Transfer device, vacuum transfer box and vacuum coating apparatus

Abstract

The application discloses a transfer device, a vacuum transfer box and a vacuum coating equipment. The second transfer mechanism is slidably connected to the first transfer mechanism, the third transfer mechanism is slidably connected to the second transfer mechanism, and the rotary feeding mechanism is slidably connected to the third transfer mechanism. Therefore, when the first transfer mechanism moves along the first direction, the rotary feeding mechanism can be driven to move, when the second transfer mechanism moves along the second direction, the rotary feeding mechanism can be driven to move, and when the third transfer mechanism moves along the third direction, the rotary feeding mechanism can be driven to move. The rotary feeding mechanism can rotate on the third transfer mechanism, and the rotation axis is parallel to the first direction. Therefore, the cage can be transferred from the previous process to the next process without damaging the vacuum environment. The vacuum time during manual feeding and unloading operation is saved, the operation time required for feeding and unloading is saved, the overall beat speed of the coating process is improved, and the production efficiency is improved.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating technology, and in particular to a transfer device, a vacuum transfer box, and a vacuum coating equipment. Background Technology

[0002] Vacuum coating technology is a method of evaporating or sputtering metals, alloys or compounds in a vacuum, causing them to solidify and deposit on the object to be coated (called a substrate, sheet or matrix).

[0003] Currently, most coating processes rely on manual loading and unloading. This means that after each coating cycle, the chamber door must be opened to transfer the coated part to the next stage. Opening the chamber door disrupts the vacuum environment required for coating. When the coated part is moved to the next stage, time must be spent creating a vacuum inside the chamber. Summary of the Invention

[0004] The purpose of this invention is to provide a transfer device, a vacuum transfer box, and a vacuum coating equipment that do not require disrupting the vacuum environment, save the vacuuming time during manual loading and unloading operations, and improve the overall cycle speed of the coating process, thereby increasing production efficiency.

[0005] In a first aspect, the present invention provides a transfer device, comprising a frame, a first transfer mechanism, a second transfer mechanism, a third transfer mechanism, and a rotating feeding mechanism; the first transfer mechanism is slidably connected to the frame and is movable relative to the frame along a first direction; the second transfer mechanism is slidably connected to the first transfer mechanism and is movable relative to the first transfer mechanism along a second direction; the third transfer mechanism is slidably connected to the second transfer mechanism and is movable relative to the second transfer mechanism along a third direction; the rotating feeding mechanism is rotatably disposed on the third transfer mechanism, and the rotation axis of the rotating feeding mechanism is parallel to the first direction, and the rotating feeding mechanism is capable of gripping a cargo cage; the first direction, the second direction, and the third direction are perpendicular to each other.

[0006] In an optional embodiment, the frame is provided with a first guide component that is movable along the second direction, the first guide component being connected to the second transfer mechanism, and the first guide component being capable of telescoping along the first direction.

[0007] In an optional embodiment, the first guide assembly includes a first guide member and a second guide member that are slidably connected, the first guide member and the second guide member being capable of relative sliding along the first direction; the first guide member is connected to the second transfer mechanism; the second guide member is drivenly connected to the frame and is capable of moving along the second direction.

[0008] In an optional embodiment, the frame is provided with a second driving mechanism, which is connected to the second guide member and is used to drive the second guide member to move along the second direction.

[0009] In an optional embodiment, the frame is provided with a second guide component that is movable along a third direction, the second guide component being connected to the third transfer mechanism, and the second guide component being extendable and retractable along the first direction.

[0010] In an optional embodiment, the second guide assembly includes a third guide and a fourth guide, the third guide and the fourth guide being capable of relative sliding along the first direction; the third guide is connected to the third transfer mechanism; the fourth guide is drivenly connected to the frame and is capable of moving along the second direction.

[0011] In an optional embodiment, the frame is slidably connected to a transmission frame, the transmission frame is slidably connected to the fourth guide member, the transmission frame is movable relative to the frame along the third direction, and the fourth guide member is movable relative to the transmission frame along the second direction.

[0012] In an optional embodiment, the transfer device includes a rotating mechanism, which includes a first rotating component and a second rotating component; the first rotating component and the second rotating component are spaced apart along the third direction; the first rotating component and the second rotating component are selectively connected to the rotating feeding mechanism to drive the rotating feeding mechanism to rotate relative to the third transfer mechanism; wherein the rotation direction of the rotating feeding mechanism driven by the first rotating component is opposite to the rotation direction of the rotating feeding mechanism driven by the second rotating component.

