System and method for detecting thermal deformation of a traveling wave tube cathode-focus

Abstract

A kind of detection system and detection method of traveling wave tube cathode-focus pole thermal deformation, detection system includes: heating device, infrared temperature detection device and geometric measurement device.Heating device includes: the accommodation space formed inside vacuum chamber, accommodation space is suitable for placing the traveling wave tube cathode-focus pole to be measured, transparent observation window is arranged on vacuum chamber;Vacuum gauge tube is arranged in vacuum chamber to detect the vacuum degree in accommodation space;Power supply is arranged outside vacuum chamber, power supply is electrically connected with the traveling wave tube cathode-focus pole to be measured;Vacuum pump is communicated with vacuum chamber, vacuum pump is suitable for vacuumizing vacuum chamber to prevent traveling wave tube cathode-focus pole from being oxidized.Infrared temperature detection device is suitable for obtaining the temperature of traveling wave tube cathode-focus pole under the output power of power supply preset by observation window.Geometric measurement device is configured to obtain the deformation amount of traveling wave tube cathode-focus pole at preset temperature by observation window in response to power output power adjustment.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the field of microwave electron vacuum devices, and particularly relates to a detection system and a detection method for thermal deformation of a cathode-focus electrode of a traveling wave tube. BACKGROUND

[0002] As an important component of the traveling wave tube for generating electron beams, the electron gun has a crucial influence on the performance of the traveling wave tube. With the increase of the frequency band, the channel radius of the electron gun becomes smaller and smaller. When the frequency band reaches the millimeter wave band and above, the error caused by the thermal deformation of the electron gun will greatly affect the electron optical system and the electron beam parameters, such as the current, the radius, the position relative to the cathode, the laminar flow of the electrons and the flow rate, and thus seriously affect the overall performance of the traveling wave tube.

[0003] Since the electron gun is composed of different materials, the difference in the thermal expansion coefficient of the materials will cause mechanical deformation of each component of the electron gun under the action of high temperature, change the mechanical structure of the electron gun, and for example, cause deformation of the cathode and change the distance between the cathode and the focus electrode.

[0004] The changes in the mechanical structure of the electron gun will affect the electrical performance of the traveling wave tube, such as affecting the emission and focusing of the electron beam, affecting the emission power of the traveling wave tube, and in severe cases, causing the electron gun to fail due to sparking.

[0005] As can be seen from the above, the increase of temperature will affect the changes in the mechanical structure of the electron gun, cause a certain amount of deformation of the electron gun, and thus have a certain influence on the electrical performance parameters of the electron gun.

[0006] In the related art, by assembling samples of multiple parameters, the flow rate and other indicators of the traveling wave tube are tested in the later stage, the compensation amount corresponding to the optimal indicator is selected as the result of the height deformation, but this scheme has high cost, and the flow rate is easily affected by factors such as poor centering of the electron gun and the high-frequency assembly. Or through special structural design, the deformation amount is reduced, but such structure is relatively complex, it is difficult to realize high-precision processing and assembly, and the traveling wave tube is small in size and light in weight, and there is not enough space to design a complex structure assembly positioning mold. Or a ceramic pin or other material with a low heat transfer coefficient is added to the upper surface of the cathode-focus electrode of the traveling wave tube, and the height change of the pin is measured by using a height gauge and a dial gauge to represent the height change of the cathode-focus electrode of the traveling wave tube, but the coaxiality change cannot be measured, and the ceramic is in contact with the heat source, which will change the original temperature field distribution and affect the measurement accuracy.

[0007] However, the non-contact temperature detection device needs to be directly opposite the measured object. Although the non-contact temperature detection device can also display the temperature in the inclined state, the precision will be reduced, which cannot obtain the accurate temperature of the cathode-focus electrode of the traveling wave tube while detecting the deformation amount of the thermal deformation of the cathode-focus electrode of the traveling wave tube. SUMMARY

[0008] Therefore, the disclosure provides a system and method for detecting thermal deformation of a cathode-focus electrode of a traveling wave tube.

[0009] One aspect of the disclosure provides a system for detecting thermal deformation of a cathode-focus electrode of a traveling wave tube, comprising: a heating device, an infrared temperature detection device, and a geometric quantity measurement device. The heating device comprises: a vacuum chamber, a vacuum gauge, a power supply, and a vacuum pump. The vacuum chamber forms an accommodation space inside, which is suitable for placing the traveling wave tube cathode-focus electrode to be measured, and a transparent observation window is arranged on the vacuum chamber; the vacuum gauge is arranged in the vacuum chamber to detect the vacuum degree in the accommodation space; the power supply is arranged outside the vacuum chamber, and the power supply is electrically connected with the traveling wave tube cathode-focus electrode to be measured, wherein the temperature of the traveling wave tube cathode-focus electrode to be measured rises under the condition of power supply; the vacuum pump is communicated with the vacuum chamber, and the vacuum pump is suitable for vacuumizing the vacuum chamber to prevent the traveling wave tube cathode-focus electrode from being oxidized. The infrared temperature detection device is suitable for obtaining the temperature of the traveling wave tube cathode-focus electrode under the preset output power of the power supply through the observation window. The geometric quantity measurement device is configured to obtain the deformation amount of the traveling wave tube cathode-focus electrode at the preset temperature through the observation window in response to the adjustment of the output power of the power supply.

