Manual diaphragm valve

Abstract

The present invention provides a manually operated diaphragm valve that maintains compactness through a simple construction while simultaneously allowing for setting the valve body's opening and closing range. This design is unaffected by individual differences in the valve's internal shape, ensuring sufficient flow rate when fully open, and also allowing for arbitrary adjustment of the fully open flow rate. The valve body 1 includes a valve body 12 assembled inside a main body 10 and a main shaft 13 threaded into the main body 10 in a lifting motion, separating the valve body 12 from the valve seat 14. A handle 2 is mounted above the valve body 1 for manually rotating the main shaft 13. Near the upper part of the valve body 1, a fully open position adjustment mechanism 20 is provided. This mechanism restricts the rotation of the handle 2 on the fully open side, setting the upper limit of the flow rate of the valve body 12 when fully open.

Description

Technical Field

[0001] This invention relates to a manually operated diaphragm valve for use, for example in a semiconductor manufacturing apparatus, which opens and closes a flow path by manual operation of a handle or the like, and particularly to a manually operated diaphragm valve capable of adjusting the flow rate when fully open with high precision. Background Technology

[0002] This type of manually operated diaphragm valve is typically used as the main valve in a gas supply system for semiconductor manufacturing. The valve stem is raised or lowered by operating a manual handle located at the top, opening or closing the flow path. Typically, on the secondary side of the flow path where this manually operated diaphragm valve is located, branch flow paths are arranged in parallel to ensure the same flow rate in each branch. Each branch flow path is connected to an automatically operating diaphragm valve, which individually adjusts the flow rate from these valves to the secondary side.

[0003] Therefore, when using a manual diaphragm valve as the main valve, in order to achieve high-precision flow control by utilizing the diaphragms on the secondary side, it is necessary to correctly set the flow rate of the manual diaphragm valve on its primary side when it is fully open.

[0004] As a manual diaphragm valve used as the main valve, for example, the valve in the applicant's patent application document 1. This diaphragm valve has a manual handle body mounted on the upper part of the valve shaft. Rotating this handle body at approximately 90° causes the valve body (diaphragm) to actuate via the valve shaft, opening and closing the flow path. In this case, it is generally known that the opening and closing range of the valve body can be set by limiting the rotation range of the handle body. As a rotation-limiting structure for such a handle, a connecting pin protrudes and is mounted on the bottom surface of the handle. On the other hand, sometimes a connecting pin groove is formed at approximately 90° on the upper surface of the valve body. By guiding the connecting pin to the connecting pin groove, the rotation range of the handle body is set. Thus, while maintaining compactness, the opening and closing action of the valve body is limited by a simple structure utilizing the engagement of the concave and convex parts (connecting pin, connecting pin groove), allowing the flow rate to be set when fully open.

[0005] Prior art literature

[0006] Patent documents

[0007] Patent Document 1: Japanese Patent No. 6580377. Summary of the Invention

[0008] The problem that the invention aims to solve

[0009] However, dimensional differences arise in the manufacturing of the components of a diaphragm valve, making it difficult to ensure that the internal dimensions of the assembled valve are completely consistent. This can be due to minute deformations or shape deviations in the diaphragm, or variations in the shape or height of the valve seat when it is fixed to the main body via riveting. These individual differences in the valve's internal shape significantly affect the valve's opening degree when fully open. For example, in the manual diaphragm valve described in Patent Document 1, where a rotation-limiting structure using interlocking protrusions and recesses (connecting pins, connecting pin grooves) is used to limit the handle's rotation angle to 90°, errors in the rotation angle can lead to individual differences in the flow rate when each valve is fully open.

[0010] As a result, there is a possibility that the semiconductor manufacturing process results after the automatic diaphragm valves connected to the secondary side will show differences. Therefore, in order to homogenize the manufacturing process, it is sometimes necessary to adjust the flow rate of all automatic diaphragm valves on the secondary side individually.

