A secondary imaging layout splitting method, a secondary layout splitting system and a computer medium

Abstract

The present application relates to the field of photoetching technology, and particularly relates to a secondary imaging layout splitting method, a secondary layout splitting system and a computer medium, the secondary imaging layout splitting method specifically comprises the following steps: obtaining an initial layout; constructing a splitting model based on the obtained initial layout; obtaining preset parameters and a preset parameter function relationship between adjacent patterns based on the constructed splitting model; comparing the value of the preset parameter function relationship between the adjacent patterns with a preset threshold, pre-splitting the initial layout based on the comparison result, and obtaining a pre-splitting layout; and combining the pre-splitting layout with the splitting model to obtain a required splitting layout. The relationship between patterns will affect the effect of layout splitting, and by this method, all pattern relationships in the secondary imaging layout can be analyzed and optimized, and the layout meeting the requirements can be split.

Description

[Technical Field]

[0001] This invention relates to the field of photolithography, and in particular to a method for splitting a secondary imaging pattern, a system for splitting a secondary pattern, and a computer medium. [Background Technology]

[0002] The ever-increasing integration density of large-scale semiconductor integrated circuits has pushed existing hardware manufacturing capabilities, such as lithography machine resolution, to near physical limits, making significant breakthroughs unlikely in the short term. One direct manifestation of integration density is the spacing between patterns in the chip layout. As integration density increases, the spacing between patterns decreases. When the distance between patterns is less than the resolution of current lithography machines, these locations in the layout will stick together after exposure, rendering the chip unusable. This means that current hardware is insufficient to fabricate such a chip layout. To further improve the manufacturing process, the industry has proposed a technical solution: secondary imaging technology.

[0003] The relationships between patterns in secondary imaging technology affect the layout splitting effect. To obtain a better splitting effect, it is necessary to analyze all the pattern relationships in the chip. These pattern relationships have a non-linear and complex relationship with the pattern splitting result. To split and optimize the entire chip design, analyzing these relationships is a major challenge to memory and time performance. [Summary of the Invention]

[0004] To address the issue of improving the resolution of secondary imaging layouts, this invention provides a method, system, and computer medium for secondary imaging layout splitting.

[0005] The present invention provides a method for splitting a secondary imaging layout, which specifically includes the following steps: obtaining an initial layout; constructing a splitting model based on the obtained initial layout; obtaining preset parameters and preset parameter function relationships between adjacent graphics based on the constructed splitting model; comparing the values ​​of the preset parameter function relationships between adjacent graphics with preset thresholds, and pre-splitting the initial layout based on the comparison results to obtain a pre-splitting layout; and optimizing the pre-splitting layout in conjunction with the splitting model to obtain the required split layout.

[0006] Preferably, the preset parameters include the distance between adjacent graphics and the projection length of their projections at the corresponding distances. The preset parameter function is the sum of the products of the difference between the distances between all line segment pairs of adjacent graphics and a preset threshold, and the projection length. Pre-splitting the initial layout based on the comparison results specifically includes the following steps: obtaining the distances between all line segment pairs of adjacent graphics in the initial layout and comparing them to obtain the minimum distance; comparing the minimum distance with a preset threshold; if the minimum distance is greater than the preset threshold, it is not considered; if the minimum distance is less than the preset threshold, obtaining all line segment pairs in adjacent graphics whose distances are less than the preset threshold; substituting the preset parameter function of the obtained line segment pairs that meet the conditions into a preset formula, and pre-splitting the initial layout based on the output results of the preset formula.

[0007] Preferably, when pre-splitting adjacent graphics with a minimum distance less than a preset threshold, they are preferentially grouped into different groups.

[0008] Preferably, the secondary imaging layout splitting method further includes splitting adjacent graphics with a minimum distance greater than a preset threshold. The specific splitting includes the following steps: obtaining all line segment pairs in adjacent graphics where the distance is greater than the preset threshold; substituting the obtained line segment pairs into a preset formula; when the projection length of one graphic on another graphic reaches its maximum value, defining the graphic as a standard graphic; when the distance relationship and the corresponding projection length relationship between the standard graphic and adjacent graphics reach their maximum values, grouping the adjacent graphics and the standard graphic into the same group; repeating the above operations, and using the grouped groups as the inter-group splitting results.

[0009] Preferably, pre-splitting the initial layout further includes splitting the grouped graphics in the inter-group splitting results, specifically including the following steps: performing preliminary coloring on the graphics in each group according to the steps of obtaining the inter-group splitting results to obtain the intra-group coloring results; the inter-group splitting results and the intra-group coloring results are used together as the pre-splitting results.

[0010] Preferably, the preset formula is as follows: in, The value of f can be 0 or 1.

[0011] Preferably, the parameters obtained from the pre-split layout are all nonlinear relationships, and the optimization of the pre-split layout further includes the following transformation and solution steps: transforming the nonlinear relationships into parameters of a constrained linear programming based on a preset mixed integer linear programming model; and solving for the parameters of the constrained linear programming.

[0012] Preferably, the method for optimizing the pre-split layout in conjunction with the splitting model includes performing calculation optimization using a preset function, wherein the preset function is: Where x represents the (N+M) parameters to be optimized, all of which take values ​​of 0 or 1. The first N parameters represent the splitting state of each group of graphics, and the (N+1) to (N+M)th parameters indicate whether the Mth cost value is 0. This represents the constraint matrix, and B is used to represent the boundary of the constraints.

