Workbench of integrated circuit manufacturing equipment and integrated circuit manufacturing equipment

Abstract

This application relates to the field of semiconductor processing technology, specifically to a worktable and integrated circuit manufacturing equipment for integrated circuit manufacturing. The lateral air-bearing assembly and the vertical air-bearing assembly are both mounted on the connecting assembly. A first air-bearing portion extending in the X direction is provided on the X-direction air-bearing guide rail, and a second air-bearing portion extending in the X direction is provided on the base. The lateral air-bearing assembly cooperates with the first air-bearing portion, and the vertical air-bearing assembly cooperates with the second air-bearing portion. The stator of the first X-direction linear motor is fixed to the X-direction air-bearing guide rail, and the mover of the first X-direction linear motor is fixed to the connecting assembly. The second positioning module is mounted on the Y-direction air-bearing guide rail. The purpose of this application is to address at least one technical problem described in the background art by providing a worktable and integrated circuit manufacturing equipment for integrated circuit manufacturing.

Description

Technical Field

[0001] This application relates to the field of semiconductor processing technology, and more specifically, to a workbench for integrated circuit manufacturing equipment and integrated circuit manufacturing equipment. Background Technology

[0002] Integrated circuit manufacturing equipment is a device that exposes and images mask patterns onto silicon wafers, primarily used for the manufacture of integrated circuits (ICs) or other micro-devices. The stage, as a key precision moving component in the equipment, is responsible for supporting the wafer and performing precise movements to meet requirements. During the exposure process, high-precision synchronous movement between the mask stage and the stage is necessary to ensure the dynamic imaging quality of the integrated circuit manufacturing equipment.

[0003] The workpiece stage generally employs a coarse-micro positioning method, where a long-stroke coarse stage achieves long-distance coarse positioning, while a micro stage achieves nanometer-level precise positioning. The function of the micro stage is to support the silicon wafer and, through precise adjustment and positioning in the horizontal and vertical six degrees of freedom, enable the silicon wafer to complete alignment, leveling, and focusing operations.

[0004] Conventional low-precision stepper integrated circuit manufacturing equipment uses a worktable that moves silicon wafers in the X and Y directions via a combination of motors, lead screws, and mechanical guides. This mechanical structure is very complex and requires high precision in machining. Summary of the Invention

[0005] The purpose of this application is to provide a workbench for an integrated circuit manufacturing equipment and an integrated circuit manufacturing equipment in response to at least one of the technical problems described in the background art.

[0006] To achieve the above objectives, this application adopts the following technical solution:

[0007] One aspect of this application provides a worktable for an integrated circuit manufacturing equipment, including a base, a first positioning module, and a second positioning module. The first positioning module includes a first X-axis linear motor, an X-axis air-bearing guide rail, a Y-axis air-bearing guide rail, a connecting component, a lateral air-bearing component, and a vertical air-bearing component. The X-axis air-bearing guide rail is fixed to the base, and the connecting component is fixed to one end of the Y-axis air-bearing guide rail. The lateral air-bearing component and the vertical air-bearing component are both mounted on the connecting component. A first air-bearing portion extending in the X direction is provided on the X-axis air-bearing guide rail, and a second air-bearing portion extending in the X direction is provided on the base. The lateral air-bearing component cooperates with the first air-bearing portion, and the vertical air-bearing component cooperates with the second air-bearing portion. The stator of the first X-axis linear motor is fixed to the X-axis air-bearing guide rail, and the mover of the first X-axis linear motor is fixed to the connecting component. The second positioning module is mounted on the Y-axis air-bearing guide rail.

[0008] Optionally, the first positioning module further includes a second X-axis linear motor and an X-axis motor support fixed to the base. The stator of the second X-axis linear motor is fixed to the X-axis motor support, and the mover of the second X-axis linear motor is fixed to the Y-axis air-bearing guide rail. The long-stroke X-axis movement is driven by the first and second X-axis linear motors, and the differential motion of the first and second X-axis linear motors can achieve a long-stroke R-axis movement. Z Movement in a certain direction.