[0010] According to the embodiments of the disclosure, the vacuum chamber further comprises: a base plate and a plurality of lead porcelains. The base plate is located at the bottom of the shell; the plurality of lead porcelains are respectively penetrated through the base plate, and the traveling wave tube cathode-focus electrode to be measured is arranged on one end of the plurality of lead porcelains located in the accommodation space; one end of any two lead porcelains in the plurality of lead porcelains is connected with the filament of the cathode of the traveling wave tube cathode-focus electrode to be measured, and the other end is suitable for connecting with an external power supply to heat the traveling wave tube cathode-focus electrode to be measured under the action of the external power supply, so that the traveling wave tube cathode-focus electrode to be measured is deformed by heat.

[0011] According to the embodiments of the disclosure, the vacuum chamber further comprises: a leveling assembly. The leveling assembly is arranged on the base plate, and the leveling assembly is located outside the accommodation space. The leveling assembly is suitable for adjusting the traveling wave tube cathode-focus electrode to be measured to a horizontal state.

[0012] According to the embodiments of the disclosure, the vacuum chamber further comprises: a tray and a support column located inside the accommodation space. One end of the support column is fixedly connected with the base plate, and the other end is fixedly connected with the tray; the tray is suitable for supporting the traveling wave tube cathode-focus electrode to be measured.

[0013] According to the embodiments of the disclosure, the vacuum chamber further comprises: a side wall. A groove is arranged on the base plate, and the side wall is sealingly connected with the base plate by pressing the first sealing unit through the side wall under the condition that the gas pressure in the accommodation space is less than the atmospheric pressure.

[0014] According to an embodiment of the present disclosure, the light shield is suitable for filtering a part of light emitted by the cathode-focus of the TWT under the action of the power supply when the geometric measurement device cannot distinguish the boundary of the cathode-focus of the TWT to be measured.

[0015] According to another embodiment of the present disclosure, a method for detecting thermal deformation of a cathode-focus of a TWT, using any of the detection systems described above, comprises:

[0016] Placing the cathode-focus of the TWT to be measured in the accommodation space, and connecting the cathode-focus of the TWT to the power supply;

[0017] Vacuumizing the vacuum chamber to a preset vacuum value;

[0018] Aligning the probe of the infrared temperature detection device with the observation window on the vacuum chamber, turning on the power supply, and adjusting the output power of the power supply to obtain the temperature of the cathode-focus of the TWT at different powers;

[0019] Turning off the power supply, aligning the lens of the geometric measurement device with the observation window, turning on the power supply again, and adjusting the output power of the power supply to obtain the deformation amount of the cathode-focus of the TWT at different temperatures.

[0020] According to another embodiment of the present disclosure, connecting the cathode-focus of the TWT to be measured to the power supply comprises connecting the cathode of the cathode-focus of the TWT to be measured to one end of the lead porcelain, and connecting the other end of the lead porcelain assembly to the power supply.

[0021] According to another embodiment of the present disclosure, before turning on the power supply again, the method further comprises adjusting the cathode-focus of the TWT to be measured to a horizontal state through the leveling assembly under the geometric measurement device.

[0022] According to another embodiment of the present disclosure, adjusting the output power of the power supply to obtain the deformation amount of the cathode-focus of the TWT at different temperatures comprises adding a light shield between the observation window and the lens of the geometric measurement device when the geometric measurement device cannot distinguish the boundary of the cathode-focus of the TWT to be measured.

[0023] According to embodiments of this disclosure, a vacuum gauge is used to etch and monitor the gas pressure inside the vacuum chamber in real time. A vacuum pump is used to reduce the gas pressure inside the vacuum chamber to a preset value, preventing oxidation of the traveling wave tube cathode-focusing electrode during heating. By setting up a vacuum chamber, a vacuum heat dissipation environment suitable for the working state is created. The infrared temperature detection device and the geometric measurement device can perform non-contact measurements on the cathode-focusing electrode of the traveling wave tube under test through a transparent observation window on the vacuum chamber, without affecting the surrounding temperature field distribution. The characteristic location of deformation is directly measured with high measurement accuracy. The sufficiently large vacuum chamber and the non-contact measurement method do not require other auxiliary tooling fixtures, allowing the cathode-focusing electrode assembly to be placed inside the vacuum chamber for measuring the power consumption-temperature-deformation relationship. By measuring the power consumption and temperature relationship, the temperature value is converted into a power consumption value, and the power consumption can be controlled by the power supply, thereby obtaining the relationship between temperature and the deformation of the traveling wave tube focusing electrode. The deformation data of the focusing electrode of a traveling wave tube (TWT) can effectively assist in the electro-optical design, electro-optical robustness evaluation, reliability evaluation, and assembly compensation of the TWT. Attached Figure Description

[0024] Figure 1 This is a schematic diagram illustrating how changes in the cathode height of a traveling wave tube cause fluctuations in the electron trajectory.

[0025] Figure 2 This is a schematic diagram illustrating how changes in the focusing electrode height of a traveling wave tube cause fluctuations in the electron trajectory.

[0026] Figure 3 This is a system block diagram of a traveling wave tube cathode-focusing electrode thermal deformation detection system according to an embodiment of the present disclosure;

[0027] Figure 4 This is a front view of the vacuum chamber according to an embodiment of the present disclosure;

[0028] Figure 5 for Figure 4 A cross-sectional view of the vacuum chamber shown;

[0029] Figure 6 for Figure 4 The first perspective view of the vacuum chamber shown;

[0030] Figure 7 for Figure 4 The second perspective view of the vacuum chamber shown;

[0031] Figure 8 A flowchart of a method for detecting thermal deformation of a traveling wave tube cathode-focusing electrode according to another embodiment of this disclosure; and

[0032] Figure 9 This is a flowchart of a method for detecting thermal deformation of the cathode-focusing electrode of a traveling wave tube according to another embodiment of this disclosure.

