A device for detecting thermal cycle performance of a ceramic substrate

Abstract

The application discloses a kind of equipment for ceramic substrate thermal cycle performance detection, belong to ceramic substrate performance detection field.It includes detection unit and adjusting unit, the side end surface of detection unit is through being provided with adjusting unit.High-temperature gas touch low-temperature solid and form water drop in the inner cavity of detection box and form a liquid level, high-temperature gas in detection box continues to heat the temperature of its internal space, and the liquid level formed under the high-temperature heating of the inner cavity of detection box evaporates quickly, the temperature of the bottom end surface surface of detection box reduces after the evaporation of liquid level, the shunt plate for placing ceramic substrate separates the inner cavity of entire detection box into two relatively independent spaces, the temperature above shunt plate is higher than the temperature below shunt plate, when there is temperature difference in a relatively closed space, gas exchange circulation is generated, so that ceramic substrate needing thermal cycle performance treatment is in a cold and hot alternating space.

Description

Technical Field

[0001] This invention relates to the field of ceramic substrate performance testing, and more specifically, to a device for testing the thermal cycling performance of ceramic substrates. Background Technology

[0002] Ceramic substrates are special process boards where copper foil is directly bonded to the surface (single-sided or double-sided) of alumina (Al2O3) or aluminum nitride (AlN) ceramic substrates at high temperatures. The resulting ultra-thin composite substrates possess excellent electrical insulation properties, high thermal conductivity, excellent solderability, and high adhesion strength. Like PCB boards, they can be etched with various patterns and have a large current-carrying capacity. Therefore, ceramic substrates have become a fundamental material for high-power power electronic circuit structure and interconnection technologies. Thermal cycling performance testing is an indispensable part of the performance testing of ceramic substrates, requiring the ceramic substrate to be placed in a test chamber that simulates different temperature environments.

[0003] Patent No. CN202210605752.5 discloses a semiconductor power device reliability testing box and testing method, including a box body, in which a power device reliability adapter board, a heating system, and a control system are arranged; the power device reliability adapter board includes several power device holders, which are respectively connected to a reliability testing power supply; the heating system provides the required testing temperature; the control system controls the temperature change of the heating system, as well as the switching on and off of the power supply of each power device and the real-time monitoring of leakage current; when the leakage current of a power device exceeds the standard, the control system cuts off the power supply of the power device with the excessive leakage current and displays the power device holder code.

[0004] This patent can monitor the leakage current changes of semiconductor power devices in real time and determine the reliability of semiconductor power devices by applying a reliability detection voltage to the semiconductor power device during temperature change cycles; however, it still cannot simulate different temperature environments in the device. Summary of the Invention

[0005] Technical problems to be solved

[0006] The purpose of this invention is to provide a device for testing the thermal cycling performance of ceramic substrates, so as to solve the problems mentioned in the background art.

[0007] Technical solution

[0008] A device for testing the thermal cycling performance of ceramic substrates includes a testing unit and an adjustment unit. The adjustment unit is disposed through the side end face of the testing unit. The adjustment unit includes a fixing mechanism and an adjustment mechanism that is snapped onto the side end face of the fixing mechanism. The fixing mechanism and the adjustment mechanism are interconnected by a heat pipe. The front ends of multiple sets of adjustment mechanisms are connected in series by a receiving plate. The receiving plate is inserted laterally into the inner cavity of the testing unit from one side.

[0009] Preferably, the fixing mechanism includes a carrier and a mating hole through the side end face of the carrier. The top of the carrier is connected to a series mating block, and the side end face of the series mating block is provided with a through insertion hole. The bottom of the carrier extends forward to provide an inner buckle block. Both sides of the rear end face of the inner buckle block are provided with mating cavities. The operator can bring the outer end face of the entire carrier close to the edge of a solid, and the bottom end faces of the test box and the inner buckle block are both in contact with the flat workbench. A fixed horizontal strip is preset on the workbench, and the fixed horizontal strip is matched with the inner cavity of the mating cavity, so that the entire device is fixedly placed, avoiding the situation where the entire device is displaced due to external force when the ceramic substrate is subjected to thermal cycling test.

[0010] Preferably, the adjustment mechanism includes an internal fixing triangular member and an elastic block disposed on the side end face of the internal fixing triangular member. The other end of the elastic block is movably connected to the pressing vertical bar frame. The internal fixing triangular member, the elastic block and the pressing vertical bar frame form an N-shaped combined component. The bottom of the outer foot of the internal fixing triangular member is inserted into the gap between the bearing member and the inner buckle block.

