Flat head unit for heavy load alignment

Abstract

A mask frame support unit includes a housing, a protruding body extending below the housing, and a work station having a flat head disposed above the housing. The protruding body includes a tapered region and a cylindrical region. The tapered region includes a first end having a first diameter coupled to the housing and includes a second end having a second diameter opposite the first end. The second diameter is less than the first diameter and the tapered region is coupled to the cylindrical region at the second end. The housing houses a plurality of components including an upper receiving plate in contact with the work station, a lower receiving plate disposed below the upper receiving plate, a flat head unit movement support mechanism disposed between the lower receiving plate and the body, and a centering component.

Description

Technical Field

[0001] This specification generally relates to the manufacture of electronic devices. More specifically, this specification relates to flat head units for heavy-duty alignment. Background Technology

[0002] Electronic device manufacturing equipment may include multiple chambers, such as process chambers and loading / locking chambers. Such equipment may employ robotic devices within transfer chambers, configured to transport substrates between the multiple chambers. In some cases, multiple substrates are transferred together. Summary of the Invention

[0003] The following is a simplified overview of this disclosure to provide a basic understanding of some aspects of it. This overview is not a comprehensive summary of this disclosure. It is not intended to identify key or essential elements of this disclosure, nor is it intended to define any scope of any particular implementation of this disclosure or any scope of the claims. The sole purpose of this overview is to present some concepts of this disclosure in a simplified form as a prelude to the more detailed description that follows.

[0004] According to one embodiment, a mask frame support unit is provided. The mask frame support unit includes: a housing; a protruding body extending below the housing; and a station having a flat head disposed above the housing. The protruding body includes a tapered region and a cylindrical region. The tapered region includes a first end having a first diameter coupled to the housing, and includes a second end having a second diameter opposite to the first end. The second diameter is smaller than the first diameter, and the tapered region is coupled to the cylindrical region at the second end. The housing houses a plurality of components, including an upper receiving plate in contact with the station, a lower receiving plate disposed below the upper receiving plate, a flat head unit moving support mechanism disposed between the lower receiving plate and the body, and an alignment component.

[0005] According to another embodiment, an apparatus is provided. The apparatus includes: a mask frame; an alignment shaft including a hollow cylinder with an opening; and a plurality of mask frame support units, each including a flat head unit. The flat head unit includes: a housing; a protruding body extending below the housing and integrated into the alignment shaft via the opening; and a workstation having a flat head disposed above the housing. The housing houses a plurality of components, including an upper receiving plate in contact with the workstation, a lower receiving plate disposed below the upper receiving plate, a flat head unit movement support mechanism disposed between the lower receiving plate and the body, and an alignment component.

[0006] According to yet another embodiment, a method for forming a mask frame support unit is provided. The method includes: inserting an upper receiving plate and a lower receiving plate into a housing; forming an alignment member within the housing; securing a protruding body to the bottom of the housing; and securing a workstation having a flat head to the top of the housing. The protruding body includes a tapered region and a cylindrical region. The tapered region includes a first end having a first diameter coupled to the housing, and includes a second end having a second diameter opposite to the first end. The second diameter is smaller than the first diameter, and the tapered region is coupled to the cylindrical region at the second end. Attached Figure Description

[0007] The aspects and implementations of this disclosure will be more fully understood from the following detailed description and from the accompanying drawings, which are intended to illustrate the aspects and implementations by way of example rather than limitation.

[0008] Figure 1 This is a perspective view of a device including a flat head unit according to some embodiments.

[0009] Figure 2 This is a cross-sectional view of a device including a flat head unit according to some embodiments.

[0010] Figure 3 This is a schematic diagram of a flat head unit according to some embodiments.

[0011] Figure 4A This is a cross-sectional view of a flat head unit according to some embodiments.

[0012] Figure 4B This is based on some implementation methods, after moving from the neutral position to the offset position. Figure 4A A cross-sectional view of the flat head element.

[0013] Figures 5A-5HThe illustration shows an example process flow for forming a flat head unit according to some implementation methods.

[0014] Figure 6 This is a flowchart of a method for forming an apparatus including a flat head unit according to some embodiments.

