Optical-mechanical structure for improving ghost images, manufacturing method thereof, and display waveguide device

Abstract

The present invention provides an optomechanical structure for improving ghost images, a method for manufacturing the same, and a display waveguide device. The optomechanical structure for improving ghost images includes: a display panel having multiple pixels with gaps between them; and a filling layer disposed on a surface of the display panel having the multiple pixels, the filling layer being disposed only in the gaps between the pixels. The filling layer comprises at least a reflective layer and a light-absorbing layer. The present invention addresses the difficulty in improving ghost images in existing optomechanical structures.

Description

Technical Field

[0001] The present invention relates to the technical field of near-eye display devices, and in particular to an optomechanical structure for improving ghost images, a manufacturing method thereof, and a display waveguide device. Background Art

[0002] With the continuous development of the optical display field, the market demand for near-eye display devices has increased year by year, especially for display waveguide devices. Display waveguide devices come in a variety of types. Take AR wearable devices as an example. AR wearable devices have attracted public attention and are well-known due to their miniaturization. The combination of Micro LED optomechanical structures and optical waveguide structures has gradually become the mainstream choice for lightweight imaging solutions.

[0003] However, due to the high reflectivity of the display panel of the Micro LED optomechanical structure and the coupling grating position of the optical waveguide structure, the reflected light ( Figure 1 The first reflected light 1 and the second reflected light 2 in the optical waveguide structure will reach the Micro LED display panel again for secondary or multiple imaging, and then the first reflected light 1 and the second reflected light 2 will be transmitted through the total internal reflection of the optical waveguide structure to reach the human eye to form ghost images. The traditional methods of eliminating ghost images mainly include the following two methods (such as Figure 2 shown):

[0004] 1. Adding an AR (anti-reflection) coating to the optical lens of the Micro LED optomechanical structure minimizes the intensity of the second reflected light 2. However, due to its angle and wavelength selectivity, the AR coating can only work within a certain wavelength range and luminous angle range. It cannot eliminate reflected light at certain large angles and within the long / short wavelength ranges on the optical lens surface, so ghost images will still be generated.

[0005] 2. Tilt the optomechanical structure at a certain angle so that the projected light emitted from the optomechanical structure has a certain angle, so that the first reflected light 1 coupled into the grating surface of the optical waveguide structure does not enter the optomechanical structure to participate in secondary imaging. However, this method will have a great impact on the structural design of the entire product, and will also increase the difficulty of assembly and testing between the optomechanical structure and the optical waveguide structure.

[0006] In other words, the optical-mechanical structure in the prior art has the problem of difficulty in improving ghost images. Summary of the Invention

[0007] The main purpose of the present invention is to provide an optomechanical structure for improving ghost images, a method for manufacturing the same, and a display waveguide device, so as to solve the problem that the optomechanical structure in the prior art has difficulty in improving ghost images.

[0008] In order to achieve the above-mentioned purpose, according to one aspect of the present invention, an optomechanical structure for improving ghost images is provided, comprising: a display panel, on which a plurality of pixels are arranged, and gaps between the plurality of pixels; a filling layer, the filling layer being arranged on a surface of a side of the display panel having the plurality of pixels, and only the gaps between the plurality of pixels are filled with the filling layer, and the filling layer comprising at least a reflective layer and a light-absorbing layer.

[0009] Furthermore, the light absorbing layer is located on a surface of the reflective layer that is away from the display panel.

[0010] Furthermore, the side of the reflective layer away from the display panel is protruding from the surface of the pixel away from the display panel, and the projection of the portion of the reflective layer protruding from the pixel on the display panel at least partially overlaps with the projection of the pixel on the display panel.

[0011] Furthermore, the reflective layer includes a first layer and a second layer, the first layer is connected to the display panel and fills the gap, the second layer is connected to the side surface of the first layer away from the display panel, and the distance between the second layer and the display panel is greater than the distance between the side surface of the pixel away from the display panel and the display panel, and the projected area of the second layer on the display panel is greater than the projected area of the first layer on the display panel.

