Hot wire system and horizontal HWCVD equipment

Abstract

The present invention discloses a hot wire system and a horizontal HWCVD device. The hot wire system is used in the horizontal HWCVD device, wherein the horizontal HWCVD device has a coating chamber, a substrate carrier for placing a substrate is disposed in the coating chamber, the substrate carrier is horizontally supported and runs along a first direction, the hot wire system is disposed in the upper part in the vertical direction of the coating chamber and extends along the first direction and a second direction orthogonal to the first direction, the hot wire system includes a plurality of hot wire feeding units, and the plurality of hot wire feeding units are respectively disposed along the first direction and the second direction. The hot wire system of the present invention can maintain the stability of the coating process and improve the stability of system use.

Description

Technical Field

[0001] The present invention relates to the field of coating technologies, and in particular, to a hot wire system and a horizontal HWCVD device. Background Art

[0002] Hot wire chemical vapor deposition (HWCVD) technology has strong advantages in terms of thin film preparation cost, compound semiconductors, stability, etc. due to its process characteristics such as low-temperature growth on the substrate surface, high utilization rate of process gases, high growth rate, no plasma bombardment damage, good passivation effect, and suitability for large-area thin film growth. Its application fields involve GaAs, ferroelectric, Si-based ICs, thin film transistors (TFTs), high-efficiency solar cells, etc.

[0003] The principle of an HWCVD device is to utilize the high temperature and catalytic action of a hot wire. The reaction gas cracks on the surface of the hot wire, and its products are deposited on the surface of a coating object such as a substrate, thereby obtaining the required solid thin film. Since the temperature of the hot wire is as high as 1700 - 1800 °C during the reaction process, the hot wire will soften at high temperatures. Therefore, the hot wire system of existing HWCVD devices is usually vertically arranged on both sides of the coating chamber, and the axis of the hot wire extends in the vertical direction. Thus, even if the hot wire softens, due to the action of gravity, it can extend in a straight line. However, the problem with HWCVD devices with a vertically arranged hot wire system is that the substrate needs to be fixed to a tray through, for example, a cover plate. This will result in the part blocked by the cover plate not being coated.

[0004] In addition, a horizontal HWCVD device has been proposed. In a horizontal HWCVD device, the hot wire system is horizontally arranged. In such an HWCVD device, the substrate can be placed horizontally, and the substrate can be coated more effectively. However, other problems have also arisen simultaneously. For example, in such a horizontal HWCVD device, the hot wire needs to extend horizontally and span the coating area. Since the length of the hot wire is relatively long, the hot wire will heat up and soften and sag. The sag of the hot wire will cause the distance between the hot wire and the substrate to change, thereby affecting the coating process.

[0005] In addition, although some structures for suppressing the sag of the hot wire due to heating and softening have been proposed, such as structures adding springs, support blocks, etc. However, these structures are prone to cause the hot wire to break at high temperatures, etc., and further affect the stability of the operation of the device. Summary of the Invention

[0006] The present invention aims to solve at least one of the problems in the prior art to some extent. For this purpose, the present invention proposes a hot wire system that can be applied in a horizontal HWCVD device, which can maintain the stability of the coating process and improve the stability of system use. In addition, the present invention also proposes a horizontal HWCVD device having this hot wire system.

[0007] The hot wire system according to the first aspect of the present invention is used in a horizontal HWCVD device, wherein the horizontal HWCVD device has a coating chamber, a substrate carrier is disposed in the coating chamber, the substrate carrier is horizontally supported and runs along a first direction, the hot wire system is disposed in the upper part of the coating chamber in the vertical direction and extends along the first direction and a second direction orthogonal to the first direction, and the hot wire system includes a plurality of hot wire feeding units, and the plurality of hot wire feeding units are respectively disposed along the first direction and the second direction.

[0008] The hot wire system according to one aspect of the present invention has the following beneficial effects: it can maintain the stability of the coating process and improve the stability of system use.

[0009] In some embodiments, the hot wire feeding units are arranged in a rectangular array and disposed along the first direction and the second direction.