[0011] Preferably, the adjustment mechanism further includes a connecting trigger, which is inserted through the inner cavity of the inner fixed triangular piece and the pressing vertical bar frame. The connecting trigger includes an inserting vertical cylinder and a connecting horizontal tube that is horizontally disposed at the bottom of the inserting vertical cylinder. A connecting rod is inserted through the inner cavity of the top of the inserting vertical cylinder. A pressing clamp is provided at the top of the connecting rod. Working liquid is pre-filled into the inner cavity of the liquid-absorbing core ring tube. When it is necessary to change the temperature of the inner cavity of the detection box, the operator removes the heat insulation tube, exposing the liquid-absorbing core ring tube to the external environment. The temperature of the inner cavity of the detection box enters the inner cavity of the mating vertical bar through the connecting hole. Because the connecting horizontal tube is from the rear... The end face is horizontally inserted into the inner cavity of the vertical bar. High-temperature gas can enter the inner cavity of the vertical tube through the connecting horizontal tube and continue to rise to the inner cavity of the series rod. The high-temperature gas impacts the bottom end of the heat absorption tube. When the bottom end face of the heat absorption tube is impacted by the high-temperature gas, the working liquid inside the heat absorption tube evaporates into gas. After passing through the insulating tube, it enters the heat dissipation tube. The gas accumulates in the liquid absorption core ring tube in the heat dissipation tube section. At this time, because the outside temperature of the device is greater than the temperature inside the detection box, the gas condenses into liquid and flows back to the bottom end of the liquid absorption core ring tube under the action of gravity. This cycle repeats, so that the temperature inside the series rod can always be kept at a low temperature.

[0012] Preferably, the bottom of the inserting vertical tube passes through the inner cavity of the inner fixing triangle, the connecting horizontal tube passes laterally through the inner cavity of the inner fixing triangle and the pressing vertical frame, and the connecting horizontal tube does not fit against the inner cavity wall of the inner fixing triangle and the pressing vertical frame. The end of the connecting horizontal tube away from the inserting vertical tube passes through the inner cavity of the mating hole and protrudes. The bottom of the inserting vertical tube is inserted into the inner cavity of the inner fixing triangle and fits against the two side walls of the inner cavity wall of the inner fixing triangle.

[0013] Preferably, the pressing clamping member includes a connecting plate and a through hole on the surface of the connecting plate. Both ends of the connecting plate are provided with elastic rings, and the other ends of the two sets of elastic rings are respectively provided with contact blocks. The outer end faces of the elastic rings are in contact with the inner end faces of the inserted fixing triangular member and the pressing vertical bar frame. When the high-temperature gas touches the low-temperature connecting rod, water droplets form on the bottom end face of the heat absorption tube. The water droplets remain temporarily on their bottom end face. An external motor pushes the rear end face of the carrier member inward, causing the inserted fixing triangular member connected to one side to move in the same direction. When the rear end face of the inserted fixing triangular member is impacted, the bottom of the front end face of the inserted fixing triangular member deflects at an angle between the elastic block and the pressing vertical bar frame, causing the inserted fixing triangular member to use the elastic block as a fulcrum. Push the pressing vertical bar frame forward to reduce the angular deviation between the inner fixed triangular piece and the pressing vertical bar frame; at this time, the outer end faces of the two sets of elastic rings are at the interval between the inner fixed triangular piece and the pressing vertical bar frame, and the outer end faces of the elastic rings are in contact with the inner end faces of the inner fixed triangular piece and the pressing vertical bar frame. When the inner fixed triangular piece and the pressing vertical bar frame clamp inward, the two sets of elastic rings clamp inward with the connecting plate as the fulcrum, so that the inner end faces of the two sets of contact blocks are in contact with the outer surface of the heat pipe. After clamping the outer surface of the heat pipe, the external motor stops pushing, thus forming a clamping and releasing operation step. Repeat the above steps, and the water droplets formed on the bottom end face of the heat absorber fall downward into the inner cavity of the penetrating vertical cylinder after the clamping and releasing operation, and then enter the inner cavity of the lower connecting hole through the connecting horizontal pipe.

[0014] Preferably, the connecting rod is inserted through the inner cavity of the through hole, and the heat pipe is inserted into the inner cavity of the through hole from top to bottom at an angle, so that the inner cavity of the heat pipe is connected to the inner cavity of the connecting rod. The other end of the heat pipe is inserted through the inner cavity of the through hole, so that the fixing mechanism, the adjusting mechanism and the heat pipe become a whole.

[0015] Preferably, the heat pipe includes a heat-absorbing tube and an insulating tube connected to one end of the heat-absorbing tube. A heat-dissipating tube is installed inside the other end of the insulating tube. A liquid-absorbing core ring tube is installed through the inner cavities of the heat-absorbing tube, the insulating tube, and the heat-dissipating tube. A heat-insulating tube is installed through the other end of the heat-dissipating tube. The inner cavity of the heat-absorbing tube inserted into the through hole is connected in series with the inner cavity of the series rod. The heat-dissipating tube is inserted into the inner cavity of the through hole. The heat-insulating tube is sleeved on the outer ring of the heat-dissipating tube that protrudes from the top of the series mating block. When the operator does not need to change the temperature inside the test chamber, the removed heat-insulating tube is put back on the upper end of the heat-dissipating tube, so that the working liquid inside the liquid-absorbing core ring tube is not affected by the external temperature. This allows the working liquid to remain in a gaseous state after heating and circulate in the inner cavity of the liquid-absorbing core ring tube, keeping the inner cavity of the test chamber in a heated state.