[0011] Thus, when the handle side and valve body side are limited by means of interlocking parts such as concave and convex parts so that the rotation angle of the handle body cannot be adjusted, it is difficult to suppress the difference in Cv value caused by individual valve differences. In addition, when the flow rate of the automatic diaphragm valves on the secondary side is adjusted separately, there is also the problem of spending a lot of manpower.

[0012] Furthermore, valves used in semiconductor manufacturing are typically used in high-temperature regions of 200°C or above. If such high temperatures are encountered, the diaphragm or valve seat of a manually operated diaphragm valve will also expand / deform due to heat, thus complicating the deviation and having a greater impact on the Cv value. As a primary-side valve, it is sometimes impossible to ensure the proper flow rate when opening the valve.

[0013] For these reasons, there is a strong desire to develop a manually operated diaphragm valve that is unaffected by individual differences in the valve's internal shape, fully ensures the flow rate when fully open, and allows for arbitrary adjustment of the flow rate when fully open.

[0014] This invention was developed to address existing problems and aims to provide a manual diaphragm valve that maintains compactness through a simple construction while allowing for setting the valve body's opening and closing range. This ensures sufficient flow rate when fully open and allows for arbitrary adjustment of the flow rate when fully open, unaffected by individual differences in the valve's internal shape.

[0015] Solution for solving the problem

[0016] To achieve the above objectives, the invention involved in technical solution 1 is a manually operated diaphragm valve as follows: The valve body comprises a valve body consisting of a diaphragm assembled inside the main body, and a main shaft threaded into the main body in a manner capable of lifting and lowering, thereby contacting and separating the valve body from a valve seat assembled inside the main body. Above the valve body, a handle is installed for manually rotating the main shaft. The bottom surface of the handle and the upper surface of the valve body are assembled in an opposing state. A pin located on the bottom surface of the handle engages with a generally arc-shaped groove formed on the upper surface of the valve body, defining the rotation area for opening and closing the handle. Furthermore, the valve body has a closed-valve side end face located on the inner side of the groove. The valve body has a linear inward and outward movement area formed at the other end of the outer side of the groove, and the valve body has: a connecting hole that communicates with the groove; a female thread that is provided on the inner circumferential surface of the connecting hole; and a stop screw that is a male thread with an abutment portion at the top end that is inserted from the outer end of the connecting hole. The stop screw is finely adjusted in a linear manner in the inward and outward movement area within the connecting hole, so that the stop screw can move forward and backward. The stop screw is fixed to the inner circumference of the connecting hole by using an embedded nut with a locking function, so that the pin can abut against the valve side end face in the fully closed position and abut against the abutment portion in the fully open position. The valve body is fixed by using an embedded nut, thereby eliminating individual differences in the valve body.

[0017] The invention involved in technical solution 2 is a manual diaphragm valve as follows: the rotation angle of the handle from the closed state to the open state is any angle greater than 0° and less than 360°.

[0018] The invention involved in technical solution 3 is a manual diaphragm valve with a handle that can rotate 90° from the closed state to the open state.

[0019] The effects of the invention

[0020] According to the invention described in technical solution 1, a fully open position adjustment mechanism is provided near the upper part of the valve body. This allows for a simple structure that maintains compactness while simultaneously enabling high-precision setting of the valve body's fully open position. Even with individual differences such as dimensional variations in the internal shape of the assembled valve, the flow rate at full open can be adjusted by rotating the handle on the valve opening operation side using the fully open position adjustment mechanism. This ensures that the flow rate at full open is not affected by individual differences in the valve's internal shape. Furthermore, a diaphragm valve can also be provided, which allows for arbitrary and high-precision adjustment of the flow rate at full open using the fully open position adjustment mechanism to obtain the desired Cv value.

