A cylinder device and a semiconductor device

Abstract

This invention provides a cylinder device and a semiconductor apparatus, relating to the field of semiconductor equipment technology. The cylinder device includes a first fixing member, a second fixing member, a cylinder assembly, and an adjusting component. Both the first and second fixing members are used for connection to an external frame. One end of the cylinder assembly is connected to the first fixing member via the adjusting component, and the other end is connected to the second fixing member. The adjusting component adjusts the distance between the cylinder assembly and the external frame to achieve a preset distance, thereby reducing assembly and processing errors and improving the accuracy and assembly efficiency of the cylinder device. Furthermore, the adjusting component can also adjust the flatness of the cylinder assembly to improve the operational stability of the cylinder assembly, thereby improving the control performance of the cylinder device.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and more specifically, to a cylinder device and a semiconductor apparatus. Background Technology

[0002] Pistons are used in semiconductor equipment such as resist strippers and etching machines. Due to the precision and stability requirements of semiconductor equipment, the requirements for cylinders are also quite stringent, especially regarding the stability of their position. Currently, in practical applications, because the positional stability requirements for cylinders are extremely high, they are usually directly fixed to the machine tool or related structural components with bolts. However, after installation, it is difficult to adjust the cylinder position. This places high demands on the machining and assembly of the cylinder fixing components, which to some extent affects assembly efficiency and increases manufacturing costs. Summary of the Invention

[0003] The purpose of this invention is to provide a cylinder device and a semiconductor device that can reduce device and manufacturing errors by adjusting the cylinder assembly.

[0004] The embodiments of the present invention can be implemented as follows:

[0005] In a first aspect, the present invention provides a cylinder device, including a first fixing member, a second fixing member, a cylinder assembly, and an adjustment assembly;

[0006] Both the first fastener and the second fastener are used to connect to the external frame;

[0007] One end of the cylinder assembly is connected to the first fixing member via an adjustment component, and the other end is connected to the second fixing member. The adjustment component is used to adjust the distance between the cylinder assembly and the outer frame.

[0008] In an optional embodiment, the adjusting component includes a first fastener and a first elastic member. One end of the cylinder assembly is connected to the first fixing member via the first fastener, and the other end is connected to the second fixing member. The first elastic member is located between the first fixing member and the cylinder assembly. The first fastener is used to adjust the distance between the first fixing member and the cylinder assembly.

[0009] In an optional embodiment, the cylinder assembly includes a cylinder and a first connecting member, one side of one end of the cylinder is connected to the first connecting member, the first fixing member is connected to the first connecting member through the first fastener, and the first elastic member is disposed between the first fixing member and the first connecting member.

[0010] In an optional embodiment, the cylinder assembly further includes a second connector, which is connected to the end of the cylinder away from the first connector, and the second connector is spaced apart from the second fixing member.

[0011] In an optional embodiment, the first connector is parallel to the driving direction of the cylinder, and the second connector is perpendicular to the driving direction of the cylinder.

[0012] In an optional embodiment, the cylinder device further includes a positioning ball, the second connector is provided with a first groove, the second fixing member is provided with a second groove, the first groove and the second groove are arranged opposite to each other and both are adapted to the positioning ball, and the positioning ball is partially accommodated in the first groove and the second groove so that the second connector can rotate relative to the second fixing member.

[0013] In an optional embodiment, there are multiple first grooves and multiple second grooves, and the multiple first grooves and multiple second grooves are arranged in a straight line.

[0014] In an optional embodiment, the cylinder device further includes a connecting assembly, which includes a second fastener and a second elastic member. The second connecting member is connected to the second fixing member via the second fastener, and the second elastic member is sleeved outside the second fastener and located between the second connecting member and the second fastener.

[0015] In an optional embodiment, the number of adjustment components includes two, with the two adjustment components located on both sides of the cylinder assembly.

[0016] In a second aspect, the present invention provides a semiconductor device including a cylinder device as described in any of the foregoing embodiments.

[0017] The beneficial effects of the cylinder device and semiconductor equipment provided in the embodiments of the present invention include: adjusting the distance between the cylinder assembly and the outer frame by adjusting the component so that the distance between the cylinder assembly and the outer frame reaches a preset distance, thereby reducing assembly and processing errors and improving the accuracy and assembly efficiency of the cylinder device; in addition, the flatness of the cylinder assembly can also be adjusted by adjusting the component to improve the stability of the cylinder assembly operation, thereby improving the control performance of the cylinder device. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 A first-view structural diagram of the cylinder device provided in an embodiment of the present invention. Figure 1 ;

[0020] Figure 2 A first-view structural diagram of the cylinder device provided in an embodiment of the present invention. Figure 2 ;

[0021] Figure 3 This is a second-view structural schematic diagram of the cylinder device provided in an embodiment of the present invention;

[0022] Figure 4 This is a partial structural cross-sectional view of the cylinder device provided in an embodiment of the present invention;

[0023] Figure 5 This is a third-view structural diagram of the cylinder device provided in an embodiment of the present invention.

