An ultra-low frequency vibration isolation device based on eddy current damping

Abstract

This invention provides an ultra-low frequency vibration isolation device based on eddy current damping, comprising a base, a support column, a top plate, and a stiffness adjustment mechanism. A left support plate and a right support plate are vertically mounted on the left and right sides of the top of the base, respectively. A support column is vertically mounted in the middle of the top of the base. A top plate is mounted on the top of the left support plate and the support column. A stiffness adjustment mechanism is also installed between the top plate, the left support plate, and the support column. A first amplification mechanism is connected to the bottom of the top plate. A crossbeam is vertically connected to the lower part of the right support plate. A ball screw is installed between the crossbeam and the base. An eddy current damping device is installed below the ball screw. A connecting rod is installed on the right side of the top plate. A push rod is vertically mounted at the other end of the connecting rod, and the push rod is connected to a vibration damping device. This system can achieve vertical vibration control from 0.2Hz to 150Hz, with precise positioning, a maximum load capacity of 3000kg, wide applicability, and strong versatility.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor special devices, and particularly relates to an ultra-low frequency vibration isolation device based on eddy current damping. BACKGROUND

[0002] At present, the semiconductor industry develops rapidly, the precision requirement of semiconductor production equipment is higher and higher, and the equipment is more and more sensitive to the environment such as micro-vibration. A little micro-vibration will reduce the yield of the equipment, and even make the equipment unable to work normally. Therefore, the isolation of micro-vibration becomes more and more important.

[0003] The vibration isolation method can be mainly divided into passive vibration isolation and active vibration isolation. Passive vibration isolation does not need external energy, and the stiffness and damping coefficient are determined by passive materials. The damping materials widely used at present are metal rubber and vibration isolation springs. Passive vibration isolation can obtain good vibration isolation effect in most cases, does not need to consume energy, has simple structure and high reliability, but has poor low-frequency vibration isolation effect and poor positioning precision. Active vibration isolation is based on external energy, detects the motion speed, acceleration, displacement and other parameters of the vibration isolation object through a sensor, adjusts the driving control force by using an active control algorithm, and achieves the effect of vibration isolation. Generally, active vibration isolation can obtain better vibration isolation effect than passive vibration isolation, but has the defects of complex structure, low reliability, high energy consumption and poor stability. SUMMARY

[0004] The present application relates to the technical field of semiconductor special devices, and particularly relates to an ultra-low frequency vibration isolation device based on eddy current damping.

[0005] The technical scheme of the present application is implemented as follows: a kind of ultra-low frequency vibration isolation device based on eddy current damping, including base, support column, top plate and stiffness adjustment mechanism, the top left and right sides of the base are vertically installed with left support plate and right support plate respectively, support column is vertically installed in the middle of the top of the base, top plate is installed on the top of left support plate and support column, stiffness adjustment mechanism is also installed between top plate and left support plate, support column, the bottom of top plate is connected with first amplification mechanism, first amplification mechanism includes first connecting rod, one end of first connecting rod is connected with the top of left support plate by pin, the end of first connecting rod close to left support plate is connected with second connecting rod by pin, second connecting rod is connected with first vertical rod by pin, first vertical rod is vertically connected with the bottom of top plate, the other end of first connecting rod is connected with third connecting rod by pin, the other end of third connecting rod is connected with second vertical rod by pin, second vertical rod is connected with support column by guide rail, the bottom of second vertical rod is connected with second amplification mechanism, second amplification mechanism includes fourth connecting rod, one end of fourth connecting rod is connected with fifth connecting rod by pin, fifth connecting rod is connected with horizontal rod by pin, the other end of horizontal rod is vertically connected with left support plate, the end of fourth connecting rod close to fifth connecting rod is connected with sixth connecting rod by pin, sixth connecting rod is connected with the bottom of second vertical rod by pin, the other end of fourth connecting rod is connected with third vertical rod by pin, arc-shaped slide rail is formed in the lower part of support column, fourth connecting rod is slidably connected with arc-shaped slide rail by stop block, the lower part of right support plate is vertically connected with crossbeam, ball screw is installed between crossbeam and base, the bottom of third vertical rod is connected with ball screw by nut, ball screw is installed below, the bottom of third vertical rod is connected with ball screw by nut, the bottom of third vertical rod is connected with ball screw by nut, the bottom of third vertical rod is connected with ball screw by nut, the bottom of third vertical rod is connected with ball screw by nut, the bottom of third vertical rod is connected with ball screw by nut, the bottom of third vertical rod is connected with ball screw by nut, the bottom of third vertical rod is connected with ball screw by nut, the bottom of third vertical rod is connected with ball screw by nut, the bottom of third vertical rod is connected with ball screw by nut, the bottom of third vertical rod is connected with ball screw by nut, the bottom of third vertical rod is connected with ball screw by nut, the bottom of third vertical rod is connected with ball screw by nut, the bottom of third vertical rod is connected with ball screw by nut, the bottom of third vertical rod is connected with ball screw by nut, the bottom of third vertical rod is connected with ball screw by nut, the bottom of third vertical rod is connected with ball screw by nut, the bottom of third vertical rod is connected with ball screw by nut, the bottom of third vertical rod is connected with ball screw by nut, the bottom of third vertical rod is connected with ball screw by nut, the bottom of third vertical rod is connected with ball screw by nut, the bottom of third vertical rod is connected with ball screw by nut, the bottom of third vertical rod is connected with ball screw by nut, the bottom of third vertical rod is connected with ball screw by nut, the bottom of 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screw by nut, the bottom of third vertical rod is connected with ball screw by nut, the bottom of third vertical rod is connected with ball screw by nut, the bottom of third vertical rod is connected with ball screw by nut, the bottom of third vertical rod is connected with ball screw by nut, the bottom of third vertical rod is connected with ball screw by nut, the bottom of third vertical rod is connected with ball screw by nut, the bottom of third vertical rod is connected with ball screwThe push rod top and bottom are respectively connected with the slider of the upper damping device and the lower damping device.

