Vacuum multi-dimensional adjustment table and apparatus thereof

Abstract

This invention provides a vacuum multi-dimensional adjustment platform, comprising a vacuum connection section, a multi-angle adjustment coupling platform section, a horizontal adjustment section, and a vertical adjustment section. The vacuum connection section includes a functional adapter interface and flange connections on both sides, with the flanges connected by the horizontal and vertical adjustment sections. The vacuum multi-dimensional platform designed in this invention employs in-layer coupled X and Y-axis angle adjustment and independent Z-axis distance adjustment, significantly reducing the device's size and providing extremely high stability. It can meet the requirements for individual multi-angle and distance adjustments of functional modules. Furthermore, it features simple operation and low manufacturing costs.

Description

Technical Field

[0001] This invention belongs to the field of vacuum equipment, specifically relating to a vacuum multidimensional adjustment table and its equipment. Background Technology

[0002] Vacuum experimental systems typically integrate numerous sample characterization and processing techniques, such as the introduction of optical signals, focusing of light beams, and focusing of ion beams. These techniques all require a multi-angle adjustment device within the system to allow for adjustment of direction and angle during the experiment. This is usually achieved using an adjustment device adjustable in the X, Y, and Z directions.

[0003] Existing adjustment devices are typically integrated into the sample position and are called sample adjustment stages. They can adjust the vacuum position of the sample stage to match the functional modules that are fixed in position within the system.

[0004] Such conventional designs, while adjusting the sample position to meet the functional module requirements, often fail to address other needs, such as sample transfer and temperature measurement. Furthermore, the sample adjustment device often has limited adjustment angles or distances, hindering further improvements in the efficiency and effectiveness of the functional module. Summary of the Invention

[0005] Therefore, the purpose of this invention is to overcome the defects in the prior art and provide a multi-dimensional adjustment table and device for modular devices that is low in processing cost, easy to operate, and vacuum compatible.

[0006] To achieve the above objectives, a first aspect of the present invention provides a vacuum multidimensional adjustment platform, which includes a vacuum connection portion, a multi-angle adjustment coupling platform portion, a horizontal adjustment portion, and a vertical adjustment portion; wherein, the vacuum connection portion includes a functionalized adapter interface and flange connections on both sides, and the flanges are connected by the horizontal adjustment portion and the vertical adjustment portion.

[0007] According to a first aspect of the present invention, the vacuum multidimensional adjustment stage is wherein the multi-angle adjustment coupling platform portion is a single metal component;

[0008] Preferably, the multi-angle adjustment coupling platform is connected to a pair of horizontal active adjustment connections, horizontal self-matching connections, vertical adjustment connections, and vertical alignment connections.

[0009] According to a first aspect of the present invention, a vacuum multidimensional adjustment stage is provided, wherein the multi-angle adjustment coupling platform portion is concentric with the functionalized adapter interface.

[0010] According to a first aspect of the present invention, the vacuum multidimensional adjustment stage includes a horizontal direction adjustment section comprising a horizontal direction active adjustment connection and a horizontal direction self-matching connection.

[0011] According to a first aspect of the present invention, in a vacuum multidimensional adjustment stage, the horizontal direction active adjustment connection and the horizontal direction self-matching connection of the horizontal direction adjustment part are fixed to a flange rigidly connected to the vacuum cavity by a rotating component.

[0012] According to a first aspect of the present invention, the vacuum multidimensional adjustment stage further includes a built-in compression spring and anchoring holes; and / or

[0013] The active horizontal adjustment connection includes a horizontal adjustment knob.

[0014] According to the first aspect of the present invention, the vacuum multidimensional adjustment stage has a horizontal direction adjustment range of ±15°, preferably ±10°.

[0015] According to a first aspect of the present invention, a vacuum multidimensional adjustment stage is provided, wherein the vertical direction adjustment part comprises a vertical active adjustment knob and a vertical direction linear bearing collimator.

