Image Confirmation Computer

Abstract

An image verification computer for verifying images related to robot movements comprises a storage unit and a computing unit. The storage unit stores position information and image information of a motor driving the robot's links, received from the robot's controller. The image information is acquired by a camera mounted on the robot. The computing unit displays a model area and an image area side by side on at least one of the robot itself and a computer connected to the robot. A two-dimensional or three-dimensional model reproducing the robot's posture is displayed in the model area using computer graphics. The image is displayed in the image area.

Description

Technical Field

[0001] The present invention relates to an image confirmation computer, which is used for confirming images related to the actions of a robot. Background Art

[0002] Conventionally, for example, robots have been used to transport substrates such as wafers. The robot disclosed in Patent Document 1 includes a controller for controlling the movement of the robot.

[0003] [Prior art literature]

[0004] [Patent Document]

[0005] Patent Document 1: Japanese Patent Application Laid-Open No. 2008-28134 Summary of the Invention

[0006] Technical problem to be solved by the invention

[0007] Robots can malfunction for a variety of reasons. In these cases, repair work is required based on the specific malfunction. In wafer processing equipment, for example, high-level information management often restricts data transfer to other locations and communication with external networks. In these situations, the cause of robot malfunctions must be quickly identified and corrected.

[0008] In view of the above, an object of the present invention is to enable an operator to quickly and accurately grasp the situation when a robot fails, for example.

[0009] Technical solutions used to solve the problem

[0010] The problem to be solved by the present invention is as described above. The means for solving the problem and their effects are described below.

[0011] According to aspects of the present invention, an image confirmation computer of the following structure is provided. That is, the image confirmation computer is used to confirm images related to the movements of a robot. The image confirmation computer includes a storage unit and a computing unit. The storage unit is capable of storing information. The computing unit outputs information based on the storage content of the storage unit. The storage unit is used to store position information and image information of a motor. The motor is used to drive the connecting rod of the robot. The position information of the motor is received from the controller of the robot. The image information can be obtained by a camera installed on the robot. The computing unit displays a model area and an image area side by side on at least one of the machine and a computer connected to the machine. In the model area, a two-dimensional or three-dimensional model that reproduces the posture of the robot is displayed by computer drawing. The image is displayed in the image area.

[0012] By displaying the two areas side by side in this way, the operator can comprehensively and intuitively understand the situation related to the robot's movement, thereby enabling the operator to handle the situation smoothly and accurately.

[0013] (Effects of the Invention)

[0014] According to the present invention, when a robot fails, for example, an operator can quickly and accurately grasp the situation. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is a planar cross-sectional view showing a portion of a semiconductor processing device to which an image verification computer according to an embodiment of the present invention is applied;

[0016] Figure 2 is a side cross-sectional view showing a portion of semiconductor processing equipment in section;

[0017] Figure 3 is a schematic diagram illustrating a communication network constructed in a semiconductor processing device;

[0018] Figure 4 This figure shows an example of a status confirmation screen displayed on an image confirmation computer;

[0019] Figure 5 This is a diagram showing a display example of a log analysis screen displayed on a processing computer;

[0020] Figure 6 is a diagram showing a display example of a troubleshooting support screen; and

[0021] Figure 7 This is a diagram showing a display example of a manual screen.

[0022] Description of Reference Numerals

[0023] 27 robot 44 controller (robot controller)

[0024] 65 Image confirmation computer 66 Storage circuit (storage unit)

[0025] 67 Arithmetic circuit (arithmetic unit) 68 Display (display unit)

[0026] 72 Model area 73 Image area

[0027] 74 Log Area DETAILED DESCRIPTION

[0028] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. Figure 1 It is a planar cross-sectional view showing a portion of a semiconductor processing equipment 20 to which one embodiment of the present invention is applied. Figure 2FIG is a side cross-sectional view showing a portion of the semiconductor processing equipment 20. Figure 1 as well as Figure 2 In FIG, the states of the robot 27 being moved in various ways are shown by two-dot chain lines.

