An experimental platform and a method for using the experimental platform

Abstract

This invention relates to a testing platform and a method for using the testing platform. The testing platform includes a sample support mechanism, an X-ray source, a first signal acquisition mechanism, and a second detector. The sample support mechanism is used to support the sample to be tested; the X-ray source is used to emit incident X-rays; the first signal acquisition mechanism includes a first detector, and the projections of the X-ray source, the sample support mechanism, and the first detector on a horizontal plane are arranged sequentially along a first direction. The first detector is used to receive the X-ray diffraction signal generated by the sample to be tested; the second detector is used to receive the X-ray fluorescence signal generated from the sample to be tested. The testing platform provided by this invention can simultaneously obtain information on the nearest-neighbor atomic structure and long-range ordered structure of the same region of the sample using the incident X-rays emitted from the X-ray source, thereby fundamentally revealing the mechanism by which the evolution of the atomic and crystal structures of the material surface affects its microstructure and properties.

Description

Technical Field

[0001] This invention relates to the field of testing equipment technology, and in particular to a test platform and a method for using the test platform. Background Technology

[0002] Synchrotron radiation sources possess advantages such as extremely high brightness, wide spectrum, high collimation, and short-pulse structure, making them widely used in fundamental and applied research in physics, chemistry, life sciences, and materials science. Furthermore, with the rapid development of synchrotron radiation experimental techniques, materials scientists have gained powerful tools for studying the fine structure of matter at the atomic scale. Synchrotron radiation X-ray diffraction (XRD) is highly sensitive, primarily capable of accurately detecting long-range ordered structure information of crystal structures in samples; synchrotron radiation X-ray absorption fine structure (XAFS) is sensitive to short-range order, primarily capable of obtaining local short-range ordered structure information such as the type of nearest-neighbor coordinating atoms, interatomic spacing, coordination number, and disorder degree. Combining these two techniques allows for the comprehensive acquisition of both short-range and long-range ordered structure information of matter, providing technical support for establishing the correlation between the atomic distribution of elements and crystal structure in materials.

[0003] In existing technologies, XRD and XAFS techniques were used to study the changes in the local structure around Co ions during the discharge of the cathode catalyst in a borohydride fuel cell. In-situ XRD did not detect the formation of a new phase, while in-situ XAFS detected the presence of oxygen vacancies and proposed a new oxygen reduction reaction mechanism based on oxygen vacancies. However, the in-situ XAFS and XRD were not performed in the same experiment, making it impossible to accurately obtain all the information about the structural changes at the same location of the sample.

[0004] Meanwhile, existing technologies disclose experimental devices capable of achieving synchrotron radiation grazing incidence XAFS. These devices can acquire XAFS information from the surface and at different depths of samples such as thin films, multilayer films, and bulk materials. However, such devices lack synchronous characterization of XRD signals.

[0005] Therefore, there is an urgent need for a test platform and a method for using the test platform that can be used in conjunction with XRD and XAFS technologies, in order to solve the technical problem of not being able to accurately obtain long-range and short-range ordered structural information when the tissue structure changes at the same location of the sample. Summary of the Invention

[0006] One objective of this invention is to provide an experimental platform to solve the technical problem of being unable to accurately obtain long-range and short-range ordered structural information when the microstructure changes at the same location of a thin film sample.

[0007] To achieve the above objectives, the first aspect of the present invention provides an experimental platform, comprising:

[0008] Sample carrying mechanism, used to carry the sample to be tested;

[0009] An X-ray source is used to emit incident X-rays that can penetrate the sample to be tested.

[0010] The first signal acquisition mechanism includes a first detector. The X-ray source, the sample support mechanism, and the projection of the first detector on the horizontal plane are arranged sequentially along a first direction. The first detector is used to receive the X-ray diffraction signal generated by the sample to be tested.

[0011] The second detector is disposed along the second direction with the sample carrier mechanism, the first direction and the second direction forming an angle, and the second detector is used to receive the X-ray fluorescence signal generated from the sample to be tested.

