Method for manufacturing flow detection device, flow detection device, and flow detection method

Abstract

The application discloses a manufacturing method of a flow detection device, the flow detection device and a flow detection method. In the technical scheme, the flow of the fluid is determined based on the potential difference obtained when the fluid flows through the channel, so that the flow of the fluid is determined through the potential difference when the fluid flows through the channel, the determination of the flow of the fluid is not affected by the temperature of the fluid or chemical components in the fluid, and the accuracy of the determined flow of the fluid is improved. Furthermore, the channel for passing the fluid is determined through the glass substrate and the hydrogel film sheet, the shape of the glass substrate and the hydrogel film sheet is less affected by the temperature or the chemical components, so that the shape of the channel can be prevented from changing in the flow detection process of the fluid, the flow detection of the fluid is not inaccurate, and the accuracy of the determined flow of the fluid is further improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of optoelectronic manufacturing, and in particular to a manufacturing method of a flow detection device, the flow detection device, and a flow detection method. BACKGROUND

[0002] In the related art, the detection principle of the flow detection device is to determine the size of the flow by the volume or mass change of the sensitive element in the flow detection device. However, the sensitive element is easily affected by temperature or chemical composition, resulting in inaccurate flow detection by the flow detection device in the related art. SUMMARY

[0003] Therefore, the present application provides a manufacturing method of a flow detection device, the flow detection device, and a flow detection method, which can improve the accuracy of flow detection.

[0004] In a first aspect, the present application provides a manufacturing method of a flow detection device, comprising:

[0005] obtaining a glass substrate;

[0006] etching a target recess along a predetermined track on the glass substrate;

[0007] setting a pre-formed hydrogel on a surface of the glass substrate having the target recess;

[0008] solidifying the pre-formed hydrogel into a hydrogel membrane piece, the hydrogel membrane piece being encapsulated on the glass substrate, and a channel being formed between the glass substrate and the solidified hydrogel membrane piece through the target recess, the channel being used for passing fluid;

[0009] fixing a first electrode and a second electrode on positions of the hydrogel membrane piece corresponding to an inlet and an outlet of the channel, respectively, to obtain a potential difference when the fluid flows through the channel by the first electrode and the second electrode, and to determine the flow of the fluid based on the potential difference.

[0010] Optionally, the etching a target recess along a predetermined track on the glass substrate comprises:

[0011] determining at least one of a target cross-sectional size, a target cross-sectional shape, and a target recess length according to at least one of the conductivity, the viscosity, and the impurity content of the fluid to be detected;

[0012] etching the target recess along the predetermined track on the glass substrate according to at least one of the target cross-sectional size, the target cross-sectional shape, and the target recess length.

[0013] Optionally, the etching the target recess along the predetermined track on the glass substrate according to at least one of the target cross-sectional dimension, the target cross-sectional shape, the target recess length comprises:

[0014] determining at least one of a laser power, a focal point position, a focal length, a pulse frequency, a pulse width, a cutting speed of the ultraviolet laser according to at least one of the target cross-sectional dimension, the target cross-sectional shape, the target recess length;

[0015] etching the target recess along the predetermined track on the glass substrate using the ultraviolet laser based on at least one of the laser power, the focal point position, the focal length, the pulse frequency, the pulse width, the cutting speed of the ultraviolet laser.

[0016] Optionally, the etching the target recess along the predetermined track on the glass substrate using the ultraviolet laser comprises:

[0017] etching the target recess along a straight line between two opposite diagonal points of the glass substrate on the glass substrate using the ultraviolet laser.

[0018] Optionally, the predetermined track comprises a first track and a second track connected with the first track, and the target recess comprises a first recess and a second recess; the target cross-sectional dimension comprises a first cross-sectional dimension and a second cross-sectional dimension; the target cross-sectional shape comprises a first cross-sectional shape and a second cross-sectional shape; the target recess length comprises a first recess length and a second recess length;

[0019] the etching the target recess along the predetermined track on the glass substrate according to at least one of the target cross-sectional dimension, the target cross-sectional shape, the target recess length comprises:

[0020] determining a first cutting parameter of the ultraviolet laser according to at least one of the first cross-sectional dimension, the first cross-sectional shape, the first recess length;

[0021] determining a second cutting parameter of the ultraviolet laser according to at least one of the second cross-sectional dimension, the second cross-sectional shape, the second recess length;

[0022] etching the first recess along the first track on the glass substrate using the ultraviolet laser based on the first cutting parameter of the ultraviolet laser;

[0023] etching the second recess along the second track on the glass substrate using the ultraviolet laser based on the second cutting parameter of the ultraviolet laser;

[0024] The first cross-sectional dimension gradually decreases along a direction from the first recess to the second recess, and the second cross-sectional dimension is the same along the direction from the first recess to the second recess; a cross-sectional dimension of an end of the first recess close to the second recess is equal to the second cross-sectional dimension.

[0025] Optionally, the fixing the first electrode and the second electrode on positions corresponding to the inlet and the outlet of the channel of the hydrogel film piece respectively comprises:

[0026] The first electrode and the second electrode are fixed on positions corresponding to the inlet and the outlet of the channel of the hydrogel film piece formed by the second recess respectively.

[0027] Optionally, the setting the preformed hydrogel on the surface of the glass substrate having the target recess comprises:

[0028] The surface of the glass substrate for etching the recess is modified using a modifier; wherein the adhesion strength of the glass substrate after modification is greater than the adhesion strength of the glass substrate before modification;

[0029] The preformed hydrogel is set on the surface of the glass substrate after modification.

[0030] Optionally, the method further comprises:

[0031] The hydroxyethyl methacrylate monomer, the ethylene glycol dimethacrylate, the methacrylic acid, the deionized water, the photoinitiator and the 2, 2-dimethoxy-2-phenylphenylacetophenone are dissolved in an n-vinyl pyrrolidone solution

[0032] to obtain a target solution;

[0033] The target solution is injected into a mold, and the target solution is irradiated with ultraviolet light to obtain the preformed hydrogel; the mold can transmit ultraviolet light.

[0034] Optionally, the preformed hydrogel is cured into a hydrogel film piece by ultraviolet light irradiation.

