Vortex optical fiber probe, preparation method and scanning probe and micro-nano manipulation system

Abstract

The application provides a vortex optical fiber probe, a preparation method, a scanning probe and a micro-nano manipulation system. The vortex optical fiber probe comprises: an optical fiber, the optical fiber is subjected to a tapering treatment to form a base and a transition zone connected with the base; and a micro-nano structure located at one end of the transition zone, the micro-nano structure comprises a spiral phase plate and a needle tip at the end of the micro-nano structure, and the spiral phase plate and the needle tip are both prepared by 3D printing, wherein the cross-sectional diameter of the end is between 100 nm and 10 μm. The vortex optical fiber probe, the preparation method, the scanning probe and the micro-nano manipulation system can realize optical and mechanical detection on a micro-particle sample through a probe prepared based on a general optical fiber and 3D printing, the probe preparation process is simple, the cost is low, and the universality is strong.

Description

Technical Field

[0001] This application mainly relates to the field of laser nanofabrication technology, and in particular to a vortex fiber probe, its preparation method, scanning probe, and micro / nano manipulation system. Background Technology

[0002] In recent years, optical devices have shown a trend towards miniaturization, making the design and application of micro- and nano-optical devices a research hotspot. Among these, micro- and nano-fibers, due to their small size and light weight, are widely used in various optical detection systems. Meanwhile, silicon-based micro- and nano-fibers, with their low loss, ultra-low mass, strong evanescent field distribution, and flexibility, are ideal devices for optical force measurement and optomechanical applications. In recent years, fiber optic probes have played an increasingly important role in optical devices, appearing in scanning probe microscopes and sensors. Therefore, research on the performance of fiber optic probes is of great significance, including the measurement of the stiffness coefficient of micro- and nano-fibers and the measurement of optomechanical deformation. Fiber optic probes are the most common type of probe. When combined with a quartz tuning fork, the distance between the probe and the sample surface is controlled by shear force, making it less than half the wavelength of visible light, thus obtaining subwavelength-scale sample surface information. Based on this, if the fiber is modified to form a functional fiber optic probe, and then calibrated using amplitude and phase information fed back from the tuning fork of an atomic force microscope, the intensity distribution and magnitude of the irradiated light field can be obtained. Measurement methods based on the aforementioned properties represent a significant step forward in advancing the measurement of weak light forces. Therefore, by developing specialized functional probes, the detection of weak light forces can be achieved.

[0003] Currently, in the field of nanometry, high-end microscopes such as scanning probe microscopes are still the main measuring instruments, with the size and shape of the probe determining the imaging performance. Atomic force microscopy (AFM)-based probe scanning can achieve good imaging resolution. However, ordinary AFM-based probes can only obtain the lateral and longitudinal dimensions of the sample, and are powerless to measure mechanical information such as inter-sample interaction forces, stress, and illumination forces. This mechanical information is crucial in determining the function of micro / nanostructure devices. Therefore, there is an urgent need for a fiber optic probe that is easy to manufacture and can combine mechanical measurement with ordinary atomic force (non-)contact measurement to solve the aforementioned measurement challenges. Summary of the Invention

[0004] The technical problem to be solved by this application is to provide a vortex fiber probe, a preparation method, a scanning probe, and a micro-nano manipulation system. It can realize optical and mechanical detection of particulate samples by using probes based on general-purpose optical fibers and 3D printing. The probe preparation process is simple, low-cost, and highly universal.

[0005] To address the aforementioned technical problems, this application provides a vortex fiber probe, comprising: an optical fiber, wherein the optical fiber is tapered to form a substrate and a transition region connected to the substrate; and a micro / nano structure located at one end of the transition region, the micro / nano structure comprising a helical phase plate and a tip located at the end of the micro / nano structure, wherein the helical phase plate and the tip are both fabricated by 3D printing, wherein the cross-sectional diameter of the end is between 100 nm and 10 μm.

[0006] In one embodiment of the present invention, the spiral phase plate and the needle tip are made of photoresist.

[0007] In one embodiment of the present invention, the refractive index of the materials of the spiral phase plate and the needle tip is in the range of 1.5 to 1.62.

[0008] In one embodiment of the present invention, the optical fiber comprises a quartz glass optical fiber.