[0012] Optionally, the sample carrying mechanism includes:

[0013] A sample stage, used to hold the sample to be tested;

[0014] A first rotary drive is connected to the sample stage. The first rotary drive is used to drive the sample stage to rotate in order to adjust the angle between the incident X-ray and the surface of the sample to be tested.

[0015] Optionally, the sample carrying mechanism further includes:

[0016] A sample lifting adjustment component is connected to the sample stage and is used to adjust the height of the sample stage.

[0017] Optionally, the first signal acquisition mechanism further includes:

[0018] The second rotational drive is connected to the first detector. The second rotational drive is used to drive the first detector to rotate so that the first detector can collect X-ray diffraction signals at different positions in space.

[0019] Optionally, the rotation axis of the first detector is parallel to the second direction, and the rotation axis of the first detector coincides with the rotation axis of the sample stage.

[0020] Optionally, the first signal acquisition mechanism further includes:

[0021] The connecting frame connects the second rotary drive and the first detector.

[0022] Optionally, the first signal acquisition mechanism further includes:

[0023] A counterweight is connected to the second rotary drive, and the counterweight and the first detector are located on opposite sides of the output shaft of the second rotary drive.

[0024] Optionally, the test platform further includes a support mechanism, which includes:

[0025] The sample carrying mechanism, the first signal acquisition mechanism, and the second detector are all mounted on the frame.

[0026] A three-dimensional adjustment platform is provided, on which the frame is mounted. The three-dimensional adjustment platform is used to adjust the position of the frame in the first direction and the vertical direction, and to drive the frame to rotate around the vertical direction.

[0027] Another objective of this invention is to provide a method for using an experimental platform to solve the technical problem of being unable to accurately obtain long-range ordered structural information and short-range ordered structural information when the tissue structure changes at the same location of a sample.

[0028] To achieve this objective, the second aspect of the present invention adopts the following technical solution:

[0029] A method for using a testing platform, for using the testing platform as described above; the method includes the following steps:

[0030] Place the sample to be tested into the sample carrier;

[0031] An X-ray source emits X-rays, a first detector receives the X-ray diffraction signal generated by the sample under test, and a second detector receives the X-ray fluorescence signal generated by the sample under test.

[0032] Optionally, the test platform further includes a sample stage and a first rotary drive connected to the sample stage, and a second rotary drive connected to the first detector;

[0033] The method of use also includes:

[0034] The first rotary drive drives the sample stage to rotate in order to adjust the angle between the surface of the sample to be tested and the incident X-ray;

[0035] When the surface of the sample to be tested maintains the same angle with the incident X-ray, the second rotation drive drives the first detector to rotate so that the first detector can collect X-ray diffraction signals at different positions in space.

[0036] As can be seen from the above, the experimental platform provided by the present invention can obtain information on the nearest-neighbor atomic structure and long-range ordered structure of the same region of the sample simultaneously using incident X-rays emitted from an X-ray source, thereby revealing the mechanism by which the evolution of the atomic and crystal structures of the material surface affects the microstructure and properties. Attached Figure Description

[0037] Figure 1 This is a top view of the test platform provided in an embodiment of the present invention;

[0038] Figure 2 This is a front view of the test platform provided in an embodiment of the present invention;

[0039] Figure 3 This is a schematic diagram of the structure of the sample to be tested and the incident X-rays provided in an embodiment of the present invention;

[0040] Figure 4 The grazing incidence XRD diffraction pattern is obtained using the experimental platform provided in the embodiments of the present invention;

[0041] Figure 5 It is the integral curve of grazing incidence XRD obtained by applying the test platform provided in the embodiments of the present invention;

[0042] Figure 6 The grazing incidence XAFS spectrum is obtained using the experimental platform provided in the embodiments of the present invention.

