Mass spectrometer and ion carpet cleaning device therefor

Abstract

The application relates to a mass spectrometer and an ion blanket cleaning device thereof. The mass spectrometer comprises a shell and an ion blanket cleaning device. A vacuum cavity is formed in the shell. The ion blanket cleaning device is arranged in the vacuum cavity. The ion blanket cleaning device comprises a quadrupole rod, a cleaning electrode assembly and a vacuum assembly. A transmission channel is formed in the quadrupole rod for inputting cleaning gas. The cleaning electrode assembly and the quadrupole rod are arranged at intervals to form a glow discharge area. The glow discharge area can form glow discharge and generate cleaning ions. A cleaning area is formed in the cleaning electrode assembly. The cleaning area is used for placing an ion blanket. The cleaning ions can move in the cleaning area and diffuse to the surface of the ion blanket. The vacuum assembly is used for extracting excess cleaning gas molecules to form a gradient pressure difference. The cleaning ions remove impurities on the surface of the ion blanket through sputtering, molecular ion reaction and the like. The vacuum assembly can exhaust the excess cleaning gas molecules on the side of the cleaning area, and the cleaning efficiency of the ion blanket cleaning device is improved.

Description

Technical Field

[0001] This invention relates to the field of mass spectrometry technology, and in particular to mass spectrometers and their ion blanket cleaning devices. Background Technology

[0002] An ion carpet is an important ion-guiding structure consisting of a series of coaxial ring electrodes embedded in a rigid PCB surface. Essentially, it's a compressed ion funnel with a small central hole. Ion carpets can operate in either radio frequency (RF) or direct current (DC) mode, offering high ion transport efficiency and are increasingly used in ion-guiding structures for mass spectrometers. During use, ion carpets adsorb organic impurities, such as hydrocarbons, which accumulate on their surface, causing contamination. Over time, these impurities build up, distorting the electric field generated by the electrodes and affecting ion transport efficiency. Consequently, this impacts the mass spectrometer's sensitivity, resolution, and other performance characteristics, necessitating regular cleaning. Traditional cleaning methods, such as solvent cleaning and ultrasonic cleaning, require shutting down the instrument, breaking the vacuum, disassembling the ion carpet, cleaning, drying the cleaned components, reassembling, and then re-vacuuming. This complex and time-consuming process generates significant waste liquid, creating an environmental burden. Summary of the Invention

[0003] Therefore, it is necessary to provide a convenient and efficient mass spectrometer and its ion blanket cleaning device to address the above problems.

[0004] An ion blanket cleaning device includes a quadrupole, a cleaning electrode assembly, and a vacuum assembly. A transmission channel is formed within the quadrupole for inputting cleaning gas. The cleaning electrode assembly and the quadrupole are spaced apart to form glow discharge regions capable of generating cleaning ions through glow discharge. The transmission channel is connected to the glow discharge regions. A cleaning region is formed within the cleaning electrode assembly and is connected to the glow discharge regions. An ion blanket is placed within the cleaning region, and the cleaning ions can move and diffuse to the surface of the ion blanket within the cleaning region. The vacuum assembly is located on one side of the cleaning region and is used to extract excess cleaning gas molecules.

[0005] Furthermore, the cleaning electrode assembly includes an outlet electrode and a transfer electrode. The outlet electrode and the quadrupole are spaced apart to form the glow discharge region, and the outlet electrode and the transfer electrode are spaced apart to form the cleaning region. The side pump of the molecular pump or the forepump in the vacuum assembly is located between the outlet electrode and the transfer electrode.

[0006] Specifically, the outlet electrode has an input port, the glow discharge region is connected to the cleaning region through the input port, and the transmission electrode can form an effective electric field with the outlet electrode to cause the cleaning ions to move and diffuse onto the ion blanket.

[0007] In one embodiment, the gas pressure range within the glow discharge region is 10. 3 Pa~10 4 Pa.

