Liquid chemical detection device and substrate processing apparatus including the same

Abstract

The liquid chemical detection device of the present application includes: a base portion formed with an inlet for inflow of a liquid chemical; a flow passage portion including: a first region portion disposed adjacent to the inlet of the base portion, and in which the liquid chemical inflowing from the inlet moves at a changed fluid velocity; and a second region portion in series communication with the first region portion, and in which the liquid chemical discharged from the first region portion moves; a sensing portion including: a first sensing member that senses a first signal as an electrical signal of the first region portion; and a second sensing member that senses a second signal as an electrical signal of the second region portion; and a discriminating portion that receives the signals from the sensing portion, judges that a particle and a bubble are sensed when the electric currents of the first signal and the second signal change with respect to a reference value, and discriminates the particle and the bubble according to the electric current difference of the first signal and the second signal or the time difference of the electric current change.

Description

Technical Field

[0001] This invention relates to a liquid chemical detection device and a substrate processing device including the same. Background Technology

[0002] Particles remaining on the substrate surface have a significant impact on the characteristics and yield of semiconductor devices. Therefore, cleaning processes to remove various contaminants adhering to the substrate surface are crucial in semiconductor manufacturing. Substrate cleaning processes are performed before and after each step in the semiconductor manufacturing process. Typically, substrate cleaning includes: chemical treatment processes, using solutions of chemicals (treatment solutions) to remove particles remaining on the substrate; rinsing processes, using pure water to remove chemicals remaining on the substrate; and drying processes, using drying gases to dry the substrate.

[0003] However, when supplying liquid chemicals via pipelines, bubbles or particles may be generated within the liquid chemicals during the process, depending on various circumstances. For example, bubbles may be irregularly generated during the supply of liquid chemicals due to pump operation or valve on / off operation.

[0004] In particular, for next-generation semiconductors, even particles that are very small, such as those on the micrometer (μ) or nanometer (n) scale, can affect yield. Therefore, it is necessary to remove tiny particles or bubbles.

[0005] Bubbles and particles of micrometer (μ) or nanometer (n) size have different characteristics or causes of formation, and their removal methods also differ. Furthermore, to remove bubbles or particles, it is necessary to check the liquid chemicals for their presence before attempting removal. Summary of the Invention

[0006] Technical problems to be solved

[0007] On the one hand, the presence or absence of bubbles can be determined indirectly through methods such as flow meter malfunctions. However, this method is difficult to accurately assess the state of liquid chemicals. Furthermore, it is difficult to detect particles within the fluid solely through flow meter malfunctions. Additionally, while SURFSCAN devices (Program to operate a LASER profilometer) have recently been developed, these devices are large and expensive. Moreover, although SURFSCAN devices can detect the size or location of defects, they struggle to determine whether the defect is caused by bubbles or particles.

[0008] The technical problem to be solved by the present invention is to provide a liquid chemical detection device with a simple structure that does not use expensive equipment.

[0009] Another technical problem to be solved by the present invention is to provide a substrate processing apparatus that can detect bubbles and particles simply by adding a simple configuration.

[0010] The purpose of this invention is not limited to the above-described purposes, and other purposes not mentioned will be clearly understood by those skilled in the art through the following description.

[0011] Solution

[0012] To solve the above-mentioned technical problems, one aspect of the liquid chemical detection device of the present invention includes: a base portion having an inlet for the inflow of liquid chemicals; a flow channel portion including: a first region portion arranged adjacent to the inlet of the base portion, wherein the liquid chemicals flowing in from the inlet move in the first region portion at a changed fluid velocity; and a second region portion connected in series with the first region portion, wherein the liquid chemicals discharged from the first region portion move in the second region portion; a sensing unit including: a first sensing component sensing a first signal as an electrical signal of the first region portion; and a second sensing component sensing a second signal as an electrical signal of the second region portion; and a discrimination unit receiving the signal from the sensing unit, determining that particles and bubbles are detected when the current of the first signal and the second signal changes relative to a reference value, and distinguishing particles and bubbles based on the current difference or the time difference of the current change between the first signal and the second signal.

[0013] To solve the aforementioned technical problem, one aspect of the substrate processing apparatus of the present invention includes: a liquid chemical supply unit for supplying liquid chemicals, a liquid chemical detection device for receiving the liquid chemicals from the liquid chemical supply unit, and a rotary chuck on which at least one of the liquid chemical detection device and a wafer is arranged.

[0014] To solve the aforementioned technical problem, the liquid chemical detection device of the present invention includes: a base portion having an inlet for the inflow of liquid chemicals; a flow channel portion including a first region portion and a second region portion, the first region portion being disposed adjacent to the inlet of the base portion, the second region portion being connected in series with the first region portion, and the liquid chemicals discharged from the first region portion moving in the second region portion; a sensing unit including a first sensing component and a second sensing component, the first sensing component sensing a first signal as an electrical signal of the first region portion, and the second sensing component sensing a second signal as an electrical signal of the second region portion; and a discrimination unit receiving signals from the sensing unit, determining that particles and bubbles are detected when the currents of the first signal and the second signal change relative to a reference value, and determining the detection of particles and bubbles according to the first... Particles and bubbles are distinguished by the current difference or time difference of current change between a first signal and a second signal. The inlet is located in the central portion of the base portion. One or more flow channels are provided and are arranged radially from the central portion of the base portion. Each flow channel includes a first section and a second section. The first section has a first width, and the second section has a second width that is larger than the first width. Each of the first and second regions is provided with one or more first sections and one or more second sections. For the fluid velocity of liquid chemicals flowing through the flow channels, centrifugal force is generated by receiving rotational force from the outside, such that the fluid velocity of liquid chemicals moving in the second region is increased compared to the first region. The sensing unit is electrically connected to the second section.

[0015] Specific details of other embodiments are included in the detailed description and accompanying drawings. Attached Figure Description

[0016] Figure 1 This is a view showing a substrate processing apparatus according to a first embodiment of the present invention.

[0017] Figure 2 This is a view showing the liquid chemical detection device according to a first embodiment of the present invention arranged in a chamber.

[0018] Figure 3 This is a view showing the liquid chemical detection device according to a first embodiment of the present invention in a state of being separated into multiple layers.

[0019] Figure 4 This is a view showing the base portion of the liquid chemical detection device according to a first embodiment of the present invention.

[0020] Figure 5 This is a view showing the movement of fluid containing particles in the flow channel section of a liquid chemical detection device according to a first embodiment of the present invention.

[0021] Figure 6 It is shown Figure 5 A view of the changes in electrical signals from the sensing unit.

[0022] Figure 7 This is a view showing the movement of fluid containing air bubbles in the flow channel section of a liquid chemical detection device according to a first embodiment of the present invention.

[0023] Figure 8 It is shown Figure 7 A view of the changes in electrical signals from the sensing unit.

[0024] Figure 9a This is a view showing another variation of the first and second regions of the flow channel portion of the liquid chemical detection device according to the first embodiment of the present invention.

[0025] Figure 9b This is a view showing another variation of the first and second regions of the flow channel portion of the liquid chemical detection device according to the first embodiment of the present invention.

[0026] Figure 10 It is shown Figure 9b A view of the changes in electrical signals from the sensing unit.

[0027] Figure 11 This is a view showing the liquid chemical detection device according to a second embodiment of the present invention in a state of being separated into multiple layers.

[0028] Figure 12 This is a view showing the base portion of the liquid chemical detection device according to a third embodiment of the present invention.

[0029] Figure 13 This is a view showing the base portion of the liquid chemical detection device according to a fourth embodiment of the present invention.

[0030] Figure 14 This is a view showing the base portion of the liquid chemical detection device according to a fifth embodiment of the present invention.

[0031] Figure 15 This is a view showing the base portion of the liquid chemical detection device according to a sixth embodiment of the present invention.

[0032] Figure 16 This is a view showing a liquid chemical detection device according to a seventh embodiment of the present invention.

