Flow measuring device

Abstract

A flow rate measuring device measures a flow rate of purge gas in a purge device that supplies purge gas to a container attached to and detached from a container main body with respect to a bottom cap. The flow rate measuring device includes a base portion that mounts a flow rate measurer, an engaged portion that is provided to the base portion and engaged by the bottom cap, and a flow path portion that allows the purge gas injected from an injection port of the bottom cap to flow to the flow rate measurer in a state where the bottom cap is engaged with the engaged portion.

Description

Technical Field

[0001] One aspect of the present invention relates to a flow measurement device. Background Technology

[0002] A flow measuring device is known for measuring the flow rate of purge gas in a purge device that supplies purge gas to a container. For example, Patent Document 1 discloses a technique for measuring the flow rate of purge gas using a flow measuring device (measuring FOUP) that is identical in shape to the container (storage FOUP).

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent Application Publication No. 2008-159734 Summary of the Invention

[0006] In the aforementioned technology, for example, a container for the purging device is prepared, and the container is cut and the flow meter is installed, thereby manufacturing the flow meter. Therefore, there is a problem that measuring the flow rate of the purging gas is time-consuming.

[0007] Therefore, one aspect of the present invention is to provide a flow measuring device that can easily measure the flow rate of the purging gas of a purging device.

[0008] One aspect of the present invention is a flow measuring device for measuring the flow rate of purge gas in a purge device that supplies purge gas to a container with a bottom cover detached from the container body. The flow measuring device includes: a base on which a flow measuring device is mounted; a locking portion disposed at the base and for locking the bottom cover; and a flow path portion that allows purge gas injected from the inlet of the bottom cover to flow to the flow measuring device when the bottom cover is locked to the locking portion.

[0009] In this flow measurement device, by engaging the bottom cover with the engaging part, the original functions of the bottom cover's inlet, etc., can be effectively utilized to measure the flow rate of the purging gas in the purging device. That is, the flow rate of the purging gas in the purging device can be measured easily.

[0010] In one aspect of the flow measuring device of the present invention, the bottom cover may have a latch and be mounted on the container body by means of the latch, the latch engaging with the engaging portion. In this case, the latch of the bottom cover can be effectively utilized to engage the bottom cover with the engaging portion.

[0011] In one aspect of the flow measuring device of the present invention, the base may have a frame that is frame-shaped corresponding to the shape of the bottom cover and overlaps the bottom cover in a manner that surrounds the edge of the bottom cover. The engaging portion is a hole or groove formed on the frame for the insertion of a latch. In this case, a structure that effectively utilizes the latch to engage the bottom cover with the engaging portion can be specifically realized.

[0012] In one aspect of the flow measuring device of the present invention, the frame may have a layered surface that abuts against the upper surface of the bottom cover to restrict upward movement of the bottom cover. In this case, it is possible to prevent the bottom cover from separating from the frame upward and to easily engage the bottom cover with the engaging portion.

[0013] In one aspect of the flow measurement device of the present invention, the flow path section may have an inlet gasket that is in close contact with the edge of the injection port on the upper surface of the bottom cover when the bottom cover is engaged with the engaging part. In this case, leakage of purge gas can be prevented, and the flow rate of the purge gas can be reliably measured.

[0014] In one aspect of the flow measurement device of the present invention, the inlet liner may include a first layer made of an elastomer disposed on the injection port side and a second layer made of a gel-like material laminated on the first layer. In this case, it is possible to further prevent purge gas leakage.

[0015] In one aspect of the flow measuring device of the present invention, the base may have a pressing surface that is positioned opposite to the bottom cover when the bottom cover is engaged with the engaging part, and the inlet gasket, which is in close contact with the edge of the injection port, is pressed toward the bottom cover. In this case, it is possible to further prevent purge gas leakage.

[0016] In one aspect of the flow measuring device of the present invention, at least one of the following may be formed on the base: a positioning hole for a positioning protrusion provided on the bottom cover to enter, and a positioning protrusion entering the positioning hole provided on the bottom cover. In this case, the bottom cover can be positioned relative to the base.

[0017] Invention Effects

[0018] According to one aspect of the present invention, a flow measuring device is provided that can easily measure the flow rate of the purging gas of the purging device. Attached Figure Description

[0019] Figure 1 This is a side view of a purging storage device according to one embodiment.

[0020] Figure 2 This is a schematic structural diagram showing the structure of a purging device according to one embodiment.