[0015] Figures 7A-7C This is a top view of a mask alignment system according to some implementations. Detailed Implementation

[0016] Electronic device processing systems may include vision alignment technology that allows manufacturers to reduce production costs by minimizing or eliminating lithography and / or etching processes. For example, a conventional vision system may include multiple ball transfer units (BTUs) positioned on top of the vision axis to provide mask support during vision alignment. More specifically, each BTU includes balls (e.g., ceramic balls within a housing) on ​​which a mask frame can be mounted to support its weight while still allowing some movement of the mask frame. However, the small contact points or contact surface areas between the mask frame and the balls of the BTU can lead to undesirable deformations (e.g., dents) or marks (e.g., scratches) in the mask frame due to concentrated pressure at the contact points, especially if the mask frame placed on the BTU is sufficiently heavy.

[0017] The aspects and implementations of this disclosure address these and other disadvantages of the prior art by providing a flat head unit to provide (heavy) load alignment. For example, the flat head unit described herein can be used to provide load alignment while reducing or eliminating deformation (e.g., dents) or marks (e.g., scratches) on the load. More specifically, the flat head unit described herein can provide a larger contact point with the load (such as a mask frame) or an increased contact surface area to reduce or eliminate deformation (e.g., localized deformation). The flat head unit described herein can further support the free range of movement of the load in the XY plane. For example, the flat head unit described herein can be designed to move from the center, for example, about 7.5 mm, in any XY direction. To achieve such movement, the flat head unit described herein may include a flat head movement support mechanism for supporting the load and enabling the unit to move. For example, the flat head unit described herein may be embodied as a flat head ball (FHB) unit including a set of balls disposed in a ball retainer. The flat head unit described herein may further include a centering component or centering mechanism that can bring the flat head unit back to the center when there is no load on the flat head unit. For example, the centering component may include a set of tension springs.

[0018] For simplicity and illustrative purposes, the embodiments described herein will refer to embodiments in which the flat head unit is embodied as having a circular surface. However, the surface of the flat head unit described herein can have any suitable geometry to provide load alignment according to the embodiments described herein. Examples of other suitable geometries for the surface of the flat head unit include ellipses, polygons (e.g., quadrilaterals, hexagons, octagons), etc.

[0019] In some embodiments, the flat head unit can be implemented as a mask frame support unit within a device including a mask frame. In such embodiments, the flat head unit can support the weight of the mask sheet placed on it, thereby reducing or eliminating mask deformation (e.g., dents). For example, multiple flat head units can be utilized within a vision system, with each flat head unit associated with a corresponding axis (e.g., an idle vision shaft). Illustratively, the flat head units described herein can be implemented within an electronic device processing system including a thin-film encapsulation (TFE) system. The TFE system can be used to form thin-film barriers (e.g., organic light-emitting diode (OLED) devices) during electronic device processing. For example, the TFE system can be used to enable the formation of flexible organic light-emitting diode (OLED) devices having a thin-film barrier as a substrate material (as opposed to other materials such as glass), which reduces costs and enables lighter and thinner OLED displays. The TFE system can be, for example, a TFE chemical vapor deposition (CVD) (TFE CVD) system (e.g., a TFE plasma-enhanced CVD (TFE PECVD) system).

[0020] The aspects and implementations of this disclosure offer technical advantages over other methods. For example, as described above, the flat head unit described herein prevents deformation and markings and reduces or eliminates contact stress problems that may exist in BTUs and other similar units. Furthermore, the flat head unit described herein allows for mask frame movement that may be required during mask frame alignment. The flat head unit described herein can have a longer lifespan than other units (e.g., a BTU with the same load and test conditions). For example, the flat head unit described herein can be designed to withstand a load of, for example, about 100 kg at a temperature of, for example, about 80°C. Accordingly, when implemented as a mask frame support unit, the flat head unit described herein provides improved mask frame and / or visual alignment accuracy compared to other units (e.g., a BTU).

[0021] Figure 1 This is a perspective view of device 100 according to some embodiments. In some embodiments, device 100 is included within a vision system of a thin-film encapsulation (TFE) system. However, such embodiments should not be considered limiting, and device 100 can be implemented in any suitable system according to the embodiments described herein.

[0022] As shown in the figure, device 100 includes a flat head unit (“unit”) 110, a base body 120, and an alignment axis 130. More specifically, as will be described in further detail herein, unit 110 may be integrated into or mate with alignment axis 130 via an opening in alignment axis 130. According to the embodiments described herein, any suitable mechanism may be used to integrate unit 100 into alignment axis 130.