[0009] In one embodiment of the present invention, the diameter of the optical fiber is 100-150 μm.

[0010] Another aspect of the present invention provides a method for preparing a vortex fiber probe, comprising the following steps: preparing an optical fiber and removing the coating layer from the middle section of the optical fiber to expose the optical fiber as bare fiber in the middle section; tapering the middle section exposing the bare fiber to obtain a tapered optical fiber having a matrix and a transition region connected to the matrix; cutting the transition region of the tapered optical fiber to form a frustum in the transition region; and printing a helical phase plate and a tip on the frustum according to preset 3D printing parameters to obtain the vortex fiber probe.

[0011] In one embodiment of the present invention, the preparation method further includes: performing 3D modeling of the spiral phase plate and the tip in finite element simulation software to obtain the preset 3D printing parameters; and placing the tapered optical fiber that has formed the frustum in a femtosecond laser 3D lithography instrument, and printing the spiral phase plate and the tip on the frustum according to the preset 3D printing parameters.

[0012] Another aspect of the present invention provides a scanning probe for an atomic force microscope, comprising: a vortex fiber probe proposed in this invention; a tuning fork connected to the vortex fiber probe; and an atomic force microscope connected to the tuning fork.

[0013] Another aspect of the present invention provides a micro / nano manipulation system, comprising: a scanning probe for an atomic force microscope according to the present invention; and a micro / nano sample to be tested, wherein a vortex fiber probe in the scanning probe is adapted to manipulate the rotation of the micro / nano sample to be tested in order to perform surface imaging and / or mechanical probing of the micro / nano sample to be tested.

[0014] In one embodiment of the present invention, the micro-nano manipulation system further includes a laser, a focusing objective, a coupler, and a single-mode fiber, wherein the fiber in the vortex fiber probe is connected to the coupler, and the single-mode fiber and the focusing objective are also connected to the coupler; after the laser emits a laser beam, the laser beam is focused by the focusing objective to generate a vortex beam at the tip of the vortex fiber probe, and the sample to be tested is located in the optical path of the vortex beam.

[0015] Compared with the prior art, this application has the following advantages: The vortex fiber probe provided by this invention has the advantages of low beam coupling energy loss and small-scale integration, and can directly generate vortex beams at the end of the fiber probe; In addition, the vortex fiber probe provided by this invention has the ability to measure the interaction forces between materials and the force of irradiated laser light, and can be combined with atomic force microscopy for subsequent sample surface imaging and mechanical detection. It has the advantages of flexible operation and precise control, and can be applied to biological cells, chemical material molecules, etc., to manipulate rotating particles; From the perspective of preparation method, the preparation method of the vortex fiber probe proposed in this invention adopts the relatively mature structure of tapered cutting by the Combiner Manufacturing System (CMS) fiber processing platform and writing SPP by the femtosecond laser 3D lithography instrument. The operation is simple and consistent, and the versatility and universality are both high. Attached Figure Description

[0016] The accompanying drawings are included to provide a further understanding of this application; they are incorporated into and constitute a part of this application. The drawings illustrate embodiments of this application and, together with this specification, serve to explain the principles of this application. In the drawings:

[0017] Figure 1 This is a schematic diagram of the structure of a vortex fiber probe according to an embodiment of the present invention;

[0018] Figure 2 This is an actual end face view of a spiral phase plate of different orders in a vortex fiber probe according to an embodiment of the present invention during the 3D printing process.

[0019] Figure 3 This is a schematic diagram of the architecture of a scanning probe and micro / nano manipulation system for an atomic force microscope according to an embodiment of the present invention; and

[0020] Figure 4 This is a schematic flowchart of a method for preparing a vortex fiber probe according to an embodiment of the present invention. Detailed Implementation

[0021] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are merely some examples or embodiments of this application. For those skilled in the art, these drawings can be applied to other similar scenarios without creative effort. Unless obvious from the context or otherwise specified, the same reference numerals in the drawings represent the same structures or operations.

[0022] As indicated in this application and claims, unless the context clearly indicates otherwise, the words "a," "an," "an," and / or "the" are not specifically singular and may include plural forms. Generally speaking, the terms "comprising" and "including" only indicate the inclusion of explicitly identified steps and elements, which do not constitute an exclusive list, and the method or apparatus may also include other steps or elements.

