An integrated cleaning device for a precision film-free scribing equipment

Abstract

The present invention discloses an integrated cleaning device for a precision film-free scribing equipment, which comprises a box body, and a cleaning module is installed inside the box body; a water receiving plate is installed on the top of the box body, and a brush assembly and a cleaning sponge assembly are arranged on the water receiving plate; a left material taking port baffle and a right material taking port baffle are respectively installed on the left and right sides of the box body, and a first air inlet and a first water inlet are arranged on the left material taking port baffle; a cylinder is installed in front of the box body, and the cylinder drives a driving shaft to swing the cleaning module left and right; support feet are installed around the bottom of the box body. By adopting the above integrated cleaning device for the precision film-free scribing equipment, the waterproof and sealing performance is improved, the risk of water overflow and water mist floating out is reduced, the occupied space of the whole module is smaller, which is convenient for wiring and arranging other modules of the whole machine equipment, the frequent alarm of the magnetic switch is avoided, the working efficiency is improved, and the products after cleaning can be thoroughly dried, so that the products reaching the next working station are in a dry state.

Description

Technical Field

[0001] The present invention relates to the technical field of equipment cleaning, and particularly to an integrated cleaning device for a precision filmless scribing device. Background Art

[0002] Before and after precision machining of silicon crystal electronic devices such as glass components, wafers, and chips, it is necessary to clean the silicon crystal electronic devices to improve the machining accuracy. A common method is to use a two-fluid nozzle for cleaning.

[0003] When using a two-fluid nozzle assembly in a traditional cleaning device, multiple two-fluid nozzles are used to rinse the surface of the workpiece, and multiple air nozzles blow air to dry the surface of the workpiece. However, each nozzle is independently supplied with water or gas by a separate water pipe or air pipe, resulting in insufficient uniformity of water pressure or air pressure for each nozzle. Moreover, since each nozzle pipeline exists independently, and the two-fluid nozzle assembly is mostly installed inside the machine shell, multiple pipelines occupy a large amount of working space inside the machine shell. To minimize the space occupied by the pipelines, the pipelines need to be bent for arrangement, and excessive bending of the pipelines will cause obstruction to the internal medium flow, further affecting the cleaning effect.

[0004] In addition, in most of the prior arts, a cylinder is used to drive a air knife and a water knife to reciprocate for work. The reciprocating movement of the cylinder driving the air knife and the water knife occupies a large space, and it needs to be used in cooperation with a linear guide rail, and the debugging is complex. When the parallelism between the two linear guide rails does not meet the requirements, the movement resistance of the cylinder increases, resulting in the cylinder not moving in place, the magnetic switch not detecting, and frequent alarms. Since ordinary cylinders do not have a waterproof function, the cylinders need to be arranged outside the cleaning module, and a large opening is made on the bottom plate of the cleaning module to accommodate the connecting parts of the cylinder, the air knife, and the water knife. Therefore, a waterproof curtain needs to be used to cover above the linear guide rail and the cylinder to prevent the water vapor inside the cleaning cavity from leaking to the outside. However, the waterproof curtain can only block the flow of most of the water vapor. When high-pressure water vapor is released, splashing in the cavity will generate water mist, and a small amount of water mist will leak out through the gaps near the waterproof curtain and the linear guide rail support or the cylinder connecting parts, covering the surface of the parts near the cleaning module, which will cause the parts to rust and fail after a long time. Summary of the Invention

[0005] The object of the present invention is to provide an integrated cleaning device for a precision filmless scribing device, which can improve the waterproof and sealing performance, greatly reduce the risk of water overflow and water mist floating out, can make the entire module occupy less space, facilitate wiring and the arrangement of other modules of the whole machine equipment, avoid frequent alarms of the magnetic switch at the same time, improve work efficiency, and can thoroughly dry the products after cleaning, so that the products reaching the next working station are in a dry state.