[0013] To address the aforementioned technical problems, this invention also provides a secondary imaging layout splitting system for splitting a secondary imaging layout using the secondary imaging layout splitting method described above. The system includes a data analysis module, a data processing module, and an execution module. The data analysis module acquires the initial layout, analyzes the graphic information, and then transmits the analysis results to the data processing module. The data processing module simulates the splitting of the graphic and transmits the splitting instructions to the execution module. The execution module receives the analysis results and instructions from the data processing module and executes the graphic splitting instructions.

[0014] To solve the above-mentioned technical problems, the present invention also provides a computer medium, including a memory, a processor, and a computer program stored in the memory and executable on the processor. When the processor executes the computer program, it implements the secondary imaging layout splitting method as described above.

[0015] Compared with the prior art, the secondary imaging layout splitting method, secondary layout splitting system, and computer medium of the present invention have the following advantages:

[0016] 1. The secondary imaging layout splitting method of the present invention specifically includes the following steps: obtaining an initial layout; constructing a splitting model based on the obtained initial layout; obtaining preset parameters and preset parameter function relationships between adjacent graphics based on the constructed splitting model; comparing the values ​​of the preset parameter function relationships between adjacent graphics with preset thresholds, and pre-splitting the initial layout based on the comparison results to obtain a pre-splitting layout; and optimizing the pre-splitting layout in conjunction with the splitting model to obtain the required splitting layout. The relationship between graphics affects the layout splitting effect. This method can analyze and optimize all graphic relationships in the secondary imaging layout and split it into a layout that meets the requirements.

[0017] 2. The secondary imaging layout splitting method of the present invention includes preset parameters including the distance between adjacent graphics and the projection length of the projection between them at the corresponding distance. The preset parameter function relationship is the sum of the product of the difference between the distance between all line segment pairs of adjacent graphics and a preset threshold and the projection length. The pre-splitting of the initial layout based on the comparison result specifically includes the following steps: obtaining the distance between all line segment pairs of adjacent graphics in the initial layout and comparing them to obtain the minimum distance; comparing the minimum distance with the preset threshold; if the minimum distance is greater than the preset threshold, it is not considered; if the minimum distance is less than the preset threshold, obtaining all line segment pairs in the adjacent graphics whose distance is less than the preset threshold; substituting the preset parameter function relationship of the obtained line segment pairs that meet the conditions into the preset formula, and outputting the result based on the preset formula to pre-splitting the initial layout. The distance and projection length relationships between adjacent graphics in the layout have practical physical significance. Using these as the basis for layout splitting parameters makes the results more representative and reliable. This method defines splitting standards for different graphics and splits the initial layout based on the defined results, making the results more targeted and effectively splitting graphics with excessively narrow spacing to meet density balance requirements.

[0018] 3. In the secondary imaging layout splitting method of the present invention, when pre-splitting adjacent graphics with a minimum distance less than a preset threshold, they are preferentially grouped into different groups. This method prevents the splitting of graphics with small spacing from failing to significantly increase the spacing, thus affecting the overall effect.

[0019] 4. The secondary imaging layout splitting method of the present invention further includes splitting adjacent graphics with a minimum distance greater than a preset threshold. Specifically, the splitting includes the following steps: obtaining all line segment pairs in adjacent graphics where the distance is greater than the preset threshold; substituting the obtained line segment pairs into a preset formula; defining the graphic as a standard graphic when the projection length of one graphic on another graphic reaches its maximum value; dividing the adjacent graphics and the standard graphic into the same group when the distance relationship and corresponding projection length relationship between the standard graphic and adjacent graphics reach their maximum value; repeating the above operations, and using the divided groups as the inter-group splitting results. This method not only splits graphics with small spacing but also graphics with large spacing, thereby completing the splitting of the overall layout, better meeting the layout splitting requirements, and achieving graphic density balance.

[0020] 5. The secondary imaging layout splitting method of the present invention further includes splitting the grouped graphics in the inter-group splitting results by pre-splitting the initial layout. Specifically, it includes the following steps: performing preliminary coloring on the graphics within each group according to the steps for obtaining the inter-group splitting results to obtain intra-group coloring results; the inter-group splitting results and intra-group coloring results are used together as the pre-splitting results. The pre-splitting results are used as a whole in subsequent steps for optimization. This method can obtain more comprehensive and refined graphic splitting results, making the data results more universal.

[0021] 6. The secondary imaging layout splitting method of the present invention uses nonlinear relationships for the parameters obtained from the pre-split layout. The optimization of the pre-split layout further includes the following transformation and solution steps: transforming the nonlinear relationships into parameters of a constrained linear programming model based on a preset mixed-integer linear programming model; and solving for the parameters of the constrained linear programming. This method transforms the difficult-to-solve nonlinear parameter optimization problem into a linear programming problem of parameters, ensuring highly specific results and effectively addressing current technical problems.

[0022] 7. This invention also provides a secondary imaging layout splitting system for splitting a secondary imaging layout using the secondary imaging layout splitting method described above. The system includes a data analysis module, a data processing module, and an execution module. The data analysis module acquires the initial layout and analyzes the graphic information, then transmits the analysis results to the data processing module. The data processing module simulates the splitting of the graphic and transmits the splitting instructions to the execution module. The execution module receives the analysis results and instructions from the data processing module and executes the graphic splitting instructions. This system has the same beneficial effects as the aforementioned secondary imaging layout splitting method, and will not be elaborated upon here.