[0029] Semiconductor processing equipment 20 performs predetermined processing on wafers 24, which serve as substrates to be processed. In this embodiment, wafers 24 are semiconductor wafers. Processes applied to wafers 24 include various process treatments, such as heat treatment, impurity introduction, thin film formation, photolithography, cleaning, and planarization. Substrate processing other than the aforementioned substrate processing can also be performed in semiconductor processing equipment 20.

[0030] Semiconductor processing equipment 20 includes a wafer processing device 22 and a wafer transfer device 23. Semiconductor processing equipment 20 is predefined by, for example, the SEMI standard. SEMI stands for Semiconductor Equipment and Materials International. In this case, for example, the FOUP 25 and the FOUP opener 26 for opening and closing the FOUP 25 comply with SEMI standards E47.1, E15.1, E57, E62, E63, and E84. However, the configuration of semiconductor processing equipment 20 may differ from the SEMI standard.

[0031] The wafer processing apparatus 22 has a processing space 30 filled with a predetermined gas. The wafer processing apparatus 22 performs the aforementioned processing on the wafers 24 within the processing space 30. In addition to the processing apparatus main body that processes the wafers 24, the wafer processing apparatus 22 also includes a processing space forming portion that forms the processing space 30, a transport device that transports the wafers 24 within the processing space 30, and a regulating device that controls the atmosphere within the processing space 30. The regulating device is implemented by a fan filter unit, etc.

[0032] The wafer transfer device 23 removes pre-processed wafers 24 from the wafer folding pod 25 and supplies them to the wafer processing unit 22. It also removes processed wafers 24 from the wafer processing unit 22 and replaces them in the wafer folding pod 25. The wafer transfer device 23 functions as an equipment front end module (EFEM). In the semiconductor processing equipment 20, the wafer transfer device 23 serves as the interface for transferring wafers 24 between the wafer folding pod 25 and the wafer processing unit 22. While moving between the space within the wafer folding pod 25 and the processing space 30 of the wafer processing unit 22, the wafers 24 pass through a high-purity preparation space 29 filled with a predetermined atmosphere.

[0033] Preparation space 29 is a contamination-controlled, enclosed space. Airborne particulate matter in preparation space 29 is controlled to below a specified purity level, and environmental conditions such as temperature, humidity, and pressure are managed as needed. In this embodiment, processing space 30 and preparation space 29 are maintained at a predetermined purity level to prevent adverse effects on wafer 24 processing. This purity level, for example, adopts Class 1 as specified by ISO (International Organization for Standardization).

[0034] The robot 27 functions as a wafer transfer robot. In this embodiment, the robot 27 is implemented as a SCARA (Scaling Articulated Robot Arm) type horizontal multi-jointed robot. SCARA is an abbreviation for "Selective Compliance Assembly Robot Arm." The robot 27 is located in the preparation space 29.

[0035] like Figure 2 As shown in FIG. 1 and FIG. 2 , the robot 27 includes a base 41 , a robot arm 42 , a vertical driving actuator 43 a , a horizontal driving actuator 43 b , and a controller 44 .

[0036] The base 41 functions as a base member that supports the robot arm 42. On the upper surface of the base 41, the robot arm 42 is mounted.

[0037] The robot arm 42 has a linkage structure comprising a plurality of linkage bodies sequentially connected from the base end toward the tip end. A robot arm 45 is provided at the tip end of the robot arm 42. The robot arm 45 can hold and release the wafer 24. There are various ways for the robot arm 45 to hold the wafer 24. For example, the wafer 24 can be placed on the robot arm 45, the robot arm 45 can grip the wafer 24, or the robot arm 45 can suction the wafer 24 to the robot arm 45 using negative pressure.

[0038] The vertical drive actuator 43a vertically displaces the robot arm 42. The vertical drive actuator 43a is configured as a motor, for example. By vertically moving the robot arm 42, the height of the manipulator 45 can be changed.

[0039] The horizontal drive actuator 43b rotates each link of the robot arm 42 about its corresponding joint axis. The horizontal drive actuator 43b is, for example, an electric motor. By rotating each link about its vertical joint axis, the robot arm 45 can be moved within a horizontal plane.