[0023] As will be about Figure 2 As described in further detail below, unit 110 can provide support for a mask frame. That is, unit 110 can be implemented as a mask frame support unit. For example, unit 110 can be a TFE mask frame support unit. As will be described in further detail below, unit 110 has a geometry designed to support the weight of the mask, including the mask frame and mask sheets, in a manner that reduces contact stress and thus reduces or eliminates mask deformation. For example, in this illustrative embodiment, unit 110 has a circular surface. Reference will now be made to... Figure 2 To describe more details about unit 110.

[0024] Figure 2 This is a cross-sectional view of device 200 according to some embodiments. Device 200 includes an alignment axis 210 and a flat head unit (“unit”) integrated into or cooperating with the alignment axis 210. For example, the alignment axis 210 may be an inertial axis of a vision system. Unit 220 includes a protruding body (“body”) 222, a housing 224, and a workstation 226.

[0025] As will be described in further detail herein, body 222 includes a tapered region and a cylindrical region. The tapered region includes a first end having a first diameter coupled to housing 224, and includes a second end having a second diameter opposite to the first end. The second diameter is smaller than the first diameter, and the tapered region is coupled to the cylindrical region at the second end.

[0026] As will be described in further detail herein, housing 224 houses multiple components, including an upper receiving plate that contacts the workstation, a lower receiving plate disposed below the upper receiving plate, a flat head unit moving support mechanism disposed between the lower receiving plate and the main body, and an alignment component.

[0027] In this illustrative embodiment, housing 224 is circular, and workstation 226 has a circular, flat head. With the aid of components formed within housing 224, workstation 226 can have generally free movement (e.g., XY movement) about a center, as will be referred to below. Figures 4A-4BFurther detailed description. As further shown, one end of the mask frame 230 is positioned on the workstation 226. The device 200 may include one or more other units (not shown) to support the mask frame 230. This will now be discussed in the following references. Figure 3 Figure 4 and other figures will be used to describe further details about this unit.

[0028] Figure 3 This is a schematic diagram illustrating the dimensions of a flat head unit (“unit”) 300 according to some embodiments. As shown, the unit 300 includes a protruding body (“body”) 310, a housing 320, and a workstation 330 having a lower portion 332 and an upper portion 334. The body 310 may be integrated into or fitted into an opening within a shaft comprising a hollow cylinder. In some embodiments, the shaft is an alignment axis for a vision system used for mask frame alignment.

[0029] More specifically, the body 310 may include a cylindrical region 312 and a tapered region 314. The tapered region 314 includes a first end 317-1 having a first diameter coupled to the housing 320, and a second end 317-2 having a second diameter opposite to the first end. The second diameter is smaller than the first diameter. The tapered region 314 is coupled to the cylindrical region 312 at the second end 317-2.

[0030] Workstation 330 may be a portable workstation, capable of generally free movement around a center. In this illustrative embodiment, housing 320 is a circular housing, and workstation 330 has a circular, flat head.

[0031] The distance “L1” from the left outer edge of the lower portion 332 to the left outer edge of the housing 320 can be, for example, between about 7 mm and about 8 mm. More specifically, L1 can be, for example, about 7.5 mm.

[0032] Similarly, the distance "L2" from the right outer edge of the lower portion 332 to the right outer edge of the housing 320 can be, for example, between about 7 mm and about 8 mm. More specifically, L2 can be, for example, about 7.5 mm.

[0033] The distance "L3" between the left and right outer edges of the lower portion 332 (which also corresponds to the length of the lower portion 332 and the length of the workstation 330) may, for example, be between approximately 52 mm and approximately 60 mm. More specifically, L3 may, for example, be approximately 56 mm.

[0034] The length "L4" of the upper portion 334 can be, for example, between approximately 35 mm and approximately 45 mm. More specifically, L4 can be, for example, approximately 39 mm.

[0035] The height "L5" of workstation 330 can be, for example, between approximately 10 mm and approximately 16 mm. More specifically, L5 can be, for example, approximately 13 mm.

[0036] The height “L6” of the upper portion 334 may be, for example, between about 5 mm and about 4 mm. More specifically, L6 may be, for example, about 2 mm. Correspondingly, the height (L5-L6) of the lower portion 332 may be, for example, between about 9.5 mm and about 12 mm, and more specifically, for example, about 11 mm.

[0037] The length "L7" of the housing 320 may be, for example, between about 65 mm and about 75 mm. More specifically, L7 may be, for example, about 70 mm.

