A multi-axis laser interferometer optical axis spatial position positioning system and positioning method

Abstract

The application discloses a multi-axis laser interferometer optical axis space position positioning system and a positioning method, which comprises XYZ three-axis laser interferometer optical axis perpendicular adjustment and XYZ three-axis laser interferometer optical axis space intersection adjustment; wherein the optical axis perpendicular adjustment is to move a turntable independent measurement frame into a space coordinate system vertical reference mirror, to adjust the Z, Y and X axis laser interferometers of the turntable independent measurement frame in sequence according to displacement information and energy signals displayed on a display terminal until the displacement information is the minimum and the energy signal is the maximum; and the optical axis space intersection adjustment is to move a standard reference sphere above the turntable independent measurement frame, to adjust the Z, Y and X axis laser interferometers of the turntable independent measurement frame in sequence until the displacement information is the minimum and the energy information is the maximum. The application is simple in operation, fast in laser interferometer space position adjustment, and can realize high-precision positioning of multi-axis laser interferometer optical axes in space positions.

Description

Technical Field

[0001] This invention belongs to the field of precision assembly and adjustment technology of optical systems for large-aperture optical element surface shape accuracy detection devices, and relates to a spatial positioning system and method for optical axis positioning of a multi-axis laser interferometer. Background Technology

[0002] Aspherical elements offer advantages such as aberration correction, improved image quality, expanded field of view, increased working distance, reduced light loss, shorter overall system length, and lighter system weight, thereby achieving high-quality image effects and superior optical properties. In the manufacturing process, aspherical surface shape rapid scanning and inspection devices are increasingly used to inspect the surface shape of these elements. The independent metrology frame of the turntable, as the core component of such devices, is mainly used to detect the micro-displacement relative to the optical element's coordinate system measured by the laser interferometer during the measurement process. (See...) Figure 1 The spatial position control accuracy of the XYZ three-axis laser interferometer in the independent metrology frame of the turntable is particularly important. The turntable's independent metrology frame has three laser interferometer probes distributed along the XYZ axes in the spatial coordinate system. The spatial positions of the XYZ axis laser interferometers must be mutually perpendicular, with the optical axes intersecting at the origin o of the coordinate system. However, due to design and manufacturing errors, it is difficult to ensure that the laser interferometers' optical axes are directly orthogonal in space. This results in micro-displacement errors in the laser interferometer measurements relative to the sample coordinate system during the turntable's independent metrology frame's testing process. This leads to excessively large misalignment between the theoretical design data and the test data, increasing the difficulty of subsequent data processing and severely affecting the testing accuracy of aspherical surfaces. The orthogonality accuracy of the XYZ axis laser interferometer's optical axes in space is a bottleneck problem affecting the measurement accuracy of optical component surface shape accuracy testing devices. Therefore, there is an urgent need for a multi-axis laser interferometer optical axis spatial position positioning method.

[0003] Regarding center alignment methods, Chinese invention patent "Application No. CN106033147B, A Center Alignment System for an Optical Target Simulator and a Spherical Fairing" discloses a combined center alignment system for an optical target simulator and a spherical fairing. This system uses a self-collimating optical system and a simulator test spherical fairing for center alignment. However, this method requires the target spherical fairing and the simulator test spherical fairing to be concentric during center alignment. This places extremely high demands on the position and attitude accuracy of the target spherical fairing and the simulator test spherical fairing, making it difficult to quickly adjust them and guarantee centering accuracy.

[0004] In summary, in order to improve the spatial orthogonality accuracy of the optical axis of a multi-axis laser interferometer, this patent invention provides a spatial positioning system and method for the optical axis of a multi-axis laser interferometer. Summary of the Invention

[0005] (I) Purpose of the Invention

[0006] The purpose of this invention is to solve the problem of orthogonality accuracy of the optical axis in the spatial position of a multi-axis laser interferometer, and to propose a spatial position positioning system and method for the optical axis of a multi-axis laser interferometer. This system is easy to operate, allows for rapid adjustment of the spatial pose of the laser interferometer, and enables high-precision positioning of the optical axis in the spatial position of the multi-axis laser interferometer, thereby improving the detection accuracy of the aspherical surface rapid scanning detection device.

