A single crystal furnace

Abstract

The application relates to a single crystal furnace, comprising a main furnace chamber, an outer wall of the main furnace chamber being provided with a hanging groove; a driving mechanism, the driving mechanism comprising a cantilever assembly, the cantilever assembly being provided with a hanging part, the hanging part being used for plug-in cooperation with the hanging groove; the cantilever assembly being provided with a vertical lifting movement freedom and a horizontal rotation rotation freedom, the cantilever assembly being hung on the back of the main furnace chamber, so that the main furnace chamber can be lifted and rotated with the cantilever assembly. The technical problem that the space occupied by the rotation and lifting structure of the furnace body is large is solved, and the technical effect that the space occupied by the rotation and lifting structure of the furnace body is reduced is achieved.

Description

Technical Field

[0001] This application relates to the field of single crystal furnace technology, and in particular to a single crystal furnace. Background Technology

[0002] Monocrystalline silicon is the most fundamental material in the electronic information materials and photovoltaic industries, and the Czochralski (CZ) single crystal furnace is a key technological equipment for producing single crystal silicon. The CZ single crystal growth furnace is the main equipment for preparing single crystal silicon materials, also known as a single crystal silicon growth furnace or single crystal furnace. The equipment melts high-purity polycrystalline silicon raw materials in a quartz crucible using graphite heating. Under continuous low-pressure argon protection, the silicon crystal gradually crystallizes into a single crystal on a small seed crystal at a suitable temperature and growth rate. During the loading, crystal rod removal, and cleaning processes, depending on different needs, the auxiliary furnace chamber, isolation valve, furnace cover, or main furnace chamber needs to be raised to a certain height and opened to fulfill different task requirements. In other words, the loading and unloading process of the single crystal furnace requires rotation and lifting of the furnace body.

[0003] In the prior art, for the rotation and lifting of the main furnace chamber of a single crystal furnace, a frame needs to be set on the side of the main furnace chamber, and a rotating seat is set on the frame. In order to improve the connection stability between the rotating seat and the main furnace chamber, the rotating seat is often required to be long or large. The rotating seat has the freedom of lifting and rotating. Through the fixed connection between the rotating seat and the main furnace chamber, the rotation and lifting of the main furnace chamber as a whole can be realized. Thus, during the rotation of the main furnace chamber, the frame and the rotating seat themselves occupy a large space. During the process of driving the main furnace chamber to rotate, even more space is required to accommodate the swing of the rotating seat.

[0004] Therefore, the technical problem with the existing technology is that the rotating and lifting structure of the furnace body occupies a large space. Summary of the Invention

[0005] This application provides a single crystal furnace that solves the technical problem of the large space occupied by the furnace body's rotation and lifting structure, thereby achieving the technical effect of reducing the space occupied by the furnace body's rotation and lifting structure.

[0006] A single crystal furnace includes: a main furnace chamber, the outer wall of which has a mounting groove; and a driving mechanism, the driving mechanism including: a cantilever assembly, the cantilever assembly having a mounting part for inserting into the mounting groove; the cantilever assembly has a vertical lifting and lowering degree of freedom and a horizontal rotational degree of freedom, and after the cantilever assembly is mounted on the main furnace chamber, the main furnace chamber can be lifted, lowered, and rotated with the cantilever assembly.

[0007] Preferably, the main furnace chamber includes: a process flange; a furnace body connected to the bottom of the process flange; wherein the outer wall of the process flange has a first mounting groove, and the outer wall of the furnace body has a second mounting groove; the cantilever assembly includes: a first cantilever, the first cantilever having a first mounting portion for engaging with the first mounting groove; and a second cantilever, the second cantilever being located below the first cantilever, the second cantilever having a second mounting portion for engaging with the second mounting groove.

[0008] Preferably, a first outwardly extending mounting seat is connected to the outer wall of the process flange, and the first mounting seat has the first mounting groove.

[0009] Preferably, the first cantilever includes: a first leveling component, the first leveling component including: a first adjusting screw; a first adjusting plate, the first adjusting plate being used to abut against the outer wall of the process flange, the first adjusting plate being slidably connected to the first cantilever via the first adjusting screw, so that the first adjusting plate has the freedom to move closer to or further away from the outer wall of the process flange.

[0010] Preferably, a second mounting bracket is connected to the outer wall of the furnace body, and the second mounting bracket has a second mounting groove; the second mounting bracket is located at the bottom of the first mounting bracket, and the second mounting bracket is closer to the outer wall of the main furnace chamber than the first mounting bracket.

