A method of detecting, a method of manufacturing, and a system of detecting a suspension for a disk device

Abstract

A detection method according to an embodiment is for detecting a suspension for a disk device including an electronic component having a first side surface and a second side surface arranged in a first direction, a first adhesive provided along the first side surface, and a second adhesive provided along the second side surface. The detection method includes detecting a first height of a first position of the first adhesive, detecting a second height of a second position of the second adhesive, and determining whether at least one of a position at which the first adhesive and the second adhesive are applied in the first direction and an amount at which the first adhesive and the second adhesive are applied is appropriate based on the first height and the second height.

Description

[0001] Cross Reference to Related Applications

[0002] This application is based on Japanese Patent Application No. 2021-192145 filed November 26, 2021, the entire contents of which are incorporated herein by reference. TECHNICAL FIELD

[0003] The present application relates to a detection method, a manufacturing method, and a detection system for a suspension for a magnetic disk device used in a hard disk drive or the like. BACKGROUND

[0004] A hard disk device (HDD) is used in an information processing device such as a personal computer. The hard disk device includes a magnetic disk that rotates around a spindle, a carriage that rotates around a pivot, and the like. The carriage has an actuator arm, and rotates around the pivot in a track width direction of the magnetic disk by a positioning motor such as a voice coil motor.

[0005] A suspension for a magnetic disk device (hereinafter referred to as a suspension) is provided on the actuator arm. The suspension includes a load beam and a flexure that is stacked on the load beam. A gimbal formed near a front end of the flexure is provided with a slider that constitutes a magnetic head. The slider has an element (transducer) for accessing, for example, reading or writing data, and the like.

[0006] In order to increase the recording density of a magnetic disk, it is necessary to enable the magnetic head to be positioned on the recording surface of the magnetic disk with higher precision. Therefore, a suspension has been developed that includes an actuator element made of a piezoelectric material such as PZT (lead zirconate titanate) or the like in addition to a positioning motor. In this type of suspension, by deforming the actuator element, the front end of the suspension can be moved at a high speed in a minute amount in a swing direction (track width direction).

[0007] When the actuator element is operated, particles can fall off from the side surface of the actuator element. As a method of suppressing such a situation, it is considered to cover the side surface with an adhesive. In this case, if the adhesive deviates from the designed application position or the amount of the applied adhesive is not appropriate, a problem can occur that adversely affects the operation of the actuator element or the like. In order to suppress such a problem, it is necessary to detect whether the application position and the application amount of the adhesive are appropriate. In addition to the actuator element, this type of detection is also required for an adhesive used to bond various electronic components.

[0008] For example, in Japanese Patent Application Publication No. 2018-93081, an electronic component mounting system is disclosed in which, when mounting an electronic component on a substrate coated with an adhesive (coating agent), the state of the coating agent (coating position, coating area, and coating thickness) is statistically processed, the amount of change over time is calculated, and the coating device is feedback controlled to reduce the amount of change. However, the specific method of detecting the coating position and the like is not disclosed in this publication, and there is no mention of detecting whether the coating position and the amount of coating of each product including the substrate and the electronic component are correct. SUMMARY

[0009] An object of the present application is to provide a detection method for accurately detecting a suspension including an adhesive, a manufacturing method for the suspension, and a detection system.

[0010] The detection method according to one embodiment is a detection method for detecting a suspension for a disk device, the suspension for a disk device including an electronic component having a first side surface and a second side surface arranged along a first direction, a first adhesive arranged along the first side surface, and a second adhesive arranged along the second side surface; the detection method including measuring a first height of a first position of the first adhesive, measuring a second height of a second position of the second adhesive, and determining whether a coating position of at least one of the first adhesive and the second adhesive in the first direction and a coating amount of the at least one of the first adhesive and the second adhesive are appropriate based on the first height and the second height.

[0011] The manufacturing method according to one embodiment is a manufacturing method for manufacturing a suspension for a disk device, the suspension for a disk device including an electronic component having a first side surface and a second side surface arranged side by side along a first direction, a first adhesive arranged along the first side surface, and a second adhesive arranged along the second side surface; the manufacturing method including coating the first adhesive and the second adhesive, measuring a first height of a first position of the first adhesive, measuring a second height of a second position of the second adhesive, and determining whether a coating position of at least one of the first adhesive and the second adhesive in the first direction and a coating amount of the at least one of the first adhesive and the second adhesive are appropriate based on the first height and the second height.

[0012] A detection system according to an embodiment is a detection system for detecting a suspension for a disk device, the suspension including an electronic element having a first side surface and a second side surface juxtaposed in a first direction, a first adhesive disposed along the first side surface, and a second adhesive disposed along the second side surface, the detection system including a measurement device for measuring a first height of a first position of the first adhesive and a second height of a second position of the second adhesive, and a control device for determining whether at least one of a position at which the first adhesive and the second adhesive are applied in the first direction and an amount at which the first adhesive and the second adhesive are applied is appropriate based on the first height and the second height.

[0013] According to the present application, it is possible to provide a detection method, a manufacturing method, and a detection system that can accurately detect a suspension including an adhesive. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 is a side view of a disk device according to an embodiment.

[0015] Figure 2 is a partial cross-sectional view of a disk device according to an embodiment.

[0016] Figure 3 is a plan view of a suspension according to an embodiment.

[0017] Figure 4 is a plan view of a suspension viewed from the side opposite to Figure 3

[0018] Figure 5 is an enlarged plan view of an actuator mounting portion and an actuator element according to an embodiment.

[0019] Figure 6 is a cross-sectional view of an actuator mounting portion and an actuator element along line VI-VI in Figure 5

[0020] Figure 7 is a schematic view showing a brief configuration of a manufacturing system (detection system) according to an embodiment.

[0021] Figure 8 is a structural example of a nozzle possessed by an application device according to an embodiment.

