Optical waveguide device, chip and optical network equipment

Abstract

Embodiments of the present invention provide an optical waveguide device, chip, and optical network equipment for use in the field of optical fiber communications. These devices are used to reduce the loss of optical waveguide devices while ensuring the integration level of a chip that has integrated multiple optical waveguide devices. The optical waveguide device includes an optical waveguide circuit integrated on a substrate, the optical waveguide circuit having at least one curved region, the curved region having an exit surface for emitting a first optical signal, and the optical waveguide device further includes a reflection module having a reflection surface; the reflection surface is used to reflect a second optical signal toward the exit surface based on the first optical signal, the second optical signal being a portion of the first optical signal.

Description

Technical Field

[0001] The present application relates to the field of optical fiber communications, and in particular to an optical waveguide device, a chip, and an optical network device. Background Art

[0002] Optical waveguide devices are core components in fiber-optic communications. To achieve efficient optical interconnection on a chip, low-loss, compact optical waveguide devices require more devices to be integrated per unit area of the chip. The greater the curvature of the waveguide bends, the more devices can be integrated per unit area. However, a greater curvature of the waveguide bends results in a smaller bend radius, which in turn increases the bending loss of the device.

[0003] To this end, ion exchange technology can be used to create a refractive index profile at the bend of an optical waveguide device. For example, the refractive index at the bend is greater than the refractive index at the non-bend portion of the waveguide, resulting in a gradient refractive index profile. This reduces bending losses without changing the bend radius of the optical waveguide device.

[0004] However, the conventional method of achieving a gradient refractive index distribution in an optical waveguide device has a complex process, high processing cost and low efficiency. Summary of the Invention

[0005] According to a first aspect of an embodiment of the present invention, an optical waveguide device is provided. The optical waveguide device includes an optical waveguide line integrated on a substrate, the optical waveguide line having at least one curved region, the curved region having an exit surface for emitting a first optical signal, and the optical waveguide device further includes a reflection module having a reflection surface; the reflection surface is configured to reflect a second optical signal toward the exit surface based on the first optical signal, the second optical signal being a portion of the first optical signal.

[0006] As can be seen, the reflective module included in the optical waveguide device of this embodiment can recouple a portion of the optical power lost in the bend region of the optical waveguide back into the optical waveguide, thereby reducing losses in the optical waveguide. A chip integrating an optical waveguide device can reduce bending losses without increasing the bending radius of the optical waveguide device, effectively increasing the number of optical waveguide devices integrated within the chip and ensuring a more compact arrangement of the multiple optical waveguide devices. This effectively improves the chip's integration density, thereby enhancing the performance of the optical communication system. Furthermore, to reduce bending losses in the optical waveguide device, high-precision machining of the optical waveguide circuit is not necessary; only the reflective module is required, reducing the difficulty of processing the optical waveguide device and improving the efficiency of manufacturing the optical waveguide device.

[0007] Based on the first aspect, in an optional implementation, a direction perpendicular to the substrate surface is a first direction, and there is a second direction 320 perpendicular to the first direction, and the second direction is parallel to the substrate surface, wherein the reflective surface of the reflective module faces the exit surface of the curved area along the second direction.

[0008] Based on the first aspect, in an optional implementation, the optical waveguide device further includes a first medium, the first medium is placed between the exit surface and the reflection surface, and the refractive index of the first medium is smaller than the refractive index of the curved region.

[0009] It can be seen that by providing the first medium between the emission surface and the reflection surface, the power of light emitted from the emission surface can be reduced, thereby effectively reducing the loss of the optical waveguide line.

[0010] Based on the first aspect, in an optional implementation, the distance between the emitting surface and the reflecting surface is negatively correlated with the optical power of the second optical signal. Thus, the longer the distance between the emitting surface and the reflecting surface along the second direction, the lower the optical power of the second optical signal; and the shorter the distance between the emitting surface and the reflecting surface along the second direction, the higher the optical power of the second optical signal.

[0011] Based on the first aspect, in an optional implementation, the reflection module includes at least one reflection sub-module, and the side surface of each reflection sub-module facing the exit surface is the reflection surface.

[0012] Based on the first aspect, in an optional implementation, along a direction parallel to the surface of the substrate, a cross-section of the reflective submodule is arc-shaped or rectangular.

[0013] Based on the first aspect, in an optional implementation, the optical waveguide device further includes a second medium, the number of the reflective sub-modules is multiple, the second medium is placed between two adjacent reflective sub-modules, the refractive index of the second medium is smaller than the refractive index of the curved region, and / or the refractive index of the second medium is smaller than the refractive index of the reflective sub-module.

[0014] The second medium can effectively reduce the power of light emitted from the exit surface, thereby effectively reducing the loss of the optical waveguide line.

[0015] Based on the first aspect, in an optional implementation, the reflection module is a grating, or the reflection module is a metal part.

[0016] Based on the first aspect, in an optional implementation, if the reflective module is a metal component, the reflective module is configured to modulate the refractive index of the optical waveguide according to a modulation current. Specifically, if the reflective module is a metal component, the reflective module is connected to a controller, which can send a modulation current to the metal component. After the reflective module receives the modulation current, the reflective module acts as a resistor under the influence of the modulation current, thereby causing the reflective module to generate heat. The heated reflective module can modulate the refractive index of the optical waveguide.

[0017] It can be seen that in order to modulate the refractive index of the optical waveguide circuit, the controller adjusts the voltage of the modulation current to achieve the purpose of modulating the refractive index of the optical waveguide circuit. The voltage of the modulation current is positively correlated with the change in the refractive index of the optical waveguide circuit. That is, the greater the voltage of the modulation current, the greater the change in the refractive index of the optical waveguide circuit. Similarly, the smaller the voltage of the modulation current, the smaller the change in the refractive index of the optical waveguide circuit.

[0018] Based on the first aspect, in an optional implementation, the optical waveguide circuit has an optical output port, and when the second optical signal reaches the exit surface, the optical output port outputs an optical signal with a target optical power, and the target optical power is greater than a preset power value.

[0019] It can be seen that when the optical waveguide device is not provided with a reflective module, the optical power of the optical signal input from the optical input port is PN, and the optical power of the first optical signal emitted from the output surface is PM. Since the first optical signal emitted from the output surface is completely lost, the output optical power obtained by detecting the magnitude of the optical power output from the optical output port by the photodetector is a preset power value, and the preset power value P1 = PN - PM.

[0020] When the optical waveguide device includes a reflective module, the optical power of the optical signal input from the optical input port is PN, the optical power of the first optical signal emitted from the output surface is PM, and the optical power of the second optical signal obtained through the output surface is PM1. It can be seen that the optical power lost through the output surface is PM2 = PM - PM1. Then, by detecting the optical power output from the optical output port using the photodetector, the target optical power P2 = PN - PM2 = PN - PM - PM1 is obtained. It can be seen that P2 is greater than P1.

[0021] It can be seen that, compared with the existing solution without a reflective module, the optical waveguide device shown in this aspect can effectively reduce the optical power loss of the optical signal transmitted by the optical waveguide circuit.

[0022] Based on the first aspect, in an optional implementation, the optical waveguide circuit includes a first transmission waveguide, the first transmission waveguide having an optical input port, the bending area and an optical output port, the first transmission waveguide is used to receive the first optical signal via the optical input port, the first transmission waveguide is used to receive the second optical signal via the exit surface of the bending area, and is used to output the second optical signal via the optical output port.

[0023] Based on the first aspect, in an optional implementation, if the optical waveguide device is a delay device, the delay device is composed of an optical waveguide structure with a gradually changing curvature, for example, the optical waveguide structure is a multi-turn structure. It can be seen that the radius of the multi-turn structures included in the delay device increases from the inside to the outside of the delay device, that is, the inner ring of the delay device is arranged with an optical waveguide structure with a smaller radius, and the outer ring of the delay device is arranged with an optical waveguide structure with a larger radius. In this aspect, one or more reflective modules can be set between any two adjacent turns of optical waveguide structures. For example, the reflective module can be set between any two adjacent turns of optical waveguide structures. The reflective module can reduce the loss of the optical signal transmitted by the delay device and can also isolate the two adjacent turns of optical waveguide structures to avoid interference. It can be seen that, under the same loss condition, the delay device shown in this aspect can be equipped with an optical waveguide structure with more turns, increasing the number of turns included in the delay device to achieve the purpose of large delay and low loss.

