A vibration sensor

Abstract

A vibration sensor (200) comprising: a vibration receiver (210) and an acoustic transducer (220), the vibration receiver (210) comprising a housing (211), a limiting piece (212) and a vibration unit (213), the housing (211) forming an acoustic cavity with the acoustic transducer (220), the vibration unit (213) being located in the acoustic cavity, dividing the acoustic cavity into a first acoustic cavity (214) and a second acoustic cavity (215), wherein: the acoustic transducer (220) is in acoustic communication with the first acoustic cavity (214), the housing (211) is configured to generate vibrations based on an external vibration signal, the vibration unit (213) changes the sound pressure within the first acoustic cavity (214) in response to the vibrations of the housing (211), causing the acoustic transducer (220) to generate an electrical signal, the vibration unit (213) comprises a mass element (2131) and an elastic element (2132), a first side of the elastic element (2132) is connected to a side wall of the mass element (2131), a second side of the elastic element (2132) is connected to the limiting piece (212).

Description

[0001] Cross-references

[0002] This application claims international application No. PCT / CN2020 / 140180, filed on December 28, 2020; Chinese application No. 202110445739.3, filed on April 23, 2021; international application No. PCT / CN2021 / 107978, filed on July 22, 2021; and international application No. PCT / CN2021 / 129148, filed on November 5, 2021, the entire contents of which are incorporated herein by reference. Technical Field

[0003] This application relates to the field of acoustic technology, and in particular to a vibration sensor. Background Technology

[0004] A vibration sensor is an energy conversion device that converts vibration signals into electrical signals. When used as a bone conduction microphone, a vibration sensor can detect vibration signals transmitted through bones, skin, or muscles when a person speaks, thereby detecting the speech signal, while being unaffected by external noise. Due to limitations in manufacturing processes, the size or shape of the elastic element in current vibration sensors is difficult to control, resulting in a large volume occupied by the elastic element in the acoustic cavity, which in turn reduces the volume of the mass block, thus leading to low sensitivity of the vibration sensor.

[0005] Therefore, it is desirable to provide a vibration sensor that can limit the size of the elastic element to improve the sensitivity of the vibration sensor. Summary of the Invention

[0006] Some embodiments of this application provide a vibration sensor comprising: a vibration receiver and an acoustic transducer. The vibration receiver includes a housing, a limiting member, and a vibration unit. The housing and the acoustic transducer form an acoustic cavity. The vibration unit is located within the acoustic cavity, dividing the acoustic cavity into a first acoustic cavity and a second acoustic cavity. The acoustic transducer is acoustically connected to the first acoustic cavity. The housing is configured to generate vibration based on an external vibration signal. The vibration unit responds to the vibration of the housing by changing the sound pressure within the first acoustic cavity, causing the acoustic transducer to generate an electrical signal. The vibration unit includes a mass element and an elastic element. A first side of the elastic element is connected to the sidewall of the mass element, and a second side of the elastic element is connected to the limiting member.

[0007] In some embodiments, the limiting member is located between the housing and the acoustic transducer, and the housing, the limiting member, and the acoustic transducer form the acoustic cavity.

[0008] In some embodiments, the acoustic transducer includes a substrate, the limiting member is connected to the substrate, and the limiting member, the vibration unit, and the substrate form the first acoustic cavity.

[0009] In some embodiments, the elastic element is connected between the limiting member and the mass element, and the elastic element and the substrate are spaced apart by a certain distance in the vibration direction of the vibration unit.

[0010] In some embodiments, the thickness of the limiting member along the vibration direction of the vibration unit is greater than the thickness of the mass element along the vibration direction of the vibration unit, and the side of the limiting member facing away from the acoustic transducer is flush with the side of the mass element facing away from the acoustic transducer.

[0011] In some embodiments, the width of the limiting member along the vibration direction perpendicular to the vibration unit is 100µm to 500µm.

[0012] In some embodiments, the limiting member includes a first limiting member and a second limiting member, the first limiting member and the second limiting member being arranged sequentially along the vibration direction of the vibration unit, the first limiting member being connected to the housing, and the second limiting member being connected to the acoustic transducer.

[0013] In some embodiments, the second side of the elastic element is connected to the first limiting member.

[0014] In some embodiments, the thickness of the first limiting member along the vibration direction of the vibration unit is equal to the thickness of the mass element along the vibration direction of the vibration unit.

[0015] In some embodiments, the width of the first limiting member along the vibration direction perpendicular to the vibration unit is smaller than the width of the second limiting member along the vibration direction perpendicular to the vibration unit.

[0016] In some embodiments, the ratio of the width of the first limiting member along the vibration direction perpendicular to the vibration unit to the width of the second limiting member along the vibration direction perpendicular to the vibration unit is greater than 0.5.

[0017] In some embodiments, the first limiting member and the second limiting member are made of different materials.

[0018] In some embodiments, the first limiting member is made of at least one material selected from alloy material, metal material, and rigid plastic, and the second limiting member is made of solder paste or adhesive.

[0019] In some embodiments, the thickness of the second limiting member along the vibration direction of the vibration unit is 50µm to 500µm.

[0020] In some embodiments, the vibration unit includes a second elastic element located within the first acoustic cavity, and the second elastic element is connected to the second limiting member and the acoustic transducer, respectively.

[0021] In some embodiments, the area of ​​the second elastic element on the side closer to the acoustic transducer is larger than the area of ​​the second elastic element on the side farther from the acoustic transducer.

[0022] In some embodiments, the elastic element extends toward and is connected to the substrate, and the elastic element, the mass element, and the substrate form the first acoustic cavity.

[0023] In some embodiments, the thickness of the limiting member along the vibration direction of the vibration unit is equal to the thickness of the mass element along the vibration direction of the vibration unit, and the area of ​​the first side of the elastic element is greater than the area of ​​the second side of the elastic element.

[0024] In some embodiments, the thickness of the limiting member along the vibration direction of the vibration unit is equal to the thickness of the mass element along the vibration direction of the vibration unit, and the side of the mass element facing away from the substrate is farther from the substrate than the side of the limiting member facing away from the substrate.

[0025] In some embodiments, the mass element includes a first aperture that communicates with the first acoustic cavity and the second acoustic cavity.

[0026] In some embodiments, the housing includes a second opening through which the second acoustic cavity communicates with the outside.

[0027] In some embodiments, the limiting member is located between the elastic element and the housing.

[0028] In some embodiments, the elastic element extends toward and connects to the acoustic transducer, and the elastic element, the mass element, and the acoustic transducer form the first acoustic cavity.

[0029] In some embodiments, the thickness of the limiting member along the vibration direction of the vibration unit is 100µm to 1000µm.

[0030] Some embodiments of this application also provide a vibration sensor comprising: a vibration receiver and an acoustic transducer. The vibration receiver includes a housing and a vibration unit. The housing and the acoustic transducer form an acoustic cavity. The vibration unit is located within the acoustic cavity and divides the acoustic cavity into a first acoustic cavity and a second acoustic cavity. The acoustic transducer is acoustically connected to the first acoustic cavity. The housing is configured to generate vibration based on an external vibration signal. The vibration unit responds to the vibration of the housing by changing the sound pressure within the first acoustic cavity, causing the acoustic transducer to generate an electrical signal. The vibration unit includes a mass element and an elastic element. The elastic element surrounds and is connected to the sidewall of the mass element and extends into the housing.

[0031] In some embodiments, the thickness of the elastic element along the vibration direction of the vibration unit is greater than the thickness of the mass element along the vibration direction of the vibration unit. Attached Figure Description

[0032] This application will be further described by way of exemplary embodiments, which will be described in detail with reference to the accompanying drawings. These embodiments are not limiting; in these embodiments, the same reference numerals denote the same structures, wherein:

[0033] Figure 1 This is an exemplary frame diagram of a vibration sensor according to some embodiments of this specification;

[0034] Figure 2 These are exemplary structural diagrams of vibration sensors according to some embodiments of this specification;

[0035] Figure 3 These are exemplary structural diagrams of vibration sensors according to some embodiments of this specification;

[0036] Figure 4 These are exemplary structural diagrams of vibration sensors according to some embodiments of this specification;

[0037] Figure 5 These are exemplary structural diagrams of vibration sensors according to some embodiments of this specification;

[0038] Figure 6 These are exemplary structural diagrams of vibration sensors according to some embodiments of this specification;

[0039] Figure 7 These are exemplary structural diagrams of vibration sensors according to some embodiments of this specification;

[0040] Figure 8 These are exemplary structural diagrams of vibration sensors according to some embodiments of this specification;

[0041] Figure 9 This is an exemplary structural diagram of a vibration sensor according to some embodiments of this specification. Detailed Implementation

[0042] To more clearly illustrate the technical solutions of the embodiments in this specification, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are merely some examples or embodiments of this specification. For those skilled in the art, these drawings can be applied to other similar scenarios without creative effort. Unless obvious from the context or otherwise specified, the same reference numerals in the drawings represent the same structures or operations.

