A polarization process of a high-stability piezoelectric thin film

Abstract

The application discloses a polarization process of high-stability piezoelectric film and belongs to the technical field of polarization processes. The process comprises the following steps: a plurality of stainless steel rollers are used, the stainless steel rollers are heated to a certain degree, and the stainless steel rollers are kept warm; in the application, a heating and pressurizing process for the film is arranged in the application, so that the thickness of the film can be well controlled; a stretching process for the film is arranged subsequently, so that the toughness and ductility of the film can be effectively improved, the subsequent polarization processing effect of the film can be effectively improved, a certain direct current is further applied in the application, the polarization electric field strength is reached, the film has a good current electrification treatment effect, the molecular distribution in the film can be changed, the overall effect of the polarization treatment process can be effectively improved, and two annealing processes are arranged in the application, so that the overall polarization treatment process effect is further improved.

Description

Technical Field

[0001] This invention belongs to the field of polarization process technology, and particularly relates to a polarization process for a highly stable piezoelectric thin film. Background Technology

[0002] Polarization technology is a technique that induces intermolecular forces in various substances to generate strong polarization capabilities. The polarization process can effectively affect the original physical properties of substances, such as their melting and boiling points. During the processing of piezoelectric films, polarization treatment is required to improve the overall quality of the piezoelectric films.

[0003] Chinese patent (CN104425704A) discloses a polarization process for polyvinylidene fluoride (PVDF) thin films, comprising the following steps: Step 1: Depositing a 90-100 nm thick layer of silver as a metal electrode on one side of the PVDF thin film; Step 2: Placing the PVDF thin film with the metal electrode in a heater, with the side of the PVDF thin film with the metal electrode facing down and grounded, setting a grid electrode above the PVDF thin film, and then setting a copper electrode needle above the grid electrode; Step 3: Adjusting the temperature inside the heater to 50-60°C, and applying a 5 kV voltage to the grid electrode and a 15 kV voltage to the copper electrode needle for 3-5 minutes; Step 4: Stopping heating and power supply, and removing the polarized PVDF thin film and placing it in a desiccator. The polarization process of polyvinylidene fluoride (PVDF) film is simple and convenient, which can improve the manufacturing efficiency of PVDF film and save manufacturing costs. However, the current film polarization process does not involve stretching the film or controlling the film thickness, thus failing to improve the overall toughness and ductility of the film and consequently the effect of subsequent polarization processes. Therefore, there is an urgent need for a polarization process for highly stable piezoelectric films. Summary of the Invention

[0004] The purpose of this invention is to address the problem that current thin film polarization processing technology does not involve stretching the thin film or controlling its thickness, thus failing to improve the overall toughness and ductility of the thin film and consequently the effectiveness of subsequent polarization processes. Therefore, this invention proposes a polarization process for highly stable piezoelectric thin films.

[0005] To achieve the above objectives, the present invention employs the following technical solution: a polarization process for a high-stability piezoelectric thin film, comprising the following steps:

[0006] S1. Take multiple sets of stainless steel rollers, heat the stainless steel rollers to a certain temperature, and then keep them warm.

[0007] S2. Place the piezoelectric film to be polarized on the heat-insulating steel roller in S1, apply a certain pressure, and maintain constant temperature and pressure for a period of time to control the thickness of the piezoelectric film to a certain extent.

[0008] S3. Remove the piezoelectric film, install it on the stretching machine, increase the ambient temperature, and stretch the piezoelectric film to its length.

[0009] S4. Maintain the stretched length of the piezoelectric film, continue to increase the ambient temperature, and maintain this temperature for a period of time;

[0010] S5. Perform preliminary annealing treatment on the piezoelectric film;

[0011] S6. Place the annealed piezoelectric film between two media and maintain a constant temperature environment.

[0012] S7. Apply a certain DC current to achieve the polarization electric field strength;

[0013] S8. Perform a second annealing treatment on the piezoelectric film;

[0014] S9. Place the piezoelectric film on the cutting table and cut it into multiple pieces.