[0035] In a second aspect, the present application provides a flow detection device, the device comprising:

[0036] A glass substrate having a target recess etched along a predetermined track;

[0037] A hydrogel film piece fixed on one side of the glass substrate having the target recess, there being a channel formed by the target recess between the glass substrate and the hydrogel film piece, the channel being for passing fluid;

[0038] a first electrode and a second electrode fixed at positions corresponding to the inlet and the outlet of the channel on the hydrogel film respectively; the first electrode and the second electrode are used to obtain a potential difference when the fluid flows through the channel, and the flow rate of the fluid is determined based on the potential difference.

[0039] In a third aspect, the present application provides a flow rate detection method, which uses the flow rate detection device to detect the flow rate of the fluid.

[0040] The flow rate detection device, the manufacturing method thereof and the flow rate detection method provided above can determine the flow rate of the fluid by the potential difference when the fluid flows through the channel, so that the determination of the flow rate of the fluid is not affected by the temperature of the fluid or the chemical composition in the fluid, thereby improving the accuracy of the determined flow rate of the fluid; and since the channel for passing the fluid is determined by the glass substrate and the hydrogel film, the shape of the glass substrate and the hydrogel film is less affected by the temperature or the chemical composition, thereby avoiding the change of the shape of the channel during the flow rate detection of the fluid, so that the flow rate detection of the fluid is not inaccurate, thereby further improving the accuracy of the determined flow rate of the fluid. BRIEF DESCRIPTION OF DRAWINGS

[0041] The technical solutions and other beneficial effects of the present application will become apparent from the following detailed description of the specific embodiments of the present application, combined with the accompanying drawings.

[0042] Figure 1 A flow chart of a manufacturing method of a flow rate detection device provided by an embodiment of the present application;

[0043] Figure 2 A flow chart of another manufacturing method of a flow rate detection device provided by an embodiment of the present application;

[0044] Figure 3 A flow chart of another manufacturing method of a flow rate detection device provided by an embodiment of the present application;

[0045] Figure 4 A schematic diagram of a predetermined trajectory provided by an embodiment of the present application;

[0046] Figure 5 A schematic diagram of another predetermined trajectory provided by an embodiment of the present application;

[0047] Figure 6 A schematic diagram of another predetermined trajectory provided by an embodiment of the present application;

[0048] Figure 7 A schematic diagram of another predetermined trajectory provided by an embodiment of the present application;

[0049] Figure 8 FIG. 1 is a structural schematic diagram of a flow detection device according to an embodiment of the present application. DETAILED DESCRIPTION

[0050] The technical solutions in the embodiments of the present application will be clearly and completely described with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by a person skilled in the art without creative work fall within the scope of protection of the present application.

[0051] In the description of the present application, it should be understood that the terms "first", "second" are used only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "multiple" is two or more, unless otherwise specifically limited.

[0052] In the description of the present application, it should be noted that, unless otherwise specifically defined and limited, the terms "mounting", "connecting", "connecting" should be understood in a broad sense, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected or can communicate with each other; it can be directly connected, or indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0053] In the embodiments of the present application, any two or more schemes can be combined with each other in the art without conflict.

[0054] The manufacturing method of the flow detection device in the embodiments of the present application can be applied to the manufacturing equipment of the flow detection device. The manufacturing equipment of the flow detection device can include a substrate obtaining module, an ultraviolet laser etching module, a hydrogel setting module, an ultraviolet light irradiation module, and an electrode fixing module.

[0055] In some embodiments, the flow detection device can be used to detect the flow of fluid. The type of fluid is not limited in the embodiments of the present application. Exemplarily, the fluid can include one or a mixture of at least two of the following: water, corrosive fluid, blood, fluid with a temperature higher than a threshold, chemical fluid, etc.

[0056] Figure 1 FIG. 2 is a flowchart of a manufacturing method of a flow detection device according to an embodiment of the present application, and Figure 1As shown, the method is applied to a manufacturing device of a flow detection device, and the method comprises:

[0057] S101, obtaining a glass substrate.

[0058] In some embodiments, the substrate obtaining module of the flow detection device can obtain a glass substrate.

[0059] In some embodiments, the shape of the glass substrate can be rectangular, circular, oval, triangular, pentagonal, or other regular or irregular shapes.

[0060] In some embodiments, the glass substrate can include a silicate glass substrate. In some embodiments, the silicate glass substrate can be a glass substrate containing at least one of the following: sodium calcium silicate, sodium aluminum silicate, sodium borosilicate, etc.

[0061] In some embodiments, the type and / or size of the glass substrate can be pre-set. In other embodiments, the type and / or size of the glass substrate can be determined according to the type of fluid. For example, the type and / or size of the glass substrate used for measuring blood flow and the type and / or size of the glass substrate used for measuring water flow are different. The type of glass substrate can include different materials and / or colors of glass substrate.

[0062] In some embodiments, the substrate obtaining module can have a clamping part that can clamp the glass substrate from a pre-set position and place the glass substrate on a target position. The target position can be a position that facilitates etching of the glass substrate. In some embodiments, when the glass substrate is placed on the target position, the manufacturing device of the flow detection device can include a glass substrate fixing part for fixing the glass substrate. The fixing part can be fixed by clamping or clamping. In other embodiments, the manufacturing device of the flow detection device can include a limiting groove for placing the glass substrate so that the glass substrate is limited in the limiting groove, and the target position can be the limiting groove.

[0063] S102, etching a target recess along a predetermined track on the glass substrate.

[0064] In some embodiments, etching a target recess along a predetermined track on the glass substrate can include using ultraviolet laser to etch a target recess along a predetermined track on the glass substrate. In other embodiments, the ultraviolet laser can be replaced by other light. Other light, for example, is infrared laser.

[0065] In some embodiments, the predetermined trajectory can be pre-set. In other embodiments, the predetermined trajectory can be determined based on the type of fluid. Illustratively, a target list can be stored in the manufacturing device of the flow detection apparatus, the target list including a correspondence between types of fluids and trajectories, where the correspondence between the types of fluids and the trajectories can be one-to-one or many-to-one. The trajectories corresponding to different types of fluids can be the same or different, and the manufacturing device of the flow detection apparatus can select the predetermined trajectory according to the target list. For example, the trajectory corresponding to a fluid with high viscosity can be a straight line, and the trajectory corresponding to a fluid with low viscosity can be a curved line.