[0016] According to the first aspect of the present invention, the vacuum multidimensional adjustment stage has an overall vertical adjustment range of 5 cm, preferably 2.5 cm.

[0017] A second aspect of the present invention provides a vacuum system adjustment device, the vacuum system adjustment device comprising a vacuum multidimensional adjustment table as described in any one of the first aspects;

[0018] Preferably, the vacuum system adjustment device is selected from one or more of the following: vacuum system optical adjustment stage, vacuum ion beam adjustment stage, vacuum fiber optic adjustment stage, and vacuum precision gas introduction adjustment stage.

[0019] This invention relates to a vacuum multidimensional adjustment stage, with independent adjustment in the horizontal X and Y directions and the vertical Z direction. It can be widely used in vacuum / ultra-high vacuum systems where independent adjustment of working angles and distances is required. The functional adapter interface can be used with various functional modules, including but not limited to focusing optical lenses, ion guns, fiber optic entry and exit points, etc. It can achieve functions including, but not limited to, adjustment of the entry and exit optical paths of optically compatible scanning probe microscope systems, precise adjustment of focusing, ion gun angle and distance, and precise local gas supply during sample growth. The materials used in the overall design are compatible with ultra-high vacuum systems and can be degassed and baked together with the overall system.

[0020] The vacuum multidimensional adjustment stage of the present invention may have, but is not limited to, the following beneficial effects:

[0021] The vacuum multidimensional unit designed in this invention adopts a design with in-layer coupled X and Y direction angle adjustment and independent Z direction distance adjustment, which greatly reduces the size of the device, has extremely high stability, and can meet the requirements of individual multi-angle and distance adjustment of functional modules. It also features simple operation and low manufacturing cost. Attached Figure Description

[0022] The embodiments of the present invention will now be described in detail with reference to the accompanying drawings, wherein:

[0023] Figure 1 The overall structure of the vacuum multidimensional adjustment stage of the present invention is shown.

[0024] Figure 2 The vacuum connection portion of the vacuum multidimensional adjustment stage of the present invention is shown.

[0025] Figure 3 The multi-angle adjustment coupling platform portion of the vacuum multidimensional adjustment stage of the present invention is shown.

[0026] Figure 4 The horizontal adjustment section of the vacuum multidimensional adjustment stage of the present invention is shown.

[0027] Figure 5 The invention illustrates the horizontal active adjustment and adaptive component of the vacuum multidimensional adjustment stage.

[0028] Figure 6 The vertical adjustment section of the vacuum multidimensional adjustment stage of the present invention is shown.

[0029] Figure 7 The vertical active adjustment and alignment component of the vacuum multidimensional adjustment stage of the present invention is shown.

[0030] Figure 8 An optical adjustment stage for a vacuum system based on the vacuum multidimensional adjustment stage of the present invention is shown.

[0031] Figure 9 A vacuum ion beam adjustment stage based on the vacuum multidimensional adjustment stage of the present invention is shown.

[0032] Figure 10 A vacuum fiber optic adjustment stage based on the vacuum multidimensional adjustment stage of the present invention is shown.

[0033] Explanation of reference numerals in the attached figures:

[0034] 1. Vacuum connection section; 2. Multi-angle adjustable coupling platform section; 3. Horizontal adjustment section; 4. Vertical adjustment section; 5. Functional adapter interface; 6. Horizontal adjustment connection flange; 7. Vertical adjustment connection flange; 8. Vertical adjustment connection; 9. Vertical collimation; 10. Horizontal active adjustment connection; 11. Horizontal self-matching connection; 12. Rotatable component; 13. Horizontal adjustment knob; 14. Built-in compression spring; 15. Anchoring hole; 16. Vertical active adjustment knob; 17. Linear bearing collimator; 18. Sample; 19. Optical path; 20. Adjustment stage; 21. Ion beam; 22. Ion gun; 23. Optical fiber; 24. Multi-dimensional adjustment stage. Detailed Implementation

[0035] The present invention will be further illustrated below with specific embodiments. However, it should be understood that these embodiments are merely for more detailed and specific illustration and should not be construed as limiting the present invention in any way.

