Active near-field compound probe, detection device and calibration method of probe

Abstract

The application relates to an active near-field composite probe, a detection device and a calibration method of the probe. The probe comprises a wiring layer, a signal transmission layer arranged on the wiring layer, a detection coil, a first transmission component and a second transmission component arranged on the signal transmission layer, wherein the detection coil is used for detecting an electromagnetic field of a measured object to obtain a radio frequency signal; a first shielding layer arranged on the signal transmission layer, a first amplification circuit and a second amplification circuit, a first output port and a second output port arranged on the first shielding layer, wherein the input ends of the first amplification circuit and the second amplification circuit are connected with the detection coil respectively, the first amplification circuit and the second amplification circuit are used for amplifying and processing the received radio frequency signal, and the first output port and the second output port are used for outputting the amplified radio frequency signal to an analyzer. The active near-field composite probe provided by the application can realize high-sensitivity electromagnetic field measurement.

Description

Technical Field

[0001] This application relates to the field of electromagnetic detection technology, and in particular to an active near-field composite probe, an active near-field detection device, and a calibration method for the active near-field composite probe. Background Technology

[0002] To address the challenge of locating emission sources in complex electromagnetic environments, the IEC 61967 standard proposes using probes for near-field scanning measurements. However, as chip integration and frequency increase, along with smaller power consumption, area, and voltage, the electromagnetic environment becomes increasingly complex, and the emitted electromagnetic interference becomes weaker, posing challenges to detection and location. Typically, the amplitude of the captured radiated signal is very small, and in special scenarios, it is necessary to simultaneously detect electric and magnetic field information. Summary of the Invention

[0003] Therefore, it is necessary to provide an active near-field composite probe, an active near-field detection device, and a calibration method for the active near-field composite probe that can simultaneously detect electromagnetic fields, in order to address the above-mentioned technical problems.

[0004] In a first aspect, embodiments of this application provide an active near-field composite probe, comprising:

[0005] A routing layer, wherein power transmission traces are provided on the routing layer;

[0006] A signal transmission layer is disposed on the trace layer. The signal transmission layer is provided with a detection coil, a first transmission component, and a second transmission component. The detection coil is used to detect the electromagnetic field of the device under test to obtain a radio frequency signal.

[0007] A first shielding layer is disposed on the signal transmission layer. The first shielding layer is provided with a first amplification circuit and a second amplification circuit, a first output port and a second output port. The input terminal of the first amplification circuit is connected to the first end of the detection coil, and the output terminal of the first amplification circuit is connected to the first output port via the first transmission component. The input terminal of the second amplification circuit is connected to the second end of the detection coil, and the output terminal of the second amplification circuit is connected to the second output port via the second transmission component. The first amplification circuit and the second amplification circuit are respectively used to amplify the received radio frequency signal. The first output port and the second output port are used to output the amplified radio frequency signal to the analyzer.

[0008] In one embodiment, the active near-field composite probe has a plurality of first coaxial through holes, which are spaced apart on the periphery of the first amplification circuit and the second amplification circuit.

[0009] In one embodiment, a plurality of first coaxial vias are symmetrically arranged around the first amplifier circuit and the second amplifier circuit.

[0010] In one embodiment, the first transmission component includes a first microstrip line, and the second transmission component includes a second microstrip line, wherein the first microstrip line and the second microstrip line are symmetrically arranged.

[0011] In one embodiment, the active near-field composite probe is further provided with a via array, the via array including a plurality of spaced second coaxial through holes, each of the second coaxial through holes being spaced apart from the first transmission component and the second transmission component.

[0012] In one embodiment, the active near-field composite probe further includes a plurality of third coaxial through holes, which are spaced apart at the peripheral edge of the first shielding layer to shield external interference signals.

[0013] In one embodiment, the first amplification circuit includes: a first low-noise amplifier, the input terminal of the first low-noise amplifier being connected to a first terminal of the detection coil, and the output terminal of the first low-noise amplifier being connected to the first output port via the first transmission component;

[0014] The second amplification circuit includes: a second low-noise amplifier, the input terminal of which is connected to the second terminal of the detection coil, and the output terminal of which is connected to the second output port via the second transmission component.

[0015] In one embodiment, the first amplifier circuit further includes:

[0016] The first power conversion circuit is used to receive the power supply voltage and reduce the power supply voltage by a voltage drop.