[0043] In the picture:

[0044] 1. Sample carrying mechanism; 11. Sample stage; 12. First rotary drive component; 13. Sample lifting adjustment component;

[0045] 2. First signal acquisition mechanism; 21. First detector; 22. Second rotary drive component; 23. Connecting frame; 231. Mounting rod; 232. Compensating rod; 233. Sliding rod; 234. Sliding block; 24. Counterweight;

[0046] 3. Second detector;

[0047] 4. X-ray source;

[0048] 5. Support mechanism; 51. Frame; 52. Three-dimensional adjustment stage; 521. Diffractometer rotating stage; 522. Diffractometer horizontal moving stage; 523. Diffractometer vertical moving stage;

[0049] 6. Pre-ionization chamber; 7. Incident X-rays;

[0050] 10. Sample to be tested. Detailed Implementation

[0051] The technical solution of the present invention will be further described below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, only the parts relevant to the present invention are shown in the accompanying drawings, not all of them.

[0052] This invention defines certain directional terms. Unless otherwise stated, the directional terms used, such as "up," "down," "left," "right," "inner," and "outer," are used for ease of understanding and therefore do not constitute a limitation on the scope of protection of this invention.

[0053] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0054] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0055] This embodiment provides an experimental platform for accurately obtaining long-range ordered structure information and short-range ordered structure information of samples at the same location when the tissue structure changes.

[0056] like Figure 1 and Figure 2As shown, the experimental platform provided in this embodiment includes a sample carrier 1, an X-ray source 4, a first signal acquisition mechanism 2, and a second detector 3. The sample carrier 1 carries the sample 10 to be tested, and the X-ray source 4 emits incident X-rays 7, which can penetrate the sample 10. The first signal acquisition mechanism 2 includes a first detector 21, which receives the X-ray diffraction signal generated by the sample 10 to obtain the long-range ordered structure information of the sample 10. The second detector 3 receives the X-ray fluorescence signal generated from the sample 10 to obtain the short-range ordered structure information of the sample 10.

[0057] Specifically, the X-ray source 4, sample support mechanism 1, and first detector 21 are sequentially arranged along the X-axis (first direction) on the horizontal plane, so that the first detector 21 can collect X-ray diffraction signals. The second detector 3 and sample support mechanism 1 are arranged along the Y-axis (second direction), with the X-axis and Y-axis forming an angle, so that the second detector 3 can collect X-ray fluorescence signals. Furthermore, the angle between the X-axis and Y-axis is approximately 90°. It should be noted that the angle between the X-axis and Y-axis is not limited to approximately 90°, as long as it is sufficient for the second detector 3 to collect X-ray fluorescence signals.

[0058] The method of using the experimental platform provided in this embodiment includes the following steps:

[0059] Place the sample to be tested 10 into the sample support mechanism 1;

[0060] X-ray source 4 emits X-rays, first detector 21 receives X-ray diffraction signals generated by sample 10 to be tested, and at the same time, second detector 3 receives X-ray fluorescence signals generated by sample 10 to be tested.

[0061] The experimental platform provided in this embodiment can simultaneously obtain information on the nearest-neighbor atomic structure and long-range ordered structure of the same region of the sample using incident X-rays 7 emitted from X-ray source 4, thereby revealing the mechanism by which the evolution of atomic and crystal structures on the surface of the material affects its properties.

[0062] It should be noted that the X-ray source 4 provided in this embodiment can be a synchrotron radiation source, but it is not limited to this. It can also be other forms of X-ray source 4, as long as it can emit rays.

[0063] The following mainly introduces the specific structure of the sample carrying mechanism 1.

[0064] like Figure 3 As shown, when incident X-ray 7 enters the sample 10 to be tested, the angle between incident X-ray 7 and the surface of the sample 10 to be tested is the grazing incidence angle of incident X-ray 7 (e.g., Figure 3As shown in α), the grazing incidence angle of the incident X-ray 7 determines the depth to which the incident X-ray 7 penetrates the sample. Therefore, by changing the grazing incidence angle of the incident X-ray 7, the structural information of the sample 10 at different depths can be obtained.

[0065] like Figure 1 and Figure 2 As shown, to adjust the grazing incidence angle of the incident X-ray 7, the sample carrying mechanism 1 includes a sample stage 11 and a first rotary drive 12. The sample stage 11 is used to carry the sample 10 to be tested. The first rotary drive 12 is connected to the sample stage 11 and is used to drive the sample stage 11 to rotate, thereby adjusting the angle between the incident X-ray 7 and the surface of the sample 10 to be tested. Specifically, the rotation axis of the first rotary drive 12 is parallel to the Y-axis, and the first rotary drive 12 can be any drive source that can drive the sample stage 11 to rotate, such as a motor.