[0009] Optionally, the first positioning module includes two vertical air-bearing components and two second air-bearing parts. Both second air-bearing parts are located on the base. One vertical air-bearing component is fixed to the connecting component, and the other vertical air-bearing component is fixed to the end of the Y-axis air-bearing guide rail away from the connecting component. The two vertical air-bearing components and the two second air-bearing parts cooperate in a one-to-one correspondence. This allows the movement of the Y-axis air-bearing guide rail in the X-axis to be supported by the cooperation of the two vertical air-bearing components and the two second air-bearing parts, improving the stability of the movement.

[0010] Optionally, the second air flotation part includes an iron strip, which is fixed inside the base and extends in the X direction.

[0011] Optionally, the second positioning module includes a Y-axis linear motor and a U-shaped air-bearing assembly. The stator of the Y-axis linear motor is mounted on the Y-axis air-bearing guide rail, and the mover of the Y-axis linear motor is mounted on the U-shaped air-bearing assembly. The U-shaped air-bearing assembly is slidably engaged with the Y-axis air-bearing guide rail.

[0012] Optionally, a third air-bearing part is installed on the Y-direction air-bearing guide rail, and the third air-bearing part extends in the Y direction, and the third air-bearing part cooperates with the U-shaped air-bearing assembly.

[0013] Optionally, the second positioning module further includes a vertical component and a mirror block. The mirror block, the vertical component, and the U-shaped air-bearing component are sequentially connected from top to bottom in the Z-axis. The vertical component is used to drive the mirror block in the R-axis direction. X Towards, R Y Move upwards and upwards (Z).

[0014] Optionally, the vertical assembly includes three sets of drive components, and the three sets of drive components are in R Z The drive assembly, which is uniformly distributed, includes a motor and a cam both mounted on the U-shaped air flotation assembly. The cam is connected to the motor and contacts the mirror block.

[0015] Optionally, the connecting assembly includes a main body, a rotating spindle, and a bearing. The lateral air flotation assembly and the vertical air flotation assembly are both mounted on the main body, the bearing is mounted on the main body, and the Y-axis air flotation guide rail is connected to the bearing through the rotating spindle.

[0016] The lateral air flotation assembly includes interconnected lateral air flotation blocks and lateral preload magnets.

[0017] The vertical air flotation assembly includes interconnected vertical air flotation blocks, decoupling flexible components, and vertical preload magnets.

[0018] Another aspect of this application provides an integrated circuit manufacturing apparatus, including the worktable of the integrated circuit manufacturing apparatus provided in this application.

[0019] The technical solution provided in this application can achieve the following beneficial effects:

[0020] The integrated circuit manufacturing equipment and worktable provided in this application embodiment achieve positioning by moving the Y-axis air-bearing guide rail and the second positioning module mounted on the Y-axis air-bearing guide rail in the X direction via a first X-axis linear motor. The lateral and vertical air-bearing components, along with the first and second air-bearing parts, replace the traditional structure of a motor, lead screw, and mechanical guide rail, simplifying the mechanical structure of the worktable and reducing the requirements for machining. Furthermore, it improves product stability.

[0021] The additional technical features and advantages of this application will become more apparent from the following description or from practical application. Attached Figure Description

[0022] To more clearly illustrate the technical solutions of the specific embodiments of this application, the accompanying drawings used in the description of the specific embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without any creative effort.

[0023] Figure 1 A front view schematic diagram of one embodiment of the worktable of the integrated circuit manufacturing equipment provided in this application;

[0024] Figure 2 A top view of one embodiment of the worktable of the integrated circuit manufacturing equipment provided in this application;

[0025] Figure 3 This is a three-dimensional structural schematic diagram of one embodiment of the worktable of the integrated circuit manufacturing equipment provided in this application.

