A non-local plasma detection system

Abstract

The present invention relates to the field of plasma diagnosis technology, and in particular to a non-localized plasma detection system, comprising a sealed container, a first adjustment device, and a second adjustment device. Two parallel electrodes are arranged in the sealed container, and a first adjustment device is connected to each of two oppositely arranged end surfaces of the sealed container. The first adjustment device extends into the sealed container and is connected to the nearest electrode for adjusting the distance between the electrodes. A second adjustment device is connected to a side wall and extends into the sealed container, and a probe is installed at the end. The electrode distance can be flexibly adjusted, and the height of the probe can be adjusted to obtain plasma characteristics at different positions, thereby determining whether a non-localized plasma environment exists. Gas impurities in multiple different pressure environments can then be detected, and the system has strong applicability.

Description

Technical Field

[0001] The present invention relates to the technical field of plasma processing equipment, and in particular to a non-local plasma detection system. Background Art

[0002] The detection of impurities in gas based on the collision electron energy spectrum theory requires a non-local plasma environment. The non-local plasma environment conditions require that the gas pressure and plasma scale satisfy a certain relationship. Therefore, when the gas pressure changes, the plasma scale needs to be adjusted to satisfy a certain relationship with it in order to achieve a non-local plasma environment. The plasma scale can be adjusted by adjusting the electrode spacing of the plasma generator device.

[0003] In the prior art, the electrode spacing of a plasma generator device is fixed. When the gas pressure changes continuously, the fixed electrode spacing causes the non-local plasma environment to change, thereby affecting the gas detection result. Summary of the Invention

[0004] The problem solved by the present invention is that when the gas pressure changes continuously, the non-local plasma environment changes due to the fixed electrode spacing, thereby affecting the gas detection result.

[0005] To address the above-mentioned problems, the present invention provides a non-localized plasma detection system, comprising a sealed container, a first adjustment device, and a second adjustment device. The sealed container comprises two oppositely disposed end surfaces and a sidewall located between the two end surfaces. An electrode is disposed within the sealed container at each end near the two end surfaces, and the two electrodes are disposed in parallel. A first adjustment device is connected to each of the two end surfaces, and a second adjustment device is connected to the sidewall. The first and second adjustment devices extend into the sealed container, and a distal end of each first adjustment device is connected to the nearest electrode within the sealed container. A probe is mounted on a distal end of the second adjustment device. The first adjustment device is configured to drive the electrode connected thereto to move in a direction perpendicular to the end surface of the sealed container, and the second adjustment device is configured to drive the probe to move in a direction perpendicular to the sidewall of the sealed container.

[0006] Optionally, the first adjustment device and the second adjustment device both include a first sleeve, a second sleeve, and a screw, the first sleeve is sleeved outside the second sleeve, the first sleeve is located outside the sealed container and one end is sealed with the sealed container; the second sleeve passes through the inside and outside of the sealed container, the end of the second sleeve located inside the sealed container forms the end, and the end of the second sleeve located outside the sealed container is connected to the screw, and the screw is used to drive the second sleeve to move relative to the first sleeve.

[0007] Optionally, the first adjusting device also includes a first electric wire; in the first adjusting device, a first opening is provided on the side wall of the first sleeve, and a second opening is provided on the side wall of the second sleeve. One end of the first electric wire is connected to an external power supply and a cathode of a probe data analyzer, and the other end is introduced from the first opening, enters the second sleeve through the second opening, extends from the end of the second sleeve and is connected to the electrode in the sealed container.

[0008] Optionally, the second adjusting device also includes a first electric wire; in the second adjusting device, a first opening is provided on the side wall of the first sleeve, and a second opening is provided on the side wall of the second sleeve. One end of the first electric wire is connected to the anode of the probe data analyzer, and the other end is introduced from the first opening, enters the second sleeve through the second opening, and extends to connect with the probe installed at the end of the second sleeve.

[0009] Optionally, a metal fixing plate is provided on the electrode, the end of the second sleeve of the first adjustment device is vertically provided on the metal fixing plate, and the first wire extends from the end of the second sleeve and contacts the metal fixing plate.

