Air heater and temperature control device

Abstract

The application provides an air heater and a temperature control device, the air heater comprising an electric heating wire, a power supply positive electrode interface and a power supply negative electrode interface, the electric heating wire comprising a plurality of electric heating wire loops arranged between the power supply positive electrode interface and the power supply negative electrode interface, and the electric heating wire loops being connected in parallel to form a mesh shape. In the air heater and the temperature control device provided by the application, the electric heating wires are connected in parallel through the electric heating wire loops and form a mesh shape, and the air can fully complete the heat exchange process in the whole air flow cross section when passing through the air heater. Since the electric heating wire loops are connected in parallel, the diameter of each electric heating wire can be relatively smaller, and no flow dead zone is formed on the leeward surface of the electric heating wire. The current of each electric heating wire is relatively smaller in the parallel connection mode, the surface temperature of the electric heating wire is lower, the temperature difference between the electric heating wire and the air is smaller, and the unevenness of the air flow is not aggravated even if the air flow distribution in the space is uneven, which is beneficial to the accuracy and uniformity of the target air outlet temperature.

Description

Technical Field

[0001] This application relates to the field of temperature control technology, and in particular to an air heater and a temperature control device. Background Technology

[0002] Ultra-precision machining equipment, such as lithography machines, has extremely high requirements for temperature control, with precision and uniformity typically below 20 mK. For ultra-precision temperature control equipment, the incoming air is usually treated, cooled by a cooling unit to stabilize it below the target temperature, and then finely regulated by a heater to achieve the target temperature. Under such ultra-high precision control, the fluctuations and heat distribution of the airflow through each stage of the temperature control equipment must be uniform to meet the target requirements. Therefore, the fine-tuning of air heating after the cooling unit is particularly important. The heater used for this fine-tuning must have a uniform surface heating and a sufficiently large contact area with the airflow to quickly complete heat exchange and achieve local thermal equilibrium.

[0003] In the temperature control industry, the conventional heating methods are air heating and water heating. Water heating involves exchanging heat between hot water with a certain flow rate and temperature and the flowing air through a finned tube heat exchanger, thus completing the air heating process; this is an indirect heating process. Because air heating heaters heat air in direct contact, have no intermediate losses, are highly efficient, and have a fast response, they are widely integrated into temperature control equipment for precise temperature regulation.

[0004] One common type of air heater is the electric heating tube heater. This type of heater embeds the heating element within a metal tube, such as stainless steel, and fills it with thermally conductive materials like magnesium oxide. This results in a relatively large tube diameter, causing airflow to circulate around the leeward side of the heating tube during operation. This reduces the heat exchange area and efficiency, leading to localized high temperatures. Furthermore, at a given power, the electric heating tube heater generates a large current and a high surface temperature, which widens the temperature difference between the heater and the air. When the airflow at the contact surface is uneven, such as with dead zones, this can cause significant inhomogeneity, making it difficult to control the target temperature. Summary of the Invention

[0005] In view of this, this application proposes an air heater and temperature control device to improve the uniformity of heat exchange.

[0006] On one hand, this application provides an air heater, including a heating wire, a positive power supply interface and a negative power supply interface. The heating wire includes multiple heating wire circuits disposed between the positive power supply interface and the negative power supply interface, and the heating wire circuits are connected in parallel to form a mesh.

[0007] In one embodiment, the heating wire circuits are connected in series to form a large series circuit of heating wires, and the large series circuits of heating wires are connected in parallel to form a mesh; or, the heating wire circuits are connected in parallel to form a large parallel circuit of heating wires, and the large parallel circuits of heating wires are connected in series to form a mesh.

[0008] In one embodiment, the mesh includes at least one of the following: rectangular mesh, triangular mesh, rhomboid mesh, parallelogram mesh.

[0009] In one embodiment, the heating wire is a Cr20Ni80 heating wire.

