Oil film thickness detection method and device, terminal equipment and storage medium
By emitting lasers of different wavelengths onto the substrate and measuring the intensity of the reflected light, and by calculating the oil film thickness using optical principles, the problem of low paint adhesion caused by excessive oil film thickness is solved, achieving high-precision oil film thickness detection and improving paint adhesion.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- CHINA RAILWAY CONSTR HEAVY IND
- Filing Date
- 2023-03-20
- Publication Date
- 2026-07-07
AI Technical Summary
In the prior art, when the thickness of the oil film attached to the substrate surface is too large, the paint has low adhesion to the substrate, causing the paint to easily fall off, and there is a lack of effective thickness detection methods.
By using a laser transceiver to emit lasers of different wavelengths onto a substrate, and by measuring the intensity of the reflected light and the incident angle, combined with the absorption coefficient of the medium, the oil film thickness is calculated using optical principles, thus achieving high-precision detection.
Accurately measuring the oil film thickness ensures good paint adhesion to the substrate, improving processing quality and rust prevention.
Smart Images
Figure CN116242260B_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of data detection technology, and in particular to a method, apparatus, terminal equipment and storage medium for detecting oil film thickness. Background Technology
[0002] Typically, when processing substrates (such as angle steel, steel plates, etc.), an oil film is applied to the substrate to lubricate its surface for easier processing and to prevent rusting. However, when painting the oil-coated substrate, if the oil film is too thick, the paint will not adhere well, causing it to peel off easily.
[0003] Therefore, there is an urgent need for a method to detect the thickness of the oil film on the substrate surface. This would allow workers to clean substrates with excessively thick oil films, thereby improving the adhesion of paint to the substrate. Summary of the Invention
[0004] This application provides a method, apparatus, terminal equipment, and storage medium for detecting the thickness of an oil film on a substrate surface.
[0005] In a first aspect, this application provides a method for detecting oil film thickness, including:
[0006] The terminal device receives the first incident angle and the first reflected light intensity sent by the laser transceiver; wherein, the first incident angle is the angle at which the laser transceiver incident a first wavelength laser onto the substrate covered with the first oil film, the first reflected light intensity is the light intensity of the reflected laser after the substrate of the first oil film emits the first wavelength laser, and the energy absorption of the first wavelength incident laser by the first oil film is greater than a set energy threshold.
[0007] The terminal device receives the second reflected light intensity sent by the laser transceiver. The second reflected light intensity is the intensity of the reflected laser light after the laser transceiver reflects the second wavelength laser light onto the substrate covered with the first oil film based on the first incident angle. The energy absorption of the second wavelength incident laser by the first oil film is less than a set energy threshold.
[0008] The terminal device determines the thickness of the first oil film based on the first incident angle, the first reflected light intensity, the second reflected light intensity, and the pre-configured medium absorption coefficient that matches the oil film type.
[0009] In one possible implementation, the terminal device determines the thickness of the first oil film based on the first incident angle, the first reflected light intensity, the second reflected light intensity, and the pre-configured medium absorption coefficient matching the first oil film, including:
[0010] The terminal device uses the law of refraction based on the first incident angle θ, the pre-configured refractive index n1 of the air, and the pre-configured refractive index n2 of the first oil film:
[0011] α = arcsin(n1sinθ / n2)
[0012] Determine the refraction angle α of the incident laser within the first oil film;
[0013] The terminal equipment uses the following formula based on the refraction angle α and the medium absorption coefficient k of the pre-configured first oil film:
[0014] Q = -cosα / (2k)
[0015] Determine the proportionality coefficient Q;
[0016] The terminal equipment determines the thickness of the first oil film based on the proportionality coefficient, the first reflected light intensity, and the second reflected light intensity.
[0017] Understandably, the accuracy of the proportionality coefficient Q determined based on the refraction angle α and the medium absorption coefficient k of the pre-configured first oil film is high, which can result in a higher thickness of the first oil film obtained based on the proportionality coefficient.
[0018] In one possible implementation, the terminal device determines the thickness of the first oil film based on a scaling factor, a first reflected light intensity, and a second reflected light intensity, including:
[0019] The terminal device is based on the formula:
[0020]
[0021] Determine the thickness D1 of the first oil film;
[0022] Where Q is the proportionality coefficient, I γ1 I is the intensity of the first reflected light. γ2 This represents the intensity of the second reflected light.