[0043] It should be understood that the terms "system," "device," "unit," and / or "module" used in this specification are a method of distinguishing different components, elements, parts, sections, or assemblies at different levels. However, if other terms can achieve the same purpose, they may be replaced by other expressions.

[0044] The terms "first," "second," and similar terms used in this specification and claims do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Similarly, the terms "an" or "a" and similar terms do not indicate a quantity limitation, but rather indicate the presence of at least one. Unless otherwise stated, the terms "front," "rear," "lower," and / or "upper" and similar terms are for illustrative purposes only and are not intended to limit to a location or spatial orientation. Generally speaking, the terms "comprising" and "including" only indicate the inclusion of expressly identified steps and elements, which do not constitute an exclusive list, and the method or apparatus may also include other steps or elements.

[0045] This specification describes an embodiment of a vibration sensor. In some embodiments, the vibration sensor may include a vibration receiver and an acoustic transducer. In some embodiments, the vibration receiver may include a housing, a limiting member, and a vibration unit. The housing and the limiting member are connected to form an acoustic cavity, in which the vibration unit is located and divides the acoustic cavity into a first acoustic cavity and a second acoustic cavity. The acoustic transducer may be acoustically connected to the first acoustic cavity. In some embodiments, the housing may vibrate based on an external vibration signal (e.g., a signal generated by the vibration of bones, skin, etc., when a user speaks), and the vibration unit responds to the vibration of the housing by changing the sound pressure of the first acoustic cavity, causing the acoustic transducer to generate an electrical signal.

[0046] In some embodiments, the vibration unit may include a mass element and an elastic element. A first side of the elastic element may surround a sidewall connected to the mass element, and a second side of the elastic element may be connected to a limiting member, such that the elastic element is connected between the mass element and the limiting member. The first side of the elastic element may be the side of the elastic element extending toward the mass element. The second side of the elastic element may be the side opposite to the first side of the elastic element, extending toward the limiting member. In some embodiments, the limiting member may be located between the housing and the acoustic transducer. In some embodiments, the limiting member may be located between the elastic element and the housing. In the embodiments of this specification, by providing a limiting member in the vibration receiver of the vibration sensor, the limiting member can be used to restrict the elastic element to control the flow of the elastic element during the fabrication of the vibration receiver, thereby facilitating the control of the size and / or shape of the elastic element, and thus adjusting (e.g., increasing) the size or volume of the mass element to improve the sensitivity of the vibration sensor.

[0047] In some embodiments, the vibration receiver may include a housing and a vibration unit. The vibration unit includes a mass element and an elastic element, the elastic element surrounding a sidewall connected to the mass element and extending into the housing.

[0048] Figure 1 This is an exemplary frame diagram of a vibration sensor according to some embodiments of this specification.

[0049] like Figure 1 As shown, the vibration sensor 100 may include a vibration receiver 110 and an acoustic transducer 120. In some embodiments, the vibration receiver 110 and the acoustic transducer 120 may be physically connected. The physical connection in this specification may include welding, snap-fitting, gluing, or integral molding, or any combination thereof.

[0050] In some embodiments, the vibration sensor 100 can be used as a bone conduction microphone. When used as a bone conduction microphone, the vibration sensor 100 can receive vibration signals from tissues such as bones and skin generated when a user speaks, and convert these vibration signals into electrical signals containing sound information. Because it collects almost no sound (or vibration) in the air, the vibration sensor 100 is relatively unaffected by ambient noise (e.g., the voices of others speaking nearby, noise from passing vehicles), making it suitable for use in noisy environments to collect speech signals from users. In some embodiments, the vibration sensor 100 can be applied to headphones (e.g., air conduction headphones and bone conduction headphones), hearing aids, assistive hearing devices, glasses, helmets, augmented reality (AR) devices, virtual reality (VR) devices, etc., or any combination thereof. For example, the vibration sensor 100 can be used as a bone conduction microphone in headphones.

[0051] Vibration receiver 110 can be configured to receive and transmit vibration signals. In some embodiments, vibration receiver 110 includes a housing and a vibration unit. In some embodiments, vibration receiver 110 may also include a limiting member. In some embodiments, the limiting member is located between the housing and the acoustic transducer 120, and vibration receiver 110 can be connected to acoustic transducer 120 via the limiting member. In some embodiments, the housing may be a hollow structure, and the housing, limiting member, and acoustic transducer 120 are connected to form an acoustic cavity, and some components of vibration sensor 100 (e.g., vibration unit) may be located within the acoustic cavity. In some embodiments, the vibration unit may be located within the acoustic cavity, and the connection of the vibration unit (e.g., elastic element and mass element) to the limiting member can divide the acoustic cavity into a first acoustic cavity and a second acoustic cavity. The first acoustic cavity may be acoustically connected to acoustic transducer 120. Acoustic connection may be a connection method capable of transmitting sound pressure, sound waves, or vibration signals.

[0052] In some embodiments, a limiting member may be located between the vibrating element (e.g., an elastic element) and the housing. The elastic element extends toward and connects to the acoustic transducer 120. The vibrating element (e.g., an elastic element and a mass element) and the acoustic transducer 120 form a first acoustic cavity.

[0053] The acoustic transducer 120 can generate an electrical signal containing sound information based on the sound pressure change of the first acoustic cavity. In some embodiments, a vibration signal can be received via a vibration receiver 110, causing a change in the internal air pressure of the first acoustic cavity, and the acoustic transducer 120 can generate an electrical signal based on the change in internal air pressure of the first acoustic cavity. In some embodiments, when the vibration sensor 100 is operating, the housing can vibrate based on an external vibration signal (e.g., a signal generated by the vibration of bones, skin, etc., when a user speaks). The vibration unit vibrates in response to the vibration of the housing via a limiting member and transmits the vibration to the acoustic transducer 120 through the first acoustic cavity. In some embodiments, the acoustic transducer 120 vibrates based on an external vibration signal and transmits the vibration signal to the vibration unit. In some embodiments, the acoustic transducer 120 vibrates based on an external vibration signal, and the vibration unit vibrates in response to the vibration of the acoustic transducer 120 via a limiting member or housing connected to the acoustic transducer 120. For example, the vibration of the vibrating unit can cause a volume change in the first acoustic cavity, which in turn causes a change in the air pressure within the first acoustic cavity, and converts this change in air pressure into a change in sound pressure. The acoustic transducer 120 can detect this change in sound pressure within the first acoustic cavity and generate an electrical signal based on it. For example, the acoustic transducer 120 may include a diaphragm; the change in sound pressure within the first acoustic cavity acts on the diaphragm, causing it to vibrate (or deform), and the acoustic transducer 120 converts the diaphragm's vibration into an electrical signal. Further description of the vibration sensor 100 can be found in [reference needed]. Figures 2-9 And its related descriptions.

[0054] It should be noted that the above description of the vibration sensor 100 and its components is for illustrative purposes only and does not limit the scope of this specification. Those skilled in the art can make various modifications and changes to the vibration sensor 100 under the guidance of this specification. In some embodiments, the vibration sensor 100 may also include other components, such as a power supply for providing electrical power to the acoustic transducer 120. These modifications and changes are still within the scope of this specification.

[0055] Figure 2 This is an exemplary structural diagram of a vibration sensor according to some embodiments of this specification.

[0056] like Figure 2 As shown, the vibration sensor 200 may include a vibration receiver 210 and an acoustic transducer 220. In some embodiments, the vibration receiver 210 may include a housing 211, a limiting member 212, and a vibration unit 213. The limiting member 212 may be located between the housing 211 and the acoustic transducer 220, and the vibration receiver 210 is connected to the acoustic transducer 220 through the limiting member 212.

[0057] In some embodiments, the housing 211 may be a hollow structure, and the housing 211 is connected to the acoustic transducer 220 via a limiting member 212 to form an acoustic cavity. In some embodiments, a vibration unit 213 is located within the acoustic cavity, and the vibration unit 213 may be connected to the limiting member 212 to divide the acoustic cavity into a first acoustic cavity 214 and a second acoustic cavity 215. In some embodiments, the limiting member 212 may be connected to the substrate 221 of the acoustic transducer 220, such that the vibration unit 213, the limiting member 212, and the substrate 221 form the first acoustic cavity 214. The limiting member 212 is connected to the housing 211, such that the vibration unit 213, the limiting member 212, and the housing 211 form the second acoustic cavity 215. In some embodiments, the housing 211 may be a regular or irregular three-dimensional structure such as a cuboid, cylinder, or frustum. In some embodiments, the material of the housing 211 may include metal (e.g., copper, iron, aluminum), alloy (e.g., stainless steel), plastic, or any combination thereof. In some embodiments, the housing 211 may have a certain thickness to ensure sufficient strength, thereby better protecting the components of the vibration sensor 100 (e.g., vibration unit 213) disposed within the housing 211.