[0011] Preferably, the second cantilever includes: a second cantilever seat; a second cantilever body, the second cantilever body being horizontally slidably connected to the second cantilever seat; and a telescopic member, the telescopic member being fixedly connected to the second cantilever seat and acting on the second cantilever body, so that the second cantilever body has the freedom of movement to move closer to or further away from the furnace body, thereby allowing the second mounting part to enter the second mounting slot for engagement.

[0012] Preferably, the second cantilever further includes: a second leveling component, the second leveling component including: a second adjusting screw; a second adjusting plate, the second adjusting plate being used to abut against the outer wall of the furnace body, the second adjusting plate being slidably connected to the second cantilever body via the second adjusting screw, so that the second adjusting plate has the freedom to move closer to or further away from the outer wall of the furnace body.

[0013] Preferably, the driving mechanism further includes: a first driving assembly, the first driving assembly including: a base, the base being fixed; a lifting seat, the lifting seat being slidably connected to the base in a vertical direction, the second cantilever being rotatably connected to the lifting seat; and a first driving member, the first driving member being connected between the base and the lifting seat, the first driving member being used to drive the lifting seat to move vertically up and down.

[0014] Preferably, the driving mechanism further includes: a second driving assembly, the second driving assembly including: a lifting shaft, the lifting shaft being arranged vertically and housed inside the lifting seat, the first cantilever being sleeved on the lifting shaft; and a second driving member, the second driving member including: a second lead screw, the second lead screw being arranged vertically and housed inside the lifting seat and rotatably connected to the lifting seat; wherein the lifting shaft is sleeved on the second lead screw, and the lifting shaft is threadedly slidably connected to the second lead screw, so that the second cantilever can rise and fall with the lifting shaft.

[0015] Preferably, the driving mechanism further includes a rotating component that acts on the first cantilever and the second cantilever, giving the first cantilever and the second cantilever a rotational degree of freedom to rotate horizontally.

[0016] This application provides a single crystal furnace, which adopts the following technical solution:

[0017] In summary, this application includes at least one of the following beneficial technical effects:

[0018] 1. In this application, the furnace body and the cantilever are connected by a hook-and-loop connection, replacing the existing method of connecting the furnace body with a rotating seat. By connecting the furnace body and the drive mechanism through a hook-and-loop connection, the connection structure between the furnace body and the drive mechanism is simplified while ensuring a stable connection and support for the furnace body. Replacing the bulky rotating seat with a hook-and-loop connection reduces the swing space occupied by the drive mechanism when rotating the furnace body, thus solving the technical problem of the large space occupied by the rotation and lifting structure of the furnace body and achieving the technical effect of reducing the space occupied by the rotation and lifting structure of the furnace body.

[0019] 2. For the process flanges and furnace body on the main furnace chamber, two cantilever arms are used to rotate and lift them separately, which helps to distribute the weight of the cantilever arms and improve the stability of the cantilever arms supporting the main furnace chamber.

[0020] 3. A first mounting bracket and a second mounting bracket are respectively installed on the process flange and the furnace body, which are respectively connected to the first cantilever and the second cantilever. The position of the second mounting bracket is closer to the side wall of the furnace body than the position of the first mounting bracket, so that the magnetic field will not interfere with the mounting bracket during the rising and falling process, which is conducive to the rational use of space in the single crystal furnace system.

[0021] 4. Regarding the driving of the first and second cantilever arms, this application uses a first driving component to lift the first and second cantilever arms as a whole. The second driving component is housed in the lifting seat of the first driving component. The second driving component can adjust the lifting of the second cantilever arm independently, realizing flexible driving of each cantilever arm. At the same time, it greatly reduces the space occupied by the second driving component and improves the space utilization rate of the single crystal furnace system. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the main furnace chamber and drive mechanism of the single crystal furnace of this application;

[0023] Figure 2 This is a schematic diagram of the process flange and furnace body of the single crystal furnace in this application;

[0024] Figure 3 This is a schematic diagram of the cantilever assembly of the single crystal furnace of this application;

[0025] Figure 4 This is a cross-sectional view of the cantilever assembly of the single crystal furnace of this application;

[0026] Figure 5 This is a schematic diagram of the drive mechanism of the single crystal furnace of this application;

[0027] Figure 6 This is a schematic diagram of the rotating components of the single crystal furnace of this application.