[0023] Understandably, the formula It is derived from optical principles. Therefore, according to the formula... The thickness D1 of the first oil film obtained has high reliability.
[0024] In one possible implementation, before the terminal device receives the first incident angle and the first reflected light intensity transmitted by the laser transceiver, the method provided in this application further includes:
[0025] The terminal device receives multiple sets of data from the laser transceiver for determining the dielectric absorption coefficient. Each set of data for determining the dielectric absorption coefficient includes: the incident angle of incident lasers of a first wavelength and a second wavelength respectively incident on the substrate covered with a second oil film of the oil film type; the third reflected light intensity of the reflected laser after the substrate covered with the second oil film of the oil film type reflects the incident laser of the first wavelength; and the fourth reflected light intensity of the reflected laser after the substrate covered with the second oil film type reflects the incident laser of the second wavelength.
[0026] For each set of data determining the medium absorption coefficient, the terminal equipment uses the formula...
[0027]
[0028] Determine the absorption coefficient k of candidate media that matches the oil film type. n ;
[0029] Among them, I γ3 For the third reflected light intensity, I γ4 The fourth reflected light intensity is n1, the refractive index of the pre-configured air is n2, the refractive index of the pre-configured second oil film is θ, the incident angle is θ, and the thickness of the pre-configured second oil film is D2.
[0030] The terminal equipment clusters multiple candidate medium absorption coefficients that match the oil film type, and configures the candidate medium absorption coefficients at the cluster center as medium absorption coefficients that match the oil film type.
[0031] In this way, the dielectric absorption coefficient of the second oil film, which is the same type of oil film covering the substrate, can be tested in advance. Since the oil film type of the first oil film is the same as that of the second oil film, the dielectric absorption coefficient of the configured first oil film can be more in line with the actual situation, and the reliability can be higher, so that the reliability of the thickness of the final first oil film is also high.
[0032] In one possible implementation, after clustering the absorption coefficients of multiple candidate media matching the oil film type by the terminal device, the method provided in this application further includes:
[0033] The range of incident angles corresponding to the difference between the terminal device configuration and the absorption coefficient of the candidate medium located at the cluster center within a preset range.
[0034] It is understandable that, in the stage of testing the medium absorption coefficient of the second oil film matching the oil film type, when the incident angles of the first wavelength and the second wavelength of the incident laser are different, the medium absorption coefficient obtained to match the second oil film type is different, and the reliability of the range of incident angles corresponding to the other candidate medium absorption coefficients whose difference with the candidate medium absorption coefficient at the cluster center is within the preset range is high.
[0035] In order to ensure that the medium absorption coefficient matched by the first oil film is consistent with the medium absorption coefficient matched by the second oil film of the pre-configured oil film type during the subsequent stage of testing the thickness of the first oil film, the range of incident angles corresponding to other candidate medium absorption coefficients whose difference with the candidate medium absorption coefficients located at the cluster center is within a preset range can be configured, so as to provide the range of incident angles for emitting the first wavelength and the second wavelength incident laser during the subsequent stage of testing the thickness of the first oil film.
[0036] In one possible implementation, the absorption coefficients of other candidate media correspond to the range of incident angles [5°, 20°].
[0037] In one possible implementation, after the terminal device determines the thickness of the first oil film based on the first incident angle, the first reflected light intensity, the second reflected light intensity, and a pre-configured medium absorption coefficient matching the oil film type, the method provided in this application further includes:
[0038] When the thickness of the first oil film is greater than the set thickness threshold, the terminal device determines that the substrate covered with the first oil film is unqualified.
[0039] Because the accuracy of the determined thickness of the first oil film is high, the reliability of the terminal equipment in determining that the substrate covered by the first oil film is unqualified is also high when the thickness of the first oil film is greater than the set thickness threshold.
[0040] Secondly, this application provides an oil film thickness detection device, comprising:
[0041] The data receiving unit is used to receive the first incident angle and the first reflected light intensity sent by the laser transceiver; wherein, the first incident angle is the angle at which the laser transceiver incident a first wavelength laser onto the substrate covered with the first oil film, the first reflected light intensity is the light intensity of the reflected laser after the substrate of the first oil film emits the first wavelength laser, and the energy absorption of the first wavelength incident laser by the first oil film is greater than a set energy threshold.