[0058] Vibration sensor 200 can convert external vibration signals into electrical signals. By way of example only, external vibration signals may include vibration signals from a person speaking, vibration signals generated by skin movement or the operation of other devices (e.g., speakers) near the skin, and vibration signals generated by objects or air in contact with vibration sensor 200, or any combination thereof. When vibration sensor 200 is operating, housing 211 vibrates in response to the external vibration signal. The vibration of housing 211 is transmitted to vibration unit 213 through limiting member 212, and vibration unit 213 vibrates in response to the vibration of housing 211. The vibration of vibration unit 213 can cause a volume change in first acoustic cavity 214, which in turn causes a change in air pressure within the first acoustic cavity 214, and converts the change in air pressure into a change in sound pressure within the cavity. Acoustic transducer 220 can be acoustically connected to the first acoustic cavity 214 to detect the change in sound pressure within the first acoustic cavity 214 and convert the sound pressure change into an electrical signal. For example, the acoustic transducer 220 may include a pickup hole 2211. Changes in sound pressure within the first acoustic cavity 214 can act on the diaphragm of the acoustic transducer 220 through the pickup hole 2211, causing the diaphragm to vibrate (or deform) to generate an electrical signal. In some embodiments, the pickup hole 2211 may be located on the substrate 221 of the acoustic transducer 220, and the pickup hole 2211 extends through the substrate 221 along the vibration direction of the vibrating unit 213. Further, the electrical signal generated by the acoustic transducer 220 can be transmitted to an external electronic device. By way of example only, the acoustic transducer 220 may include an interface (not shown). The interface may be wired (e.g., electrically connected) or wirelessly connected to internal components (e.g., a processor) of an external electronic device. The electrical signal generated by the acoustic transducer 220 can be transmitted to the external electronic device via the interface in a wired or wireless manner. In some embodiments, the external electronic device may include a mobile device, a wearable device, a virtual reality device, an augmented reality device, or any combination thereof. In some embodiments, mobile devices may include smartphones, tablets, personal digital assistants (PDAs), gaming devices, navigation devices, etc., or any combination thereof. In some embodiments, wearable devices may include smart bracelets, headphones, hearing aids, smart helmets, smartwatches, smart clothing, smart backpacks, smart accessories, etc., or any combination thereof. In some embodiments, virtual reality devices and / or augmented reality devices may include virtual reality helmets, virtual reality glasses, virtual reality patches, augmented reality helmets, augmented reality glasses, augmented reality patches, etc., or any combination thereof. For example, virtual reality devices and / or augmented reality devices may include Google Glass, Oculus Rift, HoloLens, Gear VR, etc.

[0059] In some embodiments, the acoustic transducer 220 may include a substrate 221. The substrate 221 may be used to fix and / or support the vibration receiver 210. In some embodiments, the substrate 221 may be disposed on the acoustic transducer 220, and the housing 211 may be connected to the substrate 221 via a limiting member 212 to form an acoustic cavity. In some embodiments, the material of the substrate 221 may include metals (e.g., iron, copper), alloys (e.g., stainless steel), non-metals (plastics, rubber, resin), etc., or any combination thereof. In some embodiments, the arrangement of the substrate 221 allows the vibration receiver 210 to be processed, manufactured, and sold as an independent component. The acoustic transducer 220 with the substrate 221 can be directly physically connected (e.g., glued) to the vibration receiver 210 to obtain the vibration sensor 200, which simplifies the manufacturing process of the vibration sensor 200 and improves the process flexibility of producing the vibration sensor 200. In some embodiments, the thickness of the substrate 221 may be 10µm to 300µm. For example, the thickness of the substrate 221 may be 80µm to 90µm.

[0060] In some embodiments, the vibration unit 213 may include a mass element 2131 and an elastic element 2132. A first side of the elastic element 2132 is connected to the sidewall of the mass element 2131, and a second side of the elastic element 2132 is connected to the limiting member 212. The first side of the elastic element 2132 may be the side of the elastic element 2132 closest to the mass element 2131. The second side of the elastic element 2132 may be the side opposite to the first side of the elastic element 2132, that is, the second side of the elastic element 2132 may be the side of the elastic element 2132 closest to the limiting member 212. For example, the elastic element 2132 may have a ring-shaped structure, with the first side of the elastic element 2132 being the inner ring side of the ring-shaped structure and the second side of the elastic element 2132 being the outer ring side of the ring-shaped structure. The first and second sides of the elastic element 2132 are arranged along a direction perpendicular to the vibration direction of the vibration unit 213. In some embodiments, the elastic element 2132 and the mass element 2131 and / or the limiting member 212 may be physically connected, for example, by adhesive bonding. By way of example only, the elastic element 2132 may be a material with good adhesion (e.g., glue), so that the elastic element 2132 can be directly bonded to the mass element 2131 and / or the limiting element 212.

[0061] In some embodiments, the elastic element 2132 may be made of a high-temperature resistant material, allowing the elastic element 2132 to maintain its performance during the manufacturing process of the vibration sensor 200. In some embodiments, when the elastic element 2132 is exposed to an environment of 200°C to 300°C, its Young's modulus and shear modulus do not change or change very little (e.g., the change is within 5%), wherein Young's modulus can be used to characterize the deformation capacity of the elastic element 2132 under tension or compression, and shear modulus can be used to characterize the deformation capacity of the elastic element 2132 under shear. In some embodiments, the elastic element 2132 may be made of a material with good elasticity (i.e., prone to elastic deformation), allowing the vibration unit 213 to vibrate in response to the vibration of the housing 211. By way of example only, the material of the elastic element 2132 may include silicone rubber, silicone gel, silicone sealant, silicone sealant, etc., or any combination thereof. In order to make the elastic element 2132 have better elasticity, in some embodiments, the Shore hardness of the elastic element 2132 may be less than 50 HA. For example, the Shore hardness of the elastic element 2132 can be in the range of 5HA to 50HA.

[0062] In some embodiments, the material of the mass element 2131 may have a density greater than a certain density threshold (e.g., 6 g / cm³). 3 The material of the mass element 2131, for example, may include metals or alloys such as lead, copper, silver, tin, stainless steel, and stainless iron, or any combination thereof. For the same mass, the higher the density of the material of the mass element 2131, the smaller its size. Therefore, using a material with a density greater than a certain density threshold to make the mass element 2131 can reduce the size of the vibration sensor 200 to some extent. In some embodiments, the material density of the mass element 2131 has a significant impact on the resonance peak and sensitivity of the frequency response curve of the vibration sensor 200. For the same volume, the greater the density of the mass element 2131, the greater its mass, and the resonance peak of the vibration sensor 200 shifts to lower frequencies. By increasing the mass of the mass element 2131, the sensitivity of the vibration sensor 200 in the lower frequency range (e.g., 20Hz-6000Hz) can be improved. In some embodiments, the material density of the mass element 2131 may be greater than 6 g / cm³. 3 For example, the material density of mass element 2131 can be 7–20 g / cm³. 3In some embodiments, the mass element 2131 and the elastic element 2132 may be composed of different materials and then assembled (e.g., glued) together to form the vibration unit 213. In some embodiments, the mass element 2131 and the elastic element 2132 may also be composed of the same material and integrally formed into the vibration unit 213. In some embodiments, the thickness of the mass element 2131 along its vibration direction may be 60µm-1150µm. For example, the thickness of the mass element 2131 along its vibration direction may be 140µm-200µm.

[0063] In some embodiments, the elastic element 2132 and the substrate 221 of the acoustic transducer 220 are spaced apart by a certain distance in the vibration direction of the vibration unit 213. By setting the elastic element 2132 to not contact the substrate 221, the fabrication of the vibration sensor 200 can be made easier. In some embodiments, the vibration sensor 200 can be fabricated using a split fabrication method. For example, the vibration receiver 210 and the acoustic transducer 220 can be fabricated separately, and then the vibration receiver 210 and the acoustic transducer 220 can be physically connected (e.g., welding, gluing) to obtain the vibration sensor 200. In some embodiments, the distance between the elastic element 2132 and the substrate 221 in the vibration direction of the vibration unit 213 can be determined according to the requirements of the vibration sensor 200. For example, the height of the first acoustic cavity 214 along the vibration direction of the vibration unit 213 is set, and no further limitation is made here.

