Drug supply unit and substrate processing system thereunder, and drug supply method thereof

Abstract

This invention relates to a pharmaceutical supply unit and a substrate processing system thereunder, as well as a pharmaceutical supply method. It discloses a technique for ensuring the reliability and stability of the process by sensing and removing impurities generated during a chemical reaction when a pharmaceutical solution is supplied through the pharmaceutical supply unit.

Description

Technical Field

[0001] The present invention relates to a pharmaceutical supply unit and a substrate processing system thereunder, as well as a pharmaceutical supply method, and more specifically to a technique for ensuring the reliability and stability of the process by sensing and removing impurities generated during a chemical reaction when a pharmaceutical solution is supplied through the pharmaceutical supply unit. Background Technology

[0002] In general semiconductor device manufacturing processes and flat panel display manufacturing processes, various cleaning solutions can be used. For example, in the process of cleaning substrates, various cleaning solutions (e.g., IPA (isopropyl alcohol)) can be used to treat the substrate and remove foreign matter remaining on the substrate surface.

[0003] When supplying chemical solutions for substrate processing, various factors can cause the solutions to undergo chemical reactions, resulting in unwanted impurities. These impurities can lead to decreased process yield, defective products, and an increased risk of process accidents.

[0004] Therefore, it was disclosed that a scheme was in place to identify impurities by conducting various tests on the supplied pharmaceutical solution.

[0005] However, the existing chemical solution inspection methods have the problem that chemical solution analysis takes too long and cannot be performed immediately during process execution. Summary of the Invention

[0006] The present invention is proposed to solve the problems of the prior art as described above. Its purpose is to use spectrophotometry to detect impurities generated during chemical reactions when the medicine is supplied, and to eliminate the problem of medicine containing impurities flowing into the process through immediate measures.

[0007] In particular, the aim is to monitor the generation of IPA derivatives such as acetone when IPA solution is supplied, and to prevent the generation of a large number of defects caused by IPA derivatives.

[0008] Furthermore, the aim is to solve the problem that the chemical solutions supplied for processing substrates undergo chemical reactions due to various factors, turning into unnecessary impurities, resulting in decreased process yield and defective products.

[0009] In addition, the purpose is to eliminate the risk of process accidents caused by impurities resulting from the chemical reaction of the chemical solution.

[0010] Furthermore, the aim is to address the problem that previous chemical solution analysis methods required too much time, preventing immediate inspection during process execution.

[0011] The purpose of this invention is not limited to the foregoing content, and other purposes and advantages of this invention not mentioned can be understood from the following description.

[0012] To address the aforementioned issues, one embodiment of the drug supply unit according to the present invention may include: a drug storage section for storing the drug solution; a drug supply line for providing a path for the drug solution to flow; and a drug inspection component for detecting impurities generated during a chemical reaction in the drug solution flowing in the drug supply line by means of spectrophotometry.

[0013] Preferably, the drug solution inspection component may include a Fourier transform infrared spectrometer (FT-IR) or a Fourier transform near-infrared spectrometer (FT-NIR).

[0014] As an example, the liquid medicine storage unit may store the IPA, and the liquid medicine supply line may supply the IPA stored in the liquid medicine storage unit.

[0015] Alternatively, the drug solution inspection component may detect IPA derivatives in the drug solution supply line.

[0016] In this case, the drug detection component may detect IPA derivatives based on the presence of a peak with a set wavenumber in the spectrum.

[0017] As an example, the drug solution inspection component may include: a measuring probe disposed in the drug solution supply line to emit infrared or near-infrared light to the drug solution flowing in the drug solution supply line and detect the light transmitted through the drug solution; a Fourier transform to acquire a spectrum from the light detected by the measuring probe; and an analyzer to determine impurities based on the spectrum.

[0018] Furthermore, the drug supply unit may further include a filter disposed in the drug supply line, and the measuring probe disposed at the rear end of the filter in the drug supply line.

[0019] Preferably, the liquid medicine supply unit may further include: a discharge line for discharging the liquid medicine flowing in the liquid medicine supply line.

[0020] Furthermore, the liquid medicine supply unit may further include: a first valve, disposed at the rear end of the connection portion of the discharge line in the liquid medicine supply line to selectively open and close the liquid medicine supply line; a second valve, disposed on the discharge line to selectively open and close the discharge line; and a control unit to control the first valve and the second valve.

[0021] As an example, the control unit may selectively control the first valve and the second valve based on the inspection results of the liquid inspection component.