[0017] The first bias control circuit is connected to the power supply terminals of the first power conversion circuit and the first low-noise amplifier, respectively, and is used to provide a bias voltage to the first low-noise amplifier according to the power supply voltage after the voltage drop.

[0018] The second amplifier circuit also includes:

[0019] The second power conversion circuit is used to receive the power supply voltage and perform voltage drop processing on the power supply voltage.

[0020] The second bias control circuit is connected to the power supply terminals of the second power conversion circuit and the second low-noise amplifier, respectively, and is used to provide a bias voltage to the second low-noise amplifier according to the power supply voltage after the voltage drop.

[0021] In one embodiment, the first amplification circuit further includes: a first decoupling capacitor connected to the power transmission line, used to receive the power supply voltage and filter the received power supply voltage to output to the first power conversion circuit;

[0022] The second amplification circuit further includes a second decoupling capacitor, which is connected to the power transmission line and is used to receive the power supply voltage and filter the received power supply voltage to output it to the second power conversion circuit.

[0023] In one embodiment, the probe further includes a second shielding layer, wherein the wiring layer is disposed on the second shielding layer.

[0024] The aforementioned active near-field composite probe includes a wiring layer, a signal transmission layer, and a first shielding layer. By setting a detection coil on the signal transmission layer, the electromagnetic field of the device under test can be measured to obtain a radio frequency (RF) signal. The RF signal is amplified by a first amplification circuit and a second amplification circuit in the first shielding layer. The first and second transmission components of the signal transmission layer transmit the amplified RF signal to a first output port and a second output port of the first shielding layer, so that the first and second output ports output the amplified RF signal to the analyzer. This allows for the simultaneous detection, amplification, and analysis of electromagnetic field signals, improving the probe's applicability and detection sensitivity.

[0025] Secondly, embodiments of this application provide an active near-field detection device, including:

[0026] Active near-field composite probe as described in any of the foregoing embodiments;

[0027] The analyzer is connected to the first output port and the second output port respectively, and is used to receive the first radio frequency signal output from the first output port and the second radio frequency signal output from the second output port, and to analyze the first radio frequency signal and the second radio frequency signal to obtain the parameter factor of the electromagnetic field. The parameter factor is used to calibrate the active near-field composite probe.

[0028] The aforementioned active near-field detection device detects the electromagnetic field signal of the device under test using an active near-field composite probe and amplifies it to output a radio frequency (RF) signal. An analyzer is connected to the output port of the active near-field composite probe and receives the RF signal output by the probe. The RF signal can be analyzed to obtain parameter factors related to the electromagnetic field to be detected. Based on the obtained parameter factors, the detection performance of the probe can be calibrated to improve the detection accuracy of the probe.

[0029] Thirdly, a calibration method for an active near-field composite probe is also provided, applied to the active near-field detection device as described in the foregoing embodiments. The probe includes a first output port and a second output port, respectively used to output a first radio frequency signal and a second radio frequency signal to an analyzer. The method includes:

[0030] A near field is applied to the probe to obtain the first radio frequency signal and the second radio frequency signal of the near field of the active near field composite probe under a preset angle condition;

[0031] The transfer model of the active near-field composite probe is constructed based on the first radio frequency signal, the second radio frequency signal, and the calibration matrix;

[0032] The parameter factors of the calibration matrix are calculated based on the transfer model, and the active near-field composite probe is calibrated based on the parameter factors.

[0033] The above-mentioned calibration method for an active near-field composite probe involves applying a near field to the probe and acquiring a first radio frequency (RF) signal and a second RF signal at a preset angle. A transfer model of the probe is constructed based on the first and second RF signals. The parameter factors of the calibration matrix can be calculated based on the transfer model, thereby achieving the effect of calibrating the detection performance of the probe based on the parameter factors and improving the detection accuracy of the probe. Attached Figure Description

[0034] To more clearly illustrate the technical solutions in the embodiments of this application or the conventional technology, the drawings used in the description of the embodiments or the conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0035] Figure 1 This is a schematic diagram of the wiring layer in one embodiment;

[0036] Figure 2 This is a schematic diagram of the signal transmission layer in one embodiment;

[0037] Figure 3 This is a schematic diagram of the structure of the first shielding layer in one embodiment;

[0038] Figure 4 This is a schematic diagram of the structure of the second shielding layer in one embodiment;

[0039] Figure 5 This is a flowchart illustrating a calibration method for an active near-field composite probe in one embodiment. Detailed Implementation

[0040] To facilitate understanding of this application, a more complete description will be provided below with reference to the accompanying drawings, which illustrate embodiments of the present application. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of this application will be thorough and complete.