[0013] In an optional embodiment, the rotating feeding mechanism includes a rotating frame and a cargo cage tray; the length direction of the rotating frame is along the first direction, and one end of the rotating frame is rotatably connected to the third transfer mechanism; the cargo cage tray is connected to the rotating frame; the rotating mechanism is used to connect to the end of the rotating frame away from the third transfer mechanism to drive the rotating frame to rotate relative to the third transfer mechanism.

[0014] In an optional embodiment, the frame is provided with a first slide rail extending along the first direction, and the first transfer mechanism is slidably connected to the first slide rail.

[0015] In an optional embodiment, the first transfer mechanism includes a first frame and a first track disposed on the first frame. The first frame is slidably connected to the frame and is movable along the first direction. The first track extends along the second direction, and the second transfer mechanism is slidably connected to the first track.

[0016] In an optional embodiment, the second transfer mechanism includes a second frame and a second track disposed on the second frame; the second frame is slidably connected to the first transfer mechanism and is movable along the second direction; the second track extends along the third direction, and the third transfer mechanism is slidably connected to the second track.

[0017] In an optional embodiment, the frame is slidably connected to a transmission frame that is movable along the third direction, the transmission frame being slidably connected to the third transfer mechanism, and the transmission frame and the third transfer mechanism being able to slide relative to each other along the first direction.

[0018] In an optional embodiment, the transfer device further includes a rotating mechanism, a first driving mechanism, a second driving mechanism, a third driving mechanism, and a fourth driving mechanism; the first driving mechanism is used to drive the first transfer mechanism to move; the second driving mechanism is used to drive the second transfer mechanism to move; the third driving mechanism is used to drive the third transfer mechanism to move; and the fourth driving mechanism is used to drive the rotating mechanism to rotate, so as to drive the rotating feeding mechanism to rotate through the rotating mechanism.

[0019] Secondly, the present invention provides a vacuum transfer box, including a frame, a transfer box body, and a transfer device as described in any of the foregoing embodiments; the transfer box body is disposed on the frame, the transfer box body has a transfer chamber and an inlet and at least two outlets communicating with the transfer chamber, and the transfer device is located in the transfer chamber.

[0020] Thirdly, the present invention provides a vacuum coating apparatus, including a coating box and a vacuum transfer box as described in the foregoing embodiments; wherein each of the discharge ports corresponds to one of the coating boxes.

[0021] The beneficial effects of the embodiments of the present invention include:

[0022] The second transfer mechanism is slidably connected to the first transfer mechanism, and the third transfer mechanism is slidably connected to the second transfer mechanism. The rotating feeding mechanism is slidably connected to the third transfer mechanism. Therefore, when the first transfer mechanism moves along the first direction, it can drive the second transfer mechanism, the third transfer mechanism, and the rotating feeding mechanism to move. When the second transfer mechanism moves along the second direction, it can drive the third transfer mechanism and the rotating feeding mechanism to move. When the third transfer mechanism moves along the third direction, it can drive the rotating feeding mechanism to move. The rotating feeding mechanism can rotate on the third transfer mechanism, and the rotation axis is parallel to the first direction. This allows the cage gripped by the rotating feeding mechanism to rotate and move in three directions to transfer the cage from the previous process to the next process without disrupting the vacuum environment. This saves the vacuuming time and operation time required for manual loading and unloading, improves the overall cycle speed of the coating process, and thus improves production efficiency. Attached Figure Description

[0023] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0024] Figure 1 This is one of the schematic diagrams of the vacuum transfer box in this embodiment;

[0025] Figure 2 This is the second schematic diagram of the vacuum transfer box in this embodiment;

[0026] Figure 3 for Figure 1 , Figure 2 A schematic diagram after the hidden transfer box and frame have been removed;

[0027] Figure 4 for Figure 3 A partial structural diagram of the middle frame, the first transfer mechanism, and the second transfer mechanism;

[0028] Figure 5 for Figure 3 One of the schematic diagrams after the first motor, second motor, third motor, fourth motor and rotating mechanism are hidden;

[0029] Figure 6 for Figure 5 Enlarged view of part A;

[0030] Figure 7 for Figure 3 The second schematic diagram after the first motor, second motor, third motor, fourth motor and rotating mechanism are hidden;

[0031] Figure 8 for Figure 7 Enlarged view of part B.