[0024] Icons: 10-Cylinder assembly; 100-First fixing member; 200-Second fixing member; 210-Second groove; 300-Adjusting component; 310-First fastener; 320-First elastic element; 400-Cylinder assembly; 410-Cylinder; 420-First connector; 430-Second connector; 431-First groove; 440-First end plate; 450-Second end plate; 460-Slider; 500-Positioning ball; 600-Connecting component; 610-Second fastener; 620-Second elastic element. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0026] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0027] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0028] In the description of this invention, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of this invention is usually placed, they are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0029] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0030] It should be noted that, where there is no conflict, the features in the embodiments of the present invention can be combined with each other.

[0031] This invention provides a semiconductor device for use in the semiconductor field. The semiconductor device includes a cylinder assembly, both of which are typically placed horizontally. The cylinder assembly has an adjustment function, allowing for flatness adjustment and eliminating warping and assembly errors during processing and assembly. This satisfies assembly requirements, improves assembly efficiency, and reduces manufacturing costs.

[0032] It is understood that semiconductor equipment can be, but is not limited to, adhesive equipment, etching equipment, CVD equipment, and coating equipment, etc., without specific limitations.

[0033] In addition, the cylinder device can also be used to adjust the sealing door. When used to adjust the sealing door, the height of the sealing door can be adjusted by 60mm.

[0034] Please see Figures 1 to 3 The cylinder device 10 provided in this embodiment of the invention includes a first fixing member 100, a second fixing member 200, a cylinder assembly 400, an adjusting assembly 300, a positioning ball 500, and a connecting assembly 600.

[0035] Both the first fixing member 100 and the second fixing member 200 are used to connect to the outer frame (not shown). One end of the cylinder assembly 400 is connected to the first fixing member 100 via an adjusting component 300, and the other end is connected to the second fixing member 200. The adjusting component 300 is used to adjust the distance between the cylinder assembly 400 and the outer frame. A positioning ball 500 is disposed between the second fixing member 200 and the cylinder assembly 400. The second fixing member 200 and the cylinder assembly 400 are connected via a connecting component 600.

[0036] In this embodiment, both the cylinder assembly 400 and the first fixing member 100 are connected to the adjustment assembly 300. The first fixing member 100 is connected to the outer frame. The distance between the cylinder assembly 400 and the first fixing member 100 is adjusted by the adjustment assembly 300, that is, the distance between the cylinder assembly 400 and the outer frame is adjusted so that the distance between the cylinder assembly 400 and the outer frame reaches a preset distance, thereby reducing assembly and processing errors and improving the accuracy and assembly efficiency of the cylinder device 10. In addition, the flatness of the cylinder assembly 400 can also be adjusted by the adjustment assembly 300 to improve the stability of the cylinder assembly 400 operation, thereby facilitating the operation of the cylinder device 10.

[0037] Furthermore, the adjusting component 300 includes a first fastener 310 and a first elastic member 320. One end of the cylinder assembly 400 is connected to the first fixing member 100 via the first fastener 310, and the other end is connected to the second fixing member 200. The first elastic member 320 is located between the first fixing member 100 and the cylinder assembly 400. The first fastener 310 is used to adjust the distance between the first fixing member 100 and the cylinder assembly 400.

[0038] In this embodiment, the first fastener 310 passes through the first fixing member 100 and is threaded into the cylinder assembly 400. The distance between the first fixing member 100 and the cylinder assembly 400 is adjusted by tightening the first fastener 310. The first elastic member 320 is sleeved on the first fastener 310 to provide support between the first fixing member 100 and the cylinder assembly 400, so that the first fixing member 100 and the cylinder assembly 400 maintain a preset interval distance under the action of the first fastener 310 and the first elastic member 320. The distance between the first fixing member 100 and the cylinder assembly 400 can be increased or decreased by tightening the first fastener 310, thereby reducing assembly and processing errors and preventing the structural components of the external frame from intruding into the movement space of the cylinder assembly 400.

[0039] Specifically, the first fastener 310 is a screw, and the first elastic element 320 is a spring.

[0040] Furthermore, the number of adjustment components 300 includes two, with the two adjustment components 300 located on both sides of the cylinder assembly 400.

[0041] In this embodiment, by adjusting the adjusting component 300 on any side of the cylinder assembly 400 or simultaneously adjusting the adjusting components 300 on both sides of the cylinder assembly 400, a certain distance is maintained between the cylinder assembly 400 and the external frame, thereby improving the operational stability of the cylinder assembly 400.