[0012] Furthermore, the projected area of the light absorbing layer on the display panel is consistent with the projected area of the second layer on the display panel.

[0013] Furthermore, the thickness of the first layer is greater than the thickness of the pixel, and the sum of the thickness of the second layer and the thickness of the light absorbing layer is less than or equal to half the thickness of the first layer.

[0014] Furthermore, the reflective layer is a metal layer, the material of the metal layer includes one of gold, silver, aluminum, platinum and rhodium; and / or the material of the light absorbing layer includes one of black carbon-based, black low-valent titanium oxide and aniline black.

[0015] According to another aspect of the present invention, a display waveguide device is provided, comprising: the above-mentioned optomechanical structure for improving ghost images; an optical waveguide structure, the optical waveguide structure comprising a waveguide plate and an in-coupling grating and an out-coupling grating disposed on the waveguide plate, the optomechanical structure being configured to emit image light into the optical waveguide structure.

[0016] According to another aspect of the present invention, a method for manufacturing an optomechanical structure for improving ghost images is provided. The manufacturing method is used to manufacture the above-mentioned optomechanical structure for improving ghost images, and the manufacturing method includes: step S1: obtaining the luminous wavelength range of multiple pixels of the optomechanical structure; step S2: obtaining the material of a light-absorbing layer that matches the luminous wavelength range of the multiple pixels; step S3: obtaining a display panel of the optomechanical structure, and obtaining the size of the reflective layer according to the height of the multiple pixels on the display panel, the size of the gap between the multiple pixels, and the size of the edges of the multiple pixels and the display panel; step S4: using a graphic process of deposition or coating to generate a reflective layer on the surface of the side of the display panel having pixels; step S5: using a graphic process of deposition or coating to generate a light-absorbing layer on the surface of the side of the reflective layer away from the display panel.

[0017] Furthermore, the manufacturing method further includes step S6 after step S5: obtaining a white light source, irradiating the light absorbing layer with the white light source, and determining whether the light absorbing performance of the light absorbing layer meets the requirements.

[0018] Furthermore, in the process of determining whether the light absorption performance of the light absorption layer meets the requirements in step S6, when the light absorption performance of the light absorption layer meets the requirements, the manufacturing method also includes a step S7 located after step S6, wherein step S7 includes lighting up multiple pixels; when the light absorption performance of the light absorption layer does not meet the requirements, repeating steps S2 to S6.

[0019] Furthermore, step S7 also includes: determining whether the divergence angles of multiple pixels meet preset requirements; when the divergence angles of multiple pixels do not meet the preset requirements, repeating steps S3 to S7; when the divergence angles of multiple pixels meet the preset requirements, the manufacturing method ends.

[0020] By applying the technical solution of the present invention, the optomechanical structure for improving ghost images includes a display panel and a filling layer, wherein a plurality of pixels are arranged on the display panel, and gaps exist between the plurality of pixels; the filling layer is arranged on a surface of a side of the display panel having the plurality of pixels, and only the gaps between the plurality of pixels are filled with the filling layer, and the filling layer includes at least a reflective layer and a light-absorbing layer.

[0021] By filling the gaps between multiple pixels with a filling layer, the filling layer includes at least a reflective layer and a light-absorbing layer. On the one hand, the filling layer can effectively absorb the second reflected light reflected by the surface of the optical lens and the first reflected light reflected back by the coupled grating of the optical waveguide structure, thereby eliminating ghost light and achieving the purpose of improving ghost images; on the other hand, by setting the filling layer in the gaps between multiple pixels, the filling layer can effectively shrink the divergence angle of the pixel, thereby increasing the efficiency of the optomechanical structure. Since the volume and weight of the optomechanical structure of the AR head-mounted device are limited, the diameter of the optical lens inside it is generally small, so the angle range of light participating in the imaging of the optical lens is fixed. If the pixel's light-emitting angle is larger, the light utilization rate from the pixel to the exit pupil of the optomechanical structure will be relatively low, and the light efficiency will be low. This setting effectively increases the light utilization rate of the pixel and increases the light efficiency of the optomechanical structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The accompanying drawings, which constitute part of this application, are intended to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are intended to explain the present invention and do not constitute an undue limitation of the present invention. In the accompanying drawings:

