A polymer-based optical waveguide amplifier for (S+C+L) band and a preparation method thereof

Abstract

The present invention discloses a polymer-based optical waveguide amplifier for the (S + C + L) band and a preparation method thereof, belonging to the technical field of the preparation of polymer optical waveguide devices. In the present invention, rare earth nanoparticles doped with two luminescent center ions, Er<supgt;3+< / supgt> / Tm<supgt;3+< / supgt;, and an inert layer are prepared, and technical means such as regulating the doping position and doping ratio of Er<supgt;3+< / supgt> / Tm<supgt;3+< / supgt> and regulating the thickness of the growth barrier layer are used to tune the ultra-wideband emission spectrum of the nanoparticles; then the polymer gain material is prepared by using the above rare earth nanoparticles, and the full width at half maximum of the gain medium can reach 117 nm. Furthermore, an optical waveguide amplifier is prepared by using such a gain material, so that the working wavelength range of the optical waveguide amplifier is extended from a single S band or (C + L) band to the (S + C + L) band. The broadband polymer optical waveguide amplifier prepared by this method can obtain optical amplification gain in the wavelength range of 1450 nm - 1580 nm, and the gain is flat. The relative gain in the wavelength range of 1460 nm - 1575 nm can reach 6 - 8 dB.

Description

Technical Field

[0001] The invention belongs to the technical field of preparation of polymer optical waveguide devices, and in particular relates to a polymer-based optical waveguide amplifier oriented to a (S+C+L) band and a preparation method thereof. Background Art

[0002] With the development of technologies such as 5G, Internet of Things, and artificial intelligence, the demand for communication bandwidth and capacity has increased dramatically. Optical amplifiers can compensate for the power loss of signal light in optical communication systems and are important optical devices widely used in optical communication technologies. Optical waveguide amplifiers are new optical amplifiers that can be used in integrated systems and were developed after optical fiber amplifiers. Rare earth-doped optical waveguide amplifiers use the photoluminescence effect of lanthanide rare earth ions and pump light as excitation to amplify signal light. Optical waveguide amplifiers prepared using different types of rare earth ions as luminescence centers can achieve light amplification in various optical communication bands and are easy to integrate with a variety of optical waveguide devices. Therefore, they have important applications in integrated optical communication systems.

[0003] Using lanthanide luminescent center ion doped nanocrystals to realize the amplification function of optical waveguide is a major means of preparing organic optical waveguide amplifiers. The luminescence of lanthanide rare earth ions mainly comes from their rich 4f electron energy level transitions, and the spectrum can cover from ultraviolet to infrared bands, which provides very favorable conditions for the design and preparation of broadband optical amplifiers.

[0004] Currently available organic optical waveguide amplifiers mainly use erbium ions (Er 3+ )of 4 I 13 / 2 → 4 I 15 / 2 With the growth of communication bandwidth demand, the working bandwidth of optical amplifiers must also match it, and it needs to be expanded from the (C+L) band to the short wavelength (S+C+L) band. However, whether broadband optical communication covering the band can be achieved depends on whether a practical broadband optical amplifier can be developed. To achieve S-band optical amplification in optical amplifiers, thulium ions (Tm 3 + )of 3 H 4 → 3 F 4 Traditional optical amplification technology uses two optical amplifiers, S-band and (C+L)-band, to work together to expand bandwidth. There has been no report on an optical amplifier whose working wavelength covers the (S+C+L) band. The researchers first explored the 3+ / Tm 3+ These two rare earth ions are co-doped in nanocrystals to achieve broadband luminescence and thus prepare ultra-broadband (S+C+L) band optical amplifiers.3+ / Tm 3+ In these two co-doping systems, there are inevitably problems of energy transfer between multiple luminescent active ions, competition of excited state energy level population, and luminescence reabsorption. These problems directly lead to the small S-band gain and uneven broadband gain of the optical amplifier, making it difficult to be practical. Summary of the invention