[0022] Figure 9 is a flowchart of a manufacturing method (detection method) according to an embodiment.

[0023] Figure 10 is a model diagram for explaining measurement of a height according to an embodiment.

[0024] ​​Figure 11 is a brief plan view showing the position of the adhesive application deviated from the proper position.

[0025] Figure 12 is another brief plan view showing the position of the adhesive application deviated from the proper position.

[0026] Figure 13 is a schematic view for explaining the adhesive and the method for detecting the same according to a modification. DETAILED DESCRIPTION

[0027] An embodiment of the present application will be described with reference to the accompanying drawings.

[0028] In the present embodiment, a dual stage actuator (DSA) type suspension is taken as an example to explain the suspension for a magnetic disk device. However, the main configurations disclosed in the embodiment relating to the suspension detection method, manufacturing method, and detection system can be applied to other types of suspensions having an adhesive.

[0029] Figure 1 is a cross-sectional view showing an example of a magnetic disk device (HDD) 1. The magnetic disk device 1 includes a housing 2, a plurality of magnetic disks 4 rotating around a spindle 3, a carriage 6 rotating around a pivot 5, and a positioning motor 7 (voice coil motor) for driving the carriage 6. The housing 2 is sealed by one lid not shown.

[0030] Figure 2 shows a cross-sectional view of a part of the magnetic disk device 1. As shown in Figure 1 and Figure 2 , the carriage 6 is provided with a plurality of arms (carriage arms) 8. The front end of each arm 8 is connected to a suspension 10. At the front end of each suspension 10, there is a slider 11 constituting a magnetic head. When the magnetic disk 4 rotates at a high speed, air flows between the magnetic disk 4 and the slider 11, forming an air bearing.

[0031] In the example of Figure 2 , the suspension 10 has a base plate 20. The base plate 20 has a protrusion 20a which is inserted into a hole 8a formed in the arm 8.

[0032] When the carriage 6 rotates by the positioning motor 7, the suspension 10 moves in the radial direction of the magnetic disk 4, thereby moving the slider 11 to a desired track 4 of the magnetic disk 4.

[0033] Figure 3 shows a schematic plan view of the suspension 10 according to the present embodiment. Figure 4 is a cross-sectional view taken along the line Figure 3A schematic plan view of the suspension 10 is shown on the opposite side. The suspension 10 includes the above-described base plate 20, the load beam 30, and the wiring-equipped flexure 40. In the present embodiment, the base plate 20 is an example of a first plate, and the load beam 30 is an example of a second plate.

[0034] In the following description, a first direction X, a second direction Y, a third direction Z, and a swing direction S are defined as shown in Figure 3 The first direction X, the second direction Y, and the third direction Z intersect with each other, and are orthogonal in the present embodiment. The first direction X corresponds to a width direction of the suspension 10, the base plate 20, the load beam 30, the flexure 40, and the like. The second direction Y corresponds to a length direction of the suspension 10, the base plate 20, the load beam 30, the flexure 40, and the like. The third direction Z corresponds to a thickness direction of the suspension 10, the base plate 20, the load beam 30, the flexure 40, and the like. The swing direction S is a direction in which the front end of the load beam 30 rotates to the left or to the right. Figure 3

[0035] At the base (root) of the load beam 30, there is a pair of hinge portions 31L, 31R that can be elastically bent in the third direction Z. These hinge portions 31L, 31R are aligned in the first direction X with a space therebetween.

[0036] As shown in Figure 4 The flexure 40 is arranged along the load beam 30. In the vicinity of the front end of the load beam 30, the flexure 40 has a tongue-shaped piece 41 that functions as a gimbal portion. The slider 11 that constitutes a magnetic head is mounted on the tongue-shaped piece 41. A tail portion 42 of the flexure 40 extends to the rear of the base plate 20.

[0037] At the end of the slider 11, there is an element 11a like an MR element that can convert a magnetic signal and an electric signal. Through the element 11a, writing data to the disk 4 and reading data from the disk 4 can be performed. The slider 11, the load beam 30, the flexure 40, and the like constitute a head gimbal assembly.

[0038] The flexure 40 has a metal base 43 made of, for example, stainless steel, and a plurality of wiring lines 44 formed on the metal base 43. The wiring lines 44 are covered with an insulating layer made of, for example, polyimide. The metal base 43 is fixed to the load beam 30 by, for example, laser spot welding. A portion of the plurality of wiring lines 44 is connected to the slider 11.

[0039] The suspension 10 includes a pair of actuator mounting portions 50L, 50R and a pair of actuator elements 60L, 60R. The actuator elements 60L, 60R are mounted to the actuator mounting portions 50L, 50R by an electrically insulating adhesive 70 such as an epoxy resin.

[0040] ​The actuator mounting portions 50L, 50R are located between the protruding portions 20a provided on the base plate 20 and the hinge portions 31L, 31R, and are arranged in the first direction X. The actuator elements 60L, 60R have a function of moving the support beam 30 in the swinging direction S.

[0041] As shown in Figure 3 , the base plate 20 has recesses 51 in the actuator mounting portions 50L, 50R, respectively. These recesses 51 are recessed toward the center of the base plate 20 in the first direction X.

[0042] As shown in Figure 4 , the support beam 30 has openings 52 in the actuator mounting portions 50L, 50R, respectively. These openings 52 overlap the recesses 51 shown in Figure 3

[0043] The actuator element 60L is provided inside the recess 51 of the actuator mounting portion 50L so as to block the opening 52. The actuator element 60R is provided inside the recess 51 of the actuator mounting portion 50R so as to block the opening 52.