[0006] To achieve the above object, the present invention provides an integrated cleaning device for a precision film-free scribing equipment, including a box body, inside which a cleaning module is installed; a water receiving plate is installed on the top of the box body, and a brush assembly and a cleaning sponge assembly are respectively arranged on the left upper end surface of the water receiving plate from left to right. A cleaning chamber top plate located directly above the box body is installed on the right side of the water receiving plate, and the middle of the cleaning chamber top plate is a cleaning port; left and right material taking port baffles are respectively installed on the left and right sides of the box body, and a first air inlet and a first water inlet are arranged on the left material taking port baffle; a cylinder bottom plate is arranged in front of the box body, and a cylinder is installed on the cylinder bottom plate. The right end of the cylinder is connected to a rocker, and the bottom of the rocker is connected to a driving block, and the driving block is connected to the cleaning module through a driving shaft; support feet are installed around the bottom of the box body, and a water pipe joint is arranged at the bottom of the box body.

[0007] Preferably, a drying nozzle seat is arranged on the right side of the box body at the top. The front and rear sides of the drying nozzle seat are installed on the top of the right side of the box body through drying nozzle seat mounting brackets. Angle adjustment openings are arranged on the drying nozzle seat mounting brackets. A drying air inlet is installed on the right end surface of the drying nozzle seat, and a blowing nozzle is installed on the top of the drying nozzle seat.

[0008] Preferably, the brush assembly includes a brush and a brush mounting seat, and the brush is fixed on the top of the brush mounting seat; the cleaning sponge assembly includes a cleaning sponge, a sponge mounting base, a sponge water baffle and a sponge fixing tube. The cleaning sponge is installed on the sponge mounting base through the sponge fixing tube, and the sponge water baffles are arranged on the front and rear sides of the sponge mounting base; the bottom of the brush mounting seat and the sponge mounting base are both fixedly connected to the water receiving plate and sealing rings are arranged in the middle; waterway interfaces located below the water receiving plate are arranged below both the brush assembly and the cleaning sponge assembly.

[0009] Preferably, the cylinder is installed on the cylinder bottom plate through a left cylinder fixing plate and a right cylinder fixing plate on the left and right sides respectively. The right end of the cylinder is connected to a Y-shaped joint, and the Y-shaped joint is connected to a linear bearing seat. The linear bearing seat is located on the rocker and an installation flange is arranged on the top of the linear bearing seat.

[0010] Preferably, the cleaning module is installed on the bottom plate of the box body. Front and rear bearing bases are respectively arranged on the front and rear sides of the cleaning module. A front bearing seat and a rear bearing seat are respectively connected to the front and rear bearing bases, and bearings are arranged inside them. Front bearing covers and rear bearing end covers are respectively arranged on the outer end parts of the front bearing seat and the rear bearing seat. A rotating shaft is connected to the inner side of the bearing, and a two-fluid integration block is connected to the inner side of the rotating shaft; the bearing at the front end of the cleaning module is connected to the driving shaft.

[0011] Preferably, rotation shaft mounting plates are provided on both the front and rear sides of the two-fluid integrated block and are connected to the rotation shaft; the two-fluid integrated block includes a waterway integrated block and an air passage integrated block. The waterway integrated block is located below the air passage integrated block. A second water inlet is installed on the left side of the waterway integrated block, and a water outlet is installed on the right side. A second air inlet is installed on the left side of the air passage integrated block, and an air outlet is installed on the right side. A two-fluid nozzle mounting plate is installed above the two-fluid integrated block, and a two-fluid nozzle is installed on the right side above the two-fluid nozzle mounting plate. A third air inlet and a third water inlet are provided below the two-fluid nozzle.

[0012] Preferably, an O-ring is provided between the drive shaft and the box body, and the O-ring is provided between the rotation shaft and the front bearing seat and the rear bearing seat; sealing rubber sheets are provided between the left material taking port baffle and the right material taking port baffle and the box body 10.

[0013] Preferably, a liquid level gauge mounting plate mounted on the inner wall of the box body is provided inside the box body, a float liquid level gauge is mounted on the liquid level gauge mounting plate, and a waterproof connector located on the box body is provided above the liquid level gauge mounting plate.

[0014] Preferably, handles are installed on the outer sides of the left material taking port baffle and the right material taking port baffle.

