Turnover robot device and wafer testing equipment

Abstract

The application provides a turnover mechanical arm device and wafer testing equipment, and relates to the technical field of semiconductor testing. The turnover mechanical arm device comprises a rack, a driving mechanism and a mechanical main arm. The driving mechanism is installed on the rack, and the driving mechanism is connected with the mechanical main arm to drive the mechanical main arm to rotate relative to the rack. The position of the mechanical main arm relative to the driving mechanism is adjustable along the direction perpendicular to the rotation axis of the mechanical main arm. An auxiliary arm for carrying a testing machine is installed on the mechanical main arm, and the testing machine is adjustably arranged on the auxiliary arm. The turnover mechanical arm device can adjust the position of the mechanical main arm to assist in adjusting the position of the testing machine. The testing machine does not need to be disassembled during adjustment, and the operation is simple and labor-saving. The device has the advantages of convenient maintenance and good docking repeatability, and can easily ensure the docking accuracy of the testing machine and improve the testing efficiency.

Description

Technical Field

[0001] This invention relates to the field of semiconductor testing technology and equipment, and in particular to a flipping robotic arm device and wafer testing equipment. Background Technology

[0002] Wafer testing is the first step in back-end packaging testing of semiconductor devices. Its purpose is to screen out defective chips before packaging and ensure that each small square on the chip basically meets the characteristics or design specifications of the device. Back-end packaging testing typically includes verification of voltage, current, timing, and functionality to save packaging costs and provide a more direct understanding of wafer yield.

[0003] The test machine needs to be placed above the probe station during operation, and the motherboard mounted on the test machine needs to be precisely aligned with the probe chucks of the probe station. Meanwhile, as chips become increasingly smaller while their functional circuits become more complex, the size and weight of the test machine continue to increase.

[0004] Furthermore, due to the reduction in chip size, the number of wafers on a single-sided wafer will increase, which also increases the difficulty of docking the test machine with the probe chuck on the probe table. Similarly, the docking accuracy requirements between the test machine and the probe chuck on the probe table are also more stringent.

[0005] Therefore, how to provide a flipping robotic arm device and wafer testing equipment that can guarantee docking accuracy is one of the technical problems that need to be solved by those skilled in the art. Summary of the Invention

[0006] The purpose of this invention is to provide a flipping robotic arm device and a wafer testing equipment. The position of the testing machine can be adjusted by adjusting the position of the main robotic arm. The testing machine does not need to be disassembled during adjustment. The operation is simple and labor-saving. It has the advantages of convenient maintenance and good docking repeatability. It is easy to ensure the docking accuracy of the testing machine and improve the testing efficiency.

[0007] To achieve the above objectives, the present invention provides the following technical solution:

[0008] In a first aspect, the present invention provides a flipping robotic arm device, comprising a frame, a drive mechanism, and a main robotic arm. The drive mechanism is mounted on the frame and connected to the main robotic arm to drive the main robotic arm to rotate relative to the frame. The position of the main robotic arm relative to the drive mechanism is adjustable in a direction perpendicular to its own rotation axis. An auxiliary arm for supporting a testing machine is mounted on the main robotic arm, and the testing machine is adjustablely mounted on the auxiliary arm.

[0009] Furthermore, the drive mechanism includes a power source, a reduction mechanism, and a rotating shaft assembly rotatably connected to the frame;

[0010] The power source is mounted on the frame, and the power output end of the power source is connected to the power input end of the rotating shaft assembly through the reduction mechanism, so that the power source drives the rotating shaft assembly to rotate through the reduction mechanism.

[0011] The mechanical arm is tunably connected to the rotating shaft assembly along a direction perpendicular to its own axis of rotation.

[0012] Furthermore, the mechanical main arm slides in a direction perpendicular to its own rotation axis with the rotating shaft assembly. One of the mechanical main arm and the rotating shaft assembly has a waist-shaped groove, and the other is connected to a locking screw that matches the waist-shaped groove. The length direction of the waist-shaped groove is set along the sliding direction of the mechanical main arm, and the locking screw can slide relative to the waist-shaped groove.

[0013] Furthermore, the mechanical main arm has a first adjusting screw and a second adjusting screw. The first adjusting screw passes through a through hole on the mechanical main arm and is threadedly connected to the rotating shaft assembly. The second adjusting screw passes through a threaded hole on the mechanical main arm and abuts against the rotating shaft assembly. The first adjusting screw and the second adjusting screw are respectively used to apply opposite forces to the rotating shaft assembly.

[0014] Furthermore, the rotating shaft assembly includes a shaft body, a limiting ring, and a connecting seat. The power input end of the shaft body is connected to the reduction mechanism. The mechanical main arm is adjustablely connected to the connecting seat in a direction perpendicular to its own rotation axis. The connecting seat is connected to the limiting ring, and the limiting ring is locked to the shaft body to lock the position of the connecting seat relative to the shaft body.

[0015] Furthermore, the power input end of the rotating shaft assembly is located at the end of the rotating shaft assembly or in the middle of the rotating shaft assembly.

[0016] Furthermore, the frame is provided with a first limiting member and a second limiting member, which are used to cooperate in limiting the rotation angle of the rotating shaft assembly.

[0017] Furthermore, it also includes a controller for controlling the output of the power source and a segment sensor for detecting the position of the robotic arm;

[0018] The beginning and end of the rotation path of the robotic arm have acceleration and deceleration intervals, respectively.

[0019] A pressure plate is connected to the rotating shaft assembly. The pressure plate has a first detection surface and second detection surfaces located at both ends of the first detection surface. The two second detection surfaces correspond to the acceleration interval and the deceleration interval, respectively.

[0020] The interval sensor is located on one side of the pressure plate. The interval sensor detects the test surface and sends an identification signal to the controller through the first detection surface and the two second detection surfaces. The controller controls the output of the power source through the identification signal.

[0021] Furthermore, the main mechanical arm has an adapter plate for mounting the auxiliary arm, the position of which is adjustable relative to the main mechanical arm in a direction parallel to the rotation axis of the main mechanical arm.

[0022] Furthermore, the auxiliary arm includes a holding arm body, a limiting structure, and an adjustment structure for mounting the testing machine;

[0023] The arm body is used to connect to the main mechanical arm;

[0024] The adjustment structure slides along the X-axis with the arm body. The adjustment structure has a mounting plane for contacting and fitting with the testing machine. The mounting plane is adjustable along the Y-axis and adjustable in angle with the X-axis, Y-axis and Z-axis as axes. The X-axis, the Y-axis and the Z-axis are perpendicular to each other.

[0025] The limiting structure is used to adjust the position of the adjusting structure relative to the arm body in the X direction.