[0010] In some embodiments, a cover plate for sealing the coating chamber is provided in the upper part of the coating chamber in the vertical direction, and the hot wire system is disposed on the side of the cover plate facing the coating chamber.

[0011] In some embodiments, the hot wire feeding units of the hot wire system are connected in series to form a loop.

[0012] In some embodiments, the plurality of hot wire feeding units of the hot wire system are divided into multiple groups, and the hot wire feeding units of each group are respectively connected in series to form independent loops.

[0013] In some embodiments, the hot wire feeding unit includes a hot wire, and the hot wire has a middle portion and two connecting end portions respectively located at both ends in the length direction of the middle portion; the middle portion extends linearly along the second direction; the two connecting end portions are respectively bent relative to the middle portion.

[0014] In some embodiments, the length of the middle portion is 30 mm or more and 400 mm or less.

[0015] In some embodiments, the two connecting end portions are respectively bent by 90° relative to the middle portion.

[0016] In some embodiments, the hot wire feeding unit further includes two fasteners, and the two fasteners are respectively mounted on the cover plate. The fasteners have hot wire mounting portions and power feeding portions. The hot wire mounting portions are arranged such that when the fasteners are mounted on the cover plate, the hot wire mounting portions are located at the lower ends in the vertical direction of the fasteners; the two connecting end portions are respectively fastened to the hot wire mounting portions and are electrically connected to a power source via the power feeding portions.

[0017] The horizontal HWCVD device according to the second aspect of the present invention has the hot wire system of any one of the above. Description of the Drawings

[0018] Figure 1 It is a top view of an embodiment of the hot wire system of the present invention.

[0019] Figure 2 It is Figure 1 a perspective view of the hot wire system of

[0020] Figure 3 It is Figure 2 a schematic diagram of a series circuit of the hot wire system of

[0021] Figure 4 It is Figure 1 a schematic diagram of an embodiment of the hot wire feeding unit of the hot wire system of

[0022] Figure 5 It is Figure 4 a schematic diagram of an embodiment of the hot wire in

[0023] Figure 6 It is to Figure 4 install the hot wire in

[0024] Figure 7 a schematic diagram of an embodiment of a horizontal HWCVD device having the hot wire system of the present invention. Detailed Embodiment

[0025] The embodiments of the present embodiment will be described in detail below. The examples of the embodiments are shown in the drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are only used to explain the present embodiment and should not be construed as limiting the present embodiment.

[0026] In the description of the present embodiment, it should be understood that the orientation or positional relationship indicated by terms such as up, down, front, back, left, right, etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present embodiment and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present embodiment.

[0027] In the description of this embodiment, "several" means one or more, "multiple" means more than two, and understandings such as "greater than", "less than", "exceeding", etc. do not include the present number, and understandings such as "above", "below", "within", etc. include the present number. If there is a description of "first" and "second", it is only for the purpose of distinguishing technical features and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or implicitly indicating the sequence relationship of the indicated technical features.

[0028] In the description of this embodiment, unless otherwise clearly defined, words such as "arrangement", "installation", "connection", etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above words in this embodiment in combination with the specific content of the technical solution.

[0029] Refer to Figures 1 to 7 , and mainly refer to Figures 1 to 3 , and additionally refer to Figure 7 , according to the hot wire system 400 of the first embodiment, it is used in the horizontal HWCVD device 200. Among them, the horizontal HWCVD device 200 has a coating chamber 208. A carrier plate 204 for placing the substrate 203 is disposed in the coating chamber 208. The carrier plate 204 is horizontally supported and runs along a first direction (the front-back direction in the drawing). The hot wire system 400 of this embodiment is arranged in the upper part in the vertical direction (the up-down direction in the drawing) of the coating chamber 208 and extends along the first direction and a second direction orthogonal to the first direction (the left-right direction in the drawing) to a position that can span the carrier plate 204, for example. The hot wire system 400 includes a plurality of hot wire feeding units 300, and the plurality of hot wire feeding units 300 are respectively arranged along the first direction and the second direction.