[0015] Therefore, by adopting the above integrated cleaning device of a precision film-free scribing device, the waterproof and sealing performance of the present invention is improved, the risk of water overflow and water mist floating out is greatly reduced, the space occupied by the whole module is smaller, which is convenient for wiring and arranging other modules of the whole machine equipment, the frequent alarm of the magnetic switch is avoided, the working efficiency is improved, the products after cleaning can be thoroughly dried, and the products reaching the next working station are in a dry state.

[0016] The technical solution of the present invention will be further described in detail below with reference to the drawings and embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a three-dimensional structural schematic diagram of an integrated cleaning device of a precision film-free scribing device of the present invention;

[0018] Figure 2 is a right view of an integrated cleaning device of a precision film-free scribing device of the present invention;

[0019] Figure 3 is a left view of an integrated cleaning device of a precision film-free scribing device of the present invention;

[0020] Figure 4It is a schematic cross-sectional view of an integrated cleaning device of a precision film-free scribing equipment of the present invention;

[0021] Figure 5 It is a schematic view of a cleaning module of an integrated cleaning device of a precision film-free scribing equipment of the present invention;

[0022] Figure 6 It is a schematic view of a two-fluid component of an integrated cleaning device of a precision film-free scribing equipment of the present invention;

[0023] Figure 7 It is a schematic view of an O-ring of an integrated cleaning device of a precision film-free scribing equipment of the present invention.

[0024] Reference numerals

[0025] 1. Brush assembly; 2. Water receiving plate; 3. Cleaning sponge assembly; 4. Cleaning chamber top plate; 5. Cleaning port; 6. Drying nozzle seat; 7. Drying air inlet; 8. Blowing nozzle; 9. Drying nozzle seat mounting bracket; 10. Box body; 11. Rocker; 12. Mounting flange; 13. Linear bearing seat; 14. Driving block; 15. Support foot; 16. Y-joint; 17. Right cylinder fixing plate; 18. Cylinder; 19. Left cylinder fixing plate; 20. Cylinder bottom plate; 21. Right side material taking port baffle; 22. Left side material taking port baffle; 23. Handle; 24. Sewer pipe joint; 25. Waterproof joint; 26. First air inlet; 27. First water inlet; 28. Liquid level gauge mounting plate; 29. Cleaning module; 30. Float type liquid level gauge; 31. Rear bearing base; 32. Rear bearing end cover; 33. Rear bearing seat; 34. Rotating shaft mounting plate; 35. Two-fluid nozzle mounting plate; 36. Two-fluid nozzle; 37. Driving shaft; 38. Front bearing through cover; 39. Front bearing seat; 40. Front bearing base; 41. Second air inlet; 42. Second water inlet; 43. Air circuit integration block; 44. Air outlet; 45. Water circuit integration block; 46. Water outlet; 47. Third air inlet; 48. Third water inlet; 49. O-ring. Detailed implementation manners

[0026] The technical solutions of the present invention will be further described below with reference to the drawings and embodiments.

[0027] Unless otherwise defined, the technical terms or scientific terms used in this invention shall have the ordinary meanings as understood by those of ordinary skill in the field to which this invention pertains. The "first", "second" and similar terms used in this invention do not denote any order, quantity or importance, but are only used to distinguish different components. Words such as "comprising" or "including" mean that the elements or objects appearing before this word cover the elements or objects listed after this word and their equivalents, without excluding other elements or objects. Words such as "connected" or "coupled" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Upper", "lower", "left", "right", etc. are only used to represent relative positional relationships, and when the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0028] Embodiment 1

[0029] As Figure 1 shown, the present invention provides an integrated cleaning device for a precision filmless scribing device, including a box body 10, a water receiving plate 2 is installed on the top of the box body 10, and a brush assembly 1 and a cleaning sponge assembly 3 are respectively arranged on the left upper end surface of the water receiving plate 2 from left to right.