[0042] The data receiving unit is also used to receive the second reflected light intensity sent by the laser transceiver, wherein the second reflected light intensity is the light intensity of the reflected laser after the laser transceiver incident a second wavelength laser on the substrate covered with the first oil film based on the first incident angle and reflected by the second wavelength laser, and the energy absorption of the first oil film on the incident laser of the second wavelength is less than a set energy threshold.
[0043] The thickness determination unit is used to determine the thickness of the first oil film based on the first incident angle, the first reflected light intensity, the second reflected light intensity, and a pre-configured medium absorption coefficient that matches the oil film type.
[0044] Thirdly, this application also provides a terminal device, including a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein when the processor executes the computer program, the terminal device performs the method provided in the first aspect.
[0045] Fourthly, this application also provides a computer-readable storage medium storing a computer program that, when executed by a processor, causes the computer to perform the method provided in the first aspect.
[0046] Fifthly, this application also provides a computer program product, including a computer program that, when run, causes a computer to perform the method provided in the first aspect.
[0047] This application provides a method, apparatus, terminal device, and storage medium for detecting oil film thickness. The method involves using a first incident angle (the angle at which a laser transceiver incident a first wavelength laser onto a substrate covered with a first oil film), a first reflected light intensity (the intensity of the reflected laser light after the substrate emits the first wavelength laser), and a second reflected light intensity (the intensity of the reflected laser light after the laser transceiver incidents a second wavelength laser onto the substrate covered with the first oil film based on the first incident angle). Therefore, the thickness of the first oil film can be determined based on the first incident angle, the first reflected light intensity, the second reflected light intensity, and a pre-configured medium absorption coefficient matching the oil film type, with high accuracy in determining the thickness of the first oil film. Attached Figure Description
[0048] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0049] Figure 1 This is one of the flowcharts for the oil film thickness detection method provided in the embodiments of this application;
[0050] Figure 2 A schematic diagram of the optical path of a laser transceiver of the first wavelength incident on a substrate covered with a first oil film at a first incident angle, provided in an embodiment of this application.
[0051] Figure 3 A schematic diagram of the optical path of a laser transceiver provided in this application, which emits a second wavelength of laser light onto a substrate covered with a first oil film at a first incident angle;
[0052] Figure 4This is the second flowchart of the oil film thickness detection method provided in the embodiments of this application;
[0053] Figure 5 The incident angle of the incident laser and the absorption coefficient k of the candidate medium that matches the oil film type are determined. n Relationship diagram;
[0054] Figure 6 This is a functional block diagram of the oil film thickness detection device provided in the embodiments of this application. Detailed Implementation
[0055] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments made by those skilled in the art under the guidance of these embodiments are within the scope of protection of this application.
[0056] The terms “first,” “second,” “third,” “fourth,” etc. (if present) in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a particular order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms “comprising” and “having,” and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.
[0057] Typically, when processing substrates (such as angle steel and steel plates), an oil film is applied to the substrate to lubricate the surface for easier processing and to prevent rusting. However, when painting the oil-coated substrate, if the oil film is too thick, the paint adhesion is poor, causing the paint to easily peel off. Therefore, there is a need for a method to detect the thickness of the oil film on the substrate surface.
[0058] Based on the above-mentioned technical problems, the inventive concept of this application is to use a laser transceiver to emit lasers of different wavelengths twice to a substrate coated with an oil film, so as to measure the thickness of the oil film on the substrate coated with an oil film, and the measured thickness of the oil film is highly accurate.
[0059] The technical solutions of this application and how they solve the aforementioned technical problems will be described in detail below with specific embodiments. These specific embodiments can be combined with each other, and the same or similar concepts or processes may not be repeated in some embodiments. The embodiments of this application will now be described with reference to the accompanying drawings.
[0060] Figure 1 One of the flowcharts illustrating the oil film thickness detection method provided in this application is shown. Please refer to... Figure 1 This application provides a method for detecting oil film thickness, including:
[0061] S101: The terminal device receives the first incident angle and the first reflected light intensity sent by the laser transceiver.