[0040] The controller 44 controls the vertical driving actuator 43a and the horizontal driving actuator 43b according to a preset action program or a movement instruction input by the user, so that the robot 45 moves to a preset position. Figure 3 As shown, the controller 44 includes a storage circuit 46, a calculation circuit 47, and an output device 48. The storage circuit 46 stores predetermined programs and various data. The calculation circuit 47 performs calculations according to the programs. The output device 48 outputs control signals to the vertical drive actuator 43a and the horizontal drive actuator 43b based on the calculation results of the calculation circuit 47. The storage circuit 46 is implemented, for example, by a RAM, a ROM, or a HDD. The calculation circuit 47 is implemented, for example, by a CPU.

[0041] like Figure 3 As shown, the semiconductor processing equipment 20 includes a high-order controller 61. The high-order controller 61 transmits instructions for executing semiconductor processing steps to various devices constituting the semiconductor processing equipment 20.

[0042] The high-level controller 61 is connected to the controller 44 of the robot 27 via a wired or wireless connection. The high-level controller 61 transmits instructions to the controller 44 so that the robot 27 performs the required actions at the required time. The controller 44 controls the robot 27 according to the instructions received from the high-level controller 61.

[0043] If a certain fault occurs, the controller 44 transmits information about the fault to the higher-level controller 61. The program used by the controller 44 to control the robot 27 is composed of multiple modules. A module is a portion of the program that implements a specific action unit by the robot 27. Examples of action units include, but are not limited to, the action of placing the wafer 24 held by the robot 45 at a predetermined position and the action of the robot 45 holding the wafer 24 placed at a predetermined position.

[0044] The vertical drive actuator 43a and the horizontal drive actuator 43b are each configured as an electric motor. The electric motor is a well-known structure, and although not shown, it includes a motor drive circuit, a motor body, a rotational position sensor, and a current sensor. The motor body includes a stator, a rotor, and an output shaft. The controller 44 supplies current to the motor drive circuit via a power supply circuit so that the motor performs the desired operation. As a result, the output shaft of the motor rotates according to the flowing current.

[0045] The current flowing through the motor drive circuit is determined by the target value of the motor's operation and the measured value of the operation. Examples of the target value of the motor's operation include target values ​​related to the rotational position, rotational speed, or rotational acceleration. Similarly, examples of the measured value include measured values ​​related to the rotational position, rotational speed, or rotational acceleration. Control of the current flowing through the motor drive circuit can also be achieved using control rules such as feedback control rules and applied control rules.

[0046] A camera 62 is fixed to the connecting rod body of the robot arm 42 to which the manipulator 45 is fixed. Figure 3 As shown, the camera 62 is connected to an image verification computer 65 via a network. The image verification computer 65 can be, for example, a mobile terminal or a personal computer.

[0047] The semiconductor processing equipment 20 is provided with a camera 63 for photographing the robot 27. The camera 63 is connected to the controller 44 in a wired or wireless manner.

[0048] When an abnormality occurs in the robot 27 and troubleshooting is required, an operator can operate a computer to obtain information for processing. This computer can also be called a processing computer 70. In this embodiment, the high-level controller 61 also serves as the processing computer 70.

[0049] The image verification computer 65 includes a storage circuit (storage unit) 66 and an arithmetic circuit (arithmetic unit) 67. The storage circuit 66 is realized by, for example, a RAM, a ROM, and a HDD, and the arithmetic circuit 67 is realized by, for example, a CPU.

[0050] The memory circuit 66 of the image verification computer 65 and the memory circuit 46 of the controller 44 (hereinafter referred to as the memory circuit) store information such as the following (1) to (6). These storage operations can be performed continuously or in a distributed manner.

