Solid-state imaging device, imaging apparatus, method for operating imaging apparatus, mobile object apparatus, method for operating mobile object apparatus, and program

Abstract

The present disclosure relates to a solid-state imaging device, an imaging apparatus, a method of operating an imaging apparatus, a moving object apparatus, a method of operating a moving object apparatus, and a program that can achieve high-accuracy image stabilization by improving detection accuracy of a multi-IMU. A detection result is synthesized by a plurality of inertial measurement units (IMUs) and output, an oscillation signal of a driving frequency that serves as a reference for driving the IMUs is output as a reference signal to each of the plurality of IMUs, and thereby the plurality of IMUs are driven by the same oscillation signal of the driving frequency. A multi-IMU composed of the plurality of IMUs driven by the same oscillation signal of the driving frequency is provided integrally with an image sensor, and image stabilization corresponding to movement of the image sensor is performed. The present disclosure is applicable to an imaging apparatus.

Description

Technical Field

[0001] This disclosure relates to solid-state imaging elements, imaging devices, methods for operating imaging devices, moving object devices, methods and procedures for operating moving object devices, and more specifically, to solid-state imaging elements, imaging devices, methods for operating imaging devices, moving object devices, methods and procedures for operating moving object devices that can correct imaging deviations with high accuracy by improving the detection accuracy of multiple IMUs. Background Technology

[0002] A multi-IMU approach has been proposed to improve detection accuracy by integrating the detection results of multiple inertial measurement units (IMUs).

[0003] As a technique for improving the detection accuracy of multiple IMUs, a technique has been proposed that can appropriately combine the observations of multiple IMUs according to conditions related to noise characteristics and the observations of multiple IMUs (see Patent Document 1).

[0004] In addition, techniques have been proposed to correct imaging biases by installing an IMU in an imaging device and using actuators or similar devices to control the movement of an image sensor based on observations (Patent Document 2 and Patent Document 3).

[0005] Therefore, it is possible to consider the application of correcting imaging deviations with high accuracy by installing the multiple IMUs in the imaging device and applying the techniques disclosed in Patent Documents 2 and 3.

[0006] Existing technical documents

[0007] Patent documents

[0008] Patent Document 1: WO2020 / 045099

[0009] Patent Document 2: JP2014-138380A

[0010] Patent Document 3: JP2011-095467A Summary of the Invention

[0011] The technical problem to be solved by the present invention

[0012] Meanwhile, in multi-IMU systems using multiple IMUs, vibration-type IMUs employing microelectromechanical systems (MEMS) (such as the example in Patent Document 1) detect angular velocity based on the Coriolis force generated by rotating the object while adding vibration to it.

[0013] However, because multiple IMUs generate vibrations, the vibrations generated by other IMUs interfere with each IMU and may produce pulsating noise caused by the interference.

[0014] Specifically, due to recent improvements in IMU manufacturing accuracy, manufacturing deviations have been reduced, and the manufacturing of individual IMUs with similar vibration frequencies has increased, thus interference can easily occur, and the effects of beat frequency noise caused by interference can be easily received.

[0015] Therefore, even when multiple IMUs are simply installed in the imaging device, there is still a concern that the deviation of the image cannot be properly suppressed.

[0016] Furthermore, even if the technology disclosed in Patent Documents 2 and 3 can suppress the effects of noise caused by interference between individual IMUs of a multi-IMU, even if only the movement of the main body side of the imaging device is detected and the imaging deviation is corrected by controlling the movement of the image sensor using an actuator or the like based on the detected movement of the main body, there is still a concern that the imaging deviation cannot be completely suppressed.

[0017] In other words, while the movement of the main body of the device can be detected by a multi-IMU that detects the movement of the main body of the device, the vibration of the image sensor supported by the actuator cannot be detected.

[0018] Specifically, when the imaging device is installed in a device driven by a motor, engine, etc., a deviation occurs in the image sensor caused by the tiny high-frequency vibrations of the motor, engine, etc.

[0019] Therefore, it is not possible to simply correct the imaging deviation after the high-frequency vibration actually generated in the image sensor by moving the main body of the detection device and correcting the imaging deviation to reflect the movement detected in the movement of the image sensor.

[0020] In view of this situation, and specifically, this disclosure achieves high accuracy with multiple IMUs by reducing the impact of pulsation noise caused by interference between the individual IMUs in a configuration of multiple IMUs.

[0021] Furthermore, by applying the aforementioned highly accurate multi-IMU to an imaging device, this disclosure is able to detect movement of the image sensor and also correct for imaging deviations that follow movement caused by high-frequency vibrations generated in the image sensor.

[0022] Solution to the problem

[0023] According to a first aspect of this disclosure, a solid-state imaging element is provided, comprising: an image sensor configured to capture an image; and an inertial measurement unit (IMU) integrally disposed with the image sensor and configured to detect the acceleration and angular velocity of the image sensor, wherein the IMU outputs the acceleration and angular velocity of the image sensor to a drive control unit for controlling the drive of the image sensor.

[0024] According to a first aspect of this disclosure, an image is captured by an image sensor, the acceleration and angular velocity of the image sensor are detected by an inertial measurement unit (IMU) integrated with the image sensor, and the acceleration and angular velocity of the image sensor are output to a drive control unit that controls the drive of the image sensor.

[0025] According to a second aspect of this disclosure, an imaging apparatus and a moving object apparatus are provided, comprising: a solid-state imaging element, the solid-state imaging element including: an image sensor configured to capture an image; an inertial measurement unit (IMU) integrally disposed with the image sensor and configured to detect the acceleration and angular velocity of the image sensor; a drive unit configured to control the position and orientation of the image sensor; and a drive control unit configured to control the position and orientation of the image sensor by controlling the drive performed by the drive unit using inertial navigation and intermediate output signals based on the acceleration and angular velocity of the image sensor.

[0026] According to a second aspect of this disclosure, a method for operating an imaging device and a method for operating a moving object device represent a method for operating an imaging device comprising: a solid-state imaging element including an image sensor configured to capture an image, and an inertial measurement unit (IMU) integrally disposed with the image sensor and configured to detect the acceleration and angular velocity of the image sensor; and a drive unit configured to control the position and orientation of the image sensor, the method comprising the step of controlling the position and orientation of the image sensor by using inertial navigation and intermediate output signals based on the acceleration and angular velocity of the image sensor to control a drive performed by the drive unit.

[0027] According to a second aspect of this disclosure, an image sensor captures an image, an inertial measurement unit (IMU) integrated with the image sensor detects the acceleration and angular velocity of the image sensor, controls the position and orientation of the image sensor, and controls the position and orientation of the image sensor by using inertial navigation or intermediate output signals based on the acceleration and angular velocity of the image sensor. Attached Figure Description

[0028] Figure 1 This is a diagram showing multiple IMUs.

[0029] Figure 2 This is a diagram showing the structure of the IMU.

[0030] Figure 3 It is shown in Figure 2 The diagram shows the circuit configuration of the IMU's readout circuit.

[0031] Figure 4 It is shown in Figure 2 The diagram shows the operation of the IMU.

[0032] Figure 5 This is a diagram illustrating the operation of multiple IMUs.

[0033] Figure 6 This is a diagram illustrating the interference generated by multiple IMUs.

[0034] Figure 7 This is a diagram illustrating the interference generated by multiple IMUs.

[0035] Figure 8 This is a diagram illustrating the interference generated by multiple IMUs.

[0036] Figure 9 This is a diagram illustrating a multi-IMU according to a first embodiment of the present disclosure.

[0037] Figure 10 It is shown in Figure 9 The diagram shows an example of a multi-IMU configuration.

[0038] Figure 11 It shows the use Figure 10 The flowchart shown is for the angular velocity detection processing of multiple IMUs.

[0039] Figure 12 This is a diagram illustrating a first variation of a multi-IMU according to a first embodiment of the present disclosure.

[0040] Figure 13 It is shown in Figure 12 The diagram shows an example of a multi-IMU configuration.

[0041] Figure 14 It shows the use Figure 13 The flowchart shown is for the angular velocity detection processing of multiple IMUs.

[0042] Figure 15 This is a diagram illustrating a second variation of a multiple IMU according to the first embodiment of the present disclosure.

[0043] Figure 16 It is shown in Figure 15 The diagram shows an example of a multi-IMU configuration.

[0044] Figure 17 It shows the use in Figure 16 The flowchart shown is for the angular velocity detection processing of multiple IMUs.

[0045] Figure 18 This is a diagram illustrating a third variation of a multi-IMU according to the first embodiment of the present disclosure.

[0046] Figure 19 It is shown in Figure 18The diagram shows an example of a multi-IMU configuration.

[0047] Figure 20 This is a diagram illustrating a fourth variation of a multi-IMU according to the first embodiment of the present disclosure.

[0048] Figure 21 This is a diagram illustrating a fifth variation of a multi-IMU according to the first embodiment of the present disclosure.

[0049] Figure 22 This is a diagram illustrating a sixth variation of a multi-IMU according to the first embodiment of the present disclosure.

[0050] Figure 23 This is a diagram illustrating a configuration example of multiple IMUs according to a seventh variation of the first embodiment of this disclosure.

[0051] Figure 24 This is a diagram illustrating multiple IMUs according to a second embodiment of the present disclosure.

[0052] Figure 25 It shows the point at Figure 24 The diagram shows an example configuration of a clustering measurement device that performs clustering of multiple IMUs.

[0053] Figure 26 It is shown that it is used for Figure 25 The diagram shows an example of IMU connectivity for each cluster of multiple IMUs and a configuration example of the combined angular velocity calculation unit for the combined cluster.

[0054] Figure 27 It is shown that it is used for Figure 25 The diagram shows an example of another connection to each cluster of multiple IMUs.

[0055] Figure 28 This is a flowchart illustrating the clustering process using a clustering measurement device.

[0056] Figure 29 It shows the use in Figure 26 The flowchart shown is for the angular velocity detection processing of multiple IMUs.

[0057] Figure 30 This is a flowchart illustrating a first variation of clustering processing according to a second embodiment of the present disclosure as a multi-IMU.

[0058] Figure 31 This is a flowchart illustrating a second variation of the clustering process according to a second embodiment of the present disclosure as a multi-IMU.

[0059] Figure 32This is a flowchart illustrating a third variation of cluster processing as a second embodiment of multiple IMUs according to the present disclosure.

[0060] Figure 33 This is a diagram illustrating a fourth variation of a multiple IMU according to the second embodiment of the present disclosure.

[0061] Figure 34 It shows the use Figure 33 The flowchart shown is for the angular velocity detection processing of multiple IMUs.

[0062] Figure 35 This is a graph showing the variations of white noise, flicker noise, and random walk noise in the time domain.

[0063] Figure 36 A diagram illustrating the variations of white noise, flicker noise, and random walk noise in the frequency domain;

[0064] Figure 37 This is a graph showing the variation of the Allen variance for each of the white noise, flicker noise, and random walk noise.

[0065] Figure 38 This is a diagram illustrating an example configuration of multiple IMUs according to a third embodiment of the present disclosure.

[0066] Figure 39 It shows the use Figure 38 The flowchart shown is for the angular velocity detection processing of multiple IMUs.

[0067] Figure 40 It shows that for in Figure 38 The diagram shows the effect of the Allan variance on flicker noise acquired by multiple IMUs.

[0068] Figure 41 This is a diagram illustrating a multiple IMU according to a first variation of the third embodiment of the present disclosure.

[0069] Figure 42 This is a diagram showing the configuration of the vibrator, which is a mechanical component of the IMU.

[0070] Figure 43 This is a diagram illustrating the principle of detecting the Coriolis force.

[0071] Figure 44 This is a diagram illustrating an example configuration of an IMU unit of multiple IMUs configured to eliminate vibrations in the X-axis direction according to a fourth embodiment of the present disclosure.

[0072] Figure 45This is a diagram illustrating an example configuration of an IMU unit of multiple IMUs configured to eliminate vibrations in the Y-axis direction according to a fourth embodiment of the present disclosure.

[0073] Figure 46 It is shown that includes having Figure 44 and Figure 45 The diagram shows an example configuration of multiple IMUs in the IMU unit of the drive mechanism.

[0074] Figure 47 It shows the use in Figure 46 The flowchart of signal processing for multiple IMUs is shown in the figure.

[0075] Figure 48 This is a diagram illustrating an example configuration of the IMU block of a multi-IMU according to a first variation of the fourth embodiment of the present disclosure for eliminating vibration in the X-axis direction.

[0076] Figure 49 This is a diagram illustrating an example configuration of the IMU block of a multi-IMU according to a first variation of the fourth embodiment of the present disclosure for eliminating vibration in the Y-axis direction.

[0077] Figure 50 This is a diagram illustrating a configuration example of a second variation of the fourth embodiment of the present disclosure, in which the Coriolis force output from multiple IMU blocks of a multi-IMU is output in a time-division manner.

[0078] Figure 51 It shows the use Figure 50 The flowchart of signal processing for multiple IMUs is shown in the figure.

[0079] Figure 52 This is a diagram illustrating an example configuration of the IMU blocks of a multi-IMU according to a third variation of the fourth embodiment of the present disclosure for eliminating vibration in the Z-axis direction.

[0080] Figure 53 It is shown Figure 52 The diagram shows the variation of the connecting beam in the IMU block.

[0081] Figure 54 It is shown Figure 52 The diagram shows the variation of the connecting beam in the IMU block.

[0082] Figure 55 This is a diagram illustrating an example configuration of the IMU block of a multi-IMU according to a fourth variation of the fourth embodiment of the present disclosure for eliminating vibration in the Z-axis direction.

[0083] Figure 56 It shows the use Figure 55 The flowchart of signal processing for multiple IMUs is shown in the figure.

[0084] Figure 57 This is a diagram illustrating an example configuration of an IMU block formed by 4×4 IMU units of an X-axis direction drive mechanism, according to a fifth variation of the fourth embodiment of the present disclosure.

[0085] Figure 58 This is a diagram illustrating an example configuration of an IMU block formed by 4×4 IMU units of a Y-axis drive mechanism, according to a fifth variation of the fourth embodiment of the present disclosure.

[0086] Figure 59 This is a diagram illustrating an example configuration of an IMU block formed by 4×4 IMU units of a Z-axis drive mechanism, according to a fifth variation of the fourth embodiment of the present disclosure.

[0087] Figure 60 This is a diagram illustrating a configuration example of a multi-IMU including an IMU block, which is formed by 4×4 IMU units, according to a fifth variation of the fourth embodiment of the present disclosure.

[0088] Figure 61 This is a diagram illustrating an example configuration of multiple IMUs, including IMU blocks (each IMU block being formed by n IMU units), applied to image sensor shakiness correction according to a fifth embodiment of the present disclosure.

[0089] Figure 62 This is a diagram illustrating an example configuration of an imaging device that achieves hand shakiness correction by driving optical blocks.

[0090] Figure 63 This is a diagram illustrating an example configuration of an imaging device that achieves hand shakiness correction by driving an image sensor.

[0091] Figure 64 This is a diagram illustrating a detailed configuration example of an imaging device that achieves hand shakiness correction by driving an image sensor.

[0092] Figure 65 This is a diagram showing an outline of an imaging apparatus according to the present disclosure.

[0093] Figure 66 This is a diagram showing an example configuration of an imaging apparatus according to a first variation of the fifth embodiment.

[0094] Figure 67 This is a timing diagram showing the hand shakiness correction process;

[0095] Figure 68 It is shown by Figure 66 The flowchart shows the imaging process performed by the imaging device shown.

[0096] Figure 69 This is a diagram showing the number of IMU units and the accuracy of the calibration.

[0097] Figure 70 This is a diagram illustrating an example configuration of an imaging apparatus according to a second variation of the fifth embodiment.

[0098] Figure 71 This is a diagram showing an example configuration of an imaging apparatus according to a third variation of the fifth embodiment.

[0099] Figure 72 This is a diagram showing an example configuration of a typical personal computer. Detailed Implementation

[0100] Preferred embodiments of the present disclosure will now be described in detail with reference to the accompanying drawings. Furthermore, in this specification and the drawings, components having substantially the same functional configuration will be denoted by the same reference numerals, and therefore their repeated descriptions will be omitted.

[0101] The implementation methods for this technology will now be described. They will be described in the following order.

[0102] 1. Overview of the Invention

[0103] 2. First Implementation Method

[0104] 3. A first variation of the first embodiment

[0105] 4. A second variation of the first embodiment

[0106] 5. A third variation of the first embodiment

[0107] 6. Fourth variation of the first embodiment

[0108] 7. Fifth variation of the first embodiment

[0109] 8. A sixth variation of the first embodiment

[0110] 9. A seventh variation of the first embodiment

[0111] 10. Second Implementation Method

[0112] 11. First variation of the second embodiment

[0113] 12. A second variation of the second embodiment

[0114] 13. A third variation of the second embodiment

[0115] 14. Fourth variation of the second embodiment

[0116] 15. Third Implementation Method

[0117] 16. First variation of the third embodiment

[0118] 17. Fourth Implementation Method

[0119] 18. First variation of the fourth embodiment

[0120] 19. Second variation of the fourth embodiment

[0121] 20. Third variation of the fourth embodiment

[0122] 21. A fourth variation of the fourth embodiment

[0123] 22. Fifth variation of the fourth embodiment

[0124] 23. Fifth Implementation Method

[0125] 24. First variation of the fifth embodiment

[0126] 25. Second variation of the fifth embodiment

[0127] 26. Third variation of the fifth embodiment

[0128] 27. Examples of using software to perform processing

[0129] <<1. Overview of the Invention>>

[0130] <Multi-IMU>

[0131] Specifically, this disclosure achieves high accuracy in multiple inertial measurement units (IMUs) by reducing the impact of beat noise caused by interference between IMUs configured with multiple IMUs.

[0132] First, in describing the overview of this disclosure, multiple IMUs will be described.

[0133] As in Figure 1 As shown on the left, for example, a single IMU 1 is configured to include the following: an accelerometer sensor that detects acceleration as translational movement; and a gyroscope sensor that detects angular velocity in each of the three axes formed by the XYZ axes, where angular velocity is rotational movement, and the single IMU 1 detects both acceleration and angular velocity in each of the three axes.

[0134] While a single IMU can have high accuracy, typically, as accuracy increases, IMUs become larger and more expensive, and thus, to achieve higher accuracy, size and cost increase.

[0135] Therefore, for example, such as Figure 1As shown on the right side, by configuring multiple (e.g., n) low-accuracy and inexpensive IMUs 1, such as IMU 1-1 to 1-n, and using a synthesis device 2 to combine the detection results obtained from IMUs 1-1 to 1-n, the velocity is obtained. By reducing the noise density and bias variation by 1 / √n, the detection accuracy is improved to achieve high accuracy, thus enabling the acquisition by multiple IMUs 10.

[0136] Relative to the device size and device cost obtained in the case of a single IMU 1 with high accuracy shown on the left side in Figure 1 the device size and device cost related to IMUs 1-1 to 1-n with low accuracy and low cost can be sufficiently small and low, and a low-cost implementation can be achieved.

[0137] Hereinafter, in the case where IMUs 1-1 to 1-n do not particularly need to be distinguished from each other, one will be referred to as IMU1, and this similarly applies to other components. In this specification, hereinafter, although IMU 1 is assumed to be an IMU with a small size, low cost, and relatively low precision, IMU 1 can be an IMU with a large size, high cost, and high accuracy.

[0138] <Structure of IMU>

[0139] Next, the structure of IMU 1 will be described with reference to Figure 2

[0140] As shown on the right side in Figure 2 each IMU 1 of the multi-IMU 10 is composed of an oscillator 11 formed of silicon, a base 12 for fixing the oscillator 11, and a reading circuit 13 for reading the vibration of the oscillator 11 and outputting the angular velocity from the top in the drawing, and these IMUs 1 are joined in the order shown on the right side in Figure 2 and integrated into one body using a resin mold as shown on the left side in Figure 2

[0141] <Circuit configuration of the reading circuit>

[0142] Next, the circuit configuration of the reading circuit 13 of IMU 1 will be described with reference to Figure 3

[0143] Referring to Figure 3 the configuration for detecting the angular velocity in the reading circuit of IMU 1 will be described. The configuration for detecting the acceleration in IMU 1 is the configuration obtained by excluding the wave detection circuit from the configuration for detecting the angular velocity, so the more complex configuration for detecting the angular velocity will be specifically described.

[0144] The reading circuit 13 consists of a driving circuit block 31, a sensing circuit block 32, and a digital output circuit block 33.

[0145] The drive circuit block 31 provides an oscillation signal formed from a predetermined drive frequency to the oscillator 11 configured by the microelectromechanical system (MEMS) and the sensing circuit block 32, and vibrates the oscillator 11 based on the oscillation signal.

[0146] The sensing circuit block 32 detects the vibration generated by the Coriolis force acting on the vibrator 11 based on the oscillation signal as an analog signal, and outputs the detected analog signal to the digital output circuit block 33.

[0147] The digital output circuit block 33 converts the vibration generated by the Coriolis force acting on the vibrator 11 from the analog signal into a digital signal based on the vibration provided by the sensing circuit block 32, and outputs the digital signal as angular velocity.

[0148] More specifically, the drive circuit block 31 includes an oscillation circuit 51 and an automatic gain control circuit 52.

[0149] The oscillation circuit 51 is configured by RC, uses the vibration provided by the oscillator 11 as a reference signal to generate an oscillation signal, and outputs the generated oscillation signal to the automatic gain adjustment circuit 52 and the phase shift circuit 72 of the sensing circuit block 32.

[0150] Automatic gain control circuit 52 adjusts the gain of the oscillation signal formed according to the drive frequency provided from oscillation circuit 51 and provides it to oscillator 11, thereby causing oscillator 11 to oscillate.

[0151] The sensing circuit block 32 includes a charge amplification circuit 71, a phase shift circuit 72, a synchronous detection circuit 73, and an LPF 74.

[0152] The charge amplifier circuit 71 detects the vibration of the vibrator 11 as a vibration signal, amplifies the vibration signal, and provides the amplified vibration signal to the phase shift circuit 72.

[0153] The phase shift circuit 72 adjusts the phase of the vibration signal of the vibrator 11 detected by the charge amplifier circuit 71 based on the oscillation signal provided by the oscillation circuit 51, and outputs the adjusted vibration signal to the synchronization detection circuit 73.

[0154] The synchronous detection circuit 73 detects the waveform representing the Coriolis force acting on the oscillator 11, expressed as an envelope, based on the vibration signal of the phase-adjusted oscillator 11, and outputs the detected waveform to the LPF 74.

[0155] The LPF 74 smoothes the waveform representing the Coriolis force acting on the vibrator 11 and outputs the smoothed waveform to the digital output circuit block 33 as information on the angular velocity formed from the analog signal.

[0156] The digital output circuit block 33 includes an AD conversion circuit 91, a decimation filter 92, and a digital output circuit 93.

[0157] The AD conversion circuit 91 converts the angular velocity information formed by the Coriolis force acting on the oscillator 11 formed from the analog signal into a digital signal and outputs the digital signal to the decimation filter 92.

[0158] The decimation filter 92 averages the information on the angular velocity formed from the digital signal and outputs the averaged information to the digital output circuit 93.

[0159] The digital output circuit 93 outputs the averaged information as the angular velocity digitized into a digital signal.

[0160] <Operation of the IMU>

[0161] Next, the operation of the IMU 1 will be described with reference to Figure 4 As shown in the upper left of

[0162] As shown in Figure 4 The oscillator 11 is oscillated by the oscillation circuit 51 and vibrates based on a reference signal formed from an oscillation signal of a drive frequency fb whose gain has been adjusted by the automatic gain control circuit 52.

[0163] At this time, when a Coriolis force is applied to the oscillator 11, by applying amplitude modulation according to the Coriolis force, for example, the amplitude of the waveform output from the charge amplifier circuit 71 is modulated according to the Coriolis force as represented by the waveform fbc for the drive frequency fb.

[0164] The synchronous detection circuit 73 detects the amplitude modulation as the waveform of the analog signal representing the Coriolis force, that is, the angular velocity of the envelope from the waveform fbc, and outputs the detected waveform to the LPF 74.

[0165] In this way, the waveform of the analog signal extracted as the Coriolis force is converted into a digital signal by the digital output circuit block 33 and output as a digitized angular velocity value.

[0166] For example, as shown in Figure 5 As shown, multiple IMUs collect and integrate the above n IMUs 1, and use the composing device 2 to compose the angular velocities detected by the IMU1 - 1 to 1 - n to improve the accuracy and output the angular velocity.

[0167] <Interference generated by multiple IMUs>

[0168] More specifically, the multi-IMU 10 has, for example, Figure 6 The configuration shown.

[0169] In other words, in Figure 6 The multiple IMU 10 shown has a configuration in which IMU 1-1 to IMU 1-4 are arranged on a printed circuit board 110.

[0170] Based on this configuration, Figure 6 The multiple IMUs 10 shown in the figure consist of angular velocities detected by IMUs 1-1 to 1-4 and output with improved detection accuracy.

[0171] Meanwhile, it is known that IMU 1 was manufactured with an approximately 3% deviation in drive frequency due to individual differences in manufacturing.

[0172] Therefore, for example, in the case where IMU 1 is designed to have a drive frequency of 20,000 kHz, such as in Figure 6 As shown in IMU 1-1 to IMU 1-4, a configuration can be formed in which IMU 1-1 is driven at a drive frequency of 20.000 kHz, IMU 1-2 is driven at a drive frequency of 20.010 kHz, IMU 1-3 is driven at a drive frequency of 19.900 kHz, and IMU 1-4 is driven at a drive frequency of 20.020 kHz.

[0173] In this case, the difference between the drive frequencies of IMU 1-1 to IMU 1-4 is small, and therefore interference occurs between the vibrations of vibrator 11.

[0174] More specifically, such as Figure 7 As shown, for example, for a reference signal formed by an oscillation signal of drive frequency fb output by automatic gain control circuit 52 in a predetermined IMU 1, a reference signal of drive frequency fb' (≠fb) of a nearby IMU 1 becomes an external interference (acoustic vibration) and causes interference, amplitude modulation occurs in the reference signal actually provided to vibrator 11, and an amplitude modulation signal fe including pulsation according to frequency difference is provided to vibrator 11.

[0175] Therefore, when the reference signal of the driving frequency fb is provided to the vibrator 11, in Figure 7 When the waveform fc shown is detected as angular velocity, when the reference signal provided to the vibrator 11 is changed to an amplitude modulation signal fe due to external interference, for the waveform fc that was initially detected as angular velocity, the angular velocity is detected as an amplitude modulation signal represented by the thick line in the figure, and therefore an error appears in the angular velocity.

[0176] Similarly, the pulsation is generated as a vibration corresponding to the frequency difference between IMU 1-1 and IMU 1-4.

[0177] In other words, as a pulsation, such as Figure 8 As shown, the pulsation frequency of IMU 1-1 and IMU 1-2 becomes 10Hz (i.e., their driving frequency difference), the pulsation frequency of IMU 1-1 and IMU 1-3 becomes 100Hz (i.e., their driving frequency difference), and the pulsation frequency of IMU 1-1 and IMU 1-3 becomes 20Hz (i.e., their driving frequency difference).

[0178] Furthermore, the pulsation frequency of IMU 1-2 and IMU 1-3 becomes 110Hz as the difference between their driving frequencies, the pulsation frequency of IMU 1-2 and IMU 1-4 becomes 10Hz as the difference between their driving frequencies, and the pulsation frequency of IMU 1-3 and IMU 1-4 becomes 120Hz as the difference between their driving frequencies.

[0179] Accordingly, in IMU 1-1 to IMU 1-4, the error vibrations of the pulsation frequency overlap due to the interference occurring in the mutual reference signals, including the error angular velocity which is detected by IMU 1-1 to IMU 1-4 accordingly, and therefore there is a concern that even by combining these, the appropriate angular velocity cannot be obtained.

[0180] <<2. First Implementation Method>>

[0181] <Based on the operating principle of the multiple IMUs disclosed herein>

[0182] Therefore, in the multi-IMU according to the present disclosure, by setting the oscillation signal of the drive frequency of one of the multiple IMUs constituting the multi-IMU as a reference signal and using the reference signal to drive the other IMUs, all IMUs are driven synchronously with each other using the same drive frequency, thereby suppressing the pulsation caused by interference from mutual vibration.

[0183] In other words, in Figure 9 In the multiple IMUs 200 shown according to this disclosure, IMUs 201-1 to 201-4 are arranged on a printed circuit board 210.

[0184] here, Figure 9 The printed circuit board 210 and IMUs 201-1 to 201-4 shown in the diagram correspond to the multi-IMU 200 respectively. Figure 6 The printed circuit board 110 of IMU 10 and the components of IMUs 1-1 to 1-4 are shown in the diagram. The number of IMUs 201 arranged on the printed circuit board 210 is not limited to the number shown in the diagram. Figure 9The four IMUs 201-1 to 201-4 shown are examples of this, but can be any other number.