[0023] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps described in these embodiments do not limit the scope of this application. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it need not be further discussed in subsequent drawings.

[0024] In the description of this application, it should be understood that the orientation or positional relationship indicated by directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" is usually based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing this application and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this application; the directional terms "inner" and "outer" refer to the inner and outer contours relative to the outline of each component itself.

[0025] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.

[0026] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, these terms have no special meaning and therefore should not be construed as limiting the scope of protection of this application. In addition, although the terminology used in this application is selected from commonly known and used terms, some terms mentioned in this application's specification may have been chosen by the applicant according to his or her judgment, and their detailed meanings are explained in the relevant sections of this description. Moreover, this application should be understood not only through the actual terms used, but also through the meaning implied by each term.

[0027] It should be understood that when a component is referred to as "on another component," "connected to another component," "coupled to another component," or "in contact with another component," it can be directly on, connected to, coupled to, or in contact with that other component, or there may be an intervening component. In contrast, when a component is referred to as "directly on another component," "directly connected to," "directly coupled to," or "directly in contact with" another component, there is no intervening component. Similarly, when a first component is referred to as "electrically contacting" or "electrically coupled to" a second component, there is an electrical path between the first and second components that allows current to flow. This electrical path may include capacitors, coupled inductors, and / or other components that allow current to flow, even if there is no direct contact between the conductive components.

[0028] An embodiment of the present invention is referred to Figure 1 A vortex fiber probe 10 is proposed. The vortex fiber probe 10 is fabricated based on general-purpose optical fiber and 3D printing, and can be used for optical and mechanical detection of particulate samples. The fabrication process of this vortex fiber probe 10 is simple, low-cost, and highly versatile. According to... Figure 1The vortex fiber probe 10 mainly includes an optical fiber 11 and a micro / nano structure 12.

[0029] Specifically, the optical fiber 11 is tapered to form a substrate 111 and a transition region 112 connected to the substrate 111. A micro / nano structure 12 is located at one end of the transition region 112. More clearly, as... Figure 1 As shown in the enlarged partial view, the micro / nano structure 12 includes a helical phase plate 121 and a tip 122 located at the end a of the micro / nano structure. It is understood that end a, as the end of the micro / nano structure 12 as a whole, is also the end of the tip 122. In several embodiments of this application, the cross-sectional diameter of end a is between 100 nm and 10 μm, preferably, for example, 200 nm, belonging to the micro / nano scale. The vortex fiber probe 10 can directly generate a vortex beam at end a. Therefore, when the vortex fiber probe 10 is used in micro / nano operations, bringing end a close to the sample can achieve rotational trapping of cells and chemical material molecules. When applied to an atomic force microscope (AFM) system, it can not only perform sample surface imaging and near-field scanning, but also detect the optical force of the vortex beam. These details will be referenced below. Figure 2 Further explanation will be provided.

[0030] In this embodiment, specifically, both the spiral phase plate 121 and the needle tip 122 are fabricated using 3D printing. For example, Figure 2 Actual end face views of three different orders of spiral phase plates 121 are shown. By adjusting the 3D printing parameters, spiral phase plates with different characteristic parameters and corresponding needle tips can be fabricated, thus making them suitable for different scenarios.

[0031] For example, in this embodiment, the spiral phase plate 121 and the tip 122, fabricated by 3D printing, are made of photoresist. Preferably, the refractive index of the materials for the spiral phase plate 121 and the tip 122 is between 1.5 and 1.62. On the other hand, the optical fiber 11 can specifically be a common commercial optical fiber such as a quartz glass optical fiber. In this embodiment, the diameter of the optical fiber is 100–150 μm.

[0032] exist Figure 1 Based on the vortex fiber probe 10 shown, Figure 3 This invention further extends the present invention by providing a scanning probe 20 (hereinafter referred to as "scanning probe 20") for atomic force microscopy and a micro / nano reference system 30.

[0033] like Figure 3As shown, the scanning probe 20 includes the aforementioned vortex fiber probe 10, tuning fork 21, and atomic force microscope 22. The tuning fork 21 is connected to the vortex fiber probe 10, and the atomic force microscope 22 is connected to the tuning fork 21. By combining the vortex fiber probe 10 with the tuning fork 21 (e.g., a quartz tuning fork), a probe for atomic force microscopy (AFM) is prepared to scan the surface morphology of sample 300. In this embodiment, the vortex fiber probe 10 can combine atomic force microscopy (AFM) with optical tweezers to measure the optical force of the vortex beam. Furthermore, it can also be used to manipulate the rotation of cells and chemical material molecules.