[0007] (II) Technical Solution

[0008] To address the aforementioned technical problems, this invention provides a spatial positioning system for the optical axes of a multi-axis laser interferometer, comprising a mutually perpendicular alignment device for the optical axes of an XYZ three-axis laser interferometer and a spatially intersecting alignment fixture for the optical axes of the XYZ three-axis laser interferometer. The mutually perpendicular alignment device includes a display terminal 5, a controller 6, and a spatial coordinate system vertical reference mirror 7. The controller 6 is connected to the Z-axis interferometer 1, the Y-axis interferometer 3, and the X-axis interferometer 4 via optical fibers. The display terminal 5 is connected to the controller 6 via a cable. The controller 6 reads the positions of the Z-axis interferometer 1, the Y-axis interferometer 3, and the X-axis interferometer. The controller 6 processes the real-time distance signals of the four pairs of vertical reference mirrors 7 in the spatial coordinate system and displays the real-time distance values ​​and laser energy information on the display terminal 5. The optical axis spatial co-intersection assembly fixture includes a standard reference sphere 12, which is arranged on one side of the independent metrology frame of the turntable where the XYZ triaxial laser interferometer is located. This ensures that the XYZ triaxial laser interferometer and the standard reference sphere 12 do not interfere with each other during the assembly and adjustment of the independent metrology frame of the turntable, and realizes that the optical axes of the Z-axis interferometer 1, Y-axis interferometer 3, and X-axis interferometer 4 are concentric with the center of the standard reference sphere 12.

[0009] The spatial coordinate system vertical reference mirror 7 includes a Z-axis standard flat crystal 8, an X-axis standard flat crystal 9, a spatial coordinate system vertical reference mirror frame 10, and a Y-axis standard flat crystal 11. The Z-axis standard flat crystal 8, X-axis standard flat crystal 9, and Y-axis standard flat crystal 11 are high-precision standard flat crystals with a surface accuracy better than 1 / 50λ. The length and width of the standard flat crystals are adapted to the working range of the turntable independent metrology frame interferometer. The hollow structure of the spatial coordinate system vertical reference mirror frame 10 ensures that there is no light obstruction during the spatial vertical assembly and adjustment of the turntable independent metrology frame interferometer, which facilitates the operation and adjustment of the laser interferometer. At the same time, it must be ensured that the Z-axis standard flat crystal 8, X-axis standard flat crystal 9, and Y-axis standard flat crystal 11 will not change in verticality due to poor rigidity of the spatial coordinate system vertical reference mirror frame 10 during the assembly and adjustment process. The Z-axis standard flat crystal 8, X-axis standard flat crystal 9, and Y-axis standard flat crystal 11 are installed on the spatial coordinate system vertical reference mirror frame 10 after pose adjustment to form the spatial coordinate system vertical reference mirror 7.

[0010] Among them, the vertical reference mirror 7 of the spatial coordinate system can realize that the X-axis standard flat mirror 9 is perpendicular to the Y-axis standard flat mirror, the X-axis standard flat mirror 9 is perpendicular to the Z-axis standard flat mirror 8, and the X-axis standard flat mirror 9 is perpendicular to the Z-axis standard flat mirror 8. The vertical accuracy can meet 5″, providing a reference for the vertical adjustment of the optical axis of the XYZ triaxial laser interferometer of the turntable independent metering frame.

[0011] This invention also provides a spatial co-intersection assembly fixture for an XYZ triaxial laser interferometer, which is a standard reference sphere 12. Its outer dimensions are one-quarter of a standard optical sphere shell, and its inner surface is coated with a reflective silver film. The surface accuracy of the inner surface is better than 1 / 30λ. The radius of the inner surface sphere is larger than the outer dimensions of the independent metrology frame of the turntable, ensuring that the laser interferometer and the standard reference sphere do not interfere during the assembly and adjustment of the independent metrology frame of the turntable, thereby achieving concentricity between the optical axes of the Z-axis interferometer 1, the Y-axis interferometer 3, and the X-axis interferometer 4 and the center of the standard reference sphere 12.

[0012] This invention provides a method for spatial positioning of the optical axis of a multi-axis laser interferometer, comprising the following steps:

[0013] Step 1: Construct an independent measurement frame for the turntable. The optical axes of the XYZ triaxial laser interferometer are perpendicular to each other. Adjust the optical path. Fix the vertical reference mirror of the spatial coordinate system on the horizontal optical platform. Connect the controller to the XYZ triaxial laser interferometer with an optical fiber. Connect the controller to the display terminal with a cable.

