A multifunctional in-situ mechanical testing device and its equipment

Abstract

The present invention relates to the technical field of material mechanical property testing equipment, and in particular to a multifunctional in-situ mechanical testing device and its equipment. The multifunctional in-situ mechanical testing device includes a base, at least two connecting rods, a testing probe, a control system, and a pressure testing system; the base is used for sealing connection with a material analysis and testing device; the connecting rods are connected to each other to obtain a connecting body, one end of the connecting body is connected to the base, and the other end is connected to the testing probe; the control system controls the movement of different connecting rods; the pressure testing system is used for monitoring and controlling the applied stress of the testing probe. The multifunctional in-situ mechanical testing device provided by the present invention can be directly inserted through the existing interfaces on SEM and FIB, and can utilize the high-resolution imaging of the scanning electron microscope to achieve the experimental analysis purpose of in-situ testing and observation of nanomaterials and structures, observe the dynamic strain and microstructural changes of materials during the testing and failure processes, and achieve nanoscale precise positioning and observation and analysis.

Description

Technical Field

[0001] The present invention relates to the technical field of testing equipment for mechanical properties of materials, and particularly to a multifunctional in-situ mechanical testing device and equipment thereof. Background Art

[0002] The testing of the micro-area mechanical properties of thin film materials or other two-dimensional materials (fibers, tubes, etc.) with nano- or micron-sized dimensions is an important characterization testing method in modern manufacturing and scientific research. In the past 30 years, many corresponding testing technologies and equipment have been commercialized.

[0003] Currently, there are many reported testing methods for micro-area mechanical properties, which can be mainly divided into two categories: mechanical and non-mechanical methods. The former includes direct peeling method, laser peeling method, indentation method, scratching method, stretching method, bending and unfolding method, abrasion method, tape adhesion method, etc.; the latter includes thermal method, nucleation method, capacitance method, X-ray diffraction method, etc. Compared with non-mechanical methods, mechanical methods have stronger practicability. The most commonly used mechanical methods include indentation method, scratching method, and stretching method, and the combination of their corresponding theories and testing methods has been widely applied in the industry.

[0004] Regarding the commercially available testing equipment on the current market, most of them are integrated on the platforms of optical microscopes or atomic force microscopes. Its disadvantages are as follows:

[0005] 1. The resolution of optical microscopes is low, and it is impossible to perform positioning tests on thin films and materials with small sizes such as nano- or sub-micron levels.

[0006] 2. It is not suitable for stress analysis of device-level film layers. The process layers in devices generally have complex structures (patterned) and small sizes. Some failure analyses require testing the mechanical properties of a certain film layer or specific film layers in those underlying tiny areas. For example, the analysis of the bonding force between M1 and the dielectric layer above in CMOS devices. In this case, there are no such testing technologies and equipment on the current market.

[0007] 3. For testing exposed to air, some film layers are prone to oxidation or are greatly affected by humidity in the air. Therefore, the structure or performance of the film layer may change due to environmental influence during the testing process.

[0008] There are also some commercial stress testing systems based on electron microscopes on the market currently. However, they are basically discrete and need to be separately installed on the sample stages of SEM or FIB for testing. For example, the in-situ indentation testing system developed by the Swiss Federal Laboratories for Materials Science and Technology (EMPA) and the Hysitron PI85 SEM PicoIndenter in-situ indentation instrument are both tray-type designs, that is, installed on the sample stages of SEM or FIB for testing, which will inevitably affect the normal use of SEM / FIB. Summary of the Invention

[0009] The present invention aims to solve at least one of the technical problems existing in the prior art or related technologies.

[0010] To this end, the object of the present invention is to provide a multifunctional in-situ mechanical testing device, which can be integrated into various types of commercial SEM (scanning electron microscope), FIB (focused ion beam) and other equipment on the market currently, and can realize nano-scale in-situ mechanical testing. The multifunctional in-situ mechanical testing device provided by the present invention can not only be used for the mechanical property testing of bulk materials, wire materials and multi-layer thin films, but also can realize the mechanical testing of different process layers in nano-devices, such as interfacial bonding force, hardness testing, elastic modulus and in-situ cutting and stress testing.

[0011] To achieve the above object, the present invention provides a multifunctional in-situ mechanical testing device, including a base, at least two connecting rods, a testing probe, a control system and a pressure testing system;

[0012] The base is used for sealing connection with material analysis and testing equipment;

[0013] The connecting rods are connected to each other to obtain a connecting body, one end of the connecting body is connected to the base, and the other end is connected to the testing probe;

[0014] The control system controls the movement of different connecting rods;

[0015] The pressure testing system is used for monitoring and controlling the applied stress of the testing probe.

