Defect detection system and defect detection method

Abstract

The present invention discloses a defect detection system and a defect detection method, comprising a light output module, a light adjustment module, a detection module and a processing control module; the light output module is used to output a detection beam; the light adjustment module is located on the transmission path of the detection beam, and is used to adjust the detection beam to be incident on the object to be detected, and the object to be detected reflects the detection beam to form an imaging beam, and the imaging beam carries the defect information of the detection object; the detection module is located on the propagation path of the imaging beam, and forms a detection image; the processing control module is connected to the detection module, and is used to determine the defect information of the object to be detected according to the detection image; the processing control module is also connected to the light adjustment module, and is used to select an illumination mode according to the detection demand, and the illumination mode includes a bright field illumination mode, a dark field illumination mode and a bright field and dark field mixed illumination mode. The processing control module realizes that the detection beam completes different illumination modes by adjusting the light adjustment module, so as to meet more diverse needs.

Description

Technical Field

[0001] The present invention relates to the field of detection technology, and in particular to a defect detection system and a defect detection method. Background Art

[0002] With the deepening and popularization of industrial automation and intelligence, the use of automatic optical inspection equipment (Auto Optical Inspection, AOI) to replace traditional manual visual inspection has become a technological development trend. AOI equipment is widely used in the fields of automobiles, medicine, transportation, semiconductors, etc. due to its fast and accurate defect identification and positioning capabilities.

[0003] To meet different process requirements, some AOI inspection equipment currently uses both bright field and dark field lighting. Bright field is a common inspection method for AOI inspection equipment, which is suitable for most defects, and bright field images are more in line with human viewing habits. Dark field has a higher detection resolution than bright field, and can detect many tiny defects, such as scratches, dust, etc. However, in the pursuit of higher detection efficiency in the existing technology, the detection system has more components and higher costs. Summary of the invention

[0004] The embodiments of the present invention provide a defect detection system and a defect detection method, which realize different lighting modes of the detection light beam by adjusting the light adjustment module through the processing control module to meet more diverse needs.

[0005] In a first aspect, an embodiment of the present invention provides a defect detection system, including a light output module, a light adjustment module, a detection module and a processing control module;

[0006] The light output module is used to output a detection light beam;

[0007] The light adjustment module is located on the transmission path of the detection light beam, and is used to adjust the detection light beam to be incident on the object to be detected. The object to be detected reflects the detection light beam to form an imaging light beam, and the imaging light beam carries the defect information of the object to be detected;

[0008] The detection module is located on the propagation path of the imaging light beam, and is used to form a detection image according to the imaging light beam;

[0009] The processing control module is connected to the detection module and is used to determine the defect information of the object to be detected according to the detection image;

[0010] The processing control module is also connected to the light adjustment module, and is used to adjust the working state of the light adjustment module according to detection requirements to achieve different lighting modes, wherein the lighting modes include bright field lighting mode, dark field lighting mode, and bright field and dark field mixed lighting mode.

[0011] Optionally, the light adjustment module includes a transflective unit, a motion unit, a switch unit and a reflective unit;

[0012] The motion unit and the switch unit are respectively connected to the processing control module, and the switch unit is arranged in the light path between the light output module and the reflection unit;

[0013] In the bright field illumination mode, the processing control module is used to control the motion unit to drive the transflective unit to move into the light path between the light output module and the switch unit and control the switch unit to close;

[0014] In the dark field illumination mode, the processing control module is used to control the motion unit to drive the transflective unit to move out of the light path between the light output module and the switch unit and control the switch unit to open;

[0015] In the bright field and dark field mixed illumination mode, the processing control module is used to control the motion unit to drive the transflective unit to move into the light path between the light output module and the switch unit and control the switch unit to open.

[0016] Optionally, in the dark field illumination mode, the processing control module is further used to control the motion unit to drive the transflective unit to move out of the optical path between the object to be detected and the detection module.

[0017] Optionally, the reflection unit includes a focusing reflection unit.

[0018] Optionally, the focusing reflection unit includes a spherical reflector or a parabolic reflector.

