An inspection device for the purification effect of a metal fluoride trap in an excimer laser

Abstract

The present invention provides a device for testing the purification effect of a metal fluoride trap of an excimer laser, which comprises a metal fluoride trap and a dust particle counter; an air inlet and an air outlet are arranged on the metal fluoride trap; the air inlet is connected to a gas source through an air inlet pipeline for inputting a test gas into the metal fluoride trap; the dust particle counter is connected to the air outlet of the metal fluoride trap through an exhaust pipeline for detecting the particulate matter content of the gas discharged from the metal fluoride trap. The present invention accurately detects the dust cleaning effect of the electric field for capturing particulate matter by using the dust particle counter, and by combining gas flow regulation and electric field strength regulation, the optimal working parameters of the metal fluoride trap of the excimer laser can be obtained, thereby improving the qualified rate of the metal fluoride trap of the excimer laser.

Description

Technical Field

[0001] The present invention relates to the field of laser technology, and particularly to a device for testing the purification effect of a metal fluoride trap of an excimer laser. Background Art

[0002] Currently, in the discharge chamber module of an excimer laser, a dust removal module is required. Since metal particles released during the discharge process react with F2 to form dust particles such as metal fluorides, which will contaminate the box body, a circulation fan is usually used to blow these particles towards a metal fluoride trap (MFT), and these dust particles are captured inside the metal fluoride trap by using a 5KV high-voltage electric field. The metal fluoride trap is generally a cylindrical shell, and a plurality of dust removal tubes arranged in parallel are provided inside the shell. The dust removal tubes adopt a tube-line structure: each dust removal tube is provided with a dust removal wire, a negative high voltage is applied to the dust removal wire, the dust removal tube is grounded, and a high-voltage electric field for capturing dust particles is formed between the dust removal tube and the dust removal wire. More charged dust drifts to the tube wall, thereby removing dust and purifying the gas, and then the purified gas is transported back to the discharge area, thereby preventing cavity contamination and extending the service life of the cavity.

[0003] However, the following technical problems currently exist:

[0004] 1) In actual use, it is difficult to detect or measure the actual dust removal and purification effect of the metal fluoride trap;

[0005] 2) Due to the inability to detect, the working parameters and performance of the metal fluoride trap cannot be adjusted according to the purification effect, so as to achieve a better purification effect. Summary of the Invention

[0006] The purpose of the present invention is to provide a device for testing the purification effect of a metal fluoride trap of an excimer laser to solve at least one of the above technical problems existing in the prior art.

[0007] To solve the above technical problems, a device for testing the purification effect of a metal fluoride trap of an excimer laser provided by the present invention includes: a metal fluoride trap, a dust particle counter, and a DC power supply;

[0008] An air inlet and an air outlet are provided on the metal fluoride trap;

[0009] The air inlet is connected to a gas source through an air inlet pipeline for inputting a test gas into the metal fluoride trap;

[0010] The DC power supply is electrically connected to the metal fluoride trap for forming a high-voltage electrostatic field for capturing dust particles;

[0011] The dust particle counter is connected to the exhaust port of the metal fluoride trap through an exhaust pipe, and is used to detect the particulate matter content of the gas discharged from the metal fluoride trap.

[0012] During the purification effect detection, the gas in the gas source is introduced into the metal fluoride trap, and by turning on / off or adjusting the electric field in the metal fluoride trap, the purification effect of the metal fluoride trap under different electric field environments can be compared, which is simple and effective.

[0013] Further, a first one-way valve for restricting the one-way passage of gas into the metal fluoride trap is provided on the intake pipe.

[0014] Further, the DC power supply includes a low-voltage DC power supply, a high-voltage conversion module, and a DC voltmeter. The high-voltage conversion module converts the DC low voltage provided by the low-voltage DC power supply into a DC high voltage of 0-10 kV and outputs a stable DC current.

[0015] Further, the metal fluoride trap includes a cylindrical housing. A plurality of dust removal tubes are arranged in parallel and side by side inside the housing, and dust removal wires are inserted into the dust removal tubes; the dust removal tubes are grounded, the dust removal wires are connected to the DC power supply, and a high-voltage electric field for capturing dust particles is formed between the dust removal tubes and the dust removal wires.