[0038] The combined height "L8" of the housing 320 and the workstation 330 may be, for example, between about 44 mm and about 52 mm. More specifically, L8 may be, for example, about 47.75 mm. Accordingly, the height (L8-L5) of the housing 320 may be, for example, between about 34 mm and about 36 mm, and more specifically, for example, about 34.75 mm.

[0039] The height “L9” of the tapered region 314 may be, for example, between approximately 12 mm and approximately 22 mm. More specifically, L9 may be, for example, approximately 17.1 mm.

[0040] The height "L10" of the cylindrical region 312 can be, for example, between about 18 mm and about 28 mm. More specifically, L10 can be, for example, about 23 mm. Therefore, the height (L9+L10) of the main body 310 can be, for example, between about 30 mm and about 50 mm, and more specifically, for example, about 40.1 mm. Correspondingly, the total height (L8+L9+L10) of the unit 300 can be, for example, between about 74 mm and about 102 mm, and more specifically, for example, about 87.85 mm.

[0041] As further shown, the cylindrical region 312 includes a plurality of edges, including an edge 316. For example, the dimensions of the edge 316 may include a length, for example, between about 17 mm and about 27 mm, and a width, for example, between about 1 mm and about 4 mm. More specifically, the dimensions of the edge 316 may include a length, for example, about 22 mm, and a width, for example, about 2.5 mm.

[0042] As further shown, the tapering region 314 includes a first upper edge 318-1 and a second upper edge 318-2. The angle "A" between the first upper edge 318-1 and the second upper edge 318-2 may be, for example, between about 80° and about 100°. More specifically, A may be, for example, about 90°.

[0043] The length “L11” of the body 310, measured between the contact point of the first upper edge 318-1 to the housing 320 and the contact point of the second upper edge 318-2 to the housing 320, may be, for example, between about 31.2 mm and about 41.2 mm. More specifically, L11 may be, for example, about 36.2 mm.

[0044] Figure 4A This is a cross-sectional view of a flat head unit (“unit”) 400 according to some embodiments. In this illustrative example, unit 400 is embodied as a flat head ball (FHB) unit, wherein the flat head unit moving support mechanism includes a set of balls. However, such embodiments should not be considered limiting.

[0045] As shown in the figure, unit 400 includes a protruding body (“body”) 1, a housing 2, and a workstation 4. As will be described in further detail below, the workstation 4 has a flat head that allows for generally free movement (e.g., XY movement) about a center. In this illustrative embodiment, the housing 2 is a circular housing, and the workstation 4 has a circular flat head. The body 1 may be integrated into or fitted to an opening within a shaft comprising a hollow cylinder. In some embodiments, the shaft is an alignment axis for a vision system used for mask frame alignment.

[0046] Housing 2 houses multiple components. For example, housing 2 houses a lower receiving plate 3, a workstation 4, a ball retainer 5, a central structure 6, a spring-loaded flange 7, an upper receiving plate 8, a first screw 9, multiple second screws (including screw 10 (not visible in this section)), multiple third screws (including screw 11), multiple balls (including ball 12), and multiple tension springs (including tension spring 13). More specifically, the second screws may include two screws, the third screws may include three screws, the balls may include nine balls, and the tension springs may include three tension springs.

[0047] The workstation 4 is installed into the upper receiving plate 8 and the lower receiving plate 3 using the second screw (including screw 10). During assembly, the lower receiving plate 3 can be placed in a pocket within the upper receiving plate. The first screw 9 is inserted through plates 3 and 8 and the central structure 6 to secure plates 3 and 8 within the unit 400.

[0048] The balls are used to support the load of the mask placed on unit 400 and to support the movement of unit 400, and the ball retainer 5 is used to ensure the position of each of the balls in all cases. The spacing of the balls provides an approximately uniform distribution of the load placed on unit 400. More specifically, as will be referred to below. Figures 5A-5HAs described in further detail, the corresponding sets of balls are placed on the body 1 in corresponding regions between the corresponding tension springs. For example, if the balls comprise nine balls and the tension springs comprise three springs, then the first set of three balls may be placed in a first region (e.g., a sector) defined between the first and second tension springs, the second set of three balls may be placed in a second region defined between the second and third tension springs, and the third set of three balls may be placed in a third region defined between the third and first tension springs. Accordingly, in this illustrative embodiment, unit 400 is a flat-head ball (FHB) unit, wherein the flat-head unit moving support mechanism includes a set of balls.

