A handling robot and handling system

By designing the pickup and buffer components, the problem of poor reliability in picking up solar silicon wafers under vacuum adsorption was solved, achieving a highly safe and reliable pickup and unloading process, and improving the automation level of the handling system.

CN116062475BActive Publication Date: 2025-12-09BEIJING UNIV OF TECH
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Patent Information

Application Number
CN202310222095.0
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-03-09
Publication Date
2025-12-09
Estimated Expiration
2043-03-09

AI Technical Summary

Technical Problem

In existing technologies, vacuum adsorption methods have poor reliability in picking up and handling thin and fragile solar silicon wafers, and there are problems such as stress concentration and vacuum leakage, which affect the safety and reliability of picking up and handling.

Method used

The system combines a pickup assembly and a buffer assembly. The pickup assembly includes a pickup head and multiple pickup bristles. Pressure changes within the drive cavity cause deformation of the deformable part, and tangential force is applied to make the pickup bristles adhere to the object. The buffer assembly compensates for the deformation displacement of the drive cavity through elastic elements and sliding connections, ensuring the reliability and safety of pickup.

Benefits of technology

This improves the safety and reliability of solar silicon wafer picking, ensures the stability of the picking and unloading process, and enhances the automation of the handling process.

✦ Generated by Eureka AI based on patent content.

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Abstract

The application discloses a carrying manipulator, which comprises a pickup assembly and a buffer assembly. The pickup assembly comprises a pickup head and pickup bristles, and the buffer assembly comprises a buffer support rod and a buffer sleeve. In operation, when the pressure in the driving cavity is lower than the atmospheric pressure by air extraction, the driving cavity is contracted inward, the deformation part is deformed to exert a force on the pickup part, the pickup part is arranged around the deformation part, the pickup part transmits a tangential force to the pickup bristles, the pickup bristles are bent to generate a normal adhesion force to adhere to an object, the pickup bristles can be fully contacted with the object to be carried, and the pickup safety factor is improved. The buffer support rod is connected with the pickup head, the buffer sleeve can be connected with external equipment, the external equipment drives the carrying manipulator to reach the object to be carried, and the buffer sleeve and the buffer support rod are matched to compensate for the displacement amount of the driving cavity contraction deformation, so that the pickup bristles are contacted with the object to be carried. Meanwhile, the application also provides a carrying system comprising the carrying manipulator.
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Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of pick-up and carrying equipment and its peripheral facilities, in particular to a carrying manipulator and a carrying system. BACKGROUND

[0002] With the high-speed development of information technology and advanced manufacturing technology, there is a demand for reliable carrying of a large number of light, thin, fragile and porous target objects in the production and manufacturing process, such as solar silicon wafers, wafers, liquid crystal display screens (OLED panels) and the like.

[0003] Taking solar silicon wafers as an example, in the production and manufacturing process, solar silicon wafers need to be packaged and integrated in solar panels. Due to the characteristics of solar silicon wafers, such as lightness, thinness, softness, fragility and microstructure on the surface, the traditional operation mode represented by vacuum adsorption has many shortcomings. For example, the vacuum chuck only contacts the solar silicon wafers at the edge, which causes stress concentration and easily causes the solar silicon wafers to break; secondly, the microstructure on the surface of the solar silicon wafers easily causes vacuum leakage, causing adhesion failure, reducing the reliability and safety of pick-up and carrying.

[0004] Therefore, how to change the present situation that the pick-up and carrying reliability of light, thin, fragile and porous objects such as solar silicon wafers is poor by using the vacuum adsorption mode in the prior art has become a problem to be solved by those skilled in the art. SUMMARY

[0005] The purpose of the present application is to provide a carrying manipulator and a carrying system to solve the problems existing in the prior art and improve the pick-up and carrying reliability and safety of objects such as solar silicon wafers.