[0026] Figure label:

[0027] 1-First X-direction linear motor; 2-X-direction air-bearing guide rail; 3-lateral air-bearing assembly; 4-base; 5-vertical air-bearing assembly; 6-iron bar; 7-X-direction motor support; 8-Y-direction air-bearing guide rail; 9-U-shaped air-bearing assembly; 10-vertical assembly; 11-mirror block; 12-connecting assembly. Detailed Implementation

[0028] The technical solutions of this application will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0029] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0030] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0031] like Figures 1 to 3As shown, one aspect of this application provides a workbench for an integrated circuit manufacturing equipment, including a base 4, a first positioning module, and a second positioning module. The first positioning module includes a first X-axis linear motor 1, an X-axis air-bearing guide rail 2, a Y-axis air-bearing guide rail 8, a connecting component 12, a lateral air-bearing component 3, and a vertical air-bearing component 5. The X-axis air-bearing guide rail 2 is fixed to the base 4, and the connecting component 12 is fixed to one end of the Y-axis air-bearing guide rail 8. The lateral air-bearing component 3 and the vertical air-bearing component 5 are both mounted on the connecting component 12. A first air-bearing portion extending in the X direction is provided on the X-axis air-bearing guide rail 2, and a second air-bearing portion extending in the X direction is provided on the base 4. The lateral air-bearing component 3 cooperates with the first air-bearing portion, and the vertical air-bearing component 5 cooperates with the second air-bearing portion. The stator of the first X-axis linear motor 1 is fixed to the X-axis air-bearing guide rail 2, and the mover of the first X-axis linear motor 1 is fixed to the connecting component 12. The second positioning module is mounted on the Y-axis air-bearing guide rail 8.

[0032] The integrated circuit manufacturing equipment worktable provided in this application embodiment is positioned by moving the Y-axis air-bearing guide rail 8 and the second positioning module mounted on the Y-axis air-bearing guide rail 8 in the X direction via a first X-axis linear motor 1. The lateral air-bearing component 3 and the vertical air-bearing component 5, along with the first and second air-bearing parts, replace the traditional structure of a motor, lead screw, and mechanical guide rail, simplifying the mechanical structure of the worktable and reducing the requirements for machining. Furthermore, it improves product stability.

[0033] Optionally, the first positioning module further includes a second X-axis linear motor and an X-axis motor support 7 fixed to the base 4. The stator of the second X-axis linear motor is fixed to the X-axis motor support 7, and the mover of the second X-axis linear motor is fixed to the Y-axis air-bearing guide rail 8. The long-stroke X-axis movement is driven by the first X-axis linear motor 1 and the second X-axis linear motor. Simultaneously, the differential motion of the first X-axis linear motor 1 and the second X-axis linear motor can achieve a long-stroke R-axis movement. Z Movement in the X direction. The Rz-direction degree of freedom is achieved by controlling the movement of two motors in the X direction. The micro-motion uses a motor-driven cam structure, which can achieve a micro-motion of ±1mm in a limited space.

[0034] Optionally, the first positioning module includes two vertical air-bearing components 5 and two second air-bearing parts. Both second air-bearing parts are located on the base 4. One vertical air-bearing component 5 is fixed to the connecting component 12, and the other vertical air-bearing component 5 is fixed to the end of the Y-axis air-bearing guide rail 8 away from the connecting component 12. The two vertical air-bearing components 5 and the two second air-bearing parts cooperate in a one-to-one correspondence. This allows the movement of the Y-axis air-bearing guide rail 8 in the X-axis to be supported by the cooperation of the two vertical air-bearing components 5 and the two second air-bearing parts, improving the stability of the movement.

[0035] Optionally, the second air flotation part includes an iron strip 6, which is fixed inside the base 4 and extends in the X direction.

[0036] Optionally, the second positioning module includes a Y-axis linear motor and a U-shaped air-bearing assembly 9. The stator of the Y-axis linear motor is mounted on the Y-axis air-bearing guide rail 8, and the mover of the Y-axis linear motor is mounted on the U-shaped air-bearing assembly 9. The U-shaped air-bearing assembly 9 is slidably engaged with the Y-axis air-bearing guide rail 8.

[0037] Optionally, a third air flotation unit is installed on the Y-direction air flotation guide rail 8, and the third air flotation unit extends in the Y direction and cooperates with the U-shaped air flotation assembly 9.

