Gripper device, transport vehicle and transport method

Abstract

The present invention relates to a gripper device, a transport vehicle, and a transport method. The gripper device is provided with: a holding portion that holds an article; a first positioning portion that positions the holding portion in a horizontal direction with respect to the article by contacting the article at two first contact positions on an upper portion of the article; and a second positioning portion that positions the holding portion in a height direction with respect to the article by contacting the article at three second contact positions on the upper portion of the article that are not located on a straight line.

Description

TECHNICAL FIELD

[0001] The present application relates to a gripper device that holds an article, a transport vehicle provided with the gripper device, and a transport method that holds and transports an article. BACKGROUND

[0002] As described in Patent Document 1, a gripper device that supports a storage container is known. The gripper device is provided with a central cone that protrudes downward at a substantially central portion of a lifting table, and a pair of fingers that support the storage container from below. If the gripper device is lowered from above the storage container, the pair of fingers is guided by a flange portion of the storage container, and the central cone is inserted into an insertion hole of the flange portion. Thereby, the gripper device is positioned with respect to the storage container.

[0003] Patent Document 1: Japanese Patent Application Publication No. 2016-163001

[0004] In the above-described conventional gripper device, since positioning is performed by only one central cone, there is a concern that positioning in the height direction is insufficient. In the case where positioning is performed by a central cone having a semispherical outer peripheral surface, it is possible that an offset in the rotational direction centered on the central cone remains. SUMMARY

[0005] The present application describes a gripper device, a transport vehicle, and a transport method that can correctly perform positioning with respect to the horizontal direction and the height direction of an article.

[0006] One embodiment of the present application is a gripper device that holds an article placed on a transfer portion, including: a holding portion that is installed to a lifting portion that can be lifted above the transfer portion, and holds the article; a first positioning portion that is installed to the lifting portion, and performs positioning of the holding portion in the horizontal direction with respect to the article by contacting the article at two first contact positions on an upper portion of the article; and a second positioning portion that is installed to the lifting portion, and performs positioning of the holding portion in the height direction with respect to the article by contacting the article at three second contact positions on the upper portion of the article that are not located on one straight line.

[0007] According to the gripper device, the first positioning portion contacts the article at the two first contact positions on the upper portion of the article. By the contact of the first positioning portion, positioning of the holding portion in the horizontal direction with respect to the article is performed. Also, the second positioning portion contacts the article at the three second contact positions on the upper portion of the article. Since the three second contact positions are not located on one straight line, by the contact of the second positioning portion, positioning of the holding portion in the height direction with respect to the article is performed. In this way, two contact positions related to the horizontal direction, and three contact positions related to the height direction are used, so positioning with respect to the horizontal direction and the height direction of the article can be correctly performed.

[0008] The first positioning portion can also contact the article only at two first contact positions. In the case where the first positioning portion contacts the article at three or more first contact positions, the position of the horizontal-direction holding portion cannot be uniquely determined at two of the three positions and another position, and there is a possibility that a mismatch will occur. That is, a struggle can occur among the three or more first contact positions. If the first contact positions are limited to only two, such a mismatch, i.e., a struggle, can be suppressed.

[0009] The position detection portion provided on the upper surface of the article can also be formed with two tapered guide holes having openings open upward and having inner diameters that decrease as the height of the openings decreases. The positions at which the two guide holes are formed can also be two first contact positions and two second contact positions, and the first positioning portion can also have two convex members that can enter the two guide holes, respectively. In this case, the two first contact positions and the two second contact positions are shared, and thus the number of positioning members can be reduced.

[0010] The second positioning portion can also have at least one pressing member including a horizontal surface portion that contacts the position detection portion provided on the upper surface of the article at at least one second contact position. According to the pressing member including the horizontal surface portion, positioning in the height direction can be accurately and easily performed.

[0011] The second contact position can also be provided at four positions. In this case, positioning in the height direction can be more accurately performed.

[0012] As another embodiment of the present application, a transport cart can also be provided that has any one of the above-described gripper devices and travels along a track provided on a ceiling. According to the transport cart, the article is held in a state where the holding portion is accurately positioned with respect to the article. Therefore, the state of transport of the article can be stabilized, and thus the article can be transported at a high speed.

[0013] Another embodiment of the present application is a conveyance method for holding and conveying an article placed on a transfer section by a gripper device, the gripper device including: a holding section mounted to a lifting section that is capable of lifting above the transfer section and holds the article; a first positioning section for positioning in a horizontal direction with respect to the article; and a second positioning section for positioning in a height direction with respect to the article, the conveyance method including: a lowering step of lowering the lifting section; a first positioning step performed after the lowering step, in which the first positioning section is brought into contact with the article at two first contact positions on an upper portion of the article to position the holding section in the horizontal direction with respect to the article; a second positioning step performed after the lowering step, in which the second positioning section is brought into contact with the article at three second contact positions on the upper portion of the article that are not located on a straight line to position the holding section in the height direction with respect to the article; and a holding step performed after the first positioning step and the second positioning step, in which the article is held by the holding section.

