Electrostatic deflection convergent energy analyzer, imaging electron spectrometer, reflection imaging electron spectrometer, and spin vector distribution imaging device

Abstract

The present application provides a kind of electrostatic deflection convergent energy analyzer, it has wide receiving angle and high two-dimensional convergent performance, can carry out imaging to two-dimensional real space image or emission angle distribution, and can carry out two-dimensional convergent and imaging under 90 ° deflection relative to the direction of incidence. One or more outer electrodes and multiple inner electrodes are arranged along the shape of two rotors formed on the inner side and outer side of common rotation axis. Among them, the inner surface shape of outer electrode is tapered, the diameter of which decreases towards both ends, and the outer surface shape of inner electrode is tapered, the diameter of which decreases towards both ends. Electron entrance hole and exit hole are formed on the outer electrode at both ends of the rotation axis respectively. Voltage for electron acceleration and deceleration is applied to outer electrode and inner electrode in proportion to the energy of incident electron. Voltage is applied to one or more electrodes except the inner electrode at both ends, which is twice or more than the converted acceleration voltage obtained by converting the energy of electron into acceleration voltage based on the potential of outer electrode where entrance hole is formed.

Description

Technical Field

[0001] This invention relates to photoelectron spectroscopy devices such as UPS (ultraviolet photoelectron spectroscopy), XPS (X-ray photoelectron spectroscopy), and ARPES (angle-resolved photoelectron spectroscopy), Auger electron spectroscopy devices, photoelectron diffraction devices, photoelectron microscopes, and spin polarizability analysis devices. Background Technology

[0002] In electronic spectroscopy equipment, sensitivity, like energy resolution, is one of the most important performance characteristics. When measuring photoelectrons or Auger electrons, if the signal is weak and almost drowned out by noise, a significant increase in accumulation time is required to obtain a sufficient signal-to-noise ratio (SN ratio). However, this is not only inefficient, but also often limits the duration of continuous measurements due to time constraints such as the utilization time of the radiation facility or the duration of the excitation source. Furthermore, long-term measurements are hindered for samples that are susceptible to radiation damage, such as organic materials, or samples that may change over time; in most cases, weak signals cannot be adequately captured.

[0003] Furthermore, it is well known that advanced doping techniques are used in the research of novel semiconductor or superconducting materials, where even trace amounts of dopants can cause significant changes in the materials. Capturing weak signals from such dopants is extremely important for the development of new materials.

[0004] In electronic spectroscopy, in addition to measuring the energy distribution of electrons emitted from a sample, the emission angle distribution can also be measured. The determination of the energy distribution provides information on elemental composition, while the determination of the emission angle distribution provides information on the composition or electronic states in the depth direction.

[0005] Furthermore, since momentum is conserved in the in-plane direction of the sample during photoelectron emission, momentum information of electrons in the material can be obtained by measuring the kinetic energy and emission angle of the photoelectrons. By irradiating the sample with ultraviolet or X-rays to adjust the energy to the valence band, and measuring the kinetic energy and emission angle distribution of the photoelectrons, the band structure of the material can be evaluated, and the properties of the material can be basically determined.

[0006] Furthermore, in photoelectrons emitted from the inner shell, when the kinetic energy reaches hundreds of eV or higher, a strong peak known as the forward focusing peak appears in the direction connecting the photoelectron-emitting atom and the scattering atoms around it. By measuring this peak over a wide angle, the arrangement of atoms around a specific atom can be directly captured. Additionally, the interatomic distances can be calculated from the diameter of the diffraction rings formed around the forward focusing peak. As described above, by measuring the emission angle distribution using electron spectrometry, detailed atomic-level information that is difficult to obtain using other analytical methods can be obtained, making it a powerful method for developing new materials or studying the mechanisms of unknown physical properties.

[0007] However, while the widely used electrostatic hemispherical energy analyzer (hereinafter referred to as CHA) has high energy resolution, its small receiving angle of the input lens makes it difficult to use for two-dimensional photoelectron spectroscopy or atomic structure analysis to obtain emission angle distributions over a large solid angle. Additionally, the coaxial cylindrical mirror energy analyzer (hereinafter referred to as CMA), widely used primarily for Auger electron spectroscopy, is known for its large receiving solid angle, but its incident angle is still insufficient for the aforementioned analyses.

[0008] Here, a two-dimensional spherical mirror analyzer with a receiving angle of ±60° was developed (Non-Patent Document 1), and band dispersion structure determination (Non-Patent Documents 2, 3) and atomic arrangement structure determination (Non-Patent Documents 4, 5) were performed on various samples. Although the energy resolution of the analyzer was improved in stages through modification, it was still not high enough to obtain sufficient resolution for more detailed analysis, such as chemical shift structure analysis. Therefore, a spherical aberration correction lens with a receiving angle of ±45° to ±50° was invented (Patent Documents 1, 2, Non-Patent Documents 6, 7), and an attempt was made to combine it with the input lens of CHA (Non-Patent Document 8). In addition, recently, the inventors of the present invention proposed a spherical aberration correction lens with full-angle (±90°) reception (Patent Document 3). In the ultraviolet region below tens of eV, a photoelectron analysis device with full-angle reception using PEEM (photoelectron microscopy) technology has been developed (Non-Patent Documents 9, 10).

[0009] While CHAs are widely used and various designs have been developed, the receiving angle of the energy dispersion direction in the concentric hemisphere is very small. Consequently, to achieve high energy resolution, the incident angle in the concentric hemisphere must be kept at approximately ±2° or less. Furthermore, in the determination of two-dimensional real-space images and emission angle distributions, to obtain high spatial and angular resolution, the incident angle in the concentric hemisphere needs to be suppressed to approximately ±2° or ±1° or less. Therefore, when developing high-performance analyzers using CHAs, the input lens system must be designed with the premise of a very small receiving angle in the electrostatic hemisphere. In conventional input lenses where spherical aberration increases with the incident angle, the limit of the receiving angle that can form a converging beam is approximately ±7°. In this case, the convergence angle can be controlled to approximately ±2° at a relatively low magnification.

[0010] Here, if the size of the object observed on the object plane (sample plane) of the input lens is *a*, and the size of the image of the object observed on the image plane of the input lens is *b*, then the magnification (M) is defined as M = b / a. If this value is obtained using a single lens with constant electron energy at both the inlet and outlet, it is generally the ratio of the incident angle to the convergence angle. The magnification of the input lens is one of the important factors determining the sensitivity of the CHA. If the magnification is set too high, the sensitivity will decrease significantly depending on the size of the slit at the inlet located in the concentric hemisphere. Therefore, the conventional input lens described above is usually set to a low magnification. For example, when using a single lens to converge electrons with an opening angle of ±7° to an opening angle of ±2°, the magnification can be as low as approximately 3.5x.

[0011] On the other hand, in order to effectively determine the emission angle distribution over a wide range, as mentioned above, spherical aberration correction lenses that expand the receiving angle to approximately ±50° have been developed (Patent Documents 1 and 2, Non-Patent Documents 6 and 7). Furthermore, the inventors have proposed full-angle (±90°) receiving converging lenses. With full-angle receiving converging lenses, an analyzer that completely determines the electron energy and momentum can be realized. However, when designing an input lens system that uses such a wide-angle receiving converging lens to receive electrons at a wide angle and converge at an opening angle of approximately ±2° or less, the magnification becomes very high compared to conventional input lenses, resulting in a considerably long lens system. For example, if electrons are received at a receiving angle of ±50° or ±90° and converged at an opening angle of ±2°, even without deceleration, the irradiation point on the sample is magnified by approximately 25 times or 45 times at the exit surface of the wide-angle receiving converging lens. Furthermore, to obtain high energy resolution, when electrons at energy E decelerate to energy E′, according to the law of constant brightness, the magnification M can be expressed by the following equation. Here, M0 is a magnification determined by the angle of incidence and the angle of exit.

[0012] [Formula 1]

[0013]

[0014] For example, when electrons at 1000 eV are decelerated to 50 eV in the aforementioned lens, the magnification is approximately 100 to 200 times. At such high magnification, the number of electrons blocked by the entrance slit inserted into the concentric hemisphere increases, and the slit width must be increased to obtain sufficient sensitivity. However, increasing the slit width results in a decrease in energy resolution. Furthermore, in most conventional CHAs, the magnification of the input lens is around 5 times or less.

[0015] The best way to solve this problem is to increase the receiving angle of the energy analyzer. Therefore, we might consider using a CMA with a larger receiving angle instead of the concentric hemispheres of the CHA. However, the CMA uses grids at the inlet and outlet of the inner cylinder through which electrons pass, and the electrons are scattered as they pass through these inlets and outlets, disrupting their orbits. Therefore, it is difficult to image real-space images or angular distributions at high resolution using a CMA.

[0016] As described above, in order to realize a high-performance electronic spectrometer that can image real-space images or angular distributions, an energy analyzer that does not use a grid and has a receiving angle wider than the concentric hemisphere of the CHA is required.

[0017] Next, in addition to measuring the energy and momentum of electrons, the measurement of electron spin, which can affect the properties of matter and materials, will be explained. As spin polarizability analysis devices, there are Mott detectors, SPLEED detectors, and VLEED detectors (non-patent document 11) that utilize spin-orbit interactions. Furthermore, in recent years, a two-dimensional spin analyzer using an Ir(001) single-crystal substrate has been developed (non-patent document 10).

[0018] Furthermore, by combining an existing electrostatic 90° deflector and a magnetic field lens-type spin rotator (hereinafter referred to as a spin rotator), the spin polarization can be measured in three directions: in-plane and plane-direction (Patent Document 5). However, the existing electrostatic 90° deflector lacks the imaging performance to converge the beam in two dimensions, thus it cannot be applied to two-dimensional spin analysis devices for detailed studies of real-space images and emission angle distributions.

[0019] Before electrons emitted from a sample are incident onto a spin detector, their orbital path can be bent by 90° in an electric field, allowing measurement of the spin polarizability in the vertical direction of the sample surface. This method has been implemented using a combination of a quarter-cylindrical electrostatic 90° deflector (hereinafter referred to as the 90° deflector) (Non-Patent Document 11) and a VLEED detector. Furthermore, in the 90° deflector, electrons change direction by 90° along a circular arc under the condition of equilibrium between the central force and centrifugal force in the cylindrical electric field. Alternatively, a spherically symmetric electric field can be used instead of the cylindrical electric field for 90° deflection, and a spin polarizability analyzer using the 90° deflector of this method (hereinafter referred to as the 90° spherical deflector) can also be used (Non-Patent Document 12).

[0020] However, in the cylindrical symmetric electric field used in the 90° deflector and the spherical symmetric electric field used in the 90° spherical deflector, the convergence within the deflection plane occurs at the 127° and 180° deflection points, respectively, but not at the 90° deflection point. Therefore, an improved 90° deflector (Non-Patent Document 13) capable of converging an electron beam emitted from point 1 by deflecting it 90° within the deflection plane, or a 90° deflection analyzer (Non-Patent Document 14) capable of converging an electron beam by deflecting it 90° within the deflection plane by combining lenses with the 90° spherical deflector, has been proposed. However, a problem exists: while electrons incident at a certain opening angle can converge in the direction within the deflection plane, they cannot simultaneously converge in other directions. Therefore, it is difficult to apply this to two-dimensional spin analysis, which images two-dimensional real-space phenomena and emission angle distributions.

[0021] Imaging capabilities with two-dimensional real-space images and emission angle distribution are crucial for detailed studies of spin polarization. While the two-dimensional spin analyzer disclosed in Non-Patent Document 10 can perform two-dimensional analysis of spin polarization in the in-plane direction of the sample, it has not yet achieved two-dimensional analysis of spin polarization in the direction perpendicular to the sample plane. Detailed analysis of spin polarization in the direction perpendicular to the sample plane will be essential for future spintronics research, such as in high-density magnetic storage devices. To perform two-dimensional analysis of spin polarization in the direction perpendicular to the sample plane, as mentioned above, deflecting the electrons emitted from the sample by 90° using an electric field before they enter the two-dimensional spin detector is effective. However, if an existing electrostatic 90° deflector is used, the electrons only converge in the in-plane direction, lacking two-dimensional imaging capabilities and resulting in the loss of two-dimensional position and angle information.

[0022] On the other hand, a Wiener filter-type spin-rotation device (see, for example, Patent Document 4 and Non-Patent Document 15) can be used instead of an electrostatic 90° deflector for three-dimensional measurement of spin polarization. In particular, in the spin-rotation device shown in Patent Document 4, three-dimensional spin manipulation can be achieved through a multi-pole Wiener filter.

[0023] The Wiener filter is an energy analyzer that utilizes the principle that when electrons are incident on orthogonal electric and magnetic fields, only electrons with specific energies experience a balance between the force from the electric field and the force from the magnetic field (Lorentz force) and move in a straight line. In this analyzer, by adjusting the voltage applied to the electrodes forming the electric field and the voltage (or current) applied to the electromagnet, electrons incident at a certain opening angle can be converged.

[0024] However, the conditions for focusing an electron beam emitted from a single point are mismatched with the conditions for rotating the spin by 90°. If a Wiener filter is used under the latter condition, the electron beam cannot be focused at the exit point. Therefore, while Wiener filter-type spin rotation devices have been used in photoelectron microscopes and other instruments to observe three-dimensional resolved real-space images of the spin polarization of parallel electron beams, they are difficult to apply to two-dimensional analysis devices that can image both two-dimensional real-space images and emission angle distributions. Therefore, in order to obtain three-dimensional spin-resolved two-dimensional real-space images and emission angle distributions, while deflecting the electron direction by 90°, it is necessary to achieve focusing and imaging effects not only in the direction within the deflection plane but also in the direction perpendicular to it.

[0025] [Patent Documents]

[0026] [Patent Document 1] Japanese Patent No. 4802340

[0027] [Patent Document 2] Japanese Patent No. 4900389

[0028] [Patent Document 3] Japanese Patent Application 2019-227788

[0029] [Patent Document 4] International Publication WO2012 / 173007

[0030] [Patent Document 5] International Publication WO2012 / 066024

[0031] [Non-patent literature]

[0032] [Non-patent document 1] H. Daimon, "New display-type analyzer for the energy and the angular distribution of charged particles", Rev. Sci. Instrum. 59, 545 (1988).