[0023] 8. The present invention also provides a computer medium, including a memory, a processor, and a computer program stored in the memory and executable on the processor. When the processor executes the computer program, it implements the secondary imaging layout splitting method described above. It has the same beneficial effects as the aforementioned secondary imaging layout splitting method, and will not be elaborated further here. [Attached Image Description]

[0024] To more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a flowchart of the steps of a secondary imaging layout splitting method provided in the first embodiment of the present invention.

[0026] Figure 2 This is a flowchart of the pre-splitting layout steps in a secondary imaging layout splitting method provided in the first embodiment of the present invention. Figure 1 .

[0027] Figure 3 This is a flowchart of the pre-splitting layout steps in a secondary imaging layout splitting method provided in the first embodiment of the present invention. Figure 2 .

[0028] Figure 4 This is a schematic diagram of the pre-splitting layout of a secondary imaging layout splitting method provided in the first embodiment of the present invention.

[0029] Figure 5 This is a schematic diagram of the pre-splitting result of a secondary imaging layout splitting method provided in the first embodiment of the present invention.

[0030] Figure 6 This is a flowchart of the pre-splitting layout steps in a secondary imaging layout splitting method provided in the first embodiment of the present invention. Figure 3 .

[0031] Figure 7 This is a diagram illustrating the optimization steps of a secondary imaging layout splitting method provided in the first embodiment of the present invention.

[0032] Figure 8 This is a schematic diagram of different states of cost values ​​in a mixed-integer linear programming model of a secondary imaging layout splitting method provided in the first embodiment of the present invention.

[0033] Figure 9 This is a schematic diagram of a secondary imaging layout splitting system provided in the second embodiment of the present invention.

[0034] Figure 10 This is a schematic diagram of the structure of a computer medium provided in the third embodiment of the present invention.

[0035] Explanation of reference numerals in the attached diagram:

[0036] 1. Secondary imaging layout splitting system; 2. Computer media;

[0037] 11. Data analysis module; 12. Data processing module; 13. Execution module; 21. Memory; 22. Processor; 23. Computer program.

Detailed Implementation Methods

[0038] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.

[0039] Please see Figure 1 The first embodiment of the present invention provides a method for splitting a secondary imaging layout, specifically including the following steps:

[0040] S1: Obtain the initial map;

[0041] S2: Construct a splitting model based on the acquired initial map;

[0042] S3: Based on the constructed splitting model, obtain the preset parameters and preset parameter function relationships between adjacent graphics;

[0043] S4: Compare the values ​​of preset parameters between adjacent graphics with preset thresholds, and pre-divide the initial layout based on the comparison results to obtain the pre-divide layout;

[0044] S5: Optimize the pre-split layout by combining it with the splitting model to obtain the required splitting layout.

[0045] It should be noted that double-image technology refers to splitting a single integrated circuit layout into two and exposing them separately. The two exposures are independent processes performed sequentially. Therefore, during a single exposure, the distance between the patterns in the single layout increases. When the minimum distance between the patterns in the layout is greater than the maximum resolution achievable by the current hardware, the exposure can be successful. Using double-image technology is a key technology to further improve the integration density of integrated circuits. However, the key is how to split the initial layout so that the two layouts do not stick together after exposure.

[0046] Understandably, the relationship between graphics affects the effect of layout splitting. This method can analyze and optimize all graphic relationships in the secondary imaging layout and split it into a layout that meets the requirements.

[0047] Furthermore, the preset parameters include the distance between adjacent graphic line segment pairs and the projection length of the projection between them at the corresponding distance. The preset parameter function relationship is the sum of the products of the distance between all adjacent graphic line segment pairs and the projection length.

[0048] It should be noted that two parallel line segments between adjacent graphics that are not blocked by other line segments are defined as a line segment pair. The distance relationship between adjacent line segment pairs and the relationship of the projection length of their projections at the corresponding distances are a parameter standard for measuring the spacing between adjacent graphics in the initial layout. No restrictions are imposed here. If other parameter standards can also be used to split the layout, the corresponding standards can also be adopted.

[0049] Understandably, the distance relationship and projected length relationship between adjacent graphics in the layout have practical physical significance. Using this as the basis for layout splitting parameters is more representative and makes the results more realistic and reliable.

[0050] For further details, please refer to Figure 2 The pre-splitting of the initial map includes the following steps:

[0051] S41: Obtain the distances between all line segment pairs of adjacent graphics in the initial layout, compare them, and find the minimum distance;

[0052] S42: Compare the minimum distance with the preset threshold value;

[0053] S421: If the minimum distance is greater than the preset threshold, then it is not considered;

[0054] S422: If the minimum distance is less than a preset threshold, then obtain all line segment pairs in adjacent graphics whose minimum distance is less than the preset threshold;

[0055] S43: Substitute the preset parameter function relationship of the obtained line segment pairs that meet the conditions into the preset formula, and pre-split the initial layout based on the output result of the preset formula.

[0056] It should be noted that for the initial layout, assuming that graphics with a distance less than a preset threshold L will stick together after exposure, graphics with these distances should be prioritized for splitting into different layouts during layout splitting. For graphics with a distance greater than L, they need to be split evenly into two layouts to ensure that the graphic density of the two split layouts is similar. For graphics with a distance less than L, the splitting behavior is explicit; while for graphics with a distance greater than L, the standard for splitting is to make the graphic density of the split layouts similar. This requires that when splitting such graphics in the initial layout, the relationships between graphics, such as distance and projection length, need to be comprehensively considered.