[0016] In some possible implementation manners, the control system includes a displacement sensor, a driving motor and control software;

[0017] One displacement sensor is arranged on each connecting rod;

[0018] The control system controls the movement of different connecting rods through the displacement sensor.

[0019] In some possible embodiments, at least two driving motors are provided in the multifunctional in-situ mechanical testing device, and the driving motors respectively provide power sources for the movement of different connecting rods of the multifunctional in-situ mechanical testing device.

[0020] In some possible embodiments, at least one of the connecting rods is a telescopic rod, and preferably all the connecting rods are telescopic rods;

[0021] The control software controls the telescopic movement of the telescopic rod through a displacement sensor and a driving motor.

[0022] In some possible embodiments, the pressure testing system includes a pressure sensor and stress measurement software.

[0023] In some possible embodiments, the base is hermetically connected to the external interface of the material analysis and testing equipment;

[0024] The base is provided with a seal and a fixing member for fixing the base to the material analysis and testing equipment.

[0025] In some possible embodiments, the connection port of the base for hermetically connecting to the material analysis and testing equipment is provided between the base and the connection body;

[0026] The material analysis and testing equipment is FIB or SEM.

[0027] In some possible embodiments, the test probe includes a connection part and a test part, and the test part is connected to the connecting rod through the connection part;

[0028] The test part is selected from any one of the following shapes:

[0029] Arc, plane, cone, triangle, sharp corner, blade shape, etc.

[0030] In some possible embodiments, the connection body includes a first connecting rod, a second connecting rod, and a third connecting rod that are sequentially connected;

[0031] The first connecting rod is connected to the connection head of the base.

[0032] In some possible embodiments, the pressure sensors are respectively provided between the second connecting rod and the third connecting rod, and between the third connecting rod and the test probe.

[0033] In some possible embodiments, a rotating assembly is provided between the first connecting rod and the base, and / or

[0034] A rotating assembly is provided between the second connecting rod and the third connecting rod;

[0035] The rotating assembly is controlled by a rotation control system, and the rotating assembly is controlled by the rotation control system to rotate within a range of 360°.

[0036] In some possible embodiments, the first connecting rod is arranged to move along the X / Y / Z directions;

[0037] The second connecting rod is arranged to move along the Z direction;

[0038] The third connecting rod is arranged to move along the X direction.

[0039] The present invention also provides a multifunctional in-situ mechanical testing device, including the above-mentioned multifunctional in-situ mechanical testing apparatus and a material analysis and testing device, and the external interfaces of the multifunctional in-situ mechanical testing apparatus and the material analysis and testing device are hermetically connected in vacuum;

[0040] The material analysis and testing device is a FIB or an SEM.

[0041] The multifunctional in-situ mechanical testing device provided by the present invention can be used for testing the mechanical properties of the film layers of various nano-devices. The mechanical property detection includes nano-scratching, nano-indentation, nano-cutting, nano-peeling, etc., and different detections can be completed by using different test probes.

[0042] The beneficial effects of the present invention compared with the prior art:

[0043] (1) The multifunctional in-situ mechanical testing apparatus provided by the present invention is matched with the existing scanning electron microscope (SEM) and focused ion beam (FIB) devices. The matching method can be directly inserted through the existing interfaces on the SEM and FIB, and then vacuum sealing is carried out to achieve system integration; it can be withdrawn when not in use, and will not affect the normal use of the SEM and FIB.

[0044] (2) For the multifunctional in-situ mechanical testing apparatus provided by the present invention, all tests are carried out in a high-vacuum environment, which can avoid the deviation of the test results caused by the influence of the environment on the film layer during the testing process.

[0045] (3) The multifunctional in-situ mechanical testing apparatus provided by the present invention can utilize the high-resolution imaging of the scanning electron microscope to achieve the experimental analysis purpose of in-situ testing and observation of nano-materials and structures, observe the dynamic strain and microstructural changes of the materials during the testing and failure processes, and achieve nano-level precise positioning and observation and analysis.

[0046] (4) The multifunctional in-situ mechanical testing device provided by the present invention can perform the testing and analysis of the mechanical properties of the film layer at the device level; while the conventional scratch testing technology is difficult to achieve the analysis of the bonding force between process layers in the device. The present invention proposes to use a focused ion beam device to pattern the film layer (including the bottom process layer) to be analyzed in the device for delamination and testing modules, so as to realize the testing and analysis of the bonding force between the film layers in the device; in addition, it can also realize the testing of the mechanical properties of specific film layers of semiconductor devices (such as the testing of fracture strength, elastic modulus, etc.).

[0047] (5) The multifunctional in-situ mechanical testing device provided by the present invention can be used for the mechanical property testing of bulk materials, wire materials and multi-layer thin films, such as the testing of film layer bonding force and nano-cutting tests.

