System for detecting crystal rod wobble, detection method for crystal rod wobble, and calibration method.

Abstract

This invention discloses a system, method, and calibration method for detecting crystal ingot sway. The system for detecting crystal ingot sway includes a test piece and a distance detection assembly. The test piece is adapted to be connected to the lower end of a crystal pulling rope and has at least three detection surfaces. These multiple detection surfaces are coaxially arranged and located at different heights. The vertical distance between the first and second detection surfaces is h1, and the vertical distance between the first and third detection surfaces is h2, where h2 > h1. The distance detection assembly includes multiple distance detection elements. The detection position of each distance detection element is adapted to be directly opposite the outer periphery of the first detection surface. Each distance detection element is used to detect the vertical distance between itself and the corresponding detection surface located directly below it. According to the crystal ingot sway detection system of this invention, it is possible to accurately determine whether the crystal ingot is swaying and the magnitude of the sway, so as to take timely appropriate action.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a system for detecting crystal rod wobbling, a method for detecting crystal rod wobbling, and a calibration method for such detection. Background Technology

[0002] In the CZ method for single crystal growth, a seed crystal is immersed in molten silicon in a crucible using a pulling mechanism and a seed crystal clamp. The pulled mechanism is then used to slowly pull the immersed seed crystal, thereby growing a single crystal silicon rod below the seed crystal.

[0003] In related technologies, the pulling mechanism uses a pulling rope (such as a molybdenum wire rope or other soft rope) to rotate and lift the seed crystal and the ingot below it. However, during rotation or lifting, the ingot is prone to swaying. To avoid wire breakage during crystal growth (i.e., the breakage of the monocrystalline silicon wire), the swaying amplitude of the ingot needs to be controlled within a small range. Currently, the swaying amplitude of the ingot is only observed by production personnel with the naked eye, which is prone to misjudgment and cannot be dealt with in a timely manner. Summary of the Invention

[0004] The present invention aims to at least solve one of the technical problems existing in the prior art. To this end, the present invention proposes a system for detecting crystal rod swaying, which can accurately determine whether the crystal rod is swaying and the magnitude of the swaying, so as to take timely corresponding actions.

[0005] The present invention also proposes a crystal growth furnace having the above-mentioned system for detecting crystal rod wobbling.

[0006] The present invention also proposes a method for detecting crystal rod swaying, wherein the detection method uses the above-mentioned system for detecting crystal rod swaying.

[0007] The present invention also proposes a calibration method, wherein the calibration method uses the above-mentioned system for detecting crystal rod swaying to calibrate the seed crystal falling position.

[0008] According to a first aspect of the present invention, a system for detecting crystal rod swaying includes: a test piece adapted to be connected to the lower end of a crystal pulling rope, a seed crystal disposed at the lower end of the test piece, the seed crystal being coaxially disposed with the test piece and the crystal pulling rope, the test piece having at least three detection surfaces, a plurality of detection surfaces being coaxially disposed and respectively at different heights, the plurality of detection surfaces including a first detection surface, a second detection surface and a third detection surface arranged radially from the inside to the outside, the radial width of the first detection surface being greater than the radial width of the second detection surface, the vertical distance between the first detection surface and the second detection surface being h1, the first detection surface... The vertical distance between the third detection surface and the second detection surface is h2, where h2 > h1; a distance detection assembly is adapted to be fixed on the top of the crystal growth furnace and located above the workpiece to be inspected. The distance detection assembly includes a plurality of distance detection elements spaced circumferentially along the second detection surface. The radial distance between each distance detection element and the central axis of the second detection surface is equal. The detection position of each distance detection element is adapted to be directly opposite the outer periphery of the first detection surface. Each distance detection element is used to detect the vertical distance between itself and the corresponding detection surface located directly below it.

[0009] According to an embodiment of the present invention, a system for detecting crystal rod swaying is provided. The test piece has at least three detection surfaces, and multiple circumferentially spaced distance detection elements are used to measure the vertical distance between the elements and the corresponding detection surfaces. By analyzing the maximum and minimum values ​​of the measurements from the multiple distance detection elements, it can be determined whether the crystal rod is swaying and the magnitude of the sway. Furthermore, the distance detection component can measure the real-time position of the test piece, thereby precisely controlling the distance between the bottom wall of the seed crystal and the surface of the molten metal. This allows for accurate contact between the bottom wall of the seed crystal and the surface of the molten metal during the crystal growth stage, preparing for the crystal growth process.

[0010] In some embodiments, the third detection surface extends radially from the inside out and downward.

[0011] In some embodiments, the plurality of detection surfaces further includes a fourth detection surface, the fourth detection surface being located radially inside the first detection surface, and the first detection surface being disposed around the fourth detection surface, the vertical distance between the fourth detection surface and the third detection surface being h3, where h3 > h1.

[0012] In some embodiments, in the vertical direction, the second detection surface and the fourth detection surface are located on the same side of the first detection surface, and the first detection surface and the third detection surface are located on the same side of the second detection surface.

[0013] In some embodiments, the system for detecting crystal rod swaying further includes a sway-stopping device comprising two opposing telescopic mechanisms having an extended state and a retracted state. In the extended state, the adjacent ends of the two telescopic mechanisms are joined together to form a limiting ring, which is used to limit the swaying amplitude of the crystal pulling rope. In the retracted state, the adjacent ends of the two telescopic mechanisms are separated.

[0014] In some embodiments, the telescopic mechanism includes: a first telescopic member; a second telescopic member, the second telescopic member being horizontally telescopically coupled with the first telescopic member to make the length of the telescopic mechanism adjustable; a first driving member, the first driving member being used to drive the second telescopic member to move relative to the first telescopic member; and a limiting member, the limiting member being disposed at one end of the length of the first telescopic member and adapted to be spliced ​​with a limiting member of another telescopic mechanism to form the limiting ring.

[0015] In some embodiments, the stopping device further includes: a guide rail connected to the top wall of the crystal growth furnace and extending vertically; two guide rails symmetrically arranged on both radial sides of the workpiece to be inspected and spaced apart from the crystal rod at the bottom of the seed crystal; a second driving member disposed on the guide rail; two second driving members corresponding one-to-one with the two guide rails; and a telescopic mechanism disposed on the corresponding guide rail, wherein the second driving member drives the telescopic mechanism to move along the extension direction of the guide rail.

[0016] According to a second aspect of the present invention, a crystal growth furnace includes a furnace body, the top wall of which has an opening; a crystal pulling rope adapted to pass through the opening and used for pulling a crystal; a pulling mechanism fixed to the furnace body and used to drive the crystal to rise and fall via the crystal pulling rope; a driving mechanism disposed in the furnace body and used to drive the pulling mechanism to rotate around the central axis of the furnace body; and a system for detecting crystal rod swaying, the system for detecting crystal rod swaying being a system for detecting crystal rod swaying according to a first aspect of the present invention, wherein the object to be inspected is connected to the lower end of the crystal pulling rope, and a plurality of the detection surfaces are adapted to be coaxially arranged with the crystal pulling rope.

[0017] According to the crystal growth furnace of the present invention, by employing the above-described system for detecting crystal rod swaying, it is possible to determine whether the crystal rod sways during the production process and the magnitude of the swaying, thereby facilitating timely corresponding processing and providing convenience for production. At the same time, it can improve the crystal rod growth quality and production efficiency of the crystal growth furnace.

[0018] According to a third aspect embodiment of the present invention, a method for detecting crystal rod swaying is used, which is based on the crystal rod swaying detection system of the first aspect embodiment of the present invention. The detection method includes the following steps: S1, during crystal growth, acquiring the maximum value Dmax and minimum value Dmin of the detection results of a plurality of distance detection elements; S2, if Dmax-Dmin=0, it is determined that the crystal pulling rope has not swayed; if 0<Dmax-Dmin<Δ, it is determined that the crystal pulling rope is at the first level of swaying; if Dmax-Dmin≥Δ, it is determined that the crystal pulling rope is at the second level of swaying, wherein the swaying amplitude of the second level of swaying is greater than that of the first level of swaying.

[0019] The crystal rod sway detection method according to the present invention can accurately determine whether the crystal pulling rope is swaying and the degree of swaying, thereby determining whether the crystal rod is swaying and the degree of swaying. This facilitates the implementation of corresponding calibration steps and helps to avoid problems such as crystal rod breakage, falling off, and affecting crystal rod growth caused by crystal rod swaying during crystal growth, thus improving the quality of crystal rod growth.

[0020] In some embodiments, the system for detecting crystal rod sway further includes a stopping device, which includes two telescopic mechanisms and two driving mechanisms arranged opposite to each other. The telescopic mechanisms have an extended state and a retracted state. In the extended state, the adjacent ends of the two telescopic mechanisms are joined together to form a limiting ring, which is used to limit the sway amplitude of the crystal pulling rope. In the retracted state, the adjacent ends of the two telescopic mechanisms are separated. Each driving mechanism is used to drive the corresponding telescopic mechanism to move in the vertical direction. The crystal rod sway detection method further includes: S3, when it is determined that the crystal pulling rope is at the first level of sway, the driving mechanism drives the telescopic mechanism to move to a first preset position. At the first preset position, the telescopic mechanism is located above the workpiece to be inspected, and the telescopic mechanism and the workpiece to be inspected are vertically separated by a first preset distance; S4, both telescopic mechanisms are switched to the extended state until it is determined that the crystal pulling rope has not swayed.