[0044] Figure 3 The surfaces of the actuator elements 60L and 60R shown in

[0045] Figure 4 The surfaces of the actuator elements 60L and 60R shown in

[0046] Figure 5 An enlarged plan view of the actuator mounting portion 50L and the actuator element 60L is shown. The stippled area enclosed by the broken line in the figure corresponds to the adhesive 70.

[0047] As shown in Figure 5 , the recess 51 has a first inner wall 51a, a second inner wall 51b, and a third inner wall 51c. For example, the first inner wall 51a is parallel to the second direction Y, and the second inner wall 51b and the third inner wall 51c are parallel to the first direction X.

[0048] ​Further, the actuator element 60L has a first side surface 60a, a second side surface 60b, a third side surface 60c, and a fourth side surface 60d. The first side surface 60a and the second side surface 60b are both parallel to the second direction Y and juxtaposed in the first direction X. The third side surface 60c and the fourth side surface 60d are both parallel to the first direction X and juxtaposed in the second direction Y. In the present embodiment, the first side surface 60a and the second side surface 60b are both longer than the third side surface 60c and the fourth side surface 60d. The second side surface 60b faces the first inner wall 51a, the third side surface 60c faces the second inner wall 51b, and the fourth side surface 60d faces the third inner wall 51c.

[0049] In Figure 5 In the example shown in FIG. 6, the adhesive 70 is formed in a ring shape around the actuator element 60L. Specifically, the adhesive 70 includes a first adhesive 71 at the first side surface 60a, a second adhesive 72 at the second side surface 60b, a third adhesive 73 at the third side surface 60c, and a fourth adhesive 74 at the fourth side surface 60d. The first adhesive 71 and the second adhesive 72 have an elongated shape in the second direction Y. The third adhesive 73 and the fourth adhesive 74 have an elongated shape in the first direction X. These adhesives 71, 72, 73, and 74 are not necessarily connected to each other and can be at least partially separated.

[0050] Figure 6 A schematic cross-sectional view of the actuator mounting portion 50L and the actuator element 60L is shown in FIG. 7. The actuator element 60L has a piezoelectric body 63 between the first electrode 61 and the second electrode 62 in addition to the first electrode 61 and the second electrode 62. The piezoelectric body 63 is formed of PZT, for example, and deforms in response to a voltage applied between the electrodes 61, 62.

[0051] The first adhesive 71 covers the first side surface 60a while being in contact with the upper surface of the support beam 30. A portion of the first adhesive 71 protrudes above the actuator element 60L and covers the edge of the first electrode 61. Another portion of the first adhesive 71 is between the support beam 30 and the actuator element 60L and covers the edge of the second electrode 62.

[0052] The second adhesive 72 is between the second side surface 60b and the bottom plate 20 (the first inner wall 51a) and is in contact with the upper surface of the support beam 30. A portion of the second adhesive 72 protrudes above the actuator element 60L and covers the edge of the first electrode 61 and the edge of the upper surface of the bottom plate 20. Another portion of the second adhesive 72 is between the support beam 30 and the actuator element 60L and covers the edge of the second electrode 62.

[0053] Further, the cross-sectional structure of the portion including the third adhesive 73 and the fourth adhesive 74 is as shown in Figure 6As shown, the third adhesive 73 has the same configuration as the cross-sectional structure of the portion including the second adhesive 72. In other words, the third adhesive 73 is filled between the third side surface 60c and the bottom plate 20 (the second inner wall 51b) and is in contact with the upper surface of the load beam 30. A portion of the third adhesive 73 protrudes above the actuator element 60L and covers the edge of the first electrode 61 and the edge of the upper surface of the bottom plate 20. Another portion of the third adhesive 73 is between the load beam 30 and the actuator element 60L and covers the edge of the second electrode 62. The fourth adhesive 74 is filled between the fourth side surface 60D and the bottom plate 20 (the third inner wall 51c) and is in contact with the upper surface of the load beam 30. A portion of the fourth adhesive 74 protrudes above the actuator element 60 and covers the edge of the first electrode and the edge of the upper surface of the bottom plate 20. Another portion of the fourth adhesive 74 is between the load beam 30 and the actuator element 60L and covers the edge of the second electrode 62.

[0054] In Figure 5 and Figure 6 The configuration of the actuator mounting portion 50L and the actuator element 60L is shown, but the actuator mounting portion 50R and the actuator element 60R also have a similar structure.

[0055] As shown, in the present embodiment, the side surfaces of the actuator elements 60L and 60R are covered with the adhesive 70. Therefore, even if particles adhere to the side surfaces of the actuator elements 60L and 60R, the detachment of the actuator elements 60L and 60R can be suppressed.

[0056] Next, the manufacturing and inspection of the suspension 10 will be described.

[0057] Figure 7 A brief configuration of a manufacturing system 100 of the suspension 10 is shown. In the manufacturing system 100, elements that implement the inspection steps of the suspension 10 constitute an inspection system 200 of the suspension 10.

[0058] The manufacturing system 100 includes a conveyance device 110, an application device 120, a measurement device 130, a stage controller 140, a spray controller 150, and a control device 160.

[0059] The conveyance device 110 is driven by the stage controller 140, and during the manufacturing process, the conveyance device 110 transports the suspension 10 (work) placed on the stage toward the application device 120 and the measurement device 130. The application device 120 is driven by the spray controller 150, and the application device 120 applies the adhesive to the suspension 10 on which at least the actuator mounting portions 50L and 50R are formed. By curing the adhesive, the adhesive 70 is formed.

[0060] Thereafter, the actuator elements 60L, 60R are placed on the actuator mounting portions 50L, 50R, respectively, and the adhesive 70 is cured. The measuring device 130 measures the height of the adhesive 70 after the adhesive 70 is cured, with respect to the suspension 10. The measuring method of the measuring device 130 is not limited, but in one example, a white confocal method can be applied. In the white confocal method, white light emitted from a light source passes through a lens module and converges a focus at different positions depending on the color (wavelength). Then, by measuring the reflected light of the color that converges a focus on the surface of the object, the height of the surface is measured.