[0048] (6) The mechanical properties tested by the multifunctional in-situ mechanical testing device provided by the present invention include but are not limited to hardness, elastic modulus, fracture strength, film layer interface bonding force, etc. Description of the Drawings

[0049] The above and / or additional aspects and advantages of the present invention will become obvious and easy to understand from the description of the embodiments in conjunction with the following drawings, in which:

[0050] Figure 1 Shows a schematic diagram of the in-situ mechanical property testing device provided by the embodiment of the present invention;

[0051] Figure 2 Shows a schematic diagram of another in-situ mechanical property testing device provided by the embodiment of the present invention;

[0052] Figure 3 Shows a schematic diagram of another in-situ mechanical property testing device provided by the embodiment of the present invention;

[0053] Figure 4 Shows a schematic diagram of another in-situ mechanical property testing device provided by the embodiment of the present invention;

[0054] Figure 5 Shows a schematic diagram of different test probes involved in the embodiment of the present invention;

[0055] In the figure, 100 - base; 101 - connection port; 102 - connection head; 200 - first connecting rod; 300 - second connecting rod; 301 - first pressure sensor; 310 - rotating assembly; 400 - third connecting rod; 401 - second pressure sensor; 500 - test probe; connecting part - 510; testing part - 520. Detailed Embodiments

[0056] To more clearly understand the above objects, features, and advantages of the present invention, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that, without conflict, the embodiments of the present application and the features in the embodiments can be combined with each other.

[0057] In the following description, many specific details are set forth in order to fully understand the present invention. However, the present invention can also be implemented in other ways different from those described herein. Therefore, the protection scope of the present invention is not limited to the limitations of the specific embodiments disclosed below.

[0058] Based on the above, a multi-functional in-situ mechanical testing device according to some embodiments of the present invention will be described below with reference to the drawings.

[0059] An embodiment of the present invention provides a multi-functional in-situ mechanical testing device, as Figure 1 shown, including a base 100, at least two connecting rods, a test probe 500, a control system, and a pressure testing system;

[0060] The base 100 is used for sealing connection with a material analysis and testing device;

[0061] The connecting rods are connected to each other to obtain a connecting body. One end of the connecting body is connected to the base 100, and the other end is connected to the test probe 500;

[0062] The control system controls the movement of different connecting rods;

[0063] The pressure testing system is used to monitor and control the applied stress of the test probe 500.

[0064] The multi-functional in-situ mechanical testing device provided by the present invention can be well integrated into existing material analysis and testing devices on the market, such as SEM and FIB devices. The integration method can be to directly insert through the existing interfaces on SEM and FIB, and then perform vacuum sealing to achieve system integration; when not in use, it can be withdrawn to achieve plug-and-play, without affecting the normal use of SEM and FIB.

[0065] In the present invention, the base 100 is used to achieve the vacuum connection between the device and the SEM / FIB cavity, and the connection between the two can be designed according to the interfaces of different manufacturers and different models of SEM / FIB devices.

[0066] Furthermore, the base 100 is sealingly connected to the external interface of the material analysis and testing device;

[0067] The base 100 is provided with a sealing member and a fixing member for fixing the base 100 and the material analysis and testing device.

[0068] The seal is used to maintain the vacuum environment in the test chamber of the material analysis and testing equipment after the base 100 is inserted into the equipment. The shape of the seal can be designed accordingly according to the situation of the part to be sealed. For example, the seal can be an O-ring, a sealing sleeve, etc. In the present invention, the seal has a broad meaning, which can refer to a single seal or multiple seals; it can refer to a single seal or a seal assembly.

[0069] The fixing part is used to fix the base 100 and the material analysis and testing equipment together. The fixing part can select existing fixing components according to the fixing requirements, such as a flange. In the present invention, the fixing part has a broad meaning, which can refer to a single fixing part or multiple fixing parts; it can refer to a single fixing part or a fixing assembly.

[0070] For commercial SEM and FIB equipment, there are usually multiple external interfaces. The multifunctional in-situ mechanical testing device of the present invention can be inserted using these interfaces to achieve high integration with SEM / FIB.

[0071] The multifunctional in-situ mechanical testing device provided by the present invention can realize the adjustment of the stress application in different directions. On the one hand, it can be achieved by adjusting the position of the test probe 500 of the multifunctional in-situ mechanical testing device; on the other hand, it can also be achieved by adjusting the tilt of the sample stage of the material analysis and testing equipment; thus, mechanical testing and analysis in different directions can be realized.

