An exhaust gas treatment apparatus, method, device, and electronic device

Abstract

The application provides a kind of waste gas treatment equipment, method, device and electronic equipment, belongs to waste gas treatment technical field.The equipment includes: left reaction cavity, right reaction cavity, total inlet pipe, left inlet pipe, right inlet pipe, factory discharge pipe, switching pipe, total detection pipe and negative pressure detection device;The first end of total inlet pipe, left inlet pipe and switching pipe is connected with left three-way valve respectively;The first end of right inlet pipe, the first end of factory discharge pipe and the second end of switching pipe are connected with right three-way valve respectively;Left negative pressure detection pipe is communicated on left inlet pipe, right negative pressure detection pipe is communicated on right inlet pipe, the free end of left negative pressure detection pipe, the free end of right negative pressure detection pipe and the first end of total detection pipe are connected with detection three-way valve respectively;The second end of left inlet pipe is communicated with left reaction cavity, the second end of right inlet pipe is communicated with right reaction cavity, the second end of total detection pipe is communicated with negative pressure detection device.The equipment can reduce the incidence of double machine accident.

Description

Technical Field

[0001] This invention relates to the field of waste gas treatment technology, and in particular to a waste gas treatment device, method, apparatus and electronic equipment. Background Technology

[0002] The semiconductor industry uses a large amount of chemicals and specialty gases in its production processes, continuously generating significant amounts of toxic and harmful process waste gases. These waste gases need to be collected, treated, and discharged in sync with the production process; waste gas treatment systems and equipment are an integral part of the production process.

[0003] In related technologies, dual-chamber exhaust gas treatment equipment has two chambers, but both chambers share a single negative pressure detection tube. Dust and moisture from semiconductor manufacturing processes can easily clog the negative pressure detection tube. This situation is particularly prone to occur in special semiconductor manufacturing processes, such as those involving metals. At lower temperatures, these gases generate more dust, leading to more frequent clogging of the negative pressure detection tube, often resulting in daily increases in negative pressure. When the negative pressure detection tube becomes clogged, it can cause a double-down incident in the dual-chamber exhaust gas treatment equipment. An immediate halt to production after a double-down incident can damage the chips, resulting in significant losses. A delayed halt to production after a double-down incident necessitates the discharge of harmful gases through factory procedures, which severely pollutes the environment and affects the health of personnel. Summary of the Invention

[0004] This invention provides a waste gas treatment device, method, apparatus, and electronic device to solve the problem in the prior art where two reaction chambers share a single negative pressure detection tube, and both reaction chambers will shut down simultaneously when the negative pressure detection tube becomes blocked. The invention enables the use of two negative pressure detection tubes to switch the detection of negative pressure data of waste gas entering different reaction chambers. Thus, when one negative pressure detection tube is blocked, the other reaction chamber can be switched to treat the waste gas, greatly reducing the incidence of dual shutdown accidents.

[0005] This invention provides a waste gas treatment device, comprising: a left reaction chamber, a right reaction chamber, a main air inlet pipe, a left air inlet pipe, a right air inlet pipe, a plant discharge pipe, a switching pipe, a main detection pipe, and a negative pressure detection device;

[0006] The first ends of the main intake pipe, the left intake pipe, and the switching pipe are respectively connected to the left three-way valve, so that the main intake pipe can be directly connected to the left intake pipe or directly connected to the switching pipe by switching the left three-way valve;

[0007] The first end of the right intake pipe, the first end of the plant discharge pipe, and the second end of the switching pipe are respectively connected to the right three-way valve, so that the switching pipe can be directly connected to the right intake pipe or the plant discharge pipe by switching the right three-way valve.

[0008] A left negative pressure detection tube is connected to the left intake pipe, and a right negative pressure detection tube is connected to the right intake pipe. The free ends of the left negative pressure detection tube, the free ends of the right negative pressure detection tube, and the first end of the main detection tube are respectively connected to a detection three-way valve, so that the main detection tube can be directly connected to the left negative pressure detection tube or directly connected to the right negative pressure detection tube by switching the detection three-way valve.

[0009] The second end of the left intake pipe is connected to the left reaction chamber, the second end of the right intake pipe is connected to the right reaction chamber, and the second end of the main detection pipe is connected to the negative pressure detection device.

[0010] According to the waste gas treatment device provided by the present invention, a left blocking member is provided at the communication port on the left air inlet pipe connected to the left negative pressure detection pipe, near the side of the left cavity three-way valve;

[0011] And / or, at the connection port on the right air intake pipe that connects to the right negative pressure detection pipe, a right blocking element is provided on the side near the right cavity three-way valve.

[0012] According to the waste gas treatment device provided by the present invention, the left blocking member and / or the right blocking member are arc-shaped plates, the inner arc surface of the left blocking member is installed facing the left reaction chamber, and the inner arc surface of the right blocking member is installed facing the right reaction chamber.

[0013] The present invention also provides a waste gas treatment method, applied to any of the above-described waste gas treatment devices, the method comprising:

[0014] Determine the current state of the left three-way valve. When the current state of the left three-way valve allows the main air intake pipe to be directly connected to the left air intake pipe, the left reaction chamber is used to treat the exhaust gas. Determine that the left negative pressure data of the left negative pressure detection tube detected by the negative pressure detection device is valid.