[0010] In one embodiment, the air heater includes a mounting structure having mutually perpendicular horizontal and vertical sides. The heating wire circuit includes horizontal heating wires and vertical heating wires, which are stacked and do not contact each other. The mounting structure has a horizontal parallel circuit positive terminal interface and a horizontal parallel circuit negative terminal interface on its horizontal sides, with multiple sets of horizontal heating wires connected in parallel between the horizontal parallel circuit positive terminal interface and the horizontal parallel circuit negative terminal interface. The horizontal heating wires are distributed in a folded-back pattern at equal intervals along the horizontal direction. The vertical heating wires are also distributed in a folded-back pattern at equal intervals along the vertical direction.

[0011] In one embodiment, the air heater includes a mounting frame, the positive power supply interface and the negative power supply interface are respectively disposed on two opposite sides of the mounting frame, and the heating wire circuit is connected between the positive power supply interface and the negative power supply interface to form a mesh structure between the two opposite sides of the mounting frame.

[0012] On the other hand, this application provides a temperature control device, comprising:

[0013] The enclosure includes an air inlet and an air outlet, and a gas flow channel connecting the air inlet and the air outlet is provided inside the enclosure; and

[0014] Fixedly installed inside the box and sequentially arranged in the gas flow channel:

[0015] A circulating power fan is used to drive gas from the air inlet into the gas flow.

[0016] Passageway;

[0017] The fan outlet air distribution plate is used to provide resistance to the flow of gas and to regulate the gas flow rate.

[0018] homogenization;

[0019] Cooling coils are used to cool the flowing gas.

[0020] A heater, used to heat flowing gas; and

[0021] A vortex device is used to deflect and create eddies in flowing gas.

[0022] The heater is an air heater as described above.

[0023] In one embodiment, the heater includes a primary heater and a precision regulating heater, wherein the primary heater and / or the precision regulating heater is an air heater as described above.

[0024] In one embodiment, the box is provided with a partition to divide the internal space of the box into a U-shaped gas flow channel.

[0025] In one embodiment, a flow stabilizing plate is further included. The flow stabilizing plate is disposed in the gas flow channel and located between the swirling device and the air outlet to reduce the velocity fluctuation of the flowing gas. The flow stabilizing plate includes one or more screens, or the flow stabilizing plate includes one or more perforated plates.

[0026] The air heater and temperature control device provided in this application have at least the following beneficial effects: the heating wires in the air heater are connected in parallel through heating wire circuits to form a mesh, so that the air can fully complete the heat exchange process across the entire airflow cross section. At the same time, since the heating wire circuits are connected in parallel, the diameter of each heating wire can be relatively smaller, so the probability of forming a dead zone around the heating wire on the leeward side is extremely low. The parallel connection also makes the current of each heating wire relatively small, the surface temperature of the heating wire is low, and the temperature difference with the air is small. Even if the airflow distribution in the space is uneven, it will not aggravate the unevenness of the airflow, which is beneficial to the accuracy and uniformity requirements of the target outlet air temperature. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the structure of a temperature control device according to an embodiment of this application;

[0028] Figure 2 This is a schematic diagram of the structure of an air heater according to an embodiment of this application;

[0029] Figure 3 This is a schematic diagram of the structure of an air heater according to another embodiment of this application.

[0030] The component labels in the diagram are as follows:

[0031] Box 10 (including air inlet 11, air outlet 12, side plate 13, and partition plate 14); circulating power fan 20; fan outlet air distribution plate 30; cooling coil 40; primary heater 50; precision regulating heater 60; swirl device 70 (including primary swirl outlet 71, secondary swirl outlet 72, and swirl outlet airflow mixing structure 73); flow stabilizing and uniform plate 80;

[0032] Temperature control device 100;

