Vibrating element, vibrating device, and method for manufacturing vibrating element

Abstract

The present application provides a vibration element, a vibration device, and a manufacturing method of a vibration element, capable of suppressing the formation of burrs and the like foreign matter. The vibration arm of the vibration element has a first surface, a second surface on the side opposite to the first surface in the Z direction, a first side surface and a second side surface as side surfaces, and a third side surface as a tip surface. At least one of the first side surface, the second side surface, and the third side surface includes a first side surface portion inclined with respect to the Z direction and a second side surface portion inclined with respect to the first side surface portion toward the first surface or the second surface. The first weight is configured such that, when viewed from the Z direction, an outer edge portion of the first weight is located inward of or at the same position as an innermost portion among the first side surface portion and the second side surface portion.

Description

Technical Field

[0001] This invention relates to vibrating elements, vibrating devices, and methods for manufacturing vibrating elements. Background Technology

[0002] Conventionally, as shown in Patent Document 1, a method for adjusting the frequency of a quartz oscillator is known as follows: a frequency-adjusting metal film is formed on a first surface, a first side with a protrusion in the cross section, and a second side in the vibrating plate of the quartz oscillator; a laser is incident from the second surface opposite to the first surface to remove a portion of the frequency-adjusting metal film, thereby adjusting the frequency.

[0003] Furthermore, as shown in Patent Document 1, it is known that by setting the angle of laser incident to an acute angle from the second side toward the first side, it is possible to prevent the frequency adjustment metal film that should be removed from the frequency adjustment metal film on the first side from becoming a burr and remaining.

[0004] Patent Document 1: Japanese Patent Application Publication No. 2009-88806

[0005] However, in the frequency adjustment method for a quartz oscillator described in Patent Document 1, the angle of laser incidence is set to an acute angle from the second side towards the first side. Therefore, when removing the frequency adjustment metal film on the second side, the laser is refracted or blocked by the second side. Consequently, the laser cannot fully irradiate the frequency adjustment metal film on the second side, potentially forming burrs or other foreign matter. If these burrs or other foreign matter fall off during the production process or after product completion, there is a problem of the quartz oscillator's frequency changing. Summary of the Invention

[0006] The vibrating element has: a base; a vibrating arm including a first surface, a second surface on a side opposite to the first surface in a direction along the Z-axis, a first side surface, a second side surface on a side opposite to the first side surface in a direction along the X-axis perpendicular to the Z-axis, and a third side surface located on a side opposite to the base, the vibrating arm extending from the base in a direction along the Y-axis perpendicular to the Z-axis and the X-axis; and a first counterweight disposed on the second surface, at least one of the first side surface, the second side surface, and the third side surface including: a first side surface portion inclined relative to the direction along the Z-axis; and a second side surface portion inclined relative to the first side surface portion toward the first surface or the second surface, the first counterweight being configured such that, when viewed from the direction along the Z-axis, the outer edge of the first counterweight is located inside the innermost portion of the first side surface portion and the second side surface portion or at the same position as the innermost portion.

[0007] The vibration device has the aforementioned vibration element and a package for housing the vibration element.

[0008] A method for manufacturing a vibrating element includes a frequency adjustment method for adjusting the frequency of the vibrating element. The vibrating element has: a base; a vibrating arm including a first surface, a second surface opposite to the first surface in a direction along the Z-axis, a first side surface, a second side surface opposite to the first side surface in a direction along the X-axis perpendicular to the Z-axis, and a third side surface located opposite to the base, the vibrating arm extending from the base in a direction along the Y-axis perpendicular to both the Z-axis and the X-axis; and a first counterweight disposed on the second surface, the first side surface, the second side surface, and the third side surface. At least one of the components includes: a first side portion inclined relative to a direction along the Z-axis; and a second side portion inclined relative to the first side portion toward the first surface or the second surface, wherein the first counterweight is configured such that, when viewed from a direction along the Z-axis, the outer edge of the first counterweight is located inside the innermost portion of the first side portion and the second side portion or at the same position as the innermost portion, and the frequency adjustment method includes the steps of: removing at least a portion of the first counterweight by irradiating it with a laser from the first surface in a direction along the Z-axis, thereby changing the oscillation frequency of the vibrating element. Attached Figure Description

[0009] Figure 1 This is a top view showing the vibrating element of Embodiment 1.

[0010] Figure 2 yes Figure 1 Sectional view along line AA in the diagram.

[0011] Figure 3 yes Figure 1 BB line section view.

[0012] Figure 4 yes Figure 1 The CC line section view.

[0013] Figure 5 yes Figure 1 Sectional view along line D1-D1 in the diagram.

[0014] Figure 6 yes Figure 1 Sectional view along line D2-D2.

[0015] Figure 7 This is a flowchart illustrating the manufacturing method of the vibration element according to Embodiment 1.

[0016] Figure 8 This is a top view showing the vibrating element of Embodiment 1.

[0017] Figure 9This is a top view showing the vibrating element of Embodiment 1.

[0018] Figure 10 yes Figure 9 FF line section view.

[0019] Figure 11 yes Figure 9 The cross-sectional view along the GG line.

[0020] Figure 12 This is a top view showing the vibrating element of Embodiment 2.

[0021] Figure 13 yes Figure 12 Sectional view along line II.

[0022] Figure 14 yes Figure 12 The section view along line JJ in the image.

[0023] Figure 15 yes Figure 12 The KK line cross-sectional view in the image.

[0024] Figure 16 This is a top view showing the vibrating element of Embodiment 3.

[0025] Figure 17 yes Figure 16 MM line section view.

[0026] Figure 18 yes Figure 16 NN-line cross-sectional view.

[0027] Figure 19 This is a flowchart illustrating the manufacturing method of the vibration element according to Embodiment 3.

[0028] Figure 20 This is a top view showing the vibrating element of Embodiment 3.

[0029] Figure 21 yes Figure 20 The TT line section view.

[0030] Figure 22 This is a cross-sectional view showing the vibration device of Embodiment 4.

[0031] Figure 23 This is a top view showing the vibrating element of Embodiment 5.

[0032] Figure 24 This is a schematic diagram illustrating the operation of the vibration element in Embodiment 5.

[0033] Figure 25 This is a schematic diagram illustrating the operation of the vibration element in Embodiment 5.

[0034] Label Explanation

[0035] 1, 1a, 1b, 1c: Vibrating element; 10: Vibrating device; 13: Package; 41, 41c: Vibrating body; 42: Base; 43, 44: Vibrating arm; 45: Electrode; 46: Metal film; 101: First side; 102: Second side; 111, 111a: First side; 112, 112a: Second side; 113, 113a: Third side; 121, 121a, 123, 125: Upper side; 122, 122a, 124, 126: Lower side portion; 131, 131a, 132, 133: Innermost portion; 430, 440: Arm portion; 431, 431a, 441, 441a: Counterweight portion; 432, 433, 442, 443: Recessed portion; 461: First counterweight; 462: Removal area; 463A, 463B, 463C: Outer edge portion; 481: Signal electrode; 482: Ground electrode. Detailed Implementation

[0036] 1. Implementation Method 1

[0037] Reference Figures 1 to 6 The vibration element 1 of Embodiment 1 will be described.

[0038] For ease of explanation, the X-axis, Y-axis, and Z-axis are illustrated as three mutually orthogonal axes in the following figures. The direction along the X-axis is referred to as the "X-direction," the direction along the Y-axis as the "Y-direction," and the direction along the Z-axis as the "Z-direction." The side with the arrow on each axis is referred to as the "positive side," and the side opposite to the arrow is referred to as the "negative side." The positive side of the Z-direction is referred to as the "upper," and the negative side of the Z-direction is referred to as the "lower." When viewed from above in the Z-direction, the surface with the positive Z-direction is designated as the upper surface, and the surface with the negative Z-direction opposite to this upper surface is designated as the lower surface. In this embodiment, as described later, the X-axis, Y-axis, and Z-axis correspond to the crystal axes of quartz. Furthermore, in the following figures, for ease of understanding, scales different from actual dimensions are sometimes used.

[0039] like Figure 1 As shown, the vibrating element 1 is a tuning fork type quartz oscillator.

[0040] The vibrating element 1 has a vibrating body 41, an electrode 45 for vibrating the vibrating body 41, and a metal diaphragm 46 for adjusting the frequency of the vibrating body 41.

[0041] The vibrating body 41 is formed from a Z-cut quartz plate, which is a flat plate having an area in the XY plane defined by the X and Y axes and a thickness in the Z direction. Furthermore, the X, Y, and Z axes correspond to the electrical axis, mechanical axis, and optical axis, respectively, which are the crystal axes of the quartz.

[0042] The vibrating body 41 has a first surface 101 and a second surface 102 on the opposite side of the first surface 101 in the Z direction. In this embodiment, the first surface 101 is the main surface of the vibrating body 41 on the positive side in the Z direction, and the second surface 102 is the main surface of the vibrating body 41 on the negative side in the Z direction. That is, the first surface 101 is the upper surface of the vibrating body 41, and the second surface 102 is the lower surface of the vibrating body 41.