[0022] Alternatively, it could be a substrate processing system according to the present invention: the above-described liquid supply unit; and a substrate processing apparatus, which receives liquid from the liquid supply unit to process the substrate.

[0023] Alternatively, one embodiment of the drug supply method according to the present invention may include: a drug supply step of supplying drug stored in a drug storage unit to a drug supply line; an impurity detection step of detecting impurities generated by a chemical reaction in the drug flowing in the drug supply line by means of spectrophotometry; and a drug supply judgment step of supplying drug to a substrate processing apparatus or discharging drug to the outside based on the impurity detection result.

[0024] Preferably, the impurity detection step may involve detecting impurities in the drug supply line using a Fourier transform infrared spectrometer (FT-IR) or a Fourier transform near-infrared spectrometer (FT-NIR).

[0025] As an example, the drug supply step may involve supplying IPA stored in the drug storage section to the drug supply line, and the impurity detection step may involve detecting IPA derivatives in the drug supply line.

[0026] In this case, the impurity detection step may be based on the presence of a peak with a set wavenumber in the spectrum to detect IPA derivatives.

[0027] Furthermore, the drug supply judgment step may include a drug supply line shut-off step, wherein when impurities are detected, the drug supply line is shut off through the first valve in the drug supply line.

[0028] Furthermore, the liquid medicine supply determination step may further include: a discharge line opening step, in which the liquid medicine flowing in the liquid medicine supply line is discharged through a second valve in the discharge line.

[0029] Preferably, the liquid supply determination step may further include a discharge adjustment step, which opens the discharge line based on a set time or a set flow rate.

[0030] Furthermore, the drug supply judgment step may then execute the impurity detection step, and based on the impurity detection result, execute the drug supply line shutdown step to the discharge adjustment step.

[0031] Furthermore, a preferred embodiment of the drug supply unit according to the present invention may include: a drug storage section for storing IPA drug solution; a drug supply line for providing a path for the flow of IPA drug solution; a filter disposed in the drug supply line; a discharge line for discharging the drug solution flowing in the drug supply line; a first valve disposed at the rear end of the connection portion of the discharge line in the drug supply line to selectively open and close the drug supply line; a second valve disposed in the discharge line to selectively open and close the discharge line; a measuring probe disposed in the drug supply line to emit infrared or near-infrared light to the drug solution flowing in the drug supply line and to detect the light transmitted through the drug solution; a Fourier transform for acquiring a spectrum from the light detected by the measuring probe; an analyzer for detecting IPA derivatives based on the spectrum; and a control unit for controlling the first valve and the second valve based on the analysis results of the analyzer.

[0032] According to this invention, impurities generated during the chemical reaction when the drug solution is supplied are detected in real time by spectrophotometry. Based on this, the drug solution containing impurities is discharged to the outside immediately, thereby removing the impact of impurities on the process.

[0033] In particular, sensing the generation of IPA derivatives when supplying IPA solution can prevent the generation of numerous defects caused by impurities such as acetone, acetic acid, and isopropyl acetate.

[0034] Furthermore, it can solve the problem that the chemical solution supplied for processing the substrate undergoes chemical reactions due to various factors and becomes unnecessary impurities, thereby reducing the process yield and causing defective products, and eliminate the risk of process accidents caused by impurities resulting from the chemical reaction of the chemical solution.

[0035] The effects of the present invention are not limited to those mentioned above. Other effects not mentioned can be clearly understood by those skilled in the art from the following description. Attached Figure Description

[0036] Figure 1 An embodiment of a substrate processing system to which the present invention is applied is shown.

[0037] Figure 2 A structural diagram of an embodiment of the liquid medicine supply unit according to the present invention is shown.

[0038] Figure 3 An example is shown of supplying a pharmaceutical solution to a substrate processing apparatus via a pharmaceutical solution supply unit according to the invention.

[0039] Figure 4A structural diagram showing an embodiment of the drug solution inspection component of the drug solution supply unit according to the present invention is provided.

[0040] Figure 5 A flowchart illustrating an embodiment of the pharmaceutical solution supply method according to the present invention is shown.

[0041] Figure 6 A flowchart illustrating an embodiment of the process of detecting and discharging IPA derivatives using the pharmaceutical solution supply method according to the present invention is shown.

[0042] Figures 7 to 10 An example of a spectrum applicable to the pharmaceutical solution supply method according to the present invention is shown.

