Transport system, control method thereof, and method for manufacturing product

Abstract

A transport system, a control method thereof, and a method for manufacturing an article. The transport system includes: a mover having a first magnet group arranged parallel to a first direction and a second magnet group arranged parallel to a second direction intersecting the first direction; and a plurality of coils arranged parallel to the first direction so as to be able to face the first magnet group and the second magnet group. The mover is movable in the first direction along the plurality of coils by electromagnetic forces received from the plurality of coils by the first magnet group, while the posture of the mover is controlled by the electromagnetic forces received from the plurality of coils by the first magnet group or the second magnet group.

Description

[0001] This application is a divisional application of the invention patent application with the application date of August 5, 2019, application number 201910716617.6, and invention name “Transportation system, mover, control equipment and control method”. Technical Field

[0002] The present invention relates to a transportation system and a control method thereof, and a method for manufacturing a product. Background Art

[0003] Transport systems are commonly used in production lines for assembling industrial products, semiconductor exposure equipment, and the like. Specifically, transport systems in production lines transport workpieces, such as components, between multiple stations within a production line or between production lines in factory automation, or can be used as transport equipment in processing equipment. One proposed transport system uses a linear motor with a movable magnet.

[0004] A transport system using a movable magnet type linear motor is formed by using a guide device such as a mechanically contacting linear guide. However, transport systems using such a guide device suffer from the following issues: productivity is degraded by contaminants such as wear debris from guide rails and bearings, lubricating oil, and its volatile components, which are discharged from the sliding parts of the linear guides. Furthermore, there is the problem of increased friction in the sliding parts during high-speed transport, which reduces the lifespan of the linear guides.

[0005] Japanese Patent Application Laid-Open No. 2015-230927 and Japanese Patent Application Laid-Open No. 2016-532308 disclose non-contact magnetic levitation-type motion devices or transport devices without a sliding guide. The motion device disclosed in Japanese Patent Application Laid-Open No. 2015-230927 employs seven columns of linear motors to control the movement and posture of the mover. Furthermore, the transport device disclosed in Japanese Patent Application Laid-Open No. 2016-532308 employs six columns of levitation electromagnets, guide electromagnets, and propulsion electromagnets.

[0006] However, in the apparatuses disclosed in Japanese Patent Application Laid-Open No. 2015-230927 and Japanese Patent Application Laid-Open No. 2016-532308, many columns of linear motors or electromagnets installed make it difficult to avoid an increase in system size. Summary of the Invention

[0007] The present invention intends to provide a transport system, a mover, a control device, and a control method, which can transport the mover in a contactless manner while controlling the posture of the mover without involving an increase in the size of the system configuration.

[0008] According to one aspect of the present invention, a transportation system is provided, which includes: a mover, the mover having a first magnet group arranged parallel to a first direction and a second magnet group arranged parallel to a second direction intersecting the first direction; and a plurality of coils, the plurality of coils being arranged parallel to the first direction in a manner capable of facing the first magnet group and the second magnet group, and the mover being capable of moving along the plurality of coils in the first direction by the electromagnetic force received by the first magnet group from the plurality of coils, and the posture of the mover being controlled by the electromagnetic force received by the first magnet group or the second magnet group from the plurality of coils.

[0009] According to another aspect of the present invention, a mover is provided, which includes: a first magnet group arranged parallel to a first direction; and a second magnet group arranged parallel to a direction intersecting the first direction, and the mover can move along a plurality of coils in the first direction by the electromagnetic force received by the first magnet group from the plurality of coils, and the posture of the mover is controlled by the electromagnetic force received by the first magnet group or the second magnet group from the plurality of coils, and the plurality of coils are arranged parallel to the first direction in a manner capable of facing the first magnet group and the second magnet group.

[0010] According to another aspect of the present invention, a control device for controlling a mover is provided, the mover having a first magnet group arranged parallel to a first direction and a second magnet group arranged parallel to a direction intersecting the first direction, wherein the mover is movable in the first direction along a plurality of coils by electromagnetic forces received by the first magnet group from the plurality of coils, and the posture of the mover is controlled by electromagnetic forces received by the first magnet group or the second magnet group from the plurality of coils, and the plurality of coils are arranged parallel to the first direction so as to face the first magnet group and the second magnet group. The control device includes: a transport control unit that controls the transport of the mover in the first direction by controlling the electromagnetic forces received by the first magnet group from the plurality of coils; and a posture control unit that controls the posture of the mover by controlling the electromagnetic forces received by the first magnet group or the second magnet group from the plurality of coils.

[0011] According to another aspect of the present invention, a control method for controlling a mover is provided, wherein the mover has a first magnet group arranged parallel to a first direction and a second magnet group arranged parallel to a direction intersecting the first direction, wherein the mover is capable of moving in the first direction along a plurality of coils by electromagnetic forces received by the first magnet group from the plurality of coils, and the posture of the mover is controlled by electromagnetic forces received by the first magnet group or the second magnet group from the plurality of coils, and the plurality of coils are arranged parallel to the first direction so as to face the first magnet group and the second magnet group. The control method includes: controlling the movement of the mover in the first direction by controlling the electromagnetic forces received by the first magnet group from the plurality of coils; and controlling the posture of the mover by controlling the electromagnetic forces received by the first magnet group or the second magnet group from the plurality of coils.

[0012] Further features of the present invention will become apparent from the following description of exemplary embodiments with reference to the attached drawings.

[0013] Figures

[0014] Figure 1A is a schematic diagram illustrating the entire configuration of a transportation system including a mover and a stator according to a first embodiment.

[0015] Figure 1B is a schematic diagram illustrating the entire configuration of the transportation system according to the first embodiment.

[0016] Figure 2 is a schematic diagram illustrating a mover and a stator in the transportation system according to the first embodiment.

[0017] Figure 3 is a schematic diagram illustrating coils of a stator in the transportation system according to the first embodiment.

[0018] Figure 4 is a schematic diagram illustrating a control system for controlling a transportation system according to a first embodiment.

[0019] Figure 5 1 is a schematic diagram illustrating a posture control method of a mover in a transportation system according to a first embodiment.

[0020] Figure 6 is a schematic diagram illustrating a process of calculating a function by using a mover position in a transportation system according to the first embodiment.

[0021] Figure 7 : is a schematic diagram illustrating a process of calculating a function by using a mover posture in a transportation system according to the first embodiment.

[0022] Figure 8A : is a schematic diagram illustrating a process of calculating a function by using a mover posture in a transportation system according to the first embodiment.

[0023] Figure 8B : is a schematic diagram illustrating a process of calculating a function by using a mover posture in a transportation system according to the first embodiment.

[0024] Figure 9 is a schematic diagram illustrating a method of independently applying force to a permanent magnet of a mover in a transportation system in an X direction and a Y direction according to a first embodiment.

[0025] Figure 10 is a schematic diagram illustrating a mover in a transportation system according to a second embodiment.

[0026] Figure 11 is a schematic diagram illustrating a mover and a stator in a transportation system according to a second embodiment.

[0027] Figure 12 is a schematic diagram illustrating a mover and a stator in a transportation system according to a third embodiment.

[0028] Figure 13 is a schematic diagram illustrating a mover in a transportation system according to a third embodiment.

[0029] Figure 14A is a schematic diagram illustrating a mover in a transportation system according to a first modified example of the third embodiment.

[0030] Figure 14B is a schematic diagram illustrating a mover in a transportation system according to a second modified example of the third embodiment.

[0031] Figure 14C is a schematic diagram illustrating a mover in a transportation system according to a third modified example of the third embodiment.

[0032] Figure 14D : is a schematic diagram illustrating a mover in a transportation system according to a fourth modified example of the third embodiment.

[0033] Figure 15 is a schematic diagram illustrating a mover and a stator in a transportation system according to a fourth embodiment.

[0034] Figure 16 is a schematic diagram illustrating a mover and a stator in a transportation system according to a fourth embodiment. DETAILED DESCRIPTION

[0035] First embodiment

[0036] The following will refer to the accompanying drawings, that is, using Figures 1A to 9 A first embodiment of the present invention is described.

[0037] First, by using Figure 1A and Figure 1B The entire configuration of the transportation system according to the present embodiment is described. Figure 1A and Figure 1B 1 is a schematic diagram illustrating the entire configuration of the transport system including the mover 101 and the stator 201 according to the present embodiment. Figure 1A and Figure 1B The main parts of the mover 101 and the stator 201 are removed. Figure 1A is a diagram of the mover 101 when viewed from a Z direction described later, and Figure 1B 1 is a diagram of the mover 101 when viewed from a Y direction described later.

[0038] like Figure 1A and Figure 1BAs shown, the transport system 1 according to this embodiment includes a mover 101 that forms a moving vehicle, slider, or carriage, and a stator 201 that forms a transport path. The transport system 1 is a transport system that includes a movable magnet-type linear motor (a movable permanent magnet-type linear motor, a movable field magnet-type linear motor). Furthermore, the transport system 1 is configured as a magnetic levitation-type transport system that lacks a guide device such as a linear guide and transports the mover 101 contactlessly over the stator 201.

[0039] The transport system 1 transports the workpiece 102 on the mover 101 to a processing device that performs a processing operation on the workpiece 102 by, for example, transporting the mover 101 by the stator 201. Figure 1A and Figure 1B A single mover 101 is shown for the stator 201 , but the number of movers 101 is not limited thereto. In the transport system 1 , a plurality of movers 101 may be transported above the stator 201 .

[0040] Here, the coordinate axes, directions, etc. used in the following description are defined. First, the X-axis is cut along the horizontal direction, which is the transport direction of the mover 101, and the transport direction of the mover 101 is defined as the X-direction. Furthermore, the Z-axis is cut along the vertical direction, which is the direction perpendicular to the X-direction, and the vertical direction is defined as the Z-direction. Furthermore, the Y-axis is cut along the direction perpendicular to the X-direction and the Z-direction, and the direction perpendicular to the X-direction and the Z-direction is defined as the Y-direction. In addition, rotation about the X-axis is represented as Wx, rotation about the Y-axis is represented as Wy, and rotation about the Z-axis is represented as Wz. In addition, the symbol "*" serves as a multiplication symbol. In addition, the center of the mover 101 is represented as the origin O, the positive (+) side of the Y-axis is represented as the R-side, and the negative (-) side of the Y-axis is represented as the L-side. It should be noted that although the transport direction of the mover 101 does not necessarily have to be horizontal, in this case, the transport direction can be defined as the X-direction, and the Y-direction and Z-direction can be defined in a similar manner.

[0041] Next, we will use Figure 1A 、 Figure 1B and Figure 2 The mover 101 as a transport object in the transport system 1 according to the present embodiment will be described. Figure 2 1 is a schematic diagram illustrating the mover 101 and the stator 201 in the transport system 1 according to the present embodiment. Figure 2 : is a diagram of the mover 101 and the stator 201 when viewed from the X direction. Figure 2 The left half of the diagram is along Figure 1B The section (A) is taken along the line (A)-(A). In addition, Figure 2 The right half of the diagram is along Figure 1BSection (B) taken along line (B)-(B).