[0185] exist Figure 9 In the multiple IMUs 200 shown, the oscillation signal used by IMU 201-1 to IMU 201-4 to drive its own oscillation signal is set as the reference signal fm and supplied to the remaining IMUs 201-2 to IMU 201-4, and IMUs 201-2 to IMU 201-4 are driven based on the reference signal fm provided from IMU 201-1.

[0186] In the following text, the IMU 201 in IMUs 201-1 to 201-4 that provides its oscillation signal to the remaining IMUs 201 as a reference signal fm will also be referred to as the synchronous master, and the IMU 201 driven by the reference signal fm provided by the IMU 201 that is set as the synchronous master will also be referred to as the synchronous slave.

[0187] In other words, in Figure 9 In this case, IMU 201-1 is the synchronization master, and the other IMUs 201-2 to 201-4 are synchronization slaves.

[0188] In this configuration, the drive frequency of the oscillation signal provided from IMU 201-1, which acts as the master synchronizing unit, is set as the reference drive frequency. A reference signal fm, formed by the oscillation signal at the reference operating frequency, is provided from IMU 201-1 to IMUs 201-2 to 201-4, which act as slave synchronizing units. Then, IMUs 201-2 to 201-4, which act as slave synchronizing units, are driven by the oscillation signal at the reference drive frequency, which serves as the reference signal fm.

[0189] Therefore, in Figure 9 In this case, the oscillation signal of the drive frequency (=20.000kHz) of IMU 201-1, which is the synchronization master device, is set as the oscillation signal of the reference drive frequency. The reference signal fm formed by the oscillation signal of the reference drive frequency is provided to IMUs 201-2 to 201-4, which are the synchronization slave devices, and all IMUs 201-1 to 201-4 use the same reference signal fm to drive.

[0190] exist Figure 9 In the multiple IMUs 200 shown, the reference signal fm output from IMU 201-1 is provided to IMU 201-2 and IMU 201-3, and the reference signal fm provided from IMU 201-1 is provided to IMU 201-4 through IMU 201-2 and IMU 201-3.

[0191] The IMU 201 used as the synchronization master can be any one of IMUs 201-1 to 201-4. The reference signal fm can be supplied directly from the IMU 201 acting as the synchronization master to the IMU 201 acting as the synchronization slave, or it can be supplied by the IMU 201 acting as another synchronization slave.

[0192] Accordingly, IMUs 201-1 to 201-4 are synchronized and driven at the same drive frequency, and thus the generation of pulsations caused by mutual interference can be suppressed, and thus the occurrence of errors in the angular velocities detected by IMUs 201-1 to 201-4 can be suppressed, thereby enabling each IMU to detect angular velocity with high accuracy.

[0193] Furthermore, each of the IMUs 201-1 to 201-4 is capable of acquiring angular velocity with high accuracy, and therefore, by combining angular velocities, it is possible to perform angular velocity measurements with high accuracy using multiple IMUs 200.

[0194] <Configuration example of multiple IMUs according to this disclosure>

[0195] Next, we will refer to Figure 10 This document describes a configuration example of multiple IMUs according to this disclosure.

[0196] exist Figure 10 The configuration example of the multiple IMU 200 shown in the figure illustrates the configuration. Figure 9 The external configuration of IMU 201-1, which serves as the synchronization master, and IMU 201-2, which serves as the synchronization slave, and the circuit configuration of the read circuit are shown in the diagram of the multiple IMUs 200, IMUs 201-1 to 201-4.

[0197] Furthermore, the basic configuration of each of IMU 201-3 and IMU 201-4, which are other IMU 201 used as synchronization slave devices, is similar to the basic configuration of IMU 201-2 used as a synchronization slave device, and therefore their description will be omitted appropriately.

[0198] IMUs 201-1 and 201-2 are both arranged on the same printed circuit board 210, and each IMU detects angular velocity and outputs the detected angular velocity to the synthesis unit 202. The synthesis unit 202 synthesizes the angular velocities detected by IMUs 201-1 to 201-4 and outputs the synthesized angular velocity information as the detection result.

[0199] The IMU 201-1 consists of an oscillator 211-1 formed by MEMS, a substrate 212-1 that fixes the oscillator 211-1, and a reading circuit 213-1 that reads the vibration of the oscillator 211-1 and outputs the angular velocity from the top in the figure.

[0200] The basic functions of vibrator 211-1 and Figure 3 The vibrator 11 shown in the figure has the same basic function, so its description will be omitted.

[0201] In addition, the IMU 201-2 consists of an oscillator 211-2 formed by MEMS, a substrate 212-2 that fixes the oscillator 211-2, and a reading circuit 213-2 that reads the vibration of the oscillator 211-2 and outputs the angular velocity from the top in the figure.

[0202] The reading circuit 213-1 consists of a driving circuit block 231-1, a sensing circuit block 232-1, and a digital output circuit block 233-1.

[0203] The drive circuit block 231-1, the sensing circuit block 232-1, and the digital output circuit block 233-1 are respectively corresponding to Figure 3 The components shown are the drive circuit block 31, the sensing circuit block 32, and the digital output circuit block 33.

[0204] The drive circuit block 231-1 includes an oscillation circuit 251-1 and an automatic gain adjustment circuit 252-1.

[0205] The basic functions of the oscillation circuit 251-1 and the automatic gain adjustment circuit 252-1 are respectively... Figure 3 The oscillation circuit 51 and the automatic gain control circuit 52 shown are the same, so their descriptions are omitted.

[0206] Here, IMU 201-1 is used as a synchronization master, and therefore the oscillation signal output from oscillation circuit 251-1 is output through automatic gain control circuit 252-1 to oscillation circuits 251-2 to 251-4, which are used as synchronization slaves, as a reference signal fm.

[0207] The sensing circuit block 232-1 includes a charge amplification circuit 271-1, a phase shift circuit 272-1, a synchronous detection circuit 273-1, and an LPF 274-1.

[0208] The basic functions of the charge amplifier circuit 271-1, phase shift circuit 272-1, synchronous detection circuit 273-1, and LPF 274-1 are respectively related to... Figure 3 The basic functions of the charge amplifier circuit 71, phase shift circuit 72, synchronous detection circuit 73, and LPF 74 are the same, and their descriptions will be omitted.

[0209] The digital output circuit block 233-1 includes an AD conversion circuit 291-1, a decimation filter 292-1, and a digital output circuit 293-1.

[0210] The basic functions of the AD conversion circuit 291-1, the decimation filter 292-1, and the digital output circuit 293-1 are respectively related to... Figure 3 The basic functions of the AD conversion circuit 91, decimation filter 92, and digital output circuit 93 shown are the same, so their descriptions will be omitted as appropriate.

[0211] The reading circuit 213-2 consists of a driving circuit block 231-2, a sensing circuit block 232-2, and a digital output circuit block 233-2.

[0212] The drive circuit block 231-2, the sensing circuit block 232-2, and the digital output circuit block 233-2 are respectively corresponding to Figure 3 The components shown are the drive circuit block 31, the sensing circuit block 32, and the digital output circuit block 33.

[0213] The drive circuit block 231-2 includes an oscillation circuit 251-2 and an automatic gain adjustment circuit 252-2.

[0214] The basic configurations of the oscillation circuit 251-2 and the automatic gain adjustment circuit 252-2 are respectively as follows: Figure 3 The oscillation circuit 51 and the automatic gain control circuit 52 shown are the same, so their description is omitted.

[0215] Here, since IMU 201-2 is used as a synchronization slave, oscillation circuit 251-2 receives the reference signal fm provided by IMU 201-1, which is used as a synchronization master, and performs a pull-in operation, thereby driving IMU 201-2 synchronously with the reference drive frequency (phase-locked loop (PLL)) of the drive frequency of the reference signal fm. Accordingly, IMU 201-2, which is used as a synchronization slave, is synchronized with IMU 201-1, which is used as a synchronization master, and is driven using an oscillation signal with the same reference drive frequency.

[0216] The sensing circuit block 232-2 includes a charge amplification circuit 271-2, a phase shift circuit 272-2, a synchronous detection circuit 273-2, and an LPF 274-2.

[0217] The basic functions of charge amplifier circuit 271-2, phase shift circuit 272-2, synchronous detection circuit 273-2, and LPF 274-2 are respectively related to... Figure 3 The basic functions of the charge amplifier circuit 71, phase shift circuit 72, synchronous detection circuit 73, and LPF 74 are the same, and their descriptions will be omitted.

[0218] The digital output circuit block 233-2 includes an AD conversion circuit 291-2, a decimation filter 292-2, and a digital output circuit 293-2.

[0219] The basic functions of the AD conversion circuit 291-2, the decimation filter 292-2, and the digital output circuit 293-2 are respectively related to... Figure 3 The basic functions of the AD conversion circuit 91, decimation filter 92, and digital output circuit 93 shown are the same, so their descriptions will be omitted as appropriate.

[0220] According to the configuration described above, the oscillation circuit 251-1 of the IMU 201-1, which serves as the synchronization master, provides a reference signal fm formed by the oscillation signal of the reference drive frequency to the IMUs 201-2 to 201-4, which serve as synchronization slaves.

[0221] The oscillation circuits 251-2 to 251-4 used as synchronization slave devices have a drive frequency locked by a PLL according to a reference signal fm formed by an oscillation signal of a reference drive frequency. This configures all IMUs 201-1 to 201-4 of the multiple IMUs 200 to be synchronized with each other and can be driven using an oscillation signal formed by the same drive frequency. As a result, the generation of pulsations caused by the difference between the drive frequencies of the multiple IMUs 201 is suppressed, and angular velocity can be detected with high accuracy.

[0222] <Use in Figure 10 The angular velocity detection processing of multiple IMUs is shown in the figure.

[0223] Next, we will refer to Figure 11 The flowchart shown in the diagram uses Figure 10 The image shows the angular velocity detection processing of the multi-IMU 200.

[0224] In step S11, the oscillation circuit 251-1 of the IMU 201-1, which serves as the master synchronizing device, sends an oscillation signal with its driving frequency as the reference driving frequency as the reference signal fm to the IMUs 201-2 to 201-4, which serve as slave synchronizing devices.

[0225] In step S12, based on the reference signal fm, the oscillation signal of the driving frequency of the oscillation circuit 251-1 is used to PLL lock the oscillation circuits 251-2 to 251-4 of all IMUs 201-2 to 201-4.

[0226] According to the above process, since all IMUs 201-1 to 201-4 are driven simultaneously in sync with the reference signal fm, the generation of pulsation is suppressed and the error caused by pulsation is reduced, thereby enabling each of IMUs 201-1 to 201-4 to measure angular velocity with high accuracy.

[0227] In step S13, all IMUs 201-1 to 201-4 detect angular velocities and output the detected angular velocities to the synthesis unit 202.

[0228] In step S14, the synthesis unit 202 synthesizes the angular velocities provided from IMUs 201-1 to 201-4 and outputs the angular velocity as a composition result of the detection results using multiple IMUs 200.

[0229] According to the above process, based on the reference signal fm formed by the oscillation signal with the same driving frequency, all IMUs 201-1 to 201-4 configured with multiple IMUs 200 can be driven synchronously with each other, and thus the occurrence of errors caused by pulsation can be suppressed, thereby enabling the detection of angular velocity with high accuracy.

[0230] <<3. First Variation of the First Embodiment>>

[0231] The following example has been described above: By setting one of the multiple IMUs 201-1 to 201-4 configured as synchronous masters and the other IMUs 201 as synchronous slaves, setting the drive frequency of the synchronous masters as the reference drive frequency, and forming a configuration in which a reference signal fm formed by an oscillation signal of the reference drive frequency is supplied from the IMU 201 used as the synchronous master, all IMUs 201-1 to 201-4 are driven using the same drive frequency, and the generation of errors is suppressed, thereby enabling the detection of angular velocity with high accuracy.

[0232] However, when any one of the IMUs configured with multiple IMUs 200 is randomly set as the synchronous master, the frequency is not pulled in the oscillation circuit 251 if the reference drive frequency is very different from the drive frequency of the synchronous slave, and there is a possibility that PLL locking cannot be applied.

[0233] In this way, if the IMU 201 used as a synchronization slave cannot pull in the drive frequency of the reference signal fm and cannot apply PLL locking, the IMU 201 used as a synchronization slave cannot perform operation to synchronize with the drive frequency of the IMU 201 used as a synchronization master.

[0234] Therefore, by measuring the drive frequencies of multiple IMUs 201-1 to 201-4 configured with multiple IMUs 200, setting the IMU 201 with a drive frequency close to the median as the synchronous master, and setting the other IMUs 201 as synchronous slaves, the accuracy of pulling in the reference drive frequency as the reference signal fm can be improved.

[0235] Figure 12An example configuration of multiple IMUs 200 is shown, wherein the drive frequencies of multiple IMUs 201-1 to 201-4 configured with IMUs 200 are measured, the IMU 201 with the drive frequency close to the median is set as the synchronous master, and the other IMUs 201 are set as synchronous slaves.

[0236] exist Figure 12 Among the components of the multi-IMU 200 shown, the same reference numerals are assigned to those having the same characteristics as those in the diagram. Figure 9 The components shown are those with the same function as the components of the multi-IMU 200, and their descriptions will be omitted.

[0237] exist Figure 12 The multiple IMUs shown in the diagram are different from those in the 200. Figure 9 The component shown in the diagram for the multiple IMU 200 is the newly configured switching circuit 301.

[0238] like Figure 13 As shown, the switching circuit 301 detects the configuration. Figure 12 The drive frequencies of the oscillation circuits 251-1 to 251-4 of the multiple IMUs 200 shown are used to set the IMU 201 with the median drive frequency as the synchronous master and the other IMUs 201 as the synchronous slave.

[0239] Then, the switching circuit 301 provides the oscillation signal with the drive frequency provided by the oscillation circuit 251 of the IMU 201 set as the synchronous master device to the oscillation circuit 251 of the IMU 201 set as the synchronous slave device, as a reference signal fm for the oscillation signal as the reference drive frequency.

[0240] Accordingly, the IMU 201, which is set as a synchronous slave device, is PLL locked based on a reference signal fm formed by an oscillation signal having the same drive frequency as the IMU 201 set as a synchronous master device, and all IMUs 201-1 to 201-4 configured with multiple IMUs 200 can detect angular velocity synchronously with the oscillation signal having the same drive frequency.

[0241] As a result, errors related to the detection of angular velocity caused by pulsations resulting from interference between IMUs 201 can be suppressed, and angular velocity can be detected with higher accuracy using multiple IMUs 201.

[0242] Figure 12This illustrates an example where IMU 201-1, one of the IMUs 201-1 to 201-4 configured with multiple IMUs 200, has a drive frequency close to the median of the drive frequencies of IMUs 201-1 to 201-4, and is therefore set as the synchronous master, while IMUs 201-2 to 201-4 are set as synchronous slaves. Therefore, in Figure 12 In the diagram, arrows are used to schematically illustrate the case where the switching circuit 301 acquires the oscillation signal of IMU 201-1 (i.e., the synchronizing master) as a reference signal fm and provides the reference signal to IMUs 201-2 to 201-4, which are set as synchronizing slaves.

[0243] exist Figure 13 The diagram shows how to configure... Figure 12 The circuit configuration shown is that of the read circuits 213-1 to 213-4 and the switching circuit 301 of the multiple IMUs 200.

[0244] Figure 13 The configurations of each of the IMUs 201-1 to 201-4 shown are basically similar. Figure 10 The configuration shown in the diagram, and IMUs 201-1 to 201-4 are identified using a symbol followed by "-".

[0245] In other words, such as Figure 13 As shown, the outputs of oscillation circuits 251-1 to 251-4 and the input of the reference signal to the oscillation circuit are connected to the switching circuit 301.

[0246] The switching circuit 301 obtains the drive frequency by monitoring the oscillation signals output from the oscillation circuits 251-1 to 251-4, sets the IMU 201, including the oscillation circuit 251 with the median value, as the synchronous master, and sets the other IMUs 201 as synchronous slaves.

[0247] Then, the switching circuit 301 provides the oscillation signal output from the oscillation circuit 251 of the IMU 201, which is set as the synchronous master, as a reference signal fm to the IMU 201, which is set as the synchronous slave.

[0248] The oscillation circuit 251 of the IMU 201 configured as a synchronous slave is locked by a PLL at the drive frequency of the provided reference signal fm, and is therefore driven at the same drive frequency as the oscillation circuit 251 of the IMU 201 configured as a synchronous master. Accordingly, the IMU configured as a synchronous master and the IMU 201 configured as a synchronous slave are driven at the same drive frequency.

[0249] <Use in Figure 13The angular velocity detection processing of multiple IMUs is shown in the figure.

[0250] Next, we will refer to Figure 14 The flowchart shown uses Figure 13 The angular velocity detection processing of the multi-IMU 200 is shown.

[0251] In step S31, the switching circuit 301 drives all oscillation circuits 251-1 to 251-4 of IMUs 201-1 to 201-4 and detects the driving frequency of the oscillation signal.

[0252] In step S32, the switching circuit 301 identifies IMU 201 whose driving frequency is close to the median among the driving frequencies of the oscillation signals of all the oscillation circuits 251-1 to 251-4 of the IMUs 201-1 to 201-4 that have been detected.

[0253] In step S33, the switching circuit 301 sets the IMU 201 with a drive frequency close to the median value as the synchronous master device and sets the other IMUs 201 as synchronous slave devices.

[0254] In step S34, the switching circuit 301 extracts the oscillation signal of the oscillation circuit 251 of the IMU 201, which is set as the master device, as a reference signal fm through the connected switching, and provides the reference signal to the oscillation circuit 251 of the IMU 201, which is set as the slave device.

[0255] In step S35, based on the reference signal fm, the PLL locks the oscillation circuits 251-1 to 251-4 of all IMUs 201-1 to 201-4 in the oscillation signal of the drive frequency of the oscillation circuit 251 of the IMU 201, which serves as the synchronization master device.

[0256] According to the above process, all IMUs 201-1 to 201-4 are driven simultaneously in sync with the reference signal fm, thus suppressing the generation of pulsations and reducing errors, thereby enabling the measurement of angular velocity with high accuracy.

[0257] In step S36, all IMUs 201-1 to 201-4 detect angular velocities and output the detected angular velocities to the synthesis unit 202.

[0258] In step S37, the synthesis unit 202 synthesizes the angular velocities provided from IMUs 201-1 to 201-4 and outputs the synthesized angular velocity as the result of the detection using multiple IMUs 200.

[0259] According to the above process, since all IMUs 201-1 to 201-4 configured with multiple IMUs 200 can be driven synchronously with each other based on a reference signal fm formed by an oscillation signal with the same driving frequency, the occurrence of errors caused by pulsation can be suppressed, and angular velocity can be detected with high accuracy.

[0260] Furthermore, because the drive frequency of the IMU 201 set as the master synchronizing device is set to the median of all IMUs 201, the difference between it and the drive frequency of the reference signal fm provided to the IMU 201 set as the slave synchronizing device becomes minimal, and thus it is easy to pull in the reference drive frequency, and it is possible to prevent the state from being synchronized without applying PLL lock.

[0261] <<4. Second Variation of the First Embodiment>>

[0262] The example described above demonstrates how measuring the drive frequencies of multiple IMUs 201-1 to 201-4 configured with multiple IMUs 200, setting the IMU 201 with a drive frequency close to the median as the synchronous master, and setting the other IMUs 201 as synchronous slaves improves the accuracy of the pull-in of the reference drive frequency as the reference signal fm.

[0263] However, the drive frequencies of the multiple IMUs 201-1 to 201-4 configured with multiple IMUs 200 can be the same, and therefore the component that generates the reference signal fm and provides the reference signal to IMUs 201-1 to 201-4 can be provided separately from IMUs 201-1 to 201-4.

[0264] Figure 15 An example configuration of multiple IMUs 200 is shown, wherein a reference generation unit for generating a reference signal fm is set in IMU 200, and the reference signal fm is provided to IMUs 201-1 to 201-4.

[0265] exist Figure 15 Among the components of the multi-IMU 200 shown, the same reference numerals are assigned to those having the same characteristics as those in the diagram. Figure 9 The components shown are those with the same function as the components of the multi-IMU 200, and their descriptions will be omitted.

[0266] exist Figure 15 The multiple IMUs shown in the diagram are different from those in the 200. Figure 9 The components of the multi-IMU 200 shown are the newly provided reference generation unit 321.

[0267] Reference generation unit 321 generates an oscillation signal, the drive frequency of which (which is the design value when manufacturing IMU 201) is set as the reference drive frequency of the reference signal fm, and the reference signal is supplied to IMUs 201-1 to 201-4.

[0268] More in detail, such as Figure 16 As shown, the reference generation unit 321 is connected to the configuration Figure 15 The multiple IMUs 200 shown have oscillation circuits 251-1 to 251-4 for IMUs 201-1 to 201-4, and the generated reference signal fm is supplied to the oscillation circuits 251-1 to 251-4 for IMUs 201-1 to 201-4.

[0269] Accordingly, based on the reference signal fm supplied from the reference generation unit 321, IMUs 201-1 to 201-4 are locked by the PLL, and all sIMUs 201-1 to 201-4 configured with multiple IMUs 200 can detect angular velocity synchronously with the reference signal fm.

[0270] As a result, errors related to the detection of angular velocity caused by pulsations resulting from interference between IMUs 201 can be suppressed, and angular velocity can be detected with higher accuracy using multiple IMUs 201.

[0271] exist Figure 15 In this configuration, the reference generation unit 321 is primarily used as a synchronization master and the IMUs 201-1 to 201-4 are configured as synchronization slaves, and arrows are used to schematically show that the reference generation unit 321 provides a reference signal fm to all IMUs 201-1 to 201-4.

[0272] Figure 16 Showing configuration Figure 15 The circuit configuration shown is that of the read circuits 213-1 to 213-4 of the multiple IMUs 200 (IMUs 201-1 to 201-4) and the reference generation unit 321.

[0273] The configurations of each of IMUs 201-1 through 201-4 are basically similar. Figure 10 The configuration shown in the diagram, and IMU201-1 to 201-4 are identified using symbols followed by "-".

[0274] <Use Figure 16 The multi-IMU angular velocity detection processing shown

[0275] Next, we will refer to Figure 17 The flowchart shown uses Figure 16 The angular velocity detection processing of the multi-IMU 200 is shown.

[0276] In step S51, the reference generation unit 321 sets itself as the synchronization master and sets all IMUs 201-1 to 201-4 as synchronization slaves.

[0277] In step S52, the reference generation unit 321 provides the reference signal fm to the oscillation circuits 251-1 to 251-4 of the IMUs 201-1 to 201-4, which are set to synchronize with the devices.

[0278] In step S53, based on the reference signal fm, the oscillation circuits 251-1 to 251-4 of all IMUs 201-1 to 201-4 have a drive frequency of oscillation circuits 251-1 to 251-4 to be locked by the PLL at the drive frequency of the reference signal fm.

[0279] In step S54, all IMUs 201-1 to 201-4 detect angular velocities and output the detected angular velocities to the synthesis unit 202.

[0280] In step S55, the synthesis unit 202 synthesizes the angular velocities provided from IMUs 201-1 to 201-4 and outputs the angular velocities as a synthesis result as the detection result acquired by the multiple IMUs 200.

[0281] According to the above process, based on the reference signal fm formed by the oscillation signal with the same driving frequency, all IMUs 201-1 to 201-4 configured with multiple IMUs 200 can be driven synchronously with each other, and thus the occurrence of errors caused by pulsation can be suppressed, and angular velocity can be detected with high accuracy.

[0282] <<5. Third variation of the first embodiment>>

[0283] As described above, although an example of configuring multiple IMUs 200, IMUs 201-1 to 201-4, is configured on a printed circuit board 210, it can be configured such that the oscillators 211-1 to 211-4 of IMUs 201-1 to 201-4 are formed on a substrate 212 formed of common silicon, one IMU 201 of IMUs 201-1 to 201-4 is set as a synchronization master, and the other IMUs 204 are set as synchronization slaves.

[0284] Figure 18 An example is shown where the oscillators 211-1 to 211-4 of IMUs 201-1 to 201-4 are formed on a substrate 212 formed of common silicon, with IMU 201-1 configured as a synchronization master and IMUs 201-2 to 201-4 configured as synchronization slaves.

[0285] More in detail, such as Figure 19 As shown, the oscillation signal of the drive frequency generated by the oscillation circuit 251-1 of the IMU 201-1, which is set as a synchronous master device, is provided as a reference signal fm to the oscillation circuit 251-2 of the IMU 201-2, which is set as a synchronous slave device.

[0286] Accordingly, the oscillation circuit 251-2 of the IMU 201-2, which is configured as a synchronous slave device, is pulled into the driving frequency of the reference signal fm, and is thus driven synchronously with the driving frequency of the oscillation circuit 251-1 of the IMU 201-1, which is configured as a synchronous master device.

[0287] By also providing a reference signal fm to IMUs 201-3 and 201-4, which are configured as synchronous slave devices, the oscillation circuits 251-3 and 251-4 of IMUs 201-3 and 201-4 are also driven synchronously with the drive frequency of the oscillation circuit 251-1 of IMU 201-1, which is configured as a synchronous master device.

[0288] As a result, all IMUs 201-1 to 201-4 are driven synchronously with the reference signal fm, thus suppressing the occurrence of errors caused by the occurrence of pulsation and enabling the detection of angular velocities with high accuracy. Furthermore, the vibrators 211-1 to 211-4 are formed on the same base 212, thereby enabling a reduction in the size and cost of the device structure.

[0289] Used in Figure 18 The angular velocity detection processing and reference of the multi-IMU 200 shown in the figure are in Figure 11 The processes described in the flowcharts shown are similar, so their descriptions will be omitted.

[0290] <<6. Fourth Variation of the First Embodiment>>

[0291] As described above, although it has been described above that the oscillators 211-1 to 211-4 of IMUs 201-1 to 201-4 are formed on a substrate 212 formed of common silicon, with one of them set as a synchronous master and the others as synchronous slaves, the switching circuit 301 described above can be disposed on the substrate.

[0292] In other words, in Figure 12 In the multi-IMU 200 shown, although an example has been described in which the switching circuit 301 is disposed on the printed circuit board 210 on which IMUs 201-1 to 201-4 are formed, a switching circuit having the same function can be formed on the substrate 212 on which vibrators 211-1 to 211-4 are formed.

[0293] Figure 20As an example of the configuration of multiple IMU 200, the switching circuit 301', which is a component having the same function as the switching circuit 301, is formed on a substrate 212 on which vibrators 211-1 to 211-4 are formed.

[0294] Similarly, in this configuration, similar to Figure 12 The multi-IMU 200 shown can detect angular velocity with high accuracy, and by forming vibrators 211-1 to 211-4 and switching circuit 301' on the same base 212, the size of the device can be reduced and the cost can be lowered.

[0295] <<7. Fifth Variation of the First Embodiment>>

[0296] The example described above shows that the oscillators 211-1 to 211-4 of IMUs 201-1 to 201-4 are formed on a substrate 212 formed of common silicon, and the switching circuit 301' is further disposed on the substrate 212.

[0297] However, as in Figure 15 The multiple IMUs 200 shown can be configured to form a reference generation unit with similar functionality to the reference generation unit 321 to replace the switching circuit 301.

[0298] In other words, in Figure 20 In the multi-IMU 200 shown, although an example has been described where the switching circuit 301' is disposed on a printed circuit board 210 on which IMUs 201-1 to 201-4 are formed, instead of the switching circuit 301', a circuit with the same characteristics as the switching circuit 301' can be formed on a substrate 212 on which vibrators 211-1 to 211-4 are formed. Figure 15 The reference generation unit 321 shown is a reference generation unit with the same function.

[0299] Figure 21 An example configuration of the multiple IMU 200 is shown, wherein a reference generation unit 321′, which has the same function as the reference generation unit 321, is formed on a base 212, and vibrators 211-1 to 211-4 are formed on the base 212.

[0300] Similarly, in this configuration, with Figure 15 Similar to the multi-IMU 200 shown, it can detect angular velocity with high accuracy, and by forming the vibrators 211-1 to 211-4 and the reference generation unit 321 on the same base 212, the size and cost of the device structure can be reduced.

[0301] <<8. Sixth Variation of the First Embodiment>>

[0302] The above describes an example of suppressing the occurrence of pulsations and thus improving the accuracy of the detected angular velocity by synchronizing the drive frequencies of the oscillation circuits 251-1 to 251-4 of the IMUs 201-1 to 201-4 configured with multiple IMUs 200.

[0303] However, even when the drive frequencies can be synchronized with each other, there is noise that cannot be eliminated due to asynchrony caused by external interference from a particular object.

[0304] Therefore, even when the drive frequencies of the oscillation circuits 251-1 to 251-4 of IMUs 201-1 to 201-4 are synchronized with each other, noise that cannot be eliminated due to synchronization deviation or the like can be eliminated by forming the vibrators 211-1 to 211-4 of IMUs 201-1 to 201-4 on physically independent bases and inserting a sound insulator into the common contact portion where the vibrators are respectively set.

[0305] Figure 22 An example configuration of a multi-IMU 200 is shown, in which the vibrators 211-1 to 211-4 of IMUs 201-1 to 201-4 are each formed as independent bases, and sound insulators are inserted in contact positions that contact the common part of the bases, thus mechanically reducing the level of acoustic interference.