[0021] In some embodiments, the method for detecting crystal rod swaying further includes step S5, which is located between steps S2 and S3. In step S5, when it is determined that the crystal pulling rope is at the first level of swaying, the protective gas of the crystal growth furnace is reduced from a first preset flow rate to a second preset flow rate and maintained for a first preset duration. The swaying amplitude of the crystal pulling rope is then determined again, wherein the second preset flow rate is 2 / 3 to 1 / 2 of the first preset flow rate.

[0022] In some embodiments, the system for detecting crystal rod swaying further includes a stopping device, which includes two telescopic mechanisms and two driving mechanisms arranged opposite to each other. The telescopic mechanisms have an extended state and a retracted state. In the extended state, the adjacent ends of the two telescopic mechanisms are joined together to form a limiting ring, which is used to limit the swaying amplitude of the crystal pulling rope. In the retracted state, the adjacent ends of the two telescopic mechanisms are separated. Each driving mechanism is used to drive the corresponding telescopic mechanism to move vertically. The method for detecting crystal rod swaying further includes: S6, when it is determined that the crystal pulling rope is at the second level of swaying, the driving mechanism drives the telescopic mechanism to move upward to a position that stops against the top wall of the crystal growth furnace; S7, both telescopic mechanisms switch to the extended state; S8, the driving mechanism drives the telescopic mechanism to move downward until the telescopic mechanism moves to a second preset position and maintains it for a second preset time. At the second preset position, the telescopic mechanism is located above the workpiece to be inspected, and the telescopic mechanism and the workpiece to be inspected are vertically separated by a second preset distance.

[0023] In some embodiments, in step S8, the swaying amplitude of the crystal pulling rope is determined in real time. If it is determined that the crystal pulling rope is not swaying, the telescopic mechanism stops descending and switches to the contracted state.

[0024] In some embodiments, the method for detecting crystal rod swaying further includes step S9, which is located between steps S2 and S6. In step S9, when it is determined that the crystal pulling rope is at the second level of swaying, the protective gas of the crystal growth furnace is reduced from a first preset flow rate to a third preset flow rate and maintained for a third preset duration. The swaying amplitude of the crystal pulling rope is then determined again, wherein the third preset flow rate is 1 / 2 to 1 / 3 of the first preset flow rate.

[0025] According to a fourth aspect of the present invention, the calibration method is characterized in that the calibration method uses a crystal rod sway detection system according to a first aspect of the present invention to calibrate the seed crystal falling position. The calibration method includes the following steps: during the process of the crystal pulling rope driving the test piece to move downward from the initial position to the crystal pulling position, the current remaining stroke of the test piece is acquired multiple times at different times to perform at least one correction. In each correction, at least the descent time required for the test piece to move from the current position to the crystal pulling position is corrected. In the process of the test piece moving from the initial position to the crystal pulling position, a correction is performed every fourth preset time interval, and the number of corrections is greater than or equal to 2. The fourth preset time interval decreases as the test piece moves downward. Alternatively, the stroke of the test piece from the initial position to the crystal pulling position includes multiple sub-strokes, and at least the last sub-stroke is corrected every fourth preset time interval. Alternatively, the stroke of the test piece from the initial position to the crystal pulling position includes a first sub-stroke and a second sub-stroke, the first sub-stroke precedes the second sub-stroke, and the number of corrections in the first sub-stroke is less than the number of corrections in the second sub-stroke.

[0026] According to the calibration method of the present invention, the falling position of the seed crystal is calibrated by a system that detects the shaking of the crystal rod, so as to ensure the accuracy of the distance between the seed crystal and the liquid surface of the molten metal during the last correction, thereby achieving accurate contact between the bottom wall of the seed crystal and the liquid surface of the molten metal.

[0027] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0028] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0029] Figure 1 This is a schematic diagram of a crystal growth furnace according to an embodiment of the present invention;

[0030] Figure 2 yes Figure 1 A partial enlarged view of the crystal growth furnace shown;

[0031] Figure 3 yes Figure 1 A schematic diagram of the distance detection component shown;

[0032] Figure 4 yes Figure 1 A schematic diagram of the stopping device and the second drive component shown;

[0033] Figure 5 yes Figure 1 A schematic diagram of the part to be inspected shown;

[0034] Figure 6 yes Figure 1 The diagram shows various shaking states of the object under test. The dashed lines in the diagram indicate the distance measurement line positions from the detection element.

[0035] Figure 7 yes Figure 1 A partial schematic diagram showing the stop device in its extended state;

[0036] Figure 8 yes Figure 1 A partial schematic diagram showing the stop device in a retracted state;

[0037] Figure 9 This is a schematic flowchart of a method for detecting crystal rod swaying according to an embodiment of the present invention;

[0038] Figure 10 This is a schematic flowchart of a method for detecting crystal rod swaying according to another embodiment of the present invention;

[0039] Figure 11 This is a schematic flowchart of a calibration method according to an embodiment of the present invention.

[0040] Figure label:

[0041] Crystal growth furnace 200, furnace body 101, through port 101a, crystal pulling rope 102, pulling mechanism 103, driving mechanism 104, crystal rod 105.

[0042] System 100 for detecting crystal rod wobbling

[0043] Part to be inspected 1, First inspection surface 11, Second inspection surface 12, Third inspection surface 13, Fourth inspection surface 14

[0044] Distance detection component 2, distance detection element 21, first slot 21a, second slot 21b

[0045] Stopping device 3, limiting ring 3a, telescopic mechanism 31, first telescopic component 311, second telescopic component 312, first driving component 313, limiting component 314.

[0046] 4. Guide rail; 5. Second drive component; 6. Alarm device. Detailed Implementation

[0047] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0048] The following disclosure provides numerous different embodiments or examples for implementing various structures of the invention. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the invention. Furthermore, reference numerals and / or letters may be repeated in different examples. Such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. Additionally, examples of various specific processes and materials are provided in this invention; however, those skilled in the art will recognize the applicability of other processes and / or the use of other materials.

[0049] Hereinafter, with reference to the accompanying drawings, a system 100 for detecting crystal rod swaying according to an embodiment of the present invention will be described.

[0050] like Figures 1-2 , Figure 3 and Figure 5 As shown, the system 100 for detecting crystal rod sway includes a test piece 1, which is adapted to be connected to the lower end of the crystal pulling rope 102. A seed crystal is provided at the lower end of the test piece 1. The seed crystal is used to grow the crystal rod 105. The seed crystal, the test piece 1, and the crystal pulling rope 102 are coaxially arranged. The crystal pulling rope 102 can drive the seed crystal and the crystal rod 105 below the seed crystal to move through the test piece 1, so as to ensure the accuracy of the detection of crystal rod sway by the system 100.

[0051] The part to be inspected 1 has at least three inspection surfaces, which are coaxially arranged and at different heights. The inspection surfaces include a first inspection surface 11, a second inspection surface 12, and a third inspection surface 13 arranged radially from the inside to the outside. The second inspection surface 12 is located radially outside the first inspection surface 11, and the third inspection surface 13 is located radially outside the second inspection surface 12. The radial width d1 of the first inspection surface 11 is greater than the radial width d2 of the second inspection surface 12. The vertical distance between the first inspection surface 11 and the second inspection surface 12 is h1, and the vertical distance between the first inspection surface 11 and the third inspection surface 13 is h2, where h2 > h1.

[0052] The system 100 for detecting crystal rod sway also includes a distance detection component 2. The distance detection component 2 is adapted to be fixed on the top of the crystal growth furnace 200 and is located above the workpiece 1 to be inspected. The distance detection component 2 includes a plurality of distance detection elements 21 spaced circumferentially along the second detection surface 12. Each distance detection element 21 has an equal radial distance to the central axis of the second detection surface 12. Therefore, the plurality of distance detection elements 21 can be positioned on the same ring, with the central axis of the ring coinciding with the central axis of the second detection surface 12, to ensure... The multiple distance detection elements 21 measure accurately, and the detection position of each distance detection element 21 is adapted to be directly aligned with the outer periphery of the first detection surface 11. When the workpiece 1 under test is in an ideal, stable state, the detection position of each distance detection element 21 is directly aligned with the outer periphery of the first detection surface 11. When the workpiece 1 under test is in a shaking state, the detection position of each distance detection element 21 changes to a certain extent with the shaking of the workpiece 1 under test, thereby enabling the distance detection assembly 2 to detect the shaking of the crystal rod 105, thus improving the sensitivity and accuracy of the distance detection assembly 2.

[0053] For example, in Figure 4 In the example, there are four distance detection elements 21, which are equally spaced. Of course, there can also be two, three, or more distance detection elements 21.