[0032] Icons: 100 - Frame; 200 - Transfer box; 210 - Feed inlet; 220 - Discharge outlet; 300 - Transfer device; 310 - Frame; 311 - First slide rail; 313 - Second slide rail; 320 - First transfer mechanism; 321 - First frame; 322 - First track; 330 - Second transfer mechanism; 331 - Second frame; 332 - Second track; 333 - First guide assembly; 334 - First guide component; 335 - Second guide component; 340 - Third transfer mechanism; 341 - Third frame; 342 - Transmission frame ; 343-Second guide assembly; 344-Third guide component; 345-Fourth guide component; 346-Third track; 350-Rotating feeding mechanism; 351-Rotating frame; 352-Cargo cage pallet; 360-First rotating assembly; 361-Second rotating assembly; 362-Gear disk; 370-First drive mechanism; 371-Second drive mechanism; 372-Third drive mechanism; 373-Fourth drive mechanism; 380-First motor; 381-Second motor; 382-Third motor; 384-Fourth motor; 400-Cargo cage. Detailed Implementation

[0033] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0034] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0035] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0036] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this invention is in use. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention. In addition, the terms "first," "second," "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0037] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0038] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0039] The following is combined with Figures 1 to 8 The following describes some embodiments of the present invention in detail. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0040] This embodiment discloses a vacuum coating equipment, which includes a feed box, a first gate valve, a vacuum transfer box, a second gate valve, a coating box, and a vacuum pumping device.

[0041] The feeding box is mainly used to hold the cage 400 containing the parts to be coated. The feeding box connects to the vacuum transfer box via a first gate valve, and the vacuum transfer box connects to the coating box via a second gate valve. The vacuum transfer box is mainly used to transfer the cage 400 from the feeding box to the coating box, allowing the coating box to perform vacuum coating on the parts in the cage 400. In other words, the vacuum transfer box can transfer the cage 400 from the previous process station to the next process station. The vacuuming device mainly performs vacuuming treatment on the internal spaces of the feeding box, vacuum transfer box, and coating box.

[0042] In detail, the feeding box is equipped with a first pair of interfaces, and the vacuum transfer box is equipped with an inlet 210 and an outlet 220. A first gate valve is located between the feeding box and the vacuum transfer box. When the first gate valve is closed, it isolates the first pair of interfaces from the inlet 210, so that the vacuum environment in the vacuum transfer box and the coating box is not affected during the process of placing the cage 400 into the feeding box. The vacuuming device evacuates the feeding box to a certain degree so that it is basically the same as the vacuum degree in the vacuum transfer box. In this way, when the first gate valve is opened, the inlet 210 and the outlet 220 can be connected, so that the cage 400 can enter the vacuum transfer box from the feeding box without affecting the overall vacuum environment. The coating chamber is equipped with a second pair of interfaces. A second gate valve is located between the vacuum transfer chamber and the coating chamber. The second gate valve is closed during the process of the cage 400 being placed into the feeding box and entering the vacuum transfer chamber from the feeding box, thereby preventing the release of air during feeding from affecting the vacuum environment inside the coating chamber. When the feeding box is fully loaded and re-vacuumed to match the vacuum level of the vacuum transfer chamber, the second gate valve opens, and the discharge port 220 and the second pair of interfaces are connected. In this way, the cage 400 is transferred through the vacuum transfer chamber to the coating chamber to coat the parts.

[0043] Combination Figure 1 and Figure 2 The vacuum transfer box includes a frame 100, a transfer box body 200, and a transfer device 300. The frame 100 mainly serves to support the transfer box body 200 and the transfer device 300.

[0044] The transfer box 200 has a hollow structure and is mounted on the frame 100. The transfer box 200 has an inlet 210 and an outlet 220, with two or more outlets 220. Each outlet 220 connects to a coating box via a second gate valve. For example, the transfer box 200 is roughly rectangular, including a bottom wall and a top wall facing each other in a first direction, and four side walls connecting the bottom and top walls. The four side walls are connected end-to-end, with two side walls facing each other in a second direction. One of these two side walls has an inlet 210; the other two side walls, facing each other in a third direction, each have an outlet 220, thus connecting to two coating boxes.

[0045] The transfer device 300 is located in the transfer chamber to receive the cargo cage 400 in the feed box through the feed port 210 and place the cargo cage 400 into the coating box through the discharge port 220.

[0046] The first direction is the Z direction (up and down) shown in the figure, the second direction is the Y direction (front and back) shown in the figure, and the third direction is the X direction (left and right) shown in the figure. The first direction, the second direction, and the third direction are perpendicular to each other.