[0016] Further, a plurality of the dust removal tubes are connected in parallel. Similarly, a plurality of the dust removal wires are connected in parallel.

[0017] Further, in the axial direction, the intake port is provided in the middle of the metal fluoride trap, and the exhaust port includes a first exhaust port and a second exhaust port respectively provided at the left and right ends of the metal fluoride trap.

[0018] Further, in the axial direction, an air inlet is provided in the middle of the dust removal tube, and the air inlet is connected to the intake port on the housing through an internal intake pipe; air outlets are provided at the left and right ends of the dust removal tube, and the air outlets at the left and right ends are respectively connected to the exhaust ports at the left and right ends of the housing through internal exhaust pipes.

[0019] Further, in the axial direction, one end of the metal fluoride trap is provided with the intake port, and the other end is provided with the exhaust port.

[0020] Further, in the axial direction, one end of the dust removal tube is provided with an air inlet, and the air inlet is connected to the intake port on the housing through an internal intake pipe; the other end of the dust removal tube is provided with an air outlet, and the air outlet is connected to the exhaust port on the housing through an internal exhaust pipe.

[0021] Furthermore, the dust particle counter includes an air pump (generally a micro air pump) and a laser dust particle sensor module;

[0022] The dust particle counter includes a gas inlet and a gas outlet; the gas inlet of the dust particle counter is connected to the exhaust port of the metal fluoride trap through an exhaust pipeline;

[0023] The gas outlet of the dust particle counter is connected to the gas inlet of the gas source through a recovery pipeline.

[0024] The particle counter uses its own air pump to pump the gas from the metal fluoride trap into the sensing chamber of the laser particle sensor module. The laser particle sensor module converts the varying sizes of dust particles in the gas into light signals of varying strengths. These light signals are then converted into electrical signals of varying amplitudes for output. The detected gas is then transported back to the gas source through a recovery section.

[0025] Furthermore, it also includes a transition chamber, which is connected to the dust particle counter through a pipeline; the gas in the metal fluoride trap is input into the transition chamber through the exhaust port and the pipeline through the dust particle counter;

[0026] The gas in the transition chamber passes through a pipeline and is detected by a dust particle counter, and then optionally returns to the metal fluoride trap or the gas source.

[0027] By utilizing the transition chamber, the gas can be repeatedly transported back and forth between the transition chamber and the metal fluoride capture device, so that the same batch of gas can be tested multiple times, thereby greatly improving the accuracy of the detection. Compared with the dynamic, one-time measurements in the past, this application can effectively filter out accidental factors in the detection process and make the measurement more accurate.

[0028] Furthermore, the transition chamber is of cylinder type, and a piston plate is provided inside. The piston plate is slidably provided in the transition chamber to change the volume of the transition chamber.

[0029] Furthermore, during the test, the detection steps include:

[0030] S10. Turn off the power supply of the metal fluoride trap (i.e., the voltage value in the metal fluoride trap is zero), and input the test gas in the gas source into the metal fluoride trap until the gas pressure in the metal fluoride trap reaches the set working pressure value;

[0031] S20. The test gas in the metal fluoride trap is input into the transition chamber until the pressure in the metal fluoride trap reaches a set vacuum value, and the particle content of the test gas is detected using the dust particle counter;

[0032] S30. The test gas in the transition chamber is re-input into the metal fluoride capture device until the pressure in the transition chamber reaches the set vacuum value; turning on the power supply of the metal fluoride capture device and maintaining the voltage in the metal fluoride capture device at the set operating voltage;

[0033] S40. After the metal fluoride trap has worked for a set period of time, the power supply of the metal fluoride trap is turned off, and the purified test gas in the metal fluoride trap is re-input into the transition chamber until the air pressure in the metal fluoride trap reaches the set vacuum value, and the dust particle counter is used to detect the particulate matter content of the purified test gas.

[0034] Furthermore, in step S30, when the test gas in the transition chamber is re-input into the metal fluoride trap, the particle content of the test gas is detected again using the dust particle counter.

