Porous plug engagement

Abstract

Embodiments described herein generally relate to a porous plug with a sealing layer for a substrate support pedestal and methods of forming the same. In one or more embodiments, a sealing layer can be formed in situ by applying a fluoroelastomer composition to at least one of a porous plug and a wall of a cavity of an electrostatic chuck. The fluoroelastomer composition can be cured in situ to form a sealing layer between the porous plug and the wall of the cavity. The porous plug is positioned within the cavity to control gas flow through a gas flow passage. The sealing layer is positioned adjacent to the porous plug and can form at least one of a radial seal between the porous plug and the wall of the cavity and an axial seal between the porous plug and a cooling base.

Description

Background Technology Technical Field

[0002] The implementation described herein generally relates to a substrate support base, and more specifically to a substrate support base with a porous plug and a method for bonding the porous plug to the substrate support base.

[0003] Related technical specifications

[0004] Substrate support bases are widely used to support substrates within semiconductor processing systems during processing. One particular type of substrate support base includes a ceramic electrostatic chuck mounted on a cooling base. The electrostatic chuck typically holds the substrate in a stationary position during processing. The electrostatic chuck contains one or more embedded electrodes within the ceramic body. When a potential is applied between the electrodes and the substrate disposed on the ceramic body, an electrostatic attraction is generated, which holds the substrate against the support surface of the ceramic body. Due to the potential difference between the substrate and the electrodes, or in the case of a ceramic body made of a semiconductor material with relatively low resistivity, the generated force may have a capacitive effect, which allows charges within the ceramic body to migrate to a surface close to the substrate (Johnsen-Rahbeck effect). Electrostatic chucks utilizing capacitance and Johnsen-Rahbeck attraction are commercially available from various sources.

[0005] To control the substrate temperature during processing, a back gas is provided between the support surface of the ceramic body and the substrate. Typically, the back gas fills the gap region between the ceramic body and the substrate, thereby providing a heat transfer medium that increases the heat transfer rate between the substrate and the substrate support.

[0006] The bonding layer secures the electrostatic chuck to the cooling base. The bonding layer is susceptible to erosion by the process gases passing through it. Furthermore, eroded bonding layer can be ignited, energized, or otherwise facilitate arcing in the portion of the substrate support base exposed to the bonding layer through the back gas path. Erosion of the bonding layer is problematic for at least three reasons. First, the material eroded from the bonding layer is a process contaminant that introduces defects and reduces product yield. Second, as the aperture size in the bonding layer through which the back gas passes increases, the localized heat transfer rate between the electrostatic chuck and the cooling base changes as the bonding material is gapped and replaced, resulting in unwanted temperature inhomogeneities and process drift. Third, eroded bonding layer can provide a path from the substrate to ground potential along the sidewalls.

[0007] Therefore, there is a need for improved substrate support bases and their manufacturing methods. Summary of the Invention

[0008] The implementation described herein generally pertains to a substrate support base, and more specifically to a substrate support base with a porous plug and a method for joining the porous plug to the substrate support base.

[0009] In one aspect, a method for manufacturing a suction cup body is provided. The method includes coating a porous plug with a coating comprising a fluoroelastomer composition. The method further includes inserting the porous plug having the coating formed thereon into a cavity defined by a wall formed in the suction cup body. The method further includes curing the coating to form a sealing layer between the porous plug and the wall of the cavity.

[0010] The implementation may include one or more of the following: The coating has a thickness of about 25 micrometers to about 1,000 micrometers. Before insertion of the porous plug, the coating is partially cured to form a partially cured fluoroelastomer layer on the porous plug. A sealing layer forms a radial seal between the porous plug and the wall of the cavity. The sealing layer further forms an axial seal between the porous plug and a cooling base bonded to the suction cup body. The sealing layer further forms an axial seal between the top surface of the porous plug and a second wall of the cavity. The porous plug has a cylindrical or T-shaped shape. The fluoroelastomer composition is in the form of a paste having a viscosity of about 50 cP to about 5,000 cP. The fluoroelastomer composition includes at least one perfluoropolymer. The fluoroelastomer composition further includes at least one of the following: a curing agent, an adhesion promoter, a thickener, a solvent, and a filler.

[0011] In another aspect, a method for manufacturing a suction cup body is provided. The method includes: coating the walls of a cavity formed in the suction cup body with a coating comprising a fluorinated elastomer composition. The method further includes: inserting a porous plug into the cavity. The method further includes: curing the coating to form a sealing layer between the porous plug and the wall of the cavity.

[0012] The implementation may include one or more of the following: The coating has a thickness of about 25 micrometers to about 1,000 micrometers. Before insertion of the porous plug, the coating is partially cured to form a partially cured fluoroelastomer layer on the wall of the cavity. A sealing layer forms a radial seal between the porous plug and the wall of the cavity. The sealing layer further forms an axial seal between the porous plug and a cooling base bonded to the suction cup body. The sealing layer further forms an axial seal between the top surface of the porous plug and a second wall of the cavity. The porous plug has a cylindrical or T-shaped shape. The fluoroelastomer composition is in the form of a paste having a viscosity of about 50 cP to about 5,000 cP. The fluoroelastomer composition includes at least one perfluoropolymer. The fluoroelastomer composition further includes at least one of the following: a curing agent, an adhesion promoter, a thickener, a solvent, and a filler.

[0013] In yet another aspect, a method for manufacturing a suction cup body is provided. The method includes: coating a porous plug with a first coating comprising a fluorinated elastomer composition. The method further includes: coating the walls of a cavity formed in the suction cup body with a second coating comprising a fluorinated elastomer composition. The method further includes: inserting the porous plug having the first coating thereon into the cavity having the second coating thereon. The method further includes: curing the first and second coatings to form a sealing layer between the porous plug and the wall of the cavity.

[0014] The implementation may include one or more of the following: Before insertion of the porous plug, at least one of a first coating and a second coating is partially cured to form a partially cured fluoroelastomer layer on at least one of the porous plug and the cavity wall. At least one of the first and second coatings has a thickness of about 25 micrometers to about 1,000 micrometers. A sealing layer forms a radial seal between the porous plug and the cavity wall. The sealing layer further forms an axial seal between the porous plug and a cooling base bonded to the suction cup body. The sealing layer further forms an axial seal between the top surface of the porous plug and a second wall of the cavity. The porous plug has a cylindrical or T-shaped shape. The fluoroelastomer composition is in the form of a paste having a viscosity of about 50 cP to about 5,000 cP. The fluoroelastomer composition includes at least one perfluoropolymer. The fluoroelastomer composition further includes at least one of the following: a curing agent, an adhesion promoter, a thickener, a solvent, and a filler.

[0015] In another aspect, a method for manufacturing a suction cup body is provided. The method includes: coating a porous plug with a coating comprising a fluorinated elastomer composition. The method further includes: curing the coating to form a sealing layer on the porous plug. The method further includes: inserting the porous plug, on which the sealing layer is formed, into a cavity of a suction cup body having walls, wherein the sealing layer is compressed to form a seal between the walls of the cavity and the porous plug.

[0016] The implementation may include one or more of the following: The coating has a thickness of about 25 micrometers to about 1,000 micrometers. A sealing layer forms a radial seal between the porous plug and the wall of the cavity. The sealing layer further forms an axial seal between the porous plug and a cooling base bonded to the suction cup body. The sealing layer further forms an axial seal between the top surface of the porous plug and a second wall of the cavity. The porous plug is cylindrical or T-shaped. The fluoroelastomer composition is in the form of a paste having a viscosity of about 50 cP to about 5,000 cP. The fluoroelastomer composition includes at least one perfluoropolymer. The fluoroelastomer composition further includes at least one of the following: a curing agent, an adhesion promoter, a thickener, a solvent, and a filler.

[0017] In yet another aspect, a method for manufacturing a suction cup body is provided. The method includes: coating the walls of a cavity formed in the suction cup body with a first coating comprising a fluorinated elastomer composition. The method further includes: curing the coating to form a sealing layer on the walls of the cavity. The method further includes: inserting a porous plug into the cavity having the sealing layer formed thereon, wherein the sealing layer is compressed to form a seal between the walls of the cavity and the porous plug.