[0030] According to the hot wire system 400 of this embodiment, the stability of the coating process can be maintained and the stability of system use can be improved. Specifically, in the hot wire system 400 of this embodiment, by arranging the hot wire system 400 in the upper part in the vertical direction of the coating chamber 208 and being composed of a plurality of hot wire feeding units 300, thus, the length of the hot wire 201 (described later) of each hot wire feeding unit 300 can be shortened. Since the hot wire 201 can be formed shorter, without other auxiliary structures, the situation where the hot wire 201 sags due to heating and softening can also be suppressed. Thus, the stability of the coating process of the horizontal HWCVD device 200 can be maintained. In addition, since each hot wire feeding unit 300 can suppress the situation where the hot wire 201 sags due to heating and softening without other auxiliary structures, therefore, the risk of the hot wire 201 breaking caused by using an additional device for suppressing the sagging of the hot wire 201 due to heating and softening can be reduced. Thus, the reliability and stability of the use of the hot wire system 400 can be improved, thereby improving the stability of the horizontal HWCVD device 200.

[0031] In addition, since the hot wire system 400 has multiple hot wire feeding units 300, the area of the hot wire system 400 can be flexibly adjusted according to the size of the coating area required by the substrate 203. Thus, parameters such as the power required by the hot wire system 400 can be adjusted more precisely.

[0032] At the upper part in the vertical direction of the coating chamber 208 of the horizontal HWCVD apparatus 200, a cover plate 202 for sealing the coating chamber 208 is provided. On the side of the cover plate 202 facing the carrier plate 204, a gas distribution structure or the like is provided. The carrier plate 204 for horizontally placing the substrate 203 is located at the lower part in the vertical direction of the coating chamber 208.

[0033] Continue to refer to Figure 7 , the hot wire system 400 of the present embodiment is installed at the upper part in the vertical direction of the coating chamber 208 of the horizontal HWCVD apparatus 200. More specifically, each hot wire feeding unit 300 of the hot wire system 400 is respectively arranged on the side of the cover plate 202 facing the coating chamber 208. By arranging each hot wire feeding unit 300 of the hot wire system 400 on the cover plate 202, the size of the hot wire 201 of each hot wire feeding unit 300 can be easily shortened. For example, since the hot wire feeding unit 300 is arranged on the cover plate 202, the hot wire 201 can be arranged with a shorter length without considering the operating position of the carrier plate 204 for placing the substrate 203. When the hot wire 201 can be set to be shorter, it is not necessary to use a tensioning member such as a spring or a support block, etc., and the sagging of the hot wire 201 due to heating and softening can also be suppressed. Therefore, the risk of breakage of the hot wire 201 caused by using an additional device for suppressing the sagging of the hot wire 201 due to heating and softening can be reduced.

[0034] Continue to refer to Figures 1 to 3 , in order to ensure the heating uniformity of the hot wire system 400 in the coating chamber 208, and ensure that the hot wire system 400 straddles the entire carrier plate 204 in both the first direction (front - rear direction) and the second direction (left - right direction), the hot wire feeding units 300 can be arranged in a rectangular array along the front - rear direction and the left - right direction. Specifically, for example, the main heating part (the middle part 207, described later) of each hot wire 201 in each hot wire feeding unit 300 can extend in the left - right direction. That is, a plurality of hot wire feeding units 300 are respectively arranged in the front - rear direction, and a plurality of them are also respectively arranged in the left - right direction. Thus, in a top - down view, the entire hot wire system 400 is formed in a rectangular shape with a length in the front - rear direction and a width in the left - right direction respectively larger than the length and width of the carrier plate 204. Thus, the hot wire system 400 can straddle the entire carrier plate 204.

[0035] In addition, the hot wire system 400 can also be arranged in the left-right direction and the front-back direction in such a way that the hot wire feeding units 300 between two adjacent rows (for example, the left-right direction is the row direction) or two adjacent columns (for example, the front-back direction is the column direction) are displaced from each other.