[0010] Optionally, a piston is provided between the first sleeve and the second sleeve. The piston is disc-shaped and sleeved outside the second sleeve. The edge of the piston is in close contact with the inner wall of the first sleeve.

[0011] Optionally, a first electric wire of a reserved length is provided in the first sleeve, and the reserved length is greater than a moving distance of the second sleeve relative to the first sleeve.

[0012] Optionally, the end of the second sleeve, the first opening, and the second opening are all sealed.

[0013] Optionally, the first sleeve is connected to the sealed container via a vacuum adapter.

[0014] Optionally, the first adjusting device and the second adjusting device are also provided with a device for measuring the moving distance of the electrode along a direction perpendicular to the end face of the sealed container, and the second adjusting device is also provided with a device for measuring the moving distance of the probe along a direction perpendicular to the side wall of the sealed container.

[0015] Compared with the prior art, the present invention provides a sealed discharge device, on which a first adjustment device is vertically connected to each of the first and second end surfaces for adjusting the spacing between electrodes, and a second adjustment device is vertically connected to the side wall for adjusting the height of the probe in the sealed discharge device. The electrode spacing can be automatically adjusted by the first adjustment device under different gas pressures, and then the probe height is adjusted by the second adjustment device. The volt-ampere characteristics of the plasma at different heights in the sealed device are obtained by the probe and analyzed to determine whether it is a non-local discharge plasma environment. This overcomes the limitation caused by the electrode spacing when traditionally determining a non-local discharge plasma environment, and further utilizes the non-local plasma environment to detect gas impurities in a variety of different gas pressure environments, with flexible adjustment and strong applicability. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 Schematic diagram of a non-localized plasma detection system;

[0017] Figure 2 is a schematic diagram of a first adjustment device of a non-localized plasma detection system;

[0018] Figure 3 Schematic diagram of a second adjustment device of a non-localized plasma detection system.

[0019] Description of reference numerals:

[0020] 1-sealed container; 11-first end face; 12-second end face; 13-side wall; 21-first adjusting device; 22-second adjusting device; 3-probe; 41-first sleeve; 411-first opening; 42-second sleeve; 421-second opening; 43-first wire; 44-screw; 45-piston; 5-metal fixing plate; 61-cathode; 62-anode; 7-vacuum adapter; 8-inlet; A-end of the second sleeve; B-connection between the second sleeve and the screw. DETAILED DESCRIPTION

[0021] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0022] The terms "first," "second," and the like in the description and claims of the present invention and the accompanying drawings are used to distinguish similar objects and are not necessarily used to describe a particular order or precedence. It should be understood that the terms used in this manner are interchangeable where appropriate, such that the embodiments of the present invention described herein can be practiced in orders other than those illustrated or described herein.

[0023] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "disposed," "installed," "connected," and "connected" should be understood broadly. For example, they may refer to fixed, detachable, or integral connections; mechanical connections; direct connections or indirect connections via an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0024] Throughout this specification, references to the terms "embodiment," "one embodiment," and "an implementation" indicate that the specific features, structures, materials, or characteristics described in conjunction with that embodiment or implementation are included in at least one embodiment or implementation of the present invention. In this specification, schematic representations of these terms do not necessarily refer to the same embodiment or implementation. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or implementations.

[0025] The embodiments of the present invention are combined Figure 1 As shown, a non-local plasma detection system is provided, including a sealed container 1, a first adjustment device 21, and a second adjustment device 22. The sealed container 1 includes two end faces arranged opposite to each other and a side wall 13 located between the two end faces. An electrode is respectively provided at both ends of the sealed container 1 near the two end faces, and the two electrodes are arranged in parallel. A first adjustment device 21 is connected to each of the two end faces, and a second adjustment device 22 is connected to the side wall 13. The first adjustment device 21 and the second adjustment device 22 extend into the sealed container 1, and the end of each first adjustment device 21 is connected to the nearest electrode in the sealed container 1. A probe 3 is installed at the end of the second adjustment device 22. The first adjustment device 21 is used to drive the electrode connected thereto to move in a direction perpendicular to the end face of the sealed container, and the second adjustment device 22 is used to drive the probe 3 to move in a direction perpendicular to the side wall 13 of the sealed container 1.