[0043] Furthermore, there are no particular limitations on the constituent materials of the vibrator 41. For example, various piezoelectric materials such as lead zirconate titanate can be used, or materials other than piezoelectric materials such as silicon substrates can be used.

[0044] The vibrator 41 has a base 42 and a pair of vibrating arms 43, 44 extending from the base 42 in the Y direction. In this embodiment, the vibrating arms 43, 44 extend from the base 42 in the positive Y direction.

[0045] Vibrating arms 43 and 44 include a first surface 101 as an upper surface, a second surface 102 as a lower surface, a first side surface 111 connecting the first surface 101 and the second surface 102, a second side surface 112 on the opposite side of the first side surface 111 in the X direction, and a third side surface 113 located on the opposite side of the base 42 and connecting the first surface 101 and the second surface 102. In this embodiment, the first side surface 111 is the side surface of the vibrating arms 43 and 44 on the positive side in the X direction, and the second side surface 112 is the side surface of the vibrating arms 43 and 44 on the negative side in the X direction. The third side surface 113 is the side surface of the vibrating arms 43 and 44 on the positive side in the Y direction, that is, it is the end surface of the vibrating arms 43 and 44.

[0046] Vibrating arms 43 and 44 each have arm portions 430 and 440 and counterweight portions 431 and 441, respectively. The counterweight portions 431 and 441 are located at the end portions of the vibrating arms 43 and 44 on the side opposite to the base 42. The arm portions 430 and 440 are positioned closer to the base 42 than the counterweight portions 431 and 441, connecting the counterweight portions 431 and 441 to the base 42.

[0047] Electrodes 45 are disposed on the arm portions 430 and 440 of the vibrating arms 43 and 44. Metal films 46 are disposed on the counterweight portions 431 and 441 of the vibrating arms 43 and 44.

[0048] First, the arm sections 430 and 440 of the vibrating arms 43 and 44 will be explained.

[0049] like Figure 1and Figure 2 As shown, the arm portion 430 of the vibrating arm 43 has a groove-shaped recess 432 opening on the first surface 101 and a groove-shaped recess 433 opening on the second surface 102. Similarly, the arm portion 440 of the vibrating arm 44 has a groove-shaped recess 442 opening on the first surface 101 and a groove-shaped recess 443 opening on the second surface 102. Thus, the arm portions 430 and 440 have a generally H-shaped cross-sectional shape with groove-shaped recesses 432 and 442 on their respective first surfaces 101 and groove-shaped recesses 433 and 443 on their respective second surfaces 102.

[0050] Signal electrode 481 and ground electrode 482 are disposed as electrodes 45 in the arm portions 430 and 440 of the vibrating arms 43 and 44. Signal electrode 481 is disposed on the first surface 101 and the second surface 102 of the vibrating arm 43, and on the first side surface 111 and the second side surface 112 of the vibrating arm 44. Ground electrode 482 is disposed on the first side surface 111 and the second side surface 112 of the vibrating arm 43, and on the first surface 101 and the second surface 102 of the vibrating arm 44.

[0051] By applying a driving signal to the signal electrode 481, the vibrating arms 43 and 44 undergo bending vibrations in a manner that repeatedly approaches and moves away from each other.

[0052] Next, the counterweights 431 and 441 of the vibrating arms 43 and 44 will be described.

[0053] like Figure 3 and Figure 4 As shown, the first side surface 111 of the counterweight portion 431 of the vibrating arm 43 includes an upper side surface 121 and a lower side surface 122. The upper end of the upper side surface 121 of the first side surface 111 is connected to the first surface 101. The lower end of the upper side surface 121 of the first side surface 111 is connected to the upper end of the lower side surface 122 of the first side surface 111. The lower end of the lower side surface 122 of the first side surface 111 is connected to the second surface 102.

[0054] In this embodiment, the upper side portion 121 of the first side portion 111 in the counterweight portion 431 is parallel to the Z direction, and the lower side portion 122 of the first side portion 111 in the counterweight portion 431 is inclined relative to the Z direction.

[0055] That is, the lower side portion 122 of the first side portion 111 in the counterweight portion 431 is the first side portion that is inclined relative to the Z direction in this invention. Furthermore, the upper side portion 121 of the first side portion 111 in the counterweight portion 431 is the second side portion that is inclined relative to the first side portion of this invention toward the first surface 101.

[0056] In other words, the first side 111 in the counterweight 431 includes: a lower side 122 that is inclined relative to the Z direction; and an upper side 121 that is inclined relative to the lower side 122 that is inclined toward the first surface 101.

[0057] Furthermore, the second side 112 of the counterweight portion 431 of the vibrating arm 43 includes an upper side portion 123 and a lower side portion 124. The upper end of the upper side portion 123 of the second side 112 is connected to the first surface 101. The lower end of the upper side portion 123 of the second side 112 is connected to the upper end of the lower side portion 124 of the second side 112. The lower end of the lower side portion 124 of the second side 112 is connected to the second surface 102.

[0058] In this embodiment, the upper side portion 123 of the second side portion 112 in the counterweight portion 431 is parallel to the Z direction, and the lower side portion 124 of the second side portion 112 in the counterweight portion 431 is inclined relative to the Z direction.

[0059] That is, the lower side portion 124 of the second side portion 112 in the counterweight portion 431 is the first side portion that is inclined relative to the Z direction in the present invention. Furthermore, the upper side portion 123 of the second side portion 112 in the counterweight portion 431 is the second side portion that is inclined relative to the first side portion of the present invention toward the first surface 101.

[0060] In other words, the second side 112 in the counterweight 431 includes: a lower side 124 that is a first side portion inclined relative to the Z direction; and an upper side 123 that is a second side portion inclined relative to the lower side portion 124 that is a first side portion toward the first surface 101.

[0061] like Figure 5 As shown, the third side 113 of the counterweight portion 431 of the vibrating arm 43 includes an upper side portion 125 and a lower side portion 126. The upper end of the upper side portion 125 of the third side 113 is connected to the first side 101. The lower end of the upper side portion 125 of the third side 113 is connected to the upper end of the lower side portion 126 of the third side 113. The lower end of the lower side portion 126 of the third side 113 is connected to the second side 102.

[0062] In this embodiment, the upper side portion 125 of the third side portion 113 in the counterweight portion 431 is parallel to the Z direction, and the lower side portion 126 of the third side portion 113 in the counterweight portion 431 is inclined relative to the Z direction.

[0063] That is, the lower side portion 126 of the third side portion 113 in the counterweight portion 431 is the first side portion that is inclined relative to the Z direction in the present invention. Furthermore, the upper side portion 125 of the third side portion 113 in the counterweight portion 431 is the second side portion that is inclined relative to the first side portion of the present invention toward the first surface 101.

[0064] In other words, the third side 113 in the counterweight 431 includes: a lower side 126 which is a first side portion inclined relative to the Z direction; and an upper side 125 which is a second side portion inclined relative to the lower side portion 126 which is the first side portion toward the first surface 101.

[0065] In addition, such as Figure 1 and Figures 3 to 6 As shown, the basic structure of the counterweight 441 of the vibrating arm 44 is the same as that of the counterweight 431 of the vibrating arm 43. The first side 111 of the counterweight 441 of the vibrating arm 44 includes: a lower side 122 that is inclined relative to the Z-direction; and an upper side 121 that is inclined relative to the lower side 122 towards the first surface 101. The second side 112 of the counterweight 441 includes: a lower side 124 that is inclined relative to the Z-direction; and an upper side 123 that is inclined relative to the lower side 124 towards the first surface 101. The third side 113 of the counterweight 441 includes: a lower side 126 that is inclined relative to the Z-direction; and an upper side 125 that is inclined relative to the lower side 126 towards the first surface 101.

[0066] Next, the metal film 46 disposed on the counterweights 431 and 441 of the vibrating arms 43 and 44 will be described.

[0067] like Figure 1 as well as Figures 3 to 6 As shown, metal films 46 are respectively disposed on the second side 102, the first side side 111, the second side side 112, and the third side side 113 of the counterweight portions 431 and 441 of the vibrating arms 43 and 44. The metal films 46 are used to adjust the resonant frequency of the vibrating element 1 or to adjust the vibration balance of the vibrating arms 43 and 44. As described later, in the frequency adjustment step included in the frequency adjustment method of the vibrating element 1, a portion of the metal film 46 is removed by irradiating it with laser LB, thereby reducing the mass of the vibrating arms 43 and 44, and thus the resonant frequency of the vibrating element 1 can be adjusted. Furthermore, the material constituting the metal film 46 is not particularly limited, and for example, it can be made of a metal material with gold (Au), silver (Ag), aluminum (Al), etc. as the main components. In this embodiment, the metal film 46 is made of gold (Au).

[0068] The metal film 46 disposed on the second surface 102 of the counterweights 431 and 441 of the vibrating arms 43 and 44 is the first counterweight 461 disposed on the second surface 102 in this invention.

[0069] Figure 1 and Figures 3-6 This shows the state after the frequency adjustment process is completed, i.e., after laser LB has been irradiated and a portion of the first counterweight 461 has been removed. (See diagram below.) Figure 1 as well as Figures 4 to 6 As shown, the removal area 462 in the second surface 102 is the area where the first counterweight 461 was removed by laser LB during the frequency adjustment process.