[0033] Figure 17 This is a view showing a liquid chemical detection device according to an eighth embodiment of the present invention.

[0034] Figure 18 This is a view showing a substrate processing apparatus according to a second embodiment of the present invention.

[0035] Figure 19 This is a view showing the rotating chuck of a substrate processing apparatus according to a second embodiment of the present invention.

[0036] Figure 20 This is a flowchart illustrating a method for detecting liquid chemicals on a substrate according to an embodiment of the present invention.

[0037] Explanation of reference numerals in the attached figures

[0038] 100: Detection device; 110: Base section

[0039] 120: Flow channel section 120: Sensing section

[0040] 140: Distinguishing Part 150: Layer Part

[0041] 160: Battery 170: Drive Unit Detailed Implementation

[0042] Preferred embodiments of the invention will be described in detail below with reference to the accompanying drawings. The advantages and features of the invention, as well as the methods of achieving these advantages and features, will become apparent from the embodiments described in detail below in conjunction with the accompanying drawings. However, the invention is not limited to the embodiments disclosed below, but can be implemented in various different forms, and these embodiments are provided only to complete the disclosure of the invention and to fully inform those skilled in the art of the scope of the invention, and the invention is defined only by the scope of the claims. Throughout the specification, the same reference numerals refer to the same constituent elements.

[0043] The terminology used in this specification is for describing embodiments and is not intended to limit the invention. In this specification, the singular form also includes the plural form unless otherwise specified in the sentence. The terms "comprises" and / or "comprising" as used in this specification mean including the mentioned constituent elements, steps, operations, and / or components, without excluding the presence or addition of more than one other constituent element, step, operation, and / or component.

[0044] Figure 1 This is a view showing a substrate processing apparatus according to a first embodiment of the present invention, and Figure 2 This is a view showing the liquid chemical detection device according to a first embodiment of the present invention arranged in a chamber. Figure 3 This is a view showing the liquid chemical detection device according to the first embodiment of the present invention in a state of being separated into multiple layers, and Figure 4 This is a view showing the base portion of the liquid chemical detection device according to a first embodiment of the present invention. Figure 5This is a view illustrating the fluid movement containing particles in the flow channel section of a liquid chemical detection device according to a first embodiment of the present invention, and Figure 6 It is shown Figure 5 A view showing the changes in the electrical signal of the sensing unit. Furthermore, Figure 7 This is a view illustrating fluid movement containing air bubbles in the flow channel section of a liquid chemical detection device according to a first embodiment of the present invention, and Figure 8 It is shown Figure 7 A view showing the changes in the electrical signal of the sensing element.

[0045] First, refer to Figure 1 and Figure 2 According to an embodiment of the present invention, the substrate processing apparatus 1 is an apparatus for processing a substrate (hereinafter referred to as a wafer), which may include a liquid chemical supply unit (not shown), a chamber 50, and a liquid chemical detection device 100.

[0046] The liquid chemicals supply unit is a structure that supplies liquid chemicals and may include tank 10, circulation pipeline 20, supply pipeline 30 and recovery pipeline 40.

[0047] First, one or more tanks 10 can be set. For example, refer to... Figure 1 Two tanks 10 can be provided. Multiple tanks 10 are provided so that when the liquid chemicals (hereinafter referred to as fluids) in one tank 10 are depleted, it is not necessary to immediately refill the tank 10 that is supplying the liquid chemicals; instead, another tank 10 can be used as a backup, but this is not a limitation. For example, one or more tanks 10 can be connected to each other, or the liquid chemicals can be moved by the suction operation of the pump 11. Furthermore, various structural modifications are possible, such as connecting a heater 12 to apply heat to the liquid chemicals.

[0048] Furthermore, tank 10 may be connected to a circulation line 20. The circulation line 20 can be connected to tank 10 and can be connected to the supply line 30 and the recovery line 40, described later. Moreover, liquid chemicals can be supplied from tank 10 to chamber 50 through the supply line 30 connected to the circulation line 20. Additionally, the recovery line 40 can be connected to the circulation line 20, allowing liquid chemicals that have passed through the circulation line 20 to be collected back into tank 10 via the recovery line 40.

[0049] Furthermore, various structures can be installed on the circulation line 20 for controlling the temperature and flow rate of the liquid chemicals supplied from the tank 10 to the chamber 50. For example, the circulation line 20 may include a main pump 21, a damper 22, a main heater 23, a filter 24, a foam cutter 25, a flow meter 26, and a valve (not shown). The structures such as the main pump 21, damper 22, main heater 23, and flow meter 26 installed on the circulation line 20 are the same as known mechanisms, therefore detailed descriptions of them will be omitted.

[0050] The supply line 30 is the structure through which the liquid chemicals supplied to the chamber 50 flow, and it can connect the circulation line 20 and the chamber 50. Therefore, the liquid chemicals can move from the circulation line 20 to the chamber 50 via the supply line 30. At this time, fluid is drawn in by the suction operation of the main pump 21 located in the circulation line 20, thus creating fluid flow, and the flow rate can be adjusted by the opening degree of a valve (not shown). Furthermore, various structural modifications are possible, such as installing a flow meter 31 separate from the circulation line 20 in the supply line 30.

[0051] Furthermore, the liquid chemicals can be recovered into the tank 10 via a recovery line 40 branching off from the supply line 30. For example, the recovery line 40 can be connected from the supply line 30 to the circulation line 20. Moreover, the liquid chemicals passing through the recovery line 40 can move from the supply line 30 to the tank 10 via the circulation line 20. Additionally, a three-way valve 32 can be installed at the branch point of the recovery line 40 from the supply line 30. Therefore, the liquid chemicals flowing through the supply line 30 can move to the chamber 50 via the supply line 30, or move from the supply line 30 to the recovery line 40 via the three-way valve 32, thus allowing the flow direction of the liquid chemicals to be controlled by the three-way valve 32.

[0052] The chamber 50 processes wafers by receiving liquid chemicals from the tank 10 via a supply line 30 branching from the circulation line 20. The chamber 50 may have various structures in which spaces for processing substrates are formed. Although not shown in the figures, the chamber 50 may have a box shape. Furthermore, a rotary chuck 51 may be disposed inside the chamber 50 to rotate the substrate (not shown) while keeping it horizontal. Additionally, the chamber 50 may be provided with a cylindrical cup-shaped portion 55 for receiving and containing liquid chemicals discharged from the substrate or from the liquid chemical detection device 100. Furthermore, various variations can be implemented based on changes in the various structures, and known technologies can also be combined.

[0053] For example, chamber 50 can be a cleaning chamber provided in the cleaning process. That is, the substrate processing apparatus 1 of this embodiment can supply liquid chemicals to chamber 50 for the substrate cleaning process. For example, the liquid chemicals supplied to chamber 50 for the cleaning process can be alkaline liquid chemicals, acidic liquid chemicals, rinsing fluid, ozone water, IPA (isopropanol), etc.

[0054] However, this embodiment is not limited to the cleaning process and can be applied to various processes for supplying liquid chemicals, unless it conflicts with this embodiment. As another example, chamber 50 can be a chamber for a drying process or an etching process, etc. Furthermore, the structure on the aforementioned circulation pipeline 20 can also be modified to accommodate drying or etching processes, etc. Additionally, when chamber 50 is a chamber for a drying or etching process, the liquid chemicals can be a drying solution or an etching solution. However, this is merely an example and is not limited thereto.

[0055] Furthermore, chamber 50 is not limited to any one of the cleaning and etching processes, but may also include any one or more of the cleaning, drying, and etching processes. In addition to such processes, chambers may also include other processes not mentioned in this embodiment, unless they conflict with this embodiment.

[0056] In addition to cleaning or etching, the substrate processing apparatus 1 can also perform other processes, such as photolithography for processing substrates. In other words, the substrate processing apparatus 1 of this embodiment is applicable to various processes involving the supply of liquid chemicals.