[0024] Based on the first aspect, in an optional implementation, the optical waveguide circuit further includes a second transmission waveguide, and the reflection module is located between a first exit surface of the first transmission waveguide and a second exit surface of the second transmission waveguide.

[0025] As can be seen, the use of a single reflector module between the curved regions of two adjacent transmission waveguides reduces optical power loss, reducing the number of devices integrated on the substrate, thereby simplifying chip packaging and improving chip packaging efficiency. The reflector module located between the first and second transmission waveguides blocks coupling between the first and second transmission waveguides, preventing interference between the optical signal transmitted by the first and second transmission waveguides, further improving chip integration.

[0026] Based on the first aspect, in an optional implementation, the optical waveguide circuit includes a coupling waveguide and at least one microring resonator waveguide, the microring resonator waveguide having the bending region and the coupling region; the coupling waveguide is used to receive the first optical signal, the coupling region is used to couple the first optical signal from the coupling waveguide, and the coupling region is used to output the second optical signal via the coupling waveguide.

[0027] Based on the first aspect, in an optional implementation, the optical waveguide circuit includes a first coupling waveguide and a second coupling waveguide, and the optical waveguide circuit further includes at least one microring resonator waveguide located between the first coupling waveguide and the second coupling waveguide, and the microring resonator waveguide has the bending region, the first coupling region, and the second coupling region; the first coupling waveguide is used to receive the first optical signal, the first coupling region is used to couple the first optical signal from the first coupling waveguide, the first coupling region is used to output at least part of the second optical signal via the first coupling waveguide, and / or the second coupling region is used to output at least part of the second optical signal via the second coupling waveguide.

[0028] It can be seen that the reflective module included in the optical waveguide device can recouple a portion of the optical power lost in the microring resonator waveguide through the curved region back into the microring resonator waveguide, thereby reducing the loss of the microring resonator waveguide. It can be seen that the bending loss of the microring resonator waveguide can be reduced without increasing the bending radius of the microring resonator waveguide, effectively improving the ability to arrange multiple optical waveguide devices integrated in the chip in a more compact manner, thereby effectively improving the chip's integration density and bringing about improved performance of the optical communication system.

[0029] Because the bending radius of the microring resonator waveguide and the quality factor of the optical waveguide device are negatively correlated, that is, the larger the bending radius of the microring resonator waveguide, the smaller the quality factor of the optical waveguide device, and similarly, the smaller the bending radius of the microring resonator waveguide, the larger the quality factor of the optical waveguide device. Compared to existing optical waveguide devices, the optical waveguide device of this embodiment has a greater degree of curvature and a smaller bending radius while maintaining the same bending loss, thereby ensuring that the optical waveguide device of this embodiment has a higher quality factor and improves the communication performance of the chip.

[0030] A second aspect of an embodiment of the present invention provides a chip, comprising a substrate and an optical waveguide device integrated on the substrate, wherein the optical waveguide device is as shown in any one of the above-mentioned first aspects.

[0031] For the description of the beneficial effects shown in this aspect, please refer to the first aspect and no further details will be given.

[0032] Based on the second aspect, in an optional implementation, the reflection module included in the optical waveguide device is a metal part, and the chip also includes a controller, which is connected to the reflection module. The controller is used to input a modulation current to the reflection module, and the reflection module is used to modulate the refractive index of the optical waveguide circuit according to the modulation current.

[0033] A third aspect of an embodiment of the present invention provides an optical network device, which includes the chip shown in the second aspect above. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 This is an example diagram of the structure of an embodiment of the optical fiber communication system provided in this application;

[0035] Figure 2 This is a diagram illustrating the structure of the first embodiment of the optical waveguide device provided in this application;

[0036] Figure 3 This is an example diagram of the structure of the first embodiment of the chip provided in this application;

[0037] Figure 4 This is an example diagram of the structure of an embodiment of the reflection module provided in this application;

[0038] Figure 5 This is a diagram illustrating the structure of a second embodiment of the optical waveguide device provided in this application;

[0039] Figure 6 This is a structural example diagram of the third embodiment of the optical waveguide device provided in this application;

[0040] Figure 7This is a structural example diagram of the fourth embodiment of the optical waveguide device provided in this application;

[0041] Figure 8 This is a structural example diagram of the fifth embodiment of the optical waveguide device provided in this application;

[0042] Figure 9 This is a structural example diagram of the sixth embodiment of the optical waveguide device provided in this application;

[0043] Figure 10 This is a structural example diagram of the seventh embodiment of the optical waveguide device provided in this application;

[0044] Figure 11 This is a structural example diagram of the eighth embodiment of the optical waveguide device provided in this application;

[0045] Figure 12 This is a structural example diagram of the ninth embodiment of the optical waveguide device provided in this application;

[0046] Figure 13 This is a structural diagram illustrating a tenth embodiment of the optical waveguide device provided in this application;

[0047] Figure 14 This is a structural example diagram of the eleventh embodiment of the optical waveguide device provided in this application;

[0048] Figure 15 This is a structural example diagram of the twelfth embodiment of the optical waveguide device provided in this application;

[0049] Figure 16 This is a structural diagram illustrating the thirteenth embodiment of the optical waveguide device provided in this application;

[0050] Figure 17 This is a structural diagram illustrating the fourteenth embodiment of the optical waveguide device provided in this application;

[0051] Figure 18 This is a structural example diagram of the fifteenth embodiment of the optical waveguide device provided in this application. DETAILED DESCRIPTION

[0052] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making any creative efforts shall fall within the scope of protection of the present invention.

[0053] The term "and / or" as used in this application can be used to describe an association relationship between related objects, indicating that three possible relationships exist. For example, A and / or B can represent the following three situations: A exists alone, A and B exist simultaneously, and B exists alone. In addition, the character " / " in this application generally indicates that the related objects are in an "or" relationship.

[0054] In order to better understand the optical waveguide device provided by this application, the following first combines Figure 1 The structure of the optical fiber communication system to which the optical waveguide device provided by the present application is applied is described below.

[0055] Depend on Figure 1 As shown, this application takes the optical fiber communication system as a passive optical network (PON) as an example for exemplary description:

[0056] A PON includes an optical line terminal (OLT) 110, which provides a network-side interface for the optical access network (OAN). The OLT 110 connects to upper-layer network devices (such as switches and routers) and to one or more optical distribution networks (ODNs) at the lower layer.

[0057] The ODN consists of three parts: an optical splitter 121, a trunk optical cable 122 connected between the OLT 110 and the optical splitter 121, and branch optical cables 123 connected between the optical splitter 121 and an optical network unit (ONU) 130. The trunk optical cable 122 is used to transmit optical signals between the OLT 110 and the optical splitter 121, and the branch optical cables 123 are used to transmit optical signals between the optical splitter 121 and the ONU 130.

[0058] When OLT 110 needs to transmit downstream optical signals to ONU 130, ODN transmits the downstream optical signals from OLT 110 to each ONU through optical splitter 121. Similarly, when ONU 130 needs to transmit upstream optical signals to OLT 110, ODN aggregates the upstream optical signals from ONU 130 through optical splitter 121 and transmits them to OLT 110.

[0059] ONU 130 provides a user-side interface for the OAN and is connected to the ODN. If ONU 130 also provides user port functionality, such as an Ethernet user port or a plain old telephone service (POTS) user port, it is called an optical network terminal (ONT). This application collectively refers to ONUs and ONTs as optical network units (ONUs).

[0060] The optical waveguide device provided in this application is described below:

[0061] In existing solutions, each optical component in optical network equipment, such as OLTs or ONUs, is individually packaged. This packaging of these optical components increases the cost of the optical network equipment and increases the difficulty and cost of packaging the optical components. In addition, individually packaged optical components usually occupy a larger volume, reducing the space utilization of the optical network equipment.

[0062] The single chip packaged in optical network equipment in this application can integrate multiple optical waveguide devices. For example, a modulator is a core component in optical interconnection and optical communication, converting electrical signals into optical signals. The modulator, combined with lasers, detectors, and other wavelength division multiplexing devices, forms a complete functional transmission module, widely applicable to data centers and backbone networks. By integrating multiple optical waveguide devices on a single chip, the difficulty and cost of chip packaging can be effectively reduced. Furthermore, multiple optical waveguide devices integrated on the same chip can improve the space utilization of optical network equipment.