[0306] exist Figure 22 In the multi-IMU 200 shown, the same reference numerals are assigned to... Figure 18 The multiple IMU200 shown have components with the same function, and their descriptions will be omitted as appropriate.

[0307] In other words, in Figure 22 Among the multiple IMUs 200 shown, with Figure 18 The difference in the multi-IMU 200 shown is that vibrators 211-1 to 211-4 are respectively disposed on substrate 212'-1 and substrates 212'-2-1 to 212'-2-4 in place of substrate 212, and sound insulators 351-1 to 351-4 are provided.

[0308] exist Figure 22 In the multi-IMU 200 shown, vibrators 211-1 to 211-4 are formed on substrates 212'-2-1 to 212'-2-4 formed of physically independent silicon, respectively.

[0309] Furthermore, physically independent substrates 212'-2-1 to 212'-2-4 are formed on a common substrate 212-1 using sound insulators 351-1 to 351-4 interposed therebetween.

[0310] The sound insulators 351-1 to 351-4 are vibration-absorbing components, formed on the common substrate 212-2 of the vibrators 211-1 to 211-4, and respectively supporting substrates 212'-2-1 to 212'-2-4.

[0311] According to this configuration, the sound insulators 351-1 to 351-4 absorb the vibrations generated in the vibrators 211-1 to 211-4 and the base 212, thereby isolating the vibrations of each vibrator 211-1 to 211-4 and thus suppressing the mutual transmission of vibrations.

[0312] Therefore, even when the drive frequencies of IMUs 201-1 to 201-4 are synchronized with each other, noise caused by external interference can be reduced, and thus, angular velocity can be detected with higher accuracy.

[0313] <<9. Seventh Variation of the First Embodiment>>

[0314] As described above, an example has been described in which the vibrations 211-1 to 211-4 of IMUs 201-1 to 201-4 are formed on separate bases, and a sound insulator is inserted at the contact position of the common part of the bases that are in contact, noise that cannot be eliminated even when the drive frequencies of IMUs 201-1 to 201-4 are synchronized with each other is eliminated.

[0315] However, noise that cannot be eliminated even when the drive frequencies of IMUs 201-1 to 201-4 are synchronized with each other can be eliminated by directly detecting the pulsation and generating an inverse signal for the detected pulsation.

[0316] Figure 23 This is a configuration example of IMU 201, in which a pulsation is eliminated by detecting a pulsation in the oscillation signal output from oscillation circuit 251 and generating an inverse signal of the detected pulsation.

[0317] In other words, in Figure 23 In the IMU 201 shown, with Figure 10 The different configuration of the IMU 201 shown is the arrangement of pulsation detection circuit 371 and synthesis unit 372.

[0318] The pulsation detection circuit 371 detects the pulsation signal fg based on the oscillation signal output from the oscillation circuit 251, generates the inverted signal fg-1 of the pulsation signal, and provides the generated inverted signal to the synthesis unit 372.

[0319] The synthesis unit 372 combines the signal output from the phase shift circuit 272 with the inverted signal fg-1 of the beat signal, removes the beat component from the signal output from the phase shift circuit 272, and outputs it to the synchronization detection circuit 273.

[0320] Accordingly, even when the driving frequencies of the IMUs 201-1 to 201-4 are synchronized with each other, the generated noise can be reduced. As a result, the angular velocity can be detected with higher accuracy.

[0321] <<10. Second Embodiment>>

[0322] As described above, an example has been described in which the generation of pulsation is suppressed by synchronizing the driving frequencies of the IMUs 201-1 to 201-4 and the angular velocity can be detected with high accuracy.

[0323] However, when the driving frequency of the IMU 201 is significantly different from the driving frequency of the synchronization slave device, there is a possibility that pulling-in is not performed in the oscillation circuit 251 and PLL locking cannot be applied.

[0324] Thus, the detection accuracy of the angular velocity can be improved by measuring the driving frequencies of multiple IMUs 201, forming a cluster of IMUs 201 whose driving frequencies can be synchronized with each other as described above, detecting the angular velocity of the driving frequency to be synchronized in units of the cluster, acquiring the angular velocity acquired in units of the cluster in a time-division manner, and synthesizing the angular velocity.

[0325] In other words, as Figure 24 shown, a case will be considered where the driving frequency of the oscillation signal driving the IMUs 201-1 and 201-3 is 20.000 kHz, and the driving frequency of the oscillation signal driving the IMUs 201-2 and 201-4 is 20.100 kHz. [[ID=I1]]In this case, based on the driving frequencies of the oscillation signals driving the IMUs 201-1 to 201-4, the driving frequencies of the IMUs 201-1 and 201-3 are the same. Therefore, as

[0326] shown, the IMUs 201-1 and 201-3 are formed into a cluster 411-1, and the driving frequencies of the IMUs 201-2 and 201-4 are the same. Therefore, clustering is performed such that the IMUs 201-2 and 201-4 are formed into another cluster 411-2. Figure 24 shown, the IMUs 201-1 and 201-3 are formed into a cluster 411-1, and the driving frequencies of the IMUs 201-2 and 201-4 are the same. Therefore, clustering is performed such that the IMUs 201-2 and 201-4 are formed into another cluster 411-2.

[0327] In Figure 24 ?[[ID=?]] Figure 24 In the multi-IMU 200 shown, by setting the synchronization master device and the synchronization slave device in units of the clusters 411-1 and 411-2, the driving frequencies of the IMUs 201 are synchronized in units of the cluster, and the angular velocity is detected.

[0328] Then, the angular velocity detected in units of the cluster is acquired in a time-division manner and calculated to be synthesized, whereby the angular velocity can be detected with higher accuracy.

[0329] <Clustering of IMUs>

[0330] Next, we will refer to Figure 25 Describes the clustering of multiple IMU 201s arranged in multiple IMU 200s.

[0331] The clustering of multiple IMU 201 units within the Multi-IMU 200 is part of the manufacturing process of the Multi-IMU 200.

[0332] More specifically, through Figure 25 The clustering measurement device 451 and the connecting part 452 shown in the figure perform clustering.

[0333] The clustering measurement device 451 is used in the manufacturing process of the multiple IMUs 200 and is configured separately from the multiple IMUs 200. The clustering measurement device 451 measures the drive frequency output from the oscillation circuit 251 of the multiple IMUs 201 arranged in the multiple IMUs 200. IMUs 201 with similar measured drive frequencies and capable of being driven at the same drive frequency are configured into the same cluster, and information indicating which cluster each IMU 201 belongs to is output to the connection unit 452.

[0334] More specifically, the clustering measurement device 451 includes a reference frequency generation unit 461, a frequency measurement unit 462, and a clustering calculation unit 463.

[0335] The reference frequency generation unit 461 generates a reference frequency for the measurement of the drive frequencies of the multiple IMUs 201 and outputs the reference frequency to the frequency measurement unit 462.

[0336] The frequency measurement unit 462 measures the driving frequency (monitoring oscillation monitoring output) of the oscillation signal output from the oscillation circuit 251 of each IMU 201 based on the reference frequency supplied from the reference frequency generation unit 461, and outputs the measured driving frequency to the clustering calculation unit 463.

[0337] The clustering calculation unit 463 clusters IMUs 201 with similar drive frequencies into the same cluster based on the drive frequency of the oscillation signal output from the oscillation circuit 251 of each IMU 201, and outputs information indicating which cluster each IMU 201 belongs to to the connection unit 452.

[0338] Based on information provided by the clustering measurement device 451 indicating which cluster each IMU 201 belongs to, the connection unit 452 sets one IMU 201 belonging to the same cluster as a synchronization master and sets the other IMUs 201 as synchronization slaves. The connection is configured such that the output of the automatic gain adjustment circuit 252 of the IMU 201 set as the synchronization master is connected to the oscillation circuit 251 of the IMU 201 set as the synchronization slave.

[0339] <Synthesis of angular velocities detected for each cluster>

[0340] Next, we will refer to Figure 26 Describe the composition of the angular velocity for cluster detection of the IMU 201 for clustering.

[0341] The angular velocities detected by the clustered IMUs 201 are synthesized by using the synthesis computing unit 471 to synthesize the angular velocities detected in a time-division manner on a cluster basis.

[0342] Although the composite computing unit 471 is configured to be separate from the multiple IMU 200, the composite computing unit 471 can be configured to be integrated with the multiple IMU 200.

[0343] The synthesis computing unit 471 includes a resampler 481, an interference cancellation unit 482, and a synthesis unit 483.

[0344] The resampler 481 uses, for example, arbitrary resampling techniques (such as zero-order hold, first-order interpolation, etc.) to align the sampling frequencies of the data that have been clustered by the clustering measurement device 451 for each cluster, and outputs the aligned sampling frequencies to the interference cancellation unit 482.

[0345] In other words, since the cluster of IMU 201 is set based on the drive frequency, the angular velocities detected on a cluster-by-cluster basis have different sampling frequencies. Therefore, the resampler 481 is aligned with the sampling frequency of the angular velocities supplied on a cluster-by-cluster basis.

[0346] Interference cancellation unit 482 uses filtering to eliminate interference components between clusters, and outputs the result to synthesis unit 483. Furthermore, when the drive frequencies of the clusters are separate, no interference occurs, so the processing of interference cancellation unit 482 can be omitted.

[0347] Synthesis unit 483 synthesizes the angular velocity, which is the detected value from IMU 201, and outputs the angular velocity as a single detected value. Synthesis unit 483 combines the detected values ​​into a single value, which is a simple average, a weighted average, or a dynamically weighted average corresponding to the noise state, of the angular velocities detected by IMU 201.

[0348] Alternatively, a synthesis unit can be configured in a cluster-based manner in the stage preceding the resampler 481, and the resampler 481 and the interference cancellation unit 482 can be processed in a cluster-based manner with a detection value as the angular velocity.

[0349] <Example of a connection>

[0350] Next, an example of cluster-based IMU 201 connections performed by the connection unit 452 will be described. For example, as Figure 24 As shown, we will consider the case where IMUs 201-1 and 201-3 are set up as cluster 411-1 and IMUs 201-2 and 201-4 are set up as cluster 411-2.

[0351] In this case, the connection unit 452 sets one of the IMUs 201 within each cluster as the synchronization master and sets the other IMUs 201 as synchronization slaves. As a method for selecting a specific IMU 201 as the synchronization master, an IMU whose synchronization frequency is the median value within the cluster can be selected.

[0352] exist Figure 25 In the example shown, in cluster 411-1, IMU 201-1 is set as the synchronization master and IMU 201-3 is set as the synchronization slave.

[0353] Accordingly, Figure 26 As shown by the dashed line, the connection part 452 is connected to the output of the automatic gain control circuit 252-1 of IMU 201-1, and the oscillation circuit 251-3 of IMU 201-3 is also connected.

[0354] In addition, Figure 26 In cluster 411-2, IMU 201-2 is configured as the synchronization master and IMU 201-4 is configured as the synchronization slave.

[0355] Accordingly, Figure 26 As shown by the dashed line, the connection part 452 connects the output of the automatic gain control circuit 252-2 of IMU 201-2 and the oscillation circuit 251-4 of IMU 201-4.

[0356] In addition, such as Figure 24 As shown, clusters can be formed to create clusters other than cluster 411-1 formed by IMUs 201-1 and 201-3 and cluster 411-2 formed by IMUs 201-2 and 201-4.

[0357] For example, clustering can be performed to form cluster 411-11 formed by IMU 201-2 and cluster 411-12 formed by IMU 201-1, 201-3 and 201-4.

[0358] In this clustering configuration, IMUs 201-1 to 201-4 are connected via connector 452, as follows: Figure 27 As shown.

[0359] In other words, in Figure 27In cluster 411-11, only IMU 201-2 is configured as a single principal, and therefore no new connections are made.

[0360] Furthermore, in cluster 411-12, when IMU 201-1 is configured as the synchronization master and IMUs 201-3 and 201-4 are configured as synchronization slaves, such as Figure 27 As shown by the dotted line, the output of the automatic gain control circuit 252-1 of IMU 201-1 is connected to the oscillation circuits 251-3 and 251-4 of IMU 201-3 and 201-4.

[0361] While the example of two clusters has been described above, the number of clusters can be two or more. Furthermore, the number of IMU 201s belonging to each cluster can be any number.

[0362] Clustering Processing

[0363] Next, we will refer to Figure 28 The flowchart shown describes the clustering process performed by the clustering measurement device 451.

[0364] In step S101, the frequency measurement unit 462 measures the driving frequency of all IMUs 201 based on the reference frequency provided by the reference frequency generation unit 461, and outputs the measurement results to the clustering calculation unit 463.

[0365] In step S102, the clustering calculation unit 463 selects the IMU 201 with the lowest driving frequency.

[0366] In step S103, the clustering calculation unit 463 sets IMUs within a threshold frequency that is higher than the driving frequency of the selected IMU 201 by a predetermined width B as the same cluster.

[0367] In step S104, it is determined whether there are any unprocessed IMU 201 that have not yet been clustered.

[0368] In step S104, if there are unprocessed IMUs 201 that have not yet been clustered, the processing proceeds to step S105.

[0369] In step S105, the clustering calculation unit 463 selects unprocessed IMUs 201 with frequencies higher than the threshold frequency, and the processing returns to step S102.

[0370] In other words, before all IMUs 201 are clustered, the process of clustering un-clustered IMUs 201 with frequencies up to a predetermined width B above the lowest drive frequency into the same cluster is repeated. In other words, IMUs 201 with drive frequencies set to have a bandwidth of a predetermined width B from the lowest drive frequency are clustered into the same category.

[0371] Then, in step S105, if it is determined that there is no unprocessed IMU 201, the processing proceeds to step S106.

[0372] In step S106, the clustering calculation unit 463 outputs information indicating which cluster of the connection unit 452 a particular IMU 201 belongs to. Accordingly, the connection unit 452 connects the IMU 201 on a cluster-by-cluster basis.

[0373] Based on the above processing, multiple IMUs 201 are clustered according to their driving frequency, and IMUs 201 are connected for each cluster.

[0374] Although the example described above illustrates how the process of setting IMU 201 to a threshold frequency that is a predetermined width B higher than the lowest drive frequency in an unprocessed IMU 201 is repeated in the same cluster, the process of setting IMU 201 in an unprocessed IMU 201 to a threshold frequency that is a predetermined width B lower than the highest drive frequency can be configured to be repeated.

[0375] Furthermore, although an example of connecting the IMU 201 to each cluster via the connection section 452 has been described above, for example, by using in Figure 12 The switching circuit 301 shown in the figure allows the wiring to be switched to a state that connects to each cluster.

[0376] <Use in Figure 26 or Figure 27 Angular velocity detection processing of the multi-IMU and synthetic computing unit shown >

[0377] Next, we will refer to Figure 29 The flowchart shown uses Figure 26 or Figure 27 The angular velocity detection and processing of the multi-IMU 200 and the synthetic computing unit 471 shown.

[0378] In step S191, all IMUs 201 use oscillation signals at the drive frequency for each cluster to measure angular velocity and provide the measured angular velocity to the synthetic computing unit 471.

[0379] In step S192, the resampler 481 acquires the angular velocity supplied from each IMU 201 in a time-division manner on a cluster basis, aligns the sampling frequency on a cluster basis, and outputs the sampling frequency to the interference cancellation unit 482.

[0380] In step S193, the interference cancellation unit 482 eliminates the influence of interference from the angular velocity information provided by the resampler 481 and outputs the obtained angular velocity to the synthesis unit 483.

[0381] In step S194, the synthesis unit 483 synthesizes angular velocity information in units of clusters supplied from the interference cancellation unit 482, and outputs the synthesized result as a detection value.

[0382] According to the above process, the sampling frequencies of the angular velocities provided to each cluster by the IMU 201 with synchronized drive frequencies can be aligned, and the interference of the angular velocities is eliminated. Therefore, even when multiple IMUs 201 with different drive frequencies are used as a whole, the angular velocity can be detected with high accuracy.

[0383] <<11. First Variation of the Second Embodiment>>

[0384]

[0385] Although an example has been described of the process of clustering unprocessed IMU 201 IMUs up to a threshold frequency that is a predetermined width B higher than the lowest drive frequency into the same cluster, this process is repeated in the clustering process, but the effect of clustering is reduced when the number of clusters is too large.

[0386] Therefore, when the number of clusters is greater than the specified value N, the predetermined width B is increased, and clustering is performed again. Clustering can be performed using the number of clusters up to the specified value N.

[0387] Therefore, refer to Figure 30 The flowchart shown describes cluster processing, in which when the number of clusters exceeds a specified value N, a predetermined value is increased, and clustering is performed again to reduce the number of clusters.

[0388] exist Figure 30 The processing of steps S121 to S125 and S128 in the flowchart shown is the same as that in... Figure 28 The processes of steps S101 to S106 shown are similar, therefore, they will not be described.

[0389] In other words, after clustering all IMUs 201 in steps S121 to S125, in step S126, the clustering calculation unit 463 determines whether the current number of clusters is greater than a specified value N.

[0390] In step S126, if the number of clusters is greater than the specified value N, the process proceeds to step S127.

[0391] In step S127, the clustering calculation unit 463 resets the clustering, increases the predetermined width B by a predetermined value, and returns the process to step S122.

[0392] In other words, in step S127, the processing of steps S122 to S127 is repeated until the number of clusters becomes less than the specified value N, and the clustering is retried.

[0393] Then, in step S127, if it is determined that the number of clusters is less than the specified value N, the process proceeds to step S128.

[0394] Based on the above processing, multiple IMU 201s are clustered into clusters of less than a specified value N, and IMU 201s are connected to each cluster based on the drive frequency.

[0395] As a result, clustering can be performed within a specified value N.

[0396] <<12. Second Variation of the Second Embodiment>>

[0397]

[0398] An example has been described above in which, when the number of clusters is greater than a specified value N, a predetermined width B, which is the width of the frequency of each cluster, is increased, and clustering is performed again until the number of clusters in the clustering process becomes less than the specified value N.

[0399] However, if the predetermined width B changes, it can be assumed that the IMU 201 includes a drive frequency that deviates significantly from the designed drive frequency.

[0400] Therefore, when the predetermined width B changes, the measured drive frequency of IMU 201 deviates greatly from the designed drive frequency. The drive frequency can be adjusted by fine-tuning the vibrator 211 through laser retry or other means.

[0401] Therefore, reference Figure 31 The flowchart shown describes the clustering process, in which clustering is performed again when the predetermined width B increases, and the number of clusters is reduced. The drive frequency of the vibrator 211 of IMU 201 deviates significantly from the designed drive frequency.

[0402] Figure 31 The processing of steps S141 to S147 and S150 in the flowchart shown is... Figure 28 The processes of steps S101 to S106 shown are similar, so their descriptions will be omitted.

[0403] In other words, after clustering all IMUs 201 in steps S141 to S147, in step S148, the clustering calculation unit 463 determines whether the predetermined width B has been changed to be larger.

[0404] In step S148, if the predetermined width B is changed to a larger value, the process proceeds to step S149.

[0405] In step S149, for IMU201 whose measured drive frequency deviates from the designed drive frequency by more than a predetermined value, the vibrator 211 is adjusted by laser trimming or the like to make the drive frequency suitable for the designed drive frequency, and the process proceeds to step S150.

[0406] According to the above process, multiple IMUs 201 are clustered into a number of clusters less than a specified value N based on the drive frequency. For each cluster, IMUs 201 are connected, and the oscillator 211 of the IMU 201 whose measured drive frequency deviates from the designed drive frequency by a predetermined value is adjusted, and thus the drive frequency can be adjusted.

[0407] <<13. Third variation of the second embodiment>>

[0408]

[0409] As described above, IMU 201 clusters can be implemented using clustering techniques such as K-means clustering.

[0410] Therefore, reference Figure 32 The flowchart shown illustrates the clustering process using K-means clustering.

[0411] In step S171, the frequency measurement unit 462 measures the driving frequency of all IMUs 201 based on the reference frequency provided by the reference frequency generation unit 461, and outputs the measurement result to the clustering calculation unit 463.

[0412] In step S172, the clustering calculation unit 463 uses K-means clustering to classify IMUs whose drive frequencies are close to each other into N clusters based on the drive frequencies of all IMUs 201.

[0413] In step S173, the clustering calculation unit 463 outputs information indicating which cluster of the connection unit 452 a particular IMU 201 belongs to. Accordingly, the connection unit 452 connects the IMU 201 on a cluster-by-cluster basis.

[0414] Based on the above processing, multiple IMUs 201 are clustered according to their driving frequency, and IMUs 201 are connected for each cluster.

[0415] <<14. Fourth variation of the second embodiment>>

[0416] In the description presented above, examples of the drive circuit block 231, sensing circuit block 232, and digital output circuit block 233 being arranged in the read circuit 213 of each IMU 201 have been described.

[0417] However, the sensing circuit block 232 and the digital output circuit block 233 can be shared by the IMU 201, which is classified into the same cluster.

[0418] Figure 33 This illustrates a configuration example of multiple IMUs 200 in which sensing circuit block 232 and digital output circuit block 233 are shared by IMUs 201 classified as the same cluster.

[0419] In other words, Figure 33 The multi-IMU 200 shown includes IMUs 201'-1 to 201'-4, read circuits 213'-1 and 213'-2, and a synthesis computing unit 471'. The synthesis computing unit 471' can be located outside the multi-IMU 200.

[0420] exist Figure 33 Of the multiple IMUs 200 shown, IMUs 201'-1 and 201'-2 are classified into the first cluster, and IMUs 201'-3 and 201'-4 are classified into the second cluster.

[0421] In the first cluster, IMU 201'-1 is configured as the synchronization master, and IMU 201'-2 is configured as the synchronization slave. Therefore, the output of the automatic gain control circuit 242-1 of IMU 201'-1 is provided to the oscillation circuit 251-2 as a reference signal fm through the phase shift circuit 501-2 of IMU 201'-2.

[0422] Furthermore, within the second cluster, IMU 201'-3 is configured as a synchronization master, and IMU 201'-4 is configured as a synchronization slave. Therefore, the output of the automatic gain control circuit 242-3 of IMU 201'-3 is provided to the oscillation circuit 251-4 as a reference signal fm through the phase shift circuit 501-4 of IMU 201'-4.

[0423] According to this configuration, IMUs 201'-1 and 201'-2 share the read circuit 213'-1 in a time-division manner, and IMUs 201'-3 and 201'-4 share the read circuit 213'-4 in a time-division manner.

[0424] In other words, the reading circuit 213'-1 reads the angular velocity provided by IMU 201'-1 in the first stage and reads the angular velocity provided by IMU 201'-2 in the second stage, and provides the read angular velocity to the synthesis calculation unit 471'.

[0425] In addition, the reading circuit 213'-2 reads the angular velocity provided by IMU 201'-3 in the first stage and reads the angular velocity provided by IMU 201'-4 in the second stage, and provides the read angular velocity to the synthesis calculation unit 471'.

[0426] The synthesis computing unit 471' temporarily stores the angular velocities of IMUs 201'-1 and 201'-3 provided by timing in the first stage, and obtains the angular velocities of IMUs 201'-2 and 201'-4 provided by timing in the second stage, as well as the delayed angular velocities of IMUs 201'-1 and 201'-3. First, it synthesizes the angular velocities within the cluster. Then, it resamples the angular velocities for each cluster and synthesizes the interference-free angular velocities.

[0427] More in detail, with Figure 10 The configurations of IMU 201 in the multi-IMU 200 shown are different. Among all IMUs 201'-1 to 201'-4, only vibrators 211-1 to 211-4 and drive circuit blocks 231'-1 to 231'-4 corresponding to drive circuit block 231 set in read circuit 213 are provided.

[0428] The drive circuit blocks 231'-1 to 231'-4 have a configuration that is basically similar to that of the drive circuit blocks 231-1 to 231-4, and new phase shift circuits 501-1 to 501-4 are included.

[0429] In addition, the oscillation circuit 251-1 of IMU 201'-1 outputs an oscillation signal to the automatic gain control circuit 252-1, and also outputs an oscillation signal to the terminal 511a-1 of the switch 511-1 of the readout circuit 213'-1 as an oscillation monitoring output.

[0430] The vibrator 211-1 of IMU 201'-1 outputs the vibration signal as a reference signal to the oscillation circuit 251-1 through the phase shift circuit 501-1, and outputs the vibration signal to the terminal 512a-1 of the switch 512-1 of the readout circuit 213'-1.

[0431] In addition, besides outputting to the automatic gain control circuit 252-2, the oscillation circuit 251-2 of IMU 201'-2 also outputs an oscillation signal to terminal 511b-1 of the switch 511-1 of the readout circuit 213'-1 as an oscillation monitoring output.

[0432] The oscillator 211-2 of IMU 201'-2 outputs the vibration signal to terminal 512b-1 of switch 512-1 of readout circuit 213'-1.

[0433] In addition, besides outputting to the automatic gain control circuit 252-3, the oscillation circuit 251-3 of IMU 201'-3 also outputs an oscillation signal to terminal 511a-2 of switch 511-2 of readout circuit 213'-2 as an oscillation monitoring output.

[0434] The vibrator 211-3 of IMU 201'-3 outputs the vibration signal as a reference signal to the oscillation circuit 251-3 through the phase shift circuit 501-3, and outputs the vibration signal to the terminal 512a-2 of the switch 512-2 of the readout circuit 213'-2.

[0435] In addition to the automatic gain control circuit 252-4, the oscillation circuit 251-4 of IMU 201'-4 also outputs an oscillation signal to terminal 511b-2 of switch 511-2 of readout circuit 213'-2 as an oscillation monitoring output.

[0436] The oscillator 211-4 of IMU 201'-4 outputs the vibration signal to terminal 512b-2 of switch 512-2 of readout circuit 213'-2.

[0437] The read circuit 213'-1 has a corresponding Figure 10 The readout circuit 213 shown is configured to include only the sensing circuit block 232-1 and the digital output circuit block 233-1 (excluding the drive circuit block 231), and includes a newly configured switch 511-1.

[0438] Similarly, the read circuit 213'-2 has a corresponding Figure 10 The readout circuit 213 shown is configured to include only the sensing circuit block 232-2 and the digital output circuit block 233-2 (excluding the drive circuit block 231), and includes a newly configured switch 511-2.

[0439] In this configuration, the read circuit 213'-1 is shared by IMUs 201'-1 and 201'-2 in time-division processing. Therefore, based on the operation of phase shift circuits 501-1 and 501-2 and switches 511-1 and 512-1, the operation of reading the oscillation signal from IMU 201'-1 in the first stage and the operation of reading the oscillation signal from IMU 201'-2 in the second stage are repeated.

[0440] In other words, according to phase shift circuits 501-1 and 501-2, the oscillation signal is output from IMU 201'-1 to read circuit 213'-1 in the first phase, and the oscillation signal is output from IMU 201'-2 to read circuit 213'-1 in the second phase.

[0441] Accordingly, in the first stage, switch 511-1 is connected to terminal 511a-1, and switch 512-1 is connected to terminal 512a-1. According to this operation, in the first stage, the oscillation signal of IMU 201'-1 is read by read circuit 213'-1 and output as an angular velocity formed by a digital signal to synthesis computing unit 471'.

[0442] Furthermore, in the second stage, switch 511-1 is connected to terminal 511b-1, and switch 512-1 is connected to terminal 512b-1. According to this operation, in the second stage, the oscillation signal of IMU 201'-2 is read by read circuit 213'-1 and output as an angular velocity formed by a digital signal to synthesis computing unit 471'.

[0443] Similarly, the read circuit 213'-2 is shared by IMUs 201'-3 and 201'-4 in time-division processing. Therefore, based on the operation of phase shift circuits 501-3 and 501-4 and switches 511-2 and 512-2, the operation of reading the oscillation signal from IMU 201'-3 in the first stage and the operation of reading the oscillation signal from IMU 201'-4 in the second stage are repeated.

[0444] In other words, according to phase shift circuits 501-3 and 501-4, the oscillation signal is output from IMU 201'-3 to read circuit 213'-2 in the first phase, and the oscillation signal is output from IMU 201'-4 to read circuit 213'-2 in the second phase.

[0445] Accordingly, in the first stage, switch 511-2 is connected to terminal 511a-2, and switch 512-2 is connected to terminal 512a-2. According to this operation, in the first stage, the oscillation signal of IMU 201'-3 is read by read circuit 213'-2 and output as an angular velocity formed by a digital signal to synthesis computing unit 471'.

[0446] Furthermore, in the second stage, switch 511-2 is connected to terminal 511b-2, and switch 512-2 is connected to terminal 512b-2. According to this operation, in the second stage, the oscillation signal of IMU 201'-4 is read by readout circuit 213'-2 and output as an angular velocity formed by a digital signal to synthesis computing unit 471'.

[0447] In addition to the resampler 481, interference cancellation unit 482, and synthesis unit 483, the synthesis computing unit 471' also includes the clusters within the delay adjustment units 531-1, 531-2, and synthesis units 532-1, 532-2.