[0015] When the left negative pressure data is abnormal, the current state of the left three-way valve is switched so that the main air intake pipe and the switching pipe are directly connected. The current state of the detection three-way valve is switched so that the main detection pipe and the right negative pressure detection pipe are directly connected. The negative pressure detection device detects the right negative pressure data of the right negative pressure detection pipe.

[0016] Determine the current state of the right three-way valve. When the current state of the right three-way valve allows the switching pipe to be directly connected to the right intake pipe, the right reaction chamber is used to treat the exhaust gas, and the right negative pressure data detected by the negative pressure detection device is confirmed to be valid.

[0017] The waste gas treatment method provided by the present invention further includes:

[0018] When the current state of the left three-way valve causes the main air intake pipe and the left air intake pipe to be not directly connected, the left negative pressure data detected by the negative pressure detection device is determined to be invalid.

[0019] After a preset time, the valve position alarm of the left three-way valve is triggered, and the left reaction chamber is stopped from operating;

[0020] Switch the current state of the detection three-way valve so that the main detection tube is directly connected to the right negative pressure detection tube.

[0021] The waste gas treatment method provided by the present invention further includes:

[0022] When the current state of the right three-way valve causes the switching pipe to be non-directly connected to the right intake pipe, the right negative pressure data detected by the negative pressure detection device is determined to be invalid.

[0023] After a preset time, the valve position alarm of the right three-way valve is triggered, and the right reaction chamber is stopped from operating;

[0024] Switch the current state of the right three-way valve so that the switching pipe is directly connected to the plant discharge pipe for plant discharge.

[0025] The waste gas treatment method provided by the present invention further includes:

[0026] The maintenance status of the left intake pipe and / or the left negative pressure detection pipe is determined. When the maintenance of the left intake pipe and / or the left negative pressure detection pipe is completed and the pipe is unobstructed, the current state of the left three-way valve is switched so that the main intake pipe is directly connected to the left intake pipe. The current state of the detection three-way valve is switched so that the main detection pipe is directly connected to the left negative pressure detection pipe. The negative pressure detection device detects the left negative pressure data.

[0027] The present invention also provides a waste gas treatment device, comprising:

[0028] The first determining module is used to determine the current state of the left three-way valve. When the current state of the left three-way valve makes the main air intake pipe and the left air intake pipe directly connected, the left reaction chamber is used to treat the exhaust gas, and the left negative pressure data of the left negative pressure detection tube detected by the negative pressure detection device is determined to be valid.

[0029] The first switching module is used to switch the current state of the left three-way valve when the left negative pressure data is abnormal, so that the main air intake pipe is directly connected to the switching pipe, and to switch the current state of the detection three-way valve so that the main detection pipe is directly connected to the right negative pressure detection pipe, and the negative pressure detection device detects the right negative pressure data of the right negative pressure detection pipe.

[0030] The second determining module is used to determine the current state of the right three-way valve. When the current state of the right three-way valve causes the switching pipe to be directly connected to the right intake pipe, the right reaction chamber is used to treat the exhaust gas, and the right negative pressure data detected by the negative pressure detection device is determined to be valid.

[0031] The present invention also provides an electronic device, including a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the program to implement the exhaust gas treatment method as described above.

[0032] The present invention also provides a non-transitory computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the exhaust gas treatment method as described above.

[0033] The present invention also provides a computer program product, including a computer program that, when executed by a processor, implements the exhaust gas treatment method as described above.

[0034] The waste gas treatment equipment, method, apparatus, and electronic device provided by this invention, by respectively setting a left negative pressure detection tube and a right negative pressure detection tube on the left and right air inlet pipes, allows the other negative pressure detection tube to remain usable even if one is blocked. This enables switching to another reaction chamber for waste gas treatment, and the blocked area can be cleared without stopping waste gas treatment, significantly reducing the incidence of dual-chamber downtime accidents. Furthermore, the left and right negative pressure detection tubes are connected to the negative pressure detection device via three-way valves, eliminating the need for additional negative pressure detection devices and analog signal acquisition components for negative pressure data collection. This minimizes the modification to the waste gas treatment equipment, resulting in a significant reduction in the incidence of dual-chamber downtime accidents with low modification difficulty and minimal modification cost. Attached Figure Description

[0035] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0036] Figure 1 This is a schematic diagram illustrating an example of a turbulent region in the prior art;

[0037] Figure 2 This is a schematic diagram illustrating a structural example of waste gas treatment equipment in the prior art;

[0038] Figure 3 This is a schematic diagram of the structure of the waste gas treatment equipment provided by the present invention;

[0039] Figure 4 This is a schematic diagram of the left air inlet pipe portion of the waste gas treatment device provided by the present invention;

[0040] Figure 5This is a schematic diagram of the installation structure of the left shield of the waste gas treatment equipment provided by the present invention;

[0041] Figure 6 This is one of the flowcharts of the waste gas treatment method provided by the present invention;

[0042] Figure 7 This is the second schematic diagram of the waste gas treatment method provided by the present invention;

[0043] Figure 8 This is a schematic diagram of the structure of the waste gas treatment device provided by the present invention;

[0044] Figure 9 This is a schematic diagram of the structure of the electronic device provided by the present invention.