[0021] In this case, the male thread is rotated from the outside using a screwdriver or similar tool. The engagement of the male and female threads allows the abutment to move forward and backward along the pin's direction of movement. This facilitates adjustment of the thread engagement position within the forward and backward movement area of ​​the connecting hole. Fine-tuning of the abutment using these male and female threads allows for easy expansion or contraction of the valve's opening side rotation. After adjustment to stop the handle in the fully open position or within the desired rotation angle range, a locking nut can be used to secure the stop screw. This provides a diaphragm valve that eliminates individual variations by limiting the valve body's opening and closing action with a simple construction. Thus, when the handle is fully open, the pin abuts against the abutment, reliably and accurately setting the upper limit of its rotation position, ensuring correct flow rate when fully open.

[0022] Furthermore, the pin is positioned on the bottom surface of the handle, while the male thread is freely inserted into a straight connecting hole that connects to the side of the valve body at the fully open end position of the groove. The threaded end face of this male thread serves as the abutment of the pin, thus suppressing an increase in overall height. It eliminates the need to ensure an area outside the valve body for accommodating a fully open position adjustment mechanism, including the pin or male thread. These are positioned on the upper part of the valve body, maintaining compactness and preventing the valve body from becoming too large. Moreover, the male thread can be easily inserted from the side of the valve body.

[0023] Even when the material constituting the handle is weak, the strength of the female thread can be increased, preventing damage to the female thread and reliably inserting the stop screw to the desired position. It absorbs lead or angular errors of the male and female threads to prevent the position of the stop screw from shifting, and can maintain the limitation of the stop screw on the fully open position of the handle.

[0024] According to the inventions involved in technical solutions 2 and 3, by adjusting the rotation angle of the handle from the closed state to the open state to approximately 90°, it is applicable to quarter-turn valves, ensuring the correct flow rate even when fully open, even with such a small rotation angle of the handle. Furthermore, the rotation angle of the handle from the closed state to the open state can be set to any angle between 0° and 360°. In this case, after setting the flow rate at full open to be smaller or larger than that of a quarter-turn valve, the flow rate at full open can be adjusted with high precision to set the desired Cv value. Attached Figure Description

[0025] Figure 1 This is a front view showing a first embodiment of the manual diaphragm valve of the present invention.

[0026] Figure 2 yes Figure 1 AA section diagram.

[0027] Figure 3 It has already been Figure 1 A schematic top view showing the removal of the handle.

[0028] Figure 4 This is a three-dimensional view of a section cut open from the valve body.

[0029] Figure 5 yes Figure 1 (a) is a top view showing the handle in the open state. (b) is a top view showing the handle in the closed state.

[0030] Figure 6 This is a perspective view showing the handle.

[0031] Figure 7 (a) is a perspective view showing a second embodiment of the manual diaphragm valve of the present invention. (b) is a top view of (a).

[0032] Figure 8 This is a three-dimensional view of the lid.

[0033] Figure 9 It is shown Figure 7 A 3D view of the adjustment components. Detailed Implementation

[0034] Hereinafter, embodiments of the manually operated diaphragm valve of the present invention will be described based on the accompanying drawings. Figure 1 , 2 The first embodiment of the diaphragm valve of the present invention is shown in the figure. Figure 3 It has been shown that Figure 1 A schematic top view of the handle being disassembled. Figure 4 The following are partial cutaway perspective views of the valve body.

[0035] In the figure, the manual diaphragm valve of the present invention includes a valve body 1 and a handle 2. The valve body 1 includes a main body 10, a cover 11, a valve body 12, a main shaft 13, a valve seat 14, a valve cap 15, a pressing component 16, a main shaft cover 17, and a disc spring 18. Near the upper part of the valve body 1, a fully open position adjustment mechanism 20 is provided. The valve body 1 is opened and closed based on the opening and closing angle of the handle 2, which is approximately 90°.