[0064] In some embodiments, the mass element 2131 may further include a first aperture 21311, which connects the first acoustic cavity 214 and the second acoustic cavity 215. The first aperture 21311 can penetrate the mass element 2131, allowing gas to flow between the first acoustic cavity 214 and the second acoustic cavity 215. This balances the pressure changes inside the first acoustic cavity 214 and the second acoustic cavity 215 caused by temperature variations during the fabrication process of the vibration sensor 200 (e.g., during reflow soldering), reducing or preventing damage to the components of the vibration sensor 200 caused by these pressure changes, such as cracking or deformation.

[0065] In some embodiments, the first aperture 21311 can be a single-aperture structure. In some embodiments, the diameter of the single aperture can be 1-50 μm. For example, the diameter of the single aperture can be 7-10 μm. In some embodiments, the first aperture 21311 can be an array of a certain number of micropores. By way of example only, the number of micropores can be 2-10. In some embodiments, the diameter of each micropore can be 0.1-25 μm. For example, the diameter of each micropore can be 20 μm.

[0066] In some embodiments, the mass element 2131 may not have the first hole 21311. In some embodiments, when the mass element 2131 does not have the first hole 21311, the components of the vibration sensor 200 may be prevented from being damaged by changes in air pressure inside the first acoustic cavity 214 by increasing the connection strength between the mass element 2131 and the elastic element 2132 (e.g., increasing the adhesive strength between the mass element 2131 and the elastic element 2132).

[0067] In some embodiments, at least one second hole 2111 may be provided on the housing 211, the second hole 2111 penetrating the housing 211. The structure of the second hole 2111 is the same as or similar to the structure of the first hole 21311. The second hole 2111 allows gas to circulate between the second acoustic cavity 215 and the outside, thereby balancing the gas pressure changes inside the second acoustic cavity 215 caused by temperature changes during the fabrication process of the vibration sensor 200 (e.g., during reflow soldering), reducing or preventing damage to the components of the vibration sensor 200 caused by such gas pressure changes, such as cracking or deformation. Furthermore, when the mass element 2131 vibrates, the second hole 2111 can be used to reduce the damping generated by the gas inside the second acoustic cavity 215.

[0068] In some embodiments, ambient airborne noise may affect the performance of the vibration sensor 200. To reduce the impact of ambient airborne noise, after the vibration sensor 200 is manufactured, for example after reflow soldering, the second hole 2111 on the housing 211 can be sealed with a sealing material. As an example only, the sealing material may include epoxy resin, silicone sealant, or any combination thereof. In some embodiments, the housing 211 may also omit the second hole 2111.

[0069] In some embodiments, the first side of the elastic element 2132 may be connected around the peripheral surface of the mass element 2131. For example, when the mass element 2131 is a columnar structure (cylinder or prism), the peripheral surface of the mass element 2131 is the side surface of the columnar structure. In some embodiments, the second side of the elastic element 2132 may be connected around the inner wall of the limiting member 212, such that the projections of the mass element 2131, the elastic element 2132, and the limiting member 212 along the vibration direction of the vibration unit 213 are arranged sequentially from the inside to the outside. In some embodiments, the projection of the mass element 2131 along the vibration direction of the vibration unit 213 may be a regular and / or irregular polygon such as a circle, rectangle, pentagon, or hexagon. The projections of the elastic element 2132 and the limiting member 212 along the vibration direction of the vibration unit 213 may be regular and / or irregular polygonal rings such as circular rings, rectangular rings, pentagonal rings, or hexagonal rings, corresponding to regular and / or irregular polygons such as circles, rectangles, pentagons, and hexagons. In some embodiments, the elastic element 2132 is in close contact with the peripheral surface of the mass element 2131 and / or the limiting member 212, which can ensure the sealing of the first acoustic cavity 214, so that the air pressure change of the first acoustic cavity 214 is only related to the vibration amplitude of the vibration unit 213, thereby making the sound pressure change of the first acoustic cavity 214 more obvious and effective.

[0070] In some embodiments, the structure of the elastic element 2132 can be a single-layer structure, a double-layer structure, a multi-layer structure, etc. The dimensions and materials of each layer in the double-layer or multi-layer elastic element 2132 can be the same or different. The structure of the elastic element 2132 can be reasonably set according to the manufacturing process of the vibration sensor 200, and this application does not impose any limitations on it.

[0071] In some embodiments, due to the influence of its material type, such as adhesive material, the elastic element 2132 may be in a semi-fluid state during the fabrication of the vibration sensor 200, or it may easily deform during high-temperature processes, making it difficult to control the size and shape of the elastic element 2132. Therefore, if no limiting member is provided, the size of the mass element 2131 needs to be reduced to ensure that the elastic element 2132 does not flow to the outside of the housing 211, thereby avoiding affecting the connection between the housing 211 and the substrate 211 in subsequent processes. By setting a limiting member 212 in the vibration sensor 200, the size of the elastic element 2132 can be controlled. For example, during the fabrication of the vibration sensor 200, the limiting member 212 and the mass element 2131 can be fixed, and then the elastic element 2132 can be filled into the gap between the limiting member 212 and the mass element 2131, thereby controlling the size of the elastic element 2132 and preventing the elastic element 2132 from extending along the vibration direction perpendicular to the vibration unit 213. This provides a margin for increasing the size of the mass element 2131, thereby improving the performance of the vibration sensor 200, for example, increasing the sensitivity of the vibration sensor 200.

[0072] In some embodiments, the limiting member 212 may be located between the housing 211 and the acoustic transducer 220, with the housing 211 connected to the acoustic transducer 220 via the limiting member 212. With the overall size of the vibration sensor 200 and the size of the limiting member 212 fixed, placing the limiting member 212 between the housing 211 and the acoustic transducer 220, compared to placing it inside the housing 211, reduces the volume of the acoustic cavity occupied by the limiting member 212, thereby increasing the volume of the mass element 2131 (e.g., increasing the width of the mass element 2131 along the vibration direction perpendicular to the vibration unit 213), and thus improving the sensitivity of the vibration sensor 200.

[0073] In some embodiments, the limiting member 212 may be made of a rigid material to ensure that the limiting member 212 has sufficient strength. In some embodiments, the rigid material may include, but is not limited to, metallic materials (e.g., copper, iron, aluminum), alloy materials (e.g., stainless steel), rigid plastics, etc. For example, using brass to make the limiting member 212 can facilitate welding between the limiting member 212 and the substrate 221. As another example, using stainless steel to make the limiting member 212 can ensure that the limiting member 212 has greater strength, thereby ensuring the structural reliability of the limiting member 212. In some embodiments, the limiting member 212 may be made of a non-magnetic metal.

[0074] In some embodiments, with other parameters of the limiting member 212 (e.g., material) fixed, the width of the limiting member 212 along the vibration direction perpendicular to the vibration unit 213 can affect the strength of the limiting member 212. For example, with other parameters of the limiting member 212 (e.g., material) fixed, the width of the limiting member 212 along the vibration direction perpendicular to the vibration unit 213 (e.g.,...) Figure 2 The smaller the width d of the limiting member 212, the weaker its strength. Therefore, the width d of the limiting member 212 along the vibration direction perpendicular to the vibration unit 213 needs to be greater than a first width threshold (e.g., 100 μm) to ensure that the limiting member 212 has sufficient strength. In some embodiments, the width d of the limiting member 212 along the vibration direction perpendicular to the vibration unit 213 can be greater than 100 μm.

[0075] In some embodiments, with the overall size of the vibration sensor 200 fixed, the width d of the limiting member 212 along the vibration direction perpendicular to the vibration unit 213 can affect the width of the mass element 2131 along the vibration direction perpendicular to the vibration unit 213. For example, with the overall size of the vibration sensor 200 fixed, the larger the width d of the limiting member 212 along the vibration direction perpendicular to the vibration unit 213, the smaller the width of the mass element 2131 along the vibration direction perpendicular to the vibration unit 213, resulting in lower sensitivity of the vibration sensor 200. Therefore, the width d of the limiting member 212 along the vibration direction perpendicular to the vibration unit 213 needs to be less than a second width threshold (e.g., 500 μm) to ensure that the mass element 2131 has a suitable size, thereby ensuring that the vibration sensor 200 has high sensitivity. In some embodiments, the width d of the limiting member 212 along the vibration direction perpendicular to the vibration unit 213 can be less than 500 μm. For example, the width d of the limiting member 212 along the vibration direction perpendicular to the vibration unit 213 can be less than 300 μm. For example, the width d of the limiting member 212 along the vibration direction perpendicular to the vibration unit 213 can be less than 200um.

[0076] In some embodiments, a first width threshold and / or a second width threshold may be set according to the material strength of the limiting member 212, the overall size requirements of the vibration sensor 200, and / or the performance requirements (e.g., sensitivity requirements) of the vibration sensor 200. In some embodiments, the width d of the limiting member 212 along the vibration direction perpendicular to the vibration unit 213 may be 100µm to 500µm. For example, the width d of the limiting member 212 along the vibration direction perpendicular to the vibration unit 213 may be 100µm to 200µm.

