Conveying devices and wafer fabrication equipment

Abstract

This application provides a conveying device and wafer fabrication equipment, relating to the field of semiconductor processing equipment technology, to solve the problem of low conveying reliability in conveying devices. The conveying device includes multiple drive wheels, an annular conveyor belt, and a monitoring mechanism. The conveyor belt is sleeved on the multiple drive wheels. The monitoring mechanism includes a first monitoring unit located on one side of the conveyor belt along its rotational axis and facing the conveyor belt. The first monitoring unit is configured to monitor whether the conveyor belt is outside a preset area in the radial direction of the drive wheels. The boundary of the preset area has a preset distance between the radial direction of the drive wheels and the trajectory of the conveyor belt in a tensioned state. The wafer fabrication equipment includes the above-described conveying device. This application can improve the conveying reliability of the conveying device.

Description

Technical Field

[0001] This application relates to the field of semiconductor processing equipment, and more particularly to a transfer device and wafer fabrication equipment. Background Technology

[0002] Silicon semiconductor integrated circuits are being used more and more widely. Silicon semiconductor integrated circuits usually require the use of wafers, and wafer fabrication equipment (such as wafer etching machines, wafer dicing machines, etc.) usually has a wafer transport device.

[0003] In related technologies, a conveying device includes a robotic arm and a drive assembly connected to the robotic arm. The drive assembly includes a drive wheel, a driven wheel, and an annular conveyor belt fitted on the drive wheel and the driven wheel. The drive wheel is connected to a stepper motor, which drives the drive wheel to rotate. The drive wheel drives the conveyor belt fitted on it to move, and the conveyor belt drives the driven wheel to rotate, so that the conveyor belt can move relative to the drive wheel and the driven wheel. The robotic arm is fixedly connected to the conveyor belt, so that the conveyor belt drives the robotic arm to move, thereby conveying wafers through the robotic arm.

[0004] However, in related technologies, the transmission reliability of the transmission device is low. Summary of the Invention

[0005] In view of the above problems, embodiments of this application provide a conveying device and a wafer fabrication equipment, which can prevent the occurrence of failures in advance, thereby improving the conveying reliability of the conveying device.

[0006] To achieve the above objectives, the embodiments of this application provide the following technical solutions:

[0007] In a first aspect, embodiments of this application provide a conveying device, comprising: a plurality of drive wheels, an annular conveyor belt, and a monitoring mechanism, wherein the conveyor belt is sleeved on the plurality of drive wheels; the monitoring mechanism includes a first monitoring unit located on one side of the conveyor belt along the rotation axis and facing the conveyor belt, the first monitoring unit being configured to monitor whether the conveyor belt is located outside a preset area in the radial direction of the drive wheels, wherein the boundary of the preset area is provided with a preset distance between the radial direction of the drive wheels and the trajectory of the conveyor belt in a tensioned state.

[0008] In one optional embodiment, the preset area is located between two adjacent drive wheels, and the portion of the conveyor belt located between two adjacent drive wheels has its track in a tensioned state within the preset area.

[0009] In one optional implementation, the first monitoring unit includes a camera, and the boundary of the preset area is located within the camera's shooting area.

[0010] In one optional implementation, the first monitoring unit includes a laser scanning device, wherein the laser scanning line of the laser scanning device forms the boundary of the preset area.

[0011] In one optional implementation, the first monitoring unit further includes a first image processor electrically connected to the camera, which determines whether the conveyor belt is located outside the preset area in the radial direction of the drive wheel based on the image captured by the camera.

[0012] In one alternative embodiment, the projection of the camera along the rotational axis of the conveyor belt is located at the center of the shape formed by the conveyor belt.

[0013] In one alternative embodiment, the monitoring mechanism further includes at least one second monitoring unit located on one side of the conveyor belt along the radial direction of the drive wheel, the second monitoring unit facing the belt surface of the conveyor belt, the second monitoring unit being configured to monitor the belt surface defect state of the conveyor belt, wherein the belt surface defect state includes at least one of the number and size of the cracks.

[0014] In one alternative implementation, there are at least two second monitoring units, which are arranged at intervals along the extension direction of the annular conveyor belt.