[0063] As optical network equipment processes more and more information and the complexity of that information increases, the multiple optical waveguide devices integrated in the chip need to have the characteristics of low latency and low power consumption, and the chip integration needs to be increasingly higher. The higher the chip integration, the more optical waveguide devices are integrated per unit area of the chip.

[0064] The chip's integration density is positively correlated with the degree of curvature of the waveguide bends of the optical waveguide devices integrated into the chip. Specifically, the greater the curvature of the waveguide bends of each optical waveguide device, the smaller the area occupied by each optical waveguide device on the chip. Therefore, the greater the curvature of the waveguide bends of the optical waveguide devices, the greater the number of optical waveguide devices integrated into the chip. Similarly, the smaller the curvature of the waveguide bends of each optical waveguide device, the larger the area occupied by each optical waveguide device on the chip. Therefore, the smaller the curvature of the waveguide bends of the optical waveguide devices, the fewer optical waveguide devices integrated into the chip.

[0065] However, as the degree of curvature of the waveguide bend of the optical waveguide device increases, the bending radius of the optical waveguide device decreases, and the loss of the optical waveguide device is negatively correlated with the bending radius of the optical waveguide device. Therefore, the higher the chip integration, the smaller the bending radius of the optical waveguide device, which in turn leads to greater loss of the optical waveguide device.

[0066] The optical waveguide device provided in this application can reduce the loss of the optical waveguide device while ensuring the integration of the chip. For detailed description, please refer to the following embodiments:

[0067] Example 1

[0068] This embodiment takes the optical waveguide device as a non-resonant waveguide device as an example, and specifically, this embodiment takes the optical waveguide device as a transmission waveguide as an example for illustrative description. The transmission waveguide refers to the optical waveguide device used for transmitting optical signals.

[0069] The following combination Figure 2 As shown, Figure 2 This is an example diagram of the structure of the first embodiment of the optical waveguide device provided in this application.

[0070] Depend on Figure 2 As shown, the optical waveguide device 200 shown in this embodiment includes an optical waveguide circuit integrated on a substrate. Specifically, the optical waveguide circuit shown in this embodiment includes a transmission waveguide 201 for transmitting an optical signal. The transmission waveguide 201 has one or more curved regions. It can be seen that the curved region included in the transmission waveguide 201 shown in this embodiment is composed of an optical waveguide with an arc-shaped structure. Figure 2 The transmission waveguide 201 including a curved region 202 is taken as an example for illustrative description.

[0071] The following is an exemplary description of the method of integrating the transmission waveguide 201 on the substrate:

[0072] See also Figure 3 As shown, Figure 3 This is a diagram illustrating the structure of the first embodiment of the chip provided in this application. Transmission waveguide 201 is fabricated on the surface of substrate 301 using methods such as exposure etching, direct writing, laser ablation, or nanoimprinting. The substrate 301 shown in this embodiment may include a silicon wafer and a buried oxide layer with a low refractive index on the surface of the silicon wafer.

[0073] This embodiment uses a silicon photonics chip as an example. Multiple optical waveguide devices are integrated on the substrate of the silicon photonics chip. Integrating multiple optical waveguide devices on the same substrate enables the silicon photonics chip to have high integration density, low cost, and higher transmission bandwidth. In optical modules, where chip costs are very high, the low cost of silicon photonics chips is a significant advantage.

[0074] The transmission waveguide 201 shown in this embodiment has an optical input port 211 and an optical output port 212 . The optical input port 211 is used to receive an optical signal. After being transmitted through the transmission waveguide 201 , the optical signal is output through the optical output port 212 .

[0075] The optical waveguide device shown in this embodiment further includes a reflection module 220. The reflection module 220 is described in detail below:

[0076] First, the position of the reflection module 220 is described:

[0077] Continue as Figure 3 As shown, a direction perpendicular to the surface of the substrate 301 is a first direction 310 , and a second direction 320 is perpendicular to the first direction 310 , and the second direction 320 is parallel to the surface of the substrate 301 .

[0078] The specific shape of the cross section of the transmission waveguide 201 along the second direction 320 shown in this embodiment is not limited. For example, the cross section of the transmission waveguide 201 along the second direction 320 may be a stripe, ridge, or groove shape. This embodiment is described using an example of a substrate having a single layer of transmission waveguides. In other examples, multiple layers of transmission waveguides may be sequentially integrated on the substrate surface. This embodiment does not limit the number of layers of transmission waveguides on the substrate surface.

[0079] On the surface of the substrate 301, and along the second direction 320, the curved region 202 of the transmission waveguide 201 and the reflective module 220 are close to each other and have a certain distance therebetween. Specifically, the curved region 202 of the transmission waveguide 201 has an exit surface 331. An optical signal input through the optical input port 211 of the transmission waveguide 201, after being transmitted along the transmission waveguide 201 to the curved region 202, is emitted from the exit surface 331. This embodiment is described by taking the optical signal emitted from the exit surface 331 as the first optical signal. It can be seen that the first optical signal shown in this embodiment is a portion of the optical signal input through the optical input port 211.

[0080] The reflection module 220 has a reflection surface 332, and along the second direction 320, the output surface 331 and the reflection surface 332 face each other. In the case where the output surface 331 and the reflection surface 332 face each other along the second direction 320 shown in this embodiment, the first light signal emitted from the output surface 331 can successfully reach the reflection surface 332.

[0081] The first optical signal shown in this embodiment is an evanescent wave, and the evanescent wave is described below:

[0082] An evanescent wave is an electromagnetic wave generated on one side of an optically sparse medium when a light signal is totally reflected from a denser medium. The denser medium is the curved region 202 of the transmission waveguide 201 shown in this embodiment. The optically sparse medium shown in this embodiment can be of the following two types:

[0083] Maybe 1

[0084] In the case where there is air between the emitting surface 331 and the reflecting surface 332 as shown in this embodiment, the light-reducing medium is the air between the emitting surface 331 and the reflecting surface 332 .

[0085] Possibly 2

[0086] The optical waveguide device shown in this embodiment further includes a first medium, which is placed between the exit surface 331 and the reflection surface 332 . The refractive index of the first medium is smaller than the refractive index of the curved region 202 . In this example, the optically sparse medium is the first medium.

[0087] Next, the function of the reflection module 220 is described:

[0088] From the above description, it can be seen that the first optical signal emitted from the exit surface 331 shown in this embodiment can successfully reach the reflection surface 332 of the reflection module 220. The reflection surface 332 has a reflection performance. The reflection surface 332 is used to reflect the second optical signal to the exit surface 331 according to the first optical signal, wherein the second optical signal is a part of the first optical signal.

[0089] If the optical waveguide device is not equipped with the reflective module 220, the first optical signal emitted from the output surface 331 will be completely lost. However, in the present embodiment, when the optical waveguide device includes the reflective module 220, the reflective module 220 can, when the first optical signal reaches the reflective surface 332, cause the reflective surface 332 to reflect the second optical signal toward the output surface 331, allowing the second optical signal to successfully reach the output surface 331. Thus, the second optical signal can be re-coupled into the transmission waveguide 201 via the output surface 331, effectively reducing the loss of the optical signal transmitted by the transmission waveguide 201. The coupling described in this embodiment refers to the process by which an optical signal propagates from one optical device to another in the field of optical fiber communications.

[0090] This embodiment does not impose a limit on the distance between the emitting surface 331 and the reflecting surface 332, as long as the first optical signal emitted from the emitting surface 331 can be successfully transmitted to the reflecting surface 332. In this embodiment, the distance between the emitting surface 331 and the reflecting surface 332 is negatively correlated with the optical power of the second optical signal. That is, the longer the distance between the emitting surface 331 and the reflecting surface 332 along the second direction 320 is, the lower the optical power of the second optical signal is. Similarly, the shorter the distance between the emitting surface 331 and the reflecting surface 332 along the second direction 320 is, the higher the optical power of the second optical signal is.