[0033] Reference signs:

[0034] 1 - heating device;

[0035] 11 - vacuum chamber;

[0036] 1101 - housing space;

[0037] 1102 - observation window;

[0038] 1103 - base plate;

[0039] 1104 - lead porcelain;

[0040] 1105 - levelling assembly;

[0041] 1106 - tray;

[0042] 1107 - support column;

[0043] 1108 - side wall;

[0044] 1109 - first sealing unit;

[0045] 1110 - second sealing unit;

[0046] 1111 - upper cover;

[0047] 1112 - clamp;

[0048] 1113 - suction nozzle;

[0049] 1114 - suction nozzle adapter flange;

[0050] 12 - vacuum gauge;

[0051] 13 - power supply;

[0052] 14 - vacuum pump;

[0053] 2 - infrared temperature detection device;

[0054] 3 - geometric measurement device; and

[0055] 4 - cathode-focusing anode of the travelling wave tube to be measured. DETAILED DESCRIPTION

[0056] In order to make the objects, technical solutions and advantages of the present disclosure clearer, the following will further describe the present disclosure in detail with specific embodiments and with reference to the drawings. However, the present disclosure can be implemented in different forms and should not be interpreted as limited to the embodiments set forth herein. On the contrary, the embodiments are provided to make the disclosure fully and completely, and to fully convey the scope of the present disclosure to those skilled in the art. In the drawings, the sizes and relative sizes of layers and regions can be exaggerated for clarity, and the same reference numerals represent the same elements throughout.

[0057] In the following, embodiments of the present disclosure will be described with reference to the drawings. However, it should be understood that these descriptions are merely exemplary and are not intended to limit the scope of the present disclosure. In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the embodiments of the present disclosure. However, it will be apparent to one of ordinary skill in the art that one or more embodiments can be practiced without these specific details. In addition, in the following description, descriptions of well-known structures and techniques have been omitted to avoid unnecessarily obscuring the concept of the present disclosure.

[0058] The terms used herein are merely used to describe specific embodiments and are not intended to limit the present disclosure. The terms "include", "comprise" and the like used herein indicate the presence of the described features, steps, operations and / or components, but do not exclude the presence or addition of one or more other features, steps, operations or components.

[0059] All terms used herein, including technical and scientific terms, have meanings commonly understood by one of ordinary skill in the art, unless otherwise defined. It should be noted that the terms used herein should be interpreted as having meanings consistent with the context of the specification, and should not be interpreted in an idealized or overly formal manner.

[0060] In order for those skilled in the art to understand the technical solutions of the present disclosure, the following technical terms are explained.

[0061] In the case of using expressions similar to "at least one of A, B, and C, etc.", it should be generally interpreted as having a meaning that the items are individually selected from the group consisting of A, B, and C without being limited to all of them (for example, "a system having at least one of A, B, and C" should include but not be limited to a system having A alone, a system having B alone, a system having C alone, a system having both A and B, a system having both A and C, a system having both B and C, and / or a system having A, B, and C together, etc.). In the case of using expressions similar to "at least one of A, B, or C, etc.", it should be generally interpreted as having a meaning that the items are individually selected from the group consisting of A, B, and C without being limited to all of them (for example, "a system having at least one of A, B, or C" should include but not be limited to a system having A alone, a system having B alone, a system having C alone, a system having both A and B, a system having both A and C, a system having both B and C, and / or a system having A, B, and C together, etc.).

[0062] Figure 1 This is a schematic diagram illustrating the fluctuations in electron trajectory caused by changes in the cathode height of a traveling wave tube.

[0063] Figure 2 This is a schematic diagram illustrating how changes in the focusing electrode height of a traveling wave tube cause fluctuations in the electron trajectory.

[0064] The embodiments of this disclosure simulate the electron optics system of a terahertz traveling wave tube to demonstrate the effect of cathode-focusing electrode height variation (deformation) on electron trajectories, such as... Figure 1 As shown, the horizontal axis represents the distance electrons travel (mm), and the vertical axis represents the electron trajectory (mm). Figure 2 As shown, the horizontal axis represents the distance electrons travel (mm), and the vertical axis represents the electron trajectory (mm). Figure 1 and Figure 2 It is known that a change in height of the cathode or focusing electrode exceeding 0.03 mm will have a significant impact on the stability of the electron trajectory.

[0065] Therefore, the thermal deformation of the cathode and focusing electrode is a very critical set of design parameters. Based on the original simulation, a detection system and method for the thermal deformation of the traveling wave tube cathode and focusing electrode were developed. The thermal deformation of the traveling wave tube cathode and focusing electrode is measured to verify the correctness of the simulation results. Based on the detection results, the traveling wave tube cathode and focusing electrode can be compensated accordingly so that the thermal deformation of the cathode and focusing electrode will not adversely affect the stability of the electron trajectory during normal use.

[0066] Figure 3 This is a system block diagram of a traveling wave tube cathode-focusing electrode thermoelectric detection system.

[0067] like Figure 3As shown, one aspect of the embodiment of the present disclosure provides a detection system for hot deformation of a traveling wave tube cathode-focus electrode, which comprises a heating device 1, an infrared temperature detection device 2, and a geometric measurement device 3. The heating device 1 comprises a vacuum chamber 11, a vacuum gauge 12, a power supply 13, and a vacuum pump 14. The vacuum chamber 11 forms an accommodating space 1101 inside, which is suitable for placing a traveling wave tube cathode-focus electrode 4 to be measured, and a transparent observation window 1102 is arranged on the vacuum chamber 11; the vacuum gauge 12 is arranged in the vacuum chamber 11 to detect the vacuum degree in the accommodating space 1101; the power supply 13 is arranged outside the vacuum chamber 11, and the power supply 13 is electrically connected with the traveling wave tube cathode-focus electrode 4 to be measured, wherein the temperature of the traveling wave tube cathode-focus electrode rises under the condition of being powered on; the vacuum pump 14 is in communication with the vacuum chamber 11, and the vacuum pump 14 is suitable for vacuumizing the vacuum chamber 11 to prevent the traveling wave tube cathode-focus electrode from being oxidized. The infrared temperature detection device 2 is suitable for acquiring the temperature of the traveling wave tube cathode-focus electrode under the preset output power of the power supply 13 through the observation window 1102. The geometric measurement device 3 is configured to acquire the deformation amount of the traveling wave tube cathode-focus electrode at the preset temperature through the observation window 1102 in response to the adjustment of the output power of the power supply 13.