[0036] The main body 10 consists of an upper main body 10a and a lower main body 10b, which are screwed together to form a single unit. Inside the main body 10, a generally circular valve body 12 composed of diaphragms is assembled. A main shaft 13 is threadedly fitted onto the upper side of the valve body 12 in a manner that allows for vertical movement. Below the valve body 12 inside the main body 10, a valve seat 14 is assembled. Through the vertical movement of the main shaft 13, the valve body 12 and the valve seat 14 come into contact and separate, thereby enabling the flow path 10c formed inside the main body 10 to be opened and closed. A cover 11 is fixedly attached to the upper part of the main body 10.

[0037] Figure 6 The handle 2 shown is detachably and integrally mounted on the upper end of the main shaft 13 via a serrated structure, thereby being positioned above the valve body 1. After the handle 2 is assembled, the bottom surface 2a of the handle 2 is opposite to the upper surface 11a of the cover 11 on the upper part of the valve body 1. With the serrated structure preventing loosening or free rotation, the main shaft 13 is configured to rotate integrally based on the rotation of the handle 2.

[0038] A gripping part 2b is formed on the upper part of the handle 2. By gripping the gripping part 2b, a rotation operation is performed. The main shaft 13 rotates together with the rotation of the handle 2 and simultaneously moves up and down, thereby enabling the valve body 12 to be opened and closed.

[0039] On the bottom surface 2a of the handle, a pin 19, formed with a predetermined outer diameter and length, is installed in a downward protruding manner.

[0040] exist Figure 3 , Figure 4 In this valve body 1, a cover 11 is mounted near the upper part of the main body 10 and is located on the upper part of the valve body 1. A fully open position adjustment mechanism 20 is provided on the cover 11. The fully open position adjustment mechanism 20 is located on the valve opening operation side of the cover 11. The fully open position adjustment mechanism 20 restricts the rotation of the handle 2 on the valve opening operation side when fully open, thereby setting the upper limit of the flow rate of the valve body 12 when fully open.

[0041] In the upper surface 11a of the cover, at the position corresponding to the pin 19, a generally arc-shaped groove 30 is formed. The groove 30 is set at an angle of approximately 90° based on the width and depth that can guide the pin 19. One end of the groove 30 becomes the valve opening operation side, and the other end becomes the valve closing operation side. When the pin 19 reaches the fully open side, the pin 19 abuts against the fully open position adjustment mechanism 20 side. On the other hand, when the pin 19 reaches the fully closed side, the pin 19 abuts against the valve closing side end face 30a.

[0042] exist Figure 5In this configuration, handle 2 is set up such that rotating it to the left (counter-clockwise) opens the valve, and rotating it to the right (clockwise) closes the valve. When handle 2 is rotated to the left... Figure 5 (a) When fully open, pin 19 is located at approximately the 3 o'clock position. Figure 3 In this configuration, the fully open position of handle 2 is set in a manner that allows adjustment via the fully open position configuration mechanism 20. On the other hand, from... Figure 5 (a) Starting from the fully open position, rotate handle 2 to the right, so that it becomes Figure 5 (b) In the fully closed state, pin 19 is located at approximately the 6 o'clock position. Figure 3 In this configuration, the pin 19 abuts against the valve-side end face 30a to prevent further rotation of the handle 2. Thus, the handle 2's rotation is stopped. Figure 5 (a) until the valve is open. Figure 5 (b) The rotation angle θ of handle 2 in the closed valve state is set to approximately 90°.

[0043] The straight connecting hole 31 from Figure 3 The groove 30 is formed by connecting the fully open end position to the side 11b of the cover 11. A female thread 31a is formed in the connecting hole 31, and an embedded nut (embedded nut) 32 is fitted into the female thread 31a by thread engagement. In this embodiment, a Sprew is used as the embedded nut 32, and furthermore, a locking type Sprew with improved anti-loosening effect is used. A female thread 33 is provided on the inner circumference of the embedded nut (Sprew) 32, and this female thread 33 is disposed in a portion of the connecting hole 31.