[0026] Furthermore, the adjusting structure includes a ball bearing and a bushing seat installed on the inner ring of the ball bearing;

[0027] The ball bearing is used to adjust the angle of the bushing seat with the X, Y and Z directions as axes, and the mounting plane is adjustable relative to the bushing seat along the Y direction.

[0028] Secondly, the present invention also provides a wafer testing device, including the flipping robotic arm device described in the above scheme. The wafer testing device further includes a probe station and a testing machine. The probe station is fixedly connected to one side of the flipping robotic arm device through a connecting plate, and the testing machine is mounted on the auxiliary arm.

[0029] The flipping robotic arm device and wafer testing equipment provided by this invention can produce the following beneficial effects:

[0030] During assembly, the position of the main mechanical arm relative to the drive mechanism can be adjusted, and the auxiliary arm can be used to align the testing machine with the needle chuck. In use, the drive mechanism can drive the main mechanical arm to rotate, and the auxiliary arm on the main mechanical arm and the testing machine on the auxiliary arm will rotate accordingly. During the rotation, the testing machine can switch back and forth between the maintenance position and the docking position.

[0031] Compared to existing technologies, the flipping robotic arm device provided by the first aspect of this invention can assist in adjusting the position of the testing machine by adjusting the position of the main robotic arm. Adjustments in the aforementioned directions do not require disassembling the testing machine, making operation simple, labor-saving, and ensuring the docking accuracy of the testing machine. Furthermore, after adjusting the position of the testing machine in all six degrees of freedom directions once using the main and auxiliary robotic arms, the testing machine can be switched between the maintenance and docking positions via the drive mechanism. There is no need to readjust the testing machine's position before docking, offering advantages such as convenient maintenance and excellent docking repeatability. The operation is simple, docking accuracy is easily guaranteed, and testing efficiency is improved.

[0032] Compared with the prior art, the wafer testing equipment provided by the second aspect of the present invention includes a probe station, a tester and the above-mentioned flipping robotic arm device. In addition to having the technical effects that the flipping robotic arm device can achieve, since the flipping robotic arm device and the probe station are fixedly connected by a connecting plate, the bottom of the flipping robotic arm device does not need to be provided with an extra fixed platform, making the overall equipment structure compact and occupying a small area. Attached Figure Description

[0033] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0034] Figure 1 A three-dimensional structural diagram of a flipping robotic arm device (side cover of the frame not shown) provided in an embodiment of the present invention from a first perspective;

[0035] Figure 2 A three-dimensional structural diagram of a mechanical main arm and a rotating shaft assembly in cooperation, provided for an embodiment of the present invention;

[0036] Figure 3 for Figure 2 A magnified view of part A;

[0037] Figure 4 This is a front view structural diagram of a flipping robotic arm device provided in an embodiment of the present invention;

[0038] Figure 5 A three-dimensional structural schematic diagram of a flipping robotic arm device (the side cover of the frame is not shown) provided in an embodiment of the present invention from a second perspective.

[0039] Figure 6This is a schematic diagram showing the relative positions of the pressure plate, the section sensor, the first limiting member, and the second limiting member provided in an embodiment of the present invention.

[0040] Figure 7 A three-dimensional structural schematic diagram of an auxiliary arm provided in an embodiment of the present invention;

[0041] Figure 8 This is a schematic diagram of the three-dimensional structure of an auxiliary arm after severance, provided in an embodiment of the present invention.

[0042] Figure 9 This is a three-dimensional structural schematic diagram of a wafer testing device provided in an embodiment of the present invention.

[0043] Icons: 1 - Frame; 11 - First limiting component; 12 - Second limiting component; 13 - Section sensor; 2 - Drive mechanism; 21 - Power source; 22 - Reduction mechanism; 23 - Rotary shaft assembly; 231 - Shaft; 232 - Limiting ring; 233 - Connecting seat; 2331 - Protrusion; 234 - Protrusion; 235 - Pressure plate; 2351 - First detection surface; 2352 - Second detection surface; 3 - Mechanical main arm; 31 - Waist-shaped groove; 32 - Locking screw; 33 - First adjusting screw; 34 - Second adjusting screw; 35 - Adapter plate; 36 - Front connecting plate; 37 - Side plate; 38 - Through groove; 4 - Testing machine; 5 - Auxiliary arm; 5 1 – Arm body; 511 – Forearm; 512 – Side arm; 5121 – Upper slide rail; 5122 – Lower slide rail; 513 – Buffer protrusion; 52 – Limiting structure; 521 – Fixing block; 522 – First screw; 53 – Adjusting structure; 531 – Adjusting assembly; 5311 – Second screw; 5312 – Third screw; 5313 – Fixing cover; 5314 – Adjusting plate; 5315 – Sliding plate; 5316 – Ball bearing; 5317 – Bushing seat; 5318 – Pressure cap; 5319 – Friction plate; 532 – Support shaft; 533 – Mounting plate; 5331 – Mounting plane; 6 – Probe station; 7 – Connecting plate; 8 – Mother plate. Detailed Implementation

[0044] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0045] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0046] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0047] The specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustration and explanation only and are not intended to limit the present invention.

[0048] A first aspect of the present invention provides a flipping robotic arm device, such as... Figure 1 As shown, it includes a frame 1, a drive mechanism 2, and a mechanical main arm 3. The drive mechanism 2 is mounted on the frame 1 and connected to the mechanical main arm 3 to drive the mechanical main arm 3 to rotate relative to the frame 1. The position of the mechanical main arm 3 relative to the drive mechanism 2 is adjustable in a direction perpendicular to its own rotation axis. An auxiliary arm 5 for carrying a testing machine 4 is mounted on the mechanical main arm 3, and the testing machine 4 is adjustablely set on the auxiliary arm 5.

[0049] During assembly, the position of the main mechanical arm 3 relative to the drive mechanism 2 can be adjusted along a direction perpendicular to its own rotation axis, cooperating with the auxiliary arm 5 to align the testing machine 4 with the probe chuck. After adjustment, when maintenance of the testing machine is required, the main mechanical arm 3 can be rotated by the drive mechanism 2, and the auxiliary arm on the main mechanical arm 3 and the testing machine 4 on the auxiliary arm can rotate to the maintenance position for maintenance work. After maintenance, the main mechanical arm 3 can be rotated 180° by the drive mechanism 2 and then reset, allowing the testing machine 4 to align with the probe chuck. As can be seen from the above process, the flipping robotic arm device can assist in adjusting the position of the testing machine by adjusting the position of the main mechanical arm. Adjustment in the above direction does not require disassembling the testing machine, making operation simple, labor-saving, and easy to ensure the docking accuracy of the testing machine. At the same time, when switching between the maintenance position and the docking position, that is, each time the testing machine docks with the probe station, there is no need to readjust the position of the testing machine, making the action simple. Therefore, the above-mentioned flipping robotic arm device has the advantages of convenient maintenance and good docking repeatability, making it easy to ensure the docking accuracy of the testing machine and improving testing efficiency.