[0068] According to the embodiment of the present disclosure, by arranging the vacuum gauge 12, the etching real-time monitors the air pressure value in the vacuum chamber 11, and by arranging the vacuum pump 14, the air pressure value in the vacuum chamber 11 is reduced to within the preset value, so that the traveling wave tube cathode-focus electrode is prevented from being oxidized when heated. By arranging the vacuum chamber 11, a vacuum heat dissipation environment conforming to the working state is created, and the infrared temperature detection device 2 and the geometric measurement device 3 can perform non-contact measurement on the traveling wave tube cathode-focus electrode 4 to be measured through the transparent observation window 1102 on the vacuum chamber 11, without affecting the temperature field distribution around the traveling wave tube cathode-focus electrode 4, directly measuring the characteristic position where deformation occurs, and having high measurement accuracy. The vacuum chamber 11 with sufficient volume and the non-contact measurement method can place the cathode-focus electrode assembly inside the vacuum chamber 11 without the aid of other auxiliary tool fixtures, and can measure the correspondence relationship among power consumption, temperature, and deformation amount. By measuring the correspondence relationship between power consumption and temperature, the temperature value is converted into the power consumption value, so that the power consumption can be controlled through the power supply 13, and then the correspondence relationship between the temperature and the deformation amount of the cathode-focus electrode is obtained. The deformation amount data of the hot deformation of the traveling wave tube focus electrode can effectively assist the traveling wave tube electron optical design, electron optical robustness evaluation, reliability evaluation, assembly compensation, and the like.

[0069] According to the embodiment of the present disclosure, the geometric measurement device 3 is a device for measuring the deformation amount of the cathode and the focus electrode, which includes but is not limited to any one of a microscope, a video measurement microscope, a laser vibration meter, a laser range finder, and the like. Different types of geometric measurement devices 3 have different effects on measurement, mainly in terms of the integrity, clarity, and accuracy of the measured deformation amount.

[0070] According to embodiments of this disclosure, a tool microscope is used as a measuring tool for measuring the deformation of the thermal deformation of the cathode-focusing electrode of a traveling wave tube. It can measure multiple parameters such as the cathode radius of curvature, cathode diameter, cathode rise distance, focusing electrode inner diameter, and focusing electrode rise distance.

[0071] According to embodiments of this disclosure, the deformation of the traveling wave tube cathode-focusing electrode at a preset temperature includes at least the concentricity and height difference between the cathode and focusing electrode.

[0072] According to embodiments of this disclosure, the vacuum pump 14 includes a vacuum pre-evacuation stage to expel most of the gas from the vacuum chamber 11 to prevent the filament of the traveling wave tube cathode-focusing electrode from being oxidized or even burned out when heated.

[0073] According to embodiments of this disclosure, the power supply 13 includes either a constant current power supply 13 or a constant voltage power supply 13.

[0074] According to embodiments of this disclosure, the infrared temperature detection device 2 includes an infrared thermometer.

[0075] According to embodiments of this disclosure, the temperature measurement range of the infrared temperature detection device 2 includes at least 800℃-1200℃, for example, the temperature measurement range of the infrared temperature detection device 2 can be 600℃-2000℃.

[0076] Figure 4 This is a front view of the vacuum chamber according to an embodiment of this disclosure. Figure 5 for Figure 4 The cross-sectional view of the vacuum chamber shown is shown. Figure 6 for Figure 4 The first perspective view of the vacuum chamber shown is shown. Figure 7 for Figure 4 The second perspective view of the vacuum chamber shown.

[0077] According to embodiments of this disclosure, such as Figures 4-7 As shown, the vacuum chamber 11 also includes a chassis 110 and multiple lead ceramics 1104. The chassis 110 is located at the bottom of the outer shell; the multiple lead ceramics 1104 pass through the chassis 110 respectively, and the cathode-focusing electrode 4 of the traveling wave tube under test is disposed on one end of the multiple lead ceramics 1104 located in the accommodating space 1101; one end of any two of the multiple lead ceramics 1104 is connected to the filament of the cathode of the cathode-focusing electrode 4 of the traveling wave tube under test, and the other end is suitable for connecting to an external power supply 13, so that the cathode-focusing electrode 4 of the traveling wave tube under test is heated under the action of the external power supply 13, causing thermal deformation of the cathode-focusing electrode 4 of the traveling wave tube under test.

[0078] According to an embodiment of the present disclosure, the lead-through porcelain 1104 is a vacuum electrode, which is a sealing device that can pass through the wall of the vacuum chamber and transmit various electrical powers, electrical signals, etc. at the atmospheric end to the inside of the vacuum chamber 11.

[0079] According to an embodiment of the present disclosure, the number of the plurality of lead-through porcelains 1104 is at least 5, for example, 5 or 6.

[0080] According to an embodiment of the present disclosure, the plurality of lead-through porcelains 1104 can be connected to the bottom plate 110 in a sealed manner by welding, so as to connect the electrical potential inside the accommodating space 1101 of the vacuum chamber 11 to the outside for power-on and testing.