[0045] Figure label:

[0046] 101. Main intake pipe; 102. Negative pressure detection pipe; 103. Left intake pipe; 104. Left three-way valve; 105. Right intake pipe; 106. Right three-way valve; 107. Plant discharge pipe; 108. Switching pipe; 109. Left negative pressure detection pipe; 110. Right negative pressure detection pipe; 111. Main detection pipe; 112. Negative pressure detection device; 113. Detection three-way valve; 114. Left blocking component; 801. First determination module; 802. First switching module; 803. Second determination module. Detailed Implementation

[0047] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0048] like Figure 1 As mentioned above, when the waste gas in the semiconductor manufacturing process flows in from the main air inlet pipe, a turbulent area will be formed at the negative pressure detection tube 102. If the waste gas contains dust or moisture, it will accumulate at the negative pressure detection tube 102 and block the negative pressure detection tube 102 after a certain period of time.

[0049] In existing technologies, dual-chamber exhaust gas treatment equipment only has one negative pressure detection tube 102, such as Figure 2As shown, the negative pressure detection tube 102 is installed on the main air intake pipe. This means that if the port of the negative pressure detection tube 102 becomes blocked, the detection of both the left and right processing chambers will be affected, resulting in a double shutdown accident. In one scenario, the chip production will be directly halted, causing damage to chips that are halfway through production and resulting in serious economic losses. In another scenario, the waste gas will be discharged through the plant to complete the current chip production process before production is stopped. In this case, the waste gas will be discharged directly without treatment, polluting the environment and affecting the health of the workers. Therefore, either scenario will have serious adverse consequences.

[0050] To address the above problems, embodiments of the present invention provide a waste gas treatment device, which will be described below in conjunction with... Figures 3-5 This invention describes a waste gas treatment device, comprising: a left reaction chamber, a right reaction chamber, a main inlet pipe 101, a left inlet pipe 103, a right inlet pipe 105, a plant discharge pipe 107, a switching pipe 108, a main detection pipe 111, and a negative pressure detection device 112. The first ends of the main inlet pipe 101, the left inlet pipe 103, and the switching pipe 108 are respectively connected to a left three-way valve 104, so that the main inlet pipe 101 can be directly connected to the left inlet pipe 103 or directly connected to the switching pipe 108 by switching the left three-way valve 104. The first end of the right inlet pipe 105, the first end of the plant discharge pipe 107, and the second end of the switching pipe 108 are respectively connected to a right three-way valve 106, so that the switching pipe 107 can be directly connected to the left inlet pipe 103 or directly connected to the switching pipe 108 by switching the right three-way valve 106. 108 is directly connected to the right intake pipe 105 or the plant discharge pipe 107; a left negative pressure detection pipe 109 is connected to the left intake pipe 103, and a right negative pressure detection pipe 110 is connected to the right intake pipe 105; the free end of the left negative pressure detection pipe 109, the free end of the right negative pressure detection pipe 110, and the first end of the main detection pipe 111 are respectively connected to the detection three-way valve 113, so that the main detection pipe 111 is directly connected to the left negative pressure detection pipe 109 or the right negative pressure detection pipe 110 by switching the detection three-way valve 113; the second end of the left intake pipe 103 is connected to the left reaction chamber, the second end of the right intake pipe 105 is connected to the right reaction chamber, and the second end of the main detection pipe 111 is connected to the negative pressure detection device 112.

[0051] Specifically, the waste gas treatment equipment is equipped with a left negative pressure detection pipe 109 on the left inlet pipe 103 and a right negative pressure detection pipe 110 on the right inlet pipe 105, and the left and right negative pressure detection pipes 109 and 110 are connected by a detection three-way valve 113. This allows the right reaction chamber to be switched to treat waste gas when the left negative pressure detection pipe 109 becomes blocked during the operation of the left reaction chamber, while the right negative pressure detection pipe 110 is switched to detect negative pressure. During the operation of the right reaction chamber, on-site personnel have ample time to clear and unclog the blocked left negative pressure detection pipe 109 without requiring a complete shutdown of the waste gas treatment equipment, thus improving the long-term usability of the equipment and greatly reducing the incidence of dual-shutdown accidents, ensuring the normal operation of the waste gas treatment equipment to a certain extent.

[0052] For example, the detection three-way valve 113 in the above embodiments can be an electromagnetic three-way valve. For instance, it can keep the main detection tube 111 and the left negative pressure detection tube 109 directly connected when not energized, and keep the main detection tube 111 and the right negative pressure detection tube 110 directly connected when energized. The left three-way valve 104 and the right three-way valve 106 in the above embodiments can be pneumatic three-way valves. Specifically, the valve core of the three-way valve can be pushed by controlling the air path, thereby changing the state of the valve. The negative pressure detection device 112 in the above embodiments can be a negative pressure sensor, which is not specifically limited here.

[0053] The waste gas treatment equipment provided by this invention, by setting a left negative pressure detection pipe 109 and a right negative pressure detection pipe 110 on the left intake pipe 103 and right intake pipe 105 respectively, allows the other negative pressure detection pipe 102 to still be used even if one negative pressure detection pipe 102 is blocked. This enables switching to another reaction chamber for waste gas treatment, and the blocked area can be cleared without stopping waste gas treatment, greatly reducing the incidence of dual-chamber downtime accidents. Furthermore, the left / right negative pressure detection pipes 110 are connected to the negative pressure detection device 112 via three-way valves, eliminating the need for additional negative pressure detection devices 112 and analog quantity acquisition components for negative pressure data collection. This minimizes the modification to the waste gas treatment equipment, significantly reducing the incidence of dual-chamber downtime accidents with low modification difficulty and minimal modification cost.