[0005] In order to solve the problems of too small S-band gain and uneven broadband gain in broadband polymer waveguide amplifiers in the prior art, the present invention provides a polymer-based optical waveguide amplifier for the (S+C+L) band and a preparation method thereof. 3+ / Tm 3+ Core-shell rare earth nanoparticles and inert layers of these two luminescent central ions, and regulation of Er 3+ / Tm 3+ The ultra-wideband luminescence spectrum of nanoparticles is tuned by technical means such as doping position and doping ratio, and regulating the thickness of the growth barrier layer; then the above rare earth nanoparticles are used to prepare polymer gain materials, and the half-height of the gain medium can reach 117nm, and then this type of gain material is used to prepare optical waveguide amplifiers, so that the operating wavelength range of the optical waveguide amplifier is expanded from a single S band or (C+L) band to the (S+C+L) band. The broadband polymer optical waveguide amplifier prepared by this method can obtain optical amplification gain in the 1450nm-1580nm band, and the gain is flat, and the relative gain in the 1460nm-1575nm band can reach 6-8dB.

[0006] The principle of the preparation method of the polymer-based optical waveguide amplifier for the (S+C+L) band of the present invention is as follows:

[0007] By constructing the core-shell structure of nanoparticles, 3+ / Tm 3+ The two rare earth ions are doped in different core-shells respectively, and an inert barrier layer is prepared to solve the problem of weak luminescence intensity of thulium ions caused by energy transfer between the two luminescent active ions. Ultra-wideband (S+C+L) band emission spectrum broadening is achieved in the same nanoparticle, thereby obtaining a polymer optical waveguide amplifier that can realize ultra-wideband (S+C+L) band broadband light amplification function.

[0008] The present invention is achieved through the following technical solutions:

[0009] A method for preparing a polymer-based optical waveguide amplifier for the (S+C+L) band, comprising the following steps:

[0010] Step 1: Preparation of Er-doped 3+ , Tm 3+Core-shell rare earth nanoparticles with two luminescent central ions are doped in different shell layers and a barrier layer is added; and by regulating Er 3+ / Tm 3+ The doping position and doping ratio, and the thickness of the growth barrier layer are regulated to make Er 3+ , Tm 3+ The emission wavelength of the two luminescent central ions in the near-infrared region is 1460nm-1570nm, achieving a relatively flat broadband emission, with a full width at half maximum of 117nm;

[0011] Step 2: Physically doping or chemically bonding the doped Er prepared in step 1 3+ , Tm 3+ Core-shell rare earth nanoparticles of two luminescent center ions are doped in a polymer matrix to prepare a polymer gain medium with broadband luminescence properties;

[0012] Step 3: Use the broadband polymer gain medium obtained in step 2 as the core layer to prepare an optical waveguide amplifier, and adjust the refractive index of the core layer by adjusting the mounting matrix, baking temperature, and exposure time.

[0013] Furthermore, step one specifically includes the following contents:

[0014] A1: Preparation of core-multi-shell rare earth nanoparticles MREF by hydrothermal method, high temperature pyrolysis method or precipitation method 4 , where RE is a rare earth element and M is an alkali metal;

[0015] A2: The luminescent central ion Er 3+ 、Tm 3+ They are doped in different positions of the core and shell respectively;

[0016] The luminescent central ion Er 3+ 、Tm 3+ Doped at different positions of the core and shell, and co-doped with sensitizer ion Yb 3+ , as well as up-conversion quencher ions or other ions that can enhance the luminescence of the luminescent center ion in the (S+C+L) band, including Ce 3+ , Pr 3 + 、Nd 3+ 、Ho 3+ 、Eu 3+ or Tb 3+ ion;

[0017] A3: In Er 3+ 、Tm 3+ The ion-doped shell layer is coated with an intermediate barrier layer, which includes but is not limited to: MREF 4 (where RE is a rare earth element, M is an alkali metal), SiO2 、TiO 2 wait;

[0018] A4: Regulation 3+ 、Tm 3+ The doping position and doping ratio of ions and the thickness of the growth barrier layer are regulated to make Er 3+ The emission peak at a wavelength of 1.53 μm and Tm 3+ The emission peak spectral intensity at a wavelength of 1.48μm is matched, forming a wide spectrum covering 1.45μm-1.57μm in the same rare earth nanoparticle, achieving spectral broadening and spectral flatness in the (S+C+L) band, laying the foundation for broadband optical amplifiers to obtain gain in the (S+C+L) band.