[0066] Optionally, a first turntable can be connected to the output shaft of the first rotary drive 12, and the sample stage 11 is connected to the rotary drive through the first turntable. Of course, in other embodiments, the first turntable may not be provided, as long as the first rotary drive 12 is directly or indirectly connected to the sample stage 11 to drive the sample stage 11 to rotate around the Y direction.

[0067] Optionally, a clamp can be provided on the sample stage 11 to hold and fix the sample 10 to be tested; of course, the surface of the sample stage 11 can also be a plane to fix the sample 10 to be tested on the sample stage 11 by adhesive bonding. It should be noted that the present invention does not impose any restrictions on the specific structure of the sample stage 11, and those skilled in the art can set it according to actual usage requirements. Changes to the specific structure of the sample stage 11 do not deviate from the basic principles of the present invention.

[0068] Due to variations in sample thickness and other factors, the incident X-ray 7 may not be able to penetrate the sample 10 under test. Therefore, to ensure that the incident X-ray 7 is not limited by factors such as the height of the sample 10 under test and that it can penetrate the sample in the Z-direction (vertical direction), the sample carrying mechanism 1 also includes a sample lifting adjustment component 13. The sample lifting adjustment component 13 is connected to the sample stage 11 and is used to adjust the height of the sample stage 11.

[0069] After the sample 10 to be tested is fixed on the sample stage 11, the horizontal position of the sample 10 to be tested is calibrated and the grazing incidence angle is adjusted by adjusting the first rotation drive component 12 and the sample lifting adjustment component 13.

[0070] Preferably, in this embodiment, the first rotary drive 12 is connected to the sample stage 11 via a sample lifting adjustment member 13, that is, the output shaft of the first rotary drive 12 is connected to the sample lifting adjustment member 13, and the output end of the sample lifting adjustment member 13 is connected to the sample stage 11. Of course, in other optional embodiments, the sample lifting adjustment member 13 can also be connected to the sample stage 11 via the first rotary drive 12. The sample lifting adjustment member 13 can be a lead screw and nut mechanism, etc. It should be noted that the present invention does not impose any restrictions on the specific structure of the sample lifting adjustment member 13. Those skilled in the art can set it according to actual usage requirements, as long as it can achieve the lifting of the sample stage 11. Changes to the specific structure of the sample lifting adjustment member 13 do not deviate from the basic principles of the present invention.

[0071] During the experiment, the surface of the sample 10 to be tested is leveled and positioned at the center of the incident X-ray 7 by repeatedly adjusting the first rotary drive 12 and the sample lifting adjustment 13. After the initial position of the sample 10 to be tested is adjusted, the grazing incidence angle required for the experiment is precisely set by the first rotary drive 12, thereby achieving accurate measurement of structural information at different depths on the surface of the sample 10 to be tested.

[0072] like Figure 1 and Figure 2 As shown, the specific structure of the first signal acquisition mechanism 2 will be introduced below.

[0073] Since the diffraction signals emitted from the sample 10 to be tested are distributed within a certain range in space, and the diffraction signals at different positions are different, in order for the first detector 21 to acquire diffraction signals at different positions, the first signal acquisition mechanism 2 preferably further includes a second rotation drive 22. The second rotation drive 22 is connected to the first detector 21 and is used to drive the first detector 21 to rotate, so that the first detector 21 can acquire X-ray diffraction signals at different positions in space. Specifically, the second rotation drive 22 can be any drive source that can drive the first detector 21 to rotate, such as a motor.