[0054] In one embodiment, such as Figure 4 As shown, at the connection port of the left air intake pipe 103 connected to the left negative pressure detection pipe 109, a left blocking member 114 is provided on the side near the left cavity three-way valve;

[0055] And / or, at the connection port on the right air intake pipe 105 that connects to the right negative pressure detection pipe 110, a right blocking element is provided on the side near the right cavity three-way valve.

[0056] Specifically, turbulent areas easily form at the connection points of the left intake pipe 103 and the left negative pressure detection pipe 109, and the right intake pipe 105 and the right negative pressure detection pipe 110. This can easily lead to blockages at the ports of the left and right negative pressure detection pipes 109 and 110, causing an increase in negative pressure. Furthermore, in certain special chip manufacturing processes, such as those with low temperatures and high dust levels, blockages at the port of the negative pressure detection pipe 102 occur more frequently. This severely impacts the efficiency of semiconductor manufacturing processes and increases the workload for on-site personnel in clearing blockages.

[0057] Therefore, based on the above, a left blocking member 114 can be provided at the connection port of the left intake pipe 103 connected to the left negative pressure detection pipe 109, near the side of the left cavity three-way valve; and / or, a right blocking member can be provided at the connection port of the right intake pipe 105 connected to the right negative pressure detection pipe 110, near the side of the right cavity three-way valve.

[0058] Specifically, the left and right baffles prevent the formation of turbulent areas at the connection point. Dust in the exhaust gas accumulates gradually under the influence of these baffles, resulting in a slow and gradual increase in negative pressure. On-site personnel can detect blockages promptly by observing these slow changes in negative pressure, allowing sufficient reaction time for proactive handling. This contrasts with the absence of baffles, where turbulent flow causes rapid blockages and a sharp rise in negative pressure, leaving less reaction time and resulting in less effective response.

[0059] In one embodiment, such as Figure 5 As shown, the left blocking member 114 and / or the right blocking member are arc-shaped plates, with the inner arc surface of the left blocking member 114 facing the left reaction chamber and the inner arc surface of the right blocking member facing the right reaction chamber.

[0060] Specifically, the left blocking member 114 and / or the right blocking member can be arc-shaped plates, with the inner arc surface of the left blocking member 114 facing the left reaction chamber and the inner arc surface of the right blocking member facing the right reaction chamber.

[0061] With this shape design, dust will gradually accumulate on the outer arc surface of the blocking component. When a large amount of dust accumulates, under the action of airflow, the dust will be drawn away from the outer arc surface of the blocking component and sucked into the reaction chamber. This further reduces the probability of blockage of the left negative pressure detection tube 109 and / or the right negative pressure detection tube 110, and also further reduces the workload of on-site personnel in cleaning the pipes, thus reducing the occurrence of downtime events.

[0062] The waste gas treatment method provided by this invention is described below. The waste gas treatment method described below is applied to the waste gas treatment equipment described above. For example... Figure 6 As shown, the waste gas treatment method includes:

[0063] S601: Determine the current state of the left three-way valve 104. When the current state of the left three-way valve 104 allows the main air intake pipe 101 to be directly connected to the left air intake pipe 103, the left reaction chamber is used to process the exhaust gas, and the left negative pressure data of the left negative pressure detection tube 109 detected by the negative pressure detection device 112 is confirmed to be valid.

[0064] S602: When the left negative pressure data is abnormal, switch the current state of the left three-way valve 104 so that the main air intake pipe 101 is directly connected to the switching pipe 108, switch the current state of the detection three-way valve 113 so that the main detection pipe 111 is directly connected to the right negative pressure detection pipe 110, and the negative pressure detection device 112 detects the right negative pressure data of the right negative pressure detection pipe 110.

[0065] S603: Determine the current state of the right three-way valve 106. When the current state of the right three-way valve 106 allows the switching pipe 108 to be directly connected to the right intake pipe 105, the right reaction chamber is used to process the exhaust gas, and the right negative pressure data detected by the negative pressure detection device 112 is confirmed to be valid.

[0066] Specifically, such as Figure 7 As shown, the exhaust gas treatment equipment is first turned on. After the equipment is turned on, the default exhaust gas treatment mode is to run the left reaction chamber for exhaust gas treatment. At this time, it is necessary to check the current state of the left three-way valve 104 to see if the current state of the left three-way valve 104 allows the main air intake pipe 101 and the left air intake pipe 103 to be directly connected. When the main air intake pipe 101 and the left air intake pipe 103 are directly connected, the left reaction chamber runs for exhaust gas treatment, and the left negative pressure data of the left negative pressure detection tube 109 detected by the negative pressure detection device 112 is valid.

[0067] During the operation of the left reaction chamber, the left negative pressure data is continuously monitored to determine whether the left negative pressure data is normal. When the left negative pressure data is normal, the left reaction chamber continues to operate to treat the exhaust gas, and the left negative pressure data is continuously monitored.

