A light-weight high-precision two-dimensional flexible optical axis compensation mechanism and method

Abstract

This invention provides a lightweight, high-precision two-dimensional flexible optical axis compensation mechanism. Two one-dimensional linear transmission mechanisms are respectively mounted on the horizontal and vertical sides of the flexible compensation mechanism. Micro-motion in the horizontal and vertical directions is achieved through the flexible compensation base, realizing a lightweight two-dimensional motion mechanism. The two sets of one-dimensional linear transmission mechanisms complete the micro-stroke reciprocating motion through deceleration kinematic pairs. An unloading force device relieves the stress concentration generated in the thin-walled inner ring of the flexible compensation base during vertical movement, increasing the stiffness of the flexible compensation base. A guiding device is designed during the horizontal micro-motion reciprocating motion to eliminate radial clearance generated by the linear transmission pairs during the horizontal one-dimensional motion. Position telemetry feedback is achieved through two angle sensors. This invention is suitable for small-space, two-dimensional, high-precision optical path compensation devices in optical systems, eliminating error transmission caused by multi-stage transmissions and avoiding space constraints.

Description

Technical Field

[0001] This invention relates to a lightweight, high-precision two-dimensional flexible optical axis compensation mechanism and method, belonging to the field of aerospace optical remote sensor technology. Background Technology

[0002] In addition to acquiring high-resolution satellite imagery, ground control information and auxiliary transmission data are crucial for the high-precision positioning and interpretation of satellite imagery in high-resolution global mapping. Based on the imaging requirements of meteorological and resource satellites, most choose sun-synchronous orbits to ensure good lighting conditions during imaging. To maintain synchronization with the sun's trajectory, the satellite must overcome the effects of launch dynamics and orbital errors. Simultaneously, due to mechanical and material deformation during launch, the optical system in the remote sensing camera experiences optomechanical pose deviations, causing chromatic aberration and asymmetric aberrations. To improve image quality and meet high-resolution requirements, image shift compensation in both directions is necessary.

[0003] Currently, there are two main types of commonly used compensation mechanisms: 1. Using a high-speed motor connected to a gear pair, driving the guide rail slider through a camshaft and an equal-diameter conjugate cam mechanism to achieve one-dimensional linear motion. The disadvantage is that the transmission accuracy of the camshaft and cam mechanism is low (>2.5μm), it can only achieve one-dimensional transmission, and the outer envelope size is large; 2. Using a stepper motor connected to a gear to drive a ball screw pair to achieve linear motion. The disadvantage is that it can only achieve one-dimensional transmission; 3. Orthogonally superimposed piezoelectric ceramic linear drive motors. The disadvantages are that they require a large operating voltage, have a complex structure, large size, load ratio <0.5, and low reliability. Based on the above analysis, it can be seen that all three types of commonly used compensation mechanisms are difficult to meet the requirements of small space, high precision, and two-dimensional linear motion of cameras. Summary of the Invention

[0004] The technical problem solved by this invention is to overcome the shortcomings of the prior art and provide a lightweight, high-precision two-dimensional flexible optical axis compensation mechanism and method, which has the advantages of high repeatability positioning accuracy, high step accuracy, small load ratio, and two-dimensional linear reciprocating motion, thereby solving the problems of large effective load, high imaging quality accuracy, and small space during the image movement process of remote sensor cameras.

[0005] The technical solution provided by this invention is: a lightweight, high-precision two-dimensional flexible optical axis compensation mechanism, comprising: a flexible compensation base, a one-dimensional linear transmission pair, an unloading force device, a deceleration motion pair, a guiding device, a position sensor assembly, a driving component, and a payload;

[0006] The effective load is installed at the center of the flexible compensation base; the drive component is connected to the horizontal and vertical one-dimensional linear transmission pairs respectively through the deceleration kinematic pair; the position sensor assembly is connected to the horizontal and vertical one-dimensional linear transmission pairs respectively to provide feedback on real-time position telemetry values; the horizontal one-dimensional linear transmission pair is fixed to the inner ring of the flexible compensation base through the unloading force device, which drives the inner ring of the flexible compensation base to move linearly, and guide devices are set on both sides of the drive fork; the vertical one-dimensional linear transmission pair is connected to the outer ring of the flexible compensation base through the push rod, which drives the outer ring of the flexible compensation base to move linearly.