[0019] Optionally, the light output module includes a point light source and an illumination lens assembly.

[0020] The illumination mirror assembly is used to adjust the output light beam of the point light source to form a parallel detection light beam.

[0021] Optionally, the processing control module is electrically connected or communicatively connected to the detection module.

[0022] In a second aspect, an embodiment of the present invention provides a defect detection method, which is applied to the defect detection system according to any one of the first aspects, and the defect detection method includes:

[0023] Obtain detection requirements;

[0024] According to the detection requirements, the working state of the light adjustment module is adjusted to realize different lighting modes, wherein the lighting modes include a bright field lighting mode, a dark field lighting mode, and a bright field and dark field mixed lighting mode;

[0025] Receive detection images acquired by the detection module under different lighting modes and determine defect information of the object to be detected according to the detection images.

[0026] Optionally, the light adjustment module includes a transflective unit, a motion unit, a switch unit and a reflective unit; the motion unit and the switch unit are respectively connected to the processing control module, and the switch unit is arranged in the light path between the light output module and the reflective unit;

[0027] Adjusting the working state of the light adjustment module according to the detection requirements to achieve different lighting modes, including:

[0028] Under the requirement of bright field illumination mode, controlling the motion unit to drive the transflective unit to move into the light path between the light output module and the switch unit and controlling the switch unit to close;

[0029] Under the requirement of dark field lighting mode, controlling the motion unit to drive the transflective unit to move out of the light path between the light output module and the switch unit and controlling the switch unit to open;

[0030] Under the requirement of bright field and dark field mixed illumination mode, the motion unit is controlled to drive the transflective unit to move into the light path between the light output module and the switch unit and the switch unit is controlled to be turned on.

[0031] Optionally, under the requirement of dark field illumination mode, controlling the motion unit to drive the transflective unit to move out of the light path between the light output module and the switch unit and controlling the switch unit to open includes:

[0032] Under the requirement of the dark field illumination mode, the motion unit is controlled to drive the transflective unit to move out of the optical path between the object to be detected and the detection module.

[0033] A defect detection system provided by an embodiment of the present invention includes a light output module, a light adjustment module, a detection module and a processing control module; wherein the light output module is used to output a detection beam; the light adjustment module is located on the transmission path of the detection beam, and is used to adjust the detection beam to be incident on the object to be detected; the object to be detected reflects the detection beam to form an imaging beam, and the imaging beam carries the defect information of the detection object; the detection module is located on the propagation path of the imaging beam, and is used to form a detection image according to the imaging beam. Further, the processing control module is connected to the detection module, and the processing control module determines the defect information of the object to be detected according to the detection image formed by the detection module. At the same time, the processing control module is also connected to the light adjustment module, and the processing control module can adjust the light adjustment module according to the detection requirements, and then select the lighting mode, and the lighting mode includes a bright field lighting mode, a dark field lighting mode, and a bright field and dark field mixed lighting mode. That is, the processing control module realizes different lighting modes of the detection beam by adjusting the light adjustment module to meet more diverse needs. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0035] Figure 1 is a structural schematic diagram of a defect detection system provided by an embodiment of the present invention;

[0036] Figure 2 is a schematic structural diagram of another defect detection system provided by an embodiment of the present invention;

[0037] Figure 3 is a schematic structural diagram of another defect detection system provided by an embodiment of the present invention;

[0038] Figure 4 It is a flowchart of a defect detection method provided by an embodiment of the present invention;

[0039] Figure 5 It is a flowchart of another defect detection method provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0040] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be fully described below in combination with the drawings in the embodiments of the present invention through specific implementation methods. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work fall within the protection scope of the present invention.