[0018] The implementation may include one or more of the following potential advantages: The coating has a thickness of about 25 micrometers to about 1,000 micrometers. A sealing layer forms a radial seal between the porous plug and the wall of the cavity. The sealing layer further forms an axial seal between the porous plug and the cooling base bonded to the suction cup body. The sealing layer further forms an axial seal between the top surface of the porous plug and the second wall of the cavity. The porous plug has a cylindrical or T-shaped shape. The fluoroelastomer composition is in the form of a paste having a viscosity of about 50 cP to about 5,000 cP. The fluoroelastomer composition includes at least one perfluoropolymer. The fluoroelastomer composition further includes at least one of the following: a curing agent, an adhesion promoter, a thickener, a solvent, and a filler.

[0019] In yet another aspect, a method for manufacturing a suction cup body is provided. The method includes: coating a porous plug with a first coating comprising a fluorinated elastomer composition. The method further includes: partially curing the first coating to form a first partially cured sealing layer on the porous plug. The method further includes: coating the walls of a cavity formed in the suction cup body with a second coating comprising a fluorinated elastomer composition. The method further includes: inserting the porous plug having the first partially cured sealing layer formed thereon into a cavity having the second coating formed thereon. The method further includes: curing the first partially cured sealing layer and the second coating to form a sealing layer between the porous plug and the wall of the cavity.

[0020] The implementation may include one or more of the following potential advantages. At least one of the first and second coatings has a thickness of about 25 micrometers to about 1,000 micrometers. A sealing layer forms a radial seal between the porous plug and the wall of the cavity. The sealing layer further forms an axial seal between the porous plug and the cooling base coupled to the suction cup body. The sealing layer further forms an axial seal between the top surface of the porous plug and the second wall of the cavity. The porous plug has a cylindrical or T-shaped shape. The fluoroelastomer composition is in the form of a paste having a viscosity of about 50 cP to about 5,000 cP. The fluoroelastomer composition includes at least one perfluoropolymer. The fluoroelastomer composition further includes at least one of the following: a curing agent, an adhesion promoter, a thickener, a solvent, and a filler.

[0021] In another aspect, a non-transient computer-readable medium has instructions stored thereon that, when executed by a processor, cause the processor to perform operations on a device and / or method. Attached Figure Description

[0022] To gain a more detailed understanding of the features described above, the present disclosure, which has been briefly summarized above, can be described in more detail by referring to implementations (some of which are shown in the accompanying drawings). However, it should be noted that the drawings illustrate only typical implementations of the present disclosure and should therefore not be considered as limiting its scope, as other equally effective implementations are permissible.

[0023] Figure 1 This is a schematic diagram of a processing chamber including a substrate support base with a porous plug having an engagement, according to one or more implementations of this disclosure.

[0024] Figure 2 This is a partial cross-sectional view of a substrate support base with a porous plug having an engagement, according to one or more implementations of this disclosure.

[0025] Figure 3 This is a partial cross-sectional view of a substrate support base with a porous plug having an engagement, according to one or more implementations of this disclosure.

[0026] Figure 4 This is a flowchart illustrating an example of a method for forming a substrate base with a porous plug having an engagement, according to one or more implementations of this disclosure.

[0027] Figure 5 This is a flowchart of another example of a method for forming a substrate base with a porous plug having an engagement, according to one or more implementations of this disclosure.

[0028] Figure 6 This is a flowchart of yet another example of a method for forming a substrate base with a porous plug having an engagement, according to one or more implementations of this disclosure.

[0029] Figure 7 This is a flowchart of yet another example of a method for forming a substrate base with a porous plug having an engagement, according to one or more implementations of this disclosure.

[0030] Figure 8 This is a flowchart of yet another example of a method for forming a substrate base with a porous plug having an engagement, according to one or more implementations of this disclosure.

[0031] Figures 9A to 9C A schematic cross-sectional view is depicted of a substrate base forming a porous plug with an engagement, according to one or more implementations of the present disclosure.

[0032] For ease of understanding, the same reference numerals are used to denote the same elements in the figures where possible. It is conceivable that elements and features in one implementation can be advantageously used in other implementations without further discussion. Detailed Implementation

[0033] The following discloses a porous plug with a joint and a method for forming the porous plug with a joint. In the following implementation and Figures 1-9C Certain details are set forth in this disclosure to provide a complete understanding of the various implementations thereof. Further details describing conventional structures and systems typically associated with the bonding of porous plug formation and elastomeric polymers are not set forth in the following disclosure to avoid unnecessarily obscuring the description of the various implementations. Furthermore, the device descriptions described herein are exemplary and should not be construed as limiting the scope of the implementations described herein.

[0034] Many details, dimensions, angles, and other features shown in the accompanying drawings are merely illustrative examples of specific implementations. Therefore, other implementations may have different details, components, dimensions, angles, and features without departing from the spirit or scope of this disclosure. Furthermore, other implementations of this disclosure may be practiced without the several details described below.

[0035] Porous plugs are used in conjunction with electrostatic chucks to allow back gas to reach and cool the substrate located on the electrostatic chuck, while preventing process gas from flowing downwards through the chuck. One method of bonding the porous plug to the electrostatic chuck involves using silicone. However, a potential problem with using silicone is that it forms a chemical bond with fluorine from the fluorinated process gas. This fluorine may cause undesirable arcing from the substrate to ground via a fluorine-contaminated bonding layer. Therefore, it is advantageous to have bonding materials for the porous plug and methods for bonding the porous plug that reduce or prevent undesirable arcing.

[0036] The system and method discussed in this case employ a substrate support base having a cooling base and an electrostatic chuck, the cooling base and the electrostatic chuck being joined together via a bonding layer. A porous plug is positioned in an airflow path formed within the cooling base and the electrostatic chuck. A sealing layer formed of a fluorinated elastomer composition is used to bond the porous plug to the electrostatic chuck. The bonding of the sealing layer to the porous plug protects the bonding layer from the processing gases used during substrate processing. Advantageously, the following implementation discusses an improved technique for securing the porous plug within the airflow path to prevent degradation of the bonding layer by utilizing a sealing layer that substantially prevents gas flow around the porous plug. Furthermore, the sealing layer is made of a fluorine-resistant material. This is an improvement on the silicone materials used to bond the porous plug to the electrostatic chuck. These silicone materials are susceptible to fluorine contamination from the processing gases, which can cause an electric arc from the semiconductor substrate to ground via the fluorinated silicone material. Additionally, the fluorinated elastomer composition can be used as a viscosity-regulating liquid. In addition, sealing layers formed from fluorinated elastomer compositions can withstand higher temperatures than those formed from silicone compositions.

[0037] As used herein, "fluoroelastomer composition" refers to a polymeric composition comprising a curable fluoropolymer. A fluoropolymer can be formed by polymerizing two or more monomers, preferably one of which is fluorinated or perfluorinated, and at least one of which is a cure-site monomer (e.g., at least one fluoropolymer cure-site monomer) to allow curing. Fluoroelastomer compositions as described herein may include any suitable curable fluoroelastomer (FKM) or perfluoroelastomer (FFKM) capable of being cured to form a fluoroelastomer or perfluoroelastomer, and one or more curing agents as described herein.

[0038] As used herein, a perfluoroelastomer can be any substantially cured elastomer material derived by curing a perfluoropolymer (as defined herein) having at least one crosslinking group to allow curing by a monomer with at least one curing site. The perfluoropolymer used herein is substantially fluorinated relative to the carbon atoms in the perfluoropolymer backbone, and preferably fully fluorinated. It should be understood that some residual hydrogen may be present in the crosslinked perfluoroelastomer due to the use of hydrogen in the functional crosslinking groups in certain types of perfluoroelastomer formulations.

[0039] Fluorinated elastomer compositions and perfluoroelastomer compositions (also known as fluorocarbon elastomers) as used herein may be cured or uncured (curable). When modified by the terms "uncured" or "curable," a fluorinated elastomer or perfluoroelastomer composition refers to a composition containing a fluorinated polymer or a perfluoropolymer, wherein such crosslinking has not yet substantially occurred, and therefore the material is not yet suitable for the intended application.

[0040] The fluoroelastomer compositions described herein may contain several different components in various arrangements as detailed below, such as one or more fluoropolymers, one or more perfluoropolymers having various curing sites, curing agents, adhesion promoters, thickeners, solvents, and many other optional fillers and additives.