[0042] like Figure 1A 、 Figure 1B and Figure 2 As shown in the figure, the mover 101 has permanent magnets 103 aR, 103 bR, 103 cR, 103 dR, 103 aL, 103 bL, 103 cL, and 103 dL as the permanent magnets 103 .

[0043] The permanent magnets 103 are arranged and attached to the two side surfaces of the mover 101 that are parallel to the X direction. Specifically, the permanent magnets 103aR, 103bR, 103cR, and 103dR are attached to the side surface on the R side of the mover 101. In addition, the permanent magnets 103aL, 103bL, 103cL, and 103dL are attached to the side surface on the L side of the mover 101. It should be noted that, hereinafter, the permanent magnets of the mover 101 are simply referred to as "permanent magnets 103" as long as they do not need to be specifically distinguished. In addition, when each permanent magnet 103 needs to be identified independently and the R side and the L side do not need to be distinguished, each permanent magnet 103 is independently identified by using the reference mark corresponding to each permanent magnet 103, removing the R or L reference mark and leaving the reference characters up to the lowercase letters as identifiers. In this case, “permanent magnet 103 a ,” “permanent magnet 103 b ,” “permanent magnet 103 c ,” or “permanent magnet 103 d ” is expressed to independently identify each permanent magnet 103 .

[0044] The permanent magnets 103aR and 103dR are attached to one end and the other end of the side surface on the R side parallel to the X direction of the mover 101 in the X direction. The permanent magnets 103bR and 103cR are attached between the permanent magnets 103aR and 103dR on the side surface on the R side of the mover 101. The permanent magnets 103aR, 103bR, 103cR, and 103dR are arranged at equal intervals in the X direction, for example. In addition, for example, the permanent magnets 103aR, 103bR, 103cR, and 103dR are arranged so that their respective centers are aligned on a straight line parallel to the X direction and passing through the center of the side surface on the R side of the mover 101.

[0045] Permanent magnets 103aL and 103dL are attached to one end and the other end of the side surface on the L side parallel to the X direction of the mover 101 in the X direction. Permanent magnets 103bL and 103cL are attached between permanent magnets 103aL and 103dL on the side surface on the L side of the mover 101. Permanent magnets 103aL, 103bL, 103cL, and 103dL are arranged at equal intervals in, for example, the X direction. In addition, for example, permanent magnets 103aL, 103bL, 103cL, and 103dL are arranged so that their respective centers are aligned on a straight line parallel to the X direction and passing through the center of the side surface on the L side of the mover 101. Furthermore, the permanent magnets 103aL, 103bL, 103cL, and 103dL are arranged to the same positions in the X direction as the permanent magnets 103aR, 103bR, 103cR, and 103dR, respectively.

[0046] The permanent magnets 103a and 103d are attached to positions at a distance ry on one side and the other side in the X direction from the origin O, which is the center of the mover 101. The permanent magnets 103a, 103b, 103c, and 103d are attached to positions at a distance rx on the Y direction from the origin O. The permanent magnets 103c and 103b are attached to positions at a distance rz on one side and the other side in the X direction from the origin O.

[0047] Each of permanent magnets 103aR, 103dR, 103aL and 103dL is a set of two permanent magnets arranged parallel to the Z direction. Permanent magnets 103a and 103d are respectively formed so that the two permanent magnets are arranged parallel to the Z direction so that the polarity of the outer magnetic pole facing the stator 201 side is alternately different. It should be noted that the number of permanent magnets forming permanent magnets 103a and 103d arranged parallel to the Z direction is not limited to two, as long as it is multiple. In addition, the arrangement direction of the permanent magnets forming permanent magnets 103a and 103d does not necessarily need to be the Z direction orthogonal to the X direction (which is the transport direction), but can be the direction intersecting the X direction. That is, permanent magnets 103a and 103d can be any magnet group formed by a plurality of permanent magnets, and the plurality of permanent magnets are arranged parallel to the direction intersecting the X direction so that the polarity of each magnetic pole alternates.

[0048] On the other hand, each of permanent magnets 103bR, 103cR, 103bL and 103cL is a set of three permanent magnets arranged respectively along the Y direction. Permanent magnets 103b and 103c are respectively formed so that the three permanent magnets are arranged parallel to the X direction so that the polarity of the outer magnetic pole facing the stator 201 side is different alternately. It should be noted that the number of permanent magnets forming permanent magnets 103b and 103c arranged parallel to the X direction is not limited to three, as long as it is multiple. That is, permanent magnets 103b and 103c can be any magnet group formed by multiple permanent magnets, and the multiple permanent magnets are arranged parallel to the X direction so that the polarity of each magnetic pole alternates.

[0049] Each permanent magnet 103 is attached to a yoke 107 provided on the side surfaces on the R side and the L side of the mover 101. The yoke 107 is made of a substance having a large magnetic permeability, such as iron.

[0050] In this manner, the plurality of permanent magnets 103 are symmetrically arranged on the side surfaces on the R side and the L side on the mover 101 with the central axis along the X-axis of the mover 101 as the axis of symmetry. The mover 101 on which the permanent magnets 103 are arranged is configured to be able to move while the posture is subjected to six-axis control by the electromagnetic force received by the permanent magnets 103 from the plurality of coils 202 of the stator 201, as described later.

[0051] The mover 101 is movable in the X direction along a plurality of coils 202 arranged in two rows parallel to the X direction. The mover 101 is transported together with a workpiece 102 placed thereon. The mover 101 may have a holding mechanism for holding the workpiece 102, such as a workpiece holder on the mover 101.

[0052] Next, we will use Figure 1A 、 Figure 2 and Figure 3 The stator 201 in the transportation system 1 according to the present embodiment will be described. Figure 3 2 is a schematic diagram illustrating the coil 202 of the stator 201. It should be noted that Figure 3 2 is a diagram of the coil 202 when viewed from the Y direction.

[0053] The stator 201 has a plurality of coils 202 arranged in two rows parallel to the X direction, which is the transport direction of the mover 101. The plurality of coils 202 are attached to the stator 201 so as to face the mover 101 from the R side and the L side, respectively. The stator 201 extends in the X direction, which is the transport direction, and forms a transport path for the mover 101.

[0054] The mover 101 transported on the stator 201 has a linear scale 104, a Y target 105, and a Z target 106. The linear scale 104, the Y target 105, and the Z target 106 are attached parallel to the X direction, for example, to the bottom of the mover 101. The Z target 106 is attached to both sides of the linear scale 104 and the Y target 105.

[0055] like Figure 2 As shown, the stator 201 has a plurality of coils 202 , a plurality of linear encoders 204 , a plurality of Y sensors 205 , and a plurality of Z sensors 206 .

[0056] The plurality of coils 202 are arranged in two rows parallel to the X direction and attached to the stator 201 so as to face the permanent magnets 103 on the side surfaces on the R and L sides of the mover 101. The plurality of coils 202 arranged in one row on the R side are arranged parallel to the X direction so as to face the permanent magnets 103aR, 103bR, 103cR, and 103dR on the R side of the mover 101. Furthermore, the plurality of coils 202 arranged in one row on the L side are arranged parallel to the X direction so as to face the permanent magnets 103aL, 103bL, 103cL, and 103dL on the L side of the mover 101.

[0057] In this embodiment, the columns of coils 202 on the R and L sides of the mover 101 are arranged so as to face the permanent magnets 103a and 103d and the permanent magnets 103b and 103c, respectively. The arrangement direction of the plurality of permanent magnets differs between the permanent magnets 103a and 103d and the permanent magnets 103b and 103c. Therefore, by using fewer columns of coils 202, as described later, a force in the transport direction and a force in a direction different from the transport direction can be applied to the mover 101, thereby achieving transport control of the mover 101 and posture control of the mover 101.

[0058] In this manner, multiple coils 202 are attached along the direction of transporting mover 101. Multiple coils 202 are arranged at predetermined intervals in the X direction. Furthermore, each coil 202 is attached so that its central axis is oriented in the Y direction. It should be noted that coils 202 may be cored or coreless.

[0059] The plurality of coils 202 are configured to be current-controlled, for example, in units of three coils. The unit that controls the conduction of the coils 202 is referred to as a "coil unit 203." When current is conducted, the coils 202 generate electromagnetic force relative to the permanent magnets 103 of the mover 101, exerting force on the mover 101.

[0060] exist Figure 1A and Figure 1BIn the embodiment, permanent magnets 103a and 103d are each formed by a magnet group in which two permanent magnets are arranged in the Z direction. In contrast, each coil 202 is arranged so that the Z-direction centers of the two permanent magnets 103a and 103d match the Z-direction centers of the coil 202. Current conduction in the coil 202 facing the permanent magnets 103a and 103d generates a force in the Z direction toward the permanent magnets 103a and 103d.

[0061] Furthermore, permanent magnets 103b and 103c are formed of a magnet group of three permanent magnets arranged in the X direction. In contrast, current conduction in coils 202 facing permanent magnets 103b and 103c generates force in the X and Y directions toward permanent magnets 103b and 103c.

[0062] A plurality of linear encoders 204 are attached to the stator 201 in parallel with the X direction so as to be able to respectively face the linear scale 104 of the mover 101. Each of the linear encoders 204 can detect and output a relative position of the linear encoder 204 relative to the mover 101 by reading the linear scale 104 attached to the mover 101.

[0063] A plurality of Y sensors 205 are attached to the stator 201 parallel to the X direction so as to face the Y target 105 of the mover 101. Each of the Y sensors 205 can detect and output the relative distance between the Y sensor 205 and the Y target 105 attached to the mover 101 in the Y direction.

[0064] A plurality of Z sensors 206 are attached to the stator 201 in two rows parallel to the X direction so as to face the Z target 106 of the mover 101. Each of the Z sensors 206 can detect and output the relative distance between the Z sensor 206 and the Z target 106 attached to the mover 101 in the Z direction.

[0065] Next, we will use Figure 4 The control system for controlling the transportation system 1 according to the present embodiment will be further described. Figure 4 is a schematic diagram illustrating a control system 3 that controls the transportation system 1 according to the present embodiment.

[0066] like Figure 4 As shown, the control system 3 includes an integrated controller 301, a coil controller 302, and a sensor controller 304, and serves as a control device for controlling the transport system 1 including the mover 101 and the stator 201. The coil controller 302 is communicably connected to the integrated controller 301. In addition, the sensor controller 304 is communicably connected to the integrated controller 301.

[0067] A plurality of current controllers 303 are communicably connected to the coil controller 302. Each coil controller 302 and the plurality of current controllers 303 connected thereto are provided to a corresponding column in the two columns of the coils 202. The coil unit 203 is connected to each of the current controllers 303. The current controller 303 can control the current value of each of the coils 202 of the connected coil unit 203.