[0062] Figure 2 This diagram illustrates the optical path of a laser transceiver according to an embodiment of this application, in which a first wavelength of laser light is incident on a substrate covered with a first oil film at a first incident angle. For example, as shown... Figure 2 As shown, the laser transceiver can incident a first wavelength laser onto a substrate covered with a first oil film at a first incident angle. Thus, the substrate with the first oil film reflects the incident first wavelength laser and outputs a reflected laser.
[0063] Understandably, the first incident angle is the angle at which the laser transceiver incident a laser of the first wavelength onto the substrate covered with the first oil film. The intensity of the reflected laser light after the first wavelength laser light is emitted by the substrate of the first oil film is the aforementioned first reflected light intensity. It should be noted that the energy absorption of the first wavelength incident laser light by the first oil film is greater than a set energy threshold. This makes it easier for the energy of the first wavelength incident laser light to be absorbed by the first oil film, so as to obtain the aforementioned first reflected light intensity. The first wavelength can be 380 nm, and the second wavelength can be 950 nm.
[0064] S102: The terminal device receives the intensity of the second reflected light transmitted by the laser transceiver.
[0065] Figure 3 This diagram illustrates the optical path of a laser transceiver provided in this application, which projects a second wavelength of laser light onto a substrate covered with a first oil film at a first incident angle. For example, as shown... Figure 3 As shown, the laser transceiver can incident a second wavelength laser onto a substrate covered with a first oil film at a first incident angle. In this way, the substrate with the first oil film reflects the incident second wavelength laser and outputs a reflected laser.
[0066] Understandably, the first incident angle is the angle at which the laser transceiver incident a second wavelength laser onto the substrate covered with the first oil film. The intensity of the reflected laser light after the substrate covered with the first oil film emits the second wavelength laser light is the aforementioned second reflected light intensity. It should be noted that the energy absorption of the first oil film of the second wavelength incident laser light is less than a set energy threshold. In this way, the first oil film is less likely to absorb the second wavelength incident laser light, making it easier to detect the intensity of the reflected laser light after the second wavelength laser light light is emitted.
[0067] Based on the above S101-S102, the first reflected light intensity and the second reflected light intensity can be obtained respectively after incident lasers of different wavelengths are incident on the substrate covered with the first oil film at different incident angles.
[0068] S103: The terminal device determines the thickness of the first oil film based on the first incident angle, the first reflected light intensity, the second reflected light intensity, and the pre-configured medium absorption coefficient that matches the oil film type.
[0069] Figure 4 The second flowchart illustrates the oil film thickness detection method provided in this application embodiment. For example, as shown... Figure 4 As shown, the specific implementation of S103 may include:
[0070] S401: The terminal device determines the refraction angle α of the incident laser in the first oil film based on the first incident angle θ, the refractive index n1 of the pre-configured air and the refractive index n2 of the pre-configured first oil film, using the refraction law α = arcsin(n1sinθ / n2).
[0071] S402: The terminal equipment determines the proportionality coefficient Q using the formula Q=-cosα / (2k) based on the refraction angle α and the medium absorption coefficient k of the pre-configured first oil film.
[0072] S403: The terminal equipment determines the thickness of the first oil film based on the proportional coefficient, the first reflected light intensity, and the second reflected light intensity.
[0073] Understandably, the accuracy of the proportionality coefficient Q determined based on the refraction angle α and the medium absorption coefficient k of the pre-configured first oil film is high, which can result in a higher thickness of the first oil film obtained based on the proportionality coefficient.
[0074] Specifically, S403 can be implemented as follows:
[0075] The terminal device is based on the formula: Determine the thickness D1 of the first oil film. Where Q is the proportionality coefficient, and I... γ1 I is the intensity of the first reflected light. γ2 This represents the intensity of the second reflected light.
[0076] Specifically, the formula can be derived using the following optical principles.
[0077] First of all, as before Figure 3 As shown, the laser transmitting module of the laser transceiver emits a second-wavelength incident laser beam that enters the first oil film at incident point A with a first incident angle θ. The first oil film refracts the second-wavelength incident laser beam to obtain a refracted laser beam with a refraction angle α. Then, the first-wavelength refracted laser beam with a refraction angle α enters the substrate at incident point B. The substrate reflects the refracted laser beam with a refraction angle α back to incident point C of the first oil film at a reflection angle α. The first oil film refracts the refracted laser beam again at incident point C, outputting an outgoing laser beam with an exit angle θ.