[0041] In some implementations, the curable elastomer perfluoropolymer may comprise two or more of a variety of perfluoro copolymers, where at least one of the fluoroenes is an unsaturated monomer, such as tetrafluoroethylene (TFE), perfluoroolefins (e.g., hexafluoropropylene (HFP)), and perfluoroalkyl vinyl ethers (PAVEs) comprising linear or branched alkyl groups and including one or more ether bonds, such as perfluoro(methyl vinyl ether), perfluoro(ethyl vinyl ether), perfluoro(propyl vinyl ether), and similar compounds. Suitable examples of PAVEs include perfluoro(methyl vinyl) ether (PMVE) and perfluoro(propyl vinyl) ether (PPVE). In one example, PAVE has the chemical formula CF2=CFO (CF2CFXO). n R f Where X is F or CF3, n is 0-5, and R f It is a perfluoroalkyl group with 1-6 carbon atoms. Suitable perfluoropolymers can be those that meet the industrially accepted definition of perfluoroelastomers listed as FFKM in ASTM D-1418, and can be ternary or quaternary polymers of TFE, PAVE, and have a perfluorocuring site monomer that incorporates functional groups to allow crosslinking of the ternary polymer, wherein at least one of the curing sites is a curing site capable of being cured by the curing system used in the practice of this disclosure. These monomers can be used with comonomers that promote crosslinking. Small concentrations of unfluorinated monomers can also be used. Typically, such monomers are used to obtain the desired crosslinking properties and can be present at concentrations up to about 3 moles. Examples of such monomers include bromotetrafluorobutene, bromotrifluoroethylene, vinylidene fluoride, and monomers containing nitrile groups.

[0042] In their uncured or curable state, the fluoropolymer compositions of this disclosure may include at least one curing agent corresponding to (e.g., capable of promoting crosslinking) one of at least one curing site monomers present on the fluoropolymer. Any curing agent or combination of curing agents may be used. For example, a peroxide-curable or cyano-curable system may be used, depending on the desired physical properties of the final product and the fluoropolymer composition. Regardless of the curing system or combination of systems used, the fluoropolymer may contain at least one curing site monomer, although approximately 2 to approximately 20 curing sites (identical or different) may be suitably present. The curing agent may be present in an amount necessary to provide adequate curing.

[0043] Fluorinated elastomer compositions may contain acrylate compounds, such as any compound known or developed in the art that includes one or more acrylate functional groups. The acrylate compound may be a metal acrylate or a combination of different acrylate compounds and / or metal acrylates. Examples may include diacrylates, acrylates, dimethacrylates, triacrylates, and / or tetraacrylate compounds. More specifically, suitable examples may include zinc or copper diacrylates and acrylates. Such compounds are known to be commercially available from, for example, Sartomer of Exton, Pennsylvania, USA (trade names, e.g.) SR633 and SR634). It also includes perfluoroelastomers, fluorinated elastomers, elastomers or other resins in which acrylate groups are incorporated in their structure.

[0044] Fluorinated elastomer compositions may also contain one or more additional additives, such as fillers, plasticizers, polymer blends, and colorants. If desired, other additives may include, for example, carbon black, glass fibers, glass spheres, silicates, fiberglass, calcium sulfate, asbestos, boron fibers, ceramic fibers, aluminum hydroxide, barium sulfate, calcium carbonate, fluorinated graphite, magnesium carbonate, alumina, aluminum nitride, borax, perlite, zinc terephthalate, silicon carbide wafers, wollastonite, calcium terephthalate, fullerene tubes, lithium montmorillonite, talc, mica, carbon nanotubes, and silicon carbide whiskers.

[0045] The aforementioned fluorinated elastomer composition may contain any or all of the various components described above in any proportion, ratio, or arrangement. Those skilled in the art will recognize that these components and relative ratios may be changed and varied depending on the desired properties of the final product, which in turn depends on the application in which the mating parts will be used.

[0046] Once cured, the fluorinated elastomer composition forms a sealing layer that also engages the porous plug with the electrostatic chuck.

[0047] In some implementations of this disclosure, a fluorinated elastomer composition is bonded to a porous plug and / or electrostatic chuck by contacting a curable perfluoroelastomer composition (as described herein) with the porous plug and / or electrostatic chuck and curing it via any curing process known or developed in the art. In some implementations of this disclosure, the fluorinated elastomer composition is bonded to the porous plug and / or electrostatic chuck by contacting the curable perfluoroelastomer composition with the porous plug and / or electrostatic chuck and partially curing or semi-curing (such as allowing some cross-linking, but not to the desired extent). The porous plug and / or electrostatic chuck coated with the semi-cured fluorinated elastomer composition can be contacted with another inert substrate and cured in situ to form a final fluorinated elastomer sealing layer between the porous plug and the electrostatic chuck.

[0048] Curing or partial curing (such as semi-curing) in any method can be accomplished by any method known in or to be developed in the art, including thermal curing, curing by applying high energy, thermal curing, pressure curing, vapor curing, pressure curing, electron beam curing, or curing by any combination of the above. Post-cure treatment may also be applied if necessary.

[0049] In some implementations, the fluorinated elastomer composition is used as a colloid. As used herein, "paste" refers to a heterogeneous composition with a viscosity of about 1 centipoise (cP) to about 10,000 cP. "Heterogeneous composition" refers to a composition having more than one excipient or ingredient. As used herein, "paste" can also refer to gels, creams, adhesives, bonding agents, and any other viscous liquids or semi-solids. In some implementations, the paste used with this disclosure has adjustable viscosity and / or viscosity that can be controlled by one or more external conditions.

[0050] In some implementations, the fluorinated elastomer composition is in the form of a paste having a viscosity of about 1 cP to about 10,000 cP. In some implementations, the fluorinated elastomer composition is in the form of a paste having a minimum viscosity of about 1 cP, about 2 cP, about 5 cP, about 10 cP, about 15 cP, about 20 cP, about 25 cP, about 30 cP, about 40 cP, about 50 cP, about 60 cP, about 75 cP, about 100 cP, about 125 cP, about 150 cP, about 175 cP, about 200 cP, about 250 cP, about 300 cP, about 400 cP, about 500 cP, about 750 cP, about 1,000 cP, about 1,250 cP, about 1,500 cP, or about 2,000 cP. In some implementations, the fluorinated elastomer composition is in the form of a paste having a maximum viscosity of about 10,000 cP, about 9,500 cP, about 9,000 cP, about 8,500 cP, about 8,000 cP, about 7,500 cP, about 7,000 cP, about 6,500 cP, about 6,000 cP, about 5,500 cP, about 5,000 cP, about 4,000 cP, about 3,000 cP, about 2,000 cP, about 1,000 cP, about 500 cP, about 250 cP, about 100 cP, or about 50 cP.

[0051] In some implementations, the fluorinated elastomer composition has the following properties: about 50 cP to about 5,000 cP, about 50 cP to about 4,000 cP, about 50 cP to about 3,000 cP, about 50 cP to about 2,000 cP, about 50 cP to about 1,000 cP, about 80 cP to about 500 cP, about 80 cP to about 450 cP, about 80 cP to about 400 cP, about 80 cP to about 300 cP, about 80 cP to about 250 cP, about 80 cP to about 200 cP, about 80 cP to about 150 cP, about 100 cP to about 1,000 cP. Viscous paste forms of about 00 cP, about 100 cP to about 900 cP, about 100 cP to about 800 cP, about 100 cP to about 700 cP, about 100 cP to about 600 cP, about 100 cP to about 500 cP, about 100 cP to about 400 cP, about 100 cP to about 300 cP, about 100 cP to about 250 cP, about 200 cP to about 500 cP, about 200 cP to about 400 cP, about 250 cP to about 500 cP, about 300 cP to about 500 cP, or about 400 cP to about 500 cP.

[0052] Typically, the viscosity of the fluoroelastomer composition is controlled. In some implementations, the viscosity of the fluoroelastomer composition is adjusted based on the pore size of the pores formed in the porous plug. For example, the viscosity of the fluoroelastomer composition is adjusted so that it coats the surface of the porous plug 202 but does not fill the internal pores of the porous plug 202. Parameters that can control the viscosity of the fluoroelastomer composition include, but are not limited to, the average length, molecular weight, and / or degree of crosslinking of the copolymer; the presence and concentration of the solvent; the presence and concentration of the thickener (i.e., the viscosity-modifying component); the particle size of the components present in the paste; the free volume (i.e., porosity) of the components present in the paste; the swelling degree of the components present in the paste; ionic interactions between oppositely charged and / or partially charged substances present in the paste (such as solvent-thickener interactions); or combinations thereof.

[0053] In some implementations where the viscosity of a fluorinated elastomer composition needs to be adjusted, the fluorinated elastomer composition further includes at least one of a solvent and a thickener. In some implementations, a combination of solvent and thickener can be selected to adjust the viscosity of the paste.