[0028] Explanation of reference numerals in the attached drawings: 100, Main furnace chamber; 110, Process flange; 111, First mounting bracket; 1111, Fixing plate; 1112, First plate; 1113, Second plate; 1114, First mounting slot; 120, Furnace body; 121, Second mounting bracket; 1211, Side plate; 1212, Top plate; 1213, Cover plate; 1214, Second mounting slot; 200, Drive mechanism; 210, Cantilever assembly; 211, First cantilever; 2111, First cantilever body; 2112, First mounting part; 212, First leveling component; 2121, First adjusting screw; 2122, First adjusting plate; 213, Second cantilever; 2131, Second cantilever seat; 2132, Second cantilever body; 2133, Second mounting bracket 2134. Connecting part; 2135. Force plate; 2136. Telescopic component; 214. Second leveling component; 2141. Second adjusting screw; 2142. Second adjusting plate; 215. Sleeve; 220. First drive assembly; 221. Lifting seat; 222. First drive component; 2221. First motor; 2222. First lead screw; 2223. First slider; 230. Second drive assembly; 231. Lifting shaft; 232. Second drive component; 2321. Second motor; 2322. Second lead screw; 2323. Second slider; 240. Rotating assembly; 241. Mounting seat; 242. Gear; 243. Gear ring; 245. Positioning component; 2451. Positioning plate; 2452. Positioning notch; 2453. Positioning cylinder. Detailed Implementation

[0029] The serial numbers assigned to components in this document, such as "first" and "second," are used solely to distinguish the described objects and have no sequential or technical meaning. The terms "connection" and "linkage" used in this application, unless otherwise specified, include both direct and indirect connections (linkages). It should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are used solely for the convenience of describing this application and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0030] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0031] This application provides a single crystal furnace that solves the technical problem of the large space occupied by the rotating and lifting structure of the furnace body, thereby achieving the technical effect of reducing the space occupied by the rotating and lifting structure of the furnace body 120.

[0032] To better understand the above technical solutions, a detailed description of the technical solutions will be provided below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of this application and are not intended to limit the scope of this application.

[0033] During the loading and unloading of a single crystal furnace, the main furnace chamber 100 needs to be disassembled. To achieve this disassembly, a frame needs to be installed around the single crystal furnace, and a rotating frame is installed on the frame. The rotating frame can rotate and rise relative to the frame. The rotating frame and the main furnace chamber 100 are connected by screws or other means. After the main furnace chamber 100 is moved, the rotating frame and the main furnace chamber 100 need to be disassembled again. Only in this way can the rotating frame drive the main furnace chamber 100 to rotate and rise. Since the main furnace chamber 100 is heavy, the rotating frame usually needs to be made large and long enough (if the rotating frame is small, the connection between the rotating frame and the main furnace chamber 100 is insufficient to support the main furnace chamber 100) to stably support the main furnace chamber 100. Therefore, the circular path of the rotating frame's swing occupies a considerable amount of space, resulting in a large space occupation in the single crystal furnace system. Therefore, this application provides a single crystal furnace that can overcome the above problems.

[0034] A single crystal furnace, such as Figure 1 As shown, the furnace includes a main furnace chamber 100 and a drive mechanism 200. The main furnace chamber 100 serves as the reaction chamber for crystal growth; the drive mechanism 200 drives the main furnace chamber 100 to rotate and move up and down. Of course, the single crystal furnace also includes auxiliary furnace chambers, hot zones, crucibles, and other equipment. The structures described above are the same as those in existing technologies and will not be elaborated here.

[0035] Main furnace chamber 100, such as Figure 1 , 2As shown, the main furnace chamber 100 is used as a reaction chamber for crystal growth. The main furnace chamber 100 includes a furnace cover, a process flange 110, and a furnace body 120. The furnace cover, process flange 110, and furnace body 120 are stacked and connected from top to bottom. The process flange 110 is used to install the guide tube and water-cooled heat shield, which is beneficial to the consistency of the thermal field before and after the single crystal furnace is disassembled and assembled. The furnace body 120 is used to house the crucible and heater, etc., so that the furnace cover, process flange 110, and furnace body 120 form the main furnace chamber 100 and the reaction chamber. The furnace cover, process flange 110, and furnace body 120 are all detachably connected. Therefore, during the disassembly and assembly of the main furnace chamber 100, the furnace cover, process flange 110, and furnace body 120 need to be disassembled or installed in sequence. The disassembly and assembly of the furnace cover, process flange 110, and furnace body 120 are accomplished by rotating and lifting the drive mechanism 200. It is worth noting that the rotation and lifting of the furnace cover are not described in this embodiment. The drive of the furnace cover can be accomplished by another drive structure.