[0041] Figure 1 is a structural diagram of a defect detection system provided by an embodiment of the present invention, Figure 2 is a schematic diagram of the structure of another defect detection system provided by an embodiment of the present invention, Figure 3 is a schematic diagram of another defect detection system provided by an embodiment of the present invention, referring to Figures 1 to 3 As shown, an embodiment of the present invention provides a defect detection system 10, which includes a light output module 100, a light adjustment module 200, a detection module 300 and a processing control module 400; the light output module 100 is used to output a detection beam a; the light adjustment module 200 is located on the transmission path of the detection beam a, and is used to adjust the detection beam a to be incident on the object to be detected 20, and the object to be detected 20 reflects the detection beam a to form an imaging beam b, and the imaging beam b carries the defect information of the detection object; the detection module 300 is located on the propagation path of the imaging beam b, and is used to form an imaging according to the imaging beam b to form a detection image; the processing control module 400 is connected to the detection module 300, and is used to determine the defect information of the object to be detected 20 according to the detection image; the processing control module 400 is also connected to the light adjustment module 200, and is used to adjust the working state of the light adjustment module 200 according to the detection requirements to achieve different lighting modes, and the lighting modes include bright field lighting mode, dark field lighting mode and bright field and dark field mixed lighting mode.

[0042] Among them, the defect detection system 10 can detect defects on the surface of the object to be detected 20, so that the object to be detected 20 can be better and more stably applied in various fields. Figures 1 to 3As shown, the defect detection system 10 includes a light output module 100, a detection module 300 and a processing control module 400. The light output module 100 is used to output a detection beam a, and the output detection beam a is transmitted to the object 20 to be detected, and can be reflected to form a beam with defect information of the object 20 to be detected. And the light beam with defect information of the object 20 to be detected is collected by the detection module 300 to form a detection image and transmit it to the processing control module 400. Based on the acquisition and analysis of the detection image by the processing control module 400, the defect detection system 10 detects the defects of the object 20 to be detected. Exemplarily, the defects of the object 20 to be detected may be scratches and dust on the surface of the object 20 to be detected, and the embodiment of the present invention is not specifically limited to this.

[0043] Furthermore, the defect detection system 10 further includes a light adjustment module 200, and the light adjustment module 200 is located on the transmission path of the detection light beam a, and is used to adjust the detection light beam a to be incident on the object to be detected 20 in various forms, as shown in FIG. Figures 1 to 3 When the object to be detected 20 reflects the detection beam a to form an imaging beam b, the imaging beam b carries the defect information of the object to be detected. The detection module 300 is located on the propagation path of the imaging beam b, and is used to collect the imaging beam b and form an image according to the imaging beam b to form a detection image. The processing control module 400 determines the defect information of the object to be detected 20 according to the detection image.

[0044] Furthermore, the processing control module 400 is also connected to the light adjustment module 200, that is, the processing control module 400 adjusts the light adjustment module 200 based on the detection requirements of the object to be detected 20, so as to realize that the detection light beam a is incident on the object to be detected 20 in different forms, that is, to realize different lighting modes. Further, the lighting mode includes a bright field lighting mode, a dark field lighting mode, and a bright field and dark field mixed lighting mode. In the embodiment of the present invention, the processing control module 400 adjusts the light adjustment module 200 based on the detection requirements of the object to be detected 20, so as to realize that the defect detection system 10 works under different lighting modes, ensure the accuracy and efficiency of defect detection of the object to be detected 20, and ensure the working effect of the defect detection system 10.

[0045] In summary, in the defect detection system provided by the embodiment of the present invention, the processing control module is connected to the detection module, and the processing control module determines the defect information of the object to be detected based on the detection image formed by the detection module. At the same time, the processing control module is also connected to the light adjustment module, and the processing control module can adjust the light adjustment module according to the detection requirements, and then select the lighting mode, which includes bright field lighting mode, dark field lighting mode, and bright field and dark field mixed lighting mode. That is, the processing control module adjusts the light adjustment module to achieve different lighting modes for the detection beam to meet more diverse needs.