[0034] Furthermore, through Figure 3 A proposed micro / nano manipulation system 30 includes a scanning probe 20 for atomic force microscopy and a micro / nano sample 300 to be tested placed on a sample stage 301. A vortex fiber probe 10 in the scanning probe 20 is adapted to manipulate the rotation of the micro / nano sample 300 to perform surface imaging and / or mechanical probing of the micro / nano sample 300. For example, from... Figure 3 As can be seen in the magnified partial image, the micro / nano sample 300 to be tested may include microparticles composed of micro / nano-level biological cells or chemical material molecules. The vortex fiber probe 10 in the scanning probe 20 of the present invention can act on such microparticles to achieve non-contact rotational manipulation of microparticle materials.

[0035] To achieve this objective, in this embodiment, the micro / nano manipulation system 30 further includes a laser 31, a focusing objective 32, a coupler 33, a single-mode fiber 34, and a power meter 36. The fiber in the vortex fiber probe 10 is connected to the coupler 33, and the single-mode fiber 34 and the focusing objective 32 are also connected to the coupler 33. When the laser 31 is turned on, a fundamental-mode Gaussian beam is directly emitted. This beam is focused and coupled into the fiber coupler 33 by the focusing objective 32. According to the beam splitting ratio of the coupler 33, a portion of the light continues to propagate along the single-mode fiber 34 and then propagates in free space 35 to the power meter 36 for power measurement; the other portion of the fundamental-mode Gaussian light propagates along the vortex probe 10 to the sample 300 under test, and then... Figure 1 After the 3D-printed spiral phase plate 121 and needle tip 122 are shown, a vortex beam is directly generated in free space, which then acts on the sample 300 to be tested on the sample stage 301.

[0036] The vortex fiber probe, scanning probe for atomic force microscopy, and micro-nano manipulation system proposed in this invention are designed to generate vortex beams directly on the end face of the fiber probe. They have the advantages of high integration, flexible operation, and precise control. They can be used for rotating and manipulating tiny particles, imaging sample surfaces based on atomic force microscopy, near-field scanning, and measuring optical forces.

[0037] Compared to ordinary Gaussian beams, vortex beams possess characteristics such as a phase singularity at the center, a ring-shaped intensity distribution, and a spiral phase wavefront. Therefore, vortex beams have specific application value in optical communication fields such as wavelength division multiplexing (WDM) and encryption / decryption. In recent years, research on vortex beam generation technology has been abundant. There are many methods for generating vortex beams, one being the use of optical devices, such as spatial light modulators, spiral phase plates, cylindrical lens mode converters, and computational holograms; another is generation within optical fibers, such as photonic crystal fiber conversion methods and fiber misalignment methods. These traditional methods for generating vortex beams suffer from drawbacks such as difficulties in optical path debugging, numerous optical conversion devices, and complex fabrication. This invention further combines optical device generation with optical fiber technology, resulting in a fabrication technique that can directly generate vortex beams at the probe end of ordinary commercial single-mode optical fibers. This not only solves the problems of difficult fiber structure design and optical device coupling, but also leverages the advantages of single-mode fibers being inexpensive and widely available, which will promote the subsequent application of vortex beams.

[0038] Another aspect of the present invention refers to Figure 4 A method for preparing a vortex fiber probe is also proposed, comprising the following steps.

[0039] Step 41 involves preparing the optical fiber and removing the coating layer from the middle section of the optical fiber so that the optical fiber is bare in the middle section.

[0040] Step 42 involves tapering the middle section of the bare fiber to obtain a tapered fiber with a matrix and a transition region connected to the matrix.

[0041] Step 43 involves cutting the tapered region of the tapered fiber to form a frustum in the tapered region.

[0042] Step 44 involves printing a spiral phase plate and a needle tip on a circular platform according to preset 3D printing parameters to obtain a vortex fiber probe.