[0007] Furthermore, a lightweight, high-precision two-dimensional flexible optical axis compensation mechanism also includes a first kinematic pair support and a second kinematic pair support. The one-dimensional linear transmission pair, the deceleration kinematic pair, and the position sensor assembly for the horizontal and vertical orientations are respectively mounted on the flexible compensation base through the first kinematic pair support and the second kinematic pair support.

[0008] Furthermore, the flexible compensation base includes an inner ring and an outer ring, and the outer ring and the inner ring adopt a flexible thin-walled structure. The outer ring has a thin wall thickness of 0.96 mm, the inner ring has a thin wall thickness of 0.92 mm, and the gap on both sides of the thin wall is 2 mm.

[0009] Furthermore, in the horizontal one-dimensional linear transmission pair, the driving component drives the driving fork to undergo linear displacement in the horizontal direction through a deceleration kinematic pair. The first screw and the driving fork are engaged with raceway balls, and the driving fork pushes the inner thin wall of the flexible compensation base to translate.

[0010] Furthermore, in the vertical orientation one-dimensional linear transmission pair, the driving component drives the push rod to undergo linear displacement in the vertical direction through the deceleration kinematic pair. The second screw and the push rod are engaged with raceway balls to convert the rotational motion into linear motion. The push rod pushes the thin-walled outer ring of the flexible compensation base to translate.

[0011] Furthermore, the unloading force device includes: an unloading bushing, a first rotating joint, and an unloading force bracket; the first rotating joint is mounted on the inner ring of the flexible compensation base via the unloading force bracket, and the end of the drive fork is connected to the first rotating joint via the unloading bushing.

[0012] Furthermore, the guiding device includes: a pair of second rotary joints and joint supports;

[0013] The second rotary joint is fixed to the flexible compensation base by the joint support and is placed on both sides of the drive fork. When the drive fork moves linearly back and forth, the second rotary joints on the left and right sides guide it.

[0014] Furthermore, the deceleration kinematic pair includes: a horizontal deceleration kinematic pair and a vertical deceleration kinematic pair;

[0015] The horizontal directional deceleration motion pair includes: a first main drive wheel and a first transmission wheel. The first main drive wheel is connected to a first rotary driver. The first main drive wheel and the first transmission wheel mesh with each other. The first transmission wheel is mounted on a first screw to complete the horizontal directional deceleration motion.

[0016] The vertical orientation deceleration kinematic pair includes a second main drive wheel and a second drive wheel. The second main drive wheel is connected to the second rotary drive, and the second main drive wheel meshes with the second drive wheel. The second drive wheel is mounted on the second screw to complete the vertical orientation deceleration motion.

[0017] Furthermore, the position sensor assembly includes: a horizontal azimuth angle sensor, a first sensor support, a vertical azimuth angle sensor, and a second sensor support;

[0018] The horizontal azimuth angle sensor is mounted on the first kinematic pair support via the first sensor support base, and the horizontal azimuth angle sensor is fixedly connected to the first screw via a pin; the first rotary drive is connected to the screw via the horizontal azimuth deceleration kinematic pair, and the horizontal azimuth angle sensor feeds back the telemetry value of the position of the first screw;

[0019] The vertical azimuth angle sensor is mounted on the second kinematic pair support via the second sensor support. The vertical azimuth angle sensor shaft is fixedly connected to the second screw via a pin. The second rotary drive is connected to the second screw via the vertical azimuth deceleration kinematic pair. The vertical azimuth angle sensor feeds back the telemetry value of the position of the second screw.

[0020] A method for generating vertical and horizontal azimuth displacements using a lightweight, high-precision two-dimensional flexible optical axis compensation mechanism includes:

[0021] The first rotary actuator drives the first main drive wheel and the first drive wheel of the horizontal deceleration motion pair to decelerate.

[0022] The first transmission wheel drives the first screw to push the drive fork to reciprocate linearly in a horizontal direction;

[0023] The drive fork pushes the effective load in a horizontal reciprocating motion through the unloading force device;

[0024] The horizontal azimuth angle sensor outputs the telemetry value of the horizontal azimuth motion position of the payload.