[0061] The control unit 160 controls each element included in the manufacturing system 100, such as the stage controller 140, the jet controller 150, and the measuring device 130. The control unit 160 has a memory that stores computer programs and data for implementing operations related to the control and detection of these elements, and a processor for executing these programs.

[0062] The application device 120 is equipped with a nozzle 121 that jets the adhesive. In the present embodiment, the nozzle 121 is capable of simultaneously applying the adhesives 71, 72, 73, and 74 shown in FIG. 6. Figure 5

[0063] Figure 8 One example of such a nozzle 121 is shown. The illustrated nozzle 121 has a plurality of jet ports 122. These jet ports 122 are arranged in the same frame shape as the adhesive 70. With such a nozzle 121, the adhesives 71, 72, 73, and 74 can be simultaneously applied.

[0064] For example, the adhesive 70 in the actuator mounting portions 50L, 50R can be applied sequentially by one nozzle 121 or simultaneously by two nozzles 121.

[0065] The controller 160 detects the suspension 10 based on the height of the adhesive 70 measured by the measuring device 130. A series of manufacturing methods including this detection will be described below.

[0066] Figure 9 is a flowchart showing one example of a manufacturing method (detection method) of the suspension 10. Here, the steps related to the application and detection of the adhesive 70 in the manufacturing of one suspension 10 are mainly described, and detailed descriptions of other steps are omitted.

[0067] In the flowchart of Figure 9 , first, pre-processing including the assembly of the base plate 20 and the carrier beam 30 is performed (step S1). Thereafter, the suspension 10 is moved to a position directly opposite the nozzle 121 of the application device 120 by the transfer device 110, and the adhesive 70 is applied by the application device 120 (step S2). ​

[0068] Then, the suspension 10 is transported by the transport device 110 to a measurement position of the measurement device 130. The measurement device 130 measures the height of the adhesive 70 (step S3). Details will be described later, but in the present embodiment, the height of a plurality of positions of the adhesive 70 is to be measured.

[0069] Subsequently, based on the height measured in step S3, it is determined by the control device 160 whether the application position and the application amount of the adhesive 70 are appropriate.

[0070] When at least one of the application position and the application amount is not appropriate, the control device 160 adjusts the control parameters of the transport device 110 and the application device 120 so that the application position and the application amount of the adhesive of the next manufactured suspension 10 are appropriate (step S5).

[0071] Then, various processes required for the completion of the suspension 10 are performed (step S6). For the suspension 10 determined to be incorrect in at least one of the application position and the application amount in step S4, subsequent processing can not be performed.

[0072] An example of the height measurement in step S3 will now be described.

[0073] Figure 10 is a model diagram for explaining the height measurement. In the diagram, (a) is a plan view of the adhesive 70, and the outline shapes of the first adhesive 71 and the second adhesive 72 are indicated by solid lines, and the outline shapes of the third adhesive 73 and the fourth adhesive 74 are indicated by broken lines. Also, a first center line Cl passing through the center (first center) of the first adhesive 71 in the first direction X, a second center line C2 passing through the center (second center) of the second adhesive 72 in the first direction X, a third center line C3 passing through the center (third center) of the third adhesive 73 in the second direction Y, and a fourth center line C4 passing through the center (fourth center) of the fourth adhesive 74 in the second direction Y are respectively indicated by dot-dash lines. The center lines Cl, C2, and C4 are parallel to the second direction Y, and the center lines C3 and C4 are parallel to the first direction X. In Figure 10 In the present embodiment, the application position of the adhesive 70 is correct.

[0074] The first adhesive 71 has a first outer edge 71a beyond the first center line Cl away from the second adhesive 72 in the first direction X, and a first inner edge 71b beyond the first center line Cl toward the second adhesive 72. The second adhesive 72 has a second outer edge 72a beyond the second center line C2 away from the first adhesive 71 in the first direction X, and a second inner edge 72b beyond the first center line C2 toward the first adhesive 71.

[0075] In the step S3, the measurement device 130 measures the height of at least two, preferably more than three, of the adhesive 70. As shown inFigure 10 As shown, it is assumed that the heights of three positions, namely, the first position P1 of the first adhesive 71, the second position P2 of the second adhesive 72, and the third position P3 of the first adhesive 71, are measured. Furthermore, the distance between the first center line C1 and the second center line C2 is defined as D1, the distance between the first position P1 and the second position P2 in the first direction is defined as D2, the distance between the third center line C3 and the fourth center line C4 is defined as D3, and the distance between the first position P1 and the third position P3 in the second direction Y is defined as D4.

[0076] If the adhesive 70 is applied appropriately as designed, the first position P1, the second position P2, and the third position P3 are positioned so that none of the centers C1, C2, C3, and C4 overlap. Furthermore, the first position P1, the second position P2, and the third position P3 are positioned so that the distance D2 differs from the distance D1, and the distance D4 differs from the distance D3. If the first position P1 and the second position P2 are located on a straight line parallel to the first direction X, then the first position P1 and the third position P3 are located on a straight line parallel to the second direction Y.

[0077] exist Figure 10 In the example shown in FIG. 1 , the first position P1 is located between the first center line C1 and the first outer edge 71a in the first direction X. The second position P2 is located between the second center line C2 and the second outer edge 72a in the first direction X. That is, the first position P1 and the second position P2 are located outside the region between the first center line C1 and the second center line C2. The first position P1 and the third position P3 are also located outside the region between the third center line C3 and the fourth center line C4.

[0078] Figure 10 (b), (c), and (d) are schematic cross-sectional views of the adhesive 70 including the first position P1, the second position P2, and the third position P3, respectively. Generally, the heights of the adhesives 71, 72, 73, and 74 are highest at positions overlapping the center lines C1, C2, C3, and C4.