[0033] Air heater 200 (including mounting structure 210, transverse parallel circuit positive terminal interface 220, transverse parallel circuit negative terminal interface 230, transverse heating wire 240, longitudinal single circuit power supply positive terminal interface 250, longitudinal single circuit power supply negative terminal interface 260, longitudinal heating wire 270; mounting frame 310, heating wire positive terminal interface 320, heating wire negative terminal interface 330, heating wire 340, insulating ceramic particles 350). Detailed Implementation

[0034] Before describing the embodiments in detail, it should be understood that this application is not limited to the detailed structures or element arrangements described below or in the accompanying drawings. This application can be implemented in other ways. Furthermore, it should be understood that the wording and terminology used herein are for descriptive purposes only and should not be construed as limiting. The terms "comprising," "including," "having," and similar expressions used herein mean to include the items listed thereafter, their equivalents, and other additional items. In particular, when describing "an element," this application does not limit the number of elements to one, but may include multiple elements.

[0035] Currently, the node size of mainstream lithography machines has reached below 20nm, with overlay accuracy reaching 3nm or even lower, and 12nm chips have been successfully used in commercial production. During operation, the spatial inhomogeneity or temporal fluctuations and drifts of the local environment within a lithography machine can affect the final lithography positioning and overlay accuracy. Specifically, key components of the workpiece stage may deform due to uneven spatial distribution, fluctuations, and drifts in temperature, leading to motion errors. Ultra-precision sensing and measuring devices, such as laser interferometers, may experience measurement errors due to uneven spatial distribution, fluctuations, and drifts in temperature, humidity, and pressure. Therefore, ultra-precision processing equipment, represented by lithography machines, not only has stringent requirements for the external environment but also for its internal microenvironment to ensure processing accuracy.

[0036] For environmental control of ultra-precision machining equipment, such as lithography machines, since the equipment is located outside a high-level cleanroom, the internal microenvironment requires independent temperature control devices, such as immersion cooling or air cooling. Air cooling is widely used due to its simple layout and the convenience of utilizing the chilled water in the cleanroom for heat exchange. However, because air has a low specific heat capacity, it is prone to fluctuations and localized non-uniformity during environmental fine-tuning. Therefore, for ultra-precision temperature control equipment, every internal component needs to be designed for stable control and uniform temperature flow field distribution.

[0037] To address the problem of uneven temperature control and poor stability in existing temperature control devices caused by uneven heat exchange in air heaters, this application provides an air heater and a temperature control device. These are installed near the environment where the equipment to be controlled is located to regulate the temperature of the surrounding environment, thereby meeting the environmental temperature control requirements of the equipment. It should be noted that the temperature control device can also control the temperature of an object; in one embodiment, the area to be controlled may include the equipment itself.

[0038] Please see Figure 1 The temperature control device 100 of one embodiment of this application may include a housing 10 and a circulating power fan 20, a fan outlet air distribution plate 30, a cooling coil 40, a primary heater 50, a precision regulating heater 60, a swirl device 70 and a flow stabilizing plate 80 disposed in the housing 10.

[0039] It is understood that in other embodiments, the temperature control device 100 may omit the precision adjustment heater 60, reduce the number of swirling nozzle stages of the swirling device 70, and reduce the number of flow stabilizing plates 80; in other embodiments, the temperature control device 100 may also increase one or more of the following as needed: the number of heater stages, the number of swirling nozzle stages of the swirling device 70, or the number of flow stabilizing plates.

[0040] The enclosure 10 is surrounded by side panels 13 made of insulating material. An air inlet 11 and an air outlet 12 are located on the top of the enclosure 10. The air inlet 11 receives gas from the environment of the equipment to be temperature-controlled and introduces it into the enclosure 10. The air outlet 12 delivers gas from inside the enclosure 10 into the equipment to be temperature-controlled. A partition 14 is provided between the two parallel side panels 13 inside the enclosure 10, separating the air inlet 11 and the air outlet 12 and forming a gas flow channel from the air inlet 11 to the air outlet 12. The gas flow channel defines the direction of gas flow (e.g., the direction of gas flow within the channel). Figure 1(As indicated by the middle arrow), the gas entering the housing 10 through the air inlet 11 flows along the gas flow direction in the gas flow channel to the air outlet 12. In the illustrated embodiment, the housing 10 is provided with two air inlets 11 and two air outlets 12, and the bottom of the partition plate 14 is provided with a notch to install the precision regulating heater 60 and to allow airflow. The gas flow channel is U-shaped.