[0014] According to the conveyance method, the same effects as described above can be achieved. That is, since the two positions in the horizontal direction and the three contact positions in the height direction are contacted, positioning in the horizontal direction and the height direction with respect to the article can be accurately performed.

[0015] According to the present application, positioning in the horizontal direction and the height direction with respect to the article can be accurately performed. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 is a diagram showing a brief structure of a conveyance vehicle provided with a gripper device of an embodiment of the present application.

[0017] Figure 2 is a plan view showing the gripper device in Figure 1 .

[0018] Figure 3 is a perspective view showing an article conveyed by the conveyance vehicle system of Figure 1 .

[0019] Figure 4 is a sectional view showing a configuration of the first positioning section.

[0020] Figure 5 is a sectional view showing a configuration of the second positioning section.

[0021] Figure 6 is a diagram showing a configuration of the first positioning section and the held section of the article in the first positioning step.

[0022] Figure 7 is a diagram showing the lifting section nextFigure 6 The diagram shows the state after the state has decreased.

[0023] Figure 8 This indicates that the lifting section is connected. Figure 7 The diagram shows the state where the state has decreased and stopped.

[0024] Figure 9 It means to continue Figure 8 The diagram shows the state after the retaining part moves to the engaging position of the retained part.

[0025] Figure 10 It means to continue Figure 8 The diagram shows the state in which the retaining part and the retained part are locked together to hold the item.

[0026] Figure 11 (a)~ Figure 11 (d) is a diagram showing various variations related to the configuration of the first and second contact positions. Detailed Implementation

[0027] like Figure 1 As shown, in one embodiment, an overhead conveyor 1 travels along a track 100 laid on the ceiling 110 of a cleanroom for manufacturing semiconductor equipment. The overhead conveyor 1 in one embodiment transports FOUPs (Front Opening Unified Pods) 200 containing multiple semiconductor wafers, and transfers the FOUPs 200 relative to a transfer section, i.e., a loading port (transfer section) 300, provided in a processing apparatus for performing various processing on semiconductor wafers. The track 100 is suspended from the ceiling 110 by suspension supports 108. The track 100 has a travel track 101 and a power supply track 102 provided below the travel track 101.

[0028] The overhead conveyor 1 includes a frame unit 2, a travel unit 3a, a power receiving unit 3b, a lateral unit 4, a sorting unit 5, a lifting drive unit 6, a clamping device 10, and a controller 8. The frame unit 2 has a central frame 21, a front frame 22, and a rear frame 23. The front frame 22 extends downward from the front end of the central frame 21 (the front side in the travel direction of the overhead conveyor 1). The rear frame 23 extends downward from the rear end of the central frame 21 (the rear side in the travel direction of the overhead conveyor 1).

[0029] The traveling unit 3a and the power receiving unit 3b are arranged on the upper side of the center frame 21. The traveling unit 3a is attached to the traveling track 101. The power receiving unit 3b receives supply of electric power in a noncontact manner from a high-frequency current line laid along the power feeding track 102, for example. The traveling unit 3a travels along the track 100 by the supply of electric power to the power receiving unit 3b. The lateral unit 4 is arranged on the lower side of the center frame 21. The lateral unit 4 moves the aligner unit 5, the lift drive unit 6, and the gripper device 10 in the lateral direction (the side direction of the traveling direction of the overhead carrier 1). The aligner unit 5 is arranged on the lower side of the lateral unit 4. The aligner unit 5 rotates the lift drive unit 6 and the gripper device 10 in the horizontal plane.

[0030] The lift drive unit 6 is arranged on the lower side of the aligner unit 5. The lift drive unit 6 lifts and lowers the gripper device 10. The gripper device 10 is arranged on the lower side of the lift drive unit 6. The gripper device 10 holds the flange portion 202 of the FOUP 200. The controller 8 is arranged on the front frame 22 and the rear frame 23. The controller 8 is an electronic control unit constituted by a CPU, a ROM, a RAM, and the like. The controller 8 controls each portion of the overhead carrier 1.

[0031] Four fall-down preventing portions 26 and two cover fall-down preventing portions 27 are attached to the front frame 22 and the rear frame 23 to prevent the FOUP 200 from falling down from the frame unit 2. The fall-down preventing portions 26 are attached to the lower end of the front frame 22 and the lower end of the rear frame 23 at positions of the four corners of the frame unit 2, respectively, and oppose the front end and the rear end of the bottom surface of the FOUP 200, respectively. The cover fall-down preventing portions 27 are attached to the lower portions of the front frame 22 and the rear frame 23, respectively, and oppose the FOUP 200 from the cover 205 side (see FIG. 2). The fall-down preventing portions 26 and the cover fall-down preventing portions 27 described above are opened and closed at appropriate timings in conjunction with the transfer of the FOUP 200. Figure 3

[0032] ​The overhead carrier 1 thus configured as an example operates as follows. In the case of transferring the FOUP 200 from the load port 300 to the overhead carrier 1, the overhead carrier 1 holding the FOUP 200 stops above the load port 300. In the case where the horizontal position of the gripper device 10 is deviated from the position directly above the load port 300, the horizontal position and the angle of the holding unit are fine-adjusted for each of the lift drive units 6 by driving the lateral unit 4 and the trimmer unit 5. Next, the lift drive units 6 lower the gripper device 10, and the gripper device 10 holds the flange portion 202 of the FOUP 200 placed on the load port 300. Next, the lift drive units 6 raise the gripper device 10 to the raised end, and the FOUP 200 is arranged between the front frame 22 and the rear frame 23. The drop prevention portion 26 and the lid drop prevention portion 27 are closed. Next, the overhead carrier 1 holding the FOUP 200 starts running.