[0079] like Figure 10 As shown in the cross-sectional views (b)(c)(d), the height of the adhesive 70 (first adhesive 71) in the first position P1 is defined as the first height H1, the height of the adhesive 70 (second adhesive 72) in the second position P2 is defined as the second height H2, and the height of the adhesive 70 (first adhesive 71) in the third position P3 is defined as the third height H3.

[0080] The heights H1, H2, and H3 are based on, for example, a common reference plane RF. The reference plane RF may be the surface of the base plate 20 or the surface of the load beam 30, but is not limited thereto.

[0081] In this embodiment, it is assumed that when the measuring device 130 performs measurement, there is no deviation between each position P1, P2, and P3 and the base plate 20 or the load beam 30. In other words, the deviation of the heights H1, H2, and H3 from the appropriate values ​​is caused by the deviation of the application position and amount of the adhesive 70 from the appropriate values.

[0082] The first position P1 can be Figure 10 Like the first position P1a shown by the dotted line in FIG, the second position P2 may be set so as not to be adjacent to the third adhesive 73 and the fourth adhesive 74 in the first direction X. Figure 10 The second position P2a shown by the dotted line in the middle circle is similarly set so as not to be adjacent to the third adhesive 73 and the fourth adhesive 74 in the first direction X. The first position P1 is as shown in FIG. Figure 10 The first position P1b is located between the first center line C1 and the first inner edge 71b in the first direction X. Similarly, the second position P2 can also be located between the first center line C1 and the first inner edge 71b in the first direction X. Figure 11 The second position P2b shown by the dotted line is similarly located between the second center line C2 and the second inner edge 72b in the first direction X. The third position P3 can also be selected from various portions of the first adhesive 71 .

[0083] Figure 12 and Figure 10 to Figure 12 70 is a schematic plan view of an adhesive 70 whose application position deviates from the correct position. Figure 1 An example of the application position and the application amount of the adhesive 70 in step S4 and the feedback in step S5 will be described.

[0084] [Determination of the coating position in the first direction X]

[0085] When the difference ΔHa (= H1 − H2 ) between the first height H1 and the second height H2 is different from the predetermined reference value Hx, the control device 160 determines that the application position of the adhesive 70 in the first direction X is deviated from the correct position. The reference value Hx is an example of the first reference value.

[0086] For example, the reference value Hx is determined by taking into account the height difference between the first adhesive 71 and the second adhesive 72 applied to the correct position. In this embodiment, the gap between the base plate 20 and the actuator element 60L (or actuator element 60R) is as follows: Figure 10 As shown, the second adhesive 72 is filled in the gap, but the first adhesive 71 is not filled in the gap. Therefore, the overall height of the second adhesive 72 may be greater than the height of the first adhesive 71. Therefore, when the first adhesive 71 and the second adhesive 72 are applied to the correct positions, the reference value Hx can be set to a value corresponding to the height difference that may occur near the first position P1 and the second position P2.

[0087] The reference value Hx can also be zero. The reference value Hx can also be a numerical range having an upper limit and a lower limit. When the reference value Hx is a numerical range, in the following explanation, the expression "the difference value ΔHa is equal to the reference value Hx" means that the difference value ΔHa is included in the numerical range, and the expression "the difference value ΔHa does not coincide with the reference value Hx" means that the difference value ΔHa is not included in the numerical range.

[0088] When the position of the adhesive 70 is in the correct position as shown in FIG. 6A, the difference value ΔHa coincides with the reference value Hx. At this time, the control unit 160 determines that the position of the adhesive 70 in the first direction X is correct. Figure 11

[0089] In the example shown in FIG. 6B, the second position P2 is located on the intersection of the second center line C2 and the third center line C3. Therefore, the second height H2 is increased compared to the case where the application position of the adhesive 70 is correct, and the difference value ΔHa fluctuates in the negative direction. Thus, the difference value ΔHa becomes smaller than the reference value Hx, and the two do not coincide. At this time, the control unit 160 determines that the adhesive 70 is deviated to the right in the figure (in the direction from the first adhesive 71 toward the second adhesive 72) from the original position. Figure 12 In the example shown in FIG. 6C, the second position P2 is close to the edge of the second adhesive 72. Therefore, the second height H2 is decreased compared to the case where the application position of the adhesive 70 is correct, and the difference value ΔHa fluctuates in the positive direction. Thus, the difference value ΔHa becomes larger than the reference value Hx, and the two do not coincide. At this time, the control unit 160 determines that the adhesive 70 is deviated to the left in the figure (in the direction from the second adhesive 72 to the first adhesive 71) from the original position.

[0090] Figure 10

[0091]

Determination of the application position in the second direction Y

[0092] When the difference value ΔHb (= H1 - H3) between the first height H1 and the third height H3 is different from a predetermined reference value Hy, the control unit 160 determines that the application position of the adhesive 70 in the second direction Y is deviated from the correct position. The reference value Hy is another example of the first reference value.

[0093] The reference value Hy is determined, for example, in consideration of the height difference between the first height H1 and the third height H3 applied to the first adhesive 71 in the correct position. The reference value Hy can be zero or a numerical range having an upper limit and a lower limit. When the reference value Hy is a numerical range, in the following explanation, the expression "the difference value ΔHb is not equal to the reference value Hy" means that the difference value ΔHb is not included in the numerical range. The expression "the difference value ΔHb does not coincide with the reference value Hy" means that the difference value ΔHb is not included in the numerical range. ​​​

[0094] When the position of the adhesive 70 is in the correct position as shown in Figure 11 the difference ΔHb coincides with the reference value Hy. At this time, the control device 160 determines that the position of the adhesive 70 in the second direction Y is correct.