[0049] The tension spring is part of the centering component or centering mechanism, which causes workstation 4 to return to the center when there is no load on unit 400. Figure 4A As shown. For example, as will be referenced below. Figures 5A-5H As described in further detail, each of the tension springs may have one end attached to the centering ring of the central structure 6 using a spring-loaded flange 7 and the other end attached to the housing 2. For example, if there are three tension springs, each of the three tension springs may be positioned at approximately 120° relative to each other. Reference will be made below. Figures 5A-5H Further details are described regarding the configuration of the tension spring within unit 400.

[0050] In this illustrative embodiment, a tension spring is used to center the workstation. However, this embodiment should not be considered limiting. For example, when there is no load on unit 400, a magnetically based mechanism can be used instead of a tension spring to bring workstation 4 back to center.

[0051] The housing 2 is connected to the body 1 using multiple third screws (including screw 11). The body 1 may have suitable thread features so that another mask frame support unit (e.g., BTU) can be easily replaced with unit 400.

[0052] According to the embodiments described herein, the components of unit 400 can be formed of any suitable material. For example, components 1, 3, and 4 can be illustratively formed of a suitable ceramic material. In some embodiments, the ceramic material can be alumina or alumina (Al2O3). However, such embodiments should not be considered limiting.

[0053] Components 2 and 5-11 may be formed of an alloy or other suitable material. In some embodiments, the alloy is an aluminum (Al) alloy. For example, the Al alloy may be 6061Al alloy (e.g., 6061-T6Al alloy).

[0054] According to the embodiments described herein, the plurality of balls (including ball 12) can be formed of any suitable material. For example, the plurality of balls can be formed of a ceramic material. In some embodiments, the plurality of balls can be formed of zirconium dioxide or zirconium oxide (ZrO2). Each of the plurality of balls can have a diameter, for example, between about 4 mm and about 8.5 mm. More specifically, each of the plurality of balls can have a diameter, for example, about 6.35 mm (or 0.25 inches). Reference will be made below. Figures 5A-5H Further details regarding the configuration of the multiple balls are described.

[0055] Multiple tension springs can be formed from suitable materials (e.g., alloys) that possess excellent mechanical strength (especially at high temperatures) and high resistance to corrosion and / or oxidation. In some embodiments, multiple tension springs can be formed from suitable nickel alloys. An example of a suitable nickel alloy is a nickel-molybdenum alloy. For example, multiple tension springs can be formed from a suitable nickel-molybdenum-chromium alloy. Such nickel-molybdenum-chromium alloys may include a small amount of tungsten to provide additional corrosion resistance.

[0056] According to the embodiments described herein, the first screw 9, the second screw (including screw 10), and the third screw (including screw 11) may each have any suitable size. For example, the first screw 9 may have a diameter, for example, between about 2.5 mm and about 3.5 mm, and a length, for example, between about 16 mm and about 20 mm (e.g., an M3x18 mm screw); the second screw 10 may have a diameter, for example, between about 3.5 mm and about 4.5 mm, and a length, for example, between about 13 mm and about 17 mm (e.g., an M4x15 mm screw); and the third screw 11 may have a diameter, for example, between about 2.5 mm and about 3.5 mm, and a length, for example, between about 4 mm and about 8 mm (e.g., an M3x6 mm screw).

[0057] According to the embodiments described herein, the first screw 9, the second screw (including screw 10), and the third screw (including screw 11) can be formed of any suitable material. An example of a suitable material is anodized Al. However, other similar suitable materials are also contemplated.

[0058] exist Figure 4A In the middle position, unit 400 is located in a central position. In this position, the center positions of workstation 4, lower receiving plate 3, upper receiving plate 8, etc., indicated by line A-A', are collinear with the center position of main body 1, indicated by line B-B'. However, as will be referred to below... Figure 4B As described, line A-A' can move in a direction away from the center position (e.g., in any XY direction) in response to a load placed on unit 400.