[0051] (1) Information related to images obtained by cameras 62 and 63

[0052] (2) Information related to signals received by the controller 44 from the high-level controller 61 and signals transmitted by the controller 44 to the high-level controller 61 (communication log information)

[0053] (3) Information related to the program executed by the controller 44 to control the robot 27

[0054] (4) Information related to the current value, position, speed, acceleration (including negative acceleration; the same applies hereinafter), position deviation, speed deviation, and acceleration deviation of the motor provided to the robot 27

[0055] (5) Information related to output signals from various sensors mounted on the robot 27 (e.g., light projection / shading sensor, piston position sensor of pneumatic actuator, pressure sensor, valve position sensor of solenoid valve)

[0056] (6) Information related to input signals from various devices (e.g., solenoid valves) mounted on the input robot 27

[0057] The motor current is measured by a current sensor in the motor drive circuit. The motor position can be determined based on the values ​​measured by a rotational position sensor. The motor speed and acceleration can be determined by time-differentiating the values ​​measured by the rotational position sensor. The position deviation, velocity deviation, and acceleration deviation can be determined by calculating the differences between the position, velocity, and acceleration and the target position, velocity, and acceleration.

[0058] A web server application and a database application are pre-installed in the controller 44 , and the programs are stored in the storage circuit 46 .

[0059] However, the robot 27 may fail for some reason. In this case, the image confirmation computer 65 can display the following information based on the content stored in the storage circuit 66: Figure 4 The status confirmation screen 71 is shown. The status confirmation screen 71 includes a model area 72, an image area 73, a log area 74, and a graphic area 75.

[0060] In the model area 72, two-dimensional and three-dimensional models are displayed using computer graphics. These models are used to reproduce the posture of the robot 27 at a specific moment. The posture of the displayed model is calculated based on the motor positions stored in the memory circuit 66. A search bar 72a is located at the bottom of the model area 72, and a slider, a replay button, a pause button, and a reverse replay button are located on this search bar 72a. This allows the robot 27's movements to be reproduced in the display of the model area 72, or the robot 27's movements to be stopped at a specific moment. Even if the actual robot 27 is in a position where it cannot be photographed, such as when it is hidden behind the camera 63, the operator can easily understand the robot 27's posture by referring to the display in the model area 72.

[0061] The image area 73 displays a captured image captured by the camera 62 and stored in the storage circuit 66. The image playback position can be specified using the search bar 72a. This allows the model movement in the model area 72 to be synchronized with the animation playback in the image area 73.

[0062] The communication log stored in the storage circuit 66 is displayed in the log area 74. Information related to the program executed to control the robot 27 can also be displayed in the log area 74.

[0063] In the graph area 75, information related to the current value, position, speed, acceleration, position deviation, speed deviation, and acceleration deviation of the motor stored in the storage circuit 66 is displayed in graphs of different colors. Figure 4 In the example shown, a line graph is displayed, with values ​​plotted on the vertical axis and time plotted on the horizontal axis. A vertical line (time graph) is displayed in each graph in the graph area 75. The position of this line corresponds to the time at the time point displayed in the model area 72 and the image area 73.

[0064] When a certain fault occurs in the robot 27, information stored in the storage circuit 66 within a predetermined time range including the time when the fault occurs (for example, the range from a few seconds before the fault occurs to a few seconds after the fault occurs) is displayed as a display object on the status confirmation screen 71.

[0065] Pressing the play button on the search bar 72a replays the information displayed in the model area 72 and the image area 73. Similarly, pressing the reverse play button replays the information displayed in the reverse direction. Pressing the pause button pauses the replay / reverse playback, and pressing the pause button again unpauses the playback. The search bar 72a may also include buttons for known fast forward and reverse playback operations.

[0066] When reproducing the information being displayed, the motion of the robot 27 is reproduced in the model area 72, and the image captured by the camera 62 is dynamically displayed in the image area 73. During reproduction, the communication log is displayed in the log area 74, and a graph is displayed in the graph area 75. The log history at the time indicated by the search bar 72a is displayed in the log area 74. This log history is recorded one by one in sync with the reproduction. In the graph area 75, the time graphs in each graph move horizontally in sync with the reproduction.

[0067] With the above configuration, when a fault occurs, the operator can quickly identify the cause of the fault from various perspectives and take appropriate measures by operating the image confirmation computer 65 .

[0068] In the above example, information stored in the storage circuit 66 within a predetermined time range before and after the occurrence of a fault is displayed on the status confirmation screen 71. Alternatively, information stored in an action unit or module executed by the controller 44 at the time of the occurrence of a fault may be displayed on the status confirmation screen 71.