[0026] It should be noted that in order to construct a non-local plasma detection system, the present invention must first generate plasma and then detect whether the plasma is non-local plasma. At the same time, it can determine whether it is a non-local plasma environment. Since there are many ways to generate plasma, such as common ways such as thermal energy and electrical energy, a common method of generating plasma by discharge is to form an electric field in a sealed container and use a vacuum pump to achieve a certain vacuum degree. As the gas becomes thinner and thinner, the molecular distance and the free movement distance of molecules or ions also become longer and longer. Under the action of the electric field, they collide to form plasma, such as a plasma cleaning / etching machine.

[0027] The present invention uses a discharge method to generate plasma, and sets a sealed container 1. The sealed container 1 is in the shape of a hollow cylinder and includes two end surfaces arranged opposite to each other, such as Figure 1 The first end face 11 and the second end face 12 and the side wall 13 between the first end face 11 and the second end face 12 are provided with an injection port 8 on the side wall 13. Gas can be added to or extracted from the sealed container 1 through the injection port to change the air pressure in the sealed container 1 and construct different air pressure environments. The sealed container 1 is made of quartz glass because quartz glass has the characteristics of high temperature resistance, low expansion coefficient, thermal shock resistance, chemical stability and good electrical insulation performance. An electrode is respectively provided near the first end face 11 and the second end face 12 of the sealed container 1, and the two electrodes are kept parallel to each other. Figure 1 The apparatus includes a cathode 61 and an anode 62, both of which are hollow cylindrical and of the same size. The two are placed in parallel, with the cathode 61 close to the first end face 11 and the anode 62 close to the second end face 62. The top and bottom surfaces of the cathode 61 and the bottom and top surfaces of the anode 62 are kept parallel and at a certain distance. Because a uniform electric field is formed between the parallel electrodes, it is conducive to generating more stable plasma. A first adjustment device 21 is connected to each of the first end face 11 and the second end face 12 of the sealed container 1. The present invention adopts a vertical connection because it can better provide thrust to drive the electrode spacing and the probe to move, thereby realizing the adjustment function.

[0028] The first adjusting device 21 in the present invention refers to a device for adjusting the electrode spacing in the sealed container 1. Each first adjusting device 21 is extended into the sealed container 1, connected to the electrode closest to it, and drives the electrode connected to it to move in a direction perpendicular to the end surface of the sealed container 1 to adjust the electrode spacing. Figure 1 The first adjusting device 21 connected to the first end surface 11 is connected to a cathode 61 as its closest electrode, and the first adjusting device 21 connected to the second end surface 12 is connected to an anode 62 as its closest electrode. The first adjusting device 21 connected to the first end surface 11 is used to drive the cathode 61 to move in a direction perpendicular to the first end surface 11 and gradually away from the first end surface 11; the first adjusting device 21 connected to the second end surface 12 is used to drive the anode 61 to move in a direction perpendicular to the second end surface 12 and gradually away from the second end surface 12.

[0029] The present invention further connects a second adjusting device 22 with a probe 3 mounted on the side wall 13 of the sealed container 1, and the device is used to adjust the height of the probe 3 and drive the probe 3 to move in a direction perpendicular to the side wall 13 of the sealed container 1, that is, Figure 1In the process, the height of probe 3 within sealed container 1 is adjusted. Probes at different heights are used to detect plasma information at different locations within sealed container 1. Based on the plasma information at different locations, the volt-ampere characteristics of the plasma at different locations are obtained. Based on this characteristic, an analysis is performed to determine whether the environment is a non-localized discharge plasma environment. If the electron energy of the plasma at different heights is the same, it can be determined to be a non-localized discharge plasma. This design overcomes the limitations of traditional electrode spacing when determining a non-localized discharge plasma environment. It can then use the non-localized plasma environment to detect gas impurities in a variety of different pressure environments, providing flexible adjustment and strong applicability.