[0046] Continue to refer Figures 1 to 3 As shown, the light adjustment module 200 includes a transflective unit 210, a motion unit 220, a switch unit 230 and a reflective unit 240; the motion unit 220 and the switch unit 230 are respectively connected to the processing control module 400, and the switch unit 230 is arranged in the optical path between the light output module 100 and the reflective unit 230; in the bright field illumination mode, the processing control module 400 is used to control the motion unit 220 to drive the transflective unit 210 to move into the optical path between the light output module 100 and the switch unit 230 and control the switch unit 230 to be closed; in the dark field illumination mode, the processing control module 400 is used to control the motion unit 220 to drive the transflective unit 210 to move out of the optical path between the light output module 100 and the switch unit 230 and control the switch unit 230 to be opened; in the bright field and dark field mixed illumination mode, the processing control module 400 is used to control the motion unit 220 to drive the transflective unit 210 to move into the optical path between the light output module 100 and the switch unit 230 and control the switch unit 230 to be opened.

[0047] Among them, the light adjustment module 200 includes a transflective unit 210, a motion unit 220, a switch unit 230 and a reflection unit 240, wherein the multiple units are used to adjust the detection light beam a to be incident on the object to be detected 20 in various forms, thereby realizing various lighting modes, namely, bright field lighting mode, dark field lighting mode and bright field and dark field mixed lighting mode.

[0048] Specifically, the motion unit 220 is connected to the processing control module 400, that is, the processing control module 400 can control the movement of the motion unit 220, and by controlling the movement of the motion unit 220, the displacement of the transflective unit 210 is achieved. For example, the transflective unit 210 can be moved into the optical path between the light output module 100 and the switch unit 230, or the transflective unit 210 can be moved out of the optical path between the light output module 100 and the switch unit 230. Exemplarily, the motion unit 220 can be a mechanical arm or an electric lifting platform, etc., which is not specifically limited in the embodiment of the present invention. Further, the switch unit 230 is connected to the processing control module 400, and the switch unit 230 is arranged in the optical path between the light output module 100 and the reflection unit 230. The switch unit 230 can be controlled to be turned on or off by the processing control module 400, that is, when the switch unit 230 is turned on, the detection beam a output by the light output module 100 can be transmitted to the reflection unit 230, and when the switch unit 230 is turned off, the detection beam a output by the light output module 100 cannot be transmitted to the reflection unit 230.

[0049] Specifically, refer to Figure 1As shown, in the bright field illumination mode, the processing control module 400 controls the motion unit 220 to drive the transflective unit 210 to move into the optical path between the light output module 100 and the switch unit 230, and then the detection beam a output by the light output module 100 can be directly reflected to the object to be detected 20 by the transflective unit 210, that is, the bright field illumination of the defect detection system 10 is realized. At the same time, the processing control module 400 controls the switch unit 230 to be closed, that is, the detection beam a output by the light output module 100 is transmitted to the switch unit 230 through the transflective unit 210 and cannot be transmitted further, that is, in this case, the defect detection system 10 only performs bright field illumination.

[0050] Specifically, refer to Figure 2 As shown, in the dark field illumination mode, the processing control module 400 controls the motion unit 220 to drive the transflective unit 210 to move out of the optical path between the light output module 100 and the switch unit 230, and then the detection beam a output by the light output module 100 is not reflected directly to the object to be detected 20 by the transflective unit 210, that is, the defect detection system 10 does not perform bright field illumination. At the same time, the processing control module 400 controls the switch unit 230 to be turned on, that is, the detection beam a output by the light output module 100 is directly transmitted to the reflection unit 240 through the switch unit 230, and the reflection unit 240 transmits the detection beam a to the object to be detected 20 at a larger viewing angle, and the larger viewing angle c refers to the angle c between the reflection unit 240 and the transmission direction of the imaging beam b to the object to be detected 20, and the viewing angle c can be between 60° and 80°, and includes 60° and 80°. The embodiment of the present invention does not specifically limit the value of the viewing angle c. In this case, the defect detection system 10 only performs dark field illumination.