[0023] Figure 1 A schematic diagram showing a source of ghost images in a display waveguide device in the prior art is shown;

[0024] Figure 2 A schematic diagram of the structure of eliminating ghost images of a display waveguide device in the prior art is shown;

[0025] Figure 3 A schematic diagram showing a partial structure of an optomechanical structure for improving ghost images according to an optional embodiment of the present invention;

[0026] Figure 4 Shows a top view of the display panel before and after the filling layer is set;

[0027] Figure 5 Shown Figure 3 Schematic diagram of the filling layer in;

[0028] Figure 6 A light path diagram showing a display waveguide device according to an optional embodiment of the present invention is shown;

[0029] Figure 7 A light path diagram of a pixel of the optomechanical structure for improving ghost images of the present invention is shown;

[0030] Figure 8 A light path diagram showing the cooperation between the pixel and the optical lens of the optomechanical structure for improving ghost images of the present invention is shown;

[0031] Figure 9A flow chart showing a method for manufacturing an optomechanical structure for improving ghost images according to an optional embodiment of the present invention is shown.

[0032] The above drawings include the following reference numerals:

[0033] 1. First reflected light; 2. Second reflected light; 10. Display panel; 20. Pixel; 31. Reflective layer; 311. First layer; 312. Second layer; 32. Light-absorbing layer; 40. Optical lens; 50. Incoupling grating; 60. Outcoupling grating. DETAILED DESCRIPTION

[0034] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments in this application can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0035] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meaning as commonly understood by ordinary technicians in the technical field to which this application belongs.

[0036] In the present invention, unless otherwise specified, the directional words used, such as "up, down, top, bottom", usually refer to the directions shown in the drawings, or to the components themselves in the vertical, perpendicular or gravity direction; similarly, for ease of understanding and description, "inside and outside" refer to the inside and outside relative to the outline of each component itself, but the above directional words are not used to limit the present invention.

[0037] In order to solve the problem of difficulty in improving ghost images in the optomechanical structure in the prior art, the present invention provides an optomechanical structure for improving ghost images, a manufacturing method thereof, and a display waveguide device.

[0038] like Figures 3 to 9 As shown, the optomechanical structure for improving ghost images includes a display panel 10 and a filling layer. A plurality of pixels 20 are arranged on the display panel 10, and there are gaps between the plurality of pixels 20. The filling layer is arranged on a surface of one side of the display panel 10 having the plurality of pixels 20, and only the gaps between the plurality of pixels 20 are filled with the filling layer. The filling layer includes at least a reflective layer 31 and a light absorbing layer 32.

[0039] By filling the gaps between multiple pixels 20 with a filling layer, the filling layer includes at least a reflective layer 31 and a light-absorbing layer 32. On the one hand, the filling layer can effectively absorb the second reflected light reflected by the surface of the optical lens 40 and the first reflected light reflected back by the coupled grating 50 of the optical waveguide structure, thereby eliminating the ghost light and achieving the purpose of improving the ghost image; on the other hand, by setting the filling layer in the gaps between multiple pixels 20, the filling layer can effectively shrink the divergence angle of the pixel 20, thereby increasing the efficiency of the optomechanical structure. Since the volume and weight of the optomechanical structure of the AR head-mounted device are limited, the diameter of the optical lens 40 inside it is generally small. Therefore, the angle range of light participating in the imaging of the optical lens 40 is fixed. If the light-emitting angle of the pixel 20 is larger, the light utilization rate from the pixel 20 to the exit pupil of the optomechanical structure will be relatively low, and the light efficiency will be low. This setting effectively increases the light utilization rate of the pixel 20 and increases the light efficiency of the optomechanical structure.