[0050] It should be noted that any structure capable of driving the main mechanical arm 3 to rotate relative to the frame 1 can be referred to as the drive mechanism 2 mentioned in the above embodiments. The drive mechanism 2 can be a structure that performs rotary motion, such as a rotary motor, or a combination of a structure that performs linear motion, such as a pneumatic cylinder or a hydraulic cylinder, and a transmission structure, wherein the transmission structure can convert linear motion into rotary motion.

[0051] In some embodiments, such as Figure 1 As shown, the drive mechanism 2 includes a power source 21, a reduction mechanism 22, and a rotating shaft assembly 23 rotatably connected to the frame 1, wherein:

[0052] The power source 21 can be mounted on the frame 1 by means of screws or other structures. The power output end of the power source 21 is connected to the power input end of the rotating shaft assembly 23 through a reduction mechanism 22. The power source 21 can be a motor with a brake.

[0053] The mechanical main arm 3 is tunably connected to the rotating shaft assembly 23 in a direction perpendicular to its own rotation axis.

[0054] The rotating shaft assembly 23 is mounted on the frame 1 and is rotatably connected to the frame 1.

[0055] When in use, the power source 21 is started, which can drive the rotating shaft assembly 23 to rotate through the reduction mechanism 22, thereby realizing the rotation of the mechanical main arm 3.

[0056] The reduction mechanism 22 may include a first reduction component and a second reduction component. The first reduction component is a planetary reducer connected to the output end of the power source 21, and the second reduction component is a worm gear reduction structure. The output end of the planetary reducer is connected to the worm of the second reduction component, and the worm gear of the second reduction component is fixedly connected to the shaft assembly 23 to drive the shaft assembly 23 to rotate.

[0057] Because the testing machine 4 has many cables or cooling water pipes, the load on the main mechanical arm 3 is variable, which can impact the entire drive mechanism 2. The reduction mechanism 22 in the drive mechanism 2 has a self-locking feature. Located at the power output end of the power source 21, it can reduce the impact of the load and improve safety. It is suitable for use when the load is large and the load size is unstable.

[0058] In some embodiments, such as Figure 2 As shown, the mechanical arm 3 slides in a direction perpendicular to its own rotation axis with the rotating shaft assembly 23. Specifically, the rotating shaft assembly 23 may have a protrusion 2331, and the mechanical arm 3 may have a through groove 38. The protrusion 2331 can slide in a direction perpendicular to the rotation axis of the mechanical arm 3 with the through groove 38. The above-mentioned sliding fit structure can also limit the rotation of the mechanical arm 3 relative to the rotating shaft assembly 23.

[0059] Additionally, one of the robotic arm 3 and the rotating shaft assembly 23 may have a slotted groove 31, and the other may be connected to a locking screw 32 that matches the slotted groove 31. The length direction of the slotted groove 31 is arranged along the sliding direction of the robotic arm 3, and the locking screw 32 can be slidably connected within the slotted groove 31. Specifically, as shown... Figure 3 As shown, the mechanical main arm 3 has a waist-shaped groove 31 whose extension direction is parallel to the sliding direction of the mechanical main arm 3. A locking screw 32 passes through the waist-shaped groove 31 and extends into the rotating shaft assembly 23 to engage with the rotating shaft assembly 23 by threads.

[0060] When it is necessary to adjust the position of the main mechanical arm 3, the locking screw 32 can be loosened, the position of the main mechanical arm 3 can be adjusted, and the locking screw 32 can be tightened after the adjustment is completed.

[0061] To ensure the stability of the position of the main mechanical arm 3 relative to the rotating shaft assembly 23, multiple waist-shaped grooves 31 can be configured, with multiple waist-shaped grooves 31 arranged around the through groove on the main mechanical arm 3.

[0062] Since the main mechanical arm 3 has a certain weight, especially after it is connected to the auxiliary arm 5, the weight of the main mechanical arm 3 needs to be borne by personnel after the locking screw 32 is loosened. This will increase the labor intensity of the personnel and reduce the adjustment efficiency.

[0063] To address the above problems, in some embodiments, such as Figure 2 As shown, the mechanical main arm 3 has a first adjusting screw 33 and a second adjusting screw 34. The first adjusting screw 33 passes through the through hole (unthreaded cylindrical hole) on the mechanical main arm 3 and is threadedly connected to the rotating shaft assembly 23. The second adjusting screw 34 passes through the threaded hole on the mechanical main arm 3 and abuts against the rotating shaft assembly 23.

[0064] like Figure 2 and Figure 3 As shown, when it is necessary to lower the height of the main mechanical arm 3, first loosen all the locking screws 32, then turn the second adjusting screw 34 to move it down. At the same time, the main mechanical arm 3 and the first adjusting screw 33 on the main mechanical arm 3 also move down. After moving down to the appropriate position, lock the position of the main mechanical arm 3 with the locking screws 32. When it is necessary to raise the height of the main mechanical arm 3, first loosen all the locking screws 32, then turn the first adjusting screw 33 to push the main mechanical arm 3 up. After moving up to the appropriate position, turn the second adjusting screw 34 to press against the main mechanical arm 3. Then lock the position of the main mechanical arm 3 with the locking screws 32.

[0065] As can be seen from the above process, when using it, such as Figure 2 As shown, when in the docking position, the first adjusting screw 33 can provide a downward pulling force to the mechanical main arm 3, and the second adjusting screw 34 can provide an upward pushing force to the mechanical main arm 3. Under the action of these two forces, the mechanical main arm 3 can be limited, so that no personnel are needed to support the mechanical main arm 3, which facilitates the adjustment of the position of the mechanical main arm 3.

[0066] When the robotic arm 3 self Figure 2 When the position shown is rotated 180 degrees clockwise to reach the maintenance position, the mechanical main arm 3 tends to continue rotating clockwise under the action of gravity. The first adjusting screw 33 is subjected to the tension of the mechanical main arm 3 and the rotating shaft assembly 23, and together with the locking screw 32, it locks the position of the mechanical main arm 3 relative to the rotating shaft assembly 23.

[0067] Specifically, the second adjusting screw 34 can be configured as one, or as two, three, four, or more.