[0091] The following describes the function of the reflective module provided in this embodiment with respect to the optical power angle of the optical signal outputted through the optical output port 212 of the transmission waveguide 201:

[0092] When the optical waveguide device includes a reflective module, the second optical signal reflected by the reflective surface 332 of the reflective module can reach the curved region 202 of the transmission waveguide 201. The optical power output from the optical output port 212 is detected by a photoelectric detector (PD). In this embodiment, the optical power output from the optical output port 212 is used as the target optical power.

[0093] In order to achieve the purpose of reducing the loss of the optical waveguide device, the target optical power shown in this embodiment is greater than the preset power value. The preset power value is explained below:

[0094] When the optical waveguide device is not provided with a reflection module, the first optical signal emitted from the output surface 331 is an optical signal that is completely lost in the transmission waveguide 201. Then, when the first optical signal is completely lost, the photodetector is used to detect the magnitude of the optical power output by the optical output port 212. At this time, the detected optical power is the preset power value.

[0095] The optical waveguide device shown in this embodiment includes a reflective module 220. The second optical signal reflected by the reflective surface 332 of the reflective module 220 can be recoupled into the transmission waveguide 201, effectively avoiding loss of the second optical signal. Since the second optical signal can be retransmitted to the optical output port 212, it can be seen that the target optical power detected by the photodetector at the optical output port 212 is greater than the preset power value.

[0096] For example, when the optical waveguide device is not provided with a reflection module, the optical power of the optical signal input from the optical input port 211 is PN, and the optical power of the first optical signal emitted from the output surface 331 is PM. Since the first optical signal emitted from the output surface 331 is completely lost, the output optical power obtained by detecting the magnitude of the optical power output from the optical output port 212 by the photodetector is a preset power value, and the preset power value P1 = PN-PM.

[0097] When the optical waveguide device includes a reflective module 220, the optical power of the optical signal input from the optical input port 211 is PN, the optical power of the first optical signal output from the output surface 331 is PM, and the optical power of the second optical signal obtained through the output surface 331 is PM1. It can be seen that the optical power lost through the output surface 331 is PM2 = PM - PM1. Then, by detecting the optical power output from the optical output port 212 using the photodetector, the target optical power P2 = PN - PM2 = PN - PM - PM1 is obtained. It can be seen that P2 is greater than P1.

[0098] It can be seen that, compared with the existing solution without a reflective module, the optical waveguide device shown in this embodiment can effectively reduce the optical power loss of the optical signal transmitted by the transmission waveguide 201 .

[0099] Next, the specific configuration of the reflection module 220 is described:

[0100] The following describes an optional structure of the reflective module 220 shown in this embodiment. Based on the structure of the reflective module 220 shown in this embodiment, the reflective module 220 has the reflective performance of the first optical signal:

[0101] Structure 1

[0102] The reflective module 220 shown in this embodiment is made of a metal material for illustrative purposes. This embodiment does not limit the metal material, as long as the reflective module 220 made of a metal material has the reflective performance to reflect the first optical signal. For example, the metal material can be gold (Au), silver (Ag), copper (Cu), aluminum (Al), or tin (TiN). For another example, the metal material shown in this embodiment can also be an alloy material.

[0103] This embodiment is illustratively described by taking the reflection module 220 as including a metal part. In other examples, the reflection module 220 includes multiple reflection sub-modules, each of which is the metal part shown above, and multiple reflection sub-modules are arranged to form the reflection module 220.

[0104] This example does not limit the specific shape of the reflection module 220. For example, along the second direction 320, the cross section of the reflection module 220 is an arc or rectangular structure. Figure 3 As shown in the figure, the cross section of the reflection module 220 along the second direction is an arc-shaped example.

[0105] When the reflection module 220 is a metal part, the reflection module 220 is connected to the controller, and the controller can send a modulated current to the metal part. After the reflection module 220 receives the modulated current, the reflection module 220 is equivalent to a resistor under the action of the modulated current, thereby causing the reflection module 220 to generate heat. The reflection module 220 in the heating state can modulate the refractive index of the transmission waveguide 201.

[0106] It can be seen that in order to modulate the refractive index of the transmission waveguide 201, the controller adjusts the voltage of the modulation current to achieve the purpose of modulating the refractive index of the transmission waveguide 201, wherein the voltage of the modulation current is positively correlated with the change in the refractive index of the transmission waveguide 201, that is, the greater the voltage of the modulation current, the greater the change in the refractive index of the transmission waveguide 201, and similarly, the smaller the voltage of the modulation current, the smaller the change in the refractive index of the transmission waveguide 201.

[0107] Structure 2

[0108] The reflection module 220 shown in this example includes multiple reflection sub-modules. Specifically, the reflection module 220 shown in this example is a grating. This embodiment does not limit the type of the grating, as long as the grating has the ability to reflect the first optical signal. For example, this embodiment uses the grating formed by the multiple reflection sub-modules as a Bragg grating as an example for exemplary description:

[0109] The following combination Figure 4 The structure of the reflection module 220 shown in this example is described as follows:

[0110] The reflective module 220 shown in this embodiment includes a reflective body 401 made of optical material, and a plurality of reflective sub-modules 402 are formed on the reflective body 401 by etching.

[0111] The optical material shown in this example may be lithium niobate (LiNbO3), hafnium dioxide (HfO2), silicon dioxide (SiO2), titanium dioxide (TiO2), silicon nitride (Si3N4), silicon carbide (SiC), germanium (Ge), silicon (Si), or aluminum nitride (AlN), etc.

[0112] It can be seen that the multiple reflective sub-modules included in the reflective module 220 shown in this example are arranged in sequence. Along the second direction 320, the cross-section of each reflective sub-module is an arc-shaped or rectangular structure. This example uses the cross-section of the reflective sub-module as an example for illustrative explanation.

[0113] This embodiment does not limit the number of reflective submodules included in the reflective module 220. The following describes the spacing between any two adjacent reflective submodules:

[0114] The following describes the size of the interval between any two adjacent reflection submodules in conjunction with Formula 1:

[0115] Formula 1:

[0116] Wherein, λ in Formula 1 is the vacuum wavelength, n is the refractive index of the reflective submodule, θ is the propagation angle of the first optical signal in the transmission submodule relative to normal incidence, and Λ is the interval between any two adjacent reflective submodules.

[0117] Optionally, air is provided between any two adjacent reflective submodules included in the reflective module 220 shown in this example. Furthermore, optionally, the optical waveguide device shown in this embodiment further includes a second medium disposed between any two adjacent reflective submodules included in the reflective module 220. The refractive index of the second medium is lower than the refractive index of the curved region, and / or the refractive index of the second medium is lower than the refractive index of the reflective submodule. This embodiment uses the example where the refractive index of the second medium is lower than the refractive index of the curved region and the refractive index of the second medium is lower than the refractive index of the reflective submodule.

[0118] Structure 3

[0119] The reflection module 220 shown in this example includes multiple reflection sub-modules, which are arranged in a discrete manner to form the reflection module 220. For the description of the material and cross-section of the reflection sub-module in this embodiment, please refer to the above structure 2, and the details will not be repeated.

[0120] The reflective module included in the optical waveguide device of this embodiment can recouple a portion of the optical power lost in the bend region of the optical waveguide back into the optical waveguide, thereby reducing losses in the optical waveguide. As can be seen, the chip of this embodiment can reduce bending losses in the optical waveguide device without increasing the bending radius of the optical waveguide device, effectively increasing the number of optical waveguide devices integrated in the chip and ensuring that the multiple optical waveguide devices integrated in the chip can be arranged in a more compact manner, thereby effectively improving the chip's integration density and, in turn, enhancing the performance of the optical communication system.

[0121] Furthermore, this embodiment shows that in order to reduce the bending loss of the optical waveguide device, there is no need to perform high-precision processing on the optical waveguide circuit. Only a reflection module is required to achieve the purpose of reducing the bending loss of the optical waveguide device, thereby reducing the difficulty of processing the optical waveguide device and improving the manufacturing efficiency of the optical waveguide device.

[0122] Example 2

[0123] This embodiment takes the optical waveguide device as a non-resonant waveguide device as an example. Specifically, this embodiment takes the optical waveguide device as a transmission waveguide as an example for exemplary description. Figure 5 As shown, Figure 5 This is an example diagram of the structure of the second embodiment of the optical waveguide device provided in this application.