[0044] The aforementioned fully open position adjustment mechanism 20 includes an adjustment component 35, which allows adjustment of the position of the pin 19 in the fully open state. The adjustment component 35 has an abutment portion 36 that the pin 19 abuts against, allowing it to move forward and backward along the direction of movement of the pin 19.

[0045] In this example, the adjusting component 35 consists of a stop screw 35 having a male thread 37 that can thread into the female thread 33 of the embedded nut 32. Through these male and female threads 37 and 33, the stop screw 35 can move freely in and out of the connecting hole 31. Thus, the stop screw 35 can be inserted into any position in the connecting hole 31.

[0046] The threaded end face of the stop screw 35 forms the aforementioned abutment portion 36, and the pin 19 abuts against this abutment portion 36. Thus, by moving the stop screw 35 forward and backward through the connecting hole 3 using the male thread 37 and the female thread 33, the position of the abutment portion 36 is adjusted, so that when the handle 2 is in the fully open state, the pin 19 abuts against this abutment portion 36, thus restricting the rotation of the handle 2. In this way, the fully open position adjustment mechanism 20 arbitrarily restricts the rotation of the valve opening operation side of the handle 2 by adjusting the position of the stop screw 35, sets the rotation angle θ between the handle 2 and the main shaft 13 to limit the opening degree of the valve body 12, and can set the upper limit of the flow rate when fully open.

[0047] In this case, the forming area of ​​the female thread 33 is pre-defined so that the adjustment range of the fully open position of the stop screw 35 includes the angle of the main shaft 13 when the valve body 12 is fully open (approximately 90° relative to the closed state). Thus, when adjusting the fully open position, the insertion position of the stop screw 35 is adjusted by means of the pin 19 abutting against the abutment portion 35 before the valve body 12 reaches the fully open state, thereby adjusting the upper limit of the flow rate of the valve body 1.

[0048] Furthermore, ideally, considering individual differences in the valve body 1, the area where the female thread 33 is formed can be set in a range from below 90° to above 90°, including 90°, which is the theoretical full-open angle of the main shaft 13. Thus, in cases where there are large differences in the rotation angle θ of the main shaft 13 when the assembled valve body 1 is fully open, the full-open position can be set to be larger or smaller than 90° by the full-open position adjustment mechanism 20 accordingly.

[0049] Alternatively, adhesive 38 can be applied between the female thread 33 and the male thread 37. In this case, the locking screw 35 can be fixed to the embedded nut 32 in a position-determined state by the adhesive 38.

[0050] The valve cap 15 inside the main body 10 is formed in a generally annular shape with a stepped portion on its outer periphery and is fixed between the upper main body 10a and the lower main body 10b. A through hole 15a is formed in the center of the valve cap 15. A generally cylindrical pressing member 16 is assembled in this through hole 15a in a manner that allows for lifting and lowering. A valve body (diaphragm) 12 is installed on the bottom side of the pressing member 16, sandwiched between the valve cap 15 and the lower main body 10b on its outer periphery.

[0051] Furthermore, a spindle cover 17 is mounted between the pressing member 16 and the spindle 13, in a manner that covers the lower side of the spindle 13 and is fitted with a plurality of disc springs 18.

[0052] Through these internal structures, when the handle 2 is rotated in the valve closing direction, the main shaft 13 rotates relative to the main body 10 and simultaneously descends. As the main shaft 13 descends, the pressing component 16 is pressed down by the disc spring 18 and the main shaft cover 17. The valve body 12 is pressed against the valve seat 14 by the pressing component 16 near the center, and the flow path 10c is closed.

[0053] On the other hand, when the handle 2 is rotated in the valve opening direction, the main shaft 13 rotates relative to the main body 10 and rises at the same time. As the main shaft 13 rises, the pressing pressure on the valve body 12 is released. After the compressed disc spring 18 returns to its original shape, the main shaft cover 17 rises. At the same time, the pressing component 16 rises and the valve body 12 returns to its open state shape, and the flow path 10c becomes open.