[0068] In at least one embodiment, two second adjusting screws 34 are configured, with the two second adjusting screws 34 located on both sides of the first adjusting screw 33, thereby supporting the mechanical main arm 3 from both sides of the first adjusting screw 33.

[0069] In some embodiments, such as Figure 4 As shown, the rotating shaft assembly 23 includes a shaft body 231, a limiting ring 232, and a connecting seat 233, wherein:

[0070] The power input end of the shaft 231 is connected to the reduction mechanism 22 so that the shaft 231 can be rotated under the drive of the drive mechanism 2.

[0071] The mechanical main arm 3 is tunably connected to the connecting seat 233 in a direction perpendicular to its own rotation axis. One side of the connecting seat 233 is provided with a protrusion that slides with the through groove of the mechanical main arm 3, and the other side is connected to the limiting ring 232 by screws or other structures.

[0072] The limiting ring 232 is locked onto the shaft 231 to lock the axial position of the connecting seat 233 relative to the shaft 231.

[0073] The aforementioned rotating shaft assembly 23 has a simple structure and can lock the axial position of the mechanical main arm 3 while driving the mechanical main arm 3 to rotate, thus ensuring the operational stability of the mechanical main arm 3.

[0074] The limiting ring 232 may include an upper ring body and a lower ring body. The upper ring body and the lower ring body are fastened together to form a circular channel for the shaft 231 to pass through. The upper ring body and the lower ring body can be locked together by a structure such as screws, so that the upper ring body and the lower ring body clamp the shaft 231.

[0075] Specifically, the surface of the limiting ring 232 that contacts the shaft 231 may be provided with a rubber pad to increase the friction with the shaft 231.

[0076] In some embodiments, the power input end of the shaft 231 can be as follows: Figure 4 The end of shaft 231 is shown.

[0077] In some other embodiments, the power input end of the shaft 231 may also be located in the middle of the shaft 231, that is, the reduction mechanism 22 is connected to the middle of the shaft 231.

[0078] In some embodiments, such as Figure 4 and Figure 5 As shown, the frame 1 is provided with a first limiting member 11 and a second limiting member 12. The first limiting member 11 and the second limiting member 12 are used to cooperate in limiting the rotation angle of the rotating shaft assembly 23, so as to play a mechanical limiting role when the load is accidentally over-limited during the flipping process.

[0079] Specifically, the rotating shaft assembly 23 is provided with a protrusion 234. When the mechanical main arm 3 rotates to the docking position, the protrusion 234 just contacts the second limiting member 12; when the mechanical main arm 3 rotates to the maintenance position, the protrusion 234 just contacts the first limiting member 11.

[0080] Personnel can adjust the positions of the first limiting member 11 and the second limiting member 12 according to actual needs, thereby limiting the rotation angle of the rotating shaft assembly 23.

[0081] The rotation path of the robotic boom 3 can be divided into three segments: acceleration segment, constant speed segment, and deceleration segment. After acceleration from the maintenance position, the rotation speed of the robotic boom 3 stabilizes and enters the constant speed segment. When it is about to reach the docking position, it enters the deceleration segment to decelerate until it reaches the docking position, and vice versa.

[0082] The flipping robotic arm device also includes a controller (not shown in the figure), which is electrically connected to the power source 21 and is used to control the output of the power source 21.

[0083] like Figure 5 and 6 As shown, a pressure plate 235 is connected to the rotating shaft assembly 23. The pressure plate 235 has a detection surface. An interval segment sensor 13 electrically connected to the controller is provided on the frame 1. The interval segment sensor 13 is located on the side of the pressure plate 235 and is used to detect the detection surface and send an identification signal to the controller. After receiving the identification signal, the controller controls the output of the power source.

[0084] The detection surface includes a first detection surface 2351 and second detection surfaces 2352 located at both ends of the first detection surface 2351. The two second detection surfaces 2352 correspond to the acceleration interval and the deceleration interval, respectively, while the first detection surface 2351 corresponds to the constant speed interval. In use, when the robotic arm 3 is in the acceleration interval or the deceleration interval, the second detection surface 2352 corresponding to the aforementioned interval contacts the interval sensor 13; when the robotic arm 3 is in the constant speed interval, the first detection surface 2351 contacts the interval sensor 13.

[0085] Specifically, such as Figure 6 As shown, the robotic arm 3 is stationary at the docking position, and the second detection surface 2352 on the left side is in contact with the segment sensor 13.

[0086] When the robotic arm 3 rotates from the docking position to the maintenance position, the pressure plate 235 rotates counterclockwise. During the process of the interval sensor 13 contacting the second detection surface 2352 on the left, the robotic arm 3 is in the acceleration interval; after the interval sensor 13 contacts the first detection surface 2351, the robotic arm 3 enters the uniform speed interval; during the process of the interval sensor 13 contacting the second detection surface 2352 on the right, the robotic arm 3 is in the deceleration interval, at which point the robotic arm 3 is about to rotate to the docking position.

[0087] When the robotic arm 3 rotates from the maintenance position to the docking position, the pressure plate 235 rotates clockwise. The section sensor 13 first engages with... Figure 6When the second detection surface 2352 on the right side of the mechanical arm 3 comes into contact, the mechanical arm 3 is in the acceleration zone. After the interval sensor 13 comes into contact with the first detection surface 2351, the mechanical arm 3 enters the uniform speed zone. During the process of the interval sensor 13 coming into contact with the second detection surface 2352 on the left side, the mechanical arm 3 is in the deceleration zone, and at this time the mechanical arm 3 is about to rotate to the docking position.

[0088] It is understood that when the robotic arm 3 is in the maintenance position, one of the second detection surfaces 2352 is aligned with the section sensor 13; when the robotic arm 3 is in the docking position, the other second detection surface 2352 is aligned with the section sensor 13. In some embodiments, the section sensor 13 can be a trigger sensor that sends an identification signal to the controller. Specifically, it can be that the power source is started, and the section sensor 13 is triggered when it moves from the second detection surface of the corresponding acceleration section into the first detection surface, and continuously sends an identification signal to the controller. When the controller receives the identification signal, it maintains the output of the power source at this time, that is, it rotates the robotic arm 3 at a constant speed.

[0089] During continuous operation, the section sensor 13 will move from the first detection surface to the second detection surface, at which point the trigger recognition signal will be terminated. When the controller does not receive the recognition signal, it will control the power source to stop, that is, the mechanical main arm 3 will stop rotating.

[0090] In another embodiment, during one rotation of the robotic arm, the controller records the duration of receiving the identification signal. Since the lengths of the first detection surface 2351 and the second detection surface 2352 are fixed, the speed of the first detection surface 2351 as it passes through is calculated based on the duration recorded by the controller, so as to control the speed of the power source 21 within a suitable range.