[0033] On the other hand, in the case of transferring the FOUP 200 from the overhead carrier 1 to the load port 300, the overhead carrier 1 holding the FOUP 200 stops above the load port 300. The drop prevention portion 26 and the lid drop prevention portion 27 are opened. In the case where the horizontal position of the gripper device 10 (FOUP 200) is deviated from the position directly above the load port 300, the horizontal position and the angle of the holding unit are fine-adjusted for each of the lift drive units 6 by driving the lateral unit 4 and the trimmer unit 5. Next, the lift drive units 6 lower the gripper device 10, and the FOUP 200 is placed on the load port 300, and the gripper device 10 releases the holding of the flange portion 202 of the FOUP 200. Next, the lift drive units 6 raise the gripper device 10 to the raised end. Next, the overhead carrier 1 not holding the FOUP 200 starts running.

[0034] As Figure 2As shown, the gripper device 10 is provided with a lifting section 11 that is a main body of the gripper device 10, and a holding section 9 that holds the FOUP 200. The holding section 9 has a motor 16 fixed to the lifting section 11, one link mechanism 20 connected to the motor 16 via an output shaft 16a of the motor 16, and a pair of fingers (engagement sections) 12 installed to a front end of the link mechanism 20. The motor 16, the link mechanism 20, and the pair of fingers 12 are installed to the lifting section 11. The motor 16 and the link mechanism 20 constitute a driving section 7 that moves the pair of fingers 12. Further, the pair of fingers 12 can be driven by, for example, a ball screw or a belt, and not by the link mechanism 20. The lifting section 11 is suspended by, for example, four belts 6a that constitute the above-described lifting drive unit 6. The lifting section 11 is able to be lifted above the FOUP 200 (above the load port 300) by the lifting drive unit 6 being controlled by the controller 8. Further, it can be that the lifting drive unit 6 has three belts 6a, and the lifting section 11 is suspended by the three belts 6a.

[0035] Reference Signs List Figure 3 A FOUP 200 held by the gripper device 10 of the present embodiment is described. The FOUP 200 has, for example, a cuboid-shaped main body 201. A lid 205 is openably and closably installed to a side surface (a surface of a side in a traveling direction of the overhead shuttle 1) of the main body 201. The FOUP 200 houses a plurality of semiconductor wafers in the main body 201. The FOUP 200 can also house a plurality of semiconductor panels that are quadrilateral-shaped substrates in the main body 201. A pair of flange sections 202 held by the gripper device 10 is provided to a rectangular upper surface 201a of the main body 201. The pair of flange sections 202 is separated in a direction along the upper surface 201a and corresponding to a traveling direction of the overhead shuttle 1 (an X direction shown in the drawing). In the following description, this direction is referred to as a "first direction". The pair of flange sections 202 is disposed at end portions 201b, 201b of the X direction of the upper surface 201a, and respectively extends long in a direction along the upper surface 201a and orthogonal to the above-described first direction (a Y direction shown in the drawing). In the following description, the direction orthogonal to the first direction is referred to as a "second direction". The above-described first direction and second direction can be used in the description of the FOUP 200, and can be used in the description of the gripper device 10 of the FOUP 200. As described above, the first direction corresponds to the traveling direction of the overhead shuttle 1 in a state where the lifting drive unit 6 and the gripper device 10 are arranged in the frame unit 2.

[0036] More specifically, on the upper surface 201a of the FOUP 200, multiple pairs (three pairs in this embodiment) of support columns 203 are erected at each of the ends 201b. Each support column 203 extends perpendicularly to the upper surface 201a, and its lower end is fixed to the upper surface 201a. For example, three support columns 203 of the same length are erected at one end 201b in a first direction of the upper surface 201a, and a flange portion 202 is fixed to the upper end of the support column 203 by welding or bolts. For example, three support columns 203 of the same length are erected at the other end 201b in the first direction of the upper surface 201a, and a flange portion 202 is fixed to the upper end of the support column 203 by welding or bolts. A pair of flange portions 202 extend, for example, parallel to the upper surface 201a of the FOUP 200. As described above, the FOUP200 has a pair of flange portions 202 disposed on the upper surface 201a and separated in a first direction along the upper surface 201a.

[0037] By providing the support column 203, a predetermined space is formed between the upper surface 201a and the flange portion 202. Furthermore, as... Figure 1 As shown, a pair of flanges 202 are housed within the length of the main body 201 in a first direction (the overall length of the FOUP 200). From the center of the upper surface 201a toward the end 201b, the fingers 12 of the gripper device 10 are inserted into the space between the upper surface 201a and the flanges 202. The FOUP 200 is moved from the inside out, and the fingers 12 inserted into the space are held (supported) from below.