[0057] As another example, when substrate processing apparatus 1 performs a photolithography process, the liquid chemicals can be photoresist used as the processing liquid. This will be referred to below. Figure 18 and Figure 19 Describe it.

[0058] As described above, the substrate processing apparatus 1 may include a foam cutter 25 disposed on the circulation line 20. Although bubbles can be removed by the foam cutter 25, bubbles may regenerate downstream of the foam cutter 25 during the process, or microbubbles may be difficult to remove by the foam cutter 25. Furthermore, particles may not be removed by the foam cutter 25 and may remain in the fluid. Bubbles and particles can affect the characteristics and yield of semiconductor devices (wafer processing parts), and therefore need to be removed.

[0059] That is, bubbles and particles may be irregularly generated during wafer processing. Furthermore, bubbles and particles have different properties, therefore, the methods for removing them can differ. Moreover, bubbles and particles are not always generated in the same way in a fluid. Therefore, in order to remove or manage bubbles and particles, it is necessary to detect whether the fluid contains bubbles or particles. For this purpose, a liquid chemical detection device 100 can be installed.

[0060] The following describes the liquid chemical detection device 100. However, before that, the following describes particles and bubbles with different properties.

[0061] Particles are solid and independent of pressure changes (which can be caused by changes in fluid velocity). Unlike bubbles, the diameter (or size) of particles does not change and therefore remains constant regardless of fluid velocity. Conversely, bubbles contain gas (such as air), so their diameter changes with pressure due to the volume change of the gas. As mentioned above, particles and bubbles can have different properties with respect to fluid velocity and pressure. Furthermore, liquid chemicals have higher electrical conductivity than particles or bubbles, thus easily conducting electric current. On the other hand, particles and bubbles have low electrical conductivity, thus acting as resistors for current.

[0062] Based on this characteristic, the liquid chemical detection device 100 can detect particles or bubbles by sensing changes in the current signal, and the specific operation is as follows. However, one or more of the embodiments in this specification can be combined, and for ease of description and understanding, reference can be made to the accompanying drawings of another embodiment.

[0063] Reference Figures 3 to 7 According to an embodiment of the present invention, the liquid chemical detection device 100 can receive liquid chemicals for processing or handling wafers from the liquid chemical supply unit.

[0064] That is, the liquid chemical detection device 100 is arranged on the rotary chuck 51 for placing wafers, receives liquid chemicals supplied to the wafers, and can thus detect the liquid chemicals. Furthermore, the liquid chemical detection device 100 is not fixed to the rotary chuck 51 and can be detached, so it can be arranged on the rotary chuck 51 only when liquid chemical detection is required. However, it is not limited to this, and a structure embedded in the rotary chuck 51 is also possible. Therefore, the rotary chuck 51 and the liquid chemical detection device 100 can also be formed as a single unit. When the rotary chuck 51 and the liquid chemical detection device 100 are formed as a single unit, various variations are possible, such as the liquid chemical detection device 100 supporting the wafer together with the rotary chuck 51 during wafer processing or handling.

[0065] The liquid chemical detection device 100, arranged on the rotary chuck 51, can rotate together with the rotary chuck 51 as the rotary chuck 51 rotates. Therefore, the rotational force of the rotary chuck 51 can be transmitted to the liquid chemical detection device 100. However, the rotational force of the liquid chemical detection device 100 is not limited to being generated by the operation of the rotary chuck 51. Through various structural modifications, the liquid chemical detection device 100 can generate its own rotational force, which will be discussed later. Figure 16 and Figure 17 Please provide an explanation.

[0066] The liquid chemical detection device 100 of this embodiment may include a base 110, a flow channel 120, a sensing unit 130, a discrimination unit 140, a layer 150, and a battery 160 to detect particles and bubbles in a fluid.

[0067] The base portion 110, together with the layer portion 150, forms the appearance of the liquid chemical detection device 100. The base portion 110 may, for example, have the same or similar shape as the wafer, but its shape is not limited thereto. This is so that the liquid chemical detection device 100 can be moved in the same manner or method by a robot that moves the wafer.

[0068] The base portion 110 may be formed with an inlet 1101 for fluid to flow in, for fluid movement, and the base portion 110 may include a first body 111 and a second body 112.

[0069] For example, the inlet 1101 of the base portion 110 can be located in the central portion of the base portion 110. This is to increase the velocity of the fluid flowing into the liquid chemical detection device 100 by centrifugal force as the fluid is discharged from the central portion of the base portion 110 outwards. Therefore, this embodiment can also include various other variations as long as the fluid velocity can be increased.

[0070] Furthermore, various modifications are possible. For example, since the inlet 1101 of the base portion 110 needs to be opposite to the nozzle, the inlet 1101 can also be provided at an off-center position of the base portion 110, depending on the position of the nozzle. For instance, when two nozzles for supplying cleaning fluid and photoresist are arranged adjacent to each other, the inlet 1101 can be positioned opposite to each of the two nozzles to detect the cleaning fluid and photoresist separately.

[0071] The first body 111 may have a movable thickness to form the channel component 110A of the flow channel portion 120 (see Figure 12Here, the thickness of the first body 111 can be formed to a thickness sufficient to manufacture the channel member 110A with a recessed pattern. However, it is not limited to this; the first body 111 may have a predetermined thickness or a greater thickness to prevent damage to the liquid chemical detection device 100. In this case, the predetermined thickness or a greater thickness may vary depending on the material of the base portion 110, etc.

[0072] The second subject 112 covers the first subject 111 (see also) Figure 12 ), and can be formed from plates or films, etc. Figure 12 The diagram shows a portion of the second body 112 being cut away to illustrate the channel component 110A (i.e., its interior) of the first body 111. In other words, when the flow channel portion 120 is formed in a recessed form on the upper surface of the first body 111, the upper end of the flow channel portion 120 can be open. In this case, the second body 112 can be formed to cover the upper part of the first body 111 to prevent fluid leakage to the upper part of the first body 111.

[0073] However, the first body 111 and the second body 112 are not limited to being set separately. Various variations can be implemented according to modifications of the embodiments, such as the first body 111 and the second body 112 being formed as one unit.

[0074] Furthermore, depending on the structure of the flow channel portion 120, the base portion 110 can have various modifications on the first body 111 and the second body 112. Additionally, the shape of the base portion 110 can be, for example, a disc shape, but is not limited thereto. In other words, the base portion 110 can have various variations, such as having the flow channel portion 120 formed therein, and the velocity of the fluid can be accelerated.

[0075] As another example, the base portion 110 can have a shape similar to a propeller, see reference to this. Figure 15 The following explanation will be provided. Furthermore, although the base portion 110 in this embodiment is shown as having a horizontal plate structure, other variations are possible. These will be referred to below. Figure 17 Describe it.

[0076] The flow channel 120 is a structure for moving fluid, wherein liquid chemicals flowing into the base 110 can move by changing the fluid velocity. Based on the centrifugal force generated by the rotation of the base 110, the fluid velocity of the liquid chemicals moving in the flow channel 120 can gradually increase from the inlet 1101 to the outlet of the base 110. In other words, for the fluid moving in the flow channel 120, its velocity can be gradually increased by centrifugal force as it moves towards the outer edge of the liquid chemical detection device 100 (or is discharged to the outside of the liquid chemical detection device 100) after flowing into the base 110.

[0077] The number, shape, and structure of the flow channel sections 120 can have various variations. Firstly, one or more flow channel sections 120 can be provided. For example, refer to... Figure 3 and Figure 4 An inlet 1101 for fluid inflow is provided at the center of the base portion 110. Multiple flow channels 120 are connected to the inlet 1101 and are arranged radially from the center of the base portion 110. Furthermore, the flow channels 120 can be arranged in a straight line from the inlet 1101 toward the outer edge. However, the shape of the flow channels 120 is not limited to this. See below for reference. Figures 12 to 14 A variation of the shape of the flow channel 120 is described.