[0081] According to an embodiment of the present disclosure, the vacuum gauge 12 is arranged in the vacuum chamber 11 and connected to one end of the lead-through porcelain 1104 in the vacuum chamber 11.

[0082] According to an embodiment of the present disclosure, as shown in Figures 4-7 , the vacuum chamber 11 further comprises a leveling assembly 1105. The leveling assembly 1105 is arranged on the bottom plate 110, and the leveling assembly 1105 is located outside the accommodating space 1101. The leveling assembly 1105 is suitable for adjusting the cathode-focus electrode 4 of the TWT to be tested to a horizontal state.

[0083] According to an embodiment of the present disclosure, the leveling assembly 1105 can include at least three differential heads.

[0084] According to an embodiment of the present disclosure, as shown in Figure 5 , the vacuum chamber 11 further comprises a tray 1106 and a support column 1107 located inside the accommodating space. One end of the support column 1107 is fixedly connected to the bottom plate 110, and the other end is fixedly connected to the tray 1106. The tray 1106 is suitable for supporting the cathode-focus electrode 4 of the TWT to be tested. By arranging the tray 1106 and the support column 1107, the stability of the cathode-focus electrode 4 of the TWT to be tested in the vacuum chamber 11 is improved.

[0085] According to an embodiment of the present disclosure, the tray 1106 and the support column 1107 can withstand a high temperature of at least 200°C.

[0086] According to an embodiment of the present disclosure, the tray 1106 and / or the support column 1107 can be made of any one of ceramic and stainless steel.

[0087] According to an embodiment of the present disclosure, as shown in Figure 5 , the vacuum chamber 11 further comprises a side wall 1108. The bottom plate 110 is provided with a groove, and the side wall 1108 is sealedly connected to the bottom plate 110 by pressing the first sealing unit 1109 through the side wall 1108 when the gas pressure in the accommodating space 1101 is less than the atmospheric pressure.

[0088] According to an embodiment of the present disclosure, the first sealing unit 1109 is pressed against the O-ring.

[0089] According to an embodiment of the present disclosure, as shown in Figure 5 the vacuum chamber 11 further comprises an upper cover 1111, which is detachably arranged on the top of the vacuum chamber 11, and the observation window 1102 is arranged in the middle of the upper cover 1111.

[0090] According to an embodiment of the present disclosure, as shown in Figure 5 the upper cover 1111 and the side wall 1108 are further provided with a second sealing unit 1110, so that the upper cover 1111 and the side wall 1108 are in airtight connection when the gas pressure in the accommodation space 1101 is less than the atmospheric pressure.

[0091] According to an embodiment of the present disclosure, the second sealing unit 1110 is pressed against the O-ring.

[0092] According to an embodiment of the present disclosure, as shown in Figures 4-7 the upper cover 1111 and the side wall 1108 can be fixedly connected by a clamp 1112.

[0093] According to an embodiment of the present disclosure, as shown in Figures 5-7 the side wall 1108 of the vacuum chamber 11 is provided with an air outlet 1113, and the accommodation space 1101 is connected to a gas pump through the air outlet 1113, so that the gas pump can pump the vacuum chamber 11.

[0094] According to an embodiment of the present disclosure, as shown in Figure 5 the air outlet 1113 is provided with an air outlet adapter flange 1114, so that the vacuum chamber 11 can be quickly connected to the gas pump through the air outlet adapter flange 1114.

[0095] According to an embodiment of the present disclosure, as shown in Figure 6 and Figure 7 the air outlet 1113 can be further provided with a vacuum valve, so as to change the direction of the gas flow, adjust the size of the gas flow, and cut off or open the gas passage between the air outlet 1113 and the vacuum pump 14.

[0096] According to an embodiment of the present disclosure, a light shield plate is further included, which is suitable for filtering a part of the light emitted by the cathode-focus electrode 4 of the to-be-measured TWT under the action of the power supply 13 when the geometric measurement device 3 cannot distinguish the boundary of the cathode-focus electrode 4 of the to-be-measured TWT.

[0097] The detection system for the thermal deformation of the cathode-focus electrode of the TWT provided by the embodiment of the present disclosure requires tooling, raw materials, and process equipment, which are mature in technology, complete in social support, and easy to implement.

[0098] Figure 8 A flow chart of a method for detecting thermal deformation of a TWT cathode-focus electrode according to another embodiment of the present disclosure.

[0099] As another embodiment of the present disclosure, as shown in Figure 8 a method for detecting thermal deformation of a TWT cathode-focus electrode using any of the above detection systems is disclosed, comprising operations S810-S840.

[0100] Operation S810: Place the TWT cathode-focus electrode 4 to be measured in the accommodation space 1101, and connect the TWT cathode-focus electrode with the power supply 13.

[0101] Operation S820: Vacuumize the vacuum chamber 11 to a preset vacuum value.

[0102] Operation S830: Align the probe of the infrared temperature detection device 2 with the observation window 1102 on the vacuum chamber 11, turn on the power supply 13, and adjust the output power of the power supply 13 to obtain the temperature of the TWT cathode-focus electrode at different powers.

[0103] Operation S840: Turn off the power supply 13, align the lens of the geometric measurement device 3 with the observation window 1102, turn on the power supply 13 again, and adjust the output power of the power supply 13 to obtain the deformation amount of the TWT cathode-focus electrode at different temperatures.

[0104] According to an embodiment of the present disclosure, before operation S810, it further comprises operation S800,

[0105] Operation S800: Assemble, weld, and measure the cathode-focus electrode assembly according to the design value, so that the relative positions such as the height difference and concentricity of the cathode and the focus electrode meet the design requirements.