[0068] The coil controller 302 indicates a target current value to each of the connected current controllers 303. The current controller 303 controls the amount of current of the connected coil 202.

[0069] The coil 202 and the current controller 303 are attached on both sides in the X direction in which the mover 101 is transported.

[0070] The plurality of linear encoders 204 , the plurality of Y sensors 205 , and the plurality of Z sensors 206 are communicatively connected to the sensor controller 304 .

[0071] A plurality of linear encoders 204 are attached to the stator 201 at intervals such that one of the linear encoders 204 can reliably measure the position of one mover 101 during transport of the mover 101. Furthermore, a plurality of Y sensors 205 are attached to the stator 201 at intervals such that two of the Y sensors 205 can reliably measure the Y target 105 of one mover 101. Furthermore, a plurality of Z sensors 206 are attached to the stator 201 at intervals such that three of the Z sensors 206 in two columns can reliably measure the Z target 106 of one mover 101.

[0072] The integrated controller 301 determines the current command values ​​to be applied to the plurality of coils 202 based on the outputs from the linear encoder 204, the Y sensor 205, and the Z sensor 206, and transmits the determined current command values ​​to the coil controller 302. The coil controller 302 instructs the current controller 303 on the current values ​​described above based on the current command values ​​from the integrated controller 301. Thus, the integrated controller 301 functions as a control device that causes the mover 101 to be transported over the stator 201 in a contactless manner and controls the posture of the transported mover 101 relative to the six axes.

[0073] The following will be done by using Figure 5 A method for controlling the posture of the mover 101 executed by the integrated controller 301 will be described. Figure 5 1 is a schematic diagram illustrating a method for controlling the posture of the mover 101 in the transportation system 1 according to the present embodiment. Figure 5The figure shows an overview of the posture control method for the mover 101, focusing primarily on its data flow. The integrated controller 301 uses a mover position calculation function 401, a mover posture calculation function 402, a mover posture control function 403, and a coil current calculation function 404 to perform the processing described below. Thus, the integrated controller 301 controls the transport of the mover 101 while also controlling the posture of the mover 101 relative to the six axes. It should be noted that, as an alternative to the integrated controller 301, the coil controller 302 can be configured to perform the same processing as that performed by the integrated controller 301.

[0074] First, the mover position calculation function 401 calculates the positions and number of movers 101 above the stator 201 forming the transport path based on the measurement values ​​from the plurality of linear encoders 204 and the information about their attachment positions. Thus, the mover position calculation function 401 updates the mover position information (X) and number information in the mover information 406 (which is information about the movers 101). The mover position information (X) represents the position in the X direction, which is the transport direction of the movers 101 above the stator 201. The mover information 406 is prepared for each mover 101 above the stator 201, such as, for example Figure 5 As shown in the figure, POS-1, POS-2...

[0075] Next, the mover posture calculation function 402 identifies the Y sensor 205 and the Z sensor 206 of each of the measurable movers 101 based on the mover position information (X) in the mover information 406 updated by the mover position calculation function 401. Next, the mover posture calculation function 402 calculates posture information (Y, Z, Wx, Wy, Wz) (which is information about the posture of each mover 101) based on the values ​​output from the identified Y sensor 205 and Z sensor 206, and updates the mover information 406. The mover information 406 updated by the mover posture calculation function 402 includes the mover position information (X) and posture information (Y, Z, Wx, Wy, Wz).

[0076] Next, the mover attitude control function 403 calculates the applied force information 408 of each mover in the mover 101 based on the current mover information 406 and the attitude target value, wherein the current mover information 406 includes the mover position information (X) and attitude information (Y, Z, Wx, Wy, Wz). The applied force information 408 is information about the magnitude of the force to be applied to each mover in the mover 101. The applied force information 408 includes information about the three-axis force components (Tx, Ty, Tz) and the three-axis torque components (Twx, Twy, Twz) to be applied, which will be described later. Prepare the applied force information 408 for each mover 101 above the stator 201, such as Figure 5 As shown in the figure, TRQ-1, TRQ-2...

[0077] Next, the coil current calculation function 404 determines a current command value 409 applied to each coil 202 based on the applied force information 408 and the mover information 406 .

[0078] In this manner, integrated controller 301 determines current command value 409 by performing processing using mover position calculation function 401, mover posture calculation function 402, mover posture control function 403, and coil current calculation function 404. Integrated controller 301 transmits determined current command value 409 to coil controller 302.

[0079] Now we will use Figure 6 The processing performed by the mover position calculation function 401 is described. Figure 6 2 is a schematic diagram illustrating a process of calculating a function from a mover position.

[0080] exist Figure 6 , the reference point Oe is a position reference of the stator 201 to which the linear encoder 204 is attached. In addition, the reference point Os is a position reference of the linear scale 104 attached to the mover 101. Figure 6 The following case is illustrated: two movers 101a and 101b are transported as mover 101 and three linear encoders 204a, 204b, and 204c are arranged as linear encoders 204. Note that linear scale 104 is attached parallel to the X direction at the same position as each of movers 101a and 101b.

[0081] For example, a linear encoder 204c faces Figure 6 The linear scale 104 of the movable element 101b is shown. A linear encoder 204c reads the linear scale 104 of the movable element 101b and outputs the distance Pc. Furthermore, the position of the linear encoder 204c on the X-axis, with the origin being the reference point Oe, is represented by Sc. Therefore, the position Pos(101b) of the movable element 101b can be calculated using the following equation (1).

[0082] Pos(101b)=Sc–Pc…Equation (1)

[0083] For example, two linear encoders 204a and 204b face Figure 6 The linear scale 104 of the mover 101a is shown. The linear encoder 204a reads the linear scale 104 of the mover 101a and outputs the distance Pa. Furthermore, the position of the linear encoder 204a on the X-axis, whose origin is the reference point Oe, is represented by Sa. Therefore, based on the output of the linear encoder 204a, the position Pos(101a) of the mover 101a on the X-axis can be calculated using the following equation (2).

[0084] Pos(101a)=Sa–Pa…Equation (2)

[0085] Furthermore, linear encoder 204b reads linear scale 104 of mover 101b and outputs distance Pb. Furthermore, the position of linear encoder 204b on the X-axis, with the origin being reference point Oe, is represented by Sb. Therefore, based on the output of linear encoder 204b, the position of mover 101a on the X-axis, Pos(101a)′, can be calculated using the following equation (3).

[0086] Pos(101a)′=Sb–Pb…Equation (3)

[0087] Here, since each of the positions of the linear encoders 204a and 204b has been accurately measured in advance, the difference between the two values ​​Pos(101a) and Pos(101a)′ is sufficiently small. When the position difference of the mover 101 on the X-axis based on the outputs of the two linear encoders 204 is sufficiently small in this manner, the two linear encoders 204 can determine that the linear scale 104 is observing the same mover 101.

[0088] Note that when a plurality of linear encoders 204 face the same mover 101 , the position of the observed mover 101 can be uniquely determined by calculating the average value of the positions based on the outputs of the plurality of linear encoders 204 or the like.

[0089] The mover position calculation function 401 calculates and determines the position X of the mover 101 in the X direction as mover position information based on the output of the linear encoder 204 as described above.

[0090] Next, we will use Figure 7 、 Figure 8A and Figure 8B The processing performed by the mover posture calculation function 402 will be described.

[0091] Figure 7 The following situation is shown: the mover 101c is transported as the mover 101 and the Y sensors 205a and 205b are arranged as the Y sensors 205. The two Y sensors 205a and 205b face Figure 7 The Y target 105 of the illustrated mover 101c. When the relative distance values ​​output by the two Y sensors 205a and 205b are represented as Ya and Yb, respectively, and the interval between the Y sensors 205a and 205b is represented as Ly, the rotation amount Wz around the Z axis of the mover 101c is calculated by the following equation (4).

[0092] Wz=(Ya–Yb) / Ly…Equation (4)

[0093] Note that for a specific position of mover 101, three or more Y sensors 205 may face Y target 105. In this case, the tilt amount of Y target 105, that is, the rotation amount Wz around the Z axis, can be calculated using the least squares method.

[0094] In addition, Figure 8A and Figure 8B FIG. 4 illustrates a case where the mover 101d is transported as the mover 101 and the Z sensors 206a, 206b, and 206c are arranged as the Z sensor 206. The three Z sensors 206a, 206b, and 206c face Figure 8A and Figure 8B The Z target 106 of the illustrated mover 101d is shown. Here, the relative distance values ​​output by the three Z sensors 206a, 206b, and 206c are represented as Za, Zb, and Zc, respectively. Furthermore, the distance between the sensors in the X direction (i.e., the distance between Z sensors 206a and 206b) is represented as Lz1. Furthermore, the distance between the sensors in the Y direction (i.e., the distance between Z sensors 206a and 206c) is represented as Lz2. Next, the amount of rotation Wy around the Y axis and the amount of rotation Wx around the X axis can be calculated using equations (5a) and (5b), respectively.

[0095] Wy=(Zb–Za) / Lz1…Equation (5a)

[0096] Wx=(Zc–Za) / Lz2…Equation (5b)

[0097] The mover posture calculation function 402 may calculate the rotation amounts Wx, Wy, and Wz around the corresponding axes as the posture information on the mover 101 as described above.

[0098] Furthermore, the mover posture calculation function 402 may calculate the position Y in the Y direction and the position Z in the Z direction of the mover 101 as the posture information on the mover 101 in the following manner.

[0099] First, by using Figure 7 Describe the calculation of the position Y of the mover 101 in the Y direction. Figure 7 , the two Y sensors 205 covered by the mover 101c are Y sensors 205a and 205b, respectively. In addition, the measurement values ​​of the Y sensors 205a and 205b are expressed as Ya and Yb, respectively. In addition, the midpoint of the position of the Y sensor 205a and the position of the Y sensor 205b is expressed as Oe'. In addition, the position of the mover 101c obtained by equations (1) to (3) is expressed as Os', and the distance from Oe' to Os' is expressed as dX'. At this time, the position Y of the mover 101c in the Y direction can be calculated by approximation using the following equation.

[0100] Y=(Ya+Yb) / 2–Wz*dX′

[0101] Next, we will use Figure 8A and Figure 8B The calculation of the position Z of the mover 101 in the Z direction is described. The three Z sensors 206 covered by the mover 101d are respectively represented as Z sensors 206a, 206b and 206c. In addition, the measurement values ​​of the Z sensors 206a, 206b and 206c are respectively represented as Za, Zb and Zc. In addition, the X coordinate of the Z sensor 206a and the X coordinate of the Z sensor 206c are the same. In addition, the linear encoder 204 is located in the middle of the Z sensor 206a and the Z sensor 206c. In addition, the position X of the Z sensor 206a and the Z sensor 206c is represented as Oe". In addition, the distance from Oe" to the center Os" of the mover 101 is represented as dX". At this time, the position Z of the mover 101 in the Z direction can be calculated by approximation using the following equation.