[0072] In the present invention, the base 100 is generally arranged outside the external interface of the material analysis and testing equipment, and a driving motor and its related connection lines can generally be placed inside the base 100. A connection port 101 for sealing connection with the external interface of the material analysis and testing equipment can be provided at a part of the base 100 close to the connecting pipe or at a part between the base 100 and the connecting rod.

[0073] Based on the above content, further, the connection port 101 of the base 100 for sealing connection with the material analysis and testing equipment is arranged between the base 100 and the connecting body;

[0074] The material analysis and testing equipment is FIB or SEM.

[0075] In the present invention, the control system includes a displacement sensor, a driving motor, and control software;

[0076] Each connecting rod is provided with one of the displacement sensors;

[0077] The control system controls the movement of different connecting rods through the displacement sensors.

[0078] In the present invention, the control system has a broad meaning. The control system may include at least one displacement sensor, at least one drive motor, and at least one control software. Of course, the displacement sensor is generally arranged on each connecting rod. The entire control system may be provided with one drive motor or multiple drive motors. If multiple drive motors are provided, the drive motors may exist in a separate and dispersed form or may be integrated for use. If there is one motor, the corresponding wiring can be carried out according to the common wiring methods in the art. Similarly, the control software may exist alone, or may be embedded in other software or several software may be combined and used on one software.

[0079] The control system can control different components. For example, the control system can control the telescopic movement of the connecting rod body, or in other words, control the displacement of the connecting rod body. It can also control the displacement of the connection part between the connecting rod and the base 100, thereby controlling the connecting rod to turn in different directions. It can also control the movement of different connecting rods.

[0080] In the present invention, the connecting rod has a broad meaning. It can refer to one connecting rod or multiple connecting rods. It can refer to a single connecting rod or a connecting rod assembly. In the present invention, the connecting rod can be set in multiple modes. For example, it can be a telescopic rod that can automatically expand and contract, and the movement of the telescopic rod is controlled by the control system to achieve the purpose of adjusting the position of the test probe 500. Another example is that the connecting rod can be a sliding connecting rod assembly. A sliding groove is provided on one sliding component, and another connecting rod can be controlled to slide in the sliding groove; and so on.

[0081] In some possible embodiments, as Figures 1-4 shown, at least one of the connecting rods is a telescopic rod, and the control software controls the telescopic movement of the telescopic rod through the displacement sensor and the drive motor.

[0082] In different embodiments, one connecting rod can be a telescopic rod, two connecting rods can be telescopic rods, three connecting rods can be telescopic rods, and so on.

[0083] In some possible embodiments, all of the connecting rods are telescopic rods, and the control software controls the telescopic movement of the telescopic rods through the displacement sensor and the drive motor.

[0084] In the present invention, the control software can at least control the telescopic movement of one telescopic rod, so as to control each connecting rod to make the test probe 500 reach a specific position, providing a good basis for the subsequent detection.

[0085] The retractable rod is used, on the one hand, to insert the test probe 500 into the analysis position during the test analysis so as to realize the in-situ SEM / FIB observation of the mechanical test analysis process; on the other hand, it is used to pull out the test probe 500 when the test is completed to avoid collision with the sample stage of the FIB / SEM.

[0086] The control system software is generally digital control system software.

[0087] The driving system provides propulsion for the test probe 500 during stress testing. The test probe 500 can perform nano scratch testing, nano interface peeling testing, nano cutting testing and analysis, etc.

[0088] Furthermore, the pressure testing system includes a pressure sensor and stress measurement software.

[0089] The pressure testing system is used to control and monitor the loading stress during stress testing.

[0090] The speed and magnitude of stress application can be controlled simultaneously by the pressure testing system and the above-mentioned control system; or a separate pressure testing system and a control system supporting the pressure testing system can be set up, such as a high-precision pressure sensor, a high-precision displacement sensor, a high-precision drive motor, a high-precision digital control system software and stress testing software.

[0091] In the above content, the stress test software can exist independently or be embedded in the corresponding control software for use.

[0092] In different embodiments of the present invention, the pressure sensor of the pressure testing system can be set at one end of the connecting rod connected to the test probe 500. Of course, stress detection in different directions can be set at one end of the connecting rod in different directions. Generally speaking, the pressure sensor of the pressure testing system is set close to one end of the connecting rod of the test probe 500, so that the pressure applied by the test probe 500 can be detected more accurately.

[0093] In the present invention, the at least two connecting rods may be 2 connecting rods, or may be 3 connecting rods, 4 connecting rods, 5 connecting rods, 6 connecting rods, etc. That is, multiple connecting rods are arranged between the connecting rods and the base 100, and the position of the test probe 500 can be better adjusted through the coordination between the connecting rods.