[0038] The pair of fingers 12 of the gripper device 10 move along a first direction (X direction shown in the figure). When the gripper device 10 holds the FOUP 200, the fingers 12 enter in a manner that approaches the flange 202. When the gripper device 10 releases the holding of the FOUP 200, the fingers 12 retract in a manner that moves away from the flange 202.

[0039] like Figure 2 As shown, the linkage mechanism 20 is a mechanism for moving the finger 12. The linkage mechanism 20 includes: a central link 17 connected to the output shaft 16a of the motor 16 and rotating about the output shaft 16a; a pair of first links 18, each with its first end rotatably connected to a pair of shafts 17a at both ends of the central link 17; and a pair of second links 19, each with its base rotatably connected to a pair of shafts 18a at the second end of the first links 18. The central link 17 rotates with the output shaft 16a, and one first link 18 and the second link 19, and another first link 18 and the second link 19, move synchronously. A finger 12 is mounted on the front end of each of the pair of second links 19. A cutout 12a is formed in each finger 12 to receive the central support column 203.

[0040] The holder device 10 of the present embodiment is provided with a mechanism for positioning the holding portion 9 with respect to the FOUP 200. The necessity of proper positioning of the article is as described in the above-described Patent Document 1. Proper positioning is performed, whereby the finger portion 12 (holding portion 9) of the holder device 10 has a correct position and posture, and engagement and holding with respect to the FOUP 200 become good. The positioning mechanism provided in the holder device 10 is capable of more accurate positioning by cooperation of the position detection portion and the contact position provided in the FOUP 200.

[0041] As shown in Figure 2 , the holder device 10 is provided with four positioning portions installed to the lifting portion 11. More specifically, the holder device 10 is provided with the positioning portions at the positions of the four corners of the lifting portion 11 which is rectangular in plan view. Two first positioning portions 40 are installed on one diagonal line (the upper left corner and the lower right corner) of the lifting portion 11. The first positioning portions 40 described above perform positioning of the holding portion 9 in the horizontal direction (the direction along the XY plane) with respect to the FOUP 200. Further, two second positioning portions 50 are installed on the other diagonal line (the upper right corner and the lower left corner) of the lifting portion 11. The second positioning portions 50 described above perform positioning of the holding portion 9 in the height direction (the Z direction) with respect to the FOUP 200. Figure 2 Figure 2 Figure 1

[0042] Before describing the configurations of the first positioning portions 40 and the second positioning portions 50, the configuration of the FOUP 200 involved in the positioning mechanism will be described with reference to Figure 3 . As shown in Figure 3 , the flange portions 202 of the FOUP 200 are each an elongated flat plate member extending long in the second direction, and extend in parallel with the upper surface 201a of the FOUP 200. The flange upper surfaces 202a of the respective flange portions 202 are flat and parallel with the upper surface 201a. The flange upper surfaces 202a are position detection surfaces (position detection portions) provided to the upper surface 201a of the FOUP 200, and are capable of positioning of the holding portion 9 in the height direction by contact with the first positioning portions 40 and the second positioning portions 50.

[0043] ​​​Two guide holes 206 are formed at both ends in the second direction of each flange portion 202. The guide holes 206 have the same size and shape. Each guide hole 206 has an inverted conical shape that penetrates the flange portion 202 in the thickness direction. Each guide hole 206 has a circular opening that is open upward and has a conical taper in which the inner diameter decreases toward the lower side. That is, in each guide hole 206, the inner diameter decreases as the height of the opening at the upper end decreases. In the pair of flange portions 202, the guide holes 206 are symmetrically formed with respect to an imaginary central plane (a plane that includes the axis of the output shaft 16a) orthogonal to the first direction. The positions of the four guide holes 206 correspond to the positions of the first positioning portion 40 and the second positioning portion 50 when viewed from above. More specifically, when the holding portion 9 is in the correct position with respect to the FOUP 200, the positions of the central axes of the four guide holes 206 coincide with the positions of the shaft 42 of the first positioning portion 40 and the shaft 52 of the second positioning portion 50, which will be described later. The two guide holes 206 of the four guide holes 206 that are arranged on the first diagonal line are contacted by the first positioning portion 40 and can perform positioning in the horizontal direction of the holding portion 9. At the same time, the two guide holes 206 arranged on the first diagonal line are contacted by the two first positioning portions 40 and can also perform positioning in the height direction of the holding portion 9.

[0044] The two second positioning portions 50 do not contact the two guide holes 206 of the four guide holes 206 that are arranged on the second diagonal line. In the present embodiment, the two second positioning portions 50 contact only the flange upper surface 202a at the positions where the two guide holes 206 arranged on the second diagonal line are formed. The FOUP 200 has four guide holes 206, which can improve the versatility of the FOUP 200. The four guide holes 206 can be used, for example, in the case where the FOUP 200 is handled by an AGV (Automated Guided Vehicle) that is a different transport system from the overhead carrier 1 of the present embodiment.