[0008] In one embodiment, the air pressure range within the cleaning area is 1 Pa to 10 Pa. 2 Pa.

[0009] In one embodiment, the electric field strength of the glow discharge region decreases overall from the electric field strength of the cleaning region.

[0010] In one embodiment, when a DC voltage is applied to the quadrupole and the outlet electrode, the voltage difference between the quadrupole and the outlet electrode does not exceed 1500V.

[0011] In one embodiment, the voltage range of the transmission electrode is -500V to 500V.

[0012] In one embodiment, the quadrupole includes four guide rods, which are cylindrical or hyperboloidal rod-shaped structures, and the electrode structures of the four guide rods are identical.

[0013] In one embodiment, the ion blanket cleaning device further includes a flow controller for controlling the flow rate of the cleaning gas to be constant.

[0014] A mass spectrometer includes a housing and an ion blanket cleaning device as described above, wherein a vacuum chamber is formed within the housing; and the ion blanket cleaning device is disposed within the vacuum chamber.

[0015] The aforementioned mass spectrometer and its ion blanket cleaning device, when the ion blanket needs cleaning, adjusts the voltage of the quadrupole and cleaning electrode assembly to the cleaning state voltage value, and inputs cleaning gas through the transmission channel. After passing through the transmission channel, the cleaning gas forms a glow discharge in the glow discharge region, generating a large amount of plasma cleaning ions. After entering the cleaning area, the cleaning ions move and diffuse to the surface of the ion blanket electrodes, removing deposits and impurities from the ion blanket surface through ion sputtering, molecular ion reactions, etc., thus achieving surface cleaning. Simultaneously, the vacuum component removes excess gas molecules from the cleaning area to ensure a vacuum environment, further improving the cleaning efficiency of the ion blanket cleaning device. After cleaning, simply adjusting the voltage of the quadrupole and cleaning electrode assembly to the operating voltage value restores the normal operation of the mass spectrometer. The operation of the ion blanket cleaning device is simple and convenient, eliminating the need to shut down the mass spectrometer or perform vacuum breaking operations, greatly saving cleaning time and labor costs. Furthermore, the cleaning process does not require the use of solvents, making the ion blanket cleaning device more environmentally friendly. Attached Figure Description

[0016] The accompanying drawings, which form part of this application, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention and do not constitute an improper limitation of the invention.

[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the ion blanket cleaning device in one embodiment;

[0019] Figure 2 for Figure 1 A schematic diagram of the cavity relationship of the ion blanket cleaning device in the embodiment.

[0020] The components in the diagram are labeled as follows:

[0021] 10. Ion blanket cleaning device; 100. Quadrupole; 110. Transfer channel; 200. Cleaning electrode assembly; 210. Outlet electrode; 220. Transfer electrode; 230. Cleaning area; 240. Glow discharge area; 300. Ion blanket; 400. Discharge channel. Detailed Implementation

[0022] To make the above-mentioned objects, features, and advantages of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of the present invention. However, the present invention can be practiced in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0023] In one embodiment, the mass spectrometer includes a housing and an ion blanket cleaning device 10, wherein a vacuum chamber is formed within the housing; the ion blanket cleaning device 10 is disposed within the vacuum chamber. (See also...) Figure 1 and Figure 2 The ion blanket cleaning device 10 includes a quadrupole 100, a cleaning electrode assembly 200, and a vacuum assembly. A transmission channel 110 is formed within the quadrupole 100 for inputting cleaning gas. A glow discharge region 240 is formed between the cleaning electrode assembly 200 and the quadrupole 100. The glow discharge region 240 is capable of generating a glow discharge and producing cleaning ions. The transmission channel 110 is connected to the glow discharge region 240. A cleaning region 230 is formed within the cleaning electrode assembly 200. The cleaning region 230 is connected to the glow discharge region 240, and an ion blanket 300 is placed within the cleaning region 230. Cleaning ions can move within the cleaning region 230 and diffuse to the surface of the ion blanket 300. The vacuum assembly is located on one side of the cleaning region and is used to extract excess cleaning gas molecules.