[0019] Further, in step A2, the concentration of the luminescent center ion is defined as: the amount of substance of each luminescent center ion / the total amount of substance of the rare earth element in the rare earth nanoparticles, ranging from 0% to 2%; the total concentration of the luminescent center ion is defined as: the sum of the concentrations of all types of luminescent center ions, ranging from no more than 4%, and the concentration of the sensitizer ion is defined as: the amount of substance of the sensitizer ion / the total amount of substance of the rare earth element in the rare earth nanoparticles, specifically 20%; and the sum of the total concentration of the luminescent center ion and the concentration of the sensitizer ion does not exceed 25%;

[0020] The thickness of the barrier layer is ≥3nm, and the barrier layer is a fluoride matrix material or SiO 2 , TiO 2 Oxide materials.

[0021] Furthermore, the physical doping method in step 2 specifically includes the following contents:

[0022] B1: dispersing the rare earth nanoparticles prepared in step 1 in an organic solvent under ultrasonic dispersion or high-speed stirring to obtain a solution in which the rare earth nanoparticles are uniformly dispersed;

[0023] B2: Mixing the dispersion obtained in step B1 with a polymer photoresist in a mass percentage of 10%-30%; ultrasonically dispersing or high-speed stirring the mixed solution to obtain a gain medium in which rare earth nanoparticles are evenly dispersed.

[0024] Furthermore, the organic solvent in step B1 includes: alcohols, ketones, esters or heterocyclic compounds; the alcohols include methanol, ethanol, ethylene glycol or propylene glycol; the ketones include acetone, butanone or cyclohexanone; the esters include methyl formate, ethyl acetate, ethyl formate or butyl acetate; the heterocyclic compounds include furan, thiophene, pyrrole, thiazole or imidazole; the polymer photoresist in step B2 includes SU-8 series, BPO or BP212.

[0025] Furthermore, the chemical bonding method in step 2 specifically includes the following contents:

[0026] C1: dispersing the rare earth nanoparticles prepared in step 1 in a solvent, adding a polymer monomer and an initiator, wherein the mass of the initiator is 0.01%-1% of the mass of the polymer monomer;

[0027] C2: The nanoparticles are polymerized in a polymer matrix by bulk polymerization, solution polymerization, suspension polymerization or emulsion polymerization to obtain a gain medium; after polymerization, the doping concentration of the rare earth nanoparticles in the polymer is 0.01%-50%.

[0028] Furthermore, in step C1, the polymer monomer is a monomer that can undergo addition polymerization or a monomer that can undergo condensation polymerization; the monomer that can undergo addition polymerization includes ① monomers with unsaturated double bonds and triple bonds: such as unsaturated acid esters [specifically including: acrylates and their derivatives (methyl acrylate, methyl methacrylate, deuterated methyl methacrylate, fluoromethyl methacrylate, ethyl acrylate, ethyl methacrylate, ethyl ethyl acrylate, propyl ethyl acrylate, etc.); butyric acid esters and their derivatives (methyl butyric acid ester, methyl methyl butyric acid ester, ethyl butyric acid ester, ethyl methyl butyric acid ester, ethyl ethyl butyric acid ester, propyl butyric acid ester, etc.); 1. Monomers containing epoxy groups: glycidyl methacrylate, epoxy resin monomer, 1,2-epoxybutylene, 1,2-epoxy-9-decene, 1,2-epoxyheptane, glycidyl methyl ether; the monomers that can undergo polycondensation reaction include phenolic resin monomer (epichlorohydrin, bisphenol A), polyester, lactide monomer, etc.