[0045] Reference will be made to Figure 2 , Figure 4 and Figure 5 to describe the configurations of the first positioning portion 40 and the second positioning portion 50, respectively. As Figure 2 and Figure 4As shown, the first positioning portion 40 has a sensor case 45 fixed to a corner of the elevation portion 11, a shaft 42 capable of moving up and down with respect to the sensor case 45, and a convex member 41 fixed to a lower end portion of the shaft 42. The sensor case 45 is, for example, open upward, and its side surface is fixed to the outer side surface of the elevation portion 11. The convex member 41 can also include a conical surface portion 41a. The conical surface portion 41a has, for example, a shape corresponding to the guide hole 206 so as to be engaged with the guide hole 206 of the flange portion 202. In other words, a portion of the conical surface portion 41a of the convex member 41 has a shape substantially coinciding with the peripheral wall surface of the guide hole 206. A spring 43 is sandwiched around the shaft 42 between the bottom surface of the sensor case 45 and the convex member 41. The spring 43 exerts a force on the convex member 41 and the sensor case 45 in a direction separating them.

[0046] A position detection plate 44 is fixed to the upper end of the shaft 42. In the upper portion inside the sensor case 45, a seated sensor 46 and a presence sensor 47 are provided at opposite positions. The seated sensor 46 and the presence sensor 47 are fixed to the sensor case 45, and detect the presence or absence of a first detected piece 44a and a second detected piece 44b accompanying the relative movement of the position detection plate 44 inside the sensor case 45. The seated sensor 46 is a sensor that detects the seating of the holding portion 9, i.e., whether the convex member 41 is inserted into the guide hole 206 of the flange portion 202. The presence sensor 47 is a sensor that detects the presence of the FOUP 200 in a state where the FOUP 200 is lifted. For example, if the FOUP 200 is not present, the presence sensor 47 is turned off, and an abnormality report is made. The absence of the FOUP 200 is, for example, considered to be a loss of the engaged state of the FOUP 200 with respect to the finger portion 12 caused by the detachment of the flange portion 202, or the like. Cables for outputting signals to the controller 8 are connected to the seated sensor 46 and the presence sensor 47. The detection operation of the above-described sensors accompanying the elevation of the elevation portion 11 and the holding of the FOUP 200 by the gripper device 10 will be described later.

[0047] As Figure 2 and Figure 5As shown, the second positioning portion 50 has a box 55 fixed to a corner of the elevation portion 11, a shaft 52 capable of moving up and down with respect to the box 55, and a flat plate-shaped pressing member 51 fixed to a lower end portion of the shaft 52. The box 55 is, for example, open upward, and its side surface is fixed to the outer side surface of the elevation portion 11. The pressing member 51 can also include a horizontal surface portion 51a that contacts the flange upper surface 202a of the FOUP 200. The lower end of the shaft 52 can also slightly protrude from the lower surface of the pressing member 51. In a state in which the horizontal surface portion 51a contacts the flange upper surface 202a, the portion of the shaft 52 that protrudes is disposed within the guide hole 206. A spring 53 is sandwiched around the shaft 52 between the bottom surface of the box 55 and the pressing member 51. The spring 53 exerts a force on the pressing member 51 and the box 55 in a direction in which they are separated.

[0048] In the first positioning portion 40 and the second positioning portion 50, the height of the convex member 41 with respect to the guide hole 206 and the height of the pressing member 51 with respect to the flange upper surface 202a are equal. In other words, in a state in which the conical surface portion 41a of the convex member 41 contacts the peripheral wall surface of the guide hole 206 and the horizontal surface portion 51a of the pressing member 51 contacts the flange upper surface 202a, the forces (restoring forces) received by the spring 43 and the spring 53 are equal, and the posture of the elevation portion 11 and the holding portion 9 becomes parallel with respect to the upper surface 201a of the FOUP 200. That is, the holding portion 9 is positioned in the height direction with respect to the FOUP 200. In other words, in a state in which the convex member 41 contacts the peripheral wall surface of the guide hole 206 (the convex member 41 is fitted into the guide hole 206), the pressing member 51 contacts the flange portion 202 (is mounted), and the elevation portion 11 and the holding portion 9 suspended by the four belts 6a are placed on the flange portion 202 due to their own weight, the holding portion 9 is positioned in the height direction with respect to the FOUP 200. Also, in this state, the holding portion 9 is also positioned in the horizontal direction with respect to the FOUP 200 by the fitting of the convex member 41 with respect to the guide hole 206 (the conical fitting).

[0049] In the gripper device 10 and the FOUP 200 having the above structure, as shown in Figure 3 As shown, in the flange portion 202, the positions at which the two guide holes 206 disposed on the first pair of diagonal lines are formed are two first contact positions Pa at which the first positioning portion 40 contacts. The first positioning portion 40 contacts the FOUP 200 at the two first contact positions Pa on the upper portion of the FOUP 200, thereby positioning the holding portion 9 in the horizontal direction with respect to the FOUP 200.