[0078] As described above, the fluid velocity of the liquid chemical moving in the flow channel 120 varies depending on its position. Furthermore, when the pressure changes due to the velocity difference of the fluid, the diameter of the bubbles also changes. This causes a change in resistance, which in turn causes a change in the electrical signal, allowing for the detection of bubbles. To facilitate the description of this mechanism, the flow channel 120 can be divided into different sections for illustration.

[0079] In simple terms, the flow channel portion 120 may include a first region 121 and second regions 122, 123 divided according to their positions. Additionally, the flow channel portion 120 may include a first segment 1201 and a second segment 1202 divided according to their width. Although described in detail below, simply put, since the division of the first region 121 / second region 122, 123 differs from that of the first segment 1201 / second segment 1202, the first segment 1201 and the second segment 1202 may be disposed in the first region 121. Furthermore, the first segment 1201 and the second segment 1202 may be disposed in the second regions 122, 123. That is, the first region 121 and the second region 122, 123 may be formed by a combination of the first segment 1201 and the second segment 1202, and therefore may have the same shape. Furthermore, the flow channel portion 120 may have various structural variations; for example, it may include a channel member 110A. The flow channel portion 120 will now be described.

[0080] The flow section 120 may have a structure in which the first region 121 and the second regions 122, 123 constituting the fluid flow channel are connected to each other and thus have a certain length. However, the first region 121 and the second regions 122, 123 differ only in position and may have the same shape. That is, the difference between the first region 121 and the second regions 122, 123 lies in the different spacing distances between them and the inlet 1101. For example, the first region 121 may be arranged adjacent to the inlet 1101 of the base section 110. Therefore, the fluid flowing into the inlet 1101 can move towards the outer edge of the base section 110 via the first region 121. Furthermore, the second regions 122, 123 are connected in series with the first region 121 so that the fluid discharged from the first region 121 can move in the second regions 122, 123. That is, the first region 121 and the second regions 122, 123 can be arranged in a row from the inlet 1101 of the base section 110.

[0081] Since the first region 121 and the second region 122, 123 are used to sense electrical signals from two regions with different fluid velocities, the positions of the first region 121 and the second region 122, 123 can be distinguished from each other in the upstream and downstream directions of the flow channel 120.

[0082] In other words, for example, the first region 121 and the second region 122, 123 can have electrical sensing areas of the same area to provide electrical sensing areas with the same environment. That is, the number or range of the first segment 1201 and the second segment 1202 located in the first region 121 and the second region 122, 123 can be the same as each other.

[0083] In this regard, refer to Figure 5 and Figure 7 (The flow of liquid chemicals) Figure 5 and Figure 7 (Moving from left to right as a reference), the first region 121 can be formed as a region comprising a first segment 1201 and a second segment 1202. In this case, the second segment 1202 is not divided into the region between the two first segments 1201, but rather into a predetermined region in the front-back direction of one first segment 1201. The same applies to the second regions 122 and 123. As described above, the first region 121 and the second regions 122 and 123 can form the same environment / region for the sensing unit 130 to sense electricity.

[0084] Furthermore, since the first region 121 and the second region 122, 123 are divided in the front-rear direction relative to the length direction of the flow channel 120, the positions of the second region 122, 123 are not limited to being positioned immediately after the rear end of the first region 121.

[0085] That is, such as Figure 5 and Figure 7 As shown, the second regions 122 and 123 can be positioned immediately after the rear end of the first region 121 (representing the second region 122 corresponding to reference numeral 122), or they can be positioned at a certain distance apart (representing the second region 123 corresponding to reference numeral 123). Thus, various modifications can be made.

[0086] Furthermore, in this embodiment, although multiple second region portions 122 and 123 are provided, this is for comparison with the first region portion 121. That is, the electrical signal of the first region portion 121 can be compared with the second region portion 122 or the second region portion 123. Alternatively, the electrical signals of multiple second region portions 122 and 123 can be compared.

[0087] Furthermore, the first region 121 and the second regions 122, 123 are not limited to including a first segment 1201 and a second segment 1202. This will be referred to below. Figure 9a and Figure 9b Describe it.

[0088] Next, the first section 1201 and the second section 1202 of the flow channel section 120 will be described.

[0089] The first segment 1201 may have a first width (see...) Figure 5 (Referring to the reference numeral "W1" in the attached diagram). The second segment 1202 may have a second width greater than the first width (see attached diagram). Figure 5 (See attached figure label "W2").

[0090] For example, the widths of the first segment 1201 and the second segment 1202 are different to allow at least a portion of the segments to have a reduced width, enabling precise sensing of resistance changes caused by particles or bubbles. In other words, the resistance change can exhibit a larger ratio change in a segment with a smaller width compared to a segment with a larger width. Therefore, the flow channel portion 120 includes the first segment 1201 so that at least a portion of the area in which the sensing unit 130 detects the electrical signal has a smaller width.

[0091] For example, particles or bubbles (which may be microbubbles) can be formed at the micrometer (μ) or nanometer (n) scale. In this case, the diameter of the first segment 1201 can be in micrometer or nanometer units, allowing the fluid containing multiple particles or bubbles to move. For example, a particle may be 1 nanometer, and the diameter of the first segment 1201 may be from 20 nanometers to 100 nanometers.

[0092] However, the unit of diameter of the first segment 1201 is not limited to micrometers or nanometers. Various variations can be implemented without conflicting with this embodiment. For example, the diameter of the first segment 1201 can be in micrometers (mm).

[0093] The first region 121 and the second regions 122, 123 can be provided in one or more of each of the first segment 1201 and the second segment 1202. Therefore, the first region 121 can be provided with one or more first segments 1201 and one or more second segments 1202, whereby the first segments 1201 and the second segments 1202 can be arranged alternately. Similarly, the second regions 122, 123 can be provided with one or more first segments 1201 and one or more second segments 1202.

[0094] Furthermore, the flow channel portion 120 according to this embodiment can be formed according to the shape or structure of the base portion 110. As an example, the flow channel portion 120 may include a channel member 110A formed in a recessed form or having a through structure to form a first region portion 121 and second region portions 122, 123.

[0095] The recessed channel component 110A can be recessed to form a space corresponding to the shape of the flow channel portion 120 (which can be the shape of the first segment 1201 and the second segment 1202). The through-structure channel component 110A can be formed to penetrate the first body 111, and in this case, the first body 111 and the second body 112 can also be formed as one piece. In addition, the channel component 110A can be formed on the first body 111 of the base portion 110 by laser processing in a recessed form, but various variations are also possible.

[0096] In addition to recessed or through-hole structures, the flow channel 120 can also be formed with a raised or embossed structure. The raised or embossed structure can be formed by the partition wall component 110B, which will be referred to below. Figure 13 Describe it.

[0097] The sensing unit 130 can sense the electrical signal (which may be the electrical signal of the liquid chemical) so that the discrimination unit 140 can distinguish the difference in electrical signal within the flow channel 120. The sensing unit 130 can be electrically connected to a second section 1202 having a second width that is relatively wider than the first section 1201. At this time, the conductive liquid chemical can flow between the two ends of the sensing unit 130, thereby forming a structure in which the liquid chemical and the sensing unit 130 are connected in series. As described above, the first section 1201 can be formed into a section whose resistance value varies according to bubbles and particles.

[0098] This sensing unit 130 may include a first sensing component 131 and a second sensing component 132 capable of sensing electrical signals in the first region 121 and the second regions 122, 123. The first sensing component 131 and the second sensing component 132 differ only in the region where the electrical signal is measured, while their functions and operations are identical. For example, the first sensing component 131 can sense a first signal that is the electrical signal in the first region 121. The second sensing component 132 can sense a second signal that is the electrical signal in the second regions 122, 123. Furthermore, the first sensing component 131 and the second sensing component 132 may be configured as ammeters to sense electrical signals in the same or similar manner.