[0095] In the example as shown in Figure 12 the first position PI is on the third center line C3 and the third position P3 is near the edge of the first adhesive 71. Therefore, compared with the case where the application position of the adhesive 70 is correct, the first height HI increases while the third height H3 decreases, and the difference ΔHb fluctuates in the positive direction. This results in the difference ΔHb becoming larger than the reference value Hy, and the two do not coincide. At this time, the control unit 160 determines that the adhesive 70 is deviated upward in the figure (in the direction from the fourth adhesive 74 toward the third adhesive 73) from the original position.

[0096] Also, in the example of Figure 1 to Figure 12 the third position P3 is at the intersection of the first center line CI and the fourth center line C4. Therefore, compared with the case where the application position of the adhesive 70 is correct, the third height H3 increases, and the difference ΔHb fluctuates in the negative direction. This results in the difference ΔHb becoming smaller than the reference value Hy, and the two do not coincide. At this time, the control unit 160 determines that the adhesive 70 is deviated downward in the figure (in the direction from the third adhesive 73 to the fourth adhesive 74) from the original position.

[0097]

Determination of the application amount

[0098] When at least two of the heights HI, H2 and H3, preferably all of the heights HI, H2 and H3, are greater than a predetermined reference value Hm, the control device 160 determines that the application amount of the adhesive 70 is greater than the appropriate application amount. When at least two of the heights HI, H2 and H3, preferably all of the heights HI, H2 and H3, are smaller than the reference value Hm, the control device 160 determines that the application amount of the adhesive 70 is smaller than the appropriate application amount.

[0099] The reference value Hm can be a range of values having an upper limit and a lower limit. When the reference value Hm is a range of values, the expression "the heights HI, H2 and H3 are greater than the reference value Hm" means that the heights HI, H2 and H3 are greater than the upper limit of the range of values. The expression "the heights HI, H2 and H3 are smaller than the reference value Hm" means that the heights HI, H2 and H3 are smaller than the lower limit of the range of values.

[0100]

Feedback

[0101] When the control device 160 determines that the application position of the adhesive 70 is incorrect, the control device 160 adjusts the control parameters of the transport device 110 and the application device 120 so that the application position of the adhesive 70 becomes correct in the next suspension 10 to be manufactured. The control parameters include, for example, parameters of a motor that drives movement of the platform of the transport device 110, or parameters of an actuator that drives movement of the nozzle 121 of the application device 120.

[0102] In other words, when the control device 160 determines that the adhesive 70 is deviated in the first direction X, the position of the next suspension 10 to be manufactured and the nozzle 121 in the first direction X is adjusted in step S2. Further, when the control device 160 determines that the adhesive 70 is deviated in the second direction Y, the position of the next suspension 10 to be manufactured and the nozzle 121 in the second direction Y is adjusted in step S2.

[0103] When the control device 160 determines that the amount of the adhesive 70 is inappropriate, the control device 160 adjusts the control parameters of the application device 120 so that the amount of the adhesive 70 applied to the next suspension 10 to be manufactured becomes appropriate. The control parameters include, for example, parameters for changing the pressure at which the application device 120 applies the adhesive, and parameters for changing the temperature of the adhesive.

[0104] In other words, when the control device 160 determines that the amount of the adhesive 70 applied is too much, the control device 160 reduces the amount of the adhesive 70 applied to the next suspension 10 to be manufactured. When the control device 160 determines that the amount of the adhesive 70 applied is too little, the control device 160 increases the amount of the adhesive 70 applied to the next suspension 10 to be manufactured.

[0105] The adjustment amount of the application position and the application amount of the adhesive 70 at the time of feedback can be a predetermined constant value, or can be dynamically calculated based on the heights H1, H2, H3. In addition, a correlation data quantifying the relationship between the heights H1, H2, H3 and the application position deviation, or the relationship between the heights H1, H2, H3 and the application amount deviation can be prepared in advance, and the adjustment amount at the time of feedback can be determined based on the heights H1, H2, H3 measured in step S3 and the correlation data.

[0106] The same inspection of the application position and the application amount is performed for the adhesive 70 on both of the actuator mounting portions 50L and 50R. As another example, the inspection can be performed for the adhesive 70 of either of the actuator mounting portions 50L, 50R.

[0107] In the above, the reference Figure 10In the embodiment described above, the correctness of the application position or amount of the adhesives 71 and 72 in the first direction X is determined based on the first height H1 of the first adhesive 71 at the first position P1 and the second height H2 of the second adhesive 72 at the second position P2. This method simplifies the inspection configuration and improves the inspection accuracy compared to, for example, inspecting the application position or amount using image processing.

[0108] In addition, if Figure 10 As shown in FIG. 1 , when the first position P1 and the second position P2 deviate from the center lines C1 and C2, respectively, the deviation of the application positions of the first adhesive 71 and the second adhesive 72 is more easily reflected in the first height H1 and the second height H2. Figure 10 The dotted line in the middle circle shows the position Q1, and the part overlapping with the first center line C1 is set as the first position P1. Figure 10 When the portion of the adhesive 71 and the second adhesive 72 that overlaps the second center line C2 is defined as the second position P2, even if the first adhesive 71 and the second adhesive 72 deviate in the first direction X, both the heights H1 and H2 decrease, and thus the difference ΔHa is unlikely to deviate from the reference value. Consequently, deviations in the application positions of the adhesives 71 and 72 are difficult to detect.

[0109] And if it is Figure 7 In the case of the first position P1 (P1a, P1b) and the second position P2 (P2a, P2b) shown in FIG. , even when the first adhesive 71 and the second adhesive 72 are slightly offset in the first direction X, essentially one of the heights H1 and H2 increases while the other decreases. Therefore, ΔHa is easily affected by variations in the amount of adhesive 71 or 72 applied, making it easy to detect such variations.