[0041] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0042] It is understood that the terms "first" and "second" used in this application are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. The terms "first," "second," etc., may be used herein to describe various elements, but these elements are not limited by these terms. These terms are used only to distinguish one element from another. Furthermore, in the description of this application, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified. In the description of this application, "several" means at least one, such as one, two, etc., unless otherwise explicitly specified.

[0043] Spatial relation terms such as “below,” “under,” “below,” “under,” “above,” “above,” etc., are used herein to describe the relationship between one element or feature shown in the figure and other elements or features. It should be understood that, in addition to the orientation shown in the figure, spatial relation terms also include different orientations of the device in use and operation. For example, if the device in the figure is flipped, the element or feature described as “below,” “under,” or “below” will be oriented “above” the other element or feature. Therefore, the exemplary terms “below” and “under” can include both above and below orientations. Furthermore, the device may also include other orientations (e.g., rotated 90 degrees or other orientations), and the spatial descriptive terms used herein will be interpreted accordingly.

[0044] It should be noted that when one element is considered to be "connected" to another element, it can be directly connected to the other element or connected to the other element through an intermediary element. Furthermore, in the following embodiments, "connection" should be understood as "electrical connection," "communication connection," etc., if there is transmission of electrical signals or data between the connected objects.

[0045] When used herein, the singular forms of “a,” “an,” and “the” may also include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising,” “including,” or “having,” etc., specify the presence of the stated feature, whole, step, operation, component, part, or combination thereof, but do not preclude the possibility of the presence or addition of one or more other features, wholes, steps, operations, components, parts, or combinations thereof.

[0046] In one embodiment, this application provides an active near-field composite probe, the probe including a first shielding layer 10, a signal transmission layer 20, and a wiring layer 30.

[0047] The wiring layer 30 has the following structure: Figure 1 As shown, the wiring layer 30 is provided with power transmission traces (not shown in the figure). The power transmission traces are used to obtain external power voltage and form a power supply path to power the probe.

[0048] The signal transmission layer 20 has the following structure: Figure 2 As shown, the signal transmission layer 20 is provided with a first transmission component 201, a second transmission component 202, and a detection coil 203, which are disposed on the wiring layer 30. The detection coil 203 is used to detect the electromagnetic field of the device under test to obtain radio frequency signals.

[0049] The detection coil 203 is a composite coil that can be used to detect electric field signals and magnetic field signals to obtain corresponding radio frequency signals. The radio frequency signals are output to the output end of the probe through the first transmission component 201 and the second transmission component 202.

[0050] The first shielding layer 10 has the following structure: Figure 3 As shown, the first shielding layer 10 is disposed on the signal transmission layer 20, and the first shielding layer 10 is provided with a first amplifier circuit F1 and a second amplifier circuit F2, a first output port (not shown in the figure) and a second output port (not shown in the figure).

[0051] Please continue to refer to the following: Figure 2 and Figure 3 The input terminal of the first amplification circuit F1 is connected to the first terminal 2031 of the detection coil, and is used to receive the radio frequency signal acquired by the detection coil 203 and amplify it. The output terminal of the first amplification circuit F1 is connected to the first output port via the first transmission component 201, and is used to output and transmit the amplified radio frequency signal to the first output port, and output it to the analyzer from the first output port, so that the analyzer can analyze the detected electromagnetic field based on the radio frequency signal.

[0052] The input terminal of the second amplifier circuit F2 is connected to the second terminal 2032 of the detection coil, and is used to receive the radio frequency signal acquired by the detection coil 203 and amplify it. The output terminal of the second amplifier circuit F2 is connected to the second output port via the second transmission component 202, and is used to output and transmit the amplified radio frequency signal to the second output port, and then output it to the analyzer from the second output port, so that the analyzer can analyze the detected electromagnetic field based on the radio frequency signal.

[0053] The analyzer can be a spectrum analyzer or a network analyzer. The analyzer is also used to perform comprehensive analysis on the radio frequency signals output from the first output port and the second output port, and to calibrate the detection performance of the probe based on the analysis results.