[0054] Each distance detection element 21 is used to detect the vertical distance between itself and the corresponding detection surface located directly below it (such as the first detection surface 11, the second detection surface 12, and the third detection surface 13 mentioned above). For example, each distance detection element 21 can measure the distance between the distance detection element 21 and the corresponding detection surface located directly below it in real time. When the crystal rod 105 shakes, the detection positions of the multiple distance detection elements 21 change to a certain extent with the shaking of the workpiece 1 under test, so that the detection positions may be located on different detection surfaces. At this time, the detection results of the multiple distance detection elements 21 are somewhat different, and the maximum and minimum values ​​of the detection results of the multiple distance detection elements 21 are different (the maximum and minimum values ​​here refer to the maximum and minimum values ​​of the data detected by the multiple distance detection elements 21 at the same time). At this time, the difference between the maximum and minimum values ​​of the detection results of the multiple distance detection elements 21 can be used to determine whether the workpiece 1 under test has shaken and the magnitude of the shaking, thereby determining whether the crystal pulling rope 102 and the crystal rod 105 have shaken and the magnitude of the shaking.

[0055] It is understandable that when the detection position of the distance detection element 21 is directly aligned with the outer periphery of the first detection surface 11, or when the detection position of the distance detection element 21 is located at the outer periphery of the first detection surface 11, the distance detection element 21 is used to detect the vertical distance between itself and the first detection surface 11; when the detection position of the distance detection element 21 is directly aligned with the second detection surface 12, or when the detection position of the distance detection element 21 is located at the second detection surface 12, the distance detection element 21 is used to detect the vertical distance between itself and the second detection surface 12; when the detection position of the distance detection element 21 is directly aligned with the third detection surface 13, or when the detection position of the distance detection element 21 is located at the third detection surface 13, the distance detection element 21 is used to detect the vertical distance between itself and the third detection surface 13.

[0056] Therefore, since the radial width of the first detection surface 11 is greater than the radial width of the second detection surface 12, the detection positions of the multiple distance detection elements 21 can be in various states: for example, the detection positions of the multiple distance detection elements 21 are always located at the outer periphery of the first detection surface 11, or the detection position of at least one distance detection element 21 is located at the second detection surface 12 at some time, or the detection position of at least one distance detection element 21 is located at the third detection surface 13 at some time, resulting in different measurement distances of the multiple distance detection elements 21. Thus, by comparing whether the maximum and minimum values ​​of the distances measured by the multiple distance detection elements 21 to their corresponding detection surfaces are the same, it can be determined whether the crystal rod 105 is shaking. Secondly, by the difference between the maximum and minimum values ​​measured by the multiple distance detection elements 21, the shaking level of the crystal rod 105 can be determined, thereby realizing the judgment of the shaking amplitude of the crystal rod 105 by the system 100 for detecting crystal rod shaking.

[0057] For example, when the crystal rod 105 is not shaking, the measurement positions of the multiple distance detection elements 21 are all located at the outer periphery of the first detection surface 11, and the maximum and minimum values ​​of the vertical distances between the multiple distance detection elements 21 and the detection positions are equal; when the crystal rod 105 shakes, the detection positions of the multiple distance detection elements 21 are located on different detection surfaces, so that the maximum and minimum values ​​of the vertical distances between the multiple distance detection elements 21 and the detection positions are not equal.

[0058] Furthermore, when the crystal rod 105 experiences a slight oscillation, the detection position of at least one distance detection element 21 is located on the second detection surface 12 at some or some times, and the detection position of at least one distance detection element 21 is located on the first detection surface 11 at some or some times. At this time, the difference between the maximum and minimum vertical distances between the multiple distance detection elements 21 and their detection positions is h1, and the difference is small. When the crystal rod 105 experiences a large oscillation, the detection position of at least one distance detection element 21 is located on the third detection surface 13 at some or some times, and the detection position of at least one distance detection element 21 is located on the first detection surface 11 at some or some times. At this time, the difference between the maximum and minimum vertical distances between the multiple distance detection elements 21 and their detection positions is h2, and the difference is large.

[0059] As can be seen, when the system 100 for detecting crystal rod swaying is running, it can obtain the maximum and minimum values ​​of the detection results of multiple distance detection elements 21. If the maximum and minimum values ​​are equal, it can be determined that the test piece 1 and the crystal pulling rope 102 have not swayed. If the difference between the maximum and minimum values ​​is less than a preset value, it can be determined that the test piece 1 and the crystal pulling rope 102 have swayed slightly. If the difference between the maximum and minimum values ​​is greater than or equal to the preset value, it can be determined that the test piece 1 and the crystal pulling rope 102 have swayed significantly, so as to facilitate subsequent processing.

[0060] In addition, the distance detection component 2 can measure the real-time position of the test piece 1, so that the real-time position of the seed crystal can be obtained and the distance between the bottom wall of the seed crystal and the liquid surface of the molten liquid can be calculated, thereby facilitating the accurate contact between the bottom wall of the seed crystal and the liquid surface of the molten liquid, so as to make good preparation for the crystal growth process.

[0061] According to the embodiment of the present invention, the system 100 for detecting crystal rod swaying has at least three detection surfaces for the test piece 1 and multiple circumferentially spaced distance detection elements 21 to measure the vertical distance between the test piece 1 and the corresponding detection surfaces of the test piece 1. By analyzing the maximum and minimum values ​​of the measurement results of the multiple distance detection elements 21, it can be determined whether the crystal rod 105 is swaying and the magnitude of the swaying. Secondly, the distance detection component 2 can measure the real-time position of the test piece 1, thereby accurately controlling the distance between the bottom wall of the seed crystal and the liquid surface of the molten metal. This allows for accurate contact between the bottom wall of the seed crystal and the liquid surface of the molten metal during the crystal pulling stage, in preparation for the crystal growth process.

[0062] In addition, by setting the distance detection component 2, the vertical distance between the test piece 1 and the top wall of the furnace body 101 can be monitored in real time, so as to effectively avoid the problem of the test piece 1 hitting the top wall of the furnace body 101 during the process of lifting the test piece 1 upward, and prevent the crystal rod 105 from falling.

[0063] It is understood that in this application, the vertical distance h1 between the first detection surface 11 and the second detection surface 12 can be a certain value or a range of values ​​(a continuous range of values ​​or a discontinuous range of values); similarly, the vertical distance h2 between the first detection surface 11 and the third detection surface 13 can be a certain value or a range of values ​​(a continuous range of values ​​or a discontinuous range of values).

[0064] For example, both the first detection surface 11 and the second detection surface 12 are planar and horizontally positioned. In this case, the vertical distance h1 between the first detection surface 11 and the second detection surface 12 can be a definite value. Alternatively, one of the first detection surface 11 and the second detection surface 12 can be a horizontally positioned plane, and the other can be a conical surface with a vertical line as its central axis. In this case, the vertical distance h1 between the first detection surface 11 and the second detection surface 12 can be a continuous range of values. Of course, the vertical distance h2 between the first detection surface 11 and the third detection surface 13 can also be set in the above manner, which will not be elaborated further here.

[0065] Optionally, the distance detection element 21 can be a laser rangefinder or an infrared rangefinder, etc., and the ranging line of the distance detection element 21, for example, the laser emission line, points downward.

[0066] In some embodiments, such as Figure 5 As shown, the third detection surface 13 extends radially from the inside out and downwards, so that when the shaking amplitude of the workpiece 1 under test increases further, the vertical distance h2 between the first detection surface 11 and the third detection surface 13 measured by the multiple distance detection elements 21 will increase with the increase of the shaking amplitude, so that the system 100 can further judge the shaking amplitude, thereby improving the accuracy of detecting the shaking amplitude of the crystal rod 105 and improving the applicability of the system 100. At the same time, it makes the overall shape of the workpiece 1 under test more balanced, which is conducive to improving the weight and stability of the workpiece 1 under test, reducing the situation where the shaking of the crystal rod 105 is aggravated by the shaking of the crystal rod 105, and ensuring the accurate measurement and normal operation of the system 100.

[0067] It should be noted that the third detection surface 13 extends downward at an angle from the inside out. Therefore, the vertical distance h2 between the first detection surface 11 and the third detection surface 13 is within a variable range. In this application, it is necessary to ensure that the minimum value of the above-mentioned variable range is still greater than the vertical distance h1 between the first detection surface 11 and the second detection surface 12.

[0068] Optionally, in Figure 5 In the example, the third detection surface 13 is formed as a conical surface. Of course, the third detection surface 13 can also be formed as a conical surface, or on the longitudinal section of the workpiece 1, the line segment corresponding to the third detection surface 13 is a concave or convex curve segment.

[0069] In some embodiments, such as Figure 5As shown, the multiple detection surfaces also include a fourth detection surface 14, which is located radially inside the first detection surface 11 and the first detection surface 11 is arranged around the fourth detection surface 14. The vertical distance between the fourth detection surface 14 and the third detection surface 13 is h3, where h3 > h1, so that the accuracy of the distance detection result is increased by using the fourth detection surface 14.

[0070] As can be seen, by setting the fourth detection surface 14, the detection positions of the multiple distance detection elements 21 can also be in the following situations: the detection position of at least one distance detection element 21 is located on the third detection surface 13 at some time, the detection position of at least one distance detection element 21 is located on the fourth detection surface 14 at some time, and the detection positions of the multiple distance detection elements 21 are always within the range corresponding to the outer contour of the third detection surface 12. At this time, the difference between the maximum and minimum values ​​of the detection results of the multiple distance detection elements 21 is h3, and the shaking amplitude of the workpiece 1 to be inspected is large.