[0094] In some possible implementations, such as Figures 1-4 As shown, the connecting body includes a first connecting rod 200, a second connecting rod 300 and a third connecting rod 400 which are connected in sequence;

[0095] The first connecting rod 200 is connected to the connecting head 102 of the base 100 .

[0096] In this embodiment, three connecting rods are provided, and the positions of the test probe 500 can be adjusted by setting different directions between the connecting rods. In the present invention, various types of movement directions can be set for the movement directions of the three connecting rods according to requirements.

[0097] There are connecting pieces or rotating components connecting between the connecting rods. The connecting head 102 connecting the first connecting rod 200 and the base 100 can be set as a universal rotating joint, and the control system controls the movement of the universal rotating joint and drives the movement of the first connecting rod 200 in different directions.

[0098] In some possible embodiments, a rotating component is provided between the first connecting rod 200 and the base 100, and / or

[0099] a rotating component is provided between the second connecting rod 300 and the third connecting rod 400;

[0100] The rotating component is controlled by a rotation control system, and the rotating component is controlled by the rotation control system to rotate within a range of 360°.

[0101] In some possible embodiments, the first connecting rod 200 is arranged to move along the X / Y / Z directions;

[0102] The second connecting rod 300 is arranged to move along the Z direction;

[0103] The third connecting rod 400 is arranged to move along the X direction.

[0104] In the present invention, the accuracy of the displacement control and drive system of the first connecting rod 200 does not need to be very high. The maximum drive displacement is in the range of dozens of centimeters, and the displacement accuracy is at the millimeter level. It is mainly used for inserting the test system into the SEM / FIB cavity during testing and withdrawing the test system from the SEM / FIB cavity after the test is completed. This can not affect the operation and use of the main equipment; in addition, it can move the test probe to near the sample test area.

[0105] In addition, subsequent precise positioning tests can be achieved through the high-precision displacement regulation of the first connecting rod 200 or the regulation of other connecting rods or the coordinated cooperation with other connecting rods. Of course, in each regulation scheme, it can be interactively adjusted with the SEM / FIB sample stage to achieve.

[0106] In some possible embodiments, the multifunctional in-situ mechanical testing device is provided with at least two driving motors, and the driving motors respectively provide power sources for the movement of different connecting rods of the multifunctional in-situ mechanical testing device.

[0107] For example, the multi-functional in-situ mechanical testing device is provided with two driving motors. A driving motor is separately provided for the first connecting rod 200, and the accuracy requirement of this driving motor is relatively low, at the millimeter to centimeter level; the second connecting rod 300 and the third connecting rod 400 share a driving motor, and the accuracy of this driving motor is relatively high, at the micron or nanometer level.

[0108] For example, the multi-functional in-situ mechanical testing device is provided with three driving motors. A driving motor is separately provided for the first connecting rod 200, and the accuracy requirement of this driving motor is relatively low, at the millimeter to centimeter level; a driving motor is separately provided for each of the second connecting rod 300 and the third connecting rod 400, and the accuracy of these two driving motors is relatively high, at the micron or nanometer level.

[0109] In the present invention, the base 100 is a fixed end, and the universal rotary joint in the base 100 is a rotatable joint. The rotation range can be set according to the actual situation, such as it can rotate within 180 degrees, within 150 degrees, within 90 degrees, etc. Correspondingly, the universal rotary joint is fixedly connected to the first connecting rod 200. Therefore, when the universal rotary joint rotates, it drives the rotation of the first connecting rod 200, as well as other connecting rods and the test probe 500. When it rotates to a certain position, the first connecting rod 200 performs an elongation or shortening movement along its rod body direction through its own telescopic function; similarly, the first connecting rod 200 is fixedly connected to the second connecting rod 300. When the first connecting rod 200 moves, it drives other connecting rods and the test probe 500 to perform corresponding movements; after the first connecting rod 200 moves to a certain position, the first connecting rod 200 stops moving, and the second connecting rod 300 moves in the vertical direction. Correspondingly, when the second connecting rod 300 moves, it drives the third connecting rod 400 and the test probe 500 to perform corresponding movements; after the second connecting rod 300 moves to a certain position, the second connecting rod 300 stops moving, and the third connecting rod 400 moves in the horizontal direction. Correspondingly, when the third connecting rod 400 moves, it drives the test probe 500 to perform corresponding movements; until the test probe 500 moves to a specific position.

[0110] Of course, in the above content, the movement sequence of different connecting rods can be adjusted according to the actual situation. For example, it can be that after the first connecting rod 200 moves, the third connecting rod 400 moves first, and then the second connecting rod 300 moves; it can also be that after the third connecting rod 400 moves, the first connecting rod 200 moves first, and then the second connecting rod 300 moves; and so on.