[0057] Specifically, one feasible method is to calculate the product of the distance and the projected length between the graphics in the initial layout, using this as the relationship between the graphics and as the basis for splitting the layout. The distance reflects the proximity between two graphics, while the projected length reflects the size of the overlapping area between the two graphics. By using the sum of the products of the distance and the projected length between all pairs of line segments of adjacent graphics, i.e., cost, we can split closer graphics while ensuring a balanced graphic density in the two split layouts.

[0058] Understandably, this method defines the splitting criteria for different graphics and splits the initial layout based on the defined criteria, making the results more targeted and effectively splitting graphics with excessively narrow spacing to meet the density balance requirements.

[0059] Furthermore, when pre-splitting adjacent graphics with a minimum distance less than a preset threshold, they are preferentially grouped into different groups.

[0060] Understandably, this method is used to prevent the spacing between small-spaced graphics from not significantly increasing after splitting, thus affecting the overall effect.

[0061] For further details, please refer to Figure 3 The secondary imaging pattern splitting method also includes splitting adjacent patterns whose minimum distance is greater than a preset threshold. The specific splitting includes the following steps:

[0062] S44: Obtain all line segment pairs in adjacent graphics whose distance is greater than a preset threshold;

[0063] S45: Substitute the acquired line segment pairs into the preset formula;

[0064] S46: When the projection length of one graphic onto another graphic reaches its maximum value, the graphic is defined as the standard graphic.

[0065] S47: When the distance relationship and the corresponding projection length relationship between the standard graphic and the adjacent graphic reach the maximum value, the adjacent graphic and the standard graphic are grouped into the same group;

[0066] S48: Repeat the above operation to use the divided groups as the inter-group splitting results.

[0067] It should be noted that the graphics in the layout and the relationships between them in terms of distance and projected length can be abstracted as nodes and the relationships between them. A node represents a graphic, and the relationships between graphics are represented as the relationships between nodes. When two nodes have a relationship, it indicates a physically meaningful distance and projected length relationship between the two graphics in the layout. The layout to which a graphic is assigned can be equivalently represented by the state of a node, here denoted by 0 and 1. When a node state is 0, it means the corresponding graphic is split into the first layout; when a node state is 1, it means the corresponding graphic is split into the second layout. By updating the node states, the requirements for layout splitting and graphic density balance can be satisfied.

[0068] Understandably, this method not only splits graphics with small spacing but also graphics with large spacing, thereby completing the splitting of the overall layout, better meeting the requirements for layout splitting, and achieving a balance in graphic density.

[0069] In addition, the splitting of the initial map includes splitting graphics with a distance less than a preset threshold L and splitting pairs of graphics with a distance greater than the threshold distance L.

[0070] Specifically, for graphics where the distance between two elements is less than a set threshold L, they should be preferentially split into different layouts, meaning the corresponding nodes should have different coloring states. For example... Figure 4As shown, firstly, the initial layout is searched for graphics that satisfy a distance less than the threshold L (the dashed box in the figure). For graphics that are related to each other, opposite coloring states are adopted. Since these graphics have the highest splitting priority, they will be merged into a group after splitting and participate in the subsequent optimization process as a whole, without changing the relative coloring states of the graphics within them.

[0071] It should be noted that the step of coloring the graphic is the same as the step of splitting the graphic.

[0072] For two graphics whose distance is greater than a threshold distance L, their cost value is calculated. The remaining graphics are grouped based on the maximum cost value of each graphic. It is known that for each remaining unsplit graphic, there is one or more graphics with a cost relationship to it. Using the maximum cost value of that graphic as the standard, when the cost value of a neighboring graphic is its maximum cost value, they are grouped together. The graphics within each group are initially colored using the same steps described above. After splitting, the relative coloring states of the graphics within each group remain unchanged, and they participate as a whole in subsequent optimization processes. Figure 5 The image shows the pre-splitting result. Based on this result, the number of graphics split across the two layouts is not evenly distributed, necessitating optimization of the splitting result.

[0073] For further details, please refer to Figure 6 Pre-splitting the initial layout also includes splitting the grouped graphics in the inter-group splitting results, specifically including the following steps:

[0074] S481: Perform preliminary coloring on the graphics within each group according to the steps for obtaining the inter-group splitting results, and obtain the coloring results within the group;

[0075] It should be noted that the steps to obtain the inter-group splitting results are steps S44-S48, and the intra-group coloring results are the intra-group graphic splitting results.

[0076] S482: The inter-group splitting results and the intra-group coloring results are used together as the pre-split results.

[0077] Understandably, the pre-splitting results are incorporated as a whole into subsequent steps for optimization. This method can yield more comprehensive and refined graphical splitting results, making the data results more generalizable.

[0078] Furthermore, the preset formula is as follows: in, The value of f can be 0 or 1.

[0079] It should be noted that the cost is defined as follows: If there are n pairs of unobstructed line segments between i and j, select the line segment pairs whose projected distance pn is greater than 0 and whose distance dn is less than a set value S, and calculate the sum of pn*(S-dn) of all line segment pairs that satisfy the condition. This can be expressed by the formula:

[0080] Here, f takes the value 0 or 1. When two nodes have the same coloring state, f is 1, and the cost value is greater than 0; when two nodes have different coloring states, f is 0, and the cost value is 0. For the initial layout, since no splitting is performed, f is 1.