[0071] For example, in Figure 5 In the example, h3 > h2, which makes it easier to increase the difference between the maximum and minimum values ​​measured by the multiple distance detection elements 21 when the crystal shakes significantly, thereby making it easier for the system 100 or the operator to detect that the crystal rod 105 is shaking significantly, and thus improving the detection accuracy of the system 100.

[0072] Of course, the fourth detection surface 14 may not be provided on the part to be inspected 1, or the fourth detection surface 14 may be flush with the first detection surface 11, so that the first detection surface 11 and the fourth detection surface 14 are on the same plane.

[0073] Optionally, such as Figure 5 As shown, the first detection surface 11 and the third detection surface 13 are located on the same side of the second detection surface 12, which helps to reduce the space occupied by the test piece 1 in the vertical direction.

[0074] In some embodiments, such as Figure 5 As shown, the plurality of detection surfaces also includes a fourth detection surface 14. In the vertical direction, the second detection surface 12 and the fourth detection surface 14 are located on the same side of the first detection surface 11, and the first detection surface 11 and the third detection surface 13 are located on the same side of the second detection surface 12, which helps to reduce the space occupied by the workpiece 1 in the vertical direction. For example, in the vertical direction, the second detection surface 12 is higher than the first detection surface 11 and the third detection surface 13, and the first detection surface 11 is higher than the third detection surface 13. In the vertical direction, the fourth detection surface 14 is located between the first detection surface 11 and the second detection surface 12, or the fourth detection surface 14 is higher than the second detection surface 12.

[0075] For example, in Figure 5In the example, the fourth detection surface 14 is located radially inside the first detection surface 11 and is higher than the first detection surface 11. The second detection surface 12 is located radially outside the first detection surface 11 and is higher than both the first detection surface 11 and the fourth detection surface 14. The third detection surface 13 is located radially outside the second detection surface 12 and is lower than the first detection surface 11. The third detection surface 13 extends radially from the inside out and downward. Thus, the upper surface of the workpiece 1 under inspection forms an open-top annular groove corresponding to the position of the first detection surface 11. The center of the annular groove is formed as a protrusion, and the upper surface of the protrusion is the fourth detection surface 14. The height of the protrusion is different from the height of the outer wall of the annular groove. For example, the height of the protrusion can be lower than the height of the outer wall, or it can be higher than the height of the outer wall. That is, the fourth detection surface 14 can be located above or below the second detection surface 12.

[0076] In some embodiments, such as Figure 1 , Figure 4 and Figures 7-8 As shown, the system 100 for detecting crystal rod swaying also includes a stopping device 3. The stopping device 3 includes two telescopic mechanisms 31 arranged opposite each other. The telescopic mechanisms 31 have an extended state and a retracted state. In the extended state, the adjacent ends of the two telescopic mechanisms 31 are joined to form a limiting ring 3a. The limiting ring 3a is adapted to be arranged around the crystal pulling rope 102 to limit the swaying amplitude of the crystal pulling rope 102. That is, by reducing the swaying amplitude of the crystal pulling rope 102 through the limiting ring 3a, the swaying amplitude of the crystal rod 105 is quickly reduced, thereby improving the crystal rod 105's stability during crystal growth. The growth quality of the crystal rod is 05, avoiding crystal wire breakage; in the contracted state, the adjacent ends of the two telescopic mechanisms 31 separate, causing the aforementioned limiting ring 3a to decompose. The distance between the two telescopic mechanisms 31 can be greater than the maximum width of the workpiece 1 and the crystal rod 105, avoiding interference between the workpiece 1 and the crystal rod 105 and the telescopic mechanism 31, that is, avoiding damage to the workpiece 1 and the crystal rod 105 by the telescopic mechanism 31, or avoiding collision between the telescopic mechanism 31 and the workpiece 1 or the crystal rod 105, causing the crystal rod 105 to fall and cause production loss.

[0077] In some embodiments, such as Figure 2 and Figure 4As shown, the telescopic mechanism 31 includes a first telescopic member 311, a second telescopic member 312, a first driving member 313, and a limiting member 314. The second telescopic member 312 and the first telescopic member 311 are telescopically coupled in the horizontal direction so that the length of the telescopic mechanism 31 is adjustable, that is, the horizontal length of the telescopic mechanism 31 is adjustable. The first driving member 313 is used to drive the second telescopic member 312 to move relative to the first telescopic member 311 so as to realize the active adjustment of the length of the telescopic mechanism 31. The limiting member 314 is provided at one end of the length of the first telescopic member 311, and the limiting member 314 is adapted to be spliced ​​with the limiting member 314 of another telescopic mechanism 31 to form a limiting ring 3a.

[0078] Therefore, the first driving member 313 drives the second telescopic member 312 to move relative to the first telescopic member 311, so that the limiting ring 3a approaches or moves away from the crystal pulling rope 102, thereby realizing the conversion of the telescopic mechanism 31 in the extended state and the retracted state. In the extended state, the limiting ring 3a is at the splice of the two limiting members 314. In the retracted state, the two limiting members 314 separate from each other, so that the limiting ring 3a decomposes.

[0079] Optionally, the first telescopic member 311 defines a mating space, and in the telescopic state, the length of the second telescopic member 312 mating with the mating space is greater than the length of the second telescopic member 312 mating with the mating space in the extended state. Of course, the mating method of the first telescopic member 311 and the second telescopic member 312 is not limited to this.

[0080] In some embodiments, such as Figures 1-2As shown, the stopping device 3 also includes a guide rail 4 and a second driving component 5. The guide rail 4 is connected to the top wall of the crystal growth furnace 200 and extends vertically. There are two guide rails 4, which are symmetrically arranged on both radial sides of the workpiece 1 to be inspected. The guide rails 4 are spaced apart from the crystal rod 105 at the bottom of the seed crystal to avoid interference between the guide rails 4 and the seed crystal and crystal rod 105. The second driving component 5 is arranged on the guide rail 4. There are two second driving components 5, which correspond one-to-one with the two guide rails 4. The telescopic mechanism 31 is arranged on the corresponding guide rail 4. The second driving component 5 is used to drive the telescopic mechanism 31 to move along the extension direction of the guide rail 4, so as to realize the vertical movement of each telescopic mechanism 31, thereby adjusting the movement of the guide rail 4. The height of each telescopic structure 31 is such that when the stopping device 3 restricts the swaying of the crystal pulling rope 102, the height of the stopping device 3 is matched with the current swaying amplitude of the crystal pulling rope 102 and the current length of the crystal rod 105. For example, if the swaying amplitude of the crystal pulling rope 102 is small, the vertical distance between the stopping device 3 and the crystal rod 105 when restricting the swaying of the crystal pulling rope 102 is a1; if the swaying amplitude of the crystal pulling rope 102 is large, the vertical distance between the stopping device 3 and the crystal rod 105 when restricting the swaying of the crystal pulling rope 102 is a2, where a2 > a1. This ensures the reliable operation of the system 100. At the same time, the structure of the drive mechanism 104 is simple, reducing the failure rate and improving the stability of the drive mechanism 104.

[0081] As can be seen, each second driving member 5 is used to drive one telescopic mechanism 31 to move in the vertical direction. Optionally, the two second driving members 5 can be configured to drive the two telescopic mechanisms 31 to move synchronously; of course, the two second driving members 5 can also be configured to drive the two telescopic mechanisms 31 to move asynchronously.

[0082] In some embodiments, such as Figure 1 As shown, the system 100 for detecting crystal rod swaying also includes an alarm device 6. The alarm device 6 is communicatively connected to multiple distance detection elements 21 (e.g., wired or wireless connection), so that the detection results of the multiple distance detection elements 21, and / or the judgment result of the processor on the crystal rod 105 swaying based on the detection results of the multiple distance detection elements 21, can be transmitted to the alarm device 6. The alarm device 6 is configured to output different alarm signals according to the detection results of the multiple distance detection elements 21 to remind the operator, so that the operator can directly judge whether the crystal rod 105 is swaying and the magnitude of the swaying of the crystal rod 105 through the alarm signal.

[0083] Optionally, the alarm device 6 may include at least one of a sound alarm device, a light alarm device, or a sound and light alarm device.

[0084] For example, when the alarm device 6 includes a sound alarm device, the sound alarm device can output different sound alarm signals based on the detection results of multiple distance detection elements 21. For instance, the sound alarm device can output alarm sounds of different intensities based on the detection results of the distance detection elements 21. Alternatively, when the alarm device 6 includes a light alarm device, the light alarm device can emit lights of different intensities, and / or lights of different flashing frequencies, and / or lights of different colors based on the detection results of multiple distance detection elements 21. Optionally, the greater the shaking amplitude of the crystal rod 105, the higher the intensity of the sound or light emitted by the alarm device 6 and the faster the flashing frequency.