[0030] The brush assembly 1 includes a brush and a brush mounting seat, and the brush is fixed on the top of the brush mounting seat. The cleaning sponge assembly 3 includes a cleaning sponge, a sponge mounting base, a sponge water baffle and a sponge fixing tube. The cleaning sponge is installed on the sponge mounting base through the sponge fixing tube, and sponge water baffles are arranged on both the front and back sides of the sponge mounting base. The bottom of the brush mounting seat and the sponge mounting base are both connected and fixed to the water receiving plate 2 and seals are arranged in the middle, having good sealing performance. Waterway interfaces located below the water receiving plate 2 are arranged below both the brush assembly 1 and the cleaning sponge assembly 3, which can supply water to the brush assembly 1 and the cleaning sponge assembly 3, making it more convenient to wash the device clean.

[0031] A cleaning chamber top plate 4 located directly above the box body 10 is installed on the right side of the water receiving plate 2, and a cleaning port 5 is in the middle of the cleaning chamber top plate 4. A cleaning module 29 is installed inside the box body 10, and the position of the cleaning port 5 corresponds to the position of the cleaning module 29.

[0032] Left and right side material taking port baffles 22 and 21 are respectively installed on the left and right sides of the box body 10, which is convenient for taking away the products in the chamber after the machine stops. The left and right side material taking port baffles 22 and 21 are sealed with the box body 10 by sealing rubber sheets, both having excellent airtightness. A first air inlet 26 and a first water inlet 27 are arranged on the left side material taking port baffle 22 to supply air and water to the cleaning module 29. Handles 23 are installed on the outer sides of both the left and right side material taking port baffles 22 and 21, which can make it more convenient for the operator to open them.

[0033] On the right side of the box body 10, there is a drying nozzle seat 6 located at the top. The front and rear sides of the drying nozzle seat 6 are installed on the top of the right side of the box body 10 through the drying nozzle seat mounting brackets 9. Angle adjustment openings are provided on the drying nozzle seat mounting brackets 9, and the angle of the drying nozzle seat 6 can be adjusted as needed. A drying air inlet 7 is installed on the right end face of the drying nozzle seat 6, and a blowing nozzle 8 is installed on the top of the drying nozzle seat 6, which can blow-dry the cleaned products or workpieces.

[0034] In front of the box body 10, there is a cylinder bottom plate 20. A cylinder 18 is installed on the cylinder bottom plate 20. The left and right sides of the cylinder 18 are respectively installed on the cylinder bottom plate 20 through the left cylinder fixing plate 19 and the right cylinder fixing plate 17. The right end of the cylinder 18 is connected to a Y-shaped joint 16, and the Y-shaped joint 16 is connected to a linear bearing seat 13. The linear bearing seat 13 is located on the rocker 11 and an installation flange 12 is provided at the top of the linear bearing seat 13 to prevent the linear bearing seat 13 from falling off during the working process. The bottom of the rocker 11 is connected to a driving block 14, and the driving block 14 is connected to the cleaning module 29 through a driving shaft 37.

[0035] The cleaning module 29 is installed on the bottom plate of the box body 10. The front and rear sides of the cleaning module 29 are respectively provided with a front bearing base 40 and a rear bearing base 31. The front bearing base 40 and the rear bearing base 31 are respectively connected to a front bearing seat 39 and a rear bearing seat 33, and bearings are provided inside them. Front bearing covers 38 and rear bearing end covers 32 are respectively provided at the outer end parts of the front bearing seat 39 and the rear bearing seat 33. The bearing at the front end of the cleaning module 29 is connected to the driving shaft 37. The inner side of the bearing is connected to a rotating shaft, and the inner side of the rotating shaft is connected to a two-fluid integrated block. Among them, rotating shaft mounting plates 34 are provided on both the front and rear sides of the two-fluid integrated block and are connected to the rotating shaft. O-ring rubber seals 49 are provided between the driving shaft 37 and the box body 10, and between the rotating shaft and the front bearing seat 39 and the rear bearing seat 33. In addition, except for the opening for placing products, the rest of the entire cleaning device is completely enclosed, which can effectively prevent water seepage and leakage.

[0036] The two-fluid integrated block includes a waterway integrated block 45 and an air circuit integrated block 43. The waterway integrated block 45 is located below the air circuit integrated block 43. A second water inlet 42 is installed on the left side of the waterway integrated block 45, and a water outlet 46 is installed on the right side. A second air inlet 41 is installed on the left side of the air circuit integrated block 43, and an air outlet 44 is installed on the right side. A two-fluid nozzle mounting plate 35 is installed above the two-fluid integrated block, and a two-fluid nozzle 36 is installed on the right side above the two-fluid nozzle mounting plate 35. A third air inlet 47 and a third water inlet 48 are provided below the two-fluid nozzle 36.