[0036] Continuing to refer to Figure 3 、 Figure 4 , for example, a terminal 211 is provided on the cover plate 202. When each hot wire feeding unit 300 is installed on the cover plate 202, it is respectively connected to the terminal 211. In addition, the hot wire feeding units 300 of the hot wire system 400 can be connected in series to form a loop. For example, an external power supply access terminal 401 and an external power supply output terminal 402 are provided on the cover plate 202. The external power supply access terminal 401 is connected in series with the adjacent hot wire feeding unit 300, and the external power supply output terminal 402 is also connected in series with the adjacent hot wire feeding unit 300. In addition, between two adjacent hot wire feeding units 300, they are connected in series through a conductive member 403 such as a copper bar. Thus, the hot wire feeding units 300 of the hot wire system 400 can be connected in series to form a loop.

[0037] In addition, the multiple hot wire feeding units 300 of the hot wire system 400 can also be divided into multiple groups, and the hot wire feeding units 300 in each group are respectively connected in series to form independent loops. Specifically, the hot wire system 400 can be divided into multiple subsystems, and each subsystem can also be arranged in a rectangular array layout in the front-back direction and the left-right direction. Each subsystem is respectively connected to an independent external power supply access terminal 401 and an independent external power supply output terminal 402, and the hot wire feeding units 300 of each subsystem are respectively connected in series through a conductive member 403 such as a copper bar. Thus, the hot wire system 400 can form multiple subsystems that can be fed with independent power supplies. In this case, the hot wire system 400 can independently and flexibly adjust the on / off of each subsystem, or the magnitude of the power, etc., according to the specific coating process, the size of the substrate 203, etc. For example, when the number of substrates 203 is small and the size is small, some subsystems can be turned off to reduce the power consumption of the hot wire system 400, etc.

[0038] The following refers to Figures 4 to 6 , and various embodiments of the hot wire feeding unit 300 will be described.

[0039] The hot wire feeding unit 300 may include: two fasteners 205 and a hot wire 201. The two fasteners 205 are respectively installed on the upper part in the vertical direction of the coating chamber 208 of the horizontal HWCVD device 200. The fastener 205 has a hot wire 201 mounting portion 209 and a power feeding portion 210. The hot wire 201 mounting portion 209 is arranged such that when the fastener 205 is installed on the upper part in the vertical direction of the coating chamber 208 of the horizontal HWCVD device 200, the hot wire 201 mounting portion 209 is located at the lower end in the vertical direction of the fastener 205. The hot wire 201 has two connecting ends 206 and an intermediate portion 207, and the two connecting ends 206 are respectively bent relative to the intermediate portion 207. The two connecting ends 206 are respectively fastened to the hot wire 201 mounting portion 209 and are electrically connected to the power supply via the power feeding portion 210. In the state of being installed on the horizontal HWCVD device 200, the intermediate portion 207 extends in the horizontal direction (the left - right direction in the drawing) at the upper part in the vertical direction of the coating chamber 208, and the intermediate portion 207 is the main part of the hot wire 201 for heating the reaction gas.

[0040] In the hot wire feeding unit 300 of the present embodiment, since the two connecting ends 206 of the hot wire 201 are bent relative to the intermediate portion 207, the hot wire 201 can be easily installed directly above the coating chamber 208 in the vertical direction. In this case, even if the intermediate portion 207 of the hot wire 201 is set to be short, by increasing the number of hot wire feeding units 300, the entire hot wire 201 can cover the entire coating chamber 208 without considering problems such as possible interference with the carrier plate 204 for placing the substrate 203 in the coating chamber 208.

[0041] That is, in the hot wire feeding unit 300 of the present embodiment, a shorter hot wire 201 can be used without additionally increasing a device for suppressing the sagging of the hot wire 201 due to heating and softening, and thereby the breakage of the hot wire 201 can be suppressed.

[0042] The fastener 205 of the hot wire feeding unit 300 is installed on the side of the cover plate 202 of the coating chamber 208 of the horizontal HWCVD device 200 facing the coating chamber 208. For example, a wiring terminal 211 of an external power supply is provided on the cover plate 202. When the fastener 205 is installed on the cover plate 202, the connecting end 206 of the hot wire 201 is electrically connected to the wiring terminal 211 of the external power supply.