[0448] When the first phase angular velocity is provided from the read circuits 213'-1 and 213'-2, the delay adjustment units 531-1 and 531-2 temporarily store the angular velocity and delay the angular velocity until the second phase angular velocity is provided, and output the angular velocity to the cluster internal synthesis units 532-1 and 532-2 at the moment the second phase angular velocity is provided.

[0449] The cluster synthesis unit 532-1 synthesizes the angular velocity based on the oscillation signals detected by the IMUs 201'-1 and 201'-2 constituting the first cluster, and outputs the obtained angular velocity to the resampler 481.

[0450] The cluster synthesis unit 532-2 synthesizes the angular velocity based on the oscillation signals detected by the IMUs 201'-3 and 201'-4 constituting the second cluster, and outputs the obtained angular velocity to the resampler 481.

[0451] With this configuration, since the sensing circuit block 232 and digital output circuit block 233 of the configuration read circuit 213' can be shared in a cluster, circuit components can be omitted and costs can be reduced.

[0452] <Use Figure 33 The angular velocity measurement and processing of the multi-IMU and synthetic computing unit shown in the figure >

[0453] Next, we will refer to Figure 34 The flowchart shown uses Figure 33 The angular velocity measurement processing of the multi-IMU 200 and the synthetic computing unit 471' shown.

[0454] In step S211, the angular velocity is measured using the IMU 201' of the first phase within the same cluster.

[0455] In other words, in Figure 33 In the first cluster, switches 511-1 and 511-2 are connected to terminals 511a-1 and 512a-1 respectively, and phase shift circuits 501-1 and 501-2 are adjusted, thereby supplying the oscillation signal of IMU 201'-1 to the phase shift circuit 272-1 of the read circuit 213'.

[0456] In addition, at this time, the oscillation signal of the oscillator 211-1 of IMU 201'-1 is supplied to the charge amplifier circuit 271-1.

[0457] According to this process, in the readout circuit 213', the angular velocity detected by IMU 201'-1 is measured and output to the synthesis calculation unit 471'.

[0458] In step S212, the delay adjustment unit 531 of the synthesis calculation unit 471' temporarily stores the angular velocity of the supplied first phase and delays it until the angular velocity of the second phase is supplied.

[0459] In step S213, the angular velocity of IMU 201' using the second phase within the same cluster is measured.

[0460] In other words, in Figure 33 In the first cluster, switches 511-1 and 511-2 are connected to terminals 511b-1 and 512b-1 respectively, and phase shift circuits 501-1 and 501-2 are adjusted, thereby supplying the oscillation signal of IMU 201'-2 to the phase shift circuit 272-1 of the read circuit 213'.

[0461] In addition, at this time, the oscillation signal of the oscillator 211-2 of IMU 201'-2 is supplied to the charge amplifier circuit 271-1.

[0462] According to this process, in the readout circuit 213'-1, the angular velocity detected by IMU 201'-2 is measured and output to the synthesis calculation unit 471'.

[0463] In step S214, the cluster internal synthesis unit 532 obtains the angular velocity of the first layer and the angular velocity of the second phase provided by the delay adjustment unit 531, synthesizes the angular velocity within the cluster, and outputs the obtained angular velocity to the resampler 481.

[0464] In step S215, the resampler 481 acquires angular velocities in clusters, aligns the sampling frequencies in clusters, and outputs the angular velocities to the interference cancellation unit 482.

[0465] In step S216, the interference cancellation unit 482 eliminates the influence of interference on the angular velocity information provided by the resampler 481 and outputs the obtained angular velocity information to the synthesis unit 483.

[0466] In step S217, the synthesis unit 483 synthesizes the angular velocity information supplied by the interference cancellation unit 482 in clusters and outputs the synthesized result as a detection value.

[0467] According to the above process, the sampling frequencies of angular velocities provided by IMU 201s with drive frequencies that can be synchronized with each other from each cluster can be aligned, and synthesis can be performed while eliminating interference. Therefore, angular velocities can be detected with high accuracy when using multiple IMUs 201s with different drive frequencies.

[0468] Furthermore, since the read circuit 213' is shared for each cluster, integrating the read circuit 213' into the multi-IMU 200 device configuration can reduce the size of the device configuration and lower manufacturing costs.

[0469] <<15. Third Implementation Method>>

[0470] In the description given above, examples have been described in which noise such as pulsation is eliminated by measuring angular velocity, wherein the drive frequencies of multiple IMUs 201 and 201' are synchronized to be the same, or by clustering the IMUs according to their drive frequencies and synthesizing the measured angular velocities as clusters.

[0471] However, other noises need to be considered. For example, there is white noise, flicker noise, random walk noise, etc.

[0472] Figure 35 Examples of waveforms for time series of white noise, flicker noise, and random walk noise are shown.

[0473] exist Figure 35 In the figure, the waveforms Wwt, Wft, and Wrt represent the effects of white noise, flicker noise, and random walk noise on the angular velocities measured in the time series starting from the top of the figure.

[0474] like Figure 36 As shown, although white noise is constant throughout the frequency band, flicker noise and random walk noise are represented as having large low-frequency components.

[0475] exist Figure 36 In the diagram, the vertical axis represents intensity, the horizontal axis represents frequency, the waveform Wwf is the waveform of white noise, the waveform Wff is the waveform of flicker noise, and the waveform Wrf is the waveform of random walk noise.

[0476] like Figure 37 As shown, based on the Allan variance, flicker noise becomes a limit as a stable bias point, and it is shown that even when using noise filters, there is no waveform below the lower limit of the variance of flicker noise.

[0477] Figure 37 The figure shows the Allen variance, with the horizontal axis representing the width of the time window and the vertical axis representing the variance. Figure 37In the diagram, waveform Wa represents the Allan variance of the IMU 201, waveform Wwa represents the Allan variance of white noise, waveform Wfa represents the Allan variance of flicker noise, and waveform Wra represents the Allan variance of random walk noise. Figure 37 In the waveform shown, as the waveform moves further towards the area in the lower left, indicated by the thick arrow, it represents an improvement in noise.

[0478] In other words, by suppressing flicker noise, the bottom of the noise level in the Allen variance can be further reduced.

[0479] Therefore, a configuration can be formed to eliminate flicker noise included in the angular velocity detected by IMU 201'.

[0480] <Configuration example of multiple IMUs capable of eliminating flicker noise>

[0481] Figure 38 This is a configuration example of a multi-IMU 200 capable of eliminating flicker noise.

[0482] In addition, Figure 38 The diagram shows the configuration of the read circuit 213” and the composite computing unit 471” shared by IMU 201'-1 and IMU 201'-2, which are classified as the same cluster of multiple IMUs 200.

[0483] exist Figure 38 In the multiple IMU 200 shown, the same reference numerals are assigned to... Figure 33 The multiple IMU200 shown here have components with the same function, and their descriptions will be omitted.

[0484] In other words, in Figure 38 In the configuration shown, with Figure 33 The difference in the configuration shown is that a read circuit 213” and a synthesis calculation unit 471” are used instead of a read circuit 213' and a synthesis calculation unit 471'.

[0485] The difference between read circuit 213” and read circuit 213’ is that the differential inversion unit 551 is arranged in the stage before terminal 512b.

[0486] The differential inversion unit 551 inverts the second phase oscillation signal provided by IMU 201'-2 and outputs the inverted oscillation signal to terminal 512b.

[0487] Furthermore, the difference between the composite computing unit 471” and the composite computing unit 471’ is that the cluster internal composite unit 532’ is configured instead of the cluster internal composite unit 532, and the inversion unit 571 is configured in the previous stage.

[0488] The reversal unit 571 reverses the polarity of the angular velocity of the second phase and outputs the reversed angular velocity to the cluster internal synthesis unit 532.

[0489] Based on the configuration described above, the angular velocity is calculated for the oscillation signal of the second layer output from IMU 201'-2 when the oscillation signal of the first layer output from IMU 201'-1 is converted into an inverse phase shift state.

[0490] Therefore, for example, for an angular velocity x obtained in the first stage, the angular velocity obtained in the second stage is an angular velocity -x.

[0491] When flicker noise is added as n in the reading circuit 213, the angular velocity of the first phase is obtained as x+n, and the angular velocity of the second phase is obtained as -x+n.

[0492] The angular velocity x+n of the first phase is delayed by the delay adjustment unit 531 and provided to the internal synthesis unit 532' of the cluster. The angular velocity -x+n of the second phase is reversed by the polarity inversion unit 571 and provided to the internal synthesis unit 532' of the cluster as the angular velocity xn.

[0493] Therefore, the synthesis unit 532' inside the cluster adds the angular velocity x+n of the first phase and the angular velocity xn obtained by reversing the angular velocity of the second phase, and the sum is composed into an average value, thereby eliminating the flicker noise component n.

[0494] <Use in Figure 38 Angular velocity detection processing of the multi-IMU and synthetic computing unit shown >

[0495] Next, we will refer to Figure 39 The flowchart shown in the diagram uses Figure 38 The angular velocity detection processing is shown in the diagram with multiple IMUs 200 and a synthetic computing unit 471.

[0496] In step S231, the angular velocity is measured by the IMU 201' of the first phase within the same cluster.

[0497] In step S232, the delay adjustment unit 531 of the synthesis calculation unit 471” temporarily stores the supply angular velocity of the first phase and delays the supply angular velocity until the supply angular velocity of the second phase is supplied.

[0498] In step S233, the differential inversion unit 551 differentially inverts the oscillation signal of the second phase IMU 201' from the same cluster and outputs the result signal.

[0499] In step S234, the angular velocity of IMU 201' of the second phase within the same cluster is measured.

[0500] In step S235, the inversion unit 571 of the synthesis calculation unit 471” inverts the polarity of the angular velocity of the second phase IMU 201' and outputs the inverted angular velocity to the cluster in the synthesis unit 532.

[0501] In step S236, by acquiring the angular velocity of the first layer provided by the delay adjustment unit 531 and the polarity reversal angular velocity of the second phase provided by the reversal unit 571, and adding the two angular velocities, the cluster internal synthesis unit 532' synthesizes the angular velocity of the cluster by acquiring the average value of the angular velocities within the cluster, thereby eliminating flicker noise, and outputting the synthesized angular velocity to the resampler 481.

[0502] In step S237, the resampler 481 acquires the angular velocity in clusters, aligns the sampling frequency in clusters, and outputs the angular velocity to the interference cancellation unit 482.

[0503] In step S238, the interference cancellation unit 482 eliminates the influence of interference on the angular velocity information supplied from the resampler 481 and outputs the synthesized angular velocity information to the synthesis unit 483.

[0504] In step S239, the synthesis unit 483 synthesizes the angular velocity information supplied by the interference cancellation unit 482 in clusters and outputs the synthesized result as a detection value.

[0505] Based on the above processing, angular velocity can be detected with high accuracy while eliminating flicker noise.

[0506] like Figure 40 As shown, although the normal Allan variance in a single IMU has a waveform as represented by waveform Wa, it is known, for example, that the Allan variance increases to waveform Wsa due to temperature compensation, and it is also known that the Allan variance increases to waveform Wma by configuring multiple IMUs using multiple IMUs.

[0507] However, by using such Figure 38 The multi-IMU 200 shown is configured to reduce the aforementioned flicker noise, for example, it can further reduce... Figure 40 The waveform Wfe shown indicates the bottom of the noise level in the Allen variance, and a variance characteristic that is closer to that of white noise can be obtained.

[0508] <<16. First Variation of the Third Embodiment>>

[0509] Although the example above describes a time-division with two units in the same cluster, the number of time-divisions can be more than two.

[0510] For example, when the number of time divisions is four, such as Figure 41 As shown, multiple IMUs 200 are configured.

[0511] Figure 41 The multiple IMUs 200 shown are configured such that IMUs 201'-1 to 201'-4 are in the same cluster, with IMU 201'-1 set as the synchronization master and IMUs 201'-2 to 201'-4 set as the synchronization slaves. In other words, in this configuration, the angular velocities of the first to fourth phases are acquired.

[0512] When the number of time divisions is two, and Figure 38 The difference in the multi-IMU 200 shown is that the read circuit 213” and the synthesis computing unit 471” are arranged to replace the read circuit 213” and the synthesis computing unit 471”.

[0513] Furthermore, the difference between the reading circuit 213” and the reading circuit 213’ is that switches 511’ and 512’ are provided instead of switches 511 and 512, and differential reversing units 551-1 and 551-2 are provided instead of differential reversing unit 551.

[0514] Although switches 511' and 512' are functionally similar to switches 511 and 512, switches 511' and 512' have a number of terminals corresponding to the number of time divisions, which is different from switches 511 and 512.

[0515] In other words, in switch 511', terminals 511'a to 511'd are provided, and when the angular velocities of the first to fourth stages are acquired, switching between them is performed to connect accordingly.

[0516] Similarly, in switch 512', terminals 512'a to 512'd are arranged, and when the angular velocities of the first to fourth stages are acquired, they are switched to connect accordingly.

[0517] The differential reversing units 551-1 and 551-2 function basically similarly. Figure 38 The differential inversion unit 551 shown functions as follows: In other words, differential inversion unit 551-1 performs differential inversion on the oscillation signal provided from the second-phase IMU 201'-2 and outputs the resulting signal to terminal 512'b of switch 512'. Furthermore, differential inversion unit 551-2 performs differential inversion on the oscillation signal provided from the fourth-phase IMU 201'-4 and outputs the resulting signal to terminal 512'd of switch 512'.

[0518] The "synthesis calculation unit 471'" is different from the synthesis calculation unit 471" in that delay adjustment units 531-1 and 531-2 are arranged instead of the delay adjustment unit 531, inversion units 571-1 and 571-2 are arranged instead of the inversion unit 571, and an intra-cluster synthesis unit 532" is arranged instead of the intra-cluster synthesis unit 532'.

[0519] Both the delay adjustment units 531-1 and 531-2 have the same function as the delay adjustment unit 531. The delay adjustment unit 531-1 temporarily stores the angular velocity of the first phase until the angular velocity of the second phase is supplied and output to the intra-cluster synthesis unit 532'. The delay adjustment unit 531-2 temporarily stores the angular velocity of the third phase until the angular velocity of the fourth phase is supplied and output to the intra-cluster synthesis unit 532'.

[0520] The inversion unit 571-1 inverts the polarity of the angular velocity of the second phase and outputs it to the intra-group composition unit 532'. The inversion unit 571-2 inverts the polarity of the angular velocity of the fourth phase and outputs it to the intra-group composition unit 532'.

[0521] According to the configuration described above, for the oscillation signals of the second and fourth phases output from the IMUs 201'-2 and 201'-4, the angular velocity is calculated in a state where the oscillation signals of the first layer and the angular velocity of the third phase output from the IMUs 201'-1 and 201'3 are converted to an inverted phase shift state.

[0522] Then, the polarity is inverted by the inversion unit 571-1 and the inversion unit 571-2. Therefore, the angular velocities of the second and fourth phases are supplied to the intra-cluster synthesis unit 532.

[0523] The intra-cluster synthesis unit 532" adds the angular velocities of the first and third phases, and composes the inverted angular velocities of the second and fourth phases into an average value, thereby eliminating the flicker noise component n.

[0524] <<17. Fourth Embodiment>>

[0525] <Mechanical Structure of IMU>

[0526] In the description presented above, a technique has been described for suppressing the occurrence of errors caused by pulsation by driving a plurality of IMUs 201 and 201' with drive frequencies synchronized with each other by electrical control and detecting the angular velocity with high accuracy.

[0527] However, in addition to the electrical control of the plurality of IMUs 201, by using a mechanical structure, the occurrence of errors caused by pulsation is further suppressed, and the angular velocity can be detected with higher accuracy.

[0528] Therefore, first, reference will be made to Figure 42 The oscillator 211 is described as a mechanical component of the IMU 201.

[0529] Figure 42 The oscillator 211 shown consists of a proof mass 601, a movable drive unit 602, a fixed drive unit 603, a connecting unit 604, and a detection electrode 605.

[0530] The verification mass block 601 is a rectangular weight that vibrates in the Y-axis direction while rotating about axis Ax, which is the axis of rotation in the direction of arrow R.

[0531] On the two sides of the calibration mass block 601 in the Y-axis direction, movable drive units 602 for vibration in the Y-axis direction are arranged. A fixed drive unit 603 is provided at the position facing the movable drive unit 602.

[0532] The movable drive unit 602 is formed by a comb-shaped electrode facing the side opposite to the calibration mass block 601, and is configured to be movable relative to the fixed drive unit 603, which is configured to be fixed to the calibration mass block 601.

[0533] The fixed drive unit 603 is formed by a comb-shaped electrode facing the side facing the calibration mass block 601 (i.e., the side facing the comb-shaped electrode of the movable drive unit 602), and is formed in a state where it is fixed to the connecting part 604. The movable drive unit 602 and the fixed drive unit 603 are arranged to face each other, such that their comb-shaped electrode portions engage with each other, thereby forming an electrostatic capacitance in the space between the two electrodes.

[0534] According to this configuration, by providing an oscillation signal formed by a predetermined drive frequency provided from the drive circuit block 231 to the electrodes of the fixed drive unit 603, the electrostatic capacitance between the electrodes of the movable drive unit 602 and the fixed drive unit 603 changes according to the drive frequency, and the movable drive unit 602 periodically changes and reciprocates relative to the fixed drive unit 603 in the Y-axis direction, thereby causing the calibration mass block 601 to vibrate in the Y-axis direction at a predetermined drive frequency.

[0535] The verification mass block 601 is connected to the connection part 604 using the connection part 601a, which is formed by a rectangular frame surrounding the verification mass block 601.

[0536] Plate-shaped electrodes 604a, which are formed in a tree-like shape, are arranged on both sides of the rectangular frame of the connecting part 604 in the X-axis direction.

[0537] A plate-shaped detection electrode 605 is formed that is not in contact with the tree-shaped plate electrode 604a but is interlocked with the plate electrode 604a. An electrostatic capacitance is formed between the electrode 604a and the detection electrode 605.

[0538] The verification mass block 601 rotates around axis Ax in the direction of arrow R and vibrates at a predetermined drive frequency in the Y-axis direction.

[0539] In other words, such as Figure 43 As shown, when only the movement of the verification mass block 601 is represented, when the detection mass block rotates in the direction of arrow R and vibrates in the Y-axis direction at a predetermined drive frequency, for example, when an application is made by... Figure 43 When the external force indicated by the dashed arrow is applied, a Coriolis force is generated in the X-axis direction as indicated by the arrow fc.

[0540] In other words, when the Coriolis force is applied to Figure 42 When the verification mass block 601 is shown, displacement occurs in the X-axis direction, and the Coriolis force associated with the verification mass block 601 is transmitted to the connection part 604 formed from the rectangular frame through the connection part 601a.

[0541] Then, the distance between the electrodes 604a and the detection electrode 605 in the connection part 604 changes, and the electrostatic capacitance formed between the electrodes changes.

[0542] In other words, the Coriolis force can be measured by measuring the change in electrostatic capacitance between the electrode 604a of the connection part 604 and the detection electrode 65.

[0543] Therefore, the vibration signal provided to the sensing circuit block 232 from the vibrator 211 is a signal indicating the change in the electrostatic capacitance between the electrode 604a of the connection part 604 and the detection electrode 65.

[0544] For reference Figure 42 and Figure 43 As described, the verification mass 601 rotates in the direction of arrow R and vibrates reciprocally in the Y-axis direction at a predetermined drive frequency, and therefore, angular velocity and acceleration are detected based on the Coriolis force detected when an external force is applied.

[0545] Therefore, when using the IMU 201 to detect angular velocity or acceleration with high accuracy, the stable rotation and vibration of the calibration mass block 601 is an important condition.

[0546] However, it is assumed that multiple IMUs 200 are installed in a moving object, and therefore the operating environment is not limited to an environment where the verification mass block 601 rotates and vibrates stably.

[0547] For example, it is also assumed that the following environment is assumed, in which the IMU is predicted to frequently collide with or climb over obstacles during movement, and strong vibrations are unintentionally applied.

[0548] When a strong vibration exceeding a predetermined intensity is applied to the IMU 201, in an environment where the verification mass block 601 cannot rotate and vibrate stably as described above, the vibration frequency changes to produce pulsation, and therefore, the accuracy of the prediction detection decreases.

[0549] Multi-IMU for combating vibrations in the X-axis direction

[0550] Therefore, by considering the vibration directions of multiple IMU 201s, vibration can be eliminated.

[0551] Figure 44 This is an arrangement diagram viewed from the top surface of IMU unit 610, which is formed by four IMUs 201 capable of eliminating vibrations in the X-axis direction by taking into account the vibration direction of the four IMUs 201 in the X-axis direction.

[0552] exist Figure 44 The IMU unit 610 shown consists of four IMUs, including IMU 201-101 to IMU 201-104.

[0553] In IMU unit 610, IMU 201-102 is located to the right of IMU 201-101 in the figure, IMU 201-103 is located at the bottom of the figure, and IMU 201-104 is located at the bottom right of the figure.

[0554] IMU 201-101 and IMU 201-102 are connected by a connection beam 611-1, which changes the displacement between IMU 201-101 and IMU 201-102 to be opposite in phase relative to the X-axis direction.

[0555] More specifically, the connecting beam 611-1 is a drive mechanism formed by four grease-type frames in the figure. The four corners 611a-1, 611a-2, 611b-1, and 611b-2 are all rotatable. Among them, the corner 611a-1 that contacts IMU 201-101 and the corner 611a-2 that contacts IMU 201-102 are connected to IMU 201-101 and IMU 201-102, respectively.

[0556] In the following text, the corner sections connected to IMU 201-101 and IMU 201-102 will be referred to as connecting corner sections 611a-1 and 611a-2, respectively, and the other two corner sections will be referred to as non-connecting corner sections 611b-1 and 611b-2, respectively.

[0557] In other words, by opening the angle formed by the frames connected to the connecting corners 611a-1 and 611a-2 to be widened, and closing the angle formed by the frames connected to the non-connecting corners 611b-1 and 611b-2 to be narrowed, IMU 201-101 and IMU 201-102 are driven to shorten the distance between them.

[0558] Conversely, IMU 201-101 and IMU 201-102 are driven to extend the distance between them by closing the angle formed by the frames connected to the connecting corners 611a-1 and 611a-2 to decrease the angle and opening the angle formed by the frames connected to the non-connecting corners 611b-1 and 611b-2 to increase the angle.

[0559] According to the drive mechanism of the connecting corners 611a-1 and 611a-2 and the non-connecting corners 611b-1 and 611b-2, when IMU 201-101 moves a predetermined distance in the negative direction relative to the X-axis (to the left in the figure), the connecting beam 611-1 moves IMU 201-102 a predetermined distance in the positive direction relative to the X-axis (to the right in the figure), thereby increasing the distance between IMU 201-101 and 201-102. Conversely, when IMU 201-101 moves a predetermined distance in the positive direction relative to the X-axis (to the right in the figure), the connecting beam 611-1 moves IMU 201-102 a predetermined distance in the negative direction relative to the X-axis (to the left in the figure), thereby shortening the distance between IMU 201-101 and 201-102.

[0560] The connecting beam 611-1 shifts IMU 201-101 and IMU 201-102 to the opposite phase relative to the X-axis direction, and therefore there is no master-slave relationship between IMU 201-101 and IMU 201-102.

[0561] IMU 201-103 and IMU 201-104 are connected by connecting beam 611-2, which changes the displacement between IMU 201-103 and IMU 201-104 to be opposite in phase relative to the X-axis direction. The drive mechanism of connecting beam 611-2 is similar to that of connecting beam 611-1, and therefore its detailed illustration and description will be omitted.

[0562] In other words, when IMU 201-103 moves a predetermined distance in the positive direction relative to the X-axis (to the right in the attached figure), connecting beam 611-2 moves IMU 201-104 a predetermined distance in the negative direction relative to the X-axis (to the left in the attached figure), thus shortening the distance between IMU 201-103 and 201-104. Conversely, when IMU 201-103 moves a predetermined distance in the negative direction relative to the X-axis (to the left in the attached figure), connecting beam 611-2 moves IMU 201-104 a predetermined distance in the positive direction relative to the X-axis (to the right in the attached figure), thus lengthening the distance between IMU 201-103 and 201-104.

[0563] The connecting beam 611-2 shifts IMU 201-103 and IMU 201-104 to the opposite phase relative to the X-axis direction, and therefore there is no master-slave relationship between IMU 201-103 and IMU 201-104.

[0564] IMU 201-101 and IMU 201-103 are connected by a connecting beam 612-1, which changes the displacement between IMU 201-101 and IMU 201-103 to be out of phase with respect to the X-axis direction.

[0565] More specifically, in the connecting beam 612-1, the rotating shaft 612a is located at the center, and IMU 201-101 and IMU201-103 are connected to the ends 612b-1 and 612b-2 respectively for rotation.

[0566] For this purpose, the connecting beam 612-1 is driven like a rocker, with the rotation axis 612a as its center corresponding to the movement of IMU 201-101 and IMU 201-103 in the X-axis direction.

[0567] Accordingly, when IMU 201-101 moves a predetermined distance in the positive direction relative to the X-axis (the rightward direction in the attached figure), connecting beam 612-1 moves IMU 201-103 a predetermined distance in the negative direction relative to the X-axis (the leftward direction in the attached figure). Conversely, when IMU 201-101 moves a predetermined distance in the negative direction relative to the X-axis, connecting beam 612-1 moves IMU 201-103 a predetermined distance in the positive direction relative to the X-axis.

[0568] The connecting beam 612-1 shifts IMU 201-101 and IMU 201-103 to the opposite phase relative to the X-axis direction, and therefore there is no master-slave relationship between IMU 201-101 and IMU 201-103.

[0569] IMU 201-102 and IMU 201-104 are connected by connecting beam 612-2, which changes the displacement between IMU 201-102 and IMU 201-104 to be out of phase with respect to the X-axis. The drive mechanism of connecting beam 612-2 is similar to that of connecting beam 612-1.

[0570] In other words, when IMU 201-102 moves a predetermined distance in the positive direction relative to the X-axis (to the right in the attached figure), connecting beam 612-2 moves IMU 201-104 a predetermined distance in the negative direction relative to the X-axis (to the left in the attached figure). Conversely, when IMU 201-102 moves a predetermined distance in the negative direction relative to the X-axis (to the left in the attached figure), connecting beam 612-2 moves IMU 201-104 a predetermined distance in the positive direction relative to the X-axis (to the right in the attached figure).

[0571] The connecting beam 612-2 shifts IMU 201-102 and IMU 201-104 to the opposite phase relative to the X-axis direction, and therefore there is no master-slave relationship between IMU 201-102 and IMU 201-104.

[0572] In other words, in Figure 44 In the IMU unit 610 shown, IMUs 201-101 and 201-104 are driven with the same phase relative to the X-axis direction, IMUs 201-102 and 201-103 are driven with the same phase relative to the X-axis direction, and IMUs 201-101 and 201-104 and IMUs 201-102 and 201-103 are driven with opposite phases relative to the X-axis direction.

[0573] Furthermore, IMUs 201-101 to 201-104 may have different drive directions relative to the X-axis direction, and as described in the first to third embodiments, the drive frequency is controlled to be the same.

[0574] Then, the detection results obtained by IMU 201 driven with the same phase from IMU 201-101 to 201-104 are added together to obtain the difference between the detection results obtained by IMU 201 driven with opposite phase, and the average value is obtained, thereby obtaining the angular velocity and acceleration.

[0575] As a result, even if a vibration component in the X-axis direction caused by external interference vibration occurs, as shown by the arrow in the lower right of the figure, the vibration component in the X-axis direction caused by external interference vibration can be eliminated by taking the difference between the detection results of the IMU 201 driven by opposite phases in the X-axis direction, and the influence of vibration can be suppressed.

[0576] Multi-IMU for combating vibrations in the Y-axis direction

[0577] By using techniques similar to those for vibrations in the X-axis direction, countermeasures for vibrations in the Y-axis direction can be considered.

[0578] Figure 45 This is an arrangement diagram viewed from the top surface of IMU unit 610, which is formed by four IMUs 201 capable of eliminating vibrations in the X-axis direction by taking into account the vibration direction of the four IMUs 201 in the Y-axis direction.

[0579] and Figure 44 Similar to the IMU unit 610 shown in the figure, Figure 45 The IMU unit 610 shown also consists of four IMUs, including IMU 201-101 to IMU 201-104.

[0580] IMU 201-101 and IMU 201-102 are connected by connecting beam 631-1, which reverses the displacement between IMU 201-101 and IMU 201-102 relative to the Y-axis. The drive mechanism of connecting beam 631-1 is similar to... Figure 44 The drive mechanism of the connecting beam 612-1 shown in the figure changes the drive direction from the X-axis direction to the Y-axis direction.

[0581] In other words, when the IMU 201-101 connected to end 631b-1 moves a predetermined distance in the positive direction (upward direction in the figure) relative to the Y-axis, the connecting beam 631-1 is driven like a seesaw with the rotation axis 631a as its center, and moves a predetermined distance in the negative direction (downward direction in the figure) relative to the Y-axis to the IMU 201-102 connected to end 631b-2.