[0070] In this embodiment, the first counterweight 461 and the removal region 462 in the second surface 102 are arranged along the length direction (Y direction) of the vibrating arms 43 and 44, with the removal region 462 located at the end side (positive side in the Y direction) of the vibrating arms 43 and 44 relative to the first counterweight 461. Thus, by positioning the removal region 462 closer to the end side of the vibrating arms 43 and 44 than the first counterweight 461, in other words, by removing the end side of the first counterweight 461, the frequency change per unit mass of the removed first counterweight 461 can be further increased. Therefore, sufficient frequency adjustment amplitude can be ensured during the frequency adjustment process. However, the arrangement of the first counterweight 461 and the removal region 462 is not particularly limited; for example, the removal region 462 may also be located on the negative side in the Y direction of the first counterweight 461.

[0071] Next, the configuration of the first side 111, the second side 112, and the third side 113 of the first counterweight 461 relative to the counterweight parts 431 and 441 of the vibrating arms 43 and 44 will be described.

[0072] First, the configuration of the first side 111 of the first counterweight 461 relative to the counterweight part 431 of the vibrating arm 43 will be described.

[0073] like Figure 3 As shown, and as described above, the lower side portion 122 of the first side surface 111 in the counterweight 431 is inclined relative to the Z direction. Specifically, the lower side portion 122 of the first side surface 111 in the counterweight 431 is inclined inward from the first surface 101 toward the second surface 102 towards the counterweight 431. That is, in the first side surface 111 of the counterweight 431, the innermost portion 131 of the lower side portion 122, which is the first side surface portion, and the upper side portion 121, which is the second side surface portion, is the lower end of the lower side portion 122 that connects to the second surface 102.

[0074] In addition, the "innermost part" in this invention refers to the part located at the innermost side of the first side 111, the second side 112, and the third side 113 of the counterweight parts 431 and 441 when the first side 111, the second side 112, and the third side 113 are projected from the Z direction.

[0075] In the first side surface 111 of the counterweight 431, when an imaginary line passing through the innermost part 131 of the lower side surface 122 (which is the first side surface) and the upper side surface 121 (which is the second side surface) and parallel to the Z direction is designated as imaginary line L1, and an imaginary line passing through the outer edge 463A of the first side surface 111 of the first counterweight 461 (which is the second side surface 102 of the counterweight 431) and parallel to the Z direction is designated as imaginary line L2, imaginary line L1 and imaginary line L2 are located at the same position when viewed from the side surface in the Y direction (which is perpendicular to the Z direction).

[0076] It should be noted that the terms "same" and "equal" in this invention include manufacturing deviations, etc., and refer to being substantially the same or substantially equal.

[0077] In addition, such as Figure 1 As shown, in the counterweight 431, the lower side portion 122 of the first side surface 111, which is the first side surface portion, and the innermost portion 131 of the upper side surface portion 121, which is the second side surface portion, are in the same position as the outer edge portion 463A of the first side surface 111 of the first counterweight 461. That is, the first counterweight 461 in the counterweight 431 is configured such that, when viewed from the Z direction, the outer edge portion 463A of the first side surface 111 of the first counterweight 461 is in the same position as the lower side surface portion 122 of the first side surface 111 and the innermost portion 131 of the upper side surface portion 121, which is the second side surface portion.

[0078] In this way, by arranging the first counterweight 461 such that, when viewed from the Z direction, the outer edge 463A of the first side surface 111 of the first counterweight 461 is in the same position as the lower side surface 122 (which is the first side surface) and the innermost part 131 of the upper side surface 121 (which is the second side surface), the refraction or shielding of the laser LB in the lower side surface 122 and upper side surface 121 of the first side surface 111 can be suppressed when the laser LB is irradiated onto the first counterweight 461. Therefore, the laser LB can be sufficiently irradiated onto the first counterweight 461, suppressing the formation of foreign matter such as burrs, and thus providing a vibration element 1 that is less prone to frequency changes caused by the falling of foreign matter such as burrs.

[0079] Next, the configuration of the first counterweight 461 relative to the second side 112 in the counterweight part 431 of the vibrating arm 43 will be described.

[0080] like Figure 3 As shown, and as described above, the lower side portion 124 of the second side surface 112 in the counterweight 431 is inclined relative to the Z direction. Specifically, the lower side surface portion 124 of the second side surface 112 in the counterweight 431 is inclined inward from the first surface 101 toward the second surface 102 toward the counterweight 431. That is, in the second side surface 112 of the counterweight 431, the innermost portion 132 of the lower side surface portion 124, which is the first side surface portion, and the upper side surface portion 123, which is the second side surface portion, is the lower end of the lower side surface portion 124 that connects to the second surface 102.

[0081] In the second side surface 112 of the counterweight 431, when an imaginary line passing through the innermost part 132 of the lower side surface 124 (which is the first side surface) and the upper side surface 123 (which is the second side surface) and parallel to the Z direction is designated as imaginary line L3, and an imaginary line passing through the outer edge 463B of the second side surface 112 of the first counterweight 461 (which is the second side surface 102 of the counterweight 431) and parallel to the Z direction is designated as imaginary line L4, imaginary line L3 and imaginary line L4 are located at the same position when viewed from the side surface in the Y direction (which is perpendicular to the Z direction).

[0082] In addition, such as Figure 1 As shown, in the counterweight 431, the lower side portion 124, which is the first side portion, and the innermost portion 132, which is the upper side portion 123, which is the second side portion, in the second side portion 112 are at the same position as the outer edge portion 463B, which is the second side portion 112, in the first counterweight 461. That is, the first counterweight 461 in the counterweight 431 is configured such that, when viewed from the Z direction, the outer edge portion 463B, which is the second side portion 112, in the first counterweight 461 is located at the same position as the lower side portion 124, which is the first side portion, and the innermost portion 132, which is the upper side portion 123, which is the second side portion.

[0083] In this way, by arranging the first counterweight 461 such that, when viewed from the Z direction, the outer edge 463B of the second side 112 of the first counterweight 461 is in the same position as the lower side 124 (which is the first side) and the innermost side 132 (which is the upper side 123 (which is the second side) of the second side 112, the refraction or shielding of the laser LB can also be suppressed in the second side 112, just like in the first side 111. Therefore, the laser LB can be fully irradiated onto the first counterweight 461, and a vibrating element 1 that suppresses the generation of foreign matter such as burrs and is less prone to frequency changes can be provided.

[0084] Next, the configuration of the first counterweight 461 relative to the third side 113 in the counterweight part 431 of the vibrating arm 43 will be described.

[0085] like Figure 5 As shown, and as described above, the lower side portion 126 of the third side surface 113 in the counterweight 431 is inclined relative to the Z direction. Specifically, the lower side surface portion 126 of the third side surface 113 in the counterweight 431 is inclined inward from the first surface 101 toward the second surface 102 toward the counterweight 431. That is, in the third side surface 113 of the counterweight 431, the innermost portion 133 of the lower side surface portion 126, which is the first side surface portion, and the upper side surface portion 125, which is the second side surface portion, becomes the lower end of the lower side surface portion 126 that connects to the second surface 102.

[0086] In the third side surface 113 of the counterweight 431, when an imaginary line passing through the innermost part 133 of the lower side surface 126 (which is the first side surface) and the upper side surface 125 (which is the second side surface) and parallel to the Z direction is designated as imaginary line L5, and an imaginary line passing through the outer edge 463C of the first counterweight 461 disposed on the third side surface 113 of the second side surface 102 of the counterweight 431 and parallel to the Z direction is designated as imaginary line L6, imaginary line L6 is located on the negative side of the Y direction relative to imaginary line L5 when viewed from the side in the X direction perpendicular to the Z direction. That is, the imaginary line L6 passing through the outer edge 463C and parallel to the Z direction is located on the negative side of the Y direction, which is towards the inside compared to the imaginary line L5 passing through the innermost part 133 of the first and second side surfaces of the third side surface 113.

[0087] In addition, such as Figure 1 As shown, in the counterweight 431, the outer edge 463C of the first counterweight 461 on the side of the third side 113 is closer to the innermost side 133 of the lower side 126, which is the first side 113, and the upper side 125, which is the second side 113.

[0088] In this way, by arranging the first counterweight 461 such that, when viewed from the Z direction, the outer edge 463C of the third side 113 of the first counterweight 461 is more inward than the innermost part 133 of the lower side 126 (which is the first side 113) and the upper side 125 (which is the second side 113), the refraction or shielding of the laser LB can also be suppressed in the third side 113, similar to the first side 111 and the second side 112. Therefore, the laser LB can be fully irradiated onto the first counterweight 461, and a vibrating element 1 that suppresses the generation of foreign matter such as burrs and is less prone to frequency changes can be provided.

[0089] Next, the configuration of the first side 111, the second side 112, and the third side 113 of the first counterweight 461 relative to the counterweight part 441 of the vibrating arm 44 will be described.