[0038] Optionally, the second positioning module further includes a vertical component 10 and a mirror block 11. The mirror block 11, the vertical component 10, and the U-shaped air-bearing component 9 are sequentially connected from top to bottom in the Z-axis direction. The vertical component 10 is used to drive the mirror block 11 in the R-axis direction. X Towards, R Y The Z-direction moves upwards and upwards. In this embodiment, the Z-direction can be any direction, but it is preferably a vertical direction. Correspondingly, the X-direction and Y-direction are preferably two mutually perpendicular directions in the horizontal plane. The R... X R represents the direction of rotation of mirror block 11 about the X-axis. Y R represents the direction of rotation of mirror block 11 about the Y-axis. Z The direction of rotation of mirror block 11 around the Z-axis indicates the direction of rotation. When the Z-axis is vertical, the positions of the X-axis and Y-axis both pass through mirror block 11, or the positions of the X-axis and Y-axis are both located below mirror block 11. When mirror block 11 is disc-shaped or cylindrical, the Z-axis is perpendicular to the circular cross-section of mirror block 11.

[0039] Optionally, the vertical assembly includes three sets of drive components, and the three sets of drive components are in R ZThe drive components are evenly distributed, and each includes a motor and a cam mounted on the U-shaped air flotation component 9. The cam is driven by the motor and contacts the mirror block. In this embodiment, the motor and the cam are connected via the cam, and the motor drives the cam, thereby driving the cam to move. Preferably, the mirror block 11 and the U-shaped air flotation component 9 are connected by a shaft that can slide relative to the U-shaped air flotation component 9 in the Z-direction. The top end of this shaft is connected to the mirror block 11 via a universal joint. The motors in each drive component cooperate with each other, and the cam drives the mirror block 11 to move. X R Y And Z-axis precision micro-motion.

[0040] Optionally, the connecting assembly includes a main body, a rotating spindle, and a bearing. The lateral air flotation assembly 3 and the vertical air flotation assembly 5 are both mounted on the main body. The bearing is mounted on the main body, and the Y-axis air flotation guide rail 8 is connected to the bearing via the rotating spindle. This allows the Y-axis air flotation guide rail 8 to rotate around the connecting assembly. Z Rotate.

[0041] The lateral air flotation assembly 3 includes lateral air flotation blocks and lateral preload magnets connected to each other. The lateral air flotation blocks are used to realize frictionless relative movement between the lateral air flotation assembly 3 and the first air flotation part. The lateral preload magnets provide preload force to the lateral air flotation assembly 3, thereby ensuring the clearance required for normal operation of the air flotation.

[0042] The vertical air flotation assembly 5 includes interconnected vertical air flotation blocks, decoupling flexible components, and vertical preload magnets. The vertical air flotation blocks are used to achieve frictionless relative motion between the vertical air flotation assembly and the second air flotation part. The vertical preload magnets provide preload force to the vertical air flotation assembly 5, thereby ensuring the clearance required for normal operation of the air flotation. The decoupling flexible components are used to eliminate vertical errors in the four vertical air flotation assemblies 5.

[0043] Another aspect of this application provides an integrated circuit manufacturing apparatus, including the worktable of the integrated circuit manufacturing apparatus provided in the embodiments of this application.

[0044] The integrated circuit manufacturing equipment provided in this application embodiment employs the worktable of the integrated circuit manufacturing equipment provided in this application embodiment. During use, positioning is achieved by moving the Y-axis air-bearing guide rail 8 and the second positioning module mounted on the Y-axis air-bearing guide rail 8 in the X-direction through a first X-axis linear motor 1. The lateral air-bearing component 3 and the vertical air-bearing component 5, along with the first and second air-bearing parts, replace the traditional structure of a motor, lead screw, and mechanical guide rail, simplifying the mechanical structure of the worktable and reducing the requirements for machining. Furthermore, it also improves product stability.

[0045] To better illustrate the workbench and integrated circuit manufacturing equipment provided in this application, this application also provides an application example of the workbench and integrated circuit manufacturing equipment, which is as follows:

[0046] Disadvantages of existing technology:

[0047] The structure is complex and the positioning accuracy is poor. Conventional low-precision stepper integrated circuit manufacturing equipment uses a mechanical guide rail plus motor lead screw structure for the XY axis of the workpiece stage. This mechanical structure is very complex and requires high machining precision. Due to the complexity of the structure, processing and integration are difficult, resulting in poor product stability.

[0048] Large size and poor dynamic performance. Conventional workpiece stages are large in size due to their complex structure, resulting in an overall large volume, uncontrollable mass, and poor overall dynamic performance. The high speed and high acceleration of the workpiece stage will bring a large impact to the whole machine, directly affecting the imaging quality of integrated circuit manufacturing equipment.