[0077] In some embodiments, during the fabrication of the vibration sensor 200, the height of the first acoustic cavity 214 along the vibration direction of the vibration unit 213 can be controlled by setting the thicknesses of the limiting member 212 and the mass element 2131 along the vibration direction of the vibration unit 213. In some embodiments, the thickness of the limiting member 212 along the vibration direction of the vibration unit 213 can be greater than the thickness of the mass element 2131 along the vibration direction of the vibration unit 213. The side of the mass element 2131 facing away from the substrate 221 is flush with the side of the limiting member 212 facing away from the substrate 221. The difference between the thickness of the limiting member 212 and the thickness of the mass element 2131 along the vibration direction of the vibration unit 213 can be the height of the first acoustic cavity 214 along the vibration direction of the vibration unit 213. Therefore, when manufacturing the vibration sensor 200, the height of the first acoustic cavity 214 along the vibration direction of the vibration unit 213 can be limited by setting the thickness of the limiting member 212 along the vibration direction of the vibration unit 213 and the thickness of the mass element 2131 along the vibration direction of the vibration unit 213, so that the height of the first acoustic cavity 214 along the vibration direction of the vibration unit 213 can be controlled more precisely.

[0078] It should be noted that the above description of the vibration sensor 200 and its components is for illustrative purposes only and does not limit the scope of this specification. Those skilled in the art can make various modifications and alterations to the vibration sensor 200 under the guidance of this specification; for example, the first hole 21311 may be provided through the elastic element 2132. These modifications and alterations are still within the scope of this specification.

[0079] Figure 3 This is an exemplary structural diagram of a vibration sensor according to some embodiments of this specification.

[0080] Figure 3 The structure of the vibration sensor 300 shown is similar to Figure 2 The vibration sensor 200 shown has a similar structure, the difference being the structure of the limiting component. See also... Figure 3The limiting member 312 of the vibration sensor 300 may include a first limiting member 3121 and a second limiting member 3122. The first limiting member 3121 and the second limiting member 3122 are arranged sequentially along the vibration direction of the vibration unit 213. The first limiting member 3121 is connected to the housing 211, and the second limiting member 3122 is connected to the acoustic transducer 220 (e.g., substrate 221). That is, the housing 211, the first limiting member 3121, the second limiting member 3122, and the acoustic transducer 220 (e.g., substrate 221) are sequentially connected along the vibration direction of the vibration unit 213. In some embodiments, a first side of the elastic element 2132 is connected around the periphery of the mass element 2131, and a second side of the elastic element 2132 is connected to the first limiting member 3121. That is, the elastic element 2132 is connected between the mass element 2131 and the first limiting member 3121. The elastic element 2132 and the substrate 221 are spaced apart by a certain distance in the vibration direction of the vibration unit 213.

[0081] In some embodiments, the thickness of the first limiting member 3121 along the vibration direction of the vibration unit 213 can be equal to the thickness of the mass element 2131 along the vibration direction of the vibration unit 213. In some embodiments, the first limiting member 3121 and the mass element 2131 can be made of the same material. In this case, the first limiting member 3121 and the mass element 2131 can be processed simultaneously, thereby reducing the processing steps and making the manufacturing process of the vibration sensor 300 faster and simpler.

[0082] In some embodiments, the thickness of the second limiting member 3122 along the vibration direction of the vibration unit 213 can be equal to the height of the first acoustic cavity 214 along the vibration direction of the vibration unit 213. In this configuration, when fabricating the vibration receiver 210, the thickness of the second limiting member 3122 along the vibration direction of the vibration unit 213 can be set according to the required height of the first acoustic cavity 214 along the vibration direction of the vibration unit 213, thereby making the control of the height of the first acoustic cavity 214 along the vibration direction of the vibration unit 213 more precise. In some embodiments, the thickness of the second limiting member 3122 along the vibration direction of the vibration unit 213 can be 50µm to 500µm. For example, the thickness of the second limiting member 3122 along the vibration direction of the vibration unit 213 can be 150µm to 400µm. Another example is that the thickness of the second limiting member 3122 along the vibration direction of the vibration unit 213 can be 250µm to 300µm.

[0083] In some embodiments, the width of the first limiting member 3121 along the vibration direction perpendicular to the vibration unit 213 and the width of the second limiting member 3122 along the vibration direction perpendicular to the vibration unit 213 can be the same or different. In some embodiments, the width of the first limiting member 3121 along the vibration direction perpendicular to the vibration unit 213 can be smaller than the width of the second limiting member 3122 along the vibration direction perpendicular to the vibration unit 213, so as to facilitate the placement of the elastic element 2132 between the first limiting member 3121 and the mass element 2131. For example, by setting the width of the first limiting member 3121 along the vibration direction perpendicular to the vibration unit 213 to be smaller than the width of the second limiting member 3122 along the vibration direction perpendicular to the vibration unit 213, the elastic element 2132 can be more easily bonded between the first limiting member 3121 and the mass element 2131. In some embodiments, the ratio of the width of the first limiting member 3121 along the vibration direction perpendicular to the vibration unit 213 to the width of the second limiting member 3122 along the vibration direction perpendicular to the vibration unit 213 can be greater than 0.5. With a fixed overall size of the vibration sensor 300, by making the width of the first limiting member 3121 along the vibration direction perpendicular to the vibration unit 213 smaller, the width of the mass element 2131 along the vibration direction perpendicular to the vibration unit 213 can be increased, thereby improving the sensitivity of the vibration sensor 300. On the other hand, by making the width of the second limiting member 3122 along the vibration direction perpendicular to the vibration unit 213 larger, the overall strength of the limiting member 312 can be improved to a certain extent.

[0084] In some embodiments, the width of the first limiting member 3121 and / or the second limiting member 3122 along the vibration direction perpendicular to the vibration unit 213 can range from 100µm to 500µm. For example, the width of the first limiting member 3121 along the vibration direction perpendicular to the vibration unit 213 can range from 100µm to 250µm, and the width of the second limiting member 3122 along the vibration direction perpendicular to the vibration unit 213 can range from 200µm to 500µm.

[0085] In some embodiments, the width of the first limiting member 3121 along the vibration direction perpendicular to the vibration unit 213 may be smaller than the width of the second limiting member 3122 along the vibration direction perpendicular to the vibration unit 213.

[0086] In some embodiments, the first limiting member 3121 and the second limiting member 3122 may be made of the same material. In some embodiments, the first limiting member 3121 and the second limiting member 3122 may both be made of rigid materials. For example, the first limiting member 3121 and the second limiting member 3122 may both be made of metal (e.g., brass), alloy (e.g., stainless steel), rigid plastic, etc. Using the same material to manufacture the first limiting member 3121 and the second limiting member 3122 can simplify the manufacturing process of the vibration sensor 300.

[0087] In some embodiments, the materials of the first limiting member 3121 and the second limiting member 3122 may be different. For example, the first limiting member 3121 may be made of a rigid material (e.g., a metal, an alloy, or a rigid plastic), and the second limiting member 3122 may be made of solder paste or adhesive. During the fabrication of the vibration sensor 300, the housing 211 can be first connected to the first limiting member 3121, and then the housing 211 and the first limiting member 3121 can be directly connected to the substrate 221 via the second limiting member 3122 (e.g., by adhesive bonding), thereby simplifying the fabrication process of the vibration sensor 300. Furthermore, directly connecting the first limiting member 3121 to the substrate 221 via the second limiting member 3122 can improve the connection strength between the vibration receiver 210 and the substrate 221, thereby improving the structural reliability of the vibration sensor 300.

[0088] It should be noted that the above description of the vibration sensor 300 and its components is for illustrative purposes only and does not limit the scope of this specification. Those skilled in the art can make various modifications and alterations to the vibration sensor 300 under the guidance of this specification, and these modifications and alterations are still within the scope of this specification. For example, the limiting member 312 of the vibration sensor 300 may include multiple limiting members (e.g., four limiting members, five limiting members). The material, width along the vibration direction perpendicular to the vibration unit 213, and thickness along the vibration direction of the vibration unit 213 of each limiting member may be the same or different.

[0089] Figure 4 This is an exemplary structural diagram of a vibration sensor according to some embodiments of this specification.