[0059] Figure 4B It is from Figure 4A Another cross-sectional view of unit 400 after the intermediate position has been moved to the offset position is shown. More specifically, in this illustrative example, line A-A' has been moved to the right by at most a maximum distance "L" relative to line B-B'. In other embodiments, line A-A' may be moved to the left by at most a maximum distance L relative to line B-B'. In other embodiments, line A-A' may be moved "forward" or "backward" (e.g., inward or outward) relative to line B-B' by at most a maximum distance L. Accordingly, line A-A' may be moved away from line B-B' by at most L in any suitable XY direction. When removing the load from unit 400, a centering member including multiple tension springs allows unit 400 to... Figure 4B The offset position shown in the figure returns to Figure 4A The center position is shown in the diagram. In other words, the centering component can automatically realign line A-A' with line B-B'.

[0060] The maximum distance L is limited by the size of the element 400, as referenced above. Figure 3 For example, in some embodiments, the maximum distance L is, for example, about 7.5 mm from the center position, such that the unit 400 can be moved from the center position by up to about 7.5 mm in any XY direction.

[0061] Figures 5A-5H The process flow for manufacturing a flat head unit 500 according to some embodiments is described. The flat head unit 500 may be a mask frame support unit for supporting a mask frame. In this illustrative embodiment, the flat head unit 500 is a flat head ball (FHB) unit. However, such embodiments should not be considered limiting.

[0062] Figure 5A A bottom view of a flat head unit 500 including a housing 502 is shown. An upper receiving plate 504 is inserted into a region 503 defined within the top of the housing 502. The housing 502 and the upper receiving plate 504 are similar to those in the above references. Figures 4A-4B The housing and upper receiving plate are described.

[0063] Figure 5B The diagram shows the insertion of the upper receiving plate 504, the insertion of the lower receiving plate 506 onto the upper receiving plate 504, and the ball retainer 508 to be placed on the lower receiving plate 506. The lower receiving plate 506 and the ball retainer 508 are similar to those described in the above reference. Figures 4A-4B The lower receiving plate and ball retainer are described.

[0064] Figure 5CThe diagram illustrates the placement of a ball retainer 508 on a lower receiving plate 506, the placement of a set of tension springs (including tension springs 510) between corresponding gaps in the ball retainer 508, and a centering ring 512 to be placed in the region 509 defined by the ball retainer 508. The set of tension springs including tension springs 510 and the centering ring 512 are shown in the above reference. Figures 4A-4B The described set of tension springs is similar to a centering ring.

[0065] Figure 5D The diagram shows the attachment of each tension spring in a set of tension springs within centering ring 512 and region 509, and the center pin 514 to be placed within centering ring 512 to form a centering component or mechanism. The centering component is similar to the one described above. Figures 4A-4B The described centering component.

[0066] Figure 5E A top view of the flat head unit 500 is depicted, showing a bolt or screw 518 inserted through a hole 519 located in the top of the housing 502 to secure the center pin 514. The screw 518 is similar to the one described in the reference above. Figures 4A-4B The first screw described.

[0067] Figure 5F Returning to the bottom view of the flat head unit 500, it shows a set of balls including ball bearings 520, each ball inserted into a corresponding position within the ball retainer 508. In this illustrative embodiment, the set of balls includes nine balls. As further shown, the end of the screw 518 may be visible and flush with the center pin 514. The set of balls including ball bearings 520 is similar to the above references. Figures 4A-4B A set of balls described.

[0068] Figure 5G A protruding body (“body”) 522 is shown, secured to the bottom of housing 502 by a plurality of bolts or screws (including bolts or screws 524). The body 522 and the plurality of bolts or screws (including bolts or screws 524) are respectively similar to those described above. Figures 4A-4B The description includes the main body and multiple third screws. As shown in the figure, the main body 522 includes a tapered region 523 and a cylindrical region 525.

[0069] Figure 5H A top view of the flat head unit 500 is depicted, showing a workstation 526 secured to the top of the housing 502 with screws including screws 528. Specifically, workstation 526 is similar to the above reference. Figures 4A-4B The workstation described, and the screws (including screw 528) are similar to those in the above reference. Figures 4A-4B The description includes multiple second screws.

[0070] The body 522 can be integrated into or mate with an opening within the hollow cylinder. In some embodiments, the hollow cylinder serves as an alignment axis for a vision system used for mask frame alignment. In this illustrative embodiment, the cylindrical region 525 is designed with threads, allowing the body 522 to be integrated into the hollow cylinder using a threaded locking mechanism (e.g., “screwed” into the hollow cylinder). However, according to the embodiments described herein, any suitable integration mechanism can be used to integrate the body 522 into the hollow cylinder.