[0016] Preferably, the front end face of the elastic block is in contact with the rear end face of the receiving plate. The receiving plate includes an insertion plate and mating vertical bars arranged on the front end face of the insertion plate. Both ends of the mating vertical bars are provided with through holes. The front end of the connecting horizontal tube is inserted through the inner cavity of the lower through hole. The upper through hole is not connected to the fixing mechanism, the adjusting mechanism, or the heat pipe.

[0017] Preferably, the outer end face of the insertion plate is fitted to the inner cavity of the detection unit. The detection unit includes a detection box and series cavities opened at both ends of the detection box. The edge wall of the detection box is blocked by a barrier plate. A permeable cavity is opened on the side end face of the detection box. A flow divider is vertically arranged on the side end face of the barrier plate. The other end of the flow divider is vertically arranged on the side end face of the mating vertical bar. A heat dissipation cavity is arranged at the bottom of the detection box. The outer end face of the insertion plate is fitted to the inner cavity wall of the permeable cavity. An observation window is installed in the inner cavity of the series cavity. Because the detection box is designed as a horizontally placed, concave structure, a temperature monitoring instrument is placed at the bottom of the detection box. Through the heat dissipation cavity opened at the bottom of the detection box, a gas leakage device is used to allow the gas inside the detection box to leak out, thereby enabling real-time monitoring of the temperature inside the detection box.

[0018] The ceramic substrate that needs to be tested for thermal cycling performance is inserted laterally into the inner cavity of the series chamber. The ceramic substrate is supported by the flow divider, and the inner cavity environment of the test chamber is heated to a certain temperature by the external heating equipment.

[0019] When high-temperature gas comes into contact with water droplets formed by low-temperature solids, a liquid surface forms inside the testing chamber. The high-temperature gas in the testing chamber continuously heats the internal space, causing the liquid surface to evaporate rapidly. After evaporation, the temperature of the bottom surface of the testing chamber decreases. At this point, the flow divider used to place the ceramic substrate separates the entire testing chamber into two relatively independent spaces. The temperature above the flow divider is higher than the temperature below it. When there is a temperature difference in a relatively enclosed space, gas exchange occurs, placing the ceramic substrate, which requires thermal cycling performance treatment, in an alternating hot and cold space. Data from the ceramic substrate is read at different temperatures within the testing chamber to test its performance under different environments and temperatures.

[0020] Beneficial effects

[0021] Compared with the prior art, the advantages of this invention are:

[0022] 1. Insert the ceramic substrate that needs to be tested for thermal cycling performance laterally into the inner cavity of the series chamber. Support the ceramic substrate with a flow divider and heat the inner cavity environment of the test chamber to a certain temperature with an external heating device.

[0023] 2. Through the special structure of the heat pipe, the gas inside the pipe is condensed into liquid and flows back to the bottom of the wicking ring under the action of gravity. This cycle repeats, so that the temperature inside the series rod can always be kept at a low temperature.

[0024] 3. After clamping the outer surface of the heat pipe, the external motor stops advancing, thus forming a clamping and releasing operation step. Repeat the above steps. After the clamping and releasing operation, the water droplets formed on the bottom end of the heat absorption pipe fall downward into the inner cavity of the vertical tube and then enter the inner cavity of the connecting hole below through the connecting horizontal tube.

[0025] 4. When high-temperature gas comes into contact with low-temperature solids, water droplets form a liquid surface inside the testing chamber. The high-temperature gas in the testing chamber continuously heats the internal space, causing the liquid surface to evaporate rapidly under the high temperature heating inside the testing chamber. After evaporation, the temperature of the bottom surface of the testing chamber decreases. At this point, the flow divider used to place the ceramic substrate divides the entire testing chamber into two relatively independent spaces. The temperature above the flow divider is higher than the temperature below the flow divider. When there is a temperature difference in a relatively sealed space, gas exchange and circulation will occur, thus placing the ceramic substrate that needs to undergo thermal cycling performance treatment in a space of alternating hot and cold temperatures.

[0026] 5. A heat dissipation chamber is provided at the bottom of the testing chamber to allow gas to escape from the chamber, thus enabling real-time monitoring of the temperature inside the testing chamber.

[0027] 6. When the staff does not need to change the temperature inside the test chamber, the removed insulation tube is put back on the upper end of the heat dissipation tube to prevent the working liquid inside the suction core ring tube from being affected by the external temperature. This allows the working liquid to remain in a gaseous state after heating and circulate in the inner cavity of the suction core ring tube, keeping the inner cavity of the test chamber in a heated state.

[0028] 7. The operator can bring the outer end face of the overall carrier close to the edge of a solid, and the bottom end faces of the test box and the inner buckle block should be in contact with the flat workbench. A fixed crossbar is preset on the workbench, and the fixed crossbar is matched with the inner cavity of the mating cavity, so that the overall device is fixedly placed, and the overall device is prevented from being touched by external force during the thermal cycling test of the ceramic substrate, which would cause the overall device to shift. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of the overall structure of a device for testing the thermal cycling performance of ceramic substrates according to the present invention;

[0030] Figure 2 This is a schematic diagram of the testing unit structure of a ceramic substrate thermal cycling performance testing device according to the present invention;

[0031] Figure 3 This is a schematic diagram of a receiving plate structure for a ceramic substrate thermal cycling performance testing device according to the present invention.