[0029] Furthermore, in step C2, the polymerization temperature is controlled at 10° C. to 120° C., the polymerization time is 0.5 hour to 48 hours, and the polymerization degree of the composite polymer gain medium is adjusted according to the changes in the optical waveguide device manufacturing process to control the polymerization degree of the composite polymer to be 5%-95%.

[0030] Furthermore, step three specifically includes the following contents:

[0031] The broadband polymer gain medium obtained in step 2 is used as the core layer, and a rectangular waveguide amplifier, an inverted ridge waveguide amplifier or a loaded strip waveguide amplifier is prepared by spin coating, evaporation, photolithography, plasma etching, and ultraviolet imprinting.

[0032] On the other hand, the present invention also provides a polymer-based optical waveguide amplifier for the (S+C+L) band, which is prepared by the above preparation method. The relative gain of the polymer-based optical waveguide amplifier in the 1460nm-1575nm band can reach 6-8dB.

[0033] Compared with the prior art, the advantages of the present invention are as follows:

[0034] 1. The erbium-thulium co-doped broadband polymer optical waveguide amplifier proposed in the present invention can realize broadband optical amplification of 1.45μm-1.57μm by using a multilayer core-shell structure, which makes up for the problem of single working wavelength of traditional polymer waveguide amplifiers. Its working wavelength can cover the (S+C+L) band;

[0035] 2. Regulate Er 3+ / Tm 3+ The doping position and doping ratio of Er are adjusted, and the thickness of the growth barrier layer is adjusted. 3+ The emission peak at a wavelength of 1.53 μm and Tm 3+ By matching the emission peak spectral intensity at a wavelength of 1.48 μm, the spectral emission of the nanoparticles in the (S+C+L) band can be flattened, thereby obtaining a flat gain in the (S+C+L) band in a broadband optical waveguide amplifier;

[0036] 3. The method is highly repeatable and the prepared broadband optical amplifier has good long-term stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following is a brief introduction to the drawings required for the specific embodiments or the description of the prior art. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn according to the actual scale.

[0038] Figure 1 :Doping the luminescent center ion Er at different positions 3+ 、Tm 3+ Schematic diagram of the nanoparticle structure;

[0039] Figure 2 :Rare earth NaYF prepared by thermal decomposition method 4 :Tm,Yb@NaYF 4 @NaYF 4 :Transmission electron microscope photo of Er nanoparticles;

[0040] Figure 3 :Rare earth NaYF prepared by thermal decomposition method 4 :Tm,Yb@NaYF 4 @NaYF4 : XRD test results of Er nanoparticles;

[0041] Figure 4 : Using 980nm infrared laser to excite Er 3+ NaYF with different doping concentrations 4 :Tm,Yb@NaYF 4 @NaYF 4 : Er nanoparticles, obtaining a broadband luminescence spectrum with a wavelength of 1.45μm-1.57μm;

[0042] Figure 5 : Schematic diagram of preparing a rectangular optical waveguide amplifier using photolithography;

[0043] Figure 6 :Device photos;

[0044] Figure 7 : Gain test results. DETAILED DESCRIPTION

[0045] The present invention will be further described below in conjunction with specific embodiments. These embodiments of the present invention are only used to explain the specific embodiments of the present invention, rather than to limit the scope of the present invention. After reading the content taught by the present invention, those skilled in the art may make various changes or modifications to the present invention, and these equivalent forms also fall within the scope defined in the claims attached to the application.