[0054] The active near-field composite probe of this embodiment includes a multi-layer structure comprising a wiring layer, a signal transmission layer, and a first shielding layer. By setting a detection coil on the signal transmission layer, the electromagnetic field of the device under test can be measured to obtain a radio frequency (RF) signal. The RF signal is amplified by a first amplification circuit and a second amplification circuit in the first shielding layer. The first and second transmission components of the signal transmission layer transmit the amplified RF signal to a first output port and a second output port of the first shielding layer, so that the first and second output ports output the amplified RF signal to the analyzer. This enables simultaneous detection, amplification, and analysis of electromagnetic field signals, improving the probe's applicability and detection sensitivity.

[0055] In one embodiment, please refer to Figure 4 The probe also includes a second shielding layer 40, and the wiring layer 30 is disposed on the second shielding layer 40, that is, the first shielding layer 10, the signal transmission layer 20, the wiring layer 30 and the second shielding layer 40 are arranged in sequence.

[0056] The first shielding layer 10 and the second shielding layer 40 can be used to shield external interference signals.

[0057] In one embodiment, please continue to refer to Figure 2 and Figure 3 The first amplification circuit F1 includes: a first low-noise amplifier 101, the input terminal of the first low-noise amplifier 101 is connected to the first terminal 2031 of the detection coil, and is used to receive the radio frequency signal detected by the detection coil 203 and amplify it. The output terminal of the first low-noise amplifier 101 is used to output the amplified radio frequency signal, and the amplified radio frequency signal is transmitted to the first output port through the first transmission component 201.

[0058] The second amplification circuit F2 includes: a second low-noise amplifier 102, the input terminal of the second low-noise amplifier 102 being connected to the second terminal 2032 of the detection coil, for receiving the radio frequency signal detected by the detection coil 203 and amplifying it, the output terminal of the second low-noise amplifier 102 being used to output the amplified radio frequency signal, and the amplified radio frequency signal being transmitted to the second output port via the second transmission component 202.

[0059] The first low-noise amplifier 101 and the second low-noise amplifier 102 can amplify weak radio frequency signals by 14dB.

[0060] In this embodiment, by setting a first low-noise amplifier and a second low-noise amplifier on the first shielding layer of the probe, the radio frequency signal detected by the detection coil can be amplified, which is beneficial to improving the detection accuracy and sensitivity of the probe.

[0061] In one embodiment, please continue to refer to Figures 1-4 The probe also includes a power receiving port E for receiving an external power supply voltage. For example, the external power supply voltage can be a 12V DC voltage.

[0062] The first amplifier circuit F1 further includes a first decoupling capacitor 109, which is connected to the power transmission line and is used to receive the power supply voltage input from the port E, filter the received power supply voltage to eliminate ripple in the DC voltage, and output the filtered voltage.

[0063] The second amplifier circuit F2 further includes a second decoupling capacitor 110, which is connected to the power transmission line and is used to receive the power supply voltage input from the port E, filter the received power supply voltage to eliminate ripple in the DC voltage, and output the filtered voltage.

[0064] In this embodiment, the power supply voltage can be filtered by setting a first decoupling capacitor and a second decoupling capacitor in the first amplifier circuit and the second amplifier circuit respectively.

[0065] In one embodiment, the first amplifier circuit F1 further includes a first power conversion circuit 107 and a first bias control circuit 103.

[0066] The first power conversion circuit 107, connected to the first decoupling capacitor 109, is used to receive the filtered power supply voltage and perform voltage drop processing on the filtered power supply voltage. For example, it can convert a 12V DC voltage to 8V or 3.3V.

[0067] The first bias control circuit 103 is connected to the power supply terminals of the first power conversion circuit 107 and the first low-noise amplifier 101, respectively, and is used to provide a bias voltage to the first low-noise amplifier 101 according to the power supply voltage after voltage drop. The first low-noise amplifier 101 operates under the bias voltage provided by the first bias control circuit 103.

[0068] The second amplifier circuit F2 further includes a second power conversion circuit 108, connected to the second decoupling capacitor 110, for receiving the filtered power supply voltage and performing voltage drop processing on the power supply voltage. The first power conversion circuit 107 and the second power conversion circuit 108 may each include a low dropout regulator (LDO).

[0069] The second bias control circuit 104 is connected to the power supply terminals of the second power conversion circuit 108 and the second low-noise amplifier 102, respectively, and is used to provide a bias voltage to the second low-noise amplifier 102 according to the power supply voltage after voltage drop. The second low-noise amplifier 102 operates under the bias voltage provided by the second bias control circuit 104.