[0015] In one optional implementation, the second monitoring unit includes an image acquisition unit and a second image processor. The image acquisition unit is electrically connected to the second image processor. The image acquisition unit is used to acquire surface images of the conveyor belt, and the second image processor is used to compare the acquired surface images with the preset images.

[0016] In one alternative implementation, the image acquisition device includes either a camera or a webcam.

[0017] In one alternative embodiment, the monitoring mechanism further includes a third monitoring unit located on one side of the conveyor belt and abutting against the conveyor belt, the third monitoring unit being configured to monitor the tension of the conveyor belt.

[0018] In one alternative implementation, the third monitoring unit includes a tension monitoring sensor for monitoring the magnitude of the tension of the conveyor belt.

[0019] In one optional implementation, the third monitoring unit further includes a calculation and analysis module, which determines the dangerous section of the conveyor belt based on the tension of the conveyor belt and the surface crack state of the conveyor belt monitored by the second monitoring unit.

[0020] In one optional implementation, the monitoring mechanism further includes an alarm unit electrically connected to the first monitoring unit, the second monitoring unit, and the third monitoring unit. The alarm unit sounds an alarm when the conveyor belt is located outside a preset area in the radial direction of the drive wheel, or when the number or size of surface cracks on the conveyor belt is greater than the number or size of surface defects on the preset image, or when the second monitoring unit detects a dangerous section of the conveyor belt.

[0021] Secondly, embodiments of this application provide a wafer fabrication apparatus, including: an apparatus body and a conveying device provided in the first aspect above, the conveying device being used to convey wafers.

[0022] Compared with related technologies, the conveying device and wafer fabrication equipment provided in this application have at least the following advantages:

[0023] The conveying device provided in this application embodiment is equipped with a monitoring mechanism, which includes a first monitoring unit. The first monitoring unit detects whether the conveyor belt is located within a preset area in the radial direction of the drive wheel, so as to determine whether the conveying device needs to be stopped for inspection or maintenance and replacement. In this way, the occurrence of faults can be prevented in advance, thereby improving the conveying reliability of the conveying device.

[0024] In addition to the technical problems solved by the embodiments of this application, the technical features constituting the technical solutions, and the beneficial effects brought about by the technical features of these technical solutions described above, other technical problems that can be solved by the transmission device and wafer fabrication equipment provided by the embodiments of this application, other technical features included in the technical solutions, and the beneficial effects brought about by these technical features will be further explained in detail in the specific implementation. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of the structure of the transmission device provided in the embodiments of this application;

[0027] Figure 2This is a top view schematic diagram of the conveying device provided in the embodiments of this application;

[0028] Figure 3 This is a partial structural schematic diagram of the transmission device provided in the embodiments of this application;

[0029] Figure 4 A partial structural schematic diagram of the transmission device provided in an embodiment of this application from another perspective;

[0030] Figure 5 A schematic diagram illustrating the monitoring of the tension of the conveyor belt in the conveying device provided in this application embodiment;

[0031] Figure 6 This is a schematic diagram illustrating the monitoring of surface defects of the conveyor belt in the conveying device provided in this application embodiment.

[0032] Figure label:

[0033] 100 - Conveying device;

[0034] 110 - Transmission wheel;

[0035] 111-Drive pulley;

[0036] 112 - Driven pulley;

[0037] 113 - Idle wheel;

[0038] 120 - Conveyor Belt;

[0039] 130 - Preset area;

[0040] 140 - Second Monitoring Unit;