[0074] Preferably, the rotation axis of the first detector 21 is parallel to the Y-direction, and the rotation axis of the first detector 21 coincides with the rotation axis of the sample stage 11. That is, the movement trajectory of the first detector 21 is circular, and the sample stage 11 is approximately located at the center of the circle. When the first detector 21 rotates to different positions, the distance between the first detector 21 and the sample 10 to be tested does not change, thereby ensuring that the signal intensity detected by the first detector 21 is consistent, and thus guaranteeing the accuracy of the detection results. Preferably, the second rotation drive 22 and the first rotation drive 12 are arranged along the Y-direction.

[0075] like Figure 2As shown, the first signal acquisition mechanism 2 also includes a connecting frame 23, and the second rotary drive 22 and the first detector 21 are connected through the connecting frame 23 so that the first detector 21 can rotate around the output shaft of the second rotary drive 22.

[0076] Optionally, both the second rotary drive component 22 and the first rotary drive component 12 are electrically connected to the controller, which can control the first rotary drive component 12 and the second rotary drive component 22 to work separately or in conjunction. In this embodiment, the controller can be centralized or distributed. For example, the controller can be a single microcontroller or a combination of multiple distributed microcontrollers. The microcontroller can run a control program to control the aforementioned components to achieve their functions.

[0077] Preferably, the connecting frame 23 includes a mounting rod 231, the extension direction of which is perpendicular to the axial direction of the output shaft of the second rotary drive member 22. The connecting frame 23 may further include a position adjustment section, which includes a slide rod 233 and a slider 234. The slide rod 233 is connected to and parallel to the mounting rod 231, and the slider 234 is connected to the first detector 21. A groove is formed on the slider 234, and the slide rod 233 is slidably disposed within the groove. By sliding the first detector 21 along the slide rod 233, the distance between the first detector 21 and the sample 10 to be tested can be adjusted, thereby obtaining the desired intensity of the X-ray diffraction signal.

[0078] Preferably, the mounting rod 231 and the sliding rod 233 can be connected by a compensating rod 232. The compensating rod 232 can compensate for the distance of the first detector 21 in the Y direction, thereby ensuring that the first detector 21 and the sample stage 11 are directly aligned in the X direction, guaranteeing a strong signal strength detected by the first detector 21. It should be noted that the compensating rod 232 can be an adjustable-length component or a fixed-length component, as long as it can ensure that the first detector 21 and the sample stage 11 are directly aligned in the X direction.

[0079] like Figure 3 As shown, preferably, the first signal acquisition mechanism 2 may further include a counterweight 24. The counterweight 24 is connected to the second rotary drive 22, that is, the counterweight 24 is connected to the output shaft of the second rotary drive 22. The counterweight 24 and the first detector 21 are located on opposite sides of the output shaft of the second rotary drive 22. The counterweight 24 can reduce the load on the second rotary drive 22 and improve the angle control accuracy and position stability of the first detector 21. Preferably, the counterweight 24 can be connected to the output shaft of the second rotary drive 22 through the mounting rod 231 of the connecting frame 23, thereby balancing the total weight on the connecting frame 23. Of course, it should be noted that the counterweight 24 can also be directly connected to the output shaft of the second rotary drive 22 or connected to the output shaft of the second rotary drive 22 through other components.

[0080] Optionally, the first detector 21 can be a Pilatus-100K two-dimensional detector with a minimum exposure time of 0.002 s.

[0081] During the experiment, at the same grazing incidence angle, the first detector 21 is driven to rotate to different positions by the second rotation drive 22 to receive diffraction signals at different positions, thereby obtaining grazing incidence XRD diffraction rings.

[0082] The following section introduces information related to the second detector, 3.

[0083] Preferably, the second detector 3 is arranged on the side of the sample along the Y direction, and the second detector 3 and the sample 10 to be tested are on the same horizontal plane, so as to effectively avoid the interference of diffraction signals generated by the substrate material of the thin film sample 10 and ensure the detection accuracy of the second detector 3.

[0084] Furthermore, in order to make the second detector 3 rise and fall with the sample stage 11, the test platform may also include a lifting drive (not shown in the figure), which is used to drive the second detector 3 to rise and fall, so as to ensure that the second detector 3 can be at the same level as the sample 10 to be tested.

[0085] Preferably, the second detector 3 is a Lytle fluorescence detector.