[0091] Specifically, such as Figure 6 As shown, the second detection surface 2352 is inclined relative to the first detection surface 2351, and the second detection surface 2352 gradually approaches the section sensor 13 along a direction that gradually approaches the first detection surface 2351. When the section sensor 13 enters the first detection surface 2351, the roller on the section sensor 13 is pressed to the left, triggering the section sensor 13. After receiving the recognition signal, the controller maintains the output of the power source. When the roller on the section sensor 13 enters the second detection surface 2352 at the other end, the roller on the section sensor 13 gradually bounces to the right under the action of its own elastic element, the trigger sensor does not trigger and stops sending the recognition signal. At this time, the controller controls the power source to stop.

[0092] In other embodiments, the segment sensor continuously detects the detection surface and sends identification signals to the controller.

[0093] The first detection surface 2351 and the second detection surface 2352 can be as follows: Figure 6 As shown, the distance between the second detection surface 2352 and the rotation axis of the rotating shaft assembly 23 is a, and the distance between the first detection surface 2351 and the rotation axis of the rotating shaft assembly 23 is b. a is not equal to b. In this way, when different detection surfaces contact the segment sensor 13, different triggering effects can be achieved on the segment sensor 13.

[0094] Specifically, the first detection surface 2351 is curved into an arc shape, and the distance between each part of the first detection surface 2351 and the rotation axis of the rotating shaft assembly 23 is equal; the second detection surface 2352 is an inclined surface, and the distance between each part of the second detection surface 2352 and the rotation axis of the rotating shaft assembly 23 gradually increases along the direction that gradually approaches the first detection surface 2351.

[0095] In some other embodiments, the first detection surface 2351 and the second detection surface 2352 may be located on the end face of the pressure plate 235. The end face of the pressure plate 235 opposite to the first detection surface 2351 and the second detection surface 2352 is a plane, and the function of the trigger segment sensor 13 is realized by the thickness change of the pressure plate 235 at the first detection surface 2351 and the second detection surface 2352.

[0096] Specifically, the thickness of the pressure plate 235 at the first detection surface 2351 can remain unchanged, while the thickness of the pressure plate 235 at the second detection surface 2352 can gradually decrease along the direction that gradually moves away from the first detection surface 2351.

[0097] Among them, the section sensor 13 can be an existing pressure sensor with a pressure roller, or an infrared ranging sensor, etc.

[0098] Because the distance between the first detection surface and the second detection surface and the rotation axis of the rotating shaft assembly 23 is different, or because the thickness of the first detection surface and the second detection surface varies, the detection stroke of the interval segment sensor 13 is different in the corresponding detection surface portion.

[0099] When the interval sensor 13 is a pressure sensor, the pressure value fed back by the sensor varies depending on the detection stroke. The feedback pressure value on the second detection surface of the interval sensor 13 gradually increases in the acceleration interval; the feedback pressure value on the first detection surface of the interval sensor 13 in the constant speed interval is uniform; and the feedback pressure value on the second detection surface of the interval sensor 13 in the deceleration interval gradually decreases. Furthermore, the controller presets a corresponding speed signal based on the pressure value fed back by the interval sensor 13. At this time, the identification signal corresponds to the pressure value fed back by the pressure sensor. After receiving the identification signal, the controller outputs a speed signal to the power source 21 to control the output of the power source 21, that is, to control the rotational speed of the mechanical arm 3.

[0100] Initially, when the power source is started, the pressure reported by the section sensor in the acceleration zone is F1, and the corresponding rotational speed of the mechanical arm 3 is 0. After the power source 21 starts, the mechanical arm 3 gradually accelerates, and the pressure value reported by the section sensor 13 gradually increases. When the pressure reported by the section sensor 13 increases to F2, the mechanical arm enters the constant speed zone from the acceleration zone. F2 corresponds to the set speed V. While the mechanical arm is in the constant speed zone, F2 remains unchanged, causing the mechanical arm 3 to rotate at a constant speed. As operation continues, the pressure reported by the section sensor will decrease, and the mechanical arm 3 will enter the deceleration zone from the constant speed zone. The speed of the mechanical arm will gradually decrease from V until it reaches 0. When the rotational speed of the mechanical arm 3 reaches 0, the pressure reported by the section sensor 13 is F1, indicating that the rotation of the mechanical arm 3 has ended.

[0101] When the interval sensor 13 is an infrared ranging sensor, the distance value fed back by the infrared ranging sensor varies depending on the detection stroke. During rotation, the distance value of the second detection surface of the interval sensor 13 corresponding to the acceleration interval gradually decreases; the distance value of the first detection surface of the interval sensor 13 corresponding to the constant speed interval is uniform; and the distance value of the second detection surface of the interval sensor corresponding to the deceleration interval gradually increases.

[0102] Furthermore, the interval sensor 13 presets a corresponding speed signal based on the detected distance value. After receiving the identification signal, the controller outputs a speed signal to the power source 21 to control the output of the power source 21, that is, to control the rotational speed of the mechanical arm 3. At this time, the identification signal corresponds to the distance value fed back by the infrared ranging sensor.

[0103] Initially, when power source 21 is started, the distance value fed back by segment sensor 13 in the acceleration segment is L1, and the rotational speed of the mechanical arm 3 corresponding to L1 is 0. After power source 21 is started, the mechanical arm 3 gradually accelerates, and the distance value fed back by segment sensor 13 increases; until the distance value fed back by segment sensor 13 increases by L2, at which point the mechanical arm enters the constant speed segment from the acceleration segment. L2 corresponds to the set speed V. When the mechanical arm is in the constant speed segment, L2 remains unchanged, causing the mechanical arm 3 to rotate at a constant speed. As operation continues, the distance value fed back by segment sensor 13 will decrease, at which point the mechanical arm 3 enters the deceleration segment from the constant speed segment. In the deceleration segment, the speed of the mechanical arm 3 will gradually decrease from V until it reaches 0. When the speed of the mechanical arm becomes 0, the distance value fed back by segment sensor 13 is L1, that is, the rotation of the mechanical arm 3 ends.

[0104] In some embodiments, such as Figure 5As shown, the main mechanical arm 3 has an adapter plate 35 for mounting the auxiliary arm 5. The position of the adapter plate 35 relative to the main mechanical arm 3 is adjustable in a direction parallel to the rotation axis of the main mechanical arm 3, so as to realize the left and right horizontal adjustment function.