[0582] Conversely, when the IMU 201-101 connected to end 631b-1 moves a predetermined distance in the negative direction (downward direction in the figure) relative to the Y-axis, the connecting beam 631-1 is driven like a seesaw with the rotation axis 631a as its center, and moves a predetermined distance in the positive direction (upward direction in the figure) relative to the Y-axis to the IMU 201-102 connected to end 631b-2.

[0583] The connecting beam 631-1 shifts IMU 201-101 and IMU 201-102 to the opposite phase relative to the Y-axis direction, and therefore there is no master-slave relationship between IMU 201-101 and IMU 201-102.

[0584] IMU 201-103 and IMU 201-104 are connected by connecting beam 631-2, which modifies the displacement between IMU 201-103 and IMU 201-104 to be opposite in phase relative to the Y-axis direction. The drive mechanism of connecting beam 631-2 is similar to that of connecting beam 632-1.

[0585] In other words, when IMU 201-103 moves a predetermined distance in the positive direction relative to the Y-axis (the upward direction in the figure), connecting beam 631-2 moves IMU 201-104 a predetermined distance in the negative direction relative to the Y-axis (the downward direction in the figure). Conversely, when IMU 201-103 moves a predetermined distance in the negative direction relative to the Y-axis (the downward direction in the figure), connecting beam 631-2 moves IMU 201-104 a predetermined distance in the positive direction relative to the Y-axis (the upward direction in the figure).

[0586] The connecting beam 631-2 shifts IMU 201-103 and IMU 201-104 to the opposite phase relative to the Y-axis direction, and therefore there is no master-slave relationship between IMU 201-103 and IMU 201-104.

[0587] IMU 201-101 and IMU 201-103 are connected by connecting beam 632-1, which reverses the displacement between IMU 201-101 and IMU 201-103 relative to the Y-axis. The drive mechanism of connecting beam 632-1 is similar to... Figure 44 The drive mechanism of the connecting beam 611-1 shown in the figure changes the drive direction from the X-axis direction to the Y-axis direction.

[0588] In other words, when IMU 201-101 moves a predetermined distance relative to the Y-axis in the positive direction (upward direction in the figure), the connecting beam 632-1 drives IMU 201-101 and IMU 201-103 to shorten the distance between them by closing the angle formed by the frames connected to the connecting corners 632a-1 and 632a-2 and opening the angle formed by the frames connected to the non-connecting corners 632b-1 and 632b-2 to widen the distance.

[0589] Conversely, when IMU 201-101 moves a predetermined distance relative to the Y-axis in the negative direction (downward direction in the figure), the angle formed by the frames connected to the connecting corners 632a-1 and 632a-2 is widened by opening and the angle formed by the frames connected to the non-connecting corners 632b-1 and 632b-2 is narrowed by closing. The connecting beam 632-1 drives IMU 201-101 and IMU 201-103 to shorten the distance between them and moves IMU 201-103 a predetermined distance relative to the Y-axis in the positive direction (upward direction in the figure).

[0590] The connecting beam 632-1 shifts IMU 201-101 and IMU 201-103 to the opposite phase relative to the Y-axis direction, and therefore there is no master-slave relationship between IMU 201-101 and IMU 201-103.

[0591] IMU 201-102 and IMU 201-104 are connected by connecting beam 632-2, which reverses the displacement between IMU 201-102 and IMU 201-104 relative to the Y-axis. The drive mechanism of connecting beam 632-2 is similar to... Figure 44 The drive mechanism of the connecting beam 632-1 shown.

[0592] In other words, when IMU 201-102 moves a predetermined distance in the positive direction relative to the Y-axis (the upward direction in the figure), connecting beam 632-2 moves IMU 201-104 a predetermined distance in the negative direction relative to the Y-axis (the downward direction in the figure). Conversely, when IMU 201-102 moves a predetermined distance in the negative direction relative to the Y-axis (the downward direction in the figure), connecting beam 632-2 moves IMU 201-104 a predetermined distance in the positive direction relative to the Y-axis (the upward direction in the figure).

[0593] The connecting beam 632-2 shifts IMU 201-102 and IMU 201-104 to the opposite phase relative to the Y-axis direction, and therefore there is no master-slave relationship between IMU 201-102 and IMU 201-104.

[0594] In other words, in Figure 45 In the IMU unit 610 shown, IMUs 201-101 and 201-104 are driven with the same phase relative to the Y-axis direction, IMUs 201-102 and 201-103 are driven with the same phase relative to the Y-axis direction, and IMUs 201-101 and 201-104 and IMUs 201-102 and 201-103 are driven with opposite phases relative to the Y-axis direction.

[0595] Furthermore, IMUs 201-101 to 201-104 may have different drive directions relative to the Y-axis direction, and as described in the first to third embodiments, the drive frequency is controlled to be the same.

[0596] Then, the detection results obtained by IMU 201 driven with the same phase from IMU 201-101 to 201-104 are added together to obtain the difference between the detection results obtained by IMU 201 driven with opposite phase, and the average value is obtained, thereby obtaining the angular velocity and acceleration.

[0597] As a result, even if the following situation occurs: as shown by the arrow in the lower right part of the figure, the vibration component in the Y-axis direction caused by external interference vibration is applied, the vibration component in the Y-axis direction caused by external interference vibration can be eliminated by taking the difference between the detection results obtained by the IMU 201 driven by the opposite phase in the Y-axis direction, thus suppressing the influence of vibration.

[0598] although Figure 44 and Figure 45 The drive mechanisms in the X-axis direction and the drive mechanisms in the Y-axis direction for the same IMU unit 610 are shown respectively, but all drive mechanisms are drive mechanisms included in the IMU unit 610.

[0599] In other words, as referenced Figure 44 and Figure 45 As described, even when vibration is applied in one of the X-axis and Y-axis directions, the IMU unit 610 uses the difference between the detection results to eliminate the vibration components in the X-axis and Y-axis directions, and thus, it can achieve the measurement of angular velocity and acceleration with high accuracy.

[0600] <Included in Figure 44 and Figure 45 Example of a multi-IMU configuration for an IMU unit shown in the image >

[0601] Next, we will refer to Figure 46 Description includes Figure 44 and Figure 45 The diagram shows a configuration example of multiple IMUs 200 for IMU unit 610.

[0602] Figure 46 The multi-IMU 200 shown includes a signal processing unit 651 that receives the outputs of IMU unit 610 and the outputs of IMUs 201-101 to 201-104 of IMU unit 610 in the positive and negative directions relative to the X-axis and the positive and negative directions relative to the Y-axis, and performs signal processing.

[0603] The signal processing unit 651 includes computing units 661 and 662 and receives outputs in the positive and negative directions relative to the X-axis and the positive and negative directions relative to the Y-axis from IMUs 201-101 to 201-104 and performs signal processing.

[0604] More specifically, the calculation unit 661 receives the output of the IMU unit 610 in the positive direction relative to the X-axis (X-axis output +) and the output in the negative direction relative to the X-axis (X-axis output -) and performs calculations to take the difference between them. In other words, since the Coriolis force operates in opposite phase and the vibration component operates in the same phase, the vibration component is eliminated by taking the difference, and the Coriolis force in the X-axis is output.

[0605] In other words, by dividing the difference between the sum of the detection outputs of IMUs 201-101 and 201-104 and the sum of the detection outputs of IMUs 201-102 and 201-103 by 2, the calculation unit 661 obtains the average value of the detection results obtained by the four IMUs 201. Therefore, even when there is a vibration component in the X-axis direction, the average value can be appropriately eliminated.

[0606] The calculation unit 662 receives the outputs of the IMU unit 610 in the positive direction relative to the Y-axis (Y-axis output +) and the outputs in the negative direction relative to the Y-axis (Y-axis output -) and performs calculations to take the difference between them. In other words, since the Coriolis force operates in opposite phase and the vibration component operates in the same phase, the vibration component is eliminated by taking the difference, and the Coriolis force in the Y-axis is output.

[0607] In other words, by dividing the difference between the sum of the detection outputs of IMUs 201-101 and 201-104 and the sum of the detection outputs of IMUs 201-102 and 201-103 by 2, the calculation unit 662 obtains the average value of the detection results obtained by the four IMUs 201. Therefore, even when there is a vibration component in the Y-axis direction, this average value can be appropriately eliminated.

[0608] exist Figure 46 In the diagram, the IMU unit 610 representing the drive mechanism in the X-axis direction is specifically designated as IMU unit 610X, and the IMU unit 610 representing the drive mechanism in the Y-axis direction is specifically designated as IMU unit 610Y, and these designations will also be used hereinafter. As described above, the IMU unit 610 consists of four IMUs, including IMUs 201-101 to IMUs 201-104.

[0609] < Figure 46 Signal processing of the IMU 200 shown

[0610] Next, we will refer to Figure 47 The flowchart shown is described in Figure 46 The signal processing of the IMU 200 shown.

[0611] In step S301, the calculation unit 661 receives the positive X-axis output (X-axis output +) and the negative X-axis output (X-axis output -) from the output of the IMU unit 610, obtains the average value from their difference, and outputs the average value as the Coriolis force of the X-axis.

[0612] More specifically, for example, by dividing the difference between the sum of the detection outputs of IMUs 201-101 and 201-104 and the sum of the detection outputs of IMUs 201-102 and 201-103 by 2, the calculation unit 661 obtains the average value of the detection results of the four IMUs 201 as the Coriolis output in the X-axis direction, wherein the vibration component in the X-axis direction is eliminated.

[0613] In step S302, the calculation unit 662 receives the positive output (Y-axis output+) and the negative output (Y-axis output-) in the Y-axis direction from the output of the IMU unit 610, obtains the average value from their difference, and outputs the average value as the Coriolis force in the Y-axis.

[0614] More specifically, for example, by dividing the difference between the sum of the detection outputs of IMUs 201-101 and 201-104 and the sum of the detection outputs of IMUs 201-102 and 201-103 by 2, the calculation unit 662 obtains the average value of the detection results of the four IMUs 201 as the Coriolis output in the Y-axis direction, where the vibration component in the Y-axis direction is eliminated.

[0615] Based on the above processing, calculations are performed in both the X-axis and Y-axis directions by using the difference between the detection outputs of IMU 201-101 and 201-104 and the detection outputs of IMU 201-102 and 201-103. Even if a vibration component exists in either the X-axis or Y-axis direction, the vibration component can be appropriately eliminated.

[0616] <<18. First Variation of the Fourth Embodiment>>

[0617] <Using multiple IMU units to combat vibration in the X-axis direction>

[0618] In the description given above, although an example of implementing multiple IMUs 200 by configuring IMU unit 610 with four IMUs 201 has been described, it is possible to implement multiple IMUs 200 in which the number of IMUs 201 increases in units of IMU unit 610.

[0619] Figure 48 This is a configuration example of a multi-IMU 200, in which vibration in the X-axis direction can be eliminated when the IMU block 610B is configured such that four IMU units 610 are arranged in a 2×2 configuration.

[0620] Figure 48 The IMU block 610B shown consists of IMU units 610-1 to 610-4. Figure 48 In the IMU block 610B shown, in order to represent the drive mechanism in the X-axis direction of each of the IMU units 610-1 to 610-4, the IMU block 610B and the IMU units 610-1 to 610-4 are respectively represented as IMU block 610BX and IMU units 610X-1 to 610X-4 in the figure.

[0621] In other words, in Figure 48 In the IMU block 610BX shown, four units of IMU units 610, each including four IMUs 201, are arranged, and thus the IMU block 610BX consists of a total of 16 IMUs 201, which include 4 IMUs in the horizontal direction and 4 IMUs in the vertical direction.

[0622] The drive mechanism of the IMU 201 in the X-axis direction of each of the IMU units 610X-1 to 610X-4 is similar to that in the reference. Figure 44 The component being described.

[0623] However, new connecting beams 612E-1 and 612E-2 are provided. Connecting beam 612E-1 connects IMU 201-103-1 on the lower left side of IMU unit 610X-1 and IMU 201-101-3 on the upper left side of IMU unit 610X-3. Connecting beam 612E-2 connects IMU 201-104-2 on the lower right side of IMU unit 610X-2 and IMU 201-102-4 on the upper right side of IMU unit 610X-4.

[0624] Furthermore, in the connection between IMU unit 610X-1 and IMU unit 610X-2, instead of the connecting beam 612, two connecting beams 611E-1 and 611E-2, which are horizontally adjacent to each other connecting IMU 201, are arranged vertically. Similarly, in the connection between IMU unit 610X-3 and IMU unit 610X-4, connecting beams 611E-3 and 611E-4 are arranged. In other words, in Figure 48 The multi-IMU 200 shown in the figure has four newly added connecting beams 611E-1 to 611E-4 surrounded by dotted lines.

[0625] Connecting beam 612E-1 includes similar components Figure 44 The drive mechanism of the connecting beam 612-1 shown is a drive mechanism, and the connecting beam 612E-2 includes a drive mechanism similar to... Figure 44 The drive mechanism of the connecting beam 612-2 shown in the figure is the drive mechanism.

[0626] For this purpose, a total of 16 IMUs 201 (including four IMUs in the horizontal direction and four IMUs in the vertical direction, which are configured in) Figure 48 The multiple IMUs 200 shown are driven at a synchronous drive frequency, and the IMUs 201 that are adjacent to each other in the horizontal and vertical directions are driven with opposite phases relative to the X-axis direction, and the IMUs 201 that are adjacent to each other in the left diagonal upward direction, the left diagonal downward direction, the right diagonal upward direction, and the right diagonal downward direction are driven with the same phase relative to the X-axis direction.

[0627] Then, the detection results of IMU 201 driven with the same phase in each IMU unit 610X-1 to 610X-4 of the multi-IMU 200 configuration are added together to obtain the difference between the detection results of IMU 201 driven with opposite phases, and the average value is obtained, thereby obtaining the angular velocity and acceleration.

[0628] As a result, even when vibration is applied along the X-axis, the vibration component in the X-axis direction is eliminated by taking the difference between the detection results obtained by the IMU 201 driven in opposite phase in the X-axis direction, and thus the effect of vibration can be suppressed.

[0629] In addition, Figure 48 The number of IMUs 201 used in the multi-IMU 200 shown is greater than that in the multi-IMU 200. Figure 44 The number of IMUs 200 shown in the figure enables the detection of angular velocity and acceleration with greater accuracy.

[0630] <Using multiple IMU units to combat vibration in the Y-axis direction>

[0631] Figure 49 This is a configuration example of IMU block 610B, where vibrations in the Y-axis direction can be eliminated when four IMU units 610 are arranged in a 2×2 configuration.

[0632] Figure 49 The IMU block 610B shown consists of IMU units 610-1 to 610-4. Figure 49 In order to represent the drive mechanism in the Y-axis direction of each of the IMU units 610-1 to 610-4, the IMU block 610B and the IMU units 610-1 to 610-4 are respectively represented as IMU block 610BY and IMU units 610Y-1 to 610Y-4 in the accompanying drawings.

[0633] In other words, in Figure 49 In the IMU block 610BY shown, four IMU units 610, each including four IMUs 201, are arranged, and therefore the IMU block 610BY consists of a total of 16 IMUs 201, including 4 IMUs in the horizontal direction and 4 IMUs in the vertical direction.

[0634] Configure the drive mechanism of IMU 201 in the Y-axis direction of each of IMU units 610Y-1 to 610Y-4 with a reference. Figure 45 The components described are similar.

[0635] However, new connecting beams 631E-1 and 631E-2 were added. Connecting beam 631E-1 connects IMU 201-102-1 on the upper right side of IMU unit 610Y-1 and IMU 201-101-2 on the upper left side of IMU unit 610Y-2. Connecting beam 631E-2 connects IMU 201-103-3 on the lower right side of IMU unit 610Y-3 and IMU 201 on the lower left side of IMU unit 610Y-4.

[0636] Furthermore, in the connection between IMU unit 610Y-1 and IMU unit 610Y-3, connecting beams 632E-1 and 632E-2, which connect IMU 201, are arranged vertically adjacent to each other, replacing the connecting beam 631. Similarly, connecting beams 632E-3 and 632E-4 are arranged in the connection between IMU unit 610Y-2 and IMU unit 610Y-4. In other words, four connecting beams 632E-1 to 632E-4, surrounded by dotted lines, are newly provided.

[0637] Connecting beam 631E-1 includes similar components Figure 45 The drive mechanism of the connecting beam 631-1 shown is a drive mechanism, and the connecting beam 631E-2 includes a drive mechanism similar to... Figure 45The drive mechanism of the connecting beam 631-2 shown is a drive mechanism.

[0638] Therefore, this includes the configuration of four IMUs in the horizontal direction in the vertical direction. Figure 49 The 16 IMUs 201 of the four IMUs in the IMU block 610BY shown are driven at a synchronous drive frequency. The IMUs 201 that are adjacent to each other in the horizontal and vertical directions are driven with opposite phases relative to the Y-axis direction, and the IMUs 201 that are adjacent to each other in the left diagonal upward, left diagonal downward, right diagonal upward, and right diagonal downward directions are driven with the same phase relative to the Y-axis direction.

[0639] Then, the detection results of IMU 201 driven with the same phase in each IMU unit 610Y-1 to 610Y-4 of the multiple IMU 200 are added together to obtain the difference between the detection results of IMU 201 driven with opposite phases, and the average value is obtained, thereby obtaining the angular velocity and acceleration.

[0640] As a result, even when vibration is applied in the Y-axis direction, the vibration component in the Y-axis direction is eliminated by taking the difference between the detection results obtained by the IMU 201 driven in opposite phase in the Y-axis direction, and thus the effect of vibration can be suppressed.

[0641] In addition, Figure 49 The number of IMUs 201 used in the multi-IMU 200 shown is greater than that in the multi-IMU 200. Figure 45 The number of IMUs 200 shown in the figure enables the detection of angular velocity and acceleration with greater accuracy.

[0642] By setting each IMU unit 610 Figure 46 The signal processing unit 651 shown herein, by referring to Figure 47 The signal processing described in the flowchart shown can achieve Figure 48 and Figure 49 The signal processing shown is performed by the multiple IMU 200.

[0643] Therefore, the terms will be omitted. Figure 48 and Figure 49 The description of the signal processing performed by the multiple IMU 200 shown is illustrated.

[0644] <<19. Second variation of the fourth embodiment>>

[0645] In the description presented above, although an example of arranging four IMU units 610 and using the signal processing results of the IMU units 610 to implement a multi-IMU 200 has been described, time-division processing can be performed by switching the output of the detection results of each of the four IMU units 610 in a channel.

[0646] Figure 50 This illustrates a configuration example of a multi-IMU 200 in which the detection results of four IMU units 610 are processed in a time-division manner into four channels of output signals.

[0647] Figure 50 The multi-IMU 200 shown consists of IMU block 610B, signal processing unit 671 and switching unit 672.

[0648] The drive mechanism of IMU block 610B is formed by the drive mechanism in the X-axis direction represented in IMU block 610BX and the drive mechanism in the Y-axis direction represented in IMU block 610BY.

[0649] like Figure 48 As shown, IMU block 610BX consists of IMU units 610X-101 to 610X-4.

[0650] The IMU units 610X-1 to 610X-4 output detection outputs as signals for channels 1 to 4.

[0651] In other words, the IMU unit 610X-1 outputs the positive X-axis output (X-axis output ch1+) and the negative X-axis output (X-axis output ch1-) as channel 1 (ch1).

[0652] The IMU unit 610X-2 outputs the positive X-axis output (X-axis output ch2+) and the negative X-axis output (X-axis output ch2-) as channel 2 (ch2).

[0653] The IMU unit 610X-3 outputs the positive X-axis output (X-axis output ch3+) and the negative X-axis output (X-axis output ch3-) as channel 3 (ch3).

[0654] The IMU unit 610X-4 outputs the positive X-axis output (X-axis output ch4+) and the negative X-axis output (X-axis output ch4-) as channel 4 (ch4).

[0655] like Figure 49 As shown, IMU block 610BY consists of IMU units 610Y-1 to 610Y-4.

[0656] The IMU units 610Y-1 to 610Y-4 output detection signals as channels 1 to 4.

[0657] In other words, although not shown in the figure, IMU unit 610Y-1 outputs the positive output (Y-axis output ch1+) and the negative output (Y-axis output ch1-) in the Y-axis direction to signal processing unit 671 as channel 1 (ch1).

[0658] IMU unit 610Y-2 outputs the positive Y-axis output (Y-axis output ch2+) and the negative Y-axis output (Y-axis output ch2-) to signal processing unit 671 as channel 2 (ch2).

[0659] IMU unit 610Y-3 outputs the positive Y-axis output (Y-axis output ch3+) and the negative Y-axis output (Y-axis output ch3-) to signal processing unit 671 as channel 3 (ch3).

[0660] IMU unit 610Y-4 outputs the positive Y-axis output (Y-axis output ch4+) and the negative Y-axis output (Y-axis output ch4-) to signal processing unit 671 as channel 4 (ch4).

[0661] The signal processing unit 671 includes calculation units 681-1 to 681-4, and the calculation units 681-1 to 681-4 respectively receive the outputs of channels 1 to 4 for the positive and negative directions of the X-axis from the IMU block BX and perform signal processing.

[0662] More specifically, the calculation unit 681-1 receives the positive X-axis output (X-axis output ch1+) and the negative X-axis output (X-axis output ch1-) of channel 1 (ch1) from the output of the IMU unit 610, obtains their difference, obtains their average value, and outputs the average value as the Coriolis force (ch1) of the X-axis to the switching unit 672.

[0663] The calculation unit 681-2 receives the positive X-axis output (X-axis output ch2+) and the negative X-axis output (X-axis output ch2-) of channel 2 (ch2) from the output of the IMU unit 610, obtains the difference between them, obtains the average value, and outputs the average value as the Coriolis force (ch2) of the X-axis to the switching unit 672.

[0664] The calculation unit 681-3 receives the positive X-axis output (X-axis output ch3+) and the negative X-axis output (X-axis output ch3-) of channel 3 (ch3) from the output of the IMU unit 610, obtains the difference between them, obtains the average value, and outputs the average value as the Coriolis force (ch3) of the X-axis to the switching unit 672.

[0665] The calculation unit 681-4 receives the positive X-axis output (X-axis output ch4+) and the negative X-axis output (X-axis output ch4-) of channel 4 (ch4) from the output of the IMU unit 610, obtains the difference between them, obtains the average value, and outputs the average value as the Coriolis force (ch4) of the X-axis to the switching unit 672.

[0666] The switching unit 672 outputs the Coriolis force of the four channels supplied by the signal processing unit 671 to a later stage in a time-division manner.

[0667] More specifically, the switching unit 672 includes terminals 672a-1 to 672a-4, a switch 672b, and a control unit 672c.

[0668] Terminals 672a-1 to 672a-4 receive the Coriolis force output of channels 1 to 4 from the signal processing unit 671, respectively.

[0669] Switch 672b is controlled by control unit 672c and connected to terminals 672a-1 to 672a-4 that switch at predetermined time intervals, thus outputting the Coriolis force of the four channels of the X-axis to the subsequent stage in a time-division manner.

[0670] Coriolis force in the X-axis direction corresponding to the four channels output from IMU block 610BX can be output sequentially by switching the cycle four times, and thus the configuration required to detect the Coriolis force in the X-axis direction in a later stage can be reduced to 1 / 4.

[0671] In addition, although not shown in the accompanying drawings, a signal processing unit and a switching unit are also arranged. The signal processing unit receives the outputs of four channels in the positive direction of the Y-axis and four channels in the negative direction of the Y-axis from the IMU block 610BY for the Y-axis direction and performs signal processing. The switching unit outputs the Coriolis force outputs in the Y-axis direction corresponding to the four channels of the signal processing unit to a later stage in a time-division manner.

[0672] <Use Figure 50 Signal processing of multiple IMUs shown in the diagram >

[0673] Next, we will refer to Figure 51 The flowchart shown uses Figure 50 The signal processing of the multiple IMUs shown is illustrated.

[0674] In step S321, the control unit 672c of the switching unit 672 initializes the counter n for counting channels to 1.

[0675] In step S322, the control unit 672c is connected to terminal 672b-n via the control switch 672b based on the count n.

[0676] In step S323, the calculation units 681-1 to 681-4 of the signal processing unit 651 calculate the Coriolis force in the X-axis direction of channels 1 to 4 and output the Coriolis force to the switching unit 672.

[0677] In step S324, the switching unit 672 outputs the Coriolis force in the X-axis direction from the channel n provided by the signal processing unit 671 to the next stage via the terminal 672b-n connected to the switch 672b.

[0678] In step S325, the control unit 672c determines whether the count n is 4. If the count n is not 4, the process proceeds to step S326.

[0679] In step S326, the control unit 672c increments the count n by 1, and the process returns to step S322.

[0680] In other words, until the count n becomes 4, channel n is sequentially switched by one each time, and the Coriolis force in the X-axis direction of the corresponding channel is switched and output to a later stage.

[0681] Then, in step S325, the count n is 4, and the process proceeds to step S327.

[0682] In step S327, the control unit 672c determines whether to indicate the end of the process. If no end is indicated, it returns to step S321 and repeats the subsequent processes.

[0683] In other words, the channel can be switched from 1 to 4 until the instruction processing is completed, and the Coriolis force in the X-axis direction of the corresponding channel is output.

[0684] Then, in step S327, the process ends if the processing is indicated to be complete.

[0685] According to the above process, each Coriolis force (which has been divided into four channels) corresponding to the X-axis direction of the IMU unit 610 is switched sequentially and output to a later stage, and thus the configuration required for wave detection corresponding to each channel in the later stage can be reduced to 1 / 4.

[0686] Furthermore, although a similar treatment is performed on the Coriolis force in the Y-axis direction, only the axial direction is different, the treatment is basically the same, so its description will be omitted.

[0687] <<20. Third variation of the fourth embodiment>>

[0688] <Multiple IMUs, with further configuration to counteract vibrations in the Z-axis direction>

[0689] In the description presented above, although a configuration example of the multiple IMU 200 for configuring electric shock countermeasures in the X-axis and Y-axis directions has been described, it is possible to further configure electric shock countermeasures in the Z-axis direction.

[0690] Figure 52 The configuration of IMU block 610B with multiple IMUs 200 capable of eliminating vibrations in the Z-axis direction is shown.

[0691] Figure 52 The IMU block 610B shown consists of IMU units 610-1 to 610-4. Figure 52 In the IMU block 610B shown, in order to represent the drive mechanism in the Z-axis direction of each of the IMU units 610-1 to 610-4, the IMU block 610B and the IMU units 610-1 to 610-4 are respectively represented as IMU block 610BZ and IMU units 610Z-1 to 610Z-4 in the figure.

[0692] In other words, in Figure 52 The IMU block 610BZ shown is provided with four units 610Z-1 to 610Z-4, each comprising four IMUs 201-101 to 104, and thus the IMU block 610BZ consists of a total of 16 IMUs 201, including 4 IMUs in the horizontal direction and 4 IMUs in the vertical direction.

[0693] More in detail, Figure 52 In this configuration, IMU unit 610Z-1 includes IMU 201-101-1 to IMU 201-104-1, IMU unit 610Z-2 includes IMU 201-101-2 to IMU 201-104-2, IMU unit 610Z-3 includes IMU 201-101-3 to IMU 201-104-3, and IMU unit 610Z-4 includes IMU 201-101-4 to IMU 201-104-4.

[0694] In configuration Figure 52The IMU 201 included in the IMU block 610BZ of the multi-IMU 200 shown reciprocates in the Z-axis direction at a predetermined drive frequency when the sheet surface in the figure is set as a reference position in the Z-axis direction. This reciprocates within a range of positions where the sheet surface moves a predetermined distance forward and a predetermined distance backward.

[0695] exist Figure 52 In the upper left part, the IMU 201 marked with "×" indicates that the IMU 201 has moved from the sheet surface, which is the basic position, to the rear side, and the IMU 201 marked with a black circle indicates that the IMU 201 has moved from the sheet surface, which is the basic position, to the front side.

[0696] exist Figure 52 The upper right part shows the cross-section of the sides of the IMU block 610BZ in columns H2 and H4 when viewed along the X-axis from the right side of the figure, and the right side shows the cross-section of the sides of the IMU block 610BZ in columns H1 and H3 when viewed along the X-axis from the right side of the figure.

[0697] In addition, Figure 52 The lower left portion of the figure shows the cross-sections of the sides of IMU block 610BZ in rows B and D as seen along the Y-axis from the bottom of the figure, and the lower portion shows the cross-sections of the sides of IMU block 610BZ in rows A and C as seen along the Y-axis from the bottom of the figure.

[0698] Here, it is configured in the vertical direction of the diagram. Figure 52 The 4 rows of 16 IMUs 201 in the upper left IMU block 610BZ are represented as rows A to D, and the 4 columns in the horizontal direction are represented as columns H1 to H4.

[0699] In other words, such as Figure 52 As shown in the next stage at the lower left, row A consists of IMU 201-101-1, IMU 201-102-1, IMU 201-101-2 and IMU 201-102-2 on the left side of the figure, and the IMUs are connected to connecting beams 701-1 to 701-3.