[0090] like Figure 1 and Figures 3 to 6 As shown, the basic structure of the counterweight 441 of the vibrating arm 44 is the same as that of the counterweight 431 of the vibrating arm 43. Therefore, the arrangement of the first counterweight 461 relative to the first side 111, the second side 112, and the third side 113 of the counterweight 441 of the vibrating arm 44 is the same as that of the counterweight 431 of the vibrating arm 43. Specifically, when viewed from the Z direction, the first counterweight 461 is configured such that the outer edges 463A and 463B of the first counterweight 461 are at the same positions as the innermost parts 131 of the first side and the second side of the first side 111, and the innermost parts 132 of the first side and the second side of the second side 112, respectively. When viewed from the Z direction, the first counterweight 461 is configured such that the outer edge 463C of the first counterweight 461 is further inward than the innermost part 133 of the first side and the second side of the third side 113. Therefore, the refraction or obstruction of the laser LB by the first side 111, the second side 112, and the third side 113 in the counterweight 441 can be suppressed. Thus, the laser LB can be fully irradiated onto the first counterweight 461, and a vibration element 1 that suppresses the generation of foreign objects such as burrs and is not prone to frequency changes can be provided.

[0091] In this embodiment, as described above, the three sides of the counterweight portions 431 and 441 of the vibrating arms 43 and 44, namely the first side 111, the second side 112, and the third side 113, respectively include: lower side portions 122, 124, and 126 as the first side portion inclined relative to the Z direction; and upper side portions 121, 123, and 125 as the second side portion inclined relative to the first side portion toward the first surface 101. Moreover, the first counterweight 461 is configured such that, when viewed from the Z direction, the outer edges 463A, 463B, and 463C of the first counterweight 461 are located either inside the lower side portions 122, 124, and 126 as the first side portion and the innermost portions 131, 132, and 133 as the upper side portions 121, 123, and 125 as the second side portion, or at the same position as the innermost portions 131, 132, and 133. Alternatively, at least one of the first side 111, the second side 112, and the third side 113 can be configured as the structure of this embodiment. However, when all three sides—the first side 111, the second side 112, and the third side 113—are configured as the structure of this embodiment, the generation of foreign matter such as burrs is suppressed in these three sides. Therefore, compared to the case where only one or two of the three sides—the first side 111, the second side 112, and the third side 113—are configured as the structure of this embodiment, a vibration element 1 that is less prone to frequency changes can be provided.

[0092] Furthermore, by assuming at least one of the first side surface 111 and the second side surface 112 in the counterweight portions 431 and 441 of the vibrating arms 43 and 44 as the structure of this embodiment, a tuning fork-type quartz oscillator that is less prone to frequency changes can be provided as the vibrating element 1. That is, when a tuning fork-type quartz oscillator is formed by wet etching, due to the anisotropy of quartz, the first side surface 111 and the second side surface 112 are prone to having a convex shape in the cross section, as in the prior art. However, even if the cross section has a convex shape, in the frequency adjustment process of the vibrating element 1 described later, when the first counterweight 461 is irradiated with laser LB, the refraction or shielding of laser LB in the first side surface 111 or the second side surface 112 can be suppressed. Therefore, a tuning fork-type quartz oscillator that is less prone to frequency changes can be provided as the vibrating element 1.

[0093] Furthermore, by arranging the third side surface 113 of the counterweight portions 431 and 441 of the vibrating arms 43 and 44 in the structure of this embodiment, a vibration element 1 can be provided that increases the frequency change amount during the frequency adjustment process of the vibration element 1 described later, and is less prone to frequency changes after the frequency adjustment process. Specifically, the third side surface 113 is the end surface of the vibrating arms 43 and 44. By suppressing the refraction or obstruction of the laser LB in the third side surface 113, which is the end surface of the vibrating arms 43 and 44, the first counterweight 461 can be easily removed from the end side of the vibrating arms 43 and 44. Therefore, the frequency change amount can be increased during the frequency adjustment process. Furthermore, since the generation of foreign matter such as burrs on the end side of the vibrating arms 43 and 44 can be suppressed, a vibration element 1 that is less prone to frequency changes after the frequency adjustment process can be provided.

[0094] In addition, such as Figure 3 As shown, the width W4 in the X direction of the second surface 102 of the counterweights 431 and 441 is smaller than the width W3 in the X direction of the first surface 101 of the counterweights 431 and 441. Therefore, it is easy to form the first counterweight 461 on the entire width W4 in the X direction of the second surface 102 of the counterweights 431 and 441, and a vibrating element 1 that is easy to manufacture can be provided.

[0095] In addition, such as Figure 2 As shown, the width W1 of the first surface 101 of the arms 430 and 440 in the X direction is equal to the width W2 of the second surface 102 of the arms 430 and 440 in the X direction. As described above, a signal electrode 481 and a ground electrode 482 are disposed on the arms 430 and 440. By applying a drive signal to the signal electrode 481, the vibrating arms 43 and 44 vibrate. By making the width W1 of the first surface 101 of the arms 430 and 440 in the X direction equal to the width W2 of the second surface 102 of the arms 430 and 440, the vibration balance of the vibrating arms 43 and 44 is improved, and vibration leakage can be reduced. Therefore, a vibrating element 1 with excellent vibration efficiency can be provided.

[0096] Next, refer to Figures 7 to 11 The manufacturing method of the vibration element 1 in this embodiment will be described.

[0097] The manufacturing method of the vibrating element 1 includes a frequency adjustment method for adjusting the frequency of the vibrating element 1. Furthermore, as... Figure 7 As shown, the frequency adjustment method for adjusting the frequency of the vibration element 1 includes: a preparation step, preparing the vibration element 1; a frequency measurement step, measuring the oscillation frequency of the vibration element 1; and a frequency adjustment step, changing the oscillation frequency of the vibration element 1 to adjust the oscillation frequency of the vibration element 1 to the target value.

[0098] 1.1 Preparation process

[0099] First, in step S1, as Figure 8 As shown, a crystal wafer 40 is prepared, and a plurality of vibrators 41 are formed on the crystal wafer 40 by using photolithography and etching techniques. Next, electrodes 45 are formed on the surface of the vibrators 41 by sputtering or the like, and metal films 46 are formed on the counterweight portions 431 and 441 of the vibrating arms 43 and 44 by evaporation or the like. In this embodiment, as described above, metal films 46 are formed on the second surface 102, the first side surface 111, the second side surface 112, and the third side surface 113 of the counterweight portions 431 and 441. The metal film 46 formed on the second surface 102 is the first counterweight 461.

[0100] 1.2 Frequency Measurement Procedure

[0101] Next, in step S2, for example, the detector of the frequency measuring device having an oscillation circuit is brought into contact with the electrode 45 formed on the surface of the vibrating body 41 to measure the oscillation frequency of the vibrating element 1.

[0102] 1.3 Frequency Adjustment Process

[0103] Next, in step S3, the frequency of the vibrating element 1 is adjusted according to the oscillation frequency measured in step S2. Specifically, as follows... Figures 9 to 11 As shown, laser LB is irradiated onto the first counterweight 461 disposed on the second surface 102 of the counterweight portions 431 and 441, thereby removing a portion of the first counterweight 461. In this embodiment, laser LB irradiates from the first surface 101 side of the vibrating element 1 toward the second surface 102 in a direction along the Z direction. By removing a portion of the first counterweight 461, the mass of the vibrating arms 43 and 44 is reduced, and the oscillation frequency of the vibrating element 1 can be changed and adjusted to the target frequency. Furthermore, the basic structure of the counterweight portion 431 of the vibrating arm 43 and the counterweight portion 441 of the vibrating arm 44 is the same; therefore, in Figure 10 and Figure 11 The diagram shows the counterweight 431 of the vibrating arm 43 in the counterweight parts 431 and 441 of the vibrating arms 43 and 44.

[0104] like Figure 10 As shown, when viewed from the direction of the laser LB (Z direction), the laser LB irradiated towards the innermost part 131 of the first side surface 111 (i.e., the lower side surface 122) or the second side surface 121 (i.e., the upper side surface 121) is suppressed from being refracted or blocked by the first side surface 111. That is, when viewed from the Z direction, when the first counterweight 461, located in the first side surface 111 or the second side surface 111, is removed, the laser LB can be sufficiently irradiated towards the first counterweight 461 located in the innermost part or the same position as the innermost part 131. Therefore, when the first counterweight 461 is removed, the formation of foreign matter such as burrs is suppressed, thus providing a vibration element 1 that is less prone to frequency changes caused by the falling of foreign matter such as burrs.

[0105] Similarly, when viewed from the Z direction, regarding the laser LB irradiated towards the innermost part 132 of the first side surface 112 (i.e., the lower side surface 124) and the second side surface 123 (i.e., the upper side surface 123), the laser LB is prevented from being refracted or blocked by the second side surface 112. Therefore, the laser LB can be sufficiently irradiated towards the first counterweight 461, which is positioned towards the innermost part 132 or at the same position as the innermost part 132. Thus, when removing the first counterweight 461, the formation of foreign matter such as burrs is suppressed, thereby providing a vibrating element 1 that is less prone to frequency changes.