[0099] The sensing of electrical signals by the sensing unit 130 will now be described. However, before proceeding with the description, it should be noted that... Figure 6 and Figure 8 The reference numerals CH1, CH2, and CH3 in the figures indicate Figure 5 and Figure 7 The first region 121 and the second regions 122 and 123 are defined in the diagram. Specifically, CH1 is used to describe the electrical signal changes in the first region 121, and CH2 and CH3 are used to describe the electrical signal changes in the second regions 122 and 123.

[0100] Reference Figure 6 and Figure 8 The diagram shows three lines extending horizontally. Here, the three lines can be represented by a virtual horizontal axis to indicate time. Additionally, a virtual vertical axis can represent the change in current. The three lines generate electrical signals starting from the same reference point. When the fluid contains particles or bubbles, these particles or bubbles act as impedance, causing a change in the vertical current value. The differences in the electrical signals for particles and bubbles are as follows.

[0101] First, refer to Figure 6 In the section where the longitudinal change occurs, since the length of the transverse axis is the same, it can be known that the time for the current change sensed by the first sensing element 131 and the second sensing element 132 is the same. This is because, as described above, even if the fluid velocity increases, the particle diameter does not change, therefore the resistance of the first region 121 and the second regions 122, 123 is the same.

[0102] Next, refer to Figure 8 The timing of the current changes detected by the first sensing element 131 and the second sensing element 132 is different from each other. This is because, as the fluid velocity increases, the volume of the bubble changes according to the pressure change, thus the bubble generates different resistances in the first region 121 and the second regions 122, 123.

[0103] When the current of the first signal and the second signal sensed by the sensing unit 130 changes compared to a reference value (e.g., the current value of the fluid excluding particles and bubbles), the discrimination unit 140 can determine that particles and bubbles have been detected.

[0104] Furthermore, the discrimination unit 140 receives signals from the sensing unit 130 and distinguishes particles and bubbles based on the current difference or time difference of current change between the first signal, which is an electrical signal of the first region 121, and the second signal, which is an electrical signal of the second region 122, 123.

[0105] When the current difference or time difference of the current change between the first signal and the second signal is 0, the discrimination unit 140 can determine that the fluid contains particles. Furthermore, if a current difference or time difference of the current change occurs between the first signal and the second signal, the discrimination unit 140 can determine that the fluid contains air bubbles. Thus, the discrimination unit 140 can not only distinguish between particles and air bubbles contained in the fluid, but also differentiate between particles and air bubbles. Furthermore, the discrimination unit 140 may also include a display device, a memory chip, a data reader, etc., to continuously manage the board processing apparatus 1.

[0106] The sensing unit 130, the sensing unit 140, and the battery 160 can be arranged and mounted on the layer 150. The layer 150 can be disposed on one surface or another surface of the base 110. There can be one or more layers 150.

[0107] Reference Figure 3 The layer 150 can be configured as a single layer, and a structure such as the battery 160 can be mounted on a single layer 150. In contrast, multiple layers 150 can be configured to form a multi-layer structure, as will be discussed later. Figure 11 Please provide an explanation.

[0108] Additionally, the diameter or cross-sectional area of ​​the layer 150 may be the same as that of the base portion 110 to prevent the formation of a step with the base portion 110. However, this is merely exemplary, and various variations are possible, such as the difference in diameter or cross-sectional area between the two being within 10%.

[0109] Furthermore, the unspecified battery 160 can supply power to the sensing unit 130 or the discrimination unit 140. For example, the battery 160 can be formed as a thin film to make the liquid chemical detection device 100 compact, but it is not limited thereto.

[0110] In the liquid chemical detection device 100 described above, the liquid chemical detection device 100 can be rotated by operating the rotary chuck 51, or the base portion 110 can be rotated by the drive portion 170 of another embodiment described later. Furthermore, centrifugal force can be generated in the base portion 110. Therefore, as the fluid moves in the flow channel portion 120, the fluid velocity in the second regions 122 and 123 can become faster than the fluid velocity in the first region portion 121. At this time, due to the velocity difference of the fluid, the fluid pressure can be reduced in the second regions 122 and 123 compared to the first region portion 121. Thus, when a velocity difference is generated due to centrifugal force, the pressure changes, and as described above, the diameter changes of particles and bubbles can be different from each other.

[0111] As described above, by sensing and identifying the electrical signals of the first region 121 and the second region 122, 123 where the velocity difference of the fluid is generated due to centrifugal force, it is possible to detect whether the fluid contains bubbles or particles.

[0112] In the following text, reference will be made to Figures 9a to 10 The following describes variations of the first region 121 and the second region 122 and 123.

[0113] Figure 9a This is a view showing another variation of the first and second regions of the flow channel portion of the liquid chemical detection device according to the first embodiment of the present invention, and Figure 9b This is a view showing another variation of the first and second regions of the flow channel portion of the liquid chemical detection device according to the first embodiment of the present invention. Figure 10 It is shown Figure 9b A view of the changes in electrical signals from the sensing unit.

[0114] First, refer to Figure 9a Similar to or similar to the foregoing embodiments, the flow channel portion 120 may include a first region portion 121 and a second region portion 122. However, the difference in this embodiment is that the first region portion 121 and the second region portion 122 each include one or more first segments 1201 and one or more second segments 1202.

[0115] For example, in the first region 121, the two first segments 1201 and the three second segments 1202 can be positioned alternately. Similarly, in the second region 122, the two first segments 1201 and the three second segments 1202 can be positioned alternately. Furthermore, the second region 122 can be positioned immediately following the rear end of the first region 121 or at a predetermined distance or greater distance from the first region 121.

[0116] Furthermore, the first sensing component 131 and the second sensing component 132 of the sensing unit 130 may be provided in one or more of each of the first region 121 and the second region 122. For example, referring to... Figure 9a Two first sensing elements 131 may be provided in the first region 121, and two second sensing elements 132 may be provided in the second region 122. Furthermore, one or more first sensing elements 131 and one or more second sensing elements 132 are respectively calculated as average values, so that the discrimination unit 140 can distinguish the difference in electrical signals between the first region 121 and the second region 122, or all individual electrical signals can be compared.

[0117] However, the first region 121 and the second region 122 are not limited to having one or more first sensing elements 131 and one or more second sensing elements 132 respectively, but other variations are possible.

[0118] Reference Figure 9b Each of the first region 121 and the second region 122 may include one or more first segments 1201 and one or more second segments 1202. In addition, a first sensing element 131 and a second sensing element 132 may be electrically connected to the first region 121 and the second region 122, respectively.

[0119] Furthermore, this embodiment differs from the first embodiment in that multiple first segments 1201 and multiple second segments 1202 are provided in the first region 121 and the second region 122, thereby expanding the area for sensing electrical signals. Therefore, electrical signal detection can be implemented using the same principle and form. For this, refer to... Figure 10 as follows.

[0120] like Figure 10 As shown, when the fluid contains particles, the time of current change sensed by the first sensing element 131 and the second sensing element 132 is the same. Furthermore, although not shown in the figures, the time of electrical signal change may differ when air bubbles are included in the flow channel 120 of this embodiment. This is the same as the technical content described above, therefore repeated descriptions are omitted.

[0121] In the following text, reference will be made to Figures 11 to 16 Variations of this embodiment are described, and repeated descriptions of the same elements having the same function will be omitted. Furthermore, it should be noted that although elements corresponding to the same reference numerals may have some differences, the same reference numerals can still be used if the function is the same. Additionally, it should be noted that another embodiment can be implemented by combining at least one of the first to eighth embodiments.

[0122] Figure 11This is a view showing the liquid chemical detection device according to a second embodiment of the present invention in a multi-layered state. The main description will be based on... Figure 3 The differences lie in the content described.

[0123] Similar to or similar to the first embodiment, the liquid chemical detection device 100 according to an embodiment of the present invention includes: a base portion 110, a flow channel portion 120, a sensing portion 130, a discrimination portion 140, a layer portion 150, and a battery 160, for detecting particles and bubbles in a fluid.