[0041] The circulating power fan 20 is located in the gas flow channel near the air inlet 11. The gas entering through the air inlet 11 enters the circulating power fan 20. The circulating power fan 20 provides the power for gas circulation and the power for the gas flowing along the gas flow channel, continuously providing positive pressure to the housing 10 and reducing the risk of external gas (especially unclean gas) infiltration.

[0042] The fan outlet flow equalization plate 30 is disposed within the gas flow channel and located downstream of the circulating power fan 20 along the gas flow direction. The fan outlet flow equalization plate 30 provides resistance to the flow of gas to homogenize the gas flow velocity. The fan outlet flow equalization plate 30 can be a component with a certain opening ratio that generates resistance, thereby making the velocity of the airflow more uniform.

[0043] The cooling coil 40 is installed in the gas flow channel and is located downstream of the fan outlet air distribution plate 30 along the gas flow direction to cool the flowing gas. The cooling coil 40 uses chilled water flowing inside the coil to reduce the temperature of the airflow outside the coil to a certain set temperature.

[0044] The primary heater 50 is located downstream of the cooling coil 40 in the gas flow channel to provide initial heating to the gas flowing through it. The precision regulating heater 60 is located in the gas flow channel and between the primary heater 50 and the swirl device 70 to provide secondary heating to the gas flowing through it.

[0045] like Figure 1 As shown, a two-stage heater is installed within the gas flow channel. The primary heater 50 and the precision regulating heater 60 are a coarse-adjustment heater and a fine-adjustment heater, respectively. Multi-stage heating power control ensures that the overall average gas temperature meets the set requirements. The precision regulating heater 60 is installed at the notch between the bottom of the partition plate 14 and the base plate. The primary heater 50 and the precision regulating heater 60 can be perforated plate heaters, wire mesh heaters, or pipe mesh heaters, etc., air heaters. In a preferred embodiment, the primary heater 50 and the precision regulating heater 60 can be electric heating wire heaters; the specific structure will be described later in conjunction with... Figure 2 and Figure 3 Describe it.

[0046] The swirling device 70 is positioned within the gas flow channel and downstream of the precision regulating heater 60 along the gas flow direction, causing deflection and eddies in the flowing gas. The swirling device 70 includes a primary swirling nozzle 71, a secondary swirling nozzle 72, and a swirling nozzle airflow mixing structure 73, all located within the gas flow channel. The swirling nozzle airflow mixing structure 73 is positioned between the primary swirling nozzle 71 and the secondary swirling nozzle 72. The primary swirling nozzle 71 and the secondary swirling nozzle 72 are equipped with blades, which can be fixed blades, passively rotating blades, or actively rotating blades. After passing through the swirling device 70, the airflow is deflected and eddies are generated, ensuring thorough mixing. The multi-stage arrangement progressively improves the temperature uniformity of the airflow.

[0047] A flow-stabilizing and homogenizing plate 80 is disposed within the gas flow channel and between the swirling device 70 and the air outlet 12 to reduce velocity fluctuations in the flowing gas, thereby ensuring stable airflow. In some embodiments, the flow-stabilizing and homogenizing plate 80 is a single-stage or multi-stage screen disposed within the gas flow channel; in other embodiments, the flow-stabilizing and homogenizing plate 80 is a single-stage or multi-stage perforated plate disposed within the gas flow channel. In the illustrated embodiment, the flow-stabilizing and homogenizing plate 80 has three stages and is arranged at equal intervals between the swirling device 70 and the air outlet 12.