[0032] Figure 4 This is a schematic diagram of the adjustment unit structure of a ceramic substrate thermal cycling performance testing device according to the present invention;

[0033] Figure 5 This is a schematic diagram of the fixing mechanism, adjustment mechanism, and heat pipe cooperation of a ceramic substrate thermal cycling performance testing equipment according to the present invention;

[0034] Figure 6 This is a schematic diagram of a fixing mechanism for a ceramic substrate thermal cycling performance testing device according to the present invention.

[0035] Figure 7 This is a schematic diagram of the adjustment mechanism structure of a ceramic substrate thermal cycling performance testing device according to the present invention;

[0036] Figure 8 This is a schematic diagram of a connection trigger structure for a ceramic substrate thermal cycling performance testing device according to the present invention;

[0037] Figure 9 This is a schematic diagram of a pressing clamp structure for a ceramic substrate thermal cycling performance testing device according to the present invention;

[0038] Figure 10This is a schematic diagram of a heat pipe structure for a ceramic substrate thermal cycling performance testing device according to the present invention.

[0039] The diagram is labeled as follows: 1. Detection unit; 11. Detection box; 12. Series cavity; 13. Baffle plate; 14. Through cavity; 15. Diverter plate; 16. Heat dissipation cavity; 17. Observation window; 2. Adjustment unit; 21. Fixing mechanism; 211. Bearing component; 212. Mating hole; 213. Series mating block; 214. Through insertion hole; 215. Inner buckle block; 216. Mating cavity; 22. Adjustment mechanism; 221. Inner insertion fixing triangular piece; 222. Elastic block; 223. Pressing vertical bar frame; 224. 2241. Connecting trigger element; 2242. Inserting vertical tube; 2243. Connecting horizontal tube; 2244. Connecting rod; 2244. Pressing clamping element; 22441. Connecting plate; 22442. Through hole; 22443. Elastic ring; 22444. Adhesive block; 23. Heat pipe; 231. Heat absorption pipe; 232. Insulating pipe; 233. Heat dissipation pipe; 234. Liquid absorption core ring pipe; 235. Thermal insulation pipe; 24. Receiving plate; 241. Insertion plate; 242. Matching vertical bar; 243. Connecting hole. Detailed Implementation

[0040] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0041] In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0042] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installed," "equipped with," "sleeved / connected," "connected," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0043] Please see Figure 1-10 The present invention provides a technical solution:

[0044] Example 1

[0045] A device for testing the thermal cycling performance of ceramic substrates includes a testing unit 1 and an adjustment unit 2. The adjustment unit 2 is disposed through the side end face of the testing unit 1. The adjustment unit 2 includes a fixing mechanism 21 and an adjustment mechanism 22 that is snapped onto the side end face of the fixing mechanism 21. The fixing mechanism 21 and the adjustment mechanism 22 are interconnected by a heat pipe 23. The front ends of multiple sets of adjustment mechanisms 22 are connected in series by a receiving plate 24. The receiving plate 24 is inserted laterally into the cavity of the testing unit 1 from one side.

[0046] The fixing mechanism 21 includes a carrier 211 and a mating hole 212 that passes through the side end face of the carrier 211. The top of the carrier 211 is connected to a series mating block 213. The side end face of the series mating block 213 is provided with a through insertion hole 214. The bottom of the carrier 211 extends forward to provide an inner buckle 215. Both sides of the rear end face of the inner buckle 215 are provided with mating cavities 216. The operator can bring the outer end face of the entire carrier 211 close to the edge of a solid, and the bottom end faces of the test box 11 and the inner buckle 215 are both in contact with the flat workbench. A fixed horizontal bar is preset on the workbench and is fitted with the inner cavity of the mating cavity 216 to fix the entire device in place, so as to prevent the entire device from shifting due to external force when it is touched during thermal cycling test of the ceramic substrate.

[0047] Example 2

[0048] The adjustment mechanism 22 includes an inner-insertion fixing triangle 221 and an elastic block 222 disposed on the side end face of the inner-insertion fixing triangle 221. The other end of the elastic block 222 is movably connected to the pressing vertical bar frame 223. The inner-insertion fixing triangle 221, the elastic block 222 and the pressing vertical bar frame 223 form an N-shaped combination component. The bottom of the outer foot of the inner-insertion fixing triangle 221 is inserted into the gap between the bearing member 211 and the inner buckle block 215.