[0036] Furthermore, a first mounting seat 111 is provided on the outer wall of the process flange 110, and a second mounting seat 121 is provided on the outer wall of the furnace body 120. The first mounting seat 111 and the second mounting seat 121 serve as the driving mechanism 200 to drive the working parts of the process flange 110 and the furnace body 120, respectively. That is, the driving mechanism 200 acts on the first mounting seat 111 and the second mounting seat 121 to achieve distributed driving of the process flange 110 and the furnace body 120. The first mounting seat 111 is located directly above the second mounting seat 121. The first mounting seat 111 extends outward relative to the process flange 110, such that the first distance from the first mounting seat 111 to the outer wall of the main furnace chamber 100 is greater than the second distance from the second mounting seat 121 to the outer wall of the main furnace chamber 100. That is, the second mounting seat 121 is closer to the side wall of the main furnace chamber 100 than the first mounting seat 111.

[0037] First connector 111, such as Figure 1 , 2 As shown, this is the actuating part used to drive the process flange 110. The first mounting seat 111 is fixedly connected to the outer side wall of the process flange 110. The first mounting seat 111 includes a fixing block, a first plate 1112, and a second plate 1113. The fixing block is fixedly connected to the outer side wall of the process flange 110. The first plate 1112 is fixedly connected to the first fixing plate 1111, and the second plate 1113 is fixedly connected to the first plate 1112. The first plate 1112 and the second plate 1113 form a T-shaped structure arrangement, so that two first mounting slots 1114 are formed between the second plate 1113, the first plate 1112, and the first fixing plate 1111. The first mounting slots 1114 are used for insertion and engagement with the drive mechanism 200.

[0038] Second connector 121, such as Figure 1 ,2 As shown, it is used as a working part to drive the furnace body 120. The second mounting bracket 121 is fixedly connected to the outer wall of the furnace body 120. The second mounting bracket 121 is located directly below the first mounting bracket 111, and the second mounting bracket 121 is closer to the furnace wall of the main furnace chamber 100 than the first mounting bracket 111, so as to prevent the magnetic field from interfering with the position of the second mounting bracket 121 when the magnetic field is raised and lowered. Specifically, the second mounting bracket 121 includes a side plate 1211, a top plate 1212, and a cover plate 1213. There are two sets of side plates 1211. The two sets of side plates 1211 are arranged vertically and fixedly connected to the outer wall of the furnace body 120. The top plate 1212 and the cover plate 1213 are respectively connected to and fixed to the top of the two sets of side plates 1211, so that a second mounting groove 1214 is formed between the side plate 1211, the top plate 1212, and the cover plate 1213. The second mounting groove 1214 is used to engage with the drive mechanism 200.

[0039] Drive mechanism 200, such as Figure 1 , 3 As shown, the drive mechanism 200 is used to drive the main furnace chamber 100 to rotate and lift. The drive mechanism 200 includes a cantilever assembly 210, a first drive assembly 220, a second drive assembly 230, and a rotation assembly 240. The cantilever assembly 210 includes a first cantilever 211 and a second cantilever 213, and is used to attach to and support the main furnace chamber 100. The first drive assembly 220 is used to perform the lifting and lowering action of the cantilever assembly 210. The second drive assembly 230 is used to perform the lifting and lowering action of the first cantilever 211. The rotation assembly 240 is used to perform the rotation action of the cantilever assembly 210.

[0040] Cantilever assembly 210, such as Figure 3 As shown, the cantilever assembly 210 is used to attach to and support the main furnace chamber 100. The cantilever assembly 210 includes a first cantilever 211 and a second cantilever 213. The first cantilever 211 and the second cantilever 213 are respectively used to attach to the process flange 110 and the furnace body 120. In other words, the first cantilever 211 is used to cooperate with the first mounting seat 111 on the process flange 110, and the second cantilever 213 is used to cooperate with the second mounting seat 121 on the furnace body 120. The first cantilever 211 is located directly above the second cantilever 213. Both the first cantilever 211 and the second cantilever 213 have vertical lifting and lowering degrees of freedom and horizontal rotational degrees of freedom, so that after the first cantilever 211 and the second cantilever 213 are respectively attached to the process flange 110 and the furnace body 120, they can respectively drive the process flange 110 and the furnace body 120 to lift and rotate.

[0041] First cantilever 211, as Figure 3 , 4As shown, the first cantilever 211 is used to hook and support the process flange 110. The first cantilever 211 has a first hooking portion 2112, which is used to engage with the first hooking groove 1114 on the process flange 110. The first cantilever 211 includes a first cantilever body 2111 and a first leveling component 212. The first cantilever body 2111 has the first hooking portion 2112 at one end near the process flange 110. Specifically, the first hooking portion 2112 is hook-shaped. After the first cantilever 211 rotates to be directly below the first hooking groove 1114 of the process flange 110, the first cantilever 211 is driven... The first coupling part 2112 is raised, allowing it to engage with the first coupling groove 1114. It is worth noting that on the first coupling seat 111 of the process flange 110, a guide surface is provided on the side of the second plate 1113 facing the first coupling groove 1114. The guide surface is inclined outwards and downwards from the axis of the process flange 110. Correspondingly, a matching guide surface is provided on the first coupling part 2112, forming a coupling guide between the first coupling part 2112 and the first coupling seat 111.