[0021] Figure 3 This is a three-dimensional view showing the top of the bottom cover of the storage container.

[0022] Figure 4 This is a three-dimensional view showing the bottom of the storage container's lid.

[0023] Figure 5 This is a top perspective view of a flow measurement device according to one embodiment.

[0024] Figure 6 It means Figure 5 A three-dimensional view of the flow measurement device from below.

[0025] Figure 7 It means Figure 5 A three-dimensional view of the frame.

[0026] Figure 8 It is an enlarged representation Figure 6 A three-dimensional view of the inlet liner.

[0027] Figure 9 It is a schematic representation of what will Figure 5 A side sectional view of an example of a flow measurement device installed on the bottom cover.

[0028] Figure 10 It means Figure 9 The subsequent side sectional view.

[0029] Figure 11 It means Figure 10 The subsequent side sectional view. Detailed Implementation

[0030] Hereinafter, one embodiment will be described with reference to the accompanying drawings. In the description of the drawings, the same elements are labeled with the same reference numerals, and repeated descriptions are omitted. The scale of the drawings may not be consistent with the objects being described.

[0031] One embodiment of the flow measuring device measures the flow rate of the purging gas in the purging device. The purging device is a device that purges the interior of a storage container using purging gas, and is disposed in a purging storage device or the like. Therefore, the purging device and the purging storage device will be described first.

[0032] like Figure 1 and Figure 2As shown, the purging storage device 1 purifies the interior of the storage container 50 using purging gas and functions as a storage facility for storing multiple storage containers 50. The storage container 50 is a container such as an SMIF box or a marking sheet box containing stored items such as semiconductor wafers or glass substrates. The purging gas used is, for example, nitrogen or air. The purging storage device 1 is located, for example, in a cleanroom. The purging storage device 1 mainly includes a partition 3, a shelf 7, a crane 9, an OHT (Overhead Hoist Transfer) port 21, and a manual port 23.

[0033] The partition 3 is the cover plate of the purging storage device 1. A storage area for the storage container 50 is formed on the inner side of the partition 3. The shelf 7 is part for storing the storage container 50 and has one or more rows (two rows in this case) in the storage area. Each shelf 7 extends along a predetermined direction x, and adjacent shelves 7, 7 are arranged parallel to each other in the y direction. On each shelf 7, a plurality of purging shelves 7A for holding and storing the storage container 50 are formed along the predetermined direction x and the vertical direction z. A plurality of purging shelves 7A are arranged side by side along the vertical direction z and a plurality of them are arranged side by side along the predetermined direction x.

[0034] Crane 9 is a conveying device that moves storage container 50 in and out relative to purge shelf 7A and moves storage container 50 between purge shelf 7A and OHT port 21 and manual operation port 23. Crane 9 is disposed in an area sandwiched between opposing shelves 7, 7. Crane 9 moves on a travel track (not shown) disposed on the ground in a predetermined direction x extending along the shelves 7. Crane 9 has a guide rail 9A extending in the vertical direction z and a platform 9B capable of lifting and lowering along the guide rail 9A. The conveying of storage container 50 by crane 9 is controlled by crane controller 60. Crane controller 60 is, for example, an electronic control unit composed of CPU (Central Processing Unit), ROM (Read Only Memory), RAM (Random Access Memory), etc.

[0035] Storage container 50 is handled in and out of the purging storage unit 1 via OHT port 21 and manual operation port 23. OHT port 21 is the section where the storage container 50 is transferred between the overhead moving vehicle (OHT) 27 traveling along the overhead track 25 and the purging storage unit 1. OHT port 21 has a conveyor 21A for transporting the storage container 50. Manual operation port 23 is the section where the storage container 50 is transferred between the operator and the purging storage unit 1. Manual operation port 23 has a conveyor 23A for transporting the storage container 50.

[0036] The storage container 50 is described in detail below. The storage container 50 includes a container body 51 and a bottom cover 53. The bottom cover 53 is attached and detached from the bottom side of the container body 51 within the storage container 50. The container body 51 is rectangular box-shaped. The bottom cover 53 is rectangular plate-shaped. A sealed space 54 is formed within the storage container 50 by the container body 51 and the bottom cover 53. Multiple semiconductor wafers (not shown) are housed within the sealed space 54.