[0035] Furthermore, the method further comprises the following steps:

[0036] S50. When the purified test gas in the transition chamber is re-input into the metal fluoride trap, the particle content of the purified test gas is again detected using the dust particle counter until the air pressure in the transition chamber reaches the set vacuum value.

[0037] The working voltage and pressure values can be set according to the actual working voltage and pressure of the metal fluoride trap when the laser is working. For experimental purposes, the actual working voltage and pressure can be adjusted up and down. The vacuum value is preferably set to 10 -3 -10 -6 Pa.

[0038] Furthermore, step S20 also includes:

[0039] S21a. Before the test gas in the metal fluoride trap is input into the transition chamber, the air pressure in the transition chamber is set to a set vacuum value.

[0040] Furthermore, step S20 also includes:

[0041] S21b. Before inputting the test gas in the metal fluoride trap into the transition chamber, push the piston plate to the minimum limit position of the transition chamber volume (more preferably, push the piston plate to the position where the transition chamber volume is zero); as the test gas is input, the piston plate moves slowly and the transition chamber volume gradually increases.

[0042] By adopting the above technical solution, the present invention has the following beneficial effects:

[0043] The present invention provides a purification effect testing device for an excimer laser metal fluoride trap, which has a simple structure and uses a dust particle counter to accurately detect the dust cleaning effect of the metal fluoride trap in capturing particulate matter. In combination with gas flow regulation and electric field intensity regulation, the optimal operating parameters of the excimer laser metal fluoride trap can be obtained, thereby improving the qualification rate of the excimer laser metal fluoride trap. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the specific embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0045] Figure 1 A schematic diagram of a device for testing the purification effect of an excimer laser metal fluoride trap provided in Example 1 of the present invention;

[0046] Figure 2 Schematic diagram of the purification effect testing device for gas reflux gas source provided in Example 1 of the present invention;

[0047] Figure 3 This is a schematic diagram of the structure of the dust removal pipe arrangement in Example 1 of the present invention;

[0048] Figure 4 This is a schematic diagram of a purification effect testing device for an excimer laser metal fluoride trap provided in Example 2 of the present invention.

[0049] Reference numerals:

[0050] 10-metal fluoride trap; 11-air inlet; 12-exhaust port; 20-dust particle counter; 21-exhaust pipe; 22-first pipe; 23-second one-way valve; 30-dust removal pipe; 31-air inlet; 32-air outlet; 33-dust removal wire; 40-air source; 41-air inlet pipe; 42-first one-way valve; 43-control valve; 44-tee; 45-recovery pipe; 50-DC power supply; 60-transition chamber; 61-piston plate; 62-pump body. DETAILED DESCRIPTION

[0051] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0052] In the description of the present invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate and simplify the description of the present invention. They are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation, and therefore should not be construed as limitations on the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0053] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0054] The present invention will be further explained below with reference to specific embodiments.

[0055] Example 1

[0056] like Figure 1 As shown, this embodiment provides a device for testing the purification effect of a metal fluoride trap for an excimer laser, comprising: a metal fluoride trap 10, a dust particle counter 20, and a DC power supply 50; an air inlet 11 and an exhaust port 12 are provided on the metal fluoride trap 10; the air inlet 11 is connected to a gas source 40 through an air inlet pipe 41, for inputting a test gas into the metal fluoride trap 10; a first one-way valve 42 is provided on the air inlet pipe 41 for limiting the one-way passage of gas into the metal fluoride trap 10.

[0057] The dust particle counter 20 is connected to the exhaust port 12 of the metal fluoride trap 10 through an exhaust pipe 21 , and is used to detect the particulate matter content of the gas exhausted from the metal fluoride trap 10 .

[0058] The dust particle counter 20 includes an air pump (generally a micro air pump) and a laser dust particle sensor module; the dust particle counter 20 includes a gas inlet and a gas outlet; the gas inlet of the dust particle counter 20 is connected to the exhaust port 12 of the metal fluoride trap 10 through an exhaust pipe 21; in the above technical solution, further referring to Figure 2 As shown, the gas outlet of the dust particle counter 20 is connected to the gas inlet of the gas source 40 through the recovery pipeline 45.