[0078] Assuming the intensity of the incident laser light when it contacts the incident point A is I0, and the transmittance of the first oil film is T n Then the intensity of the refracted laser light initially passing through the incident point A at a refraction angle of α is I1 = I0T. n The intensity of a refracted laser at point B on the surface of a substrate, with a refraction angle of α, is I2 = I1e. -kl Where k is the dielectric absorption coefficient of the pre-configured first oil film, and l is the optical path length from incident point A to incident point B. Furthermore, the initial light intensity of the laser after the substrate reflects the refracted laser with a refraction angle of α at a reflection angle of α is I3 = I2n(α), where n(α) is the reflection function. Thus, the light intensity reflected from the refracted laser with a refraction angle of α to the aforementioned incident point C is I4 = I3e -kl The first oil film refracts the refracted laser again at the incident point C, and the intensity of the output laser light is I. γ1 =I4T n At this point, the laser receiving module of the laser transceiver is able to detect the intensity I of the emitted laser light. γ1 .
[0079] Furthermore, integration We obtain formula I γ1 =I0e -2kl T n 2 n(α),
[0080] According to the law of cosines, the oil film thickness D1 = lcosα, I γ1 =I0e -2kl T n 2 n(α), then the oil film thickness
[0081] Furthermore, when the second wavelength incident laser is replaced by the first wavelength incident laser, the absorption of the first wavelength incident laser energy by the first oil film is extremely weak, and can be considered equal to 0. Therefore, I... γ2 =I0T n 2 n(α), where, I γ2 Given the intensity of the emitted laser corresponding to the incident laser of the first wavelength, we can obtain the formula for determining the oil film thickness. in,
[0082] Understandably, the formula It is derived from optical principles. Therefore, according to the formula... The obtained thickness D1 of the first oil film is highly reliable. Table 1 shows the comparison between the actual thickness of the first oil film and the thickness of the first oil film measured according to the oil film thickness detection method provided in the embodiments of this application. As can be seen from Table 1, the accuracy of the measured thickness of the first oil film is greater than 95%, indicating high reliability.
[0083]
[0084] Table 1
[0085] Understandably, after determining the thickness of the first oil film, the terminal device can determine whether the thickness of the first oil film is greater than a set thickness threshold. When the thickness of the first oil film is greater than the set thickness threshold, the terminal device determines that the substrate covered by the first oil film is unqualified. Because the determination of the thickness of the first oil film is highly accurate, the reliability of the terminal device's determination that the substrate covered by the first oil film is unqualified when the thickness of the first oil film is greater than the set thickness threshold is also high.
[0086] In summary, the oil film thickness detection method provided in this application utilizes the following: the first incident angle is the angle at which a laser transceiver incident a first wavelength laser onto a substrate covered with a first oil film; the first reflected light intensity is the intensity of the reflected laser light after the substrate of the first oil film emits the first wavelength laser; and the second reflected light intensity is the intensity of the reflected laser light after the laser transceiver incidents a second wavelength laser onto the substrate covered with the first oil film based on the first incident angle and reflects the second wavelength laser. Therefore, the thickness of the first oil film can be determined based on the first incident angle, the first reflected light intensity, the second reflected light intensity, and a pre-configured dielectric absorption coefficient matching the oil film type, with high accuracy in determining the thickness of the first oil film.
[0087] exist Figure 1 Based on the corresponding embodiments, prior to S101 described above, the method provided in this application embodiment further includes:
[0088] Step 1: The terminal device receives multiple sets of data from the laser transceiver to determine the medium absorption coefficient.
[0089] The data used to determine the absorption coefficient of the medium include: the incident angle of the first wavelength and the second wavelength incident lasers respectively incident on the substrate covered with the second oil film of the oil film type; the third reflected light intensity of the reflected laser after the substrate covered with the second oil film of the oil film type reflects the first wavelength incident laser; and the fourth reflected light intensity of the reflected laser after the substrate covered with the second oil film type reflects the second wavelength incident laser.
[0090] For example, one set of data for determining the absorption coefficient of a medium may include: the incident angle X1 of the first wavelength, the incident angle Y1 of the second wavelength, the third reflected light intensity Z1, and the fourth reflected light intensity W1; another set of data for determining the absorption coefficient of a medium may include: the incident angle X2 of the first wavelength, the incident angle Y2 of the second wavelength, the third reflected light intensity Z2, and the fourth reflected light intensity W2; yet another set of data for determining the absorption coefficient of a medium may include: the incident angle X3 of the first wavelength, the incident angle Y3 of the second wavelength, the third reflected light intensity Z3, and the fourth reflected light intensity W3.