[0037] like Figure 2 , Figure 3 and Figure 4 As shown, inlet ports 52A are provided at the left and right ends of the rear side of the bottom cover 53. Outlet ports 52B are provided at the left and right ends of the front side of the bottom cover 53. The inlet ports 52A are configured to connect to a nozzle (not shown) at the top end of the supply pipe 31 of the purging device 30. The outlet ports 52B are configured to connect to a nozzle (not shown) at the top end of the discharge pipe 33 of the purging device 30. Check valves are provided on the inlet ports 52A and the outlet ports 52B. It should be noted that "front" and "rear" correspond to the near front and inner sides of the purging shelf 7A, respectively, and "left" and "right" correspond to one side and the other side in the horizontal direction orthogonal to the front and rear directions, respectively.

[0038] A latching mechanism 58 is provided on the bottom cover 53, for example. The latching mechanism 58 has a latch 58A and a cam portion 58B. In the latching mechanism 58, when a key (not shown) is inserted into an insertion port 58C formed on the bottom surface 53a of the bottom cover 53 and the key is turned, the latch 58A is moved in and out (out and out) via the cam portion 58B. The latch 58A is provided on the front and rear sides of the bottom cover 53. The latch 58A provided on the front side can protrude forward from the front surface of the bottom cover 53, and the latch 58A provided on the rear side can protrude rearward from the rear surface of the bottom cover 53.

[0039] The latch 58A engages with the fitting groove 51A provided on the container body 51. Thus, the bottom cover 53 is fixed to the container body 51. In other words, the bottom cover 53 is mounted on the container body 51 by means of the latch 58A. Positioning protrusions 59 are erected at the two front corners of the four corners of the bottom cover 53. The positioning protrusions 59 are protrusions that position the bottom cover 53 relative to the container body 51.

[0040] The purging device 30 is described in detail. For example... Figure 2 As shown, the purging device 30 is a device for supplying purging gas to the storage container 50 placed on the purging shelf 7A, and includes a supply pipe 31, an MFC (Mass Flow Controller) 35, a purging gas source 37, an exhaust pipe 33, a flow meter 39, and a purging controller 40.

[0041] Supply pipe 31 supplies purge gas and is connected to inlet 52A of bottom cover 53. MFC 35 is a device that measures the mass flow rate of purge gas flowing in supply pipe 31 and controls the flow rate. Purge gas source 37 is a tank for storing purge gas. Discharge pipe 33 discharges purge gas and is connected to outlet 52B of bottom cover 53. Flow meter 39 measures the flow rate of purge gas flowing in discharge pipe 33. Purge controller 40 controls various purging processes in purging device 30. Purge controller 40 is, for example, an electronic control unit composed of CPU, ROM, RAM, etc.

[0042] Next, a flow measurement device according to one embodiment will be described.

[0043] like Figure 5 and Figure 6 As shown, the flow measuring device 100 is a device that can be easily installed and removed from the base cover 53, and uses the base cover 53 to measure the flow rate of the purge gas of the purge device 30. The flow measuring device 100 includes a frame 110 with two flow measuring instruments 101 mounted on it, an elongated hole 120 provided on the frame 110, and a flow path 130 connected to the flow measuring instruments 101. It should be noted that the terms "upper" and "lower" below correspond to the vertical direction when mounted on the base cover 53.

[0044] like Figure 5 , Figure 6 and Figure 7 As shown, the frame 110 is a frame-shaped component corresponding to the shape of the bottom cover 53. Here, the frame 110 is rectangular. The frame 110 is formed, for example, from a thermoplastic resin (polyoxymethylene (POM)). The frame 110 includes a front slat 110F, a rear slat 110B, and side slats 110L and 110R as its skeleton components. The front slat 110F and the rear slat 110B are components that extend in the left-right direction. The side slats 110L and 110R are components that extend in the front-back direction. The side slat 110L is continuous with the left end of the front slat 110F and the left end of the rear slat 110B, and the side slat 110R is continuous with the right end of the front slat 110F and the right end of the rear slat 110B. The frame 110 constitutes the base.

[0045] The frame 110 overlaps the bottom cover 53 in such a way that it surrounds the edge of the bottom cover 53. The frame 110 overlaps the bottom cover 53 in such a way that the bottom cover 53 is disposed within the frame. When viewed from above, the shape of the frame 110 includes the shape of the bottom cover 53. The frame 110 has a lamination surface 111 on the inner edge portion of its lower surface 110a. The lamination surface 111 is a planar surface parallel to the lower surface 110a that extends above the lower surface 110a by means of lamination. The lamination surface 111 abuts against the upper surface of the bottom cover 53 to restrict upward movement of the bottom cover 53.