[0046] In the following examples, NaYF was prepared by high temperature pyrolysis. 4 :Tm,Yb@NaYF 4 @NaYF 4 :Er nanoparticles, and a broadband polymer gain medium was prepared by physical doping and chemical bonding methods. A rectangular waveguide amplifier, an inverted ridge waveguide amplifier with PMMA as the lower cladding, and an inverted ridge waveguide amplifier with silicon dioxide as the lower cladding were prepared using the gain medium. A 980nm laser was used as the pump source to detect the gain characteristics of the polymer optical waveguide amplifier in the 1.45μm-1.57μm broadband.

[0047] Example 1

[0048] This embodiment provides a method for preparing a polymer-based optical waveguide amplifier for the (S+C+L) band, which specifically includes the following steps:

[0049] (1) Preparation of NaYF by high temperature pyrolysis 4 :Tm, Yb nanoparticles: The matrix of rare earth nanoparticles is fluoride NaYF 4 , the sensitizer ion is Yb 3+ The luminescent center ion is Tm 3+The specific synthesis steps are as follows: Take 2mmol rare earth chloride RECl 3 6H 2 O [including 1% TmCl 3 6H 2 O, 20% YbCl 3 6H 2 O, 79% YCl 3 6H 2 O], together with 12mL oleic acid and 30mL octadecene, were added to a three-necked flask. During the experiment, the liquid was stirred at a high speed and argon was introduced as a protective gas. The mixed liquid was heated to 160°C for 30min and then naturally cooled to room temperature. Then, 20mL methanol solution containing 0.296g ammonium fluoride and 10mL methanol solution containing 0.2g sodium hydroxide were added dropwise to the three-necked flask. After the addition was completed, the mixed solution was heated to 58°C and maintained for 60min to remove the methanol in the solution. After the methanol was completely removed, the temperature of the reaction system was raised to 305°C and maintained for 60min, and then the liquid was allowed to cool naturally to room temperature. After the reaction system was naturally cooled to room temperature, the product was precipitated with an excess of anhydrous ethanol, and the product was washed several times with a mixed solution of anhydrous ethanol and cyclohexane to obtain NaYF 4 :Tm, Yb nanoparticles.

[0050] (2) Using high temperature pyrolysis to coat the inert barrier layer: The matrix of the rare earth nanoparticles is fluoride NaYF 4 , without doping with active rare earth ions. The specific synthesis steps are as follows: Take 2 mmol of rare earth chloride YCl 3 6H 2 O, 12 mL of oleic acid, and 30 mL of octadecene were added to a three-necked flask. During the experiment, the liquid was stirred at a high speed and argon was introduced as a protective gas. The mixed liquid was heated to 160°C for 30 minutes and then naturally cooled to room temperature. Then, 20 mL of methanol solution containing 0.296 g of ammonium fluoride and 10 mL of methanol solution containing 0.2 g of sodium hydroxide were added dropwise to the three-necked flask. After the addition was completed, the mixed solution was heated to 58°C and maintained for 60 minutes to remove the methanol in the solution. The NaYF prepared in step (1) was added to 4 :Tm, Yb nanoparticles were added to the three-necked flask as nanocores for shell growth. After the methanol was completely removed, the temperature of the reaction system was raised to 305°C and maintained for 60 minutes, and then the liquid was allowed to cool naturally to room temperature. After the reaction system cooled naturally to room temperature, the product was precipitated with excess anhydrous ethanol, and the product was washed several times with a mixed solution of anhydrous ethanol and cyclohexane to obtain NaYF 4 :Tm,Yb@NaYF 4 Nanoparticles, such as Figure 1The luminescent center ion Er is doped at different positions as shown 3+ 、Tm 3+ Schematic diagram of the nanoparticle structure;