[0025] The second rotary drive drives the second main drive wheel and the second drive wheel of the vertical orientation deceleration kinematic pair to rotate.

[0026] The second transmission wheel drives the second screw to push the push rod to reciprocate in a vertical direction;

[0027] The push rod propels the effective load in a vertical reciprocating motion;

[0028] The vertical azimuth angle sensor outputs the telemetry value of the vertical azimuth motion position of the effective load.

[0029] The advantages of this invention compared to the prior art are:

[0030] (1) The flexible compensation base of the present invention is installed with an effective load. The outer and inner rings of the flexible compensation base adopt a flexible thin-walled structure. The outer ring has a thin wall thickness of 0.96 mm, the inner ring has a thin wall thickness of 0.92 mm, and the gap on both sides of the thin wall is 2 mm. The outer ring thin wall is flexibly deformed by a linear drive in the vertical direction to achieve reciprocating motion of ±0.5 mm, with a compensation step accuracy of <1 μm, and a safety factor of 3.86 at the maximum stress point of the outer ring thin wall. The inner ring thin wall is flexibly deformed by a linear drive in the horizontal direction to achieve reciprocating motion of ±0.25 mm, and a safety factor of 4.89 at the maximum stress point of the inner ring thin wall. The ratio of effective load to load of the flexible compensation base is >0.8, and the optical axis dimension of the flexible compensation base is only 20 mm.

[0031] (2) The unloading force device of the present invention is designed at the connection between the flexible compensation base and the horizontal one-dimensional linear transmission pair. When the outer ring of the flexible compensation base moves in the vertical direction, if the stress >2000Mpa can be generated at the fixed connection between the inner ring of the flexible compensation base and the horizontal one-dimensional linear transmission pair, the unloading force device can release the concentrated stress generated by unloading the inner ring of the flexible compensation base, and generate a stress <150Mpa, with a safety factor >3.

[0032] (3) The one-dimensional linear transmission pair of the present invention enables the thin-walled inner ring and thin-walled outer ring of the driving flexible compensation base to achieve high-precision horizontal and vertical linear displacement, achieving a compensation step distance <0.5μm, a compensation step distance accuracy <0.25μm, a repeatability accuracy <±0.5μm, and is suitable for small space and high load ratio mechanism requirements.

[0033] (4) The guiding device of the present invention has the disadvantage of changing the multiple degrees of freedom of the flexible structure, and realizes that the flexible compensation base deflects about the X-axis and Y-axis with an angle of <5″ and about the Z-axis with an angle of <22″ in the horizontal and vertical directions of the two-dimensional linear motion.

[0034] (5) The present invention has two-dimensional imaging compensation for the effective position of various spaceborne remote sensor cameras and is suitable for industrial production. Attached Figure Description

[0035] Figure 1 This is a schematic diagram of the structure of the present invention;

[0036] Figure 2 This is the intended design of the flexible compensation base of the present invention;

[0037] Figure 3 This invention relates to an unloading force device;

[0038] Figure 4 This is an isometric view of the present invention. Detailed Implementation

[0039] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments.

[0040] This invention provides a lightweight, high-precision two-dimensional flexible optical axis compensation mechanism. The effective load is mounted on a flexible compensation base. The outer and inner rings of the flexible compensation base adopt a flexible thin-walled structure. The outer ring has a wall thickness of 0.96 mm, and the inner ring has a wall thickness of 0.92 mm. The gap on both sides of the thin wall is 2 mm. Vertical linear transmission drives the flexible deformation of the outer ring thin wall, achieving a reciprocating motion of ±0.5 mm. The safety factor at the maximum stress point of the outer ring thin wall is 3.86. Horizontal linear transmission drives the flexible deformation of the inner thin wall, achieving…

[0041] The reciprocating motion is ±0.25mm, and the safety factor at the point of maximum stress in the thin-walled inner ring is 4.89. Furthermore, an unloading force device is designed at the connection between the flexible compensation base and the horizontal one-dimensional linear transmission pair to ensure that the concentrated stress generated in the inner ring of the flexible compensation base is unloaded when the outer ring of the flexible compensation base moves to the vertical direction. Simultaneously, a guide mechanism is designed in the horizontal one-dimensional linear transmission pair to ensure the horizontal and pitch accuracy during the movement of the flexible structure. The lightweight, high-precision two-dimensional flexible optical axis compensation mechanism designed in this invention has the advantages of high repeatability (≤±0.5μm), high step accuracy (<1μm), low load-to-weight ratio (>0.8), and two-dimensional linear reciprocating motion, thus solving the problems of large effective load, high imaging quality accuracy, and small space during image movement of remote sensor cameras.