[0051] Specifically, refer to Figure 3 As shown, in the bright field and dark field mixed illumination mode of the defect detection system 10, the processing control module 400 controls the motion unit 220 to drive the transflective unit 210 to move into the optical path between the light output module 100 and the switch unit 230, and then the detection light beam a output by the light output module 100 can be directly reflected to the object to be detected 20 by the transflective unit 210, that is, the bright field illumination of the defect detection system 10 is realized. At the same time, the processing control module 400 controls the switch unit 230 to be turned on, that is, the detection light beam a output by the light output module 100 is directly transmitted to the reflection unit 240 through the switch unit 230, and the reflection unit 240 transmits the detection light beam a to the object to be detected 20 at a larger viewing angle, that is, the dark field illumination of the defect detection system 10 is realized, that is, in this case, the defect detection system 10 realizes the bright field and dark field mixed illumination mode.

[0052] Optional, reference Figure 2As shown, in the dark field illumination mode, the processing control module 400 is further used to control the motion unit 220 to drive the transflective unit 210 to move out of the optical path between the object to be detected 20 and the detection module 300 .

[0053] In the dark field illumination mode, that is, when the bright field illumination is turned off, the processing control module 400 controls the motion unit 220 to drive the transflective unit 210 not to adjust the transmission direction of the detection beam a. That is, the detection beam a will not be reflected by the transflective unit 210 to the object 20 to be detected.

[0054] Specifically, under the control of the processing control module 400, the motion unit 220 can control the transflective unit 210 to move out of the optical path between the light output module 100 and the switch unit 230, but the transflective unit 210 can be located on the transmission path of the imaging light beam b to transmit the imaging light beam b. Figure 2 Further, under the control of the processing control module 400, the motion unit 220 can control the transflective unit 210 to move out of the optical path between the object to be detected 20 and the detection module 300, that is, the transflective unit 210 is not located on the transmission path of the imaging light beam b, further ensuring the transmission effect of the imaging light beam b, and thus ensuring the detection effect of the defect detection system 10.

[0055] Continue to refer Figures 1 to 3 As shown, the reflection unit 240 includes a focusing reflection unit 241 .

[0056] Among them, the reflection unit 240 includes a focusing reflection unit 241, that is, the focusing reflection unit 241 has the function of converging light, and can converge the detection light beam a transmitted to the reflection unit 240, and transmit it to the object to be detected 20 with a larger viewing angle, thereby ensuring the dark field lighting effect of the defect detection system 10 in the dark field lighting or bright field and dark field mixed lighting mode.

[0057] Optional, reference Figures 1 to 3 As shown, the focusing reflection unit 241 includes a spherical reflector or a parabolic reflector.

[0058] Exemplarily, the focusing reflection unit 241 may be a spherical reflector or a parabolic reflector with a light converging function, which can ensure that more light converges to the object to be detected 20 when the defect detection system 10 realizes dark field illumination, thereby ensuring the detection effect of the defect detection system 10. Furthermore, if only the detection light beam a is reflected to the object to be detected 20 at a larger viewing angle, the reflection unit 240 may also be a plane reflector, which is not specifically limited in the embodiment of the present invention.

[0059] Continue to refer Figures 1 to 3As shown, the light output module 100 includes a point light source 110 and an illumination lens assembly 120. The illumination lens assembly 120 is used to adjust the output light beam of the point light source 110 to form a parallel detection light beam a.

[0060] Among them, the light output module 100 includes a point light source 110 and an illumination lens group 120. The point light source 110 is used to emit a detection beam a, that is, the defect detection system 10 realizes defect detection of the object to be detected 20 based on the detection beam a. The illumination lens group 120 can adjust the detection beam a and output a parallel detection beam a. Compared with the existing solution, both bright field illumination and dark field illumination require a corresponding point light source, while the embodiment of the present invention only requires a point light source 110, and different illumination modes are realized by adjusting the light adjustment module 200 by the processing control module 400, that is, reducing the preparation cost of the defect detection system 10 and reducing the occupied space of the defect detection system 10.

[0061] refer to Figures 1 to 3 As shown, the processing control module 300 is electrically connected or communicatively connected with the detection module 400 .

[0062] Specifically, the processing control module 300 and the detection module 400 can realize the transmission of the detection image through electrical connection or communication connection, that is, the configuration of the defect detection system 10 is diverse.