[0015] S10. Collect the cut piezoelectric films and irradiate them with ultraviolet light for a certain period of time.

[0016] S11. Collect the piezoelectric film and store it in the warehouse.

[0017] As a further description of the above technical solution:

[0018] In step S1, multiple sets of stainless steel rollers are taken, heated to a certain temperature of 40-60°C, and then kept warm.

[0019] As a further description of the above technical solution:

[0020] In step S2, a high-stability piezoelectric film that needs to be polarized is placed on the heat-insulating steel roller in step S1, and a pressure of 6.6-8.6 MPa is applied and kept at constant temperature and pressure for 5-8 minutes to control the thickness of the piezoelectric film to 65-75 μm.

[0021] As a further description of the above technical solution:

[0022] In step S3, the piezoelectric film is removed, installed on a stretching machine, the ambient temperature is increased, and the piezoelectric film is stretched to 1.3-1.6 times its original length.

[0023] As a further description of the above technical solution:

[0024] In step S4, the stretching length of the piezoelectric film is maintained, the ambient temperature is further increased to 100-120℃, and maintained for 2-4 hours.

[0025] As a further description of the above technical solution:

[0026] In step S6, the annealed piezoelectric film is placed between two media to maintain a constant temperature environment. The two media are two sets of metal wires and metal rollers.

[0027] As a further description of the above technical solution:

[0028] In step S7, a certain DC current is applied according to the thickness of the piezoelectric film to achieve the polarization electric field strength.

[0029] As a further description of the above technical solution:

[0030] In step S8, the piezoelectric film is subjected to a second annealing process, allowing it to cool naturally to room temperature.

[0031] As a further description of the above technical solution:

[0032] In step S9, the piezoelectric film is placed on a cutting table and cut into multiple pieces, up to 10-15 pieces.

[0033] As a further description of the above technical solution:

[0034] In step S10, the cut piezoelectric films are collected and irradiated with ultraviolet light for 25-35 minutes.

[0035] In summary, due to the adoption of the above technical solution, the beneficial effects of the present invention are:

[0036] In this invention, the method incorporates a heating and pressurizing process for the thin film, enabling effective thickness control. A subsequent stretching process further enhances the film's toughness and ductility, thus improving the subsequent polarization processing effect. The application of a specific DC current to achieve a polarization electric field strength provides excellent current-driven treatment, altering the molecular distribution within the film and further improving the overall polarization process. Additionally, two annealing processes refine the film grains, adjust the microstructure, eliminate defects, homogenize the material structure and composition, and improve material properties, further enhancing the overall polarization process effect. Attached Figure Description

[0037] Figure 1 This is a flowchart of the polarization process for a highly stable piezoelectric thin film.

[0038] Figure 2 This is a sub-flowchart of S2 in the polarization process of a high-stability piezoelectric thin film.

[0039] Figure 3 This is a sub-flowchart of S3 in the polarization process of a high-stability piezoelectric thin film.

[0040] Figure 4 This is a sub-flowchart of S4 in the polarization process of a high-stability piezoelectric thin film.

[0041] Figure 5 This is a sub-flowchart of S6 in the polarization process of a high-stability piezoelectric thin film. Detailed Implementation

[0042] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0043] Example 1

[0044] Please see Figure 1-5 This invention provides a technical solution: a polarization process for a high-stability piezoelectric thin film, comprising the following steps:

[0045] S1. Take multiple sets of stainless steel rollers, heat the stainless steel rollers to a certain temperature of 40°C, and keep them warm.

[0046] S2. Place the high-stability piezoelectric film that needs to be polarized on the heat-insulating steel roller in S1, apply a pressure of 6.6 MPa, and maintain constant temperature and pressure for 5 min to control the thickness of the piezoelectric film to 65 μm.

[0047] S3. Remove the piezoelectric film, install it on the stretching machine, increase the ambient temperature, and stretch the piezoelectric film to 1.3 times its original length.