[0070] In this embodiment, a power conversion circuit and a bias control circuit are respectively provided in the first amplification circuit and the second amplification circuit, which can generate a bias voltage corresponding to the low noise amplifier and input it to the first low noise amplifier and the second low noise amplifier respectively, so that the first low noise amplifier and the second low noise amplifier operate under the power supply of the bias voltage.

[0071] In one embodiment, please continue to refer to Figures 1-4 The active near-field composite probe has multiple first coaxial through holes A, which are spaced apart and symmetrically arranged around the first amplifier circuit and the second amplifier circuit.

[0072] During transmission, by symmetrically and spaced around the first amplifier circuit and the second amplifier circuit, a coaxial via array can be used to eliminate the resonant signal at the connection between the first shielding layer 10 and the signal transmission layer 20.

[0073] In one embodiment, please continue to refer to Figure 2The first transmission component 201 includes a first microstrip line 2011 and a first coplanar waveguide 2012 for transmitting the radio frequency signal. The first microstrip line 2011 and the first coplanar waveguide 2012 are connected through a coaxial via D1. A first SMA connector is soldered onto the first coplanar waveguide 2012, and the output port of the first SMA connector is the first output port.

[0074] The second transmission component 202 includes a second microstrip line 2021 and a second coplanar waveguide 2022 for transmitting the radio frequency signal. The second microstrip line 2021 and the second coplanar waveguide 2022 are connected through a coaxial via D2. A second SMA connector is soldered onto the second coplanar waveguide 2022, and the output port of the second SMA connector is the second output port.

[0075] The first microstrip line 2011 and the second microstrip line 2021 are symmetrically arranged, and the characteristic impedance of the first transmission component 201 and the second transmission component 202 can be designed to be 50 ohms respectively.

[0076] In one embodiment, please continue to refer to Figures 1-4 The active near-field composite probe is further provided with a via array, which includes a plurality of spaced second coaxial through holes B, each of the second coaxial through holes B being spaced apart from the first transmission component 201 and the second transmission component 202.

[0077] Among them, it is possible to Figure 2 As can be seen, a plurality of second coaxial through holes B are evenly distributed on the periphery of the first transmission component 201 and the second transmission component 202, and are spaced apart from the first transmission component 201 and the second transmission component 202. The plurality of second coaxial through holes B are used to improve the transmission performance of the transmission structure.

[0078] In one embodiment, please continue to refer to Figures 1-4 The active near-field probe also includes multiple third coaxial through holes C, which are evenly spaced at the peripheral edges of the first shielding layer 10, the signal transmission layer 20, the wiring layer 30 and the second shielding layer 40, and can be used to shield external interference signals.

[0079] In one embodiment, this application provides an active near-field detection device, comprising: an active near-field composite probe and an analyzer as described in any of the foregoing embodiments. The analyzer is connected to a first output port and a second output port of the probe, respectively, for receiving a first radio frequency (RF) signal output from the first output port and a second RF signal output from the second output port, and for analyzing the first RF signal and the second RF signal to obtain a parameter factor of the electromagnetic field. The parameter factor is related to the transmission performance of the probe and can be used to calibrate the probe.

[0080] The analyzer can be a network analyzer or a spectrum analyzer. By connecting the first and second output ports of the SMA connector of the active near-field probe to the input port of the spectrum analyzer, the magnetic radiation signal emitted by the object under test can be measured using the probe's detection section, and the magnitude of the electromagnetic field signal of the object under test can be analyzed. By connecting the network analyzer to a standard microstrip line and the first and second output ports of the active near-field probe respectively, and then using the magnetic field near-field probe to detect the magnetic field signal generated above the standard microstrip line, the probe can be calibrated using the obtained detection results.

[0081] In this embodiment, an active near-field composite probe is used to detect the electromagnetic field signal of the device under test and amplify it to output a radio frequency (RF) signal. An analyzer is connected to the output port of the active near-field composite probe and receives the RF signal output by the probe. The RF signal can be analyzed to obtain parameter factors related to the electromagnetic field to be detected. The detection performance of the probe can be calibrated based on the obtained parameter factors.