[0036] This section provides a general description of the materials and testing methods used in the experiments of this invention. While many of the materials and methods of operation used to achieve the objectives of this invention are well known in the art, the invention is still described in as much detail as possible herein. It will be apparent to those skilled in the art that, unless otherwise stated in the context, the materials and methods of operation used in this invention are well known in the art.

[0037] Example 1

[0038] This embodiment is used to illustrate the structure of the vacuum multidimensional adjustment stage of the present invention.

[0039] The vacuum multi-dimensional adjustment stage locking device of this invention comprises four main parts: a vacuum connection part 1, a multi-angle adjustment coupling platform part 2, a horizontal adjustment part 3, and a vertical adjustment part 4. The overall installation effect is shown in the figure below. Figure 1 As shown. This vacuum multidimensional adjustment platform can be connected and encapsulated to the flange interface reserved in the vacuum cavity of the specific application scenario through the aforementioned vacuum connection part 1. The ultra-high vacuum connection part is a combined device, which consists of a set of flange connections on both sides. Figure 2 As shown, the flanges on both sides are connected by a horizontal adjustment part 3 and a vertical adjustment part 4.

[0040] The multi-angle adjustable coupling platform section 3 is a single metal component. For example... Figure 3As shown, this part is connected to four sets of designs: a horizontal active adjustment connection 10, a horizontal self-matching connection 11, a vertical adjustment connection 8, and a vertical alignment connection 9. Each component in these four sets of designs is symmetrically arranged. The platform and the functional adapter interface 5 remain concentric at all times. Therefore, the entire device achieves its functionality by adjusting the angle and distance to the coupled platform.

[0041] Horizontal adjustment section 3, as shown Figure 4 As shown. It includes a horizontal active adjustment connection 10 and a horizontal self-matching connection 11, specifically as follows... Figure 5 As shown. Both are fixed to the flange 6, which is rigidly connected to the vacuum chamber, via a rotatable component 12. The working mechanism is as follows: when adjusting the X or Y angle in the horizontal direction, the anchoring hole 15 of the self-matching part in that direction needs to be loosened, and the length of the horizontal adjustment knob 13 of the active adjustment part is adjusted. Simultaneously, since the adaptive knob on the opposite side in that direction is not fixed, it can freely match to a suitable and unique length under the action of its built-in compression spring 14, thereby enabling the connected multi-angle coupling platform to rotate. This allows for precise adjustment of the horizontal tilt angle as needed during operation. After adjustment, the anchoring hole 15 is fixed, and the same steps can be used to adjust the other direction. The horizontal angle adjustment range is approximately ±10°.

[0042] The function that enables vertical encouragement and adjustment is Figure 6 The vertical adjustment component is shown. This component consists of two parts: a vertical active adjustment knob 16 and a vertical linear bearing collimator 17, as detailed below. Figure 7 As shown. The vertical active adjustment knob 16 allows for the shortening and lengthening of the entire device. The vertical collimator is constrained by a linear bearing, ensuring that the entire device can only be adjusted in the vertical direction, thus increasing the stability of the adjustment process. The overall vertical adjustment range is 2.5 cm.

[0043] Experimental Example 1

[0044] This experimental example illustrates the application of the vacuum multidimensional adjustment stage of the present invention in a scanning tunneling microscope system.

[0045] In practical applications, the multidimensional adjustment stage of this invention can be equipped with a lens module and installed in a scanning tunneling microscope system, such as... Figure 8 As shown, the incident light, after being adjusted in both horizontal angle and vertical distance by the adjustment stage 20, can be focused onto a precise location on the surface of the sample 18. The outgoing light then passes through another functional adjustment stage, where the optical signal can ultimately be collected. Lenses with different parameters can be flexibly replaced according to the actual working requirements.