[0081] Specifically, node coloring can be viewed as using the product of distance and projection length between adjacent graphics as a parameter standard, that is, a rule for splitting based on cost. There are two types of coloring: cost distinguishes whether adjacent graphics conflict. The larger the cost value, the closer the two graphics are, the larger the overlapping area, and the higher the priority of splitting them into different maps. This indicates that the two graphics conflict and are colored with different colors. Conversely, the smaller the cost value, the smaller the two graphics do not conflict and are colored with the same color.

[0082] In a given layout, the cost values ​​of two graphics are fixed, representing the distance between them and the extent of their area overlap. The value of f reflects the relative coloring state of the nodes, changing with the coloring states of the two nodes. When f equals 0, it indicates that the coloring states of the two nodes are opposite, and no change is needed; while when f is greater than 0, it indicates that the coloring states of the two nodes are the same. It can be seen that for two nodes, a cost of 0 is the optimal solution, where the coloring states of the two nodes are opposite, and the graphics are split into different layouts.

[0083] Similarly, for a given initial layout, the cost value between any two shapes can be calculated (provided there exists at least one pair of unobstructed line segments, and the projected length of this pair is greater than 0 and the distance is less than a set value S). The metric for evaluating the layout splitting effect is the sum of all the costs mentioned above, ∑. i,j cost i,j A lower total cost indicates a better outcome for the map splitting, meaning that closely spaced graphics are preferentially split into different maps, while the graphic density of the two maps is more balanced. The factor affecting the total cost is the coloring state of all nodes in the map. When the coloring state of some nodes is changed, the cost values ​​between the corresponding nodes change, thus affecting the total cost.

[0084] For further details, please refer to Figure 7 and Figure 8The parameters obtained from the pre-split layout are all non-linear relationships. The optimization of the pre-split layout also includes the following transformation and solution steps:

[0085] S51: Based on a pre-defined mixed-integer linear programming model, nonlinear relationships are transformed into parameters of a constrained linear programming problem;

[0086] S52: Solve for the parameters of a constrained linear programming problem.

[0087] It should be noted that the relationships between graphics affect the layout splitting effect. To achieve a better splitting effect, it is necessary to analyze all graphics relationships within the chip. These graphics relationships and the graphics splitting results exhibit a complex, non-linear relationship. Splitting and optimizing the entire chip design, and analyzing these relationships, presents a significant challenge to memory and time performance. Based on a set threshold distance and the relationship between distance and projection length, the graphics in the layout are grouped, and pre-splitting is performed within each group. Combining the distance and projection length relationships between groups, a linear regression model is established: using the flip state of all graphics groups as the parameter to be optimized, the overall distance and projection relationship value of the layout as the optimization objective, and the flip state and inter-group relationships as constraints. Based on this model, the layout splitting results are quickly optimized, achieving the required layout splitting effect.

[0088] Understandably, this method transforms difficult-to-solve nonlinear relationships into linear programming parameters, which are then solved, ensuring that the results are highly targeted and can effectively address current technical problems.

[0089] Specifically, when a group of graphics is flipped (the coloring state of all graphics within the group is inverted, 0 is inverted to 1, and 1 is inverted to 0), if a group of graphics A is flipped while other groups are not, the cost relationship associated with group A will change, thus affecting the total cost. In fact, all graphic groups can be flipped; therefore, by optimizing the flipping of these groups, a better splitting result can be obtained, i.e., a smaller total cost value. Here, the values ​​0 and 1 are used to mark the flipping status of each group, where 0 indicates that the group is not flipped, and 1 indicates that the group is flipped.

[0090] For an initial layout, assume there are N groups of graphics after pre-splitting. These N groups of graphics are connected by M cost relationships. When n groups of graphics in the N groups are flipped, it will affect the m pairs of cost relationships associated with them. This change in cost value can be represented by 0 and 1. The cost value in a given initial layout, denoted as COST, will change from 0 to COST or COST to 0 during the layout splitting process due to the flipping of graphic groups. Therefore, M parameters can be set to characterize the actual contribution of each pair of costs during optimization. When the parameter state is 0, it means that the two graphics connecting this pair of costs have opposite colors, contributing 0 to the total cost; while when the parameter state is 1, it means that the corresponding graphics have the same color, and this pair of costs will contribute to the total cost value.

[0091] Furthermore, the method for optimizing the pre-split layout combined with the splitting model includes using a preset function for computational optimization, where the preset function is... Where x represents the (N+M) parameters to be optimized, each taking a value of 0 or 1. This represents the constraint matrix, and B is used to represent the boundary of the constraints.

[0092] It should be noted that these (N+M) states are treated as variables to be optimized, and the optimization objective is to minimize the sum of the M cost values. The relationship between the flip state of each group of graphics and the cost magnitude is bound by constraints. Therefore, the optimization of the layout splitting result can be transformed into a linear programming problem. Since the relevant parameters for optimization only have two states, labeled as 0 and 1, this linear programming problem is a mixed-integer linear programming problem for this invention. The first N parameters represent the flip state of each group of graphics, and the (N+1) to (N+M)th parameters represent whether the Mth cost value is 0. Here, costi is used to represent the numerical magnitude of the M pairs of cost relationships before layout splitting (its value is greater than 0). By optimizing x i The value of (i>N) can make a portion of the COST i x i The contribution to the objective function is 0. Specific constraints are not limited here; the resulting constraint matrix only needs to support the expression of the relevant parameters in the formula.