[0106] According to an embodiment of the present disclosure, the design value refers to the calculated value according to the simulation software.

[0107] According to an embodiment of the present disclosure, in the case of aligning the lens of the geometric measurement device 3 with the observation window 1102, turning on the power supply 13 again, and adjusting the output power of the power supply 13 to obtain the deformation amount of the TWT cathode-focus electrode at different temperatures, because of the existence of the observation window 1102, the light reflected and emitted by the TWT cathode-focus electrode passes through the vacuum-glass interface, the glass-atmosphere interface in turn, and finally reaches the objective lens of the geometric measurement device 3, and refraction occurs at the two interfaces, resulting in that the height data obtained by measurement is higher than the actual position of the part, so it is necessary to be zeroed synchronously to avoid errors when calculating the height difference of the cathode-focus electrode.

[0108] According to an embodiment of the present disclosure, the vacuum gauge tube 12 is used to monitor the vacuum degree in the vacuum chamber 11 in real time. When vacuumizing, the vacuum degree in the vacuum chamber 11 gradually decreases to a preset vacuum value. When heating the cathode-focusing electrode of the traveling wave tube, the gas pressure in the vacuum chamber 11 increases due to the outgassing of the material heated. When the gas pressure exceeds the preset vacuum value, the heating of the filament needs to be stopped and the vacuumizing continues.

[0109] According to an embodiment of the present disclosure, the vacuum refers to a vacuum degree less than or equal to a preset vacuum value. The preset vacuum value can be 1x10 -5 Pa.

[0110] According to an embodiment of the present disclosure, the temperature of the cathode-focusing electrode of the traveling wave tube at a preset temperature is obtained by adjusting the output power of the power supply 13.

[0111] According to an embodiment of the present disclosure, at a preset interval temperature value, the temperature of the emission surface of the cathode of the cathode-focusing electrode of the traveling wave tube measured by the infrared temperature detection device 2 satisfies a preset value by adjusting the output power of the power supply 13.

[0112] According to an embodiment of the present disclosure, when the preset temperature is 800℃, the temperature of the emission surface of the cathode of the cathode-focusing electrode of the traveling wave tube measured by the infrared temperature detection device 2 is about 800℃ by adjusting the output power of the power supply 13.

[0113] According to an embodiment of the present disclosure, the error of the temperature of the emission surface of the cathode of the cathode-focusing electrode of the traveling wave tube measured by the infrared temperature detection device 2 and the preset temperature can be any one of ±1℃, ±0.5℃, ±0.1℃, etc.

[0114] According to an embodiment of the present disclosure, the preset interval temperature value can include any one of 10℃, 20℃, 30℃, 50℃, 80℃, 100℃, etc.

[0115] According to an embodiment of the present disclosure, the detection temperature range of the thermal deformation of the cathode-focusing electrode of the traveling wave tube is determined according to the working temperature of the cathode-focusing electrode of the traveling wave tube, for example, can be any one of 800℃-1200℃ or 900℃-1400℃, etc.

[0116] According to the embodiment of the present disclosure, when the power supply 13 heats the filament of the cathode of the cathode-focus of the TWT under test, the resistivity increases with the temperature, and when the temperature reaches a stable state, the heat generated by the power supply 13 heating the cathode filament and the heat transfer and dissipation between the cathode-focus 4 of the TWT under test and the surrounding environment reach a balance. In the case of increasing the power of the power supply 13, the higher the temperature of the filament of the cathode of the cathode-focus of the TWT, the faster the heat transfer and dissipation with the surrounding environment, and a new balance state will be reached within a certain time (for example, 10 minutes). Therefore, different temperature values of the cathode-focus of the TWT correspond to different power values of the power supply 13.

[0117] According to the embodiment of the present disclosure, because the geometric measurement device 3 for measuring the deformation amount does not have the capability of measuring the temperature, the current and voltage, which are easy to control, are used instead of the temperature indicator.

[0118] In an illustrative embodiment, when a constant current power supply is used to heat the filament of the cathode-focus of the TWT with an output current of 0.5 A, according to the displayed voltage value, the resistance value at this time is 3Ω according to Ohm's law, and as the temperature rises, the calculated resistance value will become 3.1Ω, 3.12Ω, 3.12Ω, and then stabilize at 3.12Ω. At this time, it can be considered that the temperature of the emission surface of the cathode of the cathode-focus of the TWT is in a balanced state.

[0119] According to the embodiment of the present disclosure, the output power of the power supply 13 is equal to the product of the current and voltage when the power supply 13 is working.

[0120] According to the embodiment of the present disclosure, during the thermal deformation of the cathode-focus 4 of the TWT under test, the focusing collector itself does not generate heat, but relies on the heat radiation and conduction of the cathode, so the temperature of the focusing collector is lower than that of the cathode, and the thermal deformation amount of the focusing collector is also slightly smaller than that of the cathode.

[0121] According to the embodiment of the present disclosure, connecting the cathode-focus 4 of the TWT under test to the power supply 13 includes connecting the cathode of the cathode-focus 4 of the TWT under test to one end of the lead porcelain 1104, and connecting the other end of the lead porcelain 1104 assembly to the power supply 13.

[0122] According to the embodiment of the present disclosure, before reconnecting the power supply 13, it further includes adjusting the cathode-focus 4 of the TWT under test to a horizontal state by the leveling assembly 1105 under the geometric measurement device 3.