[0086] Preferably, a pre-ionization chamber 6 is also provided between the sample stage 11 and the X-ray source 4. After the incident X-rays 7 pass through the pre-ionization chamber 6, the fluorescence signal generated by their interaction with the sample 10 to be tested is received by the second detector 3, thereby obtaining the XAFS spectrum of the sample. The pre-ionization chamber 6 can excite the working gas in the ionization chamber by the incident X-rays 7, and the electrodes collect the ionized electrons to form a current (also the incident X-rays 7).

[0087] Preferably, the test platform further includes a support mechanism 5, which supports the sample carrying mechanism 1, the first signal acquisition mechanism 2, and the second detector 3. The following mainly describes the support mechanism 5.

[0088] The support mechanism 5 includes a frame 51 and a three-dimensional adjustment stage 52. The sample carrying mechanism 1, the first signal acquisition mechanism 2, and the second detector 3 are all mounted on the frame 51. The frame 51 is mounted on the three-dimensional adjustment stage 52, which is used to adjust the position of the frame 51 in the X and Z directions and to drive the frame 51 to rotate around the Z direction, so as to precisely adjust the center of the first detector 21 to the center of the incident X-ray 7.

[0089] The three-dimensional adjustment stage 52 may include a diffractometer rotary stage 521, a diffractometer vertical moving stage 523, and a diffractometer horizontal moving stage 522 connected in sequence. The output end of the diffractometer rotary stage 521 is connected to the frame 51 to drive the frame 51 to rotate in the Z direction. The output end of the diffractometer horizontal moving stage 522 is connected to the diffractometer rotary stage 521 to drive the diffractometer rotary stage 521 to move in the X direction. The output end of the diffractometer vertical moving stage 523 is connected to the diffractometer horizontal moving stage 522 to drive the diffractometer horizontal moving stage 522 to move in the Z direction.

[0090] It should be noted that those skilled in the art can customize the specific structures of the diffractometer rotary stage 521, the diffractometer vertical moving stage 523, and the diffractometer horizontal moving stage 522 according to actual usage requirements. For example, the vertical moving stage 523 and the horizontal moving stage 522 can both be screw-nut mechanisms, and the diffractometer rotary stage 521 can be a motor, etc. Those skilled in the art can also customize the connection method and sequence between the diffractometer rotary stage 521, the diffractometer vertical moving stage 523, and the diffractometer horizontal moving stage 522 according to actual usage requirements. These changes to the specific structure of the three-dimensional adjustment stage 52 do not deviate from the basic principles of this invention.

[0091] During the experiment, the center of the first detector 21 was first precisely adjusted to the center of the incident X-ray 7 by adjusting the diffractometer rotating stage 521, the diffractometer vertical moving stage 523, and the diffractometer horizontal moving stage 522 of the three-dimensional adjustment stage 52. The surface of the sample 10 to be tested was made horizontal and positioned at the center of the incident X-ray 7 by repeatedly adjusting the first rotation drive 12 and the sample lifting adjustment 13. After the initial position of the sample 10 to be tested was adjusted, the first rotation drive 12 drove the sample stage 11 to rotate, thereby adjusting the angle between the surface of the sample 10 to be tested and the incident X-ray 7, i.e., precisely setting the grazing incidence angle required for the experiment. This allowed the second detector 3 to receive structural information at different depths on the surface of the sample 10 to obtain the sample's XAFS spectrum.

[0092] Meanwhile, while maintaining the same grazing incidence angle between the surface of the sample 10 to be tested and the incident X-ray 7, the second rotation drive 22 drives the first detector 21 to rotate, so that the first detector 21 can collect X-ray diffraction signals at different positions in space, thereby obtaining grazing incidence XRD diffraction rings.

[0093] Figures 4-6 The illustration schematically shows the grazing incidence XRD diffraction rings and grazing incidence XAFS spectra obtained using the experimental platform and its usage method provided in the embodiments of this application. These results include information on the long-range crystal structure and nearest-neighbor atomic structure of the sample. The sample is FAPbBr3 perovskite nanoparticles with a grazing incidence angle of 2.5°.