[0059] The DC power supply 50 is a high-voltage DC voltage source, which includes a low-voltage DC power supply, a high-voltage conversion module and a DC voltmeter. The high-voltage conversion module converts the DC low voltage provided by the low-voltage DC power supply into a DC high voltage of 0-10 KV and outputs a stable DC current of about 1 mA. The DC power supply 50 is electrically connected to the metal fluoride trap 10 to form a high-voltage electrostatic field for trapping dust particles. For details, please refer to Figure 3 As shown, the metal fluoride trap 10 includes a cylindrical housing. Inside the housing, a plurality of dust removal tubes 30 are arranged in parallel side by side. Inside the dust removal tubes 30, dust removal wires 33 (electrodes arranged in the tube core) are inserted; the dust removal tubes 30 are grounded, and the dust removal wires 33 are connected to the high-voltage power supply 50. A high-voltage electrostatic field is formed between the dust removal tubes 30 and the dust removal wires 33 to ionize the dust particles in the metal fluoride trap 10. The charged dust particles float to the inner wall of the dust removal tube and are trapped. The DC current of about 1 mA here is calculated according to the resistivity of the ionized gas and the distance between the dust removal tube and the dust removal wire. When the ionized gas is air, the DC current is about 1 mA. When the ionized gas is other gases, the value of the DC current can be specifically calculated according to the resistivity of other gases. When detecting the purification effect, the ionization of the gas to be measured in the metal fluoride trap 10 can be quickly judged by observing the value of the DC voltage, improving the detection efficiency and reducing the test error.

[0060] The dust particle counter 20 uses its own air pump to pump the gas discharged from the metal fluoride trap 10 into the induction chamber of the laser dust particle sensor module. The laser dust particle sensor module converts the dust particles of different sizes in the gas into optical signals of different strengths, and then converts the optical signals of different strengths into electrical signals of different amplitudes for output. The gas after being detected is then transported back to the gas source 40 through the recovery section.

[0061] Among them, the gas source 40 can simulate the discharge chamber to input gas containing a large number of dust particles into the metal fluoride trap 10. When detecting the purification effect, the gas in the gas source 40 is introduced into the metal fluoride trap 10. First, the electric field in the metal fluoride trap 10 is turned off, and the dust particle counter 20 is used to detect the number of particulate matters in the gas that has not been treated by the high-voltage electrostatic field. Then, by turning on the electric field in the metal fluoride trap 10 and adjusting the electric field strength, the dust particle counter 20 is used again to detect the change in the number of particulate matters in the gas treated by the high-voltage electrostatic field and under different electric field strengths. Thus, the purification effects of the metal fluoride trap 10 under different electric field environments can be compared, which is simple and effective.

[0062] Refer to Figure 3As shown, multiple dust removal pipes 30 are arranged in parallel. Similarly, multiple dust removal wires 33 are arranged in parallel. In the axial direction, the air inlet 11 of the metal fluoride trap 10 is arranged in the middle of the metal fluoride trap 10, and the exhaust port 12 includes a first exhaust port and a second exhaust port respectively arranged at the left and right ends of the metal fluoride trap 10.

[0063] The structures are arranged correspondingly. In the axial direction, an air inlet 31 is provided in the middle of the dust removal pipe 30, and the air inlet 31 is connected to the air inlet 11 on the shell through an internal air inlet pipeline; air outlets 32 are provided at the left and right ends of the dust removal pipe 30, and the air outlets 32 at the left and right ends are respectively connected to the exhaust ports 12 at the left and right ends of the shell through internal air outlet pipelines.

[0064] The particle counter 20 is conventional, such as the GT-321 in this embodiment. Its standard sampling flow rate can be precisely set at 2.83 LPM, allowing it to measure the concentrations of particles with diameters of 0.3 μm, 0.5 μm, 1 μm, 2 μm, and 5 μm in the test gas. The GT-321's pumping operation can be used to simulate the flow rate within the MFT, thereby testing the MFT's purification effectiveness on the test gas.

[0065] Now take the detection gas as air as an example, the detection steps are as follows:

[0066] 1. Turn off the DC power supply 50 and use the dust particle counter 20 to measure the content of 0.3μm, 0.5μm, 1μm, 2μm and 5μm dust particles in the air passing through the MFT at a flow rate of 2.8L / min;

[0067] 2. Turn on the DC power supply and adjust the output voltage so that the DC current reaches 1mA. At this time, the air in the MFT is ionized.