[0030] In another embodiment of the present invention, Figure 2 and Figure 3 As shown, the first adjusting device 21 and the second adjusting device 22 both include a first sleeve 41, a second sleeve 42, and a screw 44. The first sleeve 41 is sleeved on the outside of the second sleeve 42. The first sleeve 41 is located outside the sealed container 1 and one end is sealed and connected to the sealed container 1. The second sleeve 42 passes through the inside and outside of the sealed container 1. The end of the second sleeve 42 located inside the sealed container 1 forms the end. The end of the second sleeve 42 located outside the sealed container 1 is connected to the screw 44. The screw 44 is used to drive the second sleeve 42 to move relative to the first sleeve 41.

[0031] It should be noted that the first adjusting device 21 and the second adjusting device 22 are both sleeve structures, and their common features include a first sleeve 41, a second sleeve 42, and a screw 44, wherein the first sleeve 41 is a vacuum tube, and the second sleeve 42 is an insulating tube. In the present invention, the second sleeve 42 is a quartz tube, and the first sleeve 41 and the second sleeve 42 are sleeved together, the second sleeve 42 is inside, and the first sleeve 41 is outside. For the sealed container 1, the first sleeve 41 is located outside the sealed container 1, and one end is sealed and connected to the sealed container, while the second sleeve 42 runs through the inside and outside of the sealed container 1, that is, the second sleeve 42 is divided into two parts / two ends, one end is located inside the sealed container 1, and the other end is located outside the sealed container 1. The end located inside the sealed container 1 is called the end of the second sleeve 42, and the end of the second sleeve is as shown in FIG. Figure 2 As shown at A in the figure, the screw 44 is connected to one end outside the sealed container 1. When in use, by pushing the screw 44, the thrust is transmitted from the screw 44 to the second sleeve 42 through the connection B between the second sleeve 42 and the screw 44, driving the second sleeve 42 to move relative to the first sleeve. This design has a simple structure and is easy to adjust.

[0032] In another embodiment of the present invention, Figure 1 and Figure 2As shown, the first adjusting device 21 also includes a first electric wire 43; in the first adjusting device 21, a first opening 411 is provided on the side wall of the first sleeve 41, and a second opening 421 is provided on the side wall of the second sleeve 42. One end of the first electric wire 43 is connected to an external power supply and a cathode of a probe data analyzer, and the other end is introduced from the first opening 411, enters the second sleeve 42 through the second opening 421, extends from the end of the second sleeve 42 and is connected to the electrode in the sealed container 1.

[0033] It should be noted that, for the first adjustment device 21 for adjusting the electrode spacing, a first wire 43 is also provided. In the first adjustment device 21, a first opening 411 and a second opening 421 are respectively provided on the side walls of the first sleeve 41 and the second sleeve 42. The two openings are designed to facilitate the introduction of the first wire 43 into the second sleeve 42. The second sleeve 42 is used to fix the introduced first wire 43. The first wire 43 is close to one end of the first sleeve 41, introduced from the first opening 411, enters the second sleeve 42 through the second opening 421, and extends from the end of the second sleeve 42 to be connected to the electrode. This design is equivalent to introducing an external power supply into a sealed container. 1, and energize the two built-in electrodes. A first adjustment device 21 is respectively provided on the first end face 11 and the second end face 12 of the sealed container 1, extending vertically into the sealed container 1. Each first adjustment device 21 is connected to its nearest electrode. If it is close to the cathode 61, its first wire 43 extends from the end of the second sleeve 42 and is connected to the cathode 61 to provide power. If it is close to the anode 62, its first wire 43 extends from the end of the second sleeve and is connected to the anode 62 to provide power. When both electrodes are connected to an external power supply through the first adjustment device 21, a uniform electric field is generated between the two electrodes to generate plasma between the cathode 61 and the anode 62. If the end of the first wire 43 close to the first sleeve 41 is connected to the cathode 61, the end away from the first sleeve 41 is designed with two connectors, one connector is connected to the external power supply, and the other connector is connected to the cathode of the probe data analyzer; if the end of the first wire 43 close to the first sleeve 41 is connected to the anode 62, the end away from the first sleeve 41 has only one connector for the external power supply.