[0033] [Non-Patent Literature 2] F. Matsui, et al., “Three-dimensional band mapping of graphite”, Appl. Phys. Lett. 81, 2556 (2002).

[0034] [Non-Patent Literature 3] F. Matsui, et al., “Atomic-orbital analysis of the Cu Fermi surface by two-dimensional photoelectron spectroscopy”, Phys. Rev. B 72, 195417 (2005).

[0035]

Non - Patent Document 4

[0036]

Non - Patent Document 5

[0037]

Non - Patent Document 6

[0038]

Non - Patent Document 7

[0039] [Unauthorized Document 8] H. Matsuda, et al., "Development of display-typeellipsoidal mesh analyzer: Computational evaluation and experimental validation", J. Electron Spectrosc. Relat. Phenom. 195 (2014) 382.

[0040] [Non-patent document 9] M. Kotsugi et al., "Microspectroscopic two-dimensional Fermi surface mapping using a photoelectron emission microscope", Rev. Sci. Instrum., 74, 2754 (2003).

[0041] [Non-Patent Literature 10] C. Tusche et al., “Spin resolved bandstructure imaging with a high resolution momentum microscope”, Ultramicroscopy 159, 520 (2015).

[0042] [Non-Patent Literature 11] T. Okuda, et al., J. Electron Spectrosc. Relat. Phenom. 201, 23 (2015).

[0043] [Non-Patent Literature 12] E. Kisker, et al., Rev. Sci. Instrum. 50, 1598 (1979).

[0044] [Non-Patent Literature 13] L. Vattuone, M. Rocca, “Electrostatic electron analyzer with 90 deflection angle”, Rev. Sci. Instrum. 73 3861 (2002).

[0045] [Non-Patent Literature 14] A.W. Ross, et al., J. Electron Spectrosc. Relat. Phenom. 69, 189 (1994).

[0046] [Non-patent document 15] T. Kohashi, et al., "A spin rotator used for detecting all three magnetization vector components in spin-polarized electron microscopy", J. Mag. Soc. Jpn. 18, 7 (1994). Summary of the Invention

[0047] The technical problem that the invention aims to solve

[0048] In view of the above, the primary objective of this invention is to provide an electrostatic deflection converging energy analyzer that can perform analysis with higher energy resolution even when the receiving angle is wider than that of the electrostatic hemisphere of CHA.

[0049] Furthermore, a second objective of the present invention is to provide an imaging electronic spectrometer capable of imaging two-dimensional real-space images and emission angle distributions with high energy resolution.

[0050] Furthermore, a third objective of the present invention is to provide a spin polarization analysis apparatus that, in addition to performing two-dimensional analysis of spin polarization in the in-plane direction of the sample, can measure the spin polarizability in the straight direction of the sample surface by deflecting the electron emitted from the sample by 90° using an electric field before it is incident on a two-dimensional spin detector, and can also measure spin polarization in three dimensions.

[0051] If these problems are solved, it could provide revolutionary analytical tools for a detailed analysis of the three physical quantities of an electron (energy, momentum, and spin).

[0052] In order to solve the above problems, the electrostatic deflection convergence energy analyzer of the present invention has the following features 1) to 7).

[0053] 1) One or more outer electrodes and multiple inner electrodes are arranged along the shape of two rotating bodies formed on the inner and outer sides of a common rotation axis. Here, the two rotating bodies formed on the inner and outer sides of the common rotation axis are in the form of the outer rotating body surrounding the inner rotating body.

[0054] 2) Electron entrance holes and exit holes are formed in the outer electrodes at both ends of the rotating shaft.

[0055] 3) A voltage application unit that applies voltages to the outer and inner electrodes to accelerate and decelerate electrons.

[0056] Here, the voltage used to accelerate and decelerate electrons can be applied to the outer and inner electrodes in proportion to the energy of the incident electrons.

[0057] 4) The inner surface shape of the outer electrode is a shape that decreases in diameter towards the entrance hole and a shape that decreases in diameter towards the exit hole.

[0058] Here, the inner surface shape of the outer electrode facing the direction of decreasing diameter of the entrance aperture is preferably conical, toroidal, or annular, and the inner surface shape of the outer electrode facing the direction of decreasing diameter of the exit aperture is preferably conical, toroidal, or annular.

[0059] 5) The outer surface shape of the inner electrode is a shape that decreases in diameter toward the entrance aperture, a rod-shaped shape that extends toward the entrance aperture, or a shape that increases in diameter at the end on the entrance aperture side. The outer surface shape of the inner electrode is a shape that decreases in diameter toward the exit aperture, a rod-shaped shape that extends toward the exit aperture, or a shape that increases in diameter at the end on the exit aperture side.

[0060] Here, the outer surface shape of the inner electrode facing the decreasing diameter of the injection hole is preferably conical or toroidal, or a stepped shape that gradually decreases in diameter towards the injection hole. The outer surface shape of the inner electrode facing the decreasing diameter of the exit hole can preferably be conical or toroidal, or a stepped shape that gradually decreases in diameter towards the exit hole.

[0061] Furthermore, the inner surface shape of the outer electrode and the outer surface shape of the inner electrode are essentially the same on the entrance and exit sides, but they do not necessarily have to be the same; they can also have different shapes. For example, various combinations are possible, such as a conical shape on the entrance side and an annular shape on the exit side. Additionally, regarding stepped shapes with gradually decreasing diameters, for example, when an electrode with a small diameter is positioned in the center, the diameter will decrease even if there is only one step near the entrance.

[0062] 6) In the voltage application unit mentioned in 3) above, the voltage applied to one or more inner electrodes other than the inner electrodes at both ends is at least twice the converted acceleration voltage, preferably 2 to 5 times or more. This voltage is obtained by converting the energy of electrons into an acceleration voltage based on the potential of the outer electrode with the entrance hole.

[0063] The converted accelerating voltage is defined as the voltage obtained by converting the energy of electrons into an accelerating voltage. For example, the converted accelerating voltage for 1 eV is 1 V. A voltage that is 2 to 5 times or more of the converted accelerating voltage is a voltage of 2E to 5EV or more, where EeV is the electron energy. Here, the voltage applied to one or more inner electrodes other than the electrodes at both ends of the inner electrodes is preferably set to at least 10 times the converted accelerating voltage, which is obtained by converting the energy of electrons into an accelerating voltage based on the potential of the outer electrode with the entrance aperture. For example, a high voltage of 10 kV or higher is set for an electron energy of 1000 eV. This is to further widen the incident angle on the energy analysis unit, reduce the magnification of the input lens of the wide-angle receiver, improve the sensitivity of the wide-angle receiver, and improve the energy resolution.

[0064] 7) In order to make the central orbit and the above-mentioned rotation axis form a specified incident angle, a voltage is applied to each electrode, which is adjusted such that the central orbit of the electrons entering from the incident hole converges at the position of the exit hole at a specified exit angle with the rotation axis.

[0065] According to the electrostatic deflection converging energy analyzer having the features described in 1) to 7) above, by optimizing the shape, arrangement, and applied voltage of each electrode, a larger receiving angle than that of the concentric hemisphere of the CHA can be obtained to receive electrons without using a grid, thus achieving deflection converging for energy analysis. In other words, by replacing the concentric hemisphere of the CHA with the electrostatic deflection converging energy analyzer of this invention, the incident angle of the energy analysis section can be widened by approximately three times. As a result, the magnification of the input lens for wide-angle reception is reduced to about one-third, increasing the sensitivity of wide-angle reception by about nine times, thereby potentially improving energy resolution.

[0066] In the electrostatic deflection converging energy analyzer of the present invention described above, when the inner surface shape of the outer electrode and the outer surface shape of the inner electrode have a conical shape that decreases in diameter toward the entrance and exit holes, the cone angle measured from the rotation axis can be the same on the entrance and exit hole sides. Furthermore, the inner surface shape of the outer electrode and the outer surface shape of the inner electrode can also be symmetrical about a plane that intersects perpendicularly with the midpoint of the line connecting the entrance and exit holes. For example, multiple outer electrodes and multiple inner electrodes can be arranged symmetrically with respect to the aforementioned plane of symmetry, along the shape of two rotating bodies obtained by rotating the lower bases of two isosceles trapezoids of different heights but with the same plane of symmetry as a common rotation axis.

[0067] In the electrostatic deflection convergent energy analyzer of the present invention described above, the voltage applied to one or more inner electrodes other than the inner electrodes at both ends is preferably set to 10 to 50 times the converted acceleration voltage obtained by converting the energy of electrons into an acceleration voltage.

[0068] In addition, when the outer electrode consists of three or more electrodes, the voltage applied to one or more outer electrodes other than the electrodes at both ends is preferably 10 times or less of the equivalent accelerating voltage.

[0069] In the electrostatic deflection converging energy analyzer of the present invention, a deflection angle of 90° is preferred. This type of electrostatic deflection converging energy analyzer is sometimes referred to hereinafter as a "90° electrostatic deflection converging energy analyzer". According to this type of 90° electrostatic deflection converging energy analyzer, a 90° deflection caused by an electrostatic field and two-dimensional convergence and imaging can be achieved. As described later, particularly in spin analysis, it is possible to bend the direction of travel by 90° to form two-dimensional convergence and imaging without changing the spin direction, thereby obtaining a spin-resolved two-dimensional real-space image and emission angle distribution. Furthermore, although there is no particular limitation on the incident angle, an incident angle of 45°, an exit angle of 45°, and a deflection angle of 90° are also possible.

[0070] The electrostatic deflection converging energy analyzer of the present invention can have any of the following deflection angles. Furthermore, by optimizing the shape, arrangement, and applied voltage of each electrode, an energy analyzer with any deflection angle in the range of 45° to 180° can be designed. Several examples are given below.

[0071] • The incident angle is specified as 22.5° and the deflection angle as 45°.

[0072] • The incident angle is specified as 30° and the deflection angle as 60°.

[0073] • The incident angle is specified as 60° and the deflection angle as 120°.

[0074] • The specified incident angle is 67.5° and the deflection angle is 135°.

[0075] • The incident angle is specified as 75° and the deflection angle as 150°.

[0076] In addition, there is no particular limitation on the incident angle. The incident angle and the exit angle can be adjusted by making the deflection angle 45°, 60°, 120°, 135°, 150°, etc., or 45° to 180°.

[0077] In the electrostatic deflection convergence energy analyzer of the present invention, in order to enable electrons in the central orbit to cross the rotation axis, the inner electrode is divided into two parts. By changing the voltage conditions applied to the electrode, the central orbit is controlled to cross the rotation axis, and the method of whether electrons emitted from the exit hole are deflected is switched.

[0078] The analyzer is characterized in that the inner electrodes are divided into two parts (incident side and exit side), which, as a result, allows electrons to pass through the space formed between the left and right inner electrodes and through the rotation axis. By changing the voltage conditions applied to the electrodes, it is possible to switch between the situation where electrons pass through the space between the left and right inner electrodes and the situation where they do not, thereby switching whether the exiting electrons are deflected.

[0079] This type of electrostatic deflection convergence energy analyzer can be referred to as "deflection switching electrostatic convergence energy analyzer" in the following text.

[0080] In the electrostatic deflection-converging energy analyzer of the present invention, the rotating body is a rotating body with a rotation angle of 90° to 180°, or it can be a structure with a compensation electrode for compensating the electric field at the cut surface. Unless a mirror or the like is placed at the exit aperture position by using a 180° rotating body or a rotating body with an arbitrary rotation angle to reflect electrons, deflection and two-dimensional convergence and imaging in an electrostatic field can be achieved even without using a 360° rotating body.

[0081] Next, the imaging electronic spectrometer of the present invention will be described.

[0082] The imaging electronic spectrometer of the present invention is an electronic spectrometer using the electrostatic deflection convergent energy analyzer of the present invention described above. By setting an input lens at the front end of the analyzer and a projection lens and detector at the rear end of the analyzer, it can not only simultaneously measure the real space image of the sample, but also measure the two-dimensional emission angle distribution across a wide angle at high energy resolution in one go.

[0083] Here, the input lens receives electrons emitted from the sample and directs them into the entrance aperture. The entrance aperture for the energy analyzer is located on the lens axis, and the lens axis and the rotation axis of the energy analyzer are configured to a specified incident angle. Furthermore, the input lens preferably has the function of switching between angular distributions and real-space images.

[0084] Additionally, the projection lens receives electrons deflected and focused by the energy analyzer from the exit aperture. The exit aperture of the energy analyzer is located on the axis of the projection lens, and the axis of rotation of the projection lens and the energy analyzer are set to a specified exit angle. The detector performs two-dimensional detection of the electrons passing through the projection lens, measuring a two-dimensional real-space image or emission angle distribution.

[0085] In addition, it is preferable to provide small holes or slits at the inlet and outlet of the energy analyzer.

[0086] Furthermore, the reflectance imaging type electron spectrometer of the present invention is an electron spectrometer that uses the electrostatic deflection converging energy analyzer of the present invention described above (except for the type with a 180° rotating body). An electron mirror is provided at the exit aperture of the energy analyzer, an input lens is provided at the front section of the entrance aperture of the energy analyzer, and a projection lens and detector are provided at the rear section. This analyzer is a reflectance type energy analyzer that can not only determine the real-space image of the sample, but also measure the two-dimensional emission angle distribution across a wide angle in a single measurement with high energy resolution.

[0087] An input lens receives electrons emitted from the sample and directs them into an entrance aperture. An entrance aperture for the energy analyzer is located on the lens axis, and the lens axis and the rotation axis of the energy analyzer are set to a specified incident angle. A reflector is positioned on the exit aperture of the energy analyzer so that the direction of the perpendicular line aligns with the direction of the rotation axis. The reflector can be a single-crystal mirror, particularly an Ir(001) single-crystal mirror, to achieve spin analysis functionality.

[0088] The projection lens has an entrance aperture on its axis. The projection lens axis and the rotation axis of the energy analyzer are set to a specified incident angle. Electrons, deflected and converged by the energy analyzer, reflected by a mirror, and then deflected and converged again, are received through the entrance aperture. The detector performs two-dimensional detection of the electrons passing through the projection lens, measuring a two-dimensional real-space image or emission angle distribution.