[0054] Thickeners suitable for the fluorinated elastomer compositions of this disclosure include, but are not limited to, metal salts of carboxyalkyl cellulose derivatives (such as sodium carboxymethyl cellulose), alkyl cellulose derivatives (such as methyl cellulose and ethyl cellulose), partially oxidized alkyl cellulose derivatives (such as hydroxyethyl cellulose, hydroxypropyl cellulose, and hydroxypropyl methyl cellulose), starch, polyacrylamide gel, homopolymers of poly-N-vinylpyrrolidone, poly(alkyl ethers) (such as polyethylene oxide and ethylene glycol oxide), agar, agarose, xanthan gum, gelatin, dendritic macromolecules, colloidal silica, and combinations thereof. In some implementations, the thickener is present in the fluorinated elastomer composition at a concentration of about 0.1% to about 50%, about 0.5% to about 25%, about 1% to about 20%, or about 5% to about 15% by weight of the paste.

[0055] In some implementations, the fluorinated elastomer composition further includes a solvent. Solvents suitable for the fluorinated elastomer compositions of this disclosure include, but are not limited to, water, C1-C8 alcohols (such as methanol, ethanol, propanol, and butanol), and C6-C4 alcohols. 12 Straight-chain, branched, and cyclic hydrocarbons (such as hexane and cyclohexane), C6-C 14 Aryl and aralkyl hydrocarbons (such as benzene and solvents), C3-C 10 Alkyl ketones (such as acetone), C3-C 10 Esters (such as ethyl acetate), C4-C 10Alkyl ethers or combinations thereof. In some embodiments, the solvent is present in the paste at a concentration of about 10% to about 99% by weight. In some embodiments, the solvent is present in the fluoroelastomer composition at a maximum concentration of about 99%, about 98%, about 97%, about 95%, about 90%, about 80%, about 70%, about 60%, about 50%, about 40%, or about 30% by weight of the paste. In some embodiments, the solvent is present in the fluoroelastomer composition at a minimum concentration of about 15%, about 20%, about 25%, about 30%, about 40%, about 50%, about 60%, about 70%, or about 80% by weight of the fluoroelastomer composition.

[0056] In some implementations, in order to control the porosity in the formed coating, vacuum degassing is performed on the applied material and the coated components before curing.

[0057] Figure 1 A schematic diagram of a processing chamber 100 including a substrate support base 110 according to one or more implementations of the present disclosure is depicted. The substrate support base 110 includes a porous plug engaged as described herein. The processing chamber 100 includes a chamber body 102 defining a processing space 104. The substrate support base 110 is positioned within the processing space 104. The chamber body 102 includes a top plate 106, a bottom wall 107, and one or more chamber walls 108. The top plate 106 may be made of a dielectric material.

[0058] The substrate support base 110 includes an electrostatic chuck 112 disposed on the cooling base 114. The electrostatic chuck 112 includes, for example: Figure 2 and Figure 3 The porous plug 200 is shown in the diagram. The porous plug 202 is coupled to the electrostatic chuck according to the method described herein. The substrate support base 110 is generally supported above the bottom wall 107 of the processing chamber 100 by a shaft 116 coupled to the cooling base 114. The substrate support base 110 is fastened to the shaft 116 such that the substrate support base 110 can be removed from, refurbished, and refurbished from the shaft 116. The shaft 116 is sealed to the cooling base 114 to isolate the various conduits and wires disposed therein from the processing environment within the processing chamber 100. Alternatively, the electrostatic chuck 112 and the cooling base 114 may be disposed on an insulating plate attached to a ground plane or chassis. Furthermore, the ground plane may be attached to one or more of the following: a top plate 106, a bottom wall 107, and one or more chamber walls 108.

[0059] The electrostatic chuck 112 includes a support surface 120 for supporting a substrate (e.g., substrate 122, such as a semiconductor substrate). The temperature of the substrate 122 is controlled by stabilizing the temperature of the electrostatic chuck 112. For example, a back gas (such as helium or another gas) may be supplied by a gas source 124 to a gas chamber defined between the substrate 122 and the support surface 120 of the electrostatic chuck 112. The back gas is used to facilitate heat transfer between the substrate 122 and the substrate support base 110 to control the temperature of the substrate 122 during processing. The electrostatic chuck 112 may include one or more heaters. For example, the heater may be an electric heater or the like. The electrostatic chuck 112 may include one or more electrodes that can be coupled to a power source 125.

[0060] The processing chamber 100 further includes at least an induction coil antenna segment 130A and a conductive coil antenna segment 130B, both located outside the top plate 106. The induction coil antenna segment 130A and the conductive coil antenna segment 130B are respectively coupled to a radio frequency (RF) source 132 that generates RF signals. The RF source 132 is coupled to both the induction coil antenna segment 130A and the conductive coil antenna segment 130B via a matching network 134. The substrate support base 110 is also coupled to the RF source 136 that generates RF signals. The RF source 136 is coupled to the substrate support base 110 via a matching network 138. One or more chamber walls 108 may be conductive and connected to an electrical ground 140.

[0061] The pressure within the processing space 104 of the processing chamber 100 is controlled using a throttle valve 142 located between the processing chamber 100 and the vacuum pump 144. The temperature at the surface of one or more chamber walls 108 is controlled using liquid-containing conduits (not shown) located in one or more chamber walls 108 of the processing chamber 100.

[0062] System controller 150 is coupled to various components of processing chamber 100 to facilitate control of the substrate processing technology. System controller 150 includes memory 152, a central processing unit (CPU) 154, and support circuitry (or I / O) 156. Software instructions may be encoded and stored in memory for issuing instructions to the CPU. System controller 150 may communicate with one or more components of processing chamber 120 via, for example, a system bus. A program (or computer instructions) readable by system controller 150 determines which tasks can be performed on the substrate. In some aspects, the program is software readable by system controller 150. Although a single system controller 150 is shown, it should be understood that multiple system controllers may be used in conjunction with the aspects described herein.

[0063] In operation, substrate 122 is placed on the support surface 120 of substrate support base 110, and gaseous components are supplied from gas panel 160 through inlet port 162 to processing chamber 100 to form a gaseous mixture in processing space 104 of processing chamber 100. RF power from RF sources 132 and 136 is applied to induction coil antenna segment 130A, conductive coil antenna segment 130B, and substrate support base 110, respectively, igniting the gaseous mixture in processing space 104 into plasma. Furthermore, chemically reacted ions are released from the plasma and strike substrate 122, thereby removing exposed material from the surface of the substrate.

[0064] Figure 2 This is a partial cross-sectional view of a substrate support base 110 with a bonded porous plug 200 according to one or more implementations of the present disclosure. The bonded porous plug 200 includes a porous plug 202 and a sealing layer 204. As described above, the substrate support base 110 includes a cooling base 114 fixed to an electrostatic chuck 112 via a bonding layer 210.

[0065] The bonding layer 210 includes one or more materials, such as acrylic or silicone-based adhesives, epoxy resins, neoprene-based adhesives, optically transparent adhesives (such as transparent acrylic adhesives), or other suitable adhesive materials.

[0066] The cooling base 114 is typically made of a metallic material, such as stainless steel, aluminum, aluminum alloy, and other suitable materials. Furthermore, the cooling base 114 includes one or more cooling passages 212 disposed therein, which circulate heat transfer fluid to maintain thermal control of the substrate support base 110 and the substrate 122.

[0067] The electrostatic chuck 112 is typically circular in shape, but may alternatively include other geometries to accommodate non-circular substrates. For example, when used to process display glass (such as glass for flat panel displays), the electrostatic chuck 112 may include a square or rectangular substrate. The electrostatic chuck 112 typically includes a chuck body 214 containing one or more electrodes 216. The electrodes 216 are composed of a conductive material (such as copper, graphite, tungsten, molybdenum, and the like). Various examples of electrode structures include, but are not limited to, a pair of coplanar D-shaped electrodes, coplanar interdigital electrodes, multiple coaxial ring electrodes, singular, circular electrodes, or other structures. The electrodes 216 are coupled to a power supply 125 via a feedthrough 218 disposed in the substrate support base 110. The power supply 125 may drive the electrodes 216 with a positive or negative voltage. For example, the power supply 125 may drive the electrodes 216 with a voltage of approximately -1000 volts or approximately 2500 volts. Alternatively, other negative voltages or other positive voltages may be used.