[0071] Figure 6 A flowchart depicts a method 600 for integrating a mask frame support unit within a mask alignment system according to some embodiments. For example, the unit assembly may be similar to the above reference. Figure 2 - The unit described in Figure 5.

[0072] At frame 602, a mask frame support unit with a flat head is formed. In some embodiments, the mask frame support unit is a flat-head ball bearing (FHB) unit. For example, the mask frame support unit may be based on the above reference. Figures 5A-5H The described process flow is formed.

[0073] At frame 604, a mask frame support unit is mounted within the mask alignment system. Mounting the mask frame support unit may include integrating the protruding body of the mask frame support unit into an opening in an alignment axis comprising a hollow cylinder. More specifically, the alignment axis may be an inertial vision axis.

[0074] At frame 606, the mask frame is placed on the mask frame support unit. The mask frame support unit supports the weight of the mask frame while reducing or eliminating dents or other deformations. The mask frame support unit may also include a centering component or mechanism that allows the mask frame to move. For example, when the mask is removed, the centering component may cause the flat head unit to re-center itself.

[0075] The above is for reference only. Figure 1 Figure 5 illustrates further details about method 600, including the flat head unit and mask frame.

[0076] Figures 7A-7C This is a top view of a mask alignment system 700 according to some embodiments. For example, 700 may include a vision system.

[0077] Figure 7AAn overview of system 700 is shown. As illustrated, system 700 includes a chamber body 710, a plurality of flat head units 720-1 to 720-6, a plurality of ball transfer units (BTUs) 730-1 and 730-2, and a mask frame 740 disposed on the plurality of flat head units 720-1 to 720-6 and the plurality of BTUs 730-1 and 730-2. Although six flat head units and two BTUs are shown, any suitable number of flat head units and / or BTUs may be used according to the embodiments described herein. In some embodiments, the plurality of flat head units 720-1 to 720-6 include flat head ball (FHB) units. A region 750 corresponding to flat head unit 720-1 and a region 760 corresponding to BTU 730-1 are also depicted. Patterned masks may be used to cover areas of a substrate, for example, during a coating process.

[0078] Figure 7B Showing the corresponding Figure 7A An enlarged view of system 700 in region 750 is shown. Figure 7C Showing the corresponding Figure 7B An enlarged view of system 700 in region 760 is shown.

[0079] The foregoing description sets forth numerous specific details, such as examples of particular systems, components, methods, etc., to provide a good understanding of several embodiments of the invention. However, it will be apparent to those skilled in the art that at least some embodiments of the invention can be practiced without these specific details. In other instances, well-known components or methods are not described in detail, or are presented in a simple block diagram format to avoid unnecessarily obscuring the invention. Therefore, the specific details set forth are merely exemplary. Specific implementations may differ from these exemplary details and are still considered to be within the scope of the invention.

[0080] Throughout this specification, references to “one embodiment” or “implementation” mean that a particular feature, structure, or characteristic described in connection with an embodiment is included in at least one embodiment. Therefore, the phrases “in one embodiment” or “in an embodiment” appearing in various places throughout this specification do not necessarily refer to the same embodiment. Additionally, the term “or” is intended to indicate an inclusive “or” rather than an exclusive “or.” When the terms “about” or “approximately” are used herein, this is intended to indicate that the presented nominal values ​​are exactly within ±10%.

[0081] Although the operations of the methods described herein are shown and described in a specific order, the order of operations for each method may be changed, such that certain operations can be performed in reverse order or that certain operations can be performed at least partially concurrently with other operations. In another embodiment, instructions or sub-operations of different operations may be performed intermittently and / or alternately.

[0082] It should be understood that the above description is intended to be illustrative rather than restrictive. Many other examples of implementations will become apparent to those skilled in the art upon reading and understanding the above description. Although specific examples are described in this disclosure, it should be recognized that the systems and methods of this disclosure are not limited to the examples described herein, but modifications within the scope of the appended claims can be practiced. Accordingly, this specification and drawings are to be considered illustrative rather than restrictive. Therefore, the scope of this disclosure should be determined by reference to the appended claims together with the full scope of their equivalents.