[0043] (Explanation of reference numerals in the attached diagram)

[0044] 10: Substrate processing system

[0045] 70: Substrate processing apparatus

[0046] 100: Medicine supply unit,

[0047] 110: Medicine Storage Department

[0048] 130: Medicine supply line

[0049] 150: Medicine liquid inspection component,

[0050] 170: Emission line

[0051] 190: Control Department. Detailed Implementation

[0052] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings, but the present invention is not limited or restricted by the embodiments.

[0053] To illustrate the advantages of the present invention and the objectives achieved through its implementation, preferred embodiments of the present invention are described below with reference to these embodiments.

[0054] First, the terminology used in this application is for illustrative purposes only and is not intended to limit the invention. Unless otherwise explicitly stated in the context, singular expressions may include plural expressions. Furthermore, in this application, terms such as "comprising" or "having" refer to the presence of features, numbers, steps, actions, constituent elements, parts, or combinations thereof described in the specification, and should be understood as not precluding the presence or additional possibilities of one or more other features, numbers, steps, actions, constituent elements, parts, or combinations thereof.

[0055] In the description of this invention, detailed descriptions of related well-known structures or functions are omitted when it is determined that such detailed descriptions may obscure the spirit of the invention.

[0056] This invention discloses a technology that can ensure the reliability and stability of process execution by sensing and removing impurities generated during chemical reactions when supplying pharmaceutical solutions through a pharmaceutical solution supply unit.

[0057] Figure 1 An embodiment of a substrate processing system to which the present invention is applied is shown. The substrate processing system 1 may include an indexing unit 10 and a process processing unit 20. The indexing unit 10 and the process processing unit 20 may be configured in a row.

[0058] The indexing unit 10 may include a loading port 12 and a conveyor 14.

[0059] A carrier 11 containing the substrate W can be placed in the loading port 12. Multiple loading ports 12 can be provided and configured in a row. The number of loading ports 12 can be increased or decreased according to the process efficiency of the substrate processing system 1 and the space occupied.

[0060] The carrier 11 can use a front-opening unifed pod (FOUP). Multiple slots can be formed in the carrier 11 for housing the substrate in a horizontal configuration relative to the ground.

[0061] The transfer rack 14 can be configured adjacent to the loading port 12, preferably between the loading port 12 and the buffer section 30 of the process unit 20. The transfer rack 14 may include an index track 15 and an indexing robot 17. The indexing robot 17 can be placed on the index track 15. The indexing robot 17 can transfer the substrate W between the buffer section 30 and the carrier 11. The indexing robot 17 can move linearly along the index track 15 or rotate about an axis.

[0062] The process processing unit 20 may be disposed adjacent to the indexing unit 10 and behind the substrate processing system 1.

[0063] The process unit 20 may include a buffer unit 30, a moving channel 40, a main conveyor robot 50, and a substrate processing device 70.

[0064] The buffer section 30 can be disposed in front of the process handling section 20, and can serve as a temporary storage place for the substrate W between the substrate handling apparatus 70 and the carrier 11 before the substrate W is transported. Alternatively, the buffer section 30 may provide slots (not shown) for placing the substrate W inside, and multiple slots (not shown) may be provided in a spaced-apart manner.

[0065] The moving channel 40 can be configured corresponding to the buffer section 30, providing a channel for the main transfer robot 50 to move. The substrate processing device 70 can be arranged facing each other on both sides of the moving channel 40. The main transfer robot 50 moves in the moving channel 40, and can be provided with moving tracks that can move up and down to the upper and lower layers of the substrate processing device 70 and the upper and lower layers of the buffer section 30.

[0066] The main transfer robot 50 can be configured in the movement channel 40 and transfer the substrate W between the substrate processing unit 70 and the buffer unit 30 or between each substrate processing unit 70. The main transfer robot 50 can move linearly along the movement channel 40 or rotate about an axis.

[0067] Multiple substrate processing devices 70 can be configured, and they can be arranged on both sides of the moving channel 40 as the center. Some of the substrate processing devices 70 can be arranged along the length direction of the moving channel 40, and some of the substrate processing devices 70 can be stacked on top of each other. The arrangement position or number of substrate processing devices 70 can be changed as needed. As an example, the substrate processing device 70 can be provided only on one side of the moving channel 40, or the substrate processing device 70 can be provided as a single layer on one side and both sides of the moving channel 40.

[0068] The substrate processing apparatus 70 can perform a cleaning process on the substrate W. The substrate processing apparatus 70 can have different structures depending on the type of cleaning process performed, or each substrate processing apparatus 70 can have the same structure. Alternatively, it can be provided that the substrate processing apparatus 70 is divided into multiple groups, with substrate processing apparatus 70 belonging to the same group being identical to each other, and substrate processing apparatus 70 belonging to different groups having different structures. The substrate processing apparatus 70 can be divided according to the type of chemical agent or the type of cleaning method used. Alternatively, it can be provided that the substrate processing apparatus 70 sequentially performs the process on a substrate W according to each group.