[0124] Depend on Figure 5 As shown, the optical waveguide device 200 shown in this embodiment includes an optical waveguide circuit integrated on a substrate. Specifically, the optical waveguide circuit shown in this embodiment includes a first transmission waveguide 510 and a second transmission waveguide 520 for transmitting optical signals. For a detailed description of the substrate, please refer to the first embodiment and will not be repeated in this embodiment. For a detailed description of the first transmission waveguide 510 and the second transmission waveguide 520, please refer to the first embodiment and will not be repeated in this embodiment. The positional relationship between the first transmission waveguide and the second transmission waveguide 520 shown in this embodiment is described below:

[0125] As shown in this embodiment, on the surface of the substrate, the first bending area of the first transmission waveguide 510 and the second bending area of the second transmission waveguide 520 are close to each other. For the description of the first bending area and the second bending area, please refer to the description of the bending area shown in Example 1, which will not be repeated in this embodiment.

[0126] The first emission surface 511 of the first curved area and the second emission surface 521 of the second curved area shown in this embodiment face each other along the second direction. For a detailed description of the second direction, please refer to the first embodiment, which will not be described in detail in this embodiment.

[0127] The optical waveguide device shown in this embodiment includes a reflective module located between the first exit surface 511 of the first transmission waveguide 510 and the second exit surface 521 of the second transmission waveguide 520. Specifically, the transmitting module shown in this embodiment includes a first reflective surface 531 and a second reflective surface 532, which are located on either side of the reflective module. Furthermore, along the second direction, the first exit surface 511 and the first reflective surface 531 face each other, thereby ensuring that the first optical signal emitted by the first exit surface 511 reaches the first reflective surface 531. The first reflective surface 531 can then transmit the reflected second optical signal toward the first exit surface 511. Similarly, along the second direction, the second emitting surface 521 and the second reflecting surface 532 face each other, thereby ensuring that the first light signal emitted by the second reflecting surface 532 can reach the second reflecting surface 532, and the second reflecting surface 532 can then transmit the reflected second light signal to the second emitting surface 521. For a description of the function and structure of the first reflecting surface 531 and the second reflecting surface 532 shown in this embodiment, please refer to the description of the reflecting module in Example 1, and the details will not be repeated here.

[0128] As can be seen, the optical waveguide device shown in this embodiment includes a reflective module. This reflective module can recouple a portion of the optical power lost by the first transmission waveguide 510 through the first bend region back to the first transmission waveguide 510. The reflective module can also recouple a portion of the optical power lost by the second transmission waveguide 520 through the second bend region back to the second transmission waveguide 520, thereby reducing the loss of the first transmission waveguide 510 and the second transmission waveguide 520. As can be seen, the chip shown in this embodiment can reduce the bending loss of the optical waveguide device without increasing the bending radius of the first transmission waveguide 510 and the second transmission waveguide 520. This effectively increases the compactness of the arrangement of the multiple optical waveguide devices integrated in the chip, thereby effectively improving the chip's integration density and thereby improving the performance of the optical communication system.

[0129] This embodiment shows that the bending loss of an optical waveguide device can be reduced without high-precision processing of the optical waveguide circuit. Only a reflection module is required to achieve the purpose of reducing the bending loss of the optical waveguide device. This reduces the difficulty of processing the optical waveguide device and improves the manufacturing efficiency of the optical waveguide device.

[0130] In this embodiment, the same reflective module is used between the curved areas of two adjacent transmission waveguides to reduce optical power loss, thereby reducing the number of devices integrated on the substrate, thereby reducing the difficulty of chip packaging and improving the efficiency of chip packaging.

[0131] In this embodiment, the reflective module located between the first transmission waveguide 510 and the second transmission waveguide 520 can block the coupling between the first transmission waveguide 510 and the second transmission waveguide 520, thereby avoiding interference between the optical signal transmitted by the first transmission waveguide 510 and the optical signal transmitted by the second transmission waveguide 520, thereby further improving the integration of the chip.

[0132] In the first and second embodiments, the optical waveguide device is a non-resonant waveguide device, and the non-resonant waveguide device is a transmission waveguide. In other examples, the non-resonant waveguide device can also be a coupler, a delay device, a Mark-Zehnder modulator, or an arrayed waveguide grating, etc., which is not specifically limited in this application. As long as a reflection module is provided at a position facing the curved area of the optical waveguide device to ensure that the first optical signal emitted through the reflection surface of the curved area can reach the reflection surface of the reflection module, and the second optical signal emitted from the reflection surface can reach the output surface, the bending loss of the optical waveguide device can be reduced.

[0133] For example, if the optical waveguide device is a delay device, the delay device is composed of an optical waveguide structure with a gradually changing curvature, for example, the optical waveguide structure is a multi-ring structure. It can be seen that the radius of each of the multi-ring structures included in the delay device increases from the inside to the outside of the delay device, that is, the inner ring of the delay device is arranged with an optical waveguide structure with a smaller radius, and the outer ring of the delay device is arranged with an optical waveguide structure with a larger radius. In this embodiment, one or more reflection modules can be set between any two adjacent circles of optical waveguide structures. For example, the reflection module can be set between any two adjacent circles of optical waveguide structures. The reflection module can reduce the loss of the optical signal transmitted by the delay device and can also isolate the two adjacent circles of optical waveguide structures to avoid interference. It can be seen that under the same loss situation, the delay device shown in this embodiment can be set with an optical waveguide structure with more circles, thereby increasing the number of circles included in the delay device to achieve the purpose of large delay and low loss.

[0134] Example 3

[0135] This embodiment takes the optical waveguide device as a resonant waveguide device as an example. Specifically, this embodiment takes the optical waveguide circuit included in the optical waveguide device as a single waveguide microring resonant cavity as an example for illustrative description. Figure 6 As shown, Figure 6 This is an example diagram of the structure of the third embodiment of the optical waveguide device provided in this application.

[0136] Depend on Figure 6As shown, the optical waveguide device 600 shown in this embodiment includes an optical waveguide circuit integrated on a substrate. Specifically, the optical waveguide circuit shown in this embodiment includes a coupling waveguide 601 and a microring resonant cavity waveguide 602. The microring resonant cavity waveguide includes a bending region 603 and a coupling region 604.

[0137] Figure 6 Taking the coupling waveguide 601 as an example, the position of the circular structure close to the coupling waveguide 601 is the coupling region 601, and the position of the circular structure away from the coupling waveguide 601 is the bending region 603. For a detailed description of the bending region, please refer to Example 1 or Example 2, and no further details will be given.

[0138] The optical waveguide device 600 shown in this embodiment includes a reflection module 610. For the description of the reflection module 610, please refer to the description of the first embodiment. The optical waveguide device shown in this embodiment may include one or more reflection modules 610, such as Figure 7 As shown, Figure 7 This is a structural example diagram of the fourth embodiment of the optical waveguide device provided in this application. It can be seen that the optical waveguide device 600 in this example includes multiple reflection modules 701.

[0139] The reflection module provided in this embodiment can be Figure 6 As shown, the reflection surface of the reflection module 610 can face the entire curved region 603 of the micro-ring resonator waveguide 602. Figure 7 As shown, the reflective surface of the reflective module 701 may face the partially curved region 603 of the micro-ring resonator waveguide 602. For the description of the facing positions, please refer to the first embodiment, and the details will not be repeated here.

[0140] The coupled waveguide 601 shown in this embodiment includes an optical input port 605 and an optical output port 606. Figure 6 Taking the figure as an example, the function of the reflection module 610 is described as follows:

[0141] First, an optical signal is input from the optical input port 605 to the coupling waveguide 601. When the optical signal is transmitted through the coupling waveguide 601 to a position close to the coupling region 604, the coupled optical signal can be coupled into the coupling region 604, wherein the coupled optical signal is part or all of the optical signal input through the optical input port 605.

[0142] Secondly, based on the interference effect of light, when the optical path of the coupled optical signal traveling back and forth in the microring resonant cavity waveguide 602 is equal to an integer multiple of the wavelength of the coupled optical signal, a resonance phenomenon occurs, thereby storing the energy of the optical signal in the microring resonant cavity waveguide 602. Moreover, during the transmission of the coupled optical signal in the microring resonant cavity waveguide 602, a first optical signal will be emitted from the exit surface of the curved region 603 of the microring resonant cavity waveguide 602. The first optical signal is a part of the coupled optical signal.