[0043] Continue to refer to Figure 4 、 Figure 6, in order to easily install the hot wire 201 directly above the vertical direction of the coating chamber 208, the fastener 205 can be, for example, a cylindrical shape with a columnar outer periphery. One axial end of the fastener 205 is provided with a first mounting hole 212 as the mounting portion 209 of the hot wire 201. The other axial end of the fastener 205 is provided with a second mounting hole 213 as the power feeding portion 210, and a terminal 211 is inserted into the second mounting hole 213. In a state where the connecting end portion 206 of the hot wire 201 is fastened in the first mounting hole 212, the connecting end portion 206 is electrically connected to the terminal 211. The first mounting hole 212 and the second mounting hole 213 respectively extend along the axial direction of the fastener 205, and the first mounting hole 212 and the second mounting hole 213 communicate with each other. The connecting end portion 206 of the hot wire 201 can be directly inserted into the first mounting hole 212 and tightened by, for example, a set screw (not marked in the drawings), etc., thereby enabling the hot wire 201 to be easily installed in the fastener 205. The terminal 211 of the external power supply is, for example, embedded in the cover plate 202 and extends to the side of the cover plate 202 facing the coating chamber 208. When installing the fastener 205 on the cover plate 202, the second mounting hole 213 of the fastener 205 can be directly fitted and installed with the terminal 211, that is: the terminal 211 is inserted into the second mounting hole 213 and electrically connected to the connecting end portion 206 of the hot wire 201. In order to reliably electrically connect the hot wire 201 and the terminal 211, a finger spring 214, etc. can be installed in the second mounting hole 213.

[0044] Continue to refer to Figure 5 , in order to easily achieve the state where the entire hot wire feeding unit 300 is installed on the horizontal HWCVD device 200, the middle portion 207 of the hot wire 201 extends horizontally along the upper part of the vertical direction of the coating chamber 208. The included angles between the two connecting end portions 206 of the hot wire 201 and the middle portion 207 can be 90° respectively. For example, in a specific embodiment, the hot wire 201 is substantially bent into a U shape. Of course, it should be noted that 90° is only a design value, and during actual processing, this included angle may deviate from the design value. For example, within the allowable deviation range (such as 90° ± 5°), it is still considered that the included angles between the two connecting end portions 206 and the middle portion 207 are 90°. By setting the included angles between the two connecting end portions 206 of the hot wire 201 and the middle portion 207 to 90°, the middle portion 207 of the hot wire 201 can be easily extended horizontally. For example, only by installing the fastener 205 vertically on the cover plate 202 and making the first mounting hole 212 extend vertically.

[0045] Of course, if necessary in practice, the angle between the two connecting ends 206 and the middle part 207 of the hot wire 201 can also be bent, for example, to an angle greater than 90° and less than 180°. Or, it can also be bent to an angle, for example, less than 90° and greater than 0°.

[0046] In addition, between the connecting end 206 and the middle part 207, a circular arc part 215 can be provided for transition. By providing the circular arc part 215, not only can the two connecting ends 206 be easily bent, but also, when the hot wire 201 is in a high-temperature state, the temperature at the transition position between the two connecting ends 206 and the middle part 207 of the hot wire 201 can be made to be consistent with the temperature at other positions to a certain extent, suppressing the breakage of the hot wire 201 at the transition position between the connecting end 206 and the middle part 207.

[0047] Continue to refer to Figure 4 、 Figure 5 The installation distance of the two fasteners 205 on the cover plate 202 is determined according to the length S1 of the middle part 207. For example, when the angle between the two connecting ends 206 and the middle part 207 of the hot wire 201 is 90°, the distance between the axes of the first mounting holes 212 of the two fasteners 205 is equal to the distance between the axes of the two connecting ends 206 of the hot wire 201, and is approximately equal to the length S1 of the middle part 207 (it should be noted that a circular arc part 215 may be formed between the connecting end 206 and the middle part 207, but since the radius of the circular arc part 215 is much smaller than the length dimension of the middle part 207, it can be ignored).