[0106] In addition, such as Figure 11 As shown, when viewed from the Z direction, regarding the laser LB irradiated towards the innermost part 133 of the first side surface 113 (i.e., the lower side surface 126) or the second side surface 125 (i.e., the upper side surface 125), and at the same position as the innermost part 133, the laser LB is suppressed from being refracted or blocked by the third side surface 113. Therefore, the laser LB can be sufficiently irradiated towards the first counterweight 461, which is positioned towards the innermost part 133 or at the same position as the innermost part 133. Thus, when removing the first counterweight 461, the formation of foreign matter such as burrs is suppressed, thereby providing a vibrating element 1 that is less prone to frequency changes.

[0107] In addition, in this embodiment, a frequency adjustment step is performed after the frequency measurement step in step S2, but it is not limited to this. The oscillation frequency of the vibration element 1 can also be adjusted while the frequency measurement is being performed in the frequency adjustment step.

[0108] Furthermore, the laser LB used in the frequency adjustment process is not particularly limited; for example, pulsed lasers such as YAG lasers and excimer lasers, or continuously oscillating lasers such as carbon dioxide lasers, can also be used. However, in this embodiment, a pulsed laser is used as the laser LB. That is, a portion of the first counterweight 461 is removed by continuously irradiating the laser LB, which is focused into a point shape. Thus, by using a pulsed laser as the laser LB, the irradiation time and irradiation interval can be varied without changing the intensity of the laser LB, thereby controlling the irradiation amount, i.e., the energy, of the laser LB per unit area relative to the first counterweight 461. Therefore, the laser LB is stable, enabling high-precision frequency adjustment.

[0109] Furthermore, in this embodiment, although a portion of the first counterweight 461 is removed during the frequency adjustment process, the entire first counterweight 461 can also be removed. That is, by removing at least a portion of the first counterweight 461, the oscillation frequency of the vibrating element 1 can be changed, and the vibrating element 1 can be adjusted to the target frequency.

[0110] As described above, the following effects can be obtained according to this embodiment.

[0111] The vibrating element 1 includes: a base 42; vibrating arms 43 and 44, each including a first surface 101, a second surface 102 on the side opposite to the first surface 101 in the Z direction, a first side surface 111, a second side surface 112 on the side opposite to the first side surface 111 in the X direction, and a third side surface 113 on the side opposite to the base 42, the vibrating arms 43 and 44 extending from the base 42 in the Y direction; and a first counterweight 461 disposed on the second surface 102. Furthermore, at least one of the first side surface 111, the second side surface 112, and the third side surface 113 in the vibrating element 1 includes: a lower side surface portion 122, 124, 126 as a first side surface portion inclined relative to the Z direction; and an upper side surface portion 121, 123, 125 as a second side surface portion inclined relative to the first side surface portion toward the first surface 101. Furthermore, the first counterweight 461 is configured such that, when viewed from the Z direction, the outer edges 463A, 463B, and 463C of the first counterweight 461 are located inside or at the same position as the innermost portions 131, 132, and 133 of the lower side portions 122, 124, and 126 of the first side portion and the upper side portions 121, 123, and 125 of the second side portion, respectively, which are the lower side portions 122, 124, and 126 of the first side portion and the upper side portions 121, 123, and 125 of the second side portion.

[0112] Therefore, the laser LB can be fully irradiated onto the first counterweight 461, suppressing the formation of foreign objects such as burrs in the first counterweight 461, and providing a vibration element 1 that is not prone to frequency changes caused by the falling of foreign objects such as burrs.

[0113] In addition, in this embodiment, the upper side portions 121, 123, and 125 of the first side portion 111, the second side portion 112, and the third side portion 113 of the counterweight portions 431 and 441, which are the second side portions, are parallel to the Z direction, but may also be inclined relative to the Z direction.

[0114] In addition, in this embodiment, the lower side portions 122, 124, and 126 of the first side portions 111, the second side portion 112, and the third side portion 113 of the counterweight portions 431 and 441, which are the first side portions, are inclined towards the inside of the counterweight portion 431 from the first side portion 101 toward the second side portion 102, but they may also be inclined towards the outside of the counterweight portion 431.

[0115] In this embodiment, the lower side portions 122, 124, and 126 of the first side portion 111, second side portion 112, and third side portion 113 of the counterweight portions 431 and 441 are the first side portions of the present invention, and the upper side portions 121, 123, and 125 are the second side portions of the present invention. However, the upper side portions 121, 123, and 125 and the lower side portions 122, 124, and 126 can also be configured such that the upper side portions 121, 123, and 125 are the first side portions and the lower side portions 122, 124, and 126 are the second side portions. Furthermore, when the lower side portions 122, 124, and 126 are configured as second side portions, the lower side portions 122, 124, and 126, which are second side portions, are inclined toward the second surface 102 relative to the upper side portions 121, 123, and 125, which are first side portions.

[0116] In this embodiment, the upper ends of the upper side portions 121, 123, and 125 of the first side portion 111, second side portion 112, and third side portion 113 of the counterweight portions 431 and 441 are connected to the first surface 101. However, the upper ends of the upper side portions 121, 123, and 125 can also be connected to the first surface 101 via other side portions. Similarly, the lower ends of the upper side portions 121, 123, and 125 can also be connected to the upper ends of the lower side portions 122, 124, and 126 via other side portions, and the lower ends of the lower side portions 122, 124, and 126 can also be connected to the second surface 102 via other side portions.

[0117] 2. Implementation Method 2

[0118] Next, refer to Figures 12 to 15 The vibration element 1a of Embodiment 2 will be described.

[0119] The vibration element 1a in Embodiment 2 is the same as that in Embodiment 1, except that the shape of the counterweights 431a and 441a of the vibration arms 43 and 44 is different.

[0120] Furthermore, structures identical to those in Embodiment 1 described above are labeled with the same reference numerals, and their descriptions are omitted. Figures 12-15 This shows the state after the frequency adjustment process is completed, i.e., after laser LB has been irradiated and a portion of the first counterweight 461 has been removed. Furthermore, the basic structures of the counterweight portion 431a of the vibrating arm 43 and the counterweight portion 441a of the vibrating arm 44 are the same; therefore, in Figures 13-15 The diagram shows the counterweight 431a of the vibrating arm 43 in the counterweights 431a and 441a of the vibrating arms 43 and 44.

[0121] like Figure 12 , Figure 13 and Figure 15 As shown, metal films 46 are respectively disposed on the second surface 102, the first side surface 111a, the second side surface 112a, and the third side surface 113a of the counterweight portions 431a and 441a of the vibrating arms 43 and 44. The metal film 46 disposed on the second surface 102 of the counterweight portion 431a of the vibrating arm 43 is the first counterweight 461. In addition, as Figure 12 , Figure 14 and Figure 15 As shown, the removal area 462 in the second surface 102 is the area where the first counterweight 461 was removed by laser LB during the frequency adjustment process.

[0122] The first side surface 111a of the counterweight portion 431a of the vibrating arm 43 includes an upper side surface 121a and a lower side surface 122a. The upper end of the upper side surface 121a is connected to the first surface 101. The lower end of the upper side surface 121a is connected to the upper end of the lower side surface 122a. The lower end of the lower side surface 122a is connected to the second surface 102.

[0123] In this embodiment, the upper side portion 121a of the first side portion 111a in the counterweight portion 431a is inclined relative to the Z direction, and the lower side portion 122a of the first side portion 111a in the counterweight portion 431a is parallel to the Z direction.

[0124] That is, the upper side portion 121a of the first side portion 111a in the counterweight portion 431a is the first side portion that is inclined relative to the Z direction in the present invention. Furthermore, the lower side portion 122a of the first side portion 111a in the counterweight portion 431a is the second side portion that is inclined relative to the first side portion toward the second side portion 102 in the present invention.

[0125] In other words, the first side 111a in the counterweight 431a includes: an upper side 121a that is an upper side portion that is inclined relative to the Z direction; and a lower side 122a that is a second side portion that is inclined relative to the upper side portion 121a that is an upper side portion toward the second side 102.

[0126] In this embodiment, the upper side portion 121a of the first side surface 111a of the counterweight 431a slopes inward from the first surface 101 toward the second surface 102 toward the counterweight 431a. That is, in the first side surface 111a of the counterweight 431a, the innermost portion 131a of the upper side surface 121a (which is the first side surface) and the lower side surface 122a (which is the second side surface) becomes the lower end of the upper side surface 121a, which connects the upper side surface 121a and the lower side surface 122a.

[0127] like Figure 13 As shown, in the first side surface 111a of the counterweight 431a, when an imaginary line passing through the innermost part 131a of the upper side surface 121a (which is the first side surface) and the lower side surface 122a (which is the second side surface) and parallel to the Z direction is designated as imaginary line L1a, and an imaginary line passing through the outer edge 463A of the first side surface 111a of the first counterweight 461 (which is the second side surface 102 of the counterweight 431a) and parallel to the Z direction is designated as imaginary line L2a, imaginary lines L1a and L2a are located at the same position when viewed from the side surface in the Y direction, which is perpendicular to the Z direction.