[0091] Step 2: For each set of data used to determine the medium absorption coefficient, the terminal equipment calculates according to the formula. Determine the absorption coefficient k of candidate media that matches the oil film type. n .
[0092] Among them, I γ3 For the third reflected light intensity, I γ4 Let n1 be the intensity of the fourth reflected light, n2 be the refractive index of the pre-configured air, n2 be the refractive index of the pre-configured second oil film, θ be the incident angle, and D2 be the thickness of the pre-configured second oil film. Thus, each set of data used to determine the medium absorption coefficient corresponds to a k. n The value of .
[0093] Step 3: The terminal device clusters multiple candidate medium absorption coefficients that match the oil film type, and configures the candidate medium absorption coefficients at the cluster center as medium absorption coefficients that match the oil film type.
[0094] Figure 5 The incident angle of the incident laser and the absorption coefficient k of the candidate medium that matches the oil film type are determined. n A diagram illustrating the relationships. From Figure 5 As can be seen from this, the absorption coefficient k of the candidate medium that matches the oil film type n If the value is around 0.124, then 0.124 is the absorption coefficient of the candidate medium at the cluster center.
[0095] In this way, the dielectric absorption coefficient of the second oil film, which is the same type of oil film covering the substrate, can be tested in advance. Since the oil film type of the first oil film is the same as that of the second oil film, the dielectric absorption coefficient of the configured first oil film can be more in line with the actual situation, and the reliability can be higher, so that the reliability of the thickness of the final first oil film is also high.
[0096] Furthermore, the method provided in this application embodiment also includes:
[0097] The range of incident angles corresponding to the difference between the terminal device configuration and the absorption coefficient of the candidate medium located at the cluster center within a preset range.
[0098] Still Figure 5 As shown, the range of incident angles corresponding to the absorption coefficients of candidate media near the cluster center is [5°, 20°]. That is to say, the range of incident angles corresponding to the absorption coefficients of other candidate media whose difference from the absorption coefficient of the candidate media near the cluster center is within a preset range is [5°, 20°].
[0099] It is understandable that, in the stage of testing the medium absorption coefficient of the second oil film matching the oil film type, when the incident angles of the first wavelength and the second wavelength of the incident laser are different, the medium absorption coefficient obtained to match the second oil film type is different, and the reliability of the range of incident angles corresponding to the other candidate medium absorption coefficients whose difference with the candidate medium absorption coefficient at the cluster center is within the preset range is high.
[0100] In order to ensure that the medium absorption coefficient matched by the first oil film is consistent with the medium absorption coefficient matched by the second oil film of the pre-configured oil film type during the subsequent stage of testing the thickness of the first oil film, the range of incident angles corresponding to other candidate medium absorption coefficients whose difference with the candidate medium absorption coefficients located at the cluster center is within a preset range can be configured, so as to provide the range of incident angles for emitting the first wavelength and the second wavelength incident laser during the subsequent stage of testing the thickness of the first oil film.
[0101] Please see Figure 6 This application provides an oil film thickness detection device. It should be noted that the basic principle and technical effects of the oil film thickness detection device provided in this application are the same as those in the above embodiments. For the sake of brevity, any parts not mentioned in this application can be referred to the corresponding content in the above embodiments. The oil film thickness detection device includes a data receiving unit and a thickness determination unit.
[0102] The data receiving unit is used to receive the first incident angle and the first reflected light intensity sent by the laser transceiver.
[0103] Wherein, the first incident angle is the angle at which the laser transceiver incident a first wavelength laser onto the substrate covered with the first oil film, the first reflected light intensity is the light intensity of the reflected laser after the substrate of the first oil film emits the first wavelength laser, and the energy absorption of the first oil film by the incident laser of the first wavelength is greater than a set energy threshold.
[0104] The data receiving unit is also used to receive the second reflected light intensity sent by the laser transceiver, wherein the second reflected light intensity is the light intensity of the reflected laser after the laser transceiver incident a second wavelength laser onto the substrate covered with the first oil film based on the first incident angle and reflected by the second wavelength laser, and the energy absorption of the first oil film of the second wavelength incident laser is less than a set energy threshold.