[0040] Of course, the optomechanical structure of the present application also includes an optical lens 40 located on the side of the pixel 20 away from the display panel 10. The optomechanical structure also includes a shell. The above-mentioned optical lens 40 and display panel 10 are both arranged in the shell so that the shell protects the optical lens 40 and the display panel 10.

[0041] It should be noted that the above-mentioned optomechanical structure can be a MicroLED optomechanical structure, and the above-mentioned display panel 10 can be a CMOS backplane. The plurality of pixels 20 are arranged in an array, with the above-mentioned gap between any two adjacent pixels 20. The plurality of pixels 20 are configured to emit light of multiple colors, and the plurality of pixels 20 are capable of emitting at least R (red light), G (green light), and B (blue light).

[0042] like Figure 3 As shown, the light absorbing layer 32 is located on the surface of the reflective layer 31 away from the display panel 10. This configuration allows the light absorbing layer 32 to absorb ghost light reflected from the optical lens 40 and ghost light reflected from the coupling grating 50, thereby preventing these two types of ghost light from re-entering the waveguide and undergoing secondary imaging to form ghost images. This effectively eliminates ghost images without adjusting the angle and size of the optical-mechanical structure, thereby improving the final display effect.

[0043] like Figure 3 、 Figure 5 、 Figure 7 and Figure 8As shown, the side of the reflective layer 31 away from the display panel 10 protrudes from the surface of the pixel 20 away from the display panel 10, and the projection of the portion of the reflective layer 31 protruding from the pixel 20 on the display panel 10 at least partially overlaps with the projection of the pixel 20 on the display panel 10. This arrangement not only ensures that the light absorbing layer 32 can stably absorb ghost light, but also enables the reflective layer 31 to effectively reduce the divergence angle of the pixel 20, thereby increasing the efficiency of the optomechanical structure; refer to FIG. Figure 8 Generally, the volume of the optomechanical structure of an AR head-mounted device is small, so the diameter of the optical lens 40 inside it is small. Therefore, the angle range of light rays participating in the imaging of the optical lens 40 is fixed. If the light-emitting angle of the pixel 20 is larger, the utilization rate of the light rays from the pixel 20 to the exit pupil position of the optomechanical structure will be relatively low. Through the special structural setting of the reflective layer 31, the reflective layer 31 can effectively shrink the light emission angle of the pixel 20, thereby increasing the light efficiency of the optomechanical structure.

[0044] Specifically, the reflective layer 31 includes a first layer 311 and a second layer 312. The first layer 311 is connected to the display panel 10 and fills the gap. The second layer 312 is connected to the surface of the first layer 311 on the side away from the display panel 10. The distance between the second layer 312 and the display panel 10 is greater than the distance between the surface of the pixel 20 on the side away from the display panel 10 and the display panel 10. The projected area of the second layer 312 on the display panel 10 is greater than the projected area of the first layer 311 on the display panel 10. This configuration ensures that the first layer 311 fills the gap between any two adjacent pixels 20, and the second layer 312 is provided to protrude from the pixel 20. The projected area of the second layer 312 on the display panel 10 is greater than the projected area of the first layer 311 on the display panel 10. In other words, the width of the second layer 312 in the gap between any two adjacent pixels 20 is greater than the width of the first layer 311, so as to ensure that the projection of the second layer 312 on the display panel 10 can cover part of the display pixel 20. Figure 7 From the cross-sectional view, the first layer 311 and the second layer 312 on both sides of the pixel 20 can reflect a portion of the large-angle light emitted by the pixel 20 back to the pixel 20 and then emit it at a small angle. The other portion of the large-angle light emitted by the pixel 20 is incident on the first layer 311 and the second layer 312 and then reflected out at a small angle, so that the reflective layer 31 can change the propagation path of the large-angle light emitted by the pixel 20, and the large-angle light is emitted at a small angle through reflection by the reflective layer 31, thereby achieving the contraction of the light emission angle of the pixel 20.