[0102] Z=(Za+Zb) / 2–Wy*dX″

[0103] It should be noted that when both position Y and position Z have large rotation amounts Wz and Wy, respectively, the accuracy of the approximation can be further increased for the calculation.

[0104] Next, we will use Figure 1A and Figure 1B The processing performed by the coil current calculation function 404 is described below. It should be noted that Figure 1A and Figure 1B , in the symbols of forces used below, directions (force in the X direction, force in the Y direction, and force in the Z direction) are represented as x, y, and z, respectively, the R side which is the positive (+) Y side is represented as R, the L side which is the negative (–) Y side is represented as L, the positive (+) X side is represented as f, and the negative (–) X direction is represented as b.

[0105] Acts on Figure 1A and Figure 1B The force components on the permanent magnets 103 on the R and L sides of the graph are expressed as follows. The force acting on each permanent magnet 103 is the electromagnetic force applied to the permanent magnet 103 by the plurality of coils 202 to which current is applied. The permanent magnet 103 receives electromagnetic force in the X direction, which is the transport direction of the mover 101, and in the Y and Z directions, which are different from the X direction, from the plurality of coils 202 to which current is applied.

[0106] Each force acting on the permanent magnet 103 on the R side is as follows.

[0107] FzfR: Force acting in the Z direction on the permanent magnet 103aR on the R side

[0108] FxfR: Force acting in the X direction on the permanent magnet 103bR on the R side

[0109] FyfR: Force acting in the Y direction of the permanent magnet 103bR on the R side

[0110] FxbR: Force acting in the X direction on the permanent magnet 103cR on the R side

[0111] FybR: Force acting in the Y direction on the permanent magnet 103cR on the R side

[0112] FzbR: Force acting in the Z direction on the permanent magnet 103dR on the R side

[0113] Each force acting on the permanent magnet 103 on the L side is as follows.

[0114] FzfL: Force acting in the Z direction on the permanent magnet 103aL on the L side

[0115] FxfL: Force acting in the X direction of the permanent magnet 103bL on the L side

[0116] FyfL: Force acting in the Y direction of the permanent magnet 103bL on the L side

[0117] FxbL: Force acting in the X direction on the permanent magnet 103cL on the L side

[0118] FybL: Force acting in the Y direction on the permanent magnet 103cL on the L side

[0119] FzbL: Force acting in the Z direction on the permanent magnet 103dL on the L side

[0120] Furthermore, the force T applied to the mover 101 is expressed by the following equation (6). It should be noted that the values ​​Tx, Ty, and Tz are three-axis force components, which are the X-direction component, the Y-direction component, and the Z-direction component of the force, respectively. Furthermore, the values ​​Twx, Twy, and Twz are three-axis moment components, which are the moment component around the X-axis, the moment component around the Y-axis, and the moment component around the Z-axis, respectively. The transport system 1 according to this embodiment controls the transport of the mover 101 while controlling the posture of the mover 101 relative to the six axes by controlling these six-axis components of the force T (Tx, Ty, Tz, Twx, Twy, Twz).

[0121] T=(Tx,Ty,Tz,Twx,Twy,Twz)…Equation (6)

[0122] Therefore, the values ​​Tx, Ty, Tz, Twx, Twy, and Twz are calculated by the following equations (7a), (7b), (7c), (7d), (7e), and (7f), respectively.

[0123] Tx=FxfR+FxbR+FxfL+FxbL…Equation (7a)

[0124] Ty=FyfL+FyfR+FybL+FybR…Equation (7b)

[0125] Tz=FzbR+FzbL+FzfR+FzfL…Equation (7c)

[0126] Twx={(FzfL+FzbL)–(FzfR+FzbR)}*rx…Equation (7d)

[0127] Twy={(FzfL+FzfR)–(FzbL+FzbR)}*ry…Equation (7e)

[0128] Twz={(FyfL+FyfR)–(FybL+FybR)}*rz…Equation (7f)

[0129] At this time, the constraints expressed by the following equations (7g), (7h), (7i), and (7j) can be introduced for the forces acting on the permanent magnets 103. By introducing these constraints, the combination of the force components acting on the respective permanent magnets 103 can be uniquely determined to obtain a force T having predetermined six-axis components.

[0130] FxfR=FxbR=FxfL=FxbL…Equation (7g)

[0131] FyfL=FyfR…Equation (7h)

[0132] FybL=FybR…Equation (7i)

[0133] FzbR=FzbL…Equation (7j)

[0134] Next, a method by which the coil current calculation function 404 determines the amount of current applied to each coil 202 according to the force acting on each permanent magnet 103 will be described.

[0135] First, the following case will be described: a force in the Z direction is applied to permanent magnets 103a and 103d, where the polarity of the north pole and the south pole is arranged alternately in the Z direction. It should be noted that coil 202 is arranged so that its center in the Z direction is located at the center of permanent magnets 103a and 103d in the Z direction. This results in substantially no force acting on permanent magnets 103a and 103d in the X and Y directions.

[0136] The value X represents the position of the mover 101, the value j represents the number of one of the coils 202 arranged in a row, the magnitude of the force acting in the Z direction of the coil 202 (j) per unit current is represented as Fz (j, X), and the current applied to the coil 202 (j) is represented as i (j). It should be noted that the coil 202 (j) is the j-th coil 202. In this case, the current i (j) can be determined to satisfy the following equation (8). It should be noted that the following equation (8) is an equation for the permanent magnet 103dR. For the other permanent magnets 103aR, 103aL, and 103dL, each current to be applied to the coil 202 can be determined in the same manner.

[0137] ∑Fz(j,X)*i(j)=FzbR…Equation (8)

[0138] The coil current calculation function 404 can determine the current command value to be applied to the coil 202(j) as described above. The mover 101 obtains a levitation force to levitate in the Z direction, and its posture is controlled by the force applied to the mover 101 in the Z direction according to the current command value determined in this manner.

[0139] Note that when multiple coils 202 apply force to permanent magnet 103 , current is distributed according to the magnitude of the force applied by each coil 202 relative to the force per unit current, thereby uniquely determining the force acting on permanent magnet 103 .

[0140] In addition, if Figure 1A As shown, the permanent magnets 103 are symmetrically arranged on the L and R sides of the mover 101. With this symmetrical arrangement of the permanent magnets 103, the forces on the L and R sides can be used to offset multiple force components acting on the permanent magnets 103, such as the Wx force acting on the permanent magnets 103a and 103d, i.e., the torque component about the X axis. This enables more precise control of the posture of the mover 101.

[0141] Next, a method of applying force in the X direction and the Y direction independently to the permanent magnet 103 b , whose polarities of the N pole, S pole, and N pole are alternately arranged in the X direction, will be described. Figure 9 is a schematic diagram illustrating a method for independently applying forces to permanent magnet 103b in the X and Y directions. Coil current calculation function 404 determines the current command value applied to coil 202 so as to independently apply forces to permanent magnet 103b in the X and Y directions as follows. It should be noted that forces can also be independently applied to permanent magnet 103c in the X and Y directions in the same manner as for permanent magnet 103b.

[0142] The value X represents the position of mover 101, the value j represents the number of one of the coils 202 arranged in a row, and the magnitude of the force acting on coil 202(j) in the X and Y directions per unit current is represented as Fx(j, X) and Fy(j, X), respectively. Furthermore, the value of the current conducted in coil 202(j) is represented as i(j). Note that coil 202(j) is the jth coil 202.

[0143] Figure 9 The drawing in the upper portion of FIG. 1 is a view in which the X-axis is defined horizontally, the Y-axis is defined vertically, and six coils 202 facing the permanent magnet 103 bR are selected for illustration. Figure 9 The middle part of the figure is when viewed from the Z direction Figure 9 Numbers j between 1 and 6 are given to the coils 202 in the order arranged in the X direction, and each of the coils 202 is identified below by, for example, denoting one coil as coil 202 ( 1 ).

[0144] like Figure 9 As illustrated in the upper and middle parts of the drawings, the coils 202 are arranged at a pitch of a distance L. On the other hand, the permanent magnets 103 of the mover 101 are arranged at a pitch of a distance 3 / 2*L.

[0145] Figure 9 The lower part of the figure is a schematic diagram illustrating when a unit current is applied to Figure 9 The upper and middle portions of the diagram illustrate the magnitude of the force Fx in the X direction and the force Fy in the Y direction generated when each of the coils 202 is engaged.

[0146] To simplify the diagram, Figure 9 In the equation, the origin Oc of the position of the coil 202 in the X direction is defined as the midpoint of the coil 202(3) and the coil 202(4), and the center Om of the permanent magnet 103bR in the X direction is defined as the origin. Therefore, Figure 9 The figure shows the case where Oc matches Om, that is, the case where X=0.

[0147] At this time, for example, the force per unit current acting on coil 202(4) corresponds to the magnitude of Fx(4,0) in the X direction and Fy(4,0) in the Y direction. Furthermore, the force per unit current acting on coil 202(5) corresponds to the magnitude of Fx(5,0) in the X direction and Fy(5,0) in the Y direction.

[0148] Here, the current values ​​applied to coils 202(1) to 202(6) are assumed to be i(1) to i(6), respectively. Next, the magnitude FxfR of the force acting on the permanent magnet 103bR in the X direction and the magnitude FyfR of the force acting on the permanent magnet 103bR in the Y direction are generally expressed by the following equations (9) and (10), respectively.

[0149] FxfR=Fx(1,X)*i(1)+Fx(2,X)*i(2)+Fx(3,X)*i(3)+Fx(4,X)*i(4)+Fx(5,X)*i(5)+Fx(6,X)*i(6)...Equation (9)

[0150] FyfR=Fy(1,X)*i(1)+Fy(2,X)*i(2)+Fy(3,X)*i(3)+Fy(4,X)*i(4)+Fy(5,X)*i(5)+Fy(6,X)*i(6)...Equation (10)

[0151] By determining the current command values ​​so that current values ​​i(1) to i(6) satisfying the above equations (9) and (10) are applied to coils 202(1) to 202(6), respectively, forces can be applied to permanent magnet 103bR independently in the X direction and the Y direction. Coil current calculation function 404 can determine the current command values ​​applied to coil 202(j) as described above so as to apply forces to permanent magnet 103 independently in the X direction and the Y direction.

[0152] To simplify the diagram, Figure 9 In the illustrated case, the case considered is the following: among the coils 202(1) to 202(6), only coils 202(3), 202(4), and 202(5) are used for the permanent magnet 103bR, and the current values ​​of these three coils are controlled so that the sum thereof becomes zero. In this case, the force FxfR acting on the permanent magnet 103bR in the X direction and the force FyfR acting on the permanent magnet 103bR in the Y direction are expressed by the following equations (11) and (12), respectively.