[0042] First leveling component 212, such as Figure 4 As shown, the first leveling component 212 is used to level the process flange 110. The first leveling component 212 includes a first adjusting screw 2121 and a first adjusting plate 2122. The first adjusting plate 2122 is used to abut against the outer wall of the process flange 110. The first adjusting screw 2121 is threadedly connected to the first cantilever body 2111. The first adjusting plate 2122 is located below the first cantilever body 2111 and is fixedly connected to the first adjusting screw 2121. When the first cantilever 211 is hooked onto the first hook seat 111, the first adjusting plate 2122 abuts against the side wall of the process flange 110. By adjusting the position of the first adjusting screw 2121, the extension amount of the first adjusting plate 2122 is adjusted, allowing the first adjusting plate 2122 to move closer to or further away from the process flange 110. The change in the extension amount of the first adjusting plate 2122 acts on the process flange 110, thereby achieving the leveling of the process flange 110.

[0043] Second cantilever 213, as Figure 3 , 4As shown, the second cantilever 213 is used to attach and support the furnace body 120. The second cantilever 213 includes a second cantilever seat 2131, a second cantilever body 2132, a telescopic member 2135, and a second leveling member 214. The second cantilever seat 2131 is located below the first cantilever 211, and has an internal cavity. A portion of the second cantilever body 2132 is housed within the cavity, and the second cantilever body 2132 slides relative to the second cantilever seat 2131 within the cavity, allowing the second cantilever body 2132 to extend or retract horizontally on the second cantilever seat 2131. The telescopic member... 2135 is used to drive the extension or retraction of the second cantilever body 2132. In one embodiment, the telescopic member 2135 is a cylinder. The cylinder is located below the second cantilever 213 and is fixedly connected to the second cantilever seat 2131. It acts on the second cantilever body 2132. Specifically, the second cantilever body 2132 has a downwardly extending force plate 2134 below it. The piston rod of the cylinder is hinged to the force plate 2134, so that the force plate 2134 is pushed and drives the second cantilever body 2132 to extend or retract. The second cantilever body 2132 has a second hook-on portion 2133, which is used to hook onto the second hook-on seat 121 on the furnace body 120. The second hook-on portion 2133 is also hook-shaped, so that the second hook-on portion 2133 can enter the second hook-on groove 1214 to complete the hook-on. The second hook-on portion 2133 and the second hook-on seat 121 have the same guide surface as the first hook-on portion 2112 and the first hook-on seat 111, respectively, which will not be described in detail here.

[0044] Second leveling component 214, such as Figure 4 As shown, the second leveling component 214 is used to level the furnace body 120. The second leveling component 214 includes a second adjusting screw 2141 and a second adjusting plate 2142. The second adjusting plate 2142 is used to abut against the outer wall of the furnace body 120. The second adjusting screw 2141 is threadedly connected to the second cantilever body 2132. Specifically, the second adjusting screw 2141 is connected to the force plate 2134 of the second cantilever body 2132. The second adjusting plate 2142 is located below the second cantilever body 2132 and is fixedly connected to the second adjusting screw 2141. When the second cantilever 213 is hung on the second mounting base 121, the second adjusting plate 2142 abuts against the side wall of the furnace body 120. By adjusting the position of the second adjusting screw 2141, the extension amount of the second adjusting plate 2142 is adjusted, so that the second adjusting plate 2142 can move closer to or further away from the furnace body 120. The change in the extension amount of the second adjusting plate 2142 acts on the furnace body 120, thereby achieving the leveling of the furnace body 120.

[0045] First drive component 220, such as Figure 5As shown, the first drive assembly 220 is used to perform the lifting and lowering action of the cantilever assembly 210. The first drive assembly 220 is used to lift or lower the first cantilever 211 and the second cantilever 213 together. Specifically, the first drive assembly 220 includes a base, a lifting seat 221, and a first drive member 222. The base is located on one side of the single crystal furnace, and its position is relatively fixed, allowing it to be fixedly connected to the ground or other supporting objects. The lifting seat 221 slides vertically onto the base, giving it vertical lifting and lowering freedom. The second cantilever 213 is directly or indirectly rotatably connected to the lifting seat 221, allowing the second cantilever 213 to rotate independently while being driven to rise and fall by the first drive member 222. The actuator 222 includes a first lead screw 2222, a first slider 2223, and a first motor 2221. The first lead screw 2222 is vertically connected to the base and is rotatable. The first motor 2221 is connected to the base and acts on the first lead screw 2222, causing the first lead screw 2222 to rotate. The first slider 2223 is threadedly connected to the first lead screw 2222 and fixedly connected to the lifting base 221. Thus, the rotation of the first lead screw 2222 drives the first slider 2223 to slide along the direction of the first lead screw 2222, thereby causing the first slider 2223 to drive the lifting base 221 to rise and fall. At the same time, the first drive assembly 220, in cooperation with the second drive assembly 230, can also drive the first cantilever 211 to rise and fall.