[0069] Furthermore, the substrate processing system 10 may include a solution supply unit (not shown) that supplies a solution corresponding to a specific processing process to the substrate processing apparatus 70.

[0070] The present invention discloses a substrate processing system that uses a solution supply unit, which will be observed below, in the substrate processing system 10 described above. When the solution is supplied, it detects impurities that may be generated during the chemical reaction and discharges the solution containing the impurities to the outside, thereby removing the influence of impurities on the process.

[0071] The present invention discloses a liquid supply unit that supplies liquid to each substrate processing apparatus 70 of the substrate processing system 1 described above.

[0072] Figure 2A structural diagram of an embodiment of the liquid medicine supply unit according to the present invention is shown.

[0073] The liquid supply unit 100 can supply liquid to the substrate processing device 70.

[0074] The liquid medicine supply unit 100 may include a liquid medicine storage section 110, a liquid medicine supply line 130, a liquid medicine inspection component 150, a discharge line 170, a control section 190, etc.

[0075] The chemical solution storage unit 110 can store various chemicals to be used in the substrate processing process and supply the stored chemicals to the substrate processing apparatus 70 as needed. The chemical solution storage unit 110 can receive chemicals through a chemical solution inflow line (not shown) and temporarily store them.

[0076] The chemical supply line 130 can supply the chemical solution stored in the chemical solution storage section 110 to the substrate processing apparatus 70. The chemical supply line 130 can provide a path for the flow of the chemical solution. Various structures such as valves, heaters, pumps, flow meters, and filters can be configured in the chemical supply line 130 to adjust the chemical solution according to process conditions, such as adjusting the supply volume, density, temperature, etc., or removing impurities.

[0077] As an example, the solution storage unit 110 can receive and store isopropyl alcohol (IPA) as an organic solvent for substrate processing, and the solution supply line 130 can supply IPA to the substrate processing apparatus 70.

[0078] The quantity and form of the liquid storage section 110 and the liquid supply line 130 can be changed based on the type of liquid supplied by the substrate processing process.

[0079] The liquid inspection component 150 can monitor impurities contained in the liquid flowing in the liquid supply line 130. Preferably, the liquid inspection component 150 can detect impurities generated during the chemical reaction by spectrophotometry.

[0080] As an example, when IPA is supplied through the drug supply line 130, IPA derivatives may be generated. Due to these unwanted IPA derivatives, the product will be defective during processing. In this invention, the spectrum of the drug flowing in the drug supply line 130 is obtained using a Fourier transform infrared spectroscopy (FT-IR) or a Fourier transform near-infrared spectroscopy (FT-NIR). By observing whether there is a wavenumber peak corresponding to the IPA derivative in the spectrum, the presence of the IPA derivative can be determined.

[0081] The discharge line 170 can be connected to the middle of the liquid supply line 130 to discharge the liquid flowing in the liquid supply line 130 to the outside.

[0082] The control unit 190 can selectively adjust the supply of chemical solution to the substrate processing apparatus 70 via the chemical solution supply line 130. The control unit 190 can interrupt the supply of chemical solution to the substrate processing apparatus 70 via the chemical solution supply line 130 and discharge it to the outside via the discharge line 170 based on the inspection result of the chemical solution inspection member 150.

[0083] Figure 3 An example is shown of supplying a pharmaceutical solution to a substrate processing apparatus via a pharmaceutical solution supply unit according to the invention.

[0084] The Figure 3 This is an example of the liquid supply unit 100 supplying IPA to the substrate processing apparatus 70.

[0085] Typically, cleaning processes can include chemical treatment that supplies a solution to the substrate to remove foreign matter, rinsing treatment that supplies pure water to the substrate to remove residual chemicals, and drying treatment that removes residual pure water from the substrate.

[0086] For the drying process of the substrate, a supercritical fluid can be used. As an example, after replacing the pure water on the substrate with an organic solvent, supercritical fluid can be supplied to the upper surface of the substrate in the high-pressure chamber of the substrate processing apparatus 70, dissolving the organic solvent remaining on the substrate in the supercritical fluid and removing it from the substrate. In this case, IPA can be used as the organic solvent, and carbon dioxide (CO2), which has a relatively low critical temperature and critical pressure and is easily soluble in IPA, can be used as the supercritical fluid.