[0153] FxfR=Fx(3,X)*i(3)+Fx(4,X)*i(4)+Fx(5,X)*i(5)…Equation (11)

[0154] FyfR=Fy(3,X)*i(3)+Fy(4,X)*i(4)+Fy(5,X)*i(5)…Equation (12)

[0155] Furthermore, the current values ​​of the coils 202 ( 1 ) to 202 ( 6 ) are set so as to satisfy the following equations (13) and (14).

[0156] i(3)+i(4)+i(5)=0...Equation (13)

[0157] i(1)=i(2)=i(6)=0…Equation (14)

[0158] Therefore, when the magnitude of the force (FxfR, FyfR) required for the permanent magnet 103bR is determined, the current values ​​i(1), i(2), i(3), i(4), i(5), and i(6) are uniquely determined. According to the current command value determined in this manner, force is applied to the mover 101 in the X direction and the Y direction. By receiving the force applied to the mover 101 in the X direction, the mover 101 obtains a propulsion force for movement in the X direction and moves in the X direction. In addition, according to the current command value determined in this manner, the posture of the mover 101 is controlled by the force applied to the mover 101 in the X direction and the Y direction.

[0159] In this manner, the integrated controller 301 controls the respective six-axis components of the force applied to the mover 101 by controlling the currents applied to the plurality of coils 202 .

[0160] It should be noted that when the center Oc of coil 202 moves relative to the center Om of permanent magnet 103bR due to the transport of mover 101, that is, when X≠0, the coil 202 corresponding to the position after the movement can be selected. In addition, the same calculation as described above can be performed based on the force per unit current generated in coil 202.

[0161] As described above, the integrated controller 301 controls the contactless transport of the mover 101 above the stator 201 while also controlling the posture of the mover 101 above the stator 201 relative to the six axes by controlling and determining the current command values ​​applied to the multiple coils 202. In other words, the integrated controller 301 functions as a transport control unit that controls the transport of the mover 101 and controls the contactless transport of the mover 101 above the stator 201 by controlling the electromagnetic force applied by the permanent magnets 103 from the multiple coils 202. Furthermore, the integrated controller 301 functions as a posture control unit that controls the posture of the mover 101 and the posture of the mover 101 above the stator 201 relative to the six axes. It should be noted that all or part of the functions of the integrated controller 301 as a control device can be replaced with the coil controller 302 or other control devices.

[0162] As discussed above, according to this embodiment, six-axis forces of three-axis force components (Tx, Ty, Tz) and three-axis moment components (Twx, Twy, Twz) can be applied to the mover 101 by using a plurality of coils 202 arranged in two columns. Thus, the transport of the mover 101 can be controlled while simultaneously controlling the posture of the mover 101 relative to the six axes. According to this embodiment, by using coils 202 arranged in two columns, where the number of columns is smaller than the number of six-axis force components as variables to be controlled, the transport of the mover 101 can be controlled while simultaneously controlling the posture of the mover 101 relative to the six axes.

[0163] Therefore, according to this embodiment, since the number of coil 202 columns can be smaller, the mover 101 can be transported in a contactless manner while the posture of the mover 101 is controlled without causing an increase in the size or complexity of the system. In addition, according to this embodiment, since the number of coil 202 columns can be smaller, an inexpensive and compact magnetic levitation type transportation system can be constructed.

[0164] Furthermore, according to this embodiment, since permanent magnets 103 are arranged on the side of mover 101, good access to workpiece 102 is achieved. Thus, processing operations can be performed on workpiece 102 on mover 101 using highly flexible processing equipment.

[0165] Second embodiment

[0166] will be used by Figure 10 and Figure 11 A second embodiment of the present invention will be described. Figure 10 is a schematic diagram illustrating the mover 101 according to the present embodiment. Figure 11 1 is a schematic diagram illustrating a mover 101 and a stator 201 according to the present embodiment. Note that components similar to those in the above-described first embodiment are labeled with the same reference numerals, and descriptions thereof will be omitted or simplified.

[0167] The basic configuration of the mover 101 according to the present embodiment is substantially the same as that according to the first embodiment. The mover 101 according to the present embodiment is different from the configuration according to the first embodiment in the attachment form of the permanent magnet 103 .

[0168] Figure 10 1 is a diagram of the mover 101 according to the present embodiment when viewed from the Y direction. Figure 10 The arrangement of the permanent magnets 103 on the side surface on the R side of the mover 101 according to the present embodiment is illustrated.

[0169] like Figure 10 As shown, different from Figure 1BIn the illustrated first embodiment, permanent magnets 103bR and 103cR are attached to the mover 101 according to this embodiment at positions rx2 away from the center of the mover 101 in the Z direction. Permanent magnet 103b is attached to the bottom side of the mover 101 at a position rx2 away from the center of the mover 101. On the other hand, permanent magnet 103c is attached to the top side of the mover 101 at a position rx2 away from the center of the mover 101.

[0170] Figure 11 1 is a diagram of the mover 101 and the stator 201 according to the present embodiment when viewed from the X direction. Figure 11 The left half of Figure 10 Section (A) taken along line (A)-(A). Figure 11 The right half of Figure 10 Section (B) taken along line (B)-(B).

[0171] like Figure 11 As shown, in the mover 101 according to the present embodiment, the permanent magnet 103 is attached to one side surface, specifically, only to the side surface on the R side of the mover 101, unlike Figure 2 The illustrated case is that of the first embodiment.

[0172] Unlike the first embodiment in which the plurality of coils 202 are arranged in two rows, in association with the arrangement in which the permanent magnets 103 are attached only to one side surface of the mover 101, the plurality of coils 202 are arranged in a single row parallel to the X direction in the stator 201 according to this embodiment. That is, the plurality of coils 202 in the stator 201 according to this embodiment are arranged and attached in a single row parallel to the X direction so as to be able to face the permanent magnets 103aR, 103bR, 103cR, and 103dR on the side surface on the R side (i.e., one side of the mover 101).

[0173] In the case of the mover 101 according to the present embodiment, the corresponding components indicated in equation (6) of the force T applied to the mover 101 are expressed by the following equations (15a), (15b), (15c), (15d), (15e) and (15f).

[0174] Tx=FxfR+FxbR…Equation (15a)

[0175] Ty=FyfR+FybR…Equation (15b)

[0176] Tz=FzbR+FzfR…Equation (15c)

[0177] Twx=(FybR–FyfR)*rx2…Equation (15d)

[0178] Twy=(FzfR–FzbR)*ry…Equation (15e)

[0179] Twz=(FyfR–FybR)*rz…Equation (15f)

[0180] Therefore, even when the permanent magnet 103 is arranged on the R side, i.e., only on one side, six-axis forces of three-axis force components (Tx, Ty, Tz) and three-axis torque components (Twx, Twy, Twz) can be applied to the mover 101 by using multiple coils 202 arranged in one column.

[0181] As described above, according to this embodiment, six-axis forces, including three-axis force components (Tx, Ty, Tz) and three-axis moment components (Twx, Twy, Twz), can be applied to the mover 101 using a plurality of coils 202 arranged in a single row. This allows the movement of the mover 101 to be controlled while simultaneously controlling its posture relative to the six axes. According to this embodiment, by using a single row of coils 202, where the number of rows is smaller than the number of six-axis force components as variables to be controlled, the movement of the mover 101 can be controlled while simultaneously controlling its posture relative to the six axes.

[0182] Therefore, according to this embodiment, since the number of coils 202 columns can be smaller, the mover 101 can be transported in a contactless manner while the posture of the mover 101 is controlled without increasing the size or complexity of the system. In addition, according to this embodiment, since the number of coils 202 columns can be smaller, a more inexpensive and compact magnetic levitation type transportation system can be constructed.

[0183] It should be noted that although the above description has been made of a case where the permanent magnet 103 is arranged on the R side (i.e., only one of the side surfaces on the R side and the L side), the present invention is not limited thereto. Contrary to the above case, the permanent magnet 103 may be arranged on the L side (i.e., only one of the side surfaces on the R side and the L side).

[0184] Third embodiment

[0185] will be used by Figure 12 and Figure 13 A third embodiment of the present invention will be described. Figure 12 2 is a schematic diagram illustrating the mover 101 and the stator 201 according to the present embodiment. Figure 13 1 is a schematic diagram illustrating a mover 101 according to the present embodiment. Note that components similar to those in the above-described first and second embodiments are labeled with the same reference numerals, and descriptions thereof will be omitted or simplified.

[0186] The basic configuration of the mover 101 according to the present embodiment is substantially the same as that according to the first embodiment. The mover 101 according to the present embodiment differs from the configurations according to the first and second embodiments in the attachment form of the permanent magnet 103 .

[0187] Figure 12 1 is a diagram of the mover 101 and the stator 201 according to the present embodiment when viewed from the X direction. Figure 12 As shown, different from Figure 2 In the illustrated embodiment, the permanent magnets 103 are arranged parallel to the X direction of the mover 101 and attached to the top surface. The permanent magnets 103 are attached to a yoke 107 provided on the top surface of the mover 101.

[0188] Figure 13 1 is a diagram of the mover 101 according to the present embodiment when viewed from the Z direction. Figure 13 The arrangement of the permanent magnets 103 is shown in a plan view of the mover 101 according to this embodiment.

[0189] like Figure 13 As shown, permanent magnets 103aR, 103bR, 103cR, and 103dR are arranged in a plurality of portions on the R side on the top surface of the mover 101. The permanent magnets 103aR, 103bR, 103cR, and 103dR are respectively arranged at a plurality of positions on the R side at a distance rx3 in the Y direction from the origin O which is the center of the mover 101.

[0190] Furthermore, permanent magnets 103aL, 103bL, 103cL, and 103dL are arranged in a plurality of portions on the L side on the top surface of mover 101. Permanent magnets 103aL, 103bL, 103cL, and 103dL are arranged at a plurality of positions a distance rx3 from origin O on the L side in the Y direction.

[0191] The permanent magnets 103aR, 103bR, 103cR, and 103dR are arranged at a plurality of portions on the R side of the top surface of the mover 101 in substantially the same manner as the arrangement on the side surface on the R side of the mover 101 according to the first embodiment. Furthermore, the permanent magnets 103aL, 103bL, 103cL, and 103dL are arranged in a plurality of portions on the L side of the top surface of the mover 101 in substantially the same manner as the arrangement on the side surface on the L side of the mover 101 according to the first embodiment.

[0192] The permanent magnets 103a and 103d are respectively attached at positions a distance rz3 on one side and the other side in the X direction from the origin O. The permanent magnets 103c and 103b are respectively attached at positions a distance ry3 on one side and the other side in the X direction from the origin O.