[0063] Based on the same inventive concept, an embodiment of the present invention further provides a defect detection method. Figure 4 1 is a flow chart of a defect detection method provided by an embodiment of the present invention, the defect detection method comprising:

[0064] S110: Obtain detection requirements.

[0065] Among them, the defect detection system can detect defects on the surface of the object to be detected, so that the object to be detected can be better and more stably applied in various fields. And there will be different detection requirements based on the subsequent application of the object to be detected in different scenarios or based on different types of objects to be detected. The processing control module can obtain the detection requirements. For example, different detection requirements can be realized through a human-computer interaction interface or a preset program, and the embodiment of the present invention does not specifically limit this.

[0066] S120, adjusting the working state of the light adjustment module according to the detection requirements to achieve different lighting modes, where the lighting modes include a bright field lighting mode, a dark field lighting mode, and a bright field and dark field mixed lighting mode.

[0067] Specifically, the defect detection system includes a light output module, a light adjustment module, a detection module and a processing control module. The light output module is used to output a detection light beam. The light adjustment module is located on the transmission path of the detection light beam and is used to adjust the detection light beam to be incident on the object to be detected in various forms. Among them, the various forms are different lighting modes of the defect detection system. Further, the lighting mode includes a bright field lighting mode, a dark field lighting mode and a bright field and dark field mixed lighting mode. In the embodiment of the present invention, the processing control module adjusts the light adjustment module based on the detection requirements of the object to be detected, so as to realize the operation of the defect detection system under different lighting modes, ensure the accuracy and efficiency of the defect detection of the object to be detected, and ensure the working effect of the defect detection system.

[0068] S130, receiving detection images acquired by the detection module under different lighting modes and determining defect information of the object to be detected according to the detection images.

[0069] Specifically, when the object to be detected reflects the detection beam to form an imaging beam, the imaging beam carries the defect information of the detected object. The detection module is located on the propagation path of the imaging beam, and is used to collect the imaging beam and image it according to the imaging beam to form a detection image. The processing control module is connected to the processing control module, and the processing control module can determine the defect information of the object to be detected based on the detection image.

[0070] In summary, in the defect detection method provided by the embodiment of the present invention, based on different detection requirements, the processing control module can adjust the light adjustment module according to the detection requirements, and then select the lighting mode, which includes a bright field lighting mode, a dark field lighting mode, and a bright field and dark field mixed lighting mode. That is, the processing control module adjusts the light adjustment module to achieve different lighting modes for the detection beam to meet more diverse requirements.

[0071] The embodiment of the present invention also provides a defect detection method. Figure 5 : is a flow chart of another defect detection method provided by an embodiment of the present invention, the defect detection method comprising:

[0072] S210: Obtain detection requirements.

[0073] S220, under the requirement of bright field illumination mode, controlling the motion unit to drive the transflective unit to move into the light path between the light output module and the switch unit and controlling the switch unit to close.

[0074] Among them, the light adjustment module includes a transflective unit, a motion unit, a switch unit and a reflection unit, wherein the multiple units are used to adjust the detection light beam to be incident on the object to be detected in various forms, thereby realizing various lighting modes, namely, bright field lighting mode, dark field lighting mode and bright field and dark field mixed lighting mode.

[0075] Specifically, the motion unit is connected to the processing control module, that is, the processing control module can control the movement of the motion unit, and by controlling the movement of the motion unit, the displacement of the transflective unit is achieved. For example, the transflective unit can be moved into the optical path between the light output module and the switch unit, or the transflective unit can be moved out of the optical path between the light output module and the switch unit. Exemplarily, the motion unit can be a mechanical arm or an electric lifting platform, etc., and the embodiment of the present invention does not specifically limit this. Further, the switch unit is connected to the processing control module, and the switch unit is arranged in the optical path between the light output module and the reflection unit. The switch unit can be controlled to be turned on or off by the processing control module, that is, when the switch unit is turned on, the detection light beam output by the light output module can be transmitted to the reflection unit, and when the switch unit is turned off, the detection light beam output by the light output module cannot be transmitted to the reflection unit.