[0128] In addition, such as Figure 12 As shown, in the counterweight 431a, the innermost part 131a of the upper side portion 121a (which is the first side portion) and the lower side portion 122a (which is the second side portion) of the first side portion 111a are in the same position as the outer edge 463A of the first side portion 111a in the first counterweight 461. That is, the first counterweight 461 in the counterweight 431a is configured such that, when viewed from the Z direction, the outer edge 463A of the first side portion 111a in the first counterweight 461 is located in the same position as the innermost part 131a of the upper side portion 121a (which is the first side portion) and the lower side portion 122a (which is the second side portion) of the first side portion 111a.

[0129] In this way, by arranging the first counterweight 461 such that, when viewed from the Z direction, the outer edge 463A of the first side surface 111a is in the same position as the innermost part 131a of the upper side surface 121a (which is the first side surface) and the lower side surface 122a (which is the second side surface), the refraction or shielding of the laser LB in the upper side surface 121a and the lower side surface 122a of the first side surface 111a can be suppressed. Therefore, the laser LB can be sufficiently irradiated onto the first counterweight 461, suppressing the formation of foreign matter such as burrs, and thus providing a vibration element 1a that is less prone to frequency changes caused by the falling of foreign matter such as burrs.

[0130] In addition, such as Figure 13 and Figure 14 As shown, in this embodiment, the second side 112a of the counterweight part 431a of the vibrating arm 43 is a surface parallel to the YZ plane, as... Figure 15 As shown, the third side surface 113a is a surface parallel to the XZ plane. That is, the second side surface 112a and the third side surface 113a in the counterweight part 431a of the vibrating arm 43 do not include the first side surface and the second side surface in this invention.

[0131] Although the counterweight 431a of the vibrating arm 43 has been described, the basic structure of the counterweight 431a of the vibrating arm 43 is the same as that of the counterweight 441a of the vibrating arm 44. Similarly, the first side 111a of the counterweight 441a of the vibrating arm 44 includes: an upper side 121a that is an upper side 121a that is inclined relative to the Z direction; and a lower side 122a that is a second side 122a that is inclined relative to the upper side 121a that is an ... Furthermore, by arranging the first counterweight 461 such that, when viewed from the Z direction, the outer edge 463A of the first side 111a of the first counterweight 461 is in the same position as the innermost side 131a of the upper side 121a (which is the first side 111a) and the lower side 122a (which is the second side 122a), the laser LB can be sufficiently irradiated onto the first counterweight 461, and a vibration element 1a that is less prone to frequency changes caused by the falling of foreign objects such as burrs can be provided.

[0132] As described above, the same effects as in Embodiment 1 can be obtained according to this embodiment.

[0133] The first side 111a, which is one of the first side 111a, the second side 112a, and the third side 113a in the vibrating element 1a, includes: an upper side portion 121a that is inclined relative to the Z direction; and a lower side portion 122a that is inclined relative to the first side portion toward the second side 102. Furthermore, the first counterweight 461 is configured such that, when viewed from the Z direction, the outer edge 463A of the first side 111a side of the first counterweight 461 is located at the same position as the innermost portion 131a of both the upper side portion 121a (as the first side portion) and the lower side portion 122a (as the second side portion).

[0134] Therefore, the laser LB can be fully irradiated onto the first counterweight 461, suppressing the formation of foreign objects such as burrs in the first counterweight 461, and providing a vibration element 1a that is not prone to frequency changes.

[0135] In addition, in this embodiment, the second side portion, namely the lower side portion 122a, of the first side portion 111a of the counterweight portions 431a and 441a is parallel to the Z direction, but it may also be inclined relative to the Z direction.

[0136] In addition, in this embodiment, the first side portion, namely the upper side portion 121a, of the first side portion 111a of the counterweight portions 431a and 441a is inclined towards the inside of the counterweight portion 431a from the first surface 101 toward the second surface 102, but it may also be inclined towards the outside of the counterweight portion 431a.

[0137] 3. Implementation Method 3

[0138] Next, refer to Figures 16 to 18 The vibration element 1b of Embodiment 3 will be described.

[0139] Compared with the vibration element 1 of Embodiment 1, the vibration element 1b of Embodiment 3 is the same as that of Embodiment 1, except that the metal film 46 disposed on the lower side portion 122 of the first side portion 111 of the counterweight portion 431, 441 of the vibration arm 43, 44 becomes the second counterweight 465 and has a removal area 466 in which the second counterweight 465 is removed by laser LB.

[0140] Furthermore, structures identical to those in Embodiment 1 described above are labeled with the same reference numerals, and their descriptions are omitted. Figures 16-18 This indicates the state after the frequency fine-tuning process described later has been completed, i.e., after irradiating with laser LB and removing a portion of the second counterweight 465. Furthermore, since the basic structure of the counterweight part 431 of the vibrating arm 43 is the same as that of the counterweight part 441 of the vibrating arm 44, therefore, in Figure 17 and Figure 18The diagram shows the counterweight 431 of the vibrating arm 43 in the counterweight parts 431 and 441 of the vibrating arms 43 and 44.

[0141] like Figure 16 and Figure 17 As shown, metal films 46 are respectively disposed on the second side 102, the first side 111, the second side 112 and the third side 113 of the counterweight parts 431 and 441 of the vibrating arms 43 and 44.

[0142] In this embodiment, the metal film 46 disposed on the lower side portion 122 of the first side portion 111 of the counterweight portions 431 and 441 is a second counterweight 465. In other words, a second counterweight 465 is disposed on the lower side portion 122 of the first side portion 111 of the counterweight portions 431 and 441, which is a first side portion.

[0143] In addition, such as Figure 16 and Figure 18 As shown, the lower side portion 122 of the first side portion 111, which is the first side portion, has a removal area 466. The removal area 466 is the area where the second counterweight 465 was removed by irradiation with laser LB during the frequency fine-tuning process described later.

[0144] Next, refer to Figures 19 to 21 The manufacturing method of the vibration element 1b in Embodiment 3 will be described. The manufacturing method of the vibration element 1b in Embodiment 3 is the same as that in Embodiment 1, except that it includes a frequency measurement step as step S4 and a frequency fine-tuning step as step S5.

[0145] Furthermore, structures identical to those in Embodiment 1 described above are labeled with the same reference numerals, and their descriptions are omitted. Moreover, since the basic structure of the counterweight 431 of the vibrating arm 43 is the same as that of the counterweight 441 of the vibrating arm 44, therefore, in Figure 21 The diagram shows the counterweight 431 of the vibrating arm 43 in the counterweight parts 431 and 441 of the vibrating arms 43 and 44.

[0146] The manufacturing method of the vibrating element 1b includes a frequency adjustment method for adjusting the frequency of the vibrating element 1b. Furthermore, as... Figure 19 As shown, the frequency adjustment method for adjusting the frequency of the vibrating element 1b includes: a preparation step, preparing the vibrating element 1b; a frequency measurement step, measuring the oscillation frequency of the vibrating element 1b; a frequency adjustment step, adjusting the oscillation frequency of the vibrating element 1b; a frequency measurement step, measuring the oscillation frequency of the vibrating element 1b; and a frequency fine-tuning step, changing the oscillation frequency of the vibrating element 1b, thereby fine-tuning the oscillation frequency of the vibrating element 1b to the target frequency.

[0147] The preparation process of step S1, the frequency measurement process of step S2, and the frequency adjustment process of step S3 are the same as those in embodiment 1, so detailed descriptions are omitted.

[0148] 1.1 Preparation process

[0149] First, in step S1, a crystal wafer 40 is prepared, and a plurality of vibrators 41 are formed on the crystal wafer 40. Next, electrodes 45 and metal films 46 are formed on the surface of the vibrators 41. In this embodiment, as described above, the metal film 46 formed on the second surface 102 of the weight portions 431 and 441 is the first weight 461, and the metal film 46 formed on the first side surface portion 111 of the weight portions 431 and 441, i.e., the lower side surface portion 122, is the second weight 465.

[0150] 1.2 Frequency Measurement Procedure

[0151] Next, in step S2, the oscillation frequency of the vibrating element 1b is measured.

[0152] 1.3 Frequency Adjustment Process

[0153] Next, in step S3, the frequency of the vibrating element 1 is adjusted according to the oscillation frequency measured in step S2. Specifically, laser LB is irradiated onto the first counterweight 461 disposed on the second surface 102 of the counterweights 431 and 441 to remove a portion of the first counterweight 461.

[0154] 1.4 Frequency Measurement Procedure

[0155] Next, in step S4, similar to step S2, the detector of the frequency measuring device with the oscillation circuit is brought into contact with the electrode 45 formed on the surface of the vibrating body 41 to measure the oscillation frequency of the vibrating element 1b.

[0156] 1.5 Frequency fine-tuning process

[0157] Next, in step S5, the frequency of the vibrating element 1b is fine-tuned based on the oscillation frequency measured in step S4. Specifically, as follows... Figure 20 and Figure 21 As shown, laser LB is irradiated onto the second counterweight 465, which is located on the lower side portion 122 of the first side portion 111 of the counterweight portions 431 and 441, to remove a portion of the second counterweight 465.