[0049] The adjustment mechanism 22 also includes a connecting trigger 224, which is inserted through the inner cavity of the inner fixed triangular piece 221 and the pressing vertical bar frame 223. The connecting trigger 224 includes a penetrating vertical cylinder 2241 and a connecting horizontal tube 2242 that is horizontally disposed at the bottom of the penetrating vertical cylinder 2241. A connecting rod 2243 is inserted through the inner cavity of the top of the penetrating vertical cylinder 2241. A pressing clamp 2244 is provided at the top of the connecting rod 2243. Working liquid is pre-filled into the inner cavity of the liquid suction core ring tube 234. When it is necessary to change the temperature of the inner cavity of the detection box 11, the operator removes the heat insulation tube 235, exposing the liquid suction core ring tube 234 to the external environment. The temperature of the inner cavity of the detection box 11 enters the inner cavity of the mating vertical bar 242 through the connecting hole 243. 42 is inserted horizontally into the inner cavity of the vertical bar 242 from the rear end face. High-temperature gas can enter the inner cavity of the vertical tube 2241 through the connecting horizontal tube 2242 and continue to climb upward to the inner cavity of the series rod 2243. The high-temperature gas impacts the bottom end of the heat absorption tube 231. When the bottom end face of the heat absorption tube 231 is impacted by the high-temperature gas, the working liquid in the heat absorption tube 231 evaporates into gas. It passes through the insulating tube 232 and then enters the heat dissipation tube 233. The gas accumulates in the liquid absorption core ring tube 234 in the heat dissipation tube 233 section. At this time, because the external temperature of the device is greater than the temperature inside the detection box 11, the gas condenses into liquid and flows back to the bottom end of the liquid absorption core ring tube 234 under the action of gravity. This cycle repeats, so that the temperature inside the series rod 2243 can always be kept at a low temperature.

[0050] Example 3

[0051] The bottom of the inserting vertical tube 2241 passes through the inner cavity of the inner fixing triangular piece 221. The connecting horizontal tube 2242 passes laterally through the inner cavity of the inner fixing triangular piece 221 and the pressing vertical bar frame 223. The connecting horizontal tube 2242 does not fit against the inner cavity wall of the inner fixing triangular piece 221 and the pressing vertical bar frame 223. The end of the connecting horizontal tube 2242 away from the inserting vertical tube 2241 passes through the inner cavity of the mating hole 212 and protrudes. The bottom of the inserting vertical tube 2241 is inserted into the inner cavity of the inner fixing triangular piece 221 and fits against the two side walls of the inner cavity of the inner fixing triangular piece 221.

[0052] The pressing clamp 2244 includes a connecting plate 22441 and a through hole 22442 on the surface of the connecting plate 22441. Both ends of the connecting plate 22441 are provided with elastic rings 22443. The other ends of the two sets of elastic rings 22443 are respectively provided with contact blocks 22444. The outer end faces of the elastic rings 22443 are respectively attached to the inner end faces of the internally inserted fixing triangular member 221 and the pressing vertical bar frame 223. When the high-temperature gas touches the low-temperature connecting rod 2243, it absorbs heat... Water droplets form on the bottom surface of pipe 231 and remain there temporarily. An external motor pushes the rear end of the support member 211 inward, causing the internally inserted fixed triangular member 221 connected to it to move in the same direction. When the rear end of the internally inserted fixed triangular member 221 is impacted, the bottom of the front end of the internally inserted fixed triangular member 221 is deflected at an angle by the elastic block 222 and the pressing vertical bar frame 223, causing the internally inserted fixed triangular member 221 to be supported by the elastic block 222. Pushing the vertical bar frame 223 forward reduces the angular deviation between the inner fixing triangular piece 221 and the vertical bar frame 223. Since the outer end faces of the two sets of elastic rings 22443 are positioned between the inner fixing triangular piece 221 and the vertical bar frame 223, and the outer end faces of the elastic rings 22443 are in contact with the inner end faces of the inner fixing triangular piece 221 and the vertical bar frame 223, when the inner fixing triangular piece 221 and the vertical bar frame 223 clamp inward, the two sets of elastic rings 22443... 2443 clamps inward with the connecting plate 22441 as the fulcrum, so that the inner end faces of the two sets of bonding blocks 22444 are attached to the outer surface of the heat pipe 23. After clamping the outer surface of the heat pipe 23, the external motor stops pushing, thus forming a clamping and releasing operation step. Repeat the above steps, and the water droplets formed on the bottom end face of the heat absorption pipe 231 fall downward into the inner cavity of the vertical tube 2241 after the clamping and releasing operation, and then enter the inner cavity of the lower connecting hole 243 through the connecting horizontal tube 2242.

[0053] Example 4

[0054] The connecting rod 2243 is inserted through the inner cavity of the through hole 22442, and the heat pipe 23 is inserted into the inner cavity of the through hole 22442 from top to bottom, so that the inner cavity of the heat pipe 23 is connected to the inner cavity of the connecting rod 2243. The other end of the heat pipe 23 is inserted through the inner cavity of the through hole 214, so that the fixing mechanism 21, the adjusting mechanism 22 and the heat pipe 23 become a whole.