[0048] In the aforementioned temperature control device 100, the partition plate 14 divides the space inside the housing 10 into a first air chamber on the same side as the gas inlet 11 and a second air chamber on the same side as the air outlet 12. The two air chambers are connected by a notch (precision regulating heater 60) at the bottom of the partition plate 14, forming a U-shaped gas flow channel. The extracted gas from the environment of the equipment to be temperature controlled enters the first air chamber through the air inlet 11 on the housing 10, and then becomes a relatively uniform airflow after passing through the circulating power fan 20 and the fan outlet air distribution plate 30. After flowing through the cooling coil 40, it becomes an airflow with a temperature lower than the set temperature, and then passes through the primary heater 50 and the precision regulating heater 60 to be heated to the set temperature. The airflow then enters the second air chamber, where the vortex structure generated by the swirl device 70 mixes the airflow to achieve a uniform temperature. After passing through the flow stabilizing plate 80, the velocity is uniformized, and finally, it is sent into the equipment to be temperature controlled through the air outlet 12, completing the entire temperature control process.

[0049] Please see Figure 2This is a schematic diagram of one embodiment of an air heater 200 that can be used as a primary heater 50. The air heater 200 is a heating wire type heater. The heating wires are arranged vertically and horizontally on the mounting structure 210, cutting the entire airflow cross-section into several equally spaced rectangular blocks. The mounting structure 210 is rectangular, defining mutually perpendicular horizontal and vertical sections and the airflow cross-section. A horizontal parallel circuit positive terminal interface 220 and a horizontal parallel circuit negative terminal interface 230 are respectively provided on both sides. The horizontal heating wires 240 are distributed horizontally at equal intervals and then connected at both ends to the horizontal parallel circuit positive terminal interface 220 and the horizontal parallel circuit negative terminal interface 230, respectively. In the illustrated embodiment, three sets of horizontal heating wires 240 form a parallel circuit between the horizontal parallel circuit positive terminal interface 220 and the horizontal parallel circuit negative terminal interface 230. Each set of horizontal heating wires 240 can be a parallel large circuit of heating wires formed by multiple heating wire circuits connected in series and in parallel between the positive power supply interface and the negative power supply interface.

[0050] For each set of heating wires, taking the longitudinal heating wire 270 as an example, after being distributed in equal intervals along the longitudinal direction, the two ends of the longitudinal heating wire 270 are respectively connected to the longitudinal single-circuit power supply positive interface 250 and the longitudinal single-circuit power supply negative interface 260. In the illustrated embodiment, the three sets of longitudinal heating wires 270 can be connected in series to form a large series circuit of heating wires.

[0051] The transverse heating wire 240 and the longitudinal heating wire 270 are staggered in the airflow section, that is, the transverse heating wire 240 and the longitudinal heating wire 270 have different heights in the direction perpendicular to the transverse and longitudinal directions.

[0052] The transverse heating wire 240 and the longitudinal heating wire 270 are made of Cr20Ni80 heating wire with a diameter of less than 1 mm (e.g., 0.2 mm). Cr20Ni80 is a resistance heating alloy. This type of alloy has a stable microstructure, stable electrophysical properties, good high-temperature mechanical properties, good cold deformation plasticity, good weldability, and will not experience brittle fracture during long-term use. It can operate at 1000℃ and has a long service life. Of course, heating wires of other materials can also be used, as long as they meet the aforementioned performance requirements.

[0053] The aforementioned air heater 200 calculates the heating wire current under spatial layout based on the power and resistance parameters of the primary heater 50. When the current is too high, the heating wires are evenly distributed across the airflow cross-section by connecting them in parallel to form a large parallel circuit and a series circuit. This divides the airflow cross-section into several rectangular arrays, allowing the target air to fully complete the heat exchange process across the entire airflow cross-section. At the same time, because the diameter of the heating wires is very small (e.g., 0.2mm), no dead zone is formed on the leeward side of the heating wires. The parallel connection method results in a small current for each heating wire, a low surface temperature of the heating wires, and a small temperature difference with the air. Even if the airflow distribution is uneven, it will not exacerbate the airflow unevenness, which is beneficial to the accuracy and uniformity requirements of the target outlet air temperature.