[0068] 3. Use a dust particle counter 20 to measure the content of 0.3μm, 0.5μm, 1μm, 2μm and 5μm dust particles in the air passing through the MFT at a flow rate of 2.8L / min.

[0069] The following data were measured:

[0070] Table 1: MFT power off

[0071] Air1000mbar22℃

[0072]

[0073] Table 2: MFT power supply 0.97mA

[0074] Air1000mbar22℃

[0075]

[0076] Experimental results processing and analysis

[0077] Overall, the MFT after power-on reduced the number of dust particles of various sizes in the air by about two orders of magnitude.

[0078] According to the data records, the MFT dust removal rate is calculated as shown in the following table

[0079] Particle diameter (μm) Dust removal efficiency (%) 0.3 99.80435 0.5 100 1 100 2 100 5 100

[0080] It can be seen that MFT has a very high dust removal rate, and within the test range, the dust removal rate for large particles is higher than that for small particles.

[0081] in conclusion

[0082] 1. Under the given working conditions (current 1mA), the capture rate (dust removal rate) of the measured particles of MFT reaches more than 99%;

[0083] 2. Within the measured range, the larger the particle diameter, the higher the capture rate, and the capture rate of 0.5μm particles begins to reach 100%;

[0084] 3. It can be inferred that the capture rate is also higher for particles larger than 5μm.

[0085] The above experiment can also be performed using other gases as the test gas. The DC current value needs to be calculated based on the resistivity of the test gas and the distance between the dust removal tube and the dust removal wire. The power module is adjusted to make the output DC current reach the required value. The DC voltage value can be used to quickly determine whether the test gas is ionized.

[0086] The gas inlet and gas outlet of the dust particle counter 20 in this embodiment are both connected to the metal fluoride trap 10. The air pump carried by the dust particle counter 20 itself can be used to sample and detect the gas in the metal fluoride trap 10. This is convenient and simple, and sampling can be performed at any time without being affected by the working conditions in the metal fluoride trap 10. Sampling and processing can be performed before the exhaust gas enters the metal fluoride trap 10 and before the electric field treatment is performed, sampling and testing can be performed during the electric field treatment of the exhaust gas, and sampling and testing can be performed after the electric field treatment, etc., for real-time sampling and testing of the entire working process.

[0087] Example 2

[0088] The principles of this embodiment are basically the same as those of embodiment 1, except that:

[0089] like Figure 4As shown, the purification effect inspection device of the excimer laser metal fluoride trap of this embodiment also includes a transition chamber 60, which is connected to the dust particle counter 20 through a pipeline; the gas in the metal fluoride trap 10 is input into the transition chamber 60 after passing through the exhaust port 12 and the pipeline through the dust particle counter 20; the gas in the transition chamber 60 is detected by the dust particle counter 20 through the pipeline, and can be selectively returned to the metal fluoride trap 10 or the gas source 40.

[0090] Specifically, the gas inlet of the dust particle counter 20 is connected to the exhaust pipe 21 and the exhaust port 12 of the metal fluoride trap 10 through the first pipe 22; the first pipe 22 is provided with a three-way valve 44 and a second one-way valve 23 in sequence;

[0091] The third port of the tee 44 is connected to the inlet of the control valve 43 via a pipeline. The first outlet of the control valve 43 is connected to the gas source 40 via a recovery pipeline 45. The second outlet of the control valve 43 is connected to the gas inlet 11 of the metal fluoride trap 10 via a pipeline. When the metal fluoride trap 10 is outputting gas, the control valve 43 is closed, and the gas enters the transition chamber 60 through the dust particle counter 20. When the transition chamber 60 is output using the pump body 62, the control valve 43 is opened. By selecting the inlet of the control valve 43 to be connected to the first outlet or the second outlet, the gas can be selectively returned to the gas source or the metal fluoride trap 10.