[0094] Although the present invention has been described in detail above with general descriptions, specific embodiments, and experiments, modifications or improvements can be made to it, which will be obvious to those skilled in the art. Therefore, all such modifications or improvements made without departing from the spirit of the present invention fall within the scope of protection claimed by the present invention.

Claims

1. A test platform, characterized by The test platform comprises: a sample bearing mechanism (1) for bearing a sample (10) to be tested; an X-ray light source (4) for emitting incident X-rays (7) capable of being emitted into the sample (10) to be tested; a first signal collecting mechanism (2) comprising a first detector (21), wherein the projections of the X-ray light source (4), the sample bearing mechanism (1) and the first detector (21) on a horizontal plane are sequentially arranged along a first direction, and the first detector (21) is used for receiving X-ray diffraction signals generated by the sample (10) to be tested; a second detector (3) arranged along a second direction with the sample bearing mechanism (1), wherein the first direction and the second direction form an angle, and the second detector (3) is used for receiving X-ray fluorescence signals generated by the sample (10) to be tested; The test platform further comprises a support mechanism (5), wherein the support mechanism (5) comprises: a rack (51), wherein the sample bearing mechanism (1), the first signal collecting mechanism (2) and the second detector (3) are arranged on the rack (51); a three-dimensional adjusting table (52), wherein the rack (51) is arranged on the three-dimensional adjusting table (52), the three-dimensional adjusting table (52) is used for adjusting the position of the rack (51) in the first direction and a vertical direction, and driving the rack (51) to rotate around the vertical direction.

2. The test platform of claim 1, wherein, The sample bearing mechanism (1) comprises: a sample table (11) for bearing the sample (10) to be tested; a first rotating driving member (12) connected with the sample table (11), wherein the first rotating driving member (12) is used for driving the sample table (11) to rotate, so as to adjust the angle between the incident X-rays (7) and the surface of the sample (10) to be tested.

3. The test platform of claim 2, wherein, The sample bearing mechanism (1) further comprises: a sample lifting adjusting member (13) connected with the sample table (11) and used for adjusting the height of the sample table (11).

4. Test platform according to claim 2 or 3, characterized in that The first signal collecting mechanism (2) further comprises: a second rotating driving member (22) connected with the first detector (21), wherein the second rotating driving member (22) is used for driving the first detector (21) to rotate, so as to enable the first detector (21) to collect X-ray diffraction signals at different positions in space.

5. The test platform of claim 4, wherein, The rotating axis of the first detector (21) is parallel to the second direction, and the rotating axis of the first detector (21) coincides with the rotating axis of the sample table (11).

6. The test platform of claim 4, wherein, The first signal collecting mechanism (2) further comprises: a connecting rack (23), wherein the second rotating driving member (22) and the first detector (21) are connected through the connecting rack (23).

7. The test platform of claim 4, wherein, The first signal collecting mechanism (2) further comprises: a counterweight (24) connected with the second rotating driving member (22), and the counterweight (24) and the first detector (21) are respectively located on the opposite sides of the output shaft of the second rotating driving member (22).

8. A method of using a test platform, characterized by, The use method comprises the following steps: Place the sample (10) to be tested on the sample bearing mechanism (1); The X-ray source (4) emits X-rays, and the first detector (21) receives the X-ray diffraction signal generated by the sample (10) to be tested. At the same time, the second detector (3) receives the X-ray fluorescence signal generated by the sample (10) to be tested.

9. The method of using a test platform of claim 8, wherein, The test platform further comprises a sample table (11) and a first rotary drive (12) connected to the sample table (11), and a second rotary drive (22) connected to the first detector (21); The use method further comprises: The first rotary drive (12) drives the sample table (11) to rotate, so as to adjust the included angle between the surface of the sample (10) to be tested and the incident X-rays (7); When the same included angle is maintained between the surface of the sample (10) to be tested and the incident X-rays (7), the second rotary drive (22) drives the first detector (21) to rotate, so that the first detector (21) collects X-ray diffraction signals at different positions in space.

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