[0046] Second drive component 230, such as Figure 5As shown, the second drive assembly 230 is used to perform the lifting and lowering action of the first cantilever 211. The second drive assembly 230 is connected to the first drive assembly 220, enabling the second drive assembly 230 to rise and fall together with the lifting seat 221, thereby achieving independent lifting control of the first cantilever 211. Due to space limitations in the single crystal furnace system, in one embodiment, the lifting seat 221 of the first drive assembly 220 is hollow, housing the second drive assembly 230 inside the lifting seat 221. Specifically, the second drive assembly 230 includes a lifting shaft 231 and a second drive member 232. The lifting shaft 231 is located inside the lifting seat 221 and is vertically oriented, with its top extending to the outside of the lifting seat 221. The first cantilever 211 is rotatably connected to the top of the lifting shaft 231 via a bearing. The lifting shaft 231 is acted upon by the second drive member 232, allowing the first cantilever 211 to rotate independently while being driven to rise and fall by the second drive member 232. The second drive member 232 includes a second lead screw 2322, a second slider 2323, and a second motor 2321. The second lead screw 2322 is vertically positioned and housed inside the lifting base 221. The second motor 2321 is connected to the lifting base 221 and acts on the second lead screw 2322, causing the second lead screw 2322 to rotate under the drive of the second motor 2321. The second slider 2323 is threadedly connected to the second lead screw 2322. It is worth noting that the second lead screw 2322 is coaxially arranged with the lifting shaft 231, and the lifting shaft 231 is hollow, with the lifting shaft 231 sleeved on the second lead screw 2322. The lifting shaft 231 is fixedly connected to the second slider 2323. Thus, the lifting shaft 231 is sleeved on the second lead screw 2322, reducing the space occupied by the second drive component 232, so that the volume of the lifting seat 221 can be minimized, reducing the space occupied by the equipment. Based on the above, under the lifting drive of the second drive component 230, the first cantilever 211 can be lifted independently, and at the same time, under the lifting drive of the first drive component 220, the first cantilever 211 and the second cantilever 213 can be lifted together.

[0047] It is worth noting that the second cantilever 213 is located on top of the lifting seat 221 and is sleeved on the lifting shaft 231. Specifically, a sleeve 215 is sleeved on the lifting shaft 231. The second cantilever seat 2131 of the second cantilever 213 and the sleeve 215 are connected by a bearing, so that the second suspension can rotate without interfering with the lifting shaft 231.

[0048] Rotating component 240, such as Figure 6As shown, the rotating assembly 240 is used to perform the rotational action of the cantilever assembly 210. The rotating assembly 240 has two sets, each acting independently on the first cantilever 211 and the second cantilever 213, allowing the first and second cantilever 211 and 213 to rotate independently. Taking the rotating assembly 240 used to drive the rotation of the first cantilever 211 as an example, it includes a mounting base 241, a third motor (not shown), and a gear 242. The mounting base 241 is connected to the lifting seat 221. Since the first cantilever 211 needs to move up and down relative to the second cantilever 213 and the lifting seat 221, the mounting base 241 needs to be vertically slidably connected to the lifting seat 221 via a slide rail. In one embodiment, the mounting base 241 is also connected to... The top of the lifting shaft 231 is connected by a bearing, so that the mounting base 241 can be raised and lowered synchronously with the first cantilever 211. The third motor is connected to the mounting base 241, and the gear 242 is connected to the output shaft of the third motor, so that the gear 242 is driven to rotate by the third motor. The outer sides of the first cantilever 211 and the second cantilever 213 are respectively provided with horizontally arranged toothed rings 243, which mesh with the gear 242, so that when the gear 242 rotates, it drives the toothed rings 243 and the first cantilever 211 to rotate horizontally. The rotating component 240 on the second cantilever 213 can be directly connected to the lifting base 221 and drive the second cantilever 213 to rotate.