[0068] The suction cup body 214 of the electrostatic chuck 112 can be made of a ceramic material. For example, the suction cup body 214 of the electrostatic chuck 112 can be made of a low resistivity ceramic material (such as one with a resistivity of about 1xE). 9 To approximately 1xE 11 The material is made of a resistivity between 1 ohm and 1 cm. Examples of low resistivity materials include ceramics, such as alumina doped with titanium oxide or chromium oxide, doped alumina, doped boron nitride, and the like. Other materials with comparable resistivity, such as aluminum nitride, may also be used. When power is applied to electrode 216, such a ceramic material with relatively low resistivity typically promotes the Johnsen-Rahbek attraction between the substrate and the electrostatic chuck 112. Alternatively, a chuck body 214 comprising a ceramic material with a resistivity equal to or greater than 1 x E can also be used. 11 ohms-cm. Furthermore, the suction cup body 214 of the electrostatic chuck 112 can be made of alumina. Alumina can have high resistivity and be used in Coulombic mode.

[0069] During operation, the electric field generated by the driving electrode 216 holds the substrate 122 on the support surface 120 by a clamping force.

[0070] A back gas (such as helium, nitrogen, or argon) is introduced into one or more airflow channels 230 via a gas source 124 to help control the temperature of the substrate 122 when it is held by the electrostatic chuck 112. The airflow channels 230 extend from the support surface 120 of the chuck body 214 to the bottom surface 232 of the cooling base 114. The airflow channels 230 include a plurality of gas channels 234 formed in the electrostatic chuck 112, an opening 236 formed in the cooling base 114, and a cavity 240 formed in the chuck body 214 of the electrostatic chuck 112. The cavity 240 is defined by at least one sidewall 242 and a top wall 244 formed in the chuck body 214. The sidewall 242 has a diameter 246. The cavity 240 may have a cross-sectional area (e.g., diameter) larger than the cross-sectional area of ​​at least the opening 236. Although described as cylindrical, the cavity 240 may have other suitable shapes. Furthermore, although in Figure 2 A single airflow passage 230 is shown, but the substrate support base 110 may include multiple airflow channels.

[0071] Multiple gas channels 234 extend from the support surface 120, pass through the suction cup body 214 to the top wall 244 of the cavity 240, and are defined between the support surface 120 of the electrostatic chuck 112 and the top wall 244 of the cavity 240. In some implementations, the multiple gas channels 234 are replaced by a single gas supply conduit extending from the support surface 120 through the suction cup body 214 to the top wall 244 of the cavity 240. Furthermore, the back gas within the multiple gas channels 234 provides a heat transfer medium between the electrostatic chuck 112 and the substrate 122. In operation, the back gas is supplied by the gas source 124, and the back gas moves through the opening 236, through the porous plug 202, and into the multiple gas channels 234. Additionally, each gas flow channel 230 terminates at a corresponding multiple gas channels 234 formed through the support surface 120 of the suction cup body 214.

[0072] A porous plug 202 is typically disposed within the airflow channel 230 (within the cavity 240), forming part of the airflow channel 230. The porous plug 202 provides a path for pressurized gas to flow between two surfaces at different potentials. The porous plug 202 may have an open-pore structure, meaning that the pores in the porous structure are interconnected, allowing fluid to flow through the porous plug 202. In some implementations, more than half of the units in the open-pore structure are interconnected. For example, the porous plug 202 provides a path for pressurized gas to flow between the first and second surfaces of the electrostatic chuck 112 and between the first surface of the electrostatic chuck 112 and the first surface of the cooling base 114. Furthermore, the porous plug 202 includes multiple small passageways and / or pores, which reduces the likelihood of plasma ignition in the gap 260 defined between the electrostatic chuck 112 and the cooling base 114 compared to a design without the porous plug 202. The porous plug 202 is typically made of a ceramic material such as alumina or aluminum nitride. Alternatively, the porous plug 202 may be made of other porous materials. Furthermore, the porous plug 202 may have a porosity of about 30% to about 80%. Alternatively, the porous plug may have a porosity of less than 30% or greater than 80%.

[0073] The porous plug 202 can be any suitable shape. In some implementations, the porous plug 202 has a cylindrical shape. Other suitable shapes include T-shape, conical shape, and rectangular shape. Figure 2As shown, the porous plug 202 includes a top surface 250, sidewalls 252, and a bottom surface 254. The sidewalls 252 have a diameter 256. The diameter 256 of the sidewalls 252 of the porous plug 202 is smaller than the diameter 246 defined by at least one sidewall 242 of the cavity 240. The top surface 250 faces the top wall 244 of the cavity 240. The sidewalls 252 of the porous plug 202 face at least one sidewall 242 of the cavity 240. The bottom surface 254 of the porous plug 202 faces the gap 260. The gap 260 is defined by the bottom surface 254 of the porous plug, the bonding layer 210, and the cooling base 114. The gap 260 is formed in the bonding layer 210 and is part of the gas flow channel 230. In some implementations, the bonding layer 210 further extends into the gap 260. For example, the bonding layer 210 may extend into the gap 260 to contact either the sealing layer 204 or both the sealing layer 204 and the bottom surface 254 of the porous plug 202. In some implementations, various techniques (such as press-fit, sliding fit, clearance fit, pinning, and engagement) may be used to position the porous plug 202 within the cavity 240. For example, the porous plug 202 may be positioned within the cavity 240 such that the top surface 250 of the porous plug 202 contacts the top wall 244 of the cavity 240.

[0074] A sealing layer 204 is formed adjacent to the porous plug 202. The sealing layer 204 forms a seal or radial seal between the sidewall 252 of the porous plug 202 and at least one sidewall 242 of the cavity 240. The sealing layer 204 may form at least a radial seal between the porous plug 202 and the cavity 240. Furthermore, the sealing layer 204 secures the porous plug 202 within the cavity 240. For example, the sealing layer 204 may be coupled to at least one of the porous plug 202 and at least one sidewall 242 of the cavity 240. The sealing layer 204 may mechanically secure the porous plug 202 to at least one sidewall 242 of the cavity 240.

[0075] As described herein, the sealing layer 204 may be composed of an elastic polymeric material (such as an elastomer). Furthermore, the sealing member 204 may be composed of one or more of a fluorinated elastomer material (such as FKM) and a perfluorinated elastomer material (such as FFKM). Additionally, the sealing layer 204 may be composed of a material resistant to the process gas. For example, the corrosion-resistant material will not be corroded in the presence of the process gas. Additionally or alternatively, the material of the sealing layer 204 is selected such that the material does not penetrate the porous plug 202. The sealing layer 204 may be an O-ring, a cylindrical gasket, or other annular seal. Furthermore, the sealing layer 204 may be composed of a substantially non-sticky material. The sealing layer 204 is formed from a material applied as a liquid, paste, and / or gel and whose state is changed to a substantially solid or gel form.

[0076] The sealing layer 204 typically has a thickness sufficient to seal the gap between the surface of the porous plug and the surface of the wall defining the cavity 240. In some implementations, the sealing layer 204 has a thickness of about 25 micrometers to about 2,000 micrometers. In some implementations, the sealing layer 204 has a minimum thickness of about 25 micrometers, about 50 micrometers, about 100 micrometers, about 150 micrometers, about 200 micrometers, about 250 micrometers, about 300 micrometers, about 400 micrometers, about 500 micrometers, about 600 micrometers, about 750 micrometers, about 1,000 micrometers, about 1,250 micrometers, about 1,500 micrometers, about 1,750 micrometers, about 1,850 micrometers, or about 1,950 micrometers. In some implementations, the sealing layer 204 has a maximum thickness of about 2,000 micrometers, about 1,950 micrometers, about 1,850 micrometers, about 1,750 micrometers, about 1,500 micrometers, about 1,250 micrometers, about 1,000 micrometers, about 750 micrometers, about 600 micrometers, about 500 micrometers, about 400 micrometers, about 300 micrometers, about 250 micrometers, about 200 micrometers, about 150 micrometers, about 100 micrometers, or about 50 micrometers.

[0077] The bonding layer 210 secures the suction cup body 214 to the cooling base 114. Since the materials or materials constituting the bonding layer 210 are typically susceptible to erosion in the presence of the processing gases used during substrate processing, various methods have been explored to protect the bonding layer 210 from the effects of the processing gases. Advantageously, by employing a sealing layer (such as sealing layer 204) that is highly resistant to the processing gases, the processing gases are prevented from passing through the porous plug 202. Therefore, the service life of the bonding layer 210 is increased. Furthermore, the service life of the substrate support base 110 is also increased.