[0055] The heat pipe 23 includes a heat-absorbing pipe 231 and an insulating pipe 232 connected to one end of the heat-absorbing pipe 231. A heat-dissipating pipe 233 is inserted into the inner cavity of the other end of the insulating pipe 232. A liquid-absorbing core ring tube 234 is installed through the inner cavities of the heat-absorbing pipe 231, the insulating pipe 232, and the heat-dissipating pipe 233. A heat-insulating tube 235 is installed through the other end of the heat-dissipating pipe 233. The inner cavity of the heat-absorbing pipe 231 is inserted into the through hole 22442 and connected in series with the inner cavity of the series rod 2243. The heat-dissipating pipe 233 is inserted into the through hole 214. The inner cavity is insulated with a heat-insulating tube 235, which is sleeved on the outer ring of the heat dissipation tube 233 that passes through the top of the protruding series mating block 213. When the operator does not need to change the temperature inside the test chamber 11, the removed heat-insulating tube 235 is put back on the upper end of the heat dissipation tube 233, so that the working liquid in the liquid suction core ring tube 234 is not affected by the external temperature. This allows the working liquid to remain in a gaseous state after heating and circulate in the inner cavity of the liquid suction core ring tube 234, so that the inner cavity of the test chamber 11 is in a heated state.

[0056] Example 5

[0057] The front end face of the elastic block 222 is in contact with the rear end face of the receiving plate 24. The receiving plate 24 includes an insertion plate 241 and a mating vertical bar 242 arranged on the front end face of the insertion plate 241. Both the upper and lower ends of the side end face of the mating vertical bar 242 are provided with a through hole 243. The front end of the connecting horizontal tube 2242 is inserted through the cavity of the lower through hole 243. The upper through hole 243 is not connected to the fixing mechanism 21, the adjusting mechanism 22 and the heat pipe 23.

[0058] The outer end face of the insertion plate 241 is attached to the inner cavity of the detection unit 1. The detection unit 1 includes a detection box 11 and a series cavity 12 opened on both ends of the detection box 11. The edge wall of the detection box 11 is blocked by the barrier plate 13. A through cavity 14 is opened on the side end face of the detection box 11. A diverter plate 15 is vertically arranged on the side end face of the barrier plate 13. The other end of the diverter plate 15 is vertically arranged on the side end face of the mating vertical bar 242. A heat dissipation cavity 16 is arranged at the bottom of the detection box 11. The outer end face of the insertion plate 241 is attached to the inner cavity wall of the through cavity 14. An observation window 17 is installed in the inner cavity of the series cavity 12. Because the detection box 11 is set as a horizontally placed concave structure, a temperature monitor is placed at the bottom of the detection box 11. The gas leakage device in the inner cavity of the detection box 11 is opened through the heat dissipation cavity 16 at the bottom of the detection box 11, so that the temperature inside the detection box 11 can be monitored in real time.

[0059] The ceramic substrate that needs to be tested for thermal cycling performance is inserted laterally into the inner cavity of the series cavity 12. The ceramic substrate is supported by the flow divider 15, and the inner cavity environment of the test chamber 11 is heated to a certain temperature by the external heating device.

[0060] When high-temperature gas comes into contact with water droplets formed by low-temperature solids, a liquid surface is formed inside the chamber of the test chamber 11. The high-temperature gas in the test chamber 11 continuously heats the temperature of its internal space. The liquid surface formed evaporates rapidly under the high temperature heating inside the chamber of the test chamber 11. After the liquid surface evaporates, the temperature of the bottom surface of the test chamber 11 decreases. At this time, the flow divider 15 used to place the ceramic substrate divides the entire chamber of the test chamber 11 into two relatively independent spaces. The temperature above the flow divider 15 is higher than the temperature below the flow divider 15. When there is a temperature difference in a relatively sealed space, gas exchange and circulation will occur, so that the ceramic substrate that needs to be subjected to thermal cycling performance treatment is in a space of alternating hot and cold. Data of the ceramic substrate is read under different temperature conditions in the test chamber 11, thereby testing the performance of the ceramic substrate under different environments and temperatures.

[0061] In summary: The ceramic substrate requiring thermal cycling performance testing is horizontally inserted into the inner cavity of the series cavity 12. The ceramic substrate is supported by the flow divider 15. The inner environment of the test chamber 11 is heated to a certain temperature by an external heating device. Working liquid is pre-filled into the inner cavity of the liquid suction core ring tube 234. When a temperature change is required in the inner cavity of the test chamber 11, the operator removes the heat insulation tube 235, exposing the liquid suction core ring tube 234 to the external environment. The temperature inside the test chamber 11 enters the inner cavity of the mating vertical bar 242 through the connecting hole 243. Because the connecting horizontal tube 2242 is horizontally inserted into the inner cavity of the mating vertical bar 242 from the rear end face, high-temperature gas can pass through the connecting horizontal tube. After entering the inner cavity of the vertical tube 2241, 2242 continues to climb upward to the inner cavity of the connecting rod 2243, causing the high-temperature gas to impact the bottom end of the heat absorption tube 231. When the bottom end of the heat absorption tube 231 is impacted by the high-temperature gas, the working liquid inside the heat absorption tube 231 evaporates into gas. After passing through the insulating tube 232, it enters the heat dissipation tube 233. The gas accumulates in the liquid absorption core ring tube 234 in the heat dissipation tube 233. At this time, because the external temperature of the device is greater than the temperature inside the detection box 11, the gas condenses into liquid and flows back to the bottom end of the liquid absorption core ring tube 234 under the action of gravity. This cycle repeats, so that the temperature inside the connecting rod 2243 can always be kept at a low temperature.