[0085] According to a second aspect of the present invention, a crystal growth furnace 200 includes a furnace body 101, a crystal pulling rope 102, a lifting mechanism 103, a driving mechanism 104, and a system 100 for detecting crystal rod swaying. The top wall of the furnace body 101 has an opening 101a, and the furnace body 101 defines a growth cavity. The top cover of the growth cavity can form the top wall of the furnace body 101. The crystal pulling rope 102 is adapted to pass through the opening 101a and is used to lift the crystal. The lifting mechanism 103 is fixed outside the furnace body 101 and is used to drive the crystal rod 105 to rise and fall through the crystal pulling rope 102. The driving mechanism 104 is disposed in the furnace body 101 and is used to drive the lifting mechanism 103 to rotate around the central axis of the furnace body 101, so that the crystal pulling rope 102 can drive the crystal rod 105 to rotate. The crystal rod sway detection system 100 is a crystal rod sway detection system 100 according to the first aspect embodiment of the present invention. The test piece 1 is connected to the lower end of the crystal pulling rope 102. Multiple detection surfaces are adapted to be coaxially arranged with the crystal pulling rope 102. Then the crystal pulling rope 102 can be connected to the position of the central axis of the multiple detection surfaces of the test piece 1.

[0086] According to the crystal growth furnace 200 of the present invention, by employing the above-described system 100 for detecting crystal rod swaying, it is possible to determine whether the crystal rod 105 sways during the production process and the magnitude of the swaying, thereby facilitating timely corresponding processing and providing convenience for production. At the same time, it can improve the crystal rod growth quality and production efficiency of the crystal growth furnace 200.

[0087] exist Figure 1 In the example, the lifting mechanism 103 includes an upper cover and a lifting and winding module. The upper cover is disposed on the top wall of the furnace body 101. The driving mechanism 104 is used to drive the upper cover to rotate relative to the furnace body 101. The lifting and winding module is disposed in the upper cover and is adapted to follow the rotation of the upper cover. One end of the lifting rope 102 is connected to the lifting and winding module, and the lifting rope 102 is driven to move up and down through the lifting and winding module.

[0088] Optionally, the component to be tested 1 can be a counterweight of the crystal growth furnace 200, so as to save the number of components of the crystal growth furnace 200.

[0089] In some embodiments, such as Figure 1 As shown, the system 100 for detecting crystal rod swaying also includes an alarm device 6. The alarm device 6 is electrically connected to multiple distance detection elements 21 via connecting wires. The alarm device 6 is configured to output different alarm signals based on the detection results of the multiple distance detection elements 21 to remind the operator whether the crystal rod 105 is swaying and the magnitude of the swaying.

[0090] The alarm device 6 and multiple distance detection elements 21 are fixed to the top wall of the furnace body 101, and the alarm device 6 is located outside the furnace body 101. A wiring groove is formed on the top wall of the furnace body 101, and the connecting wire is located in the wiring groove. The wiring groove includes a first groove segment 21a and a second groove segment 21b. The first groove segment 21a is arranged around the opening 101a, and the second groove segment 21b is connected to the first groove segment 21a and extends radially outward along the opening 101a to the alarm device 6. This prevents the connecting wire in the wiring groove from being corroded by the gas in the furnace body 101 and ensures the normal operation of the alarm device 6 and the distance detection elements 21.

[0091] According to the method for detecting crystal rod swaying according to a third aspect embodiment of the present invention, the crystal rod swaying detection system 100 according to the first aspect embodiment of the present invention is used for detection, such as... Figure 9 and Figure 10 As shown, the detection method includes the following steps: S1, during the crystal growth process, the maximum value Dmax and minimum value Dmin of the detection results of multiple distance detection elements 21 are obtained; S2, if Dmax-Dmin=0, it is determined that the crystal pulling rope 102 has not shaken, and the test piece 1 and crystal rod 105 have not shaken; if 0<Dmax-Dmin<Δ, it is determined that the crystal pulling rope 102 is in the first level of shaking, and the test piece 1 and crystal rod 105 are also in the first level of shaking; if Dmax-Dmin≥Δ, it is determined that the crystal pulling rope 102 is in the second level of shaking, and the test piece 1 and crystal rod 105 are also in the second level of shaking, and the shaking amplitude of the second level of shaking is greater than that of the first level of shaking.

[0092] The crystal rod sway detection method according to the present invention can accurately determine whether the crystal pulling rope 102 is swaying and the degree of swaying of the crystal pulling rope 102, thereby determining whether the crystal rod 105 is swaying and the degree of swaying of the crystal rod 105. This facilitates the implementation of corresponding calibration steps and helps to avoid problems such as crystal rod 105 breakage, falling off, and affecting crystal rod 105 growth caused by crystal rod swaying during crystal growth, thereby improving the quality of crystal rod growth.

[0093] Optionally, 45mm≤Δ≤75mm, for example, Δ can be 45mm, 50mm, 65mm, or 75mm, etc.

[0094] Optionally, during the crystal growth process, steps S1 and S2 can be executed multiple times. During step S2, if Dmax-Dmin = 0, then the crystal pulling rope 102 does not sway, and steps S1 and S2 can continue to be executed until the crystal growth process ends. If 0 < Dmax-Dmin, corresponding processing can be performed based on the determined sway level of the crystal pulling rope 102 to reduce the sway amplitude of the crystal pulling rope 102.

[0095] It is understandable that when it is determined in step S2 that the crystal pulling rope 102 has not shaken, there is no need to process the crystal pulling rope 102. For example, if the system 100 includes a stop device 3, the stop device 3 does not need to be activated and remains in a contracted state.

[0096] In some embodiments, such as Figure 1 , Figure 4 and Figures 7-8 As shown, the system 100 for detecting crystal rod swaying also includes a stopping device 3. The stopping device 3 includes two telescopic mechanisms 31 arranged opposite to each other and two drive mechanisms 104. The telescopic mechanisms 31 have an extended state and a retracted state. In the extended state, the adjacent ends of the two telescopic mechanisms 31 are joined together to form a limiting ring 3a. The limiting ring 3a is used to limit the swaying amplitude of the crystal pulling rope 102. In the retracted state, the adjacent ends of the two telescopic mechanisms 31 are separated. Each drive mechanism 104 is used to drive the corresponding telescopic mechanism 31 to move in the vertical direction.

[0097] At this time, as Figure 10 As shown, the method for detecting crystal rod swaying also includes: S3, when it is determined that the crystal pulling rope 102 is at the first level of swaying, the driving mechanism 104 drives the telescopic mechanism 31 to move to the first preset position. At the first preset position, the telescopic mechanism 31 is located above the workpiece 1 to be inspected, and the telescopic mechanism 31 and the workpiece 1 to be inspected are separated by a first preset distance vertically; S4, both telescopic mechanisms 31 are switched to the extended state, so that the limiting ring 3a is sleeved on the outside of the crystal pulling rope 102 to limit the crystal pulling rope 102 in a smaller space. At this time, the limiting ring 3a interferes with the crystal pulling rope 102 to reduce the swaying amplitude of the crystal pulling rope 102 until it is determined that the crystal pulling rope 102 has not swayed.

[0098] The cross-sectional shape of the limiting ring 3a can be a circular ring or a polygonal ring, etc.

[0099] As can be seen, in step S4, the swaying of the crystal pulling rope 102 is also determined. The swaying determination in step S4 can be based on the same logic as in steps S1 and S2, which is to determine whether the crystal pulling rope 102 is swaying and the degree of swaying based on the difference between the maximum and minimum values ​​of the detection results of multiple distance detection elements 21. Of course, the swaying amplitude determination in step S4 can also be based on a different logic than in steps S1 and S2. Optionally, the first preset distance is H1, where H1 ≥ 10mm, to ensure sufficient safety distance between the telescopic mechanism 31 and the workpiece 1 to be inspected, avoiding interference between the telescopic mechanism 31 and the workpiece 1. At the same time, when the telescopic mechanism 31 is in the extended state, the limiting ring 3a is appropriately close to the crystal rod 105, so that the limiting ring 3a can better restrict the crystal pulling rope 102, thereby reducing the swaying of the crystal pulling rope 102 more quickly until it stops, ensuring the operating efficiency of the stop device 3.

[0100] As can be seen, during the crystal growth process, if step S2 determines that the crystal pulling rope 102 is in the first level of shaking, then step S3 is executed, the driving mechanism 104 drives the telescopic mechanism 31 to move to the first preset position, and then step S4 is executed, both telescopic mechanisms 31 are switched to the extended state, so that the limiting ring 3a restricts the shaking of the crystal pulling rope 102.

[0101] In step S4, the judgment of the crystal pulling rope 102 swaying is performed once or multiple times. If it is determined that the crystal pulling rope 102 is not swaying, both telescopic mechanisms 31 switch to the retracted state. If it is determined that the crystal pulling rope 102 is at the first level of swaying, both telescopic mechanisms 31 remain in the extended state. If the judgment of the crystal pulling rope 102 swaying is performed multiple times in step S4, it can be performed once at a certain time interval or repeated at a certain frequency.

[0102] Optionally, in step S4, when both telescopic mechanisms 31 are switched to the extended state, the shaking judgment of the crystal pulling rope 102 can be performed directly, or the shaking judgment of the crystal pulling rope 102 can be performed after a certain period of time.

[0103] In some embodiments, in step S3, the drive mechanism 104 drives the telescopic mechanism 31 upward to a position where it abuts against the top wall of the furnace body 101 of the crystal growth furnace 200. The drive mechanism 104 then drives the telescopic mechanism 31 downward (e.g., downward at a constant speed), and the required downward distance is calculated until the telescopic mechanism 31 moves to a first preset position. Of course, in step S3, the drive mechanism 104 can also drive the telescopic mechanism 31 to move directly toward the first preset position.