[0054] Please see Figure 3 This is a schematic diagram of another embodiment of the air heater 200, which can be used as a primary heater 50. The air heater 200 is a heating wire type heater. Depending on the diameter of the selected heating wire, the composition of the chromium-nickel alloy, and the resistance, elasticity, and strength of the heating wire, the heating wire 340 is arranged at a certain angle on the mounting frame 310. Specifically, the mounting frame 310 has a positive electrode interface 320 and a negative electrode interface 330 on both sides of the heating wire. The heating wires 340 are connected in series or in parallel at an angle between the positive electrode interface 320 and the negative electrode interface 330 to form a large series or parallel circuit of heating wires. Adjacent heating wires 340 are arranged at equal intervals and separated by insulating ceramic particles 350 to prevent short circuits and ensure the safety of the air heater 200.

[0055] Of course, the uniform spatial distribution of the air heater 200 is not limited to Figure 2 and Figure 3 As shown, for example, the heating wire circuits can be distributed in a diamond-shaped interval.

[0056] In addition, the air heater 20 can be used in a similar design to the primary heater 50 for the precision regulating heater 60.

[0057] In the aforementioned air heater 200, the electric heating wires are connected in series through a series circuit and in parallel through a large series circuit to form a mesh in the airflow section, or the electric heating wires are connected in parallel through a parallel circuit and in series through a large parallel circuit to form a mesh in the airflow section. The mesh can be a rectangular grid. Figure 2 (as shown), triangular mesh ( Figure 3 As shown in the diagram, rhomboid grids, parallelogram grids, etc., ensure that the airflow passing through the air heater can fully contact the heating surface for heating treatment, which is beneficial for the precise control and uniformity requirements of the target temperature.

[0058] When the ultra-high precision temperature control device of the air heater 200 is in operation, the target air can complete the heat exchange process across the entire airflow cross-section as it flows through the air heater 200. On the same area of ​​the airflow cross-section, the parallel structure of the heating wires allows for the use of thinner individual heating wires. Since the diameter of the heating wire is less than 1mm, or even as low as 0.2mm, no dead zone is formed on the leeward side of the heating wire. Furthermore, the parallel connection of the heating wires (direct parallel connection, parallel followed by series connection, series followed by parallel connection) results in a smaller surface current and lower surface temperature for each individual heating wire circuit (single heating wire), thus reducing the temperature difference with the air. Even if the airflow distribution leading to the air heater 200 is uneven, the unevenness will not be exacerbated after passing through the air heater 200, further contributing to achieving the target outlet air temperature accuracy and uniformity requirements.

[0059] In summary, the air heater and temperature control device of this application is an air heater with high uniformity. By uniformly distributing heating wires across the airflow cross-section through a certain series-parallel connection, the airflow cross-section of the air heater is divided into a mesh formed by several geometric square arrays. The diameter of a single heating wire can be relatively reduced, the surface current of a single heating wire can be relatively reduced, and the surface temperature can be relatively lowered, thereby reducing the temperature difference with the air. Even if the airflow distribution in the space is uneven, it will not aggravate the unevenness of the airflow, which is beneficial to the accuracy and uniformity requirements of the target outlet air temperature of the equipment.

[0060] The concepts described herein may be implemented in other forms without departing from their spirit and characteristics. The specific embodiments disclosed should be considered illustrative rather than restrictive. Therefore, the scope of this application is determined by the appended claims, and not by the preceding description. Any changes within the literal meaning and equivalent scope of the claims should fall within the scope of those claims.