[0045] like Figure 3 and Figure 4As shown, the projected area of the light absorbing layer 32 on the display panel 10 is the same as the projected area of the second layer 312 on the display panel 10. That is, the light absorbing layer 32 conformally covers the surface of the second layer 312 away from the display panel 10. This arrangement makes the display panel 10 have a side with the light absorbing layer 32 as shown in FIG. Figure 4 As shown in the picture on the right, the light reflected back to the display panel 10 by the optical lens 40 and the coupling grating 50 except for the position of the pixel 20 can be absorbed by the light absorption layer 32, thereby ensuring the absorption efficiency of the light absorption layer 32 for ghost light and ensuring the ghost image improvement effect.

[0046] Specifically, the thickness of the first layer 311 is greater than the thickness of the pixel 20, and the sum of the thickness of the second layer 312 and the thickness of the light absorbing layer 32 is less than or equal to half the thickness of the first layer 311. By rationally planning the thicknesses of the first layer 311, the second layer 312, and the light absorbing layer 32, it is advantageous to ensure that the thickness of the first layer 311 is significantly greater than the thickness of the second layer 312. This ensures that the cooperation between the first layer 311 and the second layer 312 can effectively change the emission direction of high-angle light from the pixel 20, thereby narrowing the emission angle of the pixel 20 and increasing the light utilization rate of the pixel 20. This also helps to increase the distance between the light absorbing layer 32 and the display panel 10, ensuring that the light absorbing layer 32 can stably absorb light while preventing the majority of the light emitted by the pixel 20 from being absorbed by the light absorbing layer 32, thereby ensuring the light utilization rate of the pixel 20.

[0047] Specifically, the reflective layer 31 is a metal layer, and the material of the metal layer includes one of gold, silver, aluminum, platinum and rhodium; the metal layer has a better reflective effect, and the use of metal material for the reflective layer 31 is conducive to ensuring the reflective effect and reliability of the reflective layer 31; the color of the light-absorbing layer 32 is black, and the material of the light-absorbing layer 32 includes one of black carbon-based, black low-valent titanium oxide and aniline black. By reasonably selecting the material of the light-absorbing layer 32, it is conducive to ensuring the light absorption characteristics of the light-absorbing layer 32.

[0048] like Figure 6 As shown, the present application also provides a display waveguide device, which includes the above-mentioned optomechanical structure for improving ghost images and an optical waveguide structure. The optical waveguide structure includes a waveguide plate and an in-coupling grating 50 and an out-coupling grating 60 disposed on the waveguide plate. The optomechanical structure is used to emit image light into the optical waveguide structure. This arrangement allows the second reflected light 2 reflected by the optical lens 40 in the optomechanical structure and the first reflected light 1 reflected by the surface of the in-coupling grating 50 to be absorbed by the light absorption layer 32 in the optomechanical structure. This allows the optomechanical structure to eliminate the above-mentioned two types of ghost image light, preventing the second reflected light 2 and the first reflected light 1 from entering the optical waveguide structure and participating in imaging, effectively improving the ghost image of the display waveguide device and ensuring imaging quality.