[0062] When the high-temperature gas touches the low-temperature connecting rod 2243, water droplets form on the bottom surface of the heat absorption tube 231. The water droplets remain on the bottom surface and are pushed inward by the external motor against the rear end face of the support member 211, causing the inner-insertion fixing triangular member 221 connected to it to move in the same direction. When the rear end face of the inner-insertion fixing triangular member 221 is impacted, the bottom of the front end face of the inner-insertion fixing triangular member 221 is deflected at an angle between the elastic block 222 and the pressing vertical bar frame 223, causing the inner-insertion fixing triangular member 221 to push the pressing vertical bar frame 223 forward with the elastic block 222 as the fulcrum, thus reducing the angle deviation between the inner-insertion fixing triangular member 221 and the pressing vertical bar frame 223; and because the outer end faces of the two sets of elastic rings 22443 are in the inner-insertion fixing position at this time... At the interval between the triangular piece 221 and the pressing vertical bar 223, and at the outer end face of the elastic ring 22443, both are in contact with the inner end face of the inner fixed triangular piece 221 and the pressing vertical bar 223. When the inner fixed triangular piece 221 and the pressing vertical bar 223 are clamped inward, the two sets of elastic rings 22443 are clamped inward with the connecting plate 22441 as the fulcrum, so that the inner end face of the two sets of contact blocks 22444 is in contact with the outer surface of the heat pipe 23. After clamping the outer surface of the heat pipe 23, the external motor stops pushing, thus forming a clamping and releasing operation step. Repeat the above steps, and the water droplets formed on the bottom end face of the heat absorption tube 231 fall downward into the inner cavity of the penetrating vertical cylinder 2241 after the clamping and releasing operation, and then enter the inner cavity of the lower connecting hole 243 through the connecting horizontal pipe 2242.

[0063] When high-temperature gas comes into contact with water droplets formed by low-temperature solids, a liquid surface is formed in the inner cavity of the test chamber 11. The high-temperature gas in the test chamber 11 continuously heats the temperature of its internal space. The liquid surface formed evaporates rapidly under the high temperature heating of the inner cavity of the test chamber 11. After the liquid surface evaporates, the temperature of the bottom surface of the test chamber 11 decreases. At this time, the flow divider 15 used to place the ceramic substrate divides the entire inner cavity of the test chamber 11 into two relatively independent spaces. The temperature above the flow divider 15 is higher than the temperature below the flow divider 15. When there is a temperature difference in a relatively closed space, gas exchange and circulation will occur, so that the ceramic substrate that needs to be subjected to thermal cycling performance treatment is in a space of alternating hot and cold.

[0064] Because the test chamber 11 is designed as a horizontally placed concave structure, a temperature monitor is placed at the bottom of the test chamber 11. Through the heat dissipation cavity 16 opened at the bottom of the test chamber 11, the gas leakage device inside the test chamber 11 is used to monitor the temperature inside the test chamber 11 in real time.

[0065] When the staff does not need to change the temperature inside the test chamber 11, the removed heat insulation tube 235 is put back on the upper end of the heat dissipation tube 233 so that the working liquid inside the liquid suction core ring tube 234 is not affected by the external temperature, so that the working liquid continues to remain in a gaseous state after heating and circulates in the inner cavity of the liquid suction core ring tube 234, so that the inner cavity of the test chamber 11 is in a heated state.

[0066] The data of the ceramic substrate is read under different temperature conditions in the test chamber 11, thereby testing the performance of the ceramic substrate under different environments and temperatures.

[0067] The operator can bring the outer end face of the overall support 211 close to the edge of a solid, and the bottom end faces of the test box 11 and the inner buckle 215 are both in contact with the flat workbench. A fixed crossbar is preset on the workbench, and the fixed crossbar is matched with the inner cavity of the mating cavity 216, so that the overall device is fixedly placed, avoiding the situation where the overall device is displaced due to external force when the ceramic substrate is subjected to thermal cycling test.