[0087] The liquid medicine storage section 110 serves as a temporary storage tank for liquid medicine. It can receive and store IPA from the IPA source via the power supply line 90. The power supply line 90 can be equipped with a filter 91, a flow meter 93, a valve 95, etc., to regulate the supply of IPA.

[0088] The IPA stored in the liquid storage section 110 can be supplied to the substrate processing apparatus 70 via the liquid supply line 130.

[0089] The liquid supply line 130 can be equipped with a pump 131, a damper 132, a heater 133, a thermometer 134, a filter 135, a flow meter 137, etc., to regulate the temperature and flow rate of the IPA supplied to the substrate processing device 70.

[0090] Furthermore, a pressure gauge 138 and a flow control valve (pressure regulating valve) 139 can be configured in the chemical supply line 130 to regulate the pressure of IPA supplied through the chemical supply line 130. The chemical supply line 130 supplies IPA to the substrate processing apparatus 70 between the filter 135 and the flow control valve 139. A first valve 161 can be configured at the front end of the chemical supply line 130 connected to the substrate processing apparatus 70 to selectively open and close the chemical supply line 130 to regulate the supply of IPA.

[0091] Furthermore, the liquid supply line 130 may include a circulation line, the end of which may be connected to the liquid storage unit 110 and a flow control valve 139 may be configured at its front end to recycle any liquid that has not been supplied to the substrate processing device 70 back to the liquid storage unit 110.

[0092] A drug supply line 130 may be configured with a drug inspection component 150. Preferably, the measuring probe of the drug inspection component 150 may be configured in the drug supply line 130.

[0093] The measuring probe of the liquid inspection component 150 can be positioned appropriately within the liquid supply line 130. Preferably, the measuring probe of the liquid inspection component 150 can be positioned between the filter 135 and the flow control valve 139 disposed within the liquid supply line 130. This is because IPA contains a relatively large amount of impurities such as acetone that are generated in the filter 135 after passing through it.

[0094] The drug solution inspection component 150 can use a measuring probe to inspect the IPA flowing in the drug solution supply line 130 and determine whether it contains IPA derivatives.

[0095] The discharge line 170 can be connected to the front end of the first valve 161 in the liquid supply line 130.

[0096] The discharge line 170 can discharge the IPA flowing in the drug supply line 130 to the outside. The discharge line 170 can be equipped with a second valve 165 for selectively opening and closing the discharge line, a needle valve 171 for precisely adjusting the discharge flow rate, and a flow meter 175 for measuring the discharge flow rate.

[0097] The control unit (not shown) can control the first valve 161 and the second valve 165 based on the inspection results of the liquid inspection component 150, thereby selectively supplying IPA to the substrate processing apparatus 70 or discharging IPA through the discharge line 170.

[0098] When IPA is supplied through the pharmaceutical supply unit 100 according to the invention, the presence of IPA derivatives is checked in real time. When IPA derivatives are present, the IPA flowing in the pharmaceutical supply line 130 is immediately discharged through the discharge line 170, thereby eliminating defects caused during process treatment due to the supply of IPA containing IPA derivatives.

[0099] In this invention, the drug solution inspection component 150 can detect impurities in the drug solution using Fourier transform infrared spectroscopy (FT-IR). Regarding the drug solution inspection component 150... Figure 4 A structural diagram showing an embodiment of the drug solution inspection component of the drug solution supply unit according to the present invention is provided.

[0100] The drug solution inspection component 150 may include a Fourier transform infrared spectrometer (FT-IR) or a Fourier transform near-infrared spectrometer (FT-NIR). For example, Fourier transform infrared spectroscopy (FT-IR) is a type of infrared spectroscopy that uses white light in the infrared region phased by an interferometer. It is an analytical method that measures the absorption of energy corresponding to the vibration and rotation of the molecular skeleton with changes in dipole moment when infrared light is irradiated onto the sample.

[0101] The liquid inspection component 150 may include a measuring probe 151, a Fourier transformer 153, an analyzer 155, etc.

[0102] The measuring probe 151 can be configured in the drug supply line 130 to irradiate the drug solution flowing in the drug supply line 130 with infrared or near-infrared light and detect the light transmitted through the drug solution.

[0103] The Fourier transform 153 can acquire the spectrum from the light detected by the measurement probe 151. That is, the Fourier transform 153 can convert the detected light into the frequency domain through Fourier transform to obtain the spectrum of the energy absorption distribution of the drug solution to infrared or near-infrared light.

