A method and system for machine commissioning

By marking and filtering historical data of product batches in semiconductor manufacturing lines, and using the EAP system to prioritize the selection of suitable batches for trial operation, the problem of misjudgment caused by abnormal historical data was solved, and the accuracy of trial operation and product yield were improved.

CN115220409BActive Publication Date: 2026-06-05CHANGXIN MEMORY TECH INC
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
CHANGXIN MEMORY TECH INC
Filing Date
2022-07-18
Publication Date
2026-06-05

AI Technical Summary

Technical Problem

On semiconductor manufacturing lines, using product batches with abnormal historical data for trial runs can easily lead to misjudgments, resulting in the official release of process equipment or formulas that actually deviate from the expected specifications. This can lead to a decrease in product Cpk, or even a decrease in product yield or scrapping.

Method used

By examining historical data of product batches and marking them according to preset conditions, suitable batches are selected for trial operation of process equipment or formulas. The Equipment Automation Management System (EAP) is used to identify and prioritize batches that meet the conditions for trial operation.

Benefits of technology

It improved the accuracy of machine or formula trial runs, enhanced the product's process capability index and yield, and avoided misjudgments caused by abnormal historical data.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present disclosure provides a method and system for machine trial running, the method comprising: providing a product batch; checking historical data of the product batch, and marking the product batch whose historical data meets a preset condition; determining a process machine to be trial run; and identifying and using the marked product batch to trial run the process machine to be trial run. The present disclosure checks the historical data of the product batch, and marks the product batch whose historical data meets the preset condition, filters out the process machine or process formula to be trial run, selects a suitable range of batches from the marked product batch by an equipment automatic management system to trial run the process machine or process formula to be trial run, improves the accuracy of machine trial running, improves the process capability index of the product, and improves the product yield.
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