[0048] In order to suppress the heating and softening of the hot wire 201 and its sagging, in some embodiments, the length S1 of the middle part 207 of the hot wire 201 can be 400 mm or less. In addition, it is preferably 200 mm or less, and more preferably 100 mm or less. As the length dimension of the middle part 207 of the hot wire 201 becomes shorter, the heating and softening of the hot wire 201 and its sagging can be further suppressed. In addition, in order to be able to arrange the two fasteners 205 to install the two connecting ends 206 of the hot wire 201, the length S1 of the middle part 207 of the hot wire 201 is 30 mm or more.

[0049] When the size of the carrier plate 204 is larger than the length dimension of the middle portion 207 of the hot wire 201, as long as a plurality of hot wire feeding units 300 are arranged along the length direction of the middle portion 207 of the hot wire 201 so as to be able to cover the entire carrier plate 204 along the length direction of the middle portion 207 of the hot wire 201. Therefore, the hot wire feeding unit 300 of the present embodiment, by being installed on the cover plate 202 directly above the coating chamber 208 in the vertical direction, even if the length of the middle portion 207 of the hot wire 201 is short, it is possible to easily cover the entire carrier plate 204 by increasing the number of hot wire feeding units 300.

[0050] It should be noted that when heating the process gas in the coating chamber 208, there is a gap between different hot wire feeding units 300, which may cause some areas not to be covered by the hot wire 201. However, since the process gas in the coating chamber 208 is heated as a whole, the heating uniformity of the process gas at the positions of the gaps not covered by the hot wire 201 and at the positions covered by the hot wire 201 actually has little effect. Therefore, a plurality of hot wire feeding units 300 arranged in the horizontal direction (the left-right direction in the drawing) can achieve the same heating effect as the hot wire 201 straddling the carrier plate 204.

[0051] In some embodiments, the middle portion 207 may extend linearly along the second direction. Specifically, since the deposition coating distance between the middle portion 207 of the hot wire 201 and the substrate 203 on the carrier plate 204 affects the coating quality, by making the middle portion 207 extend linearly along the second direction, it is possible to keep the distance in the vertical direction between the middle portion 207 and the substrate 203 consistent, thereby ensuring the deposition coating distance between the middle portion 207 of the hot wire 201 and the substrate 203.

[0052] In addition, in some specific embodiments, the middle portion 207 of the hot wire 201 may also not be linear according to the requirements of the process, but may be in the shape of, for example, a rectangular wave, a sine wave, etc.

[0053] Refer to Figure 6 And assist Figure 7 In addition, in the hot wire feeding unit 300 of the present embodiment, since the fastener 205 is installed on the cover plate 202 in the vertical direction, and the hot wire 201 is inserted into the first mounting hole 212 of the fastener 205 in the vertical direction through two connecting ends 206, it is possible to easily ensure the deposition coating distance S2 between the middle portion 207 of the hot wire 201 and the substrate 203 on the carrier plate 204. The deposition coating distance S2 between the hot wire 201 and the substrate 203 on the carrier plate 204 can be adjusted, for example, by the adjusting jig 100.

[0054] Specifically, the adjustment jig 100 can be structured as follows. For example, the adjustment jig 100 includes: an adjustment plate 101, and the adjustment plate 101 can hold the hot wire 201. At least one first abutting surface 102 and at least one second abutting surface 103 are provided on the adjustment plate 101. The first abutting surface 102 and the second abutting surface 103 are parallel and have a preset distance in the direction perpendicular to the first abutting surface 102. When the two connecting end portions 206 of the hot wire 201 abut the first abutting surface 102 at the middle portion 207 and the fastener 205 abuts the second abutting surface 103, the hot wire 201 is fastened to the first mounting hole 212 of the fastener 205.