[0043] For example, in some embodiments of the present invention, step 44 specifically includes 3D modeling of the spiral phase plate and the tip in finite element simulation software to obtain preset 3D printing parameters. Further, the tapered optical fiber that has formed a frustum is placed in a femtosecond laser 3D lithography instrument, and the spiral phase plate and the tip are printed on the frustum according to the preset 3D printing parameters.

[0044] To better understand the above preparation method 40, one specific implementation of preparation method 40 in the actual experimental process is described below. The vortex fiber probe can be prepared through the following steps:

[0045] (1) Prepare commonly used laboratory optical fibers, fiber optic clamps, alcohol, and lint-free paper, etc.

[0046] (2) Use fiber optic pliers to strip the coating layer from the middle section of a regular optical fiber, and then wipe the bare fiber part with alcohol-soaked lint-free paper to remove the coating layer.

[0047] (3) Place the optical fiber that has completed step (2) into the Combiner Manufacturing System (CMS).

[0048] In the optical fiber processing platform instruments;

[0049] (4) Select the tapering mode in the computer software, set the appropriate parameters, and complete the tapering of the bare fiber section;

[0050] (5) Then select the cutting mode in the computer software to complete the cutting of the frustum of the bare optical fiber;

[0051] (6) 3D modeling of the spiral phase plate and needle tip was performed in COMSOL Multiphysics finite element simulation software;

[0052] (7) Place the cut fiber probe into a femtosecond laser 3D lithography instrument and print the micro-nano level spiral phase plate and needle tip designed by the software onto the circular platform to obtain the vortex fiber probe.

[0053] In this application Figure 4 Flowcharts are used to illustrate the operations performed by the system according to embodiments of this application. It should be understood that the preceding or following operations are not necessarily performed in exact order. Instead, various steps can be processed in reverse order or simultaneously. Furthermore, other operations may be added to these processes, or one or more steps may be removed from them.

[0054] The basic concepts have been described above. Obviously, for those skilled in the art, the above disclosure is merely illustrative and does not constitute a limitation of this application. Although not explicitly stated herein, those skilled in the art may make various modifications, improvements, and corrections to this application. Such modifications, improvements, and corrections are suggested in this application, and therefore remain within the spirit and scope of the exemplary embodiments of this application.

[0055] Furthermore, this application uses specific terms to describe embodiments of the application. For example, "an embodiment," "one embodiment," and / or "some embodiments" refer to a particular feature, structure, or characteristic related to at least one embodiment of the application. Therefore, it should be emphasized and noted that "an embodiment," "one embodiment," or "an alternative embodiment" mentioned twice or more in different locations in this specification do not necessarily refer to the same embodiment. In addition, certain features, structures, or characteristics in one or more embodiments of the application can be appropriately combined.

[0056] Some aspects of this application can be executed entirely by hardware, entirely by software (including firmware, resident software, microcode, etc.), or by a combination of hardware and software. The aforementioned hardware or software may be referred to as a "data block," "module," "engine," "unit," "component," or "system." The processor may be one or more application-specific integrated circuits (ASICs), digital signal processors (DSPs), digital signal processing devices (DAPDs), programmable logic devices (PLDs), field-programmable gate arrays (FPGAs), processors, controllers, microcontrollers, microprocessors, or combinations thereof. Furthermore, aspects of this application may manifest as computer products residing in one or more computer-readable media, including computer-readable program code. For example, computer-readable media may include, but are not limited to, magnetic storage devices (e.g., hard disks, floppy disks, magnetic tapes, etc.), optical discs (e.g., compressed CDs, digital multifunction DVDs, etc.), smart cards, and flash memory devices (e.g., cards, sticks, key drives, etc.).

[0057] A computer-readable medium may contain a propagated data signal containing computer program code, for example, on baseband or as part of a carrier wave. This propagated signal may take various forms, including electromagnetic, optical, and so on, or suitable combinations thereof. A computer-readable medium can be any computer-readable medium other than a computer-readable storage medium, which can be connected to an instruction execution system, apparatus, or device to enable communication, propagation, or transmission of a program for use. The program code located on the computer-readable medium can be propagated through any suitable medium, including radio, cable, fiber optic cable, radio frequency signals, or similar media, or any combination of the above media.