[0051] (3) Coating NaYF by high temperature pyrolysis 4 :The second layer: The matrix of rare earth nanoparticles is fluoride NaYF 4 , doped with rare earth ions Er 3+ As the luminescent center. The specific synthesis steps are as follows: Take 2 mmol of rare earth chloride RECl 3 6H 2 O[including x% ErCl 3 6H 2 O, (100-x)% YCl 3 6H 2 O], wherein x is taken as 0.08, 0.1, 0.2, and 0.5 respectively, and added into a three-necked flask together with 12 mL of oleic acid and 30 mL of octadecene. During the experiment, the liquid is stirred at a high speed and argon is introduced as a protective gas. The mixed liquid is heated to 160°C for 30 minutes and then naturally cooled to room temperature. Then, 20 mL of methanol solution containing 0.296 g of ammonium fluoride and 10 mL of methanol solution containing 0.2 g of sodium hydroxide are added dropwise into the three-necked flask. After the addition is completed, the mixed solution is heated to 58°C and maintained for 60 minutes to remove the methanol in the solution. The NaYF prepared in step (2) is added 4 :Tm,Yb@NaYF 4 Nanoparticles were added to a three-necked flask as nanocores for shell growth. After the methanol was completely removed, the temperature of the reaction system was raised to 305°C and maintained for 60 minutes, and then the liquid was allowed to cool naturally to room temperature. After the reaction system cooled naturally to room temperature, the product was precipitated with excess anhydrous ethanol, and the product was washed several times with a mixed solution of anhydrous ethanol and cyclohexane to obtain NaYF 4 :Tm,Yb@NaYF 4 @NaYF 4 :Er nanoparticles. The characteristics of nanoparticles are as follows Figure 1 , Figure 2 and Figure 3 As shown, the nanoparticles have a particle size of about 22nm, are all hexagonal, and can produce an emission spectrum covering 1.45μm-1.57μm that is adjustable with the doping concentration under the excitation of 980nm infrared pump light. The emission spectrum can be determined by the luminescent central ion Tm 3+ The doping concentration can be changed to control the

[0052] (4) Using the NaYF prepared in step (3) 4 :Tm,Yb@NaYF 4 @NaYF4 : Er nanoparticles are doped with SU-8 photoresist to prepare a gain medium. Take 0.3 mmol of the washed rare earth nanoparticles, dissolve them in 2 mL of cyclohexane solvent and disperse them evenly by ultrasound. Take 1 mL of the above solution, fuse it with SU-82002 photoresist at a mass ratio of 1:4, and ultrasound for 120 minutes in the dark to obtain a photoresist polymer gain medium with evenly dispersed rare earth nanoparticles.

[0053] (5) Using the gain medium obtained in step (4) to prepare an optical waveguide amplifier. The process of preparing a rectangular optical waveguide amplifier using a photolithography process is as follows: Figure 4 First, a silicon substrate with a silicon dioxide layer is grown on the surface, as shown in FIG. Figure 4 As shown in (a), the gain medium film is obtained by spin coating at a speed of 3000 r / min for 30 seconds. Figure 4 As shown in (b), the temperature is gradually raised to 90°C for pre-baking for 30 minutes. Then the photomask with the waveguide structure is placed on the sample surface, as shown in Figure 4 As shown in (c), the sample was exposed to UV light for 4 seconds using a photolithography machine, and then the temperature was raised to 95°C for post-baking for 30 minutes. After the sample was cooled to room temperature, it was developed using a SU-8 special developer, as shown in FIG. Figure 4 As shown in (d), each soaking is 1s, and the development is completed after 5-10 times, and a sample with a rectangular waveguide structure on the surface is obtained, and the film is hardened at 150°C for 30min. Figure 4 As shown in (e), polymethyl methacrylate is finally spin-coated on the sample surface at a speed of 3000 r / min to form the upper cladding layer of the device, and the device is prepared after baking at 120°C for 150 min. Figure 4 As shown in (f), the photo of the device under 980nm laser pumping is shown in Figure 5 As shown in Figure 2, the optical amplifier obtains a relative gain of about 6-8dB at 1.45μm-1.75μm. The test results are shown in Figure 2. Figure 6 shown.

[0054] Example 2

[0055] This embodiment provides a polymer-based optical waveguide amplifier for the (S+C+L) band, which is prepared by the preparation method described in Example 1. The relative gain of the polymer-based optical waveguide amplifier in the 1460nm-1575nm band can reach 6-8dB.