[0034] In another embodiment of the present invention, Figure 1 and Figure 3 As shown, the second adjusting device 22 also includes a first electric wire 43. In the second adjusting device 22, a first opening 411 is provided on the side wall of the first sleeve 41, and a second opening 421 is provided on the side wall of the second sleeve 42. One end of the first electric wire 43 is externally connected to the anode of the probe data analyzer, and the other end is introduced from the first opening 411, enters the second sleeve 42 through the second opening 421, and extends to connect with the probe 3 installed at the end of the second sleeve 42.

[0035] It should be noted that the second adjustment device 22 is an adjustment device equipped with a probe 3. Therefore, the first wire 43 in the second sleeve 42 of the second adjustment device 22 is connected to the anode of the probe data analyzer at the end away from its first sleeve 41, and cooperates with the first adjustment device 21 connected to the cathode of the probe data analyzer to perform data analysis on the characteristics of plasmas at different heights. The first wire 43 is introduced from the first opening 411 at the end close to the first sleeve 41, passes through the second opening 421, enters the interior of the second sleeve 42, and extends until it is connected to the probe 3 installed at the end of the second sleeve 42. This design makes it easy to adjust the height of the probe 3, thereby obtaining the volt-ampere characteristics of plasmas at different heights, and further analyzes whether it is a non-localized plasma based on the characteristics.

[0036] In the present invention, the first adjusting device 21 for adjusting the electrode spacing and the second adjusting device 22 for adjusting the probe 3 both adopt substantially the same structural design, with the following differences:

[0037] One end of the first electric wire 43 of the first regulating device 21 is connected to an external power supply, and the other end is introduced into its second sleeve 42 and connected to the cathode 61 or the anode 62 in the sealed container 1, so as to energize the electrode so that plasma is generated between the cathode 61 and the anode 62 through the electric field; and one end of the first electric wire 43 in the second sleeve 42 of the second regulating device 22 is connected to an external probe data analyzer, and the other end is introduced into its second sleeve 42 and connected to the probe 3 installed at the end of the second sleeve 42, and the information of the plasma at different heights in the sealed container 1 detected by the probe 3 is transmitted to the probe data analyzer for data analysis.

[0038] In another embodiment of the present invention, Figure 1 As shown, a metal fixing plate 5 is provided on the electrode, the end of the second sleeve 42 of the first adjustment device 21 is vertically arranged on the metal fixing plate 5, and the first wire 43 extends from the end of the second sleeve 42 to contact the metal fixing plate 5.

[0039] It should be noted that the first adjustment device 21 in the present invention is used to adjust the electrode spacing, so it needs to be connected to the electrode. The connection between the first adjustment device 21 and the electrode is completed by vertically setting the end of the second sleeve 42 on the metal fixing plate 5 on the electrode. At the same time, the first wire 43 of the first adjustment device 21 extends from the end of its second sleeve 42 and contacts the metal fixing plate 5, introducing an external power supply to the electrode, so that the electrode becomes the power supply in the sealed container 1. That is, for the first adjustment device 21, the first wire 43 extends from the end of the second sleeve 42 and is indirectly connected to the electrode through the metal fixing plate 5 on the electrode.

[0040] In another embodiment of the present invention, Figure 2 and Figure 3 As shown, a piston 45 for sealing is provided between the first sleeve 41 and the second sleeve 42 . The piston 45 is disc-shaped and is sleeved outside the second sleeve 42 . The edge of the piston 45 fits tightly against the inner wall of the first sleeve 41 .

[0041] It should be noted that both the first adjusting device 21 and the second adjusting device 22 include a piston 45. The piston 45 is arranged between the first sleeve 41 and the second sleeve 42 and is disc-shaped. It is sleeved on the outside of the second sleeve 42, and the edge is close to the inner wall of the first sleeve 41. This design uses the piston 45 to seal the space between the outside of the second sleeve 42 and the inner wall of the first sleeve to prevent external gas from entering and causing any impact.

[0042] In another embodiment of the present invention, Figure 2 and Figure 3 As shown, a first electric wire 43 of a reserved length is provided in the first sleeve 41 , and the reserved length is greater than a moving distance of the second sleeve 42 relative to the first sleeve 41 .

