Vacuum pump and rotating body of vacuum pump

By setting protrusions on the rotating body of the vacuum pump for discharge, the problem of contamination in the vacuum chamber caused by particle backflow is solved, thus improving the cleanliness and performance of the vacuum pump.

CN115605685BActive Publication Date: 2026-06-30EDWARDS JAPAN
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Patent Information

Application Number
CN202180036625.1
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Priority Date
2020-06-05
Filing Date
2021-05-28
Publication Date
2026-06-30
Estimated Expiration
2041-05-28

AI Technical Summary

Technical Problem

In existing vacuum pumps, the discharge needle is positioned near the suction inlet, causing particles to fly into the exhaust gas and flow back, resulting in contamination inside the vacuum chamber.

Method used

Protrusions are provided on the rotating body of the vacuum pump to discharge at specific locations and prevent particle backflow. These protrusions are provided on the back, bottom, and midway through the gas flow path of the rotating body to ensure that the charge can be effectively discharged and discharged through the flushing gas.

Benefits of technology

It effectively prevents particle backflow, avoids contamination in the vacuum chamber, and ensures the cleanliness and stable performance of the vacuum pump.

✦ Generated by Eureka AI based on patent content.

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Abstract

This invention can prevent particle backflow during discharge. This invention is a vacuum pump (100), which includes an outer casing (127, 129), a stator column (122), a rotating body (103), and magnetic bearings (104, 105, 106A, 106B). The outer casing (127, 129) is provided with an intake port (101) and an exhaust port (133). The stator column (122) is erected inside the outer casing. The rotating body (103) is shaped to surround the outer periphery of the stator column. The magnetic bearings (104, 105)... 106A, 106B) The rotating body is supported by magnetic levitation of its rotation axis. The aforementioned vacuum pump draws gas from the intake port and discharges it from the exhaust port by rotating the rotating body. The aforementioned vacuum pump is characterized in that at least one of the following positions is provided: a first position (P1) formed on the back side of the rotating body, a second position (P2) formed on the bottom side of the rotating body, and a third position (P3) formed on the rotating body in the middle of the gas flow path, for discharging the charge carried by the rotating body.
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Citation Information

Patent Citations

  • Turbo-molecular drag pump

    JP2002206497A

  • Turbomolecular pump with static charge control

    US20070041826A1

  • Turbo vacuum pump

    US5020969A