[0069] The model area 72 and the image area 73 are arranged side by side close to each other on the same status confirmation screen 71. This allows the operator to intuitively understand the status of the fault by combining information from the two areas.

[0070] The overall status of robot 27 can be viewed in model area 72, while detailed information about the area surrounding the tip of manipulator 45 can be obtained in image area 73. Thus, the information about the two-dimensional or three-dimensional model displayed in model area 72 and the information about the photographic image displayed in image area 73 complement each other. In this sense, displaying the two images side by side is beneficial.

[0071] In addition, since the log history in the log area 74 is added at the same time as the time when the model area 72 and the image area 73 are displayed, the operator does not become confused in understanding the situation.

[0072] Since the model area 72 and the image area 73 are arranged adjacent to each other, the operator can easily understand the model image and the photographic image as unified information. This allows a configuration in which even if the image in the image area 73 is played back or stopped using the search bar 72a in the model area 72, a sense of disharmony is unlikely to occur.

[0073] exist Figure 4 In the example of FIG, the model area 72 is located on the left and the image area 73 is located on the right. However, the configuration can also be reversed. In addition, the model area 72 and the image area 73 can also be arranged in an upper and lower manner.

[0074] Next, refer to Figure 5 , which can be displayed on a display of the processing computer 70 (e.g., Figure 3 The log analysis screen 81 on the display 68 is shown.

[0075] If a fault occurs in robot 27, the communication log, which describes the communication content before and after the fault, is extremely valuable information for determining the cause of the fault. However, communication logs typically contain both content highly relevant to the fault and content less relevant to the fault, with the less relevant content often comprising a larger portion. This creates the risk that content highly relevant to the fault may be buried, making it difficult to discover.

[0076] Therefore, in this embodiment, the log analysis screen 81 output from the controller 44 to the processing computer 70 has a function that can extract and display content highly relevant to the fault, even from the communication log. This makes it easy to identify the cause of the fault and to address it. The processing computer 70 can function as a terminal for the controller 44.

[0077] Specifically, each line of the communication log contains a communication code indicating the type of communication. The memory circuit 46 of the controller 44 pre-stores information about communication codes that are highly correlated with faults in the communication log, in a format associated with information identifying the fault type (e.g., fault code). When an operator instructs the communication log to be retrieved, the log is filtered to display only the communication logs with a high correlation to the fault code, and the logs are then output from the controller 44 to the processing computer 70.

[0078] When the communication log is displayed in this narrowed-down format on the processing computer 70, the controller 44 can simultaneously display the following information (1) to (5), for example. The operator can more easily understand the situation based on the log analysis screen 81.

[0079] (1) Fault description area 82. The display content of the fault description area 82 includes, for example, the date and time when the fault occurred, the fault code, and a summary of the fault.

[0080] (2) Detailed log area 83. The display content of the detailed log area 83 includes the communication log from the predetermined time before the occurrence of the fault to the time when the fault occurs, as captured above.

[0081] (3) Operation Position Area 84: In the operation position area 84, a numerical value indicating the posture of the robot 27 when a fault occurs can be displayed in the form of a position measured in the motor or a target value.

[0082] (4) Program status area 85. The program status area 85 displays information useful for identifying the module executed to control the robot 27 based on the communication log displayed in the detailed log area 83. However, it is also possible to select each line of the communication log in the detailed log area 83 and display the program based on the selected line of the log in the program status area 85.

[0083] (5) Input / output signal area 86. The input / output signal area 86 displays output signals from various sensors mounted on the robot 27 and input signals input to various devices.

[0084] Next, refer to Figure 6 , which explains the fault processing support screen 88 that can be displayed by the processing computer 70.

[0085] The storage circuit 46 of the controller 44 stores data showing a method of handling a situation in which a certain failure occurs in the robot 27. The method of handling is output from the controller 44 to the processing computer 70 and displayed on a display (e.g., Figure 3 The display 68 shown can support the operator in dealing with faults.

[0086] The contents displayed on the display 68 to support troubleshooting operations may include, for example, the following (1) to (3).