[0024] When the ion blanket 300 needs cleaning, the voltage of the quadrupole 100 and the cleaning electrode assembly 200 is adjusted to the cleaning voltage value, and cleaning gas is input through the transmission channel 110. After passing through the transmission channel 110, the cleaning gas forms a glow discharge in the glow discharge region 240 and generates a large amount of plasma cleaning ions. After entering the cleaning region 230, the cleaning ions diffuse on the surface of the ion blanket 300 within the cleaning region 230, undergoing ion sputtering, molecular ion reactions, etc., removing deposits and other impurities from the surface of the ion blanket 300, thus achieving cleaning of the ion blanket 300 surface. At the same time, the vacuum assembly can absorb excess gas molecules in the cleaning region 230 to ensure the vacuum environment of the cleaning region 230, further improving the cleaning efficiency of the ion blanket cleaning device 10. After cleaning, simply adjusting the voltage of the quadrupole 100 and the cleaning electrode assembly 200 to the operating voltage value is sufficient to restore the normal operation of the mass spectrometer, which is convenient and quick.

[0025] Traditional cleaning methods, such as solvent cleaning and ultrasonic cleaning, require shutting down the instrument, breaking the vacuum, disassembling the ion blanket 300, cleaning, drying the cleaned components, reassembling, and then vacuuming again. The cleaning process is complex, time-consuming, and generates a large amount of waste liquid, causing an environmental burden. The ion blanket cleaning device 10 in this embodiment is simple and convenient to operate, eliminating the need to shut down the mass spectrometer and break the vacuum, thus greatly saving cleaning time and labor costs. Furthermore, the cleaning process does not require the use of solvents, making the ion blanket cleaning device 10 more environmentally friendly.

[0026] Specifically, the vacuum assembly includes a molecular pump or a backing pump. The vacuum assembly may also include other pump body assemblies.

[0027] In one embodiment, the electric field strength from the transmission channel 110 to the cleaning region 230 is reduced to facilitate the movement of cleaning ions.

[0028] In one embodiment, the cleaning electrode assembly 200 includes an outlet electrode 210 and a transfer electrode 220. The outlet electrode 210 and the quadrupole 100 are spaced apart to form a glow discharge region 240, and the outlet electrode 210 and the transfer electrode 220 are spaced apart to form a cleaning region 230. A side pump from a molecular pump or a backing pump in a vacuum assembly is provided between the outlet electrode 210 and the transfer electrode 220. The glow discharge region 240 enables the cleaning gas to undergo glow discharge, generating cleaning ions. By forming the glow discharge region 240 between the outlet electrode 210 and the quadrupole 100, sufficient space is ensured for the cleaning gas to achieve glow discharge and generate a sufficient amount of cleaning ions. This ensures the stability and reliability of the cleaning effect of the ion blanket cleaning device 10. The transfer electrode 220, in conjunction with the outlet electrode 210, further generates an electric field within the cleaning region 230, ensuring that the cleaning ions can fully contact the ion blanket 300 within the cleaning region 230, thus improving the cleaning efficiency of the ion blanket 300.

[0029] Specifically, an input port is provided on the outlet electrode 210. The glow discharge region 240 is connected to the cleaning region 230 through the input port. The transfer electrode 220 can form an effective electric field with the outlet electrode 210, causing the cleaning ions to move and diffuse onto the ion blanket 300. The transfer electrode 220 guides excess cleaning ions and impurities away from the cleaning region 230, which can further improve the cleaning efficiency of the ion blanket cleaning device 10 and ensure the cleaning effect of the ion blanket cleaning device 10.