[0068] When the left negative pressure data is abnormal, it may be caused by two situations: one is that the left intake pipe 103 is blocked, and the other is that the left negative pressure detection pipe 109 is blocked. Both situations will cause the negative pressure to rise. At this time, switch the current state of the left three-way valve 104 to make the main intake pipe 101 directly connected to the switching pipe 108. Switch the current state of the detection three-way valve 113 to make the main detection pipe 111 directly connected to the right negative pressure detection pipe 110. That is, at this time, consider using the right reaction chamber for exhaust gas treatment and use the right negative pressure detection port for negative pressure detection.

[0069] After the left three-way valve 104 switches its state, it may not be able to operate the right reaction chamber. At this time, it is also necessary to determine the current state of the right three-way valve 106 and see if the switching pipe 108 and the right intake pipe 105 are directly connected. When they are directly connected, the right reaction chamber is used to treat the exhaust gas, and the right negative pressure data of the right negative pressure detection pipe 110 detected by the negative pressure detection device 112 is valid.

[0070] Furthermore, it is understandable that when the right negative pressure data is abnormal during the operation of the right reaction chamber, and the blockage of the left intake pipe 103 and / or the left negative pressure detection pipe 109 has not been resolved, the current state of the right three-way valve 106 will be switched, allowing the switching pipe 108 to be directly connected to the plant discharge pipe 107, and the exhaust gas will be discharged into the plant. The right three-way valve 106 will also trigger a valve position alarm, and the right reaction chamber will stop operating.

[0071] The exhaust gas treatment method provided by the present invention, by setting a left negative pressure detection tube 109 and a right negative pressure detection tube 110 on the left intake pipe 103 and the right intake pipe 105 respectively, allows the other negative pressure detection tube 102 to still be used even if one negative pressure detection tube 102 is blocked. This enables the switching of another reaction chamber for exhaust gas treatment, and the blocked part can be cleared without stopping the exhaust gas treatment, which greatly reduces the occurrence rate of dual-chamber downtime accidents.

[0072] In one embodiment, the method further includes:

[0073] When the current state of the left three-way valve 104 causes the main air intake pipe 101 to be not directly connected to the left air intake pipe 103, the left negative pressure data detected by the negative pressure detection device 112 is determined to be invalid.

[0074] After a preset time, the valve position alarm of the left three-way valve 104 is triggered, and the left reaction chamber is stopped from operating.

[0075] Switch the current state of the detection three-way valve 113 so that the main detection tube 111 is directly connected to the right negative pressure detection tube 110.

[0076] Specifically, when the waste gas treatment equipment is turned on, the current state of the left three-way valve 104 results in a non-straight-through state between the main intake pipe 101 and the left intake pipe 103. At this time, it is possible that a malfunction in the left reaction chamber is causing the non-straight-through state between the main intake pipe 101 and the left intake pipe 103. At this time, the left negative pressure data detected by the negative pressure detection device 112 in the left negative pressure detection tube 109 is invalid (when the main intake pipe 101 and the left intake pipe 103 are not in a straight-through state, it may be in the process of closing the air passage of the left intake pipe 103. During this process, gas will still pass through the left intake pipe 103, so the left negative pressure data can still be detected, but this data is invalid).

[0077] After determining that the main intake pipe 101 and the left intake pipe 103 are in a non-straight-through state for a preset time, an alarm is triggered on the valve position of the left three-way valve 104, and the left reaction chamber stops operating. The alarm on the valve position of the left three-way valve 104 can be triggered, for example, at the virtual location of the left three-way valve 104 on the monitoring display device, so that monitoring personnel can promptly detect and respond to the alarm. The preset time can be several seconds or minutes, such as 5s, 8s, 30s, or 1 minute.

[0078] In addition to triggering the valve position alarm, it is also necessary to switch the current state of the detection three-way valve 113 so that the main detection pipe 111 is directly connected to the right negative pressure detection pipe 110, in order to detect the right negative pressure data during exhaust gas treatment in the right reaction chamber. It is understood that there is no specific order required for the valve position alarm and the switching of the detection three-way valve 113; the valve position alarm can be triggered first, followed by the switching of the detection three-way valve 113, or vice versa, or both can be performed simultaneously.

[0079] In one embodiment, the method further includes:

[0080] When the current state of the right three-way valve 106 causes the switching pipe 108 to be not directly connected to the right intake pipe 105, the right negative pressure data detected by the negative pressure detection device 112 is determined to be invalid.

[0081] After a preset time, the valve position alarm of the right three-way valve 106 is triggered, and the right reaction chamber is stopped from operating.

[0082] Switch the current state of the right three-way valve 106 so that the switching pipe 108 is directly connected to the plant discharge pipe 107 for plant discharge.

[0083] Specifically, after the left three-way valve 104 switches states, the right reaction chamber may not be able to operate. If the right intake pipe 105 is blocked or the right negative pressure detection pipe 110 is blocked, the switching pipe 108 and the right intake pipe 105 are not directly connected. At this time, the right negative pressure data detected by the negative pressure detection device 112 from the right negative pressure detection pipe 110 is invalid (when the main intake pipe 101 and the right intake pipe 105 are not directly connected, it may be in the process of closing the air passage of the right intake pipe 105. During this process, gas will still pass through the right intake pipe 105, so the right negative pressure data can still be detected. At this time, the data is invalid).