[0006] To achieve the above-mentioned purpose, the present application provides the following scheme: the present application provides a carrying manipulator, comprising:

[0007] a pick-up assembly, the pick-up assembly comprising a pick-up head and pick-up bristles, the pick-up head being a hollow structure, the pick-up head having a driving cavity, the driving cavity being connected with a driver, the driver being capable of changing the pressure of the driving cavity; the pick-up head comprising a deformation part and a pick-up part, the pick-up head being made of an elastic material, the change of the pressure in the driving cavity being capable of driving the deformation part to deform, the pick-up part being arranged around the deformation part, the pick-up bristles being connected with the pick-up part, the number of the pick-up bristles being multiple;

[0008] a buffer assembly, the buffer assembly comprising a buffer strut and a buffer sleeve, one end of the pick-up head away from the pick-up part being connected with the buffer strut, the buffer sleeve being slidably connected with the buffer strut and an elastic member being arranged therebetween, the buffer sleeve being capable of being connected with an external device.

[0009] Preferably, the deformation part is a curved surface structure protruding towards the direction away from the pickup bristle, the pickup part is annular, and the inner edge of the pickup part is connected with the outer edge of the deformation part.

[0010] Preferably, the axial section of the pickup bristle is wedge-shaped, and the larger end of the cross-sectional area of the pickup bristle is fixed to the pickup part.

[0011] Preferably, the pickup bristles are arranged in an array.

[0012] Preferably, the pickup assembly further comprises a bellows, the buffer support rod is connected with the pickup head by the bellows, the buffer support rod has a support rod channel, and the driving cavity is connected with the driver by the inner cavity of the bellows and the support rod channel.

[0013] Preferably, the bellows is sealingly connected with the pickup head, and the buffer support rod is threadedly connected with the bellows.

[0014] Preferably, the number of layers of the bellows is 0.5-3 layers.

[0015] Preferably, the buffer assembly further comprises a self-locking nut, the buffer sleeve is slidably sleeved on the outside of the buffer support rod, the buffer sleeve is threadedly connected with the self-locking nut, and the buffer sleeve can be connected with the external device by the self-locking nut.

[0016] Preferably, the buffer support rod is connected with a stop block at the end away from the bellows.

[0017] The application further provides a carrying system comprising the carrying manipulator and an external device, the external device is connected with the buffer sleeve, and the external device can drive the carrying manipulator to move.

[0018] The application has the following technical effects compared with the prior art.

[0019] The carrying manipulator of the present application, when the pressure in the driving cavity is less than the atmospheric pressure after the driver pumps air out of the driving cavity, the driving cavity shrinks inward, the deformation part deforms to exert force on the pickup part, the pickup part is arranged around the deformation part, the pickup part transmits tangential force to the pickup bristles, the pickup bristles are bent to generate normal adhesion force to adhere to the object, and the pickup bristles can fully contact the object to be carried to improve the pickup safety factor; the buffer support rod is connected with the pickup head, the buffer sleeve is slidingly connected with the buffer support rod and elastic elements are arranged therebetween, the buffer sleeve can be connected with external equipment, the external equipment drives the carrying manipulator to the object to be carried, and the buffer sleeve and the buffer support rod cooperate to compensate for the displacement amount of the driving cavity shrinkage and deformation, so as to ensure that the pickup bristles contact the object to be carried and ensure the pickup reliability and safety; after the object to be carried is carried to the destination, the driver inflates the driving cavity, the deformation part reversely deforms to restore the initial state, and the pickup bristles correspondingly restore the initial state to realize unloading of the object to be carried. The carrying manipulator of the present application uses the pickup assembly to pick up the object to be carried, the buffer assembly can compensate for the displacement caused by the deformation of the driving cavity, and the safety and reliability of the pickup action are further improved.

[0020] Meanwhile, the present application also provides a carrying system comprising the carrying manipulator and external equipment, the external equipment drives the carrying manipulator to the object to be carried to improve the automation degree of the carrying system. BRIEF DESCRIPTION OF DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed in the embodiments. Obviously, the drawings in the following description only constitute some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without any creative effort.