[0014] Step 2: Move the independent measurement frame of the turntable into the vertical reference mirror of the spatial coordinate system. By adjusting the interferometer support of the independent measurement frame of the turntable, make the XYZ three-axis laser interferometer of the independent measurement frame of the turntable visually basically aligned with the XYZ standard flat crystal in the vertical reference mirror of the spatial coordinate system.

[0015] Step 3: Power on the controller and display terminal. The display terminal displays displacement and energy information. At this time, manually adjust the tilt of the Z-axis laser interferometer of the turntable's independent metering frame. Observe until the display terminal shows the minimum displacement information and the maximum energy information. The adjustment of the Z-axis laser interferometer is then complete.

[0016] Repeat step 3 to complete the adjustment of the X-axis and Y-axis laser interferometers of the turntable's independent metrology frame.

[0017] Step 4: Disconnect the spatial coordinate system perpendicular reference mirror from the mutually perpendicular optical path of the XYZ triaxial laser interferometer of the independent metrology frame on the turntable, build the spatially intersecting optical path of the XYZ triaxial laser orthogonal interferometer, move the standard reference sphere close to the top of the independent metrology frame on the turntable, and adjust the standard reference sphere so that the intersection of the XYZ triaxial laser interferometer of the independent metrology frame on the turntable is basically at the center of the sphere.

[0018] Step 5: Manually adjust the translation of the Z-axis laser interferometer of the independent metering frame on the turntable, and observe until the display terminal shows the minimum displacement information and the maximum energy information. The adjustment of the Z-axis laser interferometer is then complete.

[0019] Repeat step 5 to complete the adjustment of the X-axis and Y-axis laser interferometers of the turntable's independent metrology frame.

[0020] Step 6: Secure the XYZ triaxial laser interferometer to the turntable independent metrology frame interferometer support. After securing, remove the standard reference sphere and complete the adjustment.

[0021] (III) Beneficial Effects

[0022] The multi-axis laser interferometer optical axis spatial position positioning system and positioning method provided by the above technical solution have the following beneficial effects:

[0023] (1) The present invention utilizes a spatial coordinate system vertical reference mirror device to replace trial and error in completing the mutual perpendicular alignment of the optical axes of the XYZ three-axis laser orthogonal interferometer. Compared with trial and error, it has the advantages of high efficiency and good accuracy.

[0024] (2) This invention utilizes a standard reference sphere to complete the spatial co-intersection of the optical axes of the XYZ triaxial laser interferometer. When the optical axis directions of the three laser interferometers coincide with the radius direction of the standard reference, the optical axes of the XYZ triaxial laser interferometers are concentrically intersected.

[0025] (3) The device used in this invention has a simple structure, a convenient assembly and adjustment method, and high orthogonal accuracy;

[0026] (4) The spatial positioning method used in this invention lays the foundation for achieving high-precision surface shape detection of aspherical detection devices. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the XYZ three-axis laser orthogonal interferometer structure in an independent metering frame of a turntable, which is the object of this invention.

[0028] Figure 2 This is a schematic diagram of an XYZ triaxial laser orthogonal interferometer with its optical axes perpendicular to each other.

[0029] Figure 3 This is a schematic diagram of a vertical reference mirror in a spatial coordinate system.

[0030] Figure 4 This is a schematic diagram of the spatial co-intersection of the optical axes of an XYZ triaxial laser orthogonal interferometer.

[0031] Figure 5 for Figure 2 and Figure 4 A schematic diagram of the assembly and adjustment.

[0032] In the diagram: 1. Z-axis laser interferometer; 2. Turntable independent metrology frame interferometer support; 3. X-axis laser interferometer; 4. Y-axis laser interferometer; 5. Display terminal; 6. Controller; 7. Vertical reference mirror of spatial coordinate system; 8. Z-axis standard flat crystal; 9. X-axis standard flat crystal; 10. Vertical reference mirror frame of spatial coordinate system; 11. Y-axis standard flat crystal; 12. Standard reference sphere. Detailed Implementation

[0033] To make the objectives, contents, and advantages of the present invention clearer, the specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and examples.