[0049] like Figure 9As shown, the present application also provides a method for manufacturing an optomechanical structure for improving ghost images. The manufacturing method is used to manufacture the above-mentioned optomechanical structure for improving ghost images, and the manufacturing method includes:

[0050] Step S1: obtaining the light emission wavelength range of a plurality of pixels 20 of the optomechanical structure;

[0051] Step S2: obtaining a material of the light absorption layer 32 that matches the light emission wavelength range of the plurality of pixels 20;

[0052] Step S3: Obtaining a display panel 10 of an opto-mechanical structure, wherein the plurality of pixels 20 include red pixels 20, green pixels 20, and blue pixels 20, and obtaining a size of the reflective layer 31 based on the heights of the plurality of pixels 20 on the display panel 10, the gaps between the plurality of pixels 20, and the size of the edges between the plurality of pixels 20 and the display panel 10;

[0053] Step S4: forming a reflective layer 31 on the surface of the display panel 10 having the pixels 20 by a patterning process of deposition or coating;

[0054] Step S5 : forming a light absorbing layer 32 on the surface of the reflective layer 31 away from the display panel 10 by a patterning process such as deposition or coating.

[0055] It should be noted that the emission wavelength of pixel 20 in step S1 is generally between 400 nm and 720 nm. The material of light-absorbing layer 32 in step S2 can be a black carbon-based material, black low-valent titanium oxide, aniline black, or other materials. The dimensions of reflective layer 31 in step S3 include the length, width, and height of reflective layer 31, which are generally between 3 μm and 15 μm. The material of reflective layer 31 can be one of gold, silver, aluminum, platinum, rhodium, and the like.

[0056] Specifically, the manufacturing method further includes step S6, following step S5, of obtaining a collimated white light source and illuminating the light absorbing layer 32 with the white light source to determine whether the light absorption performance of the light absorbing layer 32 meets the requirements. During step S6, if the light absorption performance of the light absorbing layer 32 meets the requirements, the manufacturing method further includes step S7, following step S6, wherein step S7 includes illuminating the plurality of pixels 20. If the light absorption performance of the light absorbing layer 32 does not meet the requirements, steps S2 through S6 are repeated.

[0057] It should be noted that the above-mentioned judgment on whether the light absorption performance of the light absorption layer 32 meets the requirements is to use a light energy detection device to respectively detect the light intensity before and after the light absorption layer 32 is set. If the light intensity after the light absorption layer 32 is set is less than 5% of the light intensity without the light absorption layer 32, the requirements are met.

[0058] Specifically, step S7 also includes: after lighting up multiple pixels 20, determining whether the divergence angles of the multiple pixels 20 meet the preset requirements; when the divergence angles of the multiple pixels 20 do not meet the preset requirements, repeating steps S3 to S7; when the divergence angles of the multiple pixels 20 meet the preset requirements, the manufacturing method ends to form the desired optomechanical structure for improving ghost images.

[0059] Obviously, the embodiments described above are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of the present invention.

[0060] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they indicate the presence of features, steps, tasks, devices, components and / or combinations thereof.

[0061] It should be noted that the terms "first," "second," and the like in the specification and claims of this application and the accompanying drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or precedence. It should be understood that the terms used in this manner are interchangeable where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than that illustrated or described herein.

[0062] The foregoing description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that various modifications and variations of the present invention are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention are intended to be within the scope of protection of the present invention.

Claims

1. A method for manufacturing an optomechanical structure for improving ghost images, characterized in that: The optical-mechanical structure comprises a display panel (10) and a filling layer, wherein a plurality of pixels (20) are provided on the display panel (10), and gaps exist between the plurality of pixels (20); the filling layer is provided on a surface of a side of the display panel (10) having the plurality of pixels (20), and only the gaps between the plurality of pixels (20) are filled with the filling layer, and the filling layer comprises at least a reflective layer (31) and a light-absorbing layer (32); the manufacturing method comprises: Step S1: obtaining the light emission wavelength range of the plurality of pixels (20) of the optomechanical structure; Step S2: obtaining a material of the light absorbing layer (32) that matches the luminous wavelength range of the plurality of pixels (20); Step S3: obtaining the display panel (10) of the optomechanical structure, and obtaining the size of the reflective layer (31) according to the heights of the plurality of pixels (20) on the display panel (10), the gaps between the plurality of pixels (20), and the size of the edges between the plurality of pixels (20) and the display panel (10); Step S4: using a patterning process of deposition or coating to generate the reflective layer (31) on the surface of the display panel (10) on one side having the pixel (20); Step S5: using a patterning process of deposition or coating to generate the light absorbing layer (32) on the surface of the reflective layer (31) on the side away from the display panel (10).