[0089] In addition, it is preferable to provide a small hole or slit at the entrance port (which also serves as the inlet and outlet) of the energy analyzer.

[0090] Next, the spin vector distribution imaging apparatus of the present invention will be described.

[0091] The spin vector distribution imaging device of the first aspect of the present invention has a 90° deflection angle, that is, it has the structure of the 90° electrostatic deflection converging energy analyzer of the present invention (a rotating body with a rotation angle of 90° to 180°, and further includes a compensation electrode for compensating the electric field at the cut surface), and also has the following structures 1a) to 1d).

[0092] 1a) An input lens having an entrance aperture for an energy analyzer on its lens axis, the lens axis and the rotation axis of the energy analyzer being set to a specified incident angle, and receiving electrons emitted from the sample and ejecting them into the entrance aperture.

[0093] 1b) An electrostatic lens having an exit port for an energy analyzer on its axis, the axis of the electrostatic lens and the rotation axis of the energy analyzer being set to a specified exit angle, and receiving electrons deflected and converged by the energy analyzer from the exit port.

[0094] 1c) A 2D spin filter, which is mounted on the electrostatic lens axis on the output side of the electrostatic lens.

[0095] 1d) A projection lens for receiving electrons reflected by a spin filter and a detector for detecting electrons transmitted through the projection lens.

[0096] Here, it is preferable to further add the following structures 1e) and 1f) to the above configuration.

[0097] 1e) Drive unit for retracting the spin filter from the electrostatic lens.

[0098] 1f) When the spin filter is in a retracted state via the drive unit, a second projection lens is used to receive electrons emitted from the electrostatic lens, and a second detector is used to detect electrons transmitted through the second projection lens.

[0099] The spin vector distribution imaging device of the second aspect of the present invention has the structure of the 90° electrostatic deflection converging energy analyzer of the present invention described above, and also has the following structures 2a) to 2d).

[0100] 2a) An input lens having an entrance aperture for an energy analyzer on its lens axis, the lens axis and the rotation axis of the energy analyzer being set to a specified incident angle, and receiving electrons emitted from the sample and ejecting them into the entrance aperture.

[0101] 2b) A 2D spin filter is placed in the exit aperture of the energy analyzer and perpendicular to the rotation axis.

[0102] 2c) An entrance aperture for the energy analyzer is set on the projection lens axis. The projection lens axis and the rotation axis of the energy analyzer are set to a specified exit angle. Electrons that are deflected and converged by the energy analyzer, reflected by the 2D spin filter, and then deflected and converged again are received from the entrance aperture.

[0103] 2d) A detector used to detect electrons passing through a projection lens.

[0104] The spin vector distribution imaging device of the third aspect of the present invention is the 90° electrostatic deflection converging energy analyzer of the present invention described above, which has the structure of an energy analyzer capable of switching deflection angles, and also has the following structures 3a) to 3f).

[0105] 3a) An input lens having an entrance aperture for an energy analyzer on its lens axis, the lens axis and the rotation axis of the energy analyzer being set to a specified incident angle, and receiving electrons emitted from the sample and expelling them through the entrance aperture.

[0106] 3b) An electrostatic lens having an exit port for an energy analyzer on its shaft, the shaft of the electrostatic lens and the rotation shaft of the energy analyzer being set to a specified exit angle, and receiving electrons deflected and converged by the energy analyzer from the exit port.

[0107] 3c) A 2D spin filter, which is mounted on the electrostatic lens axis on the output side of the electrostatic lens.

[0108] 3d) A first projection lens and a first detector, wherein the first projection lens is used to receive electrons reflected by a 2D spin filter, and the first detector is used to detect electrons that pass through the first projection lens.

[0109] 3e) A second projection lens, wherein an exit hole for an energy analyzer is provided on the projection lens axis, the projection lens axis and the rotation axis of the energy analyzer are set to a specified exit angle, and electrons that converge through the energy analyzer without deflection are received from the exit hole.

[0110] 3f) A second detector used to detect electrons passing through the second projection lens.

[0111] The spin vector distribution imaging device of the fourth aspect of the present invention does not use the 90° electrostatic deflection converging energy analyzer of the present invention in any of the spin vector distribution imaging devices of the first to third aspects described above, but rather combines multiple energy analyzers with deflection angles in the range of 45 to 150° to achieve a deflection angle of 90°.

[0112] In the spin vector distribution imaging apparatus of the first to fourth aspects of the present invention, a spin rotator may also be provided, which is disposed inside or outside at least one of the input lens and the electrostatic lens, and spins 90° in a plane perpendicular to the axis of each lens.

[0113] By setting spin rotators (each rotating 90° in a plane perpendicular to the lens axis) at the front and rear sections of a 90° electrostatic deflection converging energy analyzer, the ON and OFF states of the two spin rotators are used to determine which spin polarization direction among the three sample directions (in-plane and plane-direction) to analyze. This enables a two-dimensional analysis device that analyzes three-dimensional spin polarizability using a two-dimensional real-space image and emission angle distribution.

[0114] Invention Effects

[0115] According to the electrostatic deflection converging energy analyzer of the present invention, electrons are received at a receiving angle larger than that of the concentric hemisphere of CHA without the use of a grid, thereby deflecting and converging the electron orbits and improving energy resolution.

[0116] The imaging spectrometer according to the present invention has the effect of not only measuring the real space image of the sample with high energy resolution, but also simultaneously measuring the two-dimensional emission angular distribution over a wide angle.

[0117] The spin vector distribution imaging device according to the present invention has the effect of analyzing three-dimensional spin polarization using two-dimensional real space images and emission angle distribution. Attached Figure Description

[0118]

【 Figure 1 Schematic diagram of the electrostatic deflection converging energy analyzer in Example 1

[0119]

【 Figure 2 The graphs show the aperture aberrations of the electrostatic deflection converging energy analyzer of Example 1 and the relationship between the incident and exit angles.

[0120]

【 Figure 3 [Illustrative diagram of energy dispersion in the electrostatic deflection converging energy analyzer of Example 1]

[0121]

【 Figure 4 Two-dimensional real-space image of the electrostatic deflection converging energy analyzer in Example 1

[0122]

【 Figure 5 A diagram illustrating the shapes of the outer and inner electrodes of an electrostatic deflection converging energy analyzer.

[0123]

【 Figure 6 [Illustrative diagram of the imaging electronic spectrometer in Example 2]

[0124]

【 Figure 7 Cross-sectional views of 360° and 180° rotating electrostatic deflection converging energy analyzers

[0125]

【 Figure 8 [Structural diagram of the reflectance imaging type electron spectrometer in Example 3]

[0126]

【 Figure 9 [Structural diagram of the spin vector distribution imaging device in Example 4]

[0127]

【 Figure 10 [Structural diagram of the spin vector distribution imaging device in Example 5]

[0128]

【 Figure 11 [Illustrative diagram of the switching electrostatic deflection convergent energy analyzer in Example 6]

[0129]

【 Figure 12 [Illustrative diagram of electron orbit under other voltage conditions for the switching electrostatic deflection converging energy analyzer of Example 6]

[0130]

【 Figure 13[Illustrative diagram of the spin vector distribution imaging device in Example 7]

[0131]

【 Figure 14 A diagram illustrating a 90° electrostatic deflection converging energy analyzer, composed of an energy analyzer with deflection angle β1 and an energy analyzer with deflection angle β2 (Example 8).

[0132]

【 Figure 15 [Illustrative diagram of a 90° electrostatic deflection converging energy analyzer combination (when β1 = β2)]

[0133]

【 Figure 16 The diagram illustrates the conditions for achieving a 90° electrostatic deflection converging energy analyzer combination: (a) when β1 = β2, (b) when β1 ≠ β2.

[0134]

【 Figure 17 [Illustrative diagram of an electrostatic deflection converging energy analyzer with 45° and 60° deflection angles]

[0135]

【 Figure 18 [Illustrative diagrams of two combined electrostatic deflection converging energy analyzers: (a) combination of two 45° electrostatic deflection converging energy analyzers; (b) combination of two 60° electrostatic deflection converging energy analyzers]

[0136]

【 Figure 19 [Illustrative diagram of an electrostatic deflection converging energy analyzer with deflection angles of 120°, 135°, and 150°]

[0137]

【 Figure 20 A schematic diagram of a prior art concentric hemispherical energy analyzer (CHA).

[0138]

【 Figure 21 [Indicates CHA aperture aberration map]

[0139]

【 Figure 22 Point source diagram of the concentric hemispheres of CHA

[0140]

【 Figure 23 A schematic diagram of a prior art concentric cylindrical mirror analyzer (CMA).

[0141]

【 Figure 24 [Image showing CMA aperture aberration curve]

[0142]

【 Figure 25 A schematic diagram of a prior art VLEED detector.

[0143]

【 Figure 26 [Schematic diagram of existing spin-resolved electron spectrometers]

[0144]

【 Figure 27 [Schematic diagram of other spin-resolved electron spectrometers in the prior art]

[0145]

【 Figure 28 Schematic diagram of a spin polarization analysis apparatus using a 90° spherical deflector

[0146]

【 Figure 29 [Illustrative diagram of the improved 90° deflector]

[0147]

【 Figure 30 Combination of 90° spherical deflector and lens

[0148]

【 Figure 31 A diagram illustrating the spin rotation of a multipole Wiener filter.

[0149]

【 Figure 32 [Illustrative diagram of the electrostatic deflection convergent energy analyzer in Example 9]

[0150]

【 Figure 33 [Illustrative diagram of the electrostatic deflection convergent energy analyzer in Example 10]

[0151]

【 Figure 34 [Illustrative diagram of the electrostatic deflection converging energy analyzer in Example 11]

[0152]

【 Figure 35 Aperture aberration curve of the electrostatic deflection converging energy analyzer in Example 11

[0153]

【 Figure 36 [Illustrative diagram of the electrostatic deflection convergent energy analyzer in Example 12] Detailed Implementation

[0154] First, the basic structure and measurement principles of existing standard energy analyzers for photoelectron spectroscopy or Auger electron spectroscopy, such as CHA and CMA, are explained. Then, the electrostatic deflection focusing energy analyzer of this invention is explained in comparison with these analyzers. Furthermore, the structure of existing spin polarizability analysis devices is also described below, and the features of this invention are clarified by comparing them with the spin vector distribution imaging device of this invention.

[0155] (1) About the concentric hemispherical energy analyzer (CHA)

[0156] like Figure 20 As shown, the CHA consists of an input lens that receives and converges electrons (or charged particles) emitted from the sample, a concentric hemisphere composed of an inner and outer sphere, a slit at the entrance of the concentric hemisphere, and a detector at the exit of the concentric hemisphere. It is an analyzer that uses the converging effect of a spherically symmetric electric field. Figure 20As shown, assuming the distance from the center O of the concentric hemisphere to the central axis (optical axis) of the input lens is R0, under the ideal spherically symmetric electric field, the electric potential of any point between the inner and outer spheres (distance r from O) is given by the following equation (1).

[0157] Here, E pass V0 is the path energy of the concentric hemisphere, r = R0 is the electric potential, and e is the elementary charge. The coefficient of the first term in equation (1) is determined by the equilibrium condition of the centrifugal force and the central force on the central track. The central track refers to the energy E incident perpendicularly from the optical axis of the input lens to the concentric hemisphere. k =E pass The electron orbit. When the centrifugal force is greater than the central force (i.e., E... k >E pass In the case of a stronger central force (i.e., E), the orbit will shift outwards. k <E pass In the case of (e.g., if the track deflects inwards), the E-track will pass through the entrance slit. k =E pass The electron beam, rotating 180° in a circular orbit around the central track, converges at the exit position and is detected by the detector. k Slightly higher than E pass The electron convergence point shifts away from the center O, E k Slightly lower than E pass The electron convergence point shifts towards the center O. Thus, the detector positioned at the exit point of the concentric hemispheres is able to... Figure 20 Energy dispersion is obtained in the direction shown. Additionally, a one-dimensional real-space image or emission angle distribution is obtained perpendicular to the plane of the paper.

[0158] exist Figure 20 In the schematic diagram, an image plane is formed at the entrance slit. In this case, a one-dimensional real-space image is obtained in the direction perpendicular to the detector plane. When a diffraction plane is formed at the entrance slit by switching the voltage applied to the input lens, a one-dimensional emission angle distribution is obtained in the direction perpendicular to the detector plane. Thus, by selecting a one-dimensional real-space image or angle distribution through the entrance slit of the concentric hemisphere, a one-dimensional real-space image or emission angle distribution accompanied by energy dispersion can be obtained by a detector located at the exit of the concentric hemisphere. Furthermore, if the energy is aligned with the sharp photoelectron peak from the core layer, the electrons incident on the concentric hemisphere essentially have a single energy. Therefore, the entrance slit is widened to allow a two-dimensional real-space image or angle distribution to be incident and displayed on the detector screen.

[0159] [Formula 2]

[0160]

[0161] The characteristics of the concentric hemispheres are then specifically represented numerically. First, the voltages applied to the inner and outer spheres of the concentric hemispheres are given. The radii R of the inner and outer spheres are also given. in R out (Refer to Figure 20 The path energy E and the center orbital radius R0 are determined by the analyzer design. pass The center orbital potential V0 is determined based on measurements. When E pass Once V0 is determined, the voltages applied to the inner and outer spheres can be calculated using the above equation (1). V0 is set to the same potential as the exit electrode of the input lens, and varies with the reduction ratio of the input lens (i.e., E...). pass The changes (or changes in the energy being analyzed) are due to variations in energy levels. Figure 20 In the diagram, the radii of the inner and outer spheres are R. in =0.75R0, R out =1.25R0. In this case, the voltage V applied to the inner and outer spheres is... in and V out E is given by equations (2) and (3) below, respectively. For simplicity, E is... pass Set at 1000 eV, with V0 as the reference, the voltages applied to the inner and outer spheres are approximately 667 V and -400 V, respectively. If we consider the electron energy (here, the path energy E)... pass The energy divided by the elementary charge e (i.e., the energy converted into accelerating voltage) is called the converted accelerating voltage. The absolute values ​​of the voltages applied to the inner and outer spheres are approximately 0.67 times and 0.4 times the converted accelerating voltage, respectively.