[0111] The movement of the above connecting rods is realized through a driving motor, a displacement sensor, and a control software. The driving motor is a high-precision driving motor, the displacement sensor is a high-precision displacement sensor, and the control software is a high-precision digital control system software.

[0112] For example, in some embodiments, the first connecting rod 200 is connected to a displacement control and drive system and can move in the X / Y / Z directions or the X / Z directions to adjust the height of the test system and avoid collision with the sample stage of the FIB / SEM. The accuracy of the drive motor only needs to be in the millimeter to centimeter range.

[0113] The second connecting rod 300 can perform high-precision displacement in the Z direction, which is also controlled by displacement and pressure sensors and a drive system. It is mainly used to control the up and down movement of the test probe during directional loading in stress testing and to control and monitor the applied stress. It is controlled by a high-precision Z-axis stepper motor or other high-precision motors to achieve precise positioning of the test probe in the Z direction during the test process. The drive system is responsible for providing the Z-direction compressive stress for mechanical stress testing, and performing mechanical property tests such as nanoindentation testing, hardness, and elastic modulus testing. The speed and magnitude of the applied stress can be controlled by sensors and the drive system.

[0114] A high-precision drive motor is provided at the connection between the third connecting rod 400 and the second connecting rod 300 to achieve a movement and positioning accuracy from the nanometer level to the sub-nanometer level. During mechanical stress testing, it is used to move the test probe 500 back and forth and left and right to ensure precise positioning of the test probe 500 at the position to be tested in interaction with the SEM / FIB sample stage. The drive system is responsible for providing the X-direction pushing stress for mechanical stress testing and performing tests such as nano-scratch testing, nano-interface peeling testing, and hardness and elastic modulus testing. The speed and magnitude of the applied stress can be controlled by displacement sensors, pressure sensors, and a control system.

[0115] In different embodiments of the present invention, the first connecting rod 200, the second connecting rod 300, and the third connecting rod 400 can be pneumatic telescopic rods, or threaded telescopic rods, or other types of telescopic rods. By monitoring each connecting rod with displacement sensors, the movement positions of each connecting rod can be obtained. The telescopic conditions of the telescopic rods are as Figure 3 and Figure 4 shown.

[0116] The displacement sensors are respectively arranged on the telescopic rods and the universal rotary joints. The drive motors and the control software can be one or multiple. The drive motors respectively drive the movement of the universal rotary joints and the telescopic movement of the first connecting rod 200. At the same time, when the universal rotary joints move, they can drive the movement of the first connecting rod 200 because the universal rotary joints are connected to the connecting rods. When the universal rotary joint mechanism moves, it drives the first connecting rod 200, other connecting rods, and the test probe 500 to move. That is, in the present invention, the relative movement of different connecting rods is realized through the control software's control of the drive motors.

[0117] In the present invention, the movement mode between the connecting rods is not limited to the above mode, and the automatic robotic arm can also be referred to for setting.

[0118] In some possible implementation manners, the pressure sensors are respectively disposed between the second connecting rod 300 and the third connecting rod 400, and between the third connecting rod 400 and the test probe 500, that is, the first pressure sensor 301 and the second pressure sensor 401.

[0119] In the present invention, the pressure sensor is used to sense the pressure to judge the stress applied by the connecting rod, providing a good basis for the detection and application of the stress performance.

[0120] In some possible implementation manners, as Figures 2-4 shown, a rotating assembly 310 is disposed between the second connecting rod and the third connecting rod. The rotating assembly is controlled by a rotation control system, and the third connecting rod is controlled by the rotation control system to rotate within a range of 360°.

[0121] The rotating assembly 310 in the present invention has a broad meaning, which can refer to a rotating body or a rotating assembly composed of multiple components. The rotating assembly 310 can be of various existing types, such as a gear-type rotating assembly, a turntable motor rotating assembly, a crawler motor rotating assembly, etc.

[0122] The rotation of the rotating assembly 310 is controlled by the rotation control system, and the rotating assembly 310 can drive the third connecting rod to rotate within a range of 360°. The rotation range here can refer to either a planar range or a three-dimensional range; the rotation range here can be any value range within the range of 360° or the range within the range of 360°. For example, in some implementation manners, the rotating assembly 310 can drive the third connecting rod to rotate within a range of 60°; in some implementation manners, the rotating assembly 310 can drive the third connecting rod to rotate within a range of 90°; in some implementation manners, the rotating assembly 310 can drive the third connecting rod to rotate within a range of 120°; in some implementation manners, the rotating assembly 310 can drive the third connecting rod to rotate within a range of 180°; in some implementation manners, the rotating assembly 310 can drive the third connecting rod to rotate within a range of 270°; in some implementation manners, the rotating assembly 310 can drive the third connecting rod to rotate within a range of 360°, and so on.