[0047] Combination Figure 3The transfer device 300 includes a frame 310, a first transfer mechanism 320, a second transfer mechanism 330, a third transfer mechanism 340, and a rotary feeding mechanism 350. The first transfer mechanism 320 is slidably connected to the frame 310 and is movable relative to the frame 310 along a first direction. The second transfer mechanism 330 is slidably connected to the first transfer mechanism 320 and is movable relative to the first transfer mechanism 320 along a second direction. The third transfer mechanism 340 is slidably connected to the second transfer mechanism 330 and is movable relative to the second transfer mechanism 330 along a third direction. The rotary feeding mechanism 350 is rotatably disposed on the third transfer mechanism 340, and the rotation axis of the rotary feeding mechanism 350 is parallel to the first direction. The rotary feeding mechanism 350 is capable of gripping the cargo cage 400.

[0048] Thus, the second transfer mechanism 330 is slidably connected to the first transfer mechanism 320, the third transfer mechanism 340 is slidably connected to the second transfer mechanism 330, and the rotary feeding mechanism 350 is slidably connected to the third transfer mechanism 340. Therefore, when the first transfer mechanism 320 moves along the first direction, it can drive the second transfer mechanism 330, the third transfer mechanism 340, and the rotary feeding mechanism 350 to move. When the second transfer mechanism 330 moves along the second direction, it can drive the third transfer mechanism 340 and the rotary feeding mechanism 350 to move. When the mechanism 340 moves along the third direction, it can drive the rotating feeding mechanism 350 to move. The rotating feeding mechanism 350 can rotate on the third transfer mechanism 340, and the rotation axis is parallel to the first direction. This allows the cage 400 gripped by the rotating feeding mechanism 350 to rotate and move in three directions, so as to transfer the cage 400 from the previous process to the next process. There is no need to destroy the vacuum environment, which saves the vacuuming time during manual loading and unloading operations and the operation time required for loading and unloading. This improves the overall cycle speed of the coating process and thus improves production efficiency.

[0049] To facilitate the automated movement of the rotary feeding mechanism 350 and improve the transfer efficiency of the cargo cage 400, the transfer device 300 further includes a first drive mechanism 370, a second drive mechanism 371, a third drive mechanism 372, and a fourth drive mechanism 373. The first drive mechanism 370 drives the first transfer mechanism 320 to move; the second drive mechanism 371 drives the second transfer mechanism 330 to move; the third drive mechanism 372 drives the third transfer mechanism 340 to move; and the fourth drive mechanism 373 drives the rotary mechanism to rotate, thereby causing the rotary feeding mechanism 350 to rotate.

[0050] In this embodiment, combined with Figure 4The first transfer mechanism 320 includes a first frame 321 and a first track 322 disposed on the first frame 321. The first frame 321 is slidably connected to the frame 310 and is movable along a first direction. The first track 322 extends along a second direction, and the second transfer mechanism 330 is slidably connected to the first track 322. In this way, by providing the first track 322 extending along the second direction on the first frame 321 for the second transfer mechanism 330 to slide, the movement of the second transfer mechanism 330 along the second direction can be limited, while the friction between the first transfer mechanism 320 and the second transfer mechanism 330 can be reduced.

[0051] The frame 310 is provided with a first slide rail 311 extending along the first direction. The first frame 321 of the first transfer mechanism 320 is slidably connected to the first slide rail 311. In this way, the first slide rail 311 reduces the friction between the frame 310 and the first transfer mechanism 320 and limits the positional relationship between the first transfer mechanism 320 and the frame 310, so that the first transfer mechanism 320 can move along the first direction.

[0052] Combination Figure 5 The second transfer mechanism 330 includes a second frame 331 and a second track 332. The second frame 331 is slidably connected to the first track 322 of the first transfer mechanism 320 and is movable in a second direction; the second track 332 extends in a third direction, and the third transfer mechanism 340 is slidably connected to the second frame 331. Thus, the third transfer mechanism 340 can move in the third direction by the guidance of the second track 332, while the second track 332 reduces frictional resistance.

[0053] A first guide component 333 is connected between the frame 310 and the second transfer mechanism 330. The first guide component 333 is movable relative to the frame 310 along a second direction and is also capable of extending and retracting along a first direction.

[0054] In this way, the first guide component 333 drives the second transfer mechanism 330 to move in the second direction. At the same time, since the first guide component 333 can extend and retract in the first direction, it will not hinder the movement of the second transfer mechanism 330 in the first direction, thus preventing possible motion interference between the first transfer mechanism 320 and the second transfer mechanism 330 due to their different directions of movement.

[0055] In this embodiment, the first guide assembly 333 includes a first guide member 334 and a second guide member 335 that are slidably connected; the first guide member 334 and the second guide member 335 are capable of relative sliding along a first direction; the first guide member 334 is connected to the second frame 331; the second guide member 335 is connected to the second drive mechanism 371, thereby indirectly connecting to the frame 310, so that it can move along a second direction under the action of the second drive mechanism 371, thereby driving the second transfer mechanism 330 to move along the second direction through the first guide member 334.