[0092] By utilizing the transition chamber 60, the gas can be repeatedly transported back and forth between the transition chamber 60 and the metal fluoride capturer 10, so that the same batch of gas can be tested multiple times, thereby greatly improving the accuracy of the detection. Compared with the dynamic, one-time measurements in the past, the present application can effectively filter out accidental factors in the detection process and make the measurement more accurate.

[0093] More preferably, the transition chamber 60 is of cylinder type, and a piston plate 61 is provided inside. The piston plate 61 is slidably provided in the transition chamber 60 to change the volume of the transition chamber 60, so that the volume of the gas detected multiple times remains basically the same during the repeated reciprocating transportation of the gas between the transition chamber 60 and the metal fluoride capturer 10.

[0094] During testing, the detection steps include:

[0095] S10. Turn off the power supply of the metal fluoride capture device 10 and input the test gas within the gas source into the metal fluoride capture device 10 until the gas pressure within the metal fluoride capture device 10 reaches the set working pressure value;

[0096] S20. Input the test gas in the metal fluoride trap 10 into the transition chamber 60 until the air pressure in the metal fluoride trap 10 reaches the set vacuum value, and use the dust particle counter 20 to detect the particulate content of the test gas.

[0097] S30. Re - input the test gas in the transition chamber 60 into the metal fluoride trap 10 until the air pressure in the transition chamber 60 reaches the set vacuum value; meanwhile, use the dust particle counter 20 to detect the particulate content of the test gas again.

[0098] Turn on the power supply of the metal fluoride trap 10 and keep the voltage in the metal fluoride trap 10 at the set working voltage.

[0099] S40. After the metal fluoride trap 10 works for the set duration, turn off the power supply of the metal fluoride trap 10, re - input the purified test gas in the metal fluoride trap 10 into the transition chamber 60 until the air pressure in the metal fluoride trap 10 reaches the set vacuum value, and use the dust particle counter 20 to detect the particulate content of the purified test gas.

[0100] S50. When re - inputting the purified test gas in the transition chamber 60 into the metal fluoride trap 10, use the dust particle counter 20 to detect the particulate content of the purified test gas again until the air pressure in the transition chamber 60 reaches the set vacuum value.

[0101] Among them, the set working voltage and the set working pressure value can be set according to the actual working voltage and air pressure of the metal fluoride trap 10 when the laser works, and can also be set with an up - and - down floating on the basis of the actual working voltage and air pressure for experimental purposes. The set vacuum value is preferably 10 -3 -10 -6 Pa.

[0102] More preferably, step S20 further includes:

[0103] S21a. Before inputting the test gas in the metal fluoride trap 10 into the transition chamber 60, the air pressure in the transition chamber 60 is the set vacuum value.

[0104] Or, before inputting the test gas in the metal fluoride trap 10 into the transition chamber 60, push the piston plate 61 to the minimum limit position of the volume of the transition chamber 60 (more preferably push the piston plate 61 to the position where the volume of the transition chamber 60 is zero); as the test gas is input, the piston plate 61 moves slowly and the volume of the transition chamber 60 gradually increases.

[0105] By repeatedly detecting the same test gas, multiple detection values can be obtained, which can effectively eliminate the numerical detection errors caused by accidental factors.

[0106] The purification effect inspection device for the metal fluoride trap of the excimer laser provided by the present invention has a simple structure and can accurately detect the dust removal effect of the metal fluoride trap. Different voltage and current values can be selected through experimental design, and the best working parameters of the metal fluoride trap of the excimer laser can be determined by comparing the dust removal effects of the metal fluoride traps of the excimer laser through the above device.

[0107] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. An inspection device for the purification effect of a metal fluoride trap in an excimer laser, characterized in that, include: A metal fluoride trap (10), a dust particle counter (20), and a DC power supply (50); The metal fluoride trap (10) is provided with an air inlet (11) and an air outlet (12); The air inlet (11) is connected to the air source (40) via an air inlet pipeline (41) and is used to input the test gas into the metal fluoride trap (10); The DC power supply (50) is electrically connected to the metal fluoride collector (10) to form a high-voltage electrostatic field for capturing dust particles; The dust particle counter (20) is connected to the exhaust port (12) of the metal fluoride trap (10) via an exhaust pipe (21) and is used to detect the particulate matter content of the exhaust gas from the metal fluoride trap (10); It also includes a transition chamber (60), which is connected to the dust particle counter (20) through a pipeline; the gas in the metal fluoride trap (10) is input into the transition chamber (60) through the exhaust port (12) and the pipeline through the dust particle counter (20); The gas in the transition chamber (60) is detected by the dust particle counter (20) through the pipeline and then optionally returned to the metal fluoride trap (10) or the gas source (40).