[0006] Further, the rigidity adjusting mechanism comprises a metal spring, a guide rod is sleeved in the lower inner side of the metal spring, an adjusting nut is connected to the lower part of the guide rod, a screw rod is bolted to the bottom of the adjusting nut, a locking nut is further installed on the screw rod, the guide rod is a hollow structure, and the screw rod is respectively installed on the top of the left supporting plate and the supporting column.

[0007] Further, the left piston and the right piston are both in a trapezoidal structure, so that the static force balance of the roller is achieved when the roller is in the initial position between the left piston and the right piston.

[0008] Further, the upper supporting plate and the lower supporting plate are both made of an iron plate.

[0009] Further, the ball screw passes through the middle of the copper plate and is fixedly connected with the copper plate.

[0010] Further, the ball screw is connected with the cross beam through an upper bearing.

[0011] Further, the ball screw is connected with the base through a lower bearing.

[0012] Further, the groove is provided with a baffle at both ends.

[0013] The present application has the following beneficial effects:

[0014] The present application can realize vertical rigidity adjustment, can meet the load bearing and rigidity requirements of different types of precision instruments, can amplify the ultra-low frequency vibration through a two-stage vibration amplification mechanism, then realize ultra-low frequency vibration damping through the eddy current damping, and further realize ultra-low frequency vibration damping through the parallel double-piston roller damping device, so that the damping effect is good and the positioning is more accurate.

[0015] The present application can realize the vibration control of 0.2Hz~150 Hz in the vertical direction, has a simple structure, does not need an active damping device, has a wide vibration isolation bandwidth, has accurate positioning, and can bear a maximum load of 3000kg, so that the application range is wide and the universality is strong. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is a structural schematic view of the present application.

[0017] Figure 2 It is a structural schematic view of the rigidity adjusting mechanism of the present application.

[0018] Figure 3 It is a structural schematic view of the eddy current damping device of the present application.

[0019] Figure 4 It is a structural schematic view of the damping device of the present application.

[0020] Figure 5 Figure 1 is a bottom view of the application.