[0105] The thickness determination unit is used to determine the thickness of the first oil film based on the first incident angle, the first reflected light intensity, the second reflected light intensity, and a pre-configured medium absorption coefficient that matches the oil film type.
[0106] In one possible implementation, the thickness determination unit is specifically used to determine the refraction angle α of the incident laser in the first oil film based on the first incident angle θ, the refractive index n1 of the pre-configured air, and the refractive index n2 of the pre-configured first oil film, using the law of refraction: α=arcsin(n1sinθ / n2); to determine the proportionality coefficient Q based on the refraction angle α and the medium absorption coefficient k of the pre-configured first oil film, using the formula: Q=-cosα / (2k); and to determine the thickness of the first oil film based on the proportionality coefficient, the first reflected light intensity, and the second reflected light intensity.
[0107] In one possible implementation, the thickness determining unit is specifically used to determine the thickness according to a formula. Determine the thickness D1 of the first oil film; where Q is the proportionality coefficient, and I... γ1 I is the intensity of the first reflected light. γ2 This represents the intensity of the second reflected light.
[0108] In one possible implementation, the data receiving unit is used to receive multiple sets of data from the laser transceiver for determining the dielectric absorption coefficient.
[0109] The data used to determine the absorption coefficient of the medium include: the incident angle of the first wavelength and the second wavelength incident lasers respectively incident on the substrate covered with the second oil film of the oil film type; the third reflected light intensity of the reflected laser after the substrate covered with the second oil film of the oil film type reflects the first wavelength incident laser; and the fourth reflected light intensity of the reflected laser after the substrate covered with the second oil film type reflects the second wavelength incident laser.
[0110] The thickness determination unit is specifically used to determine the absorption coefficient of the medium for each set of data, based on the formula. Determine the absorption coefficient k of candidate media that matches the oil film type. n Among them, I γ3 For the third reflected light intensity, I γ4 Let n1 be the intensity of the fourth reflected light, n2 be the refractive index of the pre-configured air, n2 be the refractive index of the pre-configured second oil film, θ be the incident angle, and D2 be the thickness of the pre-configured second oil film. Multiple candidate medium absorption coefficients matching the oil film type are clustered, and the candidate medium absorption coefficients at the cluster centers are configured as medium absorption coefficients matching the oil film type.
[0111] In one possible implementation, the apparatus provided in this application further includes: a data configuration unit, configured to configure the range of incident angles corresponding to the absorption coefficients of other candidate media whose difference with the absorption coefficient of the candidate media located at the cluster center is within a preset range.
[0112] In one possible implementation, the absorption coefficients of other candidate media correspond to the range of incident angles [5°, 20°].
[0113] In one possible implementation, the apparatus provided in this application embodiment further includes:
[0114] The substrate inspection unit is used to determine that the substrate covered with the first oil film is unqualified when the thickness of the first oil film is greater than a set thickness threshold.
[0115] In addition, this application also provides a terminal device, including a memory, a processor, and a computer program stored in the memory and executable on the processor. When the processor executes the computer program, the terminal device performs the method provided in the above embodiments.
[0116] In addition, embodiments of this application also provide a computer-readable storage medium storing a computer program, which, when executed by a processor, causes the computer to perform the method provided in the above embodiments.
[0117] In addition, this application also provides a computer program product, including a computer program that, when run, causes a computer to perform the methods provided in the above embodiments.
[0118] Those skilled in the art will understand that all or part of the steps of the above-described method embodiments can be implemented by hardware related to program instructions. The aforementioned program can be stored in a computer-readable storage medium. When executed, the program performs the steps of the above-described method embodiments; and the aforementioned storage medium includes various media capable of storing program code, such as ROM, RAM, magnetic disks, or optical disks.
[0119] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.