[0162] [Formula 3]

[0163] V in =0.6667E pass / e+V0 (2) [Formula 4]

[0164] V out = -0.4E pass / e+V0 (3)

[0165] Figure 20 The electron orbit shown for the concentric hemispheres is the orbit when the incident angle α towards the concentric hemispheres is limited to ±3°. To achieve high convergence at the exit of the concentric hemispheres, it is necessary to control the incident angle α to be relatively small. Figure 21 The left figure shows the calculated orbit results when the incident angle α is increased to ±8°. Here, the center orbit radius R0 is set to 100mm. Figure 21The upper right figure shows the aperture aberration, and the lower right figure shows the relationship between the incident angle α and the exit angle α'. According to theoretical calculations, the aperture aberration of the concentric hemisphere is given by the following equation (4).

[0166] [Formula 5]

[0167] A(α)=-2R0α 2 +O(α 4 (4)

[0168] Here, O(α) 4 ) is the set of higher-order terms of α. In Figure 21 The diagram shows the aberration curve (dashed line) for myopia and the calculation results of aperture aberration (including higher-order terms) using only the first term on the right side of equation (4) above. It can be seen that the two are very consistent at an incident angle of ±7° (=0.12rad). In equation (4), α... 2 The coefficient (-2R0) is the aperture aberration coefficient (hereinafter referred to as C). A (indicated) Figure 21 In the case of C A =-2R0=-200. For example... Figure 21 As shown, the aperture aberration in the concentric hemispheres increases with the square of α. When α = 4°, an aberration of approximately 1 mm appears at R0 = 100 mm. Thus, without sufficiently limiting the incident angle, large aperture aberrations will occur, making it difficult to obtain two-dimensional real-space images. Furthermore, as shown below, to obtain high energy resolution, the incident angle needs to be limited to a small value to suppress aperture aberrations.

[0169] The energy resolution of the FWHM (full width at half maximum) of the concentric hemisphere is estimated by the following equation (5).

[0170] [Formula 6]

[0171]

[0172] Here, α max The maximum value of the incident angle on the concentric hemispheres, where w is the width of the inlet and outlet slits. The energy resolution defined by the above equation (5) represents the energy width of the FWHM that can be separated when an electron incident from a region of width w is truncated by a region of width w. When the energy E incident on the concentric hemispheres is... pass When the intensity of electrons is high, the slit width can be reduced to suppress its contribution to energy resolution; otherwise, low intensity will hinder the reduction of the slit width. Therefore, in many analyzers, energy resolution is improved by increasing the central orbital radius R0. The degree of reduction in slit width depends on the spot size or flux of the X-rays or electrons irradiating the sample, as well as the magnification of the input lens.

[0173] In current photoelectron spectroscopy or Auger electron spectroscopy, the spot size of X-rays or electron beams on the sample can reach about 10 to 100 μm, but here it is set slightly larger, at 50 μm. When the magnification of the input lens is 5, the magnification of the concentric hemisphere is 1, so setting the slit width to 0.25 mm seems appropriate. In this case, the contribution of the second term on the right side of equation (5) is 1 / (8·R0). When R0 = 100 mm, this contribution is 0.125 × 10⁻⁶. -2 When R0 = 200 mm, it is 0.0625 × 10. -2 By limiting the incident angle α max This can reduce the suppression of the first term on the right-hand side of equation (5). However, in this case, a significant decrease in intensity is unavoidable. For example, if α max When the angle changes from ±3° to ±1°, the intensity decreases to about 1 / 9.

[0174] Table 1 below shows the results when α is set. max When the angle is ±2° to ±8°, the energy resolution of the concentric hemisphere is calculated using the first term on the right side of equation (5). It can be seen that, in order to obtain high energy resolution while avoiding a significant reduction in intensity, it is necessary to adjust the incident angle α of the concentric hemisphere. max Set it to approximately ±2 (or ±3°).

[0175] Table 1

[0176]

[0177] Figure 22 It shows that when energy E pass A two-dimensional real-space image obtained at the exit of the concentric hemispheres when electrons are incident, assuming that the point sources on the incident surface are 5×5 (1mm spacing), at the incident angle α. max Within the cone angle range, the surface normal is used as the direction from the center of each point.

[0178] Consider α max From ±1° to ±6°. Here, the coordinate x' is along... Figure 21 The coordinate y' is taken perpendicular to the paper surface, in the direction shown. As α... max As α increases, aperture aberrations increase, and spatial resolution in the x′ direction decreases significantly. max A value of ±2° or less will yield a better real-space image. If α maxIf the angle is ±4° or greater, two point sources 1 mm apart will be connected and indistinguishable in the real space image. To obtain a high spatial resolution two-dimensional real space image at the exit of the concentric hemisphere, it is considered necessary to limit the incident angle toward the concentric hemisphere to ±1°, ±2°, or less. However, limiting the incident angle to ±1° or less results in a significant reduction in the intensity of photoelectrons.

[0179] About the Concentric Cylindrical Mirror Analyzer (CMA)

[0180] like Figure 23 As shown, the CMA consists of a coaxial cylindrical section formed by an inner and outer cylinder, and a slit and detector located at the rear of the coaxial cylindrical section. It is an analyzer that utilizes the converging effect of the cylindrical symmetrical electric field. Here, the entrance for electrons to enter the inner cylinder and the exit for electrons to exit are cylindrical gates, so that electrons can pass through without disrupting the cylindrical symmetrical electric field.

[0181] In the case of an ideal cylindrical symmetric electric field, the electric potential at any point between the inner and outer cylinders of the CMA (from a distance r from the central axis z) is represented by the following equation (6).

[0182] [Formula 7]

[0183]

[0184] Here, E pass It is the path energy of CMA, R in Where is the inner cylinder radius, and e is the elementary charge. K is a parameter that determines the electric field strength. Figure 23 The value is set to K = 1.31. Since the inner cylinder is usually set to ground potential, in equation (6), r = Rin and V(r) = 0. When setting any potential for the inner cylinder, this potential can be added to equation (6). Figure 23 In this case, the ratio of the radius of the outer cylinder to that of the inner cylinder is 2.66. According to equation (6), when E... pass When the voltage is 1000 eV, the voltage applied to the outer cylinder is approximately -746 V. If the electron energy E... pass Dividing by the value of the elementary charge e as the equivalent accelerating voltage, the absolute value of the voltage applied to the outer cylinder is approximately 0.75 times the equivalent accelerating voltage. The voltage applied to the inner cylinder is 0 times the equivalent accelerating voltage. The central orbit is the energy E incident on the cylindrical symmetrical electric field from the origin on the sample (the intersection of the central axis z and the sample surface) at an angle θ = 42.3° to the central axis z of the CMA. k =E pass The electronic orbit.

[0185] The incident angle of the cylindrical symmetric electric field on an arbitrary trajectory, measured from the central axis z, is denoted by θ = 42.3° + α, where α is the incident angle. Electrons incident on the cylindrical symmetric electric field are deflected by a force towards the central axis z, and then E... k =E pass The electron orbital beam, with the central orbital at an angle of 42.3° to the central axis z, passes through the exit gate and converges at the slit position. Although not shown, when E k >E pass When E moves to the right, the convergence point moves to the right. k <E pass When E moves to the left, the convergence point shifts to the left. k When the energy resolution is deflected, electrons cannot pass through the slit.

[0186] Figure 24 The relationship between the incident angle α and the aperture aberration is shown when the distance L between the origin and the point where the central orbit intersects the z-axis on the specimen is set to 275 mm. (If L is set to 275 mm, the length of the central orbit from the origin to the slit position is...) Figure 21 The central orbits of the concentric hemispheres shown are approximately the same length. Figure 24 In the diagram, results for K=1.33 and K=1.35 are also shown, in addition to K=1.31. When K=1.33, L=279mm, and when K=1.35, L=283mm. When K=1.31, α=0° becomes the stagnation point, and aberrations are almost zero in its vicinity. Therefore, if you want to minimize aberrations, you can choose K=1.31 to limit the angle of incidence. Conversely, if you want to increase the angle of reception even at the cost of convergence, you should set K to a value slightly greater than 1.31 (e.g., around 1.33). The value of K can be easily changed by applying a voltage to the outer cylinder. However, it is important to note that, as mentioned above, the value of L also changes when the value of K changes. That is, when the value of L changes, the optimal slit and detector positions also change.

[0187] By comparison Figure 21 and Figure 24 As shown in the aperture aberration diagram, the cylindrical symmetric electric field used for CMA exhibits stronger converging power than the spherical symmetric electric field used for CHA. This is because CMA possesses third-order aperture aberrations, while CHA has second-order aperture aberrations. Consequently, while high energy resolution is expected for CMA, it does not actually achieve the same level of energy resolution as CHA. This is because CMA uses two gates, where electrons are scattered at the entrance and exit of the cylindrical symmetric electric field, leading to reduced convergence. Therefore, CMA struggles to achieve the high energy resolution attained by CHA. Furthermore, due to the scattering effect of the gates, CMA is less likely to yield high-resolution real-space images and emission angle distributions.

[0188] (3) Existing spin polarization analysis devices

[0189] Representative spin polarizability analysis devices include the Mott detector, the SPLEED detector, and the VLEED detector, which utilize spin-orbit interactions. In addition, a two-dimensional spin analyzer using an Ir(001) single-crystal substrate has been developed in recent years (Non-Patent Document 10). Figure 25 This is a schematic diagram of a VLEED detector (Non-Patent Document 11). This spin polarization analyzer is a detector that utilizes the fact that when low-energy electrons are incident on a target magnetized by a coil, the intensity of the reflected electrons depends on whether the electron spin is parallel or antiparallel to the magnetization of the target. An iron thin film is used as the target.

[0190] Figure 26 This is a schematic diagram of a spin polarizability analysis apparatus combining CHA and VLEED. z and z' are the optical axes between the sample and the concentric hemisphere, and between the concentric hemisphere and the sample, respectively.

[0191] y and y′ are axes connecting the center of the concentric hemispheres to the entrance or exit, and x and x′ are axes perpendicular to z and y, and z′ and y′, respectively. Since the CHA consists only of an electric field, the spin direction of electrons does not change even if they pass through the CHA.

[0192] exist Figure 26 In the spin polarization analysis apparatus shown, a coil is positioned in the y' direction to measure the spin polarization in the y direction within the sample plane. When also using... Figure 26 When using a spin polarizability analyzer to determine the spin polarizability in the x-direction, simply rotating the sample 90° inward is sufficient. However, rotating the sample causes a slight deviation in the measurement area. This can be a fatal problem in the analysis of small areas. As a way to avoid the above problem, it is effective to provide a spin rotator that spins 90° in a plane perpendicular to the lens axis in the input lens or the front section of the rotary analyzer.

[0193] Therefore, without rotating the sample, the spin in the sample plane can be rotated by 90°. Alternatively, when using a VLEED spin polarization analysis apparatus, coils capable of magnetizing the target in two directions can be placed instead of a spin rotator. By switching the magnetization direction, the spin polarization in the x and y directions in the sample plane can also be measured. However, neither of the above methods can measure the spin polarization in the z direction. An effective method for measuring the z-direction spin polarization is to bend the electron's orbit by 90° using an electric field before the electron enters the target.

[0194] Figure 27This is a schematic diagram of a spin polarizability analyzer used in this manner. Here, the electron orbit is bent by 90° in the z'y' plane, thereby enabling the measurement of the spin polarizability in the direction perpendicular to the sample surface (z-direction). As a method for bending the electron orbit by 90°, a method such as... Figure 27 The 1 / 4 cylindrical electrostatic 90° deflector shown is an example of such a device.

[0195] To measure the spin polarizability in the x and y directions without rotating the sample, such as Figure 27 As shown, spin rotators are installed between the input lens and the concentric hemisphere, and between the 90° deflector and the spin analyzer. Figure 27 In this setup, both spin rotators (SR1 and SR2) are set to OFF. However, if SR1 is set to OFF and SR2 is set to ON, the rotational polarizability in the x-direction within the sample plane can be measured. If both SR1 and SR2 are set to ON, the spin polarizability in the y-direction within the sample plane can be measured. When using a VLEED spin analyzer, a coil can be added in the x' direction instead of setting a second spin rotator SR2. Using the method described above, three-dimensional spin polarizability can be measured.

[0196] In a 90° deflector, electrons deflect 90° along a circular arc under the condition that the central force and centrifugal force generated by the cylindrical electric field are in balance. Alternatively, a spherically symmetric electric field can be used instead of the cylindrical electric field to achieve the same 90° deflection. Figure 28 This is a schematic diagram of a spin polarizability analyzer using a 90° spherical deflector. A 90° deflector or 90° spherical deflector is simple in structure and suitable for bending a parallel beam by 90°. However, these deflectors cannot converge an angled beam emanating from a single point. In the case of a cylindrical electric field, there is convergence within the deflection plane, but not in the direction perpendicular to it. Furthermore, the convergence within the deflection plane is sufficient to converge a beam from a single point at a deflection angle of 127°, while a deflector with a deflection angle set to 90° cannot achieve sufficient convergence. In a spherically symmetric electric field, convergence exists not only within the deflection plane but also in the direction perpendicular to it, but the beam emanating from a single point converges at a deflection angle of 180° and becomes a diverging beam at the 90° deflection angle.

[0197] Figure 29 This is a schematic cross-sectional view of an improved 90° deflector. According to the improved 90° deflector, an electron beam emitted from a single point can be deflected 90° within the deflection plane and converged. However, in this method, the beam cannot converge simultaneously in both the direction within the deflection plane and the direction perpendicular to the deflection plane. In the case of a 90° spherical deflector, such as... Figure 30As shown, the extended beam can be narrowed by combining lenses at the exit point. However, this method cannot simultaneously converge the beam in two directions.

[0198] Figures 27-30 The 90° deflection analyzer shown can be used for three-dimensional measurement of spin polarizability. Alternatively, a Wiener filter-type spin rotation device can be used instead of such a deflection analyzer for three-dimensional measurement of spin polarizability. In the Wiener filter-type spin rotation device, the spin perpendicular to the sample surface can be rotated 90° and tilted in the in-plane direction without changing the direction of the beam. Furthermore, as... Figure 31 As shown, three-dimensional spin manipulation can be performed using a multipole Wiener filter. However, even this method cannot achieve two-dimensional convergence of a beam with angular spread while simultaneously rotating the beam with a 90° spin.