[0021] Figure 1 is a bottom view of the application. Figure 2 is a left view of the application. Figure 3 is a right view of the application. Figure 4 is a front view of the application. Figure 5 is a top view of the application. 1 - base, 2 - left support plate, 3 - right support plate, 4 - support column, 401 - guide rail, 402 - arc-shaped slide rail, 403 - stop block, 5 - top plate, 501 - connecting rod, 502 - push rod, 6 - rigidity adjustment mechanism, 601 - metal spring, 602 - guide rod, 603 - adjusting nut, 604 - screw rod, 605 - locking nut, 7 - first amplification mechanism, 701 - first connecting rod, 702 - second connecting rod, 703 - first vertical rod, 704 - third connecting rod, 705 - second vertical rod, 8 - second amplification mechanism, 801 - fourth connecting rod, 802 - fifth connecting rod, 803 - horizontal rod, 804 - sixth connecting rod, 805 - third vertical rod, 9 - cross beam, 10 - ball screw, 11 - eddy current damping device, 111 - upper support plate, 112 - lower support plate, 113 - upper permanent magnet, 114 - lower permanent magnet, 115 - copper plate, 12 - nut, 13 - damping device, 131 - upper damping device, 1310 - sliding groove, 1311 - left piston, 1312 - right piston, 1313 - left metal spring, 1314 - right metal spring, 1315 - groove, 1316 - sliding block, 1317 - roller, 1318 - baffle, 1319 - roller shaft, 132 - lower damping device, 14 - upper bearing, 15 - lower bearing. DETAILED DESCRIPTION

[0022] The technical solutions of the present application will be described clearly and completely below in conjunction with the embodiments. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without creative work are within the protection scope of the present application.

[0023] As Figures 1-5As shown, an ultra-low frequency vibration isolation device based on eddy current damping includes a base 1, a support column 4, a top plate 5 and a stiffness adjustment mechanism 6, the top of the base 1 is vertically installed with a left support plate 2 and a right support plate 3 on both sides respectively, the top of the base 1 is vertically installed with a support column 4 in the middle, the top of the left support plate 2 and the support column 4 is installed with a top plate 5, the stiffness adjustment mechanism 6 is also installed between the top plate 5 and the left support plate 2 and the support column 4, the bottom of the top plate 5 is connected with a first amplification mechanism 7, the first amplification mechanism 7 includes a first connecting rod 701, one end of the first connecting rod 701 is connected with the top of the left support plate 2 through a pin, the end of the first connecting rod 701 close to the left support plate 2 is connected with a second connecting rod 702 through a pin, the second connecting rod 702 is connected with a first vertical rod 703 through a pin, the first vertical rod 703 is vertically connected with the bottom of the top plate 5, the other end of the first connecting rod 701 is connected with a third connecting rod 704 through a pin, the other end of the third connecting rod 704 is connected with a second vertical rod 705 through a pin, the second vertical rod 705 is connected with the support column 4 through a guide rail 401, the bottom of the second vertical rod 705 is connected with a second amplification mechanism 8, the second amplification mechanism 8 includes a fourth connecting rod 801, one end of the fourth connecting rod 801 is connected with a fifth connecting rod 802 through a pin, the fifth connecting rod 802 is connected with a horizontal rod 803 through a pin, the other end of the horizontal rod 803 is vertically connected with the left support plate 2, the end of the fourth connecting rod 801 close to the fifth connecting rod 802 is connected with a sixth connecting rod 804 through a pin, the sixth connecting rod 804 is connected with the bottom of the second vertical rod 705 through a pin, the other end of the fourth connecting rod 801 is connected with a third vertical rod 805 through a pin, the lower part of the support column 4 is provided with an arc-shaped sliding rail 402, the fourth connecting rod 801 is slidingly connected with the arc-shaped sliding rail 402 through a stop block 403, the lower part of the right support plate 3 is vertically connected with a cross beam 9, the cross beam 9 and the base 1 are installed with a ball screw 10, the bottom of the third vertical rod 805 is connected with the ball screw 10 through a nut 12, the lower part of the ball screw 10 is installed with an eddy current damping device 11, the eddy current damping device 11 includes an upper support plate 111 and a lower support plate 112, the upper support plate 111 is fixedly connected with the right support plate 3, the lower support plate 112 is fixedly connected with the right support plate 3 below the upper support plate 111, the bottom of the upper support plate 11 is installed with an upper permanent magnet 113 side by side, the top of the lower support plate 112 is installed with a lower permanent magnet 114 at a vertically corresponding position of the upper permanent magnet 113, the upper permanent magnet 113 and the lower permanent magnet 114 exhibit attractive force between them, copper plates 115 are installed between the upper permanent magnet 113 and the lower permanent magnet 114 and on the ball screw 10, the ball screw 10 passes through the middle part of the upper support plate 111 and the lower support plate 112 and is slidingly connected with the upper support plate 111 and the lower support plate 112, a connecting rod 501 is installed on the right side of the top plate 5, the other end of the connecting rod 501 is vertically installed with a push rod 502,The push rod 502 is connected with a damping device 13, the right side of the damping device 13 is fixedly installed with the right supporting plate 3, the damping device 13 includes an upper damping device 131 and a lower damping device 132, the upper damping device 131 and the lower damping device 132 are provided in a mirror image structure, the upper damping device 131 includes a chute 1310, a left piston 1311 and a right piston 1312, the left piston 1311 is installed in the chute 1310, two left metal springs 1313 are installed between the left side of the chute 1310 and the wall of the chute 1310 in an up-down mode, the right piston 1312 is installed in the chute 1310, two right metal springs 1314 are installed between the right side of the chute 1310 and the wall of the chute 1310 in an up-down mode, the bottom of the chute 1310 is provided with a groove 1315, a sliding block 1316 is installed in the groove 1315, a roller 1317 is installed on the sliding block 1316 through a rolling shaft 1319, and the top and bottom of the push rod 502 are respectively connected with the sliding block 1316 of the upper damping device 131 and the lower damping device 132.