[0042] like Figure 1 , Figure 4 As shown, a lightweight, high-precision two-dimensional flexible optical axis compensation mechanism includes: a flexible compensation base 2, a one-dimensional linear transmission pair, an unloading force device, a deceleration motion pair, a guide device, a position sensor assembly, a motion pair support, a drive component, and an effective load 1.

[0043] The horizontal and vertical one-dimensional linear transmission pairs, deceleration kinematic pairs, and position sensor assemblies are all mounted to the flexible compensation base 2 via kinematic pair support seats; the drive component is connected to the horizontal and vertical one-dimensional linear transmission pairs respectively via deceleration kinematic pairs; the position sensor assemblies are connected to the horizontal and vertical one-dimensional linear transmission pairs respectively to provide feedback on real-time position telemetry values; the horizontal one-dimensional linear transmission pair is fixed to the inner ring of the flexible compensation base via an unloading force device, driving the linear movement of the inner ring of the flexible compensation base, and guide devices are provided on both sides of the drive fork 20; the vertical one-dimensional linear transmission pair is connected to the outer ring of the flexible compensation base via a push rod 23, driving the linear movement of the outer ring of the flexible compensation base, while the unloading force device is not affected by stress at the location where it is mounted on the flexible compensation base 2.

[0044] A load 1 is mounted at the center of a flexible compensation base 2. The inner thin-walled ring of the flexible compensation base 2 is connected to a horizontal one-dimensional linear transmission pair. The horizontal reciprocating motion of the load 1 (±0.25mm) is achieved through the elastic deformation of the 0.92mm inner flexible thin-walled ring of the flexible compensation base 2. The outer thin-walled ring of the flexible compensation base 2 is connected to a vertical one-dimensional linear transmission pair. The vertical reciprocating motion of the load 1 is achieved through the elastic deformation of the 0.96mm outer flexible thin-walled ring of the flexible compensation base 2.

[0045] ±0.5mm. For example... Figure 2 As shown, the inner ring of the flexible compensation base 2 is provided with a load mounting hole 24, and the unloading force device mounting hole 25 is provided between the inner ring and the outer ring. The frame of the flexible compensation base 2 is provided with a first kinematic pair support mounting hole 26 and a second kinematic pair support mounting hole 27, and the outer ring is provided with a push rod mounting hole 28.

[0046] One-dimensional linear transmission pairs include: horizontal one-dimensional linear transmission pairs and vertical one-dimensional linear transmission pairs. In the horizontal one-dimensional linear transmission pair, the driving component drives the transmission pair element, the driving fork 20, to undergo linear displacement in the horizontal direction through a reduction gear pair; in the vertical one-dimensional linear transmission pair, the driving component drives the transmission pair element, the push rod 23, to undergo linear displacement in the vertical direction through a reduction gear pair.

[0047] like Figure 3 As shown, the unloading force device includes: unloading bushing 21, first rotating joint 4 and unloading force bracket 3: the first rotating joint 4 is installed on the inner ring of the flexible compensation base 2 through the unloading force bracket 3, and the end of the drive fork 20 is connected to the first rotating joint 4 through the unloading bushing 21.

[0048] The vertical linear motion propels the outer thin wall of the flexible compensation base 2 to move flexibly in the vertical direction. The horizontal drive fork 20 is connected to the inner thin wall of the flexible compensation base 2 through the unloading force device. During the vertical motion, the unloading force device releases the connection stress between the drive fork 20 and the inner thin wall of the flexible compensation base 2.

[0049] The guiding device includes: a pair of second rotary joints 19, and joint supports 22.

[0050] The second rotating joint 19 is fixed to the flexible compensation base 2 by the joint support 22 and is placed on both sides of the drive fork 20. During the linear reciprocating motion of the drive fork 20, the left and right rotating joints 2 guide the movement and reduce the transmission gap between the first screw 8 and the drive fork 20.