[0066] In some embodiments, the predetermined trajectory can be one of or a combination of at least two of the following: straight line, arc, and wave.

[0067] In some embodiments, the target recess can have a cross-section in the shape of a rectangle, a semicircle, a semi-ellipse, a trapezoid, or other shapes.

[0068] In some embodiments, the size of the target recess can be pre-configured by the ultraviolet laser etching module. For example, the ultraviolet laser etching module can be configured with a plurality of sizes of recesses, and during use, the manufacturing device of the flow detection apparatus can receive a triggering operation from a user, and determine the size of the target recess from the plurality of sizes of recesses based on the triggering operation. In other embodiments, the size of the target recess can be flexibly determined based on attribute information of the fluid and / or a use scenario of the flow detection apparatus. The attribute information of the fluid can include at least one of the following: the name of the fluid, the type of the fluid, the viscosity of the fluid, the content of each substance in the fluid, the temperature of the fluid, the impurity content of the fluid, and the like. The use scenario of the flow detection apparatus can include at least one of the following: a medical scenario, a production scenario, and a detection control scenario. For example, in the medical scenario, the flow detection apparatus can be used to detect the flow of fluids such as blood, urine, or secretions; in the production scenario, the flow detection apparatus can be used to detect the flow of fluids generated during production; and in the detection control scenario, the flow detection apparatus can be used to detect the flow of water, and the like.

[0069] S103, disposing the pre-formed hydrogel on the surface of the glass substrate having the target recess.

[0070] In some embodiments, the hydrogel disposing module can dispose the pre-formed hydrogel on the surface of the glass substrate having the target recess.

[0071] In some embodiments, the pre-formed hydrogel can be used to form a hydrogel film. In some embodiments, the pre-formed hydrogel can be solid. In some embodiments, the shape and / or size of the pre-formed hydrogel can be the same as the shape and / or size of the hydrogel film. In some embodiments, the hardness of the pre-formed hydrogel can be less than the hardness of the hydrogel film. In some embodiments, the adhesive strength of the pre-formed hydrogel can be greater than the adhesive strength of the hydrogel film.

[0072] In some embodiments, the pre-formed hydrogel can be irradiated with ultraviolet light to obtain a hydrogel film.

[0073] In some embodiments, the surface shape and / or surface size of the pre-formed hydrogel for contacting the glass substrate may be the same as the surface shape and / or surface size of the glass substrate having the target recess. This improves the surface flatness of the flow detection device. In other embodiments, the shape and / or size of the pre-formed hydrogel may correspond to the shape and / or size of the target recess; for example, the shape of the pre-formed hydrogel is the same as the shape of the target recess, and the size of the pre-formed hydrogel is larger than the size of the target recess, so that the pre-formed hydrogel can completely cover the target recess. This saves hydrogel material.

[0074] S104. The pre-formed hydrogel is cured into a hydrogel film, the hydrogel film is encapsulated on the glass substrate, and there is a channel formed through the target recess between the glass substrate and the cured hydrogel film; the channel is used for the passage of fluid.

[0075] In some embodiments, the curing of the pre-formed hydrogel into a hydrogel film can be achieved by ultraviolet light irradiation. In some embodiments, the ultraviolet light irradiation module can emit ultraviolet light.

[0076] Specifically, when irradiating the pre-formed hydrogel with ultraviolet light, the ultraviolet light rays can be perpendicular to the surface of the pre-formed hydrogel. In some embodiments, the intensity of the ultraviolet light can be determined based on at least one of the following: the thickness of the pre-formed hydrogel. In some embodiments, the intensity of the ultraviolet light can vary over time; for example, a first intensity is used when the pre-formed hydrogel is first irradiated, a second intensity is used after the irradiation time exceeds the first duration, and a third intensity is used after the irradiation time exceeds the second duration. Wherein, the first duration is less than the second duration, the first intensity is less than the second intensity, the second intensity is greater than the third intensity, and the first intensity can be greater than, less than, or equal to the third intensity.

[0077] In some embodiments, the pre-formed hydrogel can be disposed between the glass substrate and the ultraviolet light, so that the pre-formed hydrogel is directly irradiated by the ultraviolet light to solidify the pre-formed hydrogel into a hydrogel film, and the hydrogel film is encapsulated on the glass substrate. In other embodiments, the glass substrate can be disposed between the pre-formed hydrogel and the ultraviolet light, so that the pre-formed hydrogel is irradiated by the ultraviolet light passing through the glass substrate to solidify the pre-formed hydrogel into a hydrogel film, and the hydrogel film is encapsulated on the glass substrate.

[0078] In some embodiments, to avoid deformation during ultraviolet light irradiation due to the low hardness of the pre-formed hydrogel, the pre-formed hydrogel can be fixed in a mold, and the mold can be fixed by a fixing device, so that the pressure value between the surface of the pre-formed hydrogel in contact with the glass substrate and the glass substrate is less than or equal to a preset pressure value, so that the pre-formed hydrogel will not deform during ultraviolet light irradiation.

[0079] During implementation, the size of the channel can be determined based on the size of the target recess; the larger the size of the target recess, the larger the size of the channel.

[0080] In some embodiments, the cross-sectional shape of the channel can be rectangular, semi-circular, triangular, or other shapes, and the present application embodiments do not limit the cross-sectional shape of the channel. In some embodiments, when the cross-sectional shape of the channel is rectangular, the length and / or width of the rectangle can be less than or equal to 1 millimeter. For example, the length and / or width of the rectangle can be 10 micrometers (μm), 100 micrometers (0.1 millimeters), or 1 millimeter.

[0081] In some embodiments, when the cross-sectional shape of the channel is semi-circular, the diameter of the semi-circle can be less than or equal to 1 millimeter. For example, the diameter of the semi-circle can be 10 micrometers, 100 micrometers (0.1 millimeters), or 1 millimeter, etc.

[0082] In some embodiments, the shape and / or size of the channel can be determined according to actual needs. For example, when the flow detection device is used to detect blood in a blood vessel, the shape and / or size of the channel can be the shape and / or size of the blood vessel.