[0068] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. A device for testing the thermal cycling performance of ceramic substrates, characterized in that, The device includes a detection unit (1) and an adjustment unit (2). The adjustment unit (2) is provided through the side end face of the detection unit (1). The adjustment unit (2) includes a fixing mechanism (21) and an adjustment mechanism (22) that is snapped onto the side end face of the fixing mechanism (21). The fixing mechanism (21) and the adjustment mechanism (22) are connected to each other through a heat pipe (23). The front end faces of multiple sets of adjustment mechanisms (22) are connected in series through a receiving plate (24). The receiving plate (24) is inserted into the inner cavity of the detection unit (1) from one side laterally. The fixing mechanism (21) includes a support member (211) and a mating hole (212) through the side end face of the support member (211). The top end of the support member (211) is connected to a series mating block (213). The side end face of the series mating block (213) is provided with a through insertion hole (214). The bottom of the support member (211) extends forward to provide an inner buckle block (215). Both sides of the rear end face of the inner buckle block (215) are provided with mating cavities (216). The adjustment mechanism (22) includes an internally inserted fixed triangular member (221) and an elastic block (222) disposed on the side end face of the internally inserted fixed triangular member (221). The other end of the elastic block (222) is movably connected to the pressing vertical bar frame (223). The internally inserted fixed triangular member (221), the elastic block (222) and the pressing vertical bar frame (223) form an N-shaped combination component. The bottom of the outer foot of the internally inserted fixed triangular member (221) is inserted into the gap between the bearing member (211) and the inner buckle block (215). The adjustment mechanism (22) further includes a connecting trigger (224), which is inserted through the inner cavity of the inner fixed triangular piece (221) and the pressing vertical bar frame (223). The connecting trigger (224) includes an inserting vertical cylinder (2241) and a connecting horizontal tube (2242) that is horizontally disposed at the bottom of the inserting vertical cylinder (2241). The inner cavity at the top of the inserting vertical cylinder (2241) is inserted through a connecting rod (2243), and the top of the connecting rod (2243) is provided with a pressing clamp (2244). The bottom of the inserting vertical tube (2241) passes through the inner cavity of the inner fixing triangle (221), and the connecting horizontal tube (2242) passes laterally through the inner cavity of the inner fixing triangle (221) and the pressing vertical bar (223). The connecting horizontal tube (2242) does not fit against the inner cavity wall of the inner fixing triangle (221) and the pressing vertical bar (223). The end of the connecting horizontal tube (2242) away from the inserting vertical tube (2241) passes through the inner cavity of the mating hole (212) and protrudes. The bottom of the inserting vertical tube (2241) is inserted into the inner cavity of the inner fixing triangle (221) and fits against the two side walls of the inner cavity wall of the inner fixing triangle (221). The pressing clamp (2244) includes a connecting plate (22441) and a through hole (22442) disposed on the surface of the connecting plate (22441). Both ends of the connecting plate (22441) are provided with elastic rings (22443). The other ends of the two sets of elastic rings (22443) are respectively provided with a contact block (22444). The outer end face of the elastic ring (22443) is attached to the inner end face of the inner insertion fixing triangle (221) and the pressing vertical bar frame (223). The connecting rod (2243) is inserted through the inner cavity of the through hole (22442), and the heat pipe (23) is inserted into the inner cavity of the through hole (22442) from top to bottom, so that the inner cavity of the heat pipe (23) is connected to the inner cavity of the connecting rod (2243). The other end of the heat pipe (23) is inserted through the inner cavity of the through hole (214), so that the fixing mechanism (21), the adjusting mechanism (22) and the heat pipe (23) become a whole.

2. The device for testing the thermal cycling performance of ceramic substrates according to claim 1, characterized in that: The heat pipe (23) includes a heat-absorbing pipe (231) and an insulating pipe (232) connected to one end of the heat-absorbing pipe (231). A heat-dissipating pipe (233) is installed inside the other end of the insulating pipe (232). A liquid-absorbing core ring pipe (234) is installed through the inner cavity of the heat-absorbing pipe (231), the insulating pipe (232) and the heat-dissipating pipe (233). A heat-insulating tube (235) is installed through the other end of the heat-dissipating pipe (233). The heat-absorbing pipe (231) is inserted into the inner cavity of the through hole (22442) and connected in series with the inner cavity of the series rod (2243). The heat-dissipating pipe (233) is inserted into the inner cavity of the through hole (214). The heat-insulating tube (235) is sleeved on the outer ring of the heat-dissipating pipe (233) that protrudes from the top of the series mating block (213).

3. The device for testing the thermal cycling performance of ceramic substrates according to claim 1, characterized in that: The front end face of the elastic block (222) is in contact with the rear end face of the receiving plate (24). The receiving plate (24) includes an insertion plate (241) and a mating vertical strip (242) arranged on the front end face of the insertion plate (241). Both the upper and lower ends of the side end face of the mating vertical strip (242) are provided with connecting holes (243). The front end of the connecting horizontal tube (2242) is inserted into the inner cavity of the lower connecting hole (243). The upper connecting hole (243) is not connected to the fixing mechanism (21), the adjusting mechanism (22), and the heat pipe (23).

4. The device for testing the thermal cycling performance of ceramic substrates according to claim 3, characterized in that: The outer end face of the insertion plate (241) is attached to the inner cavity of the detection unit (1). The detection unit (1) includes a detection box (11) and a series cavity (12) opened on both ends of the detection box (11). The edge wall of the detection box (11) is blocked by a barrier plate (13). A transparent cavity (14) is opened on the side end face of the detection box (11). A diverter plate (15) is vertically arranged on the side end face of the barrier plate (13). The other end of the diverter plate (15) is vertically arranged on the side end face of the matching vertical bar (242). A heat dissipation cavity (16) is arranged at the bottom of the detection box (11). The outer end face of the insertion plate (241) is attached to the inner wall of the transparent cavity (14). An observation window (17) is installed in the inner cavity of the series cavity (12).

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