[0051] Deceleration kinematic pairs include: horizontal azimuth deceleration kinematic pairs and vertical azimuth deceleration kinematic pairs.

[0052] The horizontal deceleration kinematic pair includes: a first main drive wheel 11 and a first transmission wheel 6. The first main drive wheel 11 is connected to the first rotary driver 10, and the first transmission wheel 6 is installed to the horizontal one-dimensional linear transmission pair to complete the horizontal deceleration kinematic pair. The vertical deceleration kinematic pair includes: a second main drive wheel 18 and a second transmission wheel 12. The second main drive wheel 18 is connected to the second rotary driver 17, and the second transmission wheel 12 is installed to the vertical one-dimensional linear transmission pair to complete the vertical deceleration kinematic pair.

[0053] The position sensor assembly includes: a horizontal azimuth angle sensor 9 mounted on a first kinematic pair support 5 via a first sensor support 7; the horizontal azimuth angle sensor 9 is fixedly connected to a first screw 8 of a one-dimensional linear transmission pair via a pin; a first rotary driver 10 rotates via a horizontal azimuth deceleration kinematic pair and the first screw 8, and the horizontal azimuth angle sensor 9 provides feedback on the telemetry value of the position. A vertical azimuth angle sensor 16 mounted on a second kinematic pair support 13 via a second sensor support 14; the shaft of the vertical azimuth angle sensor 16 is fixedly connected to a second screw 15 via a pin; a second rotary driver 17 rotates via a vertical azimuth deceleration kinematic pair and the second screw 15, and the vertical azimuth angle sensor 16 provides feedback on the telemetry value of the position.

[0054] Horizontal one-dimensional linear transmission pair: The first rotary driver 10 is connected to the first main transmission wheel 11 by a pin. The first main transmission wheel 11 meshes with the first transmission wheel 6. The first transmission wheel 6 is fixedly connected to the first screw 8 by a pin. The first screw 8 and the drive fork 20 are engaged by raceway ball joints. The drive fork 20 pushes the inner thin-walled circle of the flexible compensation base to translate.

[0055] Vertical orientation one-dimensional linear transmission pair: The second rotary driver 17 is connected to the second main drive wheel 18 by a pin. The second main drive wheel 18 is meshed with the second drive wheel 12 with a clearance. The second drive wheel 12 is fixedly connected to the second screw 15 by a pin. The second screw 15 and the push rod 23 are engaged with raceway balls to convert the rotational motion into linear motion. The push rod 23 pushes the thin wall of the outer ring of the flexible compensation base to translate.

[0056] A locking or unlocking method for a lightweight, high-precision two-dimensional flexible optical axis compensation mechanism, comprising the following steps:

[0057] (1) The first rotary driver 10 drives the first main transmission wheel 11 and the first transmission wheel 6 of the deceleration motion pair to decelerate;

[0058] (2) The first transmission wheel 6 drives the first screw 8 in the one-dimensional linear transmission pair to push the drive fork 20 to reciprocate linearly in the horizontal direction;

[0059] (3) The drive fork 20 is connected to the unloading bushing 21 of the unloading force device. The unloading force bracket 3 of the unloading force device is connected to the inner ring of the flexible compensation base 2. The unloading force bracket 3 and the unloading bushing 21 are connected through the first rotating joint 4, which pushes the effective load 1 to perform reciprocating motion in the horizontal direction of ±0.25mm.

[0060] (4) The horizontal azimuth angle sensor 9 axis is connected to the first screw (8) in the horizontal azimuth one-dimensional linear transmission pair and rotates to output the horizontal azimuth motion position telemetry value of the effective load 1;

[0061] (5) The second rotary driver 17 drives the second main transmission wheel 18 and the second transmission wheel 12 of the deceleration kinematic pair to rotate;

[0062] (6) The second transmission wheel 12 drives the second screw 15 in the one-dimensional linear transmission pair to push the push rod 23 to reciprocate along the vertical direction;

[0063] (7) The push rod 23 is fixedly connected to the outer ring of the flexible compensation base 2, and pushes the effective load 1 to perform a reciprocating motion of ±0.5mm in the vertical direction;

[0064] (8) The vertical orientation angle sensor 16 axis is connected to the second screw 15 of the vertical orientation one-dimensional linear transmission pair and rotates to output the telemetry value of the vertical orientation motion position of the effective load 1.