[0048] S4. Maintain the stretched length of the piezoelectric film, continue to increase the ambient temperature to 100℃, and maintain this temperature for 2 hours;

[0049] S5. Perform preliminary annealing treatment on the piezoelectric film;

[0050] S6. Place the annealed piezoelectric film between two media and maintain a constant temperature environment. The two media are two metal wires and a metal roller.

[0051] S7. Apply a certain DC current according to the thickness of the piezoelectric film to achieve the polarization electric field strength;

[0052] S8. Perform a second annealing treatment on the piezoelectric film and allow it to cool naturally to room temperature.

[0053] S9. Place the piezoelectric film on the cutting table and cut it into 10 pieces.

[0054] S10. Collect the cut piezoelectric films and irradiate them with ultraviolet light for 25 minutes.

[0055] S11. Collect the piezoelectric film and store it in the warehouse.

[0056] In this embodiment, by incorporating a heating and pressurizing process for the thin film, excellent thickness control can be achieved. A subsequent stretching process effectively improves the film's toughness and ductility, thereby enhancing the subsequent polarization processing effect. Furthermore, the application of a specific DC current to achieve the required polarization electric field strength provides excellent current-driven treatment, altering the molecular distribution within the film and further improving the overall polarization process. Additionally, two annealing processes effectively refine the film grains, adjust the microstructure, eliminate defects, homogenize the material structure and composition, and improve material properties, further enhancing the overall polarization process effect.

[0057] Example 2

[0058] Please see Figure 1-5 This invention provides a technical solution: a polarization process for a high-stability piezoelectric thin film, comprising the following steps:

[0059] S1. Take a stainless steel roller, heat the stainless steel roller to a certain temperature of 45°C, and keep it warm.

[0060] S2. Place the high-stability piezoelectric film that needs to be polarized on the heat-insulating steel roller in S1, apply a pressure of 8.2 MPa, and maintain constant temperature and pressure for 6 min to control the thickness of the piezoelectric film to 68 μm.

[0061] S3. Remove the piezoelectric film, install it on the stretching machine, increase the ambient temperature, and stretch the piezoelectric film to 1.4 times its original length.

[0062] S4. Maintain the stretched length of the piezoelectric film, continue to increase the ambient temperature to 110℃, and maintain it for 2.5 hours;

[0063] S5. Perform preliminary annealing treatment on the piezoelectric film;

[0064] S6. Place the annealed piezoelectric film between two media and maintain a constant temperature environment. The two media are two sets of metal wires and metal rollers.

[0065] S7. Apply a certain DC current according to the thickness of the piezoelectric film to achieve the polarization electric field strength;

[0066] S8. Perform a second annealing treatment on the piezoelectric film and allow it to cool naturally to room temperature.

[0067] S9. Place the piezoelectric film on the cutting table and cut it into 12 pieces.

[0068] S10. Collect the cut piezoelectric films and irradiate them with ultraviolet light for 28 minutes.

[0069] S11. Collect the piezoelectric film and store it in the warehouse.

[0070] In this embodiment, by incorporating a heating and pressurizing process for the thin film, excellent thickness control can be achieved. A subsequent stretching process effectively improves the film's toughness and ductility, thereby enhancing the subsequent polarization processing effect. Furthermore, the application of a specific DC current to achieve the required polarization electric field strength provides excellent current-driven treatment, altering the molecular distribution within the film and further improving the overall polarization process. Additionally, two annealing processes effectively refine the film grains, adjust the microstructure, eliminate defects, homogenize the material structure and composition, and improve material properties, further enhancing the overall polarization process effect.

[0071] Example 3

[0072] Please see Figure 1-5 This invention provides a technical solution: a polarization process for a high-stability piezoelectric thin film, comprising the following steps:

[0073] S1. Take multiple sets of stainless steel rollers, heat the stainless steel rollers to a certain temperature, up to 55℃, and keep them warm.