[0105] It should be noted that there are various structures that can achieve the adjustment of the position of the adapter plate 35 in a certain direction. For example, the main mechanical arm 3 is provided with a waist-shaped groove, and the adapter plate 35 is provided with a bolt that passes through the waist-shaped groove. The bolt can be locked or unlocked by a nut to achieve the position adjustment of the adapter plate 35; or the main mechanical arm 3 is provided with multiple first through holes in a direction parallel to the rotation axis of the main mechanical arm 3, and the adapter plate 35 is provided with a second through hole. The position adjustment of the adapter plate 35 can be achieved by connecting the second through hole with a suitable first through hole through a bolt and nut structure.

[0106] Of course, the structures that can achieve the above functions are not limited to the two mentioned above. Any structure that can adjust the position of the adapter plate 35 in the above-mentioned directions is within the scope of protection of this application.

[0107] Specifically, such as Figure 5 As shown, the mechanical main arm 3 includes a front connecting plate 36 and two side plates 37 respectively connected to both sides of the front connecting plate 36. The positions of the two side plates 37 relative to the drive mechanism 2 are adjustable, and the adapter plate 35 is adjustablely mounted on the front connecting plate 36.

[0108] The auxiliary arm 5 can be bolted to the adapter plate 35, thereby enabling the auxiliary arm 5 to be detachably connected.

[0109] In some embodiments, such as Figure 7 and Figure 8 As shown, the auxiliary arm 5 includes a gripping arm body 51, a limiting structure 52, and an adjustment structure 53 for mounting the testing machine 4. The gripping arm body 51 is used to connect with the main mechanical arm 3. A receiving space for accommodating the testing machine 4 is formed inside the gripping arm body 51. The side of the gripping arm body 51 facing the receiving space is the inner surface of the gripping arm body 51, and the opposite side is the outer surface of the gripping arm body 51. The adjustment structure 53 slides with the gripping arm body 51 along the X direction. The adjustment structure 53 has a mounting plane 5331 for contacting the testing machine 4. The mounting plane 5331 is adjustable along the Y direction and adjustable in angle with the X, Y, and Z directions as axes. The X, Y, and Z directions are perpendicular to each other. The limiting structure 52 is used to limit the X-direction position of the adjustment structure 53 relative to the gripping arm body 51.

[0110] The mechanical arm provided in the above embodiment can adjust the position of the testing machine 4 in the following degrees of freedom: 1) movement along the X-axis; 2) movement along the Y-axis; 3) adjustable rotation angle about the X-axis; 4) adjustable rotation angle about the Y-axis; 5) adjustable rotation angle about the Z-axis. This effectively reduces the adjustment of the mechanical main arm 3 itself, making adjustment simpler and more convenient. Furthermore, by adjusting the position and angle of the mounting plane 5331, it can be adapted to more types of testing machines, resulting in greater installation versatility.

[0111] The following is a detailed description of the structure of the limiting structure 52:

[0112] It should be noted that any structure that can limit the position of the adjustment structure 53 relative to the arm body 51 in the X direction can be the limiting structure 52 mentioned in the above embodiments. For example, the limiting structure may include a bolt and a nut, the adjustment structure 53 has a through hole for the bolt to pass through, the arm body 51 has a through groove along the Y direction, the bolt passes through the through hole and is locked by the nut, and the position of the adjustment structure is adjusted by loosening or tightening the nut; or the limiting structure 52 includes telescopic rods located on both sides of the adjustment structure 53 along the Y direction, and the telescopic rods limit the position of the adjustment structure 53 by their own extension and retraction.

[0113] by Figure 7 Taking this example, the limiting structure 52 may include a fixing block 521 located on both sides of the adjusting structure 53 along the X direction and a first screw 522 threadedly connected to the fixing block 521. The fixing block 521 can be installed on the arm body 51 by screws or other connecting parts, and the first screw 522 passes through the fixing block 521 and abuts against the side wall of the adjusting structure 53.

[0114] In use, the two first screws 522 can be turned first so that the ends of the two first screws 522 gradually move away from the side wall of the adjustment structure 53. Then, the position of the adjustment structure 53 is adjusted along the X direction. After the adjustment is completed, the two first screws 522 are turned first so that the ends of the two first screws 522 gradually approach and contact the side wall of the adjustment structure 53, thus limiting the X-direction position of the adjustment structure 53.

[0115] The structure of the adjustment structure 53 is described in detail below:

[0116] In some embodiments, such as Figure 8 As shown, the adjusting structure 53 includes a ball bearing 5316 and a bushing seat 5317 fixedly installed on the inner ring of the ball bearing 5316. The outer wall of the ball bearing 5316 is provided with a rotating spherical surface, and the bushing seat 5317 passes through the ball bearing 5316 and through the center of the ball bearing 5316. Both ends of the bushing seat 5317 are located outside the ball bearing 5316.

[0117] In use, the mounting plane 5331 is adjustable relative to the bushing seat 5317 along the Y direction, and the ball bearing 5316 can adjust the angle of the bushing seat 5317 with the X, Y and Z directions as axes, thereby realizing the angle adjustment of the mounting plane 5331 with the X, Y and Z directions as axes.

[0118] Based on the above embodiments, such as Figure 8 As shown, the adjustment structure 53 includes an adjustment component 531 and a mounting component, wherein:

[0119] The ball bearing 5316 is embedded in the adjusting component 531. The rotating spherical surface of the ball bearing 5316 is in rotational engagement with the adjusting component 531 around the center of the ball bearing 5316. The adjusting component 531 is in sliding engagement with the arm body 51 along the X direction.

[0120] The mounting component can slide relative to the bushing seat 5317 along the Y direction. The mounting component has a mounting plane 5331. The adjustment assembly 531 can adjust the position of the mounting plane 5331 by adjusting the position of the mounting component.

[0121] The aforementioned adjustment structure 53 is simple in structure and has a separate mounting component for contacting the testing machine 4. By adjusting the position of the mounting component, the various degrees of freedom can be adjusted when the testing machine 4 is docked.

[0122] In at least one embodiment, the mounting component is detachably connected to the bushing seat 5317, and the mounting component can be replaced to adapt to different test machines 4, further improving the installation versatility, and it does not require replacing a large number of parts to adapt to different test machines 4.

[0123] Specifically, such as Figure 8 As shown, the mounting component includes a support shaft 532 and a mounting plate 533 mounted on the end of the support shaft 532; the support shaft 532 is slidable relative to the bushing seat 5317 in the Y direction; the mounting plate 533 has a mounting surface 5331.

[0124] The end of the support shaft 532 is vertically fixed to the mounting plate 533.