[0123] According to an embodiment of the present disclosure, the height measured by the geometric measurement device 3 refers to the height of a very small area, which can be considered as single-point information. Therefore, the height of different positions of the TWT cathode-focus electrode 4 to be measured can be measured by the geometric measurement device 3, and it can be determined whether the TWT cathode-focus electrode 4 is in a horizontal state. For example, the heights of the approximate center positions of three different edges of the TWT cathode-focus electrode are measured by the geometric measurement device 3, and in the case where the three height values are consistent, it is determined that the TWT cathode-focus electrode is in a horizontal state.

[0124] According to an embodiment of the present disclosure, adjusting the output power of the power supply 13 to obtain the deformation amount of the TWT cathode-focus electrode at different temperatures includes: in the case where the geometric measurement device 3 cannot distinguish the boundary of the TWT cathode-focus electrode 4 to be measured, adding a light shield plate between the observation window 1102 and the lens of the geometric measurement device 3.

[0125] According to an embodiment of the present disclosure, in the case where the light shield plate is added, there is refraction, and the light shield plate will bring visual errors, so the visual errors of the light shield plate need to be determined in advance, and the corresponding data is compensated when applied.

[0126] According to an embodiment of the present disclosure, the light shield plate can be one or more.

[0127] In an illustrative embodiment, a detection method for thermal deformation of a TWT cathode-focus electrode includes a detection system including a heating device, an infrared thermometer, and a tool microscope, wherein the heating device includes a vacuum chamber, a vacuum gauge, a constant current power supply, and a vacuum pre-evacuation table.

[0128] Figure 9 A flowchart of a detection method for thermal deformation of a TWT cathode-focus electrode according to another embodiment of the present disclosure.

[0129] In an illustrative embodiment, as shown in FIG. 10, a detection method for thermal deformation of a TWT cathode-focus electrode includes operations S910-S950: Figure 9

[0130] Operation S910: Assemble, weld, and measure the TWT cathode-focus electrode assembly to be measured according to the design value (the height difference of the cathode-focus electrode is 0.1 mm), so that the relative positions such as the height difference and the concentricity of the cathode-focus electrode meet the design requirements.

[0131] Operation S920: Place the TWT cathode-focus electrode to be measured in the accommodation space, and connect the filament of the cathode of the TWT cathode-focus electrode to the power supply.

[0132] Operation S930: Evacuate the vacuum chamber to a vacuum degree better than 1×10 -5 Pa.

[0133] ​S940: The probe of the infrared thermometer is aimed at the observation window on the vacuum chamber, the constant current power supply is turned on, and the output power of the constant current power supply is adjusted to obtain the temperature of the cathode-focusing electrode of the traveling wave tube under different powers, and the power value corresponding to the emission surface of the cathode of the cathode-focusing electrode of the traveling wave tube under different temperatures is obtained.

[0134] For example, when the temperature of the emission surface of the cathode detected by the infrared thermometer is 1000 DEG C, the corresponding current of the constant current power supply is 1.5 A, and the voltage is 3.2 V. When the temperature of the emission surface of the cathode detected by the infrared thermometer is 1050 DEG C, the corresponding current of the constant current power supply is 2 A, and the voltage is 3.5 V. When the temperature of the emission surface of the cathode detected by the infrared thermometer is 1100 DEG C, the corresponding current of the constant current power supply is 2.4 A, and the voltage is 3.7 V. By measuring a plurality of groups of data, a curve of the corresponding relationship between the power and the temperature is fitted, and if the curve is smooth, the reliability of the data can be verified. S950: The power supply is turned off, the lens of the tool microscope is aimed at the observation window, the leveling device is used to level the end surface of the traveling wave tube cathode-focusing electrode to be measured, the power supply is turned on again, and the output power of the constant current power supply is adjusted to obtain the deformation amount of the traveling wave tube cathode-focusing electrode under different temperatures.

[0135] For example, when the current of the constant current power supply is 2 A and the voltage is 3.5 V, the concentricity of the traveling wave tube cathode-focusing electrode to be measured is 0.03 mm, the height difference of the thermal deformation of the cathode is 0.05 mm, and the height difference of the thermal deformation of the focusing electrode is 0.02 mm, which are measured by the tool microscope.

[0136] Therefore, when the temperature of the emission surface of the cathode of the traveling wave tube cathode-focusing electrode to be measured is 1050 DEG C, the deformation amount of the traveling wave tube cathode-focusing electrode to be measured is: the concentricity of the cathode-focusing electrode is 0.03 mm, and the height difference of the cathode-focusing electrode is 0.03 mm.

[0137] According to the embodiments of the present disclosure, the materials of the traveling wave tube cathode-focusing electrode have different formulations, and the working temperatures corresponding to each formulation are different, but the working temperature of the emission surface of the cathode of the traveling wave tube cathode-focusing electrode is 1050 DEG C ± 50 DEG C, so the deformation amount data under the condition that the temperature of the emission surface of the cathode of the traveling wave tube cathode-focusing electrode to be measured is 1050 DEG C are taken as the compensation data.

[0138] In an illustrative embodiment, the height difference of the thermal deformation of the traveling wave tube cathode-focusing electrode to be measured can be taken as the data for assembly compensation, and the design value is combined, so that the height difference of the cathode-focusing electrode is intentionally compensated to 0.13 mm during assembly, so as to offset the thermal deformation thereof during working, and improve the stability of the electron running track of the traveling wave tube.

[0139] In one illustrative embodiment, the value of the concentricity of the thermal distortion of the TWT cathode-focus gap can be measured and used as compensation data for assembly.

[0140] It should also be noted that the directional terms mentioned in the embodiments, such as "upper", "lower", "front", "back", "left", "right", etc., are only the directions of the drawings and are not intended to limit the protection scope of the present disclosure. Throughout the drawings, the same elements are denoted by the same or similar reference numerals. When it is possible to cause confusion in the understanding of the present disclosure, conventional structures or configurations will be omitted, and the shapes and sizes of the components in the drawings do not reflect the actual sizes and proportions, but only illustrate the content of the embodiments of the present disclosure.