[0090] Figure 4 The structure of the vibration sensor 400 shown is similar to Figure 3 The vibration sensor 300 shown has a similar structure, the difference being the structure of the vibration unit. See also Figure 4The vibration unit 213 of the vibration sensor 400 may further include a second elastic element 4133. The second elastic element 4133 may be located within the first acoustic cavity 214, and is connected to the second limiting member 3122 and the substrate 221 of the acoustic transducer 220, respectively. By providing the second elastic element 4133 within the first acoustic cavity 214, the volume of the first acoustic cavity 214 can be reduced, thereby improving the performance (e.g., sensitivity) of the vibration sensor 400. For example, by reducing the volume of the first acoustic cavity 214, the rate of volume change of the first acoustic cavity 214 caused by the same displacement of the vibration unit 213 is higher, and the air pressure change within the first acoustic cavity 214 is greater, thereby improving the sensitivity of the vibration sensor 400.

[0091] In some embodiments, the second elastic element 4133 may be in contact with the elastic element 2132. In some embodiments, the second elastic element 4133 may not be in contact with the elastic element 2132, that is, the second elastic element 4133 may be spaced apart from the elastic element 2132 by a certain distance. In some embodiments, the material of the second elastic element 4133 may be the same as or different from the material of the elastic element 2132. In some embodiments, the material of the elastic element 2132 and / or the second elastic element 4133 may include an elastic colloid, such as silicone rubber, silicone gel, silicone sealant, silicone adhesive, etc.

[0092] In some embodiments, the second elastic element 4133 may not be in contact with the mass element 2131, thereby preventing the mass element 2131 from being affected by the second elastic element 4133 during vibration and thus avoiding damage to the function of the vibration sensor 400. For example, the second elastic element 4133 and the mass element 2131 may be spaced apart by a certain distance along the vibration direction of the vibration unit 213, and this distance may be greater than the maximum vibration amplitude generated when the mass element 2131 vibrates along its vibration direction.

[0093] In some embodiments, the area of ​​the second elastic element 4133 on the side near the acoustic transducer 220 can be equal to the area of ​​the second elastic element 4133 on the side away from the acoustic transducer 220. The area of ​​the second elastic element 4133 on the side near the acoustic transducer 220 can refer to the cross-sectional area of ​​the second elastic element 4133 perpendicular to the vibration direction of the vibration unit 213. For example, the projected shape of the second elastic element 4133 on a plane parallel to the vibration direction of the vibration unit 213 can be rectangular. In some embodiments, when the second elastic element 4133 contacts the elastic element 2132, the width of the second elastic element 4133 along the vibration direction perpendicular to the vibration unit 213 can be smaller than the width of the elastic element 2132 along the vibration direction perpendicular to the vibration unit 213, thereby preventing the second elastic element 4133 from contacting the mass element 2131.

[0094] In some embodiments, the area of ​​the second elastic element 4133 near the acoustic transducer 220 can be larger than the area of ​​the second elastic element 4133 away from the acoustic transducer 220. For example, the projection shape of the second elastic element 4133 on a plane parallel to the vibration direction of the vibration unit 213 can be trapezoidal or triangular. The side of the second elastic element 4133 away from the second limiting member 3122 in the vibration direction perpendicular to the vibration unit 213 can be set as an inclined plane or an arc-shaped surface. By setting the area of ​​the second elastic element 4133 near the acoustic transducer 220 to be larger than the area of ​​the second elastic element 4133 away from the acoustic transducer 220, the volume of the first acoustic cavity 214 can be further reduced while avoiding contact between the second elastic element 4133 and the mass element 2131, thereby further improving the sensitivity of the vibration sensor 400.

[0095] It should be noted that the above description of the vibration sensor 400 and its components is for illustrative purposes only and does not limit the scope of this specification. Those skilled in the art can make various modifications and alterations to the vibration sensor 400 under the guidance of this specification, and these modifications and alterations are still within the scope of this specification. For example, the limiting member 312 in the vibration sensor 400 can be a single-layer limiting member (e.g., as shown in the image). Figure 2 (See the limiting member 212).

[0096] Figure 5 This is an exemplary structural diagram of a vibration sensor according to some embodiments of this specification.

[0097] Figure 5 The structure of the vibration sensor 500 shown is similar to Figure 2 The vibration sensors 200 shown have similar structures, but differ in the structure of their elastic elements.

[0098] In some embodiments, see Figure 5 The elastic element 5132 of the vibration sensor 500 can extend towards and connect to the acoustic transducer 220. For example, the elastic element 5132 can extend towards and connect to the substrate 221. The elastic element 5132, the substrate 221, and the vibration unit 213 form a first acoustic cavity 214. By connecting the elastic element 5132 to the substrate 221 of the acoustic transducer 220, the volume of the first acoustic cavity 214 can be further reduced, thereby improving the sensitivity of the vibration sensor 500.

[0099] In some embodiments, temperature changes during the fabrication of the vibration receiver 210 may cause the elastic element 5132 to flow, resulting in the elastic element 5132 penetrating into the surface of the mass element 2131 near the substrate 221 (also referred to as the "lower surface"), thereby affecting the vibration of the mass element 2131 and consequently the sensitivity of the vibration sensor 500. In some embodiments, the amount of penetration of the elastic element 5132 into the lower surface of the mass element 2131 can be controlled by controlling the total amount of material used in the elastic element 5132 (e.g., the amount of adhesive). The penetration amount may refer to the overlapping area of ​​the projected area of ​​the elastic element 5132 along the vibration direction of the vibration unit 213 and the projected area of ​​the mass element 2131 along the vibration direction of the vibration unit 213. In some embodiments, the penetration amount of the elastic element 5132 does not exceed 25% of the projected area of ​​the mass element 2131 along the vibration direction of the vibration unit 213. For example, the penetration amount of the elastic element 5132 does not exceed 10% of the projected area of ​​the mass element 2131 along the vibration direction of the vibration unit 213.

[0100] It should be noted that the above description of the vibration sensor 500 and its components is for illustrative purposes only and does not limit the scope of this specification. Those skilled in the art can make various modifications and alterations to the vibration sensor 500 under the guidance of this specification, and these modifications and alterations are still within the scope of this specification. In some embodiments, the limiting member 212 in the vibration sensor 500 may be a double-layer or multi-layer structure (e.g., as shown in the figure). Figure 3 The limiting member 312 shown. For example, the limiting member 212 in the vibration sensor 500 may include a first limiting member ( Figure 5 (not shown in the image) and second limiting member ( Figure 5 (Not shown in the image) When the widths of the first limiting member and the second limiting member are different along the vibration direction perpendicular to the vibration unit 213, the side of the elastic element 5132 near the limiting member 212 can be configured as a stepped structure, so that the elastic element 5132 can be tightly connected to the first limiting member and the second limiting member respectively.

[0101] Figure 6 This is an exemplary structural diagram of a vibration sensor according to some embodiments of this specification.

[0102] Figure 6 The structure of the vibration sensor 600 shown is similar to Figure 5 The vibration sensor 500 shown has a similar structure, but the elastic element and the limiting element have different structures.

[0103] In some embodiments, see Figure 6The thickness of the limiting member 212 along the vibration direction of the vibration unit 213 can be equal to the thickness of the mass element 2131 along the vibration direction of the vibration unit 213. In this case, the limiting member 212 and the mass element 2131 can be processed simultaneously, thereby simplifying the fabrication process of the limiting member 212 and the mass element 2131. In some embodiments, when fabricating the vibration sensor 600, the limiting member 212 and the mass element 2131 are first placed on the same horizontal plane (i.e., the side of the limiting member 212 away from the substrate 221 is flush with the side of the mass element 2131 away from the substrate 221). Then, the elastic element 6132 is bonded between the limiting member 212 and the mass element 2131. By increasing the temperature, the air in the pickup hole 2211 expands thermally, lifting the mass element 2131, so that the side of the mass element 2131 facing away from the substrate 221 is farther from the substrate 221 than the side of the limiting member 212 facing away from the substrate 221, forming a first acoustic cavity 214. In some embodiments, the difference between the distance between the side of the mass element 2131 away from the substrate 221 and the substrate 221 and the distance between the side of the limiting member 212 away from the substrate 221 and the substrate 221 can be the height of the first acoustic cavity 214 along the vibration direction of the vibration unit 213.

[0104] In some embodiments, since the elastic element 6132 has a certain deformation capability, the elastic element 6132 can be stretched and deformed during the fabrication process of the vibration sensor 600 (e.g., the lifting process of the mass element 2131), thereby making the area of ​​the first side (the side closer to the mass element 2131) of the elastic element 6132 larger than the area of ​​the second side (the side farther away from the mass element 2131) of the elastic element 6132.

[0105] It should be noted that the above description of the vibration sensor 600 and its components is for illustrative purposes only and does not limit the scope of this specification. Those skilled in the art can make various modifications and alterations to the vibration sensor 600 under the guidance of this specification, and these modifications and alterations are still within the scope of this specification. In some embodiments, the limiting member 212 in the vibration sensor 600 may be a double-layer or multi-layer structure (e.g., as shown in the figure). Figure 3 (See the limiting member 312).