[0078] Figure 3This is a partial cross-sectional view of portion 201 of a substrate support base 110 having a joined porous plug 300 according to one or more implementations of this disclosure. The joined porous plug 300 is similar to the joined porous plug 200, except that at least one of the top surface 250 and bottom surface 254 of the joined porous plug 300 is partially coated with additional sealing layers 302a, 302b (collectively referred to as 302). The additional sealing layer 302 provides additional protection against process gases and further reduces erosion of the joining layer 210. The top sealing layer 302a is formed between the top wall 244 of the cavity 240 and the top surface 250 of the porous plug 202. The top sealing layer 302a forms an axial seal between the top wall 244 of the cavity 240 and the top surface 250 of the porous plug 202. A gap 304 is defined by the top sealing layer 302a. Gap 304 is part of the gas flow channel 230 and allows air to flow through the porous plug 202 to the back of the plurality of gas channels 234 and the substrate 122. The top sealing layer 302a may be in the shape of a gasket. A bottom sealing layer 302b is formed between the bottom surface 254 of the porous plug, the bonding layer 210, and the cooling base 114. Gap 260 is further defined by the bottom sealing layer 302b. Gap 260 allows air to reach and flow through the porous plug 202 and to the back of the plurality of gas channels 234 and the substrate 122. The bottom sealing layer 302b may be in the shape of a gasket. In some implementations, sealing layer 204, top sealing layer 302a, and bottom sealing layer 302b are separate layers. In other implementations, sealing layer 204, top sealing layer 302a, and bottom sealing layer 302b form an integral layer.

[0079] Figure 4 This is a flowchart illustrating an example of a method 400 for forming a substrate base with a bonded porous plug according to one or more implementations of this disclosure. The bonded porous plug includes a porous plug and a sealing layer. The sealing layer may be composed of a fluorinated elastomer (FKM), a perfluorinated elastomer (FFKM), or a combination thereof. The sealing layer may be formed from the fluorinated elastomer composition described herein. Method 400 can be used to produce, respectively, as shown below. Figure 2 and Figure 3 The porous plugs 200 and 300 shown are examples of the joints. (See reference...) Figure 2 and Figure 3 The above discussion has been conducted, but it should be understood that method 400 can be used in conjunction with other porous plug and substrate base designs.

[0080] At operation 410, a fluorinated elastomer composition is coated onto the porous plug to form a first coating. The viscosity of the fluorinated elastomer composition can be adjusted to facilitate its application onto the porous plug. (Reference) Figure 2 and Figure 3A fluorinated elastomer composition may be applied to at least one of the top surface 250, bottom surface 254, and sidewall 252 of the porous plug 202. In one example, the fluorinated elastomer composition is applied only to the sidewall 252. In another example, the fluorinated elastomer composition is applied to the sidewall 252, bottom surface 254, and top surface 250 of the porous plug 202. In yet another example, the fluorinated elastomer composition is applied to either the sidewall 252 or the bottom surface 254 or the top surface 250 of the porous plug 202. The first coating may have a thickness of about 25 micrometers to about 1,000 micrometers, such as about 50 micrometers to about 100 micrometers.

[0081] Optionally, at operation 420, the fluorinated elastomer composition coated on the porous plug is partially cured or semi-cured. Any suitable partial curing or semi-curing process can be used.

[0082] At operation 430, a fluorinated elastomer composition is coated onto the cavity of the suction cup body to form a second coating. The viscosity of the fluorinated elastomer composition can be adjusted to facilitate its application into the cavity of the suction cup body. (Reference) Figure 2 and Figure 3 A fluorinated elastomer composition may be applied to at least one of at least one sidewall 242 and top wall 244, said at least one sidewall 242 and said top wall 244 defining a cavity 240 formed in the suction cup body 214 of the electrostatic chuck 112. The second coating may have a thickness of about 25 micrometers to about 1,000 micrometers, such as about 50 micrometers to about 100 micrometers.

[0083] Optionally, at operation 440, the fluorinated elastomer composition coated on the cavity wall defining the cavity is partially cured or semi-cured. Any suitable partial curing or semi-curing process can be used.

[0084] At operation 450, a porous plug having a (uncured or partially cured) fluoroelastomer composition deposited thereon is inserted into a cavity having a (uncured or partially cured) fluoroelastomer composition deposited on the walls defining the cavity, such that the fluoroelastomer composition coated on the walls defining the cavity contacts the fluoroelastomer composition coated on the porous plug. In some implementations, various techniques (such as press-fit, sliding fit, clearance fit, pinning, and joining) can be used to position the porous plug 202 within the cavity 240.

[0085] At operation 460, the fluorinated elastomer composition formed between the porous plug and the wall defining the cavity is cured to form a sealing layer between the porous plug and the wall defining the cavity.

[0086] Figure 5This is a flowchart of another example of a method 500 for forming a substrate base with a bonded porous plug according to one or more implementations of this disclosure. The bonded porous plug includes a porous plug and a sealing layer. The sealing layer may be composed of a fluorinated elastomer (FKM), a perfluorinated elastomer (FFKM), or a combination thereof. The sealing layer may be formed from the fluorinated elastomer composition described herein. Method 500 can be used to produce, respectively, as shown below. Figure 2 and Figure 3 The porous plugs 200 and 300 shown are examples of the joints. (See reference...) Figure 2 and Figure 3 The discussion has been conducted, but it should be understood that Method 500 can be used in conjunction with other porous plug and substrate base designs.

[0087] At operation 510, a porous plug is coated with a fluorinated elastomer composition. The viscosity of the fluorinated elastomer composition can be adjusted to facilitate its application onto the porous plug. (Reference) Figure 2 and Figure 3 A fluorinated elastomer composition may be applied to at least one of the top surface 250, bottom surface 254, and sidewall 252 of the porous plug 202. In one example, the fluorinated elastomer composition is applied only to the sidewall 252. In another example, the fluorinated elastomer composition is applied to the sidewall 252, bottom surface 254, and top surface 250 of the porous plug 202. In yet another example, the fluorinated elastomer composition is applied to either the sidewall 252 of the porous plug 202 or either the bottom surface 254 or the top surface 250.

[0088] Optionally, at operation 520, the fluorinated elastomer composition coated on the porous plug is partially cured or semi-cured. Any suitable partial curing or semi-curing process can be used.

[0089] At operation 530, a porous plug having a (uncured or partially cured) fluoroelastomer composition deposited thereon is inserted into the cavity such that the fluoroelastomer composition coated on the porous plug contacts the wall defining the cavity. In some implementations, various techniques (such as press-fit, sliding fit, clearance fit, pinning, and joining) can be used to position the porous plug 202 within the cavity 240.

[0090] At operation 540, the fluorinated elastomer composition formed between the porous plug and the wall defining the cavity is cured to form a sealing layer between the porous plug and the wall defining the cavity.

[0091] Figure 6This is a flowchart of yet another example of a method 600 for forming a substrate base with a bonded porous plug according to one or more implementations of this disclosure. The bonded porous plug includes a porous plug and a sealing layer. The sealing layer may be composed of a fluorinated elastomer (FKM), a perfluorinated elastomer (FFKM), or a combination thereof. The sealing layer may be formed from the fluorinated elastomer composition described herein. Method 600 can be used to produce, respectively, such as Figure 2 and Figure 3 The porous plugs 200 and 300 shown are examples of the joints. (See reference...) Figure 2 and Figure 3 The discussion has been conducted, but it should be understood that Method 500 can be used in conjunction with other porous plug and substrate base designs.

[0092] At operation 610, the cavity wall of the suction cup body is coated with a fluorinated elastomer composition. The viscosity of the fluorinated elastomer composition can be adjusted to facilitate its application into the cavity of the suction cup body. (Reference) Figure 2 and Figure 3 A fluorinated elastomer composition may be applied to at least one of at least one sidewall 242 and top wall 244, the at least one sidewall 242 and the top wall 244 defining a cavity 240 formed in the suction cup body 214 of the electrostatic chuck 112.

[0093] Optionally, at operation 620, the fluorinated elastomer composition coated on the cavity wall defining the cavity is partially cured or semi-cured. Any suitable partial curing or semi-curing process can be used.

[0094] At operation 630, a porous plug is inserted into the cavity such that the porous plug contacts a fluorinated elastomer composition formed on the wall defining the cavity. In some implementations, various techniques (such as press-fit, sliding fit, clearance fit, pinning, and engagement) can be used to position the porous plug 202 within the cavity 240.

[0095] At operation 640, the fluorinated elastomer composition formed on the wall defining the cavity is cured to form a sealing layer between the porous plug and the wall defining the cavity.