[0158] In this embodiment, the laser LB irradiates from the first surface 101 side of the vibrating element 1 toward the second surface 102 in the Z-direction. The focal point of the laser LB is located at the position of the first counterweight 461 disposed on the second surface 102, so that the first counterweight 461 disposed on the second surface 102 can be efficiently removed in the frequency adjustment step of step S3. That is, the position of the second counterweight 465 on the lower side surface 122 of the first side surface 111 of the counterweight portions 431 and 441 is not the same as the position of the focal point of the laser LB irradiating the second counterweight 465. Therefore, the irradiation amount, i.e., the energy of the laser LB irradiating each unit area of ​​the second counterweight 465 is less than the energy of the laser LB irradiating each unit area of ​​the first counterweight 461, and the removal amount of the second counterweight 465 at each point of the laser LB is less than the removal amount of the first counterweight 461 at each point of the laser LB.

[0159] Therefore, by removing a portion of the second counterweight 465 in the frequency fine-tuning step S5, the oscillation frequency of the vibrating element 1b can be changed with high precision compared to the frequency adjustment step S3, and the oscillation frequency of the vibrating element 1b can be fine-tuned to the target value.

[0160] Furthermore, in this embodiment, a frequency fine-tuning step is performed after the frequency measurement step in step S4, but it is not limited to this. In the frequency fine-tuning step, the oscillation frequency of the vibrating element 1b can be fine-tuned while the frequency measurement is being performed.

[0161] In addition, in this embodiment, the metal film 46 formed on the lower side portion 122 of the first side portion 111 of the counterweight portions 431 and 441 is designated as the second counterweight 465. However, the metal film 46 formed on the lower side portion 124 of the first side portion 112 of the second side portion 112 and the metal film 46 formed on the lower side portion 126 of the first side portion 113 of the third side portion can also be designated as the second counterweight 465.

[0162] As described above, according to this embodiment, in addition to the effects in Embodiment 1, the following effects can also be obtained.

[0163] A second counterweight 465 is disposed on the lower side portion 122 of the first side portion 111 of the counterweight portions 431 and 441. As a result, a vibrating element 1b that can be easily fine-tuned in frequency can be provided.

[0164] Furthermore, in this embodiment, during the frequency fine-tuning process described above, a portion of the second counterweight 465 is removed, but it is also possible to remove all of the second counterweight 465. That is, by removing at least a portion of the second counterweight 465, the oscillation frequency of the vibrating element 1b can be changed, and the vibrating element 1b can be fine-tuned to the target frequency.

[0165] 4. Implementation Method 4

[0166] Next, refer to Figure 22 The vibration device 10 of Embodiment 4 will be described. In the vibration device 10 of Embodiment 4, any one of the vibration elements 1, 1a, and 1b described above can be used. In this embodiment, an example of applying the vibration element 1 described in Embodiment 1 is shown.

[0167] Furthermore, for structures identical to those in Embodiment 1 described above, the same reference numerals are used, and their descriptions are omitted. Additionally, in Figure 22 The diagrams of the electrodes 45 and the metal film 46 disposed on the vibrating element 1 are omitted.

[0168] Figure 22 The vibration device 10 shown is used, for example, as an oscillator. Furthermore, the vibration device 10 can also be used as a device other than an oscillator, such as various sensors like accelerometers and angular velocity sensors. The vibration device 10 can be integrated into computers, printers, smartphones, tablets, watches, televisions, head-mounted displays, cameras, digital still cameras, car navigation systems, video game devices, various medical devices, various measuring devices, and various moving objects.

[0169] like Figure 22 As shown, the vibration device 10 has a package 13, a vibration element 1 housed in the package 13, and a circuit element 16.

[0170] Package 13 includes: a base 31 having a recess 311 with an opening on its upper surface; and a plate-shaped cover 32, which is engaged with the upper surface of the base 31 via a coupling member 33 in a manner that blocks the opening of the recess 311. Inside the package 13, an internal space S is formed by the recess 311, in which the vibrating element 1 and the circuit element 16 are housed.

[0171] For example, the base 31 can be made of ceramic such as alumina, and the cover 32 can be made of metallic materials such as Kovar alloy. However, there are no particular limitations on the materials used to construct the base 31 and the cover 32. For example, the cover 32 can also be made of a light-transmitting glass material.

[0172] Furthermore, the internal space S is airtight, in a depressurized state, preferably closer to a vacuum. This reduces viscous resistance and improves the vibration characteristics of the vibrating element 1. However, the atmosphere of the internal space S is not particularly limited; for example, it can be an atmosphere containing inert gases such as nitrogen or argon, or it can be in a state other than depressurization, such as atmospheric pressure or pressurization.

[0173] Additionally, the recess 311 has: a recess 311a that opens on the upper surface of the base 31; a recess 311b that opens on the bottom surface of the recess 311a, the opening width of which is smaller than that of the recess 311a; and a recess 311c that opens on the bottom surface of the recess 311b, the opening width of which is smaller than that of the recess 311b.

[0174] A plurality of internal terminals 341 are disposed on the bottom surface of recess 311a. A plurality of internal terminals 342 are disposed on the bottom surface of recess 311b. A plurality of external terminals 343 are disposed on the lower surface of base 31. A portion of the plurality of internal terminals 342 is electrically connected to the internal terminals 341 via internal wiring (not shown) formed in base 31, and the remaining portion is electrically connected to the external terminals 343 via internal wiring (not shown).

[0175] The vibrating element 1 is joined to the internal terminal 341 at its base 42 via a conductive connecting member 12. Thus, the vibrating element 1 is fixed to the base 31 via the connecting member 12, and the electrodes 45 of the vibrating element 1 are electrically connected to the internal terminal 341.

[0176] The circuit element 16 is engaged with the bottom surface of the recess 311c. The circuit element 16 may include, for example, an interface for communicating with an external host device, an oscillation circuit for oscillating the vibration element 1, etc. Alternatively, the circuit element 16 may be omitted or disposed outside the package 13.

[0177] In addition, circuit element 16 is electrically connected to internal terminal 342 via bonding wire BW.

[0178] Thus, the vibrating element 1 and the circuit element 16 are electrically connected via internal terminal 341, internal wiring (not shown), internal terminal 342, and bonding wire BW. Therefore, the circuit element 16 applies a drive signal to the vibrating element 1, thereby enabling the vibrating element 1 to oscillate at a desired frequency.

[0179] As described above, according to this embodiment, the same effect as in Embodiment 1 can be obtained, and a vibration device 10 that is not prone to frequency changes can be provided.

[0180] 5. Implementation Method 5

[0181] Next, refer to Figures 23 to 25 The vibration element 1c of Embodiment 5 will be described.

[0182] The vibration element 1c of Embodiment 5 is the same as the vibration element 1 of Embodiment 1, except that it is a gyroscope element with a so-called double-T structure.

[0183] Furthermore, structures identical to those in Embodiment 1 described above are labeled with the same reference numerals, and their descriptions are omitted. Additionally, Figure 23 This shows the state after the above-mentioned frequency adjustment process has been completed, that is, after the laser LB has been irradiated and a portion of the first counterweight 461 has been removed.

[0184] The vibration element 1c in this embodiment is a gyroscope element, specifically an angular velocity sensor element capable of detecting the angular velocity ωz with the Z-axis as the detection axis.

[0185] like Figure 23 As shown, the vibration element 1c includes a vibrating body 41c, an electrode 45, and a metal diaphragm 46 for adjusting the frequency of the vibrating body 41c. In this embodiment, as described later, the electrode 45 is used to vibrate the drive arms 456, 457, 458, and 459 of the vibrating body 41c, or to detect the vibration of the detection arms 452 and 453 of the vibrating body 41c.

[0186] The vibrator 41c is formed from a Z-cut quartz plate and has: a base 451 located in the center; a pair of detection arms 452 and 453 extending from the base 451 to the positive and negative sides of the Y direction, respectively, serving as vibration arms; a pair of connecting arms 454 and 455 extending from the base 451 to the positive and negative sides of the X direction, respectively; a pair of drive arms 456 and 457 extending from the end portions of the connecting arms 454 to the positive and negative sides of the Y direction, respectively, serving as vibration arms; and a pair of drive arms 458 and 459 extending from the end portions of the connecting arms 455 to the positive and negative sides of the Y direction, respectively, serving as vibration arms.

[0187] In this embodiment, the positive side of the detection arm 452, drive arm 456, and drive arm 458 extending in the positive Y direction is designated as the first side surface 111, and the negative side surface in the X direction is designated as the second side surface 112. The end face of the detection arm 452, drive arm 456, and drive arm 458, i.e., the positive side surface in the Y direction, is designated as the third side surface 113.

[0188] Furthermore, the side surface of the detection arm 453, drive arm 457, and drive arm 459 extending to the negative side in the Y direction is designated as the first side surface 111, and the side surface of the positive side in the X direction is designated as the second side surface 112. The end face of the detection arm 453, drive arm 457, and drive arm 459, i.e., the side surface of the negative side in the Y direction, is designated as the third side surface 113.

[0189] The pair of detection arms 452 and 453, which are vibrating arms, each have arm portions 452a and 453a and counterweight portions 452b and 453b, respectively. The counterweight portions 452b and 453b are disposed at the end portions of the detection arms 452 and 453 on the side opposite to the base 451. The arm portions 452a and 453a are disposed at a position closer to the base 451 than the counterweight portions 452b and 453b, connecting the counterweight portions 452b and 453b to the base 451.