[0034] To address the problem of orthogonal precision assembly and adjustment technology of the XYZ axis laser interferometer of the turntable independent metrology frame in a certain aspherical optical element testing device, this embodiment provides a high-precision assembly and adjustment and a reasonable and feasible solution to achieve high-precision spatial positioning and adjustment of the optical axis of the multi-axis laser interferometer.

[0035] like Figure 1 The diagram shows the structure of a three-axis laser orthogonal interferometer in the independent metrology frame of a turntable for a certain aspherical optical element testing device. It includes a Z-axis laser orthogonal interferometer 1, a turntable independent metrology frame interferometer support 2, an X-axis laser interferometer 3, and a Y-axis laser interferometer 4.

[0036] like Figure 2 and Figure 5 The diagram shown is a schematic of an XYZ three-axis laser orthogonal interferometer with its optical axes perpendicular to each other. Figure 3 A schematic diagram of a vertical reference mirror in a spatial coordinate system is shown, illustrating a display terminal 5, a controller 6, and a vertical reference mirror 7. The controller 6 is connected via optical fibers to the Z-axis interferometer 1, Y-axis interferometer 3, and X-axis interferometer 4, respectively. The display terminal 5 is connected to the controller 6 via cables. The controller reads real-time test signals of the distances from the Z-axis interferometer 1, Y-axis interferometer 3, and X-axis interferometer 4 to the vertical reference mirror 7. The controller 6 processes the data based on the measured real-time signals and displays the real-time distance values ​​and laser energy information on the display terminal 5. An independent measurement frame for the turntable and the vertical reference mirror 7 are arranged on the worktable.

[0037] The spatial coordinate system vertical reference mirror 7 includes a Z-axis standard flat crystal 8, an X-axis standard flat crystal 9, and a spatial coordinate system vertical reference mirror frame 10. The Z-axis standard flat crystal 8, X-axis standard flat crystal 9, and spatial coordinate system vertical reference mirror frame 10 are high-precision standard flat crystals with a surface accuracy better than 1 / 50λ. The length and width of the standard flat mirrors are adapted to the working range of the turntable's independent metrology frame interferometer. The spatial coordinate system vertical reference mirror frame 10 has a hollow structure and is equipped with mounting holes for the Z-axis standard flat crystal 8, X-axis standard flat crystal 9, and Y-axis standard flat crystal 11. The hollow structure of the straight reference mirror frame 10 ensures that there is no light obstruction during the vertical assembly and adjustment of the independent metrology frame interferometer of the turntable, which facilitates the operation and adjustment of the laser interferometer. At the same time, it must be ensured that the Z-axis standard flat crystal 8, X-axis standard flat crystal 9, and Y-axis standard flat crystal 11 will not change in verticality due to poor rigidity of the vertical reference mirror frame 10 of the spatial coordinate system during the assembly and adjustment process. The Z-axis standard flat crystal 8, X-axis standard flat crystal 9, and Y-axis standard flat crystal 11 are installed on the vertical reference mirror frame 10 of the spatial coordinate system after pose adjustment, forming the vertical reference mirror 7 of the spatial coordinate system.

[0038] The vertical reference mirror 7 of the spatial coordinate system can achieve perpendicularity between the X-axis standard flat mirror 9 and the Y-axis standard flat mirror, the X-axis standard flat mirror 9 and the Z-axis standard flat mirror 8, and the X-axis standard flat mirror 9 and the Z-axis standard flat mirror 8, with a vertical accuracy of 5″, providing a reference for the verticality of the optical axis of the XYZ triaxial laser interferometer.

[0039] The standard reference sphere 12 has an outer dimension of one-quarter of a standard optical sphere shell, with a reflective silver film coated on the inner surface. The inner surface surface accuracy is better than 1 / 30λ, and the inner surface sphere radius is larger than the outer dimension of the turntable's independent metrology frame. This ensures that the laser interferometer and the standard reference sphere do not interfere with each other during the assembly and adjustment of the turntable's independent metrology frame, thereby achieving concentricity between the optical axes of the Z-axis interferometer 1, Y-axis interferometer 3, and X-axis interferometer 4 and the center of the standard reference sphere 12.