[0065] When the thin-walled outer ring of the flexible compensation base 2 moves vertically, the horizontal one-dimensional linear transmission pair is designed with an unloading force device to unload the stress generated between the thin-walled outer ring and the inner ring of the flexible compensation base 2. This ensures that while the effective load 1 moves linearly in the vertical direction, the inner and outer rings of the flexible compensation base 2 are not affected by stress, thus completing high-precision vertical and horizontal linear reciprocating motion.

[0066] The lightweight, high-precision two-dimensional flexible optical axis compensation mechanism mainly consists of a flexible compensation base, a one-dimensional linear transmission pair, an unloading force device, a deceleration kinematic pair, a guide device, a position sensor assembly, a kinematic pair support, a drive component, and a payload. The payload is fixedly connected to the center of the flexible compensation base. The horizontal and vertical one-dimensional linear transmission pairs are connected to the flexible compensation base via the kinematic pair support. The horizontal one-dimensional linear kinematic pair is connected to the thin-walled inner ring of the flexible compensation base, driving the payload to move linearly horizontally. An unloading force device is installed at the connection point. The vertical one-dimensional linear kinematic pair is connected to the thin-walled outer ring of the flexible compensation base, driving the payload to move linearly vertically. Position sensor assemblies are installed at the shaft ends of the horizontal and vertical one-dimensional linear transmission pairs to provide real-time feedback of the telemetry values ​​of the payload, thus closing the loop for subsequent compensation.

[0067] like Figure 2 , 3 As shown, the unloading force device is installed in the flexible thin-walled inner ring and connected to the drive fork 20 in the horizontal one-dimensional linear transmission pair. When the push rod 23 of the vertical one-dimensional linear transmission pair pushes the outer ring of the flexible compensation base 2 to move vertically, the unloading bushing 21 in the unloading force device is connected to the drive fork 20, the unloading force bracket 3 is connected to the flexible compensation base 2, and the intermediate first rotating joint 4 unloads the vertical force and converts it into vertical displacement.

[0068] (1) In the embodiment, the effective load is 0.65Kg, the vibration during the emission stage is no more than 30g, the compensation range is ±0.5mm, the adjustment step size is ≤1μm, the repeatability is ≤±1μm, the optical axis rotation is RX / RY≤±5″, RZ≤±60″, the mechanism weight is ≤1.5kg, and the optical axis direction envelope size is <45mm.

[0069] (2) The flexible compensation mechanism realizes two-dimensional linear motion in the horizontal and vertical directions through two one-dimensional linear motion mechanisms and a flexible compensation base.

[0070] (3) The drive motor is a J35 stepper motor with a driving torque of 0.20 Nm (20 Hz to 100 Hz) and a step angle of 0.9°. During the launch process and the landing stage, the flexible compensation base and the effective load are locked. The driving torque margin during the working process is >5.6. Even in the event of an unexpected power failure, the locking torque margin of the compensation mechanism can still meet >2.6.

[0071] (4) According to the compensation step accuracy requirements, the reduction ratio of the gear pair of the one-dimensional linear transmission pair in the horizontal and vertical directions is designed to be 1 / 6, the lead of the ball screw pair of the linear motion pair is designed to be 1mm, and the compensation step accuracy can be <0.25μm.

[0072] (5) According to the compensation position accuracy requirements, the position feedback sensor is selected as an angle sensor potentiometer element. The horizontal and vertical linear motion position feedback sensor is 105mm away from the center of the rotating shaft, and the position feedback accuracy can reach ±0.1mm.