[0043] It should be noted that, for the first adjusting device 21 and the second adjusting device 22, a certain length of the first wire 43 is reserved in the first sleeve 41 thereof, and the reserved length is greater than the moving distance of the second sleeve 42 relative to the first sleeve 41, because the first wire 43 is introduced into the second sleeve 42, the second sleeve 42 fixes the first wire 43, and the top of the second sleeve 42 is connected to a screw 44. When the screw is pushed, the second sleeve 42 moves, and at the same time, the first wire 43 in the second sleeve 42 also moves accordingly, and the distance between the second opening 421 of the second sleeve 42 and the first opening 411 of the first sleeve 41 gradually widens, that is, the first wire 43 located between the first sleeve 41 and the second sleeve 42 needs to be gradually stretched and lengthened. The design of the reserved length of the first wire 43 is precisely to adapt to the change in the length of the first wire 43 in the second sleeve 42 during the adjustment process.

[0044] In another embodiment of the present invention, Figure 2 and Figure 3 As shown, the end of the second sleeve 42 , the first opening 411 , and the second opening 421 are all sealed.

[0045] It should be noted that, for the first adjusting device 21 and the second adjusting device 22, in order to maintain a sealed vacuum environment inside the first sleeve 41 and the second sleeve 42, the first opening 411 and the second opening 421 are both places where the first electric wire 43 is introduced, and air can easily enter. Therefore, the present invention applies glue to them for sealing. For the end of the second sleeve 42, this is the position where the first electric wire 43 extends out, and the present invention uses vacuum silicone for sealing.

[0046] In another embodiment of the present invention, Figure 1 As shown, the first sleeve 41 is connected to the sealed container 1 through a vacuum adapter 7.

[0047] It should be noted that in order to maintain the sealed environment inside the sealed container 1 while maintaining the connection between the first adjusting device 21 and the second adjusting device 22, a vacuum adapter 7 is installed on each of the first end face 11, the second end face 12 and the side wall 13 of the sealed container, and the first adjusting device 21 and the second adjusting device 22 are connected to the sealed container 1 through the vacuum adapter 7.

[0048] In another embodiment of the present invention, the first adjusting device 21 is also provided with a device for measuring the moving distance of the electrode along a direction perpendicular to the end face of the sealed container 1, and the second adjusting device 22 is also provided with a device for measuring the moving distance of the probe 3 along a direction perpendicular to the side wall 13 of the sealed container 1.

[0049] It should be noted that, for the first adjusting device 41, when the screw 44 is pushed, the electrode moves, and the moving direction is the same as the thrust exerted on the screw 44. Since the end of the second sleeve 42 is vertically connected to the electrode, the electrode moves in a direction perpendicular to the end face of the sealed container 1, and the electrode spacing changes, thereby achieving adjustment of the electrode spacing; for the second adjusting device 22, which is perpendicular to the side wall 13 of the sealed container 1, its second sleeve 42 and the probe installed at the end of the second sleeve 42 are perpendicular to the side wall 13 of the sealed container 1. When the screw 44 receives the thrust, it will drive the probe 3 to move in a direction perpendicular to the side wall 13 of the sealed container 1, so that the probe 3 is at different heights in the sealed container 1; if you want to obtain the distance that the first adjusting device 21 adjusts to move the electrode, or obtain the distance that the second adjusting device 22 adjusts to move the probe 3, it is necessary to provide a device for measuring the moving distance on the adjusting device. A scale for measuring the moving distance can be set on the first sleeve 41, or a vernier caliper can be installed for measurement.

[0050] Although the present invention is disclosed as above, the scope of protection disclosed by the present invention is not limited thereto. Those skilled in the art may make various changes and modifications without departing from the spirit and scope of the present invention, and these changes and modifications will fall within the scope of protection of the present invention.

