A battery production integrated system and a battery production integrated method
By integrating the laser process with diffusion and annealing processes into a battery fabrication integrated system, the problems of high equipment investment and large footprint have been solved, the process yield of N-type TOPCon batteries has been improved, the process flow has been simplified, and environmental pollution has been reduced.
CN115425113BActive Publication Date: 2026-07-03ZHEJIANG JINKO SOLAR CO LTD +1
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- ZHEJIANG JINKO SOLAR CO LTD
- Filing Date
- 2022-09-28
- Publication Date
- 2026-07-03
Smart Images
Figure CN115425113B_ABST
Abstract
This invention discloses an integrated system and method for battery fabrication. The integrated system includes: a basket storage device with baskets for loading silicon wafers; a quartz boat storage device with quartz boats for loading silicon wafers; a diffusion device for performing diffusion or annealing processes on several silicon wafers within the quartz boat; a laser device for performing laser processes on a single silicon wafer; a first silicon wafer conveying device; a second silicon wafer conveying device; a third silicon wafer conveying device; a fourth silicon wafer conveying device; and a quartz boat transfer device for transferring quartz boats from the quartz boat storage device to the diffusion device, or transferring quartz boats from the diffusion device to the quartz boat storage device. Compared with existing technologies, this invention integrates the laser process with the diffusion and annealing processes, reducing equipment investment, saving equipment floor space, and improving process yield.
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