[0124] However, the difference in the liquid chemical detection device 100 of this embodiment is that the layer 150 is composed of multiple layers 151, 152. The layer 150 composed of one or more layers 151, 152 can have a configuration based on the wire (reference). Figure 3 and Figure 11 The thickness and materials of components such as the reference numeral "W", sensing unit 130, sensing unit 140, and battery 160 are optimized.

[0125] For example, a wire can electrically connect the sensing section 130 to the flow channel section 120. In particular, if the flow channel section 120 is thin, such as having a diameter in millimeters (mm), a manufacturing method or structure can be used that minimizes defects caused by manufacturing errors while electrically connecting the wire to the flow channel section 120. For example, a manufacturing method capable of precisely manufacturing conductive materials can be used to manufacture the wire, such as a circuit formation method using a mask in semiconductor manufacturing processes, but this is merely an example.

[0126] Furthermore, unlike layer 151 where wires are provided, the thickness of layer 152 where the sensing part 130 is provided can be greater than the thickness of layer 151 where wires are provided, in order to form a thickness and structure that stably fixes the battery 160 and the like, but it is not limited thereto. As described above, various modifications can be made to layer 150 depending on the arrangement and installation of wires and battery 160 and the like.

[0127] The various shapes of the flow channel 120 will be described below.

[0128] Figure 12 This is a view showing the base portion of a liquid chemical detection device according to a third embodiment of the present invention. (Refer to...) Figure 12 Description and Reference Figure 3 and Figure 4 The differences lie in the content described.

[0129] Similar to or similar to the first embodiment, the liquid chemical detection device 100 according to an embodiment of the present invention includes: a base portion 110, a flow channel portion 120, a sensing portion 130, a discrimination portion 140, a layer portion 150, and a battery 160, for detecting particles and bubbles in a fluid.

[0130] However, the difference in the liquid chemical detection device 100 of this embodiment is that the shape of the flow channel 120 is not set as a straight line but as a curved shape.

[0131] For example, with Figure 4 Similar to or analogous to the flow channel portion 120 shown, the flow channel portion 120 may be arranged radially from the center portion of the base portion 110. However, in this embodiment, the flow channel portion 120 may be arranged in a curved shape from the inlet 1101 of the base portion 110 toward the outer edge. This can be seen in the following reference... Figure 13 The described flow channel section 120 has the same or similar shape.

[0132] The flow channel 120, configured in a curved shape, allows the fluid to move along the normal direction relative to the centrifugal force generated by the rotational force. Therefore, the fluid can move more easily.

[0133] Furthermore, according to a variant of the embodiment, the channel component 110A may be formed in the flow channel portion 120. Here, since the channel component 110A is the same as the technical content described above, repeated descriptions will be omitted.

[0134] Figure 13 This is a view showing the base portion of the liquid chemical detection device according to a fourth embodiment of the present invention. (Refer to...) Figure 13 The main description and reference Figure 3 , Figure 4 and Figure 12 The differences lie in the content described.

[0135] Similar to or similar to the first embodiment, the liquid chemical detection device 100 according to an embodiment of the present invention includes: a base portion 110, a flow channel portion 120, a sensing portion 130, a discrimination portion 140, a layer portion 150, and a battery 160, for detecting particles and bubbles in a fluid.

[0136] In addition, with the above Figure 13 In the same or similar manner as the flow channel portion 120, the flow channel portion 120 of this embodiment can be arranged radially from the center portion of the base portion 110.

[0137] However, the difference is that the base portion 110 does not have a channel component 110A formed on it, but instead has a partition wall component 110B formed on it.

[0138] In other words, refer to Figure 12 and Figure 13 In this embodiment, the flow channel portion 120 can be configured as one or more, and arranged radially. Furthermore, the flow channel portion 120 can be formed in a curved shape. The curvature of the curve can be formed such that it is in the normal direction relative to the centrifugal force generated by the rotational force produced by the base 110.

[0139] in addition, Figure 12 The flow channel portion 120 can be formed into a recessed structure through the channel member 110A, while the flow channel portion 120 in this embodiment may include a partition wall member 110B. The partition wall member 110B may have a raised shape different from the recessed shape, thereby forming a raised structure.

[0140] For example, the partition wall component 110B may have a protruding structure that forms a space in which the first segment 1201 and the second segment 1202 alternately form. That is, the partition wall component 110B may have a protruding structure that extends from the first body 111 to the second body 112 along the shape of one or more first segments 1201 and one or more second segments 1202.

[0141] The partition wall component 110B differs from the channel component 110A in that it has a raised structure rather than a recessed structure. That is, the formation of the first region 121 and the second regions 122, 123 can be the same. Of course, since the first region 121 and the second regions 122, 123 include a first segment 1201 and a second segment 1202, the first segment 1201 and the second segment 1202 can be formed in the partition wall component 110B in the same manner as in the above embodiment.

[0142] As described above, the partition wall component 110B can be formed in a raised shape along both sides of the fluid flow path from the first body 111 to the second body 112, thereby forming a first region 121 and a second region 122, 123 in the flow path portion 120.

[0143] Figure 14 This is a view showing the base portion of the liquid chemical detection device according to a fifth embodiment of the present invention. (Refer to...) Figure 14 Description and Reference Figure 3 , Figure 4 , Figure 12 and Figure 13 The differences lie in the content described.

[0144] Reference Figure 14 , and reference Figure 12 and Figure 13 Similar to or similar to the flow channel portion 120 in other embodiments, the flow channel portion 120 in this embodiment may be formed in a curved shape.

[0145] However, in this embodiment, the flow channel portion 120 can be provided as one along the direction from the inlet 1101 of the base portion 110 to the outer edge. For example, the flow channel portion 120 can be provided in a spiral shape from the center portion of the base portion 110 toward the outer edge.

[0146] Therefore, compared with the reference Figure 3Compared to movement within the described flow channel 120, the fluid can travel a longer distance along the flow channel 120 of this embodiment. Therefore, the distance between the first region 121 and the second region 122, 123 can be further increased.

[0147] Figure 15 This is a view showing the base portion of the liquid chemical detection device according to a sixth embodiment of the present invention. (Refer to...) Figure 15 The main description and reference Figure 3 , Figure 4 and Figures 12 to 14 The differences lie in the content described.

[0148] Unlike the base portion 110 described above, the base portion 110 in this embodiment is not configured as a disc structure, but has other shapes.

[0149] Reference Figure 15 Similar to the shape of a propeller, the base portion 110 may have a structure with a certain area radiating outwards from the center. However, in this embodiment, the base portion 110 is shown with its area gradually increasing from the center of the base portion 110 toward the outer edge. However, it is not limited to this. For example, the base portion 110 may also have a structure extending a certain length with the same area from the center of the base portion 110 toward the outer edge. Flow channels 120 of various shapes as described above may be provided on the base portion 110.

[0150] The following describes various variations of the liquid chemical detection device 100 that rotate on its own.

[0151] Figure 16 This is a view illustrating a liquid chemical detection apparatus according to a seventh embodiment of the present invention. (Refer to...) Figure 16 The main description and reference Figures 3 to 15 The differences lie in the content described.

[0152] Reference Figure 16 Similar to or similar to the device in the first embodiment, the liquid chemical detection device 100 according to an embodiment of the present invention includes: a base portion 110, a flow channel portion 120, a sensing portion 130, a discrimination portion 140, a layer portion 150, and a battery 160, for detecting particles and bubbles in a fluid.

[0153] In addition, the liquid chemical detection device 100 of this embodiment is different in that it is also provided with a drive unit 170.

[0154] The drive unit 170 is a structure for rotating the base unit 110 and can be connected to one surface or another surface of the base unit 110. For example, the drive unit 170 may include a motor 171, which includes a rotating shaft 172 connected to the lower part of the base unit 110.

[0155] The motor 171 can be connected to the battery 160 disposed on the layer 150 to be driven by receiving power. That is, power can be supplied to the sensing unit 130, the discrimination unit 140, and the motor 171 by one battery 160. At this time, wires can be connected in multiple directions for electrical connection between the battery 160 and the sensing unit 130 and the motor 171, etc. However, it is not limited to this.