[0096] Figure 7 This is a flowchart of yet another example of a method 700 for forming a substrate base with a bonded porous plug according to one or more implementations of this disclosure. The bonded porous plug includes a porous plug and a sealing layer. The sealing layer may be composed of a fluorinated elastomer (FKM), a perfluorinated elastomer (FFKM), or a combination thereof. The sealing layer may be formed from the fluorinated elastomer composition described herein. Method 700 can be used to produce, respectively, such as Figure 2 and Figure 3 The porous plugs 200 and 300 shown are examples of the joints. (See reference...) Figure 2 and Figure 3 The method 700 has been discussed, but it should be understood that it can be used in conjunction with other porous plug and substrate designs.

[0097] At operation 710, a porous plug is coated with a fluorinated elastomer composition. The viscosity of the fluorinated elastomer composition can be adjusted to facilitate its application to the porous plug. (Reference) Figure 2 and Figure 3 A fluorinated elastomer composition may be applied to at least one of the top surface 250, bottom surface 254, and sidewall 252 of the porous plug 202. In one example, the fluorinated elastomer composition is applied only to the sidewall 252. In another example, the fluorinated elastomer composition is applied to the sidewall 252, bottom surface 254, and top surface 250 of the porous plug 202. In yet another example, the fluorinated elastomer composition is applied to either the sidewall 252 of the porous plug 202 or either the bottom surface 254 or the top surface 250.

[0098] At operation 720, the fluoropolymer composition formed on the porous plug is cured to form a sealing layer on the porous plug. In some examples where at least one of the sealing layer 204 is formed on the sidewall 252, and the bottom sealing layer 302b is formed on the bottom surface 254 and the top sealing layer 302a is formed on the top surface 250 of the porous plug 202, a portion of the top sealing layer 302a may be removed to form a gap 304, and a portion of the bottom sealing layer 302b may be removed to form a gap 260, thereby allowing gas to flow through the porous plug. A portion of the top sealing layer 302a and the bottom sealing layer 302b may be removed before or after the fluoropolymer composition forming the sealing layer has been semi-cured and / or cured.

[0099] At operation 730, a porous plug having a sealing layer formed thereon is inserted into the cavity such that the sealing layer contacts the wall defining the cavity. In some implementations, various techniques (such as press-fit, sliding fit, clearance fit, pinning and joining, etc.) can be used to position the porous plug 202 with the sealing layer within the cavity 240.

[0100] Figure 8 This is a flowchart of yet another example of a method 800 for forming a substrate base with a porous plug having an engagement, according to one or more implementations of this disclosure. Figures 9A to 9C A schematic cross-sectional view is depicted of a substrate base forming a porous plug with a joint according to one or more implementations of this disclosure. The joined porous plug includes a porous plug and a sealing layer. The sealing layer may be composed of a fluorinated elastomer (FKM), a perfluorinated elastomer (FFKM), or a combination thereof. The sealing layer may be formed from the fluorinated elastomer composition described herein. Method 800 can be used to produce, respectively, as shown below. Figure 2 and Figure 3The porous plugs 200 and 300 shown are examples of the joints. (See reference...) Figure 2 , Figure 3 and Figures 9A-9C The method was discussed, but it should be understood that method 800 can be used in conjunction with other porous plug and substrate base designs.

[0101] At operation 810, the walls of the cavity 240 of the suction cup body 214 are coated with a fluorinated elastomer composition 904 (as described herein). The viscosity of the fluorinated elastomer composition 904 can be adjusted to facilitate application of the fluorinated elastomer composition to the walls of the cavity 240 of the suction cup body 214. Referring to FIG9, the fluorinated elastomer composition 904 can be applied to at least one of a sidewall 242 and a top wall 244, the at least one sidewall 242 and the top wall 244 being defined as follows: Figure 9A The cavity 240 formed in the suction cup body 214 of the electrostatic chuck 112 shown.

[0102] Optionally, at operation 820, the fluorinated elastomer composition 904 coated on the walls defining cavity 240 can be partially or fully cured. Any suitable partial or curing process can be used.

[0103] Alternatively, at operation 830, the porous plug may be coated with a fluorinated elastomer composition 904 as previously described herein.

[0104] Optionally, at operation 840, the fluorinated elastomer composition 904 coated on the porous plug 202 can be partially or fully cured. Any suitable partial or curing process can be used.

[0105] At operation 850, a porous plug 202 is inserted into cavity 240 such that the porous plug 202 contacts fluorinated elastomer composition 904 formed on the wall defining cavity 240. Figure 9C Depicting Figure 9B A magnified partial cross-sectional view of a portion. For example... Figure 9C As shown, the viscosity of the fluorinated elastomer composition 904 is adjusted such that the fluorinated elastomer composition 904 fills or partially fills the surface pores 910 located along the outer surface or sidewall of the porous plug 202, while substantially not filling the internal pores 920 of the porous plug 202. The fluorinated elastomer composition 904 bonds the porous plug 202 to the wall of the cavity 240, or holds the porous plug 202 in place by applying compressive forces to the various surfaces of the porous plug 202 and / or the sidewall of the cavity 240 through the elastic properties of the bonding material.

[0106] At operation 860, the fluorinated elastomer composition 904 formed on the wall defining the cavity is cured to form a sealing layer (e.g., ...) between the porous plug 202 and the wall defining the cavity 240. Figure 2 and Figure 3 The sealing layer 204 shown.

[0107] The sealing members and porous plugs described herein are applicable to substrate support bases to protect the bonding layer that joins the cooling base to the electrostatic chuck from the influence of process gases. Advantageously, protecting the bonding layer from process gases reduces erosion of the bonding layer and maintains a substantially uniform temperature on the substrate. For example, sealing members resistant to process gases can be used to form radial and / or vertical seals between the porous plugs of the electrostatic chuck. Such sealing members prevent process gases from flowing into the gap between the electrostatic chuck and the cooling base and reduce erosion of the bonding layer. Therefore, substantially uniform heat transfer between the cooling base and the electrostatic chuck, as well as a uniform temperature on the substrate, is maintained.

[0108] The implementations and all functional operations described in this specification can be implemented in digital electronic circuits or in computer software, firmware, or hardware (including the structural components disclosed in this specification and their equivalents, or combinations thereof). The implementations described herein can be implemented as one or more non-transient computer program products, that is, one or more computer programs tangibly embodied in a non-transient computer-readable storage device for execution by or control of the operation of a data processing device (such as a programmable processor, computer, or multiple processors or computers).

[0109] The processing and logic flows described in this specification can be executed by one or more programmable processors that execute one or more computer programs to perform functions by manipulating input data or generating output. The processing and logic flows can also be executed by special-purpose logic circuitry (such as FPGAs (Field-Programmable Gate Arrays) or ASICs (Application-Specific Integrated Circuits)), and the device can also be implemented as special-purpose logic circuitry.

[0110] The term "data processing device" encompasses all devices, apparatuses, and machines used for processing data, including, by way of example, programmable processors, computers, or a combination of processors or computers. In addition to hardware, the device may also include program code that creates an execution environment for the computer program in question, such as program code constituting processor firmware, protocol stacks, database management systems, operating systems, or combinations thereof. For example, processors suitable for executing computer programs include general-purpose and special-purpose microprocessors, as well as any one or more processors of any kind of digital computer.

[0111] Computer-readable media suitable for storing computer program instructions and data include all forms of non-volatile memory, media, and memory devices, including, for example, semiconductor memory devices (such as EPROM, EEPROM, and flash memory devices); magnetic disks (such as internal hard disks or removable hard disks); magneto-optical disks; and CD-ROMs and DVD-ROMs. Processors and memory may be assisted by dedicated logic circuitry or integrated into dedicated logic circuitry.

[0112] The embodiments disclosed herein further relate to any one or more of the following Examples 1-20:

[0113] 1. A method of manufacturing a suction cup body, comprising: coating a porous plug with a coating comprising a fluoroelastomer composition; inserting the porous plug having the coating formed thereon into a cavity formed in the suction cup body; and curing the coating to form a sealing layer between the porous plug and the wall of the cavity.

[0114] 2. The method as described in Example 1, wherein the coating has a thickness of about 25 micrometers to about 1,000 micrometers.

[0115] 3. The method as described in Example 1 or 2, further comprising: partially curing the coating to form a partially cured fluorinated elastomer layer on the porous plug prior to insertion of the porous plug.

[0116] 4. The method as described in any one of Examples 1-3, wherein the sealing layer forms a radial seal between the porous plug and the wall of the cavity.

[0117] 5. The method of any one of Examples 1-4, wherein the sealing layer further forms at least one of the following: a first axial seal between the porous plug and the cooling base engaged with the suction cup body, and a second axial seal between the top surface of the porous plug and the second wall of the cavity.