[0110] In this embodiment, the third height H3 at the third position P3 of the first adhesive 71 is further used to determine whether the application positions of the first adhesive 71 and the second adhesive 72 in the second direction Y are correct. In this way, deviations of the adhesives 71 and 72 in both the first direction X and the second direction Y can be detected.

[0111] Through Figure 5 The structure of the manufacturing system 100 (detection system 200) shown here can automatically detect deviations in the application position and amount without operator intervention and provide feedback. Furthermore, if the adhesive 70 is inspected for all the hangers 10 manufactured by the manufacturing system 100, fluctuations in the quality of the hangers 10 can be significantly reduced.

[0112] In addition, the inspection method disclosed in this embodiment is not limited to Figure 13 The adhesive 70 of the disclosed shape can be applied to adhesives of various shapes. A modified example of this embodiment will be disclosed below.

[0113] Figure 13 is a diagram for explaining a method of detecting the adhesive related to the modification example, the application position, and the application amount. In the diagram, a first adhesive 81, a second adhesive 82, a third adhesive 83, and a fourth adhesive 84 are shown spaced apart from each other. In the example shown, the planar shapes of these adhesives 81, 82, 83, 84 are circular and of the same size. However, the adhesives 81, 82, 83, 84 can also be elliptical or polygonal or other shapes. The adhesives 81, 82, 83, 84 can be used in the adhesion of the actuator elements 60L, 60R as in the above-described embodiment, or in the adhesion of other electronic products.

[0114] In Figure 13 , a first center line C1 passes through the centers of the first adhesive 81 and the third adhesive 83 and is parallel to the second direction Y. A second center line C2 passes through the centers of the second adhesive 82 and the fourth adhesive 84 and is parallel to the second direction Y. A third center line C3 passes through the centers of the first adhesive 81 and the second adhesive 82 and is parallel to the first direction X. A fourth center line C4 passes through the centers of the third adhesive 83 and the fourth adhesive 84 and is parallel to the first direction X.

[0115] In this modification example, when detecting the application position and the application amount, the heights of the first position P1 of the first adhesive 81, the second position P2 of the second adhesive 82, and the third position P3 of the third adhesive 83 are measured.

[0116] For example, the first position P1, the second position P2, and the third position P3 are designed so as not to overlap the center lines C1, C2, C3, C4, respectively, when the application positions of the adhesives 81, 82, 83, 84 are in the correct positions as designed. Also, the first position P1, the second position P2, and the third position P3 are designed so as to be different from the distance D2 and the distance D1, and different from the distance D4 and the distance D3, as in the above-described embodiment.

[0117] In ​ , the first position P1, the second position P2, and the third position P3 are all outside the region between the first center line C1 and the second center line C2, and outside the region between the third center line C3 and the fourth center line C4. However, these positions P1, P2, P3 can also be in other portions of the adhesives 81, 82, 83. Also, any of the positions P1, P2, P3 can be on the fourth adhesive 84.

[0118] In this modification example, the method of determining whether the application position and the application amount are appropriate using the heights of the first position P1, the second position P2, and the third position P3 is the same as in the above-described embodiment.

[0119] The present application is not limited to the configurations disclosed in these embodiments and modified examples. The present application can be implemented by modifying the configurations disclosed in these embodiments and modified examples into various forms.

[0120] For example, the adhesive that checks the application position and the application amount of the adhesive can bond electronic components other than the actuator element. In addition, the positions where the height is measured in the adhesive are not limited to three, and can be two or four or more. For the inspection of the adhesive, only one of the application position and the application amount of the adhesive can be checked.

Claims

1. An inspection method for inspecting a suspension for a disk drive, the suspension including an electronic component having a first side and a second side arranged in a first direction, a first adhesive arranged along the first side, and a second adhesive arranged along the second side, the inspection method comprising: measuring a first height of a first position of the first adhesive, measuring a second height of a second position of the second adhesive, and determining whether the first adhesive and the second adhesive are properly positioned in the first direction based on the first height and the second height, wherein the first adhesive has a first center in the first direction and a first outer edge in the first direction that is farther from the second adhesive than the first center, the second adhesive has a second center in the first direction and a second outer edge in the first direction that is farther from the first adhesive than the second center, the first position is between the first center and the first outer edge in the first direction when the first adhesive is properly positioned in the first direction, and the second position is between the second center and the second outer edge in the first direction when the second adhesive is properly positioned in the first direction.

2. An inspection method for inspecting a suspension for a disk drive, the suspension including an electronic component having a first side and a second side arranged in a first direction, a first adhesive arranged along the first side, and a second adhesive arranged along the second side, the inspection method comprising: measuring a first height of a first position of the first adhesive, measuring a second height of a second position of the second adhesive, and determining whether the first adhesive and the second adhesive are properly positioned in the first direction based on the first height and the second height, wherein the first adhesive has a first center in the first direction and a first inner edge in the first direction that is closer to the second adhesive than the first center, the second adhesive has a second center in the first direction and a second inner edge in the first direction that is closer to the first adhesive than the second center, the first position is between the first center and the first inner edge in the first direction when the first adhesive is properly positioned in the first direction, and the second position is between the second center and the second inner edge in the first direction when the second adhesive is properly positioned in the first direction. the determining includes determining that the first adhesive and the second adhesive are mispositioned in the first direction when a difference between the first height and the second height is different from a predetermined first reference value.

3. The inspection method according to claim 1 or 2, wherein the first adhesive and the second adhesive are arranged in a manner that the first adhesive and the second adhesive are not in contact with each other in a state where the first adhesive and the second adhesive are properly positioned in the first direction. ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ 3. The detection method according to claim 1 or 2, characterized in that, ​ 4. The detection method according to claim 1 or 2, characterized by, the determination includes, when both the first height and the second height are greater than a predetermined second reference value, determining that the amounts of the first adhesive and the second adhesive applied are greater than appropriate amounts, and when both the first height and the second height are less than the second reference value, determining that the amounts of the first adhesive and the second adhesive applied are less than appropriate amounts.