Claims

1. A non-local plasma detection system, characterized in that: The invention comprises a sealed container (1), a first adjusting device (21), and a second adjusting device (22), wherein the sealed container (1) comprises two end faces arranged opposite to each other and a side wall (13) located between the two end faces, an electrode is respectively arranged at each end of the sealed container (1) near the two end faces, the two electrodes are arranged in parallel, a first adjusting device (21) is connected to each of the two end faces, a second adjusting device (22) is connected to the side wall (13), the first adjusting device (21) and the second adjusting device (22) extend into the sealed container (1), and the end of each first adjusting device (21) is connected to the nearest electrode in the sealed container (1), a probe (3) is installed at the end of the second adjusting device (22), the first adjusting device (21) is used to drive the electrode connected thereto to move in a direction perpendicular to the end face of the sealed container (1), and the second adjusting device (22) is used to drive the probe (3) to move in a direction perpendicular to the side wall (13) of the sealed container (1); The first regulating device (21) and the second regulating device (22) both comprise a first sleeve (41) and a second sleeve (42); the first sleeve (41) is sleeved outside the second sleeve (42); the first sleeve (41) is located outside the sealed container (1) and one end of the first sleeve (41) is sealedly connected to the sealed container (1); the second sleeve (42) passes through the inside and outside of the sealed container (1); the end of the second sleeve (42) located inside the sealed container (1) forms the terminal; The first regulating device (21) further includes a first electric wire (43); in the first regulating device (21), a first opening (411) is provided on the side wall of the first sleeve (41), and a second opening (421) is provided on the side wall of the second sleeve (42); one end of the first electric wire (43) is connected to an external power supply and a cathode of a probe data analyzer, and the other end is introduced from the first opening (411), enters the second sleeve (42) through the second opening (421), extends from the end of the second sleeve (42), and is connected to the electrode in the sealed container (1); Wherein, in the first regulating device (21), when the end of the first wire (43) close to the first sleeve (41) is connected to the cathode (61) in the sealed container (1), the end of the first wire (43) away from the first sleeve (41) has two connectors, one connector is used for an external power supply, and the other connector is used to connect to the cathode of the probe data analyzer; when the end of the first wire (43) close to the first sleeve (41) is connected to the anode (62) in the sealed container (1), the end of the first wire (43) away from the first sleeve (41) has a connector for an external power supply.

2. The non-localized plasma detection system according to claim 1, characterized in that: The first adjusting device (21) and the second adjusting device (22) both further include a screw (44), and one end of the second sleeve (42) located outside the sealed container (1) is connected to the screw (44), and the screw (44) is used to drive the second sleeve (42) to move relative to the first sleeve (41).

3. The non-localized plasma detection system according to claim 2, characterized in that: The second regulating device (22) further includes a first electric wire (43); in the second regulating device (22), a first opening (411) is provided on the side wall of the first sleeve (41), and a second opening (421) is provided on the side wall of the second sleeve (42); one end of the first electric wire (43) is externally connected to the anode of the probe data analyzer, and the other end is introduced from the first opening (411), enters the second sleeve (42) through the second opening (421), and extends to connect with the probe (3) installed at the end of the second sleeve (42).

4. The non-localized plasma detection system according to claim 1, wherein: A metal fixing plate (5) is provided on the electrode, the end of the second sleeve (42) of the first adjustment device (21) is vertically arranged on the metal fixing plate (5), and the first wire (43) extends from the end of the second sleeve (42) and contacts the metal fixing plate (5).

5. The non-localized plasma detection system according to claim 1 or 3, characterized in that: A piston (45) for sealing is provided between the first sleeve (41) and the second sleeve (42). The piston (45) is disc-shaped and is sleeved on the second sleeve (42). The edge of the piston (45) is in close contact with the inner wall of the first sleeve (41).

6. The non-localized plasma detection system according to claim 1 or 3, characterized in that: A first electric wire (43) of a reserved length is provided in the first sleeve (41), and the reserved length is greater than a moving distance of the second sleeve (42) relative to the first sleeve (41).

7. The non-localized plasma detection system according to claim 1 or 3, characterized in that: The end of the second sleeve (42), the first opening (411), and the second opening (421) are all sealed.

8. The non-localized plasma detection system according to claim 2, wherein: The first sleeve (41) is connected to the sealed container via a vacuum adapter (7).

9. The non-localized plasma detection system according to claim 1, wherein: The first adjusting device (21) is further provided with a device for measuring the moving distance of the electrode in a direction perpendicular to the end face of the sealed container (1), and the second adjusting device (22) is further provided with a device for measuring the moving distance of the probe (3) in a direction perpendicular to the side wall (13) of the sealed container (1).

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