[0083] In some embodiments, an inlet pipe and an outlet pipe can be connected to the two ends of the channel respectively, so that the inlet pipe can input fluid into the channel and the fluid in the channel can flow out through the outlet pipe.

[0084] In some embodiments, the flow rate of the fluid detected by the flow detection device may be less than or equal to a preset flow rate.

[0085] In some embodiments, the thickness of the preformed hydrogel and / or hydrogel film can be in the range of 10 micrometers to 1 millimeter. For example, the thickness of the preformed hydrogel and / or hydrogel film can be 10 micrometers, 100 micrometers, 200 micrometers, or 1 millimeter, etc.

[0086] The channel in the embodiments of this application can be called a microchannel, which can be a channel with a smaller cross-sectional size.

[0087] S105. Fix the first electrode and the second electrode to the positions corresponding to the inlet and outlet of the channel on the hydrogel membrane, respectively, so as to obtain the potential difference when the fluid flows through the channel through the first electrode and the second electrode, and determine the flow rate of the fluid based on the potential difference.

[0088] In some embodiments, the electrode fixing module in the fabrication device can fix the first electrode and the second electrode at positions on the hydrogel membrane corresponding to the inlet and outlet of the channel, respectively.

[0089] In some embodiments, one of the first and second electrodes is a positive electrode and the other is a negative electrode. In some embodiments, the first and second electrodes can be metal electrodes.

[0090] In some embodiments, the first electrode and the second electrode may be platinum wire electrodes or platinum sheet electrodes.

[0091] In some embodiments, the surface of the hydrogel film used to fix the first and second electrodes may be away from the glass substrate.

[0092] In some embodiments, the first electrode and / or the second electrode may be welded to the hydrogel membrane. In other embodiments, the hydrogel membrane has a limiting structure, which may include, for example, a limiting portion or a threaded structure. The limiting portion may be, for example, a limiting groove or a snap-fit ​​portion, which fixes the first electrode and / or the second electrode. For example, the first electrode and the second electrode may include threaded portions, which engage with the threaded structure on the hydrogel membrane to fix the first electrode and the second electrode to the hydrogel membrane.

[0093] In some embodiments, the first electrode and the second electrode can be connected to a voltage measuring circuit, thereby measuring the voltage between the first electrode and the second electrode to obtain the potential difference when the fluid flows through the channel.

[0094] In some embodiments, a preset voltage can be applied to the first electrode or the second electrode, thereby determining the fluid flow rate by the difference between the potential difference and the preset voltage, or by the difference between the preset voltage and the potential difference.

[0095] The principle of obtaining the potential difference when fluid flows through the channel via the first and second electrodes can include at least one of the following: electrokinetic principle, ion diffusion principle, charge injection principle, etc. During implementation, the silicate-containing glass substrate ionizes in aqueous solution to produce sodium or potassium ions, giving the surface of the glass substrate a negative charge. Positively charged ions in the solution are attracted to the glass surface under electrostatic force, while negatively charged ions are repelled away from the glass surface, thus forming an electric double layer at the solution-glass interface. When the solution is confined within a microchannel, the space occupied by the electric double layer formed on the wall in the solution increases significantly. Therefore, when there is flow in the microchannel, hydrogen ions reach the downstream under electrostatic attraction, while hydroxide ions remain upstream under electrostatic repulsion, thus accumulating hydroxide and hydrogen ions upstream and downstream respectively, generating a flow potential. The porous structure of the hydrogel allows ions to diffuse from the channel into the hydrogel interior, creating a concentration difference at the corresponding upstream and downstream hydrogel locations. At the interface where the electrode contacts the hydrogel, a large number of hydrogen and hydroxide ions accumulate, respectively. The process of converting ion signals into electronic signals, known as the charge injection mechanism, is achieved through the accumulation of ions at the hydrogel, resulting in the charging and discharging of the electrical double layer. In this way, the upstream and downstream ion signals are converted into electronic signals, which are then acquired by external circuitry. This allows for the determination of different potential differences at different flow rates, thereby enabling real-time flow detection.

[0096] In this embodiment, a glass substrate is obtained; a target recess is etched on the glass substrate along a predetermined trajectory using an ultraviolet laser; a pre-formed hydrogel is disposed on the surface of the glass substrate having the target recess; the pre-formed hydrogel is irradiated with ultraviolet light to solidify the pre-formed hydrogel into a hydrogel film, the hydrogel film is encapsulated on the glass substrate, and a channel formed through the target recess exists between the glass substrate and the solidified hydrogel film; the channel is used for fluid to pass through; a first electrode and a second electrode are respectively fixed at positions on the hydrogel film corresponding to the inlet and outlet of the channel; the first electrode and the second electrode are used to obtain the potential difference when the fluid flows through the channel, and the flow rate of the fluid is determined based on the potential difference. In this way, by obtaining the potential difference when the fluid flows through the channel, and determining the fluid flow rate based on the potential difference, the determination of the fluid flow rate is not affected by the fluid temperature or the chemical composition of the fluid, thereby improving the accuracy of the determined fluid flow rate. Furthermore, since the channel for the fluid to pass through is determined by a glass substrate and a hydrogel membrane, and the shape of the glass substrate and the hydrogel membrane is less affected by temperature or chemical composition, the shape of the channel can be prevented from changing during the fluid flow detection process, thus avoiding inaccurate fluid flow detection and further improving the accuracy of the determined fluid flow rate.

[0097] Figure 2A schematic flowchart illustrating another method for manufacturing a flow detection device provided in this application embodiment is shown below. Figure 2 As shown, this method is applied to the manufacturing equipment of the flow detection device. Figure 2 In a corresponding embodiment, step S102, which involves etching the target recess along a predetermined trajectory on the glass substrate, may include steps S201 and S202:

[0098] S201. Based on at least one of the conductivity, viscosity, and impurity content of the fluid to be detected by the flow detection device, determine at least one of the target cross-sectional size, target cross-sectional shape, and target recess length for etching.