[0049] This application example designs a workpiece stage system for integrated circuit manufacturing equipment. It employs a long-stroke plus micro-motion architecture. The long-stroke system, using an H-type structure, enables coarse motion in the X / Y / Rz directions, while the short-stroke system enables micro-motion in the Z, Rx, and Ry directions. The system is driven by a linear motor, guided by an air-bearing guide rail, and uses an interferometer and optical scale measurement system. Its compact structure enables high-speed, high-acceleration, and high-positioning-precision motion.

[0050] Core solution:

[0051] Linear motors: The stator of the X-axis left-side linear motor is fixed to the X-axis air-bearing guide rail, and the mover of the X-axis left-side linear motor is connected to the Y-axis air-bearing guide rail via the Rz assembly; the stator of the X-axis right-side linear motor is fixed to the right-side motor support, and the mover of the X-axis right-side linear motor is connected to the Y-axis air-bearing guide rail via a connecting block; the X-axis left-side and X-axis right-side motors together provide X-axis drive for the workpiece stage. The Y-axis motor stator is mounted on the Y-axis air-bearing guide rail, and the Y-axis motor mover is connected to the U-shaped air-bearing assembly to provide Y-axis drive for the workpiece stage.

[0052] X-axis air buoyancy guide rail: fixed on the base, providing an air buoyancy surface for the lateral air buoyancy assembly, as well as a conductor for magnetic preload.

[0053] Lateral air flotation assembly: mounted and positioned on the Rz assembly, the Y-axis motion assembly provides X-axis guidance.

[0054] Base: Provides a running base for the workpiece stage motion assembly.

[0055] Bottom-supported air buoyancy: The vertical support assembly for the moving parts of the workpiece stage, consisting of vertical air buoyancy and magnetic preload components, moves on the iron bar air buoyancy surface on the marble, and vertically supports the entire moving assembly of the workpiece stage.

[0056] Iron bar: Fixed to the base, providing a buoyancy surface for the bottom air flotation assembly and a magnetic preload conductor.

[0057] Right motor mount: Fixed to the base, providing support for the X right motor.

[0058] Y-axis air flotation guide rail: provides a mounting base for the Y-axis motor and provides Y-axis guidance for the U-shaped air flotation assembly.

[0059] U-shaped air flotation assembly: Connected to the vertical assembly, it supports the short-stroke assembly. It has Y-axis and vertical air flotation guidance functions.

[0060] Vertical component: mounted on the U-shaped air flotation component, vertically connected to the mirror block, and can have Z / Rx / Ry precision micro-motion.

[0061] Mirror assembly: Connected to the vertical assembly, with mirror surfaces on both sides in the X and Y directions, serving as the measurement surfaces of the interferometer measurement system and supporting the wafer.

[0062] Rz component: Connected to the Y-axis air flotation guide rail and the lateral air flotation component, it has the Rz-axis degree of freedom.

[0063] The structure is simple and the positioning accuracy is high. This application example adopts a long-stroke plus micro-motion architecture. The long-stroke XY is driven by linear motors, and the Rz-axis degree of freedom is achieved by controlling the movement of two motors in the X direction. The micro-motion adopts a structure in which the motor drives the cam, which can achieve a micro-motion of ±1mm in a limited space.

[0064] With a compact structure and excellent dynamic performance, this application example utilizes air-bearing guideways for long-stroke X, Y, and vertical directions. Compared to traditional guideway slider mechanisms, this significantly improves mechanical performance, featuring low friction and high rigidity.

[0065] This application example designs a workpiece stage system for integrated circuit manufacturing equipment. It employs a long-stroke, micro-motion architecture to achieve precise positioning of the motion stage. The long-stroke X-axis is driven by two sets of motors, and the differential motion of the two sets of motors enables movement in the long-stroke RZ direction.

[0066] The workpiece stage system designed in this application example uses an air-bearing guide rail for guidance, which has frictionless and high rigidity mechanical properties.

[0067] The workpiece stage system measurement system designed in this application example adopts a measurement method using a grating ruler and an interferometer. General motion measurements such as workpiece loading and unloading are performed using the grating ruler for position measurement; while precision motion measurements during exposure are performed using a high-precision interferometer for position measurement.