[0104] Furthermore, the analyzer 155 can determine the impurities in the drug solution based on the acquired spectrum.

[0105] When radiation passes through a solid, liquid, or gas layer, electrons that make up atoms, molecules, or ions absorb the radiation and transition to energy levels equivalent to the photon energy of the radiation. These electron potential differences have eigenvalues ​​for each chemical species, and the composition of a sample can be determined by investigating the frequency of the absorbed radiation. This frequency can be expressed using the wave propagation speed (v) and wavelength (λ), and the spectrum can be expressed using the reciprocal of the wavelength, i.e., the wave number.

[0106] The analyzer 155 can identify a substance by detecting the peaks in the characteristic wave number of the spectrum.

[0107] As an example, when IPA is supplied as a drug solution, the presence of IPA derivatives in the IPA flowing in the drug solution supply line 130 can be determined by spectroscopy. The main IPA derivatives have C and O double bonds, and in this case, they can be detected in the spectrum at wavenumbers between 1700 and 1730 cm⁻¹. -1 It appears as a peak within the range. More precisely, at a wavenumber of 1715 cm⁻¹. -1 A peak appears near the point.

[0108] In this way, the analyzer 155 can determine whether the main IPA derivatives are present.

[0109] In this invention, by using the above-described liquid inspection component, the presence of impurities can be monitored in real time while the liquid is being supplied.

[0110] Furthermore, this invention discloses a method for supplying a pharmaceutical solution using the pharmaceutical solution supply unit according to the invention described above. Hereinafter, examples will be used to observe the pharmaceutical solution supply method according to the invention. The pharmaceutical solution supply method according to the invention is implemented using the pharmaceutical solution supply unit according to the invention described above; therefore, examples of the pharmaceutical solution supply unit described above will also be referred to.

[0111] Figure 5 A flowchart illustrating an embodiment of the pharmaceutical solution supply method according to the present invention is shown.

[0112] The medicine stored in the medicine storage section 110 can be supplied through the medicine supply line 130 (S110), and at the same time, the medicine flowing in the medicine supply line 130 can be inspected by the medicine inspection member 150 using the spectrophotometric inspection method (S130).

[0113] The chemical solution inspection component 150 determines the presence of impurities based on the inspection results (S150). When the inspection result of the chemical solution inspection component 150 is that there are no impurities or the presence is below the reference value, the control unit 190 can supply chemical solution to the substrate processing apparatus 70 through the chemical solution supply line 130 (S170).

[0114] If the inspection result of the liquid inspection component 150 is that there are impurities or the value is above the reference value, the control unit 190 can discharge the liquid supplied through the liquid supply line 130 to the discharge line 170 (S190).

[0115] The discharge of the liquid medicine through the discharge line 170 can be performed for a set time or a set flow rate. The control unit 190 can determine whether to re-execute the above process to supply the liquid medicine to the substrate processing apparatus 70 through the liquid medicine supply line 130 or to discharge the liquid medicine through the discharge line 170.

[0116] The method of supplying the pharmaceutical solution according to the present invention will be described in more detail for application to the supply of IPA.

[0117] Figure 6 A flowchart illustrating an embodiment of the process of detecting and discharging IPA derivatives using the pharmaceutical solution supply method according to the present invention is shown.

[0118] In the description of this embodiment, reference will also be made to the method of supplying IPA via the previously described drug supply unit. Figure 3 Examples of implementations.

[0119] The control unit 190 supplies IPA stored in the liquid storage unit 110 to the liquid supply line 130. At this time, the control unit 190 opens the first valve 161 of the liquid supply line 130 and closes the second valve 165 of the discharge line 170, so that the IPA flowing to the liquid supply line 130 is not discharged to the discharge line 170 (S211).

[0120] IPA is supplied through the drug supply line 130 (S215), and at the same time, the measuring probe 151 of the drug inspection component 150 emits infrared or near-infrared light to the drug flowing in the drug supply line 130 and detects the transmitted light (S221).

[0121] The Fourier transformer 153 of the drug liquid inspection component 150 transforms the detected light into the frequency domain through Fourier transform to obtain the spectrum of the energy absorption distribution of the drug liquid to infrared or near-infrared light (S223).

[0122] Furthermore, the analyzer 155 of the drug solution inspection component 150 analyzes the spectrum by identifying the wavenumber of peaks in the acquired spectrum (S225). The analyzer 155 can determine whether an IPA derivative is present based on the analysis results (S227).