[0125] In some embodiments, such as Figure 8 As shown, the adjustment assembly 531 includes a limiting member, a fixing cover 5313, and a sliding plate assembly connected to the fixing cover 5313, wherein:

[0126] The sliding plate assembly passes through the through slot of the arm body 51 and slides with the arm body 51 in the X direction. The ball bearing 5316 is installed on the sliding plate assembly, and the end of the mounting part that is away from the mounting plane 5331 extends into the fixed cover 5313.

[0127] The fixed cover 5313 is located on the outside of the arm body 51. The end of the support shaft 532 facing away from the mounting plate 533 extends into the fixed cover 5313. The limiting member extends into the fixed cover 5313 and is movably connected to the fixed cover 5313. The limiting member is used to limit the position of the support shaft 532 along the Y direction and the rotation angle with the X and Z directions as axes.

[0128] In the aforementioned adjustment assembly 531, the structure (i.e., the limiting component) that limits the end of the mounting component is integrated and installed on the fixing cover 5313. Since the fixing cover 5313 is located on the outside of the arm body 51, it facilitates the adjustment of the position of the mounting component by personnel.

[0129] Specifically, the arm body 51 has an upper slide rail 5121 and a lower slide rail 5122 for cooperating with the sliding plate assembly. The upper slide rail 5121 and the lower slide rail 5122 are arranged corresponding to the sliding plate assembly and are distributed at intervals along the Z direction. The extension directions of the upper slide rail 5121 and the lower slide rail 5122 are both parallel to the X direction.

[0130] In some embodiments, such as Figure 8 As shown, the limiting member may include a second screw 5311 and a plurality of third screws 5312, wherein:

[0131] The second screw 5311 is threaded into the fixing cover 5313 and extends into the fixing cover 5313 in the Y direction. When docking with the testing machine 4, the operator can tighten the second screw 5311 so that the mounting surface 5331 on the mounting part can abut against the side of the testing machine 4.

[0132] Each third screw 5312 is threaded into the fixing cover 5313 and extends into the fixing cover 5313. Each third screw 5312 is distributed around the Y direction to limit the rotation angle of the mounting component with the X and Z directions as axes.

[0133] The third screw 5312 can be configured in multiple pairs, such as two pairs, three pairs, four pairs, etc. For ease of operation, the third screw 5312 is preferably configured in two pairs, wherein the first pair is arranged opposite to each other along the X direction, and the second pair is as follows: Figure 8 As shown, they are set relative to each other along the Z-axis.

[0134] When the mounting component is rotated to a suitable angle about the X-axis, the position of the end of the mounting component can be locked by the first pair of third screws 5312; when the mounting component is rotated to a suitable angle about the Z-axis, the position of the end of the mounting component can be locked by the second pair of third screws 5312.

[0135] Specifically, the locking of the second screw 5311 and the third screw 5312 can be achieved by using the nuts on them.

[0136] like Figure 8As shown, the sliding plate assembly may include an adjusting plate 5314 and a sliding plate 5315; the adjusting plate 5314 may be connected between the fixed cover 5313 and the sliding plate 5315 by means of screws or other connecting parts, the adjusting plate 5314 faces the outer surface of the arm body 51, and the adjusting plate 5314 has a through hole for the mounting part to pass through; the sliding plate 5315 slides in the X direction with the inner surface of the arm body 51, and the ball bearing 5316 is mounted on the sliding plate 5315.

[0137] In the above-mentioned sliding plate assembly, the sliding plate assembly is divided into an adjusting plate 5314 and a sliding plate 5315, which facilitates the assembly of the sliding plate assembly with the arm body 51, so that the side arm 512 of the arm body 51 can be clamped between the adjusting plate 5314 and the sliding plate 5315 to form a stable sliding structure.

[0138] The sliding plate 5315 has a first protrusion that mates with the upper slide rail 5121 and a second protrusion that mates with the lower slide rail 5122. The first protrusion is embedded in and slidably connected to the upper slide rail 5121, and the second protrusion is embedded in and slidably connected to the lower slide rail 5122. To achieve axial positioning of the ball bearing 5316, the sliding plate 5315 has a pressure cap 5318, which positions the ball bearing 5316 within the sliding plate 5315.

[0139] Since the bearing on the sliding plate 5315 is a ball bearing 5316, it is possible to make fine adjustments to the angle when the mounting part rotates around the X and Z axes.

[0140] In some embodiments, such as Figure 8 As shown, the adjustment plate 5314 is provided with a friction plate 5319, which is in contact with the outer surface of the arm body 51.

[0141] The friction plate 5319 can increase the friction between the adjustment plate 5314 and the arm body 51, so that after the position of the adjustment structure 53 is adjusted in the X direction during the adjustment process, the adjustment structure 53 can be kept in the preset position.

[0142] In at least one embodiment, the adjusting plate 5314 is provided with a friction plate 5319 on the side facing the arm body 51. The friction plate 5319 is distributed along the Z direction at the top and bottom of the adjusting plate 5314, and the friction plate 5319 can extend along the X direction.

[0143] The friction plate 5319 can be made of materials with a high coefficient of friction, such as rubber.

[0144] The structure of the arm body 51 is described in detail below:

[0145] In some embodiments, such as Figure 7As shown, the arm body 51 includes a forearm 511 and two side arms 512 respectively connected to both ends of the forearm 511. Each side arm 512 is connected to a limit structure 52 and slidably connected to an adjustment structure 53 to achieve clamping and fixing of the testing machine 4 in the Y direction.

[0146] In some embodiments, buffer protrusions 513 are installed on the forearm 511 and both side arms 512. The buffer protrusions 513 can limit and buffer the fixed testing machine 4. At the same time, after the buffer protrusions 513 on both sides clamp the testing machine 4, the rotational degree of freedom of the mounting plane 5331 about the Y-axis no longer needs to be restricted.

[0147] Specifically, each side arm 512 is provided with two buffer protrusions 513, which are located on both sides of the adjustment structure 53, and the two buffer protrusions 513 are of different heights. The forearm 511 is provided with two buffer protrusions 513, which are located at both ends of the forearm 511, and the two buffer protrusions 513 are of the same height.

[0148] Of course, the number of buffer protrusions 513 on the forearm 511 and the two side arms 512 is not limited to the examples above, and personnel can increase or decrease them according to the actual situation.

[0149] The buffer protrusion 513 may include a connecting post and a buffer pad. The connecting post is connected to the arm body 51, and the buffer pad is connected to the end of the connecting post for contact with the testing machine 4.

[0150] A second aspect of the present invention provides a wafer testing device, such as... Figure 9 As shown, the wafer testing equipment provided in the second aspect of the present invention includes a probe station 6, a tester 4, and the above-mentioned flipping robotic arm device. The probe station 6 is fixedly connected to one side of the flipping robotic arm device through a connecting plate 7. The tester 4 is mounted on an auxiliary arm 5, and a motherboard 8 is fixedly mounted on the bottom of the tester 4.