[0156] As another example, motor 171 can also receive power from another power source. Various variations can be made to the power source used to supply power to motor 171, such as the power source being mounted on the housing of motor 171.

[0157] Figure 17 This is a view illustrating a liquid chemical detection apparatus according to an eighth embodiment of the present invention. (Refer to...) Figure 17 The main description and reference Figures 3 to 16 The differences lie in the content described.

[0158] Reference Figure 17 Similar to or similar to the device in the first embodiment, the liquid chemical detection device 100 according to this embodiment includes a base portion 110, a flow channel portion 120, a sensing portion 130, a discrimination portion 140, a layer portion 150, and a battery 160 to detect particles and bubbles in a fluid. Furthermore, similar to the seventh embodiment, the liquid chemical detection device 100 of this embodiment may also include a drive portion 170.

[0159] In addition, the liquid chemical detection device 100 of this embodiment is different in that it is also provided with an auxiliary cup-shaped component 180.

[0160] For example, the fluid contained in the cup-shaped portion 55 within the chamber 50 may contain foreign matter during the substrate cleaning process. Therefore, when liquid chemicals used to clean the substrate are stored in the cup-shaped portion 55, if liquid chemicals flowing through the liquid chemical detection device 100 are contained in the cup-shaped portion 55, liquid chemicals usable only because they move within the flow channel portion 120 may be mixed into the liquid chemicals used to clean the substrate. Consequently, liquid chemicals that are only suitable for cleaning after detection become unusable. To prevent this, an auxiliary cup-shaped member 180 can be further provided.

[0161] The auxiliary cup-shaped member 180 is a structure used to form a space that separates the fluid discharged from the flow channel portion 120 from the liquid chemicals contained in the cup-shaped portion 55. For example, the auxiliary cup-shaped member 180 may be formed along the outer periphery of the base portion 110. In addition, the auxiliary cup-shaped member 180 may have an open-top annular shape to prevent interference with the motor 171. However, since the auxiliary cup-shaped member 180 is a structure for containing fluid so that the fluid discharged from the flow channel portion 120 can be reused, the shape of the auxiliary cup-shaped member 180 is not particularly limited, and various variations can be realized.

[0162] Furthermore, the base portion 110 does not have a horizontal structure, but can be modified in various ways. For example, it can have a structure that slopes downwards from the center towards the outer edge. (See reference...) Figure 17 The base portion 110 may have a conical shape or a truncated conical shape with its central portion protruding.

[0163] Furthermore, the substrate processing apparatus 1 of the first embodiment described above provides a cleaning solution. As another example, the substrate processing apparatus 1 may include a photolithography process. In this case, the liquid chemical may be a photoresist used as the processing solution. The following description will refer to the accompanying drawings.

[0164] Figure 18 This is a view showing a substrate processing apparatus according to a second embodiment of the present invention. Figure 19 This is a view showing the rotating chuck of a substrate processing apparatus according to a second embodiment of the present invention.

[0165] Reference Figure 18 and Figure 19 The substrate processing apparatus 1 may include an indexing section 60, a processing section 70, an interface section 80, and an exposure section 90.

[0166] In simple terms, the substrate can move in a cyclic manner between the indexing section 60, processing section 70, interface section 80, and exposure section 90 of the substrate processing apparatus 1 in both vertical and horizontal directions. For example, the interface section 80, which is connected to the exposure section 90, can be provided on one side of the processing section 70. A robot 81 for transferring the substrate between the exposure section 90 and the processing section 70 can be provided on the interface section 80. The robot 81 can have a multi-axis drive structure, allowing the hand used to directly manipulate the substrate to move and rotate in three axial directions.

[0167] Furthermore, during the movement of the substrate in the substrate processing apparatus 1, a process of applying photoresist (photolithography) and a development process can be performed. For example, a process of applying photoresist to the substrate can be performed before the exposure process, and a process of developing the substrate can be performed after the exposure process.

[0168] Furthermore, the photoresist coating process and the developing process can be performed in the processing unit 70. The processing unit 70 may include a rotary chuck 51A, a developing unit (not shown), and a baking unit (not shown).

[0169] In this embodiment, the rotary chuck 51A can fix the substrate and rotate the fixed substrate. Furthermore, if it is necessary to detect liquid chemicals, the liquid chemical detection device 100 can be rotated after being placed on the rotary chuck 51A. In this case, the movement of the substrate and the liquid chemical detection device 100 can be achieved by a transfer robot (not shown).

[0170] A nozzle (not shown) for discharging photoresist can be provided above the rotary chuck 51A. Although not shown, the nozzle can be connected to a liquid chemical supply unit. Furthermore, while the substrate processing apparatus 1 according to the first embodiment described above is provided with a cup-shaped portion 55 for containing cleaning fluid, the cup-shaped portion 55 can be omitted in the substrate processing apparatus 1 according to this embodiment.

[0171] Furthermore, the substrate processing apparatus 1 in this embodiment is described as being similar to the reference apparatus. Figure 1 Different embodiments of the substrate processing apparatus 1 are described. However, these are merely exemplary, and it is obvious that another embodiment can be achieved by combining these embodiments. In other words, the substrate processing apparatus 1 may include a rotary chuck 51A (or rotary chuck 51), and two nozzles (a nozzle for supplying cleaning fluid and a nozzle for supplying photoresist) may be arranged together above the rotary chuck 51A. Furthermore, the substrate processing apparatus 1 may also be provided with a cup-shaped portion 55 for receiving the cleaning fluid.

[0172] As described above, the substrate processing apparatus 1 can be adapted to various variations.

[0173] Hereinafter, a method for detecting liquid chemicals using the substrate processing apparatus 1 or the liquid chemical detection apparatus 100 of this embodiment will be described with reference to the accompanying drawings. Furthermore, the configurations of the substrate processing apparatus 1 and the liquid chemical detection apparatus 100 are the same as those described above, therefore, repeated descriptions are omitted.

[0174] Figure 20 This is a flowchart illustrating a method for detecting liquid chemicals on a substrate according to an embodiment of the present invention.

[0175] Reference Figure 20The method for detecting liquid chemicals in a processed substrate according to this embodiment includes: providing a liquid chemical detection device 100 to enable the use of the substrate processing device 1 or the liquid chemical detection device 100 described above (S110); accelerating the fluid velocity of the liquid chemical moving in the flow channel 120 (S120); introducing the liquid chemical through the inlet 1101 to move it in the flow channel 120 (S130); sensing a first signal of a first region 121 in which liquid chemicals flow (S140); sensing a second signal of a second region 122, 123 in which liquid chemicals flow (S150); and identifying the current difference or the time difference of the current change of the first signal and the second signal (S160).

[0176] First, a liquid chemical detection device 100 (S110) can be provided.

[0177] As described above, the liquid chemical detection device 100 may include a base portion 110, a flow channel portion 120, a sensing portion 130, a discrimination portion 140, a layer portion 150, and a battery 160 to detect particles and bubbles in the fluid.

[0178] After the liquid chemical detection device 100 is provided, the fluid velocity of the liquid chemical moving in the flow channel 120 can be accelerated (S120).

[0179] The flow rate of the liquid chemical can be accelerated by rotating the provided liquid chemical detection device 100 or by rotating the base portion 110 of the liquid chemical detection device 100. This can be achieved by arranging the liquid chemical detection device 100 on the rotary chuck 51 and rotating the liquid chemical detection device 100 by rotating the chuck 51. Alternatively, the base portion 110 can be rotated by the motor 171 of the drive portion 170 provided in the liquid chemical detection device 100. Specific details regarding this are repeated from the technical content described above, and therefore are omitted.

[0180] Alternatively, as another example, the pressure in the second regions 122 and 123 can be reduced to increase the velocity of the fluid moving in the first region 121 and the second regions 122 and 123. That is, since fluid velocity and pressure are inversely proportional, the fluid pressure in the second regions 122 and 123 can be reduced compared to the first region 121, thereby increasing the fluid velocity in the second regions 122 and 123.