[0199] As described above, existing concentric hemispherical energy analyzers (CHA), concentric cylindrical mirror analyzers (CMA), and existing spin-resolved electron spectrometers have been described. Below, some embodiments of the present invention will be described in detail with reference to the accompanying drawings. Furthermore, the scope of the present invention is not limited to the following embodiments and examples; many modifications and variations are possible.

[0200]

Example 1

[0201] (90° electrostatic deflection converging energy analyzer)

[0202] Figure 1 (1) is a schematic diagram of an embodiment of the 90° electrostatic deflection converging energy analyzer of the present invention. The 90° electrostatic deflection converging energy analyzer 1 has five outer electrodes EL1, EL2, EL3, EL4, EL5 and three inner electrodes EL6, EL7, EL8, which are arranged along the shape of two rotating bodies. Electron entrance holes 11 and exit holes 12 are formed on the rotation axis 13 of the electrodes at both ends of the outer electrodes, respectively. The inner surface shape of the outer electrodes is a conical shape with a smaller diameter towards the entrance hole 11 and exit hole 12, except for the central electrode (EL3). The outer surface shape of the inner electrodes is a conical shape with a smaller diameter towards the entrance hole 11 and exit hole 12, except for the central electrode (EL7). When the position of the rotation axis direction is represented by z0, and the inlet of the energy analyzer 1 is z0 = 0 and the outlet is z0 = L, the outer electrodes and inner electrodes are symmetrical with respect to the central plane 14 at z0 = L / 2.

[0203] like Figure 1As shown in (2), the energy analyzer 1 is provided with five outer electrodes EL1, EL2, EL3, EL4, EL5 and three inner electrodes L6, EL7, EL8, on the three-dimensional surface shape of two rotating bodies obtained by rotating on the rotation axis 13 along the lower bottom of two isosceles trapezoids (20a, 20b) with different heights. The voltage used to accelerate and decelerate electrons is applied to the outer and inner electrodes in proportion to the energy of the incident electrons. In particular, a voltage more than three times the converted acceleration voltage obtained by converting the energy of the electrons into an acceleration voltage based on the potential of the outer electrode with the entrance hole 11 is set on one or more electrodes other than the inner electrodes at both ends, so that the electron center track and the rotation axis 13 are at a specified incident angle ( Figure 1 The voltage applied to each electrode is adjusted so that the central orbit of electrons incident from the entrance aperture 11 and the rotation axis 13 converge at the position of the exit aperture 12 at a specified exit angle (45°). Thus, electrons with angular expansion can be received, deflected by 90° and converged in two dimensions.

[0204] exist Figure 1 In (1), in addition to the approximate shape of the electrodes, the electron orbit and equipotential lines are also shown. The electron emitted from z0 = 0 is first accelerated by a gentle electric field, and then changes direction simultaneously under the acceleration of a strong electric field, with z0 = L / 2 as the center and parallel to the rotation axis z0. Then, while decelerating, it changes direction and converges to the exit position.

[0205] Electrons in the central orbit enter at an incident angle of 45° and exit at an exit angle of 45° to reach the convergence point. Therefore, the orientation of the central orbit is rotated by 90° by the electric field. Assuming the incident angle measured from the central orbit is α, then in Figure 1 (1) shows the electron orbits from α = -8° to +8° in 1° increments. For example... Figure 1 As shown in (1), the sample can be placed on the surface where z0 = 0, or, as described later, an input lens can be placed on the surface of the sample. When the sample is placed on the surface where z0 = 0, an electron beam or light is irradiated through a hole (not shown) formed on the inner or outer electrode. Here, an electron gun can also be placed in the inner electrode.

[0206] In addition, although Figure 1 (1) is not shown. A slit for energy selection is provided at the outlet position, and a detector is provided at the rear of it. When the sample is placed on the plane of z0=0, high energy resolution is obtained only in the low energy region analysis, but due to axial symmetry, a large acceptance angle is expected, and therefore high sensitivity will be achieved.

[0207] Figure 2 (a) is shown Figure 1(1) is a graph showing the aperture aberration of a 90° electrostatic deflection converging energy analyzer. Here, the analyzer length L is set to 275 mm. (At this time, the length of the central track is...) Figure 21 The central orbits of the concentric hemispheres of the CHA shown are approximately the same length. Figure 2 In graph (a), A, B, C, and D represent the results of adjusting the voltage applied to each electrode (EL1~EL8), thereby setting the range of the incident angle α (receiving angle) of the energy analyzer to ±2°, ±6°, ±8°, and ±10°, and reducing image blurring caused by aperture aberration. It can be seen that, compared with... Figure 21 Compared to the case of CHA, image blurring caused by aperture aberration is greatly reduced. In CMA, as shown... Figure 24 As shown, by adjusting the applied voltage according to the receiving angle, image blurring caused by aperture aberration is minimized. However, in this case, the challenge lies in the change of the convergence position.

[0208] In the energy analyzer of this invention, the applied voltage can be optimized without changing the convergence position. Furthermore, image blurring due to aperture aberration can be reduced to the same level as or lower than that of a CMA. Importantly, unlike a CMA, the energy analyzer of this invention does not use a gate electrode. Energy analyzers with imaging capabilities preferably do not use gate electrodes because the trajectory of electrons passing through the gate electrode is disturbed.

[0209] Figure 2 (b) shows the relationship between the incident and exit angles when the receiving angle is ±10°. In CHA, as... Figure 21 As shown, the deviation of the absolute values ​​of the incident and exit angles becomes significant starting from around α = ±5°. However, in the energy analyzer of the present invention, the absolute values ​​of the incident and exit angles are approximately consistent across all receiving angles; that is, the angle is conserved. Therefore, the energy analyzer of the present invention is suitable for measuring angular distributions. The adjusted voltages for A to D are shown in Table 2 below. The values ​​shown here are relative to the path energy E. pass =1000eV voltage value. The energy values ​​for other paths can be determined by changing the values ​​in Table 2 related to E. pass The voltage is obtained proportionally. Additionally, although Table 2 shows the voltage value when electrode EL1 is set to ground potential, EL1 can also be a potential other than ground potential, V1 (≠0). In this case, the voltage obtained by applying V1 to the voltage shown in Table 2 is applied to the electrodes other than EL1. In A-D, electrodes EL1 and EL5 are set to ground potential, EL2, EL4, EL6, and EL8 are set to the same potential, and only the voltages of EL3 and EL7 are adjusted.

[0210] If the energy E of the electron is...pass Dividing by the value of the elementary charge e as the equivalent accelerating voltage, a voltage of approximately 3 to 4 times the equivalent accelerating voltage is applied to EL3, and a voltage of approximately 23 to 25 times the equivalent accelerating voltage is applied to EL7. Compared to the voltages applied to CHA and CMA, the voltages applied to EL3 and EL7 are one or two orders of magnitude higher. Furthermore, the optimal voltage applied to each electrode varies depending on the shape and arrangement of the electrodes. As a result, a voltage of approximately 0 to 10 times the equivalent accelerating voltage is applied to EL3, and a voltage of approximately 10 to 50 times the equivalent accelerating voltage is applied to EL7. However, when high convergence performance is not required, the voltage applied to EL7 can be 3 to 5 times or more, and 10 times or less, the equivalent accelerating voltage.

[0211] Table 2

[0212]

[0213] Figure 3 (a) to (d) show Figure 1 (1) The results of energy dispersion calculation in a 90° electrostatic deflection convergent energy analyzer.

[0214] ΔE(=E-E pass ) and path energy E pass The ratio between them is in the range of -0.05 to +0.05. The energy resolution can be estimated from this dispersion. Table 3 below shows the calculated contribution corresponding to the first term on the right side of the above equation (5), which represents the energy resolution in the CHA case. This is an estimate of the possible energy resolution when the spot size of the illumination beam is close to zero.

[0215] Comparing Tables 1 and 3, it can be seen that when the acceptance angle is less than ±6°, the resolution is better than that of CHA. However, the contribution corresponding to the second term on the right side of the above equation (5) (effective spot size of the irradiated beam) is approximately five times that in the case of CHA. Therefore, when the spot size of the irradiated beam is large, Figure 1 (1) The 90° electrostatic deflection converging energy analyzer is inferior to CHA in terms of energy resolution. However, high-throughput beams with diameters of approximately Φ10–100 μm are commonly available. When such micro-beams are used, the contribution of the 90° electrostatic deflection converging energy analyzer to the second term on the right side of equation (5) above becomes smaller, thus enabling higher energy resolution.

[0216] Table 3

[0217]

[0218] Figure 4 (a) to (f) show, for example Figure 22shown Figure 1 (1) The result of the two-dimensional real-space image calculated in a 90° electrostatic deflection converging energy analyzer. Here, the maximum value of the incident angle α (receiving angle) is considered to be between ±2° and ±8°. Figure 22 As shown, in the concentric hemispheres of the CHA, unless the receiving angle is set to ±2° or less, large aperture aberrations occur, making it impossible to obtain a practical two-dimensional image. Therefore, as... Figure 4 As shown, in a 90° electrostatic deflection converging energy analyzer, even when the incident angle is extended to approximately ±5° to ±6°, a practical two-dimensional image can be obtained. Furthermore, at this receiving angle, as can be seen from the comparison in Tables 1 and 3 above, energy resolution comparable to that of CHA can be achieved.

[0219] Figure 5 (a) to 5(h) are schematic diagrams of embodiments of the 90° electrostatic deflection converging energy analyzer of the present invention with the same effect, except that the shape and arrangement of the electrodes are the same as those of the present invention. Figure 1 (1) The energy analyzer shown is different.

[0220] In either example, electrons enter through an entrance port located at one end of the outer electrode and converge at an exit port located at the other end. Figure 5 In the following description, the shape of the electrode refers to the inner surface shape in the case of an outer electrode, and the outer surface shape in the case of an inner electrode.

[0221] Figure 5 (a) illustrates the energy analyzer of the present invention, characterized in that a plurality of outer electrodes and a plurality of inner electrodes are arranged along two rotating surfaces formed on the inner and outer sides of a common rotation axis, and the outer electrodes and inner electrodes have a toroidal shape. Here, the outer electrodes and inner electrodes with the toroidal shape have smaller diameters toward the entrance and exit holes, and the space formed between them becomes narrower closer to the ends.

[0222] Figure 5 (b) shows a schematic diagram of the energy analyzer of the present invention, characterized in that a plurality of outer electrodes and a plurality of inner electrodes are arranged along two rotating surfaces formed on the inner and outer sides of a common rotation axis, and that some of the outer electrodes are annular electrodes with circular holes drilled in the plate, and the inner electrodes have a tapered shape with decreasing diameters toward the entrance and exit holes. Here, the aperture of the annular electrodes near the entrance and exit holes is set to be small, so that the space formed between the outer and inner electrodes around the entrance and exit holes becomes narrower.

[0223] Figure 5(c) shows a schematic diagram of the energy analyzer of the present invention, characterized in that a plurality of outer electrodes and a plurality of inner electrodes are arranged along two rotating surfaces formed on the inner and outer sides of a common rotation axis, and that some of the outer electrodes are annular electrodes with a conical shape, the diameter of which decreases toward the entrance and exit apertures. Here, with Figure 5 Similar to case (b), the inner electrode has a tapered shape that decreases toward the diameter of the inlet and outlet holes, and the annular electrode is configured to have a smaller aperture near the inlet and outlet holes.

[0224] Figure 5 (d) shows a schematic diagram of the energy analyzer of the present invention, characterized in that a plurality of outer electrodes and a plurality of inner electrodes are arranged along two rotating surfaces formed on the inner and outer sides of a common rotation axis, and the inner electrodes extend in a stepped manner to the vicinity of the entrance and exit apertures. (See diagram below.) Figure 1 In the embodiment of (1), the outer electrode has a tapered shape, wherein the diameter decreases toward the inlet and outlet holes, and the space formed between the outer electrode and the inner electrode narrows around the inlet and outlet holes.

[0225] Figure 5 (e) shows a schematic diagram of the energy analyzer of the present invention, characterized in that a plurality of outer electrodes and a plurality of inner electrodes are arranged along two rotating surfaces formed on the inner and outer sides of a common rotation axis, the inner electrodes being rod-shaped extending near the entrance and exit holes. Here, the plurality of rod-shaped electrodes may have different outer diameters.

[0226] Figure 5 (f) shows a schematic diagram of the energy analyzer of the present invention, characterized in that a plurality of outer electrodes and a plurality of inner electrodes are arranged along two rotating surfaces formed on the inner and outer sides of a common rotation axis, and the inner electrodes have an axisymmetric shape with their diameter widening at the ends.

[0227] Figure 5 (g) and 5(h) are embodiments of the energy analyzer of the present invention, wherein the number of inner electrodes and outer electrodes is set to two each. Figure 5 In (g), multiple outer electrodes and multiple inner electrodes are arranged along two rotational surfaces formed on the inner and outer sides of a common rotational axis, and the outer electrodes are... Figure 1 (1) The same electrode, the inner electrode is composed of a rod-shaped electrode or a cylindrical electrode extending to the vicinity of the inlet and outlet holes, and a bead-shaped electrode passing through the rod-shaped electrode or the cylindrical electrode.

[0228] Figure 5 (h) is characterized in that the outer electrode consists of an axisymmetric electrode extending to the entrance and exit apertures and an axisymmetric electrode disposed inside it. The inner electrode has a tapered shape whose diameter decreases towards the entrance and exit apertures. Figure 5(e) Figure 5 (f) Figure 5 (g) Figure 5 In design (h), the convergence performance is relatively low, therefore the receiving angle is set smaller than in other designs. If the receiving angle can be even smaller, then combinations are possible. Figure 5 (g) inner electrode and Figure 5 (h) The outer electrode of the present invention is designed with a total of four electrodes: two inner electrodes and two outer electrodes. Figure 5 In type (g), to improve convergence performance, it is effective to optimize the shape by increasing the degree of freedom in the shape of the inner electrode or by increasing the number of beaded electrodes. Additionally, in Figure 5 In type (h), the convergence performance can be improved by increasing the number of outer electrodes.