2. The device for testing the purification effect of the metal fluoride trap of the excimer laser according to claim 1, wherein The air inlet pipeline (41) is provided with a first one-way valve (42) for limiting the one-way flow of gas into the metal fluoride trap (10).

3. The purifying effect inspection device for the metal fluoride trap of the excimer laser according to claim 1, characterized in that: The DC power supply (50) comprises a low-voltage DC power supply, a high-voltage conversion module and a DC voltmeter. The high-voltage conversion module converts the DC low voltage provided by the low-voltage DC power supply into a DC high voltage of 0-10KV and outputs a stable DC current.

4. The excimer laser metal fluoride trap purification effect inspection device according to claim 1, characterized in that, The dust particle counter (20) comprises an air pump and a laser dust particle sensor module; The dust particle counter (20) comprises a gas inlet and a gas outlet; the gas inlet of the dust particle counter (20) is connected to the exhaust port (12) of the metal fluoride trap (10) via an exhaust pipe (21); The gas outlet of the dust particle counter (20) is connected to the gas inlet of the gas source (40) through a recovery pipeline (45).

5. The device for testing the purification effect of an excimer laser metal fluoride trap according to claim 1, characterized in that: During testing, the detection steps include: S10. Turn off the power supply of the metal fluoride trap (10), and input the test gas in the gas source (40) into the metal fluoride trap (10) until the gas pressure in the metal fluoride trap (10) reaches the set working pressure value; S20. The test gas in the metal fluoride trap (10) is input into the transition chamber (60) until the gas pressure in the metal fluoride trap (10) reaches a set vacuum value, and the particle content of the test gas is detected by using the dust particle counter (20); S30. Re-inputting the test gas in the transition chamber (60) into the metal fluoride trap (10) until the gas pressure in the transition chamber (60) reaches a set vacuum value; turning on the power supply of the metal fluoride trap (10), and maintaining the voltage in the metal fluoride trap (10) at the set working voltage; After the metal fluoride trap (10) has operated for the set duration, turn off the power supply of the metal fluoride trap (10), and re-introduce the purified test gas inside the metal fluoride trap (10) into the transition chamber (60) until the air pressure inside the metal fluoride trap (10) reaches the set vacuum value, and use the dust particle counter (20) to detect the particulate matter content of the purified test gas.

6. The excimer laser metal fluoride trap purification effect inspection device according to claim 5, characterized in that, In step S30, when re-introducing the test gas inside the transition chamber (60) into the metal fluoride trap (10), use the dust particle counter (20) to detect the particulate matter content of the test gas again.

7. The purification effect inspection device for an excimer laser metal fluoride trap according to claim 5, characterized in that: It further includes the following steps: S50. When re-introducing the purified test gas inside the transition chamber (60) into the metal fluoride trap (10), use the dust particle counter (20) to detect the particulate matter content of the purified test gas again until the air pressure inside the transition chamber (60) reaches the set vacuum value.

8. The excimer laser metal fluoride trap purification effect inspection device according to claim 5, characterized in that, Step S20 further includes: S21a. Before introducing the test gas inside the metal fluoride trap (10) into the transition chamber (60), the air pressure inside the transition chamber (60) is the set vacuum value.

9. The device for testing the purification effect of an excimer laser metal fluoride trap according to claim 5, characterized in that: The transition chamber (60) is of the cylinder type, and is internally provided with a piston plate (61). The piston plate (61) is slidably arranged inside the transition chamber (60) and is used to change the volume of the transition chamber (60); step S20 further includes: S21b. Before introducing the test gas inside the metal fluoride trap (10) into the transition chamber (60), push the piston plate (61) to the minimum limit position of the volume of the transition chamber (60); as the test gas is introduced, the piston plate (61) moves slowly, and the volume of the transition chamber (60) gradually increases.

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