[0056] Thus, by having a first guide 334 and a second guide 335 that can slide relative to each other along the first direction disposed between the second frame 331 and the frame 310, the second drive mechanism 371 can drive the second frame 331 to move along the second direction through the second guide 335, while the second frame 331 can also move along the first direction through the first guide assembly, so as to prevent possible motion interference between the first transfer mechanism 320 and the second transfer mechanism 330 due to the different directions of motion.

[0057] Specifically, in combination Figure 6 The first guide member 334 can be a sleeve-shaped element fixed on the second frame 331, such as a linear bearing. The second guide member 335 is correspondingly inserted through the slide rod of the first guide member 334, thereby reducing the sliding friction between the two. The length directions of the first guide member 334 and the second guide member 335 are both along the first direction. One end of the second guide member 335 is connected to the second drive mechanism 371.

[0058] In this embodiment, combined with Figure 7 The third transfer mechanism 340 includes a third frame 341, on which a transmission frame 342 capable of moving in a third direction is slidably connected. The third frame 341 is slidably connected to the second track 332 of the second transfer mechanism 330, and the rotating feeding mechanism 350 is rotatably mounted on the third frame 341. The transmission frame 342 is slidably connected to the third frame 341, and the transmission frame 342 and the third frame 341 are capable of relative sliding in a first direction.

[0059] In this way, the rotating feeding mechanism 350 is driven to move along the third direction by the third frame 341, and the sliding connection between the transmission frame 342 and the third frame 341 allows them to slide along the first direction, thus preventing the transmission frame 342 from interfering with the movement of the third frame 341 in the first direction.

[0060] Combination Figure 8A second guide assembly 343 is connected between the third frame 341 and the transmission frame 342. The second guide assembly 343 is movable relative to the frame 310 in a third direction and is also capable of extending and retracting in a first direction.

[0061] In this way, the transmission frame 342 drives the third transfer mechanism 340 to achieve third-direction movement through the second guide component 343. At the same time, since the first guide component 333 can extend and retract in the first direction, the third frame 341 and the transmission frame 342 can slide relative to each other in the first direction, so as to prevent the transmission frame 342 from interfering with the movement of the third frame 341 in the first direction and avoid the possible motion interference between the first transfer mechanism 320 and the third transfer mechanism 340 due to their different directions of movement.

[0062] In this embodiment, the second guide assembly 343 includes a third guide member 344 and a fourth guide member 345 that are slidably connected. The third guide member 344 and the fourth guide member 345 are capable of relative sliding along the first direction, thereby enabling relative sliding between the transmission frame 342 and the third frame 341 with low friction. The third guide member 344 is connected to the third frame 341. The transmission frame 342 is provided with a third track 346 along the second direction, and the fourth guide member 345 is slidably connected to the third track 346. That is, the fourth guide member 345 is indirectly connected to the frame 310 through the transmission frame 342, so that it can move relative to the frame along the second and third directions, while preventing the movement of the third frame 341 in the first and third directions from interfering with each other.

[0063] The third guide 344 can be a sliding column fixed on the third frame 341, and the fourth guide 345 can be a linear bearing. Both the third guide 344 and the fourth guide 345 extend along the first direction. The third guide 344 slides through the fourth guide 345, and the fourth guide 345 can be slidably connected to the third track 346 by a slider.

[0064] In order to reduce the frictional force of the transmission frame 342 moving on the frame 310, a second slide rail 313 extending along a third direction is provided on the frame 310, and the transmission frame 342 is slidably connected to the second slide rail 313.

[0065] Combination Figure 5 and Figure 7The rotating feeding mechanism 350 includes a rotating frame 351 and a cage tray 352. The length direction of the rotating frame 351 is along a first direction, and one end of the rotating frame 351 is rotatably connected to the third frame 341 of the third transfer mechanism 340. The cage tray 352 is connected to the rotating frame 351; a rotating mechanism is used to connect to the end of the rotating frame 351 away from the third transfer mechanism 340 to drive the rotating frame 351 to rotate relative to the third transfer mechanism 340, thereby causing the rotating frame 351 to drive the cage 400 held by the cage tray 352 to perform a circular motion, so as to change the orientation of the cage 400.

[0066] The structure of the cargo cage 400 is generally cylindrical. Therefore, when the transfer device 300 moves the cargo cage 400, the stability during transportation needs to be considered. Therefore, two cargo cage trays 352 are arranged opposite each other in the first direction, at both ends of the cargo cage 400. The cargo cage trays 352 are provided with semi-circular holes with the same outer diameter as the cargo cage 400. The opening direction of the semi-circular holes is away from the rotating frame 351. A support platform is provided on the inner wall of the semi-circular holes to support the cargo cage 400.