[0042] Furthermore, the cylinder assembly 400 includes a cylinder 410, a first connector 420, and a second connector 430. One side of one end of the cylinder 410 is connected to the first connector 420, and the second connector 430 is connected to the end of the cylinder 410 away from the first connector 420.

[0043] In this embodiment, the cylinder assembly 400 further includes a first end plate 440, a second end plate 450, and a slider 460. The two ends of the cylinder 410 are connected to the first end plate 440 and the second end plate 450 respectively. A first connecting member 420 is connected to the first end plate 440 by screws, and a second connecting member 430 is connected to the second end plate 450 by screws. The slider 460 can move under the drive of the cylinder 410.

[0044] Specifically, the first connecting member 420 is disposed parallel to the first fixing member 100, and the first fixing member 100 is connected to the first connecting member 420 through the first fastener 310. The first elastic member 320 is disposed between the first fixing member 100 and the first connecting member 420. The second connecting member 430 is disposed parallel to the second fixing member 200.

[0045] In practical applications, the cylinder assembly 10 is usually placed horizontally. The installation flatness of the slider 460 of the cylinder assembly 400 can be adjusted by adjusting the component 300. Of course, other movable parts on the cylinder assembly 400 can also be adjusted appropriately to ensure the normal operation of the cylinder assembly 400.

[0046] Furthermore, the first connector 420 is parallel to the driving direction of the cylinder 410, and the second connector 430 is perpendicular to the driving direction of the cylinder 410.

[0047] In this embodiment, the first fastener 310 is vertically connected to the first connector 420, so that the first connector 420 can drive the cylinder assembly 400 to rotate in a driving direction perpendicular to the cylinder 410 under the action of the first fastener 310, thereby facilitating the assembly personnel to adjust the cylinder assembly 400 and control the entire movement process.

[0048] Please refer to the following: Figures 1 to 4The second connector 430 and the second fixing member 200 are spaced apart. The second connector 430 is provided with a first groove 431, and the second fixing member 200 is provided with a second groove 210. The first groove 431 and the second groove 210 are arranged opposite to each other and are both adapted to the positioning ball 500. The positioning ball 500 is partially accommodated in the first groove 431 and the second groove 210, so that the second connector 430 can rotate relative to the second fixing member 200.

[0049] In this embodiment, both the first groove 431 and the second groove 210 are spherical arc-shaped, so that the positioning ball 500 can be partially accommodated in the first groove 431 and the second groove 210, thereby facilitating the positioning of the second connector 430 and the second fixing member 200 by means of the positioning ball 500.

[0050] In addition, since the second connector 430 and the second fixing member 200 are spaced apart, and the positioning ball 500 is located between the second connector 430 and the second fixing member 200, the second connector 430 can rotate around the positioning ball 500 to a certain extent. This allows the cylinder assembly 400 to rotate relative to the second fixing member 200 with the positioning ball 500 as the rotation point under the adjustment action of the adjustment component 300. This better adjusts the distance between the cylinder assembly 400 and the outer frame, reducing assembly and manufacturing errors.

[0051] Furthermore, there are multiple first grooves 431 and multiple second grooves 210, and the multiple first grooves 431 and multiple second grooves 210 are arranged in a straight line.

[0052] In this embodiment, the plurality of first grooves 431 and the plurality of second grooves 210 are arranged in a straight line, so that the plurality of positioning balls 500 are arranged in a straight line, thereby facilitating the rotation of the cylinder assembly 400 along the positioning balls 500. Furthermore, the straight line containing the plurality of first grooves 431 or the plurality of second grooves 210 is parallel to the straight line containing the two adjustment components.

[0053] Specifically, there are two of each of the first groove 431, the second groove 210, and the positioning ball 500. The horizontal projection of one of the first grooves 431 or the second groove 210 is waist-shaped, thereby providing a margin of movement for one of the positioning balls 500 and preventing the positioning ball 500 from over-fitting with the first groove 431 and the second groove 210.

[0054] Furthermore, the connecting component 600 includes a second fastener 610 and a second elastic member 620. The second connecting member 430 is connected to the second fixing member 200 through the second fastener 610. The second elastic member 620 is sleeved outside the second fastener 610 and located between the second connecting member 430 and the second fastener 610.

[0055] In this embodiment, the cylinder assembly 400 is connected to the second fixing member 200 via the second connector 430, and the second connector 430 and the second fixing member 200 are connected via the connecting assembly 600, thereby improving the connection stability between the second connector 430 and the second fixing member 200. By sleeved the second elastic member 620 onto the second fastener 610 and positioning it between one end of the second fastener 610 and the second fixing member 200, the connecting assembly 600 can be effectively connected while the adjusting assembly 300 adjusts the cylinder assembly 400. It is understood that the second fastener 610 can move within a small range between the second connector 430 and the second fixing member 200.

[0056] Specifically, the second fastener 610 is a screw, and the second elastic element 620 is a spring.