[0022] Figure 1 FIG. 1 is a structural schematic diagram of the carrying manipulator of the present application;

[0023] Figure 2 FIG. 2 is a working process schematic diagram of the carrying manipulator of the present application;

[0024] Figure 3 FIG. 3 is a partial structure schematic diagram of the carrying manipulator of the present application in the initial state;

[0025] Figure 4 FIG. 4 is an enlarged schematic diagram of part of the structure in FIG. 3; Figure 3

[0026] Figure 5 FIG. 5 is a partial structure schematic diagram of the carrying manipulator of the present application in the pickup state;

[0027] Figure 6 FIG. 6 is an enlarged schematic diagram of part of the structure in FIG. 5;​Figure 5 An enlarged schematic view of a middle part structure.

[0028] Wherein, 100 is a carrying manipulator;

[0029] 1 is a pickup head, 101 is a driving cavity, 102 is a deformation part, 103 is a pickup part, 2 is a pickup bristle, 3 is a buffer support rod, 4 is a buffer sleeve, 5 is a bellows, 6 is a self-locking nut, 7 is a stop block, 8 is a connecting piece, and 9 is an article to be carried. DETAILED DESCRIPTION

[0030] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application.

[0031] The present application aims to provide a carrying manipulator and a carrying system to solve the problems existing in the prior art and improve the reliability and safety of picking and carrying articles such as solar silicon wafers.

[0032] In order to make the above-mentioned purposes, features and advantages of the present application more apparent and easy to understand, the present application will be further described in detail below with reference to the drawings and specific embodiments.

[0033] The present application provides a carrying manipulator 100, which comprises a pickup assembly and a buffer assembly. The pickup assembly comprises a pickup head 1 and a pickup bristle 2. The pickup head 1 is hollow and has a driving cavity 101. The driving cavity 101 is connected with a driver, and the driver can change the pressure in the driving cavity 101. The pickup head 1 comprises a deformation part 102 and a pickup part 103. The pickup head 1 is made of an elastic material. The change of the pressure in the driving cavity 101 can drive the deformation part 102 to deform. The pickup part 103 is arranged around the deformation part 102. The pickup bristle 2 is connected with the pickup part 103, and the number of the pickup bristles 2 is multiple. The buffer assembly comprises a buffer support rod 3 and a buffer sleeve 4. The end of the pickup head 1 away from the pickup part 103 is connected with the buffer support rod 3. The buffer sleeve 4 is slidably connected with the buffer support rod 3 and an elastic member is arranged between the buffer sleeve 4 and the buffer support rod 3. The buffer sleeve 4 can be connected with an external device.

[0034] The carrying manipulator 100 of the present application, when the pressure in the driving cavity 101 is less than the atmospheric pressure (the atmospheric pressure is taken as the standard here, which means that when the carrying environment pressure is in a special condition, the carrying environment pressure should be taken as the reference), the driving cavity 101 shrinks inward, the deformation part 102 deforms to exert a force on the pickup part 103, the pickup part 103 is arranged around the deformation part 102, the pickup part 103 transmits a tangential force to the pickup bristles 2, the pickup bristles 2 are bent to generate a normal adhesion force to adhere to the object, and the pickup bristles 2 can fully contact the to-be-carried object 9 to improve the pickup safety factor; the buffer support rod 3 is connected with the pickup head 1, the buffer sleeve 4 is slidingly connected with the buffer support rod 3 and an elastic member is arranged between the buffer sleeve 4 and the buffer support rod 3, the buffer sleeve 4 can be connected with an external device, the external device drives the carrying manipulator 100 to the to-be-carried object 9, and the buffer sleeve 4 cooperates with the buffer support rod 3 to compensate for the displacement amount of the driving cavity 101 shrinkage and deformation, so as to ensure that the pickup bristles 2 contact the to-be-carried object 9 and ensure the pickup reliability and safety; after the to-be-carried object 9 is carried to the destination, the driver inflates the driving cavity 101, the deformation part 102 reversely deforms to restore the initial state, and the pickup bristles 2 correspondingly restore the initial state to realize the unloading of the to-be-carried object 9. The carrying manipulator 100 of the present application uses the pickup assembly to pick up the to-be-carried object 9, and the buffer assembly can compensate for the displacement of the driving cavity 101 deformation, further improving the safety and reliability of the pickup action. It should be explained here that the driver can select a gas pressure pipeline to inflate and deflate the driving cavity 101; in actual application, the driver can also select a gas pump, or connect the driving cavity 101 with other devices such as robots, and use the control gas circuit of the robot to control the working state of the driving cavity 101.