[0093] Specifically, setting constraints includes the following steps;

[0094] By traversing the cost relationships of M, the corresponding constraint expressions are obtained;

[0095] Add the coefficients corresponding to the expression to the constraint matrix. The corresponding position is used as a matrix element;

[0096] Complete the entire mixed-integer linear programming model by adding boundary conditions to the boundary matrix.

[0097] It should be noted that, regarding the constraints, we have: a pair of cost relationships calculated before the split, with a value of COST. The constraint expression is as follows: or, For the two possible combinations of graphics, choose one to use; based on a cost relationship calculated before splitting, its value is COST. When the graphics corresponding to this cost relationship have the same color, the contribution of cost to the total cost is COST, i.e., xk corresponds to 1. When there is exactly one set of flips, xk... k =0, where x i ,xj,x k (where i≤N, j≤N, k>N, and i≠j).

[0098] The mixed-integer linear programming model constructed using the above steps can transform a nonlinear optimization problem into a constraint-based linear programming problem. Existing solvers can then be used to quickly solve for the input parameters, resulting in better layout partitioning performance. Through optimization, [the following steps can be achieved]. Figure 5 In the optimization of map splitting, graphics with a distance less than a preset threshold distance L are assigned to different maps, and the number of graphics in the two maps is balanced.

[0099] By setting preset functions, existing difficult technical problems can be transformed into mixed-integer linear programming and expressed, thus solving existing technical problems to a certain extent.

[0100] Please see Figure 9 The present invention also provides a secondary imaging layout splitting system 1, used to split the secondary imaging layout using the secondary imaging layout splitting method described above. The system includes a data analysis module 11, a data processing module 12, and an execution module 13. The data analysis module 11 acquires the initial layout and analyzes the graphic information, then transmits the analysis results to the data processing module 12. The data processing module 12 simulates the splitting of the graphic and transmits the splitting instructions to the execution module 13. The execution module 13 receives the analysis results and instructions from the data processing module 12 and executes the graphic splitting instructions. It has the same beneficial effects as the aforementioned secondary imaging layout splitting method, and will not be elaborated further here.

[0101] Please see Figure 10To address the technical problem, the present invention also provides a computer medium 2, including a memory 21, a processor 22, and a computer program 23 stored on the memory 22 and executable on the processor 22. When the processor 22 executes the computer program 23, it implements the secondary imaging layout splitting method described above. It has the same beneficial effects as the aforementioned secondary imaging layout splitting method, and will not be elaborated upon here.

[0102] It is understood that, according to the embodiments disclosed in this invention, the processes described above with reference to the flowcharts can be implemented as computer software programs. For example, embodiments of this disclosure include a computer program product comprising a computer program carried on a computer-readable medium, the computer program containing program code for performing the methods shown in the flowcharts. In such embodiments, the computer program can be downloaded and installed from a network via a communication component, and / or installed from a removable medium. When the computer program is executed by a central processing unit (CPU), it performs the functions defined in the methods of this application. It should be noted that the computer-readable medium described in this application can be a computer-readable signal medium or a computer-readable storage medium, or any combination of the two. Computer-readable storage media include, but are not limited to, electrical, magnetic, optical, electromagnetic, infrared, or semiconductor systems, apparatuses, or devices, or any combination thereof. More specific examples of computer-readable storage media may include, but are not limited to: electrical connections having one or more wires, portable computer disks, hard disks, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM or flash memory), optical fiber, portable compact disk read-only memory (CD-ROM), optical storage devices, magnetic storage devices, or any suitable combination thereof. In this application, a computer-readable storage medium can be any tangible medium containing or storing a program that can be used by or in connection with an instruction execution system, apparatus, or device. In this application, a computer-readable signal medium may include a data signal propagated in baseband or as part of a carrier wave, carrying computer-readable program code. Such propagated data signals can take various forms, including but not limited to electromagnetic signals, optical signals, or any suitable combination thereof. A computer-readable signal medium can also be any computer-readable medium other than a computer-readable storage medium, which can send, propagate, or transmit a program for use by or in connection with an instruction execution system, apparatus, or device. The program code contained on a computer-readable medium can be transmitted using any suitable medium, including but not limited to: wireless, wire, optical fiber, RF, etc., or any suitable combination thereof.

[0103] Computer program code for performing the operations of this application can be written in one or more programming languages ​​or a combination thereof, including object-oriented programming languages ​​such as Java, Smalltalk, and C++, as well as conventional procedural programming languages ​​such as C or similar languages. The program code can be executed entirely on the user's computer, partially on the user's computer, as a standalone software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In cases involving remote computers, the remote computer can be connected to the user's computer via any type of network, including a local area network (LAN) or a wide area network (WAN), or it can be connected to an external computer (e.g., via the Internet using an Internet service provider).

[0104] In the embodiments provided by this invention, it should be understood that "B corresponding to A" means that B is associated with A, and B can be determined based on A. However, it should also be understood that determining B based on A does not mean determining B solely based on A; B can also be determined based on A and / or other information.

[0105] It should be understood that the phrase "one embodiment" or "an embodiment" throughout the specification means that a specific feature, structure, or characteristic related to the embodiment is included in at least one embodiment of the invention. Therefore, "in one embodiment" or "in an embodiment" appearing throughout the specification does not necessarily refer to the same embodiment. Furthermore, these specific features, structures, or characteristics can be combined in any suitable manner in one or more embodiments. Those skilled in the art should also recognize that the embodiments described in the specification are optional embodiments, and the actions and modules involved are not necessarily essential to the invention.