[0050] Further, in the flange portion 202, positions where the two guide holes 206 arranged on the first diagonal line are formed are also two second contact positions Pb where the first positioning portion 40 contacts. Also, positions where the two guide holes 206 arranged on the second diagonal line are formed are also two second contact positions Pb where the second positioning portion 50 contacts. The first positioning portion 40 and the second positioning portion 50 contact the four second contact positions Pb on the upper portion of the FOUP 200, thereby positioning the retaining portion 9 in the height direction with respect to the FOUP 200.

[0051] The first contact positions Pa are contact positions on the upper portion of the FOUP 200 for positioning the retaining portion 9 in the horizontal direction. The second contact positions Pb are contact positions on the upper portion of the FOUP 200 for positioning the retaining portion 9 in the height direction. In the present embodiment, positions where the two guide holes 206 arranged on the first diagonal line are formed are two first contact positions Pa and are also two second contact positions Pb. Also, the first positioning portion 40 has two protruding members 41 that can respectively enter the two guide holes 206. According to this structure, the first positioning portion 40 can also position the retaining portion 9 in the height direction, thereby functioning in the same way as the second positioning portion 50.

[0052] That is, in the present embodiment, the first positioning portion 40 contacts the FOUP 200 only at the two first contact positions Pa in order to position in the horizontal direction. On the other hand, the second contact positions Pb for positioning in the height direction are provided at four positions. In other words, the holder device 10 contacts the protruding members 41 of the first positioning portion 40 with the two guide holes 206 that are the first contact positions Pa and the second contact positions Pb, thereby positioning the retaining portion 9 in the horizontal direction and in the height direction. The holder device 10 contacts the pressing members 51 of the second positioning portion 50 with the two guide holes 206 that are the second contact positions Pb, thereby positioning the retaining portion 9 in the height direction. The first positioning portion 40 functions in the same way as the second positioning portion 50 in part of the positioning in the height direction that is required at three or more positions (two positions in the present embodiment). The above-mentioned second contact positions Pb are not located on one straight line. That is, even if any three of the four second contact positions Pb are selected, they are not located on one straight line. "Three second contact positions are not located on one straight line" means, for example, in the case where the contact portions (contact surfaces) of the respective contact positions have areas, that a straight line connecting the three center points of them does not become one straight line. "Three second contact positions are not located on one straight line" means that a plane including the three center points is uniquely determined.

[0053] Next, the transport method of the FOUP 200 by the holder device 10 and the overhead transport vehicle 1 of the present embodiment will be described. First, if the lifting section 11 comes above the load port 300, the controller 8 lowers the lifting section 11 (lowering process). In this lowering process, the lifting section 11 is lowered until the seating sensor 46 is turned on. After the lowering process, the first positioning section 40 contacts the FOUP 200 at two first contact positions Pa on the upper portion of the FOUP 200, thereby positioning the holding section 9 in the horizontal direction with respect to the FOUP 200 (first positioning process). Also, after the lowering process, the first positioning section 40 and the second positioning section 50 contact the FOUP 200 at four second contact positions Pb on the upper portion of the FOUP 200 that are not on a straight line, thereby positioning the holding section 9 in the height direction with respect to the FOUP 200 (second positioning process). The first positioning process and the second positioning process are performed substantially simultaneously. Also, after the first positioning process and the second positioning process, the FOUP 200 is held by the holding section 9 (holding process).

[0054] Referring to Figures 6-10 The first positioning process and the holding process will be described. As the lifting section 11 is lowered, first, as shown in FIG. 6, the convex member 41 enters (is inserted into) the guide hole 206. At this time, the conical surface portion 41a of the convex member 41 starts to contact the peripheral wall surface of the guide hole 206. Next, as shown in FIG. 7, the lifting section 11 and the holding section 9 are further lowered, and the seating sensor 46 is turned on. During this period, the in-place sensor 47 is switched from off to on and further to off, but the seating sensor 46 remains off, so the switching of this in-place sensor 47 is ignored. Next, as shown in FIG. 8, at the time when the lifting section 11 and the holding section 9 are further lowered by a prescribed distance, the lowering is stopped. Through the above series of processes, the first positioning process is completed. At the same time, the second positioning process is also completed. Figure 6 Figure 7 Next, as shown in FIG. 9, with the seating sensor 46 turned on, the finger section 12 is moved by the driving section 7 and is inserted into the space below the flange section 202. Next, as shown in FIG. 10, the lifting section 11 and the holding section 9 are raised, and the flange section 202 (FOUP 200) is held by the finger section 12. Through the above processes, the holding process is completed. Then, the lifting section 11 and the holding section 9 are raised until they reach within the frame unit 2. Figure 8

[0055] Next, as shown in FIG. 9, with the seating sensor 46 turned on, the finger section 12 is moved by the driving section 7 and is inserted into the space below the flange section 202. Next, as shown in FIG. 10, the lifting section 11 and the holding section 9 are raised, and the flange section 202 (FOUP 200) is held by the finger section 12. Through the above processes, the holding process is completed. Then, the lifting section 11 and the holding section 9 are raised until they reach within the frame unit 2. Figure 9 Figure 10 Next, as shown in FIG. 9, with the seating sensor 46 turned on, the finger section 12 is moved by the driving section 7 and is inserted into the space below the flange section 202. Next, as shown in FIG. 10, the lifting section 11 and the holding section 9 are raised, and the flange section 202 (FOUP 200) is held by the finger section 12. Through the above processes, the holding process is completed. Then, the lifting section 11 and the holding section 9 are raised until they reach within the frame unit 2.