[0035] In the present embodiment, the deformation part 102 is a curved surface structure protruding in the direction away from the pickup bristles 2, which avoids affecting the contact between the pickup bristles 2 and the to-be-carried object 9, and the pickup part 103 is annular, the inner edge of the pickup part 103 is connected with the outer edge of the deformation part 102, the pickup part 103 is arranged around the deformation part 102, which increases the contact area between the deformation part 102 and the to-be-carried object 9 and improves the stress uniformity of the to-be-carried object 9.

[0036] In the present embodiment, the axial section of the pickup bristle 2 is wedge-shaped, the larger cross-sectional area end of the pickup bristle 2 is fixed to the pickup part 103 to enhance the connection strength between the pickup bristle 2 and the pickup part 103, and the smaller cross-sectional area end of the pickup bristle 2 contacts the to-be-carried object, which can contact the microstructure on the surface of the to-be-carried object 9 such as a solar silicon wafer to increase the contact area with the to-be-carried object 9 and improve the carrying reliability. It should be explained here that the pickup bristle 2 is a bionic structure, which is made by imitating the bristle (the hard hair of mammals, which helps the animal body to move).

[0037] In order to further improve the stress uniformity of the to-be-carried article 9, the picking bristles 2 are arranged in an array, so that the picking bristles 2 are in uniform contact with the to-be-carried article 9, thereby ensuring the safety of the to-be-carried article 9.

[0038] Specifically, the picking assembly further comprises a bellows 5, the buffer support rod 3 is connected with the picking head 1 by the bellows 5, the bellows 5 can be deformed to adapt to various angles of the to-be-carried article 9, so as to ensure that the picking bristles 2 can be in contact with the to-be-carried article 9, and further improve the picking reliability; in addition, the buffer support rod 3 has a support rod channel, the driving cavity 101 is connected with the driver in communication by the inner cavity of the bellows 5 and the support rod channel, and it is convenient to inflate or deflate the driving cavity 101.

[0039] In order to avoid leakage, the bellows 5 is sealingly connected with the picking head 1, in actual application, the buffer support rod 3 is threadedly connected with the bellows 5, which is convenient for disassembly and assembly, and sealing threads can be selected to avoid leakage, thereby ensuring the working reliability of the driving cavity 101.

[0040] In the embodiment, the number of layers of the bellows 5 is 0.5 layers to 3 layers, which can be determined according to the specific specifications of the carrying manipulator 100, carrying requirements, installation space and the like in actual operation, thereby improving the flexible adaptability of the carrying manipulator 100.

[0041] More specifically, the buffer assembly further comprises a self-locking nut 6, the buffer sleeve 4 is slidably sleeved on the outside of the buffer support rod 3, the buffer sleeve 4 is threadedly connected with the self-locking nut 6, the connection position of the buffer sleeve 4 and the self-locking nut 6 can be adjusted, thereby improving the flexible adaptability of the buffer assembly, and the buffer sleeve 4 can be connected with an external device by the self-locking nut 6, in the embodiment, a connecting piece 8 of the external device is sleeved on the buffer sleeve 4, the self-locking nuts 6 are arranged at the upper and lower ends of the connecting piece 8 of the external device, the two self-locking nuts 6 fix the position of the connecting piece 8, the relative positions of the two self-locking nuts 6 and the buffer sleeve 4 are adjusted, and then the connection position of the carrying manipulator 100 and the external device is adjusted, so as to meet different carrying requirements.

