Vacuum pump and rotating body of vacuum pump
By setting protrusions on the rotating body of the vacuum pump for discharge, the problem of contamination in the vacuum chamber caused by particle backflow is solved, thus improving the cleanliness and performance of the vacuum pump.
CN115605685BActive Publication Date: 2026-06-30EDWARDS JAPAN
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Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- EDWARDS JAPAN
- Filing Date
- 2021-05-28
- Publication Date
- 2026-06-30
AI Technical Summary
Technical Problem
In existing vacuum pumps, the discharge needle is positioned near the suction inlet, causing particles to fly into the exhaust gas and flow back, resulting in contamination inside the vacuum chamber.
Method used
Protrusions are provided on the rotating body of the vacuum pump to discharge at specific locations and prevent particle backflow. These protrusions are provided on the back, bottom, and midway through the gas flow path of the rotating body to ensure that the charge can be effectively discharged and discharged through the flushing gas.
Benefits of technology
It effectively prevents particle backflow, avoids contamination in the vacuum chamber, and ensures the cleanliness and stable performance of the vacuum pump.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure CN115605685B_ABST
Abstract
This invention can prevent particle backflow during discharge. This invention is a vacuum pump (100), which includes an outer casing (127, 129), a stator column (122), a rotating body (103), and magnetic bearings (104, 105, 106A, 106B). The outer casing (127, 129) is provided with an intake port (101) and an exhaust port (133). The stator column (122) is erected inside the outer casing. The rotating body (103) is shaped to surround the outer periphery of the stator column. The magnetic bearings (104, 105)... 106A, 106B) The rotating body is supported by magnetic levitation of its rotation axis. The aforementioned vacuum pump draws gas from the intake port and discharges it from the exhaust port by rotating the rotating body. The aforementioned vacuum pump is characterized in that at least one of the following positions is provided: a first position (P1) formed on the back side of the rotating body, a second position (P2) formed on the bottom side of the rotating body, and a third position (P3) formed on the rotating body in the middle of the gas flow path, for discharging the charge carried by the rotating body.
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