[0082] The active near-field composite probe provided in this application can improve detection sensitivity; however, due to defects in manufacturing processes and circuit design, it cannot achieve complete symmetry, which reduces parameters such as the detection frequency response and isolation of the designed active near-field probe. Therefore, it is necessary to introduce a de-embedding method for the active near-field probe to calibrate the errors caused by asymmetric transmission.

[0083] In one embodiment, such as Figure 5As shown, a calibration method for an active near-field composite probe is also provided, applied to the active near-field detection device as described in the foregoing embodiments. The probe includes a first output port and a second output port, used to output a first radio frequency signal and a second radio frequency signal to an analyzer, respectively. The first output port is connected to a first input terminal of the analyzer, and the second output port is connected to a second input terminal of the analyzer. The probe's detection coil 230 forms a first transmission link with the first output port and the first input terminal. The second output port is connected to the second input terminal of the analyzer, and the probe's detection coil 230 forms a second transmission link with the second output port and the second input terminal.

[0084] The method includes steps 502-506:

[0085] Step 502: Apply a near field to the active near-field composite probe and acquire the first radio frequency signal and the second radio frequency signal of the near field of the active near-field composite probe under a preset angle condition.

[0086] The preset angle can be the angle between the probe and the direction of the electric field or magnetic field to be measured, and the angle is between 0 degrees and 180 degrees, including at least a first angle and a second angle, and the first angle and the second angle are different.

[0087] A near field is applied to the probe at the first angle to obtain a first radio frequency signal output from the first output port of the probe, a second radio frequency signal output from the second output port, and a first characteristic parameter. The first characteristic parameter may be characteristic information such as the intensity and direction of the electric field and magnetic field at the first angle. The first radio frequency signal is recorded as the first total output signal, and the second radio frequency signal is recorded as the second total output signal.

[0088] A near field is applied to the probe at the second angle to obtain the first radio frequency signal output from the first output port of the probe and the second radio frequency signal output from the second output port, as well as the second characteristic parameter. The second characteristic parameter may be characteristic information such as the intensity and direction of the electric field and magnetic field at the second angle. The first radio frequency signal is recorded as the third total output signal, and the second radio frequency signal is recorded as the fourth total output signal.

[0089] Step 504: Construct the transmission model of the active near-field composite probe based on the first radio frequency signal, the second radio frequency signal, and the calibration matrix.

[0090] Specifically, from the first perspective, the first total output signal and the second total output signal are characterized using a calibration matrix and the first characteristic parameter to construct a first transfer model. This first transfer model establishes the relationship between the calibration matrix and the first total output signal, the second total output signal, and the first characteristic parameter.

[0091] From the second perspective, the third and fourth total output signals are characterized using a calibration matrix and the second characteristic parameter to construct a second transfer model. This second transfer model establishes the relationship between the calibration matrix and the third, fourth, and second characteristic parameters.

[0092] Step 506: Calculate the parameter factor of the calibration matrix according to the transfer model, and calibrate the active near-field composite probe according to the parameter factor.

[0093] After obtaining the constructed first and second transmission models, by inputting the acquired first, second, third, and fourth total output signals, the first characteristic parameter, and the specific values ​​of the second characteristic parameter, the specific parameter factors in the calibration matrix can be calculated. The calibration matrix can be used to characterize the characteristics of the first and second transmission links of the active near-field probe. Based on the parameter factors, the first and second transmission links of the active near-field probe are calibrated to eliminate the influence of asymmetry between the first and second transmission links. After calculating the calibration matrix, the calibrated measurement values ​​are obtained by incorporating the calibration matrix into the measurement process of the active near-field probe, thus achieving the calibration of the active near-field probe.

[0094] In this embodiment, by applying a near field to the probe and acquiring a first radio frequency (RF) signal and a second RF signal at a preset angle, a transmission model of the probe is constructed based on the first RF signal and the second RF signal. The parameter factor of the calibration matrix can be calculated based on the transmission model, thereby achieving the effect of calibrating the detection performance of the probe based on the parameter factor, eliminating the influence of asymmetry in the probe's transmission link, and improving the detection accuracy of the probe.

[0095] In the description of this specification, references to terms such as "some embodiments," "other embodiments," and "ideal embodiments" indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative descriptions of the above terms do not necessarily refer to the same embodiments or examples.

[0096] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0097] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. An active near-field compound probe, characterized in that, The application relates to an active near-field composite probe. The active near-field composite probe comprises a wiring layer, a signal transmission layer, a first shielding layer and a plurality of first coaxial through holes. The signal transmission layer is arranged on the wiring layer and is provided with a detection coil, a first transmission component and a second transmission component. The first shielding layer is arranged on the signal transmission layer and is provided with a first amplification circuit and a second amplification circuit, a first output port and a second output port.