[0068] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A table for an integrated circuit manufacturing apparatus, characterized by comprising: The first positioning module comprises a first X-direction linear motor, an X-direction air floating guide rail, a Y-direction air floating guide rail, a connecting assembly, a lateral air floating assembly and a vertical air floating assembly, the X-direction air floating guide rail is fixed on the base, the connecting assembly is fixed on one end of the Y-direction air floating guide rail, the lateral air floating assembly and the vertical air floating assembly are both installed on the connecting assembly, a first air floating part extending in the X-direction is arranged on the X-direction air floating guide rail, a second air floating part extending in the X-direction is arranged on the base, the lateral air floating assembly cooperates with the first air floating part, the vertical air floating assembly cooperates with the second air floating part, the stator of the first X-direction linear motor is fixed on the X-direction air floating guide rail, the rotor of the first X-direction linear motor is fixed on the connecting assembly, and the second positioning module is installed on the Y-direction air floating guide rail.

2. The stage of an integrated-circuit manufacturing apparatus according to Claim 1, wherein The first positioning module further comprises a second X-direction linear motor and an X-direction motor support fixed on the base, the stator of the second X-direction linear motor is fixed on the X-direction motor support, and the rotor of the second X-direction linear motor is fixed on the Y-direction air floating guide rail.

3. The stage of an integrated-circuit manufacturing apparatus according to Claim 2, wherein The first positioning module comprises two vertical air floating assemblies and two second air floating parts, the two second air floating parts are both located on the base, one vertical air floating assembly is fixed on the connecting assembly, and the other vertical air floating assembly is fixed on the end of the Y-direction air floating guide rail away from the connecting assembly, and the two vertical air floating assemblies correspond to the two second air floating parts one by one.

4. The stage of an integrated-circuit manufacturing apparatus according to Claim 3, wherein The second air floating part comprises an iron strip, the iron strip is fixed in the base, and the iron strip extends in the X-direction.

5. The stage of an integrated-circuit manufacturing apparatus according to any one of claims 1 to 4, wherein The second positioning module comprises a Y-direction linear motor and a Huizi-shaped air floating assembly, the stator of the Y-direction linear motor is installed on the Y-direction air floating guide rail, the rotor of the Y-direction linear motor is installed on the Huizi-shaped air floating assembly, and the Huizi-shaped air floating assembly is in sliding cooperation with the Y-direction air floating guide rail.

6. The stage of an integrated-circuit manufacturing apparatus according to claim 5, wherein A third air floating part is installed on the Y-direction air floating guide rail and extends in the Y-direction, and the third air floating part cooperates with the Huizi-shaped air floating assembly.

7. The stage of an integrated-circuit manufacturing apparatus according to claim 6, wherein The second positioning module further comprises a vertical assembly and a mirror block, the mirror block, the vertical assembly and the back-shaped air floating assembly are sequentially connected from top to bottom in the Z direction, the vertical assembly is used for driving the mirror block to move in the R X direction, the R Y direction and the Z direction.

8. The stage of an integrated-circuit manufacturing apparatus according to Claim 7, wherein The vertical assembly includes three sets of driving assemblies, three sets of the driving assemblies are in R Z To the uniform distribution, the driving assembly includes a motor and a cam mounted on the back-shaped air floating assembly, the cam is in transmission connection with the motor, and the cam is in contact with the mirror block.

9. The stage of an integrated-circuit manufacturing apparatus according to claim 1, wherein The connecting assembly comprises a main body, a rotating core shaft and a bearing, the lateral air floating assembly and the vertical air floating assembly are both installed on the main body, the bearing is installed on the main body, and the Y-direction air floating guide rail is connected with the bearing through the rotating core shaft. The lateral air floating assembly comprises a lateral air floating block and a lateral pre-loaded magnet connected with each other, The vertical air floating assembly comprises a vertical air floating block, a decoupling flexible piece and a vertical pre-loaded magnet connected with each other.

10. An integrated circuit manufacturing apparatus, characterized by comprising: A worktable of an integrated circuit manufacturing device as claimed in any one of claims 1-9.

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