Claims

1. An air heater, characterized in that: It includes a heating wire, a positive power supply interface, and a negative power supply interface. The heating wire includes multiple heating wire circuits disposed between the positive power supply interface and the negative power supply interface. The heating wire circuits are connected in parallel to form a mesh. The heating wire circuit includes a transverse heating wire and a longitudinal heating wire, wherein the transverse heating wire and the longitudinal heating wire are stacked and distributed without contacting each other; The power supply positive interface includes a horizontal parallel circuit positive main interface and a vertical single circuit power supply positive interface; the power supply negative interface includes a horizontal parallel circuit negative main interface and a vertical single circuit power supply negative interface; Each of the lateral heating wires is folded back and distributed at equal intervals in the lateral direction, and its two ends are respectively connected to the positive terminal of the lateral parallel circuit and the negative terminal of the lateral parallel circuit. Each of the longitudinal heating wires is distributed in a longitudinally equidistant manner with its ends folded back and forth. Both ends are connected to the positive terminal interface of the longitudinal single-circuit power supply of the longitudinal heating wire and the negative terminal interface of the longitudinal single-circuit power supply, respectively. The transverse heating wire and the longitudinal heating wire are both made of heating wire with a diameter of less than 1 mm.

2. The air heater according to claim 1, characterized in that: The heating wire circuits are connected in series to form a large series heating wire circuit, and the large series heating wire circuits are connected in parallel to form a mesh; or, the heating wire circuits are connected in parallel to form a large parallel heating wire circuit, and the large parallel heating wire circuits are connected in series to form a mesh.

3. The air heater according to claim 1, characterized in that: The heating wire is a Cr20Ni80 heating wire with a diameter of less than 1 mm.

4. The air heater according to claim 1, characterized in that: The air heater further includes a mounting structure having mutually perpendicular horizontal and vertical dimensions; the mounting structure is respectively provided with a positive terminal interface and a negative terminal interface of the horizontal parallel circuit, and multiple sets of the horizontal heating wires are connected in parallel between the positive terminal interface and the negative terminal interface to form a parallel circuit; and / or, multiple sets of the vertical heating wires are connected in series to form a large series circuit of heating wires.

5. The air heater according to claim 4, characterized in that: Each set of the horizontal heating wires is a parallel large circuit of heating wires formed by multiple heating wire circuits connected in series and in parallel between the positive power supply interface and the negative power supply interface.

6. The air heater according to claim 4, characterized in that: The air heater also includes a mounting frame. The positive power supply interface and the negative power supply interface are respectively located on two opposite sides of the mounting frame. The heating wire circuit is connected between the positive power supply interface and the negative power supply interface to form a mesh structure between the two opposite sides of the mounting frame.

7. A temperature control device, characterized in that: include: The enclosure has an air inlet and an air outlet, and the enclosure has a gas flow channel connecting the air inlet and the air outlet. as well as Fixedly installed inside the box and sequentially arranged in the gas flow channel: A circulating power fan is used to drive gas from the air inlet into the gas flow channel; The fan outlet air distribution plate is used to provide resistance to the flow of gas to make the gas flow rate uniform. Cooling coils are used to cool the flowing gas. A heater, used to heat flowing gas; and A vortex device is used to deflect and create eddies in flowing gas. The heater is an air heater as described in any one of claims 1 to 6.

8. The temperature control device according to claim 7, characterized in that: The heater includes a primary heater and a precision regulating heater, wherein the primary heater and / or the precision regulating heater is an air heater as described in any one of claims 1 to 6.

9. The temperature control device according to claim 8, characterized in that: The box is equipped with a partition plate to divide the internal space of the box into a U-shaped gas flow channel.

10. The temperature control device according to claim 7, characterized in that: It also includes a flow stabilizing and uniform plate, which is disposed in the gas flow channel and located between the swirling device and the air outlet to reduce the velocity fluctuation of the flowing gas; the flow stabilizing and uniform plate includes one or more screens, or the flow stabilizing and uniform plate includes one or more perforated plates.

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