[0067] The rotating mechanism drives the rotating feeding mechanism 350 to rotate relative to the third transfer mechanism 340. The rotating mechanism includes a first rotating component 360 and a second rotating component 361. The first rotating component 360 and the second rotating component 361 have basically the same structure, both being a gear disk 362 with a rotating shaft. The rotating shaft is used to connect the rotating frame 351. When the gear disk 362 rotates, it drives the rotating frame 351 to rotate. Of course, the first rotating component 360 and the second rotating component 361 can also be in the form of a belt drive structure or a turntable structure.

[0068] Combination Figure 1 The first rotating assembly 360 and the second rotating assembly 361 are spaced apart along a third direction. The first rotating assembly 360 and the second rotating assembly 361 are selectively connected to the rotating feeding mechanism 350 to drive the rotating feeding mechanism 350 to rotate relative to the third transfer mechanism 340. The rotation direction of the rotating feeding mechanism 350 driven by the first rotating assembly 360 is opposite to the rotation direction of the rotating feeding mechanism 350 driven by the second rotating assembly 361. Thus, by driving the rotating feeding mechanism 350 to rotate in opposite directions through the first rotating assembly 360 and the second rotating assembly 361, the cargo cage 400 is transferred to the coating box docked with different discharge ports 220, reducing the overall volume occupied by the vacuum transfer box and making the structure more compact.

[0069] Combination Figure 1In this embodiment, the transfer box 200 has drive motors on its exterior, each corresponding to one of the first drive mechanism 370, the second drive mechanism 371, the third drive mechanism 372, and the fourth drive mechanism 373. Each of these drive mechanisms is connected to its corresponding drive motor via a magnetic fluid sealed transmission component. In other words, the transfer box 200 has a first motor 380, a second motor 381, a third motor 382, ​​and a fourth motor 384 on its exterior. These motors are connected to the first drive mechanism 370, the second drive mechanism 371, the third drive mechanism 372, and the fourth drive mechanism 373 via fluid sealed transmission components. This allows all motors to transmit power to the various drive mechanisms inside the transfer box 200 via magnetic fluid, ensuring that the vacuum environment inside the transfer box 200 remains unaffected.

[0070] Since the rotating mechanism includes a first rotating component 360 and a second rotating component 361, there are correspondingly two fourth motors 384. One fourth motor 384 is connected to the first rotating component 360 in a transmission connection, and the other fourth motor 384 is connected to the second rotating component 361 in a transmission connection.

[0071] In this embodiment, the first driving mechanism 370 can be a lead screw transmission mechanism, which includes a first lead screw nut and a first lead screw with threaded engagement. The length direction of the first lead screw is along a first direction. The first lead screw nut is fixed to the first frame 321 of the first transfer mechanism 320, and the first lead screw is connected to the first motor 380 for transmission. Thus, when the first motor 380 is working, the torsional driving force provided by the first motor 380 causes the first lead screw to rotate. Since the first lead screw nut is fixed to the first frame 321, the first lead screw and the first lead screw nut generate a helical motion, converting the torsional driving force into a linear driving force, so that the first lead screw nut drives the first frame 321 to move along the first direction.

[0072] The first motor 380 is mounted on the side wall of the vacuum chamber, and the axis of the first motor 380 is perpendicular to the first direction. Therefore, it is necessary to change the direction of the torsional driving force. At this time, the transmission connection between the first motor 380 and the first lead screw can be realized by bevel gear.

[0073] Specifically, a gear shaft is provided on the frame 310, the length of which extends perpendicular to the first direction. The gear shaft is provided with a first bevel gear, and a second bevel gear is provided on the first lead screw. The first and second bevel gears mesh, so that when the first motor 380 is working, it can drive the gear shaft to rotate, and then drive the first lead screw to rotate through the meshing of the two bevel gears.

[0074] Of course, in some embodiments, the first drive mechanism 370 may also be a gear and rack mechanism or a belt drive, etc. Taking the gear and rack mechanism as an example, the rack extends along the first direction and is fixed to the first frame 321, while the gear is connected to the first motor 380, so that when the first motor 380 is working, the first transfer mechanism 320 moves in the first direction.