[0058] Similarly, it should be noted that, in order to simplify the description of the present application and thus aid in the understanding of one or more embodiments, the foregoing description of the embodiments of the present application sometimes combines multiple features into a single embodiment, drawing, or description thereof. However, this disclosure method does not imply that the subject matter of the present application requires more features than those mentioned in the claims. In fact, the embodiments contain fewer features than all the features of the single embodiments disclosed above.

[0059] In some embodiments, numbers describing the quantity of components and attributes are used. It should be understood that such numbers used in the description of embodiments are modified in some examples with the terms "approximately," "approximately," or "generally." Unless otherwise stated, "approximately," "approximately," or "generally" indicates that the numbers are allowed to vary by ±20%. Accordingly, in some embodiments, the numerical parameters used in the specification and claims are approximate values, which may be changed depending on the characteristics required by individual embodiments. In some embodiments, numerical parameters should take into account specified significant digits and employ a general method of digit reservation. Although the numerical ranges and parameters used to confirm their breadth of scope in some embodiments of this application are approximate values, in specific embodiments, such values ​​are set as precisely as feasible.

[0060] Although this application has been described with reference to specific embodiments, those skilled in the art should recognize that the above embodiments are only used to illustrate this application, and various equivalent changes or substitutions can be made without departing from the spirit of this application. Therefore, any changes or modifications to the above embodiments within the essential spirit of this application will fall within the scope of the claims of this application.

Claims

1. A micro-nano manipulation system, characterized in that, include: A scanning probe for an atomic force microscope includes a vortex fiber optic probe, a tuning fork, and an atomic force microscope, wherein the tuning fork is connected to the vortex fiber optic probe, and the atomic force microscope is connected to the tuning fork; and The micro / nano sample to be tested, wherein the vortex fiber probe in the scanning probe is adapted to manipulate the rotation of the micro / nano sample to complete surface imaging and / or mechanical probing of the micro / nano sample. The vortex fiber probe includes: Optical fiber, wherein the optical fiber is tapered to form a matrix and a transition region connected to the matrix; and A micro / nano structure is located at one end of the transition region. The micro / nano structure includes a spiral phase plate and a needle tip located at the end of the micro / nano structure. Both the spiral phase plate and the needle tip are fabricated by 3D printing. The cross-sectional diameter of the end is between 100 nm and 10 μm.

2. The micro-nano manipulation system of claim 1, wherein, The spiral phase plate and the needle tip are made of photoresist.

3. The micro / nano manipulation system as described in claim 2, characterized in that, The refractive index of the materials of the spiral phase plate and the needle tip ranges from 1.5 to 1.

62.

4. The micro / nano manipulation system as described in claim 1 or 2, characterized in that, The optical fiber includes quartz glass optical fiber.

5. The micro / nano manipulation system as described in claim 4, characterized in that, The diameter of the optical fiber is 100~150μm.

6. The micro / nano manipulation system as described in claim 1, characterized in that, It also includes a laser, a focusing objective, a coupler, and a single-mode fiber, among which... The optical fiber in the vortex fiber probe is connected to the coupler, and the single-mode fiber and the focusing objective are also connected to the coupler; After the laser emits a laser beam, the laser beam is focused by the focusing objective lens and generates a vortex beam at the tip of the vortex fiber probe, and the micro / nano sample to be tested is located in the optical path of the vortex beam.

7. A method for fabricating a vortex fiber probe, characterized in that, Suitable for fabricating vortex fiber probes in micro / nano manipulation systems as described in any one of claims 1 to 6, the fabrication method comprising the following steps: Prepare the optical fiber and remove the coating layer from the middle section of the optical fiber to expose the optical fiber as a bare fiber in the middle section; The middle section of the bare fiber is tapered to obtain a tapered optical fiber having a matrix and a transition region connected to the matrix; The transition region of the tapered optical fiber is cut to form a frustum in the transition region; as well as According to preset 3D printing parameters, a spiral phase plate and a needle tip are printed on the circular platform to obtain the vortex fiber probe.

8. The preparation method according to claim 7, characterized in that, Also includes: In finite element simulation software, 3D models of the spiral phase plate and the needle tip are performed to obtain the preset 3D printing parameters; as well as The tapered optical fiber that has formed the truncated cone is placed in a femtosecond laser 3D lithography instrument, and a spiral phase plate and a needle tip are printed on the truncated cone according to the preset 3D printing parameters.

Images