[0106] Figure 7 This is an exemplary structural diagram of a vibration sensor according to some embodiments of this specification.

[0107] Figure 7 The structure of the vibration sensor 700 shown is similar to Figure 5 The vibration sensor 500 shown has a similar structure, except that the structure of the limiting component is different.

[0108] In some embodiments, see Figure 7The limiting member 712 may be located between the elastic element 2132 and the housing 211. In some embodiments, the limiting member 712 may be disposed around the elastic element 2132, with the side of the elastic element 2132 near the mass element 2131 physically connected to the mass element 2131, and the side of the elastic element 2132 near the limiting member 712 physically connected to the limiting member 712. In some embodiments, the limiting member 712 may not contact the housing 211. For example, the limiting member 712 may be spaced apart from the housing 211. In some embodiments, the limiting member 712 may contact the housing 211. In some embodiments, the elastic element 2132 may extend toward and be physically connected to the substrate 221 of the acoustic transducer 220, such that the substrate 221, the elastic element 2132, and the mass element 2131 form a first acoustic cavity 214.

[0109] In some embodiments, the thickness of the limiting member 712 along the vibration direction of the vibration unit 213 can be 100µm to 1000µm. For example, the thickness of the limiting member 712 along the vibration direction of the vibration unit 213 can be 200µm to 500µm. In some embodiments, the thickness of the limiting member 712 along the vibration direction of the vibration unit 213 can be equal to the thickness of the mass element 2131 along the vibration direction of the vibration unit 213. In this case, the limiting member 712 and the mass element 2131 can be processed simultaneously, thereby simplifying the manufacturing process of the limiting member 712 and the mass element 2131.

[0110] It should be noted that the above description of the vibration sensor 700 and its components is for illustrative purposes only and does not limit the scope of this specification. Those skilled in the art can make various modifications and alterations to the vibration sensor 800 under the guidance of this specification. For example, the thickness of the limiting member 712 along the vibration direction of the vibration unit 213 can be greater than or equal to the thickness of the elastic element 2132 along the vibration direction of the vibration unit 213.

[0111] Figure 8 This is an exemplary structural diagram of a vibration sensor according to some embodiments of this specification.

[0112] like Figure 8 As shown, the vibration sensor 800 may not include a limiting element. See also: [link to relevant documentation] Figure 8An elastic element 8132 is disposed around a mass element 2131. The inner side of the elastic element 8132 is physically connected to the mass element 2131, and the outer side of the elastic element 8132 is physically connected to the housing 211. In some embodiments, the elastic element 8132 and the substrate 221 are spaced apart by a certain distance in the vibration direction of the vibration unit 213. The elastic element 8132, the mass element 2131, the housing 211, and the substrate 221 form a first acoustic cavity 214. The elastic element 8132, the mass element 2131, and the housing 211 form a second acoustic cavity 215.

[0113] In some embodiments, when forming the first acoustic cavity 214 and the second acoustic cavity 215, a fixture can be used. Figure 8 (Not shown) The distance between the mass element 2131 and the substrate 211 (i.e., the height of the first acoustic cavity 214) is controlled. For example, the mass element 2131 can be placed on a fixture, and the height of the fixture itself can be used to lift the mass element 2131. Then, the mass element 2131 and the housing 211 can be connected by an elastic element 8132 to control the height of the first acoustic cavity 214 and the second acoustic cavity 215. By connecting the mass element 2131 to the housing 211 by the elastic element 8132 and controlling the distance between the mass element 2131 and the substrate 211 by the fixture, the height of the first acoustic cavity 214 and the second acoustic cavity 215 can be controlled more stably and accurately, thereby simplifying the fabrication process of the vibration sensor 800. In addition, the structure of the mass element 2131 (e.g., whether the mass element 2131 has holes) does not affect the above process.

[0114] In some embodiments, the thickness of the elastic element 8132 along the vibration direction of the vibration unit 213 may be less than, equal to or greater than the thickness of the mass element 2131 along the vibration direction of the vibration unit 213.

[0115] Figure 9 This is an exemplary structural diagram of a vibration sensor 800 shown according to some embodiments of this specification.

[0116] like Figure 9As shown, in some embodiments, the thickness of the elastic element 8132 along the vibration direction of the vibration unit 213 can be greater than the thickness of the mass element 8132 along the vibration direction of the vibration unit 213. For example, the two sides of the elastic element 8132 along the vibration direction of the vibration unit 213 can protrude relative to the two sides of the mass element 2131 along the vibration direction of the vibration unit 213. That is, the side of the elastic element 8132 closer to the substrate 211 is closer to the substrate 211 than the side of the mass element 2131 closer to the substrate 211, and the side of the elastic element 8132 farther from the substrate 211 is farther from the substrate 211 than the side of the mass element 2131 farther from the substrate 211. This arrangement can increase the connection area between the elastic element 8132 and the mass element 2131, thereby improving the connection strength between the elastic element 8132 and the mass element 2131.

[0117] It should be noted that the above description of the vibration sensor 800 and its components is for illustrative purposes only and does not limit the scope of this specification. Those skilled in the art can make various modifications and changes to the vibration sensor 800 under the guidance of this specification. For example, the side of the elastic element 8132 closest to the substrate 211 may be closer to the substrate 211 than the side of the mass element 2131 closest to the substrate 211, and the side of the elastic element 8132 furthest from the substrate 211 may be flush with the side of the mass element 2131 furthest from the substrate 211. Alternatively, the side of the elastic element 8132 closest to the substrate 211 may be flush with the side of the mass element 2131 closest to the substrate 211, and the side of the elastic element 8132 furthest from the substrate 211 may be farther from the substrate 211 than the side of the mass element 2131 furthest from the substrate 211.

[0118] The basic concepts have been described above. Obviously, for those skilled in the art, the detailed disclosure above is merely illustrative and does not constitute a limitation of this application. Although not explicitly stated herein, those skilled in the art may make various modifications, improvements, and corrections to this application. Such modifications, improvements, and corrections are suggested in this application, and therefore remain within the spirit and scope of the exemplary embodiments of this application.

[0119] Furthermore, this application uses specific terms to describe embodiments of the application. For example, "an embodiment," "one embodiment," and / or "some embodiments" refer to a particular feature, structure, or characteristic associated with at least one embodiment of the application. Therefore, it should be emphasized and noted that "an embodiment," "one embodiment," or "an alternative embodiment" mentioned twice or more in different locations in this specification do not necessarily refer to the same embodiment. In addition, certain features, structures, or characteristics in one or more embodiments of the application can be appropriately combined.

[0120] Furthermore, those skilled in the art will understand that aspects of this application can be described and illustrated through several patentable types or situations, including any new and useful combination of processes, machines, products, or substances, or any new and useful improvements thereof. Accordingly, aspects of this application can be implemented entirely by hardware, entirely by software (including firmware, resident software, microcode, etc.), or by a combination of hardware and software. All of the above hardware or software may be referred to as a “data block,” “module,” “engine,” “unit,” “component,” or “system.” Furthermore, aspects of this application may manifest as a computer product located on one or more computer-readable media, the product including computer-readable program code.

[0121] Computer storage media may contain a propagated data signal containing computer program code, for example, on baseband or as part of a carrier wave. This propagated signal may take various forms, including electromagnetic, optical, and suitable combinations thereof. Computer storage media can be any computer-readable medium other than a computer-readable storage medium, which can be connected to an instruction execution system, apparatus, or device to enable communication, propagation, or transmission of a program for use. The program code located on the computer storage medium can be propagated through any suitable medium, including radio, cable, fiber optic cable, RF, or similar media, or any combination of the above media.

[0122] The computer program code required for the operation of each part of this application can be written in any one or more programming languages, including object-oriented programming languages ​​such as Java, Scala, Smalltalk, Eiffel, JADE, Emerald, C++, C#, VB.NET, Python, etc., conventional procedural programming languages ​​such as C, Visual Basic, Fortran 2003, Perl, COBOL 2002, PHP, ABAP, dynamic programming languages ​​such as Python, Ruby, and Groovy, or other programming languages. This program code can run entirely on the user's computer, or as a standalone software package on the user's computer, or partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In the latter case, the remote computer can be connected to the user's computer through any network, such as a local area network (LAN) or wide area network (WAN), or connected to an external computer (e.g., via the Internet), or in a cloud computing environment, or used as a service such as Software as a Service (SaaS).