[0049] Furthermore, the rotating assembly 240 may also include a positioning element 245, which includes a positioning disk 2451 and a positioning cylinder 2453. The positioning disk 2451 is connected in a ring to the outer ring of the first cantilever 211 and the second cantilever 213. A positioning notch 2452 is provided on the positioning disk 2451. The positioning cylinder 2453 is fixedly connected to the mounting base 241. The positioning cylinder 2453 pushes out and enters the positioning notch 2452 to realize the positioning of the positioning disk 2451 and the first cantilever 211 (or the second cantilever 213).

[0050] Working principle / steps:

[0051] During the disassembly of the single crystal furnace, the first driving component 222 drives and adjusts the horizontal height of the lifting seat 221 and the cantilever assembly 210 so that the height of the second cantilever 213 is adapted to the second mounting seat 121; then the second driving component 232 drives and adjusts the horizontal height of the first cantilever 211 so that the height of the first cantilever 211 is adapted to the first mounting seat 111; at the same time, the rotating component 240 drives the first cantilever 211 and the second cantilever 213 to the mounting position below the first mounting seat 111 and the second mounting seat 121 respectively.

[0052] The second drive assembly 230 drives the process flange 110 to lift and rotate: the second motor 2321 drives the second lead screw 2322 to rotate, causing the lifting shaft 231 to rise vertically, thereby causing the first cantilever 211 to rise, so that the first hook part 2112 of the first cantilever 211 engages with the first hook seat 111 on the process flange 110. The second motor 2321 continues to drive the second lead screw 2322 to rotate, and the lifting shaft 231 drives the first cantilever 211 to continue to lift, so that the process flange 110 is lifted and detached from the furnace body 120; the third motor drives the gear 242 to rotate, causing the first cantilever 211 to rotate, thereby unscrewing the process flange 110.

[0053] The second drive assembly 230 drives the furnace body 120 to lift: the first motor 2221 drives the first lead screw 2222 to rotate, causing the lifting seat 221 to rise vertically, thereby causing the second cantilever 213 to rise (during this process, the first cantilever 211 will rise together with the second cantilever 213), so that the second hooking part 2133 of the second cantilever 213 engages with the second hooking seat 121 on the furnace body 120. The first motor 2221 continues to rotate the first lead screw 2222, and the lifting seat 221 drives the second cantilever 213 to continue to lift; the third motor drives the gear 242 to rotate, causing the second cantilever 213 to rotate, thereby opening the furnace body 120; since the process flange 110 is lifted at the same time as the furnace body 120 is lifted, the process flange 110 can be driven to descend to a suitable position by the second drive assembly 232.

[0054] Technical effects:

[0055] 1. In this application, the furnace body 120 and the cantilever are connected by a hook-and-loop connection, replacing the existing method of connecting the furnace body 120 with a rotating seat. By connecting the furnace body 120 and the drive mechanism 200 through a hook-and-loop connection, the connection structure between the furnace body 120 and the drive mechanism 200 is simplified while ensuring a stable connection and support for the furnace body 120. Replacing the bulky rotating seat with a hook-and-loop connection reduces the swing space occupied by the drive mechanism 200 when rotating the furnace body 120, thus solving the technical problem of the large space occupied by the rotation and lifting structure of the furnace body 120 and achieving the technical effect of reducing the space occupied by the rotation and lifting structure of the furnace body 120.

[0056] 2. For the process flange 110 and furnace body 120 on the main furnace chamber 100, the two cantilever arms are rotated and lifted separately, which helps to distribute the weight of the cantilever arms and improve the stability of the cantilever arms supporting the main furnace chamber 100.

[0057] 3. A first mounting bracket 111 and a second mounting bracket 121 are respectively provided on the process flange 110 and the furnace body 120, which are respectively connected to the first cantilever 211 and the second cantilever 213. The position of the second mounting bracket 121 is closer to the side wall of the furnace body 120 than the position of the first mounting bracket 111, so that the magnetic field will not interfere with the mounting bracket during the rising and falling process, which is conducive to the rational use of space in the single crystal furnace system.

[0058] 4. Regarding the driving of the first cantilever 211 and the second cantilever 213, this application uses the first driving component 220 to lift the first cantilever 211 and the second cantilever 213 as a whole. The second driving component 230 is housed in the lifting seat 221 of the first driving component 220. The second driving component 230 can adjust the lifting of the second cantilever 213 independently, realizing flexible driving of each cantilever. At the same time, it greatly reduces the space occupied by the second driving component 230 and improves the space utilization rate of the single crystal furnace system.

[0059] Although preferred embodiments of this application have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of this application.

[0060] Obviously, those skilled in the art can make various modifications and variations to this application without departing from the spirit and scope of this application. Therefore, if such modifications and variations fall within the scope of the claims of this application and their equivalents, this application also intends to include such modifications and variations.