[0106] In various embodiments of the present invention, it should be understood that the sequence number of each process does not necessarily imply the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of the present invention.

[0107] The flowcharts and block diagrams in the accompanying drawings illustrate the architecture, functionality, and operation of possible implementations of systems, methods, and computer program products according to various embodiments of this application. In this regard, each block in a flowchart or block diagram may represent a module, segment, or portion of code containing one or more executable instructions for implementing a specified logical function. It should also be noted that in some alternative implementations, the functions indicated in the blocks may occur in a different order than those indicated in the drawings. For example, two consecutively indicated blocks may actually be executed substantially in parallel, and they may sometimes be executed in reverse order, depending on the functions involved. It is particularly important to note that each block in the block diagrams and / or flowcharts, and combinations of blocks in the block diagrams and / or flowcharts, can be implemented using a dedicated hardware-based system that performs the specified function or operation, or using a combination of dedicated hardware and computer instructions.

[0108] Compared with the prior art, the secondary imaging layout splitting method, secondary layout splitting system, and computer medium of the present invention have the following advantages:

[0109] 1. The secondary imaging layout splitting method of the present invention specifically includes the following steps: obtaining an initial layout; constructing a splitting model based on the obtained initial layout; obtaining preset parameters and preset parameter function relationships between adjacent graphics based on the constructed splitting model; comparing the values ​​of the preset parameter function relationships between adjacent graphics with preset thresholds, and pre-splitting the initial layout based on the comparison results to obtain a pre-splitting layout; and optimizing the pre-splitting layout in conjunction with the splitting model to obtain the required splitting layout. The relationship between graphics affects the layout splitting effect. This method can analyze and optimize all graphic relationships in the secondary imaging layout and split it into a layout that meets the requirements.

[0110] 2. The secondary imaging layout splitting method of the present invention includes preset parameters including the distance between adjacent graphics and the projection length of the projection between them at the corresponding distance. The preset parameter function relationship is the sum of the product of the difference between the distance between all line segment pairs of adjacent graphics and a preset threshold and the projection length. The pre-splitting of the initial layout based on the comparison result specifically includes the following steps: obtaining the distance between all line segment pairs of adjacent graphics in the initial layout and comparing them to obtain the minimum distance; comparing the minimum distance with the preset threshold; if the minimum distance is greater than the preset threshold, it is not considered; if the minimum distance is less than the preset threshold, obtaining all line segment pairs in the adjacent graphics whose distance is less than the preset threshold; substituting the preset parameter function relationship of the obtained line segment pairs that meet the conditions into the preset formula, and outputting the result based on the preset formula to pre-splitting the initial layout. The distance and projection length relationships between adjacent graphics in the layout have practical physical significance. Using these as the basis for layout splitting parameters makes the results more representative and reliable. This method defines splitting standards for different graphics and splits the initial layout based on the defined results, making the results more targeted and effectively splitting graphics with excessively narrow spacing to meet density balance requirements.

[0111] 3. In the secondary imaging layout splitting method of the present invention, when pre-splitting adjacent graphics with a minimum distance less than a preset threshold, they are preferentially grouped into different groups. This method prevents the splitting of graphics with small spacing from failing to significantly increase the spacing, thus affecting the overall effect.

[0112] 4. The secondary imaging layout splitting method of the present invention further includes splitting adjacent graphics with a minimum distance greater than a preset threshold. Specifically, the splitting includes the following steps: obtaining all line segment pairs in adjacent graphics where the distance is greater than the preset threshold; substituting the obtained line segment pairs into a preset formula; defining the graphic as a standard graphic when the projection length of one graphic on another graphic reaches its maximum value; dividing the adjacent graphics and the standard graphic into the same group when the distance relationship and corresponding projection length relationship between the standard graphic and adjacent graphics reach their maximum value; repeating the above operations, and using the divided groups as the inter-group splitting results. This method not only splits graphics with small spacing but also graphics with large spacing, thereby completing the splitting of the overall layout, better meeting the layout splitting requirements, and achieving graphic density balance.

[0113] 5. The secondary imaging layout splitting method of the present invention further includes splitting the grouped graphics in the inter-group splitting results by pre-splitting the initial layout. Specifically, it includes the following steps: performing preliminary coloring on the graphics within each group according to the steps for obtaining the inter-group splitting results to obtain intra-group coloring results; the inter-group splitting results and intra-group coloring results are used together as the pre-splitting results. The pre-splitting results are used as a whole in subsequent steps for optimization. This method can obtain more comprehensive and refined graphic splitting results, making the data results more universal.

[0114] 6. The secondary imaging layout splitting method of the present invention uses nonlinear relationships for the parameters obtained from the pre-split layout. The optimization of the pre-split layout further includes the following transformation and solution steps: transforming the nonlinear relationships into parameters of a constrained linear programming model based on a preset mixed-integer linear programming model; and solving for the parameters of the constrained linear programming. This method transforms the difficult-to-solve nonlinear parameter optimization problem into a linear programming problem of parameters, ensuring highly specific results and effectively addressing current technical problems.

[0115] 7. This invention also provides a secondary imaging layout splitting system for splitting a secondary imaging layout using the secondary imaging layout splitting method described above. The system includes a data analysis module, a data processing module, and an execution module. The data analysis module acquires the initial layout and analyzes the graphic information, then transmits the analysis results to the data processing module. The data processing module simulates the splitting of the graphic and transmits the splitting instructions to the execution module. The execution module receives the analysis results and instructions from the data processing module and executes the graphic splitting instructions. This system has the same beneficial effects as the aforementioned secondary imaging layout splitting method, and will not be elaborated upon here.