[0024] The rigidity adjusting mechanism 6 includes a metal spring 601, a guide rod 602 is sleeved in the lower inner side of the metal spring 601, an adjusting nut 603 is connected to the lower part of the guide rod 602, a screw rod 604 is bolted to the bottom of the adjusting nut 603, a locking nut 605 is further installed on the screw rod 604, the guide rod 602 is in a hollow structure, and the screw rod 604 is installed on the top of the left supporting plate 2 and the supporting column 4.

[0025] The left piston 1311 and the right piston 1312 are both in a trapezoidal structure, so that the roller 1317 is in static force balance in the initial position between the left piston 1311 and the right piston 1312.

[0026] The upper supporting plate 111 and the lower supporting plate 112 are both made of iron plates.

[0027] The ball screw 10 passes through the middle of the copper plate 115 and is fixedly connected with the copper plate 115.

[0028] The ball screw 10 is connected with the cross beam 9 through the upper bearing 14.

[0029] The ball screw 10 is connected with the base 1 through the lower bearing 15.

[0030] The groove 1315 is provided with a baffle 1318 at both ends.

[0031] When installing, the precision instrument is installed on the top plate 5, according to the weight requirement of the precision instrument, the adjusting nut 603 of the rigidity adjusting mechanism 6 is adjusted to adjust the compression amount of the metal spring 601, so that the push rod 502 is in the initial state, at this time, the upper damping device 131 and the lower damping device 132 of the damping device 13 do not exert a pushing force on the push rod 502, and the roller 1317 is in the initial static force balance state, and then the locking nut 605 is tightened.

[0032] When working, the precision instrument generates vibration, which is reduced in parallel through the eddy current damping device 11 and the damping device 13 in the vertical direction. First, the vertical vibration is amplified through the first amplification mechanism 7, and then the vertical vibration is further amplified through the second amplification mechanism 8, and then the vertical vibration is converted into rotary motion through the ball screw 10, and the copper plate 115 rotates with the ball screw 10. Since there is a vertical magnetic field between the upper permanent magnet 113 and the lower permanent magnet 114, when the copper plate 115 rotates in the magnetic field, an eddy current is generated. The magnetic field excited by the eddy current is opposite to the vertical magnetic field generated by the upper permanent magnet 113 and the lower permanent magnet 114, thereby generating a damping effect and achieving a damping effect. Since the damping positioning accuracy is better and more accurate through the two-stage amplification mechanism; in addition, when the vertical vibration is transmitted to the parallel damping device 13 through the push rod 502, the push rod 502 pushes the sliding block 1316 to slide, drives the roller 1317 to slide in the vertical direction, and drives the left piston 1311 and the right piston 1312 to slide. At this time, the left metal spring 1313 and the right metal spring 1314 are used for damping.