[0099] For example, the fabrication equipment for the flow detection device may store at least one of conductivity range, viscosity range, and impurity content range, and a correlation between them and at least one of target cross-sectional size, target cross-sectional shape, and target recess length. Based on the correlation and at least one of conductivity, viscosity, and impurity content of the fluid to be detected, at least one of the target cross-sectional size, target cross-sectional shape, and target recess length for etching is determined.

[0100] For example, if the fluid has higher conductivity, the target cross-sectional size can be larger, and / or the target recess length can be smaller; conversely, if the fluid has lower conductivity, the target cross-sectional size can be smaller, and / or the target recess length can be larger.

[0101] For example, if the viscosity of the fluid is higher, the target cross-sectional size can be larger, and / or the target cross-sectional shape can be circular, and / or the target concave length can be smaller; conversely, if the viscosity of the fluid is lower, the target cross-sectional size can be smaller, and / or the target cross-sectional shape can be rectangular, and / or the target concave length can be larger.

[0102] For example, if the impurity content of the fluid is higher, the target cross-sectional size can be larger, and / or the target cross-sectional shape can be circular, and / or the target recess length can be smaller; conversely, if the impurity content of the fluid is lower, the target cross-sectional size can be smaller, and / or the target cross-sectional shape can be rectangular, and / or the target recess length can be larger.

[0103] S202. Based on at least one of the target cross-sectional size, the target cross-sectional shape, and the target recess length, the ultraviolet laser is used to etch the target recess on the glass substrate along the predetermined trajectory.

[0104] In some embodiments, etching configuration information can be generated based on at least one of the target cross-sectional size, the target cross-sectional shape, and the target recess length. Based on the etching configuration information, the target recess is etched on the glass substrate along the predetermined trajectory using the ultraviolet laser.

[0105] In this way, the ultraviolet laser etching module can use the ultraviolet laser to etch a target recess on the glass substrate along the predetermined trajectory based on the etching configuration information, which conforms to at least one of the target cross-sectional size, the target cross-sectional shape, and the target recess length.

[0106] In this embodiment, based on at least one of the conductivity, viscosity, and impurity content of the fluid to be detected by the flow detection device, at least one of the target cross-sectional size, target cross-sectional shape, and target recess length is determined. Based on at least one of the target cross-sectional size, target cross-sectional shape, and target recess length, the ultraviolet laser is used to etch the target recess on the glass substrate along the predetermined trajectory. This allows the ultraviolet laser etching module to etch a target recess that meets the detection requirements.

[0107] Figure 3 A schematic flowchart illustrating another method for manufacturing a flow detection device provided in this application embodiment is shown below. Figure 3 As shown, this method is applied to the manufacturing equipment of the flow detection device. Figure 3 In a corresponding embodiment, step S202, which involves etching the target recess along the predetermined trajectory on the glass substrate according to at least one of the target cross-sectional size, the target cross-sectional shape, and the target recess length, may include steps S301 and S302:

[0108] S301. Determine at least one of the following based on at least one of the target cross-sectional dimensions, the target cross-sectional shape, and the target recess length: laser power, focal position, focal length, relay frequency, power pulse width, and cutting speed.

[0109] For example, if the target cross-sectional size is larger, the laser power is greater, and / or the tuning relay frequency is higher, and / or the power pulse width is greater, and / or the cutting speed is higher; conversely, if the target cross-sectional size is smaller, the laser power is lower, and / or the tuning relay frequency is lower, and / or the power pulse width is smaller, and / or the cutting speed is lower.

[0110] For example, if the target cross-section is rectangular, the higher the laser power, and / or the higher the tuning relay frequency, and / or the larger the power pulse width, and / or the higher the cutting speed; if the target cross-section is semi-circular, the lower the laser power, and / or the lower the tuning relay frequency, and / or the smaller the power pulse width, and / or the lower the cutting speed.

[0111] For example, if the length of the target recess is greater than the length threshold, the laser power is greater, and / or the tuning relay frequency is higher, and / or the power pulse width is greater, and / or the cutting speed is higher; conversely, if the length of the target recess is less than or equal to the length threshold, the laser power is lower, and / or the tuning relay frequency is lower, and / or the power pulse width is smaller, and / or the cutting speed is lower.

[0112] In some embodiments, the laser power required for laser cutting depends primarily on at least one of the following: the material to be cut, the material thickness, and the required cutting speed. Laser power significantly affects at least one of the following: cutting thickness, cutting speed, and kerf width. Generally, increasing laser power increases the thickness of the material that can be cut, accelerates the cutting speed, and also increases the kerf width.

[0113] In some embodiments, the focal point location has a significant impact on the cut width. Generally, the cutting depth is maximized and the cut width is minimized when the focal point is located approximately one-third below the material surface.

[0114] In some embodiments, when the depth of the target recess is large, a longer focal length of light can be used to obtain a cut surface with good perpendicularity. When the depth of the target recess is small, a shorter focal length of light can be used, resulting in a smaller spot diameter, higher power density, and faster cutting speed.

[0115] S302. Based on at least one of the laser power, the focal position, the focal length, the tuning frequency, the power pulse width, and the cutting speed, the ultraviolet laser is used to etch the target recess on the glass substrate along the predetermined trajectory.

[0116] In some embodiments, etching configuration information can be determined based on at least one of the laser power, the focal position, the focal length, the tuning relay frequency, the power pulse width, and the cutting speed. Based on the etching configuration information, the ultraviolet laser is used to etch the target recess on the glass substrate along the predetermined trajectory.

[0117] In some embodiments of this application, etching the target recess on the glass substrate along the predetermined trajectory using the ultraviolet laser includes: etching the target recess on the glass substrate along a straight line connecting two opposite diagonal points of the glass substrate using the ultraviolet laser.

[0118] In some embodiments, the length of the target recess may be equal to the length of the straight line connecting two opposite diagonal points of the glass substrate. For example, the predetermined trajectory may be a first straight line that overlaps with the straight line connecting two opposite diagonal points of the glass substrate, and the two endpoints of the first straight line are respectively the two opposite diagonal points of the glass substrate. In other embodiments, the length of the target recess may be less than the length of the straight line connecting two opposite diagonal points of the glass substrate. For example, the predetermined trajectory may be a second straight line that overlaps with the straight line connecting two opposite diagonal points of the glass substrate, and at least one endpoint of the second straight line does not belong to the two opposite diagonal points of the glass substrate.