[0084] After determining that the switching pipe 108 and the right intake pipe 105 are in a non-straight-through state for a preset time, an alarm is triggered on the valve position of the right three-way valve 106, and the right reaction chamber stops operating. The valve position alarm for the right three-way valve 106 can be triggered, for example, at the virtual location of the right three-way valve 106 on the monitoring display device, so that monitoring personnel can promptly detect and respond to the alarm. The preset time can be several seconds or minutes, such as 5s, 8s, 30s, or 1 minute.

[0085] If the switching pipe 108 and the right intake pipe 105 are not in a direct connection state, then the switching pipe 108 and the plant discharge pipe 107 will form a direct connection state, and the exhaust gas will be directly discharged into the plant.

[0086] In one embodiment, the method further includes:

[0087] The maintenance status of the left intake pipe 103 and / or the left negative pressure detection pipe 109 is determined. When the maintenance of the left intake pipe 103 and / or the left negative pressure detection pipe 109 is completed and the pipe is unobstructed, the current state of the left three-way valve 104 is switched so that the main intake pipe 101 is directly connected to the left intake pipe 103. The current state of the detection three-way valve 113 is switched so that the main detection pipe 111 is directly connected to the left negative pressure detection pipe 109. The negative pressure detection device 112 detects the left negative pressure data.

[0088] Specifically, during the operation of the right reaction chamber or when a negative pressure increase event occurs during the operation of the right reaction chamber, the maintenance status of the left intake pipe 103 and / or the left negative pressure detection pipe 109 can be determined. When the maintenance is completed, the operation of the left reaction chamber can be switched to detect the left negative pressure data.

[0089] The waste gas treatment apparatus provided by the present invention is described below. The waste gas treatment apparatus described below can be referred to in correspondence with the waste gas treatment method described above. For example... Figure 8As shown, the device includes: a first determining module 801, a first switching module 802, and a second determining module 803. The first determining module 801 is used to determine the current state of the left three-way valve 104. When the current state of the left three-way valve 104 allows the main intake pipe 101 to be directly connected to the left intake pipe 103, the left reaction chamber is used to treat the exhaust gas, and the left negative pressure data of the left negative pressure detection tube 109 detected by the negative pressure detection device 112 is determined to be valid. The first switching module 802 is used to switch the current state of the left three-way valve 104 when the left negative pressure data is abnormal, so that... The main intake pipe 101 is directly connected to the switching pipe 108, and the current state of the switching detection three-way valve 113 is switched so that the main detection pipe 111 is directly connected to the right negative pressure detection pipe 110. The negative pressure detection device 112 detects the right negative pressure data of the right negative pressure detection pipe 110. The second determination module 803 is used to determine the current state of the right three-way valve 106. When the current state of the right three-way valve 106 makes the switching pipe 108 directly connected to the right intake pipe 105, the right reaction chamber is used to treat the exhaust gas, and the right negative pressure data detected by the negative pressure detection device 112 is determined to be valid.

[0090] The exhaust gas treatment device provided by the present invention, by setting a left negative pressure detection tube 109 and a right negative pressure detection tube 110 on the left intake pipe 103 and the right intake pipe 105 respectively, allows the other negative pressure detection tube 102 to still be used even if one negative pressure detection tube 102 is blocked. This allows switching to another reaction chamber for exhaust gas treatment, and the blocked part can be cleared without stopping the exhaust gas treatment, which greatly reduces the occurrence rate of dual-chamber downtime accidents.

[0091] In one embodiment, the device further includes: a third determining module, a first alarm shutdown module, and a second switching module.

[0092] The third determining module is used to determine that the left negative pressure data detected by the negative pressure detection device 112 is invalid when the current state of the left three-way valve 104 makes the main air intake pipe 101 and the left air intake pipe 103 not directly connected.

[0093] The first alarm shutdown module is used to trigger a valve position alarm for the left three-way valve 104 after a preset time, and to stop the operation of the left reaction chamber.

[0094] The second switching module is used to switch the current state of the left three-way valve 104 so that the main air intake pipe 101 is directly connected to the switching pipe 108, and to switch the current state of the detection three-way valve 113 so that the main detection pipe 111 is directly connected to the right negative pressure detection pipe 110.

[0095] In one embodiment, the device further includes: a fourth determining module, a second alarm shutdown module, and a third switching module.

[0096] The fourth determination module is used to determine that the right negative pressure data detected by the negative pressure detection device 112 is invalid when the current state of the right three-way valve 106 causes the switching pipe 108 to be not directly connected to the right air intake pipe 105.

[0097] The second alarm shutdown module is used to trigger a valve position alarm for the right three-way valve 106 after a preset time, and to stop the right reaction chamber from operating.

[0098] The third switching module is used to switch the current state of the right three-way valve 106, so that the switching pipe 108 is directly connected to the plant discharge pipe 107 for plant discharge.

[0099] In one embodiment, the device further includes a fourth switching module.