[0041] 150 - Third monitoring unit. Detailed Implementation

[0042] In related technologies, the main reason for the low reliability of the conveying device is that the conveying device includes a robotic arm and a drive assembly connected to the robotic arm. The drive assembly includes a drive wheel, a driven wheel, and an annular conveyor belt sleeved on the drive wheel and driven wheel. The drive wheel is connected to a stepper motor, which drives the drive wheel to rotate. The drive wheel drives the conveyor belt to move, and the conveyor belt drives the driven wheel to rotate, so that the conveyor belt can move relative to the drive wheel and driven wheel. The robotic arm is fixedly connected to the conveyor belt, so that the conveyor belt drives the robotic arm to move, thereby realizing the conveying of wafers. In addition, the drive assembly also includes an idler wheel, which is used to change the path of the conveyor belt and to achieve the purpose of pre-tensioning the conveyor belt. However, on the one hand, under long-term operation, the position of the idler wheel is prone to displacement, resulting in insufficient tension between the conveyor belt and the drive wheel, causing slippage and resulting in low conveying reliability. On the other hand, since the conveyor belt is a consumable part, under long-term operation, the conveyor belt changes from elastic deformation to plastic deformation, the conveyor belt loosens, and even cracks appear on the surface, resulting in fatigue failure, thus causing the technical problem of low conveying reliability of the conveying device.

[0043] To address the aforementioned issues, the conveying device provided in this application embodiment includes a monitoring mechanism. The monitoring mechanism comprises a first monitoring unit, which detects whether the conveyor belt is located within a preset area in the radial direction of the drive wheel to determine whether the conveying device needs to be stopped for inspection, maintenance, or replacement. This approach can prevent malfunctions in advance, thereby improving the conveying reliability of the conveying device.

[0044] To make the above-mentioned objectives, features, and advantages of the embodiments of this application more apparent and understandable, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0045] Example 1

[0046] Figure 1 This is a schematic diagram of the structure of the transmission device provided in the embodiments of this application; Figure 2 This is a top view schematic diagram of the conveying device provided in the embodiments of this application; Figure 3 This is a partial structural schematic diagram of the transmission device provided in the embodiments of this application; Figure 4 A partial structural schematic diagram of the transmission device provided in an embodiment of this application from another perspective; Figure 5 This is a schematic diagram illustrating the monitoring of the tension of the conveyor belt in the conveying device provided in an embodiment of this application.

[0047] See Figures 1 to 5As shown, the conveying device 100 provided in this embodiment includes multiple drive wheels 110 and an annular conveyor belt 120, with the conveyor belt 120 mounted on the multiple drive wheels 110. For example, the multiple drive wheels 110 include a drive pulley 111, a driven pulley 112, and an idler pulley 113, etc. The conveyor belt 120 is mounted on the drive pulley 111 and the driven pulley 112. The drive pulley 111 is connected to a driving component such as a stepper motor, so that the stepper motor drives the drive pulley 111 to rotate, thereby driving the conveyor belt 120. The conveyor belt 120 drives the driven pulley 112 to rotate. A robotic arm or the like is connected to the conveyor belt 120 to form a conveyor belt 120 conveyor, thereby realizing the conveying of products such as wafers.

[0048] The conveying device 100 also includes a base, a drive wheel 110 is mounted on the base and can rotate relative to the base, and an idler wheel 113 is mounted on the base by threaded fasteners. The number of idler wheels 113 can be one or more. By setting the idler wheels 113, the conveyor belt 120 can be pre-tensioned to meet the tension between the conveyor belt 120 and the drive wheel 110, and to prevent the conveyor belt 120 from slipping between the drive pulley 111 and the driven pulley 112 due to slack, thereby improving the conveying reliability of the conveying device 100.

[0049] The conveyor belt 120 can be a regular V-belt, a flat belt, etc., and can be made of materials such as rubber, possessing a certain degree of elastic deformation and plastic deformation.

[0050] See Figure 5 As shown, to avoid the problem of low transmission reliability of the conveying device 100 due to displacement caused by loose idler wheel 113, in this embodiment of the application, the conveying device 100 further includes a monitoring mechanism. The monitoring mechanism includes a first monitoring unit (not shown in the figure), wherein the first monitoring unit is located on one side of the conveyor belt 120 along the rotation axis and faces the conveyor belt 120. The first monitoring unit is configured to monitor whether the conveyor belt 120 is outside the preset area 130 in the radial direction of the drive wheel 110, wherein the boundary of the preset area 130 (e.g., the boundary of the drive wheel 110 is outside the preset area 130) is defined as the boundary of the drive wheel 110. Figure 5 The dotted line in the diagram indicates that a preset distance is provided between the drive wheel 110 in the radial direction and the track of the conveyor belt 120 in the tensioned state.