[0046] The frame 110 has protrusions 112 at its two rear inner corners, each extending inwards. The protrusions 112 are plate-shaped. The protrusions 112 are positioned opposite the bottom cover 53 when the frame 110 overlaps with it, and are located above the inlet 52A. The upper surface of the protrusions 112 is continuous with the upper surface 110b of the frame 110. The lower surface of the protrusions 112 is a planar surface parallel to the lower surface 110a, extending above the layer difference surface 111 via a layer difference. As described later, the lower surface of the protrusions 112 forms a pressing surface 112a that presses the inlet liner 133 toward the bottom cover 53.

[0047] The frame 110 has positioning holes 113 for the positioning protrusions 59 on the bottom cover 53 to enter. The positioning holes 113 are formed at the two front corners of the four corners of the frame 110. The positioning holes 113 are through holes with a cross section corresponding to the shape of the positioning protrusions 59.

[0048] A plate-shaped component 114 is superimposed and fixed on the upper surface 110b of the frame 110. The plate-shaped component 114 supports various devices mounted on the frame 110. The plate-shaped component 114 is formed of a material (such as metal) with higher rigidity than the frame 110. The plate-shaped component 114 is arranged to be mounted on the rear sill 110B and the side sills 110L and 110R. Two mass flow meters 101, a battery 102, a converter 103, and a data logger 104 are fixed on the plate-shaped component 114.

[0049] The mass flow meter 101 is a device used to measure the flow rate of the purge gas. There is no particular limitation on the mass flow meter 101, and various flow meters can be used. The battery 102 is a storage battery that stores the power supplied to the mass flow meter 101 and the data logger 104. There is no particular limitation on the battery 102, and various batteries can be used. The converter 103 transforms the power from the battery 102 and supplies it to the mass flow meter 101 and the data logger 104. The converter 103 is, for example, a DC-DC converter. There is no particular limitation on the converter 103, and various converters can be used. The data logger 104 is a recorder that records the measurement results measured by the mass flow meter 101. There is no particular limitation on the data logger 104, and various data loggers can be used.

[0050] The elongated hole 120 is formed on the frame 110 and is for the insertion latch 58A (see reference). Figure 3The latch 58A is inserted into and engaged with the bottom cover 53. In other words, with the frame 110 overlapping the bottom cover 53, the latch 58A is embedded in the elongated hole 120. The elongated hole 120 is formed on the front sill 110F and the rear sill 110B of the frame 110. The elongated hole 120 is a hole that extends through the front and rear directions, with its length in the left and right direction. The elongated hole 120 has a vertical width corresponding to the vertical width of the latch 58A. The elongated holes 120 are arranged in a manner that they are opposite to the latch 58A, which does not protrude from the bottom cover 53, in the front and rear direction when the frame 110 and the bottom cover 53 are overlapping. The elongated holes 120 are provided in the same number as or more of the latches 58A.

[0051] With the frame 110 overlapping the bottom cover 53 and the latch 58A of the bottom cover 53 engaged with the elongated hole 120 (hereinafter also referred to as the "engaged state of the frame 110"), the flow path 130 allows the purge gas injected from the injection port 52A of the bottom cover 53 to flow into the flow meter 101. The flow path 130 has a vent 131, a tube 132, and an inlet gasket 133.

[0052] The vent 131 is a through hole formed on the protrusion 112. The vent 131 communicates with the injection port 52A of the bottom cover 53 when the frame 110 is engaged. One end of the tube 132 is connected to the flow meter 101. The other end of the tube 132 is connected to the upper end of the vent 131.

[0053] When the frame 110 is engaged, the inlet liner 133 is in close contact with the edge of the injection port 52A on the upper surface of the bottom cover 53 (see reference). Figure 10 The inlet liner 133 is a ring-shaped component. (For example...) Figure 8 As shown, the inlet liner 133 is disposed on the lower surface of the protrusion 112 such that it surrounds the vent 131 when viewed from below. The inlet liner 133 includes a first layer 133x disposed on the injection port 52A side (lower side) and made of an elastomer, and a second layer 133y disposed on the protrusion 112 side (upper side) and made of a gel-like material. The first layer 133x and the second layer 133y are stacked. The first layer 133x is formed, for example, of polyurethane rubber. The second layer 133y is formed of a gel-like material with silicone as the main raw material and high flexibility.