[0033] The above only describes the preferred embodiments of the present application and does not limit the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. An ultra-low frequency vibration isolation device based on eddy current damping, comprising a base, a support column, a top plate and a stiffness adjustment mechanism, characterized in that, The left and right sides of the top of the base are respectively vertically provided with left and right support plates, and a support column is vertically provided in the middle of the top of the base, a top plate is provided on the top of the left support plate and the support column, a rigidity adjusting mechanism is further provided between the top plate, the left support plate and the support column, a first amplification mechanism is connected to the bottom of the top plate, the first amplification mechanism comprises a first connecting rod, one end of the first connecting rod is connected to the top of the left support plate through a pin, the end of the first connecting rod close to the left support plate is connected to a second connecting rod through a pin, the second connecting rod is connected to a first vertical rod through a pin, the first vertical rod is vertically connected to the bottom of the top plate, the other end of the first connecting rod is connected to a third connecting rod through a pin, the other end of the third connecting rod is connected to a second vertical rod through a pin, the second vertical rod is connected to the support column through a guide rail, the second vertical rod is connected to a second amplification mechanism at the bottom, the second amplification mechanism comprises a fourth connecting rod, one end of the fourth connecting rod is connected to a fifth connecting rod through a pin, the fifth connecting rod is connected to a horizontal rod through a pin, the other end of the horizontal rod is vertically connected to the left support plate, the end of the fourth connecting rod close to the fifth connecting rod is connected to a sixth connecting rod through a pin, the sixth connecting rod is connected to the bottom of the second vertical rod through a pin, the other end of the fourth connecting rod is connected to a third vertical rod through a pin, an arc-shaped slide rail is provided in the lower part of the support column, the fourth connecting rod is slidably connected to the arc-shaped slide rail through a stop block, a cross beam is vertically connected to the lower part of the right support plate, a ball screw is provided between the cross beam and the base, the bottom of the third vertical rod is connected to the ball screw through a nut, an eddy current damping device is provided at the lower part of the ball screw, the eddy current damping device comprises an upper support plate and a lower support plate, the upper support plate is fixedly connected to the right support plate, the lower support plate is fixedly connected to the right support plate below the upper support plate, upper permanent magnets are provided side by side at the bottom of the upper support plate, lower permanent magnets are provided at the top of the lower support plate in vertical correspondence with the upper permanent magnets, the upper permanent magnets and the lower permanent magnets are in attractive action, copper plates are provided between the upper permanent magnets and the lower permanent magnets and on the ball screw, the ball screw passes through the middle parts of the upper support plate and the lower support plate and is slidably connected to the upper support plate and the lower support plate, a connecting rod is provided on the right side of the top plate, a push rod is vertically provided at the other end of the connecting rod, a damping device is connected to the push rod, the damping device is fixedly connected to the right support plate on the right side, the damping device comprises an upper damping device and a lower damping device, the upper damping device and the lower damping device are provided in mirror image structure, the upper damping device comprises a sliding groove, a left piston and a right piston, two left metal springs are provided between the left piston and the sliding groove wall in the sliding groove, two right metal springs are provided between the right piston and the sliding groove wall in the sliding groove, a groove is provided at the bottom of the sliding groove, a sliding block is provided in the groove, a roller is provided on the sliding block through a roller shaft, the top and bottom of the push rod are respectively in contact with the sliding blocks of the upper damping device and the lower damping device.

2. The ultra-low frequency vibration isolation device based on eddy current damping according to claim 1, characterized in that, The rigidity adjusting mechanism comprises a metal spring, a guide rod sleeved in the lower inner side of the metal spring, an adjusting nut connected to the lower part of the guide rod, a screw rod bolted at the bottom of the adjusting nut, a locking nut further installed on the screw rod, the guide rod being in a hollow structure, and the screw rod being respectively installed at the top of the left supporting plate and the supporting column.

3. The ultra-low frequency vibration isolation device based on eddy current damping according to claim 1, characterized in that, The left piston and the right piston are both in a trapezoidal structure, so that the static force balance of the roller is achieved when the roller is in the initial position between the left piston and the right piston.

4. The ultra-low frequency vibration isolation device based on eddy current damping according to claim 1, characterized in that, The upper supporting plate and the lower supporting plate are both made of iron plates.

5. The ultra-low frequency vibration isolation device based on eddy current damping according to claim 1, characterized in that, The ball screw rod passes through the middle of the copper plate and is fixedly connected with the copper plate.

6. The ultra-low frequency vibration isolation device based on eddy current damping according to claim 1, characterized in that, The ball screw rod and the cross beam are connected through upper bearings.

7. The ultra-low frequency vibration isolation device based on eddy current damping according to claim 1, characterized in that, The ball screw rod and the base are connected through lower bearings.

8. The ultra-low frequency vibration isolation device based on eddy current damping according to claim 1, characterized in that, The groove is provided with baffle plates at both ends.

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