Claims

1. A mask frame support unit, comprising a flat-head ball bearing unit, the flat-head ball bearing unit comprising: case; A protruding body extending below the housing includes a tapered region and a cylindrical region. The tapered region includes a first end having a first diameter coupled to the housing and a second end having a second diameter opposite to the first end, wherein the second diameter is smaller than the first diameter, and wherein the tapered region is coupled to the cylindrical region at the second end. A workstation having a flat head disposed above the housing; The housing houses multiple components, which include: An upper receiving plate, which is in contact with the workstation; A lower receiving plate is disposed below the upper receiving plate; A flat head unit moving support mechanism, wherein the flat head unit moving support mechanism is disposed between the lower receiving plate and the protruding body, wherein the flat head unit moving support mechanism includes a set of balls disposed in a ball retainer; and A centering component, wherein the centering component centers the workstation to a central position in response to the removal of a load disposed on the workstation.

2. The mask frame support unit of claim 1, wherein the centering component comprises a set of tension springs, each tension spring having a first end attached to the housing and a second end attached to the centering ring.

3. The mask frame support unit as claimed in claim 1, wherein the housing is a circular housing and the flat head is a circular flat head.

4. The mask frame support unit as described in claim 1, wherein: The protruding body has a height between 30 mm and 50 mm and a length between 31.2 mm and 41.2 mm; The housing has a height between 34 mm and 36 mm and a length between 65 mm and 75 mm; and The workstation has a height between 10mm and 16mm and a length between 52mm and 60mm.

5. The mask frame support unit as described in claim 4, wherein: The protruding body has a height of 40.1 mm and a length of 36.2 mm; The housing has a height of 34.75 mm and a length of 70 mm; and The workstation has a height of 13mm and a length of 56mm.

6. A system comprising: Mask frame; Alignment shaft, the alignment shaft comprising a hollow cylinder having an opening; and Multiple mask frame support units, each comprising a flat-head ball bearing unit, wherein the flat-head ball bearing unit includes: case; A protruding body extends below the housing and is integrated into the alignment shaft via the opening; and A workstation having a flat head disposed above the housing; The housing houses multiple components, which include: An upper receiving plate, which is in contact with the workstation; A lower receiving plate is disposed below the upper receiving plate; A flat head unit moving support mechanism, wherein the flat head unit moving support mechanism is disposed between the lower receiving plate and the protruding body, wherein the flat head unit moving support mechanism includes a set of balls disposed in a ball retainer; and A centering component, wherein the centering component centers the workstation to a central position in response to the removal of the mask frame from the workstation.

7. The system of claim 6, wherein the centering component comprises a set of tension springs, each tension spring having a first end attached to the housing and a second end attached to the centering ring.

8. The system of claim 6, wherein the housing is a circular housing and the flat head is a circular flat head.

9. The system of claim 6, wherein the plurality of mask frame support units comprises 6 flat head support units and 2 ball conveying units.

10. The system of claim 6, wherein: The protruding body has a height between 30 mm and 50 mm and a length between 31.2 mm and 41.2 mm; The housing has a height between 34 mm and 36 mm and a length between 65 mm and 75 mm; and The workstation has a height between 10mm and 16mm and a length between 52mm and 60mm.

11. The system of claim 6, wherein: The protruding body includes a tapering region and a cylindrical region; The tapering region includes a first end having a first diameter coupled to the housing, and includes a second end having a second diameter opposite to the first end; The second diameter is smaller than the first diameter; and The tapering region is coupled to the cylindrical region at the second end.

12. A method for forming a mask frame support unit, comprising: Insert the upper and lower receiving plates into the housing; A ball retainer containing multiple ball positions is placed on the upper receiving plate; An alignment component is formed within the housing; A ball is inserted into each of the plurality of ball positions; The protruding body is fixed to the bottom of the housing. The protruding body includes a tapered region and a cylindrical region. The tapered region includes a first end having a first diameter coupled to the housing and a second end having a second diameter opposite to the first end, wherein the second diameter is smaller than the first diameter, and wherein the tapered region is coupled to the cylindrical region at the second end. and A workstation with a flat head is secured to the top of the housing, wherein the centering component centers the workstation to a central position in response to the removal of a load disposed on the workstation.

13. The method of claim 12, wherein forming the centering component comprises: A set of tension springs is placed on the lower receiving plate; and The set of tension springs is attached to the centering ring.

14. The method of claim 13, wherein each of the set of tension springs is disposed between corresponding gaps in the ball retainer.

15. The method of claim 13, further comprising forming a center pin within the centering ring.

16. The method of claim 12, further comprising mounting the flat head unit within a mask alignment system including a mask frame, wherein mounting the flat head unit comprises integrating the protruding body into an alignment axis.

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