[0118] 6. The method of any one of Examples 1-5, wherein the fluorinated elastomer composition is in the form of a paste having a viscosity of about 50 cP to about 5,000 cP.

[0119] 7. The method as described in any one of Examples 1-6, wherein the fluorinated elastomer composition comprises at least one perfluoropolymer.

[0120] 8. The method of any one of Examples 1-7, wherein the fluorinated elastomer composition further comprises at least one of the following: a curing agent, an adhesion promoter, a thickener, a solvent, and a filler.

[0121] 9. A method of manufacturing a suction cup body, comprising: coating a wall of a cavity formed in the suction cup body with a coating comprising a fluorinated elastomer composition; inserting a porous plug into the cavity; and curing the coating to form a sealing layer between the porous plug and the wall of the cavity.

[0122] 10. The method of Example 9, further comprising: partially curing the coating to form a partially cured fluorinated elastomer layer on the wall of the cavity prior to insertion of the porous plug.

[0123] 11. The method as described in Example 9 or 10, wherein the sealing layer forms a radial seal between the porous plug and the wall of the cavity.

[0124] 12. The method of any one of Examples 9-11, wherein the sealing layer further forms at least one of the following: a first axial seal between the porous plug and a cooling base engaged with the suction cup body, and a second axial seal between the top surface of the porous plug and a second wall of the cavity.

[0125] 13. The method of any one of Examples 9-12, wherein the fluorinated elastomer composition is in the form of a paste having a viscosity of about 50 cP to about 5,000 cP.

[0126] 14. The method of any one of Examples 9-13, wherein the fluorinated elastomer composition comprises at least one perfluoropolymer.

[0127] 15. The method of any one of Examples 9-14, wherein the fluoroelastomer composition further comprises at least one of the following: a curing agent, an adhesion promoter, a thickener, a solvent, and a filler.

[0128] 16. A method of manufacturing a suction cup body, comprising: coating a porous plug with a first coating comprising a fluorinated elastomer composition; coating a wall of a cavity formed in the suction cup body with a second coating comprising the fluorinated elastomer composition; inserting the porous plug having the first coating thereon into the cavity having the second coating thereon; and curing the first coating and the second coating to form a sealing layer between the porous plug and the wall of the cavity.

[0129] 17. The method of Example 16, further comprising: partially curing at least one of the first coating and the second coating prior to insertion of the porous plug to form a partially cured fluoroelastomer layer on at least one of the porous plug and the wall of the cavity.

[0130] 18. The method as described in Example 16 or 17, wherein the sealing layer forms a radial seal between the porous plug and the wall of the cavity.

[0131] 19. The method of any one of Examples 16-18, wherein the sealing layer further forms at least one of the following: a first axial seal between the porous plug and a cooling base engaged with the suction cup body, and a second axial seal between the top surface of the porous plug and a second wall of the cavity.

[0132] 20. The method of any one of Examples 16-19, wherein the fluorinated elastomer composition is in the form of a paste having a viscosity of about 50 cP to about 5,000 cP, and the fluorinated elastomer composition comprises at least one perfluoropolymer and optionally includes at least one of the following: a curing agent, an adhesion promoter, a thickener, a solvent, and a filler.

[0133] While the foregoing descriptions are embodiments of this disclosure, other and further embodiments may be devised without departing from the basic scope of this disclosure and the scope defined by the following claims. All documents described herein are incorporated by reference, including any priority documents and / or test procedures that do not conflict with this document. It will be apparent from the general description and specific embodiments that, while the form of this disclosure has been illustrated and described, various modifications may be made without departing from the spirit and scope of this disclosure. Therefore, this disclosure is not intended to be limited thereto. Similarly, for the purposes of U.S. law, the term “comprising” is considered synonymous with the term “including.” Similarly, when a component, element, or group of elements is preceded by the transitional phrase “comprising,” it should be understood that, in consideration of the same component or group of elements, the transitional phrase “substantially constitutes,” “consisting of,” “selected from the group consisting of,” or “is” precedes the description of the component, element, or groups of elements, and vice versa. As used herein, the term “about” refers to a variation of + / - 10% from the nominal value. It should be understood that such variation may be included in any value provided herein.

[0134] The sets of minimum values ​​and the sets of maximum values ​​have been used to describe certain embodiments and features. It should be understood that, unless otherwise stated, the range including any combination of two values ​​should be considered as, for example, a combination of any minimum and any maximum value, a combination of any two minimum values, and / or a combination of any two maximum values. Certain minimum values, maximum values, and ranges appear in one or more of the following claims.

Claims

1. A method for manufacturing a suction cup body, comprising: The porous plug is coated with a coating comprising an elastomeric composition, wherein the elastomeric composition includes a cellulose-containing thickener. The porous plug having the coating formed thereon is inserted into the cavity formed in the suction cup body; as well as The coating is cured to form a sealing layer between the porous plug and the wall of the cavity.

2. The method as described in claim 1, characterized in that, The coating has a thickness of 25 micrometers to 1,000 micrometers.

3. The method of claim 1, further comprising: Before the porous plug is inserted, the coating is partially cured to form a partially cured fluorinated elastomer layer on the porous plug.

4. The method as described in claim 1, characterized in that, The sealing layer forms a radial seal between the porous plug and the wall of the cavity.

5. The method as described in claim 4, characterized in that, The sealing layer further forms at least one of the following: a first axial seal between the porous plug and the cooling base engaged with the suction cup body, and a second axial seal between the top surface of the porous plug and the second wall of the cavity.

6. The method as described in claim 1, characterized in that, The elastomer composition is in the form of a paste with a viscosity of 50 cP to 5,000 cP.

7. The method as described in claim 6, characterized in that, The elastomer composition includes at least one perfluoropolymer.

8. The method as described in claim 7, characterized in that, The elastomer composition further includes at least one of the following: a curing agent, an adhesion promoter, a solvent, and a filler.

9. A method for manufacturing a suction cup body, comprising: The walls of the cavity formed in the suction cup body are coated with a coating comprising an elastomeric composition, wherein the elastomeric composition is in the form of a paste having a viscosity of 50 cP to 5,000 cP, and wherein the elastomeric composition comprises a thickener containing cellulose. Insert the porous plug into the cavity having the coating; as well as The coating is cured to form a sealing layer between the porous plug and the wall of the cavity.

10. The method of claim 9, further comprising: Before the porous plug is inserted, the coating is partially cured to form a partially cured fluorinated elastomer layer on the wall of the cavity.

11. The method as described in claim 9, characterized in that, The sealing layer forms a radial seal between the porous plug and the wall of the cavity.

12. The method as described in claim 9, characterized in that, The sealing layer further forms at least one of the following: a first axial seal between the porous plug and the cooling base engaged with the suction cup body, and a second axial seal between the top surface of the porous plug and the second wall of the cavity.

13. The method as described in claim 9, characterized in that, The elastomer composition is in the form of a paste with viscosity ranging from 100 cP to 3,000 cP.

14. The method as described in claim 13, characterized in that, The elastomer composition includes at least one perfluoropolymer.

15. The method as described in claim 14, characterized in that, The elastomer composition further includes at least one of the following: a curing agent, an adhesion promoter, a solvent, and a filler.

16. A method for manufacturing a suction cup body, comprising: The porous plug is coated with a first coating comprising an elastomeric composition, wherein the elastomeric composition includes a cellulose-containing thickener. The walls of the cavity formed in the suction cup body are coated with a second coating comprising the elastomeric composition; The porous plug having the first coating formed thereon is inserted into the cavity having the second coating formed thereon; as well as The first coating and the second coating are cured to form a sealing layer between the porous plug and the wall of the cavity.

17. The method of claim 16, further comprising: Prior to insertion of the porous plug, at least one of the first coating and the second coating is partially cured to form a partially cured fluorinated elastomer layer on at least one of the porous plug and the wall of the cavity.

18. The method as described in claim 16, characterized in that, The sealing layer forms a radial seal between the porous plug and the wall of the cavity.

19. The method as described in claim 18, characterized in that, The sealing layer further forms at least one of the following: a first axial seal between the porous plug and the cooling base engaged with the suction cup body, and a second axial seal between the top surface of the porous plug and the second wall of the cavity.

20. The method as described in claim 18, characterized in that, The elastomeric composition is in the form of a paste having a viscosity of 50 cP to 5,000 cP, and the elastomeric composition comprises at least one perfluoropolymer and optionally includes at least one of the following: a curing agent, an adhesion promoter, a solvent, and a filler.

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