[0104] In some embodiments, such as Figure 10As shown, the method for detecting crystal rod swaying also includes step S5, which is located between steps S2 and S3. In step S5, when it is determined that the crystal pulling rope 102 is in the first level of swaying, the protective gas of the crystal growth furnace 200 is reduced from the first preset flow rate to the second preset flow rate and maintained for the first preset duration. The swaying amplitude of the crystal pulling rope 102 is determined again, wherein the second preset flow rate is 2 / 3 to 1 / 2 of the first preset flow rate.

[0105] Obviously, when it is determined in step S2 that the crystal pulling rope 102 is in the first level of shaking, in step S5, the flow rate of the protective gas of the crystal growth furnace 200 is reduced to the second preset flow rate and maintained for the first preset duration. This reduces the influence of the protective gas on the shaking of the crystal pulling rope 102 while ensuring normal production operation, thereby reducing the shaking amplitude of the crystal pulling rope 102 and improving the applicability and efficiency of the crystal rod shaking detection system 100.

[0106] It is understandable that the judgment of the swaying amplitude of the crystal pulling rope 102 in step S5 may be the same as or different from the judgment logic of the crystal pulling rope 102 in steps S1 and S2.

[0107] As can be seen, since step S5 is located between steps S2 and S3, if the judgment of the shaking amplitude of the crystal pulling rope 102 after the time period corresponding to the first preset duration in step S5 is still at the first level of shaking, then step S3 is executed. If the judgment of the shaking amplitude of the crystal pulling rope 102 after the time period corresponding to the first preset duration in step S5 is that no shaking has occurred, then step S3 does not need to be executed. That is to say, if the crystal pulling rope 102 is at the first level of shaking, the shaking of the crystal pulling rope 102 can be stabilized by reducing the flow rate of the protective airflow. If this is feasible, then there is no need to apply forced mechanical intervention through the stop device 3. If this is not feasible, then mechanical intervention can be applied through the stop device 3. This simplifies the operation logic of the detection method and facilitates the rapid stabilization of the crystal rod 105, avoiding the entire shaking time being too long.

[0108] For example, during crystal growth, if step S2 determines that the crystal pulling rope 102 is at the first level of swaying, then step S5 is executed, reducing the flow rate of the protective gas in the crystal growth furnace 200 to the second preset flow rate and maintaining it for the first preset time. After the first preset time, the swaying amplitude of the crystal pulling rope 102 is determined again. If the crystal pulling rope 102 does not sway, then the swaying treatment of the crystal pulling rope 102 is complete, and the process can continue from step S1 until the end of the crystal growth process. If the crystal pulling rope 102... If the vibration level is still at the first level, then step S3 is executed. The drive mechanism 104 drives the telescopic mechanism 31 to move to the first preset position above the workpiece 1 to be inspected. Then, step S4 is executed, where both telescopic mechanisms 31 switch to the extended state, and the two limiting members 314 are spliced ​​together to form a limiting ring 3a. The limiting ring 3a is fitted onto the crystal pulling rope 102 to limit the vibration of the crystal pulling rope 102 until the vibration of the crystal pulling rope 102 stops. At this point, the vibration processing of the crystal pulling rope 102 is completed, and the process can continue from step S1. Of course, the method for detecting crystal rod vibration may also exclude step S5. If it is determined in step S2 that the crystal pulling rope 102 is at the first level of vibration, step S3 is executed directly.

[0109] Optionally, the first preset duration is t1, where 20s≤t1≤30s. For example, t1 can be 20s, 22s, 25s, 28s, or 30s, etc.

[0110] In some embodiments, such as Figure 1 , Figure 4 and Figures 7-8 As shown, the system 100 for detecting crystal rod swaying also includes a stopping device 3. The stopping device 3 includes two telescopic mechanisms 31 arranged opposite to each other and two drive mechanisms 104. The telescopic mechanisms 31 have an extended state and a retracted state. In the extended state, the adjacent ends of the two telescopic mechanisms 31 are joined together to form a limiting ring 3a. The limiting ring 3a is used to limit the swaying amplitude of the crystal pulling rope 102. In the retracted state, the adjacent ends of the two telescopic mechanisms 31 are separated. Each drive mechanism 104 is used to drive the corresponding telescopic mechanism 31 to move in the vertical direction.

[0111] At this time, as Figure 10As shown, the method for detecting crystal rod swaying also includes: S6, when it is determined that the crystal pulling rope 102 is in the second level of swaying, the drive mechanism 104 drives the telescopic mechanism 31 to move upward to the position where it stops against the top wall of the furnace body 101 of the crystal growth furnace 200. This position can be the highest position that the telescopic mechanism 31 can reach; S7, both telescopic mechanisms 31 are switched to the extended state, at which time the limiting ring 3a is sleeved on the outside of the crystal pulling rope 102; S8, the drive mechanism 104 drives the telescopic mechanism 31 to move downward until the telescopic mechanism 31 moves to the second preset position and maintains it for the second preset time. At the second preset position, the telescopic mechanism 31 is located above the workpiece 1 to be inspected, and the telescopic mechanism 31 and the workpiece 1 to be inspected are separated by a second preset distance vertically.

[0112] As can be seen, in step S6, the driving mechanism 104 can drive the telescopic mechanism 31 to the position furthest from the inspected part 1 in terms of vertical distance, so as to avoid the swaying amplitude of the inspected part 1 and the crystal rod 105 increasing when the limiting ring 3a is sleeved outside the crystal pulling rope 102 in step S7; in step S8, during the downward movement of the telescopic mechanism 31, the limiting ring 3a is always sleeved outside the crystal pulling rope 102 to limit the swaying of the crystal pulling rope 102, so that the limiting ring 3a "straightens" the crystal pulling rope 102 from top to bottom, so as to effectively and gradually reduce the swaying amplitude of the crystal pulling rope 102 and the crystal rod 105.

[0113] Optionally, in step S8, the length of the second preset duration can be set according to actual needs. For example, in step S8, the telescopic mechanism 31 moves to the second preset position and maintains the second preset duration until it is determined that the crystal pulling rope 102 has not shaken.

[0114] Optionally, the judgment of the crystal pulling rope 102 swaying in step S8 can be based on the same logic as the judgment of the crystal pulling rope 102 in steps S1 and S2. It is also based on the difference between the maximum and minimum values ​​of the detection results of multiple distance detection elements 21 to determine whether the crystal pulling rope 102 is swaying and the level of swaying of the crystal pulling rope 102. Optionally, the second preset distance is H2, H2≥10mm, to ensure that there is a sufficient safety distance between the telescopic mechanism 31 and the workpiece 1 to be inspected, so as to avoid interference between the telescopic mechanism 31 and the workpiece 1 to be inspected. At the same time, when the telescopic mechanism 31 is in the extended state, the limiting ring 3a is relatively close to the crystal rod 105, which can more quickly reduce the swaying of the crystal pulling rope 102 until it stops, ensuring the operating efficiency of the stopping device 3.

[0115] As can be seen, during the crystal growth process, if step S2 determines that the crystal pulling rope 102 is in the second level of shaking, then step S6 is executed, and the driving mechanism 104 drives the telescopic mechanism 31 to move upward to the position where it stops against the top wall of the furnace body 101 of the crystal growth furnace 200. Then step S7 is executed, and both telescopic mechanisms 31 are switched to the extended state. Then step S8 is executed, and the driving mechanism 104 drives the telescopic mechanism 31 to move downward until the telescopic mechanism 31 moves to the second preset position and maintains it for the second preset time.

[0116] Optionally, during step S8, the judgment on the shaking of the crystal pulling rope 102 is performed once or multiple times. If it is determined that the crystal pulling rope 102 is not shaking during step S8, both telescopic mechanisms 31 switch to the retracted state. If 0 < Dmax - Dmin, both telescopic mechanisms 31 remain in the extended state until the crystal pulling rope 102 stops shaking. If the judgment on the shaking of the crystal pulling rope 102 is performed multiple times in step S8, it can be performed once at regular intervals or repeated at a certain frequency.

[0117] Optionally, in step S8, the swaying amplitude of the crystal pulling rope 102 is determined in real time. If it is determined that the crystal pulling rope 102 has not swayed, the telescopic mechanism 31 stops descending and switches to the retracted state to simplify the detection method.

[0118] For example, in step S8, if it is determined that the crystal pulling rope 102 does not sway during the descent of the telescopic mechanism 31, the telescopic mechanism 31 stops descending and does not need to move to the second preset position; if it is determined that the crystal pulling rope 102 sways during the descent of the telescopic mechanism 31, the telescopic mechanism 31 continues to descend until the second preset position, regardless of the magnitude of the sway.

[0119] In some embodiments, such as Figure 10 As shown, the method for detecting crystal rod swaying also includes step S9, which is located between steps S2 and S6. In step S9, when it is determined that the crystal pulling rope 102 is in the second-level swaying level, the protective gas of the crystal growth furnace 200 is reduced from the first preset flow rate to the third preset flow rate and maintained for the third preset duration. The swaying amplitude of the crystal pulling rope 102 is determined again, wherein the third preset flow rate is 1 / 2 to 1 / 3 of the first preset flow rate.