[0037] Inside the box body 10, there is a liquid level gauge mounting plate 28 installed on the inner wall of the box body 10. A float type liquid level gauge 30 is installed on the liquid level gauge mounting plate 28. When the drain pipe is blocked and the drainage is not smooth, when the liquid level in the cavity rises to the alarm value, it will automatically alarm to prompt for maintenance. Above the liquid level gauge mounting plate 28, there is a waterproof connector 25 on the box body 10, which is used for threading the float type liquid level gauge 30 and isolating the water and gas inside the cleaning cavity from the outside.

[0038] Support feet 15 are installed around the bottom of the box body 10, which can provide stable support and fixation. A drain pipe connector 24 is provided at the bottom of the box body 10, which can drain the sewage in the cavity in time.

[0039] The working principle of the integrated cleaning device of a precision filmless scribing device of the present invention: Use a manipulator to place the product or workpiece to be cleaned on the water receiving plate 2. First, the product or workpiece can be preliminarily cleaned by the brush assembly 1 and the cleaning sponge assembly 3 to scrape off the surface dirt. A cleaning port 5 is provided behind the cleaning sponge assembly 3. Then use the manipulator to place the product or workpiece after preliminary cleaning above the cleaning port 5 for two-fluid cleaning.

[0040] A cleaning module 29 is correspondingly arranged below the cleaning port 5, which can wash the surface of the product or workpiece to be cleaned. The cleaning module 29 uses a two-fluid atomizing nozzle to scour the product or workpiece to be cleaned, which can save a large amount of water while ensuring the cleaning effect.

[0041] During the flushing process, the cleaning module 29 is driven by a cylinder 18 to make a reciprocating swing. The swing amplitude of the cleaning module 29 can be changed by adjusting the telescopic distance of the cylinder 18 to be suitable for different products or workpieces. At the same time, the load on the cylinder of the bearing scheme is much smaller than that of the linear guide scheme, and the cylinder can move in place without causing frequent alarms of the magnetic switch, which is beneficial to improving work efficiency. The dirty water after flushing will flow back into the inside of the box body 10 and be discharged along the drain pipe connector 24. A float type liquid level gauge is arranged inside the box body 10. When the drain pipe connector 24 is blocked, the liquid level inside the box body 10 rises. When the float 30 reaches a certain position, it can alarm in time to prompt the staff to carry out maintenance. After the equipment to be cleaned is washed clean, the blowing nozzle 8 on the right side of the present invention can be used to blow and dry the surface of the equipment to make it dry quickly.

[0042] When the cleaning work is completed, the material taking ports on the left and right sides of the cleaning device of the present invention can be opened according to the situation to take out the parts that accidentally fall into the inside of the box body 10 during the cleaning process, and it is also convenient to clean the inside of the box body 10 regularly.

[0043] Therefore, the integrated cleaning device of the above-mentioned precise film-free cutting equipment is adopted in the present invention, which improves the waterproof and sealing performance, greatly reduces the risk of water overflow and water mist floating out, makes the whole module occupy less space, facilitates wiring and the arrangement of other modules of the whole machine equipment, avoids frequent alarms of magnetic switches, improves work efficiency, can thoroughly dry the products after cleaning, and makes the products reaching the next working station present a dry state.

[0044] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit them. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that they can still modify or equivalently replace the technical solutions of the present invention, and these modifications or equivalent replacements cannot make the modified technical solutions deviate from the spirit and scope of the technical solutions of the present invention.