[0057] It should also be noted that, as Figure 5 As shown, the cylinder assembly 10 is usually placed horizontally, where the dashed line A is the horizontal line.

[0058] In practical applications, both the first fixing member 100 and the second fixing member 200 are connected to the external frame. During the adjustment process of the adjusting component 300, both the first fixing member 100 and the second fixing member 200 remain fixed. All components of the cylinder device 10, except for the first fixing member 100 and the second fixing member 200, rotate relative to the first fixing member 100 and the second fixing member 200 via the positioning ball 500. That is, after adjustment, the adjusting component 300, the cylinder assembly 400, the positioning ball 500, and the connecting component 600 are all set at an angle to the horizontal line.

[0059] Specifically, the components of the cylinder assembly 10, excluding the first fixing member 100 and the second fixing member 200, rotate clockwise by 0.3° or counterclockwise by 3° with the positioning ball 500 as the pivot point. If counterclockwise is taken as the positive direction, the included angle range is -0.3° to 3°.

[0060] In summary, the embodiments of the present invention provide a cylinder device and a semiconductor device. By adjusting the distance between the cylinder assembly 400 and the first fixed member 100 using the adjusting component 300, the distance between the cylinder assembly 400 and the outer frame reaches a preset distance, thereby reducing assembly and processing errors and improving the accuracy and assembly efficiency of the cylinder device 10. Furthermore, the flatness of the cylinder assembly 400 can be adjusted using the adjusting component 300 to improve the stability of the cylinder assembly 400's operation, thus facilitating the operation of the cylinder device 10. By positioning the ball 500 between the second connecting member 430 and the second fixed member 200, the cylinder assembly 400, under the adjustment of the adjusting component 300, rotates relative to the second fixed member 200 around the positioning ball 500 as a rotation point, thereby better adjusting the distance between the cylinder assembly 400 and the outer frame and reducing assembly and manufacturing errors.

[0061] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A cylinder device characterized by comprising: The first fixing part (100), the second fixing part (200), the cylinder assembly (400) and the adjusting assembly (300) are included. The first fixing part (100) and the second fixing part (200) are used for connecting with an external frame. One end of the cylinder assembly (400) is connected with the first fixing part (100) through the adjusting assembly (300), and the other end is connected with the second fixing part (200), and the adjusting assembly (300) is used for adjusting the distance between the cylinder assembly (400) and the external frame. The adjusting assembly (300) includes a first fastener (310) and a first elastic member (320), one end of the cylinder assembly (400) is connected with the first fixing part (100) through the first fastener (310), and the other end is connected with the second fixing part (200), and the first elastic member (320) is located between the first fixing part (100) and the cylinder assembly (400), and the first fastener (310) is used for adjusting the distance between the first fixing part (100) and the cylinder assembly (400). The cylinder assembly (400) includes a cylinder (410) and a first connecting piece (420), one side of one end of the cylinder (410) is connected with the first connecting piece (420), the first fixing part (100) is connected with the first connecting piece (420) through the first fastener (310), and the first elastic member (320) is arranged between the first fixing part (100) and the first connecting piece (420). The cylinder assembly (400) further includes a second connecting piece (430), the second connecting piece (430) is connected with one end of the cylinder (410) away from the first connecting piece (420), and the second connecting piece (430) is arranged at intervals with the second fixing part (200). The cylinder device further includes a positioning ball (500), the second connecting piece (430) is provided with a first groove (431), the second fixing part (200) is provided with a second groove (210), the first groove (431) and the second groove (210) are oppositely arranged and are matched with the positioning ball (500), and the positioning ball (500) is partially accommodated in the first groove (431) and the second groove (210), so that the second connecting piece (430) can rotate relative to the second fixing part (200).

2. The cylinder device according to claim 1, characterized in that The first connecting piece (420) is parallel to the driving direction of the cylinder (410), and the second connecting piece (430) is perpendicular to the driving direction of the cylinder (410).

3. The cylinder device according to claim 1, characterized in that The number of the first grooves (431) and the second grooves (210) is multiple, and the multiple first grooves (431) and the multiple second grooves (210) are arranged in a straight line.

4. The cylinder device according to claim 1, characterized in that The air cylinder device further comprises a connecting assembly (600), the connecting assembly (600) comprises a second fastener (610) and a second elastic member (620), the second connecting member (430) is connected with the second fixing member (200) through the second fastener (610), and the second elastic member (620) is sleeved outside the second fastener (610) and located between the second connecting member (430) and the second fastener (610).

5. The cylinder device according to claim 1, characterized in that The number of the adjusting assemblies (300) is two, and the two adjusting assemblies (300) are located on two sides of the air cylinder assembly (400).

6. A semiconductor device, characterized by comprising: An air cylinder device comprising the air cylinder device according to any one of claims 1-5.

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