[0074] S2. Place the high-stability piezoelectric film that needs to be polarized on the heat-insulating steel roller in S1, apply a pressure of 8.2 MPa, and maintain constant temperature and pressure for 7 min to control the thickness of the piezoelectric film to 70 μm.

[0075] S3. Remove the piezoelectric film, install it on the stretching machine, increase the ambient temperature, and stretch the piezoelectric film to 1.5 times its original length.

[0076] S4. Maintain the stretched length of the piezoelectric film, continue to increase the ambient temperature to 115℃, and maintain this temperature for 3 hours;

[0077] S5. Perform preliminary annealing treatment on the piezoelectric film;

[0078] S6. Place the annealed piezoelectric film between two media and maintain a constant temperature environment. The two media are two sets of metal wires and metal rollers.

[0079] S7. Apply a certain DC current according to the thickness of the piezoelectric film to achieve the polarization electric field strength;

[0080] S8. Perform a second annealing treatment on the piezoelectric film and allow it to cool naturally to room temperature.

[0081] S9. Place the piezoelectric film on the cutting table and cut it into 13 pieces.

[0082] S10. Collect the cut piezoelectric films and irradiate them with ultraviolet light for 32 minutes.

[0083] S11. Collect the piezoelectric film and store it in the warehouse.

[0084] In this embodiment, by incorporating a heating and pressurizing process for the thin film, excellent thickness control can be achieved. A subsequent stretching process effectively improves the film's toughness and ductility, thereby enhancing the subsequent polarization processing effect. Furthermore, the application of a specific DC current to achieve the required polarization electric field strength provides excellent current-driven treatment, altering the molecular distribution within the film and further improving the overall polarization process. Additionally, two annealing processes effectively refine the film grains, adjust the microstructure, eliminate defects, homogenize the material structure and composition, and improve material properties, further enhancing the overall polarization process effect.

[0085] Example 4

[0086] Please see Figure 1-5 This invention provides a technical solution: a polarization process for a high-stability piezoelectric thin film, comprising the following steps:

[0087] S1. Take multiple sets of stainless steel rollers, heat the stainless steel rollers to a certain temperature of 60°C, and keep them warm.

[0088] S2. Place the high-stability piezoelectric film that needs to be polarized on the heat-insulating steel roller in S1, apply a pressure of 8.6 MPa, and maintain constant temperature and pressure for 8 min to control the thickness of the piezoelectric film to 75 μm.

[0089] S3. Remove the piezoelectric film, install it on the stretching machine, increase the ambient temperature, and stretch the piezoelectric film to 1.6 times its original length.

[0090] S4. Maintain the stretched length of the piezoelectric film, continue to increase the ambient temperature to 120℃, and maintain this temperature for 4 hours;

[0091] S5. Perform preliminary annealing treatment on the piezoelectric film;

[0092] S6. Place the annealed piezoelectric film between two media and maintain a constant temperature environment. The two media are two sets of metal wires and metal rollers.

[0093] S7. Apply a certain DC current according to the thickness of the piezoelectric film to achieve the polarization electric field strength;

[0094] S8. Perform a second annealing treatment on the piezoelectric film and allow it to cool naturally to room temperature.

[0095] S9. Place the piezoelectric film on the cutting table and cut it into 15 pieces.

[0096] S10. Collect the cut piezoelectric films and irradiate them with ultraviolet light for 35 minutes.

[0097] S11. Collect the piezoelectric film and store it in the warehouse.

[0098] In this embodiment, by incorporating a heating and pressurizing process for the thin film, excellent thickness control can be achieved. A subsequent stretching process effectively improves the film's toughness and ductility, thereby enhancing the subsequent polarization processing effect. Furthermore, the application of a specific DC current to achieve the required polarization electric field strength provides excellent current-driven treatment, altering the molecular distribution within the film and further improving the overall polarization process. Additionally, two annealing processes effectively refine the film grains, adjust the microstructure, eliminate defects, homogenize the material structure and composition, and improve material properties, further enhancing the overall polarization process effect.