[0056] The preferred embodiments of the present invention are described in detail above in conjunction with the accompanying drawings. However, the present invention is not limited to the specific details in the above embodiments. Within the technical concept of the present invention, a variety of simple modifications can be made to the technical solution of the present invention, and these simple modifications all belong to the protection scope of the present invention.

[0057] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present invention will not further describe various possible combinations.

[0058] In addition, various embodiments of the present invention may be arbitrarily combined, and as long as they do not violate the concept of the present invention, they should also be regarded as the contents disclosed by the present invention.

Claims

1. A method for preparing a polymer-based optical waveguide amplifier for the (S+C+L) band, characterized in that: The specific steps include: Step 1: Preparation of Er-doped 3+ , Tm 3+ Core-shell rare earth nanoparticles with two luminescent central ions are doped in different shell layers and a barrier layer is added; and by regulating Er 3+ / Tm 3+ The doping position and doping ratio, and the thickness of the growth barrier layer are regulated to make Er 3+ , Tm 3+ The emission wavelength of the two luminescent central ions in the near-infrared region is 1460nm-1570nm, achieving a relatively flat broadband emission, with a full width at half maximum of 117nm; Step 2: Physically doping or chemically bonding the doped Er prepared in step 1 3+ , Tm 3+ Core-shell rare earth nanoparticles of two luminescent center ions are doped in a polymer matrix to prepare a polymer gain medium with broadband luminescence properties; Step 3: Use the broadband polymer gain medium obtained in step 2 as the core layer to prepare an optical waveguide amplifier, and adjust the refractive index of the core layer by adjusting the mounting matrix, baking temperature, and exposure time.

2. The method for preparing a polymer-based optical waveguide amplifier for the (S+C+L) band as claimed in claim 1, characterized in that: Step 1 specifically includes the following: A1: Prepare core-multi-shell rare earth nanoparticles MREF4 by hydrothermal method, high temperature pyrolysis method or precipitation method, wherein RE is a rare earth element and M is an alkali metal; A2: The luminescent central ion Er 3+ 、Tm 3+ They are doped in different positions of the core and shell; The luminescent central ion Er 3+ 、Tm 3+ Doped at different positions of the core and shell, and co-doped with sensitizer ion Yb 3+ , as well as up-conversion quencher ions or other ions that can enhance the luminescence of the luminescent center ion in the (S+C+L) band, including Ce 3+ , Pr 3+ 、Nd 3 + 、Ho 3+ 、Eu 3+ or Tb 3+ ion; A3: In Er 3+ 、Tm 3+ An intermediate barrier layer is encapsulated in the ion-doped shell layer; A4: Regulation 3+ 、Tm 3+ The doping position and doping ratio of ions and the thickness of the growth barrier layer are regulated to make Er 3+ The emission peak at a wavelength of 1.53 μm and Tm 3+ The emission peak spectral intensity at a wavelength of 1.48μm is matched, forming a wide spectrum covering 1.45μm-1.57μm in the same rare earth nanoparticle, achieving spectral broadening and spectral flatness in the (S+C+L) band, laying the foundation for broadband optical amplifiers to obtain gain in the (S+C+L) band.

3. The method for preparing a polymer-based optical waveguide amplifier for the (S+C+L) band as claimed in claim 2, characterized in that: In step A2, the concentration of the luminescent center ion is defined as: the amount of substance of each luminescent center ion / the total amount of substance of the rare earth element in the rare earth nanoparticles, ranging from 0% to 2%; the total concentration of the luminescent center ion is defined as: the sum of the concentrations of all types of luminescent center ions, ranging from no more than 4%, and the concentration of the sensitizer ion is defined as: the amount of substance of the sensitizer ion / the total amount of substance of the rare earth element in the rare earth nanoparticles, specifically 20%; and the sum of the total concentration of the luminescent center ion and the concentration of the sensitizer ion does not exceed 25%; The thickness of the barrier layer is ≥3nm, and the barrier layer is a fluoride matrix material or SiO2, TiO2 oxide material.