[0123] The main IPA derivatives have C and O double bonds, which can be observed in the spectrum at wavenumbers of 1700 to 1730 cm⁻¹. -1 It appears as a peak within the range. More precisely, at a wavenumber of 1715 cm⁻¹. -1 A peak appears near the point.

[0124] As an example, Figure 7The spectrum of IPA without IPA derivatives is shown.

[0125] IPA has a molecular structure with a single bond between the OH group and C, which results in a spectrum with a wavenumber of 1700 to 1730 cm⁻¹. -1 There is no peak in range 221.

[0126] Figure 8 The spectrum is shown when acetone is present.

[0127] The molecular structure of acetone has a double bond between O and C, which results in a spectrum with wavenumbers ranging from 1730 to 1700 cm⁻¹. -1 A peak appears in range 241.

[0128] Figure 9 The spectrum is shown when acetic acid is present.

[0129] The molecular structure of acetic acid has a single bond between the OH group and C, but the O and C groups attached to it have double bonds. Therefore, in the spectrum, at a wavenumber of 1710 cm⁻¹, the OH group has a single bond between the OH group and C. -1 A peak appears near 261.

[0130] Figure 10 The spectrum is shown when isopropyl acetate is present.

[0131] The molecular structure of isopropyl acetate also contains a double bond between O and C at 270°, thus appearing in the spectrum at a wavenumber of 1720 cm⁻¹ at 260°. -1 A peak appears near 271.

[0132] In this way, the main IPA derivatives can be identified by analyzing their spectra.

[0133] If the analysis result of the drug solution inspection component 150 is that no IPA derivative is detected or that the result is slightly below a set value, the control unit 190 keeps the first valve 161 of the drug solution supply line 130 open and the second valve 165 of the discharge line 170 closed, and continues to supply IPA to the substrate processing apparatus 70 through the drug solution supply line 130.

[0134] Conversely, when the analysis result of the drug solution inspection component 150 indicates that an IPA derivative has been detected, the control unit 190 closes the first valve 161 of the drug solution supply line 130 and opens the second valve 165 of the discharge line 170 (S231), interrupting the supply of IPA to the substrate processing apparatus 70 through the drug solution supply line 130, and simultaneously discharging the IPA flowing in the drug solution supply line 130 through the discharge line 170 (S233).

[0135] The control unit 190 executes the discharge of IPA through the discharge line 170 until a set time or a set flow rate is reached, and determines whether the set time or the set flow rate has been reached (S235).

[0136] When the discharge of IPA reaches the set time or set flow rate, the IPA flowing in the drug supply line 130 can be re-checked by the drug inspection component 150 to see if it contains IPA derivatives, and the above process can be repeated based on the inspection results.

[0137] As observed above, this invention uses spectrophotometry to detect impurities generated during the chemical reaction when the drug solution is supplied. Based on this, the drug solution containing impurities is discharged to the outside immediately, thereby removing the impact of impurities on the process.

[0138] In particular, sensing the generation of IPA derivatives when supplying IPA solution can prevent the generation of numerous defects caused by impurities such as acetone, acetic acid, and isopropyl acetate.

[0139] Furthermore, it can solve the problem that the chemical solution supplied for processing the substrate undergoes chemical reactions due to various factors and becomes unnecessary impurities, thereby reducing the process yield and causing defective products, and eliminate the risk of process accidents caused by impurities resulting from the chemical reaction of the chemical solution.

[0140] The above description is merely illustrative of the technical concept of the present invention. Those skilled in the art can make various modifications and variations without departing from the essential characteristics of the invention. Therefore, the embodiments described herein are for illustrating the technical concept and not for limiting it; the technical concept of the invention is not limited by such embodiments. The scope of protection of the present invention should be interpreted according to the appended claims, and all technical concepts within the same scope are included within the scope of the claims.

Claims

1. A liquid medicine supply unit, characterized in that, include: The pharmaceutical solution storage department is responsible for storing pharmaceutical solutions. The liquid medicine supply line provides a path for the liquid medicine to flow and is a circulation line with both ends connected to the liquid medicine storage section; The liquid inspection component uses spectrophotometry to detect impurities generated during chemical reactions in the liquid flowing in the liquid supply line. The discharge line discharges the liquid medicine flowing in the liquid medicine supply line; as well as A first valve is disposed at the rear end of the connection portion of the discharge line in the liquid supply line and at the front end of the connection portion of the substrate processing device to selectively open and close the liquid supply line.

2. The liquid medicine supply unit according to claim 1, characterized in that, The drug solution inspection component includes a Fourier transform infrared spectrometer or a Fourier transform near-infrared spectrometer.