[0076] Specifically, in the bright field illumination mode of the defect detection system, the processing control module controls the motion unit to drive the transflective unit to move into the optical path between the light output module and the switch unit, and then the detection beam output by the light output module can be directly reflected to the object to be detected by the transflective unit, that is, the bright field illumination of the defect detection system is realized. At the same time, the processing control module controls the switch unit to be closed, that is, the detection beam output by the light output module is transmitted to the switch unit through the transflective unit and cannot be transmitted further, that is, in this case, the defect detection system only performs bright field illumination.

[0077] S230, under the requirement of dark field lighting mode, controlling the motion unit to drive the transflective unit to move out of the light path between the light output module and the switch unit and controlling the switch unit to open.

[0078] Specifically, in the dark field illumination mode of the defect detection system, the processing control module controls the motion unit to drive the transflective unit to move out of the optical path between the light output module and the switch unit, and then the detection beam output by the light output module does not pass through the transflective unit to directly reflect the detection beam to the object to be detected, that is, the defect detection system does not perform bright field illumination. At the same time, the processing control module controls the switch unit to open, that is, the detection beam output by the light output module is directly transmitted to the reflection unit through the switch unit, and the reflection unit transmits the detection beam to the object to be detected at a larger viewing angle, and the larger viewing angle refers to the angle between the reflection of the reflection unit to the object to be detected and the transmission direction of the imaging beam, and the viewing angle can be between 60° and 80°, and includes 60° and 80°. The embodiment of the present invention does not specifically limit the value of the viewing angle. In other words, in this case, the defect detection system only performs dark field illumination.

[0079] Optionally, under the requirement of dark field illumination mode, the motion unit is controlled to drive the transflective unit to move out of the optical path between the object to be detected and the detection module.

[0080] In the dark field illumination mode, that is, when the bright field illumination is turned off, the processing control module controls the motion unit to drive the transflective unit not to adjust the transmission direction of the detection beam, that is, the detection beam will not be reflected to the object to be detected through the transflective unit.

[0081] Specifically, under the control of the processing control module, the motion unit can control the transflective unit to move out of the optical path between the light output module and the switch unit, but the transflective unit can be located on the transmission path of the imaging light beam to transmit the imaging light beam. Further, under the control of the processing control module, the motion unit can control the transflective unit to move out of the optical path between the object to be detected and the detection module, that is, the transflective unit is not located on the transmission path of the imaging light beam, further ensuring the transmission effect of the imaging light beam, and then ensuring the detection effect of the defect detection system.

[0082] S240, under the requirement of bright field and dark field mixed lighting mode, control the motion unit to drive the transflective unit to move into the light path between the light output module and the switch unit and control the switch unit to open.

[0083] Specifically, in the bright field and dark field mixed illumination mode of the defect detection system, the processing control module controls the motion unit to drive the transflective unit to move into the optical path between the light output module and the switch unit, and then the detection light beam output by the light output module can be directly reflected to the object to be detected by the transflective unit, that is, the bright field illumination of the defect detection system is realized. At the same time, the processing control module controls the switch unit to open, that is, the detection light beam output by the light output module is directly transmitted to the reflection unit through the switch unit, and the reflection unit transmits the detection light beam to the object to be detected at a larger viewing angle, that is, the dark field illumination of the defect detection system is realized, that is, in this case, the defect detection system realizes the bright field and dark field mixed illumination mode.

[0084] S250 , controlling the detection module to determine defect information of the object to be detected according to the detection image.

[0085] In summary, the defect detection method provided by the embodiment of the present invention refines how the processing control module adjusts the light adjustment module to realize different lighting modes of the detection light beam to meet more diverse needs.

[0086] Note that the above are only preferred embodiments of the present invention and the technical principles used. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and that various obvious changes, readjustments and substitutions can be made by those skilled in the art without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in more detail through the above embodiments, the present invention is not limited to the above embodiments, and may include more other equivalent embodiments without departing from the concept of the present invention, and the scope of the present invention is determined by the scope of the appended claims.