4. The method for preparing a polymer-based optical waveguide amplifier for the (S+C+L) band as claimed in claim 1, characterized in that: The physical doping method in step 2 specifically includes the following contents: B1: dispersing the rare earth nanoparticles prepared in step 1 in an organic solvent under ultrasonic dispersion or high-speed stirring to obtain a solution in which the rare earth nanoparticles are uniformly dispersed; B2: Mixing the dispersion obtained in step B1 with a polymer photoresist in a mass percentage of 10%-30%; ultrasonically dispersing or high-speed stirring the mixed solution to obtain a gain medium in which rare earth nanoparticles are evenly dispersed.

5. The method for preparing a polymer-based optical waveguide amplifier for the (S+C+L) band as claimed in claim 4, characterized in that: The organic solvent described in step B1 includes: alcohols, ketones, esters or heterocyclic compounds; the alcohols include methanol, ethanol, ethylene glycol or propylene glycol; the ketones include acetone, butanone or cyclohexanone; the esters include methyl formate, ethyl acetate, ethyl formate or butyl acetate; the heterocyclic compounds include furan, thiophene, pyrrole, thiazole or imidazole; the polymer photoresist described in step B2 includes SU-8 series, BPO or BP212.

6. The method for preparing a polymer-based optical waveguide amplifier for the (S+C+L) band as claimed in claim 1, characterized in that: The chemical bonding method of step 2 specifically includes the following contents: C1: dispersing the rare earth nanoparticles prepared in step 1 in a solvent, adding a polymer monomer and an initiator, wherein the mass of the initiator is 0.01%-1% of the mass of the polymer monomer; C2: The nanoparticles are polymerized in a polymer matrix by bulk polymerization, solution polymerization, suspension polymerization or emulsion polymerization to obtain a gain medium; after polymerization, the doping concentration of the rare earth nanoparticles in the polymer is 0.01%-50%.

7. The method for preparing a polymer-based optical waveguide amplifier for the (S+C+L) band as claimed in claim 6, characterized in that: In step C1, the polymer monomer is a monomer that can undergo addition polymerization or a monomer that can undergo condensation polymerization; the monomer that can undergo addition polymerization includes ① monomers with unsaturated double bonds and triple bonds: unsaturated acid esters; olefin monomers, propylene and propylene monomers; ② monomers with epoxy groups: glycidyl methacrylate, epoxy resin monomers, 1,2-butylene oxide, 1,2-epoxy-9-decene, 1,2-epoxyheptane, glycidyl methyl ether; the monomer that can undergo condensation polymerization includes phenolic resin monomers, polyesters, and lactide monomers.

8. The method for preparing a polymer-based optical waveguide amplifier for the (S+C+L) band as claimed in claim 6, characterized in that: In step C2, the polymerization temperature is controlled at 10° C. to 120° C., the polymerization time is 0.5 hour to 48 hours, and the polymerization degree of the composite polymer gain medium is adjusted according to the change of the optical waveguide device manufacturing process, and the polymerization degree of the composite polymer is controlled to be 5%-95%.

9. The method for preparing a polymer-based optical waveguide amplifier for the (S+C+L) band as claimed in claim 1, characterized in that: Step 3 specifically includes the following: The broadband polymer gain medium obtained in step 2 is used as the core layer, and a rectangular waveguide amplifier, an inverted ridge waveguide amplifier or a loaded strip waveguide amplifier is prepared by spin coating, evaporation, photolithography, plasma etching, and ultraviolet imprinting.

10. A polymer-based optical waveguide amplifier for the (S+C+L) band, characterized in that: Prepared by the preparation method according to any one of claims 1 to 9, the polymer-based optical waveguide amplifier has a relative gain of up to 6-8 dB in the 1460nm-1575nm band.

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