[0054] When the flow measuring device 100 configured as described above is installed on the bottom cover 53, as follows: Figure 9 As shown, for example, the operator positions the flow measuring device 100 above the bottom cover 53. At this time, the flow measuring device 100 is aligned front-to-back with the positioning hole 113 positioned on the positioning protrusion 59. The latch 58A is set to a state where it does not protrude from the bottom cover 53.

[0055] Next, as Figure 10As shown, the operator overlaps the frame 110 with the bottom cover 53 so that it surrounds the edge of the bottom cover 53, and connects the vent 131 to the injection port 52A via the inlet gasket 133. At this time, the positioning protrusion 59 is inserted into the positioning hole 113. In addition, the inlet gasket 133 is pressed tightly against the edge of the injection port 52A, and the pressing surface 112a of the protrusion 112 is used to press the inlet gasket 133 toward the bottom cover 53, thereby deforming the inlet gasket 133 by compression.

[0056] Next, as Figure 11 As shown, the operator inserts the key into the insertion port 58C of the bottom cover 53 (refer to...). Figure 4 The cam portion 58B is rotated, causing the latch 58A to protrude from the bottom cover 53. The latch 58A then enters and embeds into the elongated hole 120. As a result, the frame 110 engages with the bottom cover 53, and the flow measuring device 100 is installed onto the bottom cover 53.

[0057] The flow measuring device 100, mounted on the bottom cover 53, is similar to the storage container 50, and is moved in and out of the plurality of purge shelves 7A in a predetermined sequence by the crane 9. When placed on each purge shelf 7A, it is supplied with purge gas by the purge device 30. The flow measuring device 100 mounted on the bottom cover 53 measures the flow rate of the purge gas using a mass flow meter 101 and records the measurement result in a data logger 104.

[0058] Furthermore, when removing the flow measuring device 100 from the bottom cover 53, the operator inserts a key into the insertion port 58C of the bottom cover 53 and rotates it, thereby causing the latch 58A to engage with the bottom cover 53 via the cam portion 58B, and disengaging the latch 58A from the elongated hole 120 to release the engagement. Then, the operator lifts the flow measuring device 100 upwards to pull out the positioning protrusion 59 from the positioning hole 113, thus completing the disassembly.

[0059] As described above, by engaging the bottom cover 53 with the elongated hole 120 and mounting the flow measuring device 100 on the bottom cover 53, the original functions of the inlet 52A, etc., of the bottom cover 53 can be effectively utilized to measure the flow rate of the purge gas in the purge device 30. That is, the flow rate of the purge gas in the purge device 30 can be measured easily. Furthermore, the flow measuring device 100 can also be mounted on a different bottom cover than the bottom cover 53, improving versatility.

[0060] In the flow measuring device 100, the latch 58A for mounting the bottom cover 53 onto the container body 51 engages with the elongated hole 120. In this case, the latch 58A of the bottom cover 53 can be effectively utilized to engage the bottom cover 53 with the elongated hole 120. The flow measuring device 100 can be easily mounted on the bottom cover 53.

[0061] In the flow measuring device 100, the frame 110 is frame-shaped, corresponding to the shape of the bottom cover 53, and overlaps the bottom cover 53 by surrounding its edge. An elongated hole 120 is formed on the frame 110 for the insertion of the latch 58A. In this case, a structure can be specifically realized that effectively utilizes the latch to engage the bottom cover 53 with the elongated hole 120.

[0062] In the flow measuring device 100, the frame 110 has a layering surface 111 that abuts against the upper surface of the bottom cover 53 to restrict the upward movement of the bottom cover 53. In this case, it is possible to prevent the bottom cover 53 from separating upward from the frame 110 and to easily engage the bottom cover 53 with the elongated hole 120.

[0063] In the flow measuring device 100, the flow path section 130 has an inlet gasket 133, which, when the bottom cover 53 is engaged with the elongated hole 120, is in close contact with the edge of the injection port 52A on the upper surface of the bottom cover 53. In this case, an airtight seal can be maintained between the injection port 52A and the vent hole 131 to prevent the purge gas from leaking between the injection port 52A and the vent hole 131, thus enabling reliable measurement of the purge gas flow rate.

[0064] In the flow measurement device 100, the inlet liner 133 includes a first layer 133x made of an elastomer and a second layer 133y made of a gel-like material. In this case, leakage of purge gas from the inlet 52A between the inlet and the vent 131 can be further prevented, and the flow rate of the purge gas can be measured more reliably.