[0100] The fourth switching module is used to determine the maintenance status of the left intake pipe 103 and / or the left negative pressure detection pipe 109. When the maintenance of the left intake pipe 103 and / or the left negative pressure detection pipe 109 is completed and the pipe is unobstructed, the current state of the left three-way valve 104 is switched so that the main intake pipe 101 is directly connected to the left intake pipe 103. The current state of the detection three-way valve 113 is switched so that the main detection pipe 111 is directly connected to the left negative pressure detection pipe 109. The negative pressure detection device 112 detects the left negative pressure data.

[0101] Figure 9 An example is a schematic diagram of the physical structure of an electronic device, such as... Figure 9 As shown, the electronic device may include: a processor 910, a communication interface 920, a memory 930, and a communication bus 940, wherein the processor 910, the communication interface 920, and the memory 930 communicate with each other via the communication bus 940. The processor 910 can call logical instructions in the memory 930 to execute an exhaust gas treatment method, which includes:

[0102] The current state of the left three-way valve 104 is determined. When the current state of the left three-way valve 104 makes the main air intake pipe 101 and the left air intake pipe 103 directly connected, the left reaction chamber is used to treat the exhaust gas, and the left negative pressure data of the left negative pressure detection tube 109 detected by the negative pressure detection device 112 is determined to be valid.

[0103] When the left negative pressure data is abnormal, the current state of the left three-way valve 104 is switched so that the main air intake pipe 101 is directly connected to the switching pipe 108, and the current state of the detection three-way valve 113 is switched so that the main detection pipe 111 is directly connected to the right negative pressure detection pipe 110, and the negative pressure detection device 112 detects the right negative pressure data of the right negative pressure detection pipe 110;

[0104] The current state of the right three-way valve 106 is determined. When the current state of the right three-way valve 106 allows the switching pipe 108 to be directly connected to the right intake pipe 105, the right reaction chamber is used to treat the exhaust gas, and the right negative pressure data detected by the negative pressure detection device 112 is determined to be valid.

[0105] Furthermore, the logical instructions in the aforementioned memory 930 can be implemented as software functional units and, when sold or used as independent products, can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention, essentially, or the part that contributes to the prior art, or a part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of the present invention. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0106] On the other hand, the present invention also provides a computer program product, the computer program product comprising a computer program that can be stored on a non-transitory computer-readable storage medium, wherein when the computer program is executed by a processor, the computer is able to perform the exhaust gas treatment method provided by the above methods, the method comprising:

[0107] The current state of the left three-way valve 104 is determined. When the current state of the left three-way valve 104 makes the main air intake pipe 101 and the left air intake pipe 103 directly connected, the left reaction chamber is used to treat the exhaust gas, and the left negative pressure data of the left negative pressure detection tube 109 detected by the negative pressure detection device 112 is determined to be valid.

[0108] When the left negative pressure data is abnormal, the current state of the left three-way valve 104 is switched so that the main air intake pipe 101 is directly connected to the switching pipe 108, and the current state of the detection three-way valve 113 is switched so that the main detection pipe 111 is directly connected to the right negative pressure detection pipe 110, and the negative pressure detection device 112 detects the right negative pressure data of the right negative pressure detection pipe 110;

[0109] The current state of the right three-way valve 106 is determined. When the current state of the right three-way valve 106 allows the switching pipe 108 to be directly connected to the right intake pipe 105, the right reaction chamber is used to treat the exhaust gas, and the right negative pressure data detected by the negative pressure detection device 112 is determined to be valid.

[0110] In another aspect, the present invention also provides a non-transitory computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, is implemented to perform the exhaust gas treatment methods provided by the methods described above, the method comprising:

[0111] The current state of the left three-way valve 104 is determined. When the current state of the left three-way valve 104 makes the main air intake pipe 101 and the left air intake pipe 103 directly connected, the left reaction chamber is used to treat the exhaust gas, and the left negative pressure data of the left negative pressure detection tube 109 detected by the negative pressure detection device 112 is determined to be valid.

[0112] When the left negative pressure data is abnormal, the current state of the left three-way valve 104 is switched so that the main air intake pipe 101 is directly connected to the switching pipe 108, and the current state of the detection three-way valve 113 is switched so that the main detection pipe 111 is directly connected to the right negative pressure detection pipe 110, and the negative pressure detection device 112 detects the right negative pressure data of the right negative pressure detection pipe 110;

[0113] The current state of the right three-way valve 106 is determined. When the current state of the right three-way valve 106 allows the switching pipe 108 to be directly connected to the right intake pipe 105, the right reaction chamber is used to treat the exhaust gas, and the right negative pressure data detected by the negative pressure detection device 112 is determined to be valid.

[0114] The device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the modules can be selected to achieve the purpose of this embodiment according to actual needs. Those skilled in the art can understand and implement this without any creative effort.

[0115] Through the above description of the embodiments, those skilled in the art can clearly understand that each embodiment can be implemented by means of software plus necessary general-purpose hardware platforms, and of course, it can also be implemented by hardware. Based on this understanding, the above technical solutions, in essence or the part that contributes to the prior art, can be embodied in the form of a software product. This computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, magnetic disk, optical disk, etc., and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute the methods described in the various embodiments or some parts of the embodiments.