[0123] In the present invention, by providing the rotating assembly 310, on the one hand, the position of the test probe 500 can be controlled during the test; on the other hand, after the test is completed, the test probe 500 can be rotated by the rotating assembly 310 so that the test probe 500 is received in a position close to the inner wall of the device (such as an SEM or FIB device), such as Figure 4 as shown

[0124] Furthermore, as Figure 5 shown, the test probe 500 includes a connecting portion 510 and a testing portion 520, and the testing portion 520 is connected to the connecting rod through the connecting portion 510;

[0125] The testing portion 520 is selected from any one of the following shapes:

[0126] arc-shaped, flat, conical, triangular, sharp-cornered, blade-shaped.

[0127] In the present invention, the test probe 500 is detachably connected to the connecting rod, and the test probe 500 can be replaced with different test probes 500 according to different test purposes. The position of the testing portion of the test probe 500 in the present invention can be set at different positions of the connecting portion according to different requirements, such as it can be set at the free end of the connecting portion, or can be set above or below or at other angles close to the free end of the connecting portion.

[0128] The design of the replaceable test probe 500 is designed according to different test purposes.

[0129] The replaceable test probe 500 and its connection design will ensure that the test probe 500 has sufficient rigidity during the test.

[0130] The replaceable test probe 500 and its connection design will ensure that the test probe 500 has sufficient operability during the replacement process.

[0131] Figure 5 Shown is a typical test probe 500 proposed in the present invention, Figure 1 the test probe 500 in Figure 5Any one of the test probes can be replaced. For different test film materials and test purposes, different test probes 500 can be used. Among them, the arc-shaped test probe (2a) is used for stress testing of the circular columnar test module for FIB patterning (as described in the subsequent in-situ nano-patterning interface peeling test scheme); the planar test probe (2b) is used for stress testing of the cubic columnar test module for FIB patterning (as described in the subsequent in-situ nano-patterning interface peeling test scheme); the conical test probe (2c) is used for nano-scratch testing of those with relatively low film hardness (as described in the subsequent in-situ nano-scratch test scheme); the sharp-angled test probe (2d) is used for nano-scratch testing of those with relatively high film hardness (as described in the subsequent in-situ nano-scratch test scheme); the nano-indentation test probe (2e) is used for nano-indentation testing.

[0132] An embodiment of the present invention also provides a multi-functional in-situ mechanical testing device, including the above-mentioned multi-functional in-situ mechanical testing device and a material analysis testing device, and the external interface of the multi-functional in-situ mechanical testing device is vacuum-sealed and connected to the material analysis testing device;

[0133] The material analysis testing device is FIB or SEM.

[0134] The multi-functional in-situ mechanical testing device provided by the embodiment of the present invention can be used for testing the mechanical properties of the film layers of various nano-devices, as follows:

[0135] 1. In-situ nano-scratch testing (non-device level);

[0136] 2. In-situ nano-scratch testing (device level);

[0137] 3. In-situ nano-peeling testing (non-device level);

[0138] 4. In-situ nano-peeling testing (device level);

[0139] 5. In-situ wire cutting testing;

[0140] 6. In-situ testing of the mechanical properties of nano-film layers (non-device level);

[0141] 7. In-situ testing of the mechanical properties of nano-film layers (device level).

[0142] Different detections can be completed using different test probes 500.

[0143] Compared with the current testing devices and technologies on the market, the multi-functional in-situ mechanical testing device proposed by the present invention has the following advantages:

[0144] It can be matched with scanning electron microscopes and focused ion beam devices on the market.

[0145] When not in use, this device can be retracted without affecting the normal use of the SEM and FIB.

[0146] The high-resolution imaging of the scanning electron microscope can be utilized to achieve nanoscale precise positioning and observation analysis.

[0147] The focused ion beam equipment can be used to strip the film layer to be analyzed, precisely cut and position the test module, and ensure nanoscale positioning and analysis for subsequent mechanical tests.

[0148] All tests are carried out in a high-vacuum environment, which can avoid deviations in test results caused by environmental influences during the testing process of the film layer.

[0149] The high-resolution imaging of the scanning electron microscope can be utilized to achieve the experimental analysis purpose of in-situ mechanical testing and observation of nanomaterials and structures, and observe the dynamic stress and microscopic structure changes of the material during the testing and failure processes.

[0150] Currently, there are also some commercial stress testing systems based on electron microscopes on the market, but basically they are all discrete and need to be separately installed on the sample stage of the SEM or FIB for testing. After the testing is completed, they need to be disassembled from the SEM sample stage, which will inevitably affect the normal use of the SEM / FIB.