[0055] With this adjustment jig 100, when installing the hot wire 201, the deposition coating distance S2 between the hot wire 201 and the substrate 203 on the carrier plate 204 can be ensured. Specifically, since the adjustment plate 101 has the first abutting surface 102 against which the middle portion 207 of the hot wire 201 abuts and the second abutting surface 103 against which the fastener 205 abuts, and a preset distance is provided between the first abutting surface 102 and the second abutting surface 103. Therefore, when the middle portion 207 of the hot wire 201 abuts the first abutting surface 102 of the adjustment plate 101, the distance between the middle portion 207 of the hot wire 201 and the second abutting surface 103 is the preset distance. And, since the two connecting end portions 206 of the hot wire 201 are fastened to the first mounting hole 212 of the fastener 205 in the state where the second abutting surface 103 of the adjustment plate 101 abuts the fastener 205. That is, the distance between the middle portion 207 of the hot wire 201 and the position of the fastener 205 where it abuts the second abutting surface 103 of the adjustment plate 101 is always the preset distance. In other words, with this adjustment jig 100, the hot wire 201 can be ensured to be installed in the fastener 205 at an accurate preset distance.

[0056] Since the fastener 205 is fixed on the cover plate 202, and as a relatively large component fixed in the HWCVD device 200, the position of the cover plate 202 is also fixed. In other words, the distance S3 of the fastener 205 relative to the substrate 203 is a fixed distance planned during design. Therefore, as long as the two connecting end portions 206 of the hot wire 201 can be installed in the first mounting hole 212 of the fastener 205 while ensuring the accurate distance S4 between the middle portion 207 of the hot wire 201 and the fastener 205, the accurate installation position of the hot wire 201 can be ensured, and the installation accuracy of the hot wire 201 can be improved.

[0057] Continue to refer to Figure 6 、 Figure 7, in some embodiments, the vertical distance between the middle portion 207 and the substrate 203 placed in the coating chamber 208 is adjustable. Specifically, in the same horizontal HWCVD apparatus 200 or in different horizontal HWCVD apparatuses 200, sometimes different deposition coating distances S2 may be required according to different processes, that is: the distance between the middle portion 207 of the hot wire 201 and the substrate 203 may need to be different. In the present embodiment, since the fastener 205 is installed on the cover plate 202 in the vertical direction, and the hot wire 201 is inserted into the first mounting hole 212 of the fastener 205 in the vertical direction through two connecting ends 206, therefore, the vertical distance S4 between the middle portion 207 of the hot wire 201 and the fastener 205 can be easily adjusted, and thereby the distance between the middle portion 207 of the hot wire 201 and the substrate 203 (i.e., the deposition coating distance S2) can be adjusted.

[0058] The method for adjusting the vertical distance between the middle portion 207 and the substrate 203 is not particularly limited. For example, the adjusting jig 100 can be used to adjust by replacing the hot wire 201 with connecting ends 206 of different lengths. Alternatively, the adjustment can also be performed by changing the positions where the two connecting ends 206 of the hot wire 201 are inserted into the first mounting hole 212 of the fastener 205.

[0059] The vertical distance S4 between the middle portion 207 and the lower part of the fastener 205 (i.e., the length of the part where the connecting end 206 protrudes from the fastener 205) can be set to be 10 mm or more and 40 mm or less. More specifically, in some specific embodiments, it can be 10 mm, 15 mm, 20 mm, 25 mm, 30 mm, 35 mm, 40 mm, etc. Similarly, these distances can be adjusted by the adjusting jig 100. For example, the first abutting surface 102 of the adjusting plate 101 of the adjusting jig 100 can have a plurality of them, and the plurality of first abutting surfaces 102 are respectively distributed at intervals in a direction perpendicular to the first abutting surface 102 to form different adjustment gears between the first abutting surface 102 and the second abutting surface 103. The distance between the first abutting surface 102 and the second abutting surface 103 can be set in the range of 10 mm or more and 40 mm or less. More specifically, for example, gears of 10 mm, 15 mm, 20 mm, 25 mm, 30 mm, 35 mm, 40 mm, etc. can be formed. In addition, if necessary, the length of the part where the connecting end 206 protrudes from the fastener 205 can also be set to be 5 mm or more and 100 mm or less.

[0060] Thus, in the hot wire feeding unit 300 of the present embodiment, since the fastener 205 is arranged vertically above the coating chamber 208, for example, mounted on the cover plate 202 of the coating chamber 208, and the hot wire 201 is inserted vertically into the first mounting hole 212 of the fastener 205 through two connecting ends 206, not only can the accuracy of the deposition coating distance S2 between the middle part 207 of the hot wire 201 and the substrate 203 on the carrier plate 204 be easily ensured, thereby improving the quality of the deposition coating (such as the uniformity of the deposition coating, etc.), but also, according to the actual process requirements, by replacing the connecting ends 206 with different ones, etc., the distance of the deposition coating between the middle part 207 of the hot wire 201 and the substrate 203 can be adjusted.