Claims

1. A defect detection system, characterized in that: It includes a light output module, a light adjustment module, a detection module and a processing control module; The light output module is used to output a detection light beam; The light adjustment module is located on the transmission path of the detection light beam, and is used to adjust the detection light beam to be incident on the object to be detected. The object to be detected reflects the detection light beam to form an imaging light beam, and the imaging light beam carries the defect information of the object to be detected; The detection module is located on the propagation path of the imaging light beam, and is used to form a detection image according to the imaging light beam; The processing control module is connected to the detection module and is used to determine the defect information of the object to be detected according to the detection image; The processing control module is also connected to the light adjustment module, and is used to adjust the working state of the light adjustment module according to the detection requirements to achieve different lighting modes, wherein the lighting modes include a bright field lighting mode, a dark field lighting mode, and a bright field and dark field mixed lighting mode; Wherein, the light adjustment module includes a transflective unit, a motion unit, a switch unit and a reflective unit; The motion unit and the switch unit are respectively connected to the processing control module, and the switch unit is arranged in the light path between the light output module and the reflection unit; In the bright field illumination mode, the processing control module is used to control the motion unit to drive the transflective unit to move into the light path between the light output module and the switch unit and control the switch unit to close; In the dark field illumination mode, the processing control module is used to control the motion unit to drive the transflective unit to move out of the light path between the light output module and the switch unit and control the switch unit to open; In the bright field and dark field mixed illumination mode, the processing control module is used to control the motion unit to drive the transflective unit to move into the light path between the light output module and the switch unit and control the switch unit to open.

2. The defect detection system according to claim 1, characterized in that: In the dark field illumination mode, the processing control module is further used to control the motion unit to drive the transflective unit to move out of the optical path between the object to be detected and the detection module.

3. The defect detection system according to claim 1, characterized in that: The reflection unit includes a focusing reflection unit.

4. The defect detection system according to claim 3, characterized in that: The focusing reflection unit includes a spherical reflector or a parabolic reflector.

5. The defect detection system according to claim 1, characterized in that: The light output module includes a point light source and an illumination lens assembly. The illumination mirror assembly is used to adjust the output light beam of the point light source to form a parallel detection light beam.

6. The defect detection system according to claim 1, characterized in that: The processing control module is electrically connected or communicatively connected to the detection module.

7. A defect detection method, applied to the defect detection system according to any one of claims 1 to 6, characterized in that: The defect detection method comprises: Obtain detection requirements; The working state of the light adjustment module is adjusted according to the detection requirements to realize different lighting modes, wherein the lighting modes include a bright field lighting mode, a dark field lighting mode, and a bright field and dark field mixed lighting mode; the light adjustment module includes a transflective unit, a motion unit, a switch unit, and a reflective unit; the motion unit and the switch unit are respectively connected to the processing control module, and the switch unit is arranged in the optical path between the light output module and the reflective unit; Receiving detection images acquired by the detection module under different lighting modes and determining defect information of the object to be detected according to the detection images; Wherein, adjusting the working state of the light adjustment module according to the detection demand to achieve different lighting modes includes: Under the requirement of bright field illumination mode, controlling the motion unit to drive the transflective unit to move into the light path between the light output module and the switch unit and controlling the switch unit to close; Under the requirement of dark field lighting mode, controlling the motion unit to drive the transflective unit to move out of the light path between the light output module and the switch unit and controlling the switch unit to open; Under the requirement of bright field and dark field mixed illumination mode, the motion unit is controlled to drive the transflective unit to move into the light path between the light output module and the switch unit and the switch unit is controlled to be turned on.

8. The detection method according to claim 7, characterized in that: Under the requirement of dark field illumination mode, controlling the motion unit to drive the transflective unit to move out of the light path between the light output module and the switch unit and controlling the switch unit to open includes: Under the requirement of the dark field illumination mode, the motion unit is controlled to drive the transflective unit to move out of the optical path between the object to be detected and the detection module.

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