[0193] On the top surface of the mover 101 , the center portion between the R-side portion and the L-side portion where the permanent magnets 103 are arranged as described above serves as a portion on which the workpiece 102 to be transported is placed.

[0194] On the other hand, Figure 12 As shown, a plurality of coils 202 are attached to the stator 201 so as to be located above the top surface of the mover 101. The plurality of coils 202 are arranged in two rows parallel to the X direction so as to be able to face downwardly toward the permanent magnets 103 on both the R and L sides of the top surface of the mover 101 and are attached to the stator 201. The plurality of coils 202 on the R side are arranged in a row parallel to the X direction so as to be able to face downwardly toward the permanent magnets 103aR, 103bR, 103cR, and 103dR on the R side of the mover 101. The plurality of coils 202 on the L side are arranged in a row parallel to the X direction so as to be able to face downwardly toward the permanent magnets 103aL, 103bL, 103cL, and 103dL on the L side of the mover 101.

[0195] When the mover 101 is according to the present embodiment, the corresponding components indicated in equation (6) of the force T applied to the mover 101 are expressed by the following equations (16a), (16b), (16c), (16d), (16e) and (16f).

[0196] Tx=FxfR+FxbR+FxfL+FxbL…Equation (16a)

[0197] Ty=FyfL+FyfR+FybL+FybR…Equation (16b)

[0198] Tz=FzbR+FzbL+FzfR+FzfL…Equation (16c)

[0199] Twx={(FzfL+FzbL)–(FzfR+FzbR)}*rx3…Equation (16d)

[0200] Twy={(FzfL+FzfR)–(FzbL+FzbR)}*ry3…Equation (16e)

[0201] Twz={(FybL+FybR)–(FyfL+FyfR)}*rz3…Equation (16f)

[0202] At this time, the constraints expressed by the following equations (16g), (16h), (16i), and (16j) can be introduced for the forces acting on the permanent magnets 103. By introducing these constraints, the combination of the force components acting on the respective permanent magnets 103 can be uniquely determined to obtain a force T having predetermined six-axis components.

[0203] FxfR=FxbR=FxfL=FxbL…Equation (16g)

[0204] FyfL=FyfR…Equation (16h)

[0205] FybL=FybR…Equation (16i)

[0206] FzbR=FzbL…Equation (16j)

[0207] Therefore, even when the permanent magnet 103 is arranged on the top surface, six-axis forces of three-axis force components (Tx, Ty, Tz) and three-axis moment components (Twx, Twy, Twz) can be applied to the mover 101 by using the plurality of coils 202 arranged in two columns.

[0208] As described above, according to this embodiment, six-axis forces, including three-axis force components (Tx, Ty, Tz) and three-axis moment components (Twx, Twy, Twz), can be applied to the mover 101 using a plurality of coils 202 arranged in two columns. This allows the movement of the mover 101 to be controlled while simultaneously controlling its posture relative to the six axes. According to this embodiment, the movement of the mover 101 can be controlled while simultaneously controlling its posture relative to the six axes using two columns of coils 202, the number of which is smaller than the number of six-axis force components to be controlled.

[0209] Therefore, according to this embodiment, since the number of columns of the coils 202 may be smaller, the mover 101 can be transported contactlessly while the posture of the mover 101 is controlled without causing an increase in the size or complexity of the system.

[0210] Furthermore, in this embodiment, the coil 202 may be further formed to include an iron core. This allows a strong attractive force to act between the iron core of the coil 202 and the permanent magnet 103, thereby helping to levitate the mover 101. Specifically, the coil 202 including an iron core is preferred when the mover 101 or the workpiece 102 placed on the mover 101 is heavy. It should be noted that the iron core of the coil 202 may be any iron core as long as it induces an attractive force with respect to at least one of the permanent magnets 103a, 103b, 103c, and 103d.

[0211] It should be noted that various modified examples can be adopted for the mover 101 according to the third embodiment described above. The mover 101 according to first to fourth modified examples of the third embodiment described above will be described below.

[0212] First modified example

[0213] will be used by Figure 14A A mover 101 according to a first modified example is described. Figure 14Ais a schematic diagram illustrating a mover 101 according to the present modified example.

[0214] The basic structure of the mover 101 according to this modified example is the same as that of the above Figure 12 and Figure 13 The basic configuration of the illustrated third embodiment is substantially the same. The mover 101 according to the present modified example is different from the configuration according to the third embodiment in the attachment form of the permanent magnet 103 .

[0215] Figure 14A 1 is a diagram of the mover 101 according to the present modified example when viewed from the Z direction. Figure 14A The arrangement of the permanent magnets 103 on the top surface of the mover 101 according to the present modified example is illustrated.

[0216] like Figure 14A As shown, permanent magnets 103bR, 103cR, and 103eR are arranged in a plurality of portions on the R side on the top surface of the mover 101. The permanent magnets 103bR, 103cR, and 103eR are respectively arranged at a plurality of positions on the R side in the Y direction that are a distance rx3 from a center line extending in the X direction through an origin O that is the center of the mover 101.

[0217] Furthermore, permanent magnets 103bL, 103cL, and 103eL are arranged in a plurality of portions on the L side on the top surface of the mover 101. The permanent magnets 103bL, 103cL, and 103eL are respectively arranged at a plurality of positions on the L side in the Y direction at a distance rx3 from a center line extending through the origin O in the X direction.

[0218] The permanent magnets 103bR and 103cR are arranged in accordance with Figure 13 The permanent magnets 103bL and 103cL are arranged in a plurality of portions on the R side of the top surface of the mover 101 in substantially the same manner as in the arrangement on the top surface on the R side of the mover 101 of the third embodiment shown. Figure 13 The arrangement on the top surface on the L side of the mover 101 of the illustrated third embodiment is arranged in a plurality of portions on the L side on the top surface of the mover 101 in substantially the same manner.

[0219] In this modified example, no Figure 13 The permanent magnets 103aR, 103dR, 103aL, and 103dL are shown in FIG. Instead, the permanent magnet 103eR is arranged between the permanent magnets 103bR and 103cR. In addition, in this modified example, the permanent magnet 103eL is arranged between the permanent magnets 103bL and 103cL. These features make this modified example different from Figure 13The illustrated third embodiment has magnet arrangements of the permanent magnets 103eR and 103eL that are similar to the magnet arrangements of the permanent magnets 103aR and 103aL, respectively.

[0220] When the mover 101 according to the present modified example, the corresponding components indicated in equation (6) of the force T applied to the mover 101 are expressed by the following equations (17a), (17b), (17c), (17d), (17e) and (17f).

[0221] Tx=FxfL+FxbL+FxfR+FxbR…Equation (17a)

[0222] Ty=FycL+FycR…Equation (17b)

[0223] Tz=FzfL+FzbL+FzfR+FzbR…Equation (17c)

[0224] Twx={(FzfL+FzbL)–(FzfR+FzbR)}*rx3…Equation (17d)

[0225] Twy={(FzfL+FzfR)–(FzbL+FzbR)}*ry3…Equation (17e)

[0226] Twz={(FxfR+FxbR)–(FxfL+FxbL)}*rx3…Equation (17f)

[0227] According to this modified example, the number of permanent magnets 103 arranged on the mover 101 can be reduced. It should be noted that although the force in the Z direction cannot be Figure 14A The illustrated permanent magnets 103eR and 103eL are controlled, but the controllability toward the Z direction can be improved by increasing the number of permanent magnets arranged and disposed in the X direction.

[0228] Second modified example

[0229] will be used by Figure 14B A mover 101 according to a second modified example is described. Figure 14B is a schematic diagram illustrating a mover 101 according to the present modified example.

[0230] The basic structure of the mover 101 according to this modified example is the same as that according to the above Figure 14A The configuration of the mover 101 of the illustrated first modified example is basically the same. The mover 101 according to the present modified example is different from the configuration of the first modified example in that one of the permanent magnets 103eR and 103eL is not arranged.

[0231] Figure 14B1 is a diagram of the mover 101 according to the present modified example when viewed from the Z direction. Figure 14B The arrangement of the permanent magnets 103 on the top surface of the mover 101 according to the present modified example is illustrated.

[0232] like Figure 14B As shown, in this modified example, the permanent magnet 103eL is arranged between the permanent magnets 103bL and 103cL in the same manner as in the first modified example. On the other hand, in this modified example, unlike the first modified example, the permanent magnet 103eR is not arranged between the permanent magnets 103bR and 103cR.

[0233] As discussed above, in this modified example, only the permanent magnet 103eL of the permanent magnets 103eR and 103eL according to the first modified example is arranged. Figure 14B In the illustrated case, only the permanent magnet 103eR may be arranged among the permanent magnets 103eR and 103eL.

[0234] In the case of the mover 101 of this modified example, the corresponding components indicated in equation (6) of the force T applied to the mover 101, in addition to the Y-direction force component Ty, are expressed by equations (17a), (17c), (17d), (17e), and (17f) described above. In the case of this modified example, the Y-direction force component Ty is expressed by the following equation (18b).

[0235] Ty=FycL…Equation (18b)

[0236] According to this modified example, the number of permanent magnets 103 arranged on the mover 101 can be further reduced compared to the first modified example. Also in this modified example, by controlling Ty and Twz, six-axis components including the force in the Y direction can be controlled.

[0237] Third Modified Example

[0238] will be used by Figure 14C A mover 101 according to a third modified example is described. Figure 14C is a schematic diagram illustrating a mover 101 according to the present modified example.

[0239] The basic structure of the mover 101 according to this modified example is the same as that of the above Figure 12 and Figure 13 The basic configuration of the illustrated third embodiment is substantially the same. The mover 101 according to the present modified example is different from the configuration according to the third embodiment in the attachment form of the permanent magnet 103 .

[0240] Figure 14C 1 is a diagram of the mover 101 according to the present modified example when viewed from the Z direction. Figure 14C The arrangement of the permanent magnets 103 on the top surface of the mover 101 according to the present modified example is illustrated.

[0241] like Figure 14C As shown, permanent magnets 103bR, 103cR, and 103dR are arranged in a plurality of portions on the R side on the top surface of the mover 101. The permanent magnets 103bR, 103cR, and 103dR are respectively arranged at a plurality of positions on the R side in the Y direction at a distance rx3 from a center line extending in the X direction through an origin O that is the center of the mover 101.

[0242] Furthermore, permanent magnets 103aL, 103bL, and 103cL are arranged in a plurality of portions on the L side on the top surface of the mover 101. The permanent magnets 103aL, 103bL, and 103cL are respectively arranged at a plurality of positions on the L side in the Y direction at a distance rx3 from a center line extending through the origin O in the X direction.

[0243] The permanent magnets 103bR, 103cR and 103dR are arranged in accordance with Figure 13 The arrangement on the top surface on the R side of the mover 101 of the illustrated third embodiment is basically arranged in a plurality of portions on the R side on the top surface of the mover 101. In this modified example, different from Figure 13 In the illustrated third embodiment, the permanent magnet 103 aR is not arranged.