[0151] Since the flipping robotic arm device and the probe station 6 are fixedly connected by the connecting plate 7, there is no need to set up an extra fixed platform at the bottom of the flipping robotic arm device, making the overall equipment structure compact and occupying a small area.

[0152] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A flipping robotic arm device, characterized in that, The device includes a frame (1), a drive mechanism (2), and a mechanical main arm (3). The drive mechanism (2) is mounted on the frame (1) and connected to the mechanical main arm (3) to drive the mechanical main arm (3) to rotate relative to the frame (1). The position of the mechanical main arm (3) relative to the drive mechanism (2) is adjustable in a direction perpendicular to its own rotation axis. An auxiliary arm (5) for carrying a testing machine (4) is mounted on the mechanical main arm (3). The testing machine (4) is adjustablely mounted on the auxiliary arm (5). The auxiliary arm (5) includes a holding arm body (51) and an adjustment structure (53) for mounting the test machine (4). The arm body (51) is used to connect with the mechanical main arm (3) and has a through groove along the Y direction; The adjustment structure (53) includes a ball bearing (5316) and a bushing seat (5317) fixedly installed on the inner ring of the ball bearing (5316); it also includes a mounting component, a limiting component, a fixing cover (5313) and a sliding plate assembly connected to the fixing cover (5313); The mounting component includes a support shaft (532) and a mounting plate (533) mounted on the end of the support shaft (532); the support shaft (532) is slidable relative to the bushing seat (5317) in the Y direction; the mounting plate (533) has a mounting surface (5331) for contacting and engaging with the testing machine (4); the sliding plate assembly passes through the through groove of the arm body (51) and slides in cooperation with the arm body (51) in the X direction; the ball bearing ( 5316) is installed on the sliding plate assembly; the fixed cover (5313) is located on the outside of the arm body (51), the end of the support shaft (532) away from the mounting plate (533) extends into the fixed cover (5313), the limiting member extends into the fixed cover (5313) and is movably connected to the fixed cover (5313), the limiting member is used to limit the position of the support shaft (532) along the Y direction and the rotation angle with the X and Z directions as axes.

2. The flipping robotic arm device according to claim 1, characterized in that, The drive mechanism (2) includes a power source (21), a reduction mechanism (22), and a rotating shaft assembly (23) rotatably connected to the frame (1). The power source (21) is mounted on the frame (1). The power output end of the power source (21) is connected to the power input end of the rotating shaft assembly (23) through the reduction mechanism (22) so that the power source (21) drives the rotating shaft assembly (23) to rotate through the reduction mechanism (22). The mechanical arm (3) is tunably connected to the rotating shaft assembly (23) in a direction perpendicular to its own rotation axis.

3. The flipping robotic arm device according to claim 2, characterized in that, The mechanical main arm (3) slides in a direction perpendicular to its own rotation axis with the rotating shaft assembly (23). One of the mechanical main arm (3) and the rotating shaft assembly (23) is provided with a waist-shaped groove (31), and the other is connected with a locking screw (32) that matches the waist-shaped groove (31). The length direction of the waist-shaped groove (31) is set along the sliding direction of the mechanical main arm (3), and the locking screw (32) can slide relative to the waist-shaped groove (31).

4. The flipping robotic arm device according to claim 3, characterized in that, The mechanical main arm (3) has a first adjusting screw (33) and a second adjusting screw (34). The first adjusting screw (33) passes through the through hole on the mechanical main arm (3) and is threadedly connected to the rotating shaft assembly (23). The second adjusting screw (34) passes through the threaded hole on the mechanical main arm (3) and abuts against the rotating shaft assembly (23). The first adjusting screw (33) and the second adjusting screw (34) are respectively used to apply opposite forces to the rotating shaft assembly (23).

5. The flipping robotic arm device according to claim 2, characterized in that, The rotating shaft assembly (23) includes a shaft (231), a limiting ring (232), and a connecting seat (233). The power input end of the shaft (231) is connected to the reduction mechanism (22). The mechanical main arm (3) is tunably connected to the connecting seat (233) in a direction perpendicular to its own rotation axis. The connecting seat (233) is connected to the limiting ring (232). The limiting ring (232) is locked onto the shaft (231) to lock the position of the connecting seat (233) relative to the shaft (231).

6. The flipping robotic arm device according to claim 2, characterized in that, The power input end of the shaft assembly (23) is located at the end of the shaft assembly (23) or in the middle of the shaft assembly (23).

7. The flipping robotic arm device according to claim 2, characterized in that, The frame (1) is provided with a first limiting member (11) and a second limiting member (12), which are used to limit the rotation angle of the rotating shaft assembly (23).

8. The flipping robotic arm device according to claim 2, characterized in that, It also includes a controller for controlling the output of the power source (21) and a segment sensor (13) for detecting the position of the mechanical arm (3). The beginning and end of the rotation path of the mechanical main arm (3) have acceleration intervals and deceleration intervals, respectively; The rotating shaft assembly (23) is connected to a pressure plate (235). The pressure plate (235) has a first detection surface (2351) and second detection surfaces (2352) located at both ends of the first detection surface (2351). The two second detection surfaces (2352) correspond to the acceleration interval and the deceleration interval, respectively. The interval sensor (13) is located on one side of the pressure plate (235). The interval sensor (13) detects the test surface and sends an identification signal to the controller through the first detection surface (2351) and the two second detection surfaces (2352). The controller controls the output of the power source (21) through the identification signal.

9. The flipping robotic arm device according to any one of claims 1-8, characterized in that, The main mechanical arm (3) has an adapter plate (35) for mounting the auxiliary arm (5), and the position of the adapter plate (35) relative to the main mechanical arm (3) is adjustable in a direction parallel to the rotation axis of the main mechanical arm (3).

10. The flipping robotic arm device according to claim 1, characterized in that, The auxiliary arm (5) includes a limiting structure (52); The limiting structure (52) is used to adjust the position of the adjusting structure (53) relative to the arm body (51) in the X direction. The mounting plane (5331) is adjustable along the Y direction and adjustable in angle with the X, Y and Z directions as axes. The X, Y and Z directions are perpendicular to each other.

11. A wafer testing device, characterized in that, The wafer testing equipment includes the flipping robotic arm device as described in any one of claims 1-10, and further includes a probe station (6) and a tester (4). The probe station (6) is fixedly connected to one side of the flipping robotic arm device via a connecting plate (7), and the tester (4) is mounted on the auxiliary arm (5).

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