[0054] Furthermore, in the above embodiment, a groove 30 is formed on the upper surface of the cover 11 provided on the valve body 1, but it is also possible to provide the groove 30 directly on the upper surface of the body 10 without providing the cover 11.

[0055] Additionally, a pin 19 is mounted on the bottom surface 2a of the handle, and a generally arc-shaped groove 30 is formed on the upper surface 11a side of the cover. Alternatively, a groove can be formed on the bottom surface 2a of the handle, and a pin 19 can be mounted on the upper surface 11a side of the cover (the upper surface side of the valve body 1) (not shown). In this way, as long as a pin 19 is provided on either the bottom surface 2a of the handle or the upper surface side of the body, and the pin 19 engages with the generally arc-shaped groove 30 formed on the other side, a portion of the rotation area of ​​the handle 2 when opening and closing can be defined.

[0056] Alternatively, instead of assembling the embedded nut 32 in the connecting hole 31, the female thread portion 31a formed in the connecting hole 31 can be used as the female thread that is threaded into the male thread 37. Furthermore, in either of these cases, the application of adhesive between the male and female threads can be omitted. In this case, the adjusted stop screw 35 can be rotated again to adjust the position of the changing abutment portion 36. On the other hand, the male and female threads can also be fixed by a fixing method other than adhesive 38.

[0057] The opening and closing angle of the handle 2 from the closed valve state to the open valve state can be any angle other than 90°. In this case, the angle of the groove 30 can be set to any angle greater than 0° and less than 360°.

[0058] Next, the operation and function of the manual diaphragm valve of the present invention in the above embodiments will be explained.

[0059] Even with individual differences among the components constituting the valve body 1, the valve body 1 can still precisely adjust the flow rate of the valve body 12 when fully open via the fully open position adjustment mechanism 20 after assembly. In this case, the adjusting member 35 of the fully open position adjustment mechanism 20, which consists of a stop screw, moves forward and backward relative to the connecting hole 31 through the threaded engagement of the male thread 37 and the female thread 33. This moves the position of the abutment portion 36, which is the threaded end face of the stop screw 35, so that the adjusting pin 19 abuts against the abutment portion 36 at the abutment position, restricting the rotation of the valve opening operation side of the handle 2 on which the pin 19 is mounted when fully open, thereby allowing the flow rate when fully open to be set arbitrarily.

[0060] Specifically, after the valve body 1 is assembled, while the fluid is flowing inside the valve body 1, the insertion position of the stop screw 35 is adjusted. When the flow rate is consistent with the desired flow rate, the adjustment based on the forward and backward movement of the stop screw 35 is stopped, and this position is set as the fully open position of the valve body 1.

[0061] For example, with the handle 2 fully open, and the Cv value set to 0.62 for a fluid temperature of 200°C, the stop screw 35 is moved forward or backward to the position where the Cv value is 0.62 to adjust the abutment portion 36. Thus, when the handle 2 is fully open, the pin 19 abuts against the abutment portion 36, limiting its rotation, and ensuring that the valve body 1 reliably has a Cv value of 0.62 when fully open. After the valve body 1 is assembled, even if the rotation angle θ of the handle 2 and the spindle 13 when fully open varies due to individual differences, a fixed Cv value is maintained by limiting the rotation of the handle on the manually operated side when fully open using the fully open position adjustment mechanism 20.

[0062] Therefore, when multiple valves (not shown) are connected in parallel on the secondary side of valve body 1, the flow rate of these secondary side valves can be supplied to the secondary side valves at the desired flow rate without individual flow rate adjustment, and the subsequent process of the secondary side valves can be stabilized. Furthermore, by using the fully open position adjustment mechanism 20 to accurately set the Cv value of valve body 1 when it is fully open, it can also accommodate the flow of fluids at different temperatures or fluid pressures.