[0119] In some embodiments, the predetermined trajectory may be a third straight line that overlaps with one axis of symmetry of the glass substrate, and the two endpoints of the third straight line are at the midpoints of two opposite sides of the glass substrate. In other embodiments, the predetermined trajectory may be a fourth straight line that overlaps with one axis of symmetry of the glass substrate, and at least one of the two endpoints of the fourth straight line is not at the midpoint of two opposite sides of the glass substrate.

[0120] Figure 4 A schematic diagram of a predetermined trajectory provided in an embodiment of this application, such as... Figure 4 As shown, the predetermined trajectory 41 can be a first straight line, which overlaps with the straight line connecting two opposite diagonal points of the glass substrate 42, and the two endpoints of the first straight line are the two opposite diagonal points of the glass substrate 42, respectively.

[0121] Figure 5 A schematic diagram of another predetermined trajectory provided in the embodiments of this application, such as Figure 5 As shown, the predetermined trajectory 41 can be a second straight line, which overlaps with the straight line connecting two opposite diagonal points of the glass substrate 42, and neither of the two endpoints of the second straight line is the two opposite diagonal points of the glass substrate 42.

[0122] Figure 6 A schematic diagram of yet another predetermined trajectory provided in the embodiments of this application, such as... Figure 6 As shown, the predetermined trajectory 41 can be a third straight line, which overlaps with one axis of symmetry of the glass substrate 42, and the two endpoints of the third straight line are at the midpoints of two opposite sides of the glass substrate 42.

[0123] Figure 7 A schematic diagram of another predetermined trajectory provided in the embodiments of this application, such asFigure 7 As shown, the predetermined trajectory 41 can be a fourth straight line, which overlaps with one axis of symmetry of the glass substrate 42, and neither of the two endpoints of the fourth straight line is at the midpoint of the two opposite sides of the glass substrate 42.

[0124] In other embodiments, the glass substrate can be circular, and the predetermined trajectory can be a straight line passing through the center of the circle. This avoids injury to users due to sharp parts when the flow detection device is used in scenarios such as blood detection, making the flow detection device safer to use and easier to manufacture.

[0125] In some other embodiments, the glass substrate can be elliptical in shape, and the predetermined trajectory can be a straight line passing through the major axis. This avoids injury to users due to sharp parts when the flow detection device is used in scenarios such as blood detection, making the flow detection device safer to use and easier to manufacture. In addition, since the predetermined trajectory is a straight line passing through the major axis, the length of the target recess can be increased and less glass substrate material is used, thereby saving material costs and improving detection accuracy.

[0126] In some embodiments, the predetermined trajectory includes a first trajectory and a second trajectory connected to the first trajectory; the target recess includes a first recess and a second recess; the target cross-sectional size includes a first cross-sectional size and a second cross-sectional size; the target cross-sectional shape includes a first cross-sectional shape and a second cross-sectional shape; and the target recess length includes a first recess length and a second recess length.

[0127] In some embodiments, etching the target recess along the predetermined trajectory on the glass substrate according to at least one of the target cross-sectional size, the target cross-sectional shape, and the target recess length includes: determining a first cutting parameter of the ultraviolet laser according to at least one of the first cross-sectional size, the first cross-sectional shape, and the first recess length; determining a second cutting parameter of the ultraviolet laser according to at least one of the second cross-sectional size, the second cross-sectional shape, and the second recess length; etching the first recess along the first trajectory on the glass substrate using the ultraviolet laser based on the first cutting parameter of the ultraviolet laser; and etching the second recess along the second trajectory on the glass substrate using the ultraviolet laser based on the second cutting parameter of the ultraviolet laser.

[0128] Wherein, the first cross-sectional dimension gradually decreases along the direction from the first recess to the second recess, and the second cross-sectional dimension is the same along the direction from the first recess to the second recess; the cross-sectional dimension of the end of the first recess near the second recess is equal to the second cross-sectional dimension.

[0129] In some embodiments, the first cutting parameters may include at least one of the following: first laser power, first focal position, first focal length, first relay frequency, first power pulse width, and first cutting speed.

[0130] In some embodiments, the second cutting parameters may include at least one of the following: second laser power, second focal position, second focal length, second relay frequency, second power pulse width, and second cutting speed.

[0131] In some embodiments, at least some of the parameters in the first cutting parameter and the second cutting parameter are different.

[0132] During implementation, the laser power may include a first laser power and a second laser power, the focal position may include a first focal position and a second focal position, the focal length may include a first focal length and a second focal length, the tuning relay frequency may include a first tuning relay frequency and a second tuning relay frequency, the power pulse width may include a first power pulse width and a second power pulse width, and the cutting speed may include a first cutting speed and a second cutting speed.

[0133] In some embodiments, the direction from the first recess to the second recess can be the direction of fluid flow.

[0134] In this way, the flow direction includes a first concave portion and a second concave portion. The cross-sectional size of the first concave portion gradually decreases, while the cross-sectional size of the second concave portion remains unchanged. Furthermore, the cross-sectional size of the end of the first concave portion is equal to that of the second concave portion. In this way, the first concave portion can act as a flow guide, allowing it to accommodate more fluid when the flow rate of the fluid entering the channel is unstable. This serves as a buffer, preventing damage to the flow detection device.

[0135] In some embodiments, the length of the first recess may be less than the length of the second recess. In other embodiments, the length of the first recess may be equal to the length of the second recess.

[0136] In some embodiments, fixing the first electrode and the second electrode to positions on the hydrogel membrane corresponding to the inlet and outlet of the channel, respectively, includes:

[0137] The first electrode and the second electrode are respectively fixed at the inlet and outlet positions of the channel formed through the second recess in the hydrogel membrane.

[0138] In this way, by fixing the first electrode and the second electrode at the corresponding positions of the inlet and outlet of the channel formed by the second recess in the hydrogel membrane, respectively, and with the same cross-sectional size of the channel formed by the second recess, the flow detection device can accurately measure the flow rate.