[0042] In order to avoid that the buffer sleeve 4 is slipped off from the buffer support rod 3, the end of the buffer support rod 3 away from the bellows 5 is connected with a stop block 7, thereby improving the structural stability of the buffer assembly.

[0043] Further, the present application further provides a carrying system, which comprises the above-mentioned carrying manipulator 100 and further comprises an external device, the external device is connected with the buffer sleeve 4, and the external device can be a robot, and the external device can drive the carrying manipulator 100 to move, in actual application, a plurality of groups of carrying manipulators 100 can be arranged according to actual needs, thereby improving the working efficiency.

[0044] The conveying manipulator 100, the driving cavity 101 of the pickup assembly utilizes the pickup bristles 2 to fully contact the to-be-conveyed article 9, the bellows 5 is matched with the buffer assembly to compensate the displacement amount of the shrinkage deformation of the driving cavity 101, and the pickup stability is further improved.When the suction in the driving cavity 101 is in a negative pressure state, as shown in Figure 5 The deformation part 102 of the side wall and the bottom of the driving cavity 101 is deformed under the action of the pressure difference to provide tangential loading force for the pickup bristles 2, so that the van der waals adhesion force of the annularly distributed pickup bristles 2 is generated, and the vacuum adhesion force is formed between the deformation part 102 and the to-be-conveyed article 9; when the negative pressure is removed or the driving cavity 101 is in a positive pressure state, the deformation part 102 is reversely deformed, and the driving cavity 101 and the pickup bristles 2 are separated from the article.

[0045] The principle and implementation mode of the present application are described by applying specific examples in the present application, and the above embodiment is only used to help understand the method and core idea of the present application; at the same time, for those skilled in the art, according to the idea of the present application, the specific implementation mode and application range will be changed. In view of the above, the content of the specification should not be understood as a limitation of the present application.

Claims

1. A transfer robot characterized by comprising: include: A pickup assembly includes a pickup head and pickup bristles. The pickup head has a hollow structure and a drive cavity connected to an actuator, which can change the pressure in the drive cavity. The pickup head includes a deformable portion and a pickup portion. The pickup head is made of an elastic material. Pressure changes in the drive cavity can cause the deformable portion to deform. The pickup portion is arranged around the deformable portion. The pickup bristles are connected to the pickup portion, and the number of pickup bristles is multiple. A buffer assembly includes a buffer support rod and a buffer sleeve. The pickup head, at one end away from the pickup section, is connected to the buffer support rod. The buffer sleeve is slidably connected to the buffer support rod, and an elastic element is disposed between them. The buffer sleeve can be connected to an external device. The pickup assembly also includes a bellows, through which the buffer support rod is connected to the pickup head. The buffer support rod has a support rod channel, and the drive cavity communicates with a driver via the inner cavity of the bellows and the support rod channel. The buffer assembly also includes a self-locking nut, through which the buffer sleeve is slidably fitted onto the outside of the buffer support rod. The buffer sleeve is threadedly connected to the self-locking nut, and the buffer sleeve can be connected to the external device via the self-locking nut. The bellows is sealed to the pickup head, and the buffer support rod is threaded to the bellows; a stop block is connected to the end of the buffer support rod away from the bellows.

2. The handling robot according to claim 1, characterized in that: The deformable part is a curved surface structure that protrudes away from the direction of the picking bristles, and the picking part is annular, with the inner edge of the picking part connected to the outer edge of the deformable part.

3. The handling robot of claim 1, wherein: The axial cross-section of the picking bristles is wedge-shaped, and the end with the larger cross-sectional area of ​​the picking bristles is fixed to the picking part.

4. The handling robot of claim 1, wherein: The picking bristles are arranged in an array.

5. The handling robot of claim 1, wherein: The number of corrugated pipe layers is 0.5 to 3.

6. A handling system comprising the handling robot of any one of claims 1-5, characterized in that: It also includes external equipment, which is connected to the buffer sleeve and can drive the handling robot to move.

Citation Information

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