[0120] Obviously, when it is determined in step S2 that the crystal pulling rope 102 is in the second level of shaking, in step S9, the flow rate of the protective gas of the crystal growth furnace 200 is reduced to the third preset flow rate and maintained for the second preset time. This reduces the influence of the protective gas on the shaking of the crystal pulling rope 102 while ensuring normal production operation, thereby reducing the shaking amplitude of the crystal pulling rope 102, improving the applicability of the crystal rod shaking detection system 100, and saving calibration time.

[0121] It is understandable that the judgment of the swaying amplitude of the crystal pulling rope 102 in step S9 may be the same as or different from the judgment logic of the crystal pulling rope 102 in steps S1 and S2.

[0122] As can be seen, since step S9 is located between steps S2 and S6, if the judgment of the shaking amplitude of the crystal pulling rope 102 after the time period corresponding to the second preset duration in step S9 is still at the second level of shaking, then step S6 is executed. If the judgment of the shaking amplitude of the crystal pulling rope 102 after the time period corresponding to the second preset duration in step S9 is that no shaking has occurred, then step S6 does not need to be executed. That is to say, if the crystal pulling rope 102 is at the second level of shaking, the shaking of the crystal pulling rope 102 can be stabilized by reducing the flow rate of the protective airflow. If this is feasible, then there is no need to apply forced mechanical intervention through the stop device 3. If this is not feasible, then mechanical intervention can be applied through the stop device 3. This simplifies the operation logic of the detection method and facilitates the rapid stabilization of the crystal rod 105, avoiding the entire shaking time being too long.

[0123] Optionally, the third preset duration is t3, where 10s≤t3≤15s. For example, t3 can be 10s, 11s, 12s, 13s, 14s, or 15s, etc.

[0124] In some embodiments, in step S9, when the determination result of the shaking amplitude of the crystal pulling rope 102 is that the crystal pulling rope 102 is at the first level of shaking, steps S3 and S4 are executed sequentially to achieve rapid stabilization of the crystal rod 105 and save the entire shaking processing time.

[0125] For example, during crystal growth, if step S2 determines that the crystal pulling rope 102 is at the second level of swaying, then step S9 is executed: the flow rate of the protective gas in the crystal growth furnace 200 is reduced to the third preset flow rate and maintained for the second preset duration. After the second preset duration, the swaying amplitude of the crystal pulling rope 102 is determined again. If the crystal pulling rope 102 does not sway, then the swaying treatment of the crystal pulling rope 102 is completed, and step S1 can continue to be executed until the crystal growth result is achieved. If step S9 determines that the crystal pulling rope 102 is at the first level of swaying, then step S3 is executed, the drive mechanism 104 drives the telescopic mechanism 31 to move to the first preset position, and then step S4 is executed, both telescopic mechanisms 31 are switched to the extended state, so that the limiting ring 3a restricts the swaying of the crystal pulling rope 102 until it is determined that the crystal pulling rope 102 does not sway.

[0126] If the crystal pulling rope 102 is still in the second-level swaying state in step S9, then step S6 is executed. The drive mechanism 104 drives the telescopic mechanism 31 to move upward to the position where it stops against the top wall of the furnace body 101 of the crystal growth furnace 200. Then, step S7 is executed, where both telescopic mechanisms 31 switch to the extended state, and the two limiting members 314 are spliced ​​together to form a limiting ring 3a. The limiting ring 3a is sleeved on the crystal pulling rope 102 to limit the swaying of the crystal pulling rope 102. Then, step S8 is executed, where the drive mechanism 104 drives the telescopic mechanism 31 to move downward until the telescopic mechanism 31 moves to the second preset position, so that the limiting ring 3a moves downward along the crystal pulling rope 102 from the position where it stops against the top wall of the furnace body 101 to the second preset position. The position is set so that the downward movement of the limiting ring 3a can reduce the swaying of the crystal pulling rope 102. In step S8, during the process of the telescopic mechanism 31 moving to the second preset position, if it is determined that the crystal pulling rope 102 is not swaying, the telescopic mechanism 31 stops descending and switches to the retracted state. The swaying treatment of the crystal pulling rope 102 is now complete. Then, steps S1 and S2 are executed until the crystal growth process ends. If it is determined that the crystal pulling rope 102 is still swaying, step S8 is executed until the telescopic mechanism 31 moves to the second preset position, until it is determined again that the crystal pulling rope 102 is not swaying. The swaying treatment of the crystal pulling rope 102 is now complete. Then, steps S1 and S2 are executed until the crystal growth process ends.

[0127] Of course, the method for detecting crystal rod swaying may also exclude step S9. If it is determined in step S2 that the crystal pulling rope 102 is at the second level of swaying, step S6 can be executed directly.

[0128] According to a calibration method of a fourth aspect of the present invention, the calibration method uses a crystal rod sway detection system 100 according to a first aspect of the present invention to calibrate the seed crystal's falling position, such as... Figure 11 As shown, the calibration method includes the following steps: during the process of the crystal pulling rope 102 driving the test piece 1 to move downward from the initial position to the crystal pulling position, the current remaining stroke of the test piece 1 is acquired multiple times at different times to make at least one correction. During a single correction, at least the descent time required for the test piece 1 to move from the current position to the crystal pulling position is corrected to ensure the accuracy of the distance between the seed crystal and the liquid surface of the molten liquid, so that the bottom wall of the seed crystal can be accurately contacted with the liquid surface of the molten liquid.

[0129] At the seeding position, the bottom wall of the seed crystal is suitable for contact with the liquid surface of the molten metal. The ideal seeding position is when the bottom wall of the seed crystal is in contact with the liquid surface of the molten metal. The above-mentioned modification in this application can make at least one correction to the actual seeding position of the seed crystal so that the actual seeding position of the seed crystal approaches or coincides with the ideal seeding position, thereby achieving seeding calibration.

[0130] In the process of the test piece 1 moving from the initial position to the seeding position, a correction is performed every fourth preset time interval, and the number of corrections is greater than or equal to 2. The fourth preset time interval decreases as the test piece 1 moves downward. Alternatively, the journey of the test piece 1 from the initial position to the seeding position includes multiple sub-journeys, and a correction is performed every fourth preset time interval in at least the last sub-journey. Alternatively, the journey of the test piece 1 from the initial position to the seeding position includes a first sub-journey and a second sub-journey. The first sub-journey precedes the second sub-journey, and the number of corrections in the first sub-journey is less than the number of corrections in the second sub-journey. All of these methods are beneficial in ensuring the accuracy of the actual seeding position by using fewer corrections.

[0131] For example, the journey of the test piece 1 from the initial position to the crystal-leading position includes a first sub-journey and a second sub-journey. The first sub-journey precedes the second sub-journey. The number of corrections in the first sub-journey is less than the number of corrections in the second sub-journey. A correction is performed every certain period of time during the formation of the second sub-journey.

[0132] Of course, the system 100 for detecting crystal rod swaying can be corrected at regular intervals with relatively short intervals to ensure the accuracy of the distance between the seed crystal and the molten surface during the last correction.

[0133] It is understandable that the initial position of the part to be inspected 1 can be the highest position of the part to be inspected 1, or the initial position of the part to be inspected 1 can be located at any position between the highest position of the part to be inspected 1 and the crystal-driving position.

[0134] In addition, a seed crystal is connected to the lower end of the test piece 1. The crystal pulling rope 102 drives the test piece 1 to rise and fall, thereby driving the seed crystal to rise and fall. The distance detection component 2 measures its own distance from the test piece 1 to calculate the distance between the seed crystal and the surface of the molten liquid.

[0135] According to the calibration method of the present invention, the falling position of the seed crystal is calibrated by the system 100 for detecting the shaking of the crystal rod, so as to ensure the accuracy of the distance between the seed crystal and the liquid surface of the molten liquid during the last correction, thereby achieving accurate contact between the bottom wall of the seed crystal and the liquid surface of the molten liquid.

[0136] In some embodiments, during a single correction, at least one of the descent speed and rotation speed of the test piece 1 can also be corrected; for example, when the descent speed is corrected, the descent speed of the test piece 1 can be better matched with the remaining required descent time, and when the rotation speed of the test piece 1 is corrected, the rotation speed of the seed crystal can be corrected so that the seed crystal is fully prepared.

[0137] Optionally, during a single correction, the descent speed of the workpiece 1 can be reduced, and / or the rotational speed of the workpiece 1 can be increased. Of course, the descent speed of the workpiece 1 can remain essentially constant throughout the entire descent process.

[0138] During the process of the crystal pulling rope 102 driving the workpiece 1 to move downward from the initial position to the crystal pulling position, the lifting mechanism 103 drives the workpiece 1 to descend at a certain speed through the crystal pulling rope 102. During the descent of the seed crystal, the distance detection component 2 measures the workpiece 1 to obtain the position of the workpiece 1, thereby calculating the precise position of the seed crystal in the furnace body 101 within the bottom wall of the furnace. The remaining stroke of the seed crystal is calculated, and the descent time of the seed crystal is corrected based on the remaining stroke and the descent speed of the seed crystal, thereby completing one correction of the crystal pulling process.

[0139] It is evident that, regardless of when a correction is made throughout the entire process, it is sufficient to ensure that at least one correction is made sequentially from the initial position to the crystal-leading position.