[0063] In order to obtain the desired Cv value when fully open, the fully open position can be reduced from 90°. For example, if the Cv value when fully open is set to 0.5, the angle of the handle when fully open can be adjusted to approximately 75° using the fully open position adjustment mechanism.

[0064] As with the valve body 1 in this embodiment, when the rotation angle θ of the handle 2 during opening and closing is set to approximately 90°, the Cv value can be set with high precision even when the valve body 1 is rotated to a quarter turn and the valve body 12 is controlled to open and close by rotating the handle 2 at a small angle. In the case of the valve body 1 with a quarter turn, it is also easy to confirm the opening and closing state by visually confirming the orientation of the gripping part 2b of the handle 2 from the outside.

[0065] When the rotation angle θ of the handle 2 from the open valve state to the closed valve state is set to any angle from 0° to 360°, the flow rate when fully open can be set to be smaller or larger relative to the quarter turn. In this case, the flow rate when fully open can also be set with high precision.

[0066] With the pin 19 or the stop screw 35 located in the rotation area of ​​the handle 2, which is opposite to the bottom surface 2a of the handle and the top surface 11a of the cover, it is not necessary to ensure an area outside the valve body 1 for configuring the fully open position adjustment mechanism 20, thus preventing the valve body 1 from becoming too large and achieving excellent compactness.

[0067] An insert nut 32, consisting of a locking sprew, is inserted into the communicating hole 31. The inner circumference of the sprew 32 is threaded with a female thread 33, which is threaded into the male thread 37. Therefore, after the locking screw 35 is screwed into the female thread 33 for position adjustment, it is difficult to loosen. Even if a violent vibration or impact is applied from the outside, the locking screw 35 is reliably prevented from loosening. Thus, the adjusted position of the locking screw 35 can be firmly maintained. Furthermore, by applying adhesive 38 between the male thread 37 and the female thread 33, the fixing force is further improved, and the positional displacement of the locking screw 35 is more reliably prevented. On the other hand, by using the sprew 32, the application of adhesive 38 can be omitted. In this case, sufficient holding force can still be provided to prevent the adjusted positional displacement of the locking screw 35.

[0068] exist Figure 7 (a) Figure 7 (b) shows a second embodiment of the manual diaphragm valve of the present invention. Furthermore, in this embodiment, parts identical to those in the foregoing embodiments are indicated by the same symbols, and their descriptions are omitted.

[0069] In this embodiment, the valve body 40 includes a fully open position adjustment mechanism 41, which comprises: Figure 9 The adjustment component 42 is shown in the figure. The adjustment component 42 has a cylindrical portion 43 and a protruding piece 44 formed on the outer peripheral side of the cylindrical portion 43, and is provided in such a way that it can be fitted to the upper surface side of the cover 45 of the valve body 40.

[0070] like Figure 8As shown, on the cover 45 side, a groove-shaped receiving portion 47, slightly wider than the groove 46, is formed extending circumferentially from the groove 46, which is formed in an arc shape in a manner substantially similar to that in the aforementioned embodiment, toward the valve operation side. Further along the inner diameter side than the groove 46, a circumferential groove 48 is formed, a portion of which communicates with the receiving portion 47. This circumferential groove 48 is configured to a size and depth that allows the cylindrical portion 43 of the adjusting member 42 to be accommodated in a movable, fitted state. On the outer circumference side of the cover 45, threaded holes 49 are formed at approximately 90° angles at two locations, communicating with the circumferential groove 48. The locking screw member 50 is freely threaded into and inserted into these threaded holes 49.

[0071] The adjusting component 42 is inserted into the circumferential groove 48 in a state where the cylindrical part 43 can rotate around its rotation axis, and the protruding piece 44 is assembled into the receiving part 47 in a state where it can move forward and backward, and is received on the upper surface side of the cover 45. The protruding piece 44 is positioned opposite to the pin 19 of the handle, and the side opposite to the pin 19 becomes the abutment part 51.