[0056] ​​​According to the gripper device 10 and the above-described conveyance method of the embodiment, the first positioning portion 40 contacts the FOUP 200 at two first contact positions Pa on the upper portion of the FOUP 200. By the contact of the first positioning portion 40, positioning of the holding portion 9 in the horizontal direction with respect to the FOUP 200 is performed. Also, the first positioning portion 40 and the second positioning portion 50 contact the FOUP 200 at at least three second contact positions Pb (four positions in the embodiment) on the upper portion of the FOUP 200. The above-described second contact positions Pb are not located on a straight line, so by the contact of the first positioning portion 40 and the second positioning portion 50, positioning of the holding portion 9 in the height direction with respect to the FOUP 200 is performed. In this way, two positions in the horizontal direction and at least three contact positions in the height direction are used, so positioning in the horizontal direction and the height direction with respect to the FOUP 200 can be accurately performed.

[0057] In the case where the first positioning portion 40 contacts the FOUP 200 at three or more first contact positions, the position of the holding portion 9 in the horizontal direction cannot be uniquely determined by two of the three and the other, so there is a possibility that mismatch occurs. That is, contention can occur between the three or more first contact positions. If the first contact positions Pa are limited to only two positions, such mismatch, that is, contention can be suppressed.

[0058] The first positioning portion 40 has two convex members 41 that can respectively enter the two above-described guide holes 206, so as to function in the same manner as the second positioning portion. The two first contact positions and the two second contact positions are shared, so the number of members for positioning can be reduced.

[0059] According to the pressing member 51 including the horizontal surface portion 51a, positioning in the height direction can be accurately and easily performed.

[0060] Since the second contact positions are provided at four positions, positioning in the height direction can be more accurately performed.

[0061] According to the overhead carrier 1, the FOUP 200 is held in a state where the holding portion is accurately positioned with respect to the FOUP 200. Therefore, the conveyance state of the FOUP 200 can be stabilized, so the FOUP 200 can also be conveyed at high speed.

[0062] The above-described embodiment of the present application has been described, but the present application is not limited to the above-described embodiment. For example, the arrangement of the first contact positions Pa and the second contact positions Pb can be changed to various modes. For example, Figure 11As shown in (a) of FIG. 10, two first contact positions Pa (wherein the second contact positions are also provided by the taper) can be provided on one flange portion 202, and one second contact position Pb can be provided on the other flange portion 202. As shown in (b) of FIG. 10, the same kind of contact positions can be provided on the same side in the second direction. In this case, the first contact positions Pa also serve as the second contact positions by the taper. As shown in (c) of FIG. 10, two first contact positions Pa (wherein the second contact positions are also provided by the taper) can be provided on one flange portion 202, and one second contact position Pb can be provided on the other flange portion 202. As shown in (d) of FIG. 10, two first contact positions Pa (wherein the second contact positions are also provided by the taper) can be provided on one flange portion 202, and one large (wide range) second contact position Pb can be provided on the other flange portion 202. The wide range second contact position Pb provides the same stability as the case where a plurality of second contact positions Pb are provided. Figure 11 Figure 11 Figure 11

[0063] The position detection portion where the first positioning portion and the second positioning portion contact can be provided at an appropriate position on the upper portion of the article. The position detection portion can be provided on a portion other than the flange portion on the upper surface of the article. The position detection portion can be provided as a horizontal surface (a surface parallel to the upper surface 201a of the main body 201). The holding portion can be engaged with any portion of the upper portion (including the side surface) of the article, not limited to the case where the holding portion is engaged with the flange portion. The structure of the holding portion is not limited to the above-described embodiments. The engagement portion of the holding portion is not limited to the case where the engagement portion moves from the inside to the outside. The engagement portion of the holding portion can move from the outside to the inside.

[0064] The first positioning portion and the second positioning portion are not limited to the case where the positioning is provided by a spring mechanism. The first positioning portion and the second positioning portion can be provided with an elastic member other than a spring, or can be provided without an elastic member. The first positioning portion and the second positioning portion can be provided with a damper mechanism. The second positioning portion can be a flat member whose position relative to the lifting portion 11 is fixed.