Claims

1. An integrated cleaning device for a precision film-free scribing equipment, characterized in that: It includes a box body, and a cleaning module is installed inside the box body; a water receiving plate is installed on the top of the box body. On the upper left end face of the water receiving plate, a brush assembly and a cleaning sponge assembly are respectively arranged from left to right. On the right side of the water receiving plate, a cleaning chamber top plate located directly above the box body is installed, and the middle of the cleaning chamber top plate is a cleaning opening; on the left and right sides of the box body, a left material taking port baffle and a right material taking port baffle are respectively installed. A first air inlet and a first water inlet are arranged on the left material taking port baffle; in front of the box body, a cylinder bottom plate is arranged, and a cylinder is installed on the cylinder bottom plate. The right end of the cylinder is connected to a rocker, and the bottom of the rocker is connected to a driving block. The driving block is connected to the cleaning module through a driving shaft; support feet are installed around the bottom of the box body, and a sewer pipe joint is arranged at the bottom of the box body. The brush assembly includes a brush and a brush mounting seat, and the brush is fixed on the top of the brush mounting seat; the cleaning sponge assembly includes a cleaning sponge, a sponge mounting base, a sponge water baffle and a sponge fixing pipe. The cleaning sponge is installed on the sponge mounting base through the sponge fixing pipe, and the sponge water baffle is arranged on both the front and back sides of the sponge mounting base; the bottom of the brush mounting seat and the sponge mounting base are both connected and fixed to the water receiving plate, and sealing rings are arranged in the middle; waterway interfaces located below the water receiving plate are arranged below both the brush assembly and the cleaning sponge assembly. The cleaning module is installed on the bottom plate of the box body. A front bearing base and a rear bearing base are respectively arranged on the front and back sides of the cleaning module. A front bearing seat and a rear bearing seat are respectively connected to the front bearing base and the rear bearing base, and bearings are arranged inside them. Front bearing covers and rear bearing end covers are respectively arranged on the outer ends of the front bearing seat and the rear bearing seat. The inner side of the bearing is connected to a rotating shaft, and the inner side of the rotating shaft is connected to a two-fluid integrated block; the bearing at the front end of the cleaning module is connected to the driving shaft. Rotating shaft mounting plates are arranged on both the front and back sides of the two-fluid integrated block and are connected to the rotating shaft; the two-fluid integrated block includes a waterway integrated block and an airway integrated block. The waterway integrated block is located below the airway integrated block. A second water inlet is installed on the left side of the waterway integrated block, and a water outlet is installed on the right side. A second air inlet is installed on the left side of the airway integrated block, and an air outlet is installed on the right side; a two-fluid nozzle mounting plate is installed above the two-fluid integrated block, and a two-fluid nozzle is installed on the upper right side of the two-fluid nozzle mounting plate. A third air inlet and a third water inlet are arranged below the two-fluid nozzle.

2. The integrated cleaning device of a precision film-free dicing equipment according to claim 1, wherein: On the right side of the box body, a drying nozzle seat is arranged at the top. The front and back sides of the drying nozzle seat are installed on the top of the right side of the box body through drying nozzle seat mounting brackets. Angle adjustment openings are arranged on the drying nozzle seat mounting brackets. A drying air inlet is installed on the right end face of the drying nozzle seat, and a blowing nozzle is installed on the top of the drying nozzle seat.

3. The integrated cleaning device of a precision film-free scribing equipment according to claim 1, characterized in that: The left and right sides of the cylinder are respectively installed on the cylinder bottom plate through a left cylinder fixing plate and a right cylinder fixing plate. A Y-shaped joint is connected to the right end of the cylinder. The Y-shaped joint is connected to a linear bearing block. The linear bearing block is located on the rocker, and an installation flange is provided at the top of the linear bearing block.

4. The integrated cleaning device of a precision film-free scribing equipment according to claim 1, characterized in that: An O-ring is provided between the drive shaft and the box body. The O-ring is also provided between the rotating shaft and the front bearing block and the rear bearing block respectively; Sealing rubber sheets are provided between the left and right material taking port baffles and the box body.

5. The integrated cleaning device of a precision filmless dicing equipment according to claim 1, characterized in that: A liquid level gauge mounting plate is installed on the inner wall of the box body inside the box. A float liquid level gauge is installed on the liquid level gauge mounting plate, and a waterproof connector located on the box body is provided above the liquid level gauge mounting plate.

6. The integrated cleaning device of a precision film-free scribing equipment according to claim 1, characterized in that: Handles are installed on the outer sides of both the left and right material taking port baffles.

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