[0087] (1) Fault Description Area 89. The fault description area 89 displays the date, time, and fault code of the fault. Fault description area 89 can also selectively display faults that occurred within a predetermined period of time from the most recent fault occurrence, or faults that occurred a predetermined number of times from the most recent fault occurrence. In the following description, past faults displayed in the fault description area 89 may also be referred to as fault history.

[0088] (2) Processing content description area (detailed description area) 90. The processing content description area 90 displays in detail the processing method corresponding to the fault described in the fault description area 89. The processing method is pre-created by the manufacturer of the robot 27 according to the fault code and is stored in the storage circuit 46 of the controller 44 in the form of appropriate electronic data such as HTML data, image data, animation data, PDF data, etc. When a fault history is selected in the fault description area 89, the processing method corresponding to the fault history can also be displayed in the processing content description area 90. The animation data can be, for example, data obtained by photographing the robot 27 with the camera 63 when a fault occurred in the past.

[0089] (3) Related Item List Area 91. Related Item List Area 91 displays a list of items related to the fault being explained in Fault Description Area 89. When a fault history is selected in Fault Description Area 89, items related to that fault history can also be displayed in Related Item List Area 91. The list consists of one or more related items. Examples of related items include (a) and (b) below.

[0090] (a) Past job records corresponding to the current fault or the selected fault history. In the event of a fault, the operator can display a job record creation screen on the display 68 by operating an appropriate user interface device. The interface can be, for example, a touch panel integrally provided with the display 68, or a hardware key arranged near the display 68, but is not limited thereto. The operator can create a job record by specifying the fault code, the date and time of the fault occurrence, the date and time of the operation, the operator, the operation content and its results, the title of the job record, the importance of the job record, etc. on the job record creation screen. The job record input by the operator to the processing computer 70 is transmitted from the processing computer 70 to the controller 44. After receiving the data of the job record, the controller 44 associates the job record with the fault code and stores it in the storage circuit 46. The importance and title of the job record, for example, are displayed on the associated item list area 91.

[0091] (b) Faults related to the current fault or the selected fault history. Examples of related faults include, but are not limited to, other faults that may occur simultaneously with a particular fault and other faults that may arise as a result of a particular fault. Fault-to-fault associations can be pre-created by the manufacturer of the robot 27 and stored in the memory circuit 46 of the controller 44. Fault-to-fault associations can also be configured to be logged in the memory circuit 46 by an operator. For example, the related item list area 91 displays a fault code.

[0092] The operator can appropriately select related items displayed in the related item list area 91 by appropriately operating the user interface device. Information on the selected related items is transmitted from the processing computer 70 to the controller 44. The controller 44 transmits various data to the processing computer 70 so that, when a job record is selected, the contents of the job record are displayed in the processing content description area 90, and, when a related fault is selected, the method for handling the fault is displayed in the processing content description area 90.

[0093] Although a plurality of related items can be displayed in the related item list area 91 , the controller 44 can control the processing computer 70 so that the related items are sorted so that related items with higher priorities are located at the top and related items with lower priorities are located at the bottom. Figure 6The status of related items is displayed in the related item list area 91, arranged by priority. Priority can be determined based on, for example, the frequency of fault occurrence, the frequency of displaying the explanation screen, the importance specified in the work log, and the degree of relevance determined by the current sensor and position sensor detection values ​​at the time of the fault occurrence. When multiple perspectives are used to determine priority, the controller 44 can, for example, calculate the sum of indicators quantified by the frequency of fault occurrence, etc., multiplied by appropriate weights, and use the resulting sum as the priority.

[0094] For example, in the event of a collision, abnormalities such as an increase in position deviation are detected for multiple motors driving each joint at the same time. On the other hand, for example, in the event of a cable breakage of a certain motor, only the abnormality is detected for that motor. It is also possible to pre-store an abnormality detection pattern that is assumed in this way, and when an abnormality occurs, calculate the similarity between the actual abnormality detection pattern and the assumed abnormality detection pattern, and give priority to displaying the troubleshooting content for the abnormality corresponding to the assumed abnormality detection pattern with high similarity. As an abnormality detection pattern, it is possible to use a combination of generation / non-generation of multiple detection items (position deviation or speed deviation, etc.), or it is also possible to use a measured value such as the current value of a certain motor when the abnormality occurs. In addition, as similarity, for example, when using a combination of generation / non-generation of multiple detection items as an abnormality detection pattern, it is also possible to use the number of consistent combinations of generation / non-generation of multiple detection items. In this case, it is also possible to increase the influence of the similarity of important detection items by weighting multiple detection items.