[0143] Again, the first optical signal emitted from the curved region 603 of the microring resonator waveguide 602 can successfully reach the reflecting surface of the reflecting module 610 having reflective performance, and the reflecting surface is used to reflect the second optical signal toward the exit surface of the curved region 603 according to the first optical signal, wherein the second optical signal is a part of the first optical signal.

[0144] If the optical waveguide device does not include the reflective module 610, the first optical signal emitted from the exit surface of the curved region 603 is an optical signal completely lost by the microring resonator waveguide 602. However, in the present embodiment, when the optical waveguide device includes the reflective module 610, the reflective module 610 can reflect the second optical signal toward the exit surface of the curved region 603 when the first optical signal reaches the reflective surface of the reflective module 610, so that the second optical signal can successfully reach the exit surface. Therefore, the second optical signal can be re-coupled into the microring resonator waveguide 602 via the exit surface of the curved region 603, effectively reducing the loss of the optical signal transmitted by the microring resonator waveguide 602.

[0145] For the description of the distance between the exit surface of the curved area 603 and the reflection surface of the reflection module 610 in this embodiment, please refer to the first embodiment for details, which will not be repeated in this embodiment.

[0146] It should be noted that this embodiment does not limit the shape of the microring resonant cavity waveguide. As long as the coupled optical signal is coupled into the microring resonant cavity waveguide and resonance occurs, it is sufficient. For example, Figure 8 As shown, Figure 8 This is a structural example diagram of the fifth embodiment of the optical waveguide device provided in this application. Figure 8 The optical waveguide device 800 shown includes a coupling waveguide 801, a micro-ring resonant cavity waveguide 802 and a reflection module 803. The description of the coupling waveguide 801 and the micro-ring resonant cavity waveguide 802 can be found in Figure 6 or Figure 7 As shown, the specific details are not repeated in this embodiment. Figure 8 The example shown is illustrated by taking the micro-ring resonator waveguide 802 as an elliptical shape as an example.

[0147] Another example Figure 9As shown, Figure 9 This is a structural example diagram of the sixth embodiment of the optical waveguide device provided in this application. Figure 9 The optical waveguide device 900 shown includes a coupling waveguide 901, a micro-ring resonant cavity waveguide 902 and a reflection module 903. The description of the coupling waveguide 901 and the micro-ring resonant cavity waveguide 902 can be found in Figure 6 or Figure 7 As shown, the specific details are not repeated in this embodiment. Figure 9 The example shown is exemplified by taking the racetrack-shaped microring resonator waveguide 902 as an example.

[0148] This embodiment does not limit the shape of the micro-ring resonator waveguide included in the optical waveguide device and the number of the reflection modules included.

[0149] The reflective module included in the optical waveguide device shown in this embodiment can recouple a portion of the optical power lost by the microring resonator waveguide through the curved region back into the microring resonator waveguide, thereby reducing the loss of the microring resonator waveguide. As can be seen, the chip shown in this embodiment can reduce the bending loss of the microring resonator waveguide without increasing the bending radius of the microring resonator waveguide, effectively improving the compact arrangement of the multiple optical waveguide devices integrated in the chip, thereby effectively increasing the chip's integration density and, in turn, improving the performance of the optical communication system.

[0150] Furthermore, this embodiment shows that in order to reduce the bending loss of the microring resonator waveguide, there is no need to perform high-precision processing on the optical waveguide circuit. Only a reflection module needs to be provided to achieve the purpose of reducing the bending loss of the optical waveguide device, thereby reducing the difficulty of processing the optical waveguide device and improving the manufacturing efficiency of the optical waveguide device.

[0151] Because the bending radius of the microring resonator waveguide and the quality factor of the optical waveguide device are negatively correlated, that is, the larger the bending radius of the microring resonator waveguide, the smaller the quality factor of the optical waveguide device. Similarly, the smaller the bending radius of the microring resonator waveguide, the larger the quality factor of the optical waveguide device. Compared to existing optical waveguide devices, the optical waveguide device of this embodiment has a greater degree of curvature and a smaller bending radius under the same bending loss. This ensures that the optical waveguide device of this embodiment has a higher quality factor, thereby improving the communication performance of the chip.

[0152] Example 4

[0153] Example 3 is illustrated by taking an optical waveguide device including a coupled waveguide and a microring resonant cavity waveguide as an example. This embodiment is illustrated by taking an optical waveguide device including two coupled waveguides as an example. Figure 10 As shown, Figure 10 This is a structural example diagram of the seventh embodiment of the optical waveguide device provided in this application.

[0154] Depend on Figure 10 As shown, the optical waveguide device 1000 shown in this embodiment includes an optical waveguide circuit integrated on a substrate. Specifically, the optical waveguide circuit shown in this embodiment includes a first coupling waveguide 1001, a second coupling waveguide 1002, and a microring resonator waveguide 1003. On the surface of the substrate, the first coupling waveguide 1001 and the second coupling waveguide 1002 are located on both sides of the microring resonator waveguide 1003, that is, the microring resonator waveguide 1003 is located between the first coupling waveguide 1001 and the second coupling waveguide 1002.

[0155] The microring resonator waveguide 1003 shown in this embodiment includes a first bending region 1004, a first coupling region 1005, a second bending region 1009, and a second coupling region 1006. The first bending region 1004, the first coupling region 1005, the second bending region 1009, and the second coupling region 1006 are sequentially connected to form a closed circle shown in the microring resonator waveguide 1003.

[0156] For the description of the positions of the first coupling region 1005 and the first coupling waveguide 1001, as well as the description of the positions of the second coupling region 1006 and the second coupling waveguide 1002, please refer to the description of the positions of the coupling regions and the coupling waveguides shown in Example 3, and the specific details are not repeated in this embodiment.

[0157] The optical waveguide device 1000 shown in this embodiment includes a first reflective module 1007 and a second reflective module 1008. Along the second direction, the first curved region 1004 and the first reflective module 1007 face each other, and the second curved region 1009 and the second reflective module 1008 face each other. For a description of the facing positions, refer to the description of the structure in which the reflective modules and the curved regions face each other in the first embodiment, and the details are omitted here. It should be noted that the number of reflective modules shown in this embodiment is optional and illustrative; as long as the reflective modules face at least part of the curved regions along the second direction, they are sufficient.

[0158] The first coupling waveguide 1001 shown in this embodiment includes an optical input port 1011 and a first optical output port 1012, and the second coupling waveguide 1002 includes a second optical output port 1013. The functions of the first reflection module 1007 and the second reflection module 1008 are described below:

[0159] First, an optical signal is input from the optical input port 1011 to the first coupling waveguide 1001. When the optical signal is transmitted through the first coupling waveguide 1001 to a position close to the first coupling region 1005, the coupled optical signal can be coupled into the first coupling region 1005, wherein the coupled optical signal is part or all of the optical signal input through the optical input port 1011.

[0160] Secondly, based on the interference effect of light, when the optical path of the coupled optical signal traveling back and forth in the microring resonant cavity waveguide 1003 is equal to an integer multiple of the wavelength of the coupled optical signal, a resonance phenomenon occurs, thereby storing the energy of the optical signal in the microring resonant cavity waveguide 1003. Moreover, during the transmission of the coupled optical signal in the microring resonant cavity waveguide 1003, the first optical signal is emitted from the first curved region 1004 and the second curved region 1009 of the microring resonant cavity waveguide 1003. The first optical signals emitted from the first curved region 1004 and the second curved region 1009 are respectively part of the coupled optical signal.

[0161] Again, the first optical signal emitted from the first curved region 1004 of the microring resonator waveguide 1003 can successfully reach the reflective surface of the first reflective module 1007, which has reflective properties. The reflective surface is used to reflect a second optical signal toward the exit surface of the first curved region 1004 based on the first optical signal. The second optical signal is a portion of the first optical signal emitted from the first curved region 1004. Similarly, the first optical signal emitted from the second curved region 1009 of the microring resonator waveguide 1003 can successfully reach the reflective surface of the second reflective module 1008, which has reflective properties. The reflective surface is used to reflect a second optical signal toward the exit surface of the second curved region 1009 based on the first optical signal. The second optical signal is a portion of the first optical signal emitted from the second curved region 1009.