[0046] Experimental Example 2

[0047] This experimental example illustrates the application of the vacuum multidimensional adjustment stage of the present invention in ion guns or electron beam focusing equipment.

[0048] Ion guns or electron beam focusing devices are widely used in vacuum systems to perform ion bombardment and etching on sample surfaces. Most existing devices achieve these functions by remotely adjusting the sample position. This method is limited by the sample's movement range and cannot guarantee precise surface treatment. Inaccurately adjusted ion beams can affect a wider area, impacting efficiency and reducing the lifespan of modules such as the sample holder. Figure 9 As shown, the ion gun 22 is installed in the vacuum multidimensional adjustment stage of the present invention, which can effectively adjust parameters such as the angle of the ion beam 21 and the distance from the sample 18, and can precisely control the bombardment of the sample, thereby achieving better experimental results.

[0049] Experimental Example 3

[0050] This experimental example illustrates the application of the vacuum multidimensional adjustment stage of the present invention in ion guns or electron beam focusing equipment.

[0051] like Figure 10 As shown, the fiber optic module 23 can be paired with the vacuum multidimensional adjustment stage 24 to precisely adjust its position and angle, which is beneficial for achieving precise optical signal angle adjustment. Vertical adjustment can be used to collect stronger feedback signals, which is beneficial for optical signal acquisition.

[0052] Although the invention has been described to a certain extent, it is apparent that appropriate variations can be made to the various conditions without departing from the spirit and scope of the invention. It is understood that the invention is not limited to the described embodiments, but falls within the scope of the claims, which include equivalent substitutions for each of the elements.

Claims

1. A vacuum multi-dimensional adjustment table, characterized in that, The vacuum multidimensional adjustment platform includes a vacuum connection part, a multi-angle adjustment coupling platform part, a horizontal adjustment part, and a vertical adjustment part; wherein, the vacuum connection part includes a functional adapter interface and flange connections on both sides, and the flanges are connected by the horizontal adjustment part and the vertical adjustment part; The multi-angle adjustment coupling platform is a single metal component. It is concentric with the functional adapter interface and connected to a pair of horizontal active adjustment connections, horizontal self-matching connections, vertical adjustment connections, and vertical alignment connections. The horizontal adjustment part includes a horizontal active adjustment connection and a horizontal self-matching connection. Both the horizontal active adjustment connection and the horizontal self-matching connection are fixed to a flange rigidly connected to the vacuum chamber by rotating components. The horizontal adjustment part also includes a built-in compression spring, anchoring holes, and a horizontal adjustment knob. When it is necessary to adjust the X or Y angle in the horizontal direction, the anchoring hole of the self-matching part in that direction is loosened, and the length of the horizontal adjustment knob of the active adjustment part is adjusted. At the same time, since the adaptive knob on the opposite side in that direction is not fixed, it is freely matched to a suitable and unique length under the action of the built-in compression spring, so that the connected multi-angle coupling platform can rotate to achieve the purpose of precisely adjusting the horizontal tilt angle at the required angle.

2. The vacuum multi-dimensional adjustment table according to claim 1, characterized in that The horizontal adjustment section has a horizontal angle adjustment range of ±15°.

3. The vacuum multi-dimensional adjustment table according to claim 1, wherein, The vertical adjustment section includes a vertical active adjustment knob and a vertical linear bearing collimator.

4. The vacuum multi-dimensional adjustment table of claim 1, wherein, The overall vertical adjustment range is 5cm.

5. A vacuum system adjustment apparatus, characterized by, The vacuum system adjustment equipment includes a vacuum multidimensional adjustment table as described in any one of claims 1 to 4; The vacuum system adjustment equipment is selected from one or more of the following: vacuum system optical adjustment stage, vacuum ion beam adjustment stage, vacuum fiber optic adjustment stage, and vacuum precision gas introduction adjustment stage.

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