Claims

1. A single crystal furnace, characterized in that, include: The main furnace chamber (100) has a hanging groove on its outer wall; Drive mechanism (200), the drive mechanism (200) includes: The cantilever assembly (210) has a hook-on part for engaging with the hook-on slot; the cantilever assembly (210) has a vertical lifting and lowering degree of freedom and a horizontal rotational degree of freedom; after the cantilever assembly (210) is hooked onto the main furnace chamber (100), the main furnace chamber (100) can be lifted, lowered and rotated with the cantilever assembly (210); The first drive assembly (220) is used to perform the lifting and lowering action of the cantilever assembly (210); It also includes a rotating component (240) for performing the rotational action of the cantilever component (210).

2. A single crystal furnace according to claim 1, characterized in that, The main furnace chamber (100) includes: Process flange (110); Furnace body (120), the furnace body (120) being connected to the bottom of the process flange (110); The outer wall of the process flange (110) has a first mounting groove (1114), and the outer wall of the furnace body (120) has a second mounting groove (1214). The cantilever assembly (210) includes: A first cantilever (211) has a first hook-on portion (2112) which is used to engage with the first hook-on slot (1114). The second cantilever (213) is located below the first cantilever (211) and has a second hook-on portion (2133) for engaging with the second hook-on slot (1214).

3. A single crystal furnace according to claim 2, characterized in that, The outer wall of the process flange (110) is connected to an extended first hook seat (111), and the first hook seat (111) has a first hook groove (1114).

4. A single crystal furnace according to claim 3, characterized in that, The first cantilever (211) includes: The first leveling component (212) includes: First adjusting screw (2121); The first adjusting plate (2122) is used to abut against the outer wall of the process flange (110). The first adjusting plate (2122) is slidably connected to the first cantilever (211) by the first adjusting screw (2121), so that the first adjusting plate (2122) has the freedom to move closer to or further away from the outer wall of the process flange (110).

5. A single crystal furnace according to claim 3, characterized in that, A second mounting bracket (121) is connected to the outer wall of the furnace body (120), and the second mounting bracket (121) has a second mounting groove (1214); the second mounting bracket (121) is located at the bottom of the first mounting bracket (111), and the second mounting bracket (121) is closer to the outer wall of the main furnace chamber (100) relative to the first mounting bracket (111).

6. A single crystal furnace according to claim 5, characterized in that, The second cantilever (213) includes: Second cantilever (2131); The second cantilever body (2132) is horizontally slidably connected to the second cantilever seat (2131); and The telescopic component (2135) is fixedly connected to the second cantilever seat (2131) and acts on the second cantilever body (2132), so that the second cantilever body (2132) has the freedom of movement to move closer to or further away from the furnace body (120), thereby allowing the second hook part (2133) to enter the second hook groove (1214) for engagement.

7. A single crystal furnace according to claim 6, characterized in that, The second cantilever (213) also includes: The second leveling component (214) includes: Second adjusting screw (2141); The second adjusting plate (2142) is used to abut against the outer wall of the furnace body (120). The second adjusting plate (2142) is slidably connected to the second cantilever body (2132) by the second adjusting screw (2141), so that the second adjusting plate (2142) has the freedom to move closer to or further away from the outer wall of the furnace body (120).

8. A single crystal furnace according to claim 2, characterized in that, The drive mechanism (200) further includes: A first driving component (220) includes: The base body is fixed; A lifting seat (221), which is slidably connected to the seat body in a vertical direction, and a second cantilever (213) is rotatably connected to the lifting seat (221); and A first driving member (222) is connected between the base and the lifting seat (221), and the first driving member (222) is used to drive the lifting seat (221) to move vertically up and down.

9. A single crystal furnace according to claim 8, characterized in that, The drive mechanism (200) further includes: The second drive component (230) includes: A lifting shaft (231) is arranged vertically and housed inside the lifting seat (221). The first cantilever (211) is sleeved on the lifting shaft (231). The second driving element (232) includes: The second lead screw (2322) is arranged vertically and is housed inside the lifting seat (221) and is rotatably connected to the lifting seat (221). The lifting shaft (231) is sleeved on the second lead screw (2322), and the lifting shaft (231) is connected to the second lead screw (2322) by threaded sliding, so that the second cantilever (213) can rise and fall with the lifting shaft (231).

10. A single crystal furnace according to claim 8, characterized in that, The drive mechanism (200) further includes: A rotating component (240) acts on the first cantilever (211) and the second cantilever (213) so that the first cantilever (211) and the second cantilever (213) have a rotational degree of freedom to rotate horizontally.

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