[0162] It can be seen that if the optical waveguide device is not provided with the first reflective module 1007 and the second reflective module 1008, the first optical signal emitted from the exit surface of the first curved region 1004 and the first optical signal emitted from the exit surface of the second curved region 1009 are optical signals completely lost by the microring resonator waveguide 1003. However, in this embodiment, taking the first reflective module 1007 as an example, the first reflective module 1007 can reflect the second optical signal toward the exit surface of the first curved region 1004 when the first optical signal reaches the reflective surface of the first reflective module 1007, so that the second optical signal can successfully reach the exit surface. It can be seen that the second optical signal can be re-coupled into the microring resonator waveguide 1003 via the exit surface of the first curved region 1004, effectively reducing the loss of the optical signal transmitted by the microring resonator waveguide 1003. For the description of the function of the second reflective module 1008, please refer to the description of the function of the first reflective module 1007, and the details are not repeated here.

[0163] The microring resonator waveguide 1003 couples a first output optical signal to the first coupling waveguide 1001 via the first coupling region 1005, and the first output optical signal is output via the first optical output port 1012 of the first coupling waveguide 1001. Also, the microring resonator waveguide 1003 couples a second output optical signal to the second coupling waveguide 1002 via the second coupling region 1006, and the second output optical signal is output via the second optical output port 1013 of the second coupling waveguide 1002.

[0164] For the description of the distance between the exit surface of the first curved area 1004 and the reflection surface of the first reflection module 1007, and the description of the distance between the exit surface of the second curved area 1009 and the reflection surface of the second reflection module 1008 in this embodiment, please refer to the first embodiment for details, and the specific details are not repeated in this embodiment.

[0165] It should be noted that this embodiment does not limit the shape of the microring resonant cavity waveguide. As long as the coupled optical signal is coupled into the microring resonant cavity waveguide and resonance occurs, it is sufficient. For example, Figure 11 As shown, Figure 11 This is an example diagram of the structure of the eighth embodiment of the optical waveguide device provided in this application. Figure 11 For a detailed description of the structure of the optical waveguide device 1100, see Figure 10 The structure of the optical waveguide device shown in FIG. Figure 11 The optical waveguide device 1100 shown is relatively Figure 10 The difference of the optical waveguide device 1000 shown is that Figure 11 The micro-ring resonator waveguide 1101 shown is elliptical for illustrative purposes.

[0166] Another example Figure 12 As shown, Figure 12 This is a structural example diagram of the ninth embodiment of the optical waveguide device provided in this application. Figure 12 For a detailed description of the structure of the optical waveguide device 1200, see Figure 10 The structure of the optical waveguide device shown in FIG. Figure 12 The optical waveguide device 1200 shown is relatively Figure 10 The difference of the optical waveguide device 1000 shown is that Figure 12 The micro-ring resonator waveguide 1201 shown is a racetrack shape for illustrative purposes.

[0167] This embodiment does not limit the shape of the micro-ring resonator waveguide included in the optical waveguide device and the number of the reflection modules included.

[0168] The reflective module included in the optical waveguide device shown in this embodiment can recouple a portion of the optical power lost by the microring resonator waveguide through the curved region back into the microring resonator waveguide, thereby reducing the loss of the microring resonator waveguide. As can be seen, the chip shown in this embodiment can reduce the bending loss of the microring resonator waveguide without increasing the bending radius of the microring resonator waveguide, effectively improving the compact arrangement of the multiple optical waveguide devices integrated in the chip, thereby effectively increasing the chip's integration density and, in turn, improving the performance of the optical communication system.

[0169] Furthermore, this embodiment shows that in order to reduce the bending loss of the microring resonator waveguide, there is no need to perform high-precision processing on the optical waveguide circuit. Only a reflection module needs to be provided to achieve the purpose of reducing the bending loss of the optical waveguide device, thereby reducing the difficulty of processing the optical waveguide device and improving the manufacturing efficiency of the optical waveguide device.

[0170] Example 5

[0171] The optical waveguide device shown in the third and fourth embodiments is described by taking a micro-ring resonant cavity waveguide as an example. The optical waveguide device shown in this embodiment includes multiple micro-ring resonant cavity waveguides. For detailed description, please refer to Figure 13 As shown, Figure 13 This is a structural example diagram of the tenth embodiment of the optical waveguide device provided in this application.

[0172] The optical waveguide device 1300 shown in this embodiment includes a coupling waveguide 1301, a first microring resonant cavity waveguide 1302, and a second microring resonant cavity waveguide 1303. For the description of the coupling waveguide 1301, the first microring resonant cavity waveguide 1302, and the second microring resonant cavity waveguide 1303, please refer to the description of the coupling waveguide and the microring resonant cavity waveguide shown in the third embodiment, and the details are not repeated in this embodiment.

[0173] Depend on Figure 13 As shown, the first micro-ring resonant cavity waveguide 1302 and the second micro-ring resonant cavity waveguide 1303 shown in this embodiment are located on the same side of the coupling waveguide 1301 for illustrative description.

[0174] For the description of the reflection module included in the optical waveguide device shown in this embodiment, please refer to the third and fourth embodiments, and the specific details are not repeated in this embodiment. The third curved region 1304 of the first microring resonator waveguide 1302 and the fourth curved region 1305 of the second microring resonator waveguide 1303 shown in this embodiment face each other along the second aspect. In this embodiment, a reflection module 1306 is provided between the third curved region 1304 and the fourth curved region 1305.

[0175] The coupled waveguide 1301 shown in this embodiment includes an optical input port 1307 and an optical output port 1308. The function of the reflective module 1306 is different from that of the third embodiment in that the transmitting module shown in this embodiment has a first reflective surface and a second reflective surface. For a description of the structures of the first reflective surface and the second reflective surface, see Figure 5 As shown, the specific details are not repeated in this embodiment.

[0176] The first reflective surface faces the third curved region 1304 of the first microring resonator waveguide 1302, and the second reflective surface faces the fourth curved region 1305 of the second microring resonator waveguide 1303. Therefore, based on the interference effect of light, the coupling waveguide 1301 can couple the first coupled optical signal into the first microring resonator waveguide 1302. The first optical signal is then emitted from the exit surface of the third curved region 1304 of the first microring resonator waveguide 1302. This first optical signal is a portion of the first coupled optical signal. The first optical signal emitted from the third curved region 1304 of the first microring resonator waveguide 1302 successfully reaches the first reflective surface, which is configured to reflect the second optical signal toward the exit surface of the third curved region 1304 based on the first optical signal. The second optical signal is a portion of the first optical signal. Similarly, the coupling waveguide 1301 can couple the second coupled optical signal into the second microring resonator waveguide 1303. The first optical signal will be emitted from the exit surface of the fourth curved region 1305 of the second microring resonator waveguide 1303. The first optical signal is a portion of the second coupled optical signal. The first optical signal emitted from the fourth curved region 1305 of the second microring resonator waveguide 1303 can successfully reach the second reflective surface having reflective properties. The second reflective surface is used to reflect the second optical signal toward the exit surface of the fourth curved region 1305 based on the first optical signal. The second optical signal is a portion of the first optical signal. The reflection module shown in this embodiment can effectively reduce the loss of optical signals transmitted by the first microring resonator waveguide 1302 and the second microring resonator waveguide 1303.

[0177] Figure 13 The circular structure of each micro-ring resonant cavity waveguide is used as an example for illustrative description. It should be clear that this embodiment does not limit the shape of the micro-ring resonant cavity waveguide. As long as the coupled optical signal is coupled into the micro-ring resonant cavity waveguide and resonance occurs, it is sufficient. For example, Figure 14 As shown, Figure 14 This is a structural example diagram of the eleventh embodiment of the optical waveguide device provided in this application. Figure 14 For a detailed description of the structure of the optical waveguide device 1400, see Figure 13 The structure of the optical waveguide device shown in FIG. Figure 14 The optical waveguide device 1400 shown is relatively Figure 13 The difference of the optical waveguide device 1300 shown is that Figure 14 The micro-ring resonator waveguide 1401 shown is elliptical for illustrative purposes.