[0229] and Figure 1 The situation is the same as in (1), in Figure 5 In (a) to (h), the voltage used to accelerate and decelerate electrons is applied to the outer and inner electrodes in proportion to the energy of the incident electrons. A voltage is applied to one or more inner electrodes, excluding the electrodes at both ends of the inner electrodes. This voltage is 3 to 5 times or more of the converted accelerating voltage obtained by converting the energy of the electrons into an accelerating voltage based on the potential of the outer electrode with the incident aperture. However, to obtain high converging performance, it is preferable to set the voltage to approximately 10 to 50 times the converted accelerating voltage, based on the potential of the outer electrode with the incident aperture.

[0230] In the electrostatic deflection convergent energy analyzer of the present invention, the number of electrodes is not limited to... Figure 1 (1) or Figure 5 The number of electrodes shown. The number of inner and outer electrodes can be two or more, but considering performance and cost, it is preferable to have 3 to 5 inner electrodes and 3 to 7 outer electrodes. Additionally, as... Figure 1 (1) and Figure 5 As shown, the inner and outer electrodes preferably have a shape and arrangement in which the space formed between them narrows around the entrance and exit apertures. This allows the electric field applied to the entrance and exit apertures to remain relatively small. Furthermore, the inner and outer electrodes are preferably symmetrical with respect to a plane that intersects perpendicularly with the line connecting the entrance and exit apertures at its midpoint. However, the actual design does not necessarily have to be planar symmetrical; non-planar symmetrical shapes can be used depending on the overall design of the analytical apparatus. Figure 1 and Figure 5In the design, electrons in the central orbit enter at an incident angle of 45° and exit at an exit angle of 45°. However, the incident and exit angles of the central orbit are not limited to these. For example, a 90° deflection electrostatic convergence energy analyzer with an incident angle of 50° and an exit angle of 40° can also be designed. In this case, the inner and outer electrodes are preferably shaped asymmetrically with respect to the plane that intersects perpendicularly with the straight line connecting the entrance and exit holes at the midpoint of the straight line.

[0231] In addition, although Figure 5 The diagram illustrates various electrode shapes, which can be freely combined to design various forms of electrostatic deflection converging energy analyzers, and are not limited to these. Figure 5 The shape shown. The combination of shape types is not limited to the outer electrode and the inner electrode; the entrance hole side and the exit hole side can also be freely changed.

[0232]

Example 2

[0233] (Imaging-type electronic spectrometer)

[0234] Figure 6 (a) is a schematic diagram of one embodiment of the imaging electronic spectrometer of the present invention, wherein the input lens is disposed in Figure 1 In the front section of the (1) 90° electrostatic deflection converging energy analyzer, the projection lens is located in the rear section. Electrons emitted from the sample are decelerated by the input lens before entering the energy analyzer, achieving high energy resolution over a wide energy range. The 90° electrostatic deflection converging energy analyzer can be expected to have significant effects when combined with an input lens that has a wide-angle receiving capability. As mentioned above, in order to obtain a usable two-dimensional real-space image and emission angular distribution with spatial or angular resolution using CHA, the incident angle to the concentric hemisphere needs to be set to ±2° or less.

[0235] However, if a spherical aberration-corrected lens with a receiving angle of ±50° or a converging lens with a full-angle (±90°) receiving angle is used, and if electrons emitted from the sample are received at an opening angle of ±50° or ±90° and converged at an opening angle of ±2° or less, the magnification becomes very high. Even if the input lens converges with the same energy as at incidence (without deceleration), if the opening angle is ±50° or ±90° and converged at an opening angle of ±2° or less, the magnification will become approximately 25x or 45x. The magnification increases further with deceleration. For example, if 1000 eV electrons are decelerated to 50 eV, according to the law of constant luminance, the magnification is approximately 100 to 200x. In cases with even higher resolution, such as... Figure 6As shown in (a), inserting small holes or slits on the incident and exit sides of the energy analyzer prevents most electrons from passing through, resulting in a significant decrease in sensitivity. Therefore, when the 90° electrostatic deflection converging energy analyzer of the present invention is used instead of the CHA, the incident angle to the energy analysis section can be widened by about 3 times, and the sensitivity can be improved by about 9 times compared to the case of using the CHA.

[0236] Figure 6 (b) The device has the same Figure 6 (a) has the same basic structure as the device, but the structure of the energy analyzer is slightly different. Figure 6 In (b), the energy analyzer is constructed as a 180° rotating body instead of a 360° rotating body to save space. Figure 7 It shows Figure 6 Cross-sectional views of the energy analyzers perpendicular to the paper in (a) and (b). Figure 7 In the 360° rotating body type shown in (a), the inner electrode is fixed by a fixing foot. The fixing foot is positioned where its influence on the electric field is minimized, and electrodes EL6 and EL8 are fixed to electrodes EL2 and EL4 respectively via the fixing foot. In the 180° rotating body type, as shown in (a), the inner electrode is fixed by a fixing foot. Figure 7 (b) shows the compensation electrode to compensate for the electric field at the cut surface. Using an energy analyzer with a rotation angle of 180° or less instead of a 180° rotating energy analyzer can save space. In this case, it is preferable to set the rotation angle between 90° and 180°. Furthermore, in the case of an energy analyzer with a rotation angle of 180° or less, such as... Figure 7 As shown in (b), a compensation electrode is provided to compensate for the electric field at the cut surface.

[0237]

Example 3

[0238] (Reflection Imaging Electron Spectrometer)

[0239] Figure 8 An embodiment of the reflectance imaging electron spectrometer of the present invention is shown. The reflectance imaging electron spectrometer of this embodiment is characterized in that electrons deflected and converged by the 90° electrostatic deflection converging energy analyzer of Embodiment 1 are reflected by a single crystal mirror, and then deflected and converged again by 90°. Electrons emitted from the sample are converged by the input lens and enter the energy analyzer through a small aperture tilted at 45°. The incident electrons are deflected by 90° and converged, reflected by the single crystal mirror, and converged again by 90° to return to the position of the entrance aperture, from where they are emitted in a direction perpendicular to the incident direction. The emitted electrons are imaged as a two-dimensional real-space image or emission angle distribution by the projection lens and applied to the detector.

[0240] The entrance aperture also serves as the exit aperture for selecting energy, and the energy resolution and sensitivity largely depend on the size of this aperture. Therefore, in order to adjust the energy resolution and sensitivity according to the measurement, the aperture section preferably has multiple apertures of different sizes, and it is desirable to have a switching mechanism for them, or a mechanism such as the aperture size being freely adjustable.

[0241] because Figure 8 The energy analyzer in the reflectance imaging type electron spectrometer shown is... Figure 6 The energy analyzer shown has twice the energy dispersion, thus allowing for higher energy resolution. However, noise may increase and the signal-to-noise ratio (SN) may decrease due to inelastic scattering, for example, from a single crystal mirror located in the exit aperture of the energy analyzer. Therefore, to reduce noise, energy sorting in two stages (two convergence points) is effective. The sorting at the aforementioned aperture is the second stage; the first stage uses... Figure 8 The energy separation mirror shown is a single-crystal mirror. In a single-crystal mirror used for energy separation, the portion corresponding to the aperture is single crystal, while the other portions are covered with electron-absorbing material.

[0242]

Example 4

[0243] (Spin vector distribution imaging device)

[0244] Figure 9 It shows the use of Figure 1 (1) An embodiment of the spin vector distribution imaging device of the present invention, which is a 90° electrostatic deflection converging energy analyzer. Figure 9 In the spin vector distribution imaging apparatus shown, as illustrated, a two-dimensional spin filter 8 is provided to measure a two-dimensional real-space image or emission angle distribution by spin resolution. An electrostatic lens 19 is positioned in front of the two-dimensional spin filter 8 to allow electrons to enter and be adjusted with appropriate energy and angle. Then, the electrons reflected by the two-dimensional spin filter 8 are projected onto the first detector 4a through the first projection lens 3a. The two-dimensional spin filter 8 can be deflected from the optical axis. In the deflected state, the second projection lens 3b and the second detector 4b are used to obtain a typical (spin-integrated) two-dimensional real-space image or two-dimensional emission angle distribution.

[0245] Spin rotators 7a (SR1) and 7b (SR2), located on the optical axis of the front and rear sections of the 90° deflection energy analyzer 1, are used for three-dimensional spin resolution in and out of the sample plane. SR1 and SR2 are set to either rotate the spin 90° (hereinafter referred to as "ON") on a surface perpendicular to the optical axis or not rotate (hereinafter referred to as "OFF"). When both SR1 and SR2 are OFF, the spin polarizability in the y-direction (perpendicular to the paper plane) in the sample plane can be measured. To measure the spin polarizability in the x-direction in the sample plane, simply set SR1 to ON; to measure the spin polarizability in the z-direction (out of the paper plane), simply set SR2 to ON.

[0246] exist Figure 9 In the spin vector distribution imaging apparatus, although the first projection lens 3a and the first detector 4a are positioned on the same plane as the deflection plane, the two-dimensional spin filter 8, the first projection lens 3a, and the first detector 4a can also be rotated 90° about the intersection of the z' axis and the z” axis perpendicular to the paper plane. In this case, when both SR1 and SR2 are OFF, the spin polarizability in the direction perpendicular to the sample plane (z direction) can be measured. Furthermore, to measure the spin polarizability in the x direction within the sample plane, both SR1 and SR2 are set to ON; to measure the spin polarizability in the y direction within the sample plane, only SR2 needs to be set to ON.

[0247] Despite Figure 9 The following embodiments illustrate a rotational vector distribution imaging apparatus with a spin rotator, but the spin rotator is not required. Instead of a spin rotator, the direction of the spin to be detected can be determined by rotating the sample and / or rotating a spin analyzer consisting of a two-dimensional spin filter, a projection lens, and a detector.

[0248] In addition, although Figure 9 The diagram shows a spin vector distribution imaging device using an energy analyzer of the 360° rotating body type, but it can also be configured as a spin vector distribution imaging device using an energy analyzer with a rotation angle of 180° or less.

[0249]

Example 5

[0250] (Spin vector distribution imaging device)

[0251] Figure 10 Is using Figure 8 The diagram shows a simplified version of a spin vector distribution imaging device for a reflective imaging type electron spectrometer. A two-dimensional spin filter 8, such as Au / Ir(001), is used instead of a single crystal mirror. Thus, a two-dimensional real-space image or emission angle distribution of spin analysis can be obtained through the detector. Input lens 2 and... Figure 9The spin vector distribution imaging apparatus shown may or may not include the spin rotator 7. If the spin rotator is used, the spin polarizability in two directions within the sample plane can be measured. When the spin rotator 7 is OFF, the spin polarizability in the in-plane y-direction (perpendicular to the paper plane) of the sample 10 can be measured; when the spin rotator 7 is OFF, the spin polarizability in the in-plane x-direction of the sample can be measured. Alternatively, as described above, the spin polarizability in both in-plane directions of the sample 10 can be measured by rotating the sample 10 without using the spin rotator.

[0252]

Example 6

[0253] (Switching electrostatic deflection convergent energy analyzer)

[0254] Figure 11 This is a schematic diagram of one embodiment of the switching electrostatic deflection convergent energy analyzer of the present invention. Figure 11 The switchable electrostatic deflection converging energy analyzer shown has seven outer electrodes EL1, EL2…, EL7 and six inner electrodes EL8, EL9…, EL13. The inner surfaces of the outer electrodes are axially symmetric, and the outer surfaces of the inner electrodes are axially symmetric, and they are coaxially arranged. Assuming the analyzer's inlet is z0 = 0 and the outlet is z0 = L, then the outer and inner electrodes are symmetrical about a plane at z0 = L / 2. Furthermore, among the outer and inner electrodes, if… Figure 1 (1) Similar to the 90° electrostatic deflection converging energy analyzer, the electrodes on the inlet side (EL1, EL2, EL8) are cones that narrow towards the inlet diameter, and the electrodes on the outlet side (EL6, EL7, EL13) are cones that narrow towards the outlet direction.

[0255] Figure 11 The most distinctive feature of the switching electrostatic deflection convergent energy analyzer is that the inner electrode is divided into two regions, which allows electrons to pass through the space formed between the left and right inner electrodes. Figure 11 The electron orbits and equipotential lines shown are the result of a 90° deflection. The orbits incident at a 45° angle to the central axis z are the central orbits, representing orbits with an incident angle range of ±8°. These orbits are related to... Figure 1 Compared to the trajectory shown in (1), the convergence is slightly reduced at z0 = L. Table 4 below shows the convergence values ​​obtained through simulation when the orbital is applied to… Figure 11 A table showing the voltages of each electrode in a switching electrostatic deflection convergent energy analyzer (path energy E). pass The voltage value is 1000eV. For electrons of 1keV, a high voltage of 13kV is applied to EL10 and EL11.

[0256] Table 4

[0257] EL1 EL2 EL3 EL4 EL5 EL6 EL7 0V 100V 5000V 7000V 5000V 100V 0V EL8 EL9 EL10 EL1l EL12 ELl3 100V 5600V 13000V 13000V 5600V 100V

[0258] Figure 12 (a) and 12(b) show how by changing Figure 11 The voltage conditions in a switching electrostatic deflection convergent energy analyzer are used to switch the deflection results. The voltage conditions (path energy E) for each condition are as follows: pass =1000eV voltage values ​​are shown in Tables 5 and 6 below. Figure 12 In (a) and 12(b), with Figure 11 The difference is that electrons pass through the electric field created between the left and right inner electrodes. Figure 12 In case (a), the orbits converge once near z0 = L / 2, and then converge again at z0 = L. In contrast, in Figure 12 In case (b), the orbits converge at z0 = L without crossing each other. In both cases, the orbits trace an S-shape and point towards the original direction at z0 = L. That is, the final deflection angle is 0°.

[0259] On the other hand, Figure 12 In case (a), the energy dispersion is almost the same as Figure 11 The situation is the same, but... Figure 12 In the case of (b), with Figure 12 Compared to case (a), the energy dispersion is significantly reduced due to the cancellation effect. As a result, Figure 12 The settings in (a) are suitable for energy analysis, while Figure 12 The settings in (b) are suitable for PEEM (photoelectron microscopy) measurements that suppress chromatic aberration.