Claims
1. A method for detecting oil film thickness, characterized in that, include: The terminal device receives a first incident angle and a first reflected light intensity from a laser transceiver; wherein, the first incident angle is the angle at which the laser transceiver incident a first wavelength laser onto a substrate covered with a first oil film; the first reflected light intensity is the light intensity of the reflected laser after the substrate of the first oil film emits the first wavelength laser; and the energy absorption of the first oil film of the incident laser of the first wavelength is greater than a set energy threshold. The terminal device receives a second reflected light intensity sent by a laser transceiver, wherein the second reflected light intensity is the intensity of the reflected laser light after the laser transceiver incident a second wavelength laser onto the substrate covered with a first oil film at a first incident angle and then reflected by the second wavelength laser; the energy absorption of the first oil film of the second wavelength incident laser is less than the set energy threshold. The terminal device determines the reflected light intensity ratio based on the first reflected light intensity and the second reflected light intensity; The terminal device determines the thickness of the first oil film based on the first incident angle, the reflected light intensity ratio, and the medium absorption coefficient that matches the oil film type of the first oil film. The terminal device determines the thickness of the first oil film based on the first incident angle, the reflected light intensity ratio, and a medium absorption coefficient matching the oil film type of the first oil film, including: The terminal device uses the law of refraction based on the first incident angle θ, the pre-configured refractive index n1 of air, and the pre-configured refractive index n2 of the first oil film: α = arcsin(n1sinθ / n2) Determine the refraction angle α of the incident laser within the first oil film; The terminal device uses the following formula based on the refraction angle α and the pre-configured medium absorption coefficient k of the first oil film: Q = -cosα / (2k) Determine the proportionality coefficient Q; The terminal device determines the thickness of the first oil film based on the proportionality coefficient, the first reflected light intensity, and the second reflected light intensity. The terminal device determines the thickness of the first oil film based on the proportionality coefficient, the first reflected light intensity, and the second reflected light intensity, including: The terminal device is based on the following formula: Determine the thickness D1 of the first oil film; Where Q is the proportionality coefficient. The intensity of the first reflected light. The intensity of the second reflected light is denoted as .
2. The method according to claim 1, characterized in that, Before the terminal device receives the first incident angle and the first reflected light intensity transmitted by the laser transceiver, the method further includes: The terminal device receives multiple sets of data from the laser transceiver for determining the dielectric absorption coefficient. Each set of data for determining the dielectric absorption coefficient includes: the incident angle of incident lasers of a first wavelength and a second wavelength respectively incident on the substrate covered with the second oil film; the third reflected light intensity of the reflected laser after the substrate covered with the second oil film reflects the incident laser of the first wavelength; and the fourth reflected light intensity of the reflected laser after the substrate covered with the second oil film reflects the incident laser of the second wavelength. The oil film type of the second oil film is the same as that of the first oil film. For each set of data determining the medium absorption coefficient, the terminal device calculates according to the formula. Determine the absorption coefficient of candidate media that match the oil film type. ; in, The intensity of the third reflected light. The fourth reflected light intensity is given by n1, where n1 is the pre-configured refractive index of air and n2 is the pre-configured refractive index of the second oil film. Where D is the incident angle, and D2 is the thickness of the pre-configured second oil film; The terminal device clusters multiple candidate medium absorption coefficients that match the oil film type, and configures the candidate medium absorption coefficient at the cluster center as the medium absorption coefficient that matches the oil film type.
3. The method according to claim 2, characterized in that, After the terminal device clusters the absorption coefficients of multiple candidate media matching the oil film type, the method further includes: The terminal device is configured such that the difference between the absorption coefficient of the candidate medium located at the cluster center and the absorption coefficient of other candidate media is within a preset range, corresponding to the range of incident angles.
4. The method according to claim 3, characterized in that, The absorption coefficients of the other candidate media correspond to the range of incident angles of [5°, 20°].
5. The method according to any one of claims 1-4, characterized in that, After the terminal device determines the thickness of the first oil film based on the first incident angle, the first reflected light intensity, the second reflected light intensity, and a pre-configured medium absorption coefficient matching the oil film type, the method further includes: When the thickness of the first oil film is greater than a set thickness threshold, the terminal device determines that the substrate covered with the first oil film is unqualified.
6. An oil film thickness detection device, characterized in that, The device is used to perform the oil film thickness detection method as described in any one of claims 1 to 5.
7. A terminal device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that, When the processor executes the computer program, it causes the terminal device to perform the method as described in any one of claims 1 to 5.
8. A computer-readable storage medium storing a computer program, characterized in that, When the computer program is executed by a processor, it causes the computer to perform the method as described in any one of claims 1 to 5.