[0700] The connecting beam 701-1 is composed of a frame, etc., and has a central axis 701a-1 fixed to the reference position Lb. The adjacent IMUs 201-101-1 and 201-102-1 are connected to the two ends 701b-1-1 and 701b-1-2, respectively.

[0701] For example, when an IMU 201-101-1 connected to an end 701b-1-1 is in the negative direction relative to the Z-axis (e.g., from the rear side of the sheet surface as the basic position Lb), Figure 52 When the lower left side of the figure moves a predetermined distance, the connecting beam 701-1 rotates about the central axis 701a-1, which serves as the axis, and moves in the positive direction relative to the Z-axis (e.g., from the front side of the sheet surface, which serves as the basic position Lb). Figure 52 The upper left side of the diagram) is moved to the other end of the IMU 201-102-1, which is 701b-1-2.

[0702] Conversely, for example, when an IMU 201-101-1 connected to an end 701b-1-1 is in the positive direction relative to the Z-axis (e.g., from the front side of the sheet surface as the basic position Lb) Figure 52 When the connecting beam 701-1 moves a predetermined distance on the upper side of the lower left part of the figure, it rotates about the central axis 701a-1, which serves as the axis, and in the negative direction relative to the Z-axis (e.g., from the rear side of the sheet surface, which serves as the basic position Lb). Figure 52 The lower left side of the figure) is moved to connect to the other end 701b-1-2 of the IMU 201-102-1.

[0703] Connecting beams 701-2 and 701-3 consist of similar drive mechanisms. Therefore, in the configuration of IMUs 201-101-1, 201-102-1, 201-101-2, and 201-102-2 in row A, the drive mechanisms of connecting beams 701-1 to 701-3 synchronously drive IMUs 201-101-1 and 201-102-1 in the same phase in the positive or negative direction of the Z-axis, and synchronously drive IMUs 201-101-2 and 201-102-2 in the same phase in the positive or negative direction of the Z-axis.

[0704] In addition, IMU 201-101-1 and IMU 201-102-1, as well as IMU 201-101-2 and IMU 201-102-2, are driven synchronously to be in opposite phases in the Z-axis direction.

[0705] In addition, such as Figure 52 As shown on the right side of the upper right part, IMU 201-101-1, IMU 201-103-1, IMU 201-101-3 and IMU 201-103-3 in column H1 are respectively connected to connecting beams 702-1 to 702-3.

[0706] The connecting beam 702-1 is composed of a frame, etc., and has a central axis 702a-1 fixed to the reference position Lb. The adjacent IMUs 201-101-1 and 201-103-1 are connected to the two ends 702b-1-1 and 702b-1-2 respectively.

[0707] For example, when an IMU 201-101-1 connected to an end 702b-1-1 is in the negative direction relative to the Z-axis (e.g., away from the rear side of the sheet surface as the basic position Lb, in other words, Figure 52 When the connecting beam 702-1 moves a predetermined distance from the right side of the basic position Lb in the upper right part, it rotates about the central axis 702a-1, which serves as the axis, and moves in the positive direction relative to the Z-axis (for example, away from the front side of the sheet surface that serves as the basic position Lb, in other words, Figure 52 Move the base position Lb to the left of the upper right part of the object by a predetermined distance.

[0708] Conversely, for example, when an IMU 201-101-1 connected to an end 702b-1-1 is in the positive direction relative to the Z-axis (e.g., away from the front side of the sheet surface as the basic position Lb, in other words, Figure 52 When the connecting beam 702-1 moves a predetermined distance on the right side of the basic position Lb in the upper right part, it rotates about the central axis 702a-1, which serves as the axis, and moves in the negative direction relative to the Z-axis (for example, away from the rear side of the sheet surface that serves as the basic position Lb, in other words, Figure 52 The basic position Lb in the upper right part of the basic position (left side) is moved to connect to the other end 702b-1-2 of the IMU 201-103-1 at a predetermined distance.

[0709] Connecting beams 702-2 and 702-3 consist of similar drive mechanisms. Therefore, in the configuration of IMUs 201-101-1, 201-103-1, 201-101-3, and 201-103-3 in column H1, the drive mechanisms of connecting beams 702-1 to 702-3 drive IMUs 201-101-1 and 201-101-3 synchronously in the positive or negative direction of the Z-axis, and drive IMUs 201-103-1 and 201-103-3 synchronously in the same phase in the positive or negative direction of the Z-axis.

[0710] In addition, IMU 201-101-1 and IMU 201-101-3, as well as IMU 201-103-1 and IMU 201-103-3, are driven synchronously to be in opposite phases in the Z-axis direction.

[0711] Each of the IMUs 201 configured in rows A through D consists of a drive mechanism similar to that of the IMU 201 in row A. For example, as Figure 52 As shown in the previous stage at the lower left, the IMUs 201 in rows B and D are driven in the Z-axis direction with a phase opposite to that of IMU 201 in row A, and as... Figure 52 As shown in the next stage at the lower left, IMU 201 in row C is driven in the Z-axis direction with the same phase as IMU 201 in row A.

[0712] Each IMU in columns H1 through H4 is configured with a drive mechanism similar to that of IMU 201 in column H1. Therefore, as... Figure 52 As shown on the upper right left side, IMUs 201 in columns H2 and H4 are driven in the Z-axis direction with the opposite phase to IMU 201 in column H1, and as... Figure 52 As shown on the right side of the upper right part, IMU201 in column H3 is driven in the Z-axis direction with the same phase as IMU201 in column H1.

[0713] According to this drive configuration, adjacent IMUs 201 arranged in rows A to D constituting IMU block 610BZ along the X-axis are driven alternately with opposite phases, using reference position Lb as their center in the Z-axis direction. Furthermore, adjacent IMUs 201 arranged in columns H1 to H4 along the Y-axis are driven alternately with opposite phases, using reference position Lb as their center in the Z-axis direction.

[0714] As a result, the IMU 201 constituting the IMU block 610BZ is driven synchronously with the IMU 201 adjacent to it in the vertical and horizontal directions in the Z-axis direction with opposite phases, and is driven synchronously with the IMU 201 adjacent to it in the left diagonal above, left diagonal below, right diagonal above, and right diagonal below in the Z-axis direction with the same phase.

[0715] Figure 52 This shows that when IMU 201-101-1 is in the negative direction along the Z-axis (e.g., behind the fundamental position Lb of the sheet surface, in other words...), Figure 52 The driving direction of each IMU 201 when it moves a predetermined distance from the right side of the basic position Lb in the upper right part of the sheet surface. Therefore, when IMU 201-101-1 moves in the positive direction of the Z-axis (e.g., from the front side of the basic position Lb, in other words, ...), Figure 52 When moving a predetermined distance on the left side of the basic position Lb in the upper right part, Figure 52 The driving direction of each IMU 201 shown in the figure changes to the opposite direction in the Z-axis direction.

[0716] <Deformation of the connecting beam>

[0717] <Example of a connecting beam connected to the side of the IMU>

[0718] In the IMU block 610BZ configured to eliminate vibration in the Z-axis direction, the variations of connecting beams 701 and 702 can be considered based on the connection positions to which the connecting beams are connected in the IMU 201.

[0719] For example, such as Figure 53 As shown, the central portion of the side of IMU 201 can be connected to the ends of connecting beams 701-201 to 701-203, so that IMUs 201-103-1, 201-104-1, 201-103-2, and 201-104-2 are connected to connecting beams 701-201 to 701-203.

[0720] <Example of connecting beams to the center position of the IMU>

[0721] In addition, for example, such as Figure 54 As shown, the IMU 201 can be connected to the center position of the ends of the connecting beams 701-301 to 701-303, so that IMUs 201-103-1, 201-104-1, 201-103-2, and 201-104-2 are connected to the connecting beams 701-301 to 701-303.

[0722] In this case, it is necessary to consider the interference of the IMU 201 body related to the drive of the connecting beam 701, and therefore, for example, as Figure 54 As shown, in order to avoid interference related to the drive of the connecting beam 701, the IMU 201 can be formed in an H shape when viewed from the top surface, so as to avoid interference related to the drive of the connecting beam 701.

[0723] Furthermore, the signal processing used to obtain the Coriolis force in the Z-axis direction is similar to that used for reference. Figure 51 The flowchart shown describes the signal processing for obtaining the Coriolis force in the X-axis direction, and therefore its description will be omitted.

[0724] <<21. Fourth Variation of the Fourth Embodiment>>

[0725] In the above signal processing, although the process of switching channels by switching unit 672 after signal processing is performed by signal processing unit 671 has been described, signal processing can be performed after switching the output channel of each IMU unit 610.

[0726] Figure 55This illustrates a configuration example of a multi-IMU 200 that performs signal processing after switching the output channel of each IMU unit 610.

[0727] exist Figure 55 In the multi-IMU 200 shown, the same reference numerals are assigned to those with the same... Figure 50 The components shown are those with the same function as the components of the multi-IMU 200, and their descriptions will be omitted.

[0728] exist Figure 55 Among the multiple IMUs 200 shown, with Figure 50 The difference in the multi-IMU 200 shown is that, instead of signal processing unit 671 and switching unit 672, it includes switching units 731 and 732 and signal processing unit 733.

[0729] The switching unit 731 is configured using terminals 731a-1 to 731a-4, switch 731b, and control unit 731c.

[0730] Terminals 731a-1 to 731a-4 receive the positive Coriolis force output in the X-axis direction from channels 1 to 4, which are the outputs of IMU units 610X-1 to 610X-4 of IMU block 610BX.

[0731] The control unit 731c controls the switch 731b to synchronize with the switching unit 732, and the switch 731b is sequentially switched to connect to terminals 731a-1 to 731a-4, and outputs the positive direction Coriolis force of channels 1 to 4, which are the outputs of IMU units 610X-1 to 610X-4, to the signal processing unit 733.

[0732] The switching unit 732 is configured using terminals 732a-1 to 732a-4, switch 732b, and control unit 732c.

[0733] Terminals 732a-1 to 732a-4 receive the negative Coriolis force output in the X-axis direction from channels 1 to 4, which are the outputs of IMU units 610X-1 to 610X-4 of IMU block 610BX.

[0734] The control unit 732c controls the switch 732b to synchronize with the switching unit 731, and the switch 732b is switched sequentially to connect to terminals 732a-1 to 732a-4, and the Coriolis force output in the negative X-axis direction of channels 1 to 4, which are the outputs of IMU units 610X-1 to 610X-4, is output to the signal processing unit 733.

[0735] The signal processing unit 733 includes a calculation unit 741, which calculates the Coriolis force of each channel based on the difference between the positive and negative Coriolis forces in the X-axis direction of channels 1 to 4 supplied from the switching units 731 and 732, according to the switching of the synchronized channels, and outputs the Coriolis force by controlling the calculation unit 741.

[0736] In other words, in switching units 731 and 732, the switching of channels is performed synchronously with each other. Therefore, calculation unit 741 calculates the Coriolis force of each channel based on the difference between the positive Coriolis force in the X-axis direction and the negative Coriolis force in the X-axis direction supplied from switching units 731 and 732 through the sequential switching of channels.

[0737] exist Figure 55 In the multi-IMU 200 shown, signal processing is performed after channel switching, and the positive and negative Coriolis forces are calculated by switching channels. As a result, the number of components required for calculation and processing in a later stage after IMU block 610BX can be simplified to two, and flicker noise can be reduced.

[0738] Although not shown in the figure, components corresponding to the switching units 731 and 732 for obtaining the Coriolis force in the Y-axis direction and the signal processing unit 733 also exist. Figure 55 In the middle, and its description will be omitted.

[0739] In addition, components along the Z-axis can be arranged similarly.

[0740] <Use Figure 55 Signal processing of multiple IMUs shown in the diagram >

[0741] Next, we will refer to Figure 56 The flowchart shown uses Figure 55 The signal processing of the multiple IMUs shown is illustrated.

[0742] In step S381, the control units 731c and 732c of switching units 731 and 732 synchronize with each other, and the count n for counting channels is initialized to 1.

[0743] In step S382, the control unit 731c is connected to the terminal 731a-n via the control switch 731b based on the count n.

[0744] In step S383, the control unit 732c is connected to terminals 732a-n via the count-based control switch 732b.

[0745] In step S384, switch 731b of switching unit 731 provides a positive Coriolis force in the X-axis direction of channel n of terminal 731a-n to signal processing unit 733, and switch 732b of switching unit 732 provides a negative Coriolis force in the X-axis direction of channel n of terminal 732a-n to signal processing unit 733.

[0746] In step S385, the calculation unit 741 of the signal processing unit 733 calculates the Coriolis force in the X-axis direction based on the positive Coriolis force in the X-axis direction of channel n provided by the switching unit 731 and the negative Coriolis force in the X-axis direction of channel n provided by the switching unit 732, thereby eliminating vibration and outputting the calculated Coriolis force.

[0747] In step S386, the control units 731c and 732c of switching units 731 and 732 determine whether the count n is 4. If the count is not 4, the process proceeds to step S387.

[0748] In step S387, the control units 731c and 732c of switching units 731 and 732 increment the count n by 1, and the process returns to step S382.

[0749] In other words, until the count n becomes 4, channel n is switched sequentially by one each time, and the Coriolis force of the corresponding channel n is switched and output to the signal processing unit 733.

[0750] Then, in step S387, if the count n is 4, the process proceeds to step S388.

[0751] In step S388, the control units 731c and 732c of switching units 731 and 732 determine whether to indicate the end of processing, and if there is no indication of end, the processing returns to step S381 and the subsequent processing is repeated.

[0752] In other words, until the instruction processing is finished, the channels are sequentially switched to 1 to 4, and the Coriolis force in the X-axis direction of the corresponding channel is output.

[0753] Then, in step S388, the process ends if the processing is indicated to be complete.

[0754] According to the above process, the positive and negative Coriolis forces in the X-axis direction corresponding to the IMU unit 610 divided into four channels are sequentially changed and output to the signal processing unit 733, and thus the number of components required for wave detection in the later stage of each channel can be reduced to 1 / 2.

[0755] In addition, the channel is changed, and the positive and negative Coriolis forces in the X-axis direction are output to the signal processing unit 733, thus reducing flicker noise.

[0756] Additionally, although similar processing is performed on the Coriolis force in the Y-axis direction and the Coriolis force in the Z-axis direction, and the Coriolis force can be obtained, only the axis direction is different, and the processing is basically the same, so its description will be omitted.

[0757] <<22. Fifth Variation of the Fourth Embodiment>>

[0758] In the description presented above, an example of IMU block 610B having two IMU units 610 in the horizontal × vertical direction has been described, and more IMU units 610 may be included.

[0759] In other words, such as Figures 57 to 59 As shown, the IMU unit 610 can be configured with a total of 16 4×4 units.

[0760] Figure 57 An example configuration of IMU block 610BXn is shown, in which IMU unit 610X formed by a drive mechanism that relieves vibration in the X-axis direction is set to 4×4.

[0761] also, Figure 58 An example configuration of IMU block 610BYn is shown, wherein the IMU unit 610Y formed by the drive mechanism that cancels vibration in the Y-axis direction is set to 4×4.

[0762] also, Figure 59 An example configuration of IMU block 610BZn is shown, wherein IMU unit 610Z, formed by a drive mechanism that eliminates vibration in the Z-axis direction, is set to 4×4.

[0763] Furthermore, for the IMU blocks 610BXn, 610BYn, and 610BZn in the XYZ axis directions, the number of IMU units 610 is not limited to 16, but can be any value, such as n. Additionally, the number in the horizontal direction and the number in the vertical direction do not need to be the same.

[0764] like Figure 60 As shown, the configuration of the multi-IMU 200 includes IMU block 610Bn, which is formed by IMU blocks 610BXn, 610Byn, and 610BZn associated with n IMU units. Figure 50 The configurations of the multiple IMU 200 shown are basically similar, where n IMU units are eliminated through expansion. Figures 57 to 59 The vibration in the XYZ axis direction is obtained by the drive mechanism shown.

[0765] In other words, Figure 60 The multi-IMU 200 shown includes an IMU block 610Bn, a signal processing unit 751, and a switching unit 752. Figure 60 Although only the configuration for implementing the signal processing corresponding to the drive mechanism for eliminating vibration in the X-axis direction is shown, signal processing units and switching units in the Y-axis and Z-axis directions, which are not shown in the figure, are also included.

[0766] IMU block 610Bn uses IMU unit 610 as units to output the positive and negative Coriolis forces in the X-axis direction for each unit channel. In other words, here, a channel represents n channels corresponding to the unit number n of IMU unit 610.

[0767] The signal processing unit 751 includes calculation units 761-1 to 761-n, calculates the Coriolis force for each channel, and outputs the calculated Coriolis force to the switching unit 752.

[0768] The switching unit 752 outputs the Coriolis force of the X-axis from the n channels provided by the signal processing unit 751 to the subsequent stage in a time-division manner.

[0769] More specifically, the switching unit 752 includes terminals 752a-1 to 752a-n, a switch 752b, and a control unit 752c.

[0770] Terminals 752a-1 to 752a-n receive the output of the Coriolis force of channel n from the signal processing unit 751.

[0771] Switch 752b is controlled by control unit 752c and has connections to terminals 752a-1 to 752a-n that are switched at predetermined time intervals, and thus outputs the Coriolis force of the X-axis of n channels to the subsequent stage in a time-division manner.

[0772] also, Figure 60 The signal processing of the multi-IMU 200 shown is a reference. Figure 51 The described process is for the case where there are n channels, so its description will be omitted.

[0773] Furthermore, when arranging n IMU units 610, similar to the reference... Figure 55 The described multi-IMU 200 can also be configured to perform signal processing after channel switching.

[0774] In the description given above, although an example of an IMU unit 610 with two IMUs in the horizontal direction and two IMUs in the vertical direction as the minimum unit has been described, the IMU unit 610 can be configured with a different number of IMUs, and for example, an IMU unit 610 with four IMUs 201 × four IMUs 201 as units can be formed.

[0775] In this scenario, 16 IMUs 201 can form a channel to perform signal processing.

[0776] Preferably, the number of IMUs 201 in the configuration of IMU unit 610 for each channel is the same as the number of IMUs 201 that detect the Coriolis force in the positive direction and the number of IMUs 201 that detect the Coriolis force in the negative direction.

[0777] However, the number of IMU 201s detecting the Coriolis force in the positive direction is not necessarily the same as the number detecting the Coriolis force in the negative direction. In this case, it is necessary to design a calculation method for each channel (i.e., for each IMU unit).

[0778] For example, a representative value of the positive Coriolis force can be obtained from the detection results acquired by multiple IMUs 201 that detect the positive Coriolis force, and a representative value of the negative Coriolis force can be obtained from the detection results acquired by multiple IMUs 201 that detect the negative Coriolis force. Furthermore, the Coriolis force of the IMU unit 610 corresponding to one channel can be obtained, so that vibration can be eliminated based on the difference between the representative value of the positive Coriolis force and the representative value of the negative Coriolis force.

[0779] <<23. Fifth Implementation Method>>

[0780] The configuration of the multiple IMU 200 has been described above, and the aforementioned multiple IMU 200 can be applied to hand shake correction in image sensors.

[0781] Figure 61 An example configuration is shown where a multi-IMU 200, including a drive mechanism capable of canceling vibrations in the XYZ axis directions, is applied to an image sensor.

[0782] like Figure 61 As shown in the lower part, a configuration of multiple IMU200, including a drive mechanism capable of eliminating vibrations in the XYZ axis directions, is attached to the rear side of the imaging surface of the image sensor 801.

[0783] As described above, the multiple IMU 200 consists of n IMU units 610, which include IMU blocks 610BXn, 610Y and 610BXn. The IMU blocks 610BXn, 610Y and 610BXn are formed by a drive mechanism capable of eliminating vibrations in the XYZ axis directions.

[0784] Therefore, angular velocity and acceleration can be detected for each cell region 801a corresponding to the area where the IMU cell 610 is arranged on the image sensor 801.

[0785] With this configuration, hand tremors can be corrected with high accuracy for each unit region 801a using signal processing based on the acceleration and angular velocity of the pin point detected in each unit region of the image captured by the image sensor 801.

[0786] <<24. First Variation of the Fifth Embodiment>>

[0787] In the description given above, although an example of applying hand shake correction using signal processing to the various cell regions 801a of the IMU unit 610 arranged on the image sensor 801 has been described, hand shake can be physically corrected using a drive mechanism instead of signal processing.

[0788] While hand tremor refers to imaging deviations that occur when a user operates the imaging device while holding it by hand, here, hand tremor refers to general deviations that occur during imaging. Therefore, for example, it is assumed that deviations in imaging caused by high-frequency vibrations generated by the motor or engine driven by the imaging device mounted on a moving object such as a drone or vehicle, driven by a motor, engine, etc., are included in hand tremor.

[0789] <Configuration example of an imaging device that achieves hand shake correction by driving optical blocks>

[0790] First, an overview of techniques for physically correcting hand tremors using a drive mechanism will be described. Figure 62 This is a configuration example of an imaging device that achieves hand shake correction by driving optical blocks.

[0791] Figure 62 The imaging device 1001 shown is configured with an optical block 1011, a reflector 1012, a shutter 1013, an image sensor 1014, and a drive unit 1015.

[0792] Optical block 1011 has a configuration formed by lenses for focus adjustment, etc., and transmits incident light, represented by solid lines, to be focused onto image sensor 1014 via reflector 1012 and shutter 1013. The incident light focused onto image sensor 1014 is represented by dashed lines. Furthermore, the waveform portion in the transmission path of the incident light, represented by solid lines, represents hand shake.

[0793] The reflector 1012 reflects a portion of the incident light to the viewfinder F (the viewfinder F that the user observes), and transmits the remaining incident light, along with a mirror not shown in the figure, through the shutter 1013 to the image sensor 1014.

[0794] The shutter 1013 is a component formed by a mechanical or electrical configuration that controls its opening and closing, and adjusts the exposure time of the light that passes through the image sensor 1014 via the incident light incident through the optical block 1011.

[0795] The image sensor 1014 is constructed using CMOS, CCD, etc., and captures images formed by pixel signals corresponding to the amount of incident light.

[0796] The drive unit 1015 is formed by an actuator or the like and drives the optical block 1011 in a direction perpendicular to the incident direction of the incident light.

[0797] More specifically, when a movement caused by hand tremor or the like is detected in the optical block 1011 using an IMU or other device not shown in the figure, the drive unit 1015 drives the optical block 1011 to cancel the detected movement.

[0798] In other words, in Figure 62 In the imaging device 1001 shown, the driving unit 1015 drives the optical block 1011 to cancel movement caused by hand tremors, thereby correcting hand tremors in the image captured by the image sensor 1014. Figure 62 In the diagram, the solid line represents the path of the incident light after it has been formed in a straight line by the drive unit 1015, which indicates the correction of hand tremors in the incident light by operating the drive unit 1015.

[0799] However, Figure 62 The driving unit 1015 of the imaging device 1001 shown needs to drive the optical block 1011 formed by lenses, etc., so a relatively large component is necessary. In addition, since the driving unit 1015 is a relatively large component, high-speed driving becomes difficult, and for example, it is difficult to achieve vibration elimination driving by performing driving that follows the high-frequency vibrations generated when the electric motor or engine is running.

[0800] <Configuration example of an imaging device that achieves hand shake correction by driving an image sensor>

[0801] Therefore, in this disclosure, by providing a driving unit for driving the image sensor 1014 instead of a driving unit 1015 for driving the optical block 1011, the configuration of the driving unit is reduced in size, and the driving unit is configured to follow high-frequency vibrations.

[0802] Figure 63 This is a configuration example of an imaging device that achieves hand shakiness correction by setting up a drive unit that drives the image sensor 1014. Figure 63 The imaging device 1021 shown is for having a similar Figure 62 Components of the same function as those in the imaging apparatus 1001 shown are assigned the same reference numerals, and their descriptions will be omitted as appropriate.

[0803] In other words, Figure 63 The imaging device 1021 shown is Figure 62 The difference in the imaging device 1001 shown is that it includes a driving unit 1031 for driving the image sensor 1014 instead of a driving unit 1015 for driving the optical block 1011.

[0804] The drive unit 1031 is formed by an actuator or the like and drives the image sensor 1014 in a direction perpendicular to the incident direction of the incident light.

[0805] When the image sensor 1014 is detected to move due to hand tremors or the like by means of an IMU (not shown in the figure), the drive unit 1031 drives the image sensor 1014 to cancel the detected movement.

[0806] exist Figure 63 In the imaging device 1021 shown, the image sensor 1014 is driven by the driving unit 1031 to eliminate movement caused by hand tremors, etc., and thus corrects hand tremors in the image captured by the image sensor 1014.

[0807] Because in Figure 63 The driving unit 1031 of the imaging device 1021 shown is configured to drive an image sensor 1014 that is smaller and lighter than an optical block 1011 formed by a lens or the like, so the driving unit 1031 can be configured to be relatively small.

[0808] Furthermore, since the drive unit 1031 is a relatively small and lightweight component, high-speed drive can be achieved, and for example, drive that eliminates vibration by following high-frequency vibrations generated according to the operation of the electric motor or engine can be achieved.

[0809] <Detailed configuration example of an imaging device that achieves hand shake correction by driving an image sensor>

[0810] Next, we will refer to Figure 64A detailed configuration example of an imaging device 1021 that achieves hand shake correction by driving an image sensor 1014 is described.

[0811] exist Figure 64 Among the components of the imaging device 1021 shown, the same reference symbols are assigned to those having the same... Figure 63 The components of the imaging device 1021 shown have the same function as those in the device, so their description will be omitted appropriately.

[0812] In other words, Figure 64 The imaging device 1021 shown has Figure 63 Detailed configuration of the imaging device 1021 shown.

[0813] Apart from Figure 63 In addition to the components of the imaging device 1021 shown, Figure 64 The imaging device 1021 shown also includes an IMU 1041, a position / pose detection unit 1042, and a drive control unit 1043.

[0814] The driving unit 1031 is described as being divided into driving units 1031a-1 and 1031a-2 and driving units 1031b-1 and 1031b-2. Driving units 1031a-1 and 1031a-2 drive the image sensor 1014 in the horizontal direction in the figure, and driving units 1031b-1 and 1031b-2 drive the image sensor 1014 in the vertical direction in the figure.

[0815] The IMU 1041 detects the acceleration and angular velocity of the main body of the imaging device 1021 and outputs the acceleration and angular velocity to the position / attitude detection unit 1042.

[0816] The position / attitude detection unit 1042 detects the position and attitude of the main body of the imaging device 1021 by integrating the acceleration and angular velocity detected by the IMU 1041, and outputs the position and attitude to the drive control unit 1043.

[0817] Based on the position and orientation information of the main body of the imaging device 1021 detected by the position / or orientation detection unit 1042, the drive control unit 1043 outputs control signals for driving the image sensor 1014 in the direction used to eliminate generated vibrations to drive units 1031a-1, 1031a-2, 1031a-1, and 1031a-2. In other words, the drive control unit 1043 controls the position and orientation of the image sensor 1014 by driving drive unit 1031 using inertial navigation or intermediate output signals (acceleration, velocity, angular velocity, and angle, which become intermediate variables) from IMU 1041 and position / or orientation detection unit 1042.

[0818] More specifically, the movement of the image sensor 1014 is transmitted from the drive unit 1031, etc., accompanying the main body of the imaging device 1021, and thus becomes a movement that follows the movement of the main body of the imaging device 1021. In other words, the movement of the image sensor 1014 is a movement that follows the movement of the main body of the imaging device 1021, and is obtained by delaying the movement of the imaging device 1021 by a predetermined time interval.

[0819] Therefore, the drive control unit 1043 predicts the movement of the image sensor 1014 based on the movement of the imaging device 1021 detected by the position / pose detection unit 1042, and provides control signals for driving the drive units 1031a-1, 1031a-2, 1031a-1 and 1031a-2 to cancel the predicted movement of the image sensor 1014.

[0820] Therefore, by performing feedforward control based on the detection results obtained by the position / pose detection unit 1042, the drive control unit 1043 controls the drive units 1031a-1, 1031a-2, 1031a-1 and 1031a-2, thereby canceling the movement of the image sensor 1014.

[0821] Each of the drive units 1031a-1, 1031a-2, 1031a-1 and 1031a-2 drives the image sensor 1014 based on the direction and amount of movement of the control signal provided from the drive control unit 1043.

[0822] As a result, based on the change in position and orientation of the imaging device 1021, the image sensor 1014 is driven in the direction used to eliminate hand shakiness, thereby achieving hand shakiness correction.

[0823] However, in Figure 64 In the configuration of the imaging device 1021 shown, the IMU 1041 is arranged outside the driving range of the driving units 1031a-1, 1031a-2, 1031a-1 and 1031a-2 that drive the image sensor 1014, and therefore the position and orientation of the image sensor 1014 cannot be properly detected even when the position and orientation of the main body of the imaging device 1021 can be properly detected.