[0260] Table 5

[0261] EL1 EL2 EL3 EL4 EL5 EL6 EL7 0V 300V 800V 0V 700V 400V 0V EL8 EL9 EL10 EL11 EL12 EL13 0V 21500V 18200V 21800V 16000V 0V

[0262] Table 6

[0263] EL1 EL2 EL3 EL4 EL5 EL6 EL7 0V 100V 100V 500V 100V 100V 0V EL8 EL9 EL10 EL11 EL12 EL13 0V 18800V 4900V 4600V 18400V 150V

[0264]

Example 7

[0265] (Spin vector distribution imaging device)

[0266] Figure 13 It shows the use of Figure 11 and Figure 12 This diagram illustrates the spin vector distribution imaging device of a switching electrostatic deflection converging energy analyzer. Three measurement modes are shown. Figure 13 (a) is the spin-resolved mode. Figure 13 (b) is the spin integration mode. Figure 13 (c) is the PEEM (photoelectron microscope) mode.

[0267] In spin-resolved mode, the deflection switching energy analyzer is set to a 90° deflection condition. For electrons deflected at 90°, an electrostatic lens 19, a second spin rotator 7b (SR2), a two-dimensional spin filter 8, a first projection lens 3a (set perpendicular to the paper surface), and a first detector 4a are configured. Then, the energy can be determined based on the... Figure 9 The three-dimensional spin polarizability is measured using the same principle as the three-dimensional spin polarizability analysis device. When both the second spin rotator 7b (SR2) and the first spin rotator 7a (SR2) are set to OFF, the spin polarizability in the plane direction of the sample 10 can be measured.

[0268] In spin integration mode, the second projection lens 3b and the second detector 4b, configured for S-type electrons, can measure a normal two-dimensional real-space image or a two-dimensional emission angle distribution without spin resolution. Here, the measurement of the two-dimensional real-space image is performed using the sharp photoelectron spectral peaks of core excitation. On the other hand, most of the photoelectrons generated by irradiation with vacuum ultraviolet or X-rays are secondary electrons. Secondary electrons are electrons that have lost energy in various processes before emission and have a wide range of energies.

[0269] In PEEM, these secondary electrons are often used for imaging to obtain bright contrast due to the difference in the work function of the surfaces. Figure 13 The PEEM mode in (c) is the mode used to measure this type of PEEM image. In the PEEM mode, the following is used: Figure 12 The settings in (b) are used to eliminate energy dispersion. This makes it possible to obtain a clear PEEM image with suppressed chromatic aberration. Figure 13 The device in is characterized by (and) Figure 9 Compared to other devices, this one has a PEEM measurement function, which allows you to switch measurement modes simply by applying voltage to each component.

[0270]

Example 8

[0271] (Other 90° electrostatic deflection converging energy analyzers)

[0272] Reference Figure 14 This describes other embodiments of an electrostatic energy analyzer with 90° deflection convergence. For example... Figure 14 As shown, the electrostatic energy analyzer in this embodiment is composed of a combination of two or more electro-optical systems. Here, each electro-optical system to be combined can be any one of an electrostatic converging mirror, an electrostatic deflector, or an electrostatic lens.

[0273] exist Figure 14In the diagram, A and B schematically represent two electron optical systems used for combination. A has a deflection angle β1, and B has a deflection angle β2. However, when an electrostatic lens is used for A or B, the central orbit is not the central axis of the lens, but rather an orbit that enters from the central axis at a certain angle and exits at a certain angle. Let the deflection angle in this case be β1 or β2. Assume that the electrons in the central orbit are incident or emitted perpendicularly to the two end faces of A and B, respectively. The two end faces of A and B are arranged perpendicular to the xy plane, with the right end face of A and the left end face of B arranged opposite each other. Let the vector perpendicular to the left end face of A be vector a, and the vector perpendicular to the right end face of B be vector b, given by the following equation (7) using β1 and β2.

[0274] [Formula 7]

[0275]

[0276] When B rotates about the x-axis by an angle γ, the vector perpendicular to the right end face of B is given by the following equation (8). Here, since the condition for vectors a and b' to be perpendicular is given by the following equation (9), the condition for the rotation angle γ of 90° deflection is given by the following equation (10).

[0277] [Formula 8]

[0278]

[0279] [Formula 9]

[0280]

[0281] [Formula 10]

[0282]

[0283] Based on the above, Figure 15 Some combinations of two electro-optical systems with equal deflection angles (β1 = β2) are shown to achieve a 90° deflection. For example, when β1 = β2 = 60°, a 90° deflection is produced when combined with γ = 70.5°. Figure 16 (a) shows the condition for a 90° deflection when β1 = β2. This condition applies only to deflection angles between 45° and 135°. In this case, a 90° deflection can be achieved by selecting γ as shown in the figure. Figure 16 (b) shows the 90° deflection condition for some β1 when β2 ≠ β1. The dashed lines for γ = 90° and β2 = 90° represent the relationship between β2 and γ when β1 = 90° and β1 = 0°, respectively.

[0284] Figure 17(a) and 17(b) are examples of a 45° electrostatic deflection converging energy analyzer and a 60° electrostatic deflection converging energy analyzer, respectively. The central track of the 45° electrostatic deflection converging energy analyzer is at an angle of 22.5° to the central axis, while the central track of the 60° electrostatic deflection converging energy analyzer is at an angle of 30° to the central axis. Figure 17 (a) and 17(b) show orbits with incident angles ranging from ±8° as measured from the central orbit. These orbits have lower convergence than... Figure 1 (1) The 90° electrostatic deflection converging energy analyzer can achieve higher convergence by limiting the incident angle to about ±5°.

[0285] exist Figure 17 In the case of the 45° electrostatic deflection converging energy analyzer shown in (a), and Figure 15 The situation is the same as shown in (a). A 90° deflection can be achieved by combining two identical rotation angles γ = 0°. Figure 1 (a) shows a 90° electrostatic deflection converging energy analyzer based on this combination. On the other hand, in the case of a 60° electrostatic deflection converging energy analyzer, such as... Figure 15 As shown in (b), a 90° deflection can be achieved by combining two identical components with a rotation angle γ = 70.5°. Figure 18 (b) shows a 90° electrostatic deflection converging energy analyzer based on this combination. Additionally, when combined... Figure 17 When using the 45° electrostatic deflection converging energy analyzer and the 60° electrostatic deflection converging energy analyzer, according to the above equation (10), a 90° deflection can be achieved with a rotation angle γ = 54.7°.

[0286] Figure 19 (a), 19(b), and 19(c) show schematic diagrams of embodiments of the 120° electrostatic deflection converging energy analyzer, the 135° electrostatic deflection converging energy analyzer, and the 150° electrostatic deflection converging energy analyzer, respectively. The central orbits are the orbits incident from the central axis at angles of 60°, 67.5°, and 75°, respectively. Figure 19 (a), 19(b), and 19(c) show orbits with incident angles ranging from ±8°, measured from the center orbit. Figure 17 Compared to orbits (a) and 17(b), these orbits exhibit improved convergence. Additionally, orbits employing the same characteristics as... Figure 19 Energy analyzers with the same electrode structure but deflection angles of 150° or greater and 180° or less. However, when the deflection angle is 160° or greater, the focusing performance decreases significantly. Additionally, according to... Figure 16 (b) or equation (10) above, can also be used as follows Figure 19The analyzers shown in (a) and 19(b) have a larger deflection angle to achieve a 90° deflection. However, when the deflection angle is large, due to geometric limitations, an energy analyzer with a rotation angle of 180° or smaller is used instead. Figure 17 The 360° rotation type shown (see) Figure 7 ).

[0287] Small deflection angle energy analyzers and large deflection angle energy analyzers each have their advantages and disadvantages. First, when using... Figure 17 The energy analyzers with small deflection angles shown in (a) and 17(b) have the advantage of being easy to design in combination with the input lens. However, the smaller the deflection angle, the smaller the energy dispersion and the lower the energy resolution.

[0288] On the other hand, in such Figure 19 In the energy analyzers with large deflection angles shown in (a) and 19(b), the energy resolution is improved, but when combined with input lenses or other energy analyzers, a complex design such as a 180° rotating body type is required.

[0289] The following table 7 summarizes... Figure 1 , Figure 17 , Figure 19 The applied voltages of each electrostatic deflection converging energy analyzer. These are the path energy E. pass =1000eV. In these energy analyzers, a high voltage of approximately 13 to 24 kV is applied to the inner electrode EL7 relative to 1000eV. In the electrostatic deflection converging energy analyzer of the present invention, it is not limited to... Figure 1 , Figure 17 , Figure 19 The electrostatic deflection converging energy analyzer shown has an ideal voltage applied to at least one inner electrode set in the range of approximately 10–50 kV relative to 1000 eV. However, when high convergence performance is not required, the voltage applied to at least one inner electrode can be 2–5 kV or greater, but less than 10 kV relative to 1000 eV.

[0290] Table 7

[0291]

[0292] Furthermore, although an electrostatic deflection converging energy analyzer with a specific deflection angle is shown as an example, the electrostatic deflection converging energy analyzer of the present invention can also be designed similarly to be an energy analyzer with an arbitrary deflection angle of 45° to 180°.

[0293]

Example 9

[0294] Figure 32(a) The electrostatic deflection and convergence type energy analyzer shown has, in an electrostatic deflection and convergence type energy analyzer having the same structure as Figure 1 , the voltage applied to EL7 set to 10 times the converted acceleration voltage (10 kV when E pass = 1 keV), and the outer diameter of the inner electrode, the inner diameter of the outer electrode, and the voltage applied to EL3 are adjusted to minimize the aperture aberration. In Figure 1 , the ratio of the outer diameter of the inner electrode to the length L is about 0.12, and the ratio of the inner diameter of the outer electrode to the length L is about 0.64. In Figure 32 (a), the ratio of the outer diameter of the inner electrode to the length L is about 0.27, and the ratio of the inner diameter of the outer electrode to the length L is about by 0.76. In the electrostatic deflection and convergence type energy analyzer of Figure 32 (a), as shown in Figure 32 (b), the image blur caused by the aperture aberration is increased by about 13 times compared with the case of the structure of the electrostatic deflection and convergence type energy analyzer shown in Figure 1 . As described above, when the voltage applied to EL7 is reduced to about 10 times the converted acceleration voltage, the deterioration of the convergence performance becomes significant. However, this deterioration of the convergence performance can be greatly reduced by appropriately shaping the inner electrode.

[0295]

Example 10

[0296] Here, Figure 33 (a) shows an example of a suitable shape of the inner electrode in the electrostatic deflection and convergence type energy analyzer of the present invention. The same as in the case of Figure 32 (a), the voltage of EL7 is set to 10 times the converted acceleration voltage. EL6 and EL8 are different from the electrostatic deflection and convergence type energy analyzer shown in Figure 1 and Figure 32 (a), and have a stepped shape characterized by two outer diameters D1 and D2 (D1 < D2). In Figure 33 (a), the ratio of D1 to the length L is 0.11, and the ratio of D2 to the length L is 0.24. In addition, the ratio of the inner diameter of the outer electrode to the length L is about 0.76. As shown in Figure 33 (b), the convergence performance is not as good as that of the electrostatic deflection and convergence type energy analyzer shown in Figure 1 , but is greatly improved compared with the electrostatic deflection and convergence type energy analyzer shown in Figure 32 (a). In Figure 33 (a), EL6 and EL8 are different from Figure 1 or Figure 32The case is the same as that of the electrostatic deflection converging energy analyzer shown in (a), which has a tapered section with a smaller diameter toward the inlet or outlet. However, it is also effective to eliminate the tapered section. As the simplest shape, it can also be a coaxial two-section cylindrical shape characterized only by two outer diameters D1 and D2 and two lengths in the z-axis direction.

[0297]

Example 11

[0298] Figure 34 This is an embodiment of the electrostatic deflection convergent energy analyzer of the present invention when a lower voltage is applied to the inner electrode EL7. Figure 34 (a), 34, (b), and (c) represent voltages applied to the inner electrode EL7 that are 5 times, 2 times, and 1.5 times the converted accelerating voltage, respectively (when E pass Examples are shown for the conditions of 5kV, 2kV, and 1.5kV (when the voltage is 1keV). In any case, the inner electrodes EL6 and EL8 are stepped shapes with tapered portions on the inlet or outlet side. However, as... Figure 33 In this case, a design without a tapered section is also effective; it can also be a coaxial two-segment cylindrical shape characterized by only two outer diameters D1 and D2 and two lengths along the z-axis. The outer surface of EL7 has a cylindrical shape with an outer diameter greater than D1 and D2. In this way, apart from the tapered section, the inner electrode as a whole has a coaxial three-segment cylindrical shape. Figure 34 (a), 34(b), and 34(c) represent the results obtained by adjusting the three outer diameters and the lengths of each part, and by applying voltage to minimize aperture aberrations, respectively. The ratios of D1, D2, and D3 to the length L are shown in the figure. Figure 34 In the case of the electrostatic deflection converging energy analyzer shown in (a), D1 / L = 0.11, D2 / L = 0.26, D3 / L = 0.38, at... Figure 34 In the case of the electrostatic deflection converging energy analyzer shown in (b), D1 / L = 0.13, D2 / L = 0.28, and D3 / L = 0.52. Furthermore, in... Figure 34 In the case of the electrostatic deflection converging energy analyzer shown in (c), D1 / L = 0.13, D2 / L = 0.28, and D3 / L = 0.51. Additionally, in... Figure 34 In the case of the electrostatic deflection converging energy analyzer shown in (a), the ratio of the inner diameter to the length L of the outer electrode is approximately 0.76, while... Figure 34 (b) and Figure 34 In the case of the electrostatic deflection converging energy analyzer shown in (c), the ratio of the inner diameter to the length L of the outer electrode is 0.87.