[0244] In addition, the permanent magnets 103aL, 103bL and 103cL are arranged in accordance with Figure 13 The arrangement on the top surface on the L side of the mover 101 of the illustrated third embodiment is basically arranged in a plurality of portions on the L side of the top surface of the mover 101. In this modified example, different from Figure 13 In the illustrated third embodiment, no permanent magnet 103dL is arranged.

[0245] It should be noted that, compared with the present modified example, the permanent magnets 103 aR and 103 dL may be arranged, and the permanent magnets 103 dR and 103 aL may not be arranged.

[0246] In the second modified example described above, when the mover 101 passes through an area where the coil 202 may not be arranged facing the permanent magnet 103eL, a situation in which the Y-direction force component Ty cannot be applied may occur. In contrast, in this modified example, when the coil 202 is arranged so as to face at least one of the permanent magnets 103dR and 103aL, the Y-direction force component Ty can be applied. Thus, in this modified example, the six-axis component including the Y-direction force can be controlled more reliably than in the second modified example. That is, this modified example can counteract the situation in which no force can be applied in the Y direction in the second modified example.

[0247] In the case of the mover 101 according to this modified example, in addition to the Y-direction force component Ty and the moment component Twz about the Z axis, the corresponding components indicated in equation (6) of the force T applied to the mover 101 are expressed by equations (17a), (17c), (17d), and (17e) described above. In the case of this modified example, the Y-direction force component Ty and the moment component Twz about the Z axis are expressed by the following equations (19b-1) and (19f-1) or equations (19b-2) and (19f-2), depending on which of the permanent magnets 103dR or 103aL faces the coil 202.

[0248] First, when the permanent magnet 103dR does not face the coil 202 and the permanent magnet 103aL faces the coil 202, the Y-direction force component Ty and the moment component Twz about the Z axis are expressed by the following equations (19b-1) and (19f-1).

[0249] Ty=FyfL…Equation (19b-1)

[0250] Twz={(FxfR+FxbR)–(FxfL+FxbL)}*rx3–FyfL*rz3…Equation (19f-1)

[0251] On the other hand, when the permanent magnet 103aL does not face the coil 202 and the permanent magnet 103dR faces the coil 202, the Y-direction force component Ty and the moment component Twz about the Z axis are expressed by the following equations (19b-2) and (19f-2).

[0252] Ty=FybR…Equation (19b-2)

[0253] Twz={(FxfR+FxbR)–(FxfL+FxbL)}*rx3+FybR*rz3…Equation (19f-2)

[0254] It should be noted that when the permanent magnets 103aL and 103dR face the coil 202, the Y-direction force component Ty and the moment component Twz about the Z axis are expressed by the following equations (19b-3) and (19f-3).

[0255] Ty=FyfL+FybR…Equation (19b-3)

[0256] Twz={(FxfR+FxbR)–(FxfL+FxbL)}*rx3+(FybR–FyfL)*rz3…Equation (19f-3)

[0257] Fourth modified example

[0258] will be used by Figure 14D A mover 101 according to a fourth modified example is described. Figure 14D is a schematic diagram illustrating a mover 101 according to the present modified example.

[0259] The basic structure of the mover 101 according to this modified example is the same as that of the above Figure 12 and Figure 13 The basic configuration of the illustrated third embodiment is substantially the same. The mover 101 according to the present modified example is different from the configuration according to the third embodiment in the attachment form of the permanent magnet 103 .

[0260] Figure 14D 1 is a diagram of the mover 101 according to the present modified example when viewed from the Z direction. Figure 14D The arrangement of the permanent magnets 103 on the top surface of the mover 101 according to the present modified example is illustrated.

[0261] like Figure 14D As shown, permanent magnets 103bR and 103cR are arranged in a plurality of portions on the R side on the top surface of the mover 101. The permanent magnets 103bR and 103cR are respectively arranged at a plurality of positions on the R side in the Y direction at a distance rx3 from a center line extending in the X direction through an origin O that is the center of the mover 101.

[0262] In the present modified embodiment, a plurality of permanent magnets 103giR (where i=1, 2, 3, 4, 5) similar to the permanent magnet 103aR are arranged and disposed at constant intervals in the X direction in a plurality of portions on the R side of the top surface of the mover 101 outside the permanent magnets 103bR and 103cR. The yoke 107 to which the plurality of permanent magnets 103giR are attached is separate from the yoke 107 to which the permanent magnets 103bR and 103cR are attached. The plurality of permanent magnets 103giR is not limited to Figure 14D Five are shown, and the number of the permanent magnets 103giR may be any number as long as it is plural.

[0263] Furthermore, permanent magnets 103bL and 103cL are arranged in a plurality of portions on the L side on the top surface of mover 101. Permanent magnets 103bL and 103cL are respectively arranged at a plurality of positions on the L side in the Y direction at a distance rx3 from a center line extending through origin O in the X direction.

[0264] In the present modified embodiment, a plurality of permanent magnets 103giL (where i=1, 2, 3, 4, 5) similar to the permanent magnet 103aL are arranged and disposed at constant intervals in the X direction in a plurality of portions on the L side of the top surface of the mover 101 outside the permanent magnets 103bL and 103cL. The yoke 107 to which the plurality of permanent magnets 103giL are attached is separate from the yoke 107 to which the permanent magnets 103bL and 103cL are attached. The plurality of permanent magnets 103giL is not limited to Figure 14D Five are shown, and the number of permanent magnets 103giL may be any number as long as it is plural.

[0265] As discussed above, the yoke 107 to which permanent magnets 103a and 103d, formed by a group of permanent magnets arranged in the Y direction, are attached is separate from the yoke 107 to which permanent magnets 103b and 103c, formed by a group of permanent magnets arranged in the X direction, are attached. This reduces or prevents unnecessary interference of magnetic flux and improves controllability. However, the yoke 107 can be formed integrally rather than separately. In this case, the mover 101 can be constructed at a lower cost than when the yoke 107 is separate.

[0266] It should be noted that also Figure 13 In the illustrated third embodiment, the yokes 107 attached to the permanent magnets 103 formed by the magnet groups with permanent magnets arranged in different directions can be separated from each other in the same manner as in the present modified example. In this case, the yoke 107 attached to the permanent magnets 103a and 103d formed by the magnet group with permanent magnets arranged in the Y direction can be separated from the yoke 107 attached to the permanent magnets 103b and 103c formed by the magnet group with permanent magnets arranged in the X direction.

[0267] In addition, also in Figure 1B The first embodiment shown in the figure, Figure 10 The second embodiment shown and Figure 15 In the illustrated fourth embodiment, the yokes 107 attached to the permanent magnets 103 formed by magnet groups whose permanent magnets are arranged in different directions can be separated from each other in the same manner as in the present modified example. In this case, the yoke 107 attached to the permanent magnets 103a and 103d formed by the magnet group whose permanent magnets are arranged in the Z direction can be separated from the yoke 107 attached to the permanent magnets 103b and 103c formed by the magnet group whose permanent magnets are arranged in the X direction.

[0268] In this modified example, the force acting in the Y direction of the permanent magnet 103giR is represented by FyiR, and the force acting in the Y direction of the permanent magnet 103giL is represented by FyiL. Then, the Y-direction force component Ty corresponds to the sum of the force components acting on the respective permanent magnets 103giR and 103giL. That is, in the case of the mover 101 according to this modified example, the Y-direction force component Ty is expressed by the following equation (20b).

[0269] Ty = ∑FyiR + ∑FyiL ... Equation (20b)

[0270] According to the present modified example, by adjusting the number of permanent magnets 103giR and 103giL to be arranged, the Y-direction force component Ty can be increased or decreased.

[0271] Other modified examples

[0272] For the mover 101 according to the third embodiment described above, further other modified examples are possible. For example, in order to further enhance the transport capacity in the X-axis direction, the number of permanent magnets may be greater than the number of magnets in the four groups of permanent magnets 103bR, 103cR, 103bL, and 103cL. Specifically, many permanent magnets similar to permanent magnet 103bR can be arranged horizontally in one or more columns on multiple parts on the R side of the top surface of the mover 101. Similarly, many permanent magnets similar to permanent magnet 103bL can be arranged horizontally in one or more columns on multiple parts on the L side of the top surface of the mover 101.

[0273] Fourth embodiment

[0274] will be used by Figure 15 and Figure 16 A fourth embodiment of the present invention will be described. Figure 15 and Figure 16 1 is a schematic diagram illustrating a mover 101 and a stator 201 according to the present embodiment. Note that components similar to those in the above-described first to third embodiments are denoted by the same reference numerals, and descriptions thereof will be omitted or simplified.

[0275] The basic configuration of the mover 101 according to the present embodiment is substantially the same as that according to the first embodiment. The mover 101 according to the present embodiment is different from the configurations according to the first to third embodiments in the attachment form of the permanent magnet 103 .

[0276] Figure 15 The figure in the upper part of FIG is a view of the mover 101 and the stator 201 according to the present embodiment when viewed from the Z+ side in the Z direction. It should be noted that the workpiece 102 is Figure 15 Not shown in the figure. Figure 15The drawing in the middle portion of FIG. 1 is a view of the side surface on the R side of the mover 101 according to the present embodiment when viewed from the R side in the Y direction. Figure 15 The figure in the lower part of is a view of the side surface on the L side of the mover 101 according to the present embodiment when viewed from the L side in the Y direction. It should be noted that Figure 15 The figure in the lower part of shows an upside-down view on the side on the L side of the mover 101 for better representation.

[0277] also, Figure 16 1 is a diagram of the mover 101 and the stator 201 according to the present embodiment when viewed from the X direction. Figure 16 The left part of the diagram is along Figure 15 A cross-sectional view (A) taken along line (A)-(A) in the middle portion of the drawing. Figure 16 The right part of the diagram is along Figure 15 A sectional view (B) taken along line (B)-(B) in the middle portion of the figure.

[0278] like Figure 15 As shown, unlike the first embodiment, the permanent magnets 103cR and 103dR are attached to the side surface on the R side of the mover 101. That is, in this embodiment, the permanent magnets 103aR and 103bR are not attached to the side surface on the R side of the mover 101.

[0279] The permanent magnets 103cR and 103dR are respectively attached to positions ry1 away from the origin O in the Y direction, which is the center of the mover 101. Furthermore, the permanent magnet 103dR is attached to a position rx1 away from the origin O on the other side in the X direction. Furthermore, the permanent magnet 103cR is attached to a position rx2 away from the origin O on the other side in the X direction.

[0280] Furthermore, unlike the first embodiment, the permanent magnets 103aL and 103bL are attached to the side surfaces on the L side of the mover 101. That is, in this embodiment, the permanent magnets 103cL and 103dL are not attached to the side surfaces on the L side of the mover 101.