[0123] Furthermore, unless expressly stated in the claims, the order of processing elements and sequences, the use of numbers and letters, or other names described in this application are not intended to limit the order of the processes and methods of this application. Although the foregoing disclosure has discussed some currently considered useful embodiments of the invention through various examples, it should be understood that such details are for illustrative purposes only, and the appended claims are not limited to the disclosed embodiments; rather, the claims are intended to cover all modifications and equivalent combinations that conform to the substance and scope of the embodiments of this application. For example, while the system components described above can be implemented using hardware devices, they can also be implemented solely through software solutions, such as installing the described system on existing servers or mobile devices.

[0124] Similarly, it should be noted that, in order to simplify the description of the present application and thus aid in the understanding of one or more embodiments of the invention, the foregoing description of the embodiments of the present application sometimes combines multiple features into a single embodiment, drawing, or description thereof. However, this disclosure method does not imply that the subject matter of the application requires more features than those mentioned in the claims. In fact, the embodiments contain fewer features than all the features of the single embodiments disclosed above.

[0125] In some embodiments, numbers describing the quantity of components and attributes are used. It should be understood that such numbers used in the description of embodiments are modified in some examples with the terms "approximately," "approximately," or "generally." Unless otherwise stated, "approximately," "approximately," or "generally" indicates that the numbers are allowed to vary by ±20%. Accordingly, in some embodiments, the numerical parameters used in the specification and claims are approximate values, which may be changed depending on the characteristics required by individual embodiments. In some embodiments, numerical parameters should take into account specified significant digits and employ a general method of digit reservation. Although the numerical ranges and parameters used to confirm their breadth of scope in some embodiments of this application are approximate values, in specific embodiments, such values ​​are set as precisely as feasible.

[0126] For each patent, patent application, patent application publication, and other material such as articles, books, specifications, publications, and documents referenced in this application, the entire contents of that patent are incorporated herein by reference. This excludes historical application documents that are inconsistent with or conflict with the content of this application, as well as documents that limit the broadest scope of the claims in this application (currently or subsequently appended to this application). It should be noted that if there are any inconsistencies or conflicts between the descriptions, definitions, and / or terminology used in the supplementary materials of this application and the content of this application, the descriptions, definitions, and / or terminology used in this application shall prevail.

[0127] Finally, it should be understood that the embodiments described in this application are merely illustrative of the principles of the embodiments of this application. Other modifications may also fall within the scope of this application. Therefore, alternative configurations of the embodiments of this application are considered as examples and not limitations, and are regarded as consistent with the teachings of this application. Accordingly, the embodiments of this application are not limited to the embodiments explicitly described and illustrated in this application.

Claims

1. A vibration sensor, characterized in that, include: A vibration receiver and an acoustic transducer are provided. The vibration receiver includes a housing, a limiting member, and a vibration unit. The housing and the acoustic transducer form an acoustic cavity. The vibration unit is located within the acoustic cavity, dividing the acoustic cavity into a first acoustic cavity and a second acoustic cavity, wherein: The acoustic transducer is acoustically connected to the first acoustic cavity. The housing is configured to generate vibration based on an external vibration signal, and the vibration unit responds to the vibration of the housing by changing the sound pressure within the first acoustic cavity, causing the acoustic transducer to generate an electrical signal. The vibration unit includes a mass element and an elastic element. The penetration amount of the elastic element does not exceed 25% of the projected area of ​​the mass element along the vibration direction of the vibration unit. The penetration amount is the overlapping area of ​​the projected area of ​​the elastic element along the vibration direction of the vibration unit and the projected area of ​​the mass element along the vibration direction of the vibration unit.

2. The vibration sensor according to claim 1, characterized in that, The limiting member is located between the housing and the acoustic transducer, and the housing, the limiting member, and the acoustic transducer form the acoustic cavity.

3. The vibration sensor according to claim 2, characterized in that, The acoustic transducer includes a substrate, the limiting member is connected to the substrate, and the limiting member, the vibration unit and the substrate form the first acoustic cavity.

4. The vibration sensor according to claim 3, characterized in that, The elastic element is connected between the limiting member and the mass element, and the elastic element and the substrate are spaced apart by a certain distance in the vibration direction of the vibration unit.

5. The vibration sensor according to claim 2, characterized in that, The thickness of the limiting member along the vibration direction of the vibration unit is greater than the thickness of the mass element along the vibration direction of the vibration unit, and the side of the limiting member facing away from the acoustic transducer is flush with the side of the mass element facing away from the acoustic transducer.

6. The vibration sensor according to claim 2, characterized in that, The width of the limiting member along the vibration direction perpendicular to the vibration unit is 100 μm to 500 μm.

7. The vibration sensor according to claim 2, characterized in that, The limiting member includes a first limiting member and a second limiting member, which are arranged sequentially along the vibration direction of the vibration unit. The first limiting member is connected to the housing, and the second limiting member is connected to the acoustic transducer.

8. The vibration sensor according to claim 7, characterized in that, The second side of the elastic element is connected to the first limiting member.

9. The vibration sensor according to claim 7, characterized in that, The thickness of the first limiting member along the vibration direction of the vibration unit is equal to the thickness of the mass element along the vibration direction of the vibration unit.

10. The vibration sensor according to claim 7, characterized in that, The width of the first limiting member along the vibration direction perpendicular to the vibration unit is smaller than the width of the second limiting member along the vibration direction perpendicular to the vibration unit.

11. The vibration sensor according to claim 10, characterized in that, The ratio of the width of the first limiting member along the vibration direction perpendicular to the vibration unit to the width of the second limiting member along the vibration direction perpendicular to the vibration unit is greater than 0.

5.

12. The vibration sensor according to claim 7, characterized in that, The first limiting member and the second limiting member are made of different materials.

13. The vibration sensor according to claim 12, characterized in that, The first limiting member is made of at least one material selected from alloy material, metal material, and rigid plastic, and the second limiting member is made of solder paste or adhesive.

14. The vibration sensor according to claim 13, characterized in that, The thickness of the second limiting member along the vibration direction of the vibration unit is 50 μm to 500 μm.

15. The vibration sensor according to claim 7, characterized in that, The vibration unit includes a second elastic element located inside the first acoustic cavity, and the second elastic element is connected to the second limiting member and the acoustic transducer respectively.

16. The vibration sensor according to claim 15, characterized in that, The area of ​​the second elastic element on the side closer to the acoustic transducer is larger than the area of ​​the second elastic element on the side farther away from the acoustic transducer.

17. The vibration sensor according to claim 3, characterized in that, The elastic element extends toward and connects to the substrate, and the elastic element, the mass element, and the substrate form the first acoustic cavity.

18. The vibration sensor according to claim 17, characterized in that, The thickness of the limiting member along the vibration direction of the vibration unit is equal to the thickness of the mass element along the vibration direction of the vibration unit, and the area of ​​the first side of the elastic element is greater than the area of ​​the second side of the elastic element.

19. The vibration sensor according to claim 17, characterized in that, The thickness of the limiting member along the vibration direction of the vibration unit is equal to the thickness of the mass element along the vibration direction of the vibration unit, and the side of the mass element facing away from the substrate is farther from the substrate than the side of the limiting member facing away from the substrate.

20. The vibration sensor according to claim 1, characterized in that, The mass element includes a first aperture that connects the first acoustic cavity and the second acoustic cavity.

21. The vibration sensor according to claim 1, characterized in that, The housing includes a second opening, through which the second acoustic cavity communicates with the outside.

22. The vibration sensor according to claim 1, characterized in that, The limiting member is located between the elastic element and the housing.

23. The vibration sensor according to claim 22, characterized in that, The elastic element extends toward and connects to the acoustic transducer, and the elastic element, the mass element, and the acoustic transducer form the first acoustic cavity.

24. The vibration sensor according to claim 22, characterized in that, The thickness of the limiting member along the vibration direction of the vibration unit is 100 μm to 1000 μm.

25. A vibration sensor, characterized in that, include: A vibration receiver and an acoustic transducer are provided. The vibration receiver includes a housing and a vibration unit. The housing and the acoustic transducer form an acoustic cavity. The vibration unit is located within the acoustic cavity and divides the acoustic cavity into a first acoustic cavity and a second acoustic cavity, wherein: The acoustic transducer is acoustically connected to the first acoustic cavity. The housing is configured to generate vibration based on an external vibration signal, and the vibration unit responds to the vibration of the housing by changing the sound pressure within the first acoustic cavity, causing the acoustic transducer to generate an electrical signal. The vibration unit includes a mass element and an elastic element. The penetration amount of the elastic element does not exceed 25% of the projected area of ​​the mass element along the vibration direction of the vibration unit. The penetration amount is the overlapping area of ​​the projected area of ​​the elastic element along the vibration direction of the vibration unit and the projected area of ​​the mass element along the vibration direction of the vibration unit.

26. The vibration sensor according to claim 25, characterized in that, The thickness of the elastic element along the vibration direction of the vibration unit is greater than the thickness of the mass element along the vibration direction of the vibration unit.

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