[0181] Next, the liquid chemicals can be allowed to flow in through the inlet 1101 of the base portion 110 and move in the flow channel portion 120 (S130).

[0182] Liquid chemicals can be moved from tank 10 of the liquid chemical supply unit to circulation pipeline 20 and supply pipeline 30, and then supplied to inlet 1101 of base unit 110. The liquid chemicals supplied to base unit 110 can flow sequentially through first region 121 and second region 122, 123, which are connected to inlet 1101. At this time, sensing unit 130 can sense the electrical signals of first region 121 and second region 122, 123.

[0183] The sensing of electrical signals can be achieved by sensing a first signal in a first region 121 in which liquid chemicals flow and a second signal in a second region 122, 123.

[0184] Therefore, the first sensing component 131 can sense a first signal in the first region 121 in which liquid chemicals flow (S140). In addition, the second sensing component 132 can sense a second signal in the second regions 122 and 123 in which liquid chemicals flow (S150).

[0185] The sensing of the first sensing element 131 and the second sensing element 132 can be the measurement of the current that changes due to the resistive effect of particles or bubbles. The resistance of the particles or bubbles and the electrical signal are the same as those described for the substrate processing apparatus 1.

[0186] Furthermore, the electrical signal sensing of the sensing unit 130 is used to detect particles or bubbles dispersed in the fluid. Therefore, the sensing of the first signal of the first sensing unit 131 and the sensing of the second signal of the second sensing unit 132 can be performed sequentially or simultaneously.

[0187] Next, the current difference or time difference of the current change between the first signal and the second signal can be identified (S160).

[0188] For example, when the current difference or time difference of the current change between the first signal and the second signal is 0, the discrimination unit 140 can determine that the fluid contains particles. Furthermore, when a current difference or time difference of the current change occurs between the first signal and the second signal, the discrimination unit 140 can determine that the fluid contains air bubbles.

[0189] The embodiments of the present invention have been described above with reference to the accompanying drawings. However, those skilled in the art should understand that the present invention can be implemented in other specific forms without changing its technical concept or essential features. Therefore, the above embodiments should be understood as exemplary in all respects, and not restrictive.

Claims

1. A liquid chemical detection device comprising: a base portion formed with an inlet through which a liquid chemical flows; a flow passage portion including a first region portion disposed adjacent to the inlet of the base portion and in which the liquid chemical flowing from the inlet moves at a changed fluid velocity, and a second region portion in series communication with the first region portion and in which the liquid chemical discharged from the first region portion moves; a sensing portion including a first sensing member that senses a first signal as an electrical signal of the first region portion, and a second sensing member that senses a second signal as an electrical signal of the second region portion; a discrimination portion that receives signals from the sensing portion, judges that a particle and a bubble are sensed when a current of the first signal and the second signal changes with respect to a reference value, and discriminates the particle and the bubble based on whether a difference in current or a difference in duration of current change of the first signal and the second signal is 0; wherein, for a fluid velocity of the liquid chemical flowing through the flow passage portion, the fluid velocity of the liquid chemical moving in the second region portion is increased compared to the first region portion by receiving a rotational force from the outside or a centrifugal force generated by rotation of the base portion. the discrimination portion:

2. The liquid chemical detection device of claim 1, wherein, judges that the liquid chemical contains a particle when the difference in current or the difference in duration of current change of the first signal and the second signal is 0, judges that the liquid chemical contains a bubble when the difference in current or the difference in duration of current change of the first signal and the second signal is not 0, and discriminates the particle and the bubble. the base portion includes:

3. The liquid chemical detection device of claim 1, wherein, a first body having a thickness to form the flow passage portion; and a second body covering the first body.

4. The liquid chemical detection device according to claim 3, wherein the flow passage portion includes a passage member that passes through the first body or is formed in the first body in a recessed form, thereby forming the first region portion and the second region portion.

5. The liquid chemical detection device according to claim 1, wherein the base portion includes a first body and a second body opposite to the first body, the flow passage portion includes a partition wall member that is formed from the first body to the second body in a relief form along both sides of a moving path of the liquid chemical, thereby forming the first region portion and the second region portion.

6. The liquid chemical detection device according to claim 1, wherein the inlet is provided at a central portion of the base portion, the flow passage portion is provided as one or more, and the one or more flow passage portions are provided radially from the central portion of the base portion.

7. The liquid chemical detection device according to claim 6, wherein the flow passage portion is provided in a linear direction from the inlet toward an outer edge.

8. The liquid chemical detection device according to claim 6, wherein the flow passage portion is provided in a curved shape from the inlet toward an outer edge. ​ 9.The liquid chemical detection device of claim 1, wherein the inlet is provided at a center portion of the base portion, the flow passage portion is provided in a spiral shape from the center portion of the base portion toward an outer edge. 10.The liquid chemical detection device of claim 1, wherein the flow passage portion includes a first section having a first width and a second section having a second width greater than the first width, one or more of the first sections and one or more of the second sections are provided in each of the first area portion and the second area portion. 11.The liquid chemical detection device of claim 10, wherein the sensing portion is electrically connected to the second section. 12.The liquid chemical detection device of claim 1, further comprising: a layer portion provided on one surface or the other surface of the base portion, and the sensing portion and the discrimination portion are disposed in the layer portion. 13.The liquid chemical detection device of claim 12, wherein the layer portion is provided as one or more, and a cross-sectional area of the layer portion is the same as or has a difference within 10% from a cross-sectional area of the base portion, and the liquid chemical detection device further includes a battery portion provided in the layer portion and providing power to the sensing portion and the discrimination portion. 14.The liquid chemical detection device of claim 1, further comprising: a driving portion connected to one surface or the other surface of the base portion and rotating the base portion, the driving portion includes a motor having a rotating shaft connected to the base portion. 15.A substrate processing apparatus comprising: a liquid chemical supply portion supplying a liquid chemical; the liquid chemical detection device of claim 1 receiving the liquid chemical from the liquid chemical supply portion; and a spin chuck on which at least either of the liquid chemical detection device and a wafer is disposed. 16.The substrate processing apparatus of claim 15, wherein the spin chuck rotates the liquid chemical detection device such that the liquid chemical detection device increases in speed in the second area portion compared to the first area portion according to a rotating force of the spin chuck. 17.The substrate processing apparatus of claim 15, wherein the liquid chemical includes any one of a cleaning liquid for cleaning the wafer and a processing liquid for processing the wafer. 18.The substrate processing apparatus of claim 17, wherein the liquid chemical is constituted by the cleaning liquid, the substrate processing apparatus further includes a cup portion surrounding the spin chuck and containing the liquid chemical discharged from the wafer or the liquid chemical detection device. 19.A liquid chemical detection device comprising: a base portion formed with an inlet for a liquid chemical to flow in; a flow passage portion including a first area portion disposed adjacent to the inlet of the base portion and a second area portion in series communication with the first area portion and in which the liquid chemical moved from the first area portion, a sensing portion including a first sensing member that senses a first signal as an electric signal of the first area portion and a second sensing member that senses a second signal as an electric signal of the second area portion, a discriminating portion that receives signals from the sensing portion, judges that a particle and a bubble are sensed when a current of the first signal and the second signal changes with respect to a reference value, and discriminates the particle and the bubble according to whether a difference in current or a difference in duration of current change of the first signal and the second signal is 0, the inlet is disposed at a center portion of the base portion, the flow passage portion is disposed in one or more and radially from the center portion of the base portion, the flow passage portion includes a first section having a first width and a second section having a second width greater than the first width, one or more of the first sections and one or more of the second sections are disposed in each of the first area portion and the second area portion, for a fluid velocity of the liquid chemical flowing through the flow passage portion, a centrifugal force is generated by receiving a rotational force from the outside so that the fluid velocity of the liquid chemical moving in the second area portion is increased compared to the first area portion, and the sensing portion is electrically connected to the second section.

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