[0299] Figure 34 The aperture aberrations of the electrostatic deflection converging energy analyzers shown in (a), 34(b), and 34(c) are... Figure 1 , Figure 33 (a) The aperture aberrations of the electrostatic deflection converging energy analyzer shown in (a) are combined with... Figure 35 As shown in the diagram. It's important to note that aperture aberration increases as the voltage applied to EL7 gradually decreases. Therefore, to reduce aperture aberration, the voltage applied to EL7 should ideally be set as high as possible. Another point to note is that aperture aberration increases abruptly when the voltage applied to EL7 decreases from twice the calculated acceleration voltage to 1.5 times. Therefore, the voltage applied to EL7 is preferably set to more than twice the calculated acceleration voltage. Furthermore, by setting the voltage applied to EL7 to be higher than... Figure 1 The electrostatic deflection converging energy analyzer shown can further reduce aperture aberrations. However, the voltage applied to the EL7 cannot be set as high as desired, and there are limitations in the design and fabrication of the inner diameter electrode.

[0300]

Example 12

[0301] Figure 36 An example of the electrostatic deflection converging energy analyzer of the present invention is shown when the voltage applied to EL7 is set to 50 times the equivalent accelerating voltage. As a result of optimization, the outer diameter of EL7 is smaller than that of EL6 and EL8. As shown in the figure, the limit of the voltage applied to EL7 is approximately 50 times; if this value is exceeded, the outer diameter of EL7 becomes too small, leading to wiring and insulation difficulties.

[0302] When the electrostatic deflection convergent energy analyzer of the present invention is used in an imaging device, it is necessary to make the aperture aberration sufficiently small. However, in this case, according to Figure 35 Based on the above considerations, the voltage applied to EL7 is preferably set to approximately 10 to 50 times the equivalent acceleration voltage. Furthermore, when high convergence performance and ease of design / manufacturing are required, the voltage applied to EL7 is preferably set to approximately 20 to 30 times the equivalent acceleration voltage.

[0303] Table 8 below summarizes the results. Figure 32 (a) Figure 33 (a) Figure 34 (a) Figure 34 (b) Figure 34 (c) and Figure 36 The table shows the applied voltage in the case of an electrostatic deflection converging energy analyzer. As can be seen from Table 8, the methods for applying voltage to EL1 through EL8 vary. Figure 34(b) The electrostatic deflection converging energy analyzer shown begins to change. When the voltage applied to EL7 is more than twice the calculated accelerating voltage, a voltage of 0 or positive is applied to the other electrodes; when the voltage applied to EL7 is less than twice the calculated accelerating voltage, a voltage of 0 or negative is applied to the other electrodes. From Figure 34 (b) In the case of the electrostatic deflection converging energy analyzer shown, since the outer electrodes EL1 to EL5 are all set to the same potential (0V), they can also be designed as a single electrode. Furthermore, in Figure 34 In the case of the electrostatic deflection converging energy analyzer shown in (a), since (adjacent) EL1, EL2 and EL4, EL5 are all at the same potential (0V), all outer electrodes can be designed as three electrodes. Thus, the number of outer electrodes is not limited to the five EL1 to EL5 shown in the embodiment; it can also be three, one, two, four, or more than six. Furthermore, the number of inner electrodes is not limited to the three EL6 to EL8 shown in the embodiment; it can also be four or more. Increasing the number of electrodes allows for better control of the electric field.

[0304] Table 8

[0305]

[0306] Regarding the shape and arrangement of the electrodes, various variations are possible as long as they are configured to create the same electric field as shown in the embodiments. Here, the characteristics of the electric field of the electrostatic deflection converging energy analyzer of the present invention will be described.

[0307] 1) When electrons enter the electrostatic deflection and focusing energy analyzer, they will accelerate under the influence of the electric field and gradually change their direction of travel.

[0308] 2) The direction of the electrons is parallel to the axis (z-axis) of the electrostatic deflection converging energy analyzer at the midpoint (z = L / 2) between the incident and exit points or near the incident and exit points.

[0309] 3) Then, as it decelerates, it gradually changes its direction of travel to reach the launch position. At this point, the electrons in the central orbit will receive the specified deflection angle and be emitted.

[0310] On the other hand, in a CMA (coaxial cylindrical mirror analyzer), electrons incident on the cylindrical electric field change direction by deceleration, becoming parallel to the z-axis at the midpoint between the incident and exit points, and then change direction again while accelerating to reach the exit position. Furthermore, in a CHA (convergent circular mirror), electrons in the central orbit trace a circular trajectory due to the balance between the central force and centrifugal force generated by the spherically symmetric electric field, thus neither accelerating nor decelerating. Therefore, the electrostatic deflection converging energy analyzer of this invention is fundamentally different from the electric field used in CMA or CHA.

[0311] Industrial application

[0312] This invention is useful for energy analysis devices, photoelectron spectroscopy devices, and spin polarizability analysis devices.

[0313] Explanation of symbols in the diagram

[0314] 1. 90° electrostatic deflection converging energy analyzer

[0315] 2. Input lens

[0316] 3, 3a, 3b Projection lenses

[0317] Detectors 4, 4a, and 4b

[0318] 5 Single Crystal Mirrors

[0319] 6 small holes

[0320] 7, 7a, 7b Spin Rotators

[0321] 8 Two-dimensional filter

[0322] 9. Light or electron beam

[0323] 10 samples

[0324] 11. Entrance port

[0325] 12 Exit Holes

[0326] 13 Rotation axis

[0327] 14. Central face

[0328] 17 Inner electrode fixing feet

[0329] 18 Compensation Electrode

[0330] 19. Electrostatic Lens

[0331] Isosceles trapezoids 20a and 20b

Claims

1. An electrostatic deflection converging energy analyzer, characterized in that: have Multiple outer electrodes and multiple inner electrodes are arranged along the shape of two rotating bodies respectively formed on the inner side of a common rotation axis and on the outer side surrounding the inner side; electron entrance holes and exit holes are formed on the outer electrodes at both ends of the rotation axis; a voltage application unit is used to apply voltages to the multiple outer electrodes and the multiple inner electrodes to accelerate and decelerate electrons; No gate electrode is used on the electron track. The inner surface shape of the outer electrode is such that the diameter decreases towards the entrance aperture and the diameter decreases towards the exit aperture. The outer surface shape of the inner electrode is either a shape that decreases in diameter toward the entrance aperture, a rod-shaped shape extending toward the entrance aperture, or a shape that increases in diameter at the end on the entrance aperture side, and the shape that decreases in diameter toward the exit aperture, a rod-shaped shape extending toward the exit aperture, or a shape that increases in diameter at the end on the exit aperture side; wherein, the voltage application unit refers to the voltage applied to the inner electrode other than the inner electrodes at both ends, and the voltage is a voltage that is more than twice the converted acceleration voltage obtained by converting the energy of electrons into an acceleration voltage based on the potential of the outer electrode on which the entrance aperture is formed; In this process, a voltage is applied to each electrode at a specified incident angle between the central orbit and the rotation axis, so that electrons incident from the incident hole converge at the position of the exit hole at a specified exit angle with the central orbit and the rotation axis.

2. The electrostatic deflection converging energy analyzer according to claim 1, characterized in that: The inner surface shape of the outer electrode and the outer surface shape of the inner electrode are symmetrical about a plane that intersects perpendicularly with respect to the midpoint of the line connecting the inlet and the outlet.

3. The electrostatic deflection converging energy analyzer according to claim 1, characterized in that: The inner surface shape of the outer electrode facing the decreasing diameter of the entrance aperture is conical, toroidal, or annular, and the inner surface shape of the outer electrode facing the decreasing diameter of the exit aperture is also conical, toroidal, or annular. The outer surface shape of the inner electrode that decreases in diameter toward the entrance aperture is conical or toroidal, or a stepped shape that gradually decreases in diameter toward the entrance aperture.

4. The electrostatic deflection converging energy analyzer according to claim 1, characterized in that: The voltage applied to one or more inner electrodes other than the inner electrodes at both ends is set to a voltage that is 10 to 50 times the converted acceleration voltage obtained by converting the energy of electrons into an acceleration voltage.

5. The electrostatic deflection converging energy analyzer according to claim 4, characterized in that: The voltage applied to one or more outer electrodes other than the two outer electrodes at both ends is less than 10 times the converted acceleration voltage.

6. The electrostatic deflection converging energy analyzer according to claim 1, characterized in that: The deflection angle is 90°.

7. The electrostatic deflection converging energy analyzer according to claim 1, characterized in that: The deflection angle is any one of 45°, 60°, 120°, 135° and 150°.

8. The electrostatic deflection converging energy analyzer according to claim 1, characterized in that: The deflection angle is greater than 45° and less than 90°, or greater than 90° and less than 180°.

9. The electrostatic deflection converging energy analyzer according to claim 1, characterized in that: The inner electrode is divided into two parts to allow electrons in the central orbit to pass through the rotation axis. By changing the voltage conditions applied to the electrodes, the control over whether the central orbit passes through the rotation axis is achieved, thereby switching whether electrons emitted from the exit hole are deflected.

10. The electrostatic deflection converging energy analyzer according to claim 1, characterized in that: in, The rotating body is a rotating body with a rotation angle of 90° to 180°, and is provided with a compensation electrode for compensating the electric field at the cutting surface.

11. An imaging electronic spectrometer, characterized in that: An electron spectroscopy device using the electrostatic deflection converging energy analyzer of claim 1 includes an input lens, wherein the entrance aperture is provided on the lens axis, the lens axis and the rotation axis are set to the specified incident angle, and the device receives electrons emitted from the sample and emits them into the entrance aperture. A projection lens, wherein the exit aperture is provided on the projection lens axis, the projection lens axis and the rotation axis are set to the specified exit angle, and electrons deflected and focused by the electrostatic deflection and focusing energy analyzer are received from the exit aperture; And a detector that detects electrons passing through the projection lens.

12. A reflection imaging type electronic spectrometer, characterized in that: An electron spectroscopy device using the electrostatic deflection converging energy analyzer of claim 1 includes an input lens, wherein the entrance aperture is provided on the input lens axis, the lens axis and the rotation axis are set to the specified incident angle, and receives electrons emitted from the sample and emits them into the entrance aperture. A reflector is disposed on the outlet of the energy analyzer and perpendicular to the rotation axis; A projection lens, wherein the entrance aperture is provided on the projection lens axis, the projection lens axis and the rotation axis are set to the specified incident angle, and electrons are received from the entrance aperture by the electrostatic deflection and focusing energy analyzer, and then reflected by the mirror and deflected and focused again; And a detector that detects electrons passing through the projection lens.

13. A spin vector distribution imaging device, characterized in that: have The electrostatic deflection convergent energy analyzer as described in claim 6; An input lens, wherein the entrance aperture is provided on the input lens axis, the lens axis and the rotation axis are set to the specified incident angle, receiving electrons emitted from the sample and emitting them into the entrance aperture; An electrostatic lens, wherein the exit hole is provided on the electrostatic lens axis, the electrostatic lens axis and the rotation axis are set to the specified exit angle, and electrons deflected and focused by the electrostatic deflection and focusing energy analyzer are received from the exit hole; A two-dimensional rotating filter is disposed on the electrostatic lens axis on the output side of the electrostatic lens; And a projection lens that receives electrons reflected by the rotating filter and a detector that detects electrons transmitted through the projection lens.

14. A spin vector distribution imaging device, characterized in that: have The electrostatic deflection convergent energy analyzer as described in claim 6; An input lens, wherein the entrance aperture is provided on the lens axis, the lens axis and the rotation axis are set to the specified incident angle, receives electrons emitted from the sample and emits them into the entrance aperture; A two-dimensional spin filter is disposed in the exit aperture of the electrostatic deflection converging energy analyzer and is perpendicular to the rotation axis; A projection lens, wherein the entrance aperture is provided on the projection lens axis, the projection lens axis and the rotation axis are set to the specified incident angle, and electrons deflected and focused by the electrostatic deflection and focusing energy analyzer and reflected by the two-dimensional spin filter and then deflected and focused again are received from the entrance aperture; And a detector that detects electrons passing through the projection lens.

15. A spin vector distribution imaging device, characterized in that: have The electrostatic deflection convergent energy analyzer as described in claim 9; An input lens, wherein the entrance aperture is provided on the lens axis, the lens axis and the rotation axis are set to the specified incident angle, receives electrons emitted from the sample and emits them into the entrance aperture; An electrostatic lens, wherein the exit hole is provided on the electrostatic lens axis, the electrostatic lens axis and the rotation axis are set to the specified exit angle, and electrons deflected and focused by the electrostatic deflection and focusing energy analyzer are received from the exit hole; A two-dimensional spin filter is disposed on the electrostatic lens axis on the output side of the electrostatic lens; A first projection lens that receives electrons reflected by the spin filter and a first detector that detects electrons transmitted through the first projection lens; The second projection lens, wherein the exit hole is provided on the projection lens axis, the projection lens axis and the rotation axis are set to the specified exit angle, and electrons that are focused by the electrostatic deflection focusing energy analyzer without deflection are received from the exit hole; And a second detector that detects electrons passing through the second projection lens.

16. A spin vector distribution imaging device, characterized in that: In the spin vector distribution imaging device of claim 13, the electrostatic deflection converging energy analyzer with a deflection angle of 90° is replaced by a device composed of a plurality of electrostatic deflection converging energy analyzers of claim 7.

17. The spin vector distribution imaging device according to claim 13, characterized in that: It is equipped with a spin rotator disposed inside or outside at least one of the input lens and the electrostatic lens, which spins 90° in a plane perpendicular to the axis of each lens.

18. A spin vector distribution imaging device, characterized in that: have The electrostatic deflection converging energy analyzer of claim 9, with a deflection angle of 90°; An input lens, wherein the entrance aperture is provided on the input lens axis, the lens axis and the rotation axis are set to the specified incident angle, receiving electrons emitted from the sample and emitting them into the entrance aperture; An electrostatic lens, wherein the exit hole is provided on the electrostatic lens axis, the electrostatic lens axis and the rotation axis are set to the specified exit angle, and electrons deflected and focused by the electrostatic deflection and focusing energy analyzer are received from the exit hole; A two-dimensional rotating filter is disposed on the electrostatic lens axis on the output side of the electrostatic lens; And a projection lens that receives electrons reflected by the rotating filter and a detector that detects electrons transmitted through the projection lens.

19. A spin vector distribution imaging device, characterized in that: In the spin vector distribution imaging device of claim 13, the electrostatic deflection converging energy analyzer with a deflection angle of 90° is replaced by a device composed of multiple electrostatic deflection converging energy analyzers of claim 1 with deflection angles set to 45° to 150°.

Images