[0140] In this application, parameters such as Δ, first preset distance, first preset flow rate, second preset flow rate, first preset duration, second preset distance, second preset duration, and third preset duration can be set according to actual needs.

[0141] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, features defined with "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0142] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0143] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0144] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "beneath" of the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0145] Although embodiments of the invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A system for detecting crystal rod swaying, characterized in that, The application relates to a seed crystal detection device for a crystal growth furnace. The seed crystal detection device comprises a seed crystal to be detected, a distance detection assembly and a stop device. The seed crystal to be detected is adapted to be connected to the lower end of a pulling rope, and the lower end of the seed crystal to be detected is provided with a seed crystal which is coaxially arranged with the seed crystal to be detected and the pulling rope. The seed crystal to be detected has at least three detection surfaces, and the plurality of detection surfaces are coaxially arranged at different heights.

2. The system for detecting wobble of a crystal bar according to claim 1, wherein The plurality of detection surfaces comprise a first detection surface, a second detection surface and a third detection surface which are sequentially arranged in a radial direction from inside to outside.

3. The system for detecting wobble of a crystal bar of claim 1, wherein, The radial width of the first detection surface is greater than that of the second detection surface.

4. The system for detecting wobble of a crystal bar of claim 3, wherein, The upper and lower spacing of the first detection surface and the second detection surface is h1, and the upper and lower spacing of the first detection surface and the third detection surface is h2, h2>h1.

5. The system for detecting wobble of a crystal bar according to any one of claims 1-4, wherein, The distance detection assembly is adapted to be fixed to the top of the crystal growth furnace and is located above the seed crystal to be detected. The distance detection assembly comprises a plurality of distance detection elements which are spaced apart along the circumference of the second detection surface.

6. The system for detecting wobble of a crystal bar of claim 5, wherein, The radial distance between each distance detection element and the central axis of the second detection surface is equal. The detection position of each distance detection element is adapted to be vertically opposite to the outer periphery of the first detection surface. The third detection surface extends downwardly and radially from inside to outside. The plurality of detection surfaces further comprise a fourth detection surface which is located on the radial inner side of the first detection surface and is surrounded by the first detection surface. The upper and lower spacing of the fourth detection surface and the third detection surface is h3, h3>h1.

7. The system for detecting wobble of a crystal bar of claim 5, wherein, In the vertical direction, the second detection surface and the fourth detection surface are located on the same side of the first detection surface, and the first detection surface and the third detection surface are located on the same side of the second detection surface. The stop device comprises two oppositely arranged telescopic mechanisms. In the extended state, the ends of the two telescopic mechanisms adjacent to each other are spliced to form a limiting ring which is used to limit the swing amplitude of the pulling rope. In the contracted state, the ends of the two telescopic mechanisms adjacent to each other are separated. The telescopic mechanism comprises a first telescopic member and a second telescopic member which is telescopically connected with the first telescopic member in the horizontal direction to adjust the length of the telescopic mechanism. The first driving member is used to drive the second telescopic member to move relative to the first telescopic member. The limiting member is arranged at one end of the length of the first telescopic member and is adapted to be spliced with the limiting member of the other telescopic mechanism to form the limiting ring. The stop device further comprises guide rails which are connected with the top wall of the crystal growth furnace and extend in the vertical direction. The guide rails are spaced apart from the crystal rod at the bottom of the seed crystal. The two guide rails are symmetrically arranged on the two sides of the seed crystal to be detected in the radial direction. A second driving member is arranged on the guide rail, and two second driving members are arranged one by one with two guide rails, and the telescopic mechanism is arranged corresponding to the guide rail, and the second driving member is used for driving the telescopic mechanism to move along the extension direction of the guide rail.

8. A crystal growth furnace, characterized by, Comprise: The furnace body, the top wall of the furnace body is formed with a through port; The crystal pulling rope is suitable for being arranged in the through port, and is used for pulling the crystal; The pulling mechanism is fixedly arranged outside the furnace body, and is used for driving the crystal to rise and fall through the crystal pulling rope; The driving mechanism is arranged in the furnace body, and is used for driving the pulling mechanism to rotate around the center axis of the furnace body; The system for detecting the wobble of the crystal bar is the system for detecting the wobble of the crystal bar according to any one of claims 1-7, the detection object is connected to the lower end of the crystal pulling rope, and a plurality of detection surfaces are coaxially arranged with the crystal pulling rope.

9. A method of detecting wobble of a boule, characterized by, The detection method comprises the following steps: S1, in the crystal growing process, the maximum value Dmax and the minimum value Dmin of the detection results of a plurality of distance detection elements are obtained; S2, if Dmax-Dmin=0, it is judged that the crystal pulling rope does not wobble, If 0 If Dmax-Dmin≥Δ, it is judged that the crystal pulling rope is in a second wobble level, and the wobble amplitude of the second wobble level is greater than that of the first wobble level. The system for detecting the wobble of the crystal bar further comprises a stop device, the stop device comprises two oppositely arranged telescopic mechanisms and two driving mechanisms, the telescopic mechanism has an extended state and a contracted state, in the extended state, the ends adjacent to each other of the two telescopic mechanisms are spliced to form a limiting ring, the limiting ring is used for limiting the wobble amplitude of the crystal pulling rope, in the contracted state, the ends adjacent to each other of the two telescopic mechanisms are separated, and each driving mechanism is used for driving the corresponding telescopic mechanism to move in the vertical direction, 10. The method for detecting crystal rod wobbling according to claim 9, characterized in that, The detection method of the wobble of the crystal bar further comprises: S3, when the crystal pulling rope is in the first wobble level, the driving mechanism drives the telescopic mechanism to move to a first preset position, in the first preset position, the telescopic mechanism is located above the detection object, and the telescopic mechanism is separated from the detection object by a first preset distance; S4, both the telescopic mechanisms are switched to the extended state until it is judged that the crystal pulling rope does not wobble. The detection method of the wobble of the crystal bar further comprises step S5, which is between step S2 and step S3, and in step S5, when the crystal pulling rope is in the first wobble level, the protective gas of the crystal growth furnace is reduced from a first preset flow rate to a second preset flow rate, and the second preset flow rate is 2 / 3-1 / 2 of the first preset flow rate.

11. The method for detecting crystal rod wobbling according to claim 10, characterized in that, ​ 12. The method of claim 9-11, wherein, The system for detecting the wobble of the crystal bar further comprises a stop device, the stop device comprising two oppositely arranged telescopic mechanisms and two driving mechanisms, the telescopic mechanism having an extended state and a contracted state, in the extended state, the ends of the two telescopic mechanisms adjacent to each other are spliced to form a limiting ring, the limiting ring is used to limit the amplitude of the wobble of the pulling rope, in the contracted state, the ends of the two telescopic mechanisms adjacent to each other are separated, each driving mechanism is used to drive the corresponding telescopic mechanism to move in the vertical direction, The method for detecting the wobble of the crystal bar further comprises: S6, when the pulling rope is in the second level of wobble, the driving mechanism drives the telescopic mechanism to move upward to a position where the telescopic mechanism abuts against the top wall of the furnace body of the crystal growth furnace; S7, both of the telescopic mechanisms are switched to the extended state; S8, the driving mechanism drives the telescopic mechanism to move downward until the telescopic mechanism moves to a second preset position, and the telescopic mechanism is kept at the second preset position for a second preset time length, in the second preset position, the telescopic mechanism is located above the detected piece, and the telescopic mechanism is separated from the detected piece by a second preset distance.

13. The method for detecting crystal rod wobbling according to claim 12, characterized in that, In step S8, the amplitude of the wobble of the pulling rope is judged in real time, if it is judged that the pulling rope does not wobble, the telescopic mechanism stops descending and is switched to the contracted state.

14. The method for detecting crystal rod wobbling according to claim 12, characterized in that, The method for detecting the wobble of the crystal bar further comprises step S9, step S9 is located between step S2 and step S6, and in step S9, when the pulling rope is in the second level of wobble, the protective gas of the crystal growth furnace is reduced from the first preset flow rate to the third preset flow rate, and the third preset flow rate is 1 / 2-1 / 3 of the first preset flow rate, and the third preset time length is maintained, and the amplitude of the wobble of the pulling rope is judged again.

15. A method of calibration, characterized by, The calibration method uses the system for detecting the wobble of the crystal bar according to any one of claims 1-7 to calibrate the falling position of the seed crystal, The calibration method comprises the following steps: In the process that the pulling rope drives the detected piece to move downward from the initial position to the crystal introduction position, the current remaining stroke of the detected piece is acquired multiple times at different time instants to perform at least one correction, in a single correction, at least the falling time required for the detected piece to move from the current position to the crystal introduction position is corrected, wherein, In the process that the detected piece moves from the initial position to the crystal introduction position, correction is performed every fourth preset time length, and the number of corrections is greater than or equal to 2, the fourth preset time length is shortened as the detected piece moves downward, or The stroke of the detected piece from the initial position to the crystal introduction position comprises multiple sub-strokes, correction is performed every fourth preset time length in at least the last sub-stroke, or The stroke of the detected piece from the initial position to the crystal introduction position comprises a first sub-stroke and a second sub-stroke, the first sub-stroke precedes the second sub-stroke, and the number of corrections in the first sub-stroke is less than the number of corrections in the second sub-stroke.

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