[0073] (6) The high-precision two-dimensional compensation mechanism has completed functional and performance tests. The performance test results are shown in Table 1:

[0074] Table 1 Performance Test Table for Position Switching Device with Forced Exit Functionality

[0075]

[0076] (7) The flexible compensation mechanism completed acceptance-level mechanical tests in the X, Y, and Z directions. The X, Y, and Z directions were paired orthogonal, and low-level random vibration, acceptance-level random vibration, and acceptance-level sinusoidal sweep tests were conducted respectively. The vibration response curves in the X, Y, and Z directions were measured. A characteristic-level sinusoidal sweep was performed before and after each vibration test to detect the change in the first-order frequency before and after the test. The first-order frequencies of the sinusoidal sweeps before and after the sinusoidal vibration and random vibration tests were compared. The changes in the first-order sweep frequencies before the vibration tests in the X, Y, and Z directions are shown in Table 2.

[0077] Table 2. Vibration frequency scans before and after the test in the X, Y, and Z directions.

[0078]

[0079]

[0080] This invention, through analysis of characteristic-level scanning data, shows that during vibration tests in the X, Y, and Z directions, the characteristic-level scanning curves before and after the acceptance-level test in each direction exhibit good consistency. The frequency drift of the characteristic-level scanning vibration in the X, Y, and Z directions before and after the acceptance-level test is 1.3%, 2%, and 6%, respectively, all less than 10%. This indicates that the stiffness of the flexible compensation mechanism with a load ratio > 0.8 did not change significantly during the test, and the strength at the thin-walled inner and outer rings of the flexible compensation base meets the safety margin. Precision tests were conducted on the flexible compensation mechanism before and after the mechanical tests. The linear displacement in the horizontal and vertical directions reached ±0.8 mm stroke, the accuracy of horizontal and vertical deflection around the X-axis and Y-axis was ≤ ±5″, and the accuracy of deflection around the Z-axis was ≤ ±22″. High precision was achieved with a compensation step distance < 0.5 μm, a compensation step distance accuracy < 0.25 μm, and a repeatability accuracy < ±0.5 mm. Both the function and performance were verified.

[0081] The parts of this invention not described in detail are well-known to those skilled in the art.

Claims

1. A lightweight, high-precision two-dimensional flexible optical axis compensation mechanism, characterized in that, include: Flexible compensation base (2), one-dimensional linear transmission pair, unloading force device, deceleration motion pair, guide device, position sensor assembly, drive component, effective load (1). The effective load (1) is installed at the center of the flexible compensation base (2); the driving component is connected to the horizontal and vertical one-dimensional linear transmission pairs respectively through the deceleration kinematic pair; The position sensor assembly is connected to the horizontal and vertical one-dimensional linear transmission pairs respectively to provide real-time position telemetry values; the horizontal one-dimensional linear transmission pair is fixed to the inner ring of the flexible compensation base (2) through the unloading force device, which drives the inner ring of the flexible compensation base (2) to move linearly, and guide devices are set on both sides of the drive fork (20). The vertical one-dimensional linear transmission pair is connected to the outer ring of the flexible compensation base (2) through the push rod (23), which drives the outer ring of the flexible compensation base (2) to move linearly; The lightweight, high-precision two-dimensional flexible optical axis compensation mechanism further includes a first kinematic pair support (5) and a second kinematic pair support (13). The one-dimensional linear transmission pair, deceleration kinematic pair and position sensor assembly of the horizontal and vertical orientations are respectively mounted on the flexible compensation base (2) through the first kinematic pair support (5) and the second kinematic pair support (13).

2. The lightweight, high-precision two-dimensional flexible optical axis compensation mechanism according to claim 1, characterized in that: The flexible compensation base (2) includes an inner ring and an outer ring. The outer ring and the inner ring adopt a flexible thin-walled structure. The outer ring has a thin wall thickness of 0.96 mm, the inner ring has a thin wall thickness of 0.92 mm, and the gap between the two sides of the thin wall is 2 mm.

3. The lightweight, high-precision two-dimensional flexible optical axis compensation mechanism according to claim 1, characterized in that: In the horizontal one-dimensional linear transmission pair, the driving component drives the driving fork (20) to make linear displacement in the horizontal direction through the deceleration kinematic pair. The first screw (8) and the driving fork (20) are engaged with raceway ball bearings. The driving fork (20) pushes the thin wall of the inner ring of the flexible compensation base to translate.