[0151] The multifunctional in-situ mechanical testing device proposed in the present invention uses sidewall insertion and can be retracted to a non-test position at any time, so it will not affect the use of the SEM / FIB. The whole testing efficiency is high and the system maintenance is simple.

[0152] The experimental equipment for in-situ mechanical testing proposed in the present invention has the following characteristics:

[0153] It is highly integrated with commercial SEM / FIB equipment and does not affect the operation of the SEM / FIB;

[0154] A testing scheme based on FIB patterning is proposed to achieve stress testing of device-level process layers, providing a new solution for nanoscale / microscale stress testing;

[0155] A solution for multifunctional in-situ mechanical testing;

[0156] Combined with SEM analysis, it realizes in-situ analysis of the morphology and microstructure during the material mechanical testing process;

[0157] The testing efficiency and success rate are high.

[0158] The driving motor described in the present invention, such as a stepper motor, displacement sensor, and pressure sensor, all use commercial products.

[0159] It should be noted that in the present invention, the material analysis and testing equipment is FIB (focus ion beam) or SEM (Scanning electron microscopy). It can refer to an FIB with SEM function or a separate FIB, or an SEM with FIB function or a separate SEM.

[0160] In the present invention, terms such as "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance; the term "a plurality of" means two or more, unless otherwise clearly defined. Terms such as "installed", "connected", "joined", "fixed" and the like should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, an integral connection, or a virtual connection; "joined" can be a direct connection or an indirect connection through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0161] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by terms such as "upper", "lower", "left", "right", "front", "rear", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or unit referred to must have a specific direction, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present invention.

[0162] In the description of this specification, the descriptions of terms such as "one embodiment", "some embodiments", "specific embodiments", etc. mean that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0163] The above are only some exemplary embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A multi-functional in-situ mechanical testing device, characterized in that, it includes a base, at least two connecting rods, a test probe, a control system and a pressure testing system. The control system includes a displacement sensor, a driving motor and control software; the base is used for sealing connection with a material analysis and testing device; the connecting rods are connected to each other to obtain a connecting body. One end of the connecting body is connected to the base, and the other end is connected to the test probe. One displacement sensor is arranged on each connecting rod; the connecting rods are all telescopic rods; the control software controls the telescopic movement of the telescopic rod through the displacement sensor and the driving motor; the multi-functional in-situ mechanical testing device is provided with at least two driving motors, and the driving motors respectively provide power sources for the movement of different connecting rods of the multi-functional in-situ mechanical testing device; the control system controls the movement of different connecting rods through the displacement sensor; the pressure testing system is used for monitoring and controlling the applied stress of the test probe.

2. The multi-functional in-situ mechanical testing device according to claim 1, characterized in that, the pressure testing system includes a pressure sensor and stress measurement software.

3. The multi-functional in-situ mechanical testing device according to claim 2, characterized in that, the base is hermetically connected to the external interface of the material analysis and testing device; the base is provided with a sealing member and a fixing member for fixing the base and the material analysis and testing device; furthermore, the connection port of the base for hermetically connecting with the material analysis and testing device is arranged between the base and the connecting body; the material analysis and testing device is FIB or SEM.

4. The multi-functional in-situ mechanical testing device according to claim 2, characterized in that, the test probe includes a connecting part and a testing part, and the testing part is connected to the connecting rod through the connecting part; the testing part is selected from any one of the following shapes: arc-shaped, flat, conical, triangular, sharp-cornered, blade-shaped.

5. The multi-functional in-situ mechanical testing device according to any one of claims 2-4, characterized in that, the connecting body includes a first connecting rod, a second connecting rod and a third connecting rod which are connected in sequence; the first connecting rod is connected to the connection head of the base.

6. The multi-functional in-situ mechanical testing device according to claim 5, characterized in that, the pressure sensors are respectively arranged between the second connecting rod and the third connecting rod, and between the third connecting rod and the test probe; furthermore, a rotating assembly is arranged between the first connecting rod and the base, and / or a rotating assembly is arranged between the second connecting rod and the third connecting rod; the rotating assembly is controlled by a rotation control system, and the rotating assembly is controlled by the rotation control system to rotate within a range of 360°.

7. The multi-functional in-situ mechanical testing device according to claim 5, characterized in that, the first connecting rod is arranged to move in the X / Y / Z direction; the second connecting rod is arranged to move in the Z direction; the third connecting rod is arranged to move in the X direction.

8. A multi-functional in-situ mechanical testing equipment, characterized in that, Comprising the multifunctional in-situ mechanical testing device and the material analysis and testing equipment according to any one of claims 1-7, the external interface of the multifunctional in-situ mechanical testing device is hermetically connected to the material analysis and testing equipment in a vacuum manner; The material analysis and testing equipment is FIB or SEM.

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