[0139] In other embodiments, the cross-sectional dimensions of the target recess can be increased and then decreased along the direction of fluid flow, thereby enabling the fluid in the channel formed by the target recess to be fully electrolyzed and the electrolyzed ions to flow fully, thereby improving the accuracy of the flow measurement by the flow detection device.

[0140] In some embodiments, the step of depositing the pre-formed hydrogel on the surface of the glass substrate having the target recess includes: modifying the surface of the glass substrate for etching the recess using a modifier; wherein the adhesive strength of the modified glass substrate is greater than the adhesive strength of the glass substrate before modification; and depositing the pre-formed hydrogel on the surface of the modified glass substrate.

[0141] In some embodiments, the modifier may be a viscosity modifier. In some embodiments, the modifier may be disposed on the surface of the glass substrate from which the target recess is removed, thereby enhancing the adhesion between the preformed hydrogel and the glass substrate, and thus enabling the preformed hydrogel to be reliably encapsulated on the glass substrate when exposed to ultraviolet light.

[0142] In some embodiments, the fabrication apparatus may further include a modification module for modifying the surface of the glass substrate used for etching the recesses with a modifier. A hydrogel application module of the fabrication apparatus may be used to apply the pre-formed hydrogel to the surface of the modified glass substrate.

[0143] In some embodiments, the method further includes: dissolving hydroxyethyl methacrylate monomer, ethylene glycol dimethacrylate, methacrylic acid, deionized water, photoinitiator, and 2,2-dimethoxy-2-phenylacetophenone in an n-vinylpyrrolidone solution to obtain a target solution; injecting the target solution into a mold and irradiating the target solution with ultraviolet light to obtain the pre-formed hydrogel; the mold is transparent to ultraviolet light.

[0144] In some embodiments, the fabrication apparatus may further include a hydrogel fabrication module for: dissolving hydroxyethyl methacrylate monomer, ethylene glycol dimethacrylate, methacrylic acid, deionized water, photoinitiator, and 2,2-dimethoxy-2-phenylacetophenone in an n-vinylpyrrolidone solution to obtain a target solution; injecting the target solution into a mold and irradiating the target solution with ultraviolet light to obtain the pre-formed hydrogel.

[0145] In this embodiment, a 200μm thick hydrogel film was fabricated in a test environment. The film did not deform after repeated bending, indicating good mechanical strength. In this embodiment, the hydrogel film was immersed in deionized water, and its thickness and mass were tested periodically. The swelling of the hydrogel over time was observed, showing a swelling ratio of approximately 1.7 times. This indicates that the hydrogel in this embodiment has a low swelling rate and is suitable for use as an encapsulation material.

[0146] The flow detection device in this embodiment can also be called a hydrogel microfluidic chip. The hydrogel microfluidic chip can detect the flow rate in the channel in real time and rapidly. The hydrogel microfluidic chip has a three-layer structure: from top to bottom, electrodes, hydrogel, and a glass channel. The electrodes are attached to the surface of the hydrogel to perform non-invasive sensing of small flow rates in the channel.

[0147] In this embodiment, a UV laser micromachining platform can be used to print microchannels on glass. By continuously adjusting the laser cutting power and number of cuts, microchannels of suitable size can be obtained, and inlets and outlets can be printed to allow fluid flow. In some embodiments, metal electrodes can be attached to the surface of the hydrogel to measure the potential difference across the channel. Different potential differences are obtained with different flow rates, thereby determining the flow rate of the fluid within the channel.

[0148] In some embodiments, channels with a size of 100 micrometers can be fabricated on a glass substrate using an ultraviolet laser micromachining platform. The glass substrate is then plasma-treated and immersed in a prepared silane coupling agent solution (i.e., modification treatment), resulting in Si-O bonds on the surface of the glass substrate (i.e., the modified glass substrate). A semi-formed hydrogel (i.e., the pre-formed hydrogel described above) is then attached to the surface of this modified glass substrate. After ultraviolet light initiation, the hydrogel film is well encapsulated on the glass substrate, forming the channel. Two Luer connectors are then connected to the inlet and outlet of the channel, respectively. These two Luer connectors can also be used to connect to an inlet pipe and an outlet pipe, thus completing a hydrogel microfluidic chip. Alternatively, flow rate at the target location can be detected by attaching platinum wire electrodes to the hydrogel surface with insulating adhesive.

[0149] This application also analyzes the influencing factors of flow rate detection through experiments, including the thickness of the hydrogel and the type of fluid. Experiments revealed that a thinner hydrogel results in a larger potential difference. While the type and quantity of ions in the fluid do not affect the magnitude of the potential difference, they do affect the response time. Thus, in some embodiments, the fluid flow rate can be determined based on the thickness of the hydrogel membrane and the potential difference as the fluid flows through the channel. In some embodiments, the time for displaying the fluid flow rate can be determined based on the type and quantity of ions in the fluid, thereby ensuring that the flow rate displayed by the display module is the accurate fluid flow rate.

[0150] In some embodiments, the potential difference can increase linearly with the flow rate, and the response time is within 25 seconds.

[0151] Figure 8 This is a schematic diagram of the structure of a flow detection device provided in an embodiment of this application, as shown below. Figure 8 As shown, the flow detection device 80 includes:

[0152] The glass substrate 81 has a target recess etched along a predetermined trajectory;

[0153] A hydrogel membrane 82 is fixed to one side of the glass substrate 81 having the target recess, and a channel formed through the target recess exists between the glass substrate 81 and the hydrogel membrane 82; the channel is used for the passage of fluid;

[0154] The first electrode 83 and the second electrode 84 are respectively fixed at positions on the hydrogel membrane 82 corresponding to the inlet and outlet of the channel; the first electrode 83 and the second electrode 84 are used to obtain the potential difference when the fluid flows through the channel, and to determine the flow rate of the fluid based on the potential difference.

[0155] Among them, the channel 85 for the passage of fluid, such as Figure 8 The dotted line portion is shown in the diagram. Inlet and outlet pipes can be connected to both ends of channel 85, allowing fluid to flow through the channel to detect the flow rate. In some embodiments, the inlet and outlet pipes can be connected to the two ends of the channel via Luer connectors, respectively.