[0824] Therefore, even when the image sensor 1014 is driven by the drive units 1031a-1, 1031a-2, 1031a-1, and 1031a-2, it may not be able to properly correct for hand shakiness. Furthermore, specifically, in cases where high-frequency vibrations are generated in the image sensor 1014, the IMU 1041 cannot detect changes in the position and orientation of the image sensor 1014 as high-frequency vibrations and cannot properly follow the movement, thus raising concerns about the inability to perform appropriate corrections.

[0825] <Overview of the imaging device according to the present invention>

[0826] Therefore, in this disclosure, an IMU is provided to detect the position and orientation of the image sensor 1014, and the drive unit 1031 is driven based on the changes in the position and orientation of the image sensor 1014 and the changes in the position and orientation of the main body of the imaging device.

[0827] Accordingly, the drive unit 1015 can be controlled to follow the movement of the image sensor 1014 with high accuracy, and thus can achieve correction of hand tremors, which also include high-frequency vibrations generated by the drive of a motor or engine.

[0828] Figure 65 An example configuration of an imaging device is shown, which includes an IMU for detecting the position and orientation of an image sensor 1014 and a drive unit 1031 driven based on the position and orientation of the image sensor 1014 and the position and orientation of the main body of the imaging device.

[0829] exist Figure 65 In the imaging apparatus 1061 shown, the same reference numerals are assigned to those having the same... Figure 64 The components of the imaging device 1021 shown herein have the same function as those in the imaging device 1021, and their descriptions will be omitted as appropriate.

[0830] In other words, Figure 65 The imaging device 1061 shown is Figure 64 The difference in the configuration of the imaging device 1021 shown is that an IMU 1081 and a position / attitude detection unit 1082 are newly arranged, and a drive control unit 1083 is arranged instead of a drive control unit 1043.

[0831] IMU 1081 is configured to integrate with image sensor 1014, detect the acceleration and angular velocity of image sensor 1014, and output the acceleration and angular velocity to position / pose detection unit 1082.

[0832] The position / pose detection unit 1082 detects the position and pose of the image sensor 1014 based on the acceleration and integral calculation of the acceleration provided by the image sensor 1014 from the IMU 1081, and outputs the position and pose to the drive control unit 1083.

[0833] Based on the position and orientation information of the main body of the imaging device 1061 provided by the position / or orientation detection unit 1042 and the position and orientation information of the image sensor 1014 provided by the position / or orientation detection unit 1082, the drive control unit 1083 calculates the target values ​​of the control quantities of the drive units 1031a-1, 1031a-2, 1031a-1 and 1031a-2 for maintaining the predetermined state of the position and orientation of the image sensor 1014.

[0834] Then, the drive control unit 1083 generates a control signal based on the calculated target value of the control quantity, and drives the drive units 1031a-1, 1031a-2, 1031a-1 and 1031a-2.

[0835] In other words, the drive control unit 1083 uses inertial navigation and intermediate output signals to control the position and orientation of the image sensor 1014 to remain in a predetermined state based on the position and orientation information of the main body of the imaging device 1061 provided by the position / orientation detection unit 1042 and the position and orientation information of the image sensor 1014 provided by the position / orientation detection unit 1082.

[0836] Furthermore, since a predetermined time delay occurs between the position and orientation of the main body of the imaging device 1061 provided by the position / orientation detection unit 1042 and the position and orientation of the actual image sensor 1014, as described above, only the position and orientation of the main body of the imaging device 1061 are used to perform feedforward control of the drive unit 1031.

[0837] However, the position and orientation information of the image sensor 1014 provided by the position / pose detection unit 1082 can be assumed to be the current position and orientation of the image sensor 1014 as a result of the driving performed by the driving units 1031a-1, 1031a-2, 1031a-1 and 1031a-2.

[0838] Therefore, the drive control unit 1083 can be regarded as simultaneously realizing feedforward control based on the position and posture of the main body of the imaging device 1061 provided by the position / posture detection unit 1042 and feedback control based on the position and posture of the image sensor 1014 provided by the position / posture detection unit 1082.

[0839] According to this configuration, by mounting the main body of the imaging device in a mobile object device such as a drone or a vehicle, the drive units 1031a-1, 1031a-2, 1031a-1 and 1031a-2 can be controlled to follow the movement (changes in position and posture) of the image sensor 1014 with high accuracy, and hand tremors can be corrected, which also include high-frequency vibrations generated by the operation of the motor and engine that serve as the power source.

[0840] <Example of the configuration of the imaging apparatus according to the first variation of the fifth embodiment>

[0841] Next, we will refer to Figure 66 An example configuration of an imaging apparatus according to a first variation of the fifth embodiment of the present disclosure is described. Figure 66 Although an example configuration of the imaging device 1101 being installed in a mobile object device 1100 such as a vehicle or a drone is shown, the imaging device 1101 may be configured not to be installed in the mobile object device 1100.

[0842] Figure 66 The imaging device 1101 shown is configured with a main unit 1111, an imaging unit 1112, and an output unit 1113 that outputs an image as an imaging result. The main unit 1111 controls operations for correcting hand tremors (including deviations caused by accompanying vibrations due to movement of the moving object device 1100). The imaging unit 1112 includes an image sensor that captures images.

[0843] The main unit 1111 includes an IMU 1131, a main body position / pose detection unit 1132, an image sensor position / pose detection unit 1133, a drive control unit 1134, a drive unit 1135, and a hand tremor correction processing unit 1136.

[0844] IMU 1131 corresponds to in Figure 65 The IMU 1041 shown in the figure detects the acceleration and angular velocity of the main body unit 1111 and outputs the acceleration and angular velocity to the main body position / attitude detection unit 1132.

[0845] The main body position / pose detection unit 1132 is corresponding to Figure 65 The position / pose detection unit 1042 shown includes a translational movement calculation unit 1151 and a rotational movement calculation unit 1152, which detects the position and pose of the main body unit 1111 and outputs the position and pose to the drive control unit 1134.

[0846] The translational movement calculation unit 1151 detects the position of the main body unit 1111 through integration calculation based on the acceleration information provided by the IMU 1131, and outputs the detected position to the drive control unit 1134.

[0847] The rotation and movement calculation unit 1152 detects the posture of the main body unit 1111 by integral calculation based on the angular velocity information provided by the IMU 1132 and outputs the detected posture to the drive control unit 1134.

[0848] The image sensor position / pose detection unit 1133 is essentially a component similar to the subject position / pose detection unit 1132, and is related to... Figure 65 The component corresponding to the position / pose detection unit 1082 shown in the figure. The image sensor position / pose detection unit 1133 includes a translational movement calculation unit 1171 and a rotational movement calculation unit 1172, detects the position and pose of the imaging unit 1112 (its image sensor 1181), and outputs the position and pose to the drive control unit 1134.

[0849] The translational motion calculation unit 1171 detects the position of the image sensor 1181 by performing an integral operation based on the acceleration information provided by the IMU 1182 of the imaging unit 1112, and outputs the detected position to the drive control unit 1134.

[0850] The rotation and movement calculation unit 1172 detects the pose of the image sensor 1181 by integrating the angular velocity information provided by the IMU 1182 of the imaging unit 1112, and outputs the detected pose to the drive control unit 1134.

[0851] Drive control unit 1134 and in Figure 65 Corresponding to the drive control unit 1083 shown, and based on the position and posture information of the main body unit 1111 provided by the main body position / posture detection unit 1132 and the position and posture information of the image sensor 1181 of the imaging unit 1112 provided by the image sensor position / posture detection unit 1133, the drive unit 1135 is controlled.

[0852] More specifically, the drive control unit 1134 includes a control quantity target value calculation unit 1134a, and calculates a control quantity target value for maintaining the position and orientation of the image sensor 1181 in a predetermined state based on the position and orientation information of the main unit 1111 and the position and orientation information of the image sensor 1181.

[0853] Then, the drive control unit 1134 generates a control signal for driving the drive unit 1135 based on the control quantity target value, which is the calculation result obtained by the control quantity target value calculation unit 1134a, and supplies the control signal to the drive unit 1135 to be driven.

[0854] The drive unit 1135 is a corresponding to the one in Figure 65 The actuators and other components of the drive unit 1031 (1031a-1, 1031a-2, 1031b-1 and 1031b-2) shown in the figure drive the position and orientation of the image sensor 1181 based on the control signal from the drive control unit 1134.

[0855] The drive control unit 1134 provides information on the changes in position and posture of the main body unit 1111 and the changes in position and posture of the image sensor 1181 to the hand tremor correction processing unit 1136.

[0856] The hand shake correction processing unit 1136 includes an image frame buffer 1136a, which buffers images provided from the image sensor 1181. Based on information about the position and pose of the main unit 1111 and the position and pose of the image sensor 1181, the hand shake correction processing unit 1136 corrects the buffered image captured by the image sensor 1181 through signal processing, and outputs the corrected image to the output unit 1113.

[0857] The following will be referenced Figure 67 Details of the image shake correction processing performed by the shake correction processing unit 1136 are described.

[0858] The imaging unit 1112 is configured using an image sensor 1181 and an IMU 1182. The image sensor 1181 is... Figure 65 The component corresponding to the image sensor 1014 shown captures an image formed by pixel signals corresponding to the amount of incident light, and provides the captured image to the hand shake correction processing unit 1136.

[0859] IMU 1182 corresponds to Figure 65 The components of IMU 1081 shown are configured to be integrated with image sensor 1181, thus detecting the acceleration and angular velocity of image sensor 1181 and outputting the acceleration and angular velocity to image sensor position / pose detection unit 1133.

[0860] Imaging unit 1112, for example, has a configuration in which multiple IMUs 200, having a drive mechanism capable of eliminating vibrations in the XYZ axis directions, are attached to... Figure 61 The rear side of the imaging surface of the image sensor 801 shown.

[0861] In other words, the image sensor 1181 is corresponding to Figure 61 The image sensor 801 shown is a component, and IMU 1182 is a component corresponding to multiple IMUs 200.

[0862] Thus, similar to the multi-IMU 200, the IMU 1182 is configured using N IMU units 610 including IMU blocks 610BXn, 610Y and 610BXn, which are formed by drive mechanisms capable of canceling vibrations in the XYZ axis directions.

[0863] Therefore, image sensor 1181 and IMU 1182 can also be used for each cell region of image sensor 801 ( Figure 61 The IMU unit 610 set in the unit area 801a) shown in the figure is used as a unit to detect acceleration and angular velocity.

[0864] The output unit 1113 outputs an image corrected by the hand shake correction processing unit 1136. More specifically, the output unit 1113 includes an image recording unit 1191 and a transmission unit 1192.

[0865] The image recording unit 1191 records the image corrected by the hand shake correction processing unit 1136 as data.

[0866] The transmission unit 1192 is configured, for example, using Ethernet, and transmits the image corrected by the hand shakiness correction processing unit 1136 to an external information processing device, communication terminal, etc. via a network not shown in the figure.

[0867] The output unit 1113 can have any other configuration, for example, it can be configured to use a display with display function, and can display the image corrected by the hand shake correction processing unit 1136.

[0868] Therefore, in Figure 66 In the imaging device 1101 shown, the drive control unit 1134 controls the position and posture of the imaging device 1101 to remain in a predetermined state based on the position and posture information of the main body of the imaging device 1101 provided by the main body position / posture detection unit 1132 and the position and posture information of the image sensor 1181 provided by the image sensor position / posture detection unit 1133, using inertial navigation and intermediate output signals.

[0869] Furthermore, a predetermined time delay occurs between the position and orientation of the main unit 1111 of the imaging device 1101 provided by the main body position / pose detection unit 1132 and the position and orientation of the actual image sensor 1181. Therefore, feedforward control is performed solely by the drive unit 1135 using only the position and orientation of the main body of the imaging device 1101.

[0870] However, the position and orientation information of the image sensor 1181 provided by the image sensor position / pose detection unit 1133 can be assumed to be the current position and orientation of the image sensor 1181 as a result of the drive performed by the drive unit 1135.

[0871] Therefore, the drive control unit 1134 can be regarded as simultaneously implementing feedforward control of the drive unit 1135 based on the position and posture of the main unit 1111 of the imaging device 1101 provided by the main body position / posture detection unit 1132 and feedback control of the drive unit 1135 based on the position and posture of the image sensor 1181 provided by the image sensor position / posture detection unit 1133.

[0872] <Hand Shake Correction Process>

[0873] In the drive of the drive unit 1135 controlled by the drive control unit 1134, there is a time delay between the provision of the control signal and the actual drive, and therefore there is a possibility that hand tremors that vibrate at a speed higher than the predetermined speed cannot be corrected.

[0874] The hand tremor correction processing unit 1136 corrects hand tremors that cannot be corrected by the drive unit 1135 by using signal processing, based on the position and posture of the main unit 1111 of the imaging device 1101 provided by the main body position / posture detection unit 1132, and the position and posture of the image sensor 1181 provided by the image sensor position / posture detection unit 1133 provided by the drive control unit 1134.

[0875] As described above, the imaging unit 1112, for example, includes a multi-IMU 200 attached to a drive mechanism capable of eliminating vibrations in the XYZ axis directions. Figure 61 The image sensor 801 is configured on the rear side of the imaging surface.

[0876] For this purpose, IMU 1182 can output acceleration and angular velocity for each cell region of image sensor 1181 corresponding to IMU cell 610.

[0877] Therefore, the image sensor position / pose detection unit 1133 uses the IMU unit 610 as a unit to acquire position and pose information and outputs the acquired information to the drive control unit 1134.

[0878] The drive control unit 1134 uses the IMU unit 610 as a unit provided by the image sensor position / pose detection unit 1133 to acquire and store the position and pose information of the image sensor 1181, and provides the acquired information to the hand shake correction processing unit 1136.

[0879] Correspondingly, the image sensor 1181 uses the cell region of the IMU unit 610, in which the IMU 1182 is configured, to output an image formed by pixel signals to the hand shake correction processing unit 1136. In the following text, the group of pixels corresponding to the cell region of the IMU unit 610 on the image sensor 1181 will also be referred to as a pixel unit.

[0880] The image sensor 1181 of the imaging unit 1112 outputs pixel signals to the hand shake correction processing unit 1136 in units of pixels.

[0881] The hand shake correction processing unit 1136 obtains a pixel-level motion vector from the position and pose information of the image sensor 1181 in units of IMU unit 610, performs correction processing corresponding to the motion vector on the pixel signals provided by the corresponding image sensor 1181, and buffers the generated pixel signals in the image frame buffer 1136a.

[0882] In other words, the hand shake correction processing unit 1136 repeats the following process: obtaining a motion vector from position and pose information provided in units of IMU units that are unit regions, performing hand shake correction processing on the corresponding image in units of pixel units based on the obtained motion vector, buffering the corrected image, and outputting the corrected image to the output unit 1113 when buffering the image corresponding to a frame.

[0883] For example, in the case where the image sensor 1181 has N unit regions (pixel units #1 to #N and IMU units #1 to #N are present) having IMU units and pixel units as units, such as Figure 67 As shown in the timing diagram, the hand tremor correction processing unit 1136 processes the data sequentially.

[0884] exist Figure 67 In the middle, starting from the top, the image sensor 1181 shows the reading timing in units of pixels, the IMU 1182 shows the reading timing of acceleration and angular velocity (position and attitude) in units of IMU units, the timing of the hand shake correction processing unit 1136 performing correction processing, the writing timing of the image frame buffer 1136a, the accumulation timing of the image frame buffer 1136a, and the image frame output timing.

[0885] In other words, when the synchronization signal representing the reading of the image frame synchronization signal n starts at the timing indicated by the frame synchronization signal SyncFn, the unit synchronization signal representing the reading of pixel unit #1 as the first pixel unit is assumed to be the unit synchronization signal SyncU#1. Furthermore, for example, the frame synchronization signal is 30Hz, 60Hz, 120Hz, etc., and for example, the unit synchronization signal is approximately 1kHz to 10kHz.

[0886] When the synchronization signal SyncFn = the unit synchronization signal SyncU#1, when the reading of image frame n begins, firstly, the pixel signal of pixel unit #1 is read by the image sensor 1181 and the pixel signal is provided to the hand shake correction processing unit 1136.

[0887] Furthermore, the acceleration and angular velocity of the corresponding IMU unit #1 are simultaneously read in IMU 1182. Then, the image sensor position / pose detection unit 1133 detects the position and pose information of the cell region corresponding to IMU unit #1 in image sensor 1181, and provides the detected information to the drive control unit 1134. In addition, the drive control unit 1134 provides the position and pose information of the cell region corresponding to IMU unit #1 in image sensor 1181 to the hand shake correction processing unit 1136.

[0888] At timing t1, which is the next timing, the hand shake correction processing unit 1136 obtains a motion vector based on the position and pose information of the cell region corresponding to IMU cell #1, uses the obtained motion vector to perform hand shake correction processing on the pixel signal of the corresponding pixel cell #1, and stores the result signal in the image frame buffer 1136a.

[0889] Subsequently, for the unit synchronization signal SyncU#2, the pixel signal of pixel unit #2 is read by the image sensor 1181 and provided to the hand shake correction processing unit 1136.

[0890] In addition, IMU 1182 simultaneously reads the acceleration and angular velocity of the corresponding IMU unit #2. Then, image sensor position / pose detection unit 1133 detects the position and pose information of the cell region corresponding to IMU unit #2 in image sensor 1181, and provides the detected information to drive control unit 1134. Furthermore, drive control unit 1134 provides the position and pose information of the cell region corresponding to IMU unit #2 in image sensor 1181 to hand shake correction processing unit 1136.

[0891] Then, at the next timing t2, the hand shake correction processing unit 1136 obtains the motion vector based on the position and pose information of the cell region corresponding to the IMU cell #2, uses the obtained motion vector to perform hand shake correction processing on the pixel signal of the corresponding pixel cell #2, and stores the result signal in the image frame buffer 1136a.

[0892] Subsequently, similar processing is repeated until pixel unit #N and IMU unit #N. When image data corresponding to a frame that has undergone hand shake correction processing is buffered in image frame buffer 1136a, hand shake correction processing unit 1136 outputs the image signal of frame n buffered in image frame buffer 1136a to output unit 1113 with frame synchronization signal SyncF(n+1) = unit synchronization signal SyncU#1 (which becomes the timing for reading the next frame (n+1)).

[0893] Furthermore, in the calculation of the target value of the control quantity of the drive unit 1135 used to drive the position and orientation of the image sensor 1181, the position and orientation of each unit region (i.e., acquired on a per IMU unit basis) can be used, and the control of the drive unit 1135 can be executed at a high frequency.

[0894] Furthermore, when calculating the target value of the control quantity, the target value of the control quantity can be obtained statistically from the position and pose acquired on a unit basis corresponding to an IMU cell of a frame. For example, the target value of the control quantity can be obtained using information such as the average value, or the target value of the control quantity can be obtained using the position and pose information of a specific cell region.

[0895] <Imaging Processing>

[0896] Next, refer to Figure 68 The flowchart shown describes the use of Figure 66 The imaging processing of the imaging device 1101 shown.

[0897] In step S401, IMU 1131 detects the acceleration and angular velocity of the main body unit 1111 and outputs the acceleration and angular velocity to the main body position / attitude detection unit 1132.

[0898] In step S402, the translational movement calculation unit 1151 of the main body position / attitude detection unit 1132 uses integral calculation based on the acceleration information provided from the IMU 1131 to detect the position of the main body unit 1111, and outputs the detected position to the drive control unit 1134. The rotational movement calculation unit 1152 of the main body position / attitude detection unit 1132 uses integral calculation based on the angular velocity information provided from the IMU 1132 to detect the attitude of the main body unit 1111, and outputs the detected attitude to the drive control unit 1134.

[0899] In step S403, image sensor 1181 captures an image.

[0900] In step S404, the image sensor 1181 and IMU 1182 set the unprocessed cell regions in the cell regions corresponding to the pixel units and IMU units as the cell regions of interest.

[0901] In step S405, the image sensor 1181 reads the pixel signal of the pixel unit corresponding to the unit of interest area and outputs the read pixel signal to the hand shake correction processing unit 1136.

[0902] In step S406, IMU 1182 detects the acceleration and angular velocity of the image sensor 1181 of the IMU unit corresponding to the region of interest, and outputs the acceleration and angular velocity to the image sensor position / pose detection unit 1133.

[0903] In step S407, the translational motion calculation unit 1171 of the image sensor position / pose detection unit 1133 detects the position of the region of interest in the image sensor 1181 using integration operations based on the acceleration information of the IMU cell corresponding to the region of interest provided by the IMU 1182, and outputs the detected position to the drive control unit 1134. The rotational motion calculation unit 1172 of the image sensor position / pose detection unit 1133 detects the pose of the region of interest in the image sensor 1181 using integration operations based on the angular velocity information of the IMU cell corresponding to the region of interest provided by the IMU 1182 of the imaging unit 1112, and outputs the detected pose to the drive control unit 1134.

[0904] The drive control unit 1134 provides the position and posture information of the main unit 1111 of the image sensor 1181 and the position and posture information of the area of ​​interest to the hand shake correction processing unit 1136.

[0905] In step S408, the hand shake correction processing unit 1136 obtains a motion vector in units of pixels of the unit of interest based on the position and pose information of the main unit 1111 and the position and pose information of the unit of interest region of the image sensor 1181, and performs hand shake correction processing using the obtained motion vector in units of pixels of the unit of interest region.

[0906] In step S409, the hand shake correction processing unit 1136 buffers the pixel signal of the interest unit region that has undergone hand shake correction processing in the image frame buffer 1136a.

[0907] In step S410, the image sensor 1181 and the IMU 1182 determine whether there are any unprocessed cell regions in the cell regions corresponding to the pixel cells and IMU cells.

[0908] In step S410, if there are unprocessed cell regions, the processing returns to step S404.

[0909] In other words, before performing hand shake correction processing on all cell regions, the processing of steps S404 to S410 is repeated, and the processing of performing hand shake correction processing on each cell region and buffering data in the image frame buffer 1136a is repeated.

[0910] Then, after performing hand shake correction on all cell regions and if there are no cell regions that were not processed in step S410, the process proceeds to step S411.

[0911] In step S411, the hand shake correction processing unit 1136 reads the image that has undergone hand shake correction processing corresponding to a frame buffered in the image frame buffer 1136a, and outputs the read image to the output unit 1113.

[0912] In step S412, the drive control unit 1134 generates a control signal for controlling the drive unit 1135 based on the position and posture information of the main body unit 1111 provided by the main body position / posture detection unit 1132 and the position and posture information of the image sensor 1181 of the imaging unit 1112 provided by the image sensor position / posture detection unit 1133, and outputs the generated control signal to the drive unit 1135.

[0913] More specifically, by controlling the control quantity target value calculation unit 1134a, the drive control unit 1134 uses the drive unit 1135 for setting the position and orientation of the image sensor 1181 to a predetermined state, and calculates the control quantity target value based on the position and orientation information of the main unit 1111 and the position and orientation information of the image sensor 1181.

[0914] In step S413, the drive control unit 1134 generates a control signal for driving the drive unit 1135 based on the control quantity target value, which is the calculation result obtained by the control quantity target value calculation unit 1134a, and supplies the generated control signal to the drive unit 1135 to control the drive.

[0915] In step S414, it is determined whether the imaging process has been indicated to end, and if no indication of end has been given, the process returns to step S401.

[0916] In other words, repeat steps S401 to S414 until the imaging process is indicated to end.

[0917] Then, in step S414, the process ends if the imaging process has already been indicated to end.

[0918] According to the above process, in addition to the information on the position and orientation of the main unit 1111, the position and orientation of the image sensor 1181 are controlled by the drive unit 1135 based on the information on the position and orientation of the image sensor 1181, and it is possible to achieve high-accuracy and high-speed correction of hand shake according to the image sensor 1181.

[0919] Specifically, since the IMU 1182 is arranged in an integrated state with the image sensor 1181, the position and orientation of the image sensor 1181 detected by using the IMU 1182 are appropriately detected, and thus, the imaging device 1101 installed in a moving object device 1100 such as a drone or a vehicle can correct hand shake (deviation according to high-frequency vibration of a drive motor or the like of the moving object device 1100) caused by high-frequency vibration of a drive motor or the like of the moving object device 1100.

[0920] In addition, based on the information on the position and orientation detected for each unit region having an image unit corresponding to the IMU unit, the image captured by using the image sensor 1181 can be corrected by signal processing, and thus, hand shake can be corrected with higher accuracy.

[0921] In the description given above, although an example of obtaining a motion vector based on the information on the position and orientation of the main unit 1111 and the information on the position and orientation of the image sensor 1181 and implementing a hand shake correction process has been described, the influence of high-frequency vibration on the position and orientation of the main unit 1111 is considered to be low, and thus, the motion vector can be obtained only from the information on the position and orientation of the image sensor 1181, and the hand shake correction process can be implemented by using signal processing.

[0922] <Number of IMU units and accuracy of hand shake correction>

[0923] In the description presented above, although an example in which N IMU units are configured for one image sensor 1181 has been described, N can be 1 or more.

[0924] Therefore, for example, as shown in the left part of Figure 69 the IMU unit 610B1 in the case where N is 1 can be used, as shown in the central part of Figure 69 the IMU unit 610B4 in the case where N is 4 can be used, as shown in the right part of Figure 69 the IMU unit 610B16 in the case where N is 16 can be used, and N can be larger than this.

[0925] Furthermore, while high-accuracy hand shake correction can be achieved by increasing the number N of IMU units 610, the processing load and power consumption increase with the number of units, and the cost also increases. Therefore, there is a trade-off between the accuracy of hand shake correction processing and the processing load, power consumption, and cost. For this reason, it is preferable to determine the number of IMU units 610 based on the required accuracy and cost for the purpose.

[0926] <<25. Second variation of the fifth embodiment>>

[0927] In the descriptions presented above, although the relationship with Figure 61 The image sensor 801 shown and the multiple IMU 200 are similarly configured as an example of an integrated imaging unit 1112, but the image sensor 1181 and IMU 1182 can be configured to contact each other and can be in any other configuration, as long as the position and orientation of the image sensor 1181 are acquired by the IMU 1182.

[0928] For example, such as Figure 70 As shown, the IMU 1182, as a single unit, can be configured to contact the side portion of the image sensor 1181.

[0929] Figure 70 This illustrates a configuration example where the drive unit 1135 is also integrated near the image sensor 1181. In other words, as... Figure 70 As shown, the imaging unit 1112 may have a configuration in which an image sensor 1181, an IMU 1182 and a driving unit 1135 are integrated, and, for example, may be formed into a package structure of an imaging element obtained by forming them as a single unit.

[0930] Furthermore, the imaging unit 1112 may have a driving unit 1135 further integrated with a referenced... Figure 60 The image sensor 801 and the multi-IMU 200 are integrated in a configuration described, and, for example, an imaging element package structure can be formed by integrating them into one unit.

[0931] <<26. Third variation of the fifth embodiment>>

[0932] In the description presented above, although an example has been described in which the acceleration and angular velocity of the image sensor 1181 are acquired via the IMU 1182 and the position and orientation are detected, any other configuration may be used as long as the position and orientation of the image sensor 1181 are acquired.

[0933] For example, such as Figure 71 As shown, a position detection unit utilizing Hall elements can be used.

[0934] In other words, Figure 71 The position detection unit 1201 shown consists of magnets 1211-1 and 1211-2 and Hall elements 1212-1 and 1212-2.

[0935] Magnets 1211-1 and 1211-2 are arranged such that the magnetization directions of the magnets are aligned in each of the vertical and horizontal directions of the image sensor 1181.

[0936] With the image sensor 1181 located at the origin, Hall elements 1212-1 and 1212-2 are fixedly arranged to coincide with the magnetic pole boundary lines of the S / N poles of magnets 1211-1 and 1211-2.

[0937] According to this arrangement, when the image sensor 1181 moves, the magnetic field applied to the Hall elements 1212-1 and 1212-2 changes proportionally to the amount of movement of the magnets, wherein the boundary line between the S poles / N poles of the magnets 1211-1 and 1211-2 is set at the center.

[0938] By measuring this magnetic field, the positions of magnets 1211-1 and 1211-2 within the range of the horizontal and vertical directions can be detected.

[0939] Can be used as Figure 71 The position detection unit 1201 shown is used to detect the position of the image sensor 1181.

[0940] However, by using such Figure 71 The position detection unit 1201 shown can detect position changes in the planar direction corresponding to the imaging surface of the image sensor 1181, but it cannot detect changes in the incident direction. Therefore, as a countermeasure, the magnet 1211 and the Hall element 1212 can be arranged separately in the incident direction of the incident light.

[0941] Furthermore, the IMU 1182 and the position detection unit 1201 can be used in combination.

[0942] <<27. Examples of using software to perform processing>>

[0943] The above series of processes can be performed by hardware or software. When using software to perform the series of processes, the program configuring the software is installed from a record into a computer built into dedicated hardware, or, for example, a general-purpose computer capable of performing various functions by installing various programs.

[0944] Figure 72This illustrates a configuration example of a general-purpose computer. The personal computer has a built-in central processing unit (CPU) 11001. An input / output interface 11005 is connected to the CPU 11001 via a bus 11004. Read-only memory (ROM) 11002 and random access memory (RAM) 11003 are connected to the bus 11004.