[0095] The above configuration makes it easy to identify the cause of a fault and address it. Furthermore, by displaying the user's registered work history on the troubleshooting support screen 88, it is possible to process the fault based on the accumulated knowledge gained from past operations, and this knowledge can be shared with multiple people. Since related items are displayed in descending order of priority, any faults that occur can be handled efficiently.

[0096] The memory circuit 46 of the controller 44 stores data on methods for determining the cause of a fault, data describing methods for handling the fault, and instructions describing how to use the robot. Figure 7 As shown, the user can operate the user interface device according to the situation, and these data and instructions are displayed on the display 68 for reference.

[0097] The manual screen 93 will be briefly described. A table of contents display area 94 is located on the left side of the manual screen 93, displaying a list of the manual's table of contents. A detailed display area 95 is located on the right side of the manual screen 93, displaying the specific contents of the manual corresponding to the table of contents item selected in the table of contents display area 94. A search box 96 is located above the table of contents display area 94, allowing for text searches targeting the manual's text data. This eliminates the need to bring paper manuals to the robot 27.

[0098] The display of the log analysis screen 81, the troubleshooting support screen 88, and the manual screen 93 described above is achieved through the cooperation of a web server application pre-installed in the controller 44 and a web browser application pre-installed in the processing computer 70. By starting the web browser on the processing computer 70 and performing appropriate operations, the operator can display the log analysis screen 81, the troubleshooting support screen 88, and the manual screen 93 on, for example, the display 68 in the form of a web page or the like.

[0099] It is also possible to prepare a processing computer 70 (in other words, a terminal for the controller 44) for viewing various screens separately from the high-level controller 61. In any case, a Web browser application is installed on the computer on the viewing side. The Web server of the controller 44 determines the display content from the storage content of the storage circuit 46 according to the request from the Web browser of the computer on the viewing side, and transmits various data such as HTML data. On the computer on the viewing side, the Web browser draws screens such as web pages based on the various data received. In this configuration, the operator only needs to prepare a suitable terminal with a general Web browser application installed as the computer on the viewing side to utilize the functions of the log analysis screen 81, the troubleshooting support screen 88, and the instruction manual screen 93. In this way, in this embodiment, there is no need to install special software such as a dedicated application on the terminal. Therefore, this configuration is very suitable for use in semiconductor manufacturing plants, etc., which strictly restrict the carrying of electronic devices and require high confidentiality measures for the carried electronic devices.

[0100] As described above, in this embodiment, the image confirmation computer 65 for confirming images related to the movement of the robot 27 includes a storage circuit 66 and an arithmetic circuit 67. The storage circuit 66 can store information. The arithmetic circuit 67 outputs information based on the stored contents of the storage circuit 66. The storage circuit 66 stores position information of the motors that drive the links of the robot 27, as well as image information. The position information of the motors can be received from the controller 44 of the robot 27. Image information can be acquired by the camera 62 mounted on the robot 27. The arithmetic circuit 67 is used to display the model area 72 and the image area 73 side by side on the display of the machine. In the model area 72, a two-dimensional or three-dimensional model that reproduces the posture of the robot 27 is displayed using computer graphics. The image area 73 displays the image.

[0101] By displaying the two areas side by side in this manner, the operator can comprehensively and intuitively grasp the situation related to the operation of the robot 27. This allows the operator to smoothly and accurately handle the situation (for example, the occurrence of a fault).

[0102] In addition, in the image verification computer 65 of the present embodiment, the time corresponding to the model displayed in the model area 72 and the time corresponding to the image displayed in the image area 73 are synchronized.

[0103] This allows the reproduction of the model movement in the model area 72 to be synchronized with the reproduction of the animation in the image area 73. Therefore, the operator who is viewing the screen can easily grasp the situation.