[0141] Unless otherwise known as the opposite meaning, the numerical parameters in the specification and the appended claims are approximate values, which can be changed according to the desired characteristics obtained by the content of the present disclosure. Specifically, all the numbers used in the specification and claims to express the content of the composition, reaction conditions, etc. should be understood as being modified by the term "about" in all cases. Generally, it is expressed to mean that it includes a change of ±10% in some embodiments, a change of ±5% in some embodiments, a change of ±1% in some embodiments, a change of ±0.5% in some embodiments.

[0142] The ordinal numbers used in the specification and claims, such as "first", "second", "third", etc., are used to modify the corresponding elements, which do not mean that the elements have any ordinal number, nor represent the order of one element and another element, or the order of the manufacturing method. The use of these ordinal numbers is only used to make the element with a certain name clearly distinguishable from another element with the same name.

[0143] In addition, unless the steps are specifically described or must occur in sequence, the order of the above steps is not limited to the above list, and can be changed or rearranged according to the desired design. And the above embodiments can be mixed and used with each other or with other embodiments based on design and reliability considerations, that is, the technical features in different embodiments can be freely combined to form more embodiments.

[0144] The above specific embodiments further illustrate the purpose, technical solutions and beneficial effects of the present disclosure. It should be understood that the above description is only a specific embodiment of the present disclosure and is not intended to limit the present disclosure. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present disclosure shall be included in the protection scope of the present disclosure.

Claims

1. A system for detecting thermal deformation of a traveling wave tube (TWT) cathode-focus, comprising: a heating device, comprising: a vacuum chamber, having an internal accommodation space suitable for placing a TWT cathode-focus to be detected, and a transparent observation window provided on the vacuum chamber; a vacuum gauge provided in the vacuum chamber to detect vacuum degree in the accommodation space; a power supply provided outside the vacuum chamber, and electrically connected to the TWT cathode-focus to be detected, wherein the TWT cathode-focus to be detected is heated to rise in temperature; a vacuum pump in communication with the vacuum chamber, and suitable for vacuumizing the vacuum chamber to prevent the TWT cathode-focus to be detected from being oxidized; and an infrared temperature detection device suitable for acquiring temperature of the TWT cathode-focus to be detected under a preset output power of the power supply through the observation window; and a geometric measurement device configured to acquire deformation amount of the TWT cathode-focus to be detected at a preset temperature through the observation window in response to adjustment of the output power of the power supply; wherein the vacuum chamber further comprises: a base plate located at a bottom of the vacuum chamber; a plurality of lead porcelain wires respectively penetrating through the base plate, and the TWT cathode-focus to be detected being provided on one end of the plurality of lead porcelain wires located in the accommodation space; one end of any two of the plurality of lead porcelain wires being connected to a filament of a cathode of the TWT cathode-focus to be detected, and the other end being suitable for being connected to an external power supply to heat the TWT cathode-focus to be detected under action of the external power supply, so that the TWT cathode-focus to be detected is deformed thermally; and a leveling assembly provided on the base plate, and located outside the accommodation space, and suitable for adjusting the TWT cathode-focus to be detected to a horizontal state. The vacuum chamber further comprises: a tray and a support column located inside the accommodation space; the support column has one end fixedly connected to the base plate and the other end fixedly connected to the tray; and the tray is suitable for supporting the TWT cathode-focus to be detected. The vacuum chamber further comprises: a side wall provided with a groove on the base plate, and suitable for being pressed tightly with a first sealing unit by the side wall under a condition that gas pressure in the accommodation space is less than atmospheric pressure, so that the side wall is sealingly connected to the base plate. 4.The system of claim 1, further comprising a light shield plate suitable for filtering a part of light emitted by the TWT cathode-focus to be detected under action of the power supply in a case that the geometric measurement device cannot distinguish a boundary of the TWT cathode-focus to be detected. 5.A method for detecting thermal deformation of a TWT cathode-focus, comprising: placing a TWT cathode-focus to be detected in an accommodation space, and connecting the TWT cathode-focus to be detected to a power supply; vacuumizing a vacuum chamber to a preset vacuum value; ​ ​ ​ ​ ​ ​ ​ 2. The detection system of claim 1, wherein, ​ ​ ​ 3. The detection system of claim 1, wherein, ​ ​ ​ ​ ​ ​ aligning a probe of an infrared temperature detection device to an observation window on the vacuum chamber, turning on a power supply, adjusting an output power of the power supply to obtain temperatures of the cathode-focus electrode of the TWT under different powers; turning off the power supply, aligning a lens of a geometric measurement device to the observation window, turning on the power supply again, adjusting the output power of the power supply to obtain deformation amounts of the cathode-focus electrode of the TWT under different temperatures.

6. The detection method according to claim 5, wherein, The connecting the cathode-focus electrode of the TWT to the power supply comprises: connecting a cathode of the cathode-focus electrode of the TWT to one end of a lead porcelain, and connecting the other end of the lead porcelain assembly to the power supply.

7. The detection method according to claim 5, wherein, The turning on the power supply again further comprises: adjusting the cathode-focus electrode of the TWT to a horizontal state by the leveling assembly under the geometric measurement device.

8. The detection method according to claim 5, wherein, The adjusting the output power of the power supply to obtain the deformation amounts of the cathode-focus electrode of the TWT under different temperatures comprises: in a case that the geometric measurement device cannot distinguish boundaries of the cathode-focus electrode of the TWT, adding a light shield between the observation window and the lens of the geometric measurement device.

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