[0065] In the above-described embodiments, the sensors (the seating sensor 46 and the in-place sensor 47) are provided on the first positioning portion 40. The sensors (for example, the same seating sensor and in-place sensor as disclosed in the above-described embodiments) can be provided on the second positioning portion 50, not on the first positioning portion 40. Alternatively, the sensors can be provided on both the first positioning portion 40 and the second positioning portion 50. That is, the sensors can be provided at the positions of the four corners of the lifting portion 11. ​​​

[0066] In the above embodiment, the guide hole 206 is provided with the through flange portion 202. It is not limited to this embodiment, and a tapered guide hole with a bottom portion (without the through flange portion 202) can be provided. In addition, it is not limited to the embodiment in which the guide hole 206 of the article is conical. For example, the first positioning portion can also have a cylindrical protruding member, and a cylindrical hole portion (through hole portion) can be formed at any position of the upper portion of the article. In this case, positioning in the height direction is not possible in the first positioning portion, so it is necessary to provide at least three second contact positions at positions different from the two first contact positions on the article.

[0067] In other words, it is not limited to the embodiment in which the first contact position functions as the second contact position. Two first contact positions and three or more second contact positions can be provided individually. Or one of the two first contact positions can function as the second contact position. In any embodiment, the gripper device has the first positioning portion corresponding to the first contact position and the second positioning portion corresponding to the second contact position. In the article, in the case where a certain specific first contact position functions as the second contact position, the first positioning portion corresponding to the specific first contact position in the gripper device functions as the second positioning portion.

[0068] The article is not limited to the FOUP 200. The article can also be a SMIF (Standard Mechanical Interface) Pod or a FOSB (Front Opening Shipping Box) or the like.

[0069] Explanation of Reference Numerals

[0070] 1…overhead transport vehicle (transport vehicle), 7…drive portion, 9…holding portion, 10…gripper device, 11…lifting portion, 12…finger portion, 16…motor, 20…linkage mechanism, 40…first positioning portion, 41…protruding member, 41a…conical surface portion, 50…second positioning portion, 51…pressing member, 51a…horizontal surface portion, 200…FOUP (article), 201…main body, 201a…upper surface, 202…flange portion, 202a…flange upper surface (position detection portion), 206…guide hole, 300…load port (transfer portion), Pa…first contact position, Pb…second contact position.

Claims

1. A clamping device for holding an article placed on a transfer section, comprising: A holding part is installed on a lifting part that can move up and down above the aforementioned transfer part, and holds the aforementioned item; A first positioning part, installed on the lifting part, contacts the article at two first contact points on the upper part of the article, thereby positioning the holding part horizontally relative to the article; and The second positioning part, which is installed on the lifting part, contacts the article at three second contact points on the upper part of the article that are not in a straight line, and positions the holding part relative to the article in the height direction. The aforementioned first positioning part and the aforementioned second positioning part include two horizontal and height positioning parts that position the aforementioned retaining part in both the horizontal and vertical directions, and a height positioning part that positions the aforementioned retaining part only in the vertical direction.

2. The clamping device according to claim 1, wherein, The aforementioned first positioning part contacts the item only at the two aforementioned first contact positions.

3. The clamping device according to claim 1, wherein, The position detection part disposed on the upper surface of the aforementioned article has two conical guide holes with upward-facing openings, and the inner diameter decreases as the height of the openings decreases. The positions of the two guide holes are the two aforementioned first contact positions and the two aforementioned second contact positions. The first positioning part has two protruding parts that can respectively enter the two guide holes.

4. The clamping device according to claim 2, wherein, The position detection part disposed on the upper surface of the aforementioned article has two conical guide holes with upward-facing openings, and the inner diameter decreases as the height of the openings decreases. The positions of the two guide holes are the two aforementioned first contact positions and the two aforementioned second contact positions. The first positioning part has two protruding parts that can respectively enter the two guide holes.

5. The clamping device according to any one of claims 1 to 4, wherein, The second positioning part has at least one pressing member included in the second contact position and in contact with at least one horizontal face that is disposed on the upper surface of the article and is in contact with the position detection part.

6. The clamping device according to any one of claims 1 to 4, wherein, The aforementioned second contact positions are located at four locations.

7. The clamping device according to claim 5, wherein, The aforementioned second contact positions are located at four locations.

8. A conveyor vehicle, comprising: The clamping device according to any one of claims 1 to 7, and travels along a track provided on the ceiling.

9. A conveying method comprising holding and conveying an article placed in a transfer section using a clamping device. The aforementioned clamping device includes: a lifting part mounted above the transfer section and a holding part for holding the article; a first positioning part for positioning relative to the horizontal direction of the article; and a second positioning part for positioning relative to the height direction of the article. The aforementioned first positioning part and the aforementioned second positioning part include two horizontal and height positioning parts that position the aforementioned retaining part in both the horizontal and vertical directions, and a height positioning part that positions the aforementioned retaining part only in the vertical direction. The conveying method includes the following steps: The lowering process causes the aforementioned lifting unit to descend; The first positioning process is performed after the descent process. The first positioning part is brought into contact with the article at two first contact positions on the upper part of the article, and the holding part is positioned in the horizontal direction relative to the article. The second positioning process is performed after the aforementioned lowering process. The second positioning part contacts the article at three non-aligned second contact points on the upper part of the article, thereby positioning the retaining part in the height direction relative to the article. The holding process is performed after the first positioning process and the second positioning process, and the item is held by the holding part.

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