4. The lightweight, high-precision two-dimensional flexible optical axis compensation mechanism according to claim 1, characterized in that: In the vertical one-dimensional linear transmission pair, the driving component drives the push rod (23) to make a linear displacement in the vertical direction through the deceleration kinematic pair. The second screw (15) and the push rod (23) are engaged with raceway ball joints to convert the rotational motion into linear motion. The push rod (23) pushes the thin wall of the outer ring of the flexible compensation base to translate.

5. The lightweight, high-precision two-dimensional flexible optical axis compensation mechanism according to claim 1, characterized in that: The unloading force device includes: unloading bushing (21), first rotating joint (4) and unloading force bracket (3); the first rotating joint (4) is installed on the inner ring of the flexible compensation base (2) through the unloading force bracket (3), and the end of the drive fork (20) is connected to the first rotating joint (4) through the unloading bushing (21).

6. The lightweight, high-precision two-dimensional flexible optical axis compensation mechanism according to claim 1, characterized in that: The guiding device includes: a pair of second rotating joints (19) and joint supports (22); the second rotating joints (19) are fixed on the flexible compensation base (2) through the joint supports (22) and are respectively placed on both sides of the drive fork (20). When the drive fork (20) moves linearly back and forth, the second rotating joints (19) on the left and right sides guide the movement.

7. The lightweight, high-precision two-dimensional flexible optical axis compensation mechanism according to claim 1, characterized in that: The deceleration kinematic pair includes: a horizontal deceleration kinematic pair and a vertical deceleration kinematic pair; The horizontal azimuth deceleration motion pair includes: a first main drive wheel (11) and a first drive wheel (6). The first main drive wheel (11) is connected to the first rotary driver (10). The first main drive wheel (11) and the first drive wheel (6) mesh. The first drive wheel (6) is mounted on the first screw (8) to complete the horizontal azimuth deceleration motion. The vertical azimuth deceleration motion pair includes a second main drive wheel (18) and a second drive wheel (12). The second main drive wheel (18) is connected to the second rotary driver (17). The second main drive wheel (18) and the second drive wheel (12) mesh with each other. The second drive wheel (12) is mounted on the second screw (15) to complete the vertical azimuth deceleration motion.

8. The lightweight, high-precision two-dimensional flexible optical axis compensation mechanism according to claim 7, characterized in that: The position sensor assembly includes: a horizontal azimuth angle sensor (9), a first sensor support (7), a vertical azimuth angle sensor (16), and a second sensor support (14); the horizontal azimuth angle sensor (9) is mounted on a first kinematic pair support (5) via the first sensor support (7), and the horizontal azimuth angle sensor (9) is fixedly connected to a first screw (8) via a pin; a first rotary driver (10) is connected to the first screw (8) via a horizontal azimuth deceleration kinematic pair, and the horizontal azimuth angle sensor (9) provides feedback on the position telemetry value of the first screw (8); the vertical azimuth angle sensor (16) is mounted on a second kinematic pair support (13) via the second sensor support (14), and the shaft of the vertical azimuth angle sensor (16) is fixedly connected to the second screw (15) via a pin, and a second rotary driver (17) is connected to the second screw (15) via a vertical azimuth deceleration kinematic pair, and the vertical azimuth angle sensor (16) provides feedback on the position telemetry value of the second screw (15).

9. A method for generating vertical and horizontal azimuth displacements using a lightweight, high-precision two-dimensional flexible optical axis compensation mechanism according to any one of claims 1 to 8, characterized in that... include: The first rotary driver (10) drives the first main drive wheel (11) and the first drive wheel (6) of the horizontal orientation deceleration motion pair to decelerate; The first transmission wheel (6) drives the first screw (8) to push the drive fork (20) to reciprocate in a straight line along the horizontal direction; The drive fork (20) pushes the effective load (1) to reciprocate in the horizontal direction through the unloading force device; The horizontal azimuth angle sensor (9) outputs the telemetry value of the horizontal azimuth motion position of the effective load (1); The second rotary drive (17) drives the second main drive wheel (18) and the second drive wheel (12) of the vertical orientation deceleration kinematic pair to rotate; The second transmission wheel (12) drives the second screw (15) to push the push rod (23) to reciprocate in the vertical direction; the push rod (23) pushes the effective load (1) to reciprocate in the vertical direction; The vertical azimuth angle sensor (16) outputs the effective load (1) vertical azimuth motion position telemetry value.

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