[0099] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A polarization process for a high-stability piezoelectric thin film, characterized in that: Includes the following steps: S1. Take multiple sets of stainless steel rollers, heat the stainless steel rollers to a certain temperature, and keep them warm. By setting a heating and pressurizing process for the film inside, the thickness of the film can be well controlled. At the same time, a stretching process for the film is set in the subsequent stage, which can effectively improve the toughness and ductility of the film, thereby effectively improving the subsequent polarization processing effect of the film. S2. Place the piezoelectric film to be polarized on the heat-insulating steel roller in S1, apply a certain pressure, and maintain constant temperature and pressure for a period of time to control the thickness of the piezoelectric film to a certain extent. S3. Remove the piezoelectric film, install it on the stretching machine, increase the ambient temperature, and stretch the piezoelectric film to its length. S4. Maintain the stretched length of the piezoelectric film, continue to increase the ambient temperature, and maintain this temperature for a period of time; S5. Perform preliminary annealing treatment on the piezoelectric film; S6. Place the annealed piezoelectric film between two media and maintain a constant temperature environment. S7. Apply a certain DC current to achieve the polarization electric field strength; The process of applying a certain DC current to achieve the polarization electric field strength is also set up inside, which has a good current-passing treatment effect on the thin film, can change the molecular distribution in the thin film, and thus can effectively improve the overall effect of the polarization treatment process. S8. Perform a second annealing treatment on the piezoelectric film; S9. Place the piezoelectric film on the cutting table and cut it into multiple pieces. S10. Collect the cut piezoelectric films and irradiate them with ultraviolet light for a certain period of time. S11. The piezoelectric thin film is collected and stored in the warehouse; it has two annealing processes, which can effectively refine the thin film grains, adjust the structure, eliminate structural defects, homogenize the material structure and composition, improve the material properties, and further improve the overall polarization treatment process effect.

2. The polarization process for a high-stability piezoelectric thin film according to claim 1, characterized in that, In step S1, multiple sets of stainless steel rollers are taken, and the stainless steel rollers are heated to a certain temperature of 40-60℃ and then kept warm.

3. The polarization process for a high-stability piezoelectric thin film according to claim 1, characterized in that, In step S2, a high-stability piezoelectric film that needs to be polarized is placed on the heat-insulating steel roller in step S1, and a pressure of 6.6-8.6 MPa is applied and kept at constant temperature and pressure for 5-8 minutes to control the thickness of the piezoelectric film to 65-75 μm.

4. The polarization process for a high-stability piezoelectric thin film according to claim 1, characterized in that, In step S3, the piezoelectric film is removed, installed on a stretching machine, the ambient temperature is increased, and the piezoelectric film is stretched to 1.3-1.6 times its original length.

5. The polarization process for a high-stability piezoelectric thin film according to claim 1, characterized in that, In step S4, the stretching length of the piezoelectric film is maintained, the ambient temperature is further increased to 100-120℃, and maintained for 2-4 hours.

6. The polarization process for a high-stability piezoelectric thin film according to claim 1, characterized in that, In step S6, the annealed piezoelectric film is placed between two media to maintain a constant temperature environment. The two media are two sets of metal wires and metal rollers.

7. The polarization process for a high-stability piezoelectric thin film according to claim 1, characterized in that, In step S7, a certain DC current is applied according to the thickness of the piezoelectric film to achieve the polarization electric field strength.

8. The polarization process for a high-stability piezoelectric thin film according to claim 1, characterized in that, In step S8, the piezoelectric film is subjected to a second annealing process, allowing it to cool naturally to room temperature.

9. The polarization process for a high-stability piezoelectric thin film according to claim 1, characterized in that, In step S9, the piezoelectric film is placed on a cutting table and cut into multiple pieces, up to 10-15 pieces.

10. The polarization process for a high-stability piezoelectric thin film according to claim 1, characterized in that, In step S10, the cut piezoelectric films are collected and irradiated with ultraviolet light for 25-35 minutes.

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