[0051] In this way, the first monitoring unit can monitor whether the conveyor belt 120 is located at or outside the boundary of the preset area 130 in the radial direction of the drive wheel 110. When the first monitoring unit detects that the conveyor belt 120 is located at or outside the boundary of the preset area 130, it indicates that the idler wheel 113 has deviated from its position and the tension between the conveyor belt 120 and the drive wheel 110 is insufficient. The machine can be stopped for inspection or maintenance of the conveyor device 100, which can achieve the purpose of fault prevention of the conveyor device 100, reduce the failure rate of the conveyor device 100, and thus improve the conveying reliability of the conveyor device 100.

[0052] In one alternative embodiment, the preset area 130 is located between two adjacent drive wheels 110, and the portion of the conveyor belt 120 located between two adjacent drive wheels 110 has its track in the tensioned state located within the preset area 130.

[0053] For example, two adjacent transmission wheels 110 can be a driving pulley 111 and a driven pulley 112, or a driving pulley 111 and an idler pulley 113, or an idler pulley 113 and a driven pulley 112, etc.

[0054] When the first monitoring unit detects that the portion of the conveyor belt 120 located between two adjacent drive wheels 110 is at or outside the boundary of the preset area 130, it can stop the machine for inspection or maintenance and replacement, so as to prevent failures in advance, reduce the failure rate of the conveyor device 100, and thus improve the conveying reliability of the conveyor device 100.

[0055] The first monitoring unit may include, but is not limited to, a camera. It is understood that the boundary of the preset area 130 is located within the camera's shooting area, so that the camera can capture the state of the conveyor belt 120 corresponding to the preset area 130, thereby achieving the purpose of real-time monitoring and reducing the failure rate of the conveyor device 100.

[0056] Based on the above embodiments, the first monitoring unit further includes a first image processor electrically connected to the camera. The first image processor determines whether the conveyor belt 120 is located outside the preset area 130 in the radial direction of the transmission wheel 110 based on the image captured by the camera.

[0057] It is understood that the first image processor includes, but is not limited to, a computer, and may also be other devices capable of viewing or even processing images. This embodiment does not impose specific limitations on this.

[0058] In a specific implementation, the camera transmits the captured images to the first image processor. The user can perform visual analysis based on the images captured by the camera to determine whether the conveyor belt 120 is outside the preset area 130 in the radial direction of the drive wheel 110. Alternatively, the first image processor has an image analysis function. The first image processor can automatically analyze the images captured by the camera to determine whether the conveyor belt 120 is outside the preset area 130 in the radial direction of the drive wheel 110. For example, the first image processor contains a standard image. When the image captured by the camera is uploaded to the first image processor, the first image processor compares the captured image with the standard image and displays the comparison result on the first image processor, thereby achieving the purpose of automatic image analysis and improving the degree of automation.

[0059] For example, the projection of the camera along the rotation axis of the conveyor belt 120 can be located at the center of the shape formed by the conveyor belt 120. For instance, when the conveyor device 100 is placed horizontally, if the idler wheel 113 shifts due to gravity, causing the conveyor belt 120 to slack, the center of the shape formed by the conveyor belt 120 will touch the boundary of the preset area 130 before other parts. In this way, by positioning the projection of the camera along the rotation axis of the conveyor belt 120 at the center of the shape formed by the conveyor belt 120, it is possible to monitor whether the conveyor belt 120 is within the preset area 130, enabling real-time monitoring of the state of the conveyor belt 120 and achieving the purpose of preventing malfunctions in advance.

[0060] Of course, the projection of the camera along the rotation axis of the conveyor belt 120 can also be located at other positions in the shape formed by the conveyor belt 120, as long as the boundary of the preset area 130 is within the shooting area of ​​the camera. This embodiment does not impose specific restrictions on this.

[0061] Alternatively, multiple cameras can be set at intervals to capture images of different areas of the preset area 130 boundary. This avoids the situation where a single camera cannot capture the entire boundary of the preset area 130, thereby improving the reliability of monitoring whether the conveyor belt 120 is within the preset area 130.