5. The detection method according to claim 1 or 2, characterized by, the first adhesive and the second adhesive have elongated shapes in a second direction intersecting the first direction, the detection method further includes, measuring a third height of a third position of the first adhesive deviating from the first position in the second direction, based on the first height and the third height, determining whether the application position of the first adhesive in the second direction is correct.

6. The detection method according to claim 1 or 2, wherein the electronic element is an actuator element including a piezoelectric body, the suspension includes a first plate facing at least the second side in the first direction, a second plate overlapping the actuator element and having an opening while overlapping the first plate, the first adhesive contacts the second plate while covering the first side, the second adhesive contacts the second plate while being filled between the second side and the first plate.

7. A manufacturing method, the manufacturing method being a manufacturing method for manufacturing a suspension for a magnetic disk device, the suspension for the magnetic disk device including an electronic element having a first side and a second side juxtaposed in a first direction, a first adhesive disposed along the first side, and a second adhesive disposed along the second side; the manufacturing method including, applying the first adhesive and the second adhesive, measuring a first height of a first position of the first adhesive, measuring a second height of a second position of the second adhesive, based on the first height and the second height, determining whether the application position of the first adhesive and the second adhesive in the first direction is appropriate, wherein the first adhesive has a first center in the first direction and a first outer edge in the first direction farther from the second adhesive than the first center, the second adhesive has a second center in the first direction and a second outer edge in the first direction farther from the first adhesive than the second center, when the application position of the first adhesive in the first direction is correct, the first position is between the first center and the first outer edge in the first direction, when the application position of the second adhesive in the first direction is correct, the second position is between the second center and the second outer edge in the first direction.

8. A manufacturing method, the manufacturing method being a manufacturing method for manufacturing a suspension for a magnetic disk device, the suspension for the magnetic disk device including an electronic element having a first side and a second side juxtaposed in a first direction, a first adhesive disposed along the first side, and a second adhesive disposed along the second side; the manufacturing method including, applying the first adhesive and the second adhesive, measuring a first height of a first position of the first adhesive, measuring a second height of a second position of the second adhesive, based on the first height and the second height, determining whether the application position of the first adhesive and the second adhesive in the first direction is appropriate, wherein the first adhesive has a first center in the first direction and a first outer edge in the first direction farther from the second adhesive than the first center, the second adhesive has a second center in the first direction and a second outer edge in the first direction farther from the first adhesive than the second center, when the application position of the first adhesive in the first direction is correct, the first position is between the first center and the first outer edge in the first direction, when the application position of the second adhesive in the first direction is correct, the second position is between the second center and the second outer edge in the first direction. applying the first adhesive and the second adhesive, measuring a first height of a first position of the first adhesive, measuring a second height of a second position of the second adhesive, determining whether the application position of the first adhesive and the second adhesive in the first direction is appropriate based on the first height and the second height, wherein the first adhesive has a first center in the first direction and a first inner edge in the first direction that is closer to the second adhesive than the first center, the second adhesive has a second center in the first direction and a second inner edge in the first direction that is closer to the first adhesive than the second center, when the application position of the first adhesive in the first direction is correct, the first position is between the first center and the first inner edge in the first direction, when the application position of the second adhesive in the first direction is correct, the second position is between the second center and the second inner edge in the first direction.

9. The production method according to claim 7 or 8, characterized by, The determination includes, when the difference between the first height and the second height is different from a predetermined first reference value, determining that the application position of the first adhesive and the second adhesive in the first direction is deviated from the correct position.

10. A detection system, the detection being a detection system for detecting a suspension for a disk device, the suspension for a disk device including, an electronic element having a first side surface and a second side surface juxtaposed in a first direction, a first adhesive disposed along the first side surface, and a second adhesive disposed along the second side surface; the detection system including, a measuring device for measuring a first height of a first position of the first adhesive and a second height of a second position of the second adhesive, a control device for determining whether the application position of the first adhesive and the second adhesive in the first direction is appropriate based on the first height and the second height, wherein the first adhesive has a first center in the first direction and a first outer edge in the first direction that is farther from the second adhesive than the first center, the second adhesive has a second center in the first direction and a second outer edge in the first direction that is farther from the first adhesive than the second center, when the application position of the first adhesive in the first direction is correct, the first position is between the first center and the first outer edge in the first direction, when the application position of the second adhesive in the first direction is correct, the second position is between the second center and the second outer edge in the first direction.

11. A detection system, the detection being a detection system for detecting a suspension for a disk device, the suspension for a disk device including, an electronic element having a first side surface and a second side surface juxtaposed in a first direction, a first adhesive disposed along the first side surface, and a second adhesive disposed along the second side surface; the detection system including, a measuring device for measuring a first height of a first position of the first adhesive and a second height of a second position of the second adhesive, a control device for determining whether the application positions of the first adhesive and the second adhesive in the first direction are appropriate based on the first height and the second height, wherein the first adhesive has a first center in the first direction and a first inner edge in the first direction that is closer to the second adhesive than the first center, the second adhesive has a second center in the first direction and a second inner edge in the first direction that is closer to the first adhesive than the second center, when the application position of the first adhesive in the first direction is correct, the first position is located between the first center and the first inner edge in the first direction, when the application position of the first adhesive in the first direction is correct, the second position is located between the second center and the second inner edge in the first direction.

12. The detection system according to claim 10 or 11, characterized in that the determination includes, when the difference between the first height and the second height is not the same as a predetermined first reference value, determining that the application positions of the first adhesive and the second adhesive in the first direction are deviated from the correct positions.

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