[0178] Another example Figure 15 As shown, Figure 15This is a structural example diagram of the twelfth embodiment of the optical waveguide device provided in this application. Figure 15 For a detailed description of the structure of the optical waveguide device 1500, see Figure 13 The structure of the optical waveguide device shown in FIG. Figure 15 The optical waveguide device 1500 shown is relatively Figure 13 The difference of the optical waveguide device 1300 shown is that Figure 15 The micro-ring resonator waveguide 1501 shown is a racetrack shape for illustrative purposes.

[0179] This embodiment does not limit the shape of the micro-ring resonant cavity waveguide included in the optical waveguide device and the number of the reflective modules included. This embodiment does not limit the number of micro-ring resonant cavity waveguides included in the optical waveguide device. As long as any two adjacent micro-ring resonant cavity waveguides, such as Figures 13 to 15 Any of the shown ones will do.

[0180] It can be seen that the use of a reflective module included in the optical waveguide device shown in this embodiment can simultaneously reduce the loss of optical signals transmitted by the first microring resonator waveguide 1302 and the second microring resonator waveguide 1303, effectively improving the ability of multiple optical waveguide devices integrated in the chip to be arranged in a more compact manner, thereby effectively improving the integration of the chip, thereby improving the performance of the optical communication system, and reducing the difficulty of processing the optical waveguide device, thereby improving the manufacturing efficiency of the optical waveguide device.

[0181] Moreover, as shown in this embodiment, the reflection module located between the first microring resonant cavity waveguide and the second microring resonant cavity waveguide can block the coupling between the first microring resonant cavity waveguide and the second microring resonant cavity waveguide, thereby avoiding mutual interference between the first microring resonant cavity waveguide and the second microring resonant cavity waveguide, and further improving the integration of the chip.

[0182] Example 6

[0183] The difference between this embodiment and the fifth embodiment is that the optical waveguide device shown in this embodiment includes multiple coupled waveguides, such as Figure 16 As shown, Figure 16 This is a structural diagram illustrating the thirteenth embodiment of the optical waveguide device provided in this application. The optical waveguide device 1600 shown in this embodiment includes a first coupling waveguide 1601 and a second coupling waveguide 1602, as well as multiple microring resonant cavity waveguides located between the first coupling waveguide 1601 and the second coupling waveguide 1602. For a description of the multiple microring resonant cavity waveguides, please refer to the fifth embodiment and will not be repeated here. For a detailed description of the optical waveguide device including two coupling waveguides, please refer to the fourth embodiment and will not be repeated here.

[0184] The optical waveguide device shown in this embodiment includes one or more reflection modules. Figure 16 For a detailed description of the reflection module 1603 located between the adjacent first micro-ring resonant cavity waveguide 1604 and the second micro-ring resonant cavity waveguide 1605 , please refer to the fifth embodiment, and no further details are given.

[0185] Figure 16 The circular structure of each micro-ring resonant cavity waveguide is used as an example for illustrative description. This embodiment does not limit the specific shape of the micro-ring resonant cavity waveguide. As long as the coupled optical signal is coupled into the micro-ring resonant cavity waveguide and resonance occurs, it is sufficient. For example, Figure 17 As shown, Figure 17 This is a structural example diagram of the fourteenth embodiment of the optical waveguide device provided in this application. Figure 17 For a detailed description of the structure of the optical waveguide device 1700, see Figure 16 The structure of the optical waveguide device shown in FIG. Figure 17 The optical waveguide device 1700 shown is relatively Figure 16 The difference of the optical waveguide device 1600 shown is that Figure 17 The micro-ring resonator waveguide 1701 shown is elliptical for illustrative purposes.

[0186] Another example Figure 18 As shown, Figure 18 This is a structural example diagram of the fifteenth embodiment of the optical waveguide device provided in this application. Figure 18 For a detailed description of the structure of the optical waveguide device 1800, see Figure 16 The structure of the optical waveguide device shown in FIG. Figure 18 The optical waveguide device 1800 shown is relatively Figure 16 The difference of the optical waveguide device 1600 shown is that Figure 18 The micro-ring resonator waveguide 1801 shown is a racetrack shape for illustrative purposes.

[0187] This embodiment does not limit the shape of the micro-ring resonator waveguide included in the optical waveguide device and the number of the reflection modules included.

[0188] As described above, the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that the technical solutions described in the above embodiments can still be modified, or some of the technical features thereof can be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An optical waveguide device, characterized in that: The optical waveguide device includes an optical waveguide circuit integrated on a substrate, the optical waveguide circuit having at least one curved region, the curved region having an exit surface for emitting a first optical signal, and the optical waveguide device further includes a reflective module, the reflective module being a metal member, the reflective module being configured to modulate a refractive index of the optical waveguide circuit according to a modulation current, the reflective module having a reflective surface; The reflection surface is used to reflect a second light signal toward the exit surface according to the first light signal, where the second light signal is a part of the first light signal.

2. The optical waveguide device according to claim 1, wherein The optical waveguide device further includes a first medium disposed between the emitting surface and the reflecting surface, wherein the refractive index of the first medium is smaller than the refractive index of the curved region.

3. The optical waveguide device according to claim 1 or 2, characterized in that The distance between the exit surface and the reflection surface is negatively correlated with the optical power of the second optical signal.

4. The optical waveguide device according to any one of claims 1 to 3, characterized in that The reflection module includes at least one reflection submodule, and the side surface of each reflection submodule facing the emission surface is the reflection surface.

5. The optical waveguide device according to claim 4, wherein Along a direction parallel to the substrate surface, the cross section of the reflective submodule is arc-shaped or rectangular.

6. The optical waveguide device according to claim 4 or 5, characterized in that The optical waveguide device further includes a second medium. The number of the reflective submodules is multiple, and the second medium is placed between two adjacent reflective submodules. The refractive index of the second medium is smaller than the refractive index of the curved area, and / or the refractive index of the second medium is smaller than the refractive index of the reflective submodule.

7. The optical waveguide device according to any one of claims 1 to 6, characterized in that The optical waveguide circuit has an optical output port. When the second optical signal reaches the output surface, the optical output port outputs an optical signal with a target optical power, and the target optical power is greater than a preset power value.

8. The optical waveguide device according to any one of claims 1 to 7, characterized in that The optical waveguide circuit includes a first transmission waveguide having an optical input port, the bending area and an optical output port. The first transmission waveguide is used to receive the first optical signal via the optical input port, receive the second optical signal via the output surface of the bending area, and output the second optical signal via the optical output port.

9. The optical waveguide device according to claim 8, wherein The optical waveguide circuit further includes a second transmission waveguide, and the reflection module is located between a first exit surface of the first transmission waveguide and a second exit surface of the second transmission waveguide.

10. The optical waveguide device according to any one of claims 1 to 7, characterized in that The optical waveguide circuit includes a coupling waveguide and at least one microring resonant cavity waveguide, and the microring resonant cavity waveguide has the bending region and the coupling region; The coupling waveguide is used to receive the first optical signal, the coupling region is used to couple the first optical signal from the coupling waveguide, and the coupling region is used to output the second optical signal via the coupling waveguide.

11. The optical waveguide device according to any one of claims 1 to 7, characterized in that The optical waveguide circuit includes a first coupling waveguide and a second coupling waveguide, and the optical waveguide circuit further includes at least one microring resonator waveguide located between the first coupling waveguide and the second coupling waveguide, wherein the microring resonator waveguide has the bending region, the first coupling region, and the second coupling region; The first coupling waveguide is used to receive the first optical signal, the first coupling region is used to couple the first optical signal from the first coupling waveguide, the first coupling region is used to output at least part of the second optical signal via the first coupling waveguide, and / or the second coupling region is used to output at least part of the second optical signal via the second coupling waveguide.

12. A chip, characterized in that: The chip includes a substrate and an optical waveguide device integrated on the substrate, wherein the optical waveguide device is as claimed in any one of claims 1 to 11.

13. The chip according to claim 12, characterized in that The reflection module included in the optical waveguide device is a metal part, and the chip also includes a controller, which is connected to the reflection module. The controller is used to input a modulation current to the reflection module, and the reflection module is used to modulate the refractive index of the optical waveguide circuit according to the modulation current.

14. An optical network device, characterized in that: The optical network device comprises the chip according to claim 12 or 13.

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