[0104] Furthermore, in the image verification computer 65 of this embodiment, the storage circuit 66 stores a communication log of the controller 44 communicating with other devices. In addition to the model area 72 and the image area 73, the calculation circuit 67 can also display a log area 74 on the computer. This log area 74 is used to output a history of the communication log. The display time of the communication log in the log area 74 is synchronized with the time in the model area 72 and the image area 73.

[0105] Thus, the display of the log area 74 changes at a timing that matches the timing of displaying the model area 72 and the image area 73. Therefore, the operator does not become confused in understanding the situation.

[0106] In the image verification computer 65 of this embodiment, the calculation circuit 67 displays a common search bar 72 a for specifying the time corresponding to the model displayed in the model area 72 and the time corresponding to the image displayed in the image area 73 .

[0107] Thus, through intuitive operation using the search bar, it is possible to specify the time at which the status is to be displayed in the model area 72 and the image area 73. Therefore, the operator can easily grasp the status at the time they want to know. In addition, since the search bar 72a is shared, a simple screen that is less likely to cause confusion during operation can be achieved.

[0108] While the preferred embodiment of the present invention has been described above, the above configuration can be modified as follows, for example.

[0109] Information on the robot 27's normal state can also be stored in at least one of the memory circuit 66 of the image verification computer 65 and the memory circuit 46 of the controller 44. In this case, when a fault occurs, the normal state information can be displayed on the image verification computer 65 or the processing computer 70 for reference. This configuration is particularly useful in the graph area 75 on the status confirmation screen 71 displayed by the image verification computer 65. This is because the graph in the graph area 75 can fluctuate significantly even in a normal state, and without a comparison standard, it is difficult to distinguish between abnormal and normal conditions. The graph in the graph area 75 can also display a parameter (e.g., average, maximum, or minimum values) that indicates the characteristics of the graph under normal conditions.

[0110] The computer that displays at least one of the log analysis screen 81 , the troubleshooting support screen 88 , and the instruction manual screen 93 can also be a teaching device that is operated to perform a teaching operation on the robot 27 .

[0111] When the teaching operation is performed by the teaching device, the image captured by the camera 62 mounted on the robot 27 can also be used to assist the teaching.

[0112] The image confirmation computer 65 and the processing computer 70 can also be realized by a single piece of hardware (computer).

[0113] The status confirmation screen 71 displayed on the image confirmation computer 65 can also be displayed by a browser, similarly to the log analysis screen 81 and the like.

[0114] The image confirmation computer 65 can also display the status confirmation screen 71 on a display of another computer connected to the image confirmation computer 65 instead of or in addition to the display of the computer itself.

Claims

1. An image confirmation computer for confirming images related to robot movements, characterized in that have: a storage unit capable of storing information; and a computing unit that outputs information based on the stored content of the storage unit, The storage unit is used to store position information of a motor received from a controller of the robot and image information acquired by a camera mounted on the robot, wherein the motor is used to drive a connecting rod of the robot, and The computing unit is used to display the model area and the image area side by side on at least one of the machine and the computer connected to the machine. The model area displays a two-dimensional or three-dimensional model that reproduces the posture of the robot by computer graphics, and the posture of the model is calculated based on the positions of the motors stored in the storage unit. The image area displays the image, The overall status of the robot is obtained from the model area, and the detailed status of the periphery of the front end of the manipulator is obtained from the image area.

2. The image verification computer according to claim 1, wherein: The time corresponding to the model displayed in the model area and the time corresponding to the image displayed in the image area are synchronized.

3. The image verification computer according to claim 2, wherein: The storage unit stores a communication log of the controller communicating with other devices. In addition to the model area and the image area, the computing unit further causes a log area to be displayed on at least one of the local machine and a computer connected to the local machine, wherein the log area is used to output the history of the communication log. The display time of the communication log history in the log area is synchronized with the time of the model area and the image area.

4. The image verification computer according to claim 2 or 3, wherein: The calculation unit displays a common search bar for specifying a time corresponding to the model displayed in the model area and a time corresponding to the image displayed in the image area.

Images