[0945] Input unit 11006, output unit 11007, storage unit 11008, and communication unit 11009 are connected to input / output interface 11005. Input unit 11006 is formed by an input device such as a keyboard or mouse to which the user inputs operation commands. Output unit 11007 outputs the processing operation screen or image of the processing result to a display device. Storage unit 11008 is formed by a hard disk drive or the like to store programs and various data. Communication unit 11009 is formed by a local area network (LAN) adapter or the like and performs communication processing via a network represented by the Internet. In addition, a drive 11010 that reads data from / writes data to a removable storage medium 11011, such as a disk (including floppy disk), optical disk (including CD-ROM and DVD), magneto-optical disk (including microdisk (MD)), or semiconductor memory, is connected to input / output interface 11005.

[0946] The program is stored in ROM 11002 or read from removable storage medium 11011 (such as a disk, optical disk, magneto-optical disk, or semiconductor memory) and installed in storage unit 11008. CPU 11001 performs various processes based on the program loaded from storage unit 11008 into RAM 11003. In RAM 11003, CPU 11001 performs various processes and also appropriately stores necessary data, etc.

[0947] In a computer with the above configuration, for example, CPU 11001 performs the above series of processes by loading a program stored in storage unit 11008 into RAM 11003 and executing the program via input / output interface 11005 and bus 11004.

[0948] For example, a program executed by a computer (CPU 11001) can be recorded on a removable storage medium 11011, which serves as a packaging medium for supply. The program can also be provided via wired or wireless transmission media such as a local area network, the Internet, or digital satellite broadcasting.

[0949] In a computer, by installing the removable storage medium 11011 on the drive 11010, a program can be installed in the storage unit 11008 via the input / output interface 11005. The program can be received via the communication unit 11009 through a wired or wireless transmission medium for installation in the storage unit 11008. Alternatively, the program can be pre-installed in the ROM 11002 or the storage unit 11008.

[0950] It should be noted that a program executed by a computer may be a program that is processed sequentially in the order described in this specification, or it may be a program that is processed in parallel or at necessary timed intervals, such as when a call time is required.

[0951] in addition, Figure 72 The CPU 11001 implementation shown Figure 66 The functions of the drive control unit 1134 and the hand tremor correction processing unit 1136 shown are illustrated.

[0952] In this specification, a system means a group of multiple components (devices, modules (parts), etc.), and all components may or may not be contained in the same housing. Therefore, multiple devices and multiple modules housed in separate housings and connected via a network, and a single device housed in a housing, constitute a system.

[0953] It should be noted that the embodiments of this disclosure are not limited to the above-described embodiments, and modifications can be made in various ways without departing from the spirit of this disclosure.

[0954] For example, this disclosure can be configured as a cloud computing solution, in which multiple devices share and collaborate to process a function via a network.

[0955] In addition, each step described in the flowchart above can be performed by a single device or by multiple devices in a shared manner.

[0956] Furthermore, in cases where a step includes multiple processes, the multiple processes included in a step can be executed by a single device or by multiple devices in a shared manner.

[0957] In addition, the following configurations may be used in this disclosure.

[0958] <1> A solid-state imaging element, comprising:

[0959] An image sensor is configured to capture images; and

[0960] An inertial measurement unit (IMU) is integrated with the image sensor and configured to detect the acceleration and angular velocity of the image sensor.

[0961] The IMU outputs the acceleration and angular velocity of the image sensor to the drive control unit that controls the drive of the image sensor.

[0962] <2> according to <1> Solid-state imaging elements, where the IMU is a multi-IMU composed of multiple IMUs.

[0963] <3> according to <2> The solid-state imaging element in the image sensor is configured such that, when the image sensor is divided into multiple regions, each of the multiple IMUs is configured with multiple IMUs to detect acceleration and angular velocity for each unit region with the divided regions as units, and outputs the acceleration and angular velocity of each unit region to the drive control unit in sequence.

[0964] <4> according to <3> In a solid-state imaging element, when each of the multiple IMUs sequentially outputs the acceleration and angular velocity of each unit region to the drive control unit, the image sensor outputs an image to the corresponding unit region.

[0965] <5> according to <1> The solid-state imaging element in the image sensor is a single unit. The image sensor detects the acceleration and angular velocity of the image sensor and outputs the acceleration and angular velocity of the image sensor to the drive control unit in sequence.

[0966] <6> according to <1> The solid-state imaging element also includes a driving unit configured to control the position and orientation of the image sensor.

[0967] The drive control unit controls the position and orientation of the image sensor by using inertial navigation based on the acceleration and angular velocity of the image sensor and controlling the drive executed by the drive unit through intermediate output signals.

[0968] <7> according to <6> Solid-state imaging elements, in which the driving unit is the actuator that drives the image sensor.

[0969] <8> An imaging device, comprising:

[0970] Solid-state imaging elements, including:

[0971] An image sensor is configured to capture images, and

[0972] An inertial measurement unit (IMU) is integrated with an image sensor and configured to detect the acceleration and angular velocity of the image sensor.

[0973] The drive unit is configured to control the position and orientation of the image sensor; and

[0974] The drive control unit is configured to control the position and attitude of the image sensor by using inertial navigation based on the acceleration and angular velocity of the image sensor and intermediate output signals to control the drive performed by the drive unit.

[0975] <9> according to <8> The imaging device also includes an image sensor position / pose detection unit, which is configured to detect the position and pose of the image sensor using integral calculations based on the acceleration and angular velocity of the image sensor.

[0976] The drive control unit uses feedback control based on the position and posture of the image sensor to control the drive performed by the drive unit.

[0977] <10> according to <8> The imaging device also includes a separate IMU, which is integrated with the main body of the device and configured to detect the acceleration and angular velocity of the main body of the device.

[0978] The drive control unit uses the inertial direction based on the acceleration and angular velocity of the image sensor detected by the IMU and the acceleration and angular velocity of the main body of the device detected by another IMU to control the drive performed by the drive unit.

[0979] <11> Imaging device described in <10> It also includes: an image sensor position / pose detection unit, configured to detect the position and pose of the image sensor using integral calculations based on the image sensor's acceleration and angular velocity; and

[0980] The main body position / attitude detection unit is configured to detect the position and attitude of the main body using integral calculations based on the acceleration and angular velocity of the main body.

[0981] The drive control unit uses feedback control based on the position and posture of the image sensor and feedforward control based on the position and posture of the device body to control the drive executed by the drive unit.

[0982] <12> according to <11> The imaging device also includes a control quantity target value calculation unit, which is configured to calculate control quantity target values ​​related to the drive performed by the drive unit based on the position and pose of the image sensor and the position and pose of the device body.

[0983] The drive control unit controls the drive executed by the drive unit based on the target value of the control quantity.

[0984] <13> according to <8> to <12> The imaging apparatus of any one of the above further includes a correction unit configured to correct the image captured by the image sensor based on the acceleration and angular velocity of the image sensor.

[0985] <14> according to <13> An imaging device, wherein the IMU is a multi-IMU composed of multiple IMUs.

[0986] <15> exist <14> The imaging device described in the document,

[0987] When the image sensor is divided into multiple regions, each of the multiple IMUs configured with multiple IMUs detects acceleration and angular velocity for each unit region, with the divided region as the unit.

[0988] When each of the multiple IMUs detects acceleration and angular velocity for each cell region, the image sensor outputs an image to the corresponding cell region, and

[0989] The correction unit corrects the image of each cell region based on the acceleration and angular velocity of each cell region.

[0990] <16> according to <15> The imaging device further includes: an image sensor position / pose detection unit, configured to detect the position and pose of each cell region of the image sensor using integral calculations based on the acceleration and angular velocity of each cell region of the image sensor.

[0991] The correction unit corrects the image of each unit region based on the position and pose of each unit region of the image sensor.

[0992] <17> according to <8> An imaging device in which the IMU is a single entity that detects the acceleration and angular velocity of the image sensor.

[0993] <18> according to <8> to <17> An imaging device according to any one of the following, wherein the driving unit is an actuator that drives the image sensor.

[0994] <19> A method for operating an imaging device, comprising:

[0995] A solid-state imaging element includes: an image sensor configured to capture an image and an inertial measurement unit (IMU) integrally arranged with the image sensor and configured to detect the acceleration and angular velocity of the image sensor; and

[0996] The drive unit is configured to control the position and orientation of the image sensor.

[0997] The method includes:

[0998] The steps for controlling the position and orientation of the image sensor are achieved by using inertial navigation based on the acceleration and angular velocity of the image sensor and controlling the drive performed by the drive unit.

[0999] <20> A program that enables a computer to control an imaging device, the imaging device comprising:

[1000] A solid-state imaging element, comprising an image sensor configured to capture an image and an inertial measurement unit (IMU) integrally arranged with the image sensor and configured to detect the acceleration and angular velocity of the image sensor; and

[1001] The drive unit is configured to control the position and orientation of the image sensor.

[1002] Used as a drive control unit, it is configured to control the position and orientation of the image sensor by controlling the drive performed by the drive unit using inertial navigation based on the acceleration and angular velocity of the image sensor and intermediate output signals.

[1003] <21> A device for moving an object, comprising:

[1004] Imaging device, including:

[1005] A solid-state imaging element, comprising an image sensor configured to capture an image and an inertial measurement unit (IMU) arranged integrally with the image sensor and configured to detect the acceleration and angular velocity of the image sensor;

[1006] The drive unit is configured to control the position and orientation of the image sensor; and

[1007] The drive control unit is configured to control the position and orientation of the image sensor by controlling the drive performed by the drive unit using inertial navigation based on the acceleration and angular velocity of the image sensor and intermediate output signals.

[1008] <22> according to <21> The moving object device further includes: an image sensor position / pose detection unit, which is configured to detect the position and pose of the image sensor using integral calculations based on the acceleration and angular velocity of the image sensor.

[1009] The drive control unit uses feedback control based on the position and posture of the image sensor to control the drive executed by the drive unit.

[1010] <23> according to <21> The moving object device also includes another IMU, distinct from the IMU, which is integrally mounted with the main body of the imaging device and configured to detect the acceleration and angular velocity of the main body of the imaging device.

[1011] The drive control unit uses the inertial direction based on the acceleration and angular velocity of the image sensor detected by the IMU and the acceleration and angular velocity of the main body of the imaging device detected by another IMU to control the drive performed by the drive unit.

[1012] <24> according to <23> The moving object device also includes:

[1013] An image sensor position / pose detection unit is configured to detect the position and pose of the image sensor using integral calculations based on the image sensor's acceleration and angular velocity; and

[1014] The subject position / pose detection unit is configured to detect the position and pose of the subject of the imaging device using integral calculations based on the acceleration and angular velocity of the subject.

[1015] The drive control unit uses feedback control based on the position and posture of the image sensor and feedforward control based on the position and posture of the imaging device to control the drive performed by the drive unit.

[1016] <25> according to <23> The moving object device further includes: a control quantity target value calculation unit, which is configured to calculate a control quantity target value related to the drive executed by the drive unit based on the position and pose of the image sensor and the position and pose of the main body of the imaging device.

[1017] The drive control unit controls the drive executed by the drive unit based on the target value of the control quantity.

[1018] <26> according to <21> to <25> The moving object device of any one of the following further includes: a correction unit configured to correct the image captured by the image sensor based on the acceleration and angular velocity of the image sensor.

[1019] <27> according to <26> A mobile object device, wherein the IMU is a multi-IMU composed of multiple IMUs.

[1020] <28> exist <27> The moving object device described in the text,

[1021] When the image sensor is divided into multiple regions, each of the multiple IMUs configured with multiple IMUs detects acceleration and angular velocity for each unit region, with the divided region as the unit.

[1022] When each of the multiple IMUs detects the acceleration and angular velocity of each cell region, the image sensor outputs an image corresponding to each cell region, and

[1023] The correction unit corrects the graph of each cell region based on the acceleration and angular velocity of each cell region.

[1024] <29> according to <28> The moving object device further includes: an image sensor position / pose detection unit, configured to detect the position and pose of each unit region of the image sensor using integral calculations based on the acceleration and angular velocity of each unit region of the image sensor.

[1025] The correction unit corrects the image of each unit region based on the position and pose of each unit region of the image sensor.

[1026] <30> A method for operating a moving object device including an imaging apparatus, the imaging apparatus comprising:

[1027] A solid-state imaging element, comprising an image sensor configured to capture an image and an inertial measurement unit (IMU) integrally arranged with the image sensor and configured to detect the acceleration and angular velocity of the image sensor; and

[1028] The drive unit is configured to control the position and orientation of the image sensor.

[1029] The method includes:

[1030] The steps for controlling the position and orientation of the image sensor are achieved by using inertial navigation based on the acceleration and angular velocity of the image sensor and controlling the drive performed by the drive unit.

[1031] <31> A program that enables a computer to control a moving object device, the moving object device comprising:

[1032] A solid-state imaging element includes: an image sensor configured to capture an image; and an inertial measurement unit (IMU) integrally arranged with the image sensor and configured to detect the acceleration and angular velocity of the image sensor; and

[1033] The drive unit is configured to control the position and orientation of the image sensor; the program enables the computer to be used as:

[1034] The drive control unit is configured to control the position and orientation of the image sensor by using inertial navigation based on the acceleration and angular velocity of the image sensor and intermediate output signals to control the drive performed by the drive unit.

[1035] [List of Reference Numbers]

[1036] More than 200 inertial measurement units (IMUs)

[1037] 201, 201-1 to 201-4 IMU

[1038] 210 Printed Circuit Board

[1039] 211, 211-1 to 211-4 oscillators

[1040] 212, 212-1 to 212-4, 212', 212'-1, 212'-2-1 to 212'-2-4 substrates

[1041] 213, 213-1 to 213-4, 213', 213”', 213”' Reading circuits

[1042] Drive circuit blocks 231, 231-1 to 231-4

[1043] Sensing circuit blocks 232, 232-1 to 232-4

[1044] Digital output circuit blocks 233, 233-1 to 233-4

[1045] 251, 251-1 to 241-4 oscillation circuits

[1046] Automatic gain control circuits 252, 252-1 to 252-4

[1047] Charge amplifier circuits 271, 271-1 to 271-4

[1048] Phase shift circuits 272, 272-1 to 272-4

[1049] Synchronous detection circuits 273, 273-1 to 273-4

[1050] 274, 274-1 to 274-4 LPF

[1051] 291, 291-1 to 291-4 AD conversion circuits

[1052] Decimation filters 292, 292-1 to 292-4

[1053] Digital output circuits 293, 293-1 to 293-4

[1054] 301, 301' switching circuit

[1055] 321, 321' Reference Signal Generation Unit

[1056] 351, 351-1 to 351-4 sound insulators

[1057] 371 Pulse Detection Circuit

[1058] 372 Synthesis Unit

[1059] Clusters 411, 411-1, and 411-2

[1060] 451 Clustering Measurement Device

[1061] 452 Connecting Part

[1062] 461 Reference Frequency Generation Unit

[1063] 462 frequency measurement unit

[1064] 463 clustering computation units

[1065] 471, 471', 471”, 471”' composite computing units

[1066] 481 resampler

[1067] 483 Interference Cancellation Unit

[1068] 484 Synthesis Unit

[1069] Switches 511, 511-1, 511-2, 511', 512, 512-1, 512-2, 512', 521, 521-1, 521-2, 522, 522-1, 522-2

[1070] 531, 531-1, 531-2 Delay Adjustment Unit

[1071] 532, 532', 532” cluster internal synthesis unit

[1072] 551, 551-1, 551-2 Differential Reversing Unit

[1073] 561, 561' switch

[1074] 571, 571-2, 571-2 Inversion Unit

[1075] 601 Check Quality Block

[1076] 602 Movable Drive Unit

[1077] 603 Fixed Drive Unit

[1078] 604 Connector

[1079] 604a electrode

[1080] 605 detection electrode

[1081] 610, 610X, 610X-1 to 610X-4, 610Y, 610Y-1 to 610Y-4, 610Z, 610Z-1 to 610Z-4 IMU units

[1082] 610BX, 610BY, 610BZIMU blocks

[1083] 611, 611-1, 611-2 connecting beams

[1084] 612-1 and 612-2 connecting beams

[1085] 632, 632-1, 632-2 connecting beams

[1086] 631, 631-1, 631-2 connecting beams

[1087] 651 Signal Processing Unit

[1088] 661, 662 computing units

[1089] 671 Signal Processing Unit

[1090] 672 switching unit

[1091] Calculation units 681, 681-1 to 681-4

[1092] 701, 701-1 to 701-3, 702, 702-1 to 702-3 connecting beams

[1093] 731, 732 switching units

[1094] 733 Signal Processing Unit

[1095] 741 computing units

[1096] 751 Signal Processing Unit

[1097] 752 switching unit

[1098] 801 Image Sensor

[1099] 1100 Moving Object Device

[1100] 1101 Imaging Device

[1101] 1111 Main Unit

[1102] 1112 imaging units

[1103] 1113 Output Unit

[1104] 1131IMU

[1105] 1132 Main Body Position / Posture Detection Unit

[1106] 1133 Image Sensor Position / Pose Detection Unit

[1107] 1134 Drive Control Unit

[1108] 1135 drive unit

[1109] 1136 Hand Shake Correction Processing Unit

[1110] 1151 Translation Calculation Unit

[1111] 1152 Rotation and Translation Calculation Unit

[1112] 1171 Translation Calculation Unit

[1113] 1172 Rotation and Translation Calculation Unit

[1114] 1181 Image Sensor

[1115] 1182IMU

[1116] 1191 Image Recording Unit

[1117] 1192 Transmission Unit

[1118] 1201 Position Detection Unit

[1119] 1211-1 and 1211-2 magnets

[1120] Hall elements 1212-1 and 1212-2.

Claims

1. A solid-state imaging element, comprising: An image sensor is configured to capture images; as well as An inertial measurement unit (IMU) is integrated with the image sensor and configured to detect the acceleration and angular velocity of the image sensor. The IMU outputs the acceleration and angular velocity of the image sensor to the drive control unit that controls the drive of the image sensor; The IMU is a multi-IMU formed by multiple IMUs; When the image sensor is divided into multiple regions, each of the multiple IMUs is configured to detect acceleration and angular velocity for each unit region, which is divided into regions, and outputs the acceleration and angular velocity of each unit region to the drive control unit in sequence.

2. The solid-state imaging element according to claim 1, wherein, When each of the plurality of IMUs outputs the acceleration and angular velocity of each unit region to the drive control unit in sequence, the image sensor outputs an image to the corresponding unit region.

3. The solid-state imaging element according to claim 1, wherein, The IMU is a single unit that detects the acceleration and angular velocity of the image sensor and outputs the acceleration and angular velocity of the image sensor to the drive control unit in sequence.

4. The solid-state imaging element according to claim 1 further includes a driving unit configured to control the position and orientation of the image sensor. in, The drive control unit controls the position and attitude of the image sensor by using inertial navigation based on the acceleration and angular velocity of the image sensor and intermediate output signals to control the drive performed by the drive unit.

5. The solid-state imaging element according to claim 4, wherein, The driving unit is an actuator that drives the image sensor.

6. An imaging device, comprising: Solid-state imaging elements, including: An image sensor is configured to capture images, and An inertial measurement unit (IMU) is integrated with the image sensor and configured to detect the acceleration and angular velocity of the image sensor. A driving unit is configured to control the position and orientation of the image sensor; and The drive control unit is configured to control the position and the attitude of the image sensor by using inertial navigation based on the acceleration and angular velocity of the image sensor and intermediate output signals to control the drive performed by the drive unit. The imaging device further includes a correction unit configured to correct the image captured by the image sensor based on the acceleration and angular velocity of the image sensor; The IMU is a multi-IMU formed by multiple IMUs; When the image sensor is divided into multiple regions, each of the multiple IMUs configured detects the acceleration and the angular velocity for each unit region, which is a unit of the divided regions. When each of the plurality of IMUs detects the acceleration and the angular velocity for each unit region, the image sensor outputs an image to the corresponding unit region; The correction unit corrects the image of each unit region based on the acceleration and angular velocity of each unit region.

7. The imaging apparatus of claim 6, further comprising an image sensor position / pose detection unit configured to detect the position and pose of the image sensor using an integral operation based on the acceleration and angular velocity of the image sensor. in, The drive control unit uses feedback control based on the position and posture of the image sensor to control the drive performed by the drive unit.

8. The imaging apparatus of claim 6 further comprises another IMU, different from the IMU, the other IMU being integrally arranged with the body of the imaging apparatus and configured to detect the acceleration and angular velocity of the body of the imaging apparatus. in, The drive control unit uses the inertial direction based on the acceleration and angular velocity of the image sensor detected by the IMU and the acceleration and angular velocity of the main body of the imaging device detected by the other IMU to control the drive performed by the drive unit.

9. The imaging apparatus according to claim 8, further comprising: An image sensor position / pose detection unit is configured to detect the position and pose of the image sensor using an integral operation based on the acceleration and angular velocity of the image sensor. as well as The subject position / pose detection unit is configured to detect the position and pose of the subject of the imaging device using an integral calculation based on the acceleration and angular velocity of the subject of the imaging device. The drive control unit uses feedback control based on the position and posture of the image sensor and feedforward control based on the position and posture of the main body of the imaging device to control the drive performed by the drive unit.

10. The imaging apparatus of claim 9, further comprising a control quantity target value calculation unit, the control quantity target value calculation unit being configured to calculate a control quantity target value related to a drive performed by the driving unit based on the position and pose of the image sensor and the position and pose of the main body of the imaging apparatus. in, The drive control unit controls the drive executed by the drive unit based on the target value of the control quantity.

11. The imaging apparatus according to claim 6, further comprising: An image sensor position / pose detection unit is configured to detect the position and pose of each unit region of the image sensor using an integral operation based on the acceleration and angular velocity of each unit region of the image sensor. The correction unit corrects the image of each unit region based on the position and the pose of each unit region of the image sensor.

12. The imaging apparatus according to claim 6, wherein, The IMU is a single entity and detects the acceleration and angular velocity of the image sensor.

13. The imaging apparatus according to claim 6, wherein, The driving unit is an actuator that drives the image sensor.

14. A method for operating an imaging apparatus, the imaging apparatus comprising: A solid-state imaging element includes: an image sensor configured to capture an image; and an inertial measurement unit (IMU) integrally disposed with the image sensor and configured to detect the acceleration and angular velocity of the image sensor; and The driving unit is configured to control the position and orientation of the image sensor. The method includes: The steps of controlling the position and attitude of the image sensor by using inertial navigation and intermediate output signals based on the acceleration and angular velocity of the image sensor to control the drive performed by the drive unit; The imaging device further includes a correction unit configured to correct the image captured by the image sensor based on the acceleration and angular velocity of the image sensor; The IMU is a multi-IMU formed by multiple IMUs; When the image sensor is divided into multiple regions, each of the multiple IMUs configured detects the acceleration and the angular velocity for each unit region, which is a unit of the divided regions. When each of the plurality of IMUs detects the acceleration and the angular velocity for each unit region, the image sensor outputs an image to the corresponding unit region; The correction unit corrects the image of each unit region based on the acceleration and angular velocity of each unit region.

15. A computer-readable storage medium having a program stored thereon, the program, when executed by a computer, causing the computer to control an imaging apparatus, the imaging apparatus comprising: A solid-state imaging element includes: an image sensor configured to capture an image; and an inertial measurement unit (IMU) integrally disposed with the image sensor and configured to detect the acceleration and angular velocity of the image sensor; and The driving unit is configured to control the position and orientation of the image sensor. The program causes the computer to function as a drive control unit, which is configured to control the position and orientation of the image sensor by using inertial navigation and intermediate output signals based on the acceleration and angular velocity of the image sensor to control the drive performed by the drive unit. The imaging device further includes a correction unit configured to correct the image captured by the image sensor based on the acceleration and angular velocity of the image sensor; The IMU is a multi-IMU formed by multiple IMUs; When the image sensor is divided into multiple regions, each of the multiple IMUs configured detects the acceleration and the angular velocity for each unit region, which is a unit of the divided regions. When each of the plurality of IMUs detects the acceleration and the angular velocity for each unit region, the image sensor outputs an image to the corresponding unit region; The correction unit corrects the image of each unit region based on the acceleration and angular velocity of each unit region.

16. A device for moving an object, comprising: Imaging device, including: A solid-state imaging element includes: an image sensor configured to capture an image; and an inertial measurement unit (IMU) integrally disposed with the image sensor and configured to detect the acceleration and angular velocity of the image sensor; and A driving unit is configured to control the position and orientation of the image sensor; and The drive control unit is configured to control the position and the attitude of the image sensor by using inertial navigation based on the acceleration and angular velocity of the image sensor and intermediate output signals to control the drive performed by the drive unit. The moving object device further includes: a correction unit configured to correct the image captured by the image sensor based on the acceleration and the angular velocity of the image sensor; The IMU is a multi-IMU formed by multiple IMUs; When the image sensor is divided into multiple regions, each of the multiple IMUs is configured to detect acceleration and angular velocity for each unit region, which is divided into regions. When each of the plurality of IMUs detects the acceleration and angular velocity of each unit region, the image sensor outputs an image corresponding to each unit region, and The correction unit corrects the image of each unit region based on the acceleration and angular velocity of each unit region.

17. The moving object device according to claim 16, further comprising: An image sensor position / pose detection unit is configured to detect the position and pose of the image sensor using an integral operation based on the acceleration and angular velocity of the image sensor. The drive control unit uses feedback control based on the position and posture of the image sensor to control the drive performed by the drive unit.

18. The object-moving device according to claim 16, further comprising: Another IMU, different from the first IMU, is integrally arranged with the main body of the imaging device and configured to detect the acceleration and angular velocity of the main body of the imaging device. The drive control unit uses the inertial direction based on the acceleration and angular velocity of the image sensor detected by the IMU and the acceleration and angular velocity of the main body of the imaging device detected by the other IMU to control the drive performed by the drive unit.

19. The moving object device according to claim 18, further comprising: An image sensor position / pose detection unit is configured to detect the position and pose of the image sensor using an integral operation based on the acceleration and angular velocity of the image sensor. as well as The subject position / pose detection unit is configured to detect the position and pose of the subject of the imaging device using integral calculations based on the acceleration and angular velocity of the subject. The drive control unit uses feedback control based on the position and posture of the image sensor and feedforward control based on the position and posture of the main body of the imaging device to control the drive performed by the drive unit.

20. The moving object device according to claim 18, further comprising: A control quantity target value calculation unit is configured to calculate a control quantity target value related to the drive performed by the drive unit, based on the position and pose of the image sensor and the position and pose of the main body of the imaging device. The drive control unit controls the drive executed by the drive unit based on the target value of the control quantity.

21. The moving object device according to claim 16, further comprising: An image sensor position / pose detection unit is configured to detect the position and pose of each unit region of the image sensor using an integral operation based on the acceleration and angular velocity of each unit region of the image sensor. The correction unit corrects the image of each unit region based on the position and the pose of each unit region of the image sensor.

22. A method for operating a moving object device including an imaging apparatus, the imaging apparatus comprising: A solid-state imaging element includes: an image sensor configured to capture an image; and an inertial measurement unit (IMU) integrally disposed with the image sensor and configured to detect the acceleration and angular velocity of the image sensor; and The driving unit is configured to control the position and orientation of the image sensor. The method includes: The steps of controlling the position and attitude of the image sensor by using inertial navigation and intermediate output signals based on the acceleration and angular velocity of the image sensor to control the drive performed by the drive unit; The moving object device further includes: a correction unit configured to correct the image captured by the image sensor based on the acceleration and the angular velocity of the image sensor; The IMU is a multi-IMU formed by multiple IMUs; When the image sensor is divided into multiple regions, each of the multiple IMUs is configured to detect acceleration and angular velocity for each unit region, which is divided into regions. When each of the plurality of IMUs detects the acceleration and angular velocity of each unit region, the image sensor outputs an image corresponding to each unit region, and The correction unit corrects the image of each unit region based on the acceleration and angular velocity of each unit region.

23. A computer-readable storage medium having a program stored thereon, the program, when executed by a computer, causing the computer to control a moving object device, the moving object device comprising: A solid-state imaging element, comprising: an image sensor configured to capture an image; and an inertial measurement unit (IMU) integrally disposed with the image sensor and configured to detect the acceleration and angular velocity of the image sensor; and The driving unit is configured to control the position and orientation of the image sensor; the program causes the computer to function as: The drive control unit is configured to control the position and the attitude of the image sensor by using inertial navigation based on the acceleration and angular velocity of the image sensor and intermediate output signals to control the drive performed by the drive unit. The moving object device further includes: a correction unit configured to correct the image captured by the image sensor based on the acceleration and the angular velocity of the image sensor; The IMU is a multi-IMU formed by multiple IMUs; When the image sensor is divided into multiple regions, each of the multiple IMUs is configured to detect acceleration and angular velocity for each unit region, which is divided into regions. When each of the plurality of IMUs detects the acceleration and angular velocity of each unit region, the image sensor outputs an image corresponding to each unit region, and The correction unit corrects the image of each unit region based on the acceleration and angular velocity of each unit region.

Images