2. The active near-field compound probe of claim 1, wherein, The input end of the first amplification circuit is connected with the first end of the detection coil.

3. The active near-field compound probe of claim 2, wherein, The output end of the first amplification circuit is connected with the first output port through the first transmission component.

4. The active near-field compound probe of claim 1, wherein, The input end of the second amplification circuit is connected with the second end of the detection coil.

5. The active near-field compound probe of claim 1, wherein, The output end of the second amplification circuit is connected with the second output port through the second transmission component.

6. The active near-field compound probe according to any one of claims 1 to 5, characterized in that The first amplification circuit and the second amplification circuit are respectively used for amplifying the received radio frequency signals. The first output port and the second output port are used for outputting the amplified radio frequency signals to an analyzer.

7. The active near-field compound probe of claim 6, wherein, The first transmission component comprises a first microstrip line, and the second transmission component comprises a second microstrip line. The first microstrip line and the second microstrip line are symmetrically arranged. The active near-field composite probe further comprises a plurality of third coaxial through holes. The third coaxial through holes are arranged on the circumferential edge of the first shielding layer and are used for shielding external interference signals. The first amplification circuit comprises a first low-noise amplifier. The input end of the first low-noise amplifier is connected with the first end of the detection coil. The output end of the first low-noise amplifier is connected with the first output port through the first transmission component. The second amplification circuit comprises a second low-noise amplifier. The input end of the second low-noise amplifier is connected with the second end of the detection coil. The output end of the second low-noise amplifier is connected with the second output port through the second transmission component. The first amplification circuit further comprises a first power conversion circuit and a first bias control circuit. The first power conversion circuit is used for receiving a power voltage and performing voltage drop processing on the power voltage. The first bias control circuit is connected with the first power conversion circuit and the power supply end of the first low-noise amplifier respectively. The first bias control circuit is used for providing a bias voltage to the first low-noise amplifier according to the voltage dropped power voltage. The second amplification circuit further comprises a second power conversion circuit and a second bias control circuit. The second power conversion circuit is used for receiving the power voltage and performing voltage drop processing on the power voltage. The second bias control circuit is connected with the second power conversion circuit and the power supply end of the second low-noise amplifier respectively. The second bias control circuit is used for providing a bias voltage to the second low-noise amplifier according to the voltage dropped power voltage. A second bias control circuit is connected with the second power conversion circuit and the power supply end of the second low-noise amplifier respectively, and is configured to provide a bias voltage to the second low-noise amplifier according to the voltage after the voltage drop.

8. The active near-field compound probe of claim 7, wherein, The first amplification circuit further comprises a first decoupling capacitor connected with the power supply transmission wire, configured to receive the power supply voltage and perform filtering processing on the received power supply voltage to output to the first power conversion circuit. The second amplification circuit further comprises a second decoupling capacitor connected with the power supply transmission wire, configured to receive the power supply voltage and perform filtering processing on the received power supply voltage to output to the second power conversion circuit.

9. The active near-field compound probe of claim 1, wherein, The probe further comprises: A second shielding layer, wherein the wire layer is arranged on the second shielding layer.

10. An active near-field probe device, characterized by The probe comprises: The active near-field composite probe according to any one of claims 1-9; An analyzer connected with the first output port and the second output port respectively, configured to receive the first radio frequency signal output by the first output port and the second radio frequency signal output by the second output port, and analyze the first radio frequency signal and the second radio frequency signal to obtain a parameter factor of the electromagnetic field, wherein the parameter factor is used for calibrating the probe.

11. A method of calibrating an active near-field compound probe, applied to an active near-field probe device as claimed in claim 10, characterized in that, The probe comprises a first output port and a second output port, configured to output a first radio frequency signal and a second radio frequency signal to an analyzer respectively, and the method comprises: Applying a near field to the active near-field composite probe, obtaining the first radio frequency signal and the second radio frequency signal of the near field of the active near-field composite probe under a preset angle condition; Constructing a transfer model of the probe according to the first radio frequency signal, the second radio frequency signal and a calibration matrix; Calculating a parameter factor of the calibration matrix according to the transfer model, and calibrating the probe according to the parameter factor.

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