[0062] In another alternative embodiment, the first monitoring unit can also be a laser scanning device. The laser scanning line of the laser scanning device forms the boundary of the preset area 130. Thus, when the conveyor belt 120 touches the boundary of the preset area 130, the laser scanning device issues an alarm, allowing the user to promptly stop the machine for inspection or maintenance. For example, Figure 5 The two dashed lines in the image can be laser scanning lines.

[0063] For example, laser scanning devices include, but are not limited to, laser sensors.

[0064] Therefore, the first monitoring unit mentioned above is mainly for the loosening and displacement of the idler wheel 113, which leads to insufficient tension between the conveyor belt 120 and the drive wheel 110, resulting in at least part of the conveyor belt 120 being outside the preset area 130. In this embodiment of the application, by setting the first monitoring unit, it is possible to monitor in real time whether the conveyor belt is within the preset area 130, thereby determining whether the idler wheel 113 has shifted, thus achieving the purpose of preventing failures in advance, reducing the failure rate of the conveyor device 100, and improving the conveying reliability of the conveyor device 100.

[0065] Figure 6 This is a schematic diagram illustrating the monitoring of surface defects of the conveyor belt in the conveying device provided in this application embodiment.

[0066] Since the conveyor belt 120 will inevitably suffer wear and tear during prolonged operation, the monitoring mechanism also includes at least one second monitoring unit 140 to monitor the health of the conveyor belt 120 under prolonged operation. Figure 1 and Figure 2 As shown, the second monitoring unit 140 is located on one side of the conveyor belt 120 along the radial direction of the drive wheel 110. The second monitoring unit 140 faces the belt surface of the conveyor belt 120. The second monitoring unit 140 is configured as a device for monitoring belt surface defects of the conveyor belt 120, wherein the belt surface defect state includes at least one of the number and size of cracks.

[0067] It should be noted that surface defects are not limited to cracks, but can also include other types of damage.

[0068] For example, in Figure 6 In the diagram, the shape within the dashed circle represents a portion of the cracks on the surface of conveyor belt 120.

[0069] It is understandable that the health rating of the conveyor belt at 120 refers to the number and size of cracks and other damage on the belt surface.

[0070] The second monitoring unit 140 monitors the defect status of the conveyor belt 120, that is, whether there are cracks on the surface of the conveyor belt 120 and the number and size of the cracks, so as to determine the health of the surface of the conveyor belt 120 and thus determine whether it is necessary to stop the machine for inspection or maintenance and replacement, so as to achieve the purpose of preventing failure in advance, reducing the failure rate of the conveyor device 100, and thus reducing the operating cost of the conveyor device 100.

[0071] There are at least two second monitoring units 140, and the at least two second monitoring units 140 are arranged at intervals along the extension direction of the annular conveyor belt 120.

[0072] It is understood that there are two or more second monitoring units 140. At least two second monitoring units 140 monitor different sections of the extended direction of the annular conveyor belt 120 in real time, which improves the monitoring range of the conveyor belt 120, thereby improving the reliability of early fault prevention and further reducing the failure rate of the conveyor device 100.

[0073] The second monitoring unit 140 includes an image acquisition unit and a second image processor. The image acquisition unit is electrically connected to the second image processor. The image acquisition unit is used to acquire surface images of the conveyor belt 120. The second image processor is used to compare the acquired surface images with preset images to determine the degree of defects on the surface of the conveyor belt 120. Based on the comparison results, it is determined whether the conveyor belt 120 needs to be replaced.

[0074] For example, an image acquisition device may include a camera or a webcam.

[0075] The angle at which the image acquisition device acquires images can be fixed or adjustable within a certain angle range to increase the acquisition range of the image acquisition device.

[0076] This embodiment does not impose specific restrictions on whether the image acquisition angle of the image acquisition device is fixed or adjustable, as long as it can clearly and intuitively acquire an image of the surface of the conveyor belt 120.

[0077] The second image processor includes, but is not limited to, image analysis devices such as computers. When the second image processor analyzes and compares the defect status of the conveyor belt 120, it can be done by the user through visual comparison; or it can be done automatically by the second image processor. The automatic analysis and comparison by the second image processor is accurate, efficient, and highly automated.