[0040] like Figure 2 , 4 As shown in Figure 5, based on the above-mentioned device for orthogonally aligning the optical axis of the XYZ-axis laser interferometer of the independent metrology frame of the turntable, this embodiment also provides a method for spatially positioning the optical axis of the XYZ-axis laser interferometer of the independent metrology frame of the turntable, including the following steps:

[0041] Step 1: Construct an independent measurement frame for the turntable. The optical axes of the XYZ triaxial laser interferometer are perpendicular to each other. Adjust the optical path. Fix the vertical reference mirror of the spatial coordinate system on the horizontal optical platform. Connect the controller to the XYZ triaxial laser interferometer with an optical fiber. Connect the controller to the display terminal with a cable.

[0042] Step 2: Move the independent measurement frame of the turntable into the vertical reference mirror of the spatial coordinate system. By adjusting the interferometer support of the independent measurement frame of the turntable, make the XYZ three-axis laser interferometer of the independent measurement frame of the turntable visually basically aligned with the XYZ standard flat crystal in the vertical reference mirror of the spatial coordinate system.

[0043] Step 3: Power on the controller and display terminal. The display terminal displays displacement and energy information. At this time, manually adjust the tilt of the Z-axis laser interferometer of the turntable's independent metering frame. Observe until the display terminal shows the minimum displacement information and the maximum energy information. The adjustment of the Z-axis laser interferometer is then complete.

[0044] Repeat step 3 to complete the adjustment of the X-axis and Y-axis laser interferometers of the turntable's independent metrology frame.

[0045] Step 4: Disconnect the spatial coordinate system perpendicular reference mirror from the mutually perpendicular optical path of the XYZ triaxial laser interferometer of the independent metrology frame on the turntable, build the spatially intersecting optical path of the XYZ triaxial laser orthogonal interferometer, move the standard reference sphere close to the top of the independent metrology frame on the turntable, and adjust the standard reference sphere so that the intersection of the XYZ triaxial laser interferometer of the independent metrology frame on the turntable is basically at the center of the sphere.

[0046] Step 5: Manually adjust the translation of the Z-axis laser interferometer of the independent metering frame on the turntable, and observe until the display terminal shows the minimum displacement information and the maximum energy information. The adjustment of the Z-axis laser interferometer is then complete.

[0047] Repeat step 5 to complete the adjustment of the X-axis and Y-axis laser interferometers of the turntable's independent metrology frame.

[0048] Step 6: Secure the XYZ triaxial laser interferometer to the turntable independent metrology frame interferometer support. After securing, remove the standard reference sphere and complete the adjustment.

[0049] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A spatial positioning system for the optical axis of a multi-axis laser interferometer, characterized in that, The system includes a mutually perpendicular optical axis adjustment device for an XYZ triaxial laser interferometer and a spatially intersecting optical axis adjustment fixture for an XYZ triaxial laser interferometer. The mutually perpendicular optical axis adjustment device includes a display terminal (5), a controller (6), and a spatial coordinate system vertical reference mirror (7). The controller (6) is connected to the Z-axis interferometer (1), Y-axis interferometer (3), and X-axis interferometer (4) via optical fibers. The display terminal (5) is connected to the controller (6) via a cable. The controller (6) reads the Z-axis interferometer (1), Y-axis interferometer (3), and X-axis interferometer (4) relative to the spatial coordinate system vertical reference mirror (7). The controller (6) performs data processing based on the real-time test signal of the distance, and displays the real-time distance value and laser energy information on the display terminal (5); the optical axis spatial co-intersection assembly tooling includes a standard reference sphere (12), which is arranged on one side of the independent metrology frame of the turntable where the XYZ triaxial laser interferometer is located, so that the XYZ triaxial laser interferometer and the standard reference sphere (12) do not interfere during the assembly and adjustment of the independent metrology frame of the turntable, and realize that the optical axes of the Z-axis interferometer (1), Y-axis interferometer (3), and X-axis interferometer (4) are concentric with the center of the standard reference sphere (12); The spatial coordinate system vertical reference mirror (7) includes a spatial coordinate system vertical reference mirror frame (10) and Z-axis standard flat crystal (8), X-axis standard flat crystal (9), and Y-axis standard flat crystal (11) arranged on three axial planes of the spatial coordinate system vertical reference mirror frame (10). The Z-axis standard flat crystal (8), X-axis standard flat crystal (9), and Y-axis standard flat crystal (11) are installed on the spatial coordinate system vertical reference mirror frame (10) after pose adjustment to form the spatial coordinate system vertical reference mirror (7).