[0075] In this embodiment, the second drive mechanism 371 can also be a lead screw transmission mechanism, which includes a threaded second lead screw and a second lead screw nut. The length direction of the second lead screw is along the second direction. The second lead screw nut is connected to the second guide member 335. The second lead screw is connected to the second motor 381 for transmission. Thus, when the second motor 381 is working, the torsional driving force provided by the second motor 381 causes the second lead screw to rotate. Since the second lead screw nut is fixed to the second frame 331, the second lead screw and the second lead screw nut generate a helical motion, converting the torsional driving force into a linear driving force, so that the second lead screw nut drives the second frame 331 to move along the second direction.

[0076] Of course, in some embodiments, the second drive mechanism 371 may also be a gear and rack mechanism or a belt drive mechanism or other transmission methods.

[0077] In this embodiment, the third drive mechanism 372 can be a belt drive mechanism, which includes a drive roller, a driven roller, and a conveyor belt. Both the drive roller and the driven roller are rotatably mounted on the frame and face each other in a third direction. The rotation axes of the drive roller and the driven roller are both along the second direction. The conveyor belt is wound around the drive roller and the driven roller. The transmission frame 342 of the third transfer mechanism 340 is connected to the conveyor belt, and the drive roller is connected to the third motor 382. Thus, when the third motor 382 is working, the driven roller can be moved by the friction between the drive roller and the conveyor belt, thereby realizing the movement of the transmission frame 342 along the third direction.

[0078] It is understood that in some embodiments, the third drive mechanism 372 may also be a gear and rack mechanism or a lead screw drive mechanism or other transmission methods.

[0079] In this embodiment, the fourth drive mechanism 373 can be a gear transmission mechanism, and there are two of them. They are both fixed on the top wall of the transfer box 200 and located inside the transfer box 200. They are respectively connected to the first rotating component 360 and the second rotating component 361. Specifically, the fourth drive mechanism 373 meshes with the gear disk 362. When the fourth motor 384 is working, it drives the gear disk 362 to rotate through the fourth drive mechanism 373. This drives the rotating frame 351 to rotate when the rotating shaft of the gear disk 362 of the first rotating component 360 or the second rotating component 361 is connected to the rotating frame 351.

[0080] In this embodiment, the working principle of the vacuum transfer box is illustrated as follows:

[0081] When the transfer device 300 needs to pick up materials, the rotating feeding mechanism 350 is aligned with the feed inlet 210 of the transfer box 200. Then, driven by the first transfer mechanism 320, the cage tray 352 is lowered to the low position for picking up materials. The second transfer mechanism 330 drives the cage tray 352 forward toward the feed inlet 210 to the picking position, so that the cage tray 352 picks up the cage 400. Then, the first transfer mechanism 320 drives the cage tray 352 upward to lift the cage 400 to the high position for picking up materials. The second transfer mechanism 330 drives the cage tray 352 backward to the original middle position.

[0082] If material needs to be fed into the coating box through the discharge port 220 on the right, the third transfer mechanism 340 drives the cage tray 352 to move to the left until the rotating frame 351 is directly opposite the first rotating component 360. Then, the first transfer mechanism 320 drives the rotating frame 351 to move upward, connecting the rotating frame 351 with the first rotating component 360. Next, the first rotating component 360 drives the rotating frame 351 to rotate 90° clockwise to the right, so that the cage tray 352 is directly opposite the right discharge port 220. Then, the first transfer mechanism 320 drives the rotating frame 351 to descend, disengaging it from the first rotating component 360. Afterward, the third transfer mechanism 340 drives the cage tray 352 to move to the right until it enters the loading position inside the coating box. The first transfer mechanism 320 then drives the cage tray 352 downward, disengaging it from the cage 400. Finally, the third transfer mechanism 340 drives the rotating feeding mechanism 350 back into the transfer box 200, thus completing one operation of picking up and placing the cargo cage 400.

[0083] As for the process of feeding material into the coating box through the discharge port 220 on the left, it is basically the same as the above process. It should be noted that at this time, the rotating frame 351 is connected to the second rotating component 361, which drives the rotating frame 351 to rotate counterclockwise to the left by 90°.

[0084] Furthermore, it should be noted that although the transfer device 300 in this embodiment is used for the transfer of coated parts in vacuum coating as described above, it does not mean that the transfer device 300 can only be used for the transfer of coated parts on shelves. It should be understood that the transfer device 300 can also be used in other industries that require the transfer of goods.