[0078] The conveyor belt 120 has one or more cracks on its surface. If the crack size does not reach the point of fatigue failure or replacement, the conveyor belt 120 can continue to be used within a certain tension range. If the conveyor belt 120 is replaced every time a crack appears, the overall cost of the conveyor device 100 will inevitably be high. Therefore, in order to reduce costs and achieve the goal of preventing failures in advance, in this embodiment, the monitoring mechanism also includes a third monitoring unit 150, such as... Figure 1 , Figure 2 and Figure 4 As shown, the third monitoring unit 150 is located on one side of the conveyor belt 120 and abuts against the conveyor belt 120. The third monitoring unit 150 is configured to monitor the tension of the conveyor belt 120.

[0079] In this embodiment, a third monitoring unit 150 is provided, positioned on one side of the conveyor belt 120 and in contact with it. The third monitoring unit 150 monitors the tension of the conveyor belt 120, and combined with the defect status of the conveyor belt 120 surface, it determines whether the conveyor belt 120 will experience fatigue failure, thereby determining whether it is necessary to stop and replace the conveyor belt 120. This extends the service life of the conveyor belt 120 and enables real-time monitoring of its status, thus preventing failures in advance, reducing the operating cost of the conveying device 100, reducing the failure rate of the conveying device 100, and improving the conveying reliability of the conveying device 100.

[0080] The third monitoring unit 150 includes a tension monitor, and the tension monitoring sensor is used to detect the magnitude of the tension of the conveyor belt 120.

[0081] Understandably, by detecting the tension of the conveyor belt 120 using a tension monitor, and combining this with the crack condition on the surface of the conveyor belt 120, the dangerous section of the conveyor belt 120 can be determined, thereby determining whether a shutdown for maintenance is necessary, thus achieving the purpose of preventing failures in advance.

[0082] The third monitoring unit 150 also includes a calculation and analysis module, which determines the dangerous section of the conveyor belt 120 based on the tension of the conveyor belt 120 and the surface crack status of the conveyor belt monitored by the second monitoring unit 140.

[0083] By setting up a calculation and analysis module, the module can calculate and analyze the dangerous section of the conveyor belt 120 based on the tension detected by the tension monitor and the surface crack state of the conveyor belt 120 monitored by the second monitoring unit 140. This can improve the accuracy of the dangerous section analysis, increase the degree of automation, accurately predict faults in advance, and reduce the failure rate of the conveyor device 100.

[0084] Based on the above embodiments, the monitoring mechanism also includes an alarm unit (not shown in the figure). The alarm unit is electrically connected to the first monitoring unit, the second monitoring unit 140 and the third monitoring unit 150. When the conveyor belt 120 is located outside the preset area 130 in the radial direction of the transmission wheel 110, or when the number or size of surface cracks on the conveyor belt 120 is greater than the number or size of surface defects on the preset image, or when the second monitoring unit 140 detects a dangerous section of the conveyor belt 120, the alarm unit will sound an alarm.

[0085] It is understandable that the alarm unit can be a buzzer that can emit a buzzing sound, or it can display the alarm signal on the operation interface of the first image processor and the second image processor, or it can remind the user to stop the machine for maintenance through alarm indicator lights, so as to ensure the transmission reliability of the transmission device 100, and thus ensure the safety and reliability of the wafers and other products transported by the transmission device 100.

[0086] Example 2

[0087] This application also provides a wafer fabrication apparatus, including an apparatus body and a conveying device provided in Embodiment 1 above, the conveying device being used to convey wafers.

[0088] It is understood that the device body is used to manufacture wafers, and its structure can refer to the structure of related technologies, which will not be described in detail in the embodiments of this application.

[0089] The structure and working principle of the conveying device have been described in detail in Embodiment 1 above, and will not be repeated here.

[0090] The conveying device and wafer fabrication equipment provided in this application embodiment, by setting a monitoring mechanism in the conveying device, the monitoring mechanism includes a first monitoring unit, which detects whether the conveyor belt is located within a preset area in the radial direction of the drive wheel, so as to determine whether the conveying device needs to be stopped for inspection or maintenance and replacement. In this way, the occurrence of failure can be prevented in advance, thereby improving the conveying reliability of the conveying device.