[0190] The pair of drive arms 456 and 457, which are vibrating arms, each have arm portions 456a and 457a and counterweight portions 456b and 457b, respectively. The counterweight portions 456b and 457b are disposed at the end portions of the drive arms 456 and 457 on the side opposite to the connecting arm 454. The arm portions 456a and 457a are disposed at a position closer to the connecting arm 454 than the counterweight portions 456b and 457b, connecting the counterweight portions 456b and 457b to the connecting arm 454.

[0191] The pair of drive arms 458 and 459, which are vibrating arms, each have arm portions 458a and 459a and counterweight portions 458b and 459b, respectively. The counterweight portions 458b and 459b are disposed at the end portions of the drive arms 458 and 459 on the side opposite to the connecting arm 455. The arm portions 458a and 459a are disposed at a position closer to the connecting arm 455 than the counterweight portions 458b and 459b, connecting the counterweight portions 458b and 459b to the connecting arm 455.

[0192] The counterweights 456b, 457b, 458b, 459b, 452b, and 453b disposed at the ends of the drive arms 456, 457, 458, 459 and the detection arms 452, 453 respectively have the same structure as in Embodiment 1 described above.

[0193] Specifically, metal films 46 are disposed on the second surface 102, first side surface 111, second side surface 112, and third side surface 113 of each of the counterweights 456b, 457b, 458b, 459b, 452b, and 453b. The metal film 46 disposed on the second surface 102 is the first counterweight 461. The removal area 462 in the second surface 102 is the area where the first counterweight 461 was removed by irradiation with laser LB during the frequency adjustment process described above.

[0194] Furthermore, when viewed from the Z direction, the first counterweight 461 of each of the counterweights 456b, 457b, 458b, 459b, 452b, and 453b is configured such that the outer edge 463A of the first side 111 of the first counterweight 461 is located at the same position as the innermost part 131 of the first side and second side of the first side 111. Additionally, when viewed from the Z direction, the outer edge 463B of the second side 112 of the first counterweight 461 is located at the same position as the innermost part 132 of the first side and second side of the second side 112. Furthermore, when viewed from the Z direction, the outer edge 463C of the third side 113 of the first counterweight 461 is positioned further inward than the innermost part 133 of the first side and second side of the third side 113. Therefore, when the laser LB is irradiated onto the first counterweight 461, the refraction or blocking of the laser LB by the first side 111, second side 112, and third side 113 of each of the counterweights 456b, 457b, 458b, 459b, 452b, and 453b can be suppressed. Thus, the laser LB can be sufficiently irradiated onto the first counterweight 461, providing a vibrating element 1c that suppresses the generation of foreign matter such as burrs and is less prone to frequency changes.

[0195] Electrode 45 has a drive signal electrode 483, a drive ground electrode 484, a first detection signal electrode 485, a first detection ground electrode 486, a second detection signal electrode 487, and a second detection ground electrode 488.

[0196] The driving signal electrode 483 is disposed on the first surface 101 and the second surface 102 in the arm portion 456a of the driving arm 456, the first surface 101 and the second surface 102 in the arm portion 457a of the driving arm 457, the first side surface 111 and the second side surface 112 in the arm portion 458a of the driving arm 458, and the first side surface 111 and the second side surface 112 in the arm portion 459a of the driving arm 459.

[0197] The driving ground electrode 484 is disposed on the first side 111 and the second side 112 of the arm portion 456a of the driving arm 456, the first side 111 and the second side 112 of the arm portion 457a of the driving arm 457, the first surface 101 and the second surface 102 of the arm portion 458a of the driving arm 458, and the first surface 101 and the second surface 102 of the arm portion 459a of the driving arm 459.

[0198] The first detection signal electrode 485 is disposed on the first surface 101 and the second surface 102 of the arm portion 452a of the detection arm 452, and the first detection ground electrode 486 is disposed on the first side surface 111 and the second side surface 112 of the arm portion 452a of the detection arm 452.

[0199] The second detection signal electrode 487 is disposed on the first surface 101 and the second surface 102 of the arm portion 453a of the detection arm 453, and the second detection ground electrode 488 is disposed on the first side surface 111 and the second side surface 112 of the arm portion 453a of the detection arm 453.

[0200] Such a vibrating element 1c detects the angular velocity ωz in the following manner.

[0201] like Figure 24 As shown, firstly, when a drive signal is applied between the drive signal electrode 483 and the drive ground electrode 484, the drive arms 456, 457, 458, and 459... Figure 24 The bending vibration occurs as indicated by the arrow in the diagram. Hereinafter, this driving mode will be referred to as the driving vibration mode.

[0202] And, as Figure 25 As shown, when the vibrating element 1c is driven in the driving vibration mode, applying an angular velocity ωz to the vibrating element 1c will trigger a new excitation mode, which is then converted to a detection vibration mode. In the detection vibration mode, the Coriolis force acts on the driving arms 456, 457, 458, and 459, thereby exciting the vibration. Figure 25 The vibration occurs in the direction indicated by arrow b. Furthermore, corresponding to the vibration in the direction indicated by arrow b in the drive arms 456, 457, 458, and 459, detection vibrations based on bending vibrations in the direction indicated by arrow a are generated in the detection arms 452 and 453. The charge generated on the detection arm 452 by this detection vibration mode is extracted between the first detection signal electrode 485 and the first detection ground electrode 486 as a first detection signal, and the charge generated on the detection arm 453 is extracted between the second detection signal electrode 487 and the second detection ground electrode 488 as a second detection signal. The angular velocity ωz can be detected based on these first and second detection signals.

[0203] According to embodiment 5 described above, the same effects as in embodiment 1 can also be obtained. That is, the vibration element of the present invention can also be applied to gyroscope elements.

Claims

1. A vibrating element, comprising: Base; A vibrating arm includes a first surface, a second surface on the side opposite to the first surface in a direction along the Z-axis, a first side surface, a second side surface on the side opposite to the first side surface in a direction along the X-axis perpendicular to the Z-axis, and a third side surface on the side opposite to the base, the vibrating arm extending from the base toward a direction along the Y-axis perpendicular to the Z-axis and the X-axis; as well as The first counterweight is disposed on the second side. The third side surface includes: a first side surface portion that is inclined relative to a direction along the Z-axis; and a second side surface portion that is inclined relative to the first side surface portion toward the first surface or the second surface. The first counterweight is configured such that, when viewed from the direction along the Z-axis, the outer edge of the third side of the first counterweight is closer to the base side than the innermost part of the first side and the second side.

2. The vibration element according to claim 1, wherein, At least one of the first side and the second side has a first side portion and a second side portion.

3. The vibration element according to claim 1, wherein, The first side and the second side have a first side portion and a second side portion, The first side portion of the first side and the first side portion of the second side are connected to the second surface. When viewed from the direction along the Z-axis, the outer edge of the first side of the first counterweight is at the same position as the innermost part of the first side and the second side of the first side, and the outer edge of the second side of the first counterweight is at the same position as the innermost part of the first side and the second side of the second side.

4. The vibration element according to claim 1, wherein, The vibrating arm has: a counterweight part, on which the first counterweight is disposed; And the arm portion, which is located closer to the base portion than the counterweight portion, has recesses formed on the first and second surfaces. The width of the second surface of the counterweight along the X-axis is smaller than the width of the first surface of the counterweight along the X-axis.

5. The vibration element according to claim 4, wherein, The width of the first face of the arm along the X-axis is equal to the width of the second face of the arm along the X-axis.

6. The vibrating element according to any one of claims 1 to 5, wherein, A second counterweight is provided on the first side surface.

7. A vibrating device, comprising: The vibrating element according to any one of claims 1 to 6; and An enclosure for housing the vibrating element.

8. A method for manufacturing a vibrating element, comprising a frequency adjustment method for adjusting the frequency of the vibrating element. The vibration element has: Base; A vibrating arm includes a first surface, a second surface on the side opposite to the first surface in a direction along the Z-axis, a first side surface, a second side surface on the side opposite to the first side surface in a direction along the X-axis perpendicular to the Z-axis, and a third side surface on the side opposite to the base, the vibrating arm extending from the base toward a direction along the Y-axis perpendicular to the Z-axis and the X-axis; as well as The first counterweight is disposed on the second side. The third side surface includes: a first side surface portion that is inclined relative to a direction along the Z-axis; and a second side surface portion that is inclined relative to the first side surface portion toward the first surface or the second surface. The first counterweight is configured such that, when viewed from a direction along the Z-axis, the outer edge of the third side of the first counterweight is closer to the base side than the innermost portion of either the first side portion or the second side portion. The frequency adjustment method includes the following steps: removing at least a portion of the first counterweight by irradiating it with a laser from the first surface along the Z-axis, thereby changing the oscillation frequency of the vibrating element.

9. The method for manufacturing a vibrating element according to claim 8, wherein, The vibrating arm has a second counterweight disposed on the first side. The frequency adjustment method includes the following steps: removing at least a portion of the second counterweight by irradiating it with a laser from the first surface along the Z-axis, thereby changing the oscillation frequency of the vibrating element.

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