[0061] Continue to refer to Figure 7 , as can be seen above, the hot wire system 400 of the first embodiment can be used in the horizontal HWCVD device 200. More specifically, as the horizontal HWCVD device 200 of the second embodiment, it has a coating chamber 208, and above the coating chamber 208 in the vertical direction, there is a cover plate 202 for sealing the coating chamber 208. The hot wire system 400 is installed on the side of the cover plate 202 facing the coating chamber 208 and is located directly above the coating chamber 208 in the vertical direction.

[0062] According to the horizontal HWCVD device 200 of the present embodiment, since its hot wire feeding unit 300 can use a shorter hot wire 201, there is no need to additionally increase a device for suppressing the sagging of the hot wire 201 due to heating and softening, and thus the breakage of the hot wire 201 can be suppressed. Therefore, the horizontal HWCVD device 200 of the present embodiment can maintain the stability of the coating process and improve the stability of system use.

[0063] Although the embodiments of the present embodiment have been shown and described, those of ordinary skill in the art can understand that: various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present embodiment, and the scope of the present embodiment is defined by the claims and their equivalents.

Claims

1. A hot wire system, which is used in a horizontal HWCVD device, wherein, The horizontal HWCVD device has a coating chamber, in which a carrier plate for placing a substrate is accommodated. The carrier plate is horizontally supported and runs along a first direction. It is characterized in that the hot wire system is arranged in the upper part of the coating chamber in the vertical direction and extends along the first direction and a second direction orthogonal to the first direction. The hot wire system includes a plurality of hot wire feeding units, and the plurality of hot wire feeding units are respectively arranged along the first direction and the second direction; The hot wire feeding unit includes two fasteners and a hot wire. The two fasteners are respectively installed on the upper part of the coating chamber of the horizontal HWCVD device in the vertical direction; The hot wire has a middle part and two connection ends respectively located at both ends of the length direction of the middle part. The two connection ends are respectively bent relative to the middle part; The fastener has a hot wire mounting part, and the hot wire mounting part is set to be located at the lower end in the vertical direction of the fastener when the fastener is installed on the upper part of the coating chamber of the horizontal HWCVD device in the vertical direction; The two connection ends are respectively fastened to the hot wire mounting part.

2. The hot wire system according to claim 1, characterized in that, The hot wire feeding units are arranged in a rectangular array and are arranged along the first direction and the second direction.

3. The hot wire system according to claim 1 or 2, characterized in that, A cover plate for sealing the coating chamber is arranged in the upper part of the coating chamber in the vertical direction, and the hot wire system is arranged on the side of the cover plate facing the coating chamber.

4. The hot wire system according to claim 1 or 2, characterized in that, Each of the hot wire feeding units of the hot wire system is connected in series to form a loop.

5. The hot wire system according to claim 1 or 2, characterized in that, The plurality of hot wire feeding units of the hot wire system are divided into multiple groups, and each group of hot wire feeding units is respectively connected in series to form an independent loop.

6. The hot wire system according to claim 3, characterized in that, The middle part extends linearly along the second direction.

7. The hot wire system according to claim 6, characterized in that, The length of the middle part is 30 mm or more and 400 mm or less.

8. The hot wire system according to claim 6, characterized in that, The two connection ends are respectively bent by 90° relative to the middle part.

9. The hot wire system according to claim 8, characterized in that, The two fasteners are respectively installed on the cover plate, and the hot wire mounting part is set to be located at the lower end in the vertical direction of the fastener when the fastener is installed on the cover plate; The fastener has a power feeding part, and the two connection ends are respectively fastened to the hot wire mounting part and are electrically connected to a power supply through the power feeding part.

10. A horizontal HWCVD device, characterized in that, A hot wire system according to any one of claims 1 to 9.

Images