[0030] In one embodiment, the cleaning electrode assembly 200 has an inlet and an outlet, both of which are connected to the cleaning chamber. Cleaning ions enter the cleaning chamber through the inlet to clean the ion blanket 300, and then the cleaning ions and impurities on the ion blanket 300 are discharged to the outside through the outlet. It should be noted that the cleaning chamber and cleaning area 230 are only spatial concepts, as long as the space can accommodate the movement of cleaning ions and the placement of the ion blanket 300. No specific spatial structure is limited.

[0031] In one embodiment, the gas pressure range within the glow discharge region 240 is 10. 3 Pa~10 4 The voltage required for glow discharge is related to the gas pressure within the region and the distance between the quadrupole 100 and the outlet electrode 210. Since glow discharge is a gas discharge phenomenon in low-pressure gas, it is necessary to create an environment below atmospheric pressure within the glow discharge region 240, while ensuring that the quadrupole 100 and the outlet electrode 210 are at relatively high pressures, so that the cleaning gas generates cleaning ions. 2 Pa~10 3 Pa. Therefore, the gas pressure within the glow discharge region 240 can be adjusted according to actual conditions. No specific limit is placed on the exact gas pressure value within the glow discharge region 240, as long as the conditions for generating a glow discharge are met.

[0032] The gas pressure in the cleaning region 230 is 1 to 2 orders of magnitude lower than the gas pressure in the glow discharge region 240. Therefore, in one embodiment, the gas pressure range in the cleaning region 230 is 10 Pa to 10 Pa. 2 Pa. The air pressure range within the cleaning zone 230 can also be 1 Pa to 10 Pa. 2 Pa. As long as the gas pressure range within the cleaning zone 230 is sufficient for the cleaning ions to diffuse onto the ion blanket 300, the ion blanket 300 can be cleaned. Simultaneously, the gas flow relationship between the glow discharge zone 240 and the cleaning zone 230 must also be satisfied. This ensures the structural continuity and unobstructed flow of the ion blanket cleaning device 10.

[0033] In one embodiment, the electric field strength of the transmission channel 110, the electric field strength of the glow discharge region 240, and the electric field strength of the cleaning region 230 decrease sequentially. The overall electric field strength tends to decrease from the transmission channel 110 to the discharge channel 400, which ensures that ions in the ion blanket cleaning device 10 can move along the electric field strength, thus ensuring the structural reliability of the ion blanket cleaning device 10.

[0034] In one embodiment, when a DC voltage is applied to the quadrupole 100 and the outlet electrode 210, the voltage difference between the quadrupole 100 and the outlet electrode 210 does not exceed 1500V. A radio frequency (RF) voltage can also be applied to the quadrupole 100 and the outlet electrode 210. Optionally, an RF voltage can also be applied to the quadrupole 100 and the outlet electrode 210 to generate an RF glow discharge of the cleaning gas. There are no restrictions on the method of energizing the quadrupole 100 and the outlet electrode 210. It is sufficient that the cleaning gas can generate a glow discharge under certain gas pressure conditions. Therefore, the voltage difference between the quadrupole 100 and the outlet electrode 210 can also not exceed 1000V. Adjustments can be made according to actual conditions. It should be further noted that the glow discharge current should be in the milliampere to ampere range. To ensure that the plasma density of the glow discharge remains at a high level, a large amount of plasma can quickly remove impurities from the ion blanket 300, further improving the cleaning efficiency of the ion blanket cleaning device 10.

[0035] In one embodiment, the voltage range of the transfer electrode 220 is -500V to 500V. The voltage range of the transfer electrode 220 can also be -100V to 100V, -200V to 200V, or 0 to 150V. The voltage of the transfer electrode 220 should ensure that the cleaning ions can move sufficiently within the cleaning chamber and diffuse onto the ion blanket 300. Therefore, the voltage range of the transfer electrode 220 only needs to be suitable for the diffusion of cleaning ions.