2. The method for manufacturing an optomechanical structure for improving ghost images according to claim 1, wherein: The production method further includes step S6 after step S5: A white light source is obtained, and the light absorbing layer (32) is illuminated by the white light source to determine whether the light absorbing performance of the light absorbing layer (32) meets the requirements.

3. The method for manufacturing an optomechanical structure for improving ghost images according to claim 2, wherein: In the process of judging whether the light absorption performance of the light absorption layer (32) meets the requirements in step S6, When the light absorption performance of the light absorption layer (32) meets the requirements, the manufacturing method further includes step S7 located after step S6, wherein step S7 includes lighting up a plurality of pixels (20); When the light absorption performance of the light absorption layer (32) does not meet the requirements, repeat steps S2 to S6.

4. The method for manufacturing an optomechanical structure for improving ghost images according to claim 3, wherein: The step S7 further comprises: Determining whether the divergence angles of the plurality of pixels (20) meet preset requirements; When the divergence angles of the plurality of pixels (20) do not meet the preset requirements, repeating steps S3 to S7; When the divergence angles of the plurality of pixels (20) meet the preset requirements, the manufacturing method ends.

5. The method for manufacturing an optomechanical structure for improving ghost images according to claim 1, wherein: The light absorbing layer (32) is located on a surface of the reflective layer (31) that is away from the display panel (10).

6. The method for manufacturing an optomechanical structure for improving ghost images according to claim 5, wherein: The side of the reflective layer (31) away from the display panel (10) is protruded from the surface of the pixel (20) away from the display panel (10), and the projection of the portion of the reflective layer (31) protruding from the pixel (20) on the display panel (10) at least partially overlaps with the projection of the pixel (20) on the display panel (10).

7. The method for manufacturing an optomechanical structure for improving ghost images according to claim 5, wherein: The reflective layer (31) comprises a first layer (311) and a second layer (312), wherein the first layer (311) is connected to the display panel (10) and fills the gap, and the second layer (312) is connected to a surface of the first layer (311) that is away from the display panel (10), and the distance between the second layer (312) and the display panel (10) is greater than the distance between a surface of the pixel (20) that is away from the display panel (10) and the display panel (10), and the projection area of the second layer (312) on the display panel (10) is greater than the projection area of the first layer (311) on the display panel (10).

8. The method for manufacturing an optomechanical structure for improving ghost images according to claim 7, wherein: The projection area of the light absorbing layer (32) on the display panel (10) is consistent with the projection area of the second layer (312) on the display panel (10).

9. The method for manufacturing an optomechanical structure for improving ghost images according to claim 7, wherein: The thickness of the first layer (311) is greater than the thickness of the pixel (20), and the sum of the thickness of the second layer (312) and the thickness of the light absorbing layer (32) is less than or equal to half the thickness of the first layer (311).

10. The method for manufacturing an optomechanical structure for improving ghost images according to any one of claims 1, 5 to 9, wherein: The reflective layer (31) is a metal layer, and the material of the metal layer includes one of gold, silver, aluminum, platinum and rhodium; and / or The material of the light absorbing layer (32) includes one of black carbon-based, black low-valent titanium oxide and aniline black.

11. A display waveguide device, characterized in that: include: An optomechanical structure manufactured by the method for manufacturing an optomechanical structure for improving ghost images according to any one of claims 1, 5 to 10; An optical waveguide structure comprises a waveguide plate and an in-coupling grating (50) and an out-coupling grating (60) arranged on the waveguide plate, and the optomechanical structure is used for emitting image light to the optical waveguide structure.

Images