[0281] The permanent magnets 103aL and 103bL are respectively attached to positions ry1 away from the origin O in the Y direction. Furthermore, the permanent magnet 103aL is attached to a position rx1 away on one side in the X direction from the origin O. Furthermore, the permanent magnet 103bL is attached to a position rx2 away on one side in the X direction from the origin O.

[0282] Furthermore, permanent magnets 103cR and 103dR, as well as permanent magnets 103aL and 103bL, are attached to mover 101 so that their positions in the Z direction are shifted in the Z direction and arranged to be different from each other. Specifically, permanent magnets 103cR and 103dR are attached to positions on the upper side of mover 101 a distance rz1 from origin O in the Z direction. Furthermore, permanent magnets 103aL and 103bL are attached to positions on the bottom side of mover 101 a distance rz1 from origin O in the Z direction.

[0283] In this manner, in the present embodiment, the permanent magnets 103 are attached to the mover 101 such that the permanent magnets 103 are asymmetrically shifted and arranged in the Z direction on the side surfaces on the R side and the L side.

[0284] The positions of the columns of coils 202 in the Z direction are as follows: Figure 16 The difference between the R side and the L side of the illustrated stator 201 is related to the fact that the positions of the permanent magnets 103 in the Z direction differ between the side surfaces on the R side and the L side of the mover 101, as described above. That is, the row of coils 202R, which are the coils 202 on the R side, is arranged parallel to the X direction so as to face the permanent magnets 103cR and 103dR on the side surface on the R side of the mover 101. On the other hand, the row of coils 202L, which are the coils 202 on the L side, is arranged parallel to the X direction so as to face the permanent magnets 103aL and 103bL on the side surface on the L side of the mover 101.

[0285] In the case of the mover 101 according to the present embodiment, the corresponding components indicated in equation (6) of the force T applied to the mover 101 are expressed by the following equations (21a), (21b), (21c), (21d), (21e) and (21f).

[0286] Tx=FxbR+FxfL…Equation (21a)

[0287] Ty=FyfL+FybR…Equation (21b)

[0288] Tz=FzbR+FzfL…Equation (21c)

[0289] Twx=(FzfL–FzbR)*ry1+(FybR–FyfL)*rz1…Equation (21d)

[0290] Twy=(FzfL–FzbR)*rx1…Equation (21e)

[0291] Twz=(FybR–FyfL)*rx2…Equation (21f)

[0292] Therefore, even when the permanent magnets 103 are asymmetrically arranged, six-axis forces of three-axis force components (Tx, Ty, Tz) and three-axis moment components (Twx, Twy, Twz) can be applied to the mover 101 by using the plurality of coils 202 arranged in two columns.

[0293] As described above, according to this embodiment, six-axis forces of three-axis force components (Tx, Ty, Tz) and three-axis force components (Twx, Twy, Twz) can be applied to the mover 101 by using a plurality of coils 202 arranged in two columns. Thus, the transport of the mover 101 can be controlled while simultaneously controlling the posture of the mover 101 relative to the six axes. According to this embodiment, by using coils 202 arranged in two columns, the number of which is smaller than the number of six-axis force components as variables to be controlled, the transport of the mover 101 can be controlled while simultaneously controlling the posture of the mover 101 relative to the six axes.

[0294] Therefore, according to this embodiment, since the number of columns of the coils 202 may be smaller, the mover 101 can be transported in a contactless manner while controlling the posture of the mover 101 without causing an increase in the size or complexity of the system.

[0295] Furthermore, when the permanent magnets 103 are symmetrically arranged on the mover 101 as in this embodiment, six-axis control of the posture of the mover 101 and transport control of the mover 101 can be achieved by using a smaller number of permanent magnets 103 than in the first embodiment. Therefore, according to this embodiment, since not only the number of columns of the coils 202 but also the number of permanent magnets 103 can be reduced, a more inexpensive and compact magnetic levitation type transport system can be constructed.

[0296] Other embodiments

[0297] The present invention is not limited to the above-described embodiments, and various modifications are possible.

[0298] For example, when used in a vacuum environment or underwater environment, organic matter, etc. is likely to fly or flow out from components such as plastic used around coil 202 or core material. In addition, the adhesive used for insulation is likely to partially flow out or further deteriorate in the same way.

[0299] Therefore, in particular, in a vacuum environment or underwater environment or in a dust-free environment (such as a clean room), it is preferable to cover the coil or a component surrounding the coil with a component to insulate it from the surrounding environment. There are several insulation methods, and it is preferable to cover one or more coils with a metal box and introduce air into it, for example.

[0300] In addition, in order to dissipate or emit heat generated from the coil to the outside, the gas is preferably a gas with large thermal conductivity, preferably helium, or hydrogen. However, nitrogen, carbon dioxide gas or air can also provide sufficient component protection performance.

[0301] In addition, one or more coils can be arranged and enclosed together in a box-like shape to form a coil box unit, and a coil row can be formed by arranging multiple coil box units. It is preferable to provide a height reference or position reference on the outside of each coil box unit to facilitate operation, thereby adjusting the height or position to the same height or position in order to arrange the box units.

[0302] Furthermore, while the above embodiment describes a case where only the electromagnetic force received by the permanent magnet 103 from the coil 202 is used as the levitation force to levitate the mover 101 as an example, the present invention is not limited thereto. For example, when the weight of the mover 101 or the weight of the workpiece 102 placed on the mover 101 is large and the levitation force to be applied in the vertical direction is large, the static pressure of a fluid such as air may be used alone to contribute to the levitation force.

[0303] Furthermore, while the above embodiments describe the case where the plurality of coils 202 are arranged in two or one columns, the present invention is not limited thereto. Depending on the number of permanent magnets 103 arranged on the mover 101, the plurality of coils 202 may also be arranged in any of three, four, and five columns, for example. According to the present invention, six-axis control of the posture of the mover 101 can be achieved by using a plurality of columns of coils 202 having a number of columns less than six (six being the number of variables in the six-axis control of the posture of the mover 101).

[0304] Furthermore, the transport system according to the present invention can be used as a transport system that transports a workpiece along with a mover to a processing area of ​​a processing device, such as a machine tool, that performs a processing operation on the workpiece, as an article in a manufacturing system for manufacturing articles such as electronic components. The processing device that performs the processing operation can be any device, such as a device that assembles components on a workpiece, performs coating or spraying, and the like. Furthermore, the article to be manufactured is not particularly limited, and any article can be manufactured.

[0305] As described above, products can be manufactured by using the transport system according to the present invention to transport workpieces to a processing area and performing processing on the workpieces being transported within the processing area. As described above, the transport system according to the present invention does not increase the size or complexity of the system. Therefore, a product manufacturing system that utilizes the transport system according to the present invention for workpiece transport can also provide significantly flexible layouts for equipment performing corresponding processing without increasing the size or complexity of the system. According to the present invention, a mover can be transported contactlessly while its posture is controlled, without increasing the size of the system layout.

[0306] While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments.The scope of the following claims is to be accorded the broadest interpretation so as to encompass all such modifications and equivalent structures and functions.

Claims

1. A transportation system comprising: a mover capable of moving along a first direction, the mover having a plurality of first magnet groups and a plurality of second magnet groups, the plurality of first magnet groups being arranged along the first direction and the plurality of second magnet groups being arranged along a second direction intersecting the first direction; as well as a stator having a coil column including a plurality of coils arranged along the first direction, the plurality of first magnet groups and the plurality of second magnet groups facing the coil column, Wherein, at least one second magnet group among the multiple second magnet groups is arranged on the front end side of the mover in the first direction compared to the multiple first magnet groups, and at least another second magnet group among the multiple second magnet groups is arranged on the rear end side of the mover in the first direction compared to the multiple first magnet groups.

2. The transport system according to claim 1, wherein: At least one second magnet group among the plurality of second magnet groups is disposed between two first magnet groups.

3. The transport system according to claim 2, wherein: The magnetic poles of the first magnets closest to the second magnet group included in each of the two first magnet groups sandwiching at least one second magnet group among the plurality of second magnet groups are identical to each other.

4. The transportation system according to claim 1, wherein: A gap is provided between at least one first magnet group among the plurality of first magnet groups and at least one second magnet group among the plurality of second magnet groups.

5. The transportation system according to claim 1, wherein: A length of at least one of the plurality of coils in the second direction is shorter than a length of each of the plurality of second magnet groups in the second direction.

6. The transportation system according to claim 1, wherein: A length of at least one of the plurality of coils in the second direction is longer than a length of each of the plurality of first magnet groups in the second direction.

7. The transportation system according to claim 1, wherein: The first magnets included in the plurality of first magnet groups, which are adjacent to each other in the first direction, have polarities different from each other at positions where the plurality of first magnet groups can face the plurality of coils, and The second magnets included in the plurality of second magnet groups, which are adjacent to each other in the second direction, have different polarities from each other at positions where the plurality of second magnet groups can face the plurality of coils.

8. The transportation system according to claim 1, wherein: The mover has a top surface parallel to the first direction, and The plurality of first magnet groups and the plurality of second magnet groups are arranged on the top surface.

9. The transport system according to claim 8, wherein: At least one coil among the plurality of coils has an iron core and is arranged to be able to face downward relative to the plurality of first magnet groups and the plurality of second magnet groups.

10. A method for controlling a transportation system, the transportation system comprising: a mover capable of moving along a first direction, the mover having a plurality of first magnet groups and a plurality of second magnet groups, the plurality of first magnet groups being arranged along the first direction and the plurality of second magnet groups being arranged along a second direction intersecting the first direction; as well as a stator having a coil column including a plurality of coils arranged along the first direction, the plurality of first magnet groups and the plurality of second magnet groups facing the coil column, wherein at least one of the plurality of second magnet groups is arranged on the front end side of the mover in the first direction compared to the plurality of first magnet groups, and at least another second magnet group of the plurality of second magnet groups is arranged on the rear end side of the mover in the first direction compared to the plurality of first magnet groups, The control method includes: controlling the transport of the mover in the first direction by controlling the electromagnetic force generated between the plurality of first magnet groups and the plurality of coils; and The posture of the mover is controlled by controlling electromagnetic forces generated between the plurality of first magnet groups and the plurality of coils and / or between the plurality of second magnet groups and the plurality of coils.

11. The control method according to claim 10, wherein: A gap is provided between at least one first magnet group among the plurality of first magnet groups and at least one second magnet group among the plurality of second magnet groups.

12. The control method according to claim 10, wherein: A length of at least one of the plurality of coils in the second direction is shorter than a length of each of the plurality of second magnet groups in the second direction.

13. The control method according to claim 10, wherein: A length of at least one of the plurality of coils in the second direction is longer than a length of each of the plurality of first magnet groups in the second direction.

14. A method for manufacturing an article, the method comprising: transporting the workpiece by using the transport system according to claim 1; as well as Processing is performed on the workpiece using a processing device.

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