[0036] In one embodiment, the quadrupole 100 includes four guide rods, each with a cylindrical or hyperboloidal rod-like structure, and the four guide rods have identical electrode structures. The ion blanket 300 consists of multiple coaxial rings. These rings include, but are not limited to, rings made of copper or other metallic conductor materials. The rings are nested on the PCB surface. Small holes are formed in the ion blanket 300, and the positions of the holes coincide with the centers of the rings.

[0037] In one embodiment, the length direction of the quadrupole 100 intersects the plane where the ion blanket 300 is located. Alternatively, the length direction of the transmission channel 110 formed by the quadrupole 100 intersects the plane where the ion blanket 300 is located. This ensures that the cleaning ions can contact the ion blanket 300 with the largest possible area for cleaning, thus guaranteeing the cleaning effect of the ion blanket cleaning device 10.

[0038] In one embodiment, the ion blanket cleaning device 10 further includes a flow controller for maintaining a constant flow rate of the cleaning gas. A stable input of cleaning gas ensures that the cleaning gas undergoes sufficient glow discharge and generates a large number of ions, guaranteeing the practicality and reliability of the ion blanket cleaning device 10. It is important to note that the cleaning gas should be selected to avoid adhering to the outlet electrode 210, ion blanket 300, and transfer electrode 220 after glow discharge. Examples include inert gases such as helium and neon, or mixtures thereof. Hydrogen or argon can also be used. The ion blanket cleaning device 10 also includes a pressure reducing valve, etc.

[0039] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0040] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0041] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0042] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first and second features directly abut each other, or that the first and second features indirectly abut each other through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0043] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0044] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0045] The embodiments described above are merely illustrative of several implementations of the present invention, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these all fall within the protection scope of the present invention. Therefore, the protection scope of this invention patent should be determined by the appended claims.

Claims

1. An ion blanket cleaning device, characterized in that, The ion blanket cleaning device includes: A quadrupole, wherein a transmission channel is formed within the quadrupole, and the transmission channel is used to input cleaning gas; A cleaning electrode assembly includes an outlet electrode and a transport electrode. The outlet electrode and the quadrupole are spaced apart to form a glow discharge region. The glow discharge region is capable of generating glow discharge and cleaning ions. The transport channel is connected to the glow discharge region. The outlet electrode and the transport electrode are spaced apart to form a cleaning region, which is connected to the glow discharge region. An ion blanket is placed within the cleaning region, and the cleaning ions can move within the cleaning region and diffuse to the surface of the ion blanket. A vacuum assembly is disposed between the outlet electrode and the transmission electrode, and the vacuum assembly is used to extract excess cleaning gas molecules. The outlet electrode has an input port, and the glow discharge region is connected to the cleaning region through the input port. The transfer electrode and the outlet electrode can form an effective electric field to move the cleaning ions onto the ion blanket. The gas pressure range within the glow discharge region is 10. 3 Pa~10 4 Pa, the air pressure range within the cleaning area is 1 Pa to 10 Pa. 2 Pa, the electric field strength in the glow discharge region decreases overall from the electric field strength in the cleaning region.

2. The ion blanket cleaning device according to claim 1, characterized in that, When a DC voltage is applied to the quadrupole and the outlet electrode, the voltage difference between the quadrupole and the outlet electrode does not exceed 1500V.

3. The ion blanket cleaning device according to claim 2, characterized in that, The voltage range of the transmission electrode is -500V to 500V.

4. The ion blanket cleaning apparatus according to any one of claims 1-3, characterized in that, The quadrupole comprises four guide rods, each guide rod being cylindrical or hyperboloidal rod-shaped, and the electrode structures of the four guide rods are identical.

5. The ion blanket cleaning apparatus according to any one of claims 1-3, characterized in that, It also includes a flow controller for controlling the flow rate of the cleaning gas to be constant.

6. A mass spectrometer, characterized in that, The mass spectrometer includes: A housing, wherein a vacuum cavity is formed within the housing; and The ion blanket cleaning device according to any one of claims 1-5, wherein the ion blanket cleaning device is disposed inside the vacuum chamber.

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