[0085] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A vacuum transfer box, characterized in that, Includes the frame, transfer housing, and transfer device; The transfer box is disposed on the frame. The transfer box has a transfer chamber, an inlet communicating with the transfer chamber, and at least two outlets. The inlet and each outlet are located on different sides of the transfer box. The transfer device is located in the transfer chamber. The transfer device includes a frame, a first transfer mechanism, a second transfer mechanism, a third transfer mechanism, and a rotating feeding mechanism; The first transfer mechanism is slidably connected to the frame and is capable of moving relative to the frame along a first direction; The second transfer mechanism is slidably connected to the first transfer mechanism and is capable of moving relative to the first transfer mechanism in a second direction; The third transfer mechanism is slidably connected to the second transfer mechanism and is capable of moving relative to the second transfer mechanism in a third direction; The rotating feeding mechanism is rotatably mounted on the third transfer mechanism, and the rotation axis of the rotating feeding mechanism is parallel to the first direction. The rotating feeding mechanism is capable of gripping the cargo cage. The first direction, the second direction, and the third direction are perpendicular to each other; The transfer device includes a rotating mechanism, which includes a first rotating component and a second rotating component. The first rotating component and the second rotating component are spaced apart along the third direction; The first rotating assembly and the second rotating assembly are selectively connected to the rotating feeding mechanism to drive the rotating feeding mechanism to rotate relative to the third transfer mechanism; Wherein, the rotation direction of the first rotating component driving the rotating feeding mechanism to rotate is opposite to the rotation direction of the second rotating component driving the rotating feeding mechanism to rotate; The rotating feeding mechanism includes a rotating frame and a cargo cage tray; The length of the rotating frame is along the first direction, and one end of the rotating frame is rotatably connected to the third transfer mechanism. The cargo cage pallet is connected to the rotating frame; the rotating mechanism is used to connect to the end of the rotating frame away from the third transfer mechanism to drive the rotating frame to rotate relative to the third transfer mechanism.

2. The vacuum transfer box according to claim 1, characterized in that, A first guide component is connected between the frame and the second transfer mechanism. The first guide component is movable relative to the frame in the second direction and is also capable of extending and retracting in the first direction.

3. The vacuum transfer box according to claim 2, characterized in that, The first guide assembly includes a first guide member and a second guide member that are slidably connected, and the first guide member and the second guide member are capable of relative sliding along the first direction; The first guide member is connected to the second transfer mechanism; The second guide is connected to the frame and is movable along the second direction.

4. The vacuum transfer box according to claim 3, characterized in that, The frame is provided with a second driving mechanism, which is connected to the second guide member and is used to drive the second guide member to move along the second direction.

5. The vacuum transfer box according to claim 1, characterized in that, A second guide component is connected between the frame and the third transfer mechanism. The second guide component is movable relative to the frame along the third direction and is also capable of extending and retracting along the first direction.

6. The vacuum transfer box according to claim 5, characterized in that, The second guide assembly includes a third guide and a fourth guide, the third guide and the fourth guide being capable of relative sliding along the first direction; The third guide member is connected to the third transfer mechanism; The fourth guide is connected to the frame and is capable of moving along the second direction.

7. The vacuum transfer box according to claim 6, characterized in that, The frame is slidably connected to a transmission frame, which is slidably connected to the fourth guide member. The transmission frame is movable relative to the frame along the third direction, and the fourth guide member is movable relative to the transmission frame along the second direction.

8. The vacuum transfer box according to claim 1, characterized in that, The frame is provided with a first slide rail extending along the first direction, and the first transfer mechanism is slidably connected to the first slide rail; And / or, The first transfer mechanism includes a first frame and a first track disposed on the first frame. The first frame is slidably connected to the frame and is movable along the first direction. The first track extends along the second direction, and the second transfer mechanism is slidably connected to the first track. And / or, The second transfer mechanism includes a second frame and a second track disposed on the second frame; the second frame is slidably connected to the first transfer mechanism and is capable of moving along the second direction; the second track extends along the third direction, and the third transfer mechanism is slidably connected to the second track; And / or, The frame is slidably connected to a transmission frame that can move along the third direction. The transmission frame is slidably connected to the third transfer mechanism, and the transmission frame and the third transfer mechanism can slide relative to each other along the first direction. And / or, The transfer device further includes a rotating mechanism, a first driving mechanism, a second driving mechanism, a third driving mechanism, and a fourth driving mechanism; the first driving mechanism is used to drive the first transfer mechanism to move; the second driving mechanism is used to drive the second transfer mechanism to move; the third driving mechanism is used to drive the third transfer mechanism to move; and the fourth driving mechanism is used to drive the rotating mechanism to rotate, so as to drive the rotating feeding mechanism to rotate through the rotating mechanism.

9. A vacuum coating apparatus, characterized in that, It includes a coating box and a vacuum transfer box as described in any one of claims 1-8; wherein each of the discharge ports corresponds to one of the coating boxes.

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