[0156] In some embodiments, the flow detection device 80 may include a display module that can display the determined flow rate of the fluid.

[0157] Of course, the flow detection device 80 may also include a processing module for obtaining the potential difference and determining the flow rate of the fluid based on the potential difference. For example, the potential difference and flow rate may be directly proportional, or the flow rate may be obtained based on the potential difference and a preset calculation formula. For yet another example, the processing module may store multiple lists of relationships between potential differences and multiple flow rates, and determine the flow rate of the fluid based on the list of relationships and the potential difference when the fluid flows through the channel. For yet another example, the processing module may store a fitted relationship curve between the potential difference and the flow rate, and determine the flow rate of the fluid based on the relationship curve and the potential difference when the fluid flows through the channel.

[0158] This application also provides a flow detection method, which is implemented using the above-described flow detection device.

[0159] Since the manufacturing method of the flow detection device and flow detection have already been discussed in the previous text, they will be briefly mentioned again.

[0160] The above description is merely a preferred embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application.

Claims

1. A method for manufacturing a flow detection device, characterized in that, include: Obtain a glass substrate; The target recess is etched along a predetermined trajectory on the glass substrate; A pre-formed hydrogel is disposed on the surface of the glass substrate having the target recess; The pre-formed hydrogel is cured into a hydrogel film, which is encapsulated on the glass substrate. A channel formed through the target recess exists between the glass substrate and the cured hydrogel film, and the channel is used for the passage of fluid. The first electrode and the second electrode are fixed at positions on the hydrogel membrane corresponding to the inlet and outlet of the channel, respectively, so as to obtain the potential difference when the fluid flows through the channel through the first electrode and the second electrode, and to determine the flow rate of the fluid based on the potential difference.

2. The method according to claim 1, characterized in that, The process of etching the target recess along a predetermined trajectory on the glass substrate includes: Based on at least one of the following factors—conductivity, viscosity, and impurity content of the fluid to be tested—determine at least one of the following factors: target cross-sectional size, target cross-sectional shape, and target recess length for etching. The target recess is etched on the glass substrate along the predetermined trajectory according to at least one of the target cross-sectional size, the target cross-sectional shape, and the target recess length.

3. The method according to claim 2, characterized in that, The step of etching the target recess along the predetermined trajectory on the glass substrate according to at least one of the target cross-sectional size, the target cross-sectional shape, and the target recess length includes: Based on at least one of the target cross-sectional dimensions, the target cross-sectional shape, and the target recess length, determine at least one of the following: laser power, focal position, focal length, relay frequency, power pulse width, and cutting speed. Based on at least one of the laser power, the focal position, the focal length, the relay frequency, the power pulse width, and the cutting speed, an ultraviolet laser is used to etch the target recess on the glass substrate along the predetermined trajectory.

4. The method according to claim 3, characterized in that, The step of etching the target recess on the glass substrate along the predetermined trajectory using the ultraviolet laser includes: Using the ultraviolet laser, the target recess is etched into the glass substrate along a straight line connecting two opposite diagonal points.

5. The method according to claim 3, characterized in that, The predetermined trajectory includes a first trajectory and a second trajectory connected to the first trajectory; the target recess includes a first recess and a second recess; the target cross-sectional dimension includes a first cross-sectional dimension and a second cross-sectional dimension; the target cross-sectional shape includes a first cross-sectional shape and a second cross-sectional shape; the target recess length includes a first recess length and a second recess length. The step of etching the target recess along the predetermined trajectory on the glass substrate according to at least one of the target cross-sectional size, the target cross-sectional shape, and the target recess length includes: The first cutting parameters of the ultraviolet laser are determined based on at least one of the first cross-sectional dimensions, the first cross-sectional shape, and the first concave length. The second cutting parameters of the ultraviolet laser are determined based on at least one of the second cross-sectional dimensions, the second cross-sectional shape, and the second concave length. Based on the first cutting parameters of the ultraviolet laser, the first recess is etched on the glass substrate along the first trajectory using the ultraviolet laser; Based on the second cutting parameters of the ultraviolet laser, the second recess is etched on the glass substrate along the second trajectory using the ultraviolet laser; Wherein, the first cross-sectional dimension gradually decreases along the direction from the first recess to the second recess, and the second cross-sectional dimension is the same along the direction from the first recess to the second recess; the cross-sectional dimension of the end of the first recess near the second recess is equal to the second cross-sectional dimension.

6. The method according to claim 5, characterized in that, The step of fixing the first electrode and the second electrode to positions on the hydrogel membrane corresponding to the inlet and outlet of the channel, respectively, includes: The first electrode and the second electrode are respectively fixed at the inlet and outlet positions of the channel formed by the second recess in the hydrogel membrane.

7. The method according to any one of claims 1 to 3, characterized in that, The step of depositing the pre-formed hydrogel on the surface of the glass substrate having the target recess includes: The surface of the glass substrate used for etching the recess is modified using a modifier; wherein the adhesive strength of the modified glass substrate is greater than that of the glass substrate before modification. The pre-formed hydrogel is applied to the surface of the modified glass substrate.

8. The method according to any one of claims 1 to 3, characterized in that, The method further includes: The target solution was obtained by dissolving hydroxyethyl methacrylate monomer, ethylene glycol dimethacrylate, methacrylic acid, deionized water, photoinitiator, and 2,2-dimethoxy-2-phenylacetophenone in an n-vinylpyrrolidone solution. The target solution is injected into a mold and irradiated with ultraviolet light to obtain the pre-formed hydrogel; the mold is transparent to ultraviolet light.

9. A flow detection device, characterized in that, The device includes: A glass substrate having a target recess etched along a predetermined trajectory; A hydrogel film is fixed to one side of the glass substrate having the target recess, and a channel formed through the target recess exists between the glass substrate and the hydrogel film, the channel being used for the passage of fluid; The first electrode and the second electrode are respectively fixed at positions on the hydrogel membrane corresponding to the inlet and outlet of the channel; the first electrode and the second electrode are used to obtain the potential difference when the fluid flows through the channel, and to determine the flow rate of the fluid based on the potential difference.

10. A flow rate detection method, characterized in that, The flow rate of the fluid is detected using the flow detection device as described in claim 9.

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