[0091] The various embodiments or implementation methods described in this specification are presented in a progressive manner. Each embodiment focuses on the differences from other embodiments, and the same or similar parts between the embodiments can be referred to each other.

[0092] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with an embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0093] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A conveying device, characterized in that, include: Multiple drive wheels, an annular conveyor belt, and a monitoring mechanism, wherein the conveyor belt is fitted onto the multiple drive wheels; The monitoring mechanism includes a first monitoring unit located on one side of the conveyor belt along the rotation axis and facing the conveyor belt. The first monitoring unit is configured to monitor whether the conveyor belt is outside a preset area in the radial direction of the drive wheel, wherein the boundary of the preset area is provided with a preset distance between the radial direction of the drive wheel and the trajectory of the conveyor belt in the tensioned state.

2. The conveying device according to claim 1, characterized in that, The preset area is located between two adjacent drive wheels, and the track of the portion of the conveyor belt located between two adjacent drive wheels in the tensioned state is located within the preset area.

3. The conveying device according to claim 2, characterized in that, The first monitoring unit includes a camera, and the boundary of the preset area is located within the shooting area of ​​the camera.

4. The conveying device according to claim 2, characterized in that, The first monitoring unit includes a laser scanning device, and the laser scanning line of the laser scanning device forms the boundary of the preset area.

5. The conveying device according to claim 3, characterized in that, The first monitoring unit further includes a first image processor electrically connected to the camera, which determines whether the conveyor belt is located outside the preset area in the radial direction of the drive wheel based on the image captured by the camera.

6. The conveying device according to claim 5, characterized in that, The projection of the camera along the rotation axis of the conveyor belt is located at the center of the shape formed by the conveyor belt.

7. The conveying device according to any one of claims 1-6, characterized in that, The monitoring mechanism further includes at least one second monitoring unit located on one side of the conveyor belt along the radial direction of the drive wheel, the second monitoring unit facing the belt surface of the conveyor belt, the second monitoring unit being configured to monitor the belt surface defect state of the conveyor belt, wherein the belt surface defect state includes at least one of the number and size of cracks.

8. The conveying device according to claim 7, characterized in that, The second monitoring unit comprises at least two units, which are arranged at intervals along the extension direction of the annular conveyor belt.

9. The conveying device according to claim 8, characterized in that, The second monitoring unit includes an image acquisition unit and a second image processor. The image acquisition unit is electrically connected to the second image processor. The image acquisition unit is used to acquire surface images of the conveyor belt, and the second image processor is used to compare the acquired surface images with preset images.

10. The conveying device according to claim 9, characterized in that, The image acquisition device includes either a camera or a webcam.

11. The conveying device according to claim 9, characterized in that, The monitoring mechanism further includes a third monitoring unit located on one side of the conveyor belt and in contact with the conveyor belt, the third monitoring unit being configured to monitor the tension of the conveyor belt.

12. The conveying device according to claim 11, characterized in that, The third monitoring unit includes a tension monitoring sensor, which is used to monitor the tension of the conveyor belt.

13. The conveying device according to claim 12, characterized in that, The third monitoring unit also includes a calculation and analysis module, which determines the dangerous section of the conveyor belt based on the tension of the conveyor belt and the surface crack state of the conveyor belt monitored by the second monitoring unit.

14. The conveying device according to claim 13, characterized in that, The monitoring mechanism also includes an alarm unit, which is electrically connected to the first monitoring unit, the second monitoring unit, and the third monitoring unit. The alarm unit will sound an alarm when the conveyor belt is located outside the preset area in the radial direction of the drive wheel, or when the number or size of surface cracks on the conveyor belt is greater than the number or size of surface defects on the preset image, or when the second monitoring unit detects a dangerous section of the conveyor belt.

15. A wafer fabrication apparatus, characterized in that, include: The device body and the conveying device as described in any one of claims 1-14, the conveying device being used to convey wafers.

Images