2. The multi-axis laser interferometer optical axis spatial positioning system as described in claim 1, characterized in that, The three axial surfaces of the vertical reference mirror frame (10) of the spatial coordinate system are provided with hollow structures, and the Z-axis standard flat crystal (8), X-axis standard flat crystal (9) and Y-axis standard flat crystal (11) are arranged on the outside of the hollow structures.

3. The multi-axis laser interferometer optical axis spatial positioning system as described in claim 2, characterized in that, In the vertical reference mirror (7) of the spatial coordinate system, the X-axis standard flat mirror (9) is perpendicular to the Y-axis standard flat mirror (11), the X-axis standard flat mirror (9) is perpendicular to the Z-axis standard flat mirror (8), and the Y-axis standard flat mirror (11) is perpendicular to the Z-axis standard flat mirror (8). The vertical accuracy meets 5″, providing a reference for the vertical adjustment of the optical axis of the XYZ triaxial laser interferometer of the independent metering frame of the turntable.

4. The multi-axis laser interferometer optical axis spatial positioning system as described in claim 3, characterized in that, The standard reference sphere (12) has an outer dimension of one-quarter of a standard optical sphere shell, and its inner surface is coated with a reflective silver film. The inner surface sphere radius is larger than the outer dimension of the turntable's independent metering frame.

5. A method for spatial positioning of the optical axis of a multi-axis laser interferometer, characterized in that, The optical axis of the XYZ triaxial laser interferometer of the turntable independent metrology frame is vertically orthogonally adjusted using the optical axis spatial positioning system of the multi-axis laser interferometer as described in claim 4.

6. The method for locating the spatial position of the optical axis of a multi-axis laser interferometer as described in claim 5, characterized in that, The vertical orthogonal alignment of the optical axis includes the following steps: Step 1: Set up the mutually perpendicular optical axis adjustment device for the XYZ three-axis laser interferometer, fix the spatial coordinate system vertical reference mirror on the horizontal optical platform, connect the controller to the XYZ three-axis laser interferometer with optical fiber, and connect the controller to the display terminal with cable; Step 2: Move the independent measurement frame of the turntable into the vertical reference mirror of the spatial coordinate system. By adjusting the interferometer support of the independent measurement frame of the turntable, make the XYZ three-axis laser interferometer of the independent measurement frame of the turntable visually basically aligned with the XYZ standard flat crystal in the vertical reference mirror of the spatial coordinate system. Step 3: Power on the controller and display terminal. The display terminal displays displacement and energy information. At this time, manually adjust the tilt of the Z-axis laser interferometer of the turntable's independent metering frame. Observe until the display terminal shows the minimum displacement information and the maximum energy information. The adjustment of the Z-axis laser interferometer is then complete. Repeat step 3 to complete the adjustment of the X-axis and Y-axis laser interferometers of the turntable's independent metrology frame; Step 4: Disconnect the spatial coordinate system vertical reference mirror from the mutually perpendicular optical path of the XYZ triaxial laser interferometer of the independent metrology frame on the turntable, build the spatially intersecting optical path of the XYZ triaxial laser orthogonal interferometer, move the standard reference sphere close to the top of the independent metrology frame on the turntable, and adjust the standard reference sphere so that the intersection of the XYZ triaxial laser interferometer of the independent metrology frame on the turntable is basically at the center of the sphere. Step 5: Manually adjust the translation of the Z-axis laser interferometer of the independent metering frame on the turntable, and observe until the display terminal shows the minimum displacement information and the maximum energy information. The adjustment of the Z-axis laser interferometer is then complete. Repeat step 5 to complete the adjustment of the X-axis and Y-axis laser interferometers of the turntable's independent metrology frame; Step 6: Secure the XYZ triaxial laser interferometer to the turntable independent metrology frame interferometer support. After securing, remove the standard reference sphere and complete the adjustment.

7. The application of a multi-axis laser interferometer optical axis spatial positioning system based on any one of claims 1-4 in the field of optical system assembly and adjustment technology for large-aperture optical element surface shape accuracy detection.

8. The application of the multi-axis laser interferometer optical axis spatial position positioning method as described in claim 5 or 6 in the field of optical system assembly and adjustment technology for large-aperture optical element surface shape accuracy detection.

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