3. The liquid medicine supply unit according to claim 1, characterized in that, The liquid medicine storage section stores IPA. The drug supply line supplies the IPA stored in the drug storage section.

4. The liquid medicine supply unit according to claim 3, characterized in that, The drug solution inspection component detects IPA derivatives in the drug solution supply line.

5. The liquid medicine supply unit according to claim 4, characterized in that, The drug detection component detects IPA derivatives based on the presence of a peak at a set wavenumber in the spectrum.

6. The liquid medicine supply unit according to claim 1, characterized in that, The drug solution inspection component includes: A measuring probe is configured in the drug supply line to emit infrared or near-infrared light to the drug flowing in the drug supply line and to detect the light transmitted through the drug; A Fourier transform is used to acquire a spectrum from the light detected by the measurement probe; and The analyzer determines impurities based on the spectrum.

7. The liquid medicine supply unit according to claim 6, characterized in that, The liquid medicine supply unit also includes: A filter is configured in the drug supply line. The measuring probe is positioned at the rear end of the filter in the drug supply line.

8. The liquid medicine supply unit according to claim 1, characterized in that, The liquid medicine supply unit also includes: A second valve is configured on the discharge line to selectively open and close the discharge line; and The control unit controls the first valve and the second valve.

9. The liquid medicine supply unit according to claim 8, characterized in that, The control unit selectively controls the first valve and the second valve based on the inspection results of the liquid inspection component.

10. A substrate processing system, characterized in that, include: The drug supply unit as described in claim 1; as well as A substrate processing apparatus receives a liquid medicine from the liquid medicine supply unit and processes the substrate.

11. A method for supplying a medicinal liquid, characterized in that, include: The liquid medicine supply step involves supplying the liquid medicine stored in the liquid medicine storage section to the liquid medicine supply line, which is connected to the circulation line at both ends of the liquid medicine storage section. The impurity detection step involves using spectrophotometry to detect impurities generated during the chemical reaction in the drug solution flowing in the drug solution supply line. as well as The liquid supply judgment step involves supplying liquid to a substrate processing device connected to the liquid supply line based on the impurity detection result, or discharging the liquid to a discharge line connected to the front end of the first valve in the liquid supply line by closing the liquid supply line through a first valve located at the front end of the connection portion of the substrate processing device in the liquid supply line.

12. The method for supplying liquid medicine according to claim 11, characterized in that, The impurity detection step uses a Fourier transform infrared spectrometer or a Fourier transform near-infrared spectrometer to detect impurities in the drug supply line.

13. The method for supplying liquid medicine according to claim 11, characterized in that, The drug supply step supplies the IPA stored in the drug storage section to the drug supply line. The impurity detection step detects IPA derivatives in the drug supply line.

14. The method for supplying liquid medicine according to claim 13, characterized in that, The impurity detection step is based on the presence of a peak at a set wavenumber in the spectrum to detect IPA derivatives.

15. The method for supplying liquid medicine according to claim 11, characterized in that, The drug supply determination step also includes: The discharge line opening step involves discharging the medicine flowing in the medicine supply line through the second valve in the discharge line.

16. The method for supplying liquid medicine according to claim 15, characterized in that, The drug supply determination step also includes: The discharge regulation step involves opening the discharge line based on a set time or a set flow rate.

17. The method for supplying liquid medicine according to claim 11, characterized in that, The drug supply judgment step then executes the impurity detection step, and based on the impurity detection result, executes the drug supply line shutdown step to the discharge adjustment step.

18. A liquid medicine supply unit, characterized in that, include: The pharmaceutical solution storage department is responsible for storing IPA solutions. The drug supply line provides a path for the flow of IPA drug solution and is a circulation line with both ends connected to the drug storage section; A filter is configured in the drug supply line; The discharge line discharges the liquid medicine flowing in the liquid medicine supply line; A first valve is disposed at the rear end of the connection portion of the discharge line in the liquid supply line and at the front end of the connection portion of the substrate processing device to selectively open and close the liquid supply line. A second valve is configured on the discharge line to selectively open and close the discharge line; A measuring probe is configured in the drug supply line to emit infrared or near-infrared light to the drug flowing in the drug supply line and to detect the light transmitted through the drug; A Fourier transform is used to acquire a spectrum from the light detected by the measurement probe; The analyzer detects IPA derivatives based on the spectrum; and The control unit controls the first valve and the second valve based on the analysis results of the analyzer to supply the chemical solution to the substrate processing device or to discharge the chemical solution to the discharge line.

Images