[0116] 8. The present invention also provides a computer medium, including a memory, a processor, and a computer program stored in the memory and executable on the processor. When the processor executes the computer program, it implements the secondary imaging layout splitting method described above. It has the same beneficial effects as the aforementioned secondary imaging layout splitting method, and will not be elaborated further here.

[0117] The foregoing has provided a detailed description of a secondary imaging layout splitting method, a secondary layout splitting system, and a computer medium disclosed in the embodiments of the present invention. Specific examples have been used to illustrate the principles and implementation methods of the present invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of the present invention. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the ideas of the present invention. Therefore, the content of this specification should not be construed as a limitation of the present invention. Any modifications, equivalent substitutions, and improvements made within the principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A method for splitting a secondary imaging layout, characterized in that: The secondary imaging layout splitting method specifically includes the following steps: Obtain the initial map; A splitting model is constructed based on the acquired initial map; Based on the constructed splitting model, the preset parameters and preset parameter function relationships between adjacent graphics are obtained; The values ​​of preset parameters between adjacent graphics are compared with preset thresholds, and the initial layout is pre-splitting based on the comparison results to obtain the pre-splitting layout. The pre-split layout is optimized by combining it with the splitting model to obtain the required splitting layout; The preset parameters include the distance between adjacent graphic line segment pairs and the projection length of their projections at the corresponding distances. The preset parameter function is the sum of the products of the difference between the distances between all adjacent graphic line segment pairs and a preset threshold, and the projection length. The pre-splitting of the initial layout based on the comparison results specifically includes the following steps: Obtain the distances between all line segment pairs of adjacent shapes in the initial layout, compare them, and find the minimum distance; Compare the minimum distance with the preset threshold value; If the minimum distance is greater than the preset threshold, it will not be considered. If the minimum distance is less than a preset threshold, then obtain all line segment pairs in adjacent graphics whose minimum distance is less than the preset threshold. Substitute the preset parameter function relationship of the obtained line segment pairs that meet the conditions into the preset formula, and pre-split the initial layout based on the output result of the preset formula.

2. The secondary imaging layout splitting method as described in claim 1, characterized in that: When pre-splitting adjacent graphics with a minimum distance less than a preset threshold, they are preferentially grouped into different groups.

3. The secondary imaging layout splitting method as described in claim 1, characterized in that: The secondary imaging layout splitting method also includes splitting adjacent graphics with a minimum distance greater than a preset threshold. The specific splitting includes the following steps: Get all line segment pairs in adjacent graphics whose distance is greater than a preset threshold; Substitute the obtained line segment pairs into the preset formula; When the projection length of one graphic onto another graphic reaches its maximum value, that graphic is defined as the standard graphic. When the distance relationship and the corresponding projection length relationship between the standard graphic and the adjacent graphic reach their maximum values, the adjacent graphic and the standard graphic are grouped into the same group. Repeat the above operation to obtain all line segments in adjacent graphics whose distance is greater than the preset threshold until the adjacent graphics and the standard graphics are divided into the same group, and the group is taken as the inter-group splitting result.

4. The secondary imaging layout splitting method as described in claim 3, characterized in that: Pre-splitting the initial layout also includes splitting the grouped graphics in the inter-group splitting results, specifically including the following steps: The graphics within each group are initially colored according to the steps for obtaining the inter-group splitting results, thus obtaining the coloring results within the group. The inter-group splitting results and the intra-group coloring results are used together as the pre-splitting results.

5. The secondary imaging layout splitting method as described in claim 1, characterized in that: The preset formula is: ,in, The value of f can be 0 or 1. This means: If there are n pairs of unobstructed line segments between i and j, take the projected length p of them. n Greater than 0, distance d n For line segment pairs less than the set value S, calculate all line segment pairs p that satisfy the condition. n *(Sd n ) and.

6. The secondary imaging layout splitting method as described in claim 1, characterized in that: The parameters obtained from the pre-split layout are all non-linear relationships. The optimization of the pre-split layout also includes the following transformation and solution steps: Based on a pre-defined mixed-integer linear programming model, nonlinear relationships are transformed into parameters for a constrained linear programming problem. Solve for the parameters of a linear programming problem with constraints.

7. The secondary imaging layout splitting method as described in claim 1, characterized in that: The method for optimizing a pre-split layout combined with a splitting model includes performing calculation optimization using a preset function, wherein the preset function is: , where x represents the (N+M) parameters to be optimized, all of which take values ​​of 0 or 1. The first N parameters represent the splitting state of each group of graphics, and the (N+1) to (N+M)th parameters indicate whether the Mth cost value is 0. This represents the constraint matrix, and B is used to represent the boundary of the constraints.

8. A secondary imaging layout splitting system, used to split the secondary imaging layout using the secondary imaging layout splitting method as described in any one of claims 1-7, characterized in that: It includes a data analysis module, a data processing module, and an operation module. The data analysis module acquires the initial layout and analyzes the graphic information. Then, it transmits the analysis results to the data processing module. The data processing module simulates the splitting of the graphic and transmits the splitting instructions to the operation module. The operation module receives the analysis results and instructions from the data processing module and executes the graphic splitting instructions.

9. A computer medium comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that: When the processor executes the computer program, it implements the secondary imaging layout splitting method as described in any one of claims 1-7.

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