[0116] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A waste gas treatment device, characterized in that, include: Left reaction chamber, right reaction chamber, main air inlet pipe, left air inlet pipe, right air inlet pipe, plant discharge pipe, switching pipe, main detection pipe and negative pressure detection device; The first ends of the main intake pipe, the left intake pipe, and the switching pipe are respectively connected to the left three-way valve, so that the main intake pipe can be directly connected to the left intake pipe or directly connected to the switching pipe by switching the left three-way valve; The first end of the right intake pipe, the first end of the plant discharge pipe, and the second end of the switching pipe are respectively connected to the right three-way valve, so that the switching pipe can be directly connected to the right intake pipe or the plant discharge pipe by switching the right three-way valve. A left negative pressure detection tube is connected to the left intake pipe, and a right negative pressure detection tube is connected to the right intake pipe. The free ends of the left negative pressure detection tube, the free ends of the right negative pressure detection tube, and the first end of the main detection tube are respectively connected to a detection three-way valve, so that the main detection tube can be directly connected to the left negative pressure detection tube or directly connected to the right negative pressure detection tube by switching the detection three-way valve. The second end of the left intake pipe is connected to the left reaction chamber, the second end of the right intake pipe is connected to the right reaction chamber, and the second end of the main detection pipe is connected to the negative pressure detection device; At the connection port on the left intake pipe that connects to the left negative pressure detection pipe, a left blocking component is provided on the side near the left three-way valve; And / or, at the connection port on the right intake pipe that connects to the right negative pressure detection pipe, a right blocking component is provided on the side near the right three-way valve; The left and / or right blocking members are arc-shaped plates, with the inner arc surface of the left blocking member facing the left reaction chamber and the inner arc surface of the right blocking member facing the right reaction chamber.

2. A method for treating waste gas, characterized in that, The method, applied to the waste gas treatment equipment of claim 1, comprises: Determine the current state of the left three-way valve. When the current state of the left three-way valve allows the main air intake pipe to be directly connected to the left air intake pipe, the left reaction chamber is used to treat the exhaust gas. Determine that the left negative pressure data of the left negative pressure detection tube detected by the negative pressure detection device is valid. When the left negative pressure data is abnormal, the current state of the left three-way valve is switched so that the main air intake pipe and the switching pipe are directly connected. The current state of the detection three-way valve is switched so that the main detection pipe and the right negative pressure detection pipe are directly connected. The negative pressure detection device detects the right negative pressure data of the right negative pressure detection pipe. Determine the current state of the right three-way valve. When the current state of the right three-way valve allows the switching pipe to be directly connected to the right intake pipe, the right reaction chamber is used to treat the exhaust gas, and the right negative pressure data detected by the negative pressure detection device is confirmed to be valid.

3. The waste gas treatment method according to claim 2, characterized in that, Also includes: When the current state of the left three-way valve causes the main air intake pipe and the left air intake pipe to be not directly connected, the left negative pressure data detected by the negative pressure detection device is determined to be invalid. After a preset time, the valve position alarm of the left three-way valve is triggered, and the left reaction chamber is stopped from operating; Switch the current state of the detection three-way valve so that the main detection tube is directly connected to the right negative pressure detection tube.

4. The waste gas treatment method according to claim 2, characterized in that, Also includes: When the current state of the right three-way valve causes the switching pipe to be non-directly connected to the right intake pipe, the right negative pressure data detected by the negative pressure detection device is determined to be invalid. After a preset time, the valve position alarm of the right three-way valve is triggered, and the right reaction chamber is stopped from operating; Switch the current state of the right three-way valve so that the switching pipe is directly connected to the plant discharge pipe for plant discharge.

5. The waste gas treatment method according to any one of claims 2 to 4, characterized in that, Also includes: The maintenance status of the left intake pipe and / or the left negative pressure detection pipe is determined. When the maintenance of the left intake pipe and / or the left negative pressure detection pipe is completed and the pipe is unobstructed, the current state of the left three-way valve is switched so that the main intake pipe is directly connected to the left intake pipe. The current state of the detection three-way valve is switched so that the main detection pipe is directly connected to the left negative pressure detection pipe. The negative pressure detection device detects the left negative pressure data.

6. A waste gas treatment device, characterized in that, The apparatus for performing the waste gas treatment method as described in any one of claims 2-5 includes: The first determining module is used to determine the current state of the left three-way valve. When the current state of the left three-way valve makes the main air intake pipe and the left air intake pipe directly connected, the left reaction chamber is used to treat the exhaust gas, and the left negative pressure data of the left negative pressure detection tube detected by the negative pressure detection device is determined to be valid. The first switching module is used to switch the current state of the left three-way valve when the left negative pressure data is abnormal, so that the main air intake pipe is directly connected to the switching pipe, and to switch the current state of the detection three-way valve so that the main detection pipe is directly connected to the right negative pressure detection pipe, and the negative pressure detection device detects the right negative pressure data of the right negative pressure detection pipe. The second determining module is used to determine the current state of the right three-way valve. When the current state of the right three-way valve causes the switching pipe to be directly connected to the right intake pipe, the right reaction chamber is used to treat the exhaust gas, and the right negative pressure data detected by the negative pressure detection device is determined to be valid.

7. An electronic device comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that, When the processor executes the program, it implements the waste gas treatment method as described in any one of claims 2 to 5.

8. A non-transitory computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by the processor, it implements the waste gas treatment method as described in any one of claims 2 to 5.

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