[0065] In the flow measurement device 100, the frame 110 has a pressing surface 112a, which presses the inlet gasket 133 toward the bottom cover 53 when the bottom cover 53 is engaged with the elongated hole 120. In this case, leakage of purge gas from the inlet 52A and the vent 131 can be further prevented, and the flow rate of the purge gas can be measured more reliably.

[0066] In the flow measuring device 100, a positioning hole 113 is formed on the frame 110 for the positioning protrusion 59 provided on the bottom cover 53 to enter. In this case, the bottom cover 53 can be positioned relative to the frame 110.

[0067] The embodiments of the present invention have been described above, but the present invention is not limited to the above embodiments. Various modifications can be made to the above embodiments without departing from the spirit of the invention.

[0068] In the above embodiment, a positioning protrusion 59 is provided on the bottom cover 53, and a positioning hole 113 for the protrusion 59 to enter is formed on the frame 110. However, this structure can be replaced or, based on this structure, a positioning hole can be provided on the bottom cover 53 and the positioning protrusion entering the positioning hole can be formed on the frame 110.

[0069] In the above embodiment, an elongated hole 120 is provided as the engaging portion, but it is not limited to an elongated hole 120. The engaging portion can also be a hole of other shapes, such as a round hole, or it can be a groove or a protrusion. In short, any structure that allows the bottom cover 53 to engage is acceptable. In the above embodiment, the latch 58A of the bottom cover 53 engages with the engaging portion, but it is also possible for an engaging portion other than the latch 58A to engage with it.

[0070] In the above embodiment, the frame 110 serves as the base, but the base may also have other structures besides the frame 110. The shape of the frame 110 is not limited to a rectangular frame and may be various frame shapes. In the above embodiment, the inlet liner 133 may not be composed of multiple layers and may be formed of a single material.

[0071] The structures in the above embodiments and modifications are not limited to the materials and shapes described above, and various materials and shapes can be applied. The structures in the above embodiments or modifications can be arbitrarily applied to structures in other embodiments or modifications. A portion of the structures in the above embodiments or modifications can be appropriately omitted without departing from the spirit of one aspect of the invention.

[0072] Explanation of reference numerals in the attached figures

[0073] 30: Purge device; 50: Storage container (container); 51: Container body; 52A: Inlet; 53: Bottom cover; 58A: Latch; 59: Positioning protrusion; 100: Flow measuring device; 101: Flow measuring instrument; 110: Frame (base); 111: Layer difference surface; 112a: Pressing surface; 113: Positioning hole; 120: Elongated hole (locked part, hole); 130: Flow path part; 133: Inlet gasket; 133x: First layer; 133y: Second layer.

Claims

1. A flow measuring device for measuring the flow rate of purge gas in a purge device that supplies purge gas to a container with a bottom cover detachable from the container body, characterized in that it comprises: The base, which is equipped with a flow meter; The engaging portion is provided at the base and is used to engage the bottom cover; and The flow path section allows the purge gas injected from the injection port of the bottom cover to flow to the flow meter while the bottom cover is engaged with the engaging part.

2. The flow measuring device according to claim 1, characterized in that, The bottom cover has a latch and is mounted on the container body by means of the latch. The latch engages with the engaged portion.

3. The flow measuring device according to claim 2, characterized in that, The base has a frame that corresponds to the shape of the bottom cover and overlaps with the bottom cover in a manner that surrounds the edge of the bottom cover. The engaging portion is a hole or groove formed on the frame for the latch to enter.

4. The flow measuring device according to claim 3, characterized in that, The frame has a layered surface that abuts against the upper surface of the bottom cover, thereby restricting the bottom cover from moving upward.

5. The flow measuring device according to any one of claims 1 to 4, characterized in that, The flow path section has an inlet liner that is in close contact with the edge of the injection port on the upper surface of the bottom cover when the bottom cover is engaged with the engaging section.

6. The flow measuring device according to claim 5, characterized in that, The inlet liner includes a first layer made of an elastomer disposed on the injection port side and a second layer made of a gel-like material stacked on the first layer.

7. The flow measuring device according to claim 5 or 6, characterized in that, The base has a pressing surface that is positioned opposite the bottom cover when the bottom cover is engaged with the engaging part, and presses the inlet liner, which is in close contact with the edge of the injection port, toward the bottom cover.

8. The flow measuring device according to any one of claims 1 to 7, characterized in that, The base is formed with a positioning hole for a positioning protrusion provided on the bottom cover to enter, and at least one of the positioning protrusions provided on the bottom cover to enter the positioning hole.

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