[0072] The adjusting component 42 is set in a manner that can be fastened by two locking screw components 50. Through the fastening from these two locations, the cylindrical portion 43 is fixed inside the cover 45 to prevent positional displacement, and the protruding piece 44 is fixed inside the receiving portion 47.

[0073] With the above configuration, after the valve body 40 is assembled, the cylindrical portion 43 is rotated within the circumferential groove 48 to adjust the protruding piece 44 (abutment portion 51) to the desired position within the receiving portion 47. The cylindrical portion 43 is then fixed using the stop screw component 50, thereby allowing the abutment portion 51 to be adjusted to the fully open position of the valve. When the handle is fully open, the pin 19 abuts against the abutment portion 51, limiting the rotation of the handle, thus enabling the accurate setting of the Cv value when fully open.

[0074] In the case of the valve body 40, for example, when the handle is in the fully open state and the Cv value is about 0.25 at a fluid temperature of 200°C, the Cv value can be adjusted to about 0.20 by using the fully open position adjustment mechanism 41 to adjust the angle of the handle from 90° to about 70°.

[0075] The embodiments of the present invention have been described in detail above, but the present invention is not limited to the embodiments described above. Various modifications can be made without departing from the spirit of the invention as described in the claims.

[0076] Symbol Explanation

[0077] 1 Valve body

[0078] 2 handles

[0079] 2a Bottom surface

[0080] 10 main body

[0081] 11 Cover

[0082] 11a Upper surface

[0083] 12. Diaphragm (valve body)

[0084] 13 Spindle

[0085] 14 Valve seat

[0086] 19 sales

[0087] 20 Fully Open Position Adjustment Mechanism

[0088] 30, 46 grooves

[0089] 31 Connecting holes

[0090] 32 Embedded Nut

[0091] 33 Female thread

[0092] 35. Stop screw (adjusting component)

[0093] 36. Threaded into the side end face (abutment part)

[0094] 37 Male thread

[0095] 38 Adhesives

[0096] 42 Adjustment components

[0097] 43. Cylindrical section

[0098] 44 Protruding pieces

[0099] 48 Circumferential Groove

[0100] 51 abutment

[0101] θ is the rotation angle of the handle.

Claims

1. A manually operated diaphragm valve, characterized in that, The valve body comprises a valve body consisting of a diaphragm assembled inside the main body and a main shaft threadedly fitted into the main body in a manner capable of lifting and lowering, thereby contacting and separating the valve body from a valve seat assembled inside the main body. Above the valve body, a handle is mounted for manually rotating the main shaft. The bottom surface of the handle and the upper surface of the valve body are mounted opposite each other. A pin on the bottom surface of the handle engages with a generally arc-shaped groove formed on the upper surface of the valve body, defining the rotation area of ​​the handle during opening and closing. Furthermore, the valve body has a valve-closing end face located on the inner side of the groove and a straight end face located on the outer side of the groove. The valve body has an inward and outward movement area, and the valve body includes: a connecting hole communicating with the groove; a female thread disposed on the inner circumferential surface of the connecting hole; and a stop screw, which is a male thread with an abutment portion at the top end inserted from the outer end of the connecting hole. The stop screw is finely adjusted in a straight line in the inward and outward movement area within the connecting hole, allowing the stop screw to move forward and backward. The stop screw is fixed to the inner circumference of the connecting hole using an embedded nut with a locking function, so that the pin can abut against the closed valve side end face in the fully closed position and abut against the abutment portion in the fully open position. The embedded nut is used to fix the pin, thereby eliminating individual differences in the valve body.

2. The manual diaphragm valve according to claim 1, wherein, The rotation angle of the handle from the closed valve state to the open valve state is any angle